Magnetic field control method and device for chip manufacturing

Abstract

The invention relates to the technical field of chip manufacturing magnetic field control, and discloses a magnetic field control method, system and device for chip manufacturing. The magnetic field control method is applied to the magnetic field control device and specifically comprises the following steps that S101, a control instruction of a user is received, and the control instruction carries execution instructions of a first output unit and a second output unit, parameter information of a coil and intensity information of a corresponding magnetic field under the parameter information of the coil; and S102, obtaining the execution instruction, sending the execution instruction to a first output unit and a second output unit to complete execution, and respectively obtaining state information of the first output unit and the second output unit. The rated current output range of the first output unit is different from the rated current output range of the second output unit, the requirement for current values can be met, and meanwhile, by arranging the multiple output units, a user can conveniently and timely test magnetic field information changes generated by the coil when different current values are input.

Description

Technical Field

[0001] The present invention relates to the technical field of magnetic field control in chip manufacturing. Specifically, it relates to a magnetic field control method and device for chip manufacturing. Background Art

[0002] A magnetic field control device, namely a constant current source, is used to provide a stable current for a coil or a semiconductor device, so that the coil generates a stable magnetic field or provides a stable current for the semiconductor device to meet the requirements of chip processing and production. With the development of technology, during the process of manufacturing wafer chips, it is necessary to test or debug different parameter information of semiconductor devices in the same processing technology to obtain the optimal way of wafer chip processing and production. During the debugging process of the parameter information of the semiconductor device working, it is necessary to adjust the input parameter information. For example, when inputting a current to a coil to form a magnetic field, it is necessary to judge the intensity of the corresponding magnetic field under different current intensities, and select the optimal input current value according to the process requirements of semiconductor processing. Along with the development of the process, the intensity of the current value also changes accordingly.

[0003] The existing magnetic field control device can only be connected to a single coil, providing a stable current for a single coil or a single semiconductor device, and the adjustable range of the current is relatively narrow, which cannot meet the requirements of the existing improvement of semiconductor manufacturing processes. Summary of the Invention

[0004] The purpose of the present invention is to provide a magnetic field control method and device for chip manufacturing, which are applied to a magnetic field control system. By setting different circuit structures for the first output unit and the second output unit of the magnetic field control device, the rated current output range of the first output unit is different from that of the second output unit, which can facilitate users to timely test the change of the magnetic field information generated by the coil when different current values are input, aiming to solve the problem that the existing magnetic field control device can only be connected to a single coil and provide a stable current for a single coil or a single semiconductor device.

[0005] The present invention is implemented as follows. A magnetic field control method for chip manufacturing is applied to a magnetic field control system, and specifically includes the following steps: S101: Receive a control instruction from the user. The control instruction carries execution instructions for the first output unit and the second output unit, parameter information of the coil, and intensity information of the magnetic field corresponding to the parameter information of the coil; S102: Obtain the execution instruction and send it to the first output unit and the second output unit to complete the execution, and respectively obtain the status information of the first output unit and the second output unit; S103: Obtain the status information of the first output unit and the second output unit, and sequentially place the status information into the parameter comparison model generated based on the parameter information of the coil and the intensity information of the magnetic field corresponding to the parameter information of the manufactured wafer, and determine whether the first output unit and the second output unit meet the working requirements; S104: Obtain the parameter characteristics of the first output unit and the second output unit compared with the parameter comparison model respectively, and then feedback the status information of the first output unit and the second output unit to the host computer, and determine the execution unit that conforms to the coil based on the parameter characteristics.

[0006] Further, in S101, receive the control instruction of the user, including: Receive the connection request sent by the user terminal through the preset communication network, and the connection request is used to request to establish a connection with the magnetic field control device; Detect whether the current account of the user terminal is the target account; If the current account of the user terminal is the target account, connect to the user terminal according to the connection request, and after the connection is completed, receive the control instruction of the user.

[0007] Further, the preset communication network includes one or a combination of a data transmission line, a 3G network, a 4G network, a 5G network, and a WIFI network.

