Inspection apparatus and inspection method using the same

Abstract

The invention relates to an inspection apparatus and an inspection method using the same. The inspection apparatus includes: a stage configured to deform in accordance with a shape of an inspection object; a moving module for moving or rotating the table; a measuring unit including a plurality of illuminators that irradiate light to the inspection object and a camera that captures an image of an inspection surface of the inspection object; the displacement sensor is used for measuring the curvature of the inspection object and transmitting curvature information of the inspection object to the measuring part; and the control part comprises a switch module for transmitting connection and disconnection signals to the plurality of illuminators and a trigger module for transmitting electric signals to the camera.

Description

Technical Field

[0001] The present invention relates to an inspection device and an inspection method using the same. More specifically, the present invention relates to an inspection device for inspecting an inspection object that provides visual information and an inspection method using the same. Background Art

[0002] A display device is a device that displays an image for providing visual information to a user. The display device includes a liquid crystal display, a light emitting diode display, an organic light emitting diode display, a quantum dot display, etc.

[0003] The display device may have a curvature. In the manufacturing process of the display device, defects may occur in the display device. Therefore, various inspection devices for inspecting whether a display device having a curvature is defective and various inspection methods using the inspection devices are being developed. Summary of the Invention

[0004] An object of the present invention is to provide an inspection device with improved inspection efficiency.

[0005] Another object of the present invention is to provide an inspection method using the inspection device.

[0006] However, the objects of the present invention are not limited to the above objects and may be extended in various ways without departing from the spirit and scope of the present invention.

[0007] To achieve the foregoing object of the present invention, an inspection device according to an embodiment of the present invention may include: a workbench configured to be deformed corresponding to a curved surface of an inspection object, and the inspection object is placed on the workbench; a moving module for moving the workbench in a first direction, a second direction intersecting the first direction, and a direction of rotation on a plane defined by the first direction and the second direction; a measurement unit including a plurality of illuminators for irradiating light to the inspection object and a camera for photographing an inspection surface of the inspection object; a displacement sensor for measuring the curvature of the inspection object and transmitting curvature information of the inspection object to the measurement unit; and a control unit including a switch module for transmitting on and off signals to the plurality of illuminators and a trigger module for transmitting an electrical signal to the camera.

[0008] In one embodiment, the camera may be an area scan camera configured to capture the inspection surface and divide it into a plurality of shooting areas corresponding to the areas of the inspection surface that are captured, and generate planar images from the shooting areas.

[0009] In one embodiment, the inspection surface may include an illuminated area illuminated by the plurality of illuminators, and the shooting areas captured by the camera on the inspection surface may be included in the illuminated area.

[0010] In one embodiment, the plurality of shooting areas may be arranged at intervals from each other in the first direction on the inspection surface.

[0011] In one embodiment, the plurality of illuminators may include a first illuminator and a second illuminator having different conditions from each other, and a first area and a second area are defined in a first shooting area among the shooting areas, where the first area is a part of the plurality of shooting areas when a first illuminated area illuminated by the first illuminator is formed, and the second area is a part of the plurality of shooting areas when a second illuminated area illuminated by the second illuminator is formed.

[0012] In one embodiment, the image obtained by the camera capturing the illuminated area may include a first illumination image generated by combining illumination images for the first area and a second illumination image generated by combining illumination images for the second area.

[0013] In one embodiment, the length of the first area in the first direction may be the same as the length of the second area in the first direction.

[0014] In one embodiment, the length of the first area in a third direction intersecting the first direction and the second direction and the length of the second area in the third direction may be the same as the length of the inspection surface in the third direction.

[0015] In one embodiment, the number of the plurality of illuminators may be less than or equal to the number of the shooting areas.

[0016] In one embodiment, the camera may be perpendicular to the inspection surface, and through the moving module, the interval between the camera and the inspection surface in the second direction may be kept constant.

[0017] In one embodiment, the displacement sensor may be attached to one surface of the camera and measure the inspection surface of the inspection object simultaneously with the camera.

[0018] In one embodiment, the object to be inspected may further include a recessed portion that is recessed from the surface of the workbench in a direction opposite to the second direction, and the workbench has a shape corresponding to the recessed portion.

[0019] In one embodiment, the object to be inspected may further include a protruding portion that protrudes from the surface of the workbench in the second direction, and the workbench has a shape corresponding to the protruding portion.

[0020] To achieve another object of the present invention described above, an inspection method according to an embodiment of the present invention may include the following steps: deforming the shape of the workbench to correspond to the curved surface of the object to be inspected to place the object to be inspected on the workbench; measuring curvature information of the object to be inspected placed on the workbench by a displacement sensor; a measurement unit including a camera and a plurality of illuminators receives the curvature information from the displacement sensor, and the plurality of illuminators irradiate light onto an inspection surface of the object to be inspected; the camera captures an illumination area where the plurality of illuminators irradiate light onto the inspection surface to obtain an image; and moving the workbench in a first direction, a second direction intersecting the first direction, and a direction of rotation in a plane defined by the first direction and the second direction by a moving module.

[0021] In one embodiment, the step of the plurality of illuminators irradiating light onto the inspection surface may include the following steps: a first illuminator among the plurality of illuminators irradiates light onto the inspection surface; and a second illuminator having conditions different from those of the first illuminator irradiates light onto the inspection surface.

[0022] In one embodiment, the step of the first illuminator irradiating light onto the inspection surface and the step of the second illuminator irradiating light onto the inspection surface may be alternately and repeatedly executed.

[0023] In one embodiment, the step of the camera capturing the illumination area to obtain the image may include the step of the camera dividing the inspection surface including the illumination area into a plurality of shooting areas spaced apart from each other in the first direction.

