Feeding device for compatible carriers and sub-rings

Abstract

The application discloses a feeding device compatible with carriers and mother-daughter rings and relates to the field of manufacturing semiconductor devices. The feeding device comprises a feeding base provided with mounting through holes and a fixing mechanism fixed to the upper side of the feeding base. The fixing mechanism comprises a limiting assembly and a material ejecting assembly. The limiting assembly can limit the carriers or the mother-daughter rings, and the material ejecting assembly is tightly pressed from one side to fix the carriers or the mother-daughter rings. The limiting assembly comprises a sleeve ring for nesting the mother-daughter rings and N-1 stop sheets. The size of the sleeve ring is adapted to the carriers. When the carrier is a regular N-polygon, the sleeve ring is inscribed in the regular N-polygon. The stop sheets are arranged at the positions where the carriers are tangent to the circle where the sleeve ring is located. The material ejecting assembly is tightly pressed from the side of the regular N-polygon where no stop sheet is arranged to fix the carriers and the sleeve ring. The application can realize the quick and tool-free disassembly of the carriers and the mother-daughter rings under the premise of ensuring the compatibility of multiple types of clamps.

Description

Technical Field

[0001] This application relates to the field of semiconductor device manufacturing or processing, and more particularly to a loading device for compatible carriers and mother-daughter rings. Background Technology

[0002] In the field of automated production, loading devices compatible with both carriers and ring systems are a crucial component of material processing systems. Their core function is to precisely position and fix materials, and then transport them to the next processing stage via mobile devices such as movable nozzles or robotic arms. In existing technologies, materials are typically pre-loaded into standardized carriers or ring systems, which are then mechanically connected to the loading device. However, during production, materials may arrive via either carriers or ring systems, which cannot be predetermined. This necessitates a loading device compatible with both carriers and ring systems. Traditional loading devices typically employ bolt-fastening: the device base has arrays of positioning holes for both polygonal carriers and annular ring systems, which are then secured with bolts. While this design achieves bidirectional compatibility between carriers and ring systems, it has significant drawbacks in practical applications. On the one hand, the changeover efficiency is low. Each time the material type is changed, the operator needs to repeatedly disassemble and assemble multiple fixing bolts with tools. On the other hand, the operation is highly complex. Due to the differences in the geometric characteristics of the carrier and the female ring, the distribution position and tightening direction of the fixing bolts are different. The operator needs to memorize the installation process of different fixtures, which is prone to misoperation. Summary of the Invention

[0003] To address the problem in existing technologies of how to achieve rapid, tool-free assembly and disassembly of carriers and rings while maintaining compatibility with both, this application provides a feeding device compatible with both carriers and rings, the specific solution of which is as follows:

[0004] A loading device compatible with carriers and rings includes a loading base with mounting through holes and a fixing mechanism fixed to the upper side of the loading base. The fixing mechanism includes a limiting component and a lifting component. The limiting component can limit the carrier or ring, and the lifting component presses from one side to fix the carrier or ring. The limiting component includes a collar for nesting the ring and N-1 baffles. The size of the collar is adapted to the carrier. When the carrier is a regular N-gon, the circle containing the collar is tangent to the regular N-gon. The baffles are located at the positions where the circle containing the carrier and the circle containing the collar are tangent. The lifting component presses from the side of the regular N-gon without baffles to fix the carrier and collar. N is greater than or equal to 3.

[0005] Preferably, the top material assembly includes a top material seat, a top material strip, at least one guide rod, and an elastic component sleeved on the guide rod. The top material seat is fixedly connected to the upper side of the feeding base. A limiting block is fixedly provided at one end of the guide rod, and the other end of the guide rod passes through the top material seat and is fixedly connected to the top material strip. The guide rod is slidably connected to the top material seat. The elastic component is located between the top material seat and the top material strip. Under the action of the elastic component, the top material strip is pressed from one side to fix the carrier or the female ring.

