Electronic shelf, electronic shelf management system and working method thereof

Abstract

An electronic shelf, an electronic shelf management system and a working method thereof, the electronic shelf comprises: a shelf main body, the shelf main body comprises a plurality of warehouses, an opening of each warehouse is provided with a radio frequency induction device, and the radio frequency induction devices are used for identifying information of materials entering and exiting from the warehouses; the goods shelf main body is fixed on the moving chassis, and the moving chassis can drive the electronic goods shelf to move; and the electronic goods shelf control module is arranged in the goods shelf main body, and the electronic goods shelf control module is used for carrying out information interaction with the radio frequency induction device and carrying out information interaction with an external system. According to the electronic shelf, visual dynamic management of materials is realized, and the accuracy and stability of a production system are improved.

Description

Technical Field

[0001] The present invention relates to the field of semiconductor manufacturing, and particularly to an electronic shelf, an electronic shelf management system and a working method thereof. Background Art

[0002] Currently, the wafer production technology in wafer manufacturing factories has high requirements, and the value of a single wafer also increases with the improvement of the production process. At present, for cross-regional wafer transfer in 200mm wafer manufacturing factories, a Material Control System (MCS for short) and a logistics control system are used. Between the electronic shelf and the machine tool, goods can be picked up and loaded through a Mobile Robot (MR for short). However, due to the previous planning and space limitations in most workshops of existing wafer manufacturing factories, mobile robots cannot cover all areas, and the electronic shelves are unstable.

[0003] Therefore, it is necessary to improve the performance and application scenarios of the electronic shelf to improve production efficiency. Summary of the Invention

[0004] The technical problem solved by the present invention is to provide an electronic shelf, an electronic shelf management system and a working method thereof to improve production efficiency.

[0005] To solve the above technical problem, the technical solution of the present invention provides an electronic shelf, including: a shelf main body, the shelf main body includes a plurality of storage bins, a radio frequency induction device is arranged at the opening of the storage bin, and the radio frequency induction device is used to identify the material information entering and leaving the storage bin; a moving chassis, the shelf main body is fixed on the moving chassis, and the moving chassis can drive the electronic shelf to move; an electronic shelf control module, which is arranged in the shelf main body, and the electronic shelf control module is used to interact with the radio frequency induction device and to interact with an external system.

[0006] Optionally, the shelf main body includes a goods location area and a control area distributed in the horizontal direction, a plurality of the storage bins are arranged in the goods location area, and the electronic shelf control module is arranged in the control area; the shape of the shelf main body includes a cube, the shelf main body includes a top surface, a bottom surface, a first surface, a second surface, a third surface and a fourth surface, the first surface and the second surface, the third surface and the fourth surface are opposite to each other in pairs, the third surface is a side surface of the goods location area, and the fourth surface is a side surface of the control area.

[0007] Optionally, a plurality of the storage bins include several rows stacked vertically, the number of storage bins in each row is multiple, the first surface of the shelf main body exposes the opening of the storage bin, the second surface of the shelf main body is the back of the storage bin, and a plurality of the storage bins are isolated from each other by partition boards; the radio frequency induction device is arranged on the bottom surface at the opening of the storage bin.

[0008] Optionally, it further includes: a liquid crystal display module embedded in the first surface at the bottom of each bin, the liquid crystal display module being electrically connected to the electronic shelf control module, and the liquid crystal display module being configured to display the material information in each bin received by the electronic shelf control module.

[0009] Optionally, it further includes: a position sensing device provided on the bottom surface of each bin, the position sensing device being electrically connected to the electronic shelf control module, and the position sensing device being configured to sense whether the materials in the bin have moved and send the information on whether the materials have moved to the electronic shelf control module; an alarm device integrated in the liquid crystal display module, and the alarm device being configured to receive an alarm signal sent by the electronic shelf control module when the materials in the bin have moved and issue an alarm.

[0010] Optionally, it further includes: a material fixing device provided on the bottom surface of each bin.

[0011] Optionally, the moving chassis includes: a bearing part fixed to the bottom surface of the shelf main body, and a walking wheel fixedly connected to the bottom of the bearing part, and the walking wheel drives the electronic shelf to move.

[0012] Optionally, the number of the walking wheels is 4, and two walking wheels close to the third surface include universal wheels; the electronic shelf further includes: a driving device provided in the control area of the shelf main body, the driving device being electrically connected to the electronic shelf control module, and the driving device being configured to drive two walking wheels close to the fourth surface; a moving assistance module provided on the top surface of the shelf main body, and the moving assistance module being configured to send a driving signal to the electronic shelf control module after manual operation, and the electronic shelf control module causes the driving device to drive two walking wheels close to the fourth surface to move.

[0013] Optionally, the material of the walking wheel includes high-strength rubber silent rollers.

[0014] Optionally, it further includes: a human-computer interaction module embedded in the top surface of the shelf main body, the human-computer interaction module being electrically connected to the electronic shelf control module, and the human-computer interaction module being configured to display the status of each bin and provide an operation interface for manual operation of the electronic shelf; the status of the bin includes: whether the bin is idle and whether the bin has a fault, and each status is represented by a different color.

[0015] Optionally, the electronic shelf further includes: a locking device provided at the bottom of the fourth surface of the shelf main body, the locking device being configured to fix or unlock the electronic shelf, the locking device being electrically connected to the electronic shelf control module, and the locking device can be operated to be fixed or unlocked through the human-computer interaction module.

