Multi-channel gas flow controller

Abstract

The invention belongs to the technical field of gas flow control, and discloses a multi-channel gas flow controller which comprises a shell body, a gas inlet pipe is installed in the shell body, a main control module is fixed to the top end of the shell body, and a data interface is arranged outside the main control module. The device can drive the filter, the high-efficiency filter tank, the coarse-efficiency filter tank and filter elements in the high-efficiency filter tank and the coarse-efficiency filter tank to rotate by pressing the pressing rod, so that the positions of the filter elements are changed, and when the front filter element is the high-efficiency filter element and the rear filter element is the coarse-efficiency filter element, the high-efficiency filter element directly treats main target pollutants, so that the purification precision is ensured to reach the standard; when the pressing rod is used for switching, the front filter element is the coarse filter element, and the rear filter element is the high-efficiency filter element, the coarse filter element can intercept large-particle pollutants, so that the purposes that the device can conveniently select different filtering schemes according to different gases and the gas filtering effect of the device is improved are achieved.

Description

Technical Field

[0001] The present invention belongs to the technical field of gas flow control, and specifically relates to a multi-channel gas flow controller. Background Art

[0002] Gas flow controllers play an important role in industrial production and high-precision experiments. Especially in the semiconductor manufacturing and chemical industries, the precise control of gas flow directly affects product quality and production efficiency. At present, the technology of single-channel gas flow controllers has been relatively mature, and high-precision flow control can be achieved. However, with the improvement of industrial automation and experimental complexity, the demand for simultaneous control of multiple gases is increasing day by day, and traditional single-channel controllers can no longer meet the needs of modern production. In recent years, the research and development of multi-channel gas flow controllers has become a hot topic, but there is still great room for improvement in terms of integration, control precision, and response speed.

[0003] Patent No. CN116301072A discloses a multi-channel gas flow control device, which adopts a multi-connected integrated multi-gas ventilation system control device. The multi-channel gas inlet ports are connected to the inlet ports on the front end face of the mixed gas channel module. The gas distributed through the distribution air channels flows to each mass flow control unit in the module and is adjusted and distributed in the required proportion, and then can enter the internal cavity at the rear end of the mixed gas channel module. Then, it passes through the longitudinal flow channel outlet of the cavity to the electromagnetic self-control module at the rear end. This device has fewer wiring and pipeline points, high integration, and short system response time, which will bring better use effects to users. Using a multi-connected integrated module system for precise distribution control of the ventilation volume of multiple types of gases can effectively solve a series of problems such as the large volume, obvious precision error, complex and difficult-to-control pipeline points, and easy leakage caused by the superposition and combination of existing single gas flow meters.

[0004] However, when this device is in use, it is impossible to throttle the gas. It can only control the rate of gas flow transmission by opening and closing the solenoid valve. By setting a hexagonal channel made of nickel-titanium memory alloy and triggering deformation through an electric heating wire, the gas flow transmission space of each group of channels is compressed, so as to achieve the purpose of throttling. And by setting staged filtration, it is avoided that the high-efficiency filter element causes a sudden increase in gas passing resistance due to too fast blockage, thereby stabilizing the system pressure. Summary of the Invention

[0005] To solve the problems raised in the above background art, the present invention provides a multi-channel gas flow controller.

[0006] To achieve the above object, the present invention provides the following technical solution: a multi-channel gas flow controller, comprising a shell body, an air inlet pipe is installed inside the shell body, a filter mechanism is arranged at one end of the air inlet pipe, a throttling mechanism is arranged at one end of the air inlet pipe, a main control module is fixed at the top of the shell body, and a data interface is arranged outside the main control module; The filtering mechanism comprises a filter cartridge, a transmission member and a filter, wherein the filter cartridge is fixed to one end of the air inlet pipe, the interior of the filter cartridge is movably connected with the transmission member, and the top end of the transmission member is fixed with the filter; The throttling mechanism comprises a delivery pipe housing and a nickel-titanium memory alloy, wherein the delivery pipe housing is connected to one end of the intake pipe, and the nickel-titanium memory alloy is fixed inside the delivery pipe housing; The main control module includes a central processing unit and a signal conditioning circuit, and the central processing unit and the signal conditioning circuit are bidirectionally electrically connected.

[0007] Preferably, a high-efficiency filter groove is provided inside the filter, a coarse-efficiency filter groove is provided inside the filter, a return spring is fixed at the bottom end of the filter cartridge, a connecting piece is fixed at the top end of the return spring, a toggle rod is fixed at one end of the connecting piece, and a pressure rod is fixed at the top end of the connecting piece.