[0006] Preferably, the loading device compatible with carriers and mother-daughter rings further includes a rotating mechanism fixedly connected to the loading base. The fixed mechanism is fixedly connected to the rotating part of the rotating mechanism, and the rotating mechanism can drive the fixed mechanism to rotate.

[0007] Preferably, the rotating mechanism includes a bearing, a rotating wheel, and a rotating drive mechanism. The bearing is fixedly disposed in the mounting through hole, the rotating wheel is coaxially and fixedly connected to the inner ring of the bearing, and the rotating drive mechanism is capable of driving the rotating wheel to rotate.

[0008] Preferably, the baffles are respectively fixed to the upper side of the inner ring of the bearing; the ejector assembly includes a mounting block, an ejector seat, an ejector bar, at least one guide rod, and an elastic component sleeved on the guide rod. The ejector seat is fixedly connected to the upper side of the inner ring of the bearing through the mounting block. One end of the guide rod is fixedly provided with a limiting block, and the other end of the guide rod passes through the ejector seat and is fixedly connected to the ejector bar. The guide rod is slidably connected to the ejector seat. The elastic component is located between the ejector seat and the ejector bar. Under the action of the elastic component, the ejector bar is pressed from one side to fix the carrier or the mother and daughter rings.

[0009] Preferably, the rotary drive mechanism includes a motor, gears, and a belt, wherein the motor drives the rotating wheel to rotate via the gears and the belt.

[0010] Preferably, all the baffles are L-shaped baffles.

[0011] Preferably, the elastic component includes a spring.

[0012] Preferably, the arc portions on both sides of the position where the collar is tangent to the regular N-sided polygon are straight edges. After the collar is installed, the N straight edges of the collar are respectively attached to the baffle or the top material assembly.

[0013] One or more technical solutions provided in this application have at least the following technical effects or advantages:

[0014] 1. Through the synergistic action of the limiting component and the top component, and utilizing the automatic reset characteristics of the elastic component, the operator only needs to place the carrier or the female ring into the area surrounded by the limiting component. Under the action of the spring, the top bar of the top component automatically applies a continuous pressing force to the side of the carrier or the female ring, thereby achieving rapid fixation of the carrier or the female ring. Moreover, during disassembly, the carrier or the female ring can be disassembled simply by overcoming the resistance of the elastic component. Compared with the traditional bolt fixing method, no tools are required for disassembly and assembly, thus improving efficiency.

[0015] 2. Adaptive to various fixture shapes, reducing equipment modification costs. The baffle is set at the position where the carrier and the collar are tangent. Together with the top bar that can slide along the guide rod, it can adapt to the right-angled side of the carrier and the arc surface contour of the annular mother and daughter rings. The "L"-shaped baffle further enhances the limiting ability of irregular fixtures and avoids positioning deviation.

[0016] 3. Dynamic rotation adjustment function enhances processing flexibility. The rotating mechanism drives the fixed mechanism to rotate as a whole. Combined with the transmission system of bearings, gears and belts, the carrier or the mother and daughter ring can be precisely adjusted from 0° to 360° in the horizontal plane. This function is particularly suitable for multi-process processing scenarios. For example, after drilling, the material needs to be rotated to a specific angle for milling. The station can be switched without disassembly and reassembly. The positioning accuracy is high and the error is small. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in this application or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are merely exemplary. For those skilled in the art, other drawings can be obtained based on the provided drawings without creative effort.

[0018] Figure 1 This is a first-view structural schematic diagram of the compatible carrier and the feeding device for the mother and daughter rings of this application without the fixtures installed;

[0019] Figure 2 This is a second-view structural schematic diagram of the compatible carrier and the feeding device for the mother and daughter rings of this application without the fixtures installed;

[0020] Figure 3 This is a schematic diagram of the compatible carrier and the feeding device of the female and male rings of this application, with the female and male rings installed;

[0021] Figure 4 This is a schematic diagram of the compatible carrier and the feeding device of the mother and daughter rings of this application, with the carrier installed;

[0022] Figure 5 This is a schematic diagram of a feeding device for compatible carriers and mother-daughter rings in the prior art, with the mother-daughter rings installed.

