An ultra-quiet and ultra-stable vacuum experimental device simulating space environment

Abstract

The application discloses a kind of ultra-quiet ultra-stable vacuum experimental device simulating space environment, the experimental device is equipped with temperature environment control system, vacuum cabin system and vibration isolation system;The temperature environment control system is arranged in the outermost layer of the vacuum test device, and the vacuum cabin system and vibration isolation system are surrounded therein, the overall temperature can be controlled at 15~25℃, temperature control stability is ±0.1℃, realize the ultra-stable environment temperature of simulating space;The vacuum cabin system includes a loading platform, which is arranged on a series-connected active vibration isolator and passive vibration isolation layer capable of suppressing medium and low frequency vibration and high frequency vibration, and the loading platform is directly connected to the passive vibration isolation layer. The series-connected active vibration isolator and passive vibration isolation layer are used to effectively isolate the influence of ground vibration, and an ultra-quiet environment simulating space is realized.The application solves the problem that low-frequency vibration is difficult to suppress by traditional methods, and solves the problem that it is difficult for traditional vibration isolation systems to achieve high temperature control stability.

Description

TECHNICAL FIELD

[0001] The present application belongs to the technical field of space ground test, and particularly relates to a super-static and super-stable vacuum experiment device for simulating space environment, which is used for simulating space vacuum environment and providing a ground test environment for electric thrusters, weak force measurement, ground-based gravitational wave detection, etc. BACKGROUND

[0002] In recent years, with the rapid development of commercial spaceflight, a large number of spacecrafts have entered space at low cost. Before space equipment enters space, environmental simulation tests need to be carried out in a ground vacuum environment. However, more and more space equipment tests have put forward new requirements for the ground vacuum environment simulation system. Super static super stable Specifically, super-static means that the influence of ground vibration can be effectively isolated, and super-stable means stable environmental temperature. These two requirements are common for many precision measurement, manufacturing, space exploration and other space equipment ground vacuum environment simulation experiments. For example, micro-thruster research and development, weak force measurement, ground-based gravitational wave detection all require super-static vacuum environment to effectively isolate ground vibration noise. Weak force measurement and the like require long-term stability of the temperature of the vacuum environment simulation system.

[0003] The reason why the traditional ground space environment simulation system cannot simulate the super-static and super-stable space environment is that:

[0004] 1. It is difficult to suppress low-frequency vibration based on the vibration isolation method of the corrugated pipe. The traditional ground vacuum environment simulation system generally includes a vacuum chamber, a pumping system (mechanical pump, molecular pump, cold pump, water cooler, etc.), a control system. The test equipment is located in the vacuum chamber. The main vibration of the system comes from the vibration of the pumping system. Generally speaking, the mechanical pump and the molecular pump belong to high-speed rotating machinery, and the vibration frequency is in the range of dozens to hundreds of Hz, which belongs to high-frequency vibration. The cold pump belongs to a reciprocating motion part, and the vibration frequency is about 1 Hz, which belongs to a low-frequency vibration source. The traditional method uses a vibration isolation corrugated pipe to connect the pumping pipeline and the pumping pump to suppress the influence of high-frequency vibration on the test equipment. However, it is difficult to suppress the low-frequency vibration of the cold pump through the vibration isolation corrugated pipe.

[0005] 2. The traditional vibration isolation system generally wraps the test equipment in a certain area in the vacuum chamber and controls the temperature of the area, but it is difficult to achieve a high temperature control stability due to the complex temperature environment outside the vacuum chamber. SUMMARY

[0006] The present application proposes a super-static and super-stable space vacuum environment simulation experiment device to solve the problems of the prior art. The first purpose is to solve the problem that the traditional method based on the vibration isolation corrugated pipe is difficult to suppress low-frequency vibration. The second purpose is to solve the problem that the traditional vibration isolation system is difficult to achieve a high temperature control stability.

[0007] The present application proposes the following technical solutions to solve the problems in the prior art:

[0008] 1. An ultra-quiet and ultra-stable vacuum experiment device for simulating space environment, characterized in that the experiment device is provided with a temperature environment control system (3), a vacuum chamber system (1) and a vibration isolation system (2); the temperature environment control system (3) is arranged at the outermost layer of the vacuum experiment device and surrounds the vacuum chamber system (1) and the vibration isolation system (2) therein, so as to control the overall temperature at 15-25℃ and the temperature control stability at ±0.1℃, thereby realizing the ultra-stable environment temperature for simulating space; the vacuum chamber system (1) comprises a carrier table (2-1) arranged on the vibration isolation system (2) connected in series and capable of suppressing medium and low frequency vibrations and high frequency vibrations; the vibration isolation system (2) comprises a passive vibration isolation layer (2-2) arranged inside a vacuum chamber (1-1) and an active vibration isolator (2-3) of passive-active integration arranged outside the vacuum chamber (1-1), which are used to effectively isolate the influence of ground vibrations and realize the ultra-quiet environment for simulating space.

[0009] Further, the vacuum chamber system comprises a vacuum chamber (1-1), vacuum chamber legs (1-2) and a vacuum pump group (1-3); the vibration isolation system (2) comprises a carrier table (2-1), a passive vibration isolation layer (2-2), an active vibration isolator (2-3) and a vibration isolation bellows (2-4); the vacuum pump group (1-3) comprises a mechanical pump group and a molecular pump, which are the main vibration noise sources of the system; the carrier table (2-1) inside the vacuum chamber is placed on the passive vibration isolation layer (2-2), and the passive vibration isolation layer (2-2) and the active vibration isolator (2-3) below are connected in series, which are used to suppress the influence of high frequency vibrations and low frequency vibrations from the ground on the carrier table (2-1); the mechanical pump group and the molecular pump are connected with the vacuum chamber (1-1) by the vibration isolation bellows (2-4), which is used to reduce the influence of the main vibration noise sources of the system on the vacuum chamber (1-1).

[0010] Further, the active vibration isolator (2-3) of passive-active integration arranged outside the vacuum chamber (1-1) is connected in series with the passive part and the active part, which are separated by an intermediate block, and an inertial vibration sensor is located on the intermediate block to detect vibration signals, which are fed back to a piezoelectric brake through a filter circuit, so that the piezoelectric brake expands or contracts to eliminate ground vibrations.

[0011] Further, the active vibration isolator (2-3) and the passive vibration isolation layer (2-2) work simultaneously and in different frequency bands; the active vibration isolator (2-3) is used to isolate vibrations of 0.6-150Hz, and vibrations above 150Hz need to be isolated by the passive vibration isolation layer (2-2).

[0012] Further, the passive vibration isolation layer (2-2) adopts a three-point support plus vibration isolation cushion passive vibration isolation mode, and the vibration isolation cushion isolates the high-frequency vibration passing through the active vibration isolation system; the three-point support structure and the object table are in line-surface contact, the transmission area of the high-frequency vibration to the object table is reduced, the vibration is further reduced, and the levelness adjustment of the object table (2-1) can be realized.

[0013] Further, the temperature environment control system (3) is a square closed temperature control room surrounding the vacuum chamber (1-1), the top of the closed temperature control room above the vacuum chamber (1-1) is provided with a ventilation pipeline (3-4) and a plurality of fans (3-3) connected with the ventilation pipeline; the environment temperature monitoring sensor (3-1) and the environment temperature controller (3-2) are arranged on the left side wall of the closed temperature control room on the left side of the vacuum chamber (1-1); the return air wall (3-5) is installed on the right side wall of the closed temperature control room on the right side of the vacuum chamber (1-1), so that the temperature of the whole environment is more uniform; the environment temperature controller (3-2) first reduces the overall environment temperature to below 15 DEG C, and then controls the overall temperature to be 15-25 DEG C through the closed-loop multi-stage heating temperature control mode, and the temperature control stability is ± 0.1 DEG C.

[0014] Advantages and effects of the present application

[0015] 1. The present application organically combines the active vibration isolator 2-3 and the passive vibration isolation layer 2-2, solves the problem that the prior art based on the vibration isolation of the corrugated pipe is difficult to suppress low-frequency vibration. The organic combination is that the passive vibration isolation layer 2-2 is above and the active vibration isolator 2-3 is below, and the positions cannot be reversed. They are connected in series through the middle fast, and work in frequency bands. The frequency band working is that when the vibration frequency is in the range of 0.6-150 Hz, the active vibration isolator gives a reverse force through the piezoelectric brake to offset the vibration, and when the vibration frequency exceeds 150 Hz, the active vibration isolator no longer works, at this time the passive vibration isolation layer 2-2 absorbs high-frequency vibration; in order to reduce the influence of high frequency exceeding 150 Hz on the vacuum chamber 1-1, the passive vibration isolation layer 2-2 adopts a three-point support plus vibration isolation cushion passive vibration isolation mode, and the vibration isolation cushion isolates the high-frequency vibration passing through the active vibration isolation system; the three-point support structure and the object table are in line-surface contact, the transmission area of the high-frequency vibration to the object table is reduced, the vibration is further reduced, and the levelness adjustment of the object table is realized.

