Graphite boat sticking point assembly performance detection method suitable for different temperature working conditions

Abstract

The invention discloses a graphite boat sticking point assembly performance detection method suitable for different temperature working conditions, which comprises the following steps: 1, according to different input working environment temperature parameters in a PECVD (Plasma Enhanced Chemical Vapor Deposition) cavity, obtaining interference magnitude requirement indexes through a finite element numerical simulation method in combination with the working performance and quality of sticking points, interference magnitude selection schemes suitable for different temperature working conditions are obtained; secondly, nonlinear fitting is carried out, and a press fitting force nonlinear regression equation suitable for assembly of clamping points under different temperature working conditions is obtained; step 3, inputting a temperature parameter, and then acquiring the value of the actual press-fitting force of the press-fitting boat piece sample through a press-fitting force detection device, and judging whether the value of the actual press-fitting force of the press-fitting boat piece sample is within the press-fitting force range calculated by the press-fitting force nonlinear regression equation; fourthly, after the whole boat piece is assembled, weighted average is conducted on data of different press-fitting boat piece clamping points, and whether a press-fitting boat piece sample meets the evaluation standard or not is judged.

Description

Technical Field

[0001] The invention relates to the technical field of graphite boat clamping point press-fitting, and in particular to a graphite boat clamping point assembly performance detection method adapting to different temperature working conditions. Background Art

[0002] Graphite boat is a key carrier for tubular PECVD equipment to realize surface coating in the process of silicon wafer preparation. With the increase of production batch and production efficiency of solar silicon wafers, the reaction temperature in the PECVD chamber and the capacity of graphite boat are constantly increasing. Problems such as damage to the graphite boat supporting silicon wafers and shortened boat life in high temperature environment lead to coating defects and even silicon wafer shedding. Effectively reducing the workload and cost of maintenance at the stuck points and improving the stability of coating quality have become one of the key technical issues to be solved in the process of silicon wafer production.

[0003] Since interference fit has the technical characteristics of good centering accuracy, simple structure, high load-bearing capacity, and no need for any fasteners, graphite boat clamping points are generally assembled using interference fit to increase the stability and rigidity of the silicon wafer support.

[0004] However, the preload force of the card point assembly has an important influence on the working performance of the graphite boat under different temperature conditions. If the assembly interference is too small, the preload force will be reduced, the stability of the silicon wafer support will be insufficient, and even the silicon wafer loading will be affected; if the assembly interference is too large, the residual stress will increase, affecting the service life. Summary of the invention

[0005] In order to overcome the above-mentioned defects of the prior art, the object of the present invention is to provide a method for detecting the assembly performance of a graphite boat clamping point that is adaptable to different temperature conditions.

[0006] The calculation formula of the pressing force at the stuck point under different temperature conditions is constructed through numerical simulation method. This model is convenient for calculating the required value of the pressing force at the stuck point under different temperature conditions.

[0007] The microprocessor of the clamping point press-fitting force detection device calculates and processes the collected force signal to determine whether the clamping point of the press-fitting meets the interference requirements under different temperature conditions.

[0008] By evaluating the assembly performance of the entire boat's card points to adapt to different working conditions, the quality of graphite boat products and the stability of their service performance can be improved during the production process.

[0009] A graphite boat clamping point assembly performance detection method adapted to different temperature conditions, comprising:

[0010] In the first step, according to the different working environment temperature parameters of the PECVD chamber, the finite element numerical simulation method is used to simulate the card point press-fitting of the entire boat.

[0011] Combined with the working performance and quality of the sticking point, the interference fit requirement index is obtained, and the interference fit selection scheme suitable for different temperature conditions is obtained;

[0012] In the second step, non-linear fitting is performed on the mapping data corresponding to the different temperature conditions - interference fit - press-fitting force curves, and a non-linear regression equation of the press-fitting force for the sticking point during assembly under different temperature conditions is obtained;

[0013] The specific calculation method is to use the non-linear regression equation shown in Equation 1 below:

[0014] F(T) = k1 + k2T - k3T 2

[0015] Equation 1;

[0016] In Equation 1, T is the ambient temperature in the PECVD chamber;

[0017] F is the maximum press-fitting force during the press-fitting of the sticking point,

[0018] The independent variable T and the dependent variable F have been normalized, and the numerical features have been scaled to the range of [0 - 1];