[0008] Preferably, the input end of the filter cartridge is connected to an air inlet pipe, the output end of the filter cartridge is connected to an air inlet pipe, the outer wall of the transmission member fits the inner wall of the filter cartridge, and the transmission member and the filter cartridge are slidably connected.

[0009] Preferably, a plurality of groups of filter holes are provided on the surface of the filter, and the filter holes are distributed at equal intervals. A group of filter plates are fixed to the central axis of the filter, and a plurality of groups of filter holes are provided on the surface of the filter plates.

[0010] Preferably, the area of the high-efficiency filter tank is equal to the area of the coarse-effect filter tank, the high-efficiency filter tank and the coarse-effect filter tank are symmetrically distributed about the central axis of the filter, and the high-efficiency filter tank and the coarse-effect filter tank are respectively located at the input end and output end of the filter cartridge and the air inlet pipe.

[0011] Preferably, the return spring is used to squeeze the connecting piece and keep it moving upward, the outer wall of the connecting piece fits the inner wall of the transmission piece, the connecting piece and the transmission piece are slidably connected, and the connecting piece and the filter are slidably connected.

[0012] Preferably, a guide groove is formed on the outer wall of the filter, the diameter of the toggle rod is equal to the width of the guide groove, the outer wall of the toggle rod fits the guide groove, and the toggle rod and the guide groove are slidably connected.

[0013] Preferably, an installation groove is formed inside the conveying pipe housing, an electric heating wire is fixed to the inner wall of the conveying pipe housing, an air inlet pipe is connected to the input end of the conveying pipe housing, an air inlet pipe is connected to the output end of the conveying pipe housing, the nickel-titanium memory alloy is an equilateral hexagonal pipe, six groups of the installation grooves and the electric heating wires are provided, and the installation grooves and the electric heating wires are equidistantly distributed about the central axis of the conveying pipe housing.

[0014] Preferably, a high-speed solenoid valve is installed at one end of the air inlet pipe, an air outlet is connected to the output end of the air inlet pipe, a thermal mass flowmeter is fixed to the top end of the air outlet, a data acquisition line is fixed to the outside of the thermal mass flowmeter, and a main control module is fixed to the top end of the data acquisition line.

[0015] Preferably, four groups of high-speed solenoid valves are provided, the high-speed solenoid valves are equidistantly distributed, the high-speed solenoid valves are installed outside the housing body, four groups of air outlets are provided, the high-speed solenoid valves are electrically connected to a signal conditioning circuit, the thermal mass flowmeter is electrically connected to the data acquisition line, and the data acquisition line is electrically connected to the signal conditioning circuit.

[0016] Compared with the prior art, the beneficial effects of the present invention are as follows: Through the cooperation of structures such as a filter cartridge, a transmission member, and a filter, the device of the present invention can drive the filter, the high-efficiency filter tank, the primary filter tank, and the filter elements inside the high-efficiency filter tank and the primary filter tank to rotate by pressing a lever, so as to change their positions. When the front filter element is a high-efficiency filter element and the rear one is a primary filter element, the high-efficiency filter element directly treats the main target pollutants to ensure that the purification accuracy meets the standard. And by placing the primary filter element at the rear, fibers or debris released during filtration are prevented from entering the subsequent process. The rear-stage filter element serves as a "safety net" to prevent contaminants shed by the front-stage filter element from polluting the downstream. When the lever is used to switch, the front filter element is a primary filter element and the rear one is a high-efficiency filter element, the primary filter element can intercept large-particle pollutants, reduce the load on the high-efficiency filter element, and extend its service life. The staged filtration can avoid a sudden increase in the gas passage resistance caused by the rapid blockage of the high-efficiency filter element, and stabilize the system pressure. The structure of the front-stage filter element is loose, and the density of the rear-stage filter element is high. The pressure drop gradient increases, but the overall is gentler and it is not easy to block the end filter element, so as to achieve the purpose of enabling the device to select different filtration schemes according to different gases and improving the gas filtration effect of the device.

