Diaphragm valve part processing method

Abstract

The invention provides a treatment method of a diaphragm valve part, which belongs to the field of part processing, and specifically comprises the following steps: pretreating the surface of the diaphragm valve part; the coating, the diluent and the additive are mixed and pre-stirred until no sludge-like precipitate exists to obtain a coating coating, and then the coating coating is sealed in a container to be continuously and electrically stirred; a spraying gun is used for keeping a proper spraying angle and spraying distance, the stirred coating is evenly sprayed to the surface of the diaphragm valve part at the normal temperature, and the spraying thickness is controlled to be 5-13 microns; the sprayed diaphragm valve part is pre-cured in a drying oven at the first temperature, then the pre-cured diaphragm valve part is cured in the environment of a drying oven at the second temperature, and the first temperature is lower than the second temperature; and the thickness of the sprayed and cured diaphragm valve part is inspected, and the surface coating condition is observed. According to the treatment scheme, the coating is additionally arranged on the surface of the diaphragm valve part, abrasion and energy consumption of the diaphragm valve can be reduced, and therefore the service life of the diaphragm valve is prolonged.

Description

Technical Field

[0001] The present invention relates to the field of part processing, and particularly to a processing method for diaphragm valve parts. Background Art

[0002] In the semiconductor industry, there are strict requirements for the service life of fluid control components. Especially for diaphragm valves, customers require the valve to be opened and closed more than 10 million times. For some special diaphragm valves, the requirement is up to 30 million times, or even 100 million times. However, the valve life of existing diaphragm valves cannot fully meet the customer's usage requirements. The coating at the key parts of the diaphragm valve often peels off, and the peeled coating will fall into the interior of the diaphragm valve, affecting the opening and closing actions of the diaphragm valve, causing leakage accidents, and further affecting the life of the diaphragm valve. Conventional spraying methods cannot be applied to the surface treatment of semiconductor diaphragm valves. Therefore, there is an urgent need for a spraying treatment method for diaphragm valve parts to extend the life of diaphragm valves. Otherwise, it will have a great impact on the entire integrated circuit process fluid control. Summary of the Invention

[0003] Therefore, in order to overcome the above-mentioned disadvantages of the prior art, the present invention provides a processing method for diaphragm valve parts, which adds a coating to the surface of the diaphragm valve parts. The coating has an extremely low coefficient of friction, so that the surface of the coating has good self-lubricating performance, which can reduce the wear and energy consumption of the diaphragm valve, thereby extending the life of the diaphragm valve.

[0004] To achieve the above object, the present invention provides a processing method for diaphragm valve parts, including: Step S1, pre-treating the surface of the diaphragm valve parts, where the pre-treatment includes at least one of degreasing, phosphating, and sandblasting; Step S2, mixing the paint, thinner, and additive and performing pre-stirring until there is no sludge-like precipitate to obtain the coating paint, then sealing the coating paint in a container and continuously performing electric stirring; Step S3, using a spray gun to maintain an appropriate spraying angle and spraying distance, and evenly spraying the stirred coating paint onto the surface of the diaphragm valve parts at room temperature, with the spraying thickness controlled at 5 - 13 um; Step S4, pre-curing the sprayed diaphragm valve parts in an oven at a first temperature, and then curing the pre-cured diaphragm valve parts in an oven at a second temperature, where the first temperature is lower than the second temperature; Step S5, randomly inspecting the thickness of the sprayed and cured diaphragm valve parts and observing the surface coating condition.

[0005] In one embodiment, Step S1 includes: degreasing the diaphragm valve parts; immersing the degreased diaphragm valve parts in an organic solvent; and putting the immersed diaphragm valve parts into a hot air oven at 80°C and drying for 10 - 15 minutes.

[0006] In one embodiment, the duration of the pre-stirring is 3 - 5 minutes.

[0007] In one embodiment, the stirring speed of the electric stirring is 50 - 60 RPM, and the stirring duration is not less than 4 hours.

[0008] In one embodiment, the spraying angle is 45°, and the spraying distance is 24 - 26 cm.

[0009] In one embodiment, the value range of the first temperature is 100 - 150 °C, and the value range of the second temperature is 200 - 250 °C.

[0010] In one embodiment, the stirred coating paint is evenly sprayed onto the surface of the diaphragm valve part at room temperature, and the environmental humidity is not more than 40%.

[0011] In one embodiment, the diaphragm valve part after spraying in step S3 is placed in an 80 °C environment for 15 - 20 minutes for drying, and then put into the oven in step S4 for curing.

[0012] In one embodiment, a film thickness gauge is used to randomly inspect the thickness of the diaphragm valve part after spraying and curing, and the surface coating condition is observed.