[0019] k1 or k2 or k3 is a constant coefficient;

[0020] In the third step, the temperature parameter is input, and then the value of the actual press-fitting force of the sticking point of the actual press-fitting boat piece sample collected by the sticking point press-fitting force detection device is obtained,

[0021] It is judged whether the value of the actual press-fitting force of the sticking point of the actual press-fitting boat piece sample is within the press-fitting force range calculated by the press-fitting force non-linear regression equation;

[0022] For the data that can match the press-fitting force range, it is judged as within the selected interference fit interval corresponding to the ambient temperature condition in the PECVD chamber;

[0023] For the data that cannot match the press-fitting force range, it is judged as not within the selected interference fit interval corresponding to the ambient temperature condition in the PECVD chamber, and the shaft part number is marked;

[0024] In the fourth step, after the assembly of the entire boat piece is completed, the data of the sticking points of different press-fitting boat pieces are weighted and averaged to judge whether this press-fitting boat piece sample meets the evaluation criteria.

[0025] In a preferred embodiment of the present invention, the interference fit selection scheme is the temperature condition - interference fit - press-fitting force curve obtained under the condition of simulating the interference fit of the sticking point with an interference fit of 5 - 25 μm.

[0026] In a preferred embodiment of the present invention, the ambient temperature in the PECVD chamber is 400 - 600 °C.

[0027] In a preferred embodiment of the present invention, k1 ∈ [0, 0.3].

[0028] In a preferred embodiment of the present invention, k2 ∈ [0.2, 0.4].

[0029] In a preferred embodiment of the present invention, k3 ∈ [0.1, 0.3].

[0030] In a preferred embodiment of the present invention, the collection by the clamping point press - fitting force detection device is to use a micro - processor for data collection, compare the collected force curve with the interference amount, so as to obtain the interference amount range of the actual press - fitting of the boat piece sample.

[0031] In a preferred embodiment of the present invention, the data judgment in the third step is based on the non - linear regression equation of the press - fitting force for assembly at the clamping point under different temperature conditions constructed in the second step.

[0032] Input the temperature parameter, and judge whether the press - fitting force collected by the clamping point press - fitting force detection device is within the press - fitting force range calculated by the equation to determine whether it is within the selected interference amount interval corresponding to the ambient temperature condition of the PECVD chamber.

[0033] In a preferred embodiment of the present invention, the collection by the clamping point press - fitting force detection device is to install a force sensor on the clamping point press - fitting machine through a connecting mechanism to obtain the reaction force of the clamping point, and at the same time use a micro - processor for data collection. Through serial communication, the collected data is transmitted to the PC side. The workpiece to be detected includes a clamping point and a boat piece, and the clamping point is assembled onto the boat piece by a clamping point machine.

[0034] The force detection device calculates and processes the collected press - fitting force signal through a micro - processor.

[0035] Judge whether the press - fitting force of this press - fitting meets the non - linear regression equation according to the input working environment temperature in the PECVD chamber, and give a light prompt according to the result.

[0036] In a preferred embodiment of the present invention, the connecting mechanism is used to connect the clamping point machine and the module for pressure detection and data processing. The upper end cover of the connecting mechanism is connected to the press - fitting rod of the press - fitting machine, and the force - sensitive resistor is embedded in the connecting mechanism; the lower end cover of the connecting mechanism is matched with the lower pressing rod.

[0037] So that the pressure of the press - fitting machine acts on the connecting mechanism and transmits the acting force to the clamping point through the lower pressing rod to realize press - fitting; the force - sensitive resistor in the connecting mechanism can sense the magnitude of the press - fitting force.