[0017] The present invention arranges the cooperation of the conveying tube shell, nickel-titanium memory alloy, installation groove and other structures, so that the device can generate heat by starting the heating wire, so that the walls of the nickel-titanium memory alloy are deformed and contracted after being heated, and the air flow flows through the nickel-titanium memory alloy, and then the gas flow rate is changed by compressing the pore size of the nickel-titanium memory alloy, and the gas flow rate is accurately controlled by cooperating with a high-speed solenoid valve, so that the overall gas flow control effect of the device is improved, thereby achieving the purpose of facilitating the device to improve the accuracy of gas flow control. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the overall rear view structure of the present invention; Figure 3 It is a schematic diagram of the overall internal structure of the present invention; Figure 4 It is a schematic diagram of the throttling mechanism structure of the present invention; Figure 5 It is a schematic diagram of the front cross-sectional structure of the throttling mechanism of the present invention; Figure 6 It is a schematic diagram of the structure of the filtering mechanism of the present invention; Figure 7 It is a bottom view of the structure of the filtering mechanism of the present invention.

[0019] In the figure: 1. Shell body; 2. Air inlet pipe; 3. Filter mechanism; 301. Filter cartridge; 302. Transmission member; 303. Filter; 304. High-efficiency filter tank; 305. Coarse-efficiency filter tank; 306. Reset spring; 307. Connector; 308. Toggle lever; 309. Pressure lever; 4. High-speed solenoid valve; 5. Throttling mechanism; 501. Delivery pipe shell; 502. Nickel-titanium memory alloy; 503. Mounting slot; 504. Heating wire; 6. Air outlet; 7. Thermal mass flowmeter; 8. Data acquisition line; 9. Main control module; 10. Data interface. DETAILED DESCRIPTION

[0020] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present invention.

[0021] like Figures 1 to 7As shown in the figure, the present invention provides a multi-channel gas flow controller, which includes a housing main body 1. An intake pipe 2 is installed inside the housing main body 1. One end of the intake pipe 2 is provided with a filtering mechanism 3, and one end of the intake pipe 2 is provided with a throttling mechanism 5. The top end of the housing main body 1 is fixed with a main control module 9. A data interface 10 is arranged outside the main control module 9. One end of the intake pipe 2 is installed with a high-speed solenoid valve 4. The output end of the intake pipe 2 is communicated with an air outlet 6. The top end of the air outlet 6 is fixed with a thermal mass flowmeter 7. A data acquisition line 8 is fixed outside the thermal mass flowmeter 7. The top end of the data acquisition line 8 is fixed with the main control module 9.

[0022] Adopting the above solution: The gas enters through the intake pipe 2. After being filtered by the filtering mechanism 3, it enters the inside of the housing main body 1. At this time, the gas can enter multiple channels through multiple groups of separated intake pipes 2. A high-speed solenoid valve 4, an air outlet 6 and a thermal mass flowmeter 7 are arranged in each channel. The gas enters the gas channel from the intake pipe 2. A thermal mass flowmeter 7 is also arranged at the connection between the intake pipe 2 and the housing main body 1. The thermal mass flowmeter 7 detects the gas flow in real time and transmits the signal to the main control module. The main control module 9 calculates the control signal through the PID algorithm according to the deviation between the set value and the actual value and drives the high-speed solenoid valve 4 to adjust the opening degree, so as to achieve precise control of the gas flow. Moreover, the thermal mass flowmeter 7 at the position of the air outlet 6 can detect the gas flow when the gas is discharged, improving the collection of gas data. The data interface 10 can be connected to external devices through wiring, and then collect and record data. This usage method is a mature prior art in this field and will not be elaborated here.

[0023] As Figures 1 to 7 shown, the filtering mechanism 3 includes a filter cylinder 301, a transmission part 302 and a filter 303. The filter cylinder 301 is fixed at one end of the intake pipe 2. A transmission part 302 is movably connected inside the filter cylinder 301. The input end of the filter cylinder 301 is communicated with the intake pipe 2. The output end of the filter cylinder 301 is communicated with the intake pipe 2. The outer wall of the transmission part 302 fits the inner wall of the filter cylinder 301, and the transmission part 302 is slidably connected with the filter cylinder 301.

[0024] As Figures 1 to 7As shown, a filter 303 is fixed to the top end of the transmission member 302. A number of groups of filter holes are formed on the surface of the filter 303, and the filter holes are equally spaced. A set of filter plates is fixed to the central axis of the filter 303, and a number of groups of filter holes are formed on the surface of the filter plates. An efficient filtration tank 304 is formed inside the filter 303, and a primary filtration tank 305 is formed inside the filter 303. The area of the efficient filtration tank 304 is equal to the area of the primary filtration tank 305. The efficient filtration tank 304 and the primary filtration tank 305 are symmetrically distributed about the central axis of the filter 303. The efficient filtration tank 304 and the primary filtration tank 305 are respectively located at the input end and the output end of the filter cylinder 301 and the intake pipe 2.

[0025] As Figures 1 to 7 shown, a return spring 306 is fixed to the bottom end inside the filter cylinder 301. The top end of the return spring 306 is fixed to a connecting member 307. The return spring 306 is used to squeeze the connecting member 307 and keep it in a tendency to move upward. The outer wall of the connecting member 307 is in contact with the inner wall of the transmission member 302. The connecting member 307 and the transmission member 302 are slidably connected. The connecting member 307 and the filter 303 are slidably connected. One end of the connecting member 307 is fixed to a toggle lever 308, and the top end of the connecting member 307 is fixed to a pressing rod 309. A guide groove is formed on the outer wall of the filter 303. The diameter of the toggle lever 308 is equal to the width of the guide groove. The outer wall of the toggle lever 308 is in contact with the guide groove. The toggle lever 308 and the guide groove are slidably connected.

[0026] Adopting the above solution: By adding high-efficiency filter elements and coarse-effect filter elements inside the high-efficiency filter tank 304 and the coarse-effect filter tank 305, pressing the pressure rod 309 causes the positions of the connecting piece 307 and the toggle rod 308 to move downward. Then, after the toggle rod 308 moves downward and the hand is released, at this time, the return spring 306 resets the connecting piece 307, the toggle rod 308, and the pressure rod 309, causing the toggle rod 308 to contact the guide groove of the filter 303, and driving the filter 303 to rotate when resetting and rising. Furthermore, it drives the filter 303, the high-efficiency filter tank 304, and the coarse-effect filter tank 305, as well as the filter elements inside the high-efficiency filter tank 304 and the coarse-effect filter tank 305 to rotate, so that their positions are swapped. When the front filter element is a high-efficiency filter element and the rear one is a coarse-effect filter element, the high-efficiency filter element directly processes the main target pollutants to ensure that the purification accuracy meets the standard, and by placing the coarse-effect filter element at the rear, it prevents fibers or debris released during filtration from entering the subsequent process. The rear-stage filter element serves as a "safety net" to prevent contaminants from the front-stage filter element from polluting the downstream. When switching with the pressure rod 309 and the front filter element is a coarse-effect filter element and the rear one is a high-efficiency filter element, the coarse-effect filter element can intercept large-particle pollutants, reduce the load on the high-efficiency filter element, and extend its service life. Staged filtration can avoid a sudden increase in the gas passage resistance caused by the rapid blockage of the high-efficiency filter element, stabilize the system pressure. The front-stage filter element has a loose structure, the rear-stage filter element has a high density, and the pressure drop gradient increases, but the overall is gentler and it is not easy to block the end filter element, enabling the device to select different filtration schemes according to different gases and improving the gas filtration effect of the device.

[0027] As Figures 1 to 7 shown, the throttling mechanism 5 includes a delivery pipe housing 501 and a nickel-titanium shape memory alloy 502. The delivery pipe housing 501 is connected to one end of the intake pipe 2. The nickel-titanium shape memory alloy 502 is fixed inside the delivery pipe housing 501. An installation groove 503 is formed inside the delivery pipe housing 501. A heating wire 504 is fixed to the inner wall of the delivery pipe housing 501. The input end of the delivery pipe housing 501 is connected to the intake pipe 2, and the output end of the delivery pipe housing 501 is connected to the intake pipe 2. The nickel-titanium shape memory alloy 502 is an equilateral hexagonal pipe. There are six groups of the installation groove 503 and the heating wire 504, and the installation groove 503 and the heating wire 504 are evenly distributed about the central axis of the delivery pipe housing 501.

[0028] Adopting the above solution: By starting the heating wire 504 to generate heat, each wall of the nickel-titanium shape memory alloy 502 deforms and shrinks after receiving the heat. The input end and the output end of the nickel-titanium shape memory alloy 502 are connected to the intake pipe 2. The length of the heating wire 504 is less than the overall length of the nickel-titanium shape memory alloy 502, so that the nickel-titanium shape memory alloy 502 at the input end and the output end does not deform, allowing the air flow to pass through the nickel-titanium shape memory alloy 502. Furthermore, by compressing the aperture of the nickel-titanium shape memory alloy 502, the gas flow rate is changed, and in cooperation with the high-speed solenoid valve 4, the gas flow rate is precisely controlled, improving the gas flow control effect of the overall device.

