Substrate processing method, processing head, and substrate processing apparatus

Abstract

The present invention relates to a substrate processing method for processing a substrate. The substrate processing method includes rotating a substrate (W) about the axis of the substrate, pressing a processing tape (2A) against a surface to be processed (5a) of the substrate (W) by a pressing member (12) in a state in which the pressing member (12) of a processing head (10A) is inclined (D1) in a first direction with respect to a predetermined pressing direction (CL) while the processing tape (2A) is being conveyed in the longitudinal direction, and then pressing the processing tape (2A) against the surface to be processed (5a) of the substrate (W) by the pressing member (12) in a state in which the pressing member (12) is inclined (D1) in the first direction with respect to the predetermined pressing direction (CL). The surface to be processed (5a) of the substrate (W) is processed by pressing the processing tape (2A) against the surface to be processed (5a) by the pressing member (12) in a state in which the pressing member (12) is inclined with respect to the pressing direction (CL) in a second direction (D2) opposite to the first direction (D1), the first direction (D1) and the second direction (D2) being directions along the longitudinal direction of the processing tape (2A) on the pressing member (12).

Description

Technical Field

[0001] The present invention relates to a substrate processing method for processing substrates such as wafers. Further, the present invention relates to a processing head for pressing a processing tape onto a substrate such as a wafer and a substrate processing apparatus including such a processing head. Background Art

[0002] In recent years, devices such as memory circuits, logic circuits, and image sensors (e.g., CMOS sensors) have been gradually highly integrated. In the process of forming these devices, foreign substances such as fine particles and dust adhere to the devices. The foreign substances adhering to the devices can cause short circuits between wirings and circuit failures. Therefore, in order to improve the reliability of the devices, it is necessary to clean the substrate on which the devices are formed to remove the foreign substances on the substrate.

[0003] Foreign substances such as the above-mentioned fine particles and dust also adhere to the back surface (non-device surface) of the substrate. When such foreign substances adhere to the back surface of the substrate, the substrate surface is inclined with respect to the stage reference surface of the exposure apparatus due to the separation of the substrate from the stage reference surface of the exposure apparatus, and as a result, pattern deviation and focus distance deviation occur. In order to prevent such problems, it is necessary to remove the foreign substances adhering to the back surface of the substrate.

[0004] Therefore, as Figure 25 and Figure 26 shown, a substrate processing apparatus that processes the back surface of the substrate using a processing tape is used. The processing for removing foreign substances from the back surface of the substrate includes: grinding the back surface of the substrate using a grinding tape and cleaning the back surface of the substrate using a cleaning tape. Figure 25 is a top view of a conventional substrate processing apparatus, Figure 26 is a side view of a conventional substrate processing apparatus. Figure 25 and Figure 26 The substrate processing apparatus shown is configured to process the substrate W by causing a plurality of pressing members 505 to perform circular motion relative to the substrate W.

[0005] The substrate processing apparatus holds the peripheral portion of the substrate W by a plurality of rollers 500 and rotates the substrate W about its axis O1 by rotating these rollers 500 themselves. The substrate processing apparatus has a plurality of eccentric shafts 507 respectively fixed to the plurality of rollers 500. Each eccentric shaft 507 has a first shaft portion 507a and a second shaft portion 507b that are eccentric by a distance e. By driving a motor 509 connected to each first shaft portion 507a, the plurality of rollers 500 perform circular motion with a radius e about the axis of the first shaft portion 507a. Thus, the substrate processing apparatus causes the substrate W to perform circular motion with a radius e while rotating the substrate W about its axis O1.

[0006] The processing tape 502 is disposed on the back side of the substrate W. The processing tape 502 is given a prescribed tension and travels in the direction indicated by the arrow Z. A plurality of pressing members 505 are arranged in the diametrical direction of the substrate W, and the back surface of the substrate W is processed by pressing the processing tape 502 against the back surface of the substrate W with these pressing members 505. The processing tape 502 pressed against the back surface of the substrate W can remove foreign matter from the back surface of the substrate W. By moving the processing head in a circular motion relative to the substrate while processing the back surface of the substrate, this substrate processing apparatus can ensure the relative speed between the pressing members of the processing head and the substrate, and can effectively process the entire substrate.

[0007] Prior Art Documents

[0008] Patent Documents

[0009] Patent Document 1: Japanese Unexamined Patent Application Publication No. 2021-2639

[0010] Problems to be Solved by the Invention

[0011] However, when processing the substrate W by moving a plurality of pressing members 505 in a circular motion relative to the substrate W, in the central region including the center (axis) O1 of the substrate W, the contact rotation number based on the pressing members 505 relatively increases compared to other regions. As a result, the substrate processing apparatus cannot uniformly process the back surface of the substrate W.

[0012] In addition, as shown in the edge portion of the substrate W Figure 27 , when the processing tape 502 is pressed against the substrate W by the pressing members 505, the substrate W is deflected upward. Since the substrate W is deflected in an arc shape, the processing tape 502 cannot be uniformly held, resulting in non-uniform processing rate of the substrate W. Therefore, as shown in Figure 28 , a substrate processing apparatus having a universal joint 509 that supports the pressing members 505 so as to be tiltably movable has been developed. Since the universal joint 509 can cause the pressing members 505 to follow the deflection of the substrate W, it is expected that the pressing members 505 can press the processing tape 502 uniformly against the substrate W.

[0013] However, as shown in Figure 29 , when the edge portion of the substrate W is warped, the pressing members 505 cannot follow the warping of the edge portion of the substrate W. As a result, the pressing members 505 cannot press the processing tape 502 uniformly against the substrate W. Summary of the Invention

[0014] Therefore, the present invention provides a substrate processing method capable of uniformly processing the entire surface to be processed of a substrate such as a wafer. In addition, the present invention provides a processing head capable of pressing a processing tape against the surface to be processed of a substrate such as a wafer with a uniform force; and a substrate processing apparatus including such a processing head.

[0015] (Means for Solving the Problems)

[0016] One aspect provides a substrate processing method, including the following: rotating the substrate about the axis of the substrate; and while conveying the processing tape in the length direction of the processing tape, pressing the processing tape against the surface to be processed of the substrate by the pressing member of the processing head while the pressing member is inclined in a first direction with respect to a specified pressing direction, and then, while the pressing member is inclined in a second direction opposite to the first direction with respect to the pressing direction, pressing the processing tape against the surface to be processed by the pressing member to process the surface to be processed of the substrate, where the first direction and the second direction are directions along the length direction of the processing tape on the pressing member.

[0017] In one aspect, causing the pressing member to incline in the first direction is to incline the pressing member in the first direction by an inclination movement actuator, and causing the pressing member to incline in the second direction is to cause the pressing member to incline in the second direction along the traveling direction of the processing tape due to the friction generated between the pressing member and the processing tape. The first direction is a direction that inclines downward toward the upstream side in the traveling direction of the processing tape, and the second direction is a direction that inclines downward toward the downstream side in the traveling direction of the processing tape.

[0018] In one aspect, causing the pressing member to incline in the first direction is to incline the pressing member in the first direction by a first inclination movement actuator, and causing the pressing member to incline in the second direction is to incline the pressing member in the second direction by a second inclination movement actuator. The first direction is a direction that inclines downward toward the upstream side in the traveling direction of the processing tape, and the second direction is a direction that inclines downward toward the downstream side in the traveling direction of the processing tape.

[0019] In one aspect, the central portion of the surface to be processed of the substrate is processed by pressing the processing tape against the central portion including the center of the surface to be processed of the substrate by the pressing member.

[0020] In one aspect, the edge portion of the surface to be processed of the substrate is processed by pressing the processing tape against the edge portion of the surface to be processed of the substrate by the pressing member.

[0021] In one aspect, the inner middle portion of the surface to be processed of the substrate is processed by pressing the processing tape against the inner middle portion of the surface to be processed of the substrate by the pressing member.

[0022] In one mode, the processing tape is pressed against the outer middle portion of the surface to be processed of the substrate by the pressing member, and the outer middle portion of the surface to be processed of the substrate is processed.

[0023] In one mode, the processing head is a grinding head for grinding the surface to be processed of the substrate, and the processing tape is a grinding tape having abrasive grains on its surface.

[0024] In one mode, the processing head is a cleaning head for cleaning the surface to be processed of the substrate, and the processing tape is a cleaning tape.

[0025] One mode provides a processing head including: a pressing member that presses a processing tape against a surface to be processed of a substrate; a pressing actuator that moves the pressing member in a prescribed pressing direction to impart a pressing force on the surface to be processed of the substrate to the pressing member; and an inclination adjustment mechanism that adjusts the inclination of the pressing member with respect to the pressing direction. The inclination adjustment mechanism includes: an inclination movement actuator that inclines the pressing member with respect to the pressing direction in a first direction; and a support shaft that is perpendicular to the length direction of the processing tape, to which the pressing member is connected and which can be inclined about the support shaft in the first direction and a second direction opposite to the first direction, the first direction and the second direction being directions along the length direction of the processing tape on the pressing member.

[0026] In one mode, the inclination adjustment mechanism further includes: a base member that supports the support shaft; and an inclination member that is connected to the support shaft and can be inclined about the support shaft, the inclination movement actuator having a rod that pushes up the inclination member.

[0027] In one mode, the inclination movement actuator is an air cylinder, and the rod is a piston rod of the air cylinder.

[0028] In one mode, the inclination adjustment mechanism further includes a screw that is screwed into a screw hole provided in the base member, the screw and the rod being respectively disposed on both sides of the support shaft, and the screw protruding from the base member toward the inclination member.

[0029] In one mode, the inclination adjustment mechanism further includes a screw that is screwed into a screw hole provided in the inclination member, the screw and the rod being respectively disposed on both sides of the support shaft, and the screw protruding from the inclination member toward the base member.

[0030] In one mode, the processing head is a polishing head for polishing the surface to be processed of the substrate, and the processing belt is a polishing belt having abrasive grains on its surface.

[0031] In one mode, the processing head is a cleaning head for cleaning the surface to be processed of the substrate, and the processing belt is a cleaning belt.

[0032] In one mode, the tilt movement actuator tilted in the first direction is a first tilt movement actuator, and the slope adjustment mechanism further includes a second tilt movement actuator that tilts the pressing member in the second direction with respect to the pressing direction.

[0033] In one mode, the slope adjustment mechanism further includes: a base member that supports the support shaft; and a tilt member that is connected to the support shaft and can tilt about the support shaft. The first tilt movement actuator has a first rod that pushes up the tilt member, and the second tilt movement actuator has a second rod that pushes up the tilt member.

[0034] In one mode, the first tilt movement actuator and the second tilt movement actuator are respectively air cylinders, and the first rod and the second rod are respectively piston rods of the air cylinders.

[0035] In one mode, the slope adjustment mechanism further includes: a first screw that is screwed into a first screw hole provided in the base member; and a second screw that is screwed into a second screw hole provided in the base member. The first screw and the first rod are respectively arranged on both sides of the support shaft, the second screw and the second rod are respectively arranged on both sides of the support shaft, and the first screw and the second screw protrude from the base member toward the tilt member.

[0036] In one mode, the slope adjustment mechanism further includes: a first screw that is screwed into a first screw hole provided in the tilt member; and a second screw that is screwed into a second screw hole provided in the tilt member. The first screw and the first rod are respectively arranged on both sides of the support shaft, the second screw and the second rod are respectively arranged on both sides of the support shaft, and the first screw and the second screw protrude from the tilt member toward the base member.

[0037] In one mode, a substrate processing apparatus is provided, including: a substrate holding unit that holds a substrate and rotates the substrate; a processing belt supply mechanism that conveys a processing belt in the length direction of the processing belt; and the above-described processing head.

[0038] Advantages of the Invention

[0039] While the pressing member of the processing head is tilted in the first direction, the processing tape is pressed against the surface to be processed of the substrate. Then, while the pressing member is tilted in the second direction opposite to the first direction, by pressing the processing tape against the surface to be processed, the pressing member can uniformly press the processing tape against the surface to be processed of the substrate. As a result, the entire surface to be processed of the substrate can be uniformly processed. Description of the Drawings

[0040] Figure 1 It is a side view showing an embodiment of a substrate processing apparatus.

[0041] Figure 2 is Figure 1 a top view of the substrate processing apparatus shown.

[0042] Figure 3 It is a schematic diagram illustrating the grinding area of the grinding head.

[0043] Figure 4 It is a perspective view showing an embodiment of the grinding head for grinding the central portion of the substrate.

[0044] Figure 5 is Figure 4 a sectional view of the grinding head shown.

[0045] Figure 6 is Figure 5 a sectional view taken along line A - A of

[0046] Figure 7 It is a sectional view showing that the pressing member holder and the pressing member are tilted in the first direction by the slope adjustment mechanism.

[0047] Figure 8A It is a sectional view showing a situation where the grinding tape is pressed against the substrate by the pressing member while the pressing member holder and the pressing member are tilted in the first direction by the slope adjustment mechanism.

[0048] Figure 8B is as Figure 8A shown, a graph showing the relationship between the position from the center of the substrate and the grinding rate when the grinding tape is pressed against the substrate by the pressing member tilted in the first direction.

[0049] Figure 9A It is a sectional view showing a situation where the grinding tape is pressed against the substrate by the pressing member while the pressing member holder and the pressing member are tilted in the second direction by the slope adjustment mechanism.

[0050] Figure 9B is as Figure 9AThe graph shows the relationship between the position from the center of the substrate and the polishing rate when the polishing tape is pressed against the substrate by the pressing member inclined in the second direction.

[0051] Figure 10 It is a flowchart showing an example of the substrate processing method of the present embodiment.

[0052] Figure 11 It is a perspective view showing another embodiment of the polishing head.

[0053] Figure 12 It is Figure 11 The sectional view of the polishing head shown.

[0054] Figure 13 It is Figure 12 The sectional view taken along the line B - B of

[0055] Figure 14A It is a sectional view showing the case where the polishing tape is pressed against the substrate by the pressing member in a state where the pressing member holder and the pressing member are inclined in the first direction by the inclination adjustment mechanism.

[0056] Figure 14B It is as Figure 14A The graph shows the relationship between the position from the center of the substrate and the polishing rate when the polishing tape is pressed against the substrate by the pressing member inclined in the first direction.

[0057] Figure 15A It is a sectional view showing the case where the polishing tape is pressed against the substrate by the pressing member in a state where the pressing member holder and the pressing member are inclined in the second direction by the inclination adjustment mechanism.

[0058] Figure 15B It is as Figure 15A The graph shows the relationship between the position from the center of the substrate and the polishing rate when the polishing tape is pressed against the substrate by the pressing member inclined in the second direction.

[0059] Figure 16 It is a flowchart showing an example of the substrate processing method of the present embodiment.

[0060] Figure 17 It is a sectional view showing another embodiment of the polishing head.

[0061] Figure 18 It is a sectional view showing still another embodiment of the polishing head.

[0062] Figure 19 It is showing Figure 18 The top view of the base member of the polishing head shown.

[0063] Figure 20It is a cross-sectional view showing a state in which the pressing member holder and the pressing member are tilted in a second direction by a second tilting actuator.

[0064] Figure 21 It is a flowchart showing an example of the substrate processing method of the present embodiment.

[0065] Figure 22 It is a cross-sectional view showing still another embodiment of the polishing head.

[0066] Figure 23A It is showing Figure 22 a longitudinal cross-sectional view of an embodiment of the first screw shown.

[0067] Figure 23B It is showing Figure 22 a longitudinal cross-sectional view of an embodiment of the first screw shown.

[0068] Figure 24 It is a side view showing another embodiment of the substrate processing apparatus.

[0069] Figure 25 It is a top view of a past substrate processing apparatus.

[0070] Figure 26 It is Figure 25 a side view of the past substrate processing apparatus shown.

[0071] Figure 27 It is a schematic diagram illustrating the case where the substrate is deflected upward by the pressing member.

[0072] Figure 28 It is a schematic diagram of a past substrate processing apparatus having a universal joint.

[0073] Figure 29 It is a schematic diagram illustrating the case where warping occurs at the edge portion of the substrate. Detailed Embodiments

[0074] Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[0075] Figure 1 It is a side view showing an embodiment of the substrate processing apparatus, Figure 2 and Figure 1 is a top view of the substrate processing apparatus shown. The substrate processing apparatus of the present embodiment is a polishing apparatus for substrate polishing which is an example of substrate processing for pressing a polishing tape which is an example of a processing tape against a substrate such as a wafer by a polishing head which is an example of a processing head. Figure 1 and Figure 2The substrate processing apparatus shown includes: a substrate holding unit 20 that holds and rotates a substrate W; a plurality of polishing heads 10A to 10D that polish a first surface 5a of the substrate W held by the substrate holding unit 20 by bringing polishing belts 2A and 2B into contact with the first surface 5a; a polishing belt supply mechanism 30A that conveys the polishing belt 2A in its longitudinal direction; and a polishing belt supply mechanism 30B that conveys the polishing belt 2B in its longitudinal direction.

[0076] In this specification, unless otherwise specified, the longitudinal direction of the polishing belts 2A and 2B and the traveling direction of the polishing belts 2A and 2B refer to the longitudinal direction of the polishing belts 2A and 2B and the traveling direction of the polishing belts 2A and 2B on the pressing members of the polishing heads 10A to 10D that press the polishing belts 2A and 2B against the first surface 5a of the substrate W, respectively.

[0077] The first surface 5a of the substrate W in this embodiment is the back surface of the substrate W on which no device is formed or on which a device is not intended to be formed, that is, a non-device surface. The second surface 5b of the substrate W on the side opposite to the first surface 5a is a surface on which a device is formed or on which a device is intended to be formed, that is, a device surface. The first surface 5a and the second surface 5b of the substrate W are flat surfaces of the substrate W. The substrate W in this embodiment is horizontally supported by the substrate holding unit 20 in a state where the surface to be processed, that is, the first surface 5a, faces downward.

[0078] The substrate holding unit 20 includes: a plurality of rollers 25 that can contact the peripheral portion of the substrate W; a plurality of motors 29 that rotate the plurality of rollers 25 at the same speed; and a plurality of eccentric shafts 27 that connect the plurality of rollers 25 and the plurality of motors 29. In this embodiment, four rollers 25 are provided, but three or five or more rollers may also be provided.

[0079] The plurality of eccentric shafts 27 each have: a first shaft portion 27a and a second shaft portion 27b that extend parallel to each other. The second shaft portion 27b is eccentric from the first shaft portion 27a by a distance e1. The plurality of rollers 25 are respectively fixed to one end of the plurality of second shaft portions 27b. The axes of the plurality of rollers 25 coincide with the axes of the plurality of second shaft portions 27b, respectively. The motors 29 are respectively connected to one end of the first shaft portion 27a.

[0080] When the plurality of motors 29 are driven, the plurality of eccentric shafts 27 rotate about their first shaft portions 27a. When the plurality of eccentric shafts 27 rotate, the rollers 25 perform a circular motion with a radius e1 about the axis of the first shaft portion 27a. When the roller 25 rotates one week about the axis of the first shaft portion 27a, the roller 25 rotates one week about the axis of the roller 25. The substrate holding unit 20 causes the substrate W held by the rollers 25 to perform a circular motion with a radius e1 and causes the substrate W to rotate about its axis (center) O1 through the motion of the rollers 25. Therefore, the substrate W moves relative to the polishing heads 10A to 10D in a circular motion. In this specification, circular motion is defined as a motion in which an object moves on a circular orbit.

[0081] A plurality of polishing heads 10A to 10D are arranged on the lower side of a substrate W held by a substrate holding unit 20. The polishing heads 10A and 10C are supported by a support member 11A, and the polishing heads 10B and 10D are supported by a support member 11B. These polishing heads 10A to 10D are arranged in the diameter direction of the substrate W. In the present embodiment, four polishing heads 10A to 10D are provided, but the number of polishing heads is not limited to the present embodiment. In one embodiment, three or less, or five or more polishing heads may be provided.

[0082] Since the abrasive belt supply mechanisms 30A and 30B basically have the same configuration, the abrasive belt supply mechanism 30A will be described below. The abrasive belt supply mechanism 30A includes: a belt unwinding scroll bar 31 to which one end of the abrasive belt 2A is connected; a belt winding scroll bar 32 to which the other end of the abrasive belt 2A is connected; and a plurality of guide rollers 33 that guide the traveling direction of the abrasive belt 2A. The belt unwinding scroll bar 31 and the belt winding scroll bar 32 are respectively connected to scroll bar motors 36 and 37.

[0083] By rotating the belt winding scroll bar 32 in the direction indicated by the arrow, the abrasive belt 2A is conveyed from the belt unwinding scroll bar 31 through the polishing heads 10A and 10C to the belt winding scroll bar 32. The abrasive belt 2A is supplied above the polishing heads 10A and 10C in such a manner that the processing surface (polishing surface) of the abrasive belt 2A faces the first surface 5a of the substrate W. The scroll bar motor 36 can apply tension to the abrasive belt 2A by imparting a predetermined torque to the belt unwinding scroll bar 31. The scroll bar motor 37 is controlled so as to convey the abrasive belt 2A at a constant speed. The speed of conveying the abrasive belt 2A can be changed by varying the rotation speed of the belt winding scroll bar 32.

[0084] In one embodiment, in addition to the belt unwinding scroll bar 31, the belt winding scroll bar 32, and the scroll bar motors 36 and 37, the substrate processing apparatus may include a belt feeding device that conveys the abrasive belt 2A in its length direction. In other embodiments, the positions of the belt unwinding scroll bar 31 and the belt winding scroll bar 32 may be arranged in reverse.

[0085] The substrate processing apparatus is electrically connected to an operation control unit 100 that controls the operations of the respective components of the substrate processing apparatus. The operations of the substrate holding unit 20, the polishing heads 10A to 10D, and the abrasive belt supply mechanisms 30A and 30B are controlled by the operation control unit 100.

[0086] The motion control unit 100 includes at least one computer. The motion control unit 100 includes: a storage device 100a that stores programs; and an arithmetic device 100b that performs arithmetic operations according to the programs. The storage device 100a includes: a main storage device (such as a random access memory) that can be accessed by the arithmetic device 100b; and an auxiliary storage device (such as a hard disk drive or a solid state drive) that stores programs. The arithmetic device 100b includes a CPU (central processing unit) or a GPU (graphics processing module) that performs arithmetic operations according to commands included in the programs stored in the storage device 100a. However, the specific configuration of the motion control unit 100 is not limited to these examples.

[0087] Figure 3 It is a schematic diagram for explaining the polishing areas of the polishing heads 10A to 10D. As Figure 3 shown, the polishing heads 10A to 10D are arranged along the diameter direction of the substrate W. The distances from the center O1 of the substrate W to the respective polishing heads increase in the order of the polishing head 10A, the polishing head 10B, the polishing head 10C, and the polishing head 10D. The polishing heads 10A and 10C are disposed below the substrate W and the polishing belt 2A, and are configured to press the polishing belt 2A from the inside thereof against the surface to be processed (the first surface 5a) of the substrate W. The polishing heads 10B and 10D are disposed below the substrate W and the polishing belt 2B, and are configured to press the polishing belt 2B from the inside thereof against the surface to be processed (the first surface 5a) of the substrate W.

[0088] The polishing heads 10A to 10D each have a pressing member 12 for pressing the polishing belt 2A or the polishing belt 2B against the surface to be processed (the first surface 5a) of the substrate W. The polishing heads 10A and 10B each have one pressing member 12, and the polishing heads 10C and 10D each have two pressing members 12. The polishing head 10A is configured to polish the central portion P1 of the substrate W including the center O1 of the substrate W. The polishing head 10B is configured to polish the inner intermediate portion P2 located radially outside the central portion P1 of the substrate W. The polishing head 10C is configured to polish the outer intermediate portion P3 located radially outside the inner intermediate portion P2 of the substrate W. The polishing head 10D is configured to be located radially outside the outer intermediate portion P3 of the substrate W and polish the outermost edge portion P4 of the substrate W. The central portion P1, the inner intermediate portion P2, the outer intermediate portion P3, and the edge portion P4 are all located within the first surface 5a of the substrate W.

[0089] As described above, the substrate processing apparatus according to the present embodiment performs circular motion of the substrate W relative to the polishing heads 10A to 10D to polish the substrate W. In the central region located inside the central portion P1 of the substrate W in the radial direction and including the center O1 of the substrate W, the number of revolutions of the inner portion of the polishing head 10A in the radial direction in contact with the pressing member 12 relatively increases compared to other regions. As a result, the substrate processing apparatus cannot uniformly process the surface to be processed of the substrate W. Therefore, the polishing head 10A according to the present embodiment is configured to be able to change the inclination of the pressing member 12 during polishing of the substrate W.

[0090] Figure 4 FIG. 4 is a perspective view showing an embodiment of the polishing head 10A for polishing the central portion P1 of the substrate W. Figure 5 is Figure 4 a cross-sectional view of the polishing head 10A shown in FIG. 4. Figure 6 is Figure 5 a cross-sectional view taken along line A-A of FIG. 5. The polishing head 10A is disposed below the substrate W and the polishing belt 2A. The polishing head 10A includes: a pressing member 12 for pressing the polishing belt 2A against the surface to be processed (first surface 5a) of the substrate W; a pressing actuator 15 that moves the pressing member 12 in a predetermined pressing direction indicated by an arrow CL to apply a pressing force to the surface to be processed (first surface 5a) of the substrate W to the pressing member 12; a housing 18 in which the pressing actuator 15 is disposed inside; and an inclination adjustment mechanism 50 for adjusting the inclination of the pressing member 12. The pressing actuator 15 includes: a movable shaft 16 connected to the pressing member 12; and a partition membrane (diaphragm) 42 that forms a pressure chamber 40 between the end (lower end) of the movable shaft 16 and the housing 18. The movable shaft 16 and the partition membrane 42 are disposed inside the housing 18.

[0091] The polishing head 10A further includes a pressing member holder 13 that holds the pressing member 12. The pressing member holder 13 is connected to the movable shaft 16 via the inclination adjustment mechanism 50 and can move integrally with the movable shaft 16. The pressing member 12 has a blade extending in a straight line and has a pressing surface for pressing the polishing belt 2A against the substrate W. The pressing member 12 is fixed in a state of being fitted into the fitting groove of the pressing member holder 13. As shown in FIG. 6, the pressing member 12 is inclined with respect to the traveling direction of the polishing belt 2A indicated by an arrow Z1. The pressing member 12 is formed of an elastic material. Examples of the material constituting the pressing member 12 include rubbers such as fluororubber, silicone rubber, and ethylene propylene diene rubber. The cross-section of the pressing member 12 has a circular shape. Figure 4 As shown in FIG. 6, the pressing member 12 is inclined with respect to the traveling direction of the polishing belt 2A indicated by an arrow Z1. The pressing member 12 is formed of an elastic material. Examples of the material constituting the pressing member 12 include rubbers such as fluororubber, silicone rubber, and ethylene propylene diene rubber. The cross-section of the pressing member 12 has a circular shape.

[0092] The pressing member 12 is not limited to this embodiment, and may have other shapes or may be made of other materials. In one embodiment, the pressing member 12 may also be formed of an annular member (e.g., an O-ring) and is hung on a protrusion provided on the side surface of the pressing member holder 13 and is supported by the pressing member holder 13 in a state of elastic deformation. In other embodiments, the pressing member 12 may also be in the shape of a curved blade.

[0093] As Figure 5 shown, the movable shaft 16 is configured to be movable within the housing 18 in its axial direction, and the movable shaft 16 can raise the pressing member 12 and the pressing member holder 13 in the pressing direction indicated by the arrow CL. The pressing member 12 faces the back side of the abrasive belt 2A. When the movable shaft 16 raises the pressing member 12 and the pressing member holder 13 in the pressing direction indicated by the arrow CL, the pressing member 12 contacts the back side of the abrasive belt 2A. The back side of the abrasive belt 2A is the side surface opposite to the abrasive surface having abrasive grains. The pressing member 12 presses the abrasive surface of the abrasive belt 2A against the first surface 5a of the substrate W, and the first surface 5a of the substrate W is polished with the abrasive belt 2A. During the polishing of the substrate W, the back side of the abrasive belt 2A is supported by the pressing member 12. During the polishing of the substrate W, the abrasive belt 2A is conveyed in its length direction at a predetermined speed. Figure 4 and Figure 5 The arrow Z1 of indicates the traveling direction of the abrasive belt 2A.

[0094] The movable shaft 16 of this embodiment is formed of a ball spline shaft. A ball spline nut 45 is disposed within the housing 18, and the movable shaft 16 is supported by the ball spline nut 45 so as to be movable in the axial direction of the movable shaft 16. In one embodiment, the movable shaft 16 may also be supported so as to be movable on the inner surface of the housing 18.

[0095] The housing 18 includes: a housing main body 18A having a space formed therein for accommodating the movable shaft 16; and a lid 18B for closing the above space. The lid 18B is detachably fixed to the housing main body 18A by screws (not shown). The pressing actuator 15 that generates a pressing force for pressing the abrasive belt 2A against the substrate W includes: the movable shaft 16 and the partition diaphragm 42. The partition diaphragm 42 contacts the end portion (lower end) of the movable shaft 16, and the edge of the partition diaphragm 42 is sandwiched between the housing main body 18A and the lid 18B. The partition diaphragm 42 only contacts the movable shaft 16 and is not fixed to the movable shaft 16.

[0096] The partition diaphragm 42 is formed of a soft material. Examples of the material constituting the partition diaphragm 42 may include chloroprene, fluororubber, and silicone rubber. The pressure chamber 40 is configured to communicate with a compressed gas supply line (not shown) and supply compressed gas (e.g., compressed air) into the pressure chamber 40 from the compressed gas supply line.

[0097] The inclination adjustment mechanism 50 is configured to adjust the inclination of the pressing member 12 with respect to the moving direction (pressing direction) CL of the pressing member 12 that moves by the pressing actuator 15. The pressing member holder 13 is connected to the inclination adjustment mechanism 50, and the pressing member 12 and the pressing member holder 13 are connected to the movable shaft 16 via the inclination adjustment mechanism 50. The inclination adjustment mechanism 50 is disposed between the movable shaft 16 and the pressing member holder 13, and the upper portion of the inclination adjustment mechanism 50 is housed inside the pressing member holder 13. The inclination adjustment mechanism 50, the pressing member holder 13, and the pressing member 12 are integrally moved by the pressing actuator 15.

[0098] When polishing the substrate W, compressed gas such as compressed air is supplied into the pressure chamber 40. The pressure of the compressed gas in the pressure chamber 40 acts on the end portion (lower end) of the movable shaft 16 via the partition diaphragm 42, causing the movable shaft 16, the inclination adjustment mechanism 50, the pressing member holder 13, and the pressing member 12 to rise. The polishing head 10A may further include a distance sensor that measures the relative movement distance of the movable shaft 16 with respect to the housing 18. When the polishing of the substrate W is completed, the pressure chamber 40 is opened to the atmosphere. As a result, the movable shaft 16, the inclination adjustment mechanism 50, the pressing member holder 13, and the pressing member 12 are lowered by the self-weight of the movable shaft 16 and the tension of the polishing belt 2A.

[0099] The pressing member holder 13 has a skirt portion 13a that extends downward. The skirt portion 13a surrounds the housing 18 and the upper portion of the inclination adjustment mechanism 50. The skirt portion 13a of the present embodiment is in the shape of a square tube, but as long as it can surround the housing 18 and the upper portion of the inclination adjustment mechanism 50, it may be other shapes. The skirt portion 13a can prevent liquids such as pure water used for polishing the substrate W from entering the housing 18 and the inclination adjustment mechanism 50.

[0100] As Figure 5 and Figure 6 shown, the inclination adjustment mechanism 50 includes: a support shaft 51; a base member 55 that supports the support shaft 51; an inclination member 56 that is connected to the support shaft 51 and can be inclined about the support shaft 51; an inclination movement actuator 58 that causes the inclination member 56 to move in an inclined manner; and a screw 69 that is screwed into a screw hole 68 provided in the base member 55. The base member 55 is fixed to the upper end of the movable shaft 16. The base member 55 has: a central portion 70; and a first protrusion 72 and a second protrusion 73 that protrude from both ends of the central portion 70. The first protrusion 72 is located on the downstream side of the central portion 70 in the traveling direction Z1 of the polishing belt 2A. The second protrusion 73 is located on the upstream side of the central portion 70 in the traveling direction of the polishing belt 2A. The upper portion of the central portion 70 is disposed inside a hollow space 75 formed in the center of the inclination member 56.

[0101] The support shaft 51 is inserted into the through hole 55a formed at the central portion 70 of the base member 55. Both ends of the support shaft 51 are inserted into two support holes 56a formed in the inclined member 56. The extending direction of the support shaft 51 is perpendicular to the moving direction (pressing direction) CL of the pressing member 12 and perpendicular to the length direction (traveling direction Z1 of the abrasive belt 2A) of the abrasive belt 2A. The pressing member 12 and the pressing member holder 13 are connected to the inclined member 56 and the support shaft 51 and can be inclined (rotated) about the support shaft 51 integrally with the inclined member 56. The pressing member holder 13 is fixed to the inclined member 56. In one embodiment, the inclined member 56 may be integrally formed with the pressing member holder 13.

[0102] The tilt actuator 58 is disposed on the downstream side of the support shaft 51 in the traveling direction Z1 of the abrasive belt 2A. The tilt actuator 58 includes a rod 59 that pushes up the inclined member 56. The tilt actuator 58 of the present embodiment is an air cylinder, and the rod 59 is a piston rod. As Figure 5 shown, the tilt actuator 58 includes: a piston rod 59, a cylinder 60, a cap 62 that closes the space in the cylinder 60; and a compressed gas supply line 65 that supplies compressed gas (e.g., compressed air) into the cylinder 60. The piston rod 59 is disposed in the cylinder 60. The tilt actuator 58 of the present embodiment is integrally formed with the first protrusion 72 of the base member 55. The tilt actuator 58 is not fixed to the housing 18 and is relatively movable up and down with respect to the housing 18. That is, the tilt actuator 58 moves up and down integrally with the base member 55, the inclined member 56, the pressing member 12, and the pressing member holder 13 by the pressing actuator 15.

[0103] The configuration of the tilt actuator 58 is not limited as long as the rod 59 can push up the inclined member 56, and is not limited to the present embodiment. In one embodiment, the tilt actuator 58 may also be an electric actuator that operates by a motor or an electromagnetic actuator that operates by electromagnetic force.

[0104] The interior of the cylinder 60 communicates with the compressed gas supply line 65 through the through hole 62a formed in the cover 62. When compressed gas is supplied from the compressed gas supply line 65 into the cylinder 60, the tilting movement actuator 58 is driven, and the piston rod 59 moves (rises) in its axial direction. The moving direction of the piston rod 59 is a direction parallel to the pressing direction CL of the pressing member 12. The piston rod 59 is configured to penetrate through the rod hole 63 of the first protrusion 72 provided in the base member 55 and can protrude upward from the base member 55. The rod hole 63 extends through the first protrusion 72 of the base member 55. The front end of the piston rod 59 is configured to be able to contact the lower surface of the tilting member 56. The tilting movement actuator 58 raises the piston rod 59, and can tilt the pressing member 12 and the pressing member holder 13 integrally with the tilting member 56 about the support shaft 51 as a fulcrum.

[0105] As Figure 5 shown, when the screw 69 and the piston rod 59 of the tilting movement actuator 58 are viewed from the axial direction of the support shaft 51, they are respectively arranged on both sides of the support shaft 51 (symmetrically with respect to the support shaft 51). The screw 69 is arranged on one side of the support shaft 51, and the piston rod 59 is arranged on the opposite side of the support shaft 51. That is, the screw 69 is arranged on the side opposite to the piston rod 59 with respect to the support shaft 51. The screw 69 and the piston rod 59 are arranged along a direction perpendicular to the support shaft 51. That is, the screw 69 and the piston rod 59 are arranged along the length direction of the abrasive belt 2A (the traveling direction Z1 of the abrasive belt 2A). The screw 69 is arranged on the upstream side of the support shaft 51 in the traveling direction Z1 of the abrasive belt 2A. The screw 69 has the function of a stopper that limits the angle of the tilting member 56 that tilts about the support shaft 51, that is, limits the angle of the tilting pressing member 12 and the pressing member holder 13.

[0106] The screw 69 is screwed into the screw hole 68 of the second protrusion 73 provided in the base member 55. The screw hole 68 extends through the second protrusion 73 of the base member 55. The screw 69 protrudes upward from the base member 55 toward the tilting member 56. The front end of the screw 69 is configured to be able to contact the lower surface of the tilting member 56. The tilting movement actuator 58 can tilt the pressing member 12 and the pressing member holder 13 about the support shaft 51 until the lower surface of the tilting member 56 contacts the front end of the screw 69. That is, when the tilting movement actuator 58 tilts the pressing member 12 and the pressing member holder 13 integrally with the tilting member 56 about the support shaft 51, the tilting angle about the support shaft 51 can be changed by the relative position of the screw 69 with respect to the tilting member 56.

[0107] In one embodiment, the screw 69 may not protrude from the base member 55. At this time, the tilting movement actuator 58 can tilt the pressing member 12 and the pressing member holder 13 about the support shaft 51 until the lower surface of the tilting member 56 contacts the base member 55.

[0108] Figure 7 This is a sectional view showing a state in which the pressing member holder 13 and the pressing member 12 are inclined in the first direction D1 by the inclination adjustment mechanism 50. As Figure 7 shown, when the piston rod 59 is raised by driving the tilt movement actuator 58, the front end of the piston rod 59 contacts the lower surface of the tilt member 56. As a result, the pressing member holder 13 and the pressing member 12 are integrally inclined in the first direction D1 about the pivot 51 with respect to the pressing direction CL of the pressing member 12. The first direction D1 is a direction along the length direction of the abrasive belt 2A, and is a direction that is inclined downward toward the upstream side in the traveling direction Z1 of the abrasive belt 2A. More specifically, when viewed from above the polishing head 10A, the first direction D1 is a direction along the length direction of the abrasive belt 2A on the pressing member 12.

[0109] When the tilt member 56, the pressing member holder 13, and the pressing member 12 are inclined in the first direction D1 with respect to the pressing direction CL of the pressing member 12, the tilt member 56 contacts the front end of the screw 69 protruding upward from the base member 55. The pressure of the compressed gas supplied from the compressed gas supply line 65 of the tilt movement actuator 58 raises the front end of the piston rod 59 and maintains it above the pressure value necessary to tilt the tilt member 56 before contacting the front end of the screw 69. Therefore, the tilt angle of the tilt member 56, the pressing member holder 13, and the pressing member 12 is determined by the protruding amount of the screw 69 protruding from the base member 55 (more specifically, the second protruding portion 73) toward the tilt member 56. The protruding amount of the screw 69 can be adjusted by the screwing condition of the screw 69 with respect to the screw hole 68.

[0110] Figure 8A This is a sectional view showing a situation in which the abrasive belt 2A is pressed against the substrate W by the pressing member 12 in a state where the pressing member holder 13 and the pressing member 12 are inclined in the first direction D1 by the inclination adjustment mechanism 50. Figure 8B This is as Figure 8A shown, a graph showing the relationship between the position from the center O1 of the substrate W and the polishing rate when the abrasive belt 2A is pressed against the substrate W by the pressing member 12 inclined in the first direction D1.

[0111] As Figure 8A shown, in a state where the pressing member holder 13 and the pressing member 12 are inclined in the first direction D1 by the inclination adjustment mechanism 50, when the pressing member 12 is moved (raised) in the pressing direction CL by the pressing actuator 15 (see Figure 5 ), the downstream side portion of the pressing member 12 in the traveling direction Z1 of the abrasive belt 2A presses the abrasive belt 2A against the surface to be processed (the first surface 5a) of the substrate W. Thus, as Figure 8BAs shown, the outer region in the radial direction in the central portion P1 of the polishing substrate W (refer to Figure 3 ). This outer region in the radial direction is a region that does not include the center O1 of the substrate W.

[0112] Figure 9A is a cross-sectional view of the case where the polishing belt 2A is pressed against the substrate W by the pressing member 12 in a state where the pressing member holder 13 and the pressing member 12 are inclined in the second direction D2 by the inclination adjustment mechanism 50. Figure 9B is as Figure 9A shown, which is a graph showing the relationship between the position from the center O1 of the substrate W and the polishing rate when the polishing belt 2A is pressed against the substrate W by the pressing member 12 inclined in the second direction D2.

[0113] When the tilt movement actuator 58 stops, the piston rod 59 descends, releasing the contact between the tilt member 56 and the piston rod 59, and the contact between the tilt member 56 and the screw 69. More specifically, when the supply of compressed gas from the compressed gas supply line 65 stops and the inside of the cylinder 60 is opened to the atmosphere, the drive of the tilt movement actuator 58 stops, the piston rod 59 descends, the piston rod 59 separates from the tilt member 56, and the tilt member 56 separates from the screw 69. The stop of the drive of the tilt movement actuator 58 is performed when the pressing member 12 is moved (raised) in the pressing direction CL by the pressing actuator 15 (refer to Figure 5 ).

[0114] During the polishing of the substrate W, the polishing belt 2A is conveyed in the direction indicated by the arrow Z1 in a state where tension is applied. As the polishing belt 2A travels, friction is generated between the polishing belt 2A and the substrate W, and between the polishing belt 2A and the pressing member 12. The friction generated between the polishing belt 2A and the pressing member 12 generates a torque that causes the pressing member 12 to tilt in the second direction D2 with respect to the pressing direction CL of the pressing member 12. As Figure 9A shown, the inclination adjustment mechanism 50 allows the inclination member 56, the pressing member holder 13, and the pressing member 12 to tilt in the second direction D2 with respect to the pressing direction CL of the pressing member 12. The second direction D2 is a direction along the traveling direction Z1 of the polishing belt 2A (the longitudinal direction of the polishing belt 2A), and is a direction that is inclined downward toward the downstream side in the traveling direction Z1 of the polishing belt 2A. The second direction D2 is a direction opposite to the first direction D1. More specifically, when viewing the polishing head 10A from above, the second direction D2 is a direction along the longitudinal direction of the polishing belt 2A on the pressing member 12.

[0115] In one embodiment, instead of stopping the drive of the tilt movement actuator 58, the pressure of the compressed gas supplied from the compressed gas supply line 65 is reduced in correspondence with the degree of tilting of the pressing member 12 in the second direction D2 along the traveling direction Z1 of the abrasive belt 2A by the friction generated between the pressing member 12 and the abrasive belt 2A.

[0116] As Figure 9A shown, when the pressing member 12 is moved (raised) in the pressing direction CL by the pressing actuator 15 (see Figure 5 ), when the pressing member holder 13 and the pressing member 12 are tilted in the second direction D2 by the slope adjustment mechanism 50, the upstream side portion of the pressing member 12 in the traveling direction Z1 of the abrasive belt 2A presses the abrasive belt 2A against the surface to be processed (the first surface 5a) of the substrate W. Thus, as Figure 9B shown, the radially inner region in the central portion P1 of the polishing substrate W (see Figure 3 ) is polished. The radially inner region is the region including the center O1 of the substrate W.

[0117] During the polishing of the substrate W, the timing of changing the slope of the pressing member 12 of the polishing head 10A, that is, the timing of stopping the tilt movement actuator 58 is determined in advance based on the polishing results of the previously polished substrates, etc. Specifically, the timing of stopping the tilt movement actuator 58 is the timing when the polishing amount of the entire central portion P1 of the substrate W becomes uniform.

[0118] The polishing heads 10B for polishing the inner middle portion P2 of the substrate W (see Figure 3 ), the polishing heads 10C for polishing the outer middle portion P3 of the substrate W (see Figure 3 ), and the polishing heads 10D for polishing the edge portion P4 of the substrate W (see Figure 3 ) are provided with a universal joint (not shown) that allows the pressing member 12 to tilt in all directions with respect to the movable shaft 16 instead of the slope adjustment mechanism 50. A well-known universal joint can be used as the universal joint.

[0119] Figure 10 is a flowchart showing an example of the substrate processing method of the present embodiment.

[0120] In step S101, the motion control unit 100 issues an instruction to the substrate holding unit 20 to rotate the substrate W about its axis O1 while relatively moving the substrate W in a circular motion with respect to the polishing heads 10A to 10D.

[0121] In step S102, the motion control unit 100 issues an instruction to the abrasive belt supply mechanisms 30A and 30B to convey the abrasive belts 2A and 2B in their length directions, respectively.

[0122] In step S103, the motion control unit 100 issues an instruction to the tilt actuator 58 of the polishing head 10A, and tilts the pressing member 12 of the polishing head 10A in the first direction D1 with respect to the specified pressing direction CL through the tilt actuator 58. More specifically, the motion control unit 100 issues an instruction to the tilt actuator 58 of the polishing head 10A, drives the tilt actuator 58 to raise the piston rod 59, and integrally with the tilting member 56, tilts the pressing member 12 and the pressing member holder 13 with respect to the specified pressing direction CL in the first direction D1.

[0123] In step S104, the motion control unit 100 issues an instruction to the pressing actuators 15 of the polishing heads 10A to 10D, and raises the pressing members 12 of the polishing heads 10A to 10D through the respective pressing actuators 15. The polishing heads 10A to 10D press the polishing belts 2A and 2B against the surface to be processed (first surface 5a) of the substrate W through the pressing members 12, respectively.

[0124] The polishing head 10A presses the polishing belt 2A against the surface to be processed (first surface 5a) of the substrate W in a state where the pressing member 12 is tilted in the first direction D1. Thus, as described with reference to Figure 8A and Figure 8B , the outer region in the radial direction in the central portion P1 of the polished substrate W (refer to Figure 3 ) is polished. The polishing heads 10A to 10D are parallel to the surface to be processed (first surface 5a) of the substrate W through universal joints (not shown), and press the polishing belts 2A and 2B against the surface to be processed (first surface 5a) of the substrate W through the pressing members 12, respectively.

[0125] In step S105, the motion control unit 100 issues an instruction to the tilt actuator 58 of the polishing head 10A to stop the drive of the tilt actuator 58, and tilts the pressing member 12 of the polishing head 10A in the second direction D2 with respect to the specified pressing direction CL due to the friction generated between the pressing member 12 of the polishing head 10A and the polishing belt 2A. The polishing head 10A further presses the polishing belt 2A against the surface to be processed (first surface 5a) of the substrate W in a state where the pressing member 12 is tilted in the second direction D2. Thus, as described with reference to Figure 9A and Figure 9B , the inner region in the radial direction (including the center O1 of the substrate W) in the central portion P1 of the polished substrate W is polished.

[0126] In step S106, the motion control unit 100 issues an instruction to the pressing actuators 15 of the polishing heads 10A to 10D to stop the drive of the respective pressing actuators 15, and lower the pressing members 12 of the polishing heads 10A to 10D. The pressing members 12 of the polishing heads 10A to 10D are separated from the polishing belts 2A and 2B and the substrate W, respectively.

[0127] In step S107, the polishing of the substrate W based on the polishing heads 10A to 10D is ended.

[0128] When adopting this embodiment, while the pressing member 12 of the polishing head 10A is inclined in the first direction D1 with respect to the pressing direction CL of the pressing member 12, the polishing belt 2A is pressed against the surface to be processed of the substrate W. Then, while the pressing member 12 is inclined in the second direction D2 opposite to the first direction D1 with respect to the pressing direction CL of the pressing member 12, the polishing belt 2A is pressed against the surface to be processed. That is, during the polishing of the substrate W, the inclination of the pressing member 12 of the polishing head 10A is changed from the first direction D1 to the second direction D2 opposite to the first direction D1. Thereby, when the substrate W is polished by making the substrate W perform a circular motion relative to the polishing heads 10A to 10D, it is possible to prevent the contact rotation speed of the pressing member 12 of the polishing head 10A from relatively increasing in the region radially inside and including the center O1 of the substrate W in the central portion P1 of the substrate W compared to other regions. As a result, the entire surface to be processed of the substrate W can be polished uniformly.

[0129] In one embodiment, the polishing head 10A may first polish the region including the center O1 of the substrate W radially inside the substrate W in the central portion P1 of the substrate W while the pressing member 12 is inclined in the second direction D2, and then polish the region radially outside the substrate W in the central portion P1 of the substrate W while the pressing member 12 is inclined in the first direction D1. At this time, with the drive of the tilt movement actuator 58 stopped, the pressing actuator 15 is driven to raise the pressing member 12 of the polishing head 10A. Thereby, the polishing head 10A can press the polishing belt 2A against the surface to be processed (the first surface 5a) of the substrate W while the pressing member 12 is inclined in the second direction D2. Then, the tilt movement actuator 58 is driven, and while the pressing member 12 is inclined in the first direction D1, the polishing belt 2A is further pressed against the surface to be processed (the first surface 5a) of the substrate W by the pressing member 12.

[0130] Figure 11 It is a perspective view showing another embodiment of the polishing head, Figure 12 is Figure 11 a sectional view of the polishing head shown, Figure 13 is Figure 12 a sectional view taken along line B - B of. The polishing head of this embodiment is the polishing head 10D for polishing the edge portion P4 of the substrate W (refer to Figure 3 ). Since the configuration and operation of this embodiment not particularly described are the same as those of the embodiment described with reference to Figures 1 to 10 , the repeated description thereof is omitted. Figure 11 and Figure 12The arrow Z2 indicates the traveling direction of the abrasive belt 2B.

[0131] The polishing head 10D of the present embodiment has two pressing members 12. The two pressing members 12 have blades shaped to extend in a straight line, and each has a pressing surface for pressing the abrasive belt 2B against the substrate W. As Figure 11 shown, the two pressing members 12 are inclined with respect to the traveling direction Z2 of the abrasive belt 2B indicated by the arrow Z2. When the polishing head 10D is viewed from above, the two pressing members 12 are symmetrically arranged about the center line L along the traveling direction Z2 of the abrasive belt 2B.

[0132] The two pressing members 12 are not limited to the present embodiment, and may have other shapes or be made of other materials. In one embodiment, the two pressing members 12 may also be formed by a single ring-shaped member (such as an O-ring), which is hung on a protrusion provided on the side surface of the pressing member holder 13 and supported by the pressing member holder 13 in an elastically deformed state. In other embodiments, the two pressing members 12 may each be in the shape of a curved blade.

[0133] The tilt actuator 58 is arranged on the downstream side of the support shaft 51 in the traveling direction Z2 of the abrasive belt 2B. The screw 69 and the piston rod 59 of the tilt actuator 58 are respectively arranged on both sides of the support shaft 51 (symmetrically with respect to the support shaft 51). The screw 69 is arranged on one side of the support shaft 51, and the piston rod 59 is arranged on the opposite side of the support shaft 51. The screw 69 and the piston rod 59 are arranged along a direction perpendicular to the support shaft 51. That is, the screw 69 and the piston rod 59 are arranged along the length direction of the abrasive belt 2B (the traveling direction Z2 of the abrasive belt 2B). The screw 69 is arranged on the upstream side of the support shaft 51 in the traveling direction Z2 of the abrasive belt 2B.

[0134] The slope adjustment mechanism 50 of the present embodiment further includes two pins 82 perpendicular to the support shaft 51. The two pins 82 pass through through holes 80 provided in the skirt portion 13a of the pressing member holder 13 and are respectively inserted into pin holes 81 provided in the tilt member 56. The two pins 82 are fixed to the pressing member holder 13 and are not fixed to the tilt member 56. The two pins 82 are respectively arranged on both sides of the support shaft 51 (symmetrically with respect to the support shaft 51). In the present embodiment, the central axis of the support shaft 51 and the central axes of the two pins 82 are located in the same plane. The two pins 82 extend in the length direction of the abrasive belt 2B (the traveling direction Z2 of the abrasive belt 2B).

[0135] The pressing member holder 13 can be tilted (rotated) relative to the inclined member 56 about the two pins 82. The pressing member holder 13 of the present embodiment is connected to the inclined member 56 by the two pins 82. The upper surface of the inclined member 56 does not contact the inner surface of the pressing member holder 13. The two pins 82 are provided to equalize the pressing force applied to the substrate W from the two pressing members 12 on the pressing member holder 13 via the abrasive belt 2B. In one embodiment, the two pins 82 may be omitted.

[0136] Figure 14A This is a cross-sectional view of a case where the abrasive belt 2B is pressed against the substrate W by the pressing member 12 in a state where the pressing member holder 13 and the pressing member 12 are tilted in the first direction D1 by the slope adjustment mechanism 50. Figure 14B It is as Figure 14A shown, a graph showing the relationship between the position from the center O1 of the substrate W and the grinding rate when the abrasive belt 2B is pressed against the substrate W by the pressing member 12 tilted in the first direction D1.

[0137] As Figure 14A shown, warping will occur in the outermost peripheral portion of a part of the edge portion of the substrate W. When grinding such a substrate W, in a state where the pressing member holder 13 and the pressing member 12 are tilted in the first direction D1 relative to the pressing direction CL of the pressing member 12 by the slope adjustment mechanism 50, the pressing member 12 is moved (raised) in the pressing direction CL by the pressing actuator 15 (refer to Figure 12 ). The downstream side portion of the pressing member 12 in the traveling direction Z2 of the abrasive belt 2B presses the abrasive belt 2B against the surface to be processed (the first surface 5a) of the substrate W. The first direction D1 is a direction along the length direction of the abrasive belt 2B, and is a direction that is inclined downward toward the upstream side in the traveling direction Z2 of the abrasive belt 2B. More specifically, when viewing the grinding head 10D from above, the first direction D1 is a direction along the length direction of the abrasive belt 2B on the pressing member 12.

[0138] The slope adjustment mechanism 50 tilts the inclined member 56, the pressing member holder 13, and the pressing member 12 in the first direction D1 so that the pressing member 12 follows the warping generated in the outermost peripheral portion of the substrate W, and contacts the substrate W via the abrasive belt 2B. Thus, as Figure 14B shown, the outer region in the radial direction (i.e., the outermost peripheral portion of the substrate W) of the edge portion P4 (refer to Figure 3 ) of the substrate W is ground. The tilt angles of the inclined member 56, the pressing member holder 13, and the pressing member 12 are determined by the protruding amount of the screw 69 protruding from the base member 55 toward the inclined member 56. The protruding amount of the screw 69 can be adjusted by the screwing condition of the screw 69 into the screw hole 68.

[0139] Figure 15A This is a cross-sectional view of a situation where the pressing member 12 presses the abrasive belt 2B against the substrate W with the pressing member holder 13 and the pressing member 12 inclined in the second direction D2 by the inclination adjustment mechanism 50. Figure 15B As shown in Figure 15A is a graph showing the relationship between the position from the center O1 of the substrate W and the grinding rate when the abrasive belt 2B is pressed against the substrate W by the pressing member 12 inclined in the second direction D2.

[0140] When the drive of the tilt movement actuator 58 is stopped, the inclination adjustment mechanism 50 allows the pressing member 12 to incline in the second direction D2 opposite to the first direction D1 with respect to the pressing direction CL of the pressing member 12 due to the friction generated between the abrasive belt 2B and the pressing member 12. The second direction D2 is a direction along the traveling direction Z2 (the longitudinal direction of the abrasive belt 2B) of the abrasive belt 2B, and is a direction that inclines downward toward the downstream side in the traveling direction Z2 of the abrasive belt 2B. More specifically, when viewing the grinding head 10D from above, the second direction D2 is a direction along the longitudinal direction of the abrasive belt 2B on the pressing member 12.

[0141] As shown in Figure 15A , when the pressing member 12 is moved (raised) in the pressing direction CL by the pressing actuator 15 (see Figure 12 ), and the pressing member holder 13 and the pressing member 12 are inclined in the second direction D2 by the inclination adjustment mechanism 50, the upstream side portion of the pressing member 12 in the traveling direction Z2 of the abrasive belt 2B presses the abrasive belt 2B against the processed surface (first surface 5a) of the substrate W. Thus, as shown in Figure 15B , the inner region in the radial direction of the edge portion P4 of the substrate W (see Figure 3 ) is ground.

[0142] During the grinding of the substrate W, the timing of changing the inclination of the pressing member 12 of the grinding head 10D, that is, the timing of stopping the tilt movement actuator 58, is determined in advance based on the grinding results of the previously ground substrates, etc. Specifically, the timing of stopping the tilt movement actuator 58 is the timing when the grinding amount of the entire edge portion P4 of the substrate W becomes uniform.

[0143] Figure 16 This is a flowchart showing an example of the substrate processing method of the present embodiment.

[0144] In step S201, the operation control unit 100 issues an instruction to the substrate holding unit 20 to perform a circular motion of the substrate W relative to the grinding heads 10A to 10D, and to rotate the substrate W about its axis O1.

[0145] In step S202, the motion control unit 100 issues commands to the abrasive belt supply mechanisms 30A and 30B to convey the abrasive belts 2A and 2B in their longitudinal directions, respectively.

[0146] In step S203, the motion control unit 100 issues a command to the tilt movement actuator 58 of the grinding head 10A, and causes the pressing member 12 of the grinding head 10A to tilt in the first direction D1 with respect to the specified pressing direction CL through the tilt movement actuator 58. Furthermore, the motion control unit 100 issues a command to the tilt movement actuator 58 of the grinding head 10D, and causes the two pressing members 12 of the grinding head 10D to tilt in the first direction D1 with respect to the specified pressing direction CL through the tilt movement actuator 58.

[0147] In step S204, the motion control unit 100 issues commands to the pressing actuators 15 of the grinding heads 10A to 10D, and causes the pressing members 12 of the grinding heads 10A to 10D to rise through the respective pressing actuators 15. The grinding heads 10A to 10D press the abrasive belts 2A and 2B against the surface to be processed (the first surface 5a) of the substrate W through the pressing members 12, respectively.

[0148] The grinding head 10A presses the abrasive belt 2A against the surface to be processed (the first surface 5a) of the substrate W in a state where the pressing member 12 is tilted in the first direction D1. The grinding head 10D presses the abrasive belt 2B against the surface to be processed (the first surface 5a) of the substrate W in a state where the two pressing members 12 are tilted in the first direction D1. Thus, as described with reference to Figure 8A and Figure 8B , the outer region in the radial direction in the central portion P1 of the substrate W (refer to Figure 3 ) is ground, and as described with reference to Figure 14A and Figure 14B , the outer region in the radial direction (i.e., the outermost peripheral portion of the substrate W) in the edge portion P4 of the substrate W (refer to Figure 3 ) is ground. The grinding heads 10B and 10C are parallel to the surface to be processed (the first surface 5a) of the substrate W through a universal joint (not shown), and can press the abrasive belts 2A and 2B against the surface to be processed (the first surface 5a) of the substrate W through the pressing members 12, respectively.

[0149] In step S205, the motion control unit 100 issues an instruction to the tilt actuator 58 of the polishing head 10A to stop the tilt actuator 58, and causes the pressing member 12 of the polishing head 10A to tilt in the second direction D2 with respect to the specified pressing direction CL due to the friction generated between the pressing member 12 of the polishing head 10A and the polishing belt 2A. Furthermore, the motion control unit 100 issues an instruction to the tilt actuator 58 of the polishing head 10D to stop the tilt actuator 58, and causes the two pressing members 12 of the polishing head 10D to tilt in the second direction D2 with respect to the specified pressing direction CL due to the friction generated between the two pressing members 12 of the polishing head 10D and the polishing belt 2B.

[0150] With the pressing member 12 of the polishing head 10A tilted in the second direction D2, the polishing head 10A further presses the polishing belt 2A against the surface to be processed (the first surface 5a) of the substrate W. With the two pressing members 12 of the polishing head 10D tilted in the second direction D2, the polishing head 10D further presses the polishing belt 2B against the surface to be processed (the first surface 5a) of the substrate W. Thus, as described with reference to Figure 9A and Figure 9B , the radially inner region (including the center O1 of the substrate W) in the central portion P1 of the substrate W is polished, and as described with reference to Figure 15A and Figure 15B , the radially inner region in the edge portion P4 of the substrate W is polished.

[0151] In step S206, the motion control unit 100 issues an instruction to the pressing actuators 15 of the polishing heads 10A to 10D to stop the respective pressing actuators 15, and causes the pressing members 12 of the polishing heads 10A to 10D to descend. The pressing members 12 of the polishing heads 10A to 10D separate from the polishing belts 2A and 2B from the substrate W, respectively.

[0152] In step S207, the polishing of the substrate W by the polishing heads 10A to 10D is completed.

[0153] When adopting this embodiment, with the two pressing members 12 of the polishing head 10D tilted in the first direction D1, the polishing belt 2B is pressed against the surface to be processed of the substrate W, and then with the two pressing members 12 tilted in the second direction D2 opposite to the first direction D1, the polishing belt 2B is pressed against the surface to be processed. That is, during the polishing of the substrate W, the inclination of the two pressing members 12 of the polishing head 10D is changed from the first direction D1 to the second direction D2 opposite to the first direction D1. Thus, even when warping occurs in a part of the edge portion P4 of the substrate W, the pressing member 12 can uniformly press the polishing belt 2B against the entire edge portion P4 of the substrate W. As a result, the entire surface to be processed of the substrate W can be polished uniformly.

[0154] In one embodiment, the grinding head 10D for grinding the edge portion P4 of the substrate W may also have the same configuration as the grinding head 10A having the inclination adjustment mechanism 50 described with reference to Figures 4 to 9B , that is, a grinding head having a pressing member 12.

[0155] In one embodiment, the grinding head 10B for grinding the inner middle portion P2 of the substrate W may also be a grinding head having the same configuration as the grinding head 10A having the inclination adjustment mechanism 50 described with reference to Figures 4 to 9B , that is, a grinding head having a pressing member 12. Alternatively, the grinding head 10B may also be a grinding head having the same configuration as the grinding head 10D having the inclination adjustment mechanism 50 described with reference to Figures 11 to 16 , that is, a grinding head having two pressing members 12. Similarly, the grinding head 10C for grinding the outer middle portion P3 of the substrate W may also be a grinding head having the same configuration as the grinding head 10A having the inclination adjustment mechanism 50 described with reference to Figures 4 to 9B , that is, a grinding head having a pressing member 12. Alternatively, the grinding head 10C may also be a grinding head having the same configuration as the grinding head 10D having the inclination adjustment mechanism 50 described with reference to Figures 11 to 16 , that is, a grinding head having two pressing members 12.

[0156] In one embodiment, the grinding head 10A for grinding the central portion P1 of the substrate W may also be a grinding head having the same configuration as the grinding head 10D having the inclination adjustment mechanism 50 described with reference to Figures 11 to 16 , that is, a grinding head having two pressing members 12.

[0157] Figure 17 is a cross-sectional view showing another embodiment of the grinding head 10A. Since the configuration and operation of the grinding head 10A in this embodiment which is not particularly described are the same as those of the embodiment described with reference to Figure 5 and Figure 6 , the repeated description thereof is omitted. Figure 17 shows a partial illustration of the grinding head 10A omitted. In this embodiment, the screw 69 is screwed into the screw hole 68 provided in the inclined member 56. Figure 17 shows a state in which the pressing member holder 13 and the pressing member 12 are inclined in the first direction D1 by the inclination adjustment mechanism 50. As shown in Figure 17As shown, when viewed from the axial direction of the support shaft 51, the screw 69 is disposed on the opposite side of the piston rod 59 of the tilting actuator 58 in the longitudinal direction of the abrasive belt 2A (the traveling direction Z1 of the abrasive belt 2A). The screw 69 is disposed on the upstream side of the support shaft 51 in the traveling direction Z1 of the abrasive belt 2A. The screw 69 has a function of a stopper that limits the angle of the tilting member 56 that tilts about the support shaft 51, that is, the angles of the pressing member 12 and the pressing member holder 13 that tilt.

[0158] In the present embodiment, the screw hole 68 opens in the plane of the tilting member 56 that faces the second protruding portion 73 of the base member 55. The screw hole 68 extends in the pressing direction CL of the pressing member 12 within the tilting member 56. The screw 69 protrudes downward from the tilting member 56 toward the base member 55. The tip of the screw 69 is configured to be able to contact the upper surface of the base member 55 (the second protruding portion 73 in the present embodiment). The tilting actuator 58 can tilt the pressing member 12 and the pressing member holder 13 about the support shaft 51, and the tip of the screw 69 directly contacts the upper surface of the base member 55. That is, when the pressing member 12 and the pressing member holder 13 are tilted integrally with the tilting member 56 by the tilting actuator 58, the tilting angle about the support shaft 51 can be changed by the relative position of the screw 69 with respect to the base member 55.

[0159] In one embodiment, the screw 69 may not protrude from the tilting member 56. In this case, the tilting actuator 58 can tilt the pressing member 12 and the pressing member holder 13 about the support shaft 51 until the lower surface of the tilting member 56 contacts the base member 55.

[0160] As Figure 17 shown, when the tilting member 56, the pressing member holder 13, and the pressing member 12 tilt in the first direction D1 with respect to the pressing direction CL of the pressing member 12, the tip of the screw 69 protruding downward from the tilting member 56 contacts the upper surface of the base member 55. The pressure of the compressed gas supplied from the compressed gas supply line 65 of the tilting actuator 58 raises the tip of the piston rod 59 and maintains a pressure value necessary for the tilting member 56 above before the tip of the screw 69 contacts the upper surface of the base member 55. Therefore, the tilting angles of the tilting member 56, the pressing member holder 13, and the pressing member 12 are determined by the protruding amount of the screw 69 protruding from the tilting member 56 toward the base member 55 (more specifically, the second protruding portion 73). The protruding amount of the screw 69 can be adjusted by the screwing condition of the screw 69 with respect to the screw hole 68.

[0161] Referring Figure 17 to the slope adjustment mechanism 50 described can also be applied to the reference Figures 11 to 16The polishing head 10D described. In addition, referring to Figure 17 The inclination adjustment mechanism 50 described can also be applied to the polishing head 10B for polishing the inner middle portion P2 of the substrate W and the polishing head 10C for polishing the outer middle portion P3 of the substrate W.

[0162] Figure 18 It is a sectional view showing another embodiment of the polishing head 10A, Figure 19 It shows Figure 18 A top view of the base member 55 of the polishing head 10A shown. Since the configuration and operation of the polishing head 10A of the present embodiment without special description are the same as those of the polishing head 10A described with reference to Figure 5 And Figure 6 The configuration and operation of the polishing head 10A described, the repeated description thereof is omitted. In the present embodiment, the above-mentioned tilt movement actuator 58 is referred to as the first tilt movement actuator 58, the rod 59 is referred to as the first rod 59, the screw hole 68 is referred to as the first screw hole 68, and the screw 69 is referred to as the first screw 69.

[0163] The inclination adjustment mechanism 50 of the present embodiment further includes: a second tilt movement actuator 90 that tilts and moves the tilt member 56 in the second direction D2; and a second screw 99 that is screwed into a second screw hole 98 provided in the base member 55. The second tilt movement actuator 90 is located on the side opposite to the tilt movement actuator 58 with respect to the support shaft 51.

[0164] The second tilt movement actuator 90 is arranged on the upstream side of the support shaft 51 in the traveling direction Z1 of the polishing belt 2A. The second tilt movement actuator 90 includes a second rod 91 that pushes up the tilt member 56. The second tilt movement actuator 90 of the present embodiment is an air cylinder, and the second rod 91 is a piston rod. As Figure 18 Shown, the second tilt movement actuator 90 includes: a piston rod 91; a cylinder 92; a lid 94 that blocks the space in the cylinder 92; and a compressed gas supply line 97 that supplies compressed gas (such as compressed air) into the cylinder 92. The piston rod 91 is arranged inside the cylinder 92. The second tilt movement actuator 90 of the present embodiment is integrally formed with the second protruding portion 73 of the base member 55. The second tilt movement actuator 90 is not fixed to the housing 18 and can move relatively up and down with respect to the housing 18. That is, the second tilt movement actuator 90 causes the first tilt movement actuator 58, the base member 55, the tilt member 56, the pressing member 12, and the pressing member holder 13 to move up and down integrally by pressing the actuator 15.

[0165] The configuration of the second tilt actuator 90 is not limited as long as the second rod 91 can push up the tilt member 56, and it is not limited to this embodiment. In one embodiment, the second tilt actuator 90 can also be an electric actuator that operates by an electric motor or an electromagnetic actuator that operates by electromagnetic force.

[0166] The inside of the cylinder 92 communicates with the compressed gas supply line 97 through the through hole 94a formed in the cover 94. When compressed gas is supplied from the compressed gas supply line 97 into the cylinder 92, the second tilt actuator 90 is driven, and the piston rod 91 moves (ascends) in its axial direction. The moving direction of the piston rod 91 is a direction parallel to the pressing direction CL of the pressing member 12. The piston rod 91 is configured to penetrate the rod hole 95 of the second protruding portion 73 provided in the base member 55 and can protrude upward from the base member 55. The rod hole 95 extends through the second protruding portion 73 of the base member 55. The front end of the piston rod 91 is configured to be able to contact the lower surface of the tilt member 56. The second tilt actuator 90 raises the piston rod 91 and can tilt the pressing member 12 and the pressing member holder 13 integrally with the tilt member 56 with the support shaft 51 as a fulcrum.

[0167] In one embodiment, the compressed gas supply line 65 of the first tilt actuator 58 and the compressed gas supply line 97 of the second tilt actuator 90 are connected to a switching valve (not shown). The switching valve is connected to a compressed gas supply source (not shown) and can introduce the compressed gas from the compressed gas supply source into either the compressed gas supply line 65 or the compressed gas supply line 97. An example of the switching valve can be a 4-port solenoid valve.

[0168] As Figure 18 and Figure 19 shown, when viewed from the axial direction of the support shaft 51, the second screw 99 and the piston rod 91 of the second tilt actuator 90 are respectively arranged on both sides of the support shaft 51 (symmetrically with respect to the support shaft 51). The second screw 99 is arranged on one side of the support shaft 51, and the piston rod 91 is arranged on the opposite side of the support shaft 51. That is, the second screw 99 is arranged on the side opposite to the piston rod 91 with respect to the support shaft 51. The second screw 99 is arranged on the downstream side of the support shaft 51 in the traveling direction Z1 of the abrasive belt 2A. The second screw 99 has a function of a stopper that limits the angle of the tilt member 56 tilted around the support shaft 51 by the second tilt actuator 90, that is, limits the angle of the tilted pressing member 12 and the pressing member holder 13.

[0169] The second screw 99 is screwed into the second screw hole 98 of the first protrusion 72 provided on the base member 55. The second screw hole 98 extends through the first protrusion 72 of the base member 55. The second screw 99 protrudes upward from the base member 55 toward the inclined member 56. The front end of the second screw 99 is configured to be able to contact the lower surface of the inclined member 56. The second tilt movement actuator 90 can tilt the pressing member 12 and the pressing member holder 13 about the support shaft 51 until the lower surface of the inclined member 56 contacts the front end of the second screw 99. That is, the tilt angle of the pressing member 12 and the pressing member holder 13 when tilted by the second tilt movement actuator 90 can be changed by the relative position of the second screw 99 with respect to the inclined member 56.

[0170] In one embodiment, the second screw 99 may not protrude from the base member 55. In this case, the second tilt movement actuator 90 can tilt the pressing member 12 and the pressing member holder 13 about the support shaft 51 until the lower surface of the inclined member 56 contacts the base member 55.

[0171] The positions of the first tilt movement actuator 58 and the first screw 69 in the base member 55 are not limited as long as the lower surface of the inclined member 56 tilted in the first direction D1 by the first tilt movement actuator 58 contacts the first screw 69, and are not limited to this embodiment. Similarly, the positions of the second tilt movement actuator 90 and the second screw 99 in the base member 55 are not limited as long as the lower surface of the inclined member 56 tilted in the second direction D2 by the second tilt movement actuator 90 contacts the second screw 99, and are not limited to this embodiment. For example, the piston rod 59 of the first tilt movement actuator 58 may be disposed outside the second screw 99, or the positions of the piston rod 59 and the second screw 99 may be exchanged. The piston rod 91 of the second tilt movement actuator 90 may be disposed outside the first screw 69, or the positions of the piston rod 91 and the first screw 69 may be exchanged.

[0172] Since the operation of tilting the pressing member holder 13 and the pressing member 12 in the first direction D1 by the first tilt movement actuator 58 is the same as the embodiment described with reference to Figure 7 it, the repeated description thereof is omitted.

[0173] Figure 20 is a cross-sectional view showing a state in which the pressing member holder 13 and the pressing member 12 are tilted in the second direction D2 by the second tilt movement actuator 90. As Figure 20As shown, in the inclination adjustment mechanism 50 of the present embodiment, the second inclination movement actuator 90 is configured to incline the pressing member holder 13 and the pressing member 12 in the second direction D2. When the piston rod 91 is raised by driving the second inclination movement actuator 90, the front end of the piston rod 91 contacts the lower surface of the inclined member 56. As a result, the pressing member holder 13 and the pressing member 12 are integrally inclined in the second direction D2 with respect to the pressing direction CL of the pressing member 12 about the support shaft 51 together with the inclined member 56.

[0174] When the inclined member 56, the pressing member holder 13, and the pressing member 12 are inclined in the second direction D2, the inclined member 56 contacts the front end of the second screw 99 that protrudes upward from the base member 55. The pressure of the compressed gas supplied from the compressed gas supply line 97 of the second inclination movement actuator 90 raises the front end of the piston rod 91 and maintains a pressure value above the value necessary to incline the inclined member 56 before contacting the front end of the second screw 99. Therefore, the inclination angle of the inclined member 56, the pressing member holder 13, and the pressing member 12 in the second direction D2 is determined by the protruding amount of the second screw 99 that protrudes from the base member 55 (more specifically, the first protrusion 72) toward the inclined member 56. The protruding amount of the second screw 99 can be adjusted by the screwing condition of the second screw 99 with respect to the second screw hole 98.

[0175] In the present embodiment, when the pressing member 12 is moved (raised) in the pressing direction CL by the pressing actuator 15 (refer to Figure 18 ), the second inclination movement actuator 90 inclines the pressing member holder 13 and the pressing member 12 in the second direction D2. When the pressing member holder 13 and the pressing member 12 are inclined in the second direction D2 by the second inclination movement actuator 90, similar to the embodiment described with reference to Figure 9A and Figure 9B , the upstream side portion of the pressing member 12 in the traveling direction Z1 of the abrasive belt 2A presses the abrasive belt 2A against the surface to be processed (the first surface 5a) of the substrate W. As a result, the inner region in the radial direction of the central portion P1 of the substrate W (refer to Figure 3 ) is ground. This inner region in the radial direction is a region including the center O1 of the substrate W.

[0176] During the grinding of the substrate W, the timing of changing the inclination of the pressing member 12 of the grinding head 10A, that is, the timing of stopping the first inclination movement actuator 58 and driving the second inclination movement actuator 90, is determined in advance based on the grinding results of the previously ground substrates and the like. Specifically, the timing of stopping the first inclination movement actuator 58 and driving the second inclination movement actuator 90 is the timing when the grinding amount of the entire central portion P1 of the substrate W becomes uniform.

[0177] Figure 21 is a flowchart showing an example of the substrate processing method of the present embodiment. Since steps S301 to S304 are the same as steps S101 to S104 shown in Figure 10 , the repeated description thereof is omitted.

[0178] In step S305, the motion control unit 100 issues an instruction to the first tilting actuator 58 of the polishing head 10A to stop the driving of the first tilting actuator 58. Furthermore, the motion control unit 100 issues an instruction to the second tilting actuator 90, and tilts the pressing member 12 of the polishing head 10A in the second direction D2 with respect to the specified pressing direction CL through the second tilting actuator 90. More specifically, the motion control unit 100 issues an instruction to the second tilting actuator 90 of the polishing head 10A to drive the second tilting actuator 90, raise the piston rod 91, and integrally tilt the pressing member 12 and the pressing member holder 13 with respect to the specified pressing direction CL in the second direction D2 together with the tilting member 56. In a state where the pressing member 12 of the polishing head 10A is tilted in the second direction D2, the polishing belt 2A is further pressed against the surface to be processed (the first surface 5a) of the substrate W. Thus, the inner region in the radial direction (including the center O1 of the substrate W) of the central portion P1 of the substrate W is polished in the same manner as in the embodiment described with reference to Figure 9A and Figure 9B .

[0179] In step S306, the motion control unit 100 issues an instruction to the pressing actuators 15 of the polishing heads 10A to 10D to stop the driving of each pressing actuator 15 and lower the pressing members 12 of the polishing heads 10A to 10D. The pressing members 12 of the polishing heads 10A to 10D separate the polishing belts 2A and 2B from the substrate W, respectively.

[0180] In step S307, the polishing of the substrate W by the polishing heads 10A to 10D is completed.

[0181] The inclination adjustment mechanism 50 including the second tilting actuator 90 and the second screw 99 can also be applied to the polishing head 10D described with reference to Figures 11 to 16 . In addition, the inclination adjustment mechanism 50 including the second tilting actuator 90 and the second screw 99 can also be applied to the polishing head 10B for polishing the inner intermediate portion P2 of the substrate W and the polishing head 10C for polishing the outer intermediate portion P3 of the substrate W.

[0182] Figure 22 is a cross-sectional view showing still another embodiment of the polishing head 10A. Since the configuration and operation of the polishing head 10A of the present embodiment are not particularly described and are the same as those described with reference to Figures 17 to 21Since the implementation manners to be described are the same, repeated descriptions thereof are omitted. In the present embodiment, the first screw 69 is screwed into the first screw hole 68 provided in the inclined member 56, and the second screw 99 is screwed into the second screw hole 98 provided in the inclined member 56.

[0183] As Figure 22 shown, when viewed from the axial direction of the support shaft 51, the first screw 69 is disposed on the side opposite to the piston rod 59 of the first tilt movement actuator 58 in the length direction of the abrasive belt 2A (the traveling direction Z1 of the abrasive belt 2A). The first screw 69 is disposed on the upstream side of the support shaft 51 in the traveling direction Z1 of the abrasive belt 2A. The first screw 69 has a function as a stopper that limits the angle of the inclined member 56 that tilts about the support shaft 51 in the first direction D1, that is, limits the angles of the pressing member 12 and the pressing member holder 13 that tilt.

[0184] When viewed from the axial direction of the support shaft 51, the second screw 99 is disposed on the side opposite to the piston rod 91 of the second tilt movement actuator 90 in the length direction of the abrasive belt 2A (the traveling direction Z1 of the abrasive belt 2A). The second screw 99 is disposed on the downstream side of the support shaft 51 in the traveling direction Z1 of the abrasive belt 2A. The second screw 99 has a function as a stopper that limits the angle of the inclined member 56 that tilts about the support shaft 51 in the second direction D2, that is, limits the angles of the pressing member 12 and the pressing member holder 13 that tilt.

[0185] In the present embodiment, the first screw hole 68 opens in the plane of the inclined member 56 that faces the second protrusion 73 of the base member 55. The first screw hole 68 extends in the inclined member 56 in a direction parallel to the pressing direction CL of the pressing member 12. The first screw 69 protrudes downward from the inclined member 56 toward the base member 55. The front end of the first screw 69 is located above (directly above) the front end of the piston rod 91 in the rod hole 95, and is configured to be able to contact the front end of the piston rod 91 in the rod hole 95.

[0186] The first tilting actuator 58 can tilt the pressing member 12 and the pressing member holder 13 about the pivot 51 until the front end of the first screw 69 contacts the front end of the piston rod 91 of the second tilting actuator 90. That is, when the pressing member 12 and the pressing member holder 13 are tilted integrally with the tilting member 56 by the first tilting actuator 58, the tilting angle about the pivot 51 can be changed by the relative position of the first screw 69 with respect to the piston rod 91. The tilting angles of the tilting member 56, the pressing member holder 13, and the pressing member 12 are determined by the protruding amount of the first screw 69 protruding from the tilting member 56 toward the base member 55 (more specifically, the second protrusion 73). The protruding amount of the first screw 69 can be adjusted by the screwing condition of the first screw 69 with respect to the first screw hole 68.

[0187] In the present embodiment, the second screw hole 98 opens in the plane of the tilting member 56 facing the first protrusion 72 of the base member 55. The second screw hole 98 extends in the tilting member 56 in a direction parallel to the pressing direction CL of the pressing member 12. The second screw 99 protrudes downward from the tilting member 56 toward the base member 55. The front end of the second screw 99 is located above (directly above) the piston rod 59 of the first tilting actuator 58 and is configured to be able to contact the front end of the piston rod 59 of the first tilting actuator 58 in the rod hole 63.

[0188] The second tilting actuator 90 can tilt the pressing member 12 and the pressing member holder 13 about the pivot 51 until the front end of the second screw 99 contacts the front end of the piston rod 59 of the first tilting actuator 58. That is, when the pressing member 12 and the pressing member holder 13 are tilted integrally with the tilting member 56 by the second tilting actuator 90, the tilting angle about the pivot 51 can be changed by the relative position of the second screw 99 with respect to the piston rod 59. The tilting angles of the tilting member 56, the pressing member holder 13, and the pressing member 12 are determined by the protruding amount of the second screw 99 protruding from the tilting member 56 toward the base member 55 (more specifically, the first protrusion 72). The protruding amount of the second screw 99 can be adjusted by the screwing condition of the second screw 99 with respect to the second screw hole 98.

[0189] In the present embodiment, the front end of the first screw 69 is located above (directly above) the piston rod 91 of the second tilting actuator 90. However, in one embodiment, the front end of the first screw 69 may also be located above the base member 55. That is, as referred to Figures 18 to 21Similarly, in the illustrated embodiment, when the inclination adjustment mechanism 50 is viewed from above, the positions of the first screw 69 and the piston rod 91 of the second tilt movement actuator 90 may also be offset. At this time, the first tilt movement actuator 58 can tilt the pressing member 12 and the pressing member holder 13 about the support shaft 51 until the tip of the first screw 69 contacts the upper surface of the base member 55.

[0190] Similarly, in the present embodiment, the tip of the second screw 99 is located above (directly above) the piston rod 59 of the first tilt movement actuator 58. However, in one embodiment, the tip of the second screw 99 may also be located above the base member 55. That is, similar to the embodiment described with reference to Figures 18 to 21 Similarly, when the inclination adjustment mechanism 50 is viewed from above, the positions of the second screw 99 and the piston rod 59 of the first tilt movement actuator 58 may also be offset. At this time, the second tilt movement actuator 90 can tilt the pressing member 12 and the pressing member holder 13 about the support shaft 51 until the tip of the second screw 99 contacts the upper surface of the base member 55.

[0191] In one embodiment, the first screw 69 may not protrude from the inclined member 56. At this time, the first tilt movement actuator 58 can tilt the pressing member 12 and the pressing member holder 13 about the support shaft 51 until the lower surface of the inclined member 56 contacts the base member 55. Similarly, in one embodiment, the second screw 99 may not protrude from the inclined member 56. At this time, the second tilt movement actuator 90 can tilt the pressing member 12 and the pressing member holder 13 about the support shaft 51 until the lower surface of the inclined member 56 contacts the base member 55.

[0192] The inclination adjustment mechanism 50 further includes: a first fixing screw 111 that fixes the relative position of the first screw 69 with respect to the first screw hole 68; and a second fixing screw 113 that fixes the relative position of the second screw 99 with respect to the second screw hole 98. The first fixing screw 111 is screwed into a first fixing screw hole 110 provided in the inclined member 56. The first fixing screw hole 110 extends in a direction orthogonal to the axial direction of the first screw 69 and communicates with the first screw hole 68. The first fixing screw 111 fixes the relative position of the first screw 69 with respect to the first screw hole 68 by pressing the first screw 69 in the first screw hole 68 against the inner surface of the inclined member 56 that forms the first screw hole 68.

[0193] The second fixing screw 113 is screwed into the second fixing screw hole 112 provided in the inclined member 56. The second fixing screw hole 112 extends in a direction orthogonal to the axial direction of the second screw 99 and communicates with the second screw hole 98. The second fixing screw 113 fixes the relative position of the second screw 99 with respect to the second screw hole 98 by pressing the second screw 99 in the second screw hole 98 against the inner surface of the inclined member 56 that constitutes the second screw hole 98. The first fixing screw 111 and the second fixing screw hole 112 can prevent changes in the protruding amounts of the first screw 69 and the second screw 99 due to vibrations of the polishing substrate W. In one embodiment, the slope adjustment mechanism 50 may not include the first fixing screw 111 and the second fixing screw 113.

[0194] Figure 23A and Figure 23B is a longitudinal sectional view showing Figure 22 one embodiment of the first screw 69 shown. The first screw 69 has: a screw body 69b; and a ball portion 69c fitted to the end portion of the screw body 69b. Figure 23A The ball portion 69c of the first screw 69 shown has a spherical body with a flat surface, and the front end 69a of the first screw 69 has a flat surface shape. Figure 23A The front end 69a of the first screw 69 shown Figure 22 is in surface contact with the front end of the piston rod 91 (or the upper surface of the base member 55) of the second tilt movement actuator 90 shown.

[0195] Figure 23B The ball portion 69c of the first screw 69 shown is a sphere, and the front end 69a of the first screw 69 has a spherical surface shape. Figure 23B The front end 69a of the first screw 69 shown Figure 22 is in point contact with the front end of the piston rod 91 (or the upper surface of the base member 55) of the second tilt movement actuator 90 shown. Figure 23A and Figure 23B Regardless of the relative position of the first screw 69 with respect to the first screw hole 68, the first screw 69 shown can make the contact surface or contact point of the front end 69a with respect to the piston rod 91 stable. Therefore, the front end 69a of the first screw 69 can stably contact the front end of the piston rod 91. Referring to Figure 23A and Figure 23B The shape of the first screw 69 described can also be applied to the second screw 99.

[0196] Since the first screw 69 ( Figure 23A and Figure 23B the ball portion 69c in the embodiment shown) repeatedly contacts the piston rod 91 of the second tilt movement actuator 90, it can also be made of a high-strength material. Similarly, since the second screw 99 ( Figure 23A and Figure 23BIn the illustrated embodiment, the spherical portion 69c) repeatedly contacts the piston rod 59 of the first tilting movement actuator 58, so it can also be made of a high-strength material. The first screw 69 and the second screw 99 ( Figure 23A and Figure 23B In the illustrated embodiment, examples of the material of the spherical portion 69c) include metals such as steel, stainless steel, and brass, polyoxymethylene (POM), ceramics, etc.

[0197] Figure 22 The piston rods 59 and 91 shown can also be made of a high-strength material. Examples of the material of the piston rods 59 and 91 include stainless steel, ceramics, etc. When the piston rods 59 and 91 are made of stainless steel, surface treatment (plating treatment) can also be performed as an anti-rust measure. The shape of the piston rods 59 and 91 is not limited to this embodiment. For example, the end faces of the piston rods 59 and 91 can also have a flat shape.

[0198] Referring to Figure 22 the first fixing screw 111 described and referring to Figure 23A and Figure 23B the embodiment of the first screw 69 described can be applied to the embodiment described with reference to Figure 17 In addition, referring to Figure 22 and Figure 23A and Figure 23B the inclination adjustment mechanism 50 described can also be applied to the polishing head 10D described with reference to Figures 11 to 16 Furthermore, referring to Figure 22 and Figure 23A and Figure 23B the inclination adjustment mechanism 50 described can also be applied to the polishing head 10B for the inner middle portion P2 of the polishing substrate W and the polishing head 10C for the outer middle portion P3 of the polishing substrate W.

[0199] Figure 24 is a side view showing another embodiment of the substrate processing apparatus. Since the configuration of the substrate processing apparatus of this embodiment is not particularly described and is the same as the configuration of the substrate processing apparatus described with reference to Figure 1 and Figure 2 the repeated description thereof is omitted. The configuration of the substrate holding portion 120 of the substrate processing apparatus of this embodiment is different from the configuration of the substrate holding portion 20 of the substrate processing apparatus described with reference to Figure 1 and Figure 2 and further includes a table circular movement mechanism 130 that circularly moves the polishing heads 10A to 10D and the polishing belt supply mechanisms 30A and 30B.

[0200] The substrate holding unit 120 includes: a plurality of rollers 125 capable of contacting the peripheral portion of the substrate W; and a roller rotation device (not shown) for rotating the plurality of rollers 125 at the same speed. The substrate W is horizontally held by the substrate holding unit 120 with its first surface 5a facing downward. In this embodiment, four rollers 125 are provided, but three or more than five rollers may also be provided.

[0201] A plurality of polishing heads 10A to 10D are arranged below the substrate W held by the substrate holding unit 120. The table circular motion mechanism 130 is arranged below the polishing heads 10A to 10D and the polishing belt supply mechanisms 30A, 30B. The support members 11A for supporting the polishing heads 10A, 10C, the support members 11B for supporting the polishing heads 10B, 10D, and the polishing belt supply mechanisms 30A, 30B are connected to the table circular motion mechanism 130.

[0202] The table circular motion mechanism 130 includes: a table motor 132, a crankshaft 134 fixed to the table motor 132, a worktable 141, a base 142, and a plurality of eccentric joints 135. The table motor 132 is arranged below the base 142 and fixed to the lower surface of the base 142. The crankshaft 134 penetrates the base 142 and extends upward. The worktable 141 is connected to the plurality of eccentric joints 135 and the crankshaft 134. The base 142 is connected to the plurality of eccentric joints 135. The worktable 141 is connected to the base 142 via the plurality of eccentric joints 135 and the crankshaft 134. Figure 24 Only two eccentric joints 135 are depicted, however, the table circular motion mechanism 130 includes at least two eccentric joints 135.

[0203] The front end of the crankshaft 134 is eccentric from the axis of the table motor 132 by a distance e2. Thus, when the table motor 132 is driven, the worktable 141 performs a circular motion with a radius of e2. Since the worktable 141 is supported by the plurality of eccentric joints 135, when the worktable 141 performs a circular motion, the worktable 141 itself does not rotate. The eccentricity of the plurality of eccentric joints 135 is the same as the eccentricity of the worktable 141. The polishing heads 10A to 10D and the polishing belt supply mechanisms 30A, 30B are fixed to the worktable 141.

[0204] When the table circular motion mechanism 130 operates, the polishing heads 10A to 10D and the polishing belt supply mechanisms 30A, 30B perform a circular motion integrally. Therefore, the substrate W held by the substrate holding unit 120 performs a circular motion relative to the polishing heads 10A to 10D.

[0205] The roller rotation device of the substrate holding unit 120 and the table motor 132 of the table circular motion mechanism 130 are electrically connected to the operation control unit 100. The operations of the substrate holding unit 120 and the table circular motion mechanism 130 are controlled by the operation control unit 100.

[0206] The polishing head 10A for the central portion P1 of the polishing substrate W in this embodiment (refer to Figure 3 ) has the same configuration as the polishing head 10A provided with the inclination adjustment mechanism 50 described with reference to Figures 4 to 10 . In one embodiment, the polishing head 10A may also be a polishing head having the same configuration as the polishing head 10A described with reference to Figure 17 , Figures 18 to 21 , Figure 22 , Figure 23A , and Figure 23B . Or, the polishing head 10A may also be a polishing head having the same configuration as the polishing head 10D provided with the inclination adjustment mechanism 50 described with reference to Figures 11 to 16 .

[0207] The polishing heads 10B, 10C, and 10D are polishing heads provided with a universal joint (not shown) that allows the pressing member 12 to tilt in all directions with respect to the movable shaft 16. In one embodiment, the polishing head 10D for the edge portion P4 of the polishing substrate W (refer to Figure 3 ) may also have the same configuration as the polishing head 10D provided with the inclination adjustment mechanism 50 described with reference to Figures 11 to 16 . In one embodiment, the polishing head 10D for the edge portion P4 of the polishing substrate W may also have the same configuration as the polishing head 10A provided with the inclination adjustment mechanism 50 described with reference to Figures 4 to 10 , Figure 17 , Figures 18 to 21 , Figure 22 , Figure 23A , and Figure 23B .

[0208] The polishing head provided with the above inclination adjustment mechanism 50 is not limited to a substrate processing apparatus that polishes a substrate by relatively circularly moving the substrate and the polishing head, and can also be applied to a substrate processing apparatus that rotates the substrate about its axis to polish the substrate without relatively circularly moving the substrate and the polishing head.

[0209] The polishing head equipped with the above-mentioned inclination adjustment mechanism 50 is applicable as an example of a processing head to a polishing apparatus for polishing a surface to be processed of a substrate, but it can also be applicable to a cleaning head of a cleaning apparatus for cleaning a surface to be processed of a substrate. Since the configuration and operation of the substrate processing apparatus equipped with the cleaning head are the same as those of the substrate processing apparatus of the above-mentioned embodiment, the repeated description thereof is omitted. When cleaning the substrate, a cleaning belt, which is an example of a processing belt, is used instead of the polishing belt. The cleaning belt is, for example, a cleaning belt made of cloth. In a substrate processing apparatus for cleaning a substrate, while the pressing member of the cleaning head equipped with the inclination adjustment mechanism 50 is inclined in a first direction with respect to the pressing direction of the pressing member, the cleaning belt is pressed against the surface to be processed of the substrate, and then while the pressing member of the cleaning head is inclined in a second direction opposite to the first direction with respect to the pressing direction of the pressing member, the cleaning belt is pressed against the surface to be processed of the substrate. Thereby, the entire surface to be processed of the substrate can be cleaned uniformly.

[0210] The above-mentioned embodiment is described for the purpose of enabling a person with ordinary knowledge in the technical field to which the present invention pertains to implement the present invention. A person skilled in the art can of course form various variations of the above-mentioned embodiment, and the technical idea of the present invention can also be applied to other embodiments. Therefore, the present invention is not limited to the described embodiments, but is interpreted most broadly in accordance with the technical idea defined by the claims.

[0211] Industrial Applicability

[0212] The present invention can be used in a substrate processing method for processing substrates such as wafers. In addition, the present invention can be used in a processing head for pressing a processing belt against a substrate such as a wafer and a substrate processing apparatus equipped with such a processing head.

[0213] Reference Signs

[0214] 2A, 2B: Polishing Belt

[0215] 5a: First Surface

[0216] 5b: Second Surface

[0217] 10A to 10D: Polishing Head

[0218] 11A, 11B: Support Member

[0219] 12: Pressing Member

[0220] 13: Pressing Member Holder

[0221] 13a: Skirt Portion

[0222] 15: Pressing Actuator

[0223] 16: Movable Shaft

[0224] 18: Housing

[0225] 18A: Housing main body

[0226] 18B: Cover

[0227] 20: Substrate holding part

[0228] 25: Roller

[0229] 27: Eccentric shaft

[0230] 27a: First shaft part

[0231] 27b: Second shaft part

[0232] 29: Motor

[0233] 30A, 30B: Grinding belt supply mechanism

[0234] 31: Belt unwinding scroll bar

[0235] 32: Belt rewinding scroll bar

[0236] 33: Guide roller

[0237] 36, 37: Scroll bar motor

[0238] 40: Pressure chamber

[0239] 42: Partition wall membrane (diaphragm)

[0240] 45: Ball spline nut

[0241] 50: Taper adjustment mechanism

[0242] 51: Support shaft

[0243] 55: Base component

[0244] 55a: Through hole

[0245] 56: Tilted component

[0246] 56a: Support hole

[0247] 58: Tilt movement actuator, first tilt movement actuator (cylinder)

[0248] 59: Rod, first rod (piston rod)

[0249] 60: Cylinder

[0250] 62: Cover

[0251] 62a: Through hole

[0252] 63: Rod hole

[0253] 65: Compressed gas supply pipeline

[0254] 68: Screw hole, first screw hole

[0255] 69: Screw, first screw

[0256] 70: Central part

[0257] 72: First protruding part

[0258] 73: Second protruding part

[0259] 75: Hollow space

[0260] 80: Through hole

[0261] 81: Plug hole

[0262] 82: Plug

[0263] 90: Second tilting movement actuator (cylinder)

[0264] 91: Second rod (piston rod)

[0265] 92: Cylinder

[0266] 94: Cover

[0267] 94a: Through hole

[0268] 95: Rod hole

[0269] 97: Compressed gas supply line

[0270] 98: Second screw hole

[0271] 99: Second screw

[0272] 100: Action control part

[0273] 100a: Storage device

[0274] 100b: Arithmetic unit

[0275] 110: First fixing screw hole

[0276] 111: First fixing screw

[0277] 112: Second fixing screw hole

[0278] 113: Second fixing screw

[0279] 120: Substrate holding part

[0280] 125: Roller

[0281] 130: Table circular motion mechanism

[0282] 132: Table motor

[0283] 134: Crankshaft

[0284] 135: Eccentric joint

[0285] 141: Workbench

[0286] 142: Base

[0287] P1: Central part

[0288] P2: Inner middle part

[0289] P3: Outer middle part

[0290] P4: Edge part.

Claims

1. A substrate processing method, characterized in that, It includes the following: Rotating the substrate about the axis of the substrate; and While conveying the processing tape in the length direction of the processing tape, with the pressing member of the processing head inclined in a first direction with respect to a specified pressing direction, pressing the processing tape against the surface to be processed of the substrate through the pressing member, and then, with the pressing member inclined in a second direction opposite to the first direction with respect to the pressing direction, pressing the processing tape against the surface to be processed through the pressing member to process the surface to be processed of the substrate. The first direction and the second direction are directions along the length direction of the processing tape on the pressing member.

2. The substrate processing method according to claim 1, characterized in that Tilting the pressing member in the first direction is achieved by tilting the pressing member in the first direction through a tilting actuator. Tilting the pressing member in the second direction is achieved by the friction generated between the pressing member and the processing tape, so that the pressing member tilts in the second direction along the traveling direction of the processing tape. The first direction is a direction that slopes downward toward the upstream side in the traveling direction of the processing tape. The second direction is a direction that slopes downward toward the downstream side in the traveling direction of the processing tape.

3. The substrate processing method according to claim 1, characterized in that Tilting the pressing member in the first direction is achieved by tilting the pressing member in the first direction through a first tilting actuator. Tilting the pressing member in the second direction is achieved by tilting the pressing member in the second direction through a second tilting actuator. The first direction is a direction that slopes downward toward the upstream side in the traveling direction of the processing tape. The second direction is a direction that slopes downward toward the downstream side in the traveling direction of the processing tape.

4. The substrate processing method according to claim 1, characterized in that Processing the central portion of the surface to be processed of the substrate by pressing the processing tape against the central portion including the center of the surface to be processed of the substrate through the pressing member.

5. The substrate processing method according to claim 1, characterized in that Processing the edge portion of the surface to be processed of the substrate by pressing the processing tape against the edge portion of the surface to be processed of the substrate through the pressing member.

6. The substrate processing method according to claim 1, characterized in that Processing the inner middle portion of the surface to be processed of the substrate by pressing the processing tape against the inner middle portion of the surface to be processed of the substrate through the pressing member.

7. The substrate processing method according to claim 1, characterized in that Processing the outer middle portion of the surface to be processed of the substrate by pressing the processing tape against the outer middle portion of the surface to be processed of the substrate through the pressing member.

8. The substrate processing method according to claim 1, characterized in that The processing head is a grinding head for grinding the surface to be processed of the substrate. The processing belt is a grinding belt having abrasive grains on its surface.

9. The substrate processing method according to claim 1, wherein: The processing head is a cleaning head for cleaning the surface to be processed of the substrate. The processing belt is a cleaning belt.

10. A processing head, characterized in that, Comprising: A pressing member that presses the processing belt against the surface to be processed of the substrate; A pressing actuator that moves the pressing member in a specified pressing direction to impart a pressing force on the pressing member with respect to the surface to be processed of the substrate; and An inclination adjustment mechanism that adjusts the inclination of the pressing member with respect to the pressing direction, The inclination adjustment mechanism includes: An inclination movement actuator that inclines the pressing member with respect to the pressing direction in a first direction; and A support shaft that is perpendicular to the length direction of the processing belt, The pressing member is connected to the support shaft and can incline about the support shaft in the first direction and a second direction opposite to the first direction, The first direction and the second direction are directions along the length direction of the processing belt on the pressing member.

11. The processing head according to claim 10, wherein: The inclination adjustment mechanism further includes: A base member that supports the support shaft; and An inclination member that is connected to the support shaft and can incline about the support shaft, The inclination movement actuator has a rod that pushes up the inclination member.

12. The processing head according to claim 11, wherein: The inclination movement actuator is an air cylinder, The rod is a piston rod of the air cylinder.

13. The processing head according to claim 11, wherein: The inclination adjustment mechanism further includes a screw that is screwed into a screw hole provided in the base member, The screw and the rod are respectively arranged on both sides of the support shaft, The screw projects from the base member toward the inclination member.

14. The processing head according to claim 11, wherein: The inclination adjustment mechanism further includes a screw that is screwed into a screw hole provided in the inclination member, The screw and the rod are respectively arranged on both sides of the support shaft, The screw projects from the inclination member toward the base member.

15. The processing head according to claim 10, wherein: The processing head is a grinding head for grinding the surface to be processed of the substrate. The processing belt is a grinding belt having abrasive grains on its surface.

16. The processing head according to claim 10, wherein: The processing head is a cleaning head for cleaning the surface to be processed of the substrate. The processing belt is a cleaning belt.

17. The processing head according to claim 10, wherein: The inclination movement actuator that inclines in the first direction is a first inclination movement actuator, The inclination adjustment mechanism further includes a second inclination movement actuator that inclines the pressing member with respect to the pressing direction in the second direction.

18. The processing head according to claim 17, wherein: The slope adjustment mechanism further includes: A base member that supports the support shaft; and An inclined member that is connected to the support shaft and can be inclined about the support shaft. The first inclination movement actuator has a first rod that pushes up the inclined member. The second inclination movement actuator has a second rod that pushes up the inclined member.

19. The processing head according to claim 18, wherein: The first inclination movement actuator and the second inclination movement actuator are respectively air cylinders. The first rod and the second rod are respectively piston rods of the air cylinders.

20. The processing head according to claim 18, wherein: The slope adjustment mechanism further includes: A first screw that is screwed into a first screw hole provided in the base member; and A second screw that is screwed into a second screw hole provided in the base member. The first screw and the first rod are respectively arranged on both sides of the support shaft. The second screw and the second rod are respectively arranged on both sides of the support shaft. The first screw and the second screw protrude from the base member toward the inclined member.

21. The processing head according to claim 18, wherein: The slope adjustment mechanism further includes: A first screw that is screwed into a first screw hole provided in the inclined member; and A second screw that is screwed into a second screw hole provided in the inclined member. The first screw and the first rod are respectively arranged on both sides of the support shaft. The second screw and the second rod are respectively arranged on both sides of the support shaft. The first screw and the second screw protrude from the inclined member toward the base member.

22. A substrate processing apparatus, characterized in that, It includes: A substrate holding portion that holds a substrate and rotates the substrate; A processing tape supply mechanism that conveys a processing tape in the length direction of the processing tape; and The processing head according to any one of claims 10-21.

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