Flow ratio controller system operating in alternating control mode

Abstract

A flow ratio controller system is provided that includes an inlet to receive a total inlet fluid flow from one or more inlet channels; a distribution channel in fluid connection with the inlet and arranged in parallel in the branch flow path downstream of the inlet; and a controller. The distribution channel comprises a mixing distribution channel. The controller selectively operates in an alternating control mode including a traffic verification control mode and a traffic ratio control mode. In a flow verification control mode, the controller calculates a calibration value for the reference volume using measurements taken by the mass flow meter in the mixed distribution channel, and then calculates a target channel calibration value for the mass flow meter in the target distribution channel. In the flow ratio control mode, the controller controls each of the distribution channels including the mixing channel according to a respective flow ratio setpoint for each distribution channel.

Description

Technical Field

[0001] The present invention relates to a flow rate ratio controller system and a flow rate ratio control method for a flow rate ratio controller Background Art

[0002] In the field of semiconductor manufacturing, achieving consistency in the production of semiconductor devices is a challenge. Due to variations in the processing parameters of each processing chamber, manufacturers often encounter difficulties in manufacturing repeatable and reproducible semiconductor devices. These variations may include differences in flow rate, temperature control, chamber surface and volume conditions, plasma frequency and density, and geometric factors. To address this issue, manufacturers have developed a practice of constructing a standard or "golden chamber" that is used to calibrate the processing chambers in the same manufacturing apparatus

[0003] This calibration process involves adjusting various processing variables to make the performance of multiple processing chambers consistent. The most commonly used method for this purpose is to recalibrate or fine-tune the processing recipe set points of mass flow controllers (MFCs)

[0004] A practice commonly adopted by some manufacturers is to introduce a gas flow into a single enclosed vacuum processing chamber and measure the rate of rise (ROR) of its internal pressure. By combining temperature measurement and the rate of rise of pressure and applying the ideal gas law equation, the mass flow rate can be calculated. This practice is known as "chamber rise rate". However, this method introduces errors due to inaccurate known volumes or slightly different chamber volumes for each processing chamber, thus hindering the ability to match processes across different processing chambers

[0005] Another conventional method involves using a general flow verification system that employs various basic flow metering or measurement concepts. In this system, the MFCs from all chambers flow into a centrally located flow validator. This method is generally more effective than the "chamber rise rate" method for chamber matching because it eliminates variations caused by different chamber volumes. However, this central verification system also has some drawbacks. These drawbacks include a significant increase in hardware, piping, and associated costs; a longer flight time (ToF) for the gas to flow from the MFC to the flow verification system due to extended piping distances; and the limitation that only one MFC can flow to the verification system at a time, thus requiring a serial or sequential method for MFC verification and variation. These factors result in longer system startup and certification times and increase the costs for manufacturers Summary of the Invention

[0006] To solve the above problems, a flow rate ratio controller system is provided, which includes: an inlet configured to receive a total inlet fluid flow; a plurality of distribution channels fluidly connected to the inlet and arranged in parallel in a branched flow path downstream of the inlet. Each of the plurality of distribution channels is provided with a corresponding valve and configured to convey a corresponding portion of the total inlet fluid flow. The plurality of distribution channels includes a mixing distribution channel. A controller is operably coupled to each of the plurality of distribution channels. The controller is configured to selectively operate in an alternating control mode including a flow verification control mode and a flow rate ratio control mode. In the flow verification control mode, the controller is configured to perform a first pressure change rate test on a first target flow path extending from the inlet through a reference volume to the mixing distribution channel using a measurement value obtained by a mass flow meter in the mixing distribution channel, thereby calculating a calibration value of the reference volume. Further, in the flow verification control mode, the controller is also configured to perform a second pressure change rate test on a second target flow path extending from the inlet through the reference volume to a target distribution channel other than the mixing distribution channel among the plurality of distribution channels by using the calibration value of the reference volume, verify a mass flow rate value measured by a mass flow meter in the target distribution channel, thereby calculating a target channel calibration value of the mass flow meter in the target distribution channel. In the flow verification control mode, the controller is also configured to calibrate the mass flow meter in the target distribution channel using the target channel calibration value. In the flow rate ratio control mode, the controller is configured to control each of the plurality of distribution channels including the mixing distribution channel according to a corresponding flow rate ratio set point of each distribution channel.

[0007] The present invention content is provided to introduce a selection of concepts further described below in the detailed description in a simplified form. The present invention content is not intended to identify key features or essential features of the claimed subject matter, nor is it intended to be used to limit the scope of the claimed subject matter. In addition, the claimed subject matter is not limited to embodiments that solve any or all of the disadvantages noted in any part of the present disclosure. Brief Description of the Drawings

[0008] Figure 1A is a schematic diagram showing a flow rate ratio controller system according to an example configuration of the present disclosure.

[0009] Figure 1B is a schematic diagram showing a flow rate ratio controller system according to another example configuration of the present disclosure.

[0010] Figure 2 Shows the control Figure 1A and 1B of a first method of a flow rate ratio controller system.

[0011] Figure 3 Shows the control Figure 1A and1B Flowchart of a second method of a flow rate ratio controller system.

[0012] Figure 4 Shows a flowchart of a third method for illustrating a first pressure change rate test for performing the first method as Figure 2 described.

[0013] Figure 5 Shows a flowchart of a fourth method for illustrating performing an on-site decay rate test to determine a calibration value of an upstream reference volume in the system of FIG. 1.

[0014] Figure 6 Shows a flowchart of a fifth method for illustrating verifying a mass flow rate value measured by a mass flow meter in a target allocation channel in a flow verification control mode of the first method 100 as Figure 2 described.

[0015] Figure 7 Shows a flowchart of a sixth method for illustrating performing an on-site decay rate test to determine a calibration value of a target allocation channel in the system of FIG. 1.

[0016] Figure 8 Is a perspective view of an example configuration of the flow rate ratio controller system of FIG. 1.

[0017] Figure 9 Is along Figure 8 the dashed line in Figure 8 a partial cross-sectional view of an example configuration of the flow rate ratio controller system.

[0018] Figure 10 Is from the same angle as Figure 9 obtained Figure 8 a side view of an example configuration of the flow rate ratio controller system, with the lid of the channel removed.

[0019] Figure 11 Shows a schematic diagram of an example computing environment in which the computing system of FIG. 1 can be implemented. Detailed Description

[0020] In view of the above problems, referring to FIG. 1, a flow ratio controller system 10 shown in a first example configuration is provided. The flow ratio controller system 10 includes a splitter subsystem 12 and an inlet 17 configured to receive an upstream total inlet fluid flow that subsequently flows through the splitter subsystem 12. For example, the inlet 17 may receive an upstream fluid flow from a collective first manifold 15 configured to collect the flows exiting from one or more inlet channels 18. In the example of FIG. 1, the flows from each of the inlet channels 18A - 18F are collected in the first manifold 15, which then delivers the combined flow to the inlet 17 of the splitter subsystem 12 of the flow ratio controller system 10. Corresponding upstream mass flow controllers MFC 1 to MFC N may be fluidly connected upstream of the inlet 17 on each of the one or more inlet channels 18. It can be understood that the first manifold 15, like the second manifold 16 described below, may be formed by a manifold block in which a fluid path is formed, or alternatively may be formed in another form, such as by one or more pipes in which appropriate fluid paths are formed.