[0029] As Figures 1 to 7 shown, the main control module 9 includes a central processor and a signal conditioning circuit. The central processor and the signal conditioning circuit are electrically connected bidirectionally. There are four groups of high-speed solenoid valves 4, which are equally spaced. The high-speed solenoid valves 4 are installed outside the housing main body 1. There are four groups of air outlets 6. The high-speed solenoid valves 4 are electrically connected to the signal conditioning circuit. The thermal mass flowmeter 7 is electrically connected to the data acquisition line 8, and the data acquisition line 8 is electrically connected to the signal conditioning circuit.

[0030] Working principle and usage process of the present invention: Air enters through the intake pipe 2. By adding a high-efficiency filter element and a primary filter element inside the high-efficiency filter tank 304 and the primary filter tank 305, pressing the pressure rod 309 causes the positions of the connecting member 307 and the toggle rod 308 to move downward. Then, after the toggle rod 308 moves downward and is released, the return spring 306 resets the connecting member 307, the toggle rod 308, and the pressure rod 309, causing the toggle rod 308 to contact the guide groove of the filter 303 and drive the filter 303 to rotate when resetting and rising. Furthermore, it drives the filter 303, the high-efficiency filter tank 304, and the primary filter tank 305, as well as the filter elements inside the high-efficiency filter tank 304 and the primary filter tank 305 to rotate, so that their positions are exchanged. When the front filter element is a high-efficiency filter element and the rear one is a primary filter element, the high-efficiency filter element directly processes the main target pollutants to ensure that the purification accuracy meets the standard. And by placing the primary filter element at the rear, it prevents fibers or debris released during filtration from entering the subsequent process. The rear-stage filter element acts as a "safety net" to prevent contaminants from the front-stage filter element from polluting the downstream. When switching with the pressure rod 309, if the front filter element is a primary filter element and the rear one is a high-efficiency filter element, the primary filter element can intercept large-particle pollutants, reduce the load on the high-efficiency filter element, and extend its service life. The staged filtration can avoid a sudden increase in the gas passage resistance caused by the rapid clogging of the high-efficiency filter element, stabilizing the system pressure. The structure of the front-stage filter element is loose, and the density of the rear-stage filter element is high, with an increasing pressure drop gradient, but overall it is gentler and not easily blocked at the end filter element, enabling the device to select different filtration schemes according to different gases, improving the gas filtration effect of the device. And after being filtered by the filtration mechanism 3, the gas enters the interior of the housing main body 1. At this time, the gas can enter multiple channels through multiple groups of separated intake pipes 2, and a high-speed solenoid valve 4, an air outlet 6, and a thermal mass flowmeter 7 are provided in each channel. The gas enters the gas channel from the intake pipe 2, and a group of thermal mass flowmeters 7 are also provided at the connection between the intake pipe 2 and the housing main body 1. The thermal mass flowmeter 7 detects the gas flow rate in real time and transmits the signal to the main control module. The main control module 9 calculates the control signal through the PID algorithm based on the deviation between the set value and the actual value and drives the high-speed solenoid valve 4 to adjust the opening degree, thereby achieving precise control of the gas flow rate. And the thermal mass flowmeter 7 at the position of the air outlet 6 can detect the gas flow rate when the gas is discharged, improving the collection of gas data. And the device can generate heat by starting the heating wire 504, causing the walls of the nitinol memory alloy 502 to deform and contract after receiving the heat. The input end and the output end of the nitinol memory alloy 502 are connected to the intake pipe 2. The length of the heating wire 504 is less than the overall length of the nitinol memory alloy 502, so that the nitinol memory alloy 502 at the input end and the output end will not deform, enabling the air flow to pass through the nitinol memory alloy 502. Furthermore, by compressing the aperture of the nitinol memory alloy 502, the gas flow rate is changed, and in cooperation with the high-speed solenoid valve 4, the gas flow rate is precisely controlled, improving the gas flow rate control effect of the overall device. And the data interface 10 can be connected to external devices through wiring,Furthermore, data is collected and recorded. This usage method is a mature and existing technology in this field and will not be elaborated here.

[0031] It should be noted that in this article, relational terms such as first and second are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, article or device.

[0032] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principles and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A multi-channel gas flow controller, comprising a housing body (1), characterized in that: An air intake pipe (2) is installed inside the shell body (1), a filtering mechanism (3) is provided at one end of the air intake pipe (2), a throttling mechanism (5) is provided at one end of the air intake pipe (2), a main control module (9) is fixed at the top end of the shell body (1), and a data interface (10) is provided outside the main control module (9); The filtering mechanism (3) comprises a filter cartridge (301), a transmission member (302) and a filter (303); the filter cartridge (301) is fixed to one end of the air intake pipe (2); the transmission member (302) is movably connected inside the filter cartridge (301); and the filter (303) is fixed to the top end of the transmission member (302); The throttling mechanism (5) comprises a delivery pipe housing (501) and a nickel-titanium memory alloy (502); the delivery pipe housing (501) is connected to one end of the air intake pipe (2); and the nickel-titanium memory alloy (502) is fixed inside the delivery pipe housing (501); The main control module (9) comprises a central processing unit and a signal conditioning circuit, and the central processing unit and the signal conditioning circuit are bidirectionally electrically connected.

2. The multi-channel gas flow controller according to claim 1, wherein: A high-efficiency filter groove (304) is provided inside the filter (303), a coarse-efficiency filter groove (305) is provided inside the filter (303), a return spring (306) is fixed at the bottom end inside the filter cartridge (301), a connecting piece (307) is fixed at the top end of the return spring (306), a toggle rod (308) is fixed at one end of the connecting piece (307), and a pressure rod (309) is fixed at the top end of the connecting piece (307).

3. The multi-channel gas flow controller according to claim 1, wherein: The input end of the filter cartridge (301) is connected to an air inlet pipe (2), the output end of the filter cartridge (301) is connected to an air inlet pipe (2), the outer wall of the transmission member (302) fits the inner wall of the filter cartridge (301), and the transmission member (302) and the filter cartridge (301) are slidably connected.

4. The multi-channel gas flow controller according to claim 1, wherein: The surface of the filter (303) is provided with a plurality of groups of filter holes, the filter holes being distributed at equal intervals, and a group of filter plates are fixed to the central axis of the filter (303), the surface of the filter plates being provided with a plurality of groups of filter holes.

5. The multi-channel gas flow controller according to claim 2, wherein: The area of the high-efficiency filter tank (304) is equal to the area of the coarse-efficiency filter tank (305); the high-efficiency filter tank (304) and the coarse-efficiency filter tank (305) are symmetrically distributed about the central axis of the filter (303); the high-efficiency filter tank (304) and the coarse-efficiency filter tank (305) are respectively located at the input end and the output end of the filter cartridge (301) and the air intake pipe (2).

6. The multi-channel gas flow controller according to claim 2, wherein: The return spring (306) is used to press the connecting piece (307) and keep it moving upwards; the outer wall of the connecting piece (307) fits the inner wall of the transmission piece (302); the connecting piece (307) and the transmission piece (302) are slidably connected; and the connecting piece (307) and the filter (303) are slidably connected.

7. The multi-channel gas flow controller according to claim 2, wherein: The outer wall of the filter (303) is provided with a guide groove, the diameter of the toggle rod (308) is equal to the width of the guide groove, the outer wall of the toggle rod (308) fits the guide groove, and the toggle rod (308) and the guide groove are slidably connected.

8. The multi-channel gas flow controller according to claim 1, wherein: The interior of the delivery tube shell (501) is provided with a mounting groove (503), an electric heating wire (504) is fixed to the inner wall of the delivery tube shell (501), the input end of the delivery tube shell (501) is connected to the air intake pipe (2), and the output end of the delivery tube shell (501) is connected to the air intake pipe (2), the nickel-titanium memory alloy (502) is an equilateral hexagonal pipe, six groups of the mounting grooves (503) and the electric heating wires (504) are arranged, and the mounting grooves (503) and the electric heating wires (504) are distributed at equal intervals about the central axis of the delivery tube shell (501).

9. The multi-channel gas flow controller according to claim 1, wherein: A high-speed solenoid valve (4) is installed at one end of the air intake pipe (2), the output end of the air intake pipe (2) is connected to an air outlet (6), a thermal mass flow meter (7) is fixed at the top end of the air outlet (6), a data acquisition line (8) is fixed outside the thermal mass flow meter (7), and a main control module (9) is fixed at the top end of the data acquisition line (8).

10. The multi-channel gas flow controller according to claim 9, wherein: The high-speed solenoid valves (4) are provided in four groups, the high-speed solenoid valves (4) are distributed at equal intervals, the high-speed solenoid valves (4) are installed outside the shell body (1), the air outlets (6) are provided in four groups, the high-speed solenoid valves (4) are electrically connected to the signal conditioning circuit, the thermal mass flowmeter (7) is electrically connected to the data acquisition line (8), and the data acquisition line (8) is electrically connected to the signal conditioning circuit.

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