Method and device for setting delivery target of to-be-processed product

Abstract

The invention provides a passing target setting method and device for a to-be-machined product, the machining process of the to-be-machined product comprises multiple stages, each stage comprises at least one machining step, and the method comprises the steps that a first passing target of a first node and the first predicted machining part number of a second node in a preset period are obtained, the first node is a root node of a processing graph network corresponding to a to-be-processed product, the processing graph network comprises a plurality of nodes, each node represents a stage, a connection relationship among the plurality of nodes is used for indicating a processing sequence of the plurality of stages, each node corresponds to a delivery target, and the second node is a node except the root node in the processing graph network; and setting a second passing target corresponding to the second node as a smaller value in the first predicted machining part number and the first passing target. The method provided by the invention can improve the achievement rate of the delivery target.

Description

Technical Field

[0001] The present application relates to the field of industrial production and processing, and particularly relates to a method and device for setting the passing target of a product to be processed. Background Art

[0002] The process of industrial product manufacturing is very complex. The production line needs to process dozens of products simultaneously, and each product may have up to thousands of processing steps. At the same time, there are also many technological requirements in product manufacturing, such as the allowable time (Qtime). The requirements for the allowable time are divided into two categories: the maximum allowable time and the minimum allowable time. The maximum allowable time requires that the processing steps be completed within the specified time, and the minimum allowable time requires that there be a certain waiting time between processing steps before processing.

[0003] Factory production planners and the person in charge of each area of the production line need to cooperate with each other to meet the delivery requirements of the products without violating the product process requirements. The planner will convert the delivery requirements into setting a passing target for a certain stage of the product every day. However, the state of the production line is constantly changing. For example, the machine processing the product needs to be shut down for inspection due to abnormalities after testing, resulting in a decrease in production capacity; the downstream machine is stockpiling goods, and due to the requirements of the allowable time, processing needs to be postponed until the downstream machine is idle before starting to process. The occurrence of similar situations easily leads to the failure to achieve the passing target as planned. Summary of the Invention

[0004] The present application provides a method and device for setting the passing target of a product to be processed, which can improve the achievement rate of the passing target in the product production stage.

[0005] In a first aspect, a method for setting the passing target of a product to be processed is provided. The processing process of the product to be processed includes multiple stages, and each stage includes at least one processing step. The method includes: obtaining the first passing target of the first node and the first estimated number of processed parts of the second node within a preset period. The first node is the root node of the processing graph network corresponding to the product to be processed. The processing graph network includes multiple nodes, each node represents one of the stages, the connection relationship between the multiple nodes is used to indicate the processing order of the multiple stages, each node corresponds to a passing target, and the second node is a node other than the root node in the processing graph network; in the case where the first estimated number of processed parts is less than the first passing target, setting the second passing target corresponding to the second node to the first estimated number of processed parts; or, in the case where the first estimated number of processed parts is greater than or equal to the first passing target, setting the second passing target corresponding to the second node to the first passing target.

[0006] The present application provides a method for setting the goods passing target of a product to be processed. Based on the processing diagram network, it is possible to search upstream of the production stage represented by the root node to set a new goods passing target, and set the goods passing target of the upstream node to the smaller value between the expected number of processed parts of the node and the first goods passing target, so as to achieve automatic pulling of goods from the upstream, thereby improving the achievement rate of the goods passing target in the product production stage.

[0007] In some possible implementation scenarios, the processing diagram network can be a tree, and each node in the tree represents a stage, and the connection relationship between multiple nodes is used to indicate the processing order of multiple stages.

[0008] It should be understood that the first goods passing target can be a target value preset by the factory production planning personnel for the first node. A stage includes one or more processing steps of the product to be processed, and multiple products to be processed may belong to the same stage. The first expected processed part is the product form of the product to be processed in the stage corresponding to the second node.

[0009] The preset period is set according to actual needs, and the present application does not limit this.

[0010] The number of the first expected processed parts of the second node within the preset period can be obtained through simulation. For example, the simulation result of the second node in the future preset period can be obtained through card control data. The present application does not limit the specific simulation method used. For example, it can be a commonly used simulation method in the industry, or the simulation method according to the priority order in the embodiments of the present application. The card control data can include the card control conditions and related data that will be considered during actual dispatching, and is imported through system integration or business.

[0011] Optionally, before resetting the second goods passing target to the first expected processed part quantity or the first goods passing target, the second node may have a corresponding old second goods passing target or the second goods passing target may also be empty.

[0012] The processing diagram network is a stage-level diagram network. According to the connection relationship or direction between nodes, the processing diagram network can be divided into Q levels, where the root node is located at the 0th level, and the upstream node closest to the root node is located at the 1st level, and Q is an integer greater than 1. The second node can be any node from the 2nd level to the Qth level. In some possible implementation manners, the nodes of each level can be traversed in ascending order of levels, and a new goods passing target can be set for the nodes according to the goods passing target of the root node and the expected number of processed parts of the nodes. In some other possible implementation manners, the nodes in the processing diagram network can also be randomly traversed, and a new goods passing target can be set for the nodes according to the goods passing target of the root node and the expected number of processed parts of the nodes. The setting order of the node goods passing target should not be construed as a limitation to the present application.

[0013] In combination with the first aspect, in certain implementations of the first aspect, before obtaining the first goods-passing target of the first node and the first estimated number of processed parts of the second node within a preset period, the method further includes: determining that the total goods-passing target is less than the first goods-passing target, where the total goods-passing target is equal to the sum of the goods-passing targets of the nodes already set in the processing graph network.

[0014] If the total goods-passing target is less than the first goods-passing target, it is considered that the first goods-passing target cannot be achieved yet, and continue to traverse the nodes in the processing graph network and set new goods-passing targets; if the total goods-passing target is greater than or equal to the first goods-passing target, it is considered that the first goods-passing target can be achieved, and stop setting new goods-passing targets for the upstream nodes in the processing graph network.

[0015] The present application provides a method for setting the goods-passing target of a product to be processed, which can statistically calculate the current total goods-passing target in real time, estimate whether the first goods-passing target can be achieved, and stop setting new goods-passing targets for the upstream nodes in the processing graph network when the first goods-passing target can be achieved, reducing the setting of redundant goods-passing targets.