[0021] The flow ratio controller system 10 may be configured as a gas delivery device that can be enclosed within a housing. The fluid pipelines described herein may be implemented using flow blocks, pipes, or other flow channel structures. It can be understood that although six mass flow controllers MFC 1 to MFC 6 are depicted in FIG. 1, their number is not particularly limited and may be less than or greater than six, as indicated by the symbol MFC N.

[0022] The inlet 17 is configured to receive the total inlet fluid flow from one or more inlet channels 18. The splitter subsystem 12 of the flow ratio controller system 10 is also configured with a plurality of distribution channels 14, which include a mixing distribution channel 14C that directs gas into a processing chamber PC where processes such as deposition and etching are performed during semiconductor manufacturing. The mixing distribution channel 14C is used in two different ways according to the operating mode (i.e., for verifying a reference volume and for delivering a portion of the total flow), and is thus referred to herein as a "mixing" channel. The distribution channels 14 are fluidly connected to the inlet 17 formed on the upstream side of the downstream manifold 16. The distribution channels 14 are arranged in parallel in a branched flow path downstream of the inlet 17 in the downstream manifold 16, leading to respective outlets 19 that direct the fluid flow into the processing chamber PC. Each of the plurality of distribution channels 14 is provided with a corresponding variable flow control valve CV1 - CV3 and is configured to deliver a corresponding portion of the total inlet fluid flow entering the splitter subsystem 12. The variable flow control valves CV1 - CV3 are integrated within channel - specific flow controllers 13 that can measure mass flow or volume flow and are located on each of the distribution channels 14.

[0023] It is understood that although three distribution channels 14 are depicted in FIG. 1, their number is not particularly limited and can be less than or greater than three, as indicated by the symbol "channel N". For example, channel N can be an additional distribution channel in the branched flow path downstream of the inlet 17. In some configurations, channel N can be configured without a flow control valve and configured to convey a corresponding portion of the total inlet fluid flow.

[0024] As Figure 1B shown, the distribution channel 14 can also include a high-flow distribution channel N+1, which branches out from the manifold at a point upstream of the branch point of the mixed distribution channel 14C and includes a downstream reference volume VM4, with isolation valves IV7 and IV8 on the upstream and downstream sides of the downstream reference volume VM4. A metering temperature sensor TM4 and a metering pressure sensor PM4 can be provided in the high-flow distribution channel N+1. Figure 1B The configuration of Figure 1A is the same as other configurations of Figure 1B and further description of

[0025] Returning to Figure 1A , at the inlet of the diverter subsystem 12, the main isolation valve IV1 is located upstream of the inlet 17. Additional isolation valves IV2, IV3, and IV5 are located upstream of their corresponding flow control valves CV1, CV2, and CV3 in the distribution channels 14A-14C, respectively. The isolation valve IV2 of the flow ratio control channel 14A is located upstream of the channel 14A, the isolation valve IV3 is adjacent to the upstream of the channel 14B, and the isolation valve IV5 is adjacent to the upstream of the mixing channel 14C.

[0026] Each of the distribution channels 14A and 14B that is not the mixed distribution channel 14C can include, in the downstream direction along the flow path of each distribution channel 14, in the following order: a valve position sensor Z configured to measure the opening of the flow control valves CV1 and CV2; a temperature sensor T configured to measure the temperature of the fluid in the distribution channel 14; an upstream pressure sensor P1 configured to measure the pressure of the fluid upstream of the restrictor R; a fixed geometry restrictor R configured to restrict the flow of the fluid; and a downstream pressure sensor P2 configured to measure the pressure of the fluid downstream of the restrictor R. The flow control valves CV1-CV3 are generally located upstream of the restrictor R, but can also be located downstream of the restrictor R as shown by the dashed line 23A. Each distribution channel 14 is configured with a corresponding outlet 19 of the diverter subsystem 12. The upstream pressure sensor P1 and the downstream pressure sensor P2 can be configured as diaphragm-isolated pressure sensors.

[0027] The mixing distribution channel 14C includes a pair of metering pressure sensors PM2, PM3 and a pair of metering temperature sensors TM3, TM4 respectively located on both sides of the flow restrictor RM. In this example, the mixing distribution channel 14C includes a series of components arranged in sequence in the downstream direction along the flow path of the mixing distribution channel 14C, and these components include a flow control valve CV3, a first internal volume VM2, a metering temperature sensor TM2 configured to measure the temperature of the first internal volume VM2, an upstream metering temperature sensor TM3 and an upstream metering pressure sensor PM2, a flow restrictor RM, a downstream metering temperature sensor TM4 and a downstream metering pressure sensor PM3, and a second internal volume VM3.

[0028] The accuracy of the upstream metering pressure sensor PM2 and the downstream metering pressure sensor PM3 can be an accuracy value within FS (full scale) ±0.1%. The temperature coefficient of the upstream metering temperature sensor TM3 and the downstream metering temperature sensor TM4 can be an accuracy value within FS / ℃ (full scale) ±0.02%. The upstream metering pressure sensor PM2 and the downstream metering pressure sensor PM3 can be MEMS (Micro-Electro-Mechanical System) oscillating pressure sensors. The channel diameter in the flow restrictor RM can be less than 50 micrometers. The channel length in the flow restrictor RM can be greater than 10 millimeters and less than 50 millimeters. The flow restrictor RM can contain a ceramic material, and the internal flow channel within the flow restrictor RM can be cut and formed within the ceramic material to precisely adjust the length and volume dimensions of the internal flow channel within the flow restrictor RM.

[0029] The flow rate ratio controller system 10 further includes a controller 22, which is operably coupled to the respective variable flow control valves CV1-CV3 of each of the plurality of distribution channels 14 to control the respective variable flow control valves CV1-CV3 in a feedback loop. For example, the variable flow control valves CV1-CV3 can be proportional flow control valves.

[0030] The controller 22 is configured to selectively operate in an alternating control mode including a flow verification control mode and a flow ratio control mode. In the flow verification control mode, the controller 22 is configured to perform a first pressure change rate test on a first target flow path extending from the inlet 17 through the reference volume VM1 to the mixing distribution channel 14C by using the measurement values obtained by the mass flow meter in the mixing distribution channel 14C, so as to calculate the calibration value of the reference volume VM1. In the flow verification control mode, the controller 22 is further configured to verify the mass flow rate value measured by the mass flow meter in the target distribution channel (e.g., 14A) among the plurality of distribution channels 14A, 14B other than the mixing distribution channel 14C by performing a second pressure change rate test on a second target flow path extending from the inlet 17 through the reference volume VM1 to the target distribution channel (e.g., 14A) by using the measurement values obtained by the temperature sensor and the pressure sensor in the target distribution channel (e.g., 14A) and the calibration value of the reference volume VM1, so as to calculate the target channel calibration value of the mass flow meter in the target distribution channel 14A.