[0038] In a preferred embodiment of the present invention, the specific method of weighted averaging the data of different press - fitting boat piece clamping points is as follows:

[0039] After the actual press-fitting of the boat piece samples is completed, after calculating the assembly performance of the clamping points A, B, and C by weighting according to the clamping point press-fitting conditions recorded by the computer, the press-fitting performance of the boat piece is calculated according to the clamping point assembly performance calculation formula 2 of the whole boat:

[0040]

[0041] Formula 2;

[0042] In the said Formula 2, φ1, φ2, and φ3 are respectively the weighting coefficients of the assembly performance of the clamping points A, B, and C, and the sum of the three is 1;

[0043] n1 or n2 or n3 are respectively the numbers of the clamping points A, B, and C that are not suitable for assembly under different temperature conditions, and n is the number of clamping points on the whole press-fitted boat piece sample;

[0044] The magnitude of the acting force for three-point positioning is:

[0045] The clamping point B is greater than the clamping point A, and the clamping point A is approximately equal to the clamping point C;

[0046] When the result of Formula 2 is not more than 10%, it is judged that the assembly performance of the press-fitted boat piece sample is excellent;

[0047] When the result of Formula 2 is not more than 30%, it is judged that the assembly performance of the press-fitted boat piece sample is qualified;

[0048] When the result of Formula 2 exceeds 30%, it is judged that the assembly performance of the press-fitted boat piece sample is unqualified.

[0049] In a preferred embodiment of the present invention, φ1 is 0.5, φ2 is 0.25, and φ3 is 0.25.

[0050] The beneficial effects of the present invention are as follows:

[0051] By evaluating the assembly performance of the clamping points of the whole boat to adapt to different working conditions, the quality of the graphite boat product and the stability of its service performance can be improved during the production process, which is beneficial to extending the service life of the graphite boat and its clamping points under different temperature conditions. Reduce the production cost of solar silicon wafer coating. Description of the Drawings

[0052] Figure 1 It is a press-fitting schematic diagram of the whole boat piece when it is a graphite boat clamping point.

[0053] Figure 2 It is the maximum reaction force curve of the clamping point under different interference amounts (two types of clamping points: chamfer and fillet).

[0054] Figure 3 It is the interference amount requirement index curve of the clamping point under different environmental temperatures

[0055] Figure 4 Schematic diagram of the clamping point connection mechanism provided on the clamping point press-fitting force detection device.

[0056] Figure 5 Flow chart of the clamping point press-fitting force detection.

[0057] Figure 6 Circuit wiring diagram of the clamping point press-fitting force detection device.

[0058] Figure 7 Force analysis diagram of the clamping point during the positioning of the silicon wafer.

[0059] Figure 8 Flow chart of the present invention. Specific implementation manners

[0060] To make the objectives, technical solutions and advantages of the present invention clearer and more explicit, the present invention will be further described in detail below through the accompanying drawings and embodiments. However, it should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the scope of the present invention. In addition, in the following structures, the descriptions of well-known structures and technologies are omitted to avoid unnecessarily confusing the concepts of the present invention.

[0061] In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", "top / bottom end", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present invention and simplifying the description. Instead of indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, it should not be construed as a limitation of the present invention. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0062] Focusing on Figure 8 , the present invention provides a method for detecting the clamping point assembly performance of a graphite boat adapted to different temperature conditions, including:

[0063] In the first step, according to the input different PECVD chamber working environment temperature parameters, the PECVD chamber working environment temperature parameter range is 400 - 600 degrees Celsius.

[0064] Simulate the clamping point press-fitting of the entire boat sheet by means of finite element numerical simulation, as Figure 1 shown.

[0065] Figure 1 In

[0066] Specific finite element numerical simulation is to fix and constrain the lower bottom surface of the boat piece, set a downward displacement condition for the clamping point until the clamping point is completely pressed into the hole of the boat piece, and the press-fitting model is as attached Figure 1 .

[0067] Set the friction coefficient to 0.15, the elastic modulus to 10.1 GPa, the Poisson's ratio to 0.28, the yield strength to 68.41, and set the press-fitting temperature to room temperature 20 °C.

[0068] By means of numerical simulation, simulate the press-fitting of the clamping point with different interference amounts under normal temperature environment to obtain the reaction force curve under different interference amounts as Figure 2 shown.

[0069] By means of numerical simulation, simulate different environmental temperatures and consider the working performance and quality of the clamping point to obtain the interference amount requirement index curve as Figure 3 shown.

[0070] Refine the mesh at the mating hole and at the mating part of the clamping point. Finally, the number of mesh elements is not less than 90,000, and the number of nodes is not less than 310,000.

[0071] And combine the working performance and quality of the clamping point to obtain the interference amount requirement index, and obtain the interference amount selection scheme suitable for different temperature working conditions.

[0072] The interference amount selection scheme is the press-fitting force curve obtained by simulating the assembly of the clamping point with an interference amount of 5 - 25 μm.