[0016] In combination with the first aspect, in certain implementations of the first aspect, the method further includes: obtaining the second estimated number of processed parts of the third node within the preset period, where the third node is the upstream node of the second node; in the case where the second estimated number of processed parts is less than the first goods-passing target, setting the third goods-passing target corresponding to the third node to the second estimated number of processed parts; or, in the case where the second estimated number of processed parts is greater than or equal to the first goods-passing target, setting the third goods-passing target corresponding to the third node to the first goods-passing target.

[0017] The second estimated number of processed parts is the product form of the product to be processed at the stage corresponding to the third node. The second estimated number of processed parts of the third node can be obtained through simulation. For example, the simulation results of the third node in the future preset period are obtained through card control data. The present application does not limit the specific simulation method used. For example, it can be a commonly used simulation method in the industry, or the simulation method in the embodiments of the present application that performs simulation in the order of priority.

[0018] The present application provides a method for setting the goods-passing target of a product to be processed, which can traverse the nodes of each layer in ascending order of the levels of the processing graph network and set new goods-passing targets for the nodes according to the goods-passing target of the root node and the estimated number of processed parts of the nodes, realizing automatic pulling of goods from the upstream, thereby improving the achievement rate of the goods-passing target in the product production stage.

[0019] In combination with the first aspect, in some implementations of the first aspect, the obtaining of the first estimated number of parts to be processed by the second node within a preset period includes: obtaining the priorities of a plurality of parts to be processed, where the plurality of parts to be processed belong to the product to be processed; simulating the product to be processed in the order of the priorities of the plurality of parts to be processed from high to low to obtain the first estimated number of parts to be processed.

[0020] The part to be processed can be the product form of the product to be processed before the processing is completed.

[0021] Exemplarily, in the order of priority levels from high to low, the parts to be processed with the same priority can be input into the optimization-based Qtime violation minimum model to give a dispatching plan with the minimum super Qtime, and it is indicated which parts to be processed should be sacrificed when it is necessary to exceed Qtime. Then, the time with the minimum super Qtime output by the optimization-based Qtime violation minimum model is input into the scheduling model based on maximizing production capacity to obtain the dispatching time and processing end time of each part to be processed on each machine, so as to obtain the first estimated number of parts to be processed by the second node within a preset period.

[0022] It should be understood that the optimization-based Qtime violation minimum model is a mathematical model used to optimize production scheduling and task allocation in industrial production by minimizing the quantity or degree of violation of the delivery time. The scheduling model based on maximizing production capacity can perform a detailed scheduling on the parts to be processed with the time of the minimum super Qtime as a hard constraint, aiming at maximizing production capacity and load balancing dispatching, and at the same time considering the influence of dispatching details such as the non-production time (setup time) of the machine on the processing time of each step of the part to be processed, and output the dispatching time of each part to be processed on each machine.

[0023] Exemplarily, first, according to the optimization-based Qtime violation minimum model and the scheduling model based on maximizing production capacity, the dispatching time of the parts to be processed with a priority equal to i on each machine can be obtained, then the priority i is incremented by 1, and continue to obtain the dispatching time of the parts to be processed with a priority equal to i + 1 on each machine according to the above two models, and so on, until the dispatching time of each part to be processed on each machine. i is an integer greater than or equal to 1.

[0024] This application provides a method for setting the goods transfer target of a product to be processed, which can simulate the product to be processed based on the priority level, and the simulation result is relatively close to the actual production result, and the estimated achievement situation of the goods transfer target can be obtained more accurately than the linear estimation method. The linear estimation method is a method for estimating the processing quantity of a machine within a preset period according to the statistical value of the average number of parts processed per hour by the machine.

[0025] In combination with the first aspect, in some implementations of the first aspect, obtaining the priorities of multiple parts to be processed includes: obtaining the attribute information of a first part to be processed, where the first part to be processed is one of the multiple parts to be processed; matching at least one priority corresponding to the first part to be processed in a business rule engine library according to the attribute information of the first part to be processed, where the business rule engine library includes multiple priority mapping relationships; and determining the highest priority among the at least one priority as the priority corresponding to the first part to be processed.

[0026] The priorities of the parts to be processed can be divided into N levels according to the processing urgency, where N is an integer greater than or equal to 1. The business rule engine library includes rule engines for a series of different business dimensions such as delivery date, process, production capacity, and special parts to be processed, and can match the corresponding priorities according to the mapping relationship between the attribute information of the parts to be processed and the priorities. Each priority mapping relationship in the business rule engine library independently assigns the priority of this business dimension to the parts to be processed, and the highest priority among the obtained at least one priority can be used as the priority corresponding to the part to be processed.

[0027] This application provides a method for setting the goods passing target of the product to be processed. By setting the priority mapping relationship in the business rule engine library, the priority of the parts to be processed related to the node of the newly set goods passing target can be improved, the accelerated dispatching of the parts to be processed can be realized, and the goods passing target can be promoted to be achieved as soon as possible.

[0028] In combination with the first aspect, in some implementations of the first aspect, before obtaining the priorities of multiple parts to be processed, the method further includes: obtaining the control data of the multiple parts to be processed; generating a list of available processing machines corresponding to the first processing step of a second part to be processed within the preset period according to the control data, where the second part to be processed is one of the multiple parts to be processed, and the first processing step is one of the at least one processing step; and if the list of available processing machines is empty, stopping the dispatching at the upstream safety site of the first processing step.

[0029] By applying multi-dimensional control data, such as the control conditions and related data considered in actual dispatching such as the manufacturing execution system (MES), a list of available processing machines for each processing step within the outlook period of each part to be scheduled can be obtained. If there is a situation where the list of available processing machines for a certain processing step is empty, find the upstream safety site of this processing step and stop the dispatching.

[0030] The present application provides a method for setting the goods passing target of a product to be processed. When the list of available processing machines in a certain processing step is expected to be empty, a safe site upstream of this processing step can be found to stop dispatching work, reducing the waste of factory production capacity and economic losses.

[0031] The present application provides a method for setting the goods passing target of a product to be processed, which can be applied in the field of semiconductor technology to improve the achievement rate of the wafer goods passing target.

[0032] In combination with the first aspect, in some implementation manners of the first aspect, the method further includes: obtaining the processing step flow information of the product to be processed; constructing the processing graph network according to the processing step flow information.

[0033] Exemplarily, the processing step flow information of the product to be processed may include the processing sequence number (stepsequence), product identifier (product), process identifier (tech), stage identifier (stage), etc. Sort in ascending order according to the processing sequence number, traverse from the first step to the last step backward, find the relationship between the upstream and downstream stages, and perform stage node construction and stage graph network construction, thereby obtaining the processing graph network.

[0034] In combination with the first aspect, in some implementation manners of the first aspect, the method further includes: outputting the second goods passing target.

[0035] The output result of the goods passing target setting method provided by the present application can be applied to the production dispatch system in the factory, such as the real-time dispatch system (RTD). The newly set goods passing target for the upstream can be integrated into the report system, that is, output the newly set goods passing target for the upstream to the report.

[0036] Second aspect, a computer device is provided, including: an obtaining module, configured to obtain a first goods-passing target of a first node and a first expected number of processed components of a second node within a preset period, where the first node is a root node of a processing graph network corresponding to a product to be processed, the processing process of the product to be processed includes multiple stages, each stage includes at least one processing step, the processing graph network includes multiple nodes, each node represents one of the stages, the connection relationships between the multiple nodes are used to indicate the processing sequence of the multiple stages, each node corresponds to a goods-passing target, and the second node is a node other than the root node in the processing graph network; a processing module, configured to, when the first expected number of processed components is less than the first goods-passing target, set a second goods-passing target corresponding to the second node to the first expected number of processed components, or, when the first expected number of processed components is greater than or equal to the first goods-passing target, set the second goods-passing target corresponding to the second node to the first goods-passing target.

[0037] In combination with the second aspect, in some implementation manners of the second aspect, the processing module is further configured to determine that the total goods-passing target is less than the first goods-passing target, and the total goods-passing target is equal to the sum of the goods-passing targets of the nodes that have been set in the processing graph network.

[0038] In combination with the second aspect, in some implementation manners of the second aspect, the obtaining module is further configured to obtain a second expected number of processed components of a third node within the preset period, where the third node is an upstream node of the second node; the processing module is further configured to, when the second expected number of processed components is less than the first goods-passing target, set a third goods-passing target corresponding to the third node to the second expected number of processed components, or, when the second expected number of processed components is greater than or equal to the first goods-passing target, set the third goods-passing target corresponding to the third node to the first goods-passing target.

[0039] In combination with the second aspect, in some implementation manners of the second aspect, the obtaining module is further configured to obtain the priorities of multiple components to be processed, and the multiple components to be processed belong to the product to be processed; the processing module is further configured to simulate the product to be processed in descending order of the priorities of the multiple components to be processed to obtain the first expected number of processed components.

[0040] In combination with the second aspect, in some implementations of the second aspect, the obtaining module is further configured to obtain the attribute information of a first component to be processed, where the first component to be processed is one of the multiple components to be processed; the processing module is further configured to match at least one priority corresponding to the first component to be processed in the business rule engine library according to the attribute information of the first component to be processed, where the business rule engine library includes multiple priority mapping relationships; the processing module is further configured to determine the highest priority among the at least one priority as the priority corresponding to the first component to be processed.

[0041] In combination with the second aspect, in some implementations of the second aspect, the obtaining module is further configured to obtain the control data of the multiple components to be processed; the processing module is further configured to: generate a list of available processing machines corresponding to the first processing step of a second component to be processed within the preset period according to the control data, where the second component to be processed is one of the multiple components to be processed, and the first processing step is one of the at least one processing step; if the list of available processing machines is empty, stop dispatching work at the upstream safety site of the first processing step.

[0042] In combination with the second aspect, in some implementations of the second aspect, the product to be processed is a wafer, and the component to be processed is the product form of the wafer before processing is completed. The processing steps include setting a circuit structure on the unprocessed wafer.

[0043] In combination with the second aspect, in some implementations of the second aspect, the obtaining module is further configured to obtain the processing step flow information of the product to be processed; the processing module is further configured to construct the processing graph network according to the processing step flow information.

[0044] In combination with the second aspect, in some implementations of the second aspect, the processing module is further configured to output the second goods transfer target.

[0045] The beneficial effects of the second aspect and any possible implementation of the second aspect correspond to those of the first aspect and any possible implementation of the first aspect, and thus will not be elaborated herein.

[0046] In a third aspect, an embodiment of the present application provides a computer device, which includes a processor for coupling with a memory and reading and executing instructions and / or program codes in the memory to execute the first aspect or any possible implementation of the first aspect.

[0047] Fourthly, an embodiment of the present application provides a computer-readable storage medium storing program codes, which, when the computer-readable storage medium runs on a computer, cause the computer to execute the method according to the first aspect or any possible implementation manner of the first aspect.

[0048] Fifthly, an embodiment of the present application provides a computer program product, which includes computer program codes, which, when the computer program codes run on a computer, cause the computer to execute the method according to the first aspect or any possible implementation manner of the first aspect. Description of the Drawings

[0049] Figure 1 FIG. is a schematic diagram of an application scenario of a goods passing target setting method provided by an embodiment of the present application.

[0050] Figure 2 FIG. is an exemplary flowchart of a goods passing target setting method provided by an embodiment of the present application.

[0051] Figure 3 FIG. is an exemplary flowchart of another goods passing target setting method provided by an embodiment of the present application.

[0052] Figure 4 FIG. is an exemplary flowchart of a goods passing target optimization provided by an embodiment of the present application.

[0053] Figure 5 FIG. is a schematic diagram of a stage-level processing diagram network provided by an embodiment of the present application.

[0054] Figure 6 FIG. is a schematic diagram of a hierarchical structure of a processing diagram network provided by an embodiment of the present application.

[0055] Figure 7 FIG. is an exemplary flowchart of setting a new goods passing target for an upstream node provided by an embodiment of the present application.

[0056] Figure 8 FIG. is a schematic architecture diagram of enhancing priorities through a business rule engine library provided by an embodiment of the present application.

[0057] Figure 9 FIG. is an exemplary flowchart of a simulation provided by an embodiment of the present application.

[0058] Figure 10 FIG. is a structural example diagram of a computer device provided by an embodiment of the present application.

[0059] Figure 11 FIG. is a structural example diagram of another computer device provided by an embodiment of the present application.

[0060] Figure 12It is an example diagram of a computer program product provided by an embodiment of the present application. Detailed implementation manners

[0061] Next, the technical solutions in the embodiments of the present application will be described in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts shall fall within the protection scope of the present application.

[0062] In the embodiments of the present application, words such as "exemplary" and "for example" are used to represent examples, illustrations or explanations. Any embodiment or design solution described as "exemplary" in the present application should not be construed as being more preferred or having more advantages than other embodiments or design solutions. Rather, the use of the word "exemplary" is intended to present concepts in a specific manner.

[0063] The business scenarios described in the embodiments of the present application are for more clearly illustrating the technical solutions in the embodiments of the present application, and do not constitute a limitation on the technical solutions provided by the embodiments of the present application. Those of ordinary skill in the art know that with the emergence of new business scenarios, the technical solutions provided by the embodiments of the present application are equally applicable to similar technical problems.

[0064] In this specification, the reference to "one embodiment" or "some embodiments" etc. means that in one or more embodiments of the present application, specific features, structures or characteristics described in combination with that embodiment are included. Thus, statements such as "in one embodiment", "in some embodiments", "in other some embodiments", "in still other embodiments" etc. that appear in different places in this specification are not necessarily all referring to the same embodiment, but mean "one or more but not all embodiments", unless otherwise specifically emphasized in other ways. The terms "comprising", "including", "having" and their variants all mean "including but not limited to", unless otherwise specifically emphasized in other ways.

[0065] In the present application, "at least one" means one or more, and "a plurality" means two or more. "And / or" describes the association relationship of associated objects, indicating that three relationships may exist. For example, A and / or B may represent: including the case where A exists alone, where A and B exist simultaneously, and where B exists alone, where A and B may be singular or plural. The character " / " generally represents an "or" relationship between the associated objects before and after. "At least one (item)" or similar expressions thereof refer to any combination of these items, including any combination of single item (s) or plural item (s). For example, at least one (item) of a, b, or c may represent: a, b, c, a - b, a - c, b - c, or a - b - c, where a, b, c may be single or multiple.

[0066] To facilitate the understanding of the embodiments of the present application, some definitions involved in the present application are briefly described first.

[0067] 1. Queue time (Qtime): The allowable interval time between two processing steps.

[0068] 2. Maximum queue time (Max Qtime): The maximum allowable interval time between two processing steps.

[0069] 3. Minimum queue time (Min Qtime): The minimum allowable interval time between two processing steps.

[0070] 4. Wafer lot: A batch consisting of several wafers.

[0071] 5. Stage: A stage includes one or more processing steps of a product, and multiple products may belong to the same stage.

[0072] 6. Move target: It refers to the quantity of products planned to be moved from the current production stage to the next production stage or the target location within a specific time period.

[0073] The manufacturing process of industrial products is very complex. Taking the manufacturing of semiconductor products as an example, the production line needs to process dozens of products simultaneously, and each product has up to thousands of processing steps. At the same time, there are also many technological requirements in semiconductor manufacturing, such as queue time. The requirements for queue time are divided into two categories: maximum queue time and minimum queue time. The maximum queue time requires that the processing steps be completed within the specified time. For example, in the lithography area, the time from coating the glue to exposure cannot exceed a time limit. The minimum queue time requires that there be a certain waiting time between processing steps. For example, in the furnace tube area, the lot needs to be cooled for a certain time before subsequent processing. Exceeding the queue time limit will lead to an increase in lot defects, a decrease in the yield rate, and some lots need to be reprocessed or even scrapped, wasting the factory's production capacity and causing great economic losses.

[0074] The factory production planners and the person in charge of each area of the production line need to cooperate with each other to meet the product delivery requirements without violating the product process requirements. The planner will convert the delivery requirements into setting a move target for a certain stage of the product every day. However, the status of the production line is changing all the time. For example, if there is an abnormality in the processing and testing of wafers on the machine tool and it needs to be stopped for inspection, the production capacity will decrease; there is a stockpile of products at the downstream machine tool, and due to the requirement of the allowable time, the processing needs to be postponed and wait until the downstream machine tool is idle before starting to process. The occurrence of similar situations easily leads to the failure to achieve the move target as planned.

[0075] Figure 1 It is a schematic diagram of the application scenario of a method for setting a move target provided by an embodiment of the present application.

[0076] The method for setting a move target provided by the present application can be applied in a semiconductor industrial software (computer integrated manufacturing, CIM) system to optimize the move target plan and improve the achievement rate of the move target.

[0077] The input of the method for setting a move target provided by the present application can be constraint conditions and user configurations. For example, it can be docked with various systems in the factory, such as the manufacturing execution system (MES) and other systems, to obtain real-time production data such as lot production data, product processing step flow (flow) information, and machine tool information. The output result of the method for setting a move target provided by the present application can be applied in the production dispatching system in the factory, such as the real-time dispatch (RTD) system. The newly set move target for the upstream can be integrated into the report system, that is, the newly set move target for the upstream is output to the report.

[0078] Figure 2 It is an exemplary flowchart of a method for setting a move target provided by an embodiment of the present application.

[0079] 210, Obtain the first move target and the first estimated number of parts to be processed.

[0080] Obtain the first move target of the first node and the first estimated number of parts to be processed by the second node within a preset period. The first node is the root node of the processing graph network corresponding to the product to be processed. The processing process of the product to be processed includes multiple stages, and each stage includes at least one processing step. The processing graph network includes multiple nodes, each node represents a stage, and the connection relationship between multiple nodes is used to indicate the processing sequence of multiple stages. Each node corresponds to a move target, and the second node is a node other than the root node in the processing graph network.

[0081] In some possible implementation scenarios, the processing graph network may be a tree, where each node in the tree represents a stage, and the connection relationships between multiple nodes are used to indicate the processing order of multiple stages.

[0082] It should be understood that the first goods-passing target may be the target value preset by the factory production planner for the first node. A stage includes one or more processing steps of the product to be processed, and multiple products to be processed may belong to one stage.

[0083] The preset period is set according to actual requirements, and the present application places no restrictions on this.

[0084] The first estimated number of processed parts of the second node within the preset period can be obtained through simulation. For example, the simulation result of the second node in the future preset period is obtained through control data. The present application places no restrictions on the specific simulation method used. For example, it can be a commonly used simulation method in the industry, or the method of simulating in the order of priority in the embodiments of the present application. The control data may include the control conditions and related data considered during actual dispatching, such as the control conditions and related data considered during actual dispatching by MES, etc.

[0085] 220, set the second goods-passing target to the smaller value of the first estimated number of processed parts and the first goods-passing target.

[0086] In the case where the first estimated number of processed parts is less than the first goods-passing target, set the second goods-passing target corresponding to the second node to the first estimated number of processed parts; or, in the case where the first estimated number of processed parts is greater than or equal to the first goods-passing target, set the second goods-passing target corresponding to the second node to the first goods-passing target.

[0087] Optionally, before resetting the second goods-passing target to the first estimated number of processed parts or the first goods-passing target, the second node may have a corresponding old second goods-passing target or the second goods-passing target may also be empty.

[0088] The processing graph network is a stage-level graph network. According to the connection relationships or directions between nodes, the processing graph network can be divided into Q levels, where the root node is located at the 0th level, the upstream node closest to the root node is located at the 1st level, and Q is an integer greater than 1. The second node can be any node from the 2nd level to the Qth level. In some possible implementation manners, the nodes of each level can be traversed in ascending order of levels, and new goods-passing targets can be set for the nodes according to the goods-passing target of the root node and the estimated number of processed parts of the nodes. In some other possible implementation manners, the nodes in the processing graph network can also be randomly traversed, and new goods-passing targets can be set for the nodes according to the goods-passing target of the root node and the estimated number of processed parts of the nodes. The setting order of the node goods-passing targets should not be construed as a limitation to the present application.

[0089] Taking the product to be processed as a wafer and the component to be processed as the product form before processing is completed as an example, the method for setting the goods transfer target provided by the embodiments of the present application will be specifically described below.

[0090] Figure 3 It is an exemplary flowchart of another method for setting the goods transfer target provided by the embodiments of the present application.

[0091] 310, Priority promotion.

[0092] Step 310 is executed by the priority promotion module. The priority promotion module can calculate the dispatching priority for each lot according to a multi-dimensional business rule engine including a business rule engine library, promote the priority of the lot related to the node with the newly set goods transfer target in the target optimization module, and output it to the simulation module to achieve accelerated dispatching of the lot, so as to promote the achievement of the goods transfer target as soon as possible.

[0093] 320, Simulation.

[0094] Step 320 is executed by the simulation module. The lot attribute information with different priorities will be input into the simulation module. The simulation module considers the impact of the real-time state of the production line on the available processing machines for the lot and considers the Qtime constraint, and simulates the production results from the current moment of the production line to a certain future outlook period, so as to calculate the achievement rate of the goods transfer target.

[0095] 330, Determine whether the current goods transfer target can be achieved.

[0096] According to the simulated production results obtained by the simulation module, the achievement of the current goods transfer target T in a certain production stage is counted. If the current goods transfer target T can be achieved, the loop ends, and the promoted lot priority is output to the dispatching system such as the RTD system to guide dispatching, and the target / optimized target is output to the report system. If the current goods transfer target T cannot be achieved, the current goods transfer target T is added with a configured constant N, aiming to increase the redundancy of pulling goods upstream to promote the achievement of the goods transfer target.

[0097] 340, Target optimization.

[0098] Step 340 is executed by the target optimization module. The target optimization module constructs a stage-level processing graph network according to the real-time processing step flow information of the product, and uses the processing graph network to search upstream to the previous stage and set a new goods transfer target, which is input into the next loop to achieve the purpose of pulling goods upstream. In the next loop, the business rule engine of the priority promotion module will screen the relevant lots according to the newly set goods transfer target of the upstream stage and promote the priority of the relevant lots, so as to achieve accelerated dispatching. Such a loop continues until the goods transfer target of the node is achieved, and the loop ends.

[0099] Figure 4 It is an exemplary flowchart for optimizing the goods-passing target provided by an embodiment of the present application. Figure 4 The shown flowchart corresponds to Figure 3 step 340. The input of the target optimization module includes MES data and the corresponding goods-passing target (target), and the output includes the goods-passing target data newly set for the upstream node. The MES data includes the processing step (flow) information of the product, which may include, for example, the processing sequence number (step sequence), product identification (product), process identification (tech), stage identification (stage), etc.

[0100] 410. Construct a graph network at the stage level.

[0101] According to the processing step flow information of the product to be processed, construct a processing graph network at the stage level. Exemplarily, all eligible flows can be found from the flow information according to the set screening conditions. Taking the screening condition example shown in Table 1, 2 eligible flows are found from the flow according to the product identification = A / B and the process identification = A, as shown in Table 2 and Table 3. Table 2 is the flow with the product identification = A and the process identification = A, and Table 3 is the flow with the product identification = B and the process identification = A.

[0102] Table 1

[0103] Product Identification Process Identification A / B A

[0104] Table 2

[0105] Processing Sequence Number Product Identification Process Identification Stage Identification 1 A A s1 2 A A s2 3 A A s3 4 A A s4 5 A A s5

[0106] Table 3

[0107] Processing Sequence Number Product Identification Process Identification Stage Identification 1 B A s0 2 B A s4 3 B A s6 4 B A s7 5 B A s8

[0108] Figure 5 It is a schematic diagram of a processing graph network at the stage level provided by an embodiment of the present application. For each flow, sort it in ascending order according to the processing sequence number, traverse from the first step to the last step backward, find the relationship between the upstream and downstream stages in the flow, and construct the stage nodes and the stage graph network, thereby obtaining the corresponding processing graph network at the stage level. Each node in the processing graph network represents a stage, and the connection relationship between multiple nodes is used to indicate the processing sequence of multiple stages.

[0109] 420. Obtain the predicted number of processed wafers for each node according to the simulation result.

[0110] According to the simulation result output by the simulation module in step 320, obtain each node node in the processing graph network iThe estimated number of wafers to be processed in a preset period in the future wafer_count i .

[0111] 430, set a new cargo transfer target to the upstream node and output it.

[0112] Divide the processing graph network at the stage level into levels, traverse the nodes in hierarchical order, and set new cargo transfer targets for upstream nodes according to the cargo transfer targets of the root nodes and output them. For details and examples, please refer to Figure 6 and Figure 7 Description.

[0113] Figure 6 It is a schematic diagram of a processing graph network layering provided in an embodiment of the present application.

[0114] Among them, the node node0 of stage 0 is the root node of the processing graph network and is located at the 0th layer of the processing graph network. The node node1 of stage 1, the node node2 of stage 2 and the node node3 of stage 3 are located at the 1st layer of the processing graph network. The node node4 of stage 4 is located at the 2nd layer of the processing graph network. Each node node in the processing graph network i Corresponding to a cargo target i , i is greater than or equal to 0 and less than the number of nodes in the processing graph network.

[0115] Figure 7 It is an exemplary flowchart for setting a new cargo transfer target to an upstream node provided in an embodiment of the present application.

[0116] 710, determine whether the root node's estimated processing cargo volume is greater than or equal to the root node's cargo transfer target target0.

[0117] Starting from the root node node0 of the 0th layer of the processing graph network, if the estimated number of processed wafers of the current root node is greater than or equal to the root node's delivery target target0, stop searching; if the estimated number of processed wafers of the current root node is less than the root node's delivery target target0, execute step 720 to move to the previous level, i.e., the 1st layer.

[0118] 720, move up one level.

[0119] 730, calculate the new cargo transfer target of the node at this layer i .

[0120] Traverse the nodes in this level one by one and i Estimated number of processed wafers wafer_count iThe smaller value of the target0 of the root node is used as the new target of the node. i , that is, target i =min(wafer_count i ,target0).

[0121] It should be understood that at node i New target for cargo transfer i Before, node i The corresponding delivery target can be empty or a preset value.

[0122] 740, update the total target of the goods sum .

[0123] target sum It is equal to the sum of the delivery targets of the nodes set in the processing diagram network, that is, target sum =sum(target i ).

[0124] 750, determine whether all nodes at the current level have been traversed.

[0125] If all nodes of the current level have not been traversed, execute step 760 to continue traversing the next node of the level. If all nodes of the current level have been traversed, execute step 770.

[0126] 760, move to the next node.

[0127] 770, determine the target sum Is it greater than or equal to the root node's cargo transfer target target0?

[0128] If target sum If target0 is greater than or equal to the root node’s cargo transfer target, it means that the cargo transfer target set by the planner at the root node can be achieved, the search stops, and the new cargo transfer target is set for the upstream node. sum If the target value is less than the root node's target0, it means that the target set by the planner at the root node cannot be achieved at present. Execute step 720 and continue to set new targets for upstream nodes until target sum Greater than or equal to target0 or all nodes in the processing graph network have been traversed.

[0129] The cargo transfer target setting method provided in the present application can set a new cargo transfer target to the upstream stage in a timely manner when the cargo transfer target set at the root node cannot be achieved after evaluation, thereby accelerating the speed at which the upstream lot flows to the downstream.

[0130] Optionally, in some other possible implementation manners, nodes in the processing graph network can also be randomly traversed, and a new goods passing target can be set for the nodes according to the goods passing target target0 of the root node and the expected number of wafers to be processed by the nodes. The above-mentioned traversing the nodes in the order of the hierarchy of the processing graph network and setting the new goods passing target is only an example, and the setting order of the node goods passing target should not be construed as a limitation to this application.

[0131] Figure 8 It is a schematic architecture diagram provided by an embodiment of this application for improving the priority through a business rule engine library. Figure 8 The shown architecture diagram corresponds to Figure 3 step 310 of

[0132] The priority of the lot can be divided into N levels according to the processing urgency, where N is an integer greater than or equal to 1. The business rule engine library includes a series of rule engines in different business dimensions such as delivery date, process, production capacity, and special lot, and can match the corresponding lot priority according to the mapping relationship between the input lot attribute information and the priority. Each business rule engine in the business rule engine library independently assigns the priority of this business dimension to the lot, and the highest priority among the obtained at least one priority (the smaller the priority value, the higher the priority) can be used as the priority of this lot, and the situation of each lot hitting the priority can be viewed in the output report.

[0133] The method provided by this application can improve the priority of the lot related to the node with the newly set goods passing target by setting the priority mapping relationship in the business rule engine library, realize the accelerated dispatching of the lot to be processed, and promote the achievement of the goods passing target as soon as possible.

[0134] Table 4 shows an example of the output report of the lot priority. Among them, the priority matching result of lot1 is priority 2, the priority matching result of lot2 is priority 1, and the priority matching result of lot3 is priority 3.

[0135] Table 4

[0136] Rule Engine 1 Rule Engine 2 Rule Engine 3 Priority Result lot1 Priority 2 Miss Priority 3 Priority 2 lot2 Miss Priority 1 Priority 2 Priority 1 lot3 Priority 3 Priority 4 Miss Priority 3

[0137] Optionally, a machine learning method can also be used to improve the priority of the lot related to the node with the newly set goods passing target. Exemplarily, the lot attribute information can be input into the trained neural network model to obtain the priority of the corresponding lot. The above example of improving the priority through the rule engine should not be construed as a limitation to this application.

[0138] Figure 9 It is an exemplary flowchart of a simulation provided by an embodiment of this application. Figure 9 The shown flowchart corresponds toFigure 3 It corresponds to step 320. The lot dispatching simulation performed by the simulation module can consider the complex Qtime requirements between machine processing steps. By inputting the information of all lots waiting for dispatching in this simulation module, the lot dispatching simulation results within a preset look-ahead period (such as 12 hours) based on the production line state at the current moment can be output.

[0139] 910, input the information of the lots to be scheduled.

[0140] Input the information of all lots waiting for dispatching.

[0141] 920, each lot generates a list of available processing machines according to the control data.

[0142] By applying multi-dimensional control data, such as the control conditions and related data considered during actual dispatching like MES, a list of available processing machines for each processing step within the preset look-ahead period for each lot to be scheduled is given.

[0143] It should be understood that the control conditions and control data of the processing machines are determined according to specific processing requirements and quality requirements. For example, a lot can only be processed by machines that have the necessary processes, recipes, etc. for processing that lot.

[0144] 930, determine whether the list of available processing machines is empty.

[0145] Based on the list of available processing machines for each processing step within the preset look-ahead period for each lot to be scheduled output in step 920, analyze whether the running of each lot is blocked. If there is a situation where the list of available processing machines for a lot processing step is empty, execute step 935 to find the upstream safety site to stop dispatching. If there is no situation where the list of available processing machines for a lot processing step is empty, execute step 940.

[0146] 935, stop dispatching.

[0147] According to the Qtime control rule engine, stop dispatching at the safety site upstream of the lot processing step where the corresponding list of available processing machines is empty.

[0148] 940, hierarchically optimize and solve the lot dispatching time.

[0149] For the remaining lots that have not been stopped from being assigned work, in the order from the highest to the lowest priority level, input the lots with the same priority into the optimization-based Qtime violation minimization model to give a work assignment plan with the minimum extra Qtime, and indicate which lots should be sacrificed when it is necessary to exceed Qtime. It should be understood that the optimization-based Qtime violation minimization model is a mathematical model used to optimize production scheduling and task allocation in industrial production by minimizing the number or degree of violations of delivery time.

[0150] Input the time of the minimum extra Qtime output by the optimization-based Qtime violation minimization model into the production capacity maximization-based scheduling model to obtain the work assignment time and processing end time of each lot on each machine tool, so as to obtain the estimated number of processed wafers of each node in the processing graph network within the preset outlook period. The production capacity maximization-based scheduling model can perform a detailed scheduling of the lots with the time of the minimum extra Qtime as a hard constraint, aiming at maximizing production capacity and load balancing work assignment, and at the same time considering the impact of work assignment details such as the non-production time (setup time) of the machine tool on the processing time of each step of the lot, and output the work assignment time of each lot on each machine tool.

[0151] The setup time of a machine tool refers to the time required to convert the machine tool from the current production task or product to the next production task or product during the production process. It includes operations such as cleaning, adjustment, tool replacement, and program change to ensure that the machine tool can smoothly start the next production task.

[0152] Exemplarily, first, according to the optimization-based Qtime violation minimization model and the production capacity maximization-based scheduling model, obtain the work assignment time of the lots with a priority equal to i on each machine tool, then increment the priority i by 1, and continue to obtain the work assignment time of the lots with a priority equal to i + 1 on each machine tool according to the above two models, and so on, until the work assignment time of all the lots that have not been stopped from being assigned work on each machine tool.

[0153] The simulation module provided by this application solves the Qtime control problem, can perform hierarchical optimization and solution of the lots based on the priority level, accelerate the solution speed, and make the performance meet the real-time requirements of the production line.

[0154] In addition to the above semiconductor manufacturing field, the method for setting the goods transfer target provided in this application can also be applied to industrial software in other manufacturing fields, such as automobile manufacturing, manufacturing of electronic products such as mobile phones, and biomedical manufacturing. The manufacturing scenarios in these industries are similar to those in semiconductor manufacturing. Product processing involves multiple steps and also involves the control of goods transfer targets. Therefore, when the method for setting the goods transfer target provided in this application is applied to other industries, it can also be customized to adapt to other manufacturing scenarios by modifying the simulation module. The above examples should not be construed as limitations on this application.

[0155] The above describes the method for setting the goods transfer target of the product to be processed according to the embodiments of this application. Next, the devices and equipment according to the embodiments of this application will be described separately in conjunction with Figure 10 and Figure 11 Describe the devices and equipment according to the embodiments of this application.

[0156] The embodiments of this application also provide a computer storage medium. Program instructions are stored in the computer storage medium. When the program is executed, it may include some or all of the steps of the method for setting the goods transfer target of the product to be processed in the corresponding Figures 2 to 9 embodiment.

[0157] Figure 10 FIG. 16 is a structural schematic diagram of a computer device 1000 provided by an embodiment of this application. The computer device 1000 includes an acquisition module 1010 and a processing module 1020. The acquisition module 1010 and the processing module 1020 can be implemented by software, hardware, or a combination of both.

[0158] Among them, the acquisition module 1010 is used to acquire the first goods transfer target of the first node and the first expected number of processed parts of the second node within a preset period to execute Figure 2 210 in the method.

[0159] The processing module 1020 is used to set the second goods transfer target corresponding to the second node as the smaller value of the first expected number of processed parts and the first goods transfer target, and execute Figures 2 to 9 Some or all of the steps in the method.

[0160] Figure 11 FIG. 30 is a structural schematic diagram of another computer device 1300 provided by an embodiment of this application. The computer device 1300 includes a processor 1302, a communication interface 1303, and a memory 1304. An example of the computer device 1300 is a computing device.

[0161] The method disclosed in the embodiments of the present application can be applied to or implemented by the processor 1302. The processor 1302 can be a central processing unit (CPU), or other general-purpose processors, digital signal processors (DSPs), application-specific integrated circuits (ASICs), field programmable gate arrays (FPGAs), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. The general-purpose processor can be a microprocessor or any conventional processor, etc. During implementation, the steps of the above method can be completed by the integrated logic circuit of the hardware in the processor 1302 or the instructions in the form of software. The various methods, steps, and logic block diagrams disclosed in the embodiments of the present application can be implemented or executed. The general-purpose processor can be a microprocessor or the processor can also be any conventional processor, etc. The steps of the method disclosed in combination with the embodiments of the present application can be directly embodied as being executed and completed by the hardware decoding processor, or executed and completed by the combination of the hardware and software modules in the decoding processor.

[0162] The memory 1304 can be a volatile memory or a non-volatile memory, or can include both volatile and non-volatile memories. Among them, the non-volatile memory can be a read-only memory (ROM), a programmable ROM (PROM), an erasable PROM (EPROM), an electrically erasable PROM (EEPROM), or a flash memory. The volatile memory can be a random access memory (RAM), which is used as an external cache. By way of example but not limitation, many forms of RAM are available, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDR SDRAM), enhanced SDRAM (ESDRAM), synchlink DRAM (SLDRAM), and direct rambus RAM (DRRAM). It should be noted that the memories of the methods described herein are intended to include, but are not limited to, these and any other suitable types of memories.

[0163] Communication can occur between the processor 1302, the memory 1304, and the communication interface 1303 via a bus. Executable code is stored in the memory 1304, and the processor 1302 reads the executable code in the memory 1304 to execute the corresponding method. Other software modules required for other running processes, such as an operating system, can also be included in the memory 1304. The operating system can be LINUX TM , UNIX TM , WINDOWS TM and so on.

[0164] For example, the executable code in the memory 1304 is used to implement the Figures 2 to 9 method shown, and the processor 1302 reads the executable code in the memory 1304 to execute the Figures 2 to 9 method shown.

[0165] In some embodiments of the present application, the disclosed method can be implemented as computer program instructions encoded in a machine-readable format on a computer-readable storage medium or encoded on other non-transitory media or articles. Figure 12A conceptual partial view of an example computer program product arranged in accordance with at least some of the embodiments presented herein is schematically shown. The example computer program product includes a computer program for executing a computer process on a computing device. In one embodiment, the example computer program product 1400 is provided using a signal-bearing medium 1401. The signal-bearing medium 1401 may include one or more program instructions 1402 that, when run by one or more processors, may provide the functions or portions of the functions described above for Figures 2 to 9 the methods shown. Thus, for example, with reference to Figures 2 to 9 the embodiments shown therein, one or more of the features may be carried out by one or more instructions associated with the signal-bearing medium 1401.

[0166] In some examples, the signal-bearing medium 1401 may comprise a computer-readable medium 1403, such as but not limited to, a hard disk drive, a compact disk (CD), a digital video disk (DVD), a digital tape, a memory, a read-only memory (ROM), or a random access memory (RAM), and so on. In some implementations, the signal-bearing medium 1401 may comprise a computer-recordable medium 1404, such as but not limited to, a memory, a read / write (R / W) CD, an R / W DVD, and so on. In some implementations, the signal-bearing medium 1401 may comprise a communication medium 1405, such as but not limited to, digital and / or analog communication media (e.g., fiber optic cables, waveguides, wired communication links, wireless communication links, and so on). Thus, for example, the signal-bearing medium 1401 may be conveyed by a wireless form of the communication medium 1405 (e.g., a wireless communication medium compliant with the IEEE 802.11 standard or other transmission protocol). The one or more program instructions 1402 may be, for example, computer-executable instructions or logic implementation instructions. In some examples, the foregoing computing device may be configured to provide various operations, functions, or actions in response to the program instructions 1402 communicated to the computing device via one or more of the computer-readable medium 1403, the computer-recordable medium 1404, and / or the communication medium 1405. It should be understood that the arrangements described herein are for illustrative purposes only. Thus, those skilled in the art will understand that other arrangements and other elements (e.g., machines, interfaces, functions, orders, and groups of functions, etc.) can be used instead, and some elements may be omitted altogether depending on the desired results. Additionally, many of the elements described may be implemented as discrete or distributed components, or as functional entities combined with other components in any suitable combination and location.

[0167] Those of ordinary skill in the art can realize that the units and method steps of each example described in combination with the embodiments disclosed herein can be implemented by electronic hardware, or a combination of computer software and electronic hardware. Whether these functions are executed in a hardware or software manner depends on the specific application and design constraints of the technical solution. Professional technicians can use different methods to implement the described functions for each specific application, but such implementation should not be considered to exceed the scope of this application.

[0168] Those skilled in the art can clearly understand that for the convenience and conciseness of description, the specific working processes of the devices and units described above can refer to the corresponding processes in the foregoing method embodiments and will not be elaborated herein.

[0169] In several embodiments provided in this application, it should be understood that the disclosed devices and methods can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the units is only a logical function division. In actual implementation, there may be other division methods. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed coupling or direct coupling or communication connection to each other can be through some interfaces. The indirect coupling or communication connection of the devices or units can be in an electrical, mechanical or other form.

[0170] The units described as separate components may or may not be physically separated. The components displayed as units may or may not be physical units, that is, they can be located in one place, or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0171] In addition, the functional units in each embodiment of this application can be integrated in a processing unit, or each unit can exist physically alone, or two or more units can be integrated in one unit.

[0172] When the above-mentioned functions are implemented in the form of software functional units and sold or used as independent products, they can be stored in a computer-readable storage medium. Based on this understanding, the technical solution of this application, in essence, or the part that contributes to the prior art or a part of this technical solution can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in various embodiments of this application. The aforementioned storage medium includes: various media that can store program codes, such as USB flash drives, mobile hard disks, read-only memories (ROM), random access memories (RAM), magnetic disks, or optical discs.

[0173] As described above, the above are only specific implementation manners of this application, but the protection scope of this application is not limited thereto. Any person skilled in the art within the technical scope disclosed by this application can easily think of changes or substitutions, which should all be covered by the protection scope of this application. Therefore, the protection scope of this application should be subject to the protection scope of the claims.

Claims

1. A method for setting the passing target of a product to be processed, characterized in that, The processing process of the product to be processed includes multiple stages, and each stage includes at least one processing step. The method includes: Obtaining a first goods passing target of a first node and a first estimated number of processed parts of a second node within a preset period. The first node is the root node of the processing graph network corresponding to the product to be processed. The processing graph network includes multiple nodes, each node represents one of the stages, and the connection relationships between the multiple nodes are used to indicate the processing sequence of the multiple stages. Each node corresponds to a goods passing target, and the second node is a node other than the root node in the processing graph network; In the case where the first estimated number of processed parts is less than the first goods passing target, setting the second goods passing target corresponding to the second node to the first estimated number of processed parts; or, In the case where the first estimated number of processed parts is greater than or equal to the first goods passing target, setting the second goods passing target corresponding to the second node to the first goods passing target.

2. The method according to claim 1, characterized in that, Before obtaining the first goods passing target of the first node and the first estimated number of processed parts of the second node within the preset period, the method further includes: Determining that the total goods passing target is less than the first goods passing target, where the total goods passing target is equal to the sum of the goods passing targets of the nodes that have been set in the processing graph network.

3. The method according to claim 1 or 2, characterized in that, The method further includes: Obtaining a second estimated number of processed parts of a third node within the preset period, where the third node is an upstream node of the second node; In the case where the second estimated number of processed parts is less than the first goods passing target, setting the third goods passing target corresponding to the third node to the second estimated number of processed parts; or, In the case where the second estimated number of processed parts is greater than or equal to the first goods passing target, setting the third goods passing target corresponding to the third node to the first goods passing target.

4. The method according to any one of claims 1 to 3, characterized in that, The obtaining of the first estimated number of processed parts of the second node within the preset period includes: Obtaining the priorities of multiple parts to be processed, where the multiple parts to be processed belong to the product to be processed; Simulating the product to be processed in the order of decreasing priority of the multiple parts to be processed to obtain the first estimated number of processed parts.

5. The method according to claim 4, wherein The obtaining of the priorities of the multiple parts to be processed includes: Obtaining the attribute information of a first part to be processed, where the first part to be processed is one of the multiple parts to be processed; Matching at least one priority corresponding to the first part to be processed in a business rule engine library according to the attribute information of the first part to be processed. The business rule engine library includes multiple priority mapping relationships; Determining the highest priority among the at least one priority as the priority corresponding to the first part to be processed.

6. The method according to claim 4 or 5, characterized in that, Before obtaining the priorities of the multiple parts to be processed, the method further includes: Obtaining the control data of the multiple parts to be processed; Generate a list of available processing machines corresponding to the first processing step of the second part to be processed within the preset period according to the control data, where the second part to be processed is one of the multiple parts to be processed, and the first processing step is one of the at least one processing step; If the list of available processing machines is empty, stop dispatching work at the upstream safety site of the first processing step.

7. The method according to any one of claims 4 to 6, characterized in that The product to be processed is a wafