Air supply disc capable of continuously supplying air

Abstract

The utility model relates to the field of air supply discs, in particular to an uninterrupted air supply disc which comprises a disc body, high-pressure diaphragm valves, pressure sensors, pneumatic diaphragm valves, one-way valves, pressure reducing valves, pressure gauges and low-pressure diaphragm valves are symmetrically installed on the two sides of the disc body, the number of the high-pressure diaphragm valves on each side is multiple, and the multiple high-pressure diaphragm valves on each side are connected in parallel. The pressure sensor is located between one side of the pneumatic diaphragm valve and the high-pressure diaphragm valve farthest away from the corner of the disc body, the other side of the pneumatic diaphragm valve is connected with one side of the pressure reducing valve, one side of the pressure reducing valve is connected with one side of the pressure gauge, and the other side of the pressure gauge is connected with a plurality of low-pressure diaphragm valves. And two sides of the one-way valve are respectively connected with the pressure gauge and the high-pressure diaphragm valve. The product is simultaneously provided with the pneumatic diaphragm valves and the PLC end for linkage, the pressure sensor transmits a signal to the PLC end, when the pressure on one side of the disc body is low, an alarm is given, the pneumatic diaphragm valve on the low-pressure side is cut off, and the pneumatic diaphragm valve on the other side is opened at the same time, so that uninterrupted air supply is realized.

Description

Technical Field

[0001] This utility model relates to the field of gas supply plates, specifically a gas supply plate for uninterrupted gas supply. Background Technology

[0002] Chemical vapor deposition (CVD) equipment is a common type of equipment used to prepare various types of thin films. It requires various auxiliary devices, and the gas supply plate is a common auxiliary device for CVD equipment.

[0003] While the existing air supply plate can supply air for the operation of CVD equipment, it needs to stop supplying air and readjust when the air supply plate alarms due to low pressure, thus failing to continuously supply air to the CVD equipment. Utility Model Content

[0004] To achieve the above objectives, the purpose of this utility model is to provide an uninterrupted gas supply plate, which can solve the problems existing in the background art. This utility model provides the following technical solution:

[0005] A gas supply tray for uninterrupted gas supply includes a tray body. Symmetrically mounted on both sides of the tray body are high-pressure diaphragm valves, pressure sensors, pneumatic diaphragm valves, check valves, pressure reducing valves, pressure gauges, and low-pressure diaphragm valves. Each side has multiple high-pressure diaphragm valves connected in parallel. The pressure sensor is located between one side of the pneumatic diaphragm valve and the high-pressure diaphragm valve furthest from the corner of the tray body. The other side of the pneumatic diaphragm valve is connected to one side of the pressure reducing valve. One side of the pressure reducing valve is connected to one side of the pressure gauge. Multiple low-pressure diaphragm valves are connected to the other side of the pressure gauge. The check valves are connected to the pressure gauge and the high-pressure diaphragm valves on both sides, respectively. In this product, the high-pressure diaphragm valves are used to control the main pipeline gas circuit switch, and the pressure sensors are used to monitor the cylinder pressure in real time. The pneumatic diaphragm valve is used to control the PLC switch, allowing one side to be used while the other side is on standby. The check valve is used to prevent gas backflow, and the pressure reducing valve is used to regulate the internal pressure of the pipeline, thereby achieving a stable flow output. The pressure gauge is used to display the low-pressure end gas pressure, and the low-pressure diaphragm valve is used to control the output of the downstream gas. The working process of this product is as follows: After connecting the gas cylinders to both sides of the disc, close all the high-pressure diaphragm valves. Open the gas cylinder, open the low-pressure diaphragm valve to purge the air that entered the pipeline when changing the gas cylinder, and then open the purge valve (to ensure that the gas inside the pipeline does not contain impurities). Close the purge valve and the low-pressure diaphragm valve, and open the high-pressure diaphragm valve. The opening and closing of the pneumatic diaphragm valve can be controlled by the PLC.

[0006] As a further embodiment of this utility model: the high-pressure diaphragm valve, pressure sensor, pneumatic diaphragm valve, check valve, pressure reducing valve, pressure gauge and low-pressure diaphragm valve are all mounted on the disc body by VCR welding, which can ensure good connection.

[0007] As a further embodiment of this invention, a precision filter is also installed on the disc body. The precision filter is connected to a low-pressure diaphragm valve, which can maintain the cleanliness of the gas used at the downstream end.

[0008] As a further aspect of this invention: the precision filter has a filtration accuracy of at least 0.003μm, which can ensure the filtration effect and continuously supply gas to the CVD equipment.

[0009] As a further embodiment of this invention: the precision filter is installed on the disc body by VCR (Vacuum Coupling Radius Seal) welding, which can ensure good connection and excellent sealing performance.

[0010] Compared with the prior art, the beneficial effects of this utility model are:

[0011] This product adds a purge pipe to help maintain the cleanliness of the gas inside the pipe. It is also equipped with a pneumatic diaphragm valve and a PLC terminal for linkage. The pressure sensor sends a signal to the PLC terminal. When the pressure on one side of the panel is low, an alarm is triggered, the pneumatic diaphragm valve on the low-pressure side is shut off, and the pneumatic diaphragm valve on the other side is opened, thereby achieving uninterrupted gas supply. Attached Figure Description

[0012] Figure 1 This is a schematic diagram of the structure of the air supply plate for uninterrupted air supply in an embodiment of this utility model.