[0073] Set different temperature working conditions - interference amount - press-fitting force curves according to the chamfered clamping point or the rounded clamping point.

[0074] Second step, perform non-linear fitting on the mapping data corresponding to different temperature working conditions - interference amount - press-fitting force curves, and obtain the non-linear regression equation of the press-fitting force when the clamping point is assembled under different temperature working conditions;

[0075] The specific calculation method is to use the non-linear regression equation shown in the following formula 1:

[0076] F(T) = k1 + k2T - k3T 2

[0077] Formula 1;

[0078] In the formula 1, T is the environmental temperature in the PECVD chamber;

[0079] F is the maximum press-fitting force when the clamping point is press-fitted,

[0080] The independent variable T and the dependent variable F have been normalized, and the numerical characteristics have been scaled to the range of [0 - 1];

[0081] k1, k2, or k3 is a constant coefficient. Usually, k1 ∈ [0, 0.3], k2 ∈ [0.2, 0.4], or k3 ∈ [0.1, 0.3] is selected.

[0082] In the third step, input the temperature parameter, and then obtain the value of the actual press-fitting force of the press-fitted boat blade sample through the clamping point press-fitting force detection device.

[0083] Specifically, the clamping point press-fitting force detection device collects data using a microprocessor, compares the collected force curve with the interference amount, and thus obtains the interference amount range of the actual press-fitting of the press-fitted boat blade sample.

[0084] Combined with Figures 4 - 6 It can be known that the clamping point press-fitting force detection device collects data by installing a force sensor on the clamping point press-fitting machine through a connecting mechanism to obtain the clamping point reaction force, and at the same time uses a microprocessor for data collection. Through serial communication, the collected data is transmitted to the PC side. The workpiece to be detected includes clamping point 1 and boat blade 2, and clamping point 1 is assembled to boat blade 2 through a clamping point machine.

[0085] The force detection device calculates and processes the collected press-fitting force signal through the microprocessor 8.

[0086] Judge whether the press-fitting force of this press-fitting meets the non-linear regression equation according to the input working environment temperature in the PECVD chamber, and give a light prompt according to the result, specifically as Figure 5 .

[0087] The connecting mechanism is used to connect the clamping point machine and the module for pressure detection and data processing. The upper end cover 4 of the connecting mechanism is connected to the press-fitting rod 10 of the press-fitting machine, and the force-sensitive resistor 5 is embedded in the connecting mechanism; the lower end cover 6 of the connecting mechanism cooperates with the lower pressing rod 7.

[0088] So that the pressure of the press-fitting machine acts on the connecting mechanism and transmits the acting force to the clamping point 1 through the lower pressing rod 7 to achieve press-fitting; the force-sensitive resistor 5 used as a force sensor in the connecting mechanism can sense the magnitude of the press-fitting force.

[0089] Judge whether the value of the actual press-fitting force of the press-fitted boat blade sample is within the press-fitting force range calculated by the non-linear regression equation of the press-fitting force. Here, the data judgment is based on the non-linear regression equation of the press-fitting force for clamping point assembly under different temperature conditions constructed in the second step.

[0090] Input the temperature parameter, and judge whether the press-fitting force collected by the clamping point press-fitting force detection device is within the press-fitting force range calculated by the equation to judge whether it is within the selected interference amount interval corresponding to the environmental temperature condition in the PECVD chamber.

[0091] Data that can match the press-fitting force range is judged to be within the selected interference fit range corresponding to the ambient temperature condition in the PECVD chamber;

[0092] Data that cannot match the press-fitting force range is judged not to be within the selected interference fit range corresponding to the ambient temperature condition in the PECVD chamber, and the shaft part number is marked.

[0093] In the fourth step, after the entire boat assembly is completed, the data of different press-fitting boat card points are weighted and averaged to determine whether this press-fitting boat sample meets the evaluation criteria.