[0016] Optionally, it further includes: a handle fixed to the fourth surface.

[0017] Optionally, the radio frequency induction device includes a radio frequency reader and a radio frequency antenna. The radio frequency reader is used to read the materials with radio frequency tags when they enter and leave the warehouse, and the radio frequency antenna is used to send the information read and written by the radio frequency reader and sense the radio frequency electronic tags on the surface of the material packaging.

[0018] Optionally, it further includes: a power module embedded in the control area, and the power module provides power support for the electronic shelf; a charging module embedded in the control area, and the charging module is used to charge the power module. The charging module includes wireless charging or contact fast charging, and the charging interface of the charging module is exposed on the fourth surface.

[0019] Optionally, the electronic shelf control module further includes a navigation module, and the electronic shelf can move according to the route provided by the navigation module.

[0020] Optionally, it further includes: a robotic arm grasping device, and the robotic arm grasping device is communicatively connected to the electronic shelf control module, and the robotic arm grasping device is used to grasp the materials in the warehouse.

[0021] Optionally, the material information includes: batch number, quantity, in and out warehouse time.

[0022] Correspondingly, the technical solution of the present invention further provides an electronic shelf management system, including: an electronic shelf; a manufacturing execution system, which conducts information interaction with the electronic shelf; an automatic handling robot system, which conducts information interaction with the electronic shelf.

[0023] Optionally, it further includes: a client, and the user can query the warehouse status of the electronic shelf through the client; the client includes: a web page, a small program or a mobile application.

[0024] Optionally, it further includes: a server, and the electronic shelf, the manufacturing execution system, and the automatic handling robot system conduct information interaction through the server.

[0025] Correspondingly, the technical solution of the present invention further provides a working method of an electronic shelf management system, including: providing an electronic shelf management system; providing production equipment, and the production equipment is communicatively connected to the manufacturing execution system, and the production equipment is used to send a feeding signal or a discharging signal; the manufacturing execution system obtains the feeding signal, the discharging signal or the user's inventory transfer information, and conducts information interaction with the electronic shelf and the automatic handling robot system; the automatic handling robot system dispatches an automatic handling robot to carry the materials according to the information interaction result.

[0026] Optionally, the manufacturing execution system interacts with the electronic shelf and the automatic handling robot system, including: the manufacturing execution system obtains the loading signal sent by the production equipment; the manufacturing execution system obtains the product batch information preferentially produced by the production equipment according to the real-time dispatching system; the manufacturing execution system obtains the material information matching the product batch information from the electronic shelf, and the material information includes the material code, the position information of the electronic shelf where the material is stored, and the warehouse information of the material stored in the electronic shelf; the manufacturing execution system sends the material information to the automatic handling robot system; the automatic handling robot system dispatches the automatic handling robot in the area where the electronic shelf is located to pick up the material according to the material information, and the automatic handling robot moves to the position of the electronic shelf according to the navigation route and takes out the target material from the warehouse; the automatic handling robot sends the target material to the loading port of the production equipment according to the navigation route, and the material is loaded by a mechanical gripper or manually.

[0027] Optionally, when the automatic handling robot takes out the target material from the warehouse, the radio frequency induction device at the bottom of the warehouse opening identifies the material information leaving the warehouse and sends the material information to the electronic shelf control module.

[0028] Optionally, the manufacturing execution system interacts with the electronic shelf and the automatic handling robot system, including: the manufacturing execution system obtains the unloading signal sent by the production equipment; the manufacturing execution system detects whether the state of the discharge port of the production equipment is consistent with the unloading signal; the manufacturing execution system sends a storage instruction request to the electronic shelf for storage; the electronic shelf allocates a warehouse according to the storage instruction; the manufacturing execution system obtains the allocated warehouse information and sends it to the automatic handling robot system, and the warehouse information includes the position information of the electronic shelf and the position of the warehouse in the electronic shelf; the automatic handling robot system dispatches the automatic handling robot in the area where the discharge port of the production equipment is located to unload the material, and the automatic handling robot moves to the position of the electronic shelf according to the navigation route and stores the target material in the allocated warehouse.

[0029] Optionally, when the automatic handling robot stores the target material in the allocated warehouse, the radio frequency induction device at the bottom of the warehouse opening identifies the material information entering the warehouse and sends the material information to the electronic shelf control module.

[0030] Optionally, after the electronic shelf is full, it further includes: moving the electronic shelf across regions, and the cross-region movement includes manual movement or automatic movement.

[0031] Optionally, the manual movement includes: manually operating the operation interface of the human-machine interaction module to manually unlock the locking device; manually operating the moving assistance module to make the driving device drive the walking wheels to move, so that the electronic shelf moves to the specified position.

[0032] Optionally, the automatic movement includes: after the electronic shelf obtains a cross-region movement signal, the navigation module provides a specified route, and the driving device drives the electronic shelf to move to the specified position.

[0033] Optionally, the manufacturing execution system interacts with the electronic shelf and the automatic handling robot system, including: the manufacturing execution system obtains user goods transfer information; the manufacturing execution system obtains material information matching the user goods transfer information from the electronic shelf, and the material information includes a material code, the position information of the electronic shelf where the material is stored, and the warehouse information of the material stored in the electronic shelf; the manufacturing execution system sends the material information to the automatic handling robot system; the automatic handling robot system dispatches the automatic handling robot in the area where the electronic shelf is located to pick up the material according to the material information, the automatic handling robot moves to the position of the electronic shelf according to the navigation route, and takes out the target material from the warehouse; the automatic handling robot delivers the target material to the specified position according to the navigation route.