[0031] In the flow ratio control mode, the controller 22 is configured to control each of the plurality of distribution channels 14 including the mixing distribution channel 14C and the target distribution channel (e.g., 14A) by using the calibrated mass flow meter according to the corresponding flow ratio set point of each distribution channel 14. For example, the mass flow meter in the mixing distribution channel 14C can be implemented as a pair of metering pressure sensors PM2, PM3 located on both sides of the restrictor RM and a pair of metering temperature sensors TM3, TM4.

[0032] The controller 22 can be configured to verify the flow rate in one of the inlet channels 18 or one or more of the distribution channels 14 by using the ideal gas law (PV = nRT) and the reference volume provided on the branch flow path downstream of the inlet 17, at least in part by performing a pressure change rate test (e.g., a pressure rise rate test (ROR test) or a pressure drop rate test (ROF test)).

[0033] The reference volume can be the upstream reference volume VM1, which is provided in the downstream manifold 16 on the branch flow path downstream of the inlet 17 and upstream of the restrictor RM of the mass flow meter located in the mixing distribution channel 14C. In this embodiment, the upstream metering pressure sensor PM1 and the upstream metering temperature sensor TM1 are located in the upstream reference volume VM1 and are operably connected to the controller 22. The upstream reference volume VM1 can be defined as a section of the flow path from the main isolation valve IV1 to the downstream valves IV2, IV3, and IV5.

[0034] In another embodiment, the reference volume can be the downstream reference volume VM3, which is provided on the branch flow path downstream of the restrictor RM of the mass flow control device located in the mixing distribution channel 14C.

[0035] Alternatively, the reference volume may be an intermediate reference volume VM2, which is provided on a branch flow path downstream of the inlet 17 and upstream of the restrictor RM of the mass flow meter located in the mixing and distribution channel 14C. In this embodiment, the metering temperature sensor TM2 is located in the intermediate reference volume VM2.

[0036] The downstream manifold 16 includes an upstream metering pressure sensor PM1 and an upstream metering temperature sensor TM1 that are located in the upstream reference volume VM1 and operably coupled to the controller 22.

[0037] The controller 22 includes a processing circuit 22A, a volatile memory 22B such as a random access memory (RAM), and a non-volatile memory 22C such as a read-only memory (ROM), a flash memory, or a hard disk. The non-volatile memory 22C stores program instructions that, when executed by the processing circuit 22A using a portion of the volatile memory 22B, cause the processing circuit 22A to instruct the diverter subsystem 12 to implement the implementation of the control process described herein accordingly. In some embodiments, the controller 22 may be configured as a system on module (SOM). The processing circuit 22A may be a central processing unit (CPU), an application specific integrated circuit (ASIC), a field programmable gate array (FPGA), or other type of microprocessor, and may be, for example, a multi-core processor. The controller 22 may be operably coupled to the diverter subsystem 12 via the network 21 or a direct data connection, and the controller 22 may optionally be operably coupled to the mass flow controllers MFC 1-MFC N of the inlet channel 18 via the network 21 or a direct data connection.

[0038] In some embodiments, it is understood that a channel-specific control microprocessor may be included within each distribution channel, the channel-specific control microprocessor including a memory and a processor function for controlling the flow controller located on that channel. It is understood that the microprocessor for one of the channels may be programmed to implement the functions of the controller 22. When such a configuration is adopted, the channel having a microprocessor configured to act as the controller 22 is referred to as the primary channel.

[0039] In one example, the diverter subsystem 12 includes flow ratio control channels 14A, 14B, and a mixing and distribution channel 14C. By closing isolation valves IV2, IV3, and IV4 while keeping isolation valve IV5 open, allowing fluid to pass only through the mixing and distribution channel 14C, where the flow rate is measured, the flow rate of the diverter subsystem 12 is verified. Flow calculations for flow control or verification may involve using a digital twin model of the restrictor RM, which incorporates fluid mechanics equations that take into account the exact geometry of the internal flow path within the restrictor RM and the properties of the fluid flowing through the restrictor RM.

[0040] For the first pressure change rate test, the controller 22 is configured to control the valves along the branch flow path to construct a first target flow path. For calibration purposes, this can be achieved by closing the main isolation valve IV1 and the downstream valves IV2, IV3, and IV5, and then opening valve IV5 and the valve IV6 located downstream of channel 14C. Then, the controller 22 performs a controlled compression or decompression on the reference volume VM1 using a calibrated total inlet flow rate with a first predetermined mass flow rate value. To achieve this, the control valve CV3 of the target distribution channel 14C and the restrictor RM can be adjusted to achieve a controlled decompression of the upstream reference volume VM1.

[0041] Then, the controller 22 measures the temperature change and pressure change in the mixing and distribution channel 14C during the controlled compression or decompression using the temperature sensor and pressure sensor measurements in the mixing and distribution channel 14C, respectively. To measure the temperature change and the pressure change, the controller 22 can measure the initial pressure and initial temperature as well as the subsequent pressure and subsequent temperature in the mixing and distribution channel 14C as a result of the controlled compression or decompression. For example, the mixing and distribution channel 14C can be used to measure the pressure decay (rate of pressure change or drop) within the volume VM1 during controlled decompression using signals from the upstream metering pressure sensor PM1 and upstream metering temperature sensor TM1 located within the reference volume VM1. The temperature sensor TM1 provides a simultaneous temperature measurement of the first upstream volume VM1, and by combining the gas law rate of change (ROC) calculation, the volume VM1 is evaluated by comparing the mass flow rate change indicated by the mixing and distribution channel 14C with the pressure and temperature values measured by the pressure sensor PM1 and temperature sensor TM1, respectively.

[0042] Then, the controller 22 calculates a calibration value of the reference volume based on the measured temperature change, the measured pressure change, the first predetermined mass flow rate value, and the gas constant. The calibration value of the upstream reference volume VM1 can be calculated based on the measured pressure decay and can subsequently be stored in the non-volatile memory 22C. The calibration value of the reference volume VM1 can also be calculated using the ideal gas law (PV = nRT), where the values of the measured initial pressure, the measured initial temperature, the measured subsequent pressure, the measured subsequent temperature, the gas constant, and the mass flow rate of the calibrated total inlet flow are used.

[0043] Subsequently, the calibrated first upstream volume VM1 is used as an established parameter and a reference for subsequent evaluation of the fluid dynamics within the other target distribution channels 14A, 14B. This process involves a series of steps to ensure that the flow characteristics of these channels 14A, 14B are within the specifications desired for stable and reliable performance.