[0094] The specific method of weighting and averaging the data of different press-fitting boat card points is as follows:

[0095] After the actual press-fitting of the boat sample is completed, according to the press-fitting conditions of the card points recorded by the computer, the assembly performance of card points A, B, and C is weighted and calculated, and then the boat press-fitting performance is calculated according to the formula 2 for the card point assembly performance of the whole boat:

[0096]

[0097] In formula 2, φ1, φ2, and φ3 are the weighting coefficients of the assembly performance of card points A, B, and C respectively, and the sum of the three is 1;

[0098] n1 or n2 or n3 are the numbers of card points A, B, and C that are not suitable for assembly under different temperature conditions respectively, and n is the number of card points on the whole press-fitting boat sample;

[0099] When the silicon wafer is coated, it is directly positioned in contact by three card points A (left), B (bottom), and C (right). The magnitudes of the acting forces of the three-point positioning are:

[0100] The force of card point B is greater than that of card point A, and card point A is approximately equal to card point C. Specifically, as Figure 6 shown.

[0101] When the result of formula 2 is not more than 10%, it is judged that the assembly performance of the press-fitting boat sample is excellent;

[0102] When the result of formula 2 is not more than 30%, it is judged that the assembly performance of the press-fitting boat sample is qualified;

[0103] When the result of formula 2 exceeds 30%, it is judged that the assembly performance of the press-fitting boat sample is unqualified.

[0104] If the calculation of the boat assembly performance exceeds 40%, it is evaluated as unqualified, and rework is recommended.

[0105] In order to further improve the accuracy of the evaluation criteria, φ1 is 0.5, φ2 is 0.25, and φ3 is 0.25.

[0106] The advantages of the present invention are as follows:

[0107] (1) By establishing a matching equation for the press-fitting force of the clamping point under different temperature conditions and designing a corresponding detection device for the press-fitting force of the clamping point, the present invention can adapt to the changes in the production requirements of PECVD, detect and quantitatively evaluate the adaptability of the clamping point assembly performance, and reduce the subjectivity of the empirical estimation method for evaluating the clamping point assembly performance and the blindness of later maintenance.

[0108] (2) The present invention can cooperate with the clamping point assembly performance detection device of the above-mentioned invention to evaluate the assembly performance of the clamping points of the whole boat adapting to different working conditions. It can not only improve the product quality during the production process, but also enhance the adaptability of the final product to different temperature environment conditions, which is beneficial to reducing the production cost of solar silicon wafer coating.

[0109] The above shows and describes the basic principles, main features and advantages of the invention.

[0110] Those skilled in the art should understand that the present invention is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection of the present invention is defined by the appended claims and their equivalents.

Claims

1. A method for detecting the assembly performance of graphite boat clamping points adaptable to different temperature conditions, characterized in that, Including: First step, according to the input different PECVD chamber working environment temperature parameters, simulate the clamping press fitting of the entire boat slice by means of finite element numerical simulation, and obtain the interference amount requirement index in combination with the working performance and quality of the clamping point, and obtain the interference amount selection scheme suitable for different temperature conditions; Second step, perform non-linear fitting on the mapping data corresponding to different temperature conditions - interference amount - press fitting force curves, and obtain the non-linear regression equation of the press fitting force when assembling the clamping point under different temperature conditions; The specific calculation method is to use the non-linear regression equation shown in Formula 1 below: F(T) = k1 + k2T - k3T 2 Formula 1; In the said Formula 1, T is the environmental temperature in the PECVD chamber; F is the maximum press fitting force when press fitting the clamping point, The independent variable T and the dependent variable F have been normalized, and the numerical characteristics have been scaled to the range of [0 - 1]; k1 or k2 or k3 is a constant coefficient; Third step, input the temperature parameter, and then obtain the value of the actual press fitting force of the clamping point of the press fitted boat slice sample collected by the clamping point press fitting force detection device, judge whether the value of the actual press fitting force of the press fitted boat slice sample is within the press fitting force range calculated by the press fitting force non-linear regression equation; For the data that can match the press fitting force range, it is judged to be within the selected interference amount interval corresponding to the environmental temperature condition in the PECVD chamber; For the data that cannot match the press fitting force range, it is judged not to be within the selected interference amount interval corresponding to the environmental temperature condition in the PECVD chamber, and the axis part number is marked; Fourth step, after the entire boat slice assembly is completed, perform weighted averaging on the data of different press fitted boat slice clamping points, and judge whether this press fitted boat slice sample meets the evaluation criteria.

2. The method for detecting the assembly performance of the graphite boat clamping points adaptable to different temperature conditions according to claim 1, wherein The said interference amount selection scheme is the temperature condition - interference amount - press fitting force curve obtained under the condition of simulating the clamping point assembly with an interference amount of 5 - 25μm.