[0024] In one embodiment, after the step of the camera dividing the inspection surface into a plurality of the shooting areas, the step of the camera capturing the illumination area to obtain the image may further include the following steps: scanning a first area in a first shooting area among the plurality of shooting areas, where the first area is a part of the plurality of shooting areas in a case where a first illumination area is formed by the first illuminator irradiating light onto the inspection surface; and scanning a second area in the first shooting area among the plurality of shooting areas, where the second area is a part of the plurality of shooting areas in a case where a second illumination area is formed by the second illuminator irradiating light onto the inspection surface.

[0025] In one embodiment, the step of the camera capturing the image may further include, between the step of scanning the first region and the step of scanning the second region: selecting the second region as a region that moves from the first region in the first direction.

[0026] In one embodiment, the step of measuring by the displacement sensor and the step of the camera capturing the image may be performed simultaneously.

[0027] The inspection apparatus according to an embodiment of the present invention may include a worktable on which an inspection object is placed and a moving module connected to the worktable. The moving module may include a first moving module that moves the worktable in a first direction, a second moving module that moves the worktable in a second direction intersecting the first direction, and a third moving module that moves the worktable in a direction of rotation on a plane defined by the first direction and the second direction. Accordingly, it is possible to photograph without omission an inspection surface of the inspection object having a curved surface, and it is possible to easily detect a surface defect of the inspection object.

[0028] The inspection method according to an embodiment of the present invention may include a step of irradiating light to an inspection surface of the inspection object by a plurality of illuminators and a step of the camera capturing an image of an illumination area where the plurality of illuminators irradiate the light to the inspection surface. Since the plurality of illuminators repeatedly perform an operation of turning on and off in sequence, light interference between the plurality of illuminators can be reduced when obtaining the image. Accordingly, it is possible to more easily detect a surface defect of the inspection object.

[0029] In addition, the camera may obtain a plurality of illumination images based on the plurality of illuminators, and one of the plurality of illuminators may also divide a shooting area into a plurality of areas. Accordingly, it is possible to more precisely and accurately detect the surface defect by combining the illumination images obtained from the shooting area.

[0030] However, the effects of the present invention are not limited to the above effects, and can be extended in various ways without departing from the spirit and scope of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 is a diagram for explaining an inspection apparatus according to an embodiment of the present invention.

[0032] Figure 2 is for explaining by Figure 1 the block diagram of the inspection method performed by the inspection apparatus.

[0033] Figures 3 to 27 is for explaining by Figure 1 the diagram of the inspection method implemented by the operation of the inspection apparatus.

[0034] Figure 28 This is a diagram of an inspection device for explaining another embodiment of the present invention.

[0035] Explanation of reference numerals

[0036] IO: Object to be inspected OS: Inspection surface

[0037] LA1, LA2, LA3: First to third illumination areas

[0038] LI1, LI2, LI3: First to third illumination images

[0039] ROI1, ROI2, ROI3: First to third shooting areas

[0040] 1, 1': Inspection device 10: Measuring unit

[0041] 12: Camera 14a, 14b, 14c: First to third illuminators

[0042] 20, 20': Displacement sensor 30: Moving module

[0043] 40: Workbench 50: Control unit

[0044] 51: Trigger module 52: Computer system unit

[0045] 53: Switch module Detailed implementation manners

[0046] The embodiments of the present invention will be described in more detail below with reference to the accompanying drawings. The same reference numerals are used for the same structural elements in the drawings, and the repeated description of the same structural elements is omitted.

[0047] Figure 1 This is a perspective view of an inspection device for explaining an embodiment of the present invention. Figure 2 This is for explaining by Figure 1 The inspection method performed by the inspection device is a block diagram.

[0048] Referring to Figure 1 and Figure 2 An inspection device 1 according to an embodiment of the present invention may include a measuring unit 10, a displacement sensor 20, a moving module 30, a workbench 40, and a control unit 50. The measuring unit 10 may include a camera 12, a first illuminator 14a, a second illuminator 14b, and a third illuminator 14c.

[0049] The inspection device 1 can be used to inspect the inspection surface OS of the object to be inspected IO to check for defects. The object to be inspected IO may be a display device having a curved surface. However, the object to be inspected IO of the present invention is not limited thereto.

[0050] In this specification, a plane may be defined by a first direction DR1 and a second direction DR2 that intersects the first direction DR1. For example, the first direction DR1 and the second direction DR2 may be perpendicular to each other. In addition, a third direction DR3 may be perpendicular to the plane.

[0051] The first to third illuminators 14a, 14b, 14c of the measuring unit 10 may irradiate light onto the inspection object IO. The camera 12 may capture the inspection surface OS in order to measure the inspection surface OS of the inspection object IO. For example, the camera 12 may scan the inspection surface OS through the light. The first to third illuminators 14a, 14b, 14c may irradiate the light, and the camera 12 may use the reflected light reflected by the inspection surface OS to extract information about the inspection surface OS. The camera 12 and the inspection surface OS may be disposed perpendicular to each other.

[0052] In one embodiment, the camera 12 may be an area scan camera. Specifically, the camera 12 may scan the inspection surface OS in units of a plane defined by the first direction DR1 and a third direction DR3 that intersects the first direction DR1.

[0053] The first illuminator 14a may irradiate first light onto the inspection surface OS of the inspection object IO. The second illuminator 14b may irradiate second light onto the inspection surface OS of the inspection object IO. The third illuminator 14c may irradiate third light onto the inspection surface OS of the inspection object IO. In one embodiment, the first light, the second light, and the third light may be of different colors from each other.

[0054] In one embodiment, the first illuminator 14a and the second illuminator 14b may have different conditions from each other. The first illuminator 14a and the third illuminator 14c may have different conditions from each other. The second illuminator 14b and the third illuminator 14c may have different conditions from each other. The conditions may include the height of each of the plurality of illuminators (e.g., the shortest distance between the illuminator and the inspection surface OS), the color of the light emitted by each of the plurality of illuminators, the intensity of the light emitted by each of the plurality of illuminators, the divergence angle of the light of the light-emitting elements included in each of the plurality of illuminators, the angle at which each of the plurality of illuminators irradiates light, and the like.