[0013] In the diagram: 1-High-pressure diaphragm valve; 2-Pressure sensor; 3-Pneumatic diaphragm valve; 4-Check valve; 5-Pressure reducing valve; 6-Pressure gauge; 7-Low-pressure diaphragm valve; 8-Precision filter; 9-Disc body. Detailed Implementation

[0014] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0015] The specific implementation of this utility model will be described in detail below with reference to specific embodiments.

[0016] Please see Figure 1This utility model provides an uninterrupted gas supply plate, including a plate body 9. A high-pressure diaphragm valve 1, a pressure sensor 2, a pneumatic diaphragm valve 3, a check valve 4, a pressure reducing valve 5, a pressure gauge 6, and a low-pressure diaphragm valve 7 are symmetrically installed on both sides of the plate body 9. Each side has multiple high-pressure diaphragm valves 1 connected in parallel. The pressure sensor 2 is located between one side of the pneumatic diaphragm valve 3 and the high-pressure diaphragm valve 1 furthest from the corner of the plate body 9. The other side of the pneumatic diaphragm valve 3 is connected to one side of the pressure reducing valve 5. One side of the pressure reducing valve 5 is connected to one side of the pressure gauge 6. Multiple low-pressure diaphragm valves 7 are connected to the other side of the pressure gauge 6. The two sides of the check valve 4 are connected to the pressure gauge 6 and the high-pressure diaphragm valve 1, respectively. In this product, the high-pressure diaphragm valve 1 is used to control the main pipeline gas circuit switch, and the pressure sensor... Device 2 is used to monitor the cylinder pressure in real time. Pneumatic diaphragm valve 3 is used to link the PLC control switch, so that one side can be used and the other side can be used as a backup. Check valve 4 is used to prevent gas backflow. Pressure reducing valve 5 is used to regulate the internal pressure of the pipeline, thereby achieving a stable flow output. Pressure gauge 6 is used to display the low-pressure end gas pressure. Low-pressure diaphragm valve 7 is used to control the output of gas at the downstream end. The working process of this product is as follows: After connecting the cylinders on both sides of the disc body 9, put the high-pressure diaphragm valve 1 in the closed state, open the cylinder, open the low-pressure diaphragm valve 7 to discharge the air that entered when changing the cylinder into the pipeline, and then open the purge valve (to ensure that the gas inside the pipeline does not contain impurities). Close the purge valve and the low-pressure diaphragm valve 7, open the high-pressure diaphragm valve 1, and control the opening and closing of the pneumatic diaphragm valve 3 through the PLC terminal.

[0017] In one embodiment of this utility model, the high-pressure diaphragm valve 1, pressure sensor 2, pneumatic diaphragm valve 3, check valve 4, pressure reducing valve 5, pressure gauge 6, and low-pressure diaphragm valve 7 are all mounted on the disc body 9 by VCR welding, which can ensure good connection.

[0018] In one embodiment of this utility model, the high-pressure diaphragm valve 1 is a high-pressure pneumatic diaphragm valve, which is easy to obtain, has good performance and long service life.

[0019] In one embodiment of this utility model, a precision filter 8 is also installed on the disc body 9. The precision filter 8 is connected to the low-pressure diaphragm valve 7, which can maintain the cleanliness of the gas used at the downstream end.

[0020] In one embodiment of this utility model, the precision filter 8 has a filtration accuracy of at least 0.003μm, which can ensure the filtration effect and continuously supply gas to the CVD equipment.

[0021] In one embodiment of this utility model, the precision filter 8 is installed on the disc body 9 by VCR (Vacuum Coupling Radius Seal) welding, which can ensure good connection and excellent sealing performance.

[0022] It should be noted that, in this utility model, unless otherwise explicitly specified and limited, the terms "fixed," "set up," etc., should be interpreted broadly. For example, they can refer to welded connections, bolted connections, or integral connections; they can refer to mechanical connections or electrical connections; they can refer to direct connections or indirect connections through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0023] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. An uninterrupted gas supply gas supply disc comprising a disc body, a high pressure diaphragm valve, a pressure sensor, a pneumatic diaphragm valve, a check valve, a pressure reducing valve, a pressure gauge and a low pressure diaphragm valve symmetrically installed on both sides of the disc body, the number of high pressure diaphragm valves on each side is multiple and the multiple high pressure diaphragm valves are connected in parallel, characterized in that, The pressure sensor is located between one side of the pneumatic diaphragm valve and the high-pressure diaphragm valve farthest from the corner of the disc body, the other side of the pneumatic diaphragm valve is connected with one side of the pressure reducing valve, one side of the pressure reducing valve is connected with one side of the pressure gauge, the other side of the pressure gauge is connected with a plurality of low-pressure diaphragm valves, and the two sides of the check valve are respectively connected with the pressure gauge and the high-pressure diaphragm valve.

2. The gas panel of claim 1, wherein The high-pressure diaphragm valve, the pressure sensor, the pneumatic diaphragm valve, the check valve, the pressure reducing valve, the pressure gauge and the low-pressure diaphragm valve are all installed on the disc body in a VCR welding manner.

3. The gas panel of claim 1, wherein, A precision filter is also installed on the disc body, and the precision filter is connected with the low-pressure diaphragm valve.

4. The gas panel of claim 3, wherein, The filtering precision of the precision filter is at least 0.003 μm.

5. The uninterrupted gas supply tray of claim 3 or 4, wherein, The precision filter is installed on the disc body in a VCR welding manner.

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