[0034] Optionally, the manufacturing execution system interacts with the electronic shelf, including: after the material transport vehicle arrives at the specified position, the manufacturing execution system obtains a discharging signal; the material is automatically transferred between the electronic shelf and the material transport vehicle through a mechanical gripper.

[0035] Compared with the prior art, the technical solution of the present invention has the following beneficial effects:

[0036] The electronic shelf of the present invention can accurately record materials through a radio frequency induction device, and through the electronic shelf control module, it interacts with the internal devices and external systems of the electronic shelf, realizes the visual dynamic management of materials, improves the accuracy and stability of the production system, and realizes the real-time management and automatic handling of wafers in transit in the factory, improving the production efficiency.

[0037] Furthermore, the electronic tag on the surface of the material package is a radio frequency electronic tag, and the induction device is a radio frequency induction device. The radio frequency electronic tag and the induction device are easy to trigger induction, which improves the induction accuracy, can accurately record the materials entering and leaving the warehouse, and improves the accuracy and stability of the production system.

[0038] The electronic shelf management system and its working method of the present invention integrate an electronic shelf, a manufacturing execution system, an automatic handling robot system, etc. The electronic shelf, the manufacturing execution system, and the automatic handling robot system can interact with each other, realize the real-time management and automatic handling of wafer materials in transit in the factory, form a complete automated logistics system for the production line, and have the advantages of high automation degree, high working efficiency, high working accuracy, and low cost for transforming the original production line, improving the production efficiency.

[0039] Furthermore, the electronic shelf can move across regions, which can overcome the problem that the automatic handling robot cannot cover the entire area due to the previous planning and space limitations in the production workshop, making the material management more flexible and orderly, and improving the stability and accuracy of the production system. BRIEF DESCRIPTION OF THE DRAWINGS

[0040] Figure 1 and Figure 2 are schematic structural diagrams of the electronic shelf in an embodiment of the present invention;

[0041] Figure 3 is a schematic structural diagram of the electronic shelf management system in an embodiment of the present invention;

[0042] Figures 4 to 7 is a flowchart of the working method of the electronic shelf management system in an embodiment of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0043] As described in the background art, it is necessary to improve the performance and application scenarios of the electronic shelf.

[0044] Specifically, due to the previous planning and space limitations in the workshops of existing wafer manufacturing factories, mobile robots cannot cover all areas, and the electronic shelves are unstable, presenting the following problems: (1) Between the cross-regional storage (Stocker) and the machine platform (Bay), the transportation of wafers is carried out by manual carts, which is time-consuming and laborious; (2) There are blind spots during the manual handling process, and the physical wafers transported by the manual carts cannot be tracked in real time; (3) The label sensors of ordinary electronic shelves often have poor induction, which is likely to cause abnormalities in the production system; (4) The cost of automatic handling robots is high, and the implementation of automated handling has high space requirements for wafer manufacturing factories. The automatic handling robots can only handle within the area of the machine platform.

[0045] To solve the above problems, the technical solution of the present invention provides an electronic shelf, an electronic shelf management system and its working method. Through the radio frequency induction device, the materials can be accurately recorded, and through the electronic shelf control module, information interaction is carried out with the internal devices and external systems of the electronic shelf, realizing the visual dynamic management of materials, improving the accuracy and stability of the production system, and realizing the real-time management and automated handling of wafers in transit in the factory, thus improving the production efficiency.

[0046] To make the above objects, features and beneficial effects of the present invention more obvious and understandable, the following detailed description of the specific embodiments of the present invention will be given with reference to the accompanying drawings.

[0047] Figure 1 and Figure 2 are schematic structural diagrams of the electronic shelf in an embodiment of the present invention.

[0048] Please refer to Figure 1 andFigure 2 , Figure 1 is the front view of the electronic shelf, Figure 2 and Figure 2 is the top view of the electronic shelf. The electronic shelf includes: a shelf body 10, which includes a plurality of storage bins 101. A radio frequency induction device 102 is provided at the opening of the storage bin. The radio frequency induction device 102 is used to identify the material information entering and leaving the storage bin 101; a moving chassis 11, on which the shelf body 10 is fixed. The moving chassis 11 can drive the electronic shelf to move; an electronic shelf control module 103, which is arranged inside the shelf body 10. The electronic shelf control module 103 is used to interact with the radio frequency induction device 102 and to interact with an external system.

[0049] The electronic shelf can accurately record materials through the radio frequency induction device 102, and interact with internal devices and external systems of the electronic shelf through the electronic shelf control module 103, realizing the visual dynamic management of materials, improving the accuracy and stability of the production system, and realizing the real-time management and automatic handling of factory wafers in transit, thus improving production efficiency.

[0050] In this embodiment, the material information includes: batch number, quantity, in and out warehouse time, etc. The radio frequency induction device 102 includes a radio frequency reader and a radio frequency antenna. The radio frequency reader is used to read materials with radio frequency tags when entering and leaving the storage bin. The radio frequency antenna is used to send the information read and written by the radio frequency reader and to sense the radio frequency electronic tag on the surface of the material package. A radio frequency electronic tag is provided on the surface of the material package, and the electronic tag has information related to the material such as batch number, quantity, in and out warehouse time, etc., so that the material can be identified by the radio frequency induction device 102 when entering and leaving the storage bin 101, realizing the dynamic management of materials.