[0055] The first illuminator 14a, the second illuminator 14b, and the third illuminator 14c may be separated from each other respectively. The first illuminator 14a, the second illuminator 14b, and the third illuminator 14c may be separated from the camera 12 respectively. The directions in which the first light, the second light, and the third light are irradiated onto the inspection surface OS may be different from each other. However, the present invention is not limited thereto. In addition, the regions where the first light, the second light, and the third light are irradiated onto the inspection surface OS may overlap each other.

[0056] An inspection device 1 according to an embodiment of the present invention is illustrated as including three illuminators (a first illuminator 14a, a second illuminator 14b, and a third illuminator 14c), but is not limited thereto, and may include at least two illuminators. For example, the inspection device 1 may include two or more than four illuminators.

[0057] The displacement sensor 20 may measure information regarding the distance between the inspection object IO and the measurement unit 10. For example, the displacement sensor 20 may measure the shortest distance between a part of the inspection surface OS and the measurement unit 10. Thus, the displacement sensor 20 may measure the curvature information of the inspection surface OS. Before the camera 12 and the first to third illuminators 14a, 14b, 14c of the measurement unit 10 operate, the inspection device 1 may measure the curvature information of the inspection surface OS through the displacement sensor 20.

[0058] The moving module 30 may move along a first direction DR1, a second direction DR2, and a direction of rotation on a plane defined by the first direction DR1 and the second direction DR2. The moving module 30 may include a first moving module 32, a second moving module 34, and a third moving module 36.

[0059] The first moving module 32 may move along the first direction DR1. The second moving module 34 may move along the second direction DR2. The third moving module 36 may include a fixed rotation axis and include rotation arms on both sides with reference to the rotation axis. The rotation arms may move along a direction of rotation on a plane defined by the first direction DR1 and the second direction DR2 with reference to the rotation axis.

[0060] The workbench 40 may be connected to the moving module 30. The inspection object IO may be placed on the workbench 40. Thus, the inspection object IO on the workbench 40 may move along the direction in which the moving module 30 moves. The inspection object IO may move along the first direction DR1, the second direction DR2, and a direction of rotation on a plane defined by the first direction DR1 and the second direction DR2 through the moving module 30.

[0061] The workbench 40 may move along the first direction DR1 through the first moving module 32. Thus, the inspection object IO may move along the first direction DR1 through the first moving module 32. In other words, after finishing the measurement of the current area on the inspection surface OS, the first moving module 32 may move the inspection object IO along the first direction DR1, whereby the inspection device 1 may measure a new area on the inspection surface OS.

[0062] The workbench 40 may move along the second direction DR2 through the second moving module 34. Thus, the inspection object IO may move along the second direction DR2 through the second moving module 34. In other words, the second moving module 34 may adjust the distance between the inspection surface OS and the measurement unit 10.

[0063] The workbench 40 can be moved along a direction of rotation on a plane defined by a first direction DR1 and a second direction DR2 by a third moving module 36. Thus, the inspection object IO can be rotated by the third moving module 36. Specifically, the workbench 40 can be connected to the rotating arm of the third moving module 36. As the rotating arm rotates about the rotation axis, the workbench 40 can also be moved along a direction of rotation on a plane defined by the first direction DR1 and the second direction DR2.

[0064] In other words, the workbench 40 can have three directivities, namely, the first direction DR1, the second direction DR2, and a direction of rotation on a plane defined by the first direction DR1 and the second direction DR2, through the first moving module 32, the second moving module 34, and the third moving module 36. Thus, it is possible to photograph the inspection surface OS of the inspection object IO having a curved surface without omission, and it is possible to easily detect surface defects of the inspection object IO.

[0065] In order to measure a new area on the inspection surface OS, the workbench 40 can be moved by the moving module 30. As a result, the distance between the camera 12 and the inspection surface OS may change. In order to keep the distance between the camera 12 and the inspection surface OS constantly at the initial value, the moving module 30 and the workbench 40 can be moved along the second direction DR2. An explanation of this will be given with reference to Figures 25 to 27 the description below.

[0066] The control unit 50 can control the operation of the inspection device 1 through an electrical signal. The control unit 50 can include a trigger module 51, a computer system unit 52, and a switch module 53.

[0067] When the first to third illuminators 14a, 14b, 14c irradiate the inspection surface OS, the trigger module 51 can transmit a photographing signal to the measuring unit 10. According to the photographing signal, the camera 12 can photograph the inspection surface OS.

[0068] The computer system unit 52 can include a personal computer, a server, etc. connected to the inspection device 1. The computer system unit 52 can also refer to a device provided externally or a microcomputer etc. provided inside the inspection device 1. The computer system unit 52 can transmit electrical signals to the trigger module 51 and the switch module 53 respectively.

[0069] The switch module 53 can transmit on and off signals (for example, Figure 8The on and off signals (OOS). For example, according to the on and off signals, the first to third illuminators 14a, 14b, 14c can sequentially irradiate light on the inspection surface OS. However, the present invention is not limited to this. According to the on and off signals, the first to third illuminators 14a, 14b, 14c can irradiate light on the inspection surface OS simultaneously.

[0070] The inspection method S1 performed by the inspection device 1 may include: Step S10, deforming the shape of the workbench 40 to correspond to the curved surface of the inspection object IO to place the inspection object IO on the workbench 40; Step S20, measuring the curvature information of the inspection object IO placed on the workbench 40 by the displacement sensor 20; Step S30, the measurement unit 10 receives the curvature information from the displacement sensor 20, and multiple illuminators (for example, Figure 1 The first to third illuminators 14a, 14b, 14c among them) irradiate light on the inspection surface OS of the inspection object IO; Step S40, the camera 12 captures the illuminated area where the multiple illuminators irradiate light on the inspection surface OS to obtain an image; and Step S50, the workbench 40 is moved along the first direction DR1, the second direction DR2, and the direction of rotation in the plane defined by the first direction DR1 and the second direction DR2 by the moving module 30.

[0071] In one embodiment, in Step S20 where the curvature information is measured by the displacement sensor 20, the curvature information of the entire inspection surface OS of the inspection object IO can be measured. After that, Step S30 where the multiple illuminators irradiate light on the inspection surface OS using the curvature information can be executed. In other words, it is not necessary to repeatedly perform the operation of Step S20 where the curvature information of a part of the inspection surface OS of the inspection object IO is measured in Step S20 where the curvature information is measured by the displacement sensor 20, and then perform the step where the multiple illuminators irradiate light on the inspection surface OS, and then perform Step S20 where the curvature information of the remaining part of the inspection surface OS of the inspection object IO is measured by the displacement sensor 20.

[0072] Figures 3 to 27 is used to illustrate the Figure 1 The figure of the inspection method implemented by the operation of the inspection device.

[0073] Figure 3 is a figure showing Step S10 in the inspection method S1 of deforming the workbench 40 to correspond to the curved surface of the inspection object IO to place the inspection object IO on the workbench 40.

[0074] Refer to Figure 3 , the inspection object IO can be placed on the workbench 40. The inspection object IO can also be placed on the workbench 40 when it has a curved surface. The inspection surface OS to be photographed of the inspection object IO can be in a state where it is parallel to the camera (for example, Figure 1The camera 12) is located on the workbench 40 in a vertical manner.

[0075] Figure 4 And Figure 5 FIGS. are diagrams for explaining step S10 of placing the inspection object IO on the workbench 40 when the inspection object IO has two or more curved surfaces.

[0076] Refer to Figure 4 And Figure 5 The inspection object IO may have two or more curved surfaces. The curved surface may have a composite shape that simultaneously has a convex shape and a concave shape. For example, when the inspection object IO has two curved surfaces, one curved surface may have a convex shape protruding in the second direction DR2, and the remaining curved surface may have a shape recessed in the direction opposite to the second direction DR2.

[0077] The shape of the workbench 40 may be deformed according to the shape of the inspection object IO. For example, when the inspection object IO has a curved surface with the composite shape, the workbench 40 may have a convex shape corresponding to the convex shape of the curved surface. In addition, the workbench 40 may have a concave shape corresponding to the concave shape of the curved surface. Thus, when the inspection object IO has the composite shape, the inspection object IO can also be easily placed on the workbench 40.

[0078] Figure 6 FIGS. are diagrams for explaining step S20 of measuring the curvature information of the inspection object IO placed on the workbench 40 by the displacement sensor 20.

[0079] Refer to Figure 6 The displacement sensor 20 may move to measure the curvature information of the inspection object IO. For example, the displacement sensor 20 may move above the inspection surface OS of the inspection object IO along the first direction DR1 and the third direction DR3. In addition, during the measurement by the displacement sensor 20, the inspection object IO placed on the workbench 40 may be moved by the movement module 30. The displacement sensor 20 may transmit the measured curvature information to the measurement unit 10. The displacement sensor 20 may measure the curvature information of the inspection surface OS by measuring the distance in the second direction DR2 between the measurement unit 10 and the inspection object IO. The displacement sensor 20 may be a structure separated from the measurement unit 10.

[0080] Figures 7 to 12 FIGS. are diagrams for explaining step S30 of irradiating light to the inspection surface OS by the plurality of illuminators using the curvature information.

[0081] Refer to Figure 7 And Figure 8, the switch module 53 can transmit an on / off signal OOS to the first illuminator 14a. The first illuminator 14a can irradiate the first light onto the inspection surface OS. The area on the inspection surface OS irradiated with the first light can be defined as the first illumination area LA1.

[0082] During the period when the first illuminator 14a emits the first light, the second illuminator 14b and the third illuminator 14c may not emit light. The switch module 53 can transmit the on / off signal OOS for turning on and off the illuminators to the first to third illuminators 14a, 14b, 14c within the time from 0t to 9t. In this case, the first illuminator 14a can receive the first on / off signal OOS1 in the on / off signal OOS between 0t and 1t. While the first illuminator 14a is turned on, it can irradiate the first light onto the inspection surface OS. When the number of illuminators is three, namely the first to third illuminators 14a, 14b, 14c, the first illuminator 14a can be turned on with a period of 3t. The first illuminator 14a can be turned on for 1t within the 3t time of one cycle and turned off for the remaining 2t time. In the section where the first illuminator 14a is not turned on, the second illuminator 14b and the third illuminator 14c can be turned on in sequence.

[0083] Refer to Figure 9 and Figure 10 , after the first illuminator 14a is turned on, the switch module 53 can transmit the on / off signal OOS to the second illuminator 14b. The second illuminator 14b can irradiate the second light onto the inspection surface OS. The area on the inspection surface OS irradiated with the second light can be defined as the second illumination area LA2.

[0084] During the period when the second illuminator 14b emits the second light, the first illuminator 14a and the third illuminator 14c may not emit light. The switch module 53 can transmit the on / off signal OOS for turning on and off the illuminators to the first to third illuminators 14a, 14b, 14c within the time from 0t to 9t. In this case, the second illuminator 14b can receive the second on / off signal OOS2 in the on / off signal OOS between 1t and 2t. While the second illuminator 14b is turned on, it can irradiate the second light onto the inspection surface OS. When the number of illuminators is three, namely the first to third illuminators 14a, 14b, 14c, the second illuminator 14b can be turned on with a period of 3t. The second illuminator 14b can be turned on for 1t within the 3t time of one cycle and turned off for the remaining 2t time. In the section where the second illuminator 14b is not turned on, the third illuminator 14c and the first illuminator 14a can be turned on in sequence.

[0085] Refer to Figure 11 andFigure 12 After the second illuminator 14b is turned on, the switch module 53 can transmit an on / off signal OOS to the third illuminator 14c. The third illuminator 14c can irradiate the third light onto the inspection surface OS. The area on the inspection surface OS irradiated with the third light can be defined as the third illumination area LA3.

[0086] During the period when the third illuminator 14c emits the third light, the first illuminator 14a and the second illuminator 14b may not emit light. The switch module 53 can transmit the on / off signal OOS for turning on and off the illuminators to the first to third illuminators 14a, 14b, 14c within the time from 0t to 9t. In this case, the third illuminator 14c can receive the third on / off signal OOS3 in the on / off signal OOS between 2t and 3t. While the third illuminator 14c is turned on, the third light can be irradiated onto the inspection surface OS. When the number of illuminators is three, that is, the first to third illuminators 14a, 14b, 14c, the third illuminator 14c can be turned on with a period of 3t. The third illuminator 14c can be turned on for 1t within the 3t time of one cycle and turned off for the remaining 2t time. In the section where the third illuminator 14c is not turned on, the first illuminator 14a and the second illuminator 14b can be turned on in sequence.

[0087] However, the present invention is not limited to the above time intervals for turning on the illuminators, etc. The time intervals for turning on the illuminators can be adjusted according to the number of illuminators so that multiple illuminators emit light onto the inspection surface OS in sequence.

[0088] Since the operations of turning on and off the first to third illuminators 14a, 14b, 14c in sequence are repeated, the light interference phenomenon between the first to third illuminators 14a, 14b, 14c can be reduced. Thus, it is possible to more easily detect surface defects of the inspection object IO.

[0089] Figures 13 to 24 This is a diagram for explaining step S40 of acquiring an image by the camera 12 photographing the illumination area (for example, Figure 7 the first illumination area LA1 in

[0090] ) irradiated with light by the multiple illuminators. Figures 13 to 17 Referring to

[0091] A part of the area selected in the shooting area ROI can be defined as the first to third shooting area ROIs 1, 2, and 3. In addition, the first to third shooting area ROIs 1, 2, and 3 can be spaced apart from each other along the first direction DR1. The number of the part of the area of the present invention is not limited to three, and the number of the part of the area can be two or more than four.

[0092] In one embodiment, the number of a plurality of illuminators (for example, Figure 1 the first to third illuminators 14a, 14b, and 14c in Figure 1 and Figure 13 shown) can be less than or equal to the number of the part of the area (for example, the first to third shooting area ROIs 1, 2, and 3). As Figure 1 and Figure 13 shown, the number of the plurality of illuminators and the number of the part of the area (for example, the first to third shooting area ROIs 1, 2, and 3) can be three respectively, so that the numbers can be the same as each other. Although not shown in Figure 1 and Figure 13 , the number of the plurality of illuminators can be less than the number of the part of the area (for example, the first to third shooting area ROIs 1, 2, and 3). However, the present invention is not limited to this, and the number of the plurality of illuminators can be more than the number of the part of the area (for example, the first to third shooting area ROIs 1, 2, and 3).

[0093] When the first illuminator 14a irradiates the first light onto the inspection surface OS, a first illumination area LA1 can be formed on the inspection surface OS. During the formation of the first illumination area LA1, the shooting area ROI can be included in the first illumination area LA1. That is, the area irradiated with the first light on the inspection surface OS can be larger than the shooting area ROI. However, the present invention is not limited to this.

[0094] When the first illumination area LA1 is formed, the first area A1 can be at least a part of the first to third shooting area ROIs 1, 2, and 3. The first area A1 can include a plurality of planar areas corresponding to respective parts of the first to third shooting area ROIs 1, 2, and 3 throughout the first to third shooting area ROIs 1, 2, and 3. For example, when the first area A1 includes N planar areas, the first area A1 can include the first - 1 area A1 - 1 to the first - N area (for example, Figure 24 the first - N area A1 - N in Figure 24 ). The N planar areas included in the first area A1 can have a constant length with respect to each other in the first direction DR1, and can be areas obtained by dividing the area combining the first to third shooting area ROIs 1, 2, and 3 into N.

[0095] While the first illuminator 14a irradiates the first light, the camera 12 may acquire a first illumination image LI1(A1-1) of the first - first area A1-1 within the first shooting area ROI1. After acquiring the first illumination image LI1(A1-1) of the first - first area A1-1, the camera 12 may acquire a first illumination image LI1(A1-2) of the first - second area A1-2 within the first shooting area ROI1. The camera 12 may sequentially acquire N images of N planar areas included in the first area A1 along the first direction DR1 throughout the first to third shooting areas ROI1, ROI2, ROI3.

[0096] The shooting area ROI may be divided by a plurality of vertical lines parallel to the first direction DR1 and spaced 1D apart in the third direction DR3, and a plurality of horizontal lines intersecting the plurality of vertical lines and spaced 1D apart in the first direction DR1. In this case, the end of the first shooting area ROI1 of the shooting area ROI opposite to the first direction DR1 may be set as a reference position of 0D, and the first - first area A1-1 in the first area A1 may be a planar area having a length of 3D in the first direction DR1 starting from 0D. The first - first area A1-1 may have the same length as the length of the inspection surface OS in the third direction DR. In other words, the first - first area A1-1 may be a planar area from 0D to 3D along the first direction DR1 within the first shooting area ROI1. In addition, the first - second area A1-2 may also be a planar area from 3D to 6D along the first direction DR1 within the first shooting area ROI1. However, the lengths of the first - first area A1-1 and the first - second area A1-2 of the present invention in the first direction DR1 and the third direction DR3 are not limited thereto.

[0097] In one embodiment, the lengths of the N planar areas included in the first area A1 in the first direction DR1 may be the same. However, the present invention is not limited thereto, and the lengths of the N planar areas included in the first area A1 in the first direction DR1 may also be different from each other.

[0098] When a camera shooting signal CS is input to the camera 12, N first area scan signals RS1 corresponding to the set sizes of the N planar areas included in the first area A1 may be generated. The camera 12 may acquire N images corresponding to the set sizes according to the generated first area scan signals RS1.

[0099] For example, when the camera shooting signal CS is input so that the camera 12 shoots from 0D to 9D, signals may be generated for the first - first area A1-1, the first - second area A1-2, and the first - third area (e.g., Figure 24A first area scan signal RS1 corresponding to the set size (e.g., the length in 3D) of each of the first to third areas A1-3 in []. The camera 12 can scan the first area A1-1, the first area A1-2, and the first area A1-3 respectively according to the generated first area scan signal RS1 according to the set size, and can obtain images for the first area A1-1, the first area A1-2, and the first area A1-3 respectively.

[0100] Refer to Figures 18 to 20 , when the second illuminator 14b irradiates the second light onto the inspection surface OS, a second illumination area LA2 can be formed on the inspection surface OS. During the formation of the second illumination area LA2, the shooting area ROI can be included in the second illumination area LA2. That is, the area irradiated with the second light on the inspection surface OS can be larger than the shooting area ROI. However, the present invention is not limited to this.

[0101] When the second illumination area LA2 is formed, the second area A2 can be at least a part of the first to third shooting areas ROI1, ROI2, ROI3. The second area A2 can include a plurality of planar areas corresponding to a part of each of the first to third shooting areas ROI1, ROI2, ROI3 throughout the first to third shooting areas ROI1, ROI2, ROI3. For example, when the second area A2 includes N planar areas, the second area A2 can include the 2-1 area A2-1 to the 2-N area (e.g., Figure 24 the 2-N area A2-N in []). The N planar areas included in the second area A2 can have a constant length with respect to each other in the first direction DR1, and the N planar areas can be areas obtained by dividing the area combining the first to third shooting areas ROI1, ROI2, ROI3 into N.

[0102] During the irradiation of the second light by the second illuminator 14b, the camera 12 can obtain a second illumination image LI2(A2-1) for the 2-1 area A2-1 within the first shooting area ROI1. After obtaining the second illumination image LI2(A2-1) for the 2-1 area A2-1, the camera 12 can obtain a second illumination image (e.g., Figure 24 the second illumination image LI2(A2-2) for the 2-2 area in []) for the 2-2 area (e.g., Figure 24 the 2-2 area A2-2 in []). The camera 12 can sequentially obtain N images for the N planar areas included in the second area A2 along the first direction DR1 throughout the first to third shooting areas ROI1, ROI2, ROI3.

[0103] The 2-1 area A2-1 in the second area A2 may have a length of 3D in the first direction DR1 starting from 1D spaced from the reference position along the first direction DR1. The 2-1 area A2-1 may be a planar area having the same length as the length of the inspection surface OS in the third direction DR3. In other words, the 2-1 area A2-1 may be a planar area from 1D to 4D along the first direction DR1 within the first shooting area ROI1.

[0104] A part of the 2-1 area A2-1 may overlap with a part of the 1-1 area (e.g., Figure 15 the 1-1 area A1-1 in ). For example, regarding the planar area from 1D to 3D along the first direction DR1, the 1-1 area A1-1 and the 2-1 area A2-1 may overlap with each other.

[0105] In one embodiment, the lengths of the N planar areas included in the second area A2 in the first direction DR1 may be the same. However, the present invention is not limited thereto, and the lengths of the N planar areas included in the second area A2 in the first direction DR1 may also be different from each other.

[0106] When a camera shooting signal CS is input to the camera 12, N second area scanning signals RS2 corresponding to the set sizes of the N planar areas included in the second area A2 may be generated. The camera 12 may acquire N images corresponding to the set sizes according to the generated second area scanning signals RS2.

[0107] For example, when a camera shooting signal CS is input so that the camera 12 shoots from 0D to 9D, second area scanning signals RS2 corresponding to the set sizes (e.g., a length of 3D) of the 2-1 area A2-1 and the 2-2 area (e.g., Figure 24 the 2-2 area A2-2 in ) may be generated. The camera 12 may scan the 2-1 area A2-1 and the 2-2 area according to the generated second area scanning signals RS2 in accordance with the set sizes, and may acquire images for the 2-1 area A2-1 and the 2-2 area respectively. When a camera shooting signal CS is further input from 9D to 10D, an image for the 2-3 area (e.g., Figure 24 the 2-3 area A2-3 in ) may be further acquired.

[0108] Referring to Figures 21 to 23 , in the case where the third illuminator 14c irradiates the third light on the inspection surface OS, a third illumination area LA3 may be formed on the inspection surface OS. During the formation of the third illumination area LA3, the shooting area ROI may be included in the third illumination area LA3. That is, the area irradiated with the third light on the inspection surface OS may be larger than the shooting area ROI. However, the present invention is not limited thereto.

[0109] When forming the third illumination area LA3, the third area A3 may be at least a part of the first to third shooting areas ROI1, ROI2, and ROI3. The third area A3 may include a plurality of planar areas corresponding to respective parts of the first to third shooting areas ROI1, ROI2, and ROI3 throughout the entirety of the first to third shooting areas ROI1, ROI2, and ROI3. For example, when the third area A3 includes N planar areas, the third area A3 may include the 3-1 area A3-1 to the 3-N area (e.g., Figure 24 the 3-N area A3-N in

[0110] During the period when the third illuminator 14c irradiates the third light, the camera 12 may acquire a third illumination image LI3(A3-1) of the 3-1 area A3-1 within the first shooting area ROI1. After acquiring the third illumination image LI3(A3-1) of the 3-1 area A3-1, the camera 12 may acquire a third illumination image (e.g., Figure 24 the third illumination image LI3(A3-2) of the 3-2 area A3-2 in Figure 24 the 3-2 area A3-2 in

[0111] The 3-1 area A3-1 in the third area A3 may have a length of 3D in the first direction DR1 starting from 2D spaced apart from the reference position along the first direction DR1. The 3-1 area A3-1 may be a planar area having the same length as the length of the inspection surface OS in the third direction DR3. In other words, the 3-1 area A3-1 may be a planar area from 2D to 5D along the first direction DR1 within the first shooting area ROI1.