[0044] To verify the mass flow rate value measured by the mass flow meter in the target distribution channel (e.g., 14A) in the flow verification control mode, the controller 22 is also configured to control the valve along the branch flow path to construct a second target flow path between the inlet and only the target distribution channel (e.g., 14A), and this second target flow path includes the reference volume VM1. This can be achieved by closing the main isolation valve IV1. Then, while constructing the second target flow path, the controller 22 performs a controlled compression or decompression on the reference volume VM1 using the calibrated total inlet flow with a second predetermined mass flow rate value. Pressurization can be achieved by closing the main isolation valve IV1, thereby effectively sealing the system to prevent external influences. By isolating the system in this way, the pressurized volume VM1 becomes a static environment where any changes can be fully attributed to the behavior of the channel being tested.

[0045] While constructing the second target flow path, the controller 22 measures the pressure change and the temperature change using the temperature sensor and the pressure sensor in the target distribution channel (e.g., 14A) during the controlled compression or decompression. In this example, while the other channels remain isolated, the downstream isolation valve IV2 or IV3 can be methodically opened according to the calibrated channel (14A or 14B). This targeted approach allows for a separate evaluation of the flow characteristics of each channel without interference from parallel flow paths.

[0046] When the channel to be calibrated is channel 14A, control the control valve CV1 and the flow restrictor R of target allocation channel 14A to achieve controlled decompression of the upstream reference volume VM1 passing through target allocation channel 14A. When the isolation valve IV2 is opened to allow fluid to flow through channel 14A, the pressure in the first upstream volume VM1 begins to decrease. During the controlled decompression in the ROF test, signals from the upstream metering pressure sensor PM1 and the upstream metering temperature sensor TM1 located in the reference volume VM1 are used to measure the pressure decay.

[0047] It can be understood that the calibration of channel 14B and other channels is similar to that of channel 14A. The pressure decay of the first upstream volume VM1 provides information about the characteristics of channel 14A, which includes the structural features of channel 14A (including cross-sectional area, surface roughness, and the presence of any flow restrictors). The pressure drop rate of the first upstream volume VM1 is recorded throughout the pressure decay.

[0048] Then, the controller 22 calculates the rate-based flow through target allocation channel 14A based on the measured pressure change, the measured temperature change, the calibration value of the reference volume VM1, and the second predetermined mass flow rate value. For example, this can be achieved by measuring the temperature at the upstream metering temperature sensor TM1 and the pressure at the upstream metering pressure sensor PM1 at two time points during the rate test, and using the calibration value of the reference volume VM1 to calculate the mass flow rate using the ideal gas law described above.

[0049] The controller calculates the restrictor-based flow through the target allocation channel based on the restrictor size of the flow restrictor R in target allocation channel 14A and the second predetermined mass flow rate value. For example, this can be achieved by a mass flow meter on target allocation channel 14A measuring the mass flow rate through the flow restrictor in target allocation channel 14A using, for example, the measured values obtained by pressure sensors P1 and P2 and temperature sensor T. Then, based on the comparison between the calculated rate-based flow and the calculated restrictor-based flow, the target channel calibration value is calculated. Subsequently, the calculated target channel calibration value is stored in the non-volatile memory 22C. Although channel 14A has been used as an example target allocation channel to describe this technique, it can be understood that this technique can be applied to Figure 1A any one of channels A-N in Figure 1B and channel N + 1 in

[0050] The flow verification control mode can also be executed by the controller 22 to verify the mass flow rate value measured by the target mass flow controller (e.g., MFC 1). To perform the flow verification of the target mass flow controller, the target mass flow controller calibration value is calculated and the target mass flow controller in the target inlet channel is calibrated using the target mass flow controller calibration value.

[0051] The fidelity of the performance of the target distribution channel 14A can be determined by comparing the observed pressure decay rate with the expected behavior predicted by the restrictor model. The difference between the observed rate and the expected rate may indicate problems such as blockage, wear, or defects in the channel or the restrictor R and may require further investigation or adjustment.

[0052] The first upstream volume VM1 can be calibrated during the chamber matching process. In such a process, the first upstream volume VM1 can be calibrated using the mixing distribution channel 14C or independently calibrated by another calibration method (e.g., the weight calibration method). When calibrating using the mixing distribution channel 14C, the first upstream volume VM1 can be calibrated independently. Thus, the first upstream volume VM1 becomes the gold chamber to match other chambers in the distribution channel 14 downstream of the inlet 17 and the inlet channel 18 upstream of the inlet 17, so that the internal volumes of these channels 14, 18 can be calibrated using the first upstream volume VM1. For example, the calibration value of the upstream reference volume VM1 can be used to calculate the flow calibration value of the upstream mass flow controller MFC 1 on the upstream channel 18A fluidly connected to the inlet 17. Thus, in the flow verification control mode, the controller 22 can be configured to verify the flow rate in the corresponding mass flow controller MFC 1. Thus, the reference volumes VM1, VM2, and VM3 can be used as non-drifting references that can be cross-checked with other flow references and mass flow controllers.

[0053] Figure 2 is a flowchart of a first method 100 for a flow rate ratio controller that includes an inlet configured to receive a total inlet fluid stream and a plurality of distribution channels fluidly connected to the inlet and arranged in parallel in a branched flow path downstream of the inlet, each of the plurality of distribution channels being provided with a corresponding valve and configured to convey a corresponding portion of the total inlet fluid stream, the plurality of distribution channels including a mixing distribution channel. The first method 100 can be implemented on the controller system 10 shown in FIG. 1 above, the controller system 10 including the processing circuit and associated memory of the controller, the controller being configured to selectively operate in an alternating control mode including a flow verification control mode and a flow rate ratio control mode. Alternatively, other suitable computing hardware and software can be used.

[0054] At step 102, the method includes determining whether to operate in a flow verification control mode or a flow ratio control mode. For example, this can be determined based on a control input from a controller or a user input. At step 104, the method includes performing a flow verification control mode that includes performing a first pressure change rate test on a first target flow path extending from an inlet through a reference volume to a mixing distribution channel using measurements obtained by a mass flow meter in the mixing distribution channel, thereby calculating a calibration value of the reference volume. At step 108, the method includes performing a flow verification control mode that includes verifying a mass flow rate value measured by a mass flow meter in a target distribution channel by performing a second pressure change rate test on a second target flow path extending from the inlet through the reference volume to the target distribution channel other than the mixing distribution channel among the plurality of distribution channels by using the calibration value of the reference volume, thereby calculating a target channel calibration value of the mass flow meter in the target distribution channel. In addition to the calibration value, at step 108, measurements obtained by a temperature sensor and a pressure sensor in the target distribution channel can also be used to calculate the target channel calibration value. At step 110, the method includes performing a flow verification control mode that includes calibrating the mass flow meter in the target distribution channel using the target channel calibration value.

[0055] At step 106, the method includes performing a flow ratio control mode in which each of the plurality of distribution channels including the mixing distribution channel is controlled according to a respective flow ratio set point of each distribution channel. Typically, this flow ratio control mode is performed after calibration using the calibrated mass flow meters of the target distribution channels. In some examples, all distribution channels can be calibrated in this manner before performing the flow ratio control mode.