[0013] In one embodiment, the diaphragm valve part is a valve cover nut or a top column.

[0014] Compared with the prior art, the advantages of the present invention are as follows: a coating is added to the surface of the diaphragm valve part. This coating has an extremely low friction coefficient, so that the coating surface has good self-lubricating performance, which can reduce the wear and energy consumption of the diaphragm valve, thereby prolonging the service life of the diaphragm valve. And this coating has high temperature resistance and can work stably for a long time in a high temperature environment. Its working temperature is as high as over 300 °C and can withstand the erosion of high temperature heat sources; this coating has good corrosion resistance to chemicals such as acids, alkalis, and solvents and can protect the base material from corrosion; the coating also has good insulation performance and can effectively prevent current leakage and arc discharge; this coating also has good anti-adhesion performance. The coating surface is smooth and not easy to adhere to impurities, and can effectively prevent dust, liquids, etc. from adhering to the coating surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required to be used in the embodiments will be briefly introduced below. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0016] Figure 1 It is a flow diagram of the processing method of the diaphragm valve part in the embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0017] The embodiments of the present application will be described in detail below with reference to the accompanying drawings.

[0018] The following specific examples illustrate the implementation manners of the present application. Those skilled in the art can easily understand other advantages and effects of the present application from the content disclosed in this specification. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. The present application can also be implemented or applied through other different specific implementation manners. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present application. It should be noted that, without conflict, the following embodiments and the features in the embodiments can be combined with each other. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts belong to the scope of protection of the present application.

[0019] It should be noted that the following describes various aspects of embodiments within the protection scope of the present invention. It should be obvious that the aspects described herein can be embodied in a wide variety of forms, and any specific structure and / or function described herein is illustrative only. Based on the present application, those skilled in the art should understand that one aspect described herein can be implemented independently of any other aspect, and two or more of these aspects can be combined in various ways. For example, any number and aspects described herein can be used to implement the device and / or practice the method. In addition, this device can be implemented and this method can be practiced using other structures and / or functions in addition to one or more of the aspects described herein.

[0020] It should also be noted that the drawings provided in the following embodiments only illustrate the basic concept of the present application in a schematic manner. The drawings only show the components related to the present application and are not drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and proportion of each component in actual implementation can be arbitrarily changed, and the component layout type may also be more complex.

[0021] In addition, in the following description, specific details are provided to facilitate a thorough understanding of the examples. However, those skilled in the art will understand that the described aspects can be practiced without these specific details.

[0022] As Figure 1 shown, the embodiments of the present application provide a processing method for diaphragm valve parts, including the following steps:

[0023] Step S1, perform surface pretreatment on the diaphragm valve parts, and the pretreatment includes at least one of degreasing, phosphating, and sandblasting.

[0024] The diaphragm valve parts can be at least one of the valve cover nut and the ejector pin. The surface of the diaphragm valve parts is pretreated. The pretreatment includes at least one of degreasing, phosphating and sandblasting.

[0025] The best surface bonding effect is achieved after sandblasting and / or phosphating and cleaning. If the surface roughness of the diaphragm valve parts meets the production requirements, only degreasing and cleaning pretreatment can also be used.

[0026] Step S2: Mix the paint, thinner and additive and perform pre-stirring until there is no sludge-like precipitate to obtain the coating paint. Then seal the coating paint in a container and continuously perform electric stirring.

[0027] Mix the paint, thinner and additive and perform pre-stirring. The duration of pre-stirring can be 3 - 5 minutes. Then seal the coating paint in a container and continuously perform electric stirring at a stirring speed of 50 - 60 RPM for at least 4 hours or more, with continuous stirring.

[0028] The composition of the paint is grease, such as MOLYKOTE D7825 of Dow Corning Corporation (the specific composition includes mineral oil, solid lubricant, thickener, etc.).

[0029] The composition of the thinner is MOLYKOTE 7415 of Dow Corning Corporation.

[0030] The composition of the additive is a common additive component in the art and is not limited herein.

[0031] Step S3: Use a spray gun to maintain an appropriate spraying angle and spraying distance, and evenly spray the stirred coating paint onto the surface of the diaphragm valve parts at room temperature. The spraying thickness is controlled within 5 - 13 um. The relative humidity during spraying is controlled below 40%. Step S3 is the spraying of the coating paint.

[0032] Dry the sprayed diaphragm valve parts. Place the sprayed diaphragm valve parts in an oven at 80°C to dry, so that the coating levels and the solvent volatilizes.

[0033] Step S4: Curing of the coating paint. Pre-cure the sprayed diaphragm valve parts in an oven at the first temperature, and then cure the pre-cured diaphragm valve parts in an oven at the second temperature. The first temperature is lower than the second temperature.