[0016] 2. The application achieves unexpected effects by changing the physical position of the temperature control object or the temperature control area. The change of the physical position of the temperature control object or the temperature control area refers to moving the temperature control object from the vacuum chamber 1-1 to outside the vacuum chamber 1-1, that is, the application takes the entire vacuum chamber 1-1 as the temperature control object. The conventional vibration isolation system generally wraps the test equipment in a certain area in the vacuum chamber and controls the temperature of the area, but this scheme is difficult to achieve high temperature control stability due to the complex temperature environment outside the vacuum chamber. The application takes the complex temperature environment outside the vacuum chamber and the temperature control object in the vacuum chamber 1-1 as a whole as the temperature control object, and even if the environmental factors outside the vacuum chamber 1-1 are complex, the temperature stability can be controlled within ±0.1℃ through closed-loop control of the temperature control system. BRIEF DESCRIPTION OF DRAWINGS

[0017] Figure 1 Fig. 1 is a schematic diagram of the ultra-quiet and ultra-stable vacuum experiment device for simulating space environment of the application;

[0018] Figure 2 Fig. 2 is a schematic diagram of the active and passive integrated system of the application;

[0019] Figure 3 Fig. 3 is a side view and a top view of the passive vibration isolation layer of the application;

[0020] Figure 4 Fig. 4 is a connection of the vacuum chamber and the vacuum pump group of the application;

[0021] Figure 5 Fig. 5 is a positional relationship between the vacuum chamber and the active vibration isolator of the application;

[0022] Figure 6 Fig. 6 is a schematic diagram of the temperature control logic diagram of the application.

[0023] In the figure, 1: vacuum chamber system; 1-1: vacuum chamber; 1-2: vacuum chamber leg; 1-3: vacuum pump group; 2: vibration isolation system, 2-1: object table; 2-2: passive vibration isolation layer; 2-3: active vibration isolator; 2-4: vibration isolation bellows; 3: environmental temperature control system; 3-1: environmental temperature monitoring sensor; 3-2: environmental temperature controller; 3-3: fan; 3-4: ventilation duct; 3-5: return air wall; 3-6: outdoor unit. DETAILED DESCRIPTION

[0024] Innovations of the application

[0025] 1. One of the innovations is that the active vibration isolator 2-3 and the passive vibration isolation layer 2-2 are organically combined to solve the problem that the prior art based on the vibration isolation bellows vibration isolation method is difficult to suppress low-frequency vibration. The organic combination is that the passive vibration isolation layer 2-2 is on the top and the active vibration isolator 2-3 is on the bottom, and the load sizes of the two are very different, so the positions cannot be reversed. The organic combination is that it works in different frequency bands. When the vibration frequency is in the range of 0.6-150Hz, the active vibration isolator cancels out the vibration through the reverse force of the piezoelectric brake. When the vibration frequency exceeds 150Hz, the active vibration isolator no longer works, and the passive vibration isolation layer 2-2 absorbs high-frequency vibration at this time.

[0026] 2. The second innovation is that the environmental temperature control system changes the physical position of the temperature control object or the temperature control area to achieve unexpected results. The change of the physical position of the temperature control object or the temperature control area refers to moving the temperature control object from the vacuum chamber 1-1 to outside the vacuum chamber 1-1, that is, taking the entire vacuum chamber 1-1 as the temperature control object instead of taking a certain test equipment inside the vacuum chamber as the temperature control object. The traditional temperature control system generally wraps the test equipment in a certain area inside the vacuum chamber and controls the temperature of the area, but this scheme is difficult to achieve high temperature control stability due to the complex temperature environment outside the vacuum chamber. The invention combines the complex temperature environment factors outside the vacuum chamber and the test equipment inside the vacuum chamber 1-1 into a common body, and takes the common body as the temperature control object. Even if the environmental factors outside the vacuum chamber 1-1 are complex, since the environmental factors outside the vacuum chamber 1-1 have been taken as the temperature control object, the temperature can be adjusted in real time through the closed-loop system to overcome the influence of the environmental factors outside the vacuum chamber 1-1 on the temperature, and the temperature is always kept in a stable range. At this time, the test equipment in the vacuum chamber will not be affected by the complex external environmental factors, thereby solving the problem that the traditional vibration isolation system is difficult to achieve high temperature control stability.

[0027] 3. Design principle of series vibration isolator

[0028] There are two ways to connect the vibration isolators in series. The present invention adopts the method of passive vibration isolator on the top and active vibration isolator on the bottom. First, comparison of the two ways: when two vibration isolators are connected in series, the vibration transmission path is from the foundation through the first vibration isolator, then through the second vibration isolator, and finally to the object table. The total transmission rate of the series system can be approximately the product of the transmission rates of the two vibration isolators (assuming that the coupling effect is small). There are two possible arrangements: A. Active vibration isolator on the bottom, passive vibration isolator on the top (next to the object table): foundation → active vibration isolator → passive vibration isolator → object table. The active vibration isolator handles low-frequency vibrations of 0- dozens of Hz, and the passive vibration isolator handles vibrations above dozens of Hz to 150 Hz. For 0- dozens of Hz: the active vibration isolator can effectively suppress, and the passive vibration isolator has poor effect in this frequency range (may amplify vibration). For dozens of Hz and above: the active vibration isolator has limited effect, and the passive vibration isolator can play a role. B. Passive vibration isolator on the bottom, active vibration isolator on the top (next to the object table): foundation → passive vibration isolator → active vibration isolator → object table. The passive vibration isolator has poor effect on 0- dozens of Hz (may amplify), and the active vibration isolator needs to handle the amplified low-frequency vibrations. This arrangement may result in the active vibration isolator needing greater control force to offset the amplified low-frequency vibrations of the passive vibration isolator, with lower efficiency. If the active vibration isolator is next to the object table, i.e. passive on the bottom and active on the top, the passive vibration isolator may first amplify low-frequency vibrations, and the active vibration isolator needs to make extra efforts to offset the amplified vibrations, with low efficiency. If the passive vibration isolator is next to the object table, i.e. active on the bottom and passive on the top, the active vibration isolator first attenuates low-frequency vibrations, and the passive vibration isolator has less effect on low frequencies, although the effect is poor, but the input low-frequency vibrations have been attenuated by the active vibration isolator.

[0029] Second, the present invention aims to solve the problem that traditional methods are difficult to suppress low-frequency vibrations. In order to effectively suppress low-frequency vibrations below dozens of Hz, we need: in the vibration transmission path, ⑴ first handle low-frequency vibrations by the active vibration isolator, as it is effective in the range of 0- dozens of Hz. ⑵ Then handle higher frequency vibrations (dozens of Hz and above) by the passive vibration isolator, to avoid the noise or control difficulty that the active vibration isolator may introduce at high frequencies. ⑶ If the passive vibration isolator is next to the object table, i.e. active on the bottom and passive on the top, the active vibration isolator first attenuates low-frequency vibrations, and the passive vibration isolator has less effect on low frequencies (although the effect is poor, but the input low-frequency vibrations have been attenuated by the active vibration isolator), and high-frequency vibrations are further attenuated by the passive vibration isolator. If the active vibration isolator is next to the object table (i.e. passive on the bottom and active on the top): the passive vibration isolator may first amplify low-frequency vibrations, and the active vibration isolator needs to make extra efforts to offset the amplified vibrations, with low efficiency.

[0030] Third, conclusion: To optimally overcome low-frequency vibrations in the 0-tens of Hz range, a passive vibration isolator should be placed immediately adjacent to the stage, while an active vibration isolator should be placed below it. This ensures: ① The active vibration isolator first addresses the low-frequency vibrations (0-tens of Hz), effectively attenuating them. ② The passive vibration isolator then addresses the remaining high-frequency vibrations (above tens of Hz), while having minimal impact on the transmission of low-frequency vibrations (because the low frequencies have already been attenuated by the active vibration isolator).

[0031] Based on the above principles, this invention designs an ultra-quiet and ultra-stable vacuum experimental device to simulate the space environment, such as... Figures 1-6 As shown, its features are as follows: the experimental device is equipped with a temperature environment control system 3, a vacuum chamber system 1, and a vibration isolation system 2; the temperature environment control system 3 is arranged on the outermost layer of the vacuum test device, surrounding the vacuum chamber system 1 and the vibration isolation system 2, and can control the overall temperature at 15-25℃ with a temperature control stability of ±0.1℃, achieving a simulated ultra-stable environment temperature of space; the vacuum chamber system 1 includes a stage 2-1, which is arranged on the series-connected vibration isolation system 2, which can suppress low-frequency and high-frequency vibrations; the vibration isolation system 2 includes a passive vibration isolation layer 2-2 arranged inside the vacuum chamber 1-1 and an active vibration isolator 2-3 arranged outside the vacuum chamber 1-1, which effectively isolates the influence of ground vibrations and achieves a simulated ultra-quiet environment of space.

[0032] like Figure 1 The vacuum chamber system shown includes a vacuum chamber 1-1, vacuum chamber legs 1-2, and a vacuum pump assembly 1-3. The vibration isolation system 2 includes a platform 2-1, a passive vibration isolation layer 2-2, an active vibration isolator 2-3, and a vibration isolation bellows 2-4. The vacuum pump assembly 1-3 includes a mechanical pump assembly, a molecular pump, etc., which are the main sources of vibration and noise in the system. The platform 2-1 in the vacuum chamber is placed on the passive vibration isolation layer 2-2. The passive vibration isolation layer 2-2 and the active vibration isolator 2-3 below it are connected in series. The series-connected passive vibration isolation layer 2-2 and active vibration isolator 2-3 are used to suppress the impact of high-frequency and low-frequency vibrations from the ground on the platform 2-1. The mechanical pump assembly and the molecular pump are connected to the vacuum chamber 1-1 by the vibration isolation bellows 2-4 to reduce the impact of the main sources of vibration and noise in the system on the vacuum chamber 1-1.

[0033] like Figure 2 As shown, the active vibration isolator 2-3, which is installed outside the vacuum chamber 1-1, has a passive part and an active part connected in series and separated by an intermediate block. The inertial vibration sensor is located on the intermediate block. The vibration signal is detected and fed back to the piezoelectric brake through a filter circuit. The piezoelectric brake will expand or contract, thereby eliminating ground vibration.

[0034] Supplementary notes:

[0035] 1) Figure 2 The active vibration isolator 2-3 is shown as an integrated active-passive vibration isolator, in which the spring and the damper on the right side of the spring constitute the passive vibration isolation function; the vibration sensor, the filter, the high-voltage amplifier and the piezoelectric actuator constitute the active vibration isolation system.

[0036] 2) Figure 2 The isolated load: refers to the vacuum chamber 1-1 that needs to be isolated, that is, the vacuum chamber 1-1 and the thrust measuring equipment inside.

[0037] 3) The vibration isolation foot surface of the active-passive integrated active vibration isolator 2-3 is in direct contact with the ground, that is, it needs to be placed directly on the ground.

[0038] As shown in Figure 1 , the active vibration isolator 2-3 outside the vacuum chamber 1-1 and the passive vibration isolation layer 2-2 inside the vacuum chamber 1-1 work simultaneously and in different frequency bands; the active vibration isolator 2-3 is used to isolate vibrations of 0.6-150Hz, and vibrations above 150Hz need to be isolated by the passive vibration isolation layer 2-2.

[0039] As shown in Figure 3 , the passive vibration isolation layer 2-2 adopts a three-point support plus vibration isolation cushion passive vibration isolation mode, and the vibration isolation cushion isolates high-frequency vibrations passing through the active vibration isolation system; the three-point support structure and the object table are in line-surface contact, reducing the transmission area of high-frequency vibrations to the object table, further reducing vibrations, and at the same time, the levelness adjustment of the object table (2-1) can be realized.

[0040] As shown in Figure 1 , the temperature environment control system 3 is a square closed temperature control room surrounding the vacuum chamber 1-1, a ventilation duct 3-4 and multiple fans 3-3 connected to the ventilation duct are arranged on the top of the closed temperature control room above the vacuum chamber 1-1; an environmental temperature monitoring sensor 3-1 and an environmental temperature controller 3-2 are arranged on the left side wall of the closed temperature control room on the left side of the vacuum chamber 1-1; a return air wall 3-5 is installed on the right side wall of the closed temperature control room on the right side of the vacuum chamber 1-1, so that the temperature of the entire environment is more uniform; the environmental temperature controller 3-2 first reduces the overall environmental temperature to below 15℃, and then controls the overall temperature at 15-25℃ by means of closed-loop multi-stage heating temperature control, and the temperature control stability is ±0.1℃.

[0041] It should be emphasized that the above specific embodiments are only an explanation of the present application, and are not a limitation of the present application. Those skilled in the art can make modifications to the above embodiments without creative contribution after reading the present specification, but as long as they are within the scope of the claims of the present application, they are protected by the patent law.

Claims

1. A super-quiet and super-stable vacuum experimental device for simulating a space environment, characterized in that: The experimental device is provided with a temperature environment control system (3), a vacuum cabin system (1) and a vibration isolation system (2); the temperature environment control system (3) is arranged on the outermost layer of the vacuum experimental device, and the vacuum cabin system (1) and the vibration isolation system (2) are surrounded therein, the overall temperature can be controlled at 15~25℃, the temperature control stability is ±0.1℃, the super-stable environment temperature of simulating space is realized; the vacuum cabin system (1) comprises a material loading platform (2-1), the material loading platform (2-1) is arranged on the vibration isolation system (2) connected in series and capable of inhibiting medium and low frequency vibration and high frequency vibration; the vibration isolation system (2) comprises a passive vibration isolation layer (2-2) arranged in the vacuum cabin (1-1) and an active vibration isolator (2-3) of passive-active integration arranged outside the vacuum cabin (1-1), the passive vibration isolation layer (2-2) and the active vibration isolator (2-3) of passive-active integration are used to effectively isolate the influence of ground vibration, and realize the super-still environment of simulating space; The vacuum cabin system comprises a vacuum cabin (1-1), a vacuum cabin support leg (1-2) and a vacuum pump group (1-3); the vibration isolation system (2) comprises a material loading platform (2-1), a passive vibration isolation layer (2-2), an active vibration isolator (2-3) and a vibration isolation bellows (2-4); the vacuum pump group (1-3) comprises a mechanical pump group and a molecular pump, and is the main vibration noise source of the system; the material loading platform (2-1) in the vacuum cabin is placed on the passive vibration isolation layer (2-2), the passive vibration isolation layer (2-2) and the active vibration isolator (2-3) below are connected in series, and the passive vibration isolation layer (2-2) and the active vibration isolator (2-3) connected in series are used to inhibit the influence of high frequency vibration and low frequency vibration from the ground on the material loading platform (2-1); the mechanical pump group and the molecular pump are connected with the vacuum cabin (1-1) through the vibration isolation bellows (2-4), so as to reduce the influence of the main vibration noise source of the system on the vacuum cabin (1-1).

2. The ultra-quiet and ultra-stable vacuum experiment device for simulating space environment according to claim 1, characterized in that: The active vibration isolator (2-3) of passive-active integration arranged outside the vacuum cabin (1-1) is connected in series with the passive part and the active part, and the two are separated by an intermediate block, an inertial vibration sensor is located on the intermediate block, a vibration signal detected is fed back to a piezoelectric brake through a filtering circuit, the piezoelectric brake expands or contracts, so that the ground vibration is eliminated.

3. The super-still and super-stable vacuum experimental device for simulating space environment according to claim 1, characterized in that the active vibration isolator (2-3) outside the vacuum cabin (1-1) and the passive vibration isolation layer (2-2) inside the vacuum cabin (1-1) work simultaneously and in different frequency bands; the active vibration isolator (2-3) is used to isolate vibration of 0.6~150Hz, and vibration above 150Hz needs to be isolated by the passive vibration isolation layer (2-2).

4. The ultra-quiet and ultra-stable vacuum experiment device for simulating space environment according to claim 1, characterized in that: The passive vibration isolation layer (2-2) adopts a three-point support passive vibration isolation mode with vibration isolation soft pads, the vibration isolation cushion isolates high frequency vibration passing through the active vibration isolation system; the three-point support structure and the material loading platform are in line-surface contact, the transmission area of high frequency vibration to the material loading platform is reduced, the vibration is further reduced, and the levelness adjustment of the material loading platform (2-1) can be realized.

5. The ultra-quiet and ultra-stable vacuum experiment device for simulating space environment according to claim 1, characterized in that: The temperature environment control system (3) is a square closed temperature control room surrounding the vacuum cabin (1-1), a ventilation pipeline (3-4) and multiple ventilators (3-3) connected with the ventilation pipeline are arranged on the top of the closed temperature control room above the vacuum cabin (1-1); an environment temperature monitoring sensor (3-1) and an environment temperature controller (3-2) are arranged on the left side wall of the closed temperature control room on the left side of the vacuum cabin (1-1); a return air wall (3-5) is installed on the right side wall of the closed temperature control room on the right side of the vacuum cabin (1-1), so that the temperature of the whole environment is more uniform; the environment temperature controller (3-2) firstly reduces the overall environment temperature to below 15 DEG C, and then controls the overall temperature at 15-25 DEG C through a closed-loop multi-stage heating temperature control mode, and the temperature control stability is ±0.1 DEG C.

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