[0051] The electronic tag on the surface of the material package is a radio frequency electronic tag, and the induction device is the radio frequency induction device 102. The radio frequency electronic tag and the induction device are easy to trigger induction, improving the induction accuracy, accurately recording the materials entering and leaving the storage bin 101, and improving the accuracy and stability of the production system.

[0052] The shelf body 10 includes a storage location area A and a control area B distributed in the horizontal direction. A plurality of the storage bins 101 are arranged in the storage location area A, and the electronic shelf control module 103 is arranged in the control area B.

[0053] In this embodiment, the shape of the shelf main body 10 includes a cube. The shelf main body 10 includes a top surface, a bottom surface, a first surface S1, a second surface S2, a third surface S3, and a fourth surface S4. The first surface S1 and the second surface S2, the third surface S3 and the fourth surface S4 are opposite to each other in pairs. The third surface S3 is a side surface of the goods location area A, and the fourth surface S4 is a side surface of the control area B.

[0054] In this embodiment, a plurality of the storage bins 101 include several rows stacked vertically. The number of storage bins 101 in each row is multiple. The first surface S1 of the shelf main body 10 exposes the openings of the storage bins 101. The second surface S2 of the shelf main body 10 is the back of the storage bins 101. A plurality of the storage bins 101 are isolated from each other by partitions. Figure 1 Two rows are schematically shown, and the number of storage bins 101 in each row is 3.

[0055] In this embodiment, the radio frequency induction device 102 is disposed on the bottom surface at the opening of the storage bin 101. So that when materials enter and exit the storage bin 101 subsequently, the radio frequency induction device 102 can easily identify the material information.

[0056] In this embodiment, the electronic shelf further includes: a liquid crystal display module 104 embedded in the first surface S1 at the bottom of each storage bin 101. The liquid crystal display module 104 is electrically connected to the electronic shelf control module 103. The liquid crystal display module 104 is used to display the material information in each storage bin 101 received by the electronic shelf control module 103.

[0057] For example, the liquid crystal display module 104 on the first surface S1 at the bottom of each storage bin 101 displays the model batch and quantity of the materials in the storage bin.

[0058] In this embodiment, the electronic shelf further includes: a material fixing device (not shown) disposed on the bottom surface of each storage bin 101. The fixing device is used to fix the materials in the storage bin 101 to prevent damage when the materials move.

[0059] In this embodiment, the electronic shelf further includes: a position sensing device (not shown) disposed on the bottom surface of each storage bin 101. The position sensing device is electrically connected to the electronic shelf control module 103. The position sensing device is used to sense whether the materials in the storage bin 101 move, and send the information on whether the materials move to the electronic shelf control module 103.

[0060] The position sensing device can transmit the detected information to the electronic shelf control module 103 when the material moves, so that the electronic shelf control module 103 can perform further signal processing. When the material is placed in a certain bin 101 of the electronic shelf, the position sensing device senses the position of the material and sends a placement signal to the electronic shelf control module 103. At the same time, the information of the item placed in the bin 101 will be displayed on the human-machine interaction module mentioned later for the user to view.

[0061] In this embodiment, the electronic shelf further includes: an alarm device (not shown) integrated in the liquid crystal display module 104, and the alarm device is used to receive the alarm signal sent by the electronic shelf control module 103 when the material in the bin 101 moves and issue an alarm; or when there is an abnormality in the verification of the material entering and leaving the bin 101, the alarm device receives the alarm signal sent by the electronic shelf control module 103 when there is an abnormality in the verification of the material entering and leaving the bin 101 and issues an alarm.

[0062] The ways for the alarm device to issue an alarm include: one or both of the warning light flashing and the sound alarm.

[0063] In this embodiment, the moving chassis 11 includes: a bearing part 111 fixed to the bottom surface of the shelf main body 10, and a traveling wheel 112 fixedly connected to the bottom of the bearing part 111, and the traveling wheel 112 drives the electronic shelf to move.

[0064] The number of the traveling wheels 112 is 4. The two traveling wheels 112 close to the third surface S3 include universal wheels. The universal wheels can adjust the moving direction of the electronic shelf.

[0065] In this embodiment, the two traveling wheels 112 close to the third surface S3 are the front wheels of the electronic shelf and are used to control the moving direction of the electronic shelf.

[0066] In this embodiment, the material of the traveling wheel 112 includes high-strength rubber silent rollers. The high-strength rubber silent rollers have a certain anti-vibration and anti-collision ability.

[0067] In this embodiment, the electronic shelf further includes: a driving device 105 arranged in the shelf main body 10 of the control area B. The driving device 105 is electrically connected to the electronic shelf control module 103, and the driving device 105 is used to drive the two traveling wheels 112 close to the fourth surface S4.

[0068] In this embodiment, the two traveling wheels 112 close to the fourth surface S4 are the rear wheels of the electronic shelf.

[0069] In this embodiment, the electronic shelf further includes a moving assistance module 106 disposed on the top surface of the shelf main body 10. The moving assistance module 106 is configured to send a driving signal to the electronic shelf control module 103 after manual operation, and the electronic shelf control module 103 causes the driving device 105 to drive two walking wheels 112 close to the fourth side S4 to move.

[0070] In this embodiment, the electronic shelf further includes a human-machine interaction module 107 embedded in the top surface of the shelf main body 10. The human-machine interaction module 107 is electrically connected to the electronic shelf control module 103. The human-machine interaction module 107 is configured to display the status of each cargo compartment 101 and provide an operation interface for manual operation of the electronic shelf.

[0071] The status of the cargo compartment 101 includes whether the cargo compartment 101 is idle and whether the cargo compartment 101 has a fault, and each status is represented by a different color. For example, if the cargo compartment 101 of the human-machine interaction module 107 is blue, it means that the current cargo compartment 101 is in use; if the cargo compartment 101 of the human-machine interaction module 107 is green, it means that the current cargo compartment 101 is in an idle state; if the cargo compartment 101 of the human-machine interaction module 107 is red, it means that the current cargo compartment 101 has a fault.

[0072] In this embodiment, the display screen of the human-machine interaction module 107 is a touch screen, which is convenient for users to perform touch operations on the operation interface.

[0073] In this embodiment, the electronic shelf further includes a locking device 108 disposed at the bottom of the fourth side S4 of the shelf main body 10. The locking device 108 is configured to fix or unlock the electronic shelf. The locking device 108 is electrically connected to the electronic shelf control module 103, and the locking device 108 can be operated to be fixed or unlocked through the human-machine interaction module 107.

[0074] For example, the user operates the operation interface of the human-machine interaction module 107 to manually unlock the locking device 108, and then the user operates the moving assistance module 106 to move the electronic shelf to a specified position.

[0075] In this embodiment, the electronic shelf further includes a handle 109 fixed to the fourth side S4. The user can move the electronic shelf through the handle.

[0076] In this embodiment, the electronic shelf further includes: a power module embedded in the control area B, which provides power support for the electronic shelf; a charging module 110 embedded in the control area B, which is used to charge the power module. The charging module 110 includes wireless charging or contact fast charging, and the charging interface of the charging module 110 is exposed on the fourth side S4.

[0077] In this embodiment, the electronic shelf further includes: a robotic arm grasping device (not shown), which is communicatively connected to the electronic shelf control module 103 and is used to grasp the materials in the storage bin 101. The robotic arm grasping device is communicatively connected to the electronic shelf control module 103, and simple point-to-point material unloading between the storage bin 101 and the robotic arm grasping device can be realized.

[0078] In this embodiment, the electronic shelf control module 103 further includes a navigation module, and the electronic shelf can move according to the route provided by the navigation module.

[0079] For the electronic shelf, information interaction is carried out between the electronic shelf control module 103 and the radio frequency induction device 102, the liquid crystal display module 104, the position induction device, the alarm device, the driving device 105, the mobile assistance module 106, the human-computer interaction module 107, the locking device 108, and the robotic arm grasping device, which can realize real-time dynamic visualization management of materials and data interaction with the manufacturing-related systems of the factory.

[0080] Figure 3 It is a schematic structural diagram of the electronic shelf management system in the embodiment of the present invention.

[0081] Please refer to Figure 3 , the electronic shelf management system includes:

[0082] Such as Figure 1 And Figure 2 The electronic shelf as described above; a Manufacturing Execution System (MES for short), which conducts information interaction with the electronic shelf; an Automatic Guided Vehicle System (AGV for short), which conducts information interaction with the electronic shelf.

[0083] For the specific description of the electronic shelf, please refer to the figure area and Figure 2 The accompanying drawings and text descriptions thereof will not be elaborated herein.

[0084] The manufacturing execution system is a computerized system used for real-time monitoring, tracking, and controlling the production process. The manufacturing execution system can integrally manage the production process, resources, and data on the production line to improve production efficiency and quality and reduce production costs.

[0085] The core functions of the manufacturing execution system include:

[0086] Production scheduling: The manufacturing execution system can automatically calculate the production plan and scheduling based on production orders and resource status, thereby optimizing the operation of the production line.

[0087] Material management: The manufacturing execution system can track the inventory status of raw materials, semi-finished products, and finished products in real time to ensure the supply of materials required for production.

[0088] Quality management: The manufacturing execution system collects quality data during the production process, conducts real-time analysis and feedback, which helps to improve product quality and reduce quality costs.

[0089] Equipment management: The manufacturing execution system can monitor the operating status of production equipment in real time, detect faults in a timely manner and perform maintenance to ensure the normal operation of the equipment.

[0090] Personnel management: The manufacturing execution system can record employees' working hours, work content, and work efficiency, which helps to improve employees' production efficiency and reduce labor costs.

[0091] Data analysis: The manufacturing execution system can conduct real-time analysis of production data to provide strong support for production decisions.

[0092] The handling robot of the automatic handling robot system can automatically transport items to the designated location through special landmark navigation.

[0093] In this embodiment, the electronic shelf management system further includes: a client through which users can query the warehouse status of the electronic shelf; the client includes: a web page, a mini-program, or a mobile application.

[0094] In this embodiment, the electronic shelf management system further includes: a server through which the electronic shelf, the manufacturing execution system, and the automatic handling robot system conduct information interaction.

[0095] The electronic shelf management system integrates the electronic shelf, the manufacturing execution system, the automatic handling robot system, etc., realizes the real-time in-transit management and automated handling of wafer materials in the factory, forms a complete automated logistics system for the production line, which has the advantages of high automation degree, high work efficiency, high work accuracy, and low transformation cost for the original production line, and improves production efficiency.

[0096] Figures 4 to 7It is the flowchart of the working method of the electronic shelf management system in the embodiment of the present invention.