[0023] In the diagram: 1. Feeding base; 2. Fixing mechanism; 21. Limiting component; 210. Collar; 211. Baffle; 22. Ejector assembly; 220. Mounting block; 221. Ejector seat; 222. Ejector bar; 223. Guide rod; 224. Elastic component; 3. Rotating mechanism; 31. Bearing; 32. Rotating wheel; 33. Rotating drive mechanism; 331. Motor; 332. Belt; 5. Mother and daughter rings; 6. Carrier. Detailed Implementation

[0024] The technical solutions in the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the embodiments described in this application are only some embodiments of this application, and not all embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0025] Example 1

[0026] Please combine participation Figures 1 to 4 The loading device compatible with carriers and female rings includes a loading base 1 with a mounting through hole and a fixing mechanism 2 fixed on the upper side of the loading base 1. The fixing mechanism 2 includes a limiting component 21 and a top component 22. The limiting component 21 can limit the carrier 6 or female ring 5, and the top component 22 can press from one side to fix the carrier 6 or female ring 5.

[0027] The limiting component 21 includes a collar 210 for nesting the mother and daughter rings 5 ​​and N-1 baffles 211. The size of the collar 210 is adapted to the carrier 6. When the carrier 6 is a regular N-gon, the circle containing the collar 210 is tangent to the regular N-gon. The baffles 211 are positioned at the point where the carrier 6 is tangent to the circle containing the collar 210. That is, when the regular N-gon is installed on the fixing mechanism 2, the N-1 baffles 211 sequentially abut against the regular N-gon. For any N-1 sides of the regular N-gon, the ejector assembly 22 presses against the side of the regular N-gon without the baffles 211 to fix the carrier 6 and the collar 210; when the female and male rings 5 ​​are installed on the fixing mechanism 2, the female and male rings 5 ​​are embedded in the collar 210, the N-1 baffles 211 are tangent to the collar 210 respectively, and the ejector assembly 22 presses against the side of the collar 210 to fix the collar 210. N is greater than or equal to 3. The regular N-gon includes regular N-gons within the allowable machining accuracy range, and does not have to be strictly regular N-gons.

[0028] Please combine participation Figure 1 and Figure 3The top material assembly 22 includes a top material seat 221, a top material strip 222, at least one guide rod 223, and an elastic component 224 sleeved on the guide rod 223. The top material seat 221 is fixedly connected to the upper side of the feeding base 1. One end of the guide rod 223 is fixedly provided with a limiting block, and the other end of the guide rod 223 passes through the top material seat 221 and is fixedly connected to the top material strip 222. The guide rod 223 is slidably connected to the top material seat 221. The elastic component 224 is located between the top material seat 221 and the top material strip 222. Under the action of the elastic component 224, the top material strip 222 is tightened from one side to fix the carrier 6 or the female ring 5.

[0029] Example 2

[0030] Please combine participation Figures 1 to 4 The loading device compatible with carriers and rings includes a loading base 1 with a mounting through hole and a fixing mechanism 2 fixed on the upper side of the loading base 1. The fixing mechanism 2 includes a limiting component 21 and a lifting component 22. The limiting component 21 can limit the carrier 6 or the ring 5, and the lifting component 22 tightens from one side to fix the carrier 6 or the ring 5. The limiting component 21 includes a collar 210 for nesting the ring 5 and N-1 baffles 211. The size of the collar 210 is adapted to the carrier 6. When the carrier 6 is a regular N-gon, the circle containing the collar 210 is tangent to the regular N-gon. The baffles 211 are located at the position where the circle containing the carrier 6 and the circle containing the collar 210 are tangent. The lifting component 22 tightens from the side of the regular N-gon where the baffles 211 are not provided to fix the carrier 6 and the collar 210. N is greater than or equal to 3.