[0112] A part of the 3-1 area A3-1 may overlap with a part of the 1-1 area A1-1 and the 2-1 area (e.g., Figure 19 the 2-1 area A2-1 in

[0113] In one embodiment, the lengths of the N planar regions included in the third region A3 in the first direction DR1 may be the same. However, the present invention is not limited thereto, and the lengths of the N planar regions included in the third region A3 in the first direction DR1 may also be different from each other.

[0114] When a camera shooting signal CS is input to the camera 12, N third region scanning signals RS3 corresponding to the set sizes of the N planar regions included in the third region A3 may be generated. The camera 12 may acquire N images corresponding to the set sizes according to the generated third region scanning signals RS3.

[0115] For example, when a camera shooting signal CS is input so that the camera 12 shoots from 0D to 9D, third region scanning signals RS3 corresponding to the set sizes (e.g., the length of 3D) of the 3-1 region A3-1 and the 3-2 region (e.g., Figure 24 the 3-2 region A3-2 therein) may be generated. The camera 12 may scan the 3-1 region A3-1 and the 3-2 region according to the generated third region scanning signals RS3 in accordance with the set sizes, and may acquire images for the 3-1 region A3-1 and the 3-2 region respectively. When a camera shooting signal CS is further input from 9D to 11D, an image for the 3-3 region (e.g., Figure 24 the 3-3 region A3-3 therein) may be further acquired.

[0116] Referring to Figure 24 Although the first region to the third region A1, A2, A3 all include regions divided into N, the present invention is not limited thereto, and the number of regions divided in the first region to the third region A1, A2, A3 may be different from each other.

[0117] During the period when the first illuminator (e.g., Figure 14 the first illuminator 14a therein) is turned on, the camera (e.g., Figure 14 the camera 12 therein) may acquire a first illumination image LI1 by scanning the first illumination regions of the 1-1 region A1-1 to the 1-N region A1-N (e.g., Figure 14 the first illumination region LA1 therein). Specifically, the camera 12 may scan from the 1-1 region A1-1 along the first direction DR1 across the first to third shooting regions (e.g., Figure 13 the first to third shooting regions ROI1, ROI2, ROI3 therein). Then, the first illumination image LI1 is obtained by combining all the images from the first illumination image LI1(A1-1) for the 1-1 region A1-1 to the first illumination image LI1(A1-N) for the 1-N region A1-N.

[0118] During the opening of the second illuminator (e.g., the second illuminator 14b in Figure 18 ), the camera 12 can obtain a second illumination image LI2 by scanning a second illumination area of the 2-1st area A2-1 to the 2-Nth area A2-N (e.g., the second illumination area LA2 in Figure 18 ). Specifically, the camera 12 can scan from the 2-1st area A2-1 along the first direction DR1 over the first to third shooting areas ROI1, ROI2, ROI3. After that, the second illumination image LI2 can be obtained by combining all the images from the second illumination image LI2(A2-1) for the 2-1st area A2-1 to the second illumination image LI2(A2-N) for the 2-Nth area A2-N.

[0119] During the opening of the third illuminator (e.g., the third illuminator 14c in Figure 21 ), the camera 12 can obtain a third illumination image LI3 by scanning a third illumination area of the 3-1st area A3-1 to the 3-Nth area A3-N (e.g., the third illumination area LA3 in Figure 21 ). Specifically, the camera 12 can scan from the 3-1st area A3-1 along the first direction DR1 over the first to third shooting areas ROI1, ROI2, ROI3. After that, the third illumination image LI3 can be obtained by combining all the images from the third illumination image LI3(A3-1) for the 3-1st area A3-1 to the third illumination image LI3(A3-N) for the 3-Nth area A3-N.

[0120] Although the obtained illumination images are illustrated as three, the present invention is not limited thereto, and two or four or more illumination images can be obtained.

[0121] The camera (e.g., the camera 12 in Figure 1 ) can obtain a plurality of first to third illumination images LI1, LI2, LI3 based on a plurality of illuminators (e.g., the first to third illuminators 14a, 14b, 14c in Figure 1 ). The camera 12 can also divide the shooting area ROI into a plurality of areas (e.g., the first to third shooting areas ROI1, ROI2, ROI3 in Figure 13 ) by one of the plurality of illuminators. Thus, the surface defects can be detected more precisely and accurately by combining the first to third illumination images LI1, LI2, LI3 obtained from the first to third shooting areas ROI1, ROI2, ROI3.

[0122] Figures 25 to 27Step S50 is for explaining the movement of the workbench 40 along the first direction DR1, the second direction DR2, and the rotational direction on the plane defined by the first direction DR1 and the second direction DR2 by the movement module 30.

[0123] The inspection surface OS on the workbench 40 and the camera 12 can maintain a constant distance. In addition, the inspection surface OS on the workbench 40 and the camera 12 can be perpendicular to each other.

[0124] After finishing the image acquisition for the current area on the inspection surface OS, when measuring a new area on the inspection surface OS, the position of the inspection object IO can be moved by the movement module 30. When moving the position of the inspection object IO, the distance and angle between the inspection surface OS and the camera 12 may not remain constant. Therefore, the movement module 30 can receive the position relationship information between the inspection surface OS and the camera 12 to move the position of the inspection surface OS.

[0125] For example, the initial value of the shortest distance between the inspection surface OS and the camera 12 can be set to L1. When the inspection object IO moves in the direction opposite to the first direction DR1 and the value of the shortest distance between the inspection surface OS and the camera 12 changes to L2, the workbench 40 can be moved by the movement module 30 so that the value of the shortest distance between the inspection surface OS and the camera 12 remains L1.

[0126] In addition, the movement module 30 can move the workbench 40 in such a way that the normal direction N of the inspection surface OS faces the camera 12. Specifically, before the camera 12 captures the inspection surface OS, the movement module 30 can adjust the position of the inspection surface OS in such a way that the normal direction N of the inspection surface OS faces the camera 12.

[0127] Figure 28 It is a diagram for explaining an inspection device according to another embodiment of the present invention.

[0128] Regarding the inspection device 1' described with reference to Figure 28 Except for the displacement sensor 20', it can be substantially the same as the inspection device 1 described with reference to Figure 1 For the inspection device 1 described with reference to

[0129] Below, the description of the structural elements that are the same as those of the inspection device 1 described with reference to Figure 1 Will be omitted or simplified.

[0130] Regarding the reference to Figure 28 The inspection method performed by the inspection device 1' except for the step of measuring the curvature information of the inspection object IO placed on the workbench 40 by the displacement sensor 20' and the measurement unit 10 receiving the curvature information from the displacement sensor 20' and a plurality of illuminators (for example, Figure 1In addition to the step of irradiating light to the inspection surface OS of the inspection object IO by the first to third illuminators 14a, 14b, and 14c), it is substantially the same as the inspection method in Figure 2 the inspection method in

[0131] In one embodiment, the displacement sensor 20' can measure the curvature information for a part of the inspection surface OS. After that, the plurality of illuminators receive the curvature information for the part of the inspection surface OS and irradiate light to the part of the inspection surface OS. After that, the displacement sensor 20' can measure the curvature information for another part of the inspection surface OS where the curvature information has not been measured again, and the plurality of illuminators irradiate light again. In other words, the step of measuring by the displacement sensor 20' and the step of irradiating light by the plurality of illuminators can be repeatedly performed by changing the measurement and irradiation parts of the inspection surface OS. The displacement sensor 20' is attached to one surface of the camera 12 and measures the inspection surface OS of the inspection object IO simultaneously with the camera 12.

[0132] The present invention can be applied to the case of inspecting defects of a display device and an electronic device including the same. For example, the present invention can be applied to the case of inspecting defects of a high-resolution smartphone, a mobile phone, a smart board, a smart watch, a tablet PC, a car navigation system, a television, a computer monitor, a notebook computer, etc.

[0133] As described above, the present invention has been described with reference to the exemplary embodiments of the present invention. However, those having ordinary knowledge in the technical field should understand that the present invention can be modified and changed in various ways without departing from the spirit and scope of the present invention described in the claims.

Claims

1. An inspection device, comprising: A workbench, configured to deform corresponding to the curved surface of an inspection object, and the inspection object is placed on the workbench; A moving module, for moving the workbench along a first direction, a second direction intersecting with the first direction, and a direction of rotation on a plane defined by the first direction and the second direction; A measurement unit, including a plurality of illuminators for irradiating light to the inspection object and a camera for photographing the inspection surface of the inspection object; A displacement sensor, for measuring the curvature of the inspection object, and transmitting the curvature information of the inspection object to the measurement unit; and A control unit, including a switch module for transmitting on and off signals to the plurality of illuminators and a trigger module for transmitting an electrical signal to the camera.

2. The inspection device according to claim 1, wherein The inspection surface includes an illumination area irradiated by the plurality of illuminators, The photographing area photographed by the camera on the inspection surface is included in the illumination area.

3. The inspection device according to claim 2, wherein The plurality of illuminators include a first illuminator and a second illuminator having different conditions from each other, And a first area and a second area are defined in a first photographing area in the photographing area, wherein, the first area is a part of the plurality of photographing areas when forming a first illumination area irradiated by the first illuminator, and the second area is a part of the plurality of photographing areas when forming a second illumination area irradiated by the second illuminator.

4. The inspection device according to claim 3, wherein The image obtained by photographing the illumination area by the camera includes a first illumination image generated by combining illumination images for the first area and a second illumination image generated by combining illumination images for the second area.

5. The inspection device according to claim 1, wherein The camera is perpendicular to the inspection surface, Through the moving module, the interval in the second direction between the camera and the inspection surface is kept constant.

6. The inspection device according to claim 1, wherein The displacement sensor is attached to one surface of the camera, and simultaneously measures the inspection surface of the inspection object together with the camera.

7. The inspection device according to claim 1, wherein The inspection object further includes a concave portion recessed from the surface of the workbench in a direction opposite to the second direction and a convex portion protruding from the surface of the workbench in the second direction, The workbench has a shape corresponding to the concave portion and a shape corresponding to the convex portion.

8. An inspection method, comprising the following steps: Deforming the shape of the workbench corresponding to the curved surface of the inspection object to place the inspection object on the workbench; Measuring the curvature information of the inspection object placed on the workbench by a displacement sensor; A measurement unit including a camera and a plurality of illuminators receives the curvature information from the displacement sensor, and the plurality of illuminators irradiate light to the inspection surface of the inspection object; The camera captures an image by photographing an illumination area where light is irradiated onto the inspection surface by the plurality of illuminators; and The stage is moved in a first direction, a second direction intersecting the first direction, and a direction of rotation on a plane defined by the first direction and the second direction by a moving module.

9. The inspection method according to claim 8, wherein The step of irradiating light onto the inspection surface by the plurality of illuminators includes the following steps: A first illuminator among the plurality of illuminators irradiates light onto the inspection surface; and A second illuminator having conditions different from those of the first illuminator irradiates light onto the inspection surface, The step of irradiating light onto the inspection surface by the first illuminator and the step of irradiating light onto the inspection surface by the second illuminator are alternately and repeatedly executed.

10. The inspection method according to claim 9, wherein The step of the camera capturing the illumination area to obtain the image includes the step of the camera dividing the inspection surface including the illumination area into a plurality of shooting areas spaced apart from each other in the first direction, After the step of the camera dividing the inspection surface into a plurality of the shooting areas, the step of the camera capturing the illumination area to obtain the image further includes the following steps: Scanning a first area in a first shooting area among the plurality of shooting areas, where the first area is a part of the plurality of shooting areas in a case of forming a first illumination area where light is irradiated onto the inspection surface by the first illuminator; and Scanning a second area in a first shooting area among the plurality of shooting areas, where the second area is a part of the plurality of shooting areas in a case of forming a second illumination area where light is irradiated onto the inspection surface by the second illuminator.

Images