[0097] Please refer to Figure 4 , the working method of the electronic shelf management system includes:

[0098] Step S10: Provide the electronic shelf system as Figure 3 described.

[0099] Step S20: Provide production equipment, which is communicatively connected to the manufacturing execution system, and the production equipment is used to send a loading signal or an unloading signal;

[0100] Step S30: The manufacturing execution system obtains the loading signal, the unloading signal or the user's goods transfer information, and conducts information interaction with the electronic shelf and the automatic handling robot system;

[0101] Step S40: The automatic handling robot system dispatches an automatic handling robot to carry the materials according to the result of the information interaction.

[0102] The electronic shelf management system integrates an electronic shelf, a manufacturing execution system, an automatic handling robot system, etc. The electronic shelf, the manufacturing execution system, and the automatic handling robot system can conduct information interaction, realizing real-time in-transit management and automated handling of wafer materials in the factory, forming a complete automated logistics system for the production line, which has the advantages of high automation, high work efficiency, high work accuracy, and low cost for transforming the original production line.

[0103] Please combine with Figure 5 Continue to refer to Figure 4 , in this embodiment, when performing a loading operation, the information interaction between the manufacturing execution system and the electronic shelf and the automatic handling robot system includes:

[0104] Step S101: The manufacturing execution system obtains the loading signal sent by the production equipment;

[0105] Step S102: The manufacturing execution system obtains the product batch information of the production equipment with priority production according to the real-time dispatching system;

[0106] Step S103: The manufacturing execution system obtains the material information matching the product batch information from the electronic shelf, and the material information includes the material code, the position information of the electronic shelf where the material is stored, and the warehouse information of the electronic shelf where the material is stored;

[0107] Step S104: The manufacturing execution system sends the material information to the automatic handling robot system;

[0108] Step S105: The automatic material handling robot system dispatches the automatic material handling robot in the area where the electronic shelf is located according to the material information. The automatic material handling robot moves to the position of the electronic shelf along the navigation route and takes out the target material from the warehouse.

[0109] Step S106: The automatic material handling robot sends the target material to the feeding port of the production equipment along the navigation route, and the feeding is carried out by a mechanical gripper or manually.

[0110] In this embodiment, when the automatic material handling robot takes out the target material from the warehouse 101, the radio frequency induction device 102 at the bottom of the opening of the warehouse 101 identifies the material information of the material leaving the warehouse 101 and sends the material information to the electronic shelf control module 103.

[0111] Please combine Figure 6 Continue to refer to Figure 4 , in this embodiment, when performing the unloading operation, the manufacturing execution system interacts with the electronic shelf and the automatic material handling robot system, including:

[0112] Step S201: The manufacturing execution system obtains the unloading signal sent by the production equipment.

[0113] Step S202: The manufacturing execution system detects whether the state of the discharge port of the production equipment is consistent with the unloading signal.

[0114] Step S203: The manufacturing execution system sends a storage instruction request to the electronic shelf for storage.

[0115] Step S204: The electronic shelf allocates a warehouse according to the storage instruction.

[0116] Step S205: The manufacturing execution system obtains the allocated warehouse information and sends it to the automatic material handling robot system. The warehouse information includes the position information of the electronic shelf and the position of the warehouse in the electronic shelf.

[0117] Step S206: The automatic material handling robot system dispatches the automatic material handling robot in the area where the discharge port of the production equipment is located for unloading. The automatic material handling robot moves to the position of the electronic shelf along the navigation route and stores the target material in the allocated warehouse.

[0118] In this embodiment, when the automatic material handling robot stores the target material in the allocated warehouse 101, the radio frequency induction device 102 at the bottom of the opening of the warehouse 101 identifies the material information of the material entering the warehouse 101 and sends the material information to the electronic shelf control module 103.

[0119] In this embodiment, after the electronic shelf is full, it further includes: moving the electronic shelf across regions, where the cross-regional movement includes manual movement or automatic movement.

[0120] Moving the electronic shelf across regions can overcome the problem that the automatic handling robot cannot cover the entire area due to the previous planning and space limitations in the production workshop, making the material management more flexible and orderly, and improving the stability and accuracy of the production system.

[0121] The manual movement includes: manually operating the operation interface of the human-machine interaction module 107 to manually unlock the locking device 108; manually operating the moving assistance module 106 to make the driving device 105 drive the walking wheels to move, so that the electronic shelf moves to the designated position.

[0122] The automatic movement includes: after the electronic shelf obtains the cross-regional movement signal, the navigation module provides a designated route, and the driving device 105 drives the electronic shelf to move to the designated position.

[0123] Please combine Figure 7 Continue to refer to Figure 4 , in this embodiment, when the user conducts goods transfer, the manufacturing execution system interacts with the electronic shelf and the automatic handling robot system, including:

[0124] Step S301: The manufacturing execution system obtains the user's goods transfer information;

[0125] Step S302: The manufacturing execution system obtains the material information matching the user's goods transfer information from the electronic shelf, where the material information includes the material code, the location information of the electronic shelf where the material is stored, and the warehouse information of the material stored in the electronic shelf;

[0126] Step S303: The manufacturing execution system sends the material information to the automatic handling robot system;

[0127] Step S304: The automatic handling robot system dispatches the automatic handling robot in the area where the electronic shelf is located to pick up the material according to the material information. The automatic handling robot moves to the position of the electronic shelf along the navigation route and takes out the target material from the warehouse;

[0128] Step S305: The automatic handling robot sends the target material to the designated position along the navigation route.

[0129] In this embodiment, when the manufacturing execution system interacts with the electronic shelf, it further includes: after the transport vehicle arrives at the designated position, the manufacturing execution system obtains the unloading signal; the material is automatically transferred between the electronic shelf and the transport vehicle through a mechanical gripper.

[0130] Although the present invention is disclosed as above, the present invention is not limited thereto. Any person skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be subject to the scope defined by the claims.

Claims

1. An electronic shelf, characterized in that, Including: A shelf main body, the shelf main body includes a plurality of storage bins, a radio frequency induction device is arranged at the opening of the storage bin, and the radio frequency induction device is used to identify the material information entering and leaving the storage bin; A moving chassis, the shelf main body is fixed on the moving chassis, and the moving chassis can drive the electronic shelf to move; An electronic shelf control module, which is arranged inside the shelf main body, and the electronic shelf control module is used to interact with the radio frequency induction device and to interact with an external system.

2. The electronic shelf according to claim 1, characterized in that, The shelf main body includes a goods location area and a control area distributed in the horizontal direction, a plurality of the storage bins are arranged in the goods location area, and the electronic shelf control module is arranged in the control area; the shape of the shelf main body includes a cube, the shelf main body includes a top surface, a bottom surface, a first surface, a second surface, a third surface and a fourth surface, the first surface and the second surface, the third surface and the fourth surface are opposite to each other in pairs, the third surface is a side surface of the goods location area, and the fourth surface is a side surface of the control area.

3. The electronic shelf according to claim 2, characterized in that, A plurality of the storage bins include several rows stacked vertically, the number of storage bins in each row is multiple, the first surface of the shelf main body exposes the opening of the storage bin, the second surface of the shelf main body is the back of the storage bin, and a plurality of the storage bins are isolated from each other by partitions; the radio frequency induction device is arranged at the bottom surface of the opening of the storage bin.

4. The electronic shelf according to claim 3, characterized in that Also including: A liquid crystal display module embedded in the first surface at the bottom of each storage bin, the liquid crystal display module is electrically connected to the electronic shelf control module, and the liquid crystal display module is used to display the material information in each storage bin received by the electronic shelf control module.

5. The electronic shelf according to claim 4, wherein Also including: A position induction device arranged at the bottom surface of each storage bin, the position induction device is electrically connected to the electronic shelf control module, and the position induction device is used to sense whether the material in the storage bin moves and send the information of whether the material moves to the electronic shelf control module; an alarm device integrated in the liquid crystal display module, and the alarm device is used to receive an alarm signal sent by the electronic shelf control module when the material in the storage bin moves and issue an alarm.

6. The electronic shelf according to claim 3, characterized in that Also including: A material fixing device arranged at the bottom surface of each storage bin.

7. The electronic shelf according to claim 2, wherein, The moving chassis includes: a bearing part fixed to the bottom surface of the shelf main body, and a walking wheel fixedly connected to the bottom of the bearing part, and the walking wheel drives the electronic shelf to move.

8. The electronic shelf according to claim 7, wherein, The number of the walking wheels is 4, and two walking wheels close to the third surface include universal wheels; the electronic shelf further includes: a driving device arranged inside the shelf main body in the control area, the driving device is electrically connected to the electronic shelf control module, and the driving device is used to drive two walking wheels close to the fourth surface; a moving assistance module arranged on the top surface of the shelf main body, and the moving assistance module is used to send a driving signal to the electronic shelf control module after manual operation, and the electronic shelf control module enables the driving device to drive two walking wheels close to the fourth surface to move.

9. The electronic shelf according to claim 7, wherein, The material of the walking wheel includes a high-strength rubber silent roller.

10. The electronic shelf according to claim 2, characterized in that, Also including: A human-machine interaction module embedded in the top surface of the shelf body, which is electrically connected to the electronic shelf control module. The human-machine interaction module is used to display the status of each bin and provide an operation interface for manual operation of the electronic shelf. The status of the bin includes whether the bin is idle and whether there is a fault, and each status is represented by a different color.

11. The electronic shelf according to claim 10, wherein, The electronic shelf further includes a locking device arranged at the bottom of the fourth side of the shelf body. The locking device is used to fix or unlock the electronic shelf, and is electrically connected to the electronic shelf control module. The locking device can be operated to be fixed or unlocked through the human-machine interaction module.

12. The electronic shelf according to claim 2, wherein It also includes: A handle fixed to the fourth side.

13. The electronic shelf according to claim 2, wherein The radio frequency induction device includes a radio frequency reader and a radio frequency antenna. The radio frequency reader is used to read the materials with radio frequency tags when entering and leaving the bin, and the radio frequency antenna is used to send the information read and written by the radio frequency reader and sense the radio frequency electronic tags on the surface of the material packaging.

14. The electronic shelf according to claim 2, wherein, It also includes: A power module embedded in the control area, which provides power support for the electronic shelf. A charging module embedded in the control area, which is used to charge the power module. The charging module includes wireless charging or contact fast charging, and the charging interface of the charging module is exposed on the fourth side.

15. The electronic shelf according to claim 2, characterized in that, The electronic shelf control module further includes a navigation module, and the electronic shelf can move according to the route provided by the navigation module.

16. The electronic shelf according to claim 1, wherein It also includes: A robotic arm grasping device, which is communicatively connected to the electronic shelf control module and is used to grasp the materials in the bin.

17. The electronic shelf according to claim 1, wherein The material information includes: batch number, quantity, and in-out warehouse time.

18. An electronic shelf management system, characterized in that, It includes: The electronic shelf according to any one of claims 1 to 17; A manufacturing execution system, which conducts information interaction with the electronic shelf; An automatic guided vehicle system, which conducts information interaction with the electronic shelf.

19. The electronic shelf management system according to claim 18, wherein It also includes: A client, through which users can query the status of the bins of the electronic shelf; the client includes: a web page, a mini program or a mobile application.

20. The electronic shelf management system according to claim 18, wherein It also includes: A server, through which the electronic shelf, the manufacturing execution system, and the automatic guided vehicle system conduct information interaction.

21. A working method of an electronic shelf management system, characterized in that It includes: Providing an electronic shelf management system according to any one of claims 18 to 20; Providing production equipment, which is communicatively connected to the manufacturing execution system and is used to send a feeding signal or a discharging signal; The manufacturing execution system obtains the feeding signal, the discharging signal or the user's goods transfer information, and conducts information interaction with the electronic shelf and the automatic guided vehicle system; The automatic guided vehicle system dispatches automatic guided vehicles to carry materials according to the information interaction result.

22. The working method of the electronic shelf management system according to claim 21, characterized in that, The manufacturing execution system interacts with the electronic shelf and the automatic handling robot system, including: the manufacturing execution system obtains the loading signal sent by the production equipment; the manufacturing execution system obtains the product batch information preferentially produced by the production equipment according to the real-time dispatching system; the manufacturing execution system obtains the material information matching the product batch information from the electronic shelf, and the material information includes the material code, the position information of the electronic shelf where the material is stored, and the warehouse information of the material stored in the electronic shelf; the manufacturing execution system sends the material information to the automatic handling robot system; the automatic handling robot system dispatches the automatic handling robot in the area where the electronic shelf is located to pick up the material according to the material information, and the automatic handling robot moves to the position of the electronic shelf according to the navigation route and takes out the target material from the warehouse; the automatic handling robot sends the target material to the loading port of the production equipment according to the navigation route, and the loading is carried out by a mechanical gripper or manually.

23. The working method of the electronic shelf management system according to claim 22, characterized in that, When the automatic handling robot takes out the target material from the warehouse, the radio frequency induction device at the bottom of the warehouse opening identifies the material information leaving the warehouse and sends the material information to the electronic shelf control module.

24. The working method of the electronic shelf management system according to claim 21, characterized in that, The manufacturing execution system interacts with the electronic shelf and the automatic handling robot system, including: the manufacturing execution system obtains the unloading signal sent by the production equipment; the manufacturing execution system detects whether the outlet state of the production equipment is consistent with the unloading signal; the manufacturing execution system sends a storage instruction request to the electronic shelf for storage; the electronic shelf allocates a warehouse according to the storage instruction; the manufacturing execution system obtains the allocated warehouse information and sends it to the automatic handling robot system, and the warehouse information includes the position information of the electronic shelf and the position of the warehouse in the electronic shelf; the automatic handling robot system dispatches the automatic handling robot in the area where the unloading port of the production equipment is located to unload the material, and the automatic handling robot moves to the position of the electronic shelf according to the navigation route and stores the target material in the allocated warehouse.

25. The working method of the electronic shelf management system according to claim 24, characterized in that, When the automatic handling robot stores the target material in the allocated warehouse, the radio frequency induction device at the bottom of the warehouse opening identifies the material information entering the warehouse and sends the material information to the electronic shelf control module.

26. The working method of the electronic shelf management system according to claim 24, characterized in that, After the electronic shelf is full, it further includes: moving the electronic shelf across regions, and the cross-region movement includes manual movement or automatic movement.

27. The working method of the electronic shelf management system according to claim 26, characterized in that, The manual movement includes: manually operating the operation interface of the human-machine interaction module to manually unlock the locking device; manually operating the movement assistance module to make the driving device drive the walking wheels to move, so that the electronic shelf moves to the designated position.

28. The working method of the electronic shelf management system according to claim 26, characterized in that, The automatic movement includes: after the electronic shelf obtains the cross-region movement signal, the navigation module provides a designated route, and the driving device drives the electronic shelf to move to the designated position.

29. The working method of the electronic shelf management system according to claim 21, characterized in that, The manufacturing execution system interacts with the electronic shelf and the automatic handling robot system, including: the manufacturing execution system obtains the user's goods transfer information; the manufacturing execution system obtains the material information that matches the user's goods transfer information from the electronic shelf, and the material information includes the material code, the location information of the electronic shelf where the material is stored, and the warehouse information of the electronic shelf where the material is stored; the manufacturing execution system sends the material information to the automatic handling robot system; the automatic handling robot system dispatches the automatic handling robot in the area where the electronic shelf is located to pick up the material according to the material information, and the automatic handling robot moves to the position of the electronic shelf along the navigation route and takes out the target material from the warehouse; The automatic handling robot sends the target material to the designated position along the navigation route.

30. The working method of the electronic shelf management system according to claim 21, characterized in that, The manufacturing execution system interacts with the electronic shelf, including: after the material transport vehicle arrives at the designated position, the manufacturing execution system obtains the unloading signal; the automatic transfer of materials between the electronic shelf and the material transport vehicle is realized through a mechanical gripper.

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