3. The method for detecting the assembly performance of the clamping points of the graphite boat adapted to different temperature conditions according to claim 1, characterized in that, The environmental temperature in the PECVD chamber is 400 - 600°C.

4. A method for detecting the assembly performance of graphite boat clamping points adapted to different temperature conditions according to claim 1, characterized in that, The said k1 ∈ [0, 0.3]. The said k2 ∈ [0.2, 0.4]. The said k3 ∈ [0.1, 0.3].

5. The method for detecting the assembly performance of the clamping points of a graphite boat adapted to different temperature conditions according to claim 1, characterized in that, The said collection by the clamping point press fitting force detection device is to use a microprocessor for data collection, compare the collected force curve with the interference amount, so as to obtain the interference amount range of the actual press fitted boat slice sample.

6. The method for detecting the assembly performance of the clamping points of a graphite boat adapted to different temperature conditions according to claim 5, wherein, The said collection by the clamping point press fitting force detection device is to install a force sensor on the clamping point press fitting machine through a connecting mechanism to obtain the reaction force of the clamping point, and at the same time use a microprocessor for data collection. Through serial communication, the collected data is transmitted to the PC side. The parts to be detected include the clamping point and the boat slice, and the clamping point is assembled to the boat slice through the clamping point machine; The force detection device calculates and processes the collected press fitting force signal through the microprocessor, judge whether the press fitting force of this press fitting meets the said non-linear regression equation according to the input PECVD chamber working environment temperature, and give a light prompt according to the result.

7. A method for detecting the assembly performance of the clamping points of a graphite boat adapted to different temperature conditions according to claim 6, characterized in that, The connecting mechanism is used to connect the card-pointing machine and the module for pressure detection and data processing. The upper end cover of the connecting mechanism is connected to the pressing rod of the press-fitting machine, and the force-sensitive resistor is embedded in the connecting mechanism; the lower end cover of the connecting mechanism cooperates with the lower pressing rod; so that the pressure of the press-fitting machine acts on the connecting mechanism and transmits the acting force to the card point through the lower pressing rod to achieve press-fitting; the force-sensitive resistor in the connecting mechanism can sense the magnitude of the press-fitting force.

8. The method for detecting the assembly performance of the graphite boat clamping points adaptable to different temperature conditions as described in claim 1, wherein, The data judgment in the third step is based on the non-linear regression equation of the press-fitting force during the assembly of the card points under different temperature conditions constructed in the second step, input the temperature parameter, and judge whether the press-fitting force collected by the card-point press-fitting force detection device is within the range of the press-fitting force calculated by the equation to judge whether it is within the selected interference fit interval corresponding to the environmental temperature condition in the PECVD chamber.

9. A method for detecting the assembly performance of graphite boat clamping points adapted to different temperature conditions as described in claim 1, characterized in that, The specific method of weighted averaging the data of different press-fitting boat piece card points is as follows: After the actual press-fitting boat piece sample is press-fitted, according to the card-point press-fitting situation recorded by the computer, the assembly performance of card points A, B, and C is weighted and calculated, and the press-fitting performance of the boat piece is calculated according to the formula 2 for the card-point assembly performance of the whole boat: In the formula 2, φ1, φ2, and φ3 are the weighted coefficients of the assembly performance of card points A, B, and C respectively, and the sum of the three is 1; n1 or n2 or n3 are the numbers of card points A, B, and C that are not suitable for assembly under different temperature conditions, and n is the number of card points on the entire press-fitting boat piece sample; The magnitude of the acting force for three-point positioning is: Card point B is greater than card point A, and card point A is approximately equal to card point C; When the result of formula 2 is not more than 10%, it is judged that the assembly performance of the press-fitting boat piece sample is excellent; When the result of formula 2 is not more than 30%, it is judged that the assembly performance of the press-fitting boat piece sample is qualified; When the result of formula 2 exceeds 30%, it is judged that the assembly performance of the press-fitting boat piece sample is unqualified.

10. A method for detecting the assembly performance of graphite boat card points adapted to different temperature conditions as described in claim 9, characterized in that φ1 is 0.5, φ2 is 0.25, and φ3 is 0.25.

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