[0031] Specifically, please refer to the following: Figure 1 and Figure 2 The loading device compatible with carriers and mother-daughter rings also includes a rotating mechanism 3 fixedly connected to the loading base 1. The fixing mechanism 2 is fixedly connected to the rotating part of the rotating mechanism 3. The rotating mechanism 3 can drive the fixing mechanism 2 to rotate. The bearing 31 includes an inner ring and an outer ring. The inner ring is driven to rotate by the rotating drive mechanism 33, and the outer ring is fixed on the loading base 1 to provide support. The two achieve low-friction and high-precision rotational motion through the cooperation of rolling elements.

[0032] Specifically, please refer to the following: Figure 2The rotating mechanism 3 includes a bearing 31, a rotating wheel 32, and a rotating drive mechanism 33. The bearing 31 is fixedly disposed in the mounting through hole, and the rotating wheel 32 is coaxially and fixedly connected to the inner ring of the bearing 31. The rotating drive mechanism 33 can drive the rotating wheel 32 to rotate. In embodiment 2, the limiting component 21 is indirectly mounted on the feeding base 1 through the rotating mechanism 3.

[0033] Specifically, please refer to the following: Figure 1 , Figure 3 and Figure 4 The baffles 211 are respectively fixed to the upper side of the inner ring of the bearing 31; the top material assembly 22 includes a mounting block 220, a top material seat 221, a top material strip 222, at least one guide rod 223 and an elastic component 224 sleeved on the guide rod 223. The top material seat 221 is fixedly connected to the upper side of the inner ring of the bearing 31 through the mounting block 220. One end of the guide rod 223 is fixedly provided with a limiting block, and the other end of the guide rod 223 passes through the top material seat 221 and is fixedly connected to the top material strip 222. The guide rod 223 is slidably connected to the top material seat 221. The elastic component 224 is located between the top material seat 221 and the top material strip 222. Under the action of the elastic component 224, the top material strip 222 is tightened from one side to fix the carrier 6 or the mother and daughter rings 5.

[0034] Specifically, please refer to the following: Figure 2 The rotary drive mechanism 33 includes a motor 331, gears and belts 332, and the motor 331 drives the rotating wheel 32 to rotate through the gears and belts 332.

[0035] Specifically, please refer to the following: Figure 1 All the baffles 211 are "L" shaped baffles 211.

[0036] Specifically, the elastic component 224 includes a spring.

[0037] Specifically, please refer to the following: Figure 3 The arc portion on both sides of the collar 210 that is tangent to the regular N-sided polygon protrudes outward to form straight edges. After the collar 210 is installed, the N straight edges of the collar 210 are respectively attached to the baffle 211 or the top material assembly 22.

[0038] Please refer to the following: Figure 3 , Figure 3This is a schematic diagram of a feeding device compatible with both the carrier and the male-female ring, equipped with the male-female ring 5. The collar 210, in which the male-female ring 5 is nested, is pushed into the surrounding area formed by several baffles 211. The top bar 222 of the top-feeding assembly 22 automatically applies a continuous pressing force to the sides of the male-female ring 5 under the action of a spring, achieving rapid fixation of the male-female ring 5. Please refer to the following reference. Figure 4 , Figure 4 This is a schematic diagram of a feeding device compatible with both carriers and rings, with carrier 6 installed. The installation of carrier 6 is similar to the installation of the aforementioned rings 5.

[0039] In existing technology, to accommodate both the square-shaped carrier 6 and the annular male-female ring 5, a positioning hole array for the carrier and a positioning hole array for the male-female ring are typically set on the loading base 1, and both are locked and fixed with bolts, which is very cumbersome. Please refer to [reference needed]. Figure 5 , Figure 5 The diagram shows a loading device for a compatible carrier and a female ring in the prior art, with the female ring 5 installed. The female ring 5 is fixed to the loading base 1 by clamps and bolts. Therefore, the installation and removal of the female ring 5 require bolts. Obviously, this method of installation and removal of the female ring 5 is time-consuming and inefficient.

[0040] In summary, this application provides a feeding device for a compatible carrier 6 and a mother-daughter ring 5 that enables rapid, tool-free assembly and disassembly while ensuring compatibility with multiple types of fixtures.

[0041] The above description of the disclosed embodiments enables those skilled in the art to make or use this application. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of this application. Therefore, this application is not to be limited to the embodiments shown herein, but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0042] Obviously, those skilled in the art can make various modifications and variations to this application without departing from the spirit and scope of this application. Therefore, if such modifications and variations fall within the scope of this application and its equivalents, this application also intends to include such modifications and variations.

Claims

1. A feeding device compatible with carriers and mother-daughter rings, characterized in that, It includes a feeding base with a mounting through hole and a fixing mechanism fixed on the upper side of the feeding base. The fixing mechanism includes a limiting component and a top component. The limiting component can limit the carrier or the female ring, and the top component presses against it from one side to fix the carrier or the female ring. The limiting component includes a collar for nesting the mother and daughter rings and N-1 baffles. The size of the collar is adapted to the carrier. When the carrier is a regular N-gon, the circle containing the collar is tangent to the regular N-gon. The baffles are positioned at the positions where the carrier and the circle containing the collar are tangent. The ejector component presses against the regular N-gon from the side without baffles to fix the carrier and the collar. N is greater than or equal to 3.

2. The feeding device for compatible carriers and mother-daughter rings as described in claim 1, characterized in that, The top material assembly includes a top material seat, a top material strip, at least one guide rod, and an elastic component sleeved on the guide rod. The top material seat is fixedly connected to the upper side of the feeding base. A limiting block is fixedly provided at one end of the guide rod, and the other end of the guide rod passes through the top material seat and is fixedly connected to the top material strip. The guide rod is slidably connected to the top material seat. The elastic component is located between the top material seat and the top material strip. Under the action of the elastic component, the top material strip is pressed from one side to fix the carrier or the male and female rings.

3. The feeding device for compatible carriers and mother-daughter rings as described in claim 1, characterized in that, It also includes a rotating mechanism fixedly connected to the feeding base, the fixed mechanism being fixedly connected to the rotating part of the rotating mechanism, and the rotating mechanism being able to drive the fixed mechanism to rotate.

4. The loading device of claim 3, wherein the carrier is a carrier ring having a plurality of carrier ring holes, and the subring is a subring having a plurality of subring holes, and the plurality of carrier ring holes and the plurality of subring holes are aligned with each other. The rotating mechanism includes a bearing, a rotating wheel, and a rotating drive mechanism. The bearing is fixedly installed in the mounting through hole, the rotating wheel is coaxially and fixedly connected to the inner ring of the bearing, and the rotating drive mechanism can drive the rotating wheel to rotate.

5. The feeding device for compatible carriers and mother-daughter rings as described in claim 4, characterized in that, The baffles are respectively fixed to the upper side of the inner ring of the bearing; the ejector assembly includes a mounting block, an ejector seat, an ejector bar, at least one guide rod and an elastic component sleeved on the guide rod. The ejector seat is fixedly connected to the upper side of the inner ring of the bearing through the mounting block. One end of the guide rod is fixedly provided with a limiting block, and the other end of the guide rod passes through the ejector seat and is fixedly connected to the ejector bar. The guide rod is slidably connected to the ejector seat. The elastic component is located between the ejector seat and the ejector bar. Under the action of the elastic component, the ejector bar is pressed from one side to fix the carrier or the mother and daughter rings.

6. The feeding device for compatible carriers and mother-daughter rings as described in claim 5, characterized in that, The rotary drive mechanism includes a motor, gears, and a belt, and the motor drives the rotating wheel to rotate through the gears and the belt.

7. The loading device of compatible carrier and sub-supercarrier according to any one of claims 1 to 6, characterized in that, All the baffles are "L" shaped baffles.

8. The loading device of compatible carrier and sub-supercarrier according to any one of claims 2, 5 or 6, characterized in that, The elastic component includes a spring.

9. The loading device of the compatible carrier and sub-supercarrier according to any one of claims 1 to 6, characterized in that, The arc portions on both sides of the position where the collar is tangent to the regular N-gon are straight edges. After the collar is installed, the straight edges of the collar are in contact with the baffle or the top material assembly.

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