[0056] Figure 3 It is a flowchart of a second method 200 for controlling a flow ratio controller system having a plurality of distribution channels fluidly connected to an inlet of a manifold and arranged in parallel in a branched flow path downstream of the inlet. Each of the plurality of distribution channels is provided with a respective control valve and configured to deliver a respective portion of the total inlet fluid flow, and the plurality of distribution channels includes a mixing distribution channel. The second method 200 can be implemented on the controller system 10 shown in FIG. 1 above, which includes a processing circuit of a controller and an associated memory, and the controller is configured to selectively operate in an alternating control mode including a flow verification control mode and a flow ratio control mode. Alternatively, other suitable computing hardware and software can be used.

[0057] At step 202, the method includes determining whether to operate in a flow verification control mode or a flow ratio control mode. At step 204, the method includes, in the flow verification control mode, adjusting a control valve to verify the flow rate in one of the inlet channels or one or more dispensing channels by performing an on-site decay rate test to determine a calibration value of an upstream reference volume. At step 206, the method includes, in the flow ratio control mode, adjusting the control valve to control the flow rate of each of the plurality of dispensing channels according to a respective flow rate ratio set point of each dispensing channel.

[0058] At step 208, the method includes performing an on-site decay rate test to determine a calibration value of a target dispensing channel. At step 210, the method includes calculating a flow rate calibration value of an upstream mass flow controller on an upstream channel connected to an inlet fluid using the calibration value of the upstream reference volume.

[0059] Figure 4 It is a flowchart of a third method 300 for performing the first pressure change rate test described in step 104 of the first method 100.

[0060] At step 302, the method includes controlling a valve along a branch flow path to construct a first target flow path. At step 304, the method includes subjecting a reference volume to a controlled compression or decompression using a calibrated total inlet flow rate having a first predetermined mass flow rate value. At step 306, the method includes using temperature sensors and pressure sensors in a mixing dispensing channel to respectively measure temperature changes and pressure changes in the mixing dispensing channel during the controlled compression or decompression. At step 308, the method includes calculating a calibration value of the reference volume based on the measured temperature changes, the measured pressure changes, the first predetermined mass flow rate value, and the gas constant. At step 310, the method includes storing the calculated calibration value of the reference volume.

[0061] Figure 5 It is a flowchart of a fourth method 400 for performing an on-site decay rate test as described in step 204 of the second method 200 to determine a calibration value of an upstream reference volume.

[0062] At step 402, the method includes pressurizing an upstream reference volume in a manifold. At step 404, the method includes adjusting a control valve of a mixing dispensing channel to achieve a controlled decompression of the upstream reference volume. At step 406, the method includes measuring the pressure decay in a ROF test using signals from an upstream metering pressure sensor and an upstream metering temperature sensor located in the upstream reference volume during the controlled decompression. At step 408, the method includes calculating a calibration value of the upstream reference volume based on the measured pressure decay. At step 410, the method includes storing the calculated calibration value.

[0063] Figure 6 It is a flowchart of a fifth method 500 for verifying the mass flow rate value measured by a mass flowmeter in a target distribution channel under the flow verification control mode described in step 108 of the first method 100.

[0064] At step 502, the method includes controlling a valve along a branch flow path to construct a second target flow path between an inlet and only the target distribution channel, the second target flow path including a reference volume. At step 504, the method includes, while constructing the second target flow path, subjecting the reference volume to a controlled compression or decompression using a calibrated total inlet flow rate having a second predetermined mass flow rate value. At step 506, the method includes, while constructing the second target flow path, measuring a pressure change and a temperature change using a temperature sensor and a pressure sensor in the target distribution channel during the controlled compression or decompression. At step 508, the method includes calculating a rate-based flow rate through the target distribution channel based on the measured pressure change, the measured temperature change, a calibration value of the reference volume, and the second predetermined mass flow rate value. At step 510, the method includes calculating a restrictor-based flow rate through the target distribution channel based on the restrictor size of a restrictor in the target distribution channel and the second predetermined mass flow rate value. At step 512, the method includes calculating a target channel calibration value based on a comparison of the calculated rate-based flow rate with the calculated restrictor-based flow rate. At step 514, the method includes storing the calculated target channel calibration value.

[0065] Figure 7 It is a flowchart of a sixth method 600 for performing an on-site decay rate test as described in step 208 of the second method 200 to determine the calibration value of a target distribution channel.

[0066] At step 602, the method includes pressurizing an upstream reference volume. At step 604, the method includes adjusting a control valve of the target distribution channel to effect a controlled decompression of the upstream reference volume passing through the target distribution channel.

[0067] At step 606, the method includes measuring a pressure decay using signals from an upstream metering pressure sensor and an upstream metering temperature sensor located in the reference volume during the controlled decompression. At step 608, the method includes calculating a decay rate-based flow rate through the target distribution channel based on the measured pressure decay and a calibration value of the upstream reference volume.

[0068] At step 610, the method includes calculating a flow limiter-based flow rate through the target distribution channel based on the flow limiter size of the flow limiter in the target distribution channel. At step 612, the method includes calculating a target channel calibration value based on a comparison of the calculated decay rate-based flow rate and the calculated flow limiter-based flow rate. At step 614, the method includes storing the calculated target channel calibration value.

[0069] The above-described system and method describe the operation of a flow control valve in a flow distribution channel under an alternating control mode including a flow verification control mode and a flow ratio control mode. This configuration increases functionality while maintaining or even reducing the material cost of manufacturing hardware.

[0070] In addition, the efficiency of process control in a single reaction chamber is improved. The MFC of each processing chamber can execute a flow verification program in a significantly shorter time. This efficiency is achieved due to the shorter distance for controlling the flow within the control system and the reduced flight time. The accelerated process not only saves time but also increases the overall throughput of semiconductor manufacturing.

[0071] According to this configuration, the MFC flow verification programs can also be run in parallel rather than in a serial manner. This parallel processing significantly reduces the time required for tool qualification and chamber matching. By simplifying these processes, the system can ensure faster setup and adjustment times, thereby increasing the productivity of semiconductor manufacturing operations.

[0072] In addition, this configuration is also capable of performing in-situ verification of the MFC to monitor long-term repeatability and drift. The in-situ verification process through the flow ratio controller channels can ensure timely identification and correction of any deviation from the desired flow parameters, thereby maintaining the reliability and accuracy of flow control over a long period of time and thus maintaining a high standard of manufacturing quality.

