Ozone supply device and ozone supply method

Abstract

An ozone supply device according to the present invention comprises: an ozone generator (1) for generating ozone; an adsorption / desorption tower (2) for adsorbing and desorbing the ozone; an ozonized gas delivery circuit (7) for delivering ozonized gas generated by the ozone generator to the adsorption / desorption tower; and a pressurization mechanism (3) for introducing pressurized carrier gas into the adsorption / desorption tower (2). Or a pressure reducing mechanism (4) for reducing the pressure of the adsorption and desorption tower (2); an ozone buffer device (5) which contains an adsorbent for adsorbing the ozone and which suppresses fluctuations in the concentration of the introduced ozone; and a desorption gas delivery circuit (6) for delivering the ozone desorbed from the adsorption and desorption tower (2) to the ozone buffer device (5) and then supplying the ozone to a supply target.

Description

Technical Field

[0001] The present application relates to an ozone supply device and an ozone supply method.

[0002] The ozone adsorption / desorption device related to the conventional ozone supply device includes: an ozone adsorption / desorption tower, an ozone discharge line that supplies a carrier gas to the ozone adsorption / desorption tower and discharges the desorbed ozone together with the carrier gas, a temperature controller that controls the temperature of the ozone adsorption / desorption tower, a pressure controller that controls the pressure of the ozone adsorption / desorption tower, an ozone concentration control device that controls the ozone concentration, and an ozone tank that stores the desorbed ozone. By controlling the temperature and / or pressure with the ozone concentration control device, the desorbed ozone is made to have a constant concentration, and a constant flow rate is provided from the ozone tank (for example, refer to Patent Document 1).

[0003] That is, this ozone adsorption / desorption device keeps the desorbed ozone at a constant concentration by controlling the temperature and / or pressure, stores the ozone gas in the ozone tank, and then can stably desorb and supply it from the ozone tank at a constant flow rate. Prior Art Documents Patent Documents

[0004] Patent Document 1: Japanese Patent Laid-Open No. 2000-72407 Summary of the Invention Technical Problem to be Solved by the Invention

[0005] In such a device, since the ozone generator supplies ozone via the ozone adsorption / desorption tower, the ozone concentration output by desorption varies greatly according to the adsorption state of ozone in the ozone adsorption / desorption tower. Therefore, in the single-pass treatment applied in general water treatment, due to the variation in the output ozone concentration, the amount of ozone acting on the treatment object varies, and thus there is a technical problem that a stable treatment effect cannot be obtained.

[0006] In addition, in order to solve this technical problem, there is also an example of providing a buffer tank (void) for suppressing the variation in ozone concentration. However, since the required capacity of the buffer tank becomes large, it is not easy to introduce such a buffer tank into the ozone supply device.

[0007] The present application discloses a technology for solving the above problems, and its object is to provide an ozone supply device that can suppress the variation in the concentration of the ozone gas supplied to the supply object and thus stabilize it by introducing the exhaust gas in the pressurized carrier gas or the ozone gas after decompression desorption into the ozone buffer device under positive pressure conditions. Technical Means for Solving the Technical Problem

[0008] The ozone supply device disclosed in the present application is characterized by including: An ozone generator that generates ozone; An adsorption and desorption tower for adsorbing and desorbing ozone; An ozone gas transfer circuit for transferring the ozonized gas generated by the ozone generator to the adsorption and desorption tower; At least one of a pressurizing mechanism for supplying pressurized carrier gas to the adsorption and desorption tower and a decompressing mechanism for decompressing the gas in the adsorption and desorption tower; An ozone buffer device that contains an adsorbent for adsorbing ozone and suppresses the concentration variation of the ozone desorbed from and transferred from the adsorption and desorption tower; and A desorbed gas transfer circuit for transferring the ozone desorbed from the adsorption and desorption tower through the supply of the carrier gas to the ozone buffer device and supplying it from the ozone buffer device to the supply target. Advantages of the Invention

[0009] According to the ozone supply device disclosed in the present application, an ozone supply device can be provided. By introducing pressurized carrier gas into the adsorption and desorption tower under positive pressure conditions or introducing the decompressed and desorbed ozone gas into the ozone buffer device, the concentration variation of the ozone gas supplied to the supply target can be suppressed and stabilized. Description of the Drawings

[0010] Figure 1 It is a diagram for explaining the structure of the ozone supply device according to Embodiment 1. Figure 2 It is a diagram for explaining one structure of the ozone buffer device of the ozone supply device according to Embodiment 1. Figure 3 It is a diagram for explaining another structure of the ozone buffer device of the ozone supply device according to Embodiment 1. Figure 4 It is a diagram for explaining the structure of the ozone supply device according to Embodiment 2. Figure 5 It is a diagram showing an actual measurement example of measuring the ozone gas concentration of the ozone buffer device of the ozone supply device according to Embodiment 2 when entering and leaving. Figure 6 It is a diagram for explaining the structure of the ozone supply device according to Embodiment 3. Figure 7 It is a diagram for explaining the structure of the ozone supply device according to Embodiment 4. Figure 8 It is a diagram for explaining the structure of the ozone supply device according to Embodiment 5. Detailed Description of the Invention

[0011] Embodiment 1. Figure 1This is a diagram for explaining the structure of the ozone supply device according to Embodiment 1. The ozone supply device 100 of Embodiment 1 (the part surrounded by the dashed box in Figure 1 ) includes: an ozone generator 1 that generates ozone; an adsorption and desorption tower 2 that adsorbs and desorbs ozone; at least one of a pressurizing mechanism 3 that introduces a pressurized carrier gas into the adsorption and desorption tower and a depressurizing mechanism 4 that depressurizes the gas in the adsorption and desorption tower (hereinafter, also simply referred to as the depressurizing mechanism 4 for depressurizing the adsorption and desorption tower); an ozone buffer device 5 that contains an adsorbent for adsorbing ozone; and a desorbed gas transfer circuit 6 that supplies ozone gas desorbed via the ozone buffer device and using the pressurized carrier gas supplied from the adsorption and desorption tower or desorbed by the depressurization of the adsorption and desorption tower to a supply target as main structural elements.

[0012] The above-mentioned ozone generator is a device that generates an ozone-containing ozonized gas using a raw material gas supplied from a raw material gas supply unit (not shown). As the ozone generator, for example, a silent discharge type ozone generation device driven by an alternating high voltage can be used. The adsorption and desorption tower is a device that selectively adsorbs ozone contained in the ozonized gas generated by the ozone generation unit via an ozonized gas transfer circuit 7 through an adsorbent filled inside, and discharges the adsorbed ozone to a supply target. The ozone destroyed from the adsorption and desorption tower during adsorption is processed by a processing device (not shown) through an adsorption gas transfer circuit 8 and discharged outside the device after being rendered harmless. Here, as the adsorbent used in the adsorption and desorption tower, an adsorbent that preferentially adsorbs ozone contained in the ozonized gas, such as silica gel, can be used. According to the adsorption characteristics of the adsorbent, the ozone concentration on the surface of the adsorbent is higher than the ozone concentration in the ozonized gas. The adsorption and desorption tower concentrates ozone to generate concentrated ozone to increase the ozone concentration of the ozonized gas. In order to desorb the concentrated ozone adsorbed on the adsorbent in the adsorption and desorption tower from the adsorbent, a pressurizing mechanism is provided in the ozone supply device to inject a gas that will be the carrier gas for ozone desorption into the adsorption and desorption tower through the desorbed gas transfer circuit 6. The gas for desorption is, for example, oxygen. The ozone buffer device is a device that selectively adsorbs ozone contained in the ozonized gas discharged from the adsorption and desorption tower through an adsorbent filled inside, and discharges the adsorbed ozone to a supply target. As the adsorbent, an adsorbent that preferentially adsorbs ozone contained in the ozonized gas, such as silica gel, can be used.

[0013] Next, the operation of the ozone supply device of Embodiment 1 will be described. In the ozone supply device of Embodiment 1 having the above structure, by introducing the ozone gas desorbed from the adsorption-desorption tower into the ozone buffer device, it is possible to suppress the change in the ozone concentration of the desorbed ozone gas and equalize the ozone concentration supplied to the supply target. In addition, by filling the ozone buffer device with an ozone adsorbent and enclosing it, the ozone storage amount per unit volume in the ozone buffer device can be significantly increased. In addition, as a desorption unit for ozone, it includes a pressurizing mechanism for pressurizing the carrier gas or a decompression mechanism for decompressing the adsorption-desorption tower. To desorb ozone from the adsorption-desorption tower, by controlling the pressurization of the carrier gas or the decompression of the gas in the adsorption-desorption tower, the desorption of the ozone gas from the adsorption-desorption tower is promoted, and the desorbed ozone gas is introduced into the ozone buffer device. Thus, in the subsequent process, the ozone concentration can be stabilized.

[0014] Here, in the case of desorbing by introducing a pressurized carrier gas, the pressurizing mechanism is provided on the upstream side of the adsorption-desorption tower. In the case of decompression desorption, the decompression mechanism is provided between the ozone buffer device and the adsorption-desorption tower. Thus, it is possible to introduce the desorbed ozone gas into the ozone buffer device under positive pressure conditions, and the adsorbent in the ozone buffer device can be maintained in a state with high ozone adsorption performance for utilization. Therefore, the concentration of the ozone gas supplied to the supply target can be stabilized. In addition, thereby, the change in the ozone gas concentration can be suppressed within the required specifications.

[0015] For the case of the decompression mechanism, by providing it on the downstream side of the adsorption-desorption tower, a pressure difference is created by reducing the pressure on the downstream side (set to negative pressure) relative to the pressure on the upstream side, so that ozone is desorbed toward the outlet connected to the supply target. On the other hand, for the case of the pressurizing mechanism, by providing it upstream of the adsorption-desorption tower to increase the pressure on the inlet side and reducing the pressure on the outlet side relative to the pressure on the inlet side, ozone is desorbed toward the outlet connected to the supply target.

[0016] In addition, compared with the case of providing the ozone buffer device on the primary side of the decompression mechanism, when the ozone buffer device is provided on the secondary side of the decompression mechanism, the ozone adsorption amount per unit adsorption dose is larger. This is because the pressure on the secondary side of the decompression mechanism is higher than that on the primary side, and the ozone partial pressure when ozone is adsorbed on the adsorbent in the ozone buffer device becomes higher. In addition, for the case of the pressurizing mechanism, as long as there is a pressure difference larger than the pressure loss between the pressurizing mechanism and the supply target, and for the case of the decompression mechanism, as long as there is a pressure difference larger than the pressure loss between the adsorption-desorption tower and the decompression mechanism.

[0017] Here, by setting the pressure of the ozone buffer device above atmospheric pressure, high adsorption performance can be obtained. The higher the pressure of the adsorbent in the ozone buffer device, the greater the ozone adsorption amount per unit adsorbent. Therefore, it is preferable to provide a back pressure valve or the like for maintaining a higher pressure on the secondary side (supply target side) of the ozone buffer device.

[0018] A pressure gauge can also be added as a unit for confirming that the pressure in the ozone buffer device is a positive pressure, i.e., a pressure above atmospheric pressure. In addition, when using a vacuum pump as a decompression mechanism, a device with a pressure above atmospheric pressure on the secondary side of the pump is selected, and a device with a positive pressure in the ozone buffer device is preferably selected. By setting a vacuum pump with the above specifications, there is no need to perform a pressure boosting operation on the secondary side of the vacuum pump. In addition, the same applies when using an ejector. Since pressurized gas is used to press out gas toward the ozone buffer device during the suction drive of the ejector, supply can be performed above atmospheric pressure. In addition, when the ozone buffer device is provided in front of the decompression mechanism, since a relationship where the primary pressure is less than the secondary pressure is formed in the decompression mechanism, compared with the case of being provided on the secondary side, the pressure decreases, and the corresponding part where the ozone adsorption amount per unit adsorbent material becomes smaller needs to be noted.

[0019] Next, the adsorbent enclosed in the above-mentioned ozone buffer device will be described in detail with reference to the drawings. In the ozone supply device according to Embodiment 1, the adsorbent is Figure 2 or Figure 3 enclosed in the ozone buffer device in the structure shown.

[0020] In Figure 2 the ozone buffer device 5a shown, the adsorbent 52 (silica gel as a representative example of this adsorbent) is filled into a container 51 made of a material with relatively high corrosion resistance (such as a SUS container, PTFE (polytetrafluoroethylene), etc.). In addition, in order to avoid local gas supply, by adopting a structure that supplies ozone gas to the entire adsorbent using a perforated metal 53 or the like, ineffective consumption of ozone caused by thermal decomposition can be suppressed. In addition, in Figure 3 the ozone buffer device 5b shown, by allowing the refrigerant 54 to flow around the adsorbent to cool the adsorbent, the ozone adsorption amount per unit adsorbent material can be further increased.

[0021] Embodiment 2. As described above, the ozone supply device according to Embodiment 1 can achieve the purpose of making the concentration constant. In order to more actively or easily achieve this purpose of making the concentration constant, in the ozone supply device according to Embodiment 2, attention is focused on the concentration of the ozone gas entering and leaving the ozone buffer device. Hereinafter, Figure 4 , Figure 5 will be used to describe this in detail.

[0022] Figure 4 This is a diagram for explaining the structure of the ozone supply device 101 according to Embodiment 2. The structure of the ozone supply device 101 according to this Embodiment 2 (the part surrounded by the dashed line box in Figure 4 ) is different from the structure of the ozone supply device 100 according to Embodiment 1 in that a controller 9 is newly added. The controller 9 can independently control the operations of all the structural elements (ozone generator 1, adsorption and desorption tower 2, pressurizing mechanism 3, depressurizing mechanism 4, ozone buffer device 5) shown inside the dotted line box F. By providing this controller 9, the following control can be performed using Figure 5 as described below. In addition, the following is also described. The controller 9 is defined as a device that performs the transfer of three operations: saturation, concentration stabilization, and completion, and the switching control of a circuit switcher described later. Here, the circuit switcher is a device that performs the opening and closing operations of a gas circuit (such as a valve), or a device that performs a switching operation (such as a three-way valve).

[0023] Figure 5 This is a diagram showing an example of the result of measuring the ozone gas concentration entering and leaving the ozone buffer device using the ozone supply device according to Embodiment 2. The horizontal axis of the curve graph shown in this figure represents the test time (unit: minute), and the vertical axis represents the ozone concentration (unit: g / Nm 3 ). In addition, among the curves in the curve graph, the dashed line represents the change in the ozone concentration at the inlet of the ozone buffer device, and among the curves in the curve graph, the solid line represents the change in the ozone concentration at the outlet of the ozone buffer device.

[0024] In addition, in the figure, the curve during the test time of 0 - 10 minutes represents the change in the ozone concentration during the saturation process of saturating the adsorbent in the ozone buffer device. The curve during the test time of 10 - 60 minutes represents the change in the ozone concentration during the following concentration stabilization process, that is, when the ozone concentration desorbed from the adsorption and desorption tower is higher than the specified concentration, a part of the ozone is adsorbed by the adsorbent in the ozone buffer device, and when the ozone concentration desorbed from the adsorption and desorption tower is lower than the specified concentration, a part of the ozone is desorbed from the adsorbent in the ozone buffer device. The curve during the test time of 10 - 60 minutes represents the change in the ozone concentration during the completion process of desorbing the ozone gas adsorbed in the ozone buffer device.

[0025] From the comparison of the variation ranges of the above two curves (the two curves shown by the solid line and the dashed line) in this curve graph, it can be seen that the variation range of the ozone concentration at the outlet is suppressed to about 1 / 8 compared with the variation range of the ozone concentration at the inlet of the ozone buffer device. By increasing the filling amount of the adsorbent included in the ozone buffer device, this variation range can be further reduced.

[0026] In addition, in the completion process, a curve shows the disappearance of ozone. Here, "completion" means stopping the desorption of ozone gas from the adsorption / desorption tower and completing the operation of the ozone supply device. In other words, the completion process is a process of removing (desorbing) the ozone adsorbed in the ozone buffer device after the desorption of ozone gas from the adsorption / desorption tower stops. The following describes this in detail.

[0027] In the above-mentioned completion process, the desorption of ozone from the adsorption / desorption tower is stopped, dry air or raw material oxygen is introduced into the ozone buffer device, and an operation is performed to desorb the ozone adsorbed on the adsorbent in the ozone buffer device. By performing the above operation, at the end of the completion process (when the device stops), ozone can be prevented from remaining in the ozone buffer device (desorbing the remaining ozone).

[0028] As described above, the reason for the smaller change range of the outlet concentration relative to the inlet concentration is as follows. That is, as a characteristic of the adsorbent encapsulated in the ozone buffer device, when the saturated adsorption state is reached for a certain adsorption concentration P (hereinafter simply referred to as concentration P), and ozone gas with an adsorption concentration Q (hereinafter simply referred to as concentration Q) greater than concentration P is introduced, due to the increase in the ozone partial pressure of the introduced gas, the adsorbent has an ozone adsorption effect, so the ozone concentration output from the ozone buffer device becomes smaller relative to the inlet concentration A. On the other hand, when ozone gas with an adsorption concentration S (hereinafter also simply referred to as concentration S) smaller than concentration P is introduced, due to the decrease in the ozone partial pressure of the introduced gas, the adsorbent has an ozone desorption effect, so the ozone concentration B output from the ozone buffer device becomes larger relative to the concentration A at the inlet (hereinafter referred to as the inlet concentration A).

[0029] In addition, the times when the concentration change curve becomes maximum and minimum are in an opposite relationship for the inlet concentration and the outlet concentration. The phase deviation between the inlet concentration and the outlet concentration occurs for the following reasons. That is, as a characteristic of the adsorbent encapsulated in the ozone buffer device, after reaching the saturated adsorption state for the inlet concentration A, when P < Q and ozone gas with concentration Q is introduced into the ozone buffer device, the adsorption equilibrium point rises, and further ozone is adsorbed, so the concentration at the outlet shows a decreasing tendency relative to the inlet concentration A. On the other hand, when P > S and ozone gas with concentration S is introduced into the ozone buffer device, the adsorption equilibrium point decreases, and ozone is desorbed, so the concentration at the outlet shows an increasing tendency relative to the inlet concentration A. This Figure 5 is an example of the concentration change before and after the ozone buffer device. As long as it is a method for suppressing ozone concentration variation using the above effects, it is not limited to this.

[0030] Embodiment 3. Next, use Figure 6, the structure of the ozone supply device according to Embodiment 3 will be described. Figure 6 is a diagram for explaining the structure of the ozone supply device 102 (the part surrounded by the dashed box in Figure 6 ) according to Embodiment 3. The structure of the ozone supply device 102 according to this Embodiment 3 is different from the structure of the ozone supply device according to Embodiment 1, particularly in the following point: a circuit switch 10, a flow regulator 11, and a dilution gas introduction circuit 12 are newly added.

[0031] The above-mentioned circuit switch 10 is a device for switching the opening and closing of the gas circuit flowing into the pressure reduction mechanism, and is also called a circuit controller, and controls the switching connection of the desorption gas transfer circuit 6 that connects the adsorption / desorption tower and the pressure reduction mechanism 4a (here, particularly, a vacuum pump is used as the pressure reduction mechanism), and the dilution gas introduction circuit 12 that connects the flow regulator 11 and the pressure reduction mechanism. In Figure 6 , two circuit switches are shown, but it can also be one circuit switch. In addition, the above-mentioned flow regulator 11 is controlled by a controller (not shown), and adjusts the flow rate of the dilution gas flowing into the pressure reduction mechanism via the dilution gas introduction circuit 12 according to the ozone concentration desorbed in the adsorption / desorption tower.

[0032] Here, the dilution gas is a gas for diluting ozone, and can generally be dry oxygen or air, preferably high-purity oxygen such as cylinder oxygen and liquid oxygen, or high-concentration oxygen with a dew point of 10°C or lower by PSA (Pressure Swing Adsorption), VPSA (Vacuum Pressure Swing Adsorption), etc. When using the air in the atmosphere, it is best to perform a treatment to dry the dilution gas. That is, when supplying high-humidity air with a dew point of more than 10°C in the atmosphere as the dilution gas, the adsorbent in the ozone buffer device adsorbs moisture, which will hinder the adsorption of ozone.

[0033] By newly adding the circuit switch 10 to the structure of the ozone supply device according to Embodiment 1, after stopping the desorption of ozone gas from the adsorption / desorption tower in the completion process shown in Embodiment 2, dry air or raw material oxygen can be introduced into the ozone buffer device, and the ozone gas adsorbed on the adsorbent in the ozone buffer device can be desorbed. Specifically, according to the instruction from a controller (not shown), the circuit switch 10 closes the desorption gas transfer circuit 6 and performs the operation of opening the dilution gas introduction circuit 12. Through this operation, the desorption of ozone gas from the adsorption / desorption tower can be stopped, and dry air or raw material oxygen can be introduced into the ozone buffer device.

[0034] By newly adding a flow regulator 11 to the structure of the ozone supply device according to Embodiment 1, it is possible to adjust the ozone concentration of the ozone gas desorbed from the adsorption / desorption tower and preliminarily reduce the concentration variation of the ozone gas introduced into the ozone buffer device.

[0035] Embodiment 4. Next, use Figure 7 to describe the structure of the ozone supply device according to Embodiment 4. Figure 7 is a diagram for explaining the structure of the ozone supply device 103 according to Embodiment 4 (the part surrounded by the dashed line box in Figure 7 ). The structure of the ozone supply device 103 according to this Embodiment 4 is different from the structure of the ozone supply device 102 according to Embodiment 3 particularly in the following point: the deceleration mechanism is a gas ejector (hereinafter also referred to as an ejector), and the flow regulator is changed to include a compressor 13, a cooling device 14, and a first bypass circuit 15.

[0036] When using an ejector in the decompression mechanism, since pressurized driving gas is required for the suction drive of the ejector, a compressor 13 with a dehumidification function is required when the driving gas is dry air. In addition, the dry air output from the compressor 13 becomes high temperature, and if it is mixed with the ozone gas desorbed from the adsorption / desorption tower, it may promote ozone decomposition. Therefore, it is preferable to provide a cooling device 14 for cooling the dry air (refer to Figure 7 the gas flow during the saturation process and the concentration stabilization process shown by the thick arrow in

[0037] In the desorption of the ozone gas in the ozone buffer device during the completion process, according to an instruction from a (not shown) controller, the loop switch 10a (also referred to as the first loop switch 10a) closes the desorption gas transfer loop 6, and the loop switch 10b (also referred to as the second loop switch 10b) opens the first bypass circuit 15.

[0038] In the ozone supply device 103 of Embodiment 4, different from the operation in the ozone supply device 102 of Embodiment 3, when introducing a dilution gas into the decompression mechanism 4b, instead of only using the dilution gas introduction loop 12, a part of it is replaced by the first bypass circuit 15, and the first bypass circuit 15 is used. Through this loop selection, high-temperature dry air can be introduced into the ozone buffer device, and the desorption of ozone can be promoted by using high-temperature gas, and the time of the completion process can be shortened (refer to Figure 7 the gas flow during the completion process shown by the thick arrow in

[0039] Embodiment 5. Next, use Figure 8, the structure of the ozone supply device related to Embodiment 5 will be described. Figure 8 This is a diagram for explaining the structure of the ozone supply device 104 (the part surrounded by the dashed line box in Figure 8 ) related to Embodiment 5. The structure of the ozone supply device 104 related to this Embodiment 5 is different from the structure of the ozone supply device related to Embodiment 1 in that a NOx removal device 16 (here, NOx is a general term for nitrogen oxides), a NOx gas transfer circuit 17, and a second bypass circuit 18 are newly provided.

[0040] Here, the NOx gas transfer circuit 17 and the second bypass circuit 18 are used when desorbing and removing Nox from the NOx removal device 16. The NOx removal device 16 is provided on the pipe between the ozone generator and the adsorption / desorption tower in the ozone supply device. This NOx removal device is a device for removing NOx generated in the ozone generator.

[0041] As a method for removing NOx in the NOx removal device, for example, a method using an adsorbent that selectively adsorbs NOx (hereinafter referred to as "NOx adsorbent") can be cited. As the NOx adsorbent, a substance whose adsorption performance changes based on temperature change is preferred, and a substance whose NOx adsorption amount changes significantly in the range of -30°C or higher and 40°C or lower is particularly preferred. In addition, as the NOx adsorbent, an adsorbent that can desorb the adsorbed NOx through a pressure reduction mechanism is preferred. Through the pressure reduction of the pressure reduction mechanism, the NOx desorbed from the NOx adsorbent in the NOx removal device is discharged from the NOx gas transfer circuit 17. As the NOx adsorbent, for example, silica gel can be used.

[0042] When the NOx adsorbent in the Nox removal device cannot adsorb more than a specified ratio of the NOx provided from the ozone generator, it transfers to the NOx desorption process for desorbing NOx from the NOx adsorbent in the NOx removal device. In the case of transferring to the NOx desorption process, a series of processes including the saturation process, the concentration stabilization process, and the completion process are temporarily interrupted, and the NOx gas moving in the order of the gas circuit for NOx desorption, that is, the NOx gas transfer circuit 17, the pressure reduction mechanism 4, and the second bypass circuit 18, is discharged to the supply object (refer to Figure 8 for the "flow of gas during the NOx desorption process" and the "flow of gas during the saturation process and the concentration stabilization process" respectively indicated by thick arrows). At this time, in order to utilize the second bypass circuit 18 (to avoid the inflow of NOx gas into the ozone buffer device, the second bypass circuit 18 is utilized), the circuit switch 10 is respectively provided on the inlet side and the outlet side of the ozone buffer device.

[0043] In the NOx desorption process, by selecting the second bypass circuit that does not pass through the ozone buffer device, it is possible to suppress the adsorption and accumulation of NOx in the adsorbent inside the ozone buffer device. In addition, in the NOx desorption process, since the ozone supply from the adsorption / desorption tower is interrupted, it is preferable to adjust the filling amount or adsorption conditions of the NOx adsorbent so as to be at the timing of transferring to the NOx desorption process during or after the completion process.

[0044] Although the present application describes various exemplary embodiments and examples, the various features, modes, and functions described in one or more embodiments are not limited to the application of a specific embodiment, and can be applied alone or in various combinations to the embodiments. Therefore, it can be considered that countless unillustrated variations are also included in the technical scope disclosed in the specification of the present application. For example, it is assumed to include cases where at least one structural element is deformed, added, or omitted, and cases where at least one structural element is extracted and combined with the structural elements of other embodiments. Reference numeral description

[0045] 1 Ozone generator, 2 Adsorption / desorption tower, 3 Pressurizing mechanism, 4 Pressure reducing mechanism, 4a Pressure reducing mechanism (vacuum pump), 4b Pressure reducing mechanism (ejector), 5, 5a, 5b Ozone buffer device, 6 Desorbed gas transfer circuit, 7 Ozonized gas transfer circuit, 8 Adsorption gas transfer circuit, 9 Controller, 10 Circuit switch, 10a Circuit switch (first circuit switch), 10b Circuit switch (second circuit switch), 11 Flow regulator, 12 Dilution gas introduction circuit, 13 Compressor, 14 Cooling device, 15 First bypass circuit, 16 NOx removal device, 17 NOx gas transfer circuit, 18 Second bypass circuit, 51 Container, 52 Adsorbent, 53 Perforated metal, 54 Refrigerant, 100, 101, 102, 103, 104 Ozone supply device.

Claims

1. An ozone supply device, characterized in that, Comprising: An ozone generator that generates ozone; An adsorption-desorption tower that adsorbs and desorbs the ozone; An ozonized gas delivery circuit that is used to deliver the ozonized gas generated by the ozone generator to the adsorption-desorption tower; At least one of a pressurizing mechanism that supplies pressurized carrier gas to the adsorption-desorption tower and a decompressing mechanism that decompresses the gas in the adsorption-desorption tower; An ozone buffer device that contains an adsorbent for adsorbing the ozone and suppresses the concentration variation of the ozone desorbed from the adsorption-desorption tower and being transported; and A desorption gas delivery circuit that is used to deliver the ozone desorbed from the adsorption-desorption tower through the supply of the carrier gas to the ozone buffer device and supply it from the ozone buffer device to the supply target.

2. The ozone supply device according to claim 1, wherein: The ozone buffer device has a back pressure valve provided on the supply target side; The adsorbent contained in the ozone buffer device is configured to supply ozone gas to the entire adsorbent.

3. The ozone supply device according to claim 2, wherein: The ozone buffer device is configured such that a refrigerant is transported around the contained adsorbent.

4. The ozone supply device according to any one of claims 1 to 3, wherein: It further includes a controller that, when controlling the adsorption of the ozone desorbed from the adsorption-desorption tower by the adsorbent contained in the ozone buffer device or the desorption of the ozone from the adsorbent contained in the ozone buffer device according to the ozone concentration at the inlet of the ozone buffer device, performs the following control: when the ozone concentration is higher than a specified concentration, adsorb a part of the ozone using the adsorbent contained in the ozone buffer device, and when the ozone concentration is lower than the specified concentration, desorb a part of the ozone from the adsorbent contained in the ozone buffer device.

5. The ozone supply device according to claim 4, wherein: The decompressing mechanism is a vacuum pump; The ozone supply device includes: a dilution gas introduction circuit that is used to introduce a dilution gas for diluting the ozone; A flow regulator that regulates the flow rate of the dilution gas according to the ozone concentration desorbed in the adsorption-desorption tower; and A circuit switch that is provided between the adsorption-desorption tower and the flow regulator and the decompressing mechanism and controls the opening and closing of the desorption gas delivery circuit; When the controller desorbs the ozone from the ozone buffer device, it uses the circuit switch to make the desorption gas delivery circuit in a closed state.

6. The ozone supply device according to claim 4, wherein: The decompressing mechanism is an ejector; The ozone supply device includes: a dilution gas introduction circuit that is used to introduce a dilution gas for diluting the ozone; A compressor that pressurizes the dilution gas; A cooling device that is provided between the compressor and the decompressing mechanism and cools the dilution gas; A first bypass circuit for supplying the dilution gas from the compressor to the pressure reducing mechanism without passing through the cooling device; A first circuit switcher disposed between the adsorption / desorption tower and the pressure reducing mechanism; and A second circuit switcher disposed on the inlet side and the outlet side of the first bypass circuit respectively, When the controller desorbs ozone from the ozone buffer device, it switches the first circuit switcher and the second circuit switcher so that the dilution gas flows into the first bypass circuit.

7. The ozone supply device according to any one of claims 4 to 6, characterized in that Comprising: A NOx removal device disposed in the ozonized gas transfer circuit to remove nitrogen oxides generated by the ozone generator; A NOx gas transfer circuit for transferring the pressure-reduced and desorbed NOx gas from the NOx removal device to the pressure reducing mechanism; And A second bypass circuit for supplying gas from the pressure reducing mechanism to the supply target without passing through the ozone buffer device, The controller switches the desorbed gas transfer circuit so that gas flows into the second bypass circuit at the timing when NOx gas is desorbed.

8. An ozone supply method, Using the ozone supply device according to claim 1 to supply ozone to the supply target, the ozone supply method is characterized by comprising: A saturation step in which the adsorbent enclosed in the ozone buffer device is saturatedly adsorbed with ozone desorbed from the adsorption / desorption tower; A concentration stabilization step in which, when the ozone concentration desorbed from the adsorption / desorption tower is higher than a specified concentration, a part of the ozone is adsorbed by the adsorbent enclosed in the ozone buffer device, and when the ozone concentration desorbed from the adsorption / desorption tower is lower than the specified concentration, a part of the ozone is desorbed from the adsorbent enclosed in the ozone buffer device; and A completion step in which the ozone gas adsorbed on the adsorbent enclosed in the ozone buffer device is desorbed.

9. The ozone supply method according to claim 8, characterized in that The ozone supply method is an ozone supply method for supplying ozone to the supply target using the ozone supply device according to claim 3, The adsorbent is cooled.

10. The ozone supply method according to claim 8, characterized in that The ozone supply method is a method for supplying ozone to the supply target using the ozone supply device according to claim 7, Comprising a NOx desorption step in which NOx is desorbed from the NOx adsorbent in the NOx removal device, Adjusting the filling amount or adsorption conditions of the NOx adsorbent to be the timing for transferring to the NOx desorption step during or after the completion step.

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