[0008] Further, the preset communication network is provided with a first communication interface and a second communication interface in the magnetic field control device. The first communication interface is used to connect to the host computer, and the second communication interface realizes data information interaction between different magnetic field control devices.

[0009] Further, in S103, obtain the status information of the first output unit and the second output unit, and sequentially place the status information into the parameter comparison model generated based on the parameter information of the coil and the intensity information of the magnetic field corresponding to the parameter information of the coil. The parameter comparison model generation steps include: Obtain the parameter information of the coil and the intensity information of the magnetic field corresponding to the parameter information of the coil, and complete the mapping association between the parameter information of the coil and the intensity information of the corresponding magnetic field, and obtain the mapping association set of the coil; Obtain a plurality of sub-parameter comparison models, and sort the sub-parameter comparison models; Obtain the mapping association set of the coil, input the mapping association set into the first sorted sub-parameter comparison model, and after the sub-parameter comparison model completes the recognition of the mapping association set, generate a parameter comparison model.

[0010] Further, determining whether the first output unit and the second output unit meet the working requirements includes: Identify the status information of the obtained first output unit and second output unit, and obtain the current and magnetic field data of the current first output unit and second output unit; Obtain the generated parameter comparison model, place the current and magnetic field data of the current first output unit and second output unit into the parameter comparison model, and obtain the data of the first output unit and second output unit.

[0011] Furthermore, obtain the parameter characteristics of the first output unit and the second output unit compared with the parameter comparison model respectively, and then feedback the status information of the first output unit and the second output unit to the host computer, including: The host computer receives the data of the first output unit and the second output unit transmitted by the magnetic field control device, and obtains the threshold range of the parameter information of the coil; Compare whether the data of the first output unit and the second output unit are within the threshold range of the parameter information of the coil. If one of them is within, select this output unit to execute. If neither is within, feedback to the magnetic field control device to execute again. If both are within, judge the output unit with a smaller threshold error to execute.

[0012] Compared with the prior art, the magnetic field control method, system and device for chip manufacturing provided by the present invention have the following beneficial effects: 1. By setting different circuit structures for the first output unit and the second output unit, the rated current output range of the first output unit is different from that of the second output unit. The rated current output range of the first output unit is 0-10A, and the rated current output range of the second output unit is 0-20A. By setting different rated current output ranges, the requirements for current values in different processing technologies of semiconductor equipment during the chip production process can be met. At the same time, by setting multiple output units, it is convenient for users to timely test the changes in the magnetic field information generated by the coil when different current values are input; 2. The rated current ranges of the first output unit and the second output unit can be different or the same, which can meet different process test requirements. And by setting the first output unit and the second output power supply, the technical effect of simultaneously outputting different rated currents by the same magnetic field control device can be achieved, and the switching of the dual output units of the same device can also be realized, which is convenient for users to operate.

[0013] A magnetic field control system for chip manufacturing executes the above-mentioned magnetic field control method for chip manufacturing. The control system includes: A communication module for receiving the control instructions of the user and connecting to the host computer; A processing module for obtaining the execution instructions and sending them to the first output unit and the second output unit to complete the execution, and respectively obtaining the status information of the first output unit and the second output unit; A judgment module, configured to obtain the status information of the first output unit and the second output unit, and sequentially place the status information in a parameter comparison model to determine whether the first output unit and the second output unit meet the working requirements; A current output module, including a first output unit and a second output unit, where the first output unit and the second output unit are respectively connected to different coils, and the first output unit and the second output unit respectively output current intensities that meet the requirements of the corresponding coils.

[0014] Specifically, the communication module includes: A first communication interface, which is used to connect to a host computer; A second communication interface, which realizes data information interaction between different magnetic field control devices through a preset communication network.