[0073] Figure 8 is a perspective view of an example configuration of the flow ratio controller system of FIG. 1. It shows a four-channel configuration where channel N is located between channel B and channel C, and channel C is the above-described hybrid distribution channel 14C. The reference numerals of other components are similar to those in FIG. 1. In the case of sensor co-packaging (e.g., TM1, PM1), a single lead represents the package where the sensor is located. It can be understood that the hybrid manifold 16 includes VM1, and these components are also used Figure 8The single lead wire in [the figure] represents. Although four channels are depicted, it can be understood that additional channels can be added, or a smaller number of channels (greater than two) can be used. Additionally, although in the depicted embodiment, flow control valves are depicted on all distribution channels 14, it can be understood that in some configurations, the flow control valves can be omitted from the distribution channels (i.e., the so-called "open channels"), while multiple other distribution channels can be controlled by the flow control valves.

[0074] Figure 9 is taken along Figure 8 the dashed line in Figure 8 A partial cross-sectional view of an example configuration of a flow ratio controller system. In this view, the internal volumes VM1, VM2, and VM3, as well as the positions of the restrictor RM and the metering temperature sensor TM2, are visible.

[0075] Figure 10 is obtained from the same angle as Figure 9 that of Figure 8 A side view of an example configuration of a flow ratio controller system, where the cover of the mixing distribution channel 14C is removed. In this view, the positions of the metering sensors PM2, TM3, and PM3 and TM4 are visible.

[0076] As Figure 9 and 10 shown, the isolation valve IV5 is adjacent to the upstream of the mixing distribution channel 14C, while the isolation valve IV6 is adjacent to the downstream of the same channel 14C, thereby regulating the fluid flow within the mixing distribution channel 14C. As Figure 9 shown, the upstream isolation valve IV5 regulates the fluid flow flowing from the upstream reference volume VM1 of the downstream manifold 16 into the mixing distribution channel 14C.

[0077] Within the housing compartment containing the mixing distribution channel 14C, the cylindrical housing containing the flow control valve CV3 integrated within the channel-specific flow controller 13 is adjacent to a cylindrical housing that contains the first internal volume VM2, the metering temperature sensors TM2 and TM3, and the upstream metering pressure sensor PM2. Another set of components including the downstream metering pressure sensor PM3, the downstream metering temperature sensor TM4, and the second internal volume VM3 is contained within a separate cylindrical housing that is adjacent to the cylindrical housing containing the first internal volume VM2. These cylindrical housings are arranged closely to each other, thereby improving the space utilization rate.

[0078] The controller 22 is physically mounted to the hybrid distribution channel 14C to establish direct data communication links with the channel-specific flow controller 13 and each sensor and valve, including isolation valves IV5, IV6; pressure sensors PM2, PM3; temperature sensors TM2, TM3, TM4; and restrictor RM, thereby reducing latency in data transmission, which is advantageous in applications that are hydrodynamically sensitive and require precise, real-time monitoring and regulation.

[0079] Figure 11 A non-limiting embodiment of a computing system 700 in which one or more of the above-described methods and processes may be implemented is schematically illustrated. The computing system 700 is shown in simplified form. The computing system 700 may be implemented as the above-described controller system 10 shown in FIG. 1 and Figures 8 - 10 as described above. The components of the computing system 700 may be included in one or more personal computers, server computers, tablet computers, home entertainment computers, network computing devices, video game devices, mobile computing devices, mobile communication devices (e.g., smart phones), and / or other computing devices, as well as wearable computing devices (e.g., smart watches and head-mounted augmented reality devices).

[0080] The computing system 700 includes processing circuitry 702, volatile memory 704, and non-volatile storage device 706. The computing system 700 may optionally include a display subsystem 708, an input subsystem 710, a communication subsystem 712, and / or Figure 11 other components not shown herein.

[0081] Processing circuitry generally includes one or more logical processors that are physical devices configured to execute instructions. For example, a logical processor may be configured to execute instructions that are part of one or more applications, programs, routines, libraries, objects, components, data structures, or other logical configurations. Such instructions may be implemented to perform tasks, implement data types, transform the state of one or more components, achieve a technical effect, or otherwise achieve a desired result.

[0082] A logical processor may include one or more physical processors configured to execute software instructions. Additionally or alternatively, a logical processor may include one or more hardware logic circuits or firmware devices configured to execute hardware-implemented logic or firmware instructions. The processor of processing circuitry 702 may be single-core or multi-core, and the instructions executed on the processor may be configured for sequential, parallel, and / or distributed processing. The various components of the processing circuitry may optionally be distributed among more than two separate devices, which may be remotely located and / or configured to coordinate processing. For example, aspects of the computing systems disclosed herein may be virtualized and executed by remotely accessible networked computing devices configured in a cloud computing configuration. In such cases, it will be understood that these virtualized aspects run on different physical logical processors of various different machines. These different physical logical processors of different machines will be understood to be collectively included in processing circuitry 702.

[0083] The non-volatile storage device 706 includes one or more physical devices configured to store instructions executable by the processing circuitry to implement the methods and processes described herein. When implementing these methods and processes, the state of the non-volatile storage device 706 may be transformed to, for example, store different data.

[0084] The non-volatile storage device 706 may include removable and / or built-in physical devices. The non-volatile storage device 706 may include optical memory, semiconductor memory, and / or magnetic memory, or other mass storage device technologies. The non-volatile storage device 706 may include non-volatile, dynamic, static, read / write, read-only, sequential access, location-addressable, file-addressable, and / or content-addressable devices. It will be understood that the non-volatile storage device 706 is configured to store instructions even when the non-volatile storage device 706 is powered off.

[0085] The volatile memory 704 may include a physical device that includes random access memory. The processing circuitry 702 generally uses the volatile memory 704 to temporarily store information during the execution of software instructions. It will be understood that when the volatile memory 704 is powered off, the volatile memory 704 generally does not continue to store instructions.

[0086] Aspects of the processing circuitry 702, the volatile memory 704, and the non-volatile storage device 706 may be integrated into one or more hardware logic components. For example, such hardware logic components may include field programmable gate arrays (FPGAs), program- and application-specific integrated circuits (PASIC / ASICs), program- and application-specific standard products (PSSP / ASSPs), system-on-chips (SOCs), and complex programmable logic devices (CPLDs).

[0087] The terms "module", "program", and "engine" may be used to describe an aspect of the computing system 700, which is typically implemented in software by a processor to perform a particular function using a portion of the volatile memory, the function involving a conversion process that specifically configures the processor to perform the function. Thus, using a portion of the volatile memory 704, the processing circuitry 702 that executes the instructions stored in the non-volatile storage device 706 instantiates the module, program, or engine. It can be understood that different modules, programs, and / or engines may be instantiated from the same application, service, code block, object, library, routine, API, function, etc. Similarly, the same module, program, and / or engine may be instantiated by different applications, services, code blocks, objects, routines, APIs, functions, etc. The terms "module", "program", and "engine" may encompass single or groups of executable files, data files, libraries, drivers, scripts, database records, etc.

[0088] When including the display subsystem 708, the display subsystem 708 may be used to present a visual representation of the data stored in the non-volatile storage device 706. The visual representation may take the form of a graphical user interface (GUI). When the methods and processes described herein change the data stored in the non-volatile storage device and thus transform the state of the non-volatile storage device, the state of the display subsystem 708 may likewise be transformed to visually represent the change in the underlying data. The display subsystem 708 may include one or more display devices utilizing almost any type of technology. Such display devices may be combined with the processing circuitry 702, the volatile memory 704, and / or the non-volatile storage device 706 in a common housing, or such display devices may be peripheral display devices.