[0034] For example, the first temperature is 120°C and the second temperature is 220°C. Specifically, pre-cure the sprayed diaphragm valve parts in an oven at 120°C for 15 minutes, and then cure the pre-cured sprayed diaphragm valve parts in an oven at 220°C for 30 minutes.

[0035] Step S5: Randomly inspect the thickness of the diaphragm valve parts after spraying and curing, and observe the surface coating condition. Step S5 is the inspection of the coating paint. In one embodiment, a film thickness gauge is used to randomly inspect the thickness of the diaphragm valve parts after spraying and curing, and observe the surface coating condition.

[0036] In the above method, a coating is added to the surface of the diaphragm valve parts. This coating has an extremely low friction coefficient, enabling the coating surface to have good self-lubricating performance, which can reduce the wear and energy consumption of the diaphragm valve, thereby extending the service life of the diaphragm valve. Moreover, this coating has high temperature resistance and can work stably for a long time in a high-temperature environment. Its working temperature is as high as over 300 °C and it can withstand the erosion of high-temperature heat sources. This coating has good corrosion resistance to chemicals such as acids, alkalis, and solvents, and can protect the substrate from corrosion. The coating also has good insulation performance and can effectively prevent current leakage and arc discharge. This coating also has good anti-sticking properties. The coating surface is smooth and not easily attached with impurities, and can effectively prevent dust, liquids, etc. from adhering to the coating surface.

[0037] In one embodiment, Step S1 includes the following sub-steps:

[0038] Step 11: Degrease the diaphragm valve parts.

[0039] Step 12: Immerse the degreased diaphragm valve parts in an organic solvent for about 1 - 2 minutes. The organic solvent can be common solvents such as acetone and acetonitrile, or MOLYKOTE / molybdate ester diluents, such as MOLYKOTE 7415 transparent anti-friction coating ketone diluent of Dow Corning DuPont Molykote.

[0040] Step 13: Put the immersed diaphragm valve parts into a hot air oven at 80 °C and dry for 10 - 15 minutes. After ensuring that there is no water stain, no oil stain, and no dust on the surface, the spraying operation of Step S3 can be carried out.

[0041] In one embodiment, the duration of the pre-stirring is 3 - 5 minutes.

[0042] In one embodiment, the stirring speed of the electric stirring is 50 - 60 RPM, and the stirring duration is not less than 4 hours.

[0043] In one embodiment, the spraying angle is 45°, and the spraying distance is 24 - 26 cm.

[0044] In one embodiment, the value range of the first temperature is 100 - 150 °C, and the value range of the second temperature is 200 - 250 °C.

[0045] In one embodiment, the stirred coating paint is evenly sprayed onto the surface of the diaphragm valve parts at room temperature, and the environmental humidity is not greater than 40%.

[0046] In one embodiment, the diaphragm valve parts after spraying in step S3 are placed in an environment of 80°C for 15 - 20 minutes for drying, and then put into the oven in step S4 for curing.

[0047] In one embodiment, a film thickness gauge is used to randomly check the thickness of the diaphragm valve parts after spraying and curing, and the surface coating condition is observed.

[0048] Embodiment 1

[0049] A processing method for diaphragm valve parts includes the following steps:

[0050] Step S1, pre-treat the surface of the diaphragm valve parts, and the pre-treatment includes at least one of degreasing, phosphating and sandblasting.

[0051] The diaphragm valve part is a valve cover nut. The surface of the diaphragm valve part is pre-treated, and the pre-treatment includes degreasing, phosphating and sandblasting.

[0052] The specific steps of degreasing are to put the diaphragm valve parts into a degreasing agent (the degreasing agent is a commercially available degreasing agent, and the concentration of the degreasing agent is generally 3% - 10% by mass fraction), the degreasing time is 5 - 15 minutes, and the temperature range is 40 - 60°C.

[0053] The specific steps of phosphating are to put the diaphragm valve parts into a phosphating system. The temperature of the phosphating treatment is generally 30 - 50°C, and the phosphating time is 5 - 30 minutes. Taking the zinc-based phosphating system as an example, the zinc ion concentration is 10 - 30 g / L, and the concentration of dihydrogen phosphate ions is 20 - 50 g / L.

[0054] The pressure of sandblasting is 0.3 - 0.8 Mpa, and the sandblasting distance is 100 - 300 mm. Preferably, the sandblasting distance is controlled at 150 - 250 mm, which can ensure that the sandblasting particles evenly impact the surface of the parts. The sandblasting medium can be quartz sand, glass beads, steel shot, etc. For diaphragm valve parts, if thick oxide scales and rust need to be removed, steel shot can be used; if a relatively smooth surface needs to be obtained, glass beads can be used. The particle size range of the sandblasting medium is between 0.1 - 2.0 mm.

[0055] After degreasing, the sample parts are soaked in MOLYKOTE 7415 solvent for about 1 minute.

[0056] The degreased sample parts can be put into a hot air oven at 80°C for drying for 10 - 15 minutes. After ensuring that there is no water stain, no oil stain and no dust on the surface, the spraying operation in step S3 can be carried out.

[0057] Step S2: Mix the coating material, diluent, and other additives and perform pre-stirring until there is no sludge-like precipitate to obtain the coating paint. Then seal the coating paint in a container and continuously perform electric stirring.

[0058] The coating material is MOLYKOTE D7825 from Dow Corning Corporation. The diluent is MOLYKOTE 7415 from Dow Corning Corporation.

[0059] Before the spraying operation, mix the D7825 coating and the diluent and perform pre-stirring. First, stir for 3 - 5 minutes, and use a stainless steel rod to stir up the sludge-like precipitate until there is no sludge-like precipitate.

[0060] Then seal the coating paint in a container and place it on a roller bed (rocking bed) for electric stirring. Stir at 50 - 60 rpm for more than 4 hours. When in use, take out a part, and continue to seal and stir the remaining coating paint in the container until it is used up.

[0061] Step S3: Use a spray gun to maintain an appropriate spraying angle and spraying distance, and evenly spray the stirred coating paint onto the surface of the diaphragm valve parts at room temperature. Control the spraying thickness within 5 - 13 um, and place the sprayed diaphragm valve parts in an 80°C environment for drying to obtain a sample part.

[0062] The spraying angle is 45°, and the spraying distance is 24 - 26 cm.

[0063] Control the working environment temperature at room temperature and the relative humidity below 40%. After spraying, place the sample part in an oven at about 80°C for 15 minutes to volatilize the leveling solvent in the coating paint.

[0064] Step S4: Pre-cure the sample part in a 120°C environment for 15 minutes to ensure a smoother surface. Then cure the pre-cured sample part in a 220°C environment for 30 minutes to obtain the diaphragm valve parts.

[0065] Step S5: Use a film thickness gauge to randomly inspect the thickness of the sprayed and cured diaphragm valve parts and observe the surface coating condition.

[0066] As described above, it is only the specific implementation manner of this application, but the protection scope of this application is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed in this application should be covered within the protection scope of this application.

Claims

1. A processing method for a diaphragm valve part, characterized in that Including: Step S1, pre-treat the surface of the diaphragm valve parts, and the pre-treatment includes at least one of degreasing, phosphating and sandblasting; Step S2, mix the coating, diluent and additive and perform pre-stirring until there is no sludge-like precipitation to obtain the coating paint, then seal the coating paint in a container and continuously perform electric stirring; Step S3, use a spray gun to maintain an appropriate spraying angle and spraying distance, and evenly spray the stirred coating paint onto the surface of the diaphragm valve parts at room temperature, and the spraying thickness is controlled at 5-13um; Step S4, pre-cure the sprayed diaphragm valve parts in an oven at the first temperature, and then cure the pre-cured diaphragm valve parts in an oven at the second temperature environment, and the first temperature is lower than the second temperature; Step S5, randomly check the thickness of the sprayed and cured diaphragm valve parts and observe the surface coating condition.

2. The processing method according to claim 1, wherein The step S1 includes: Perform degreasing treatment on the diaphragm valve parts; Immerse the degreased diaphragm valve parts in an organic solvent; Put the immersed diaphragm valve parts into a hot air oven at 80°C and dry for 10-15 minutes.

3. The processing method according to claim 1, wherein The duration of the pre-stirring is 3-5 minutes.

4. The processing method according to claim 1, wherein The stirring speed of the electric stirring is 50-60 RPM, and the stirring duration is not less than 4 hours.

5. The processing method according to claim 1, characterized in that The spraying angle is 45°, and the spraying distance is 24-26 cm.

6. The processing method according to claim 1, wherein The value range of the first temperature is 100-150°C, and the value range of the second temperature is 200-250°C.

7. The processing method according to claim 1, wherein Evenly spray the stirred coating paint onto the surface of the diaphragm valve parts at room temperature, and the environmental humidity is not more than 40%.

8. The processing method according to claim 1, characterized in that Place the diaphragm valve parts sprayed in step S3 in an 80°C environment for 15-20 minutes to dry, and then put them into the oven in step S4 for curing.

9. The processing method according to claim 1, characterized in that, Use a film thickness gauge to randomly check the thickness of the sprayed and cured diaphragm valve parts and observe the surface coating condition.

10. The processing method according to claim 1, characterized in that , The diaphragm valve parts are valve cover nuts or ejector pins.

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