[0015] Further, the processing module obtains the parameter information of the coil and the magnetic field intensity information corresponding to the parameter information of the coil, and completes the mapping association between the parameter information of the coil and the intensity information of the corresponding magnetic field, and obtains the mapping association set of the coil; Obtain multiple sub-parameter comparison models, and sort the sub-parameter comparison models; Obtain the mapping association set of the coil, input the mapping association set into the sub-parameter comparison model ranked first, and after the sub-parameter comparison model completes the recognition of the mapping association set, generate a parameter comparison model.

[0016] A magnetic field control device for chip manufacturing, including a storage device and a processor, where the storage device is used to store a computer program, and the processor runs the computer program to make the magnetic field control device execute the above-mentioned magnetic field control method for chip manufacturing. Description of the Drawings

[0017] Figure 1 It is a schematic structural diagram of a magnetic field control system for chip manufacturing proposed by the present invention Figure 2 It is a schematic flowchart of a magnetic field control method for chip manufacturing proposed by the present invention; Figure 3 It is a schematic structural diagram of a magnetic field control device for chip manufacturing proposed by the present invention; Figure 4 It is a schematic structural diagram of another embodiment of a magnetic field control device for chip manufacturing proposed by the present invention; Figure 5 It is a schematic structural diagram of a magnetic field control device for chip manufacturing proposed by the present invention. Detailed Embodiment

[0018] In order to make the objectives, technical solutions and advantages of the present invention clearer and more understandable, the present invention will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not used to limit the present invention.

[0019] The implementation of the present invention will be described in detail below in conjunction with specific embodiments.

[0020] In the drawings of this embodiment, the same or similar reference numerals correspond to the same or similar components; in the description of the present invention, it should be understood that if there are terms such as "upper", "lower", "left", "right", etc. indicating the orientation or positional relationship, they are based on the orientation or positional relationship shown in the drawings. This is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, the terms describing the positional relationship in the drawings are only for illustrative purposes and cannot be understood as a limitation of the present invention. For those of ordinary skill in the art, the specific meanings of the above terms can be understood according to specific circumstances.

[0021] Referring to Figure 1 As shown, a magnetic field control system for chip manufacturing includes a host computer, a magnetic field control device, and a coil. The host computer is used to receive the instruction information of the user and send the instruction information to the magnetic field control device. The magnetic field control device provides a corresponding current intensity to the coil, and the coil generates a corresponding magnetic field intensity.

[0022] Referring to Figure 2 As shown, a magnetic field control method for chip manufacturing is applied to the magnetic field control system and specifically includes the following steps: S101: Receive the control instruction of the user. The control instruction carries the execution instructions of the first output unit and the second output unit, the parameter information of the coil, and the intensity information of the corresponding magnetic field under the parameter information of the coil; Among them, receiving the control instruction of the user includes: Receive the connection request sent by the user terminal through a preset communication network. The connection request is used to request to establish a connection with the magnetic field control device; Detect whether the current account of the user terminal is the target account; If the current account of the user terminal is the target account, connect to the user terminal according to the connection request. After the connection is completed, receive the control instruction of the user; S102: Obtain the execution instruction and send it to the first output unit and the second output unit to complete the execution, and respectively obtain the status information of the first output unit and the second output unit; S103: Obtain the status information of the first output unit and the second output unit, and sequentially place the status information into the parameter comparison model generated based on the parameter information of the coil and the intensity information of the magnetic field corresponding to the parameter information of the coil, and determine whether the first output unit and the second output unit meet the working requirements; Among them, the steps for generating the parameter comparison model include: Obtain the parameter information of the coil and the intensity information of the magnetic field corresponding to the parameter information of the coil, and complete the mapping association between the parameter information of the coil and the intensity information of the corresponding magnetic field, and obtain the mapping association set of the coil; Obtain multiple sub-parameter comparison models and sort the sub-parameter comparison models; Obtain the mapping association set of the coil, input the mapping association set into the sub-parameter comparison model ranked first, and after the sub-parameter comparison model completes the recognition of the mapping association set, generate the parameter comparison model; S104: Obtain the parameter characteristics of the first output unit and the second output unit compared with the parameter comparison model respectively, and then feedback the status information of the first output unit and the second output unit to the host computer, and determine the execution unit that conforms to the coil based on the parameter characteristics; Among them, obtaining the parameter characteristics of the first output unit and the second output unit compared with the parameter comparison model respectively, and then feedbacking the status information of the first output unit and the second output unit to the host computer includes: The host computer receives the data of the first output unit and the second output unit transmitted by the magnetic field control device, and obtains the threshold range of the parameter information of the coil; Compare whether the data of the first output unit and the second output unit are within the threshold range of the parameter information of the coil. If one of them is within, select this output unit to execute. If neither is within, feedback to the magnetic field control device to execute again. If both are within, judge the output unit with a smaller threshold error to execute. By setting different circuit structures for the first output unit and the second output unit, the rated current output range of the first output unit is different from that of the second output unit. The rated current output range of the first output unit is 0 - 10A, and the rated current output range of the second output unit is 0 - 20A. By setting different rated current output ranges, it is possible to meet the requirements of different processing technologies of semiconductor equipment for current values during the chip production process. At the same time, by setting multiple output units, it is convenient for users to timely test the changes in the magnetic field information generated by the coil when different current values are input.

[0023] In this embodiment, the preset communication network includes one or a combination of a data transmission line, 3G network, 4G network, 5G network, Bluetooth, and WIFI network. The preset communication network is provided with a first communication interface and a second communication interface in the magnetic field control device. The first communication interface is used to connect to the host computer, and the second communication interface enables data information interaction between different magnetic field control devices.

[0024] In this embodiment, determining whether the first output unit and the second output unit meet the working requirements includes: Identifying the status information of the first output unit and the second output unit obtained, and obtaining the current and magnetic field data of the current first output unit and the second output unit; Obtaining the generated parameter comparison model, placing the current and magnetic field data of the first output unit and the second output unit in the parameter comparison model, and obtaining the data of the first output unit and the second output unit.

[0025] In this technical solution, by setting different circuit structures for the first output unit and the second output unit, the rated current output ranges of the first output unit and the second output unit are different. The rated current output range of the first output unit is 0-10A, and the rated current output range of the second output unit is 0-20A. By setting different rated current output ranges, the requirements for current values in different processing technologies of semiconductor equipment during the chip production process can be met. At the same time, by setting multiple output units, it is convenient for users to timely test the changes in the magnetic field information generated by the coil when different current values are input.

[0026] Refer to Figure 3 As shown, a magnetic field control device for chip manufacturing is applied to a magnetic field control system. The magnetic field control device includes: a communication module for receiving a user's control instruction and connecting to the host computer; a processing module for obtaining an execution instruction and sending it to the first output unit and the second output unit to complete the execution, and respectively obtaining the status information of the first output unit and the second output unit; a judgment module for obtaining the status information of the first output unit and the second output unit, and placing the status information in the parameter comparison model in sequence to determine whether the first output unit and the second output unit meet the working requirements. The rated current ranges of the first output unit and the second output unit of this technical solution can be different or the same, which can meet different process test requirements. And by setting the first output unit and the second output power supply, the technical effect of simultaneously outputting different rated currents by the same magnetic field control device can be achieved, and the switching of the dual output units of the same device can also be realized, which is convenient for user operation; The current output module includes a first output unit and a second output unit. The first output unit and the second output unit are respectively connected to different coils, and the first output unit and the second output unit respectively output the current intensity that meets the requirements of the corresponding coils. In this embodiment, the communication module includes: a first communication interface for connecting to the host computer; a second communication interface for realizing data information interaction between different magnetic field control devices through a preset communication network. Further, in this embodiment, when the magnetic field control device detects that a new magnetic field control device is connected to the second communication interface, it automatically assigns a corresponding network address to the newly connected magnetic field control device, and sends the newly generated network address information to the host computer through the first communication interface. If the magnetic field control device successively connects multiple new magnetic field control devices through the second communication interface, the magnetic field control device connected to the host computer successively assigns corresponding network addresses to the subsequent connected magnetic field control devices.

[0027] The processing module is used to receive the control instructions of the user. The processing module receives the control instructions of the user and sends the corresponding control instructions to the judgment module. The judgment module respectively obtains the status information of the first output unit and the second output unit and outputs the corresponding status information. For example, it judges whether the first output unit and the second output unit can work. If there is a problem with the first output unit, it prompts the user to switch to control the second output unit. That is, after the device is started, the judgment unit judges and confirms the status information of the first output unit and the second output unit according to the instruction information of the user.

[0028] By judging the status information of the two output units, the corresponding working status is confirmed and fed back to the host computer. The host computer can select the corresponding output unit for current output according to the corresponding working status. The processing module receives the current output control instruction of the host computer and sends the corresponding current output instruction for different output units respectively.

[0029] During the working process of the magnetic field control device, when the judgment module monitors that the status of one of the output units is abnormal, the magnetic control device will send status information to remind the user to replace the output unit interface. This can reduce the replacement of the magnetic field control device and improve the use efficiency of the magnetic field control device. By setting the first output unit and the second output power supply, the technical effect of simultaneously outputting different rated currents by the same magnetic field control device can be achieved, and the switching of the dual output units of the same device can also be realized, which is convenient for the user to operate.

[0030] Refer to Figure 4As shown, another embodiment of a magnetic field control device for chip manufacturing disclosed by the present invention includes a communication module, a processing module, a judgment module, a current output module, and a monitoring module. Among them, the monitoring module is used to monitor the current intensity information of the magnetic field control device, obtain the magnetic field intensity information of the coil, and automatically adjust the current output intensity of the magnetic field control device based on the preset magnetic field intensity information.

[0031] Referring to Figure 5 As shown, a magnetic field control device for chip manufacturing includes a storage device and a processor. The storage device is used to store computer programs, and the processor runs the computer programs to enable the magnetic field control device to execute the above-mentioned magnetic field control method for chip manufacturing.

[0032] In this embodiment, the entire operation process can be controlled by a computer, together with a PLC, etc., to achieve automated operation control. Moreover, in each operation link, sensors can be set to perform signal feedback to achieve sequential execution of steps. These are all common knowledge of current automated control and will not be elaborated one by one in this embodiment.

[0033] The above are only the preferred embodiments of the present invention and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A magnetic field control method for chip manufacturing, applied to a magnetic field control system, the magnetic field control system comprising a host computer, a magnetic field control device, and a coil, characterized in that, The method specifically includes the following steps: S101: Receive a control instruction from the user. The control instruction carries execution instructions for a first output unit and a second output unit, parameter information of a coil, and magnetic field intensity information corresponding to the parameter information of the coil; S102: Obtain the execution instruction and send it to the first output unit and the second output unit to complete the execution, and respectively obtain the status information of the first output unit and the second output unit; S103: Obtain the status information of the first output unit and the second output unit, and sequentially place the status information into a parameter comparison model generated based on the parameter information of the coil and the magnetic field intensity information corresponding to the parameter information of the coil, and determine whether the first output unit and the second output unit meet the working requirements; S104: Obtain the parameter characteristics of the first output unit and the second output unit respectively compared with the parameter comparison model, and then feedback the status information of the first output unit and the second output unit to the host computer, and determine the execution unit that meets the coil operation requirements based on the parameter characteristics.

2. The magnetic field control method for chip manufacturing according to claim 1, wherein In S101, receiving the control instruction from the user includes: Receive a connection request sent by the user terminal through a preset communication network. The connection request is used to request to establish a connection with the magnetic field control device; Detect whether the current account of the user terminal is the target account; If the current account of the user terminal is the target account, connect to the user terminal according to the connection request. After the connection is completed, receive the control instruction from the user.

3. The magnetic field control method for chip manufacturing according to claim 2, characterized in that, The preset communication network includes one or a combination of a data transmission line, a 4G network, Bluetooth, and a WIFI network.

4. The magnetic field control method for chip manufacturing according to claim 3, wherein The preset communication network is provided with a first communication interface and a second communication interface in the magnetic field control device. The first communication interface is used to connect to the host computer, and the second communication interface realizes data information interaction between different magnetic field control devices.

5. The magnetic field control method for chip manufacturing according to claim 4, wherein, In S103, obtaining the status information of the first output unit and the second output unit, and sequentially placing the status information into a parameter comparison model generated based on the parameter information of the coil and the magnetic field intensity information corresponding to the parameter information of the coil. The steps for generating the parameter comparison model include: Obtain the parameter information of the coil and the magnetic field intensity information corresponding to the parameter information of the coil, and complete the mapping association between the parameter information of the coil and the intensity information of the corresponding magnetic field, and obtain the mapping association set of the coil; Obtain a plurality of sub-parameter comparison models and sort the sub-parameter comparison models; Obtain the mapping association set of the coil, input the mapping association set into the first sorted sub-parameter comparison model. After the sub-parameter comparison model completes the recognition of the mapping association set, generate a parameter comparison model.

6. The magnetic field control method for chip manufacturing according to claim 5, characterized in that, Determining whether the first output unit and the second output unit meet the working requirements includes: Identify the status information of the obtained first output unit and second output unit, and obtain the current current and magnetic field data of the first output unit and the second output unit; Obtain the generated parameter comparison model, place the current current and magnetic field data of the first output unit and the second output unit in the parameter comparison model, and obtain the data of the first output unit and the second output unit.

7. The magnetic field control method for chip manufacturing according to claim 6, characterized in that In S104, obtain the parameter characteristics of the first output unit and the second output unit compared with the parameter comparison model respectively, and then feedback the status information of the first output unit and the second output unit to the host computer, including: The host computer receives the data of the first output unit and the second output unit transmitted by the magnetic field control device, and obtains the threshold range of the parameter information of the coil; Compare whether the data of the first output unit and the second output unit are within the threshold range of the parameter information of the coil. If one of them is within the range, select the output unit to execute. If neither is within the range, feedback to the magnetic field control device to execute again. If both are within the range, judge the output unit with a smaller threshold error to execute.

8. A magnetic field control device for chip manufacturing, which is applied to a magnetic field control system. The magnetic field control system includes a host computer, a magnetic field control device, and a coil, and is characterized in that Execute the magnetic field control method for chip manufacturing according to any one of claims 1-7, wherein the magnetic field control device includes: A communication module for receiving a user's control instruction and connecting to the host computer; A processing module for obtaining the execution instruction and sending it to the first output unit and the second output unit to complete the execution, and respectively obtaining the status information of the first output unit and the second output unit; A judgment module for obtaining the status information of the first output unit and the second output unit, and sequentially placing the status information in the parameter comparison model to judge whether the first output unit and the second output unit meet the working requirements; A current output module including a first output unit and a second output unit, wherein the first output unit and the second output unit are respectively connected to different coils, and the first output unit and the second output unit respectively output the current intensity that meets the requirements of the corresponding coils.

9. The magnetic field control device for chip manufacturing according to claim 8, characterized in that, The communication module includes: A first communication interface for connecting to the host computer; A second communication interface for realizing data information interaction between different magnetic field control devices through a preset communication network.

10. The magnetic field control device for chip manufacturing according to claim 9, characterized in that, The processing module obtains the parameter information of the coil and the corresponding magnetic field intensity information under the parameter information of the coil, and completes the mapping association between the parameter information of the coil and the corresponding magnetic field intensity information, and obtains the mapping association set of the coil; Obtain multiple sub-parameter comparison models and sort the sub-parameter comparison models; Obtain the mapping association set of the coil, input the mapping association set into the first sorted sub-parameter comparison model, and after the sub-parameter comparison model completes the recognition of the mapping association set, generate a parameter comparison model.

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