[0089] When including the input subsystem 710, the input subsystem 710 may include one or more user input devices such as keyboards, mice, touchscreens, cameras, or microphones, or be connected to them.

[0090] When including the communication subsystem 712, the communication subsystem 712 can be configured to communicatively couple the various computing devices described herein to each other and to other devices. The communication subsystem 712 can include wired and / or wireless communication devices that are compatible with one or more different communication protocols. By way of non-limiting example, the communication subsystem can be configured to communicate via a wired or wireless local area network or wide area network, a broadband cellular network, etc. In some embodiments, the communication subsystem can allow the computing system 700 to send messages to and / or receive messages from other devices via a network such as the Internet.

[0091] As used herein, "and / or" is defined to include the inclusive OR, ∨, as shown in the following truth table: A B A ∨ B True True True True False True False True True False False False

[0092] To the extent that the terms "include", "including", "has", "having", "contain", and "containing" are used herein, these terms are intended to be inclusive in a manner similar to the term "comprise" as an open transitional word and do not exclude any additional or other elements.

[0093] It will be understood that the configurations and / or methods described herein are exemplary in nature and that these specific embodiments or examples should not be considered limiting in any sense, as numerous variations are possible. The specific routines or methods described herein can represent one or more of any number of processing strategies. Accordingly, the various acts shown and / or described can be performed in the order shown and / or described, in other orders, in parallel, or omitted. Similarly, the order of the above-described processing can be changed. If "and / or" is used herein, the phrase "and / or" represents any one or all of the various recited possibilities.

[0094] The subject matter of the present disclosure includes all novel and non-obvious combinations and subcombinations of the various processes, systems, and configurations, as well as other features, functions, acts, and / or characteristics disclosed herein, and any and all equivalents thereof.

Claims

1. A flow rate ratio controller system, comprising: An inlet configured to receive a total inlet fluid flow; A plurality of distribution channels fluidly connected to the inlet and arranged in parallel in a branched flow path downstream of the inlet, each of the plurality of distribution channels being provided with a respective valve and configured to convey a respective portion of the total inlet fluid flow, the plurality of distribution channels including a mixing distribution channel; And A controller operatively coupled to each of the plurality of distribution channels, the controller being configured to selectively operate in an alternating control mode including a flow verification control mode and a flow rate ratio control mode, Wherein, in the flow verification control mode, the controller is configured to: Perform a first pressure change rate test on a first target flow path extending from the inlet through a reference volume to the mixing distribution channel using a measurement obtained by a mass flow meter in the mixing distribution channel, thereby calculating a calibration value of the reference volume; Verify a mass flow rate value measured by a mass flow meter in the target distribution channel by performing a second pressure change rate test on a second target flow path extending from the inlet through the reference volume to a target distribution channel other than the mixing distribution channel among the plurality of distribution channels using the calibration value of the reference volume, thereby calculating a target channel calibration value of the mass flow meter in the target distribution channel; and Calibrate the mass flow meter in the target distribution channel using the target channel calibration value; and In the flow rate ratio control mode, the controller is configured to control each of the plurality of distribution channels including the mixing distribution channel according to a respective flow rate ratio set point of each distribution channel.

2. The flow rate ratio controller system according to claim 1, wherein, To perform the first pressure change rate test, the controller is configured to: Control the valves along the branched flow path to construct the first target flow path; Perform a controlled compression or decompression on the reference volume using a calibrated total inlet flow rate having a first predetermined mass flow rate value; Measure temperature changes and pressure changes in the mixing distribution channel during the controlled compression or decompression using a temperature sensor and a pressure sensor in the mixing distribution channel respectively; Calculate the calibration value of the reference volume based on the measured temperature changes, the measured pressure changes, the first predetermined mass flow rate value, and the gas constant.

3. The flow rate ratio controller system according to claim 2, wherein, To verify the mass flow rate value measured by the mass flow meter in the target distribution channel in the flow verification control mode, the controller is further configured to: Control the valves along the branched flow path to construct a second target flow path between the inlet and only the target distribution channel, the second target flow path including the reference volume; Perform a controlled compression or decompression on the reference volume using a calibrated total inlet flow rate having a second predetermined mass flow rate value while constructing the second target flow path; Measure pressure changes and temperature changes using the temperature sensor and the pressure sensor in the target distribution channel during the controlled compression or decompression while constructing the second target flow path; Calculate a rate-based flow through the target distribution channel based on the measured pressure change, the measured temperature change, the calibration value of the reference volume, and the second predetermined mass flow rate value; And Calculate a restrictor-based flow through the target distribution channel based on the restrictor size of the restrictor in the target distribution channel and the second predetermined mass flow rate value; Wherein, calculate the target channel calibration value based on a comparison of the calculated rate-based flow and the calculated restrictor-based flow.

4. The flow rate ratio controller system according to claim 2, wherein, The controller is configured to measure the temperature change and the pressure change caused by the controlled compression or decompression by measuring an initial pressure and an initial temperature and a subsequent pressure and a subsequent temperature in the mixing distribution channel; and Wherein, use the ideal gas law, the measured initial pressure, the measured initial temperature, the measured subsequent pressure, the measured subsequent temperature, the gas constant, and the mass flow rate of the calibrated total inlet flow to calculate the calibration value of the reference volume.

5. The flow rate ratio controller system according to claim 2, wherein, The inlet is formed on the upstream side of the manifold; and The controller is configured to use an upstream reference volume in the manifold disposed downstream of the inlet and upstream of the mass flow meter in the mixing distribution channel on the branch flow path as the reference volume for verification.

6. The flow rate ratio controller system according to claim 5, wherein, The manifold includes an upstream metering pressure sensor and an upstream metering temperature sensor located in the upstream reference volume and operably coupled to the controller.

7. The flow rate ratio controller system according to claim 5, wherein, The plurality of distribution channels includes a high flow distribution channel that branches from the manifold at a point upstream of the branch point of the mixing distribution channel and includes a downstream reference volume with isolation valves on the upstream side and the downstream side of the downstream reference volume.

8. The flow rate ratio controller system according to claim 1, wherein, The reference volume is an intermediate reference volume disposed downstream of the inlet and upstream of the mass flow meter in the mixing distribution channel on the branch flow path.

9. The flow rate ratio controller system according to claim 8, wherein, The temperature sensor in the mixing distribution channel is a metering temperature sensor located in the intermediate reference volume; and The pressure sensor in the mixing distribution channel is a metering pressure sensor located in the intermediate reference volume.

10. The flow rate ratio controller system according to claim 9, wherein, The metering temperature sensor is one of a pair of metering temperature sensors in the mixing distribution channel, and the metering pressure sensor is one of a pair of metering pressure sensors located on both sides of the restrictor.

