Gate valve and vacuum equipment

Abstract

The invention discloses a gate valve and vacuum equipment. The gate valve comprises a valve body shell and a driving assembly. The valve body shell is provided with a flow guide channel. The driving assembly is slidably connected to the valve body shell in the direction perpendicular to the axis of the flow guide channel. The first valve plate is slidably connected with the push rod, and the push rod slides relative to the valve body shell so that the first valve plate can be switched between the initial position and the middle position. In the initial position, the first valve plate and the valve body shell are spaced, in the middle position, the first valve plate abuts against the valve body shell in the first direction, and in the axis direction of the flow guide channel, the first valve plate and the valve body shell are spaced. At the middle position, the push rod slides relative to the first valve plate, so that the first valve plate is far away from the push rod in the axis direction of the flow guide channel, and the first valve plate is located at the stop position. In the stop position, the first valve plate seals the flow guide channel. The gate valve is simple in structure and clear in driving logic, the driving assembly and the valve body shell are protected, and the sealing performance of the gate valve is guaranteed.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum valves, and particularly to a gate valve and a vacuum device. Background Art

[0002] In high-precision vacuum systems such as particle accelerators, synchrotron radiation devices, surface scattering devices, and semiconductor manufacturing equipment, vacuum valves, as the core components for maintaining and regulating the vacuum environment, directly affect the operating efficiency and stability of the system. Especially in experimental devices that require frequent replacement of beam sources, the beam source chamber needs to be periodically exposed to the atmospheric environment to complete target replacement or maintenance operations. During this process, how to effectively isolate the adjacent ultra-high vacuum region (maintaining about 10 -10 mbar level) when the beam source chamber breaks vacuum to atmospheric pressure becomes a key challenge in the design of vacuum valves.

[0003] In traditional vacuum valve technology, the pull-out gate valve is widely used due to its simple structure and controllable sealing surface. Such a valve drives the valve plate to move along the guide rail through a linear drive mechanism, and realizes sealing by using the pressing force between the valve plate and the valve seat.

[0004] However, in order to ensure smooth movement of the valve plate, a certain fitting clearance needs to be reserved between the valve plate and the valve body housing. The external air pressure acting on the back of the valve plate causes the contact stress between the valve plate and the guide rail to increase sharply. When the clearance between the valve plate and the valve is too small or the valve plate moves through an inclined linear trajectory to gradually block the valve, the friction between the valve plate and the valve body housing during movement will cause surface scratches or even jams, seriously affecting the valve life; if the clearance between the valve plate and the valve is too large, the valve plate is prone to deflection under the action of the pressure difference, resulting in uneven contact between the metal sealing ring and the valve seat, unstable sealing performance, and it is difficult to meet the ultra-high vacuum sealing requirements. Summary of the Invention

[0005] The main object of the present invention is to propose a gate valve and a vacuum device. The gate valve of the present application has a simple structure and clear drive logic, which not only protects the drive components and the valve body housing, but also ensures the sealing performance of the gate valve.

[0006] To achieve the above object, an embodiment of the first aspect of the present invention proposes a gate valve, including: A valve body housing provided with a diversion channel; A drive assembly is slidably connected to the valve body shell along a first direction, the first direction is perpendicular to the axial direction of the guide channel, the drive assembly includes a push rod and a first valve plate, the first valve plate is slidably connected to the push rod along the first direction, the push rod slides relative to the valve body shell along the first direction, so that the first valve plate switches between an initial position and an intermediate position, in the initial position, the first valve plate and the valve body shell are spaced apart, in the intermediate position, along the first direction, the first valve plate abuts against the valve body shell, and along the axial direction of the guide channel, the first valve plate and the valve body shell are spaced apart; Among them, in the middle position, the push rod slides relative to the first valve plate in the first direction, so that the first valve plate moves away from the push rod along the axial direction of the guide channel, so that the first valve plate is in the end position. At the end position, the first valve plate seals the guide channel.

[0007] In some embodiments, the driving assembly includes a first ball, the first ball is connected to the push rod, the first valve plate has a first bowl-shaped groove and a first guide groove recessed along the axial direction of the guide channel, the first bowl-shaped groove and the first guide groove are both used to accommodate the ball, the first bowl-shaped groove is connected to the first guide groove, the extension direction of the first guide groove is parallel to the first direction, and the depth of the first guide groove is less than the depth of the first bowl-shaped groove; At the initial position or the middle position, the first ball is accommodated in the first bowl-shaped groove, and at the end position, the first ball is accommodated in the first guide groove.

[0008] In some embodiments, the drive assembly includes a second valve plate, which is slidably connected to the push rod, and the second valve plate is arranged on the side of the push rod away from the first valve plate. The drive assembly also includes an elastic member, and the first valve plate is elastically connected to the second valve plate through the elastic member, and the elastic force direction of the elastic member is inclined to the first direction.

[0009] In some embodiments, the driving assembly includes a second ball, the second ball is connected to the push rod, the second valve plate has a second bowl-shaped groove and a second guide groove recessed along the axial direction of the guide channel, the second bowl-shaped groove and the second guide groove are both used to accommodate the second ball, the second bowl-shaped groove is connected to the second guide groove, the extension direction of the second guide groove is parallel to the first direction, and the depth of the second guide groove is less than the depth of the second bowl-shaped groove; At the initial position or the middle position, the second ball is accommodated in the second bowl-shaped groove, and at the end position, the second ball is accommodated in the second guide groove.

[0010] In some embodiments, the elastic member includes a spring sheet, the length direction of which is inclined to the first direction. Along the length direction of the spring sheet, the spring sheet has a first end and a second end that are relatively distributed, the first end is connected to the first valve plate, and the second end is connected to the second valve plate. At the end position, the pulling force of the first valve plate and the second valve plate on the spring sheet is a first pulling force. At the initial position or the middle position, the pulling force of the first valve plate and the second valve plate on the spring sheet is a second pulling force, and the first pulling force is greater than the second pulling force.

[0011] In some embodiments, the elastic member includes at least two elastic sheets spaced apart along the second direction, and the second direction, the first direction and the axial direction of the guide channel are perpendicular to each other.

[0012] In some embodiments, the gate valve includes an adjusting block, a valve body shell is provided with a threaded opening, the axis of the threaded opening is parallel to the axis of the guide channel, the threaded opening is provided on the side of the second valve plate away from the push rod, the adjusting block is threadedly connected to the threaded opening, and the adjusting block moves along the axial direction of the threaded opening to make the first valve plate close to or away from the valve body shell.

[0013] In some embodiments, the push rod includes a limit block protruding along the axial direction of the guide channel, and the second valve plate has a limit hole extending along the first direction. The limit hole is used to accommodate the limit block so that the push rod moves along the first direction relative to the second valve plate.

[0014] In some embodiments, the gate valve includes a sealing ring, which is located on a side of the first valve plate away from the push rod, and the sealing ring is suitable for abutting against the valve body shell along the axial direction of the guide channel.

[0015] An embodiment of the second aspect of the present invention is a vacuum device, the vacuum device includes a gate valve of any one of the above embodiments, the vacuum device also includes a reaction shell and an intermediate baffle, the reaction shell defines a reaction chamber, the intermediate baffle separates the reaction chamber into a first chamber and a second chamber, the first chamber is used to accommodate a first material, and the second chamber is used to accommodate a second material, and the gate valve is arranged on the intermediate baffle to control the connection between the first chamber and the second chamber.

[0016] According to the above embodiments, the beneficial effects of the present invention are: The present invention provides a plug valve, which includes a valve body shell and a drive assembly. The valve body shell is provided with a guide channel, which is used to connect the space inside and outside the valve body shell for material or beam transfer. The drive assembly is slidably connected to the valve body shell along a first direction, the first direction is perpendicular to the axial direction of the guide channel, and the drive assembly moves along the first direction to adjust the smoothness and closure of the guide channel. The drive assembly includes a push rod and a first valve plate, the push rod is used for direct manipulation by an operator, the push rod can slide relative to the valve body shell along the first direction, the first valve plate is slidably connected to the push plate along the first direction, and the first valve plate moves to a specific position driven by the push rod to seal the guide channel. The first valve plate has an initial position and an intermediate position, and the first valve plate can switch between the initial position and the intermediate position driven by the push rod. In the initial position, the first valve plate and the valve body shell are spaced apart, and in the intermediate position, the first valve plate and the valve body shell are spaced apart in the axial direction of the guide channel, and the first valve plate abuts against the valve body shell along the first direction.

[0017] Specifically, at the initial position and the intermediate position, the first valve plate and the valve body shell are always spaced apart from the valve body shell in the axial direction of the flow guide channel, and during the switching process between the two positions, the first valve plate only moves linearly along the first direction along with the push rod, so that during this process, the panel of the first valve plate used to seal the flow guide channel is always spaced apart from the valve body shell. With such a design, the first valve plate will never rub against the valve body shell during movement, thereby avoiding wear of the first valve plate and / or the valve body shell.

[0018] The first valve plate also has a terminal position. After the first valve plate reaches the middle position, the push rod continues to move in the first direction. Since the first valve plate is abutted by the valve body shell in the first direction at this time, and the first valve plate can slide relative to the push rod in the first direction, as the push rod continues to move in the first direction, the first valve plate will move in the opposite direction relative to the push rod in the first direction. The present application designs the first valve plate so that when the first valve plate moves in the opposite direction relative to the push rod, it can move away from the push rod in a direction deviating from the first direction, that is, the first valve plate will approach the guide channel. After reaching the extreme position, the first valve plate will be abutted by the side wall of the valve body shell that opens the guide channel, that is, the first valve plate seals the guide channel. This extreme position is called the terminal position.

[0019] The action of the first valve plate returning from the end position to the initial position via the intermediate position is the reverse stroke of the aforementioned action. The first valve plate at the end position is first separated from the valve body shell along the axial direction of the guide channel to reach the intermediate position, and then moves from the intermediate position to the initial position along the reverse direction of the first direction along with the push rod. During the process of moving from the intermediate position to the initial position, the first valve plate is always spaced from the valve body shell. The remaining details are not repeated here.

[0020] In summary, the key to the present application is that the driving behavior of the push rod in a single direction controls the movement of the first valve plate in the first direction and in the direction of the axis of the guide channel. The key design of the movement of the first valve plate in these two directions is the two abutments of the first valve plate and the valve body shell. The first abutment is the abutment of the first valve plate and the bottom wall of the valve body shell along the first direction. The first abutment makes the next movement of the first valve plate become a movement away from the push rod. The second abutment is the abutment of the side wall of the first valve plate and the valve body shell where the opening of the guide channel is set. The second abutment ensures the sealing of the first valve plate to the guide channel. Therefore, during the movement of the first valve plate of the present application, its wall facing the guide channel will never rub against the valve body shell, avoiding the wear of the first valve plate and / or the valve body shell, and the push rod finally converts the vertical pressure into the pressure of the first valve plate on the valve body shell along the axial direction of the guide channel, ensuring the sealing of the plug valve. The present application has a simple structure and clear driving logic, which not only protects the drive assembly and the valve body shell, but also ensures the sealing of the plug valve.

[0021] In addition, due to the simple structural design of the present application, the gate valve of the present application can be installed in a vacuum device. Further, the gate valve of the present application is designed with a smaller seal, and its leakage rate is lower, which can ensure that one side of the gate valve is the atmosphere and the other side is an ultra-high vacuum (10 -10 mbar).

[0022] Additional aspects and advantages of the present invention will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on the structures shown in these drawings.

[0024] Figure 1 It is a schematic perspective view of a gate valve observed along a first viewing angle in an embodiment of the present invention; Figure 2 It is a schematic perspective view of a gate valve observed along a second viewing angle in an embodiment of the present invention; Figure 3 For Figure 2 It is a schematic cross-sectional structure view of the shown gate valve intercepted by a first plane; Figure 4 For Figure 3 The enlarged view at A in; Figure 5 For Figure 2 It is a schematic cross-sectional structure view of the shown gate valve intercepted by a second plane; Figure 6 It is a schematic view of the first valve plate in the initial position in an embodiment of the present invention; Figure 7 It is a schematic view of the first valve plate in the intermediate position in an embodiment of the present invention; Figure 8 It is a schematic view of the first valve plate in the terminal position in an embodiment of the present invention; Figure 9 It is an exploded structure schematic view of a gate valve in an embodiment of the present invention; Figure 10 For Figure 9 The enlarged view at B in; Figure 11 It is an exploded structure schematic view of a gate valve observed along another viewing angle in an embodiment of the present invention; Figure 12 For Figure 11 The enlarged view at C in; Figure 13 This is a schematic structural diagram of a flap valve in another embodiment of the present invention, where the first valve plate is in the initial position; Figure 14 For Figure 13 a schematic structural diagram of the flap valve in another state, where the first valve plate is in the terminal position; Figure 15 This is a schematic structural diagram of a vacuum device in an embodiment of the present invention.

[0025] Explanation of the reference numerals in the drawings: Flap valve 10; Valve body housing 100; Flow guide channel 110; Drive assembly 200; Push rod 210; Limit block 211; First valve plate 220; First bowl-shaped groove 221; First guide groove 222; Second valve plate 230; Second bowl-shaped groove 231; Second guide groove 232; Limit hole 233; Elastic member 240; Elastic sheet 241; First ball 250; Second ball 260; Sealing ring 300; Adjusting block 400; Flexible rope 500; Inclined surface structure 600; Locking member 700; Vacuum device 20; First chamber 201; Second chamber 202; Intermediate baffle 203; First direction X.

[0026] The realization of the object, functional features and advantages of the present invention will be further described in conjunction with the embodiments with reference to the drawings. Detailed implementation manners

[0027] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0028] It should be noted that if there are directional indications (such as up, down, left, right, front, back...) involved in the embodiments of the present invention, the directional indications are only used to explain the relative position relationship and movement conditions between components in a specific posture. If the specific posture changes, the directional indications will also change accordingly.

[0029] In addition, if the embodiments of the present invention involve descriptions such as "first", "second", etc., the descriptions of "first", "second", etc. are only for descriptive purposes and should not be construed as indicating or implying their relative importance or implicitly specifying the quantity of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include at least one of such features. In addition, if "and / or", "or / and", or "and / or" appear throughout the text, their meanings include three parallel scenarios. Taking "A and / or B" as an example, it includes Scenario A, or Scenario B, or the scenario where both A and B are satisfied simultaneously. In addition, the technical solutions between the various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0030] Next, with reference to Figures 1 to 15 , the gate valve 10 and the vacuum device 20 according to the embodiments of the present invention will be described. Referring to Figures 1 to 4 and Figures 6 to 8 , the gate valve 10 of the present application includes a valve body housing 100 and a drive assembly 200. The valve body housing 100 is provided with a diversion channel 110 for communicating the inner and outer spaces of the valve body housing 100 to allow material transfer. The drive assembly 200 is slidably connected to the valve body housing 100 in a first direction X, which is perpendicular to the axis direction of the diversion channel 110. The drive assembly 200 can move in the first direction X to adjust the opening and closing of the diversion channel 110. The drive assembly 200 includes a push rod 210 and a first valve plate 220. The push rod 210 is for direct operation by an operator and can slide relative to the valve body housing 100 in the first direction X. The first valve plate 220 is slidably connected to the push plate in the first direction X. The first valve plate 220 can move to a specific position under the drive of the push rod 210 to seal the diversion channel 110. The first valve plate 220 has an initial position and an intermediate position. The first valve plate 220 can be switched between the initial position and the intermediate position under the drive of the push rod 210. At the initial position, the first valve plate 220 is spaced from the valve body housing 100. At the intermediate position, the first valve plate 220 is spaced from the valve body housing 100 in the axial direction of the diversion channel 110, and the first valve plate 220 abuts against the valve body housing 100 in the first direction X.

[0031] Specifically, referring to Figure 6 and Figure 7, at the initial position and the intermediate position, the first valve plate 220 and the valve body housing 100 are always spaced from the valve body housing 100 in the axial direction of the diversion channel 110. During the switching process between these two positions, the first valve plate 220 only moves linearly along the first direction X following the push rod 210. Therefore, during this process, the panel of the first valve plate 220 for sealing the diversion channel 110 is always spaced from the valve body housing 100. With such a design, the first valve plate 220 will never rub against the valve body housing 100 during movement, thus avoiding wear of the first valve plate 220 and / or the valve body housing 100.

[0032] Referring to Figure 8 , the first valve plate 220 also has a termination position. After the first valve plate 220 reaches the intermediate position, the push rod 210 continues to move along the first direction X. Since at this time the first valve plate 220 is abutted by the valve body housing 100 in the first direction X and the first valve plate 220 can slide relative to the push rod 210 along the first direction X, as the push rod 210 continues to move along the first direction X, the first valve plate 220 will move in the reverse direction of the first direction X relative to the push rod 210. In this application, the first valve plate 220 is designed such that when the first valve plate 220 moves in the reverse direction relative to the push rod 210, it can move away from the push rod 210 in a direction deviating from the first direction X, that is, the first valve plate 220 will approach the diversion channel 110. After reaching the limit position, the first valve plate 220 will be abutted by the side wall of the valve body housing 100 where the opening of the diversion channel 110 is provided, that is, the first valve plate 220 seals the diversion channel 110, and this limit position is called the termination position.

[0033] Referring to Figures 6 to 8 , the movement of the first valve plate 220 from the termination position through the intermediate position back to the initial position is the reverse stroke of the aforementioned movement. The first valve plate 220 at the termination position first separates from the valve body housing 100 in the axial direction of the diversion channel 110 to reach the intermediate position, and then moves from the intermediate position to the initial position along the reverse direction of the first direction X following the push rod 210. During the process of moving from the intermediate position to the initial position, the first valve plate 220 is always spaced from the valve body housing 100, and the remaining details will not be elaborated here.

[0034] In summary, the key of the present application lies in that the driving behavior of the push rod 210 in a single direction controls the movement of the first valve plate 220 in two directions, namely along the first direction X and along the axis direction of the diversion channel 110. The key design for the first valve plate 220 to move in these two directions lies in the two contacts between the first valve plate 220 and the valve body housing 100. The first contact is that the first valve plate 220 contacts the bottom wall of the valve body housing 100 along the first direction X, and this first contact makes the subsequent movement of the first valve plate 220 become a movement away from the push rod 210. The second contact is that the first valve plate 220 contacts the side wall of the valve body housing 100 where the opening of the diversion channel 110 is provided, and this second contact ensures the sealing of the diversion channel 110 by the first valve plate 220. Therefore, during the movement of the first valve plate 220 of the present application, the wall surface thereof facing the diversion channel 110 will never rub against the valve body housing 100, avoiding the wear of the first valve plate 220 and / or the valve body housing 100. Moreover, finally, the push rod 210 converts the vertical pressure into the pressure of the first valve plate 220 along the axis of the diversion channel 110 on the valve body housing 100, ensuring the sealing of the flap valve 10. The structure of the present application is simple and the driving logic is clear, which not only protects the driving assembly 200 and the valve body housing 100, but also ensures the sealing of the flap valve 10.

[0035] The following takes a specific embodiment to illustrate the flap valve 10 of the present application. For example, with reference to Figure 13 and Figure 14 , the axis of the diversion channel 110 is in the horizontal direction, and the moving direction of the push rod 210 relative to the valve body housing 100 is in the vertical direction. In the initial position, both the first valve plate 220 and the push rod 210 hang in the valve body housing 100, and the diversion channel 110 is unobstructed; the push rod 210 moves vertically downward, driving the first valve plate 220 to move downward. When the first valve plate 220 contacts the bottom wall of the valve body housing 100, the first valve plate 220 is in the middle position; the push rod 210 continues to move vertically downward, and the first valve plate 220 moves upward relative to the push rod 210 through the cooperation with a specific structure on the push rod 210, and laterally moves closer to the side wall of the valve body housing 100. After the first valve plate 220 contacts the side wall of the valve body housing 100, it reaches the end position to seal the diversion channel 110. The specific structures on the first valve plate 220 and the push rod 210 can be a bevel surface fit, or can be completed by a groove with different depths cooperating with a ball, etc.

[0036] Specifically, with reference to Figure 13 and Figure 14, taking this specific structure as an example of bevel cooperation. On one side of the push rod 210 facing the first valve plate 220, there is a bevel structure 600, and on the side of the first valve plate 220 facing the push rod 210 is a bevel that cooperates with the bevel structure 600. The first valve plate 220 is connected to the push rod 210 through two flexible ropes 500. When in the initial position, the first valve plate 220 hangs on the push rod 210 and can move synchronously along the first direction X with the push rod 210 later. After reaching the intermediate position, the flexible rope 500 bends. If the push rod 210 continues to move downward, the bevel structure 600 of the push rod 210 will abut against the bevel of the first valve plate 220, so that the first valve plate 220 can move laterally toward the side close to the diversion channel 110. Further, when reaching the termination position, the first valve plate 220 abuts against the side wall of the valve body housing 100 provided with the diversion channel 110 to seal the diversion channel 110. After the first valve plate 220 reaches the limit position, the greater the pressure applied downward by the push rod 210, the greater the lateral thrust on the valve body from the bevel structure 600, the greater the pressure on the opening of the diversion channel 110, and the stronger the sealing performance. At the joint of the push rod 210 and the valve body housing 100, a locking member 700 can be provided, such as a threaded fit structure, etc., to lock the push rod 210 at a specific position, so that the pressure for the first valve plate 220 to seal the diversion channel 110 remains at a constant value. With such a design, the wear between the first valve plate 220 and the valve body housing 100 is avoided, and the plug valve 10 has good and adjustable sealing performance.

[0037] Of course, it can be understood that the plug valve 10 of the present application has a simple structure, uses fewer parts, can be made into a smaller volume, so that the adaptability is wider and the usage scenarios are wider. Especially in some cramped layout occasions, such as the vacuum device 20, etc., the plug valve 10 of the present application ensures high sealing performance in various working environments through its advantages of small volume and high sealing performance, effectively preventing the infiltration of external air or impurities, and ensuring the purity and stability of the vacuum environment.

[0038] Refer to Figures 3 to 5 and Figures 9 to 12, in some embodiments, the driving assembly 200 includes a first ball 250, and the first ball 250 is connected to the push rod 210. The first valve plate 220 has a first bowl-shaped groove 221 and a first guiding groove 222 that are recessed along the axis direction of the diversion channel 110. Both the first bowl-shaped groove 221 and the first guiding groove 222 are used to accommodate the ball. The first bowl-shaped groove 221 communicates with the first guiding groove 222, wherein the extending direction of the first guiding groove 222 is parallel to the first direction X, and its depth is less than the depth of the first bowl-shaped groove 221. In the initial position or the intermediate position, the first ball 250 is received in the first bowl-shaped groove 221; in the end position, the first ball 250 is located in the first guiding groove 222. Specifically, the push rod 210 moves vertically downward to seal the diversion channel 110 by the first valve plate 220. At this time, the first bowl-shaped groove 221 is disposed above the first guiding groove 222. During the process of the first valve plate 220 moving downward along with the push rod 210, the ball is always located in the first bowl-shaped groove 221. Denote the distance from the first valve plate 220 to the push rod 210 in the horizontal direction at this time as L1. After the first valve plate 220 reaches the intermediate position, if the push rod 210 continues to move downward, the ball rolls out of the first bowl-shaped groove 221 and rolls into the first guiding groove 222. Denote the distance from the first valve plate 220 to the push rod 210 in the horizontal direction at this time as L2. Since the depth of the first bowl-shaped groove 221 is greater than the depth of the first guiding groove 222, L2 is greater than L1, that is, the first valve plate 220 will move away from the push rod 210 and approach the diversion channel 110. By referring to the size of the first ball 250, the depth size of the first bowl-shaped groove 221, and the depth size of the first guiding groove 222, and reasonably designing the distance between the valve body housing 100, the first valve plate 220, and the push rod 210, the first valve plate 220 can maintain a gap with the valve body housing 100 during the movement along the first direction X, and can seal the diversion channel 110 at the end position. For example, in some embodiments, the diameter of the first ball 250 is 2.5 mm, the diameter of the first bowl-shaped groove 221 is 2.5 mm, the first guiding groove 222 is an arc-shaped groove with a diameter of 2.5 mm, the depth of the first guiding groove 222 is 0.15 mm, the depth of the first bowl-shaped groove 221 is 0.5 mm, and the distance from the center position of the first bowl-shaped groove 221 to the first valve plate 220 is 0.75 mm. With such a design, when the first valve plate 220 is in the end position, the first valve plate 220 moves 0.15 mm along the axis direction of the diversion channel 110 compared with when it is in the intermediate position, thereby sealing the diversion channel 110.

[0039] This design controls the position of the first valve plate 220 by utilizing the movement of the ball between grooves at different depths. When the first ball 250 rolls from the first bowl-shaped groove 221 to the first guiding groove 222, due to the depth difference between the first bowl-shaped groove 221 and the first guiding groove 222, the first ball 250 can push the first valve plate 220 away from the push rod 210 along the axis of the diversion channel 110 and abut against the valve body housing 100, thereby achieving the purpose of sealing the diversion channel 110.

[0040] Of course, it can be understood that the first bowl-shaped groove 221 and the first guiding groove 222 can also be designed on the push rod 210, and the balls are arranged on the first valve plate 220. In this case, the first guiding groove 222 on the push rod 210 is located above the first bowl-shaped groove 221. After the push rod 210 reaches the middle position and continues to move downward, the first valve plate 220 moves upward relative to the push rod 210, that is, the balls arranged on the first valve plate 220 roll upward from the original first bowl-shaped groove 221 into the first guiding groove 222. Thus, the first valve plate 220 is pushed by the balls toward the side away from the push rod 210, pressed against the valve body housing 100, and seals the diversion channel 110.

[0041] It can be understood that in some embodiments, in order to improve the durability and operating efficiency of the plug valve 10, the first ball 250 made of ceramic material can be considered. The ceramic material has excellent wear resistance and low friction coefficient, which helps to reduce the wear of the ball when moving between the first bowl-shaped groove 221 and the first guiding groove 222 and extends the service life. For example, the first ball 250 made of zirconia ceramic can not only withstand higher pressure and temperature but also ensure high-precision positioning under long-term operation. In addition, for the design of the first bowl-shaped groove 221 and the first guiding groove 222, a self-lubricating coating such as polytetrafluoroethylene (PTFE) can be added to their surfaces to reduce the friction force, make the sliding of the ball smoother, and improve the overall performance.

[0042] It can be understood that in some embodiments, the first guiding groove 222 is designed with a slightly helical upward angle. In this way, when the first ball 250 moves from the first bowl-shaped groove 221 to the first guiding groove 222, it can not only effectively push the first valve plate 220 away from the push rod 210 but also adjust the closing speed and smoothness of the first valve plate 220 through the change of the helical angle. This structural improvement can make the plug valve 10 more stable during the closing process, reduce impact and noise, and also improve the sealing effect. For example, setting a 5-degree helical angle can make the first valve plate 220 gradually decelerate before reaching the termination position and finally achieve a smooth transition to the fully sealed state.

[0043] Furthermore, the depth of the first guiding groove 222 can be always consistent, or it can change in a progressive trend. When the depth of the first guiding groove 222 changes progressively, the movement of the first valve plate 220 towards the diversion channel 110 will be more gentle, further protecting the first valve plate 220 and the valve body housing 100.

[0044] Referring Figure 12 , in some embodiments, two sets of first bowl-shaped grooves 221, first guiding grooves 222 and ball structures along the vertical direction can also be provided. The first bowl-shaped grooves 221 and the first guiding grooves 222 are alternately arranged along the first direction X, and the two first balls 250 are respectively arranged at intervals corresponding to the first bowl-shaped grooves 221 along the first direction X. Arranging multiple sets of such structures can make the pressing force on the first valve plate 220 more uniform after sealing the diversion channel 110, and the sealing performance is better.

[0045] Referring Figures 3 to 5 and Figures 9 to 12 , in some embodiments, the driving assembly 200 further includes a second valve plate 230, and the second valve plate 230 is slidably connected to the push rod 210 and is located on the side of the push rod 210 away from the first valve plate 220. The driving assembly 200 further includes an elastic member 240, and the first valve plate 220 and the second valve plate 230 are elastically connected through the elastic member 240. The elastic force direction of the elastic member 240 is inclined to the first direction X, which means that during the movement of the push rod 210, the relative displacement between the first valve plate 220 and the second valve plate 230 will change accordingly under the action of the elastic member 240. When the plug valve 10 is in the terminal position, the pulling force applied to the elastic member 240 by the first valve plate 220 and the second valve plate 230 is the first pulling force; while in the initial position or the intermediate position, the pulling force of the two on the elastic member 240 is the second pulling force, and the first pulling force is greater than the second pulling force. Such a design helps to ensure the stability and reliability of the first valve plate 220 when switching between various positions, and also improves the sealing performance.

[0046] Furthermore, when the first plug valve 10 is in the end position, if the push rod 210 moves in the direction of the first direction X, due to the presence of the elastic member 240 and the second valve plate 230, under the action of the elastic member 240, the first ball 250 will be subjected to a large lateral pressure. Thus, as the push rod 210 moves upward, the first ball 250 moves from the first guide groove 222 of the first valve plate 220 into the first bowl-shaped groove 221 of the first valve plate 220. At this time, the distance limitation of the first ball 250 on the first valve plate 220 and the first push rod 210 is eliminated, and the first valve plate 220 is pulled towards the second valve plate 230 by the elastic force of the elastic member 240, achieving the reset effect. At this time, the first valve plate 220 is in the middle position. When the push rod 210 continues to move in the direction of the first direction X, the first ball 250 sinks into the first bowl-shaped groove 221, and the first valve plate 220, under the action of the elastic member 240, clamps the push rod 210 with the second valve plate 230. Therefore, the first valve plate 220 and the second valve plate 230 move in the reverse direction of the first direction X along with the push rod 210 at the same time. During this process, the first ball 250 is located in the first bowl-shaped groove 221, and the first valve plate 220 never contacts the valve body housing 100, protecting the first valve plate 220 and the valve body housing 100.

[0047] It can be understood that in some embodiments, the elastic member 240 may not be limited to the form of a single elastic sheet 241, and a multi-layer composite structure of the elastic sheet 241 may also be adopted. For example, a possible implementation is to combine two or more metal sheets with different elastic moduli together to form a composite elastic sheet 241. This composite elastic sheet 241 can provide a wider range of elastic force adjustment under different stretching states and adapt to more diverse working conditions. In addition, by selecting appropriate material combinations, such as combining stainless steel and titanium alloy, the weight can be significantly reduced without sacrificing strength, improving the response speed and flexibility.

[0048] It can be understood that in some embodiments, in addition to changing the structure of the elastic member 240, an additional auxiliary device can also be introduced to enhance the linkage effect between the first valve plate 220 and the second valve plate 230. For example, a fine-tuning bolt is installed, which is in direct contact with the second valve plate 230 and allows for fine adjustment of its position. The advantage of this is that the position of the second valve plate 230 can be precisely adjusted by rotating the fine-tuning bolt, thereby indirectly affecting the position of the first valve plate 220 and making the adjustment of the entire system more precise. This method is particularly suitable for application scenarios that require frequent adjustment of the valve opening and closing degree, such as precision flow control, etc.

[0049] Refer to Figure 10 and Figure 12, in some embodiments, the driving assembly 200 includes a second ball 260, and the second ball 260 is connected to the push rod 210. The second valve plate 230 has a second bowl-shaped groove 231 and a second guiding groove 232 that are recessed along the axis direction of the diversion channel 110. Both the second bowl-shaped groove 231 and the second guiding groove 232 are used to accommodate balls, and the second bowl-shaped groove 231 communicates with the second guiding groove 232. The extending direction of the second guiding groove 232 is parallel to the first direction X, and its depth is less than the depth of the second bowl-shaped groove 231. In the initial position or the intermediate position, the second ball 260 is located in the second bowl-shaped groove 231; in the terminal position, the second ball 260 enters the second guiding groove 232. This design realizes the precise control of the position of the second valve plate 230 through the movement of the second ball 260 between different grooves, thereby ensuring the accuracy and stability of the operation of the plug valve 10. When the second ball 260 rolls from the second bowl-shaped groove 231 to the second guiding groove 232, it will push the second valve plate 230 to move away from the push rod 210 along the axis direction of the diversion channel 110, and enable the second valve plate 230 to move synchronously with the first valve plate 220, strengthening the user's physical feeling during the operation and being able to timely feedback the working condition of the plug valve 10 to the user.

[0050] It can be understood that the positions of the second bowl-shaped groove 231 and the second guiding groove 232 of the second valve plate 230 can match or be complementary to the first guiding groove 222 and the first bowl-shaped groove 221 of the first valve plate 220. For example, when the positions of the second bowl-shaped groove 231 and the second guiding groove 232 of the second valve plate 230 match the first guiding groove 222 and the first bowl-shaped groove 221 of the first valve plate 220, the first ball 250 and the second ball 260 of the push rod 210 are arranged side by side along the axis direction of the diversion channel 110, and the first ball 250 and the second ball 260 are synchronously located in the first guiding groove 222 and the second guiding groove 232, or synchronously located in the first bowl-shaped groove 221 and the second bowl-shaped groove 231. Such a design strengthens the user's physical feeling.

[0051] When the positions of the second bowl-shaped groove 231 and the second guiding groove 232 of the second valve plate 230 are complementary to the first guiding groove 222 and the first bowl-shaped groove 221 of the first valve plate 220, the first ball 250 and the second ball 260 of the push rod 210 are arranged side by side along the axis direction of the diversion channel 110. When the first ball 250 is located in the first bowl-shaped groove 221, the second ball 260 is located in the second guiding groove 232. When the first ball 250 is located in the first guiding groove 222, the second ball 260 is located in the second bowl-shaped groove 231. When the first ball 250 is switched from the first bowl-shaped groove 221 to the first guiding groove 222, the second ball 260 is switched from the second guiding groove 232 to the second bowl-shaped groove 231. At this time, both the first valve plate 220 and the second valve plate 230 move towards the direction of the diversion channel 110, and the movement response is more rapid, and the physical feeling feedback to the user is more obvious.

[0052] Referring to Figures 9 to 12 , in some embodiments, the elastic member 240 includes a leaf spring 241. The length direction of the leaf spring 241 is inclined to the first direction X. Along the length direction of the leaf spring 241, the leaf spring 241 has a first end and a second end which are relatively distributed. The first end is connected to the first valve plate 220, and the second end is connected to the second valve plate 230. At the termination position, the pulling force of the first valve plate 220 and the second valve plate 230 on the leaf spring 241 is the first pulling force. At the initial position or the intermediate position, the pulling force of the first valve plate 220 and the second valve plate 230 on the leaf spring 241 is the second pulling force, and the first pulling force is greater than the second pulling force. The design that the leaf spring 241 always has a pulling force can enable the first valve plate 220 and the second valve plate 230 to achieve the effect of automatic reset, and the moving restraint force on the first valve plate 220 is more extensive, so that the movement of the first valve plate 220 is more stable and reliable.

[0053] Referring to Figures 9 to 12 , in some embodiments, the elastic member 240 is composed of at least two leaf springs 241, and these leaf springs 241 are arranged at intervals along the second direction, where the second direction, the first direction X, and the axial direction of the diversion channel 110 are perpendicular to each other. This design provides more uniform and stable support by using multiple leaf springs 241, ensuring the smooth movement and precise control of the first valve plate 220 during the entire operation process. In addition, since the leaf springs 241 are arranged at intervals along the second direction, this not only enhances the overall stability of the structure, but also allows for more flexible adjustment of the pre-tightening force between the leaf springs 241 to adapt to different working conditions.

[0054] It can be understood that in some embodiments, in order to further improve the stability and response speed of the system, more leaf springs 241 can be added on the original basis, and materials with different stiffnesses can be used to manufacture these leaf springs 241. For example, some leaf springs 241 can be made of high-carbon steel to provide a higher initial elastic force, while other leaf springs 241 can be made of stainless steel to ensure corrosion resistance during long-term use. Such a combination not only improves the durability of the entire system, but also enables the best balance of the opening and closing force and speed of the valve by adjusting the proportion of different types of leaf springs 241 according to the requirements of specific application scenarios.

[0055] Referring to Figure 2 and Figure 9, in some embodiments, the flap valve 10 further includes an adjusting block 400. A threaded port is provided on the side of the valve body housing 100 where the second valve plate 230 faces away from the push rod 210. The adjusting block 400 is threadedly connected to the threaded port on the valve body housing 100. The axis of the threaded port is parallel to the axis of the diversion channel 110 and is provided on the side of the second valve plate 230 facing away from the push rod 210. By rotating the adjusting block 400 to move it along the axis of the threaded port, the second valve plate 230 can be made to approach or move away from the valve body housing 100. Since the first valve plate 220 is indirectly connected to the second valve plate 230 through the elastic piece 241, the movement of the second valve plate 230 will affect the first valve plate 220. Even if the first valve plate 220 abuts against the diversion channel 110 of the valve body housing 100 and cannot move horizontally any further, the pressure received by the second valve plate 230 will be transmitted to the first valve plate 220, making the pressure of the first valve plate 220 on the valve body housing 100 greater or smaller, thereby adjusting the tightness of the seal and achieving the control of the sealing performance. This design realizes the fine adjustment of the position of the first valve plate 220 by using a simple mechanical principle, so that the sealing effect can be conveniently adjusted without disassembling the entire device, meeting the requirements of various working conditions. The design of the adjusting block 400 enables easy maintenance and adjustment even in a complex operating environment, greatly improving the practicality and reliability of the equipment. In addition, the adjusting block 400 also plays a limiting role to prevent the first ball 250 and / or the second ball 260 from rolling out of the corresponding grooves.

[0056] It can be understood that, in some embodiments, in order to improve the operation convenience and accuracy of the adjusting block 400, a handwheel or an electric drive mechanism can be equipped for the adjusting block 400. For example, adding a handwheel with scales, the user can precisely control the position change amount of the adjusting block 400 by rotating the handwheel. This method not only simplifies the operation process but also reduces the operation errors caused by human factors. In addition, for application scenarios that require frequent adjustment, an electric drive can also be considered to replace manual adjustment, which can achieve remote control and greatly improve the work efficiency.

[0057] It can be understood that, in some other embodiments, in addition to the above improvement measures, a self-locking mechanism can also be added between the adjusting block 400 and the threaded port to prevent accidental displacement under vibration or other external forces. For example, a spring-loaded locking pin can be integrated inside the adjusting block 400. When the adjusting block 400 reaches the predetermined position, the locking pin will automatically pop out and cooperate with the groove on the inner wall of the threaded port to form a stable fixed point. Such a design ensures that even in a harsh working environment, the adjusting block 400 can remain stable, avoiding unnecessary adjustment or failure. This self-locking function is particularly suitable for industrial environments with large vibrations or occasions that require long-term stable operation.

[0058] Refer to Figure 2 andFigure 12 In some embodiments, the push rod 210 is designed with a limiting block 211 protruding along the axis direction of the diversion channel 110. The limiting block 211 cooperates with the limiting hole 233 on the second valve plate 230, where the limiting hole 233 extends along the first direction X. This structure further ensures that the limiting block 211 can only slide along the first direction X under the restriction of the limiting hole 233, ensuring that the push rod 210 does not deviate or jam during operation.

[0059] Refer to Figure 4 、 Figure 5 and Figure 9 In some embodiments, the flap valve 10 includes a sealing ring 300. The sealing ring 300 is located on the side of the first valve plate 220 facing away from the push rod 210 and is adapted to abut against the valve body housing 100 along the axis direction of the diversion channel 110. The main function of the sealing ring 300 is to provide effective sealing when the first valve plate 220 is in the terminal position, preventing fluid leakage. The selection of the sealing ring 300 is based on its material properties, and it is usually made of rubber or polytetrafluoroethylene (PTFE) with high temperature resistance, corrosion resistance and excellent elasticity. This material can not only withstand large pressure changes, but also adapt to temperature fluctuations, ensuring long-term stable sealing effect. The introduction of the sealing ring 300 significantly improves the overall sealing performance of the flap valve 10, especially important when dealing with high-pressure or harmful media. The design of the sealing ring 300 also takes into account the needs of easy replacement and maintenance, so that the aging or damaged seal can be quickly replaced after long-term operation without disassembling the whole device.

[0060] It can be understood that, in some embodiments, in order to enhance the durability and sealing effect of the sealing ring 300, the sealing ring 300 can be made of multi-layer composite materials. For example, the inner part is a hard plastic core, and the outer part is wrapped with a soft silicone layer. The hard plastic core provides the necessary structural support, while the soft silicone layer can better fit the irregular surface to form a tighter seal. This composite material sealing ring 300 is particularly suitable for It can be understood that, in other embodiments, in addition to changing the material of the sealing ring 300, a self-tightening mechanism can also be added to its design. For example, a small spring wire ring is designed around the edge of the sealing ring 300. When subjected to external pressure, these wire rings will automatically tighten, making the sealing ring 300 fit the contact surface more tightly. This self-tightening design not only enhances the adaptability of the sealing ring 300, but also can compensate for the decline of sealing performance caused by wear to a certain extent, and is very suitable for application scenarios that require long-term stable sealing.

[0061] Refer to Figures 1 to 15 In the embodiments of the second aspect of the present invention, a vacuum device 20 is proposed. The vacuum device 20 includes the flap valve 10 of any one of the above embodiments. Refer to Figure 15, the vacuum device 20 further includes a reaction housing that defines a reaction chamber. The reaction chamber is divided into a first chamber 201 and a second chamber 202 by an intermediate baffle 203. The first chamber 201 is used to accommodate a first material, and the second chamber 202 is used to accommodate a second material. The gate valve 10 is installed on the intermediate baffle 203, and its function is to control the connection between these two chambers. When the gate valve 10 is in the open state, the first chamber 201 is connected to the second chamber 202, allowing the two materials to mix, fluids to pass through, or a predetermined chemical reaction to occur; when the gate valve 10 is closed, the interaction between the two is blocked.

[0062] The vacuum device 20 of the present application employs the gate valve 10 of any of the above embodiments, and one of the embodiments is taken as an example. Refer to Figures 1 to 15, the axial direction of the diversion channel 110 is defined as the horizontal direction, and the first direction X is defined as the vertical direction. The flap valve 10 includes a valve body housing 100, a first valve plate 220, a first bowl-shaped groove 221, a first guiding groove 222, a second valve plate 230, a second bowl-shaped groove 231, a second guiding groove 232, an elastic member 240, a first ball 250, a second ball 260, a sealing ring 300, and an adjusting block 400. When the first valve plate 220 is in the initial position, the push rod 210 pushes the first valve plate 220 downward along the first direction X until the first valve plate 220 reaches the intermediate position. During this process, the first ball 250 and the second ball 260 are always accommodated in the first bowl-shaped groove 221 of the first valve plate 220 and the second bowl-shaped groove 231 of the second valve plate 230. The first valve plate 220 and the second valve plate 230 are connected by the elastic member 240. The tensile force of the elastic member 240 causes the first valve plate 220 and the second valve plate 230 to cooperate with the first ball 250 and the second ball 260 to clamp the push rod 210 and move downward synchronously with the push rod 210. The sealing ring 300 is provided on the surface of the first valve plate 220 facing the diversion channel 110. During this process, the sealing ring 300 is always spaced from the valve body housing 100 and is not worn. After the first valve plate 220 reaches the intermediate position, the push rod 210 continues to move downward. Since the valve body housing 100 abuts against the first valve plate 220 and the second valve plate 230, and the first valve plate 220 and the second valve plate 230 are slidably connected to the push rod 210 through the first ball 250 and the second ball 260, during the subsequent downward movement of the push rod 210, both the first valve plate 220 and the second valve plate 230 move upward relative to the push rod 210. The first bowl-shaped groove 221 communicates with the first guiding groove 222, and the second bowl-shaped groove 231 communicates with the second guiding groove 232. The depth of the first bowl-shaped groove 221 is greater than the depth of the first guiding groove 222, and the depth of the second bowl-shaped groove 231 is greater than the depth of the second guiding groove 232. The first bowl-shaped groove 221 that previously accommodated the first ball 250 is located above the first guiding groove 222 that is about to accommodate the first ball 250, and the second bowl-shaped groove 231 that previously accommodated the second ball 260 is located above the second guiding groove 232 that is about to accommodate the second ball 260. Therefore, as the push rod 210 continues to move downward relative to the first valve plate 220 and the second valve plate 230, the first ball 250 located in the first bowl-shaped groove 221 and the second ball 260 located in the second bowl-shaped groove 231 respectively move to the first guiding groove 222 and the second guiding groove 232. Affected by the depth between the grooves, the first ball 250 and the second ball 260 expand the first valve plate 220 and the second valve plate 230, that is, the first valve plate 220 can move toward the diversion channel 110, causing the sealing ring 300 to abut against the valve body housing 100, achieving the purpose of sealing the diversion channel 110. The function of the adjusting block 400 and the program of the automatic reset of the device under the adjustment of the elastic member 240 have been described above and will not be elaborated here.

[0063] It can be understood that in some embodiments, for application scenarios that require precise control of the material ratio, such as in certain chemical synthesis processes where strict requirements are imposed on the raw material ratio, sensors can be respectively arranged in the first chamber 201 and the second chamber 202 to monitor the quantity or concentration of materials in the chamber in real time. And the state of the plug valve 10 is automatically adjusted through the control system, thereby realizing automatic and precise control. For example, when it is detected that the material quantity on one side is lower than the set value, the system will automatically open the plug valve 10 to allow the supplementary material to enter; conversely, the valve will be closed to stop the inflow of materials. This method not only improves the production efficiency but also ensures the consistency of product quality.

[0064] In summary, the plug valve 10 and the vacuum device 20 of the present application have a simple structure and a clear driving logic. They not only protect the driving component 200 and the valve body housing 100 but also ensure the sealing performance of the plug valve 10.

[0065] The above are only the preferred embodiments of the present invention, and do not limit the patent scope of the present invention accordingly. Any equivalent structural transformation made by using the description and drawings of the present invention under the inventive concept of the present invention, or any direct / indirect application in other related technical fields is included in the patent protection scope of the present invention.

Claims

1. A plug valve, characterized in that, include: The valve body shell is provided with a flow guide channel; A drive assembly is slidably connected to the valve body shell along a first direction, the first direction is perpendicular to the axial direction of the guide channel, the drive assembly includes a push rod and a first valve plate, the first valve plate is slidably connected to the push rod along the first direction, the push rod slides relative to the valve body shell along the first direction, so that the first valve plate switches between an initial position and an intermediate position, in the initial position, the first valve plate and the valve body shell are spaced apart, in the intermediate position, along the first direction, the first valve plate abuts against the valve body shell, and along the axial direction of the guide channel, the first valve plate and the valve body shell are spaced apart; Wherein, at the intermediate position, the push rod slides relative to the first valve plate along the first direction so that the first valve plate moves away from the push rod along the axial direction of the guide channel so that the first valve plate is in the terminal position. At the terminal position, the first valve plate seals the guide channel.

2. The plug valve according to claim 1, characterized in that, The driving assembly includes a first ball, the first ball is connected to the push rod, the first valve plate has a first bowl-shaped groove and a first guide groove recessed along the axial direction of the guide channel, the first bowl-shaped groove and the first guide groove are both used to accommodate the ball, the first bowl-shaped groove is connected to the first guide groove, the extension direction of the first guide groove is parallel to the first direction, and the depth of the first guide groove is less than the depth of the first bowl-shaped groove; At the initial position or the intermediate position, the first ball is accommodated in the first bowl-shaped groove, and at the terminal position, the first ball is accommodated in the first guide groove.

3. The plug valve according to claim 2, wherein The driving assembly includes a second valve plate, which is slidably connected to the push rod. The second valve plate is arranged on the side of the push rod away from the first valve plate. The driving assembly also includes an elastic member, through which the first valve plate is elastically connected to the second valve plate, and the elastic force direction of the elastic member is inclined to the first direction.

4. The plug valve according to claim 3, characterized in that, The driving assembly includes a second ball, the second ball is connected to the push rod, the second valve plate has a second bowl-shaped groove and a second guide groove recessed along the axial direction of the guide channel, the second bowl-shaped groove and the second guide groove are both used to accommodate the second ball, the second bowl-shaped groove is connected to the second guide groove, the extension direction of the second guide groove is parallel to the first direction, and the depth of the second guide groove is less than the depth of the second bowl-shaped groove; At the initial position or the intermediate position, the second ball is accommodated in the second bowl-shaped groove, and at the terminal position, the second ball is accommodated in the second guide groove.

5. The plug valve according to claim 3, characterized in that, The elastic member includes a spring sheet, the length direction of which is inclined to the first direction. Along the length direction of the spring sheet, the spring sheet has a first end and a second end that are relatively distributed, the first end is connected to the first valve plate, and the second end is connected to the second valve plate. At the end position, the pulling force of the first valve plate and the second valve plate on the spring sheet is a first pulling force. At the initial position or the middle position, the pulling force of the first valve plate and the second valve plate on the spring sheet is a second pulling force, and the first pulling force is greater than the second pulling force.

6. The plug valve according to claim 5, wherein, The elastic member includes at least two elastic sheets spaced apart along a second direction, and the second direction, the first direction and the axial direction of the guide channel are perpendicular to each other.

7. The flap valve according to claim 5, characterized in that The gate valve includes an adjusting block, the valve body shell is provided with a threaded opening, the axis of the threaded opening is parallel to the axis of the guide channel, the threaded opening is provided on the side of the second valve plate away from the push rod, the adjusting block is threadedly connected to the threaded opening, and the adjusting block moves along the axial direction of the threaded opening to make the first valve plate approach or move away from the valve body shell.

8. The plug valve according to claim 3, characterized in that, The push rod includes a limit block protruding along the axial direction of the guide channel, and the second valve plate has a limit hole, which extends along the first direction. The limit hole is used to accommodate the limit block so that the push rod moves along the first direction relative to the second valve plate.

9. The plug valve according to claim 1, characterized in that, The plug valve comprises a sealing ring, which is located at a side of the first valve plate away from the push rod, and is suitable for abutting against the valve body shell along the axial direction of the guide channel.

10. A vacuum device, characterized in that, The vacuum equipment comprises the gate valve according to any one of claims 1 to 9, and further comprises a reaction shell and an intermediate baffle, wherein the reaction shell defines a reaction chamber, and the intermediate baffle separates the reaction chamber into a first chamber and a second chamber, wherein the first chamber is used to accommodate a first material, and the second chamber is used to accommodate a second material, and the gate valve is arranged on the intermediate baffle to control the communication between the first chamber and the second chamber.

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