11. The flow rate ratio controller system according to claim 1, wherein, The inlet receives a total inlet flow from one or more inlet channels having one or more corresponding mass flow controllers; and In the flow verification control mode, the controller is further configured to verify the mass flow rate value measured by the target mass flow controller in the target inlet channel by using the measurement values obtained by the pressure sensor and the temperature sensor in the mixing and distribution channel, calculate the calibration value of the target mass flow controller, and calibrate the mass flow controller in the target inlet channel by using the calibration value of the target mass flow controller.

12. The flow rate ratio controller system according to claim 1, wherein, The mixing and distribution channel includes a series of components, the series of components including a respective one of a plurality of the valves arranged in sequence in the downstream flow direction along the mixing and distribution channel, a first internal volume, a metering temperature sensor configured to measure the temperature of the first internal volume, an upstream metering temperature sensor and an upstream metering pressure sensor, a flow restrictor, a downstream metering temperature sensor and a downstream metering pressure sensor, and a second internal volume.

13. The flow rate ratio controller system according to claim 12, wherein, the upstream metering pressure sensor and the downstream metering pressure sensor have an accuracy value within FS (full scale) ±0.1%; the upstream metering temperature sensor and the downstream metering temperature sensor have a temperature coefficient within FS / °C (full scale) ±0.02%.

14. The flow rate ratio controller system according to claim 12, wherein, The upstream metering pressure sensor and the downstream metering pressure sensor are MEMS (microelectromechanical system) oscillating pressure sensors.

15. The flow rate ratio controller system according to claim 12, wherein, the diameter of the channel in the flow restrictor is less than 50 micrometers; and the length of the channel in the flow restrictor is greater than 10 millimeters and less than 50 millimeters.

16. The flow rate ratio controller system according to claim 1, further comprising: an additional distribution channel in the branch flow path downstream of the inlet, the additional distribution channel not provided with a flow control valve and configured to convey a corresponding portion of the total inlet fluid flow.

17. The flow rate ratio controller system according to claim 1, wherein, the mixing and distribution channel further includes a mass flow control device having a flow restrictor including a ceramic material; and the internal flow path of the flow restrictor is formed within the ceramic material.

18. A flow rate ratio controller method for a flow rate ratio controller, the flow rate ratio controller including an inlet configured to receive a total inlet fluid flow and a plurality of distribution channels fluidly connected to the inlet and arranged in parallel in a branch flow path downstream of the inlet, each of the plurality of distribution channels provided with a respective valve and configured to convey a corresponding portion of the total inlet fluid flow, the plurality of distribution channels including a mixing and distribution channel, the method comprising the following steps: performing a flow verification control mode, which includes: performing a first pressure change rate test on a first target flow path extending from the inlet through a reference volume to the mixing and distribution channel by using the measurement values obtained by the mass flow meter in the mixing and distribution channel, so as to calculate the calibration value of the reference volume; Performing a second pressure change rate test on a second target flow path from the inlet through the reference volume to a target distribution channel among a plurality of distribution channels other than the mixing distribution channel using the calibration value of the reference volume, verifying the mass flow rate value measured by the mass flow meter in the target distribution channel, and thereby calculating a target channel calibration value of the mass flow meter in the target distribution channel; and Calibrating the mass flow meter in the target distribution channel using the target channel calibration value; and Executing the flow rate ratio control mode, in which each of the plurality of distribution channels including the mixing distribution channel is controlled according to a corresponding flow rate ratio set point of each distribution channel.

19. The flow rate ratio controller method according to claim 18, wherein Performing the first pressure change rate test, which includes Controlling the valve along the branch flow path to construct the first target flow path; Performing a controlled compression or decompression on the reference volume using a calibrated total inlet flow rate having a first predetermined mass flow rate value; Measuring the temperature change and pressure change in the mixing distribution channel during the controlled compression or decompression using a temperature sensor and a pressure sensor in the mixing distribution channel respectively; and Calculating the calibration value of the reference volume based on the measured temperature change, the measured pressure change, the first predetermined mass flow rate value, and the gas constant, and Verifying the mass flow rate value measured by the mass flow meter in the target distribution channel in the flow verification control mode, which includes Controlling the valve along the branch flow path to construct the second target flow path between the inlet and only the target distribution channel, the second target flow path including the reference volume; Performing a controlled compression or decompression on the reference volume using a calibrated total inlet flow rate having a second predetermined mass flow rate value while constructing the second target flow path; Measuring the pressure change and temperature change using the temperature sensor and the pressure sensor in the target distribution channel during the controlled compression or decompression while constructing the second target flow path; Calculating the rate-based flow rate through the target distribution channel based on the measured pressure change, the measured temperature change, the calibration value of the reference volume, and the second predetermined mass flow rate value; and Calculating the restrictor-based flow rate through the target distribution channel based on the restrictor size of the restrictor in the target distribution channel and the second predetermined mass flow rate value; wherein the target channel calibration value is calculated based on a comparison between the calculated rate-based flow rate and the calculated restrictor-based flow rate.

20. A flow rate ratio controller system, comprising An inlet configured to receive a total inlet fluid flow; A plurality of distribution channels fluidly connected to the inlet and arranged in parallel in a branch flow path downstream of the inlet, each of the plurality of distribution channels being configured to convey a corresponding portion of the total inlet fluid flow, the plurality of distribution channels including a mixing distribution channel; And A controller operably coupled to the plurality of distribution channels, the controller configured to selectively operate in an alternating control mode including a flow verification control mode and a flow ratio control mode, wherein, in the flow verification control mode, the controller is configured to: Control a valve along the branch flow path to construct a first target flow path between the inlet and only the mixing distribution channel, the first target flow path including a reference volume; Perform a controlled compression or decompression on the reference volume; Measure a first temperature change and a first pressure change in the mixing distribution channel during the controlled compression or decompression; Calculate a calibration value of the reference volume at least partially based on the measured first temperature change and the measured first pressure change; Control a valve along the branch flow path to construct a second target flow path between the inlet and only the target distribution channel including a target mass flow meter, the second target flow path including the reference volume; Perform a controlled compression or decompression on the reference volume while constructing the second target flow path; While constructing the second target flow path, measure a second pressure change and a second temperature change using temperature and pressure sensors in the target distribution channel during the controlled compression or decompression; Calculate a rate-based flow rate through the target distribution channel at least partially based on the measured second pressure change and the measured second temperature change; Calculate a restrictor-based flow rate through the target distribution channel at least partially based on the measured second pressure change and the measured second temperature change; Calculate a target channel calibration value based on a comparison of the calculated rate-based flow rate and the calculated restrictor-based flow rate; and Calibrate the target distribution channel using the target channel calibration value, and wherein, in the flow ratio control mode, the controller is configured to control each of the plurality of distribution channels including the mixing distribution channel and the target distribution channel using the calibrated mass flow meter according to a respective flow ratio set point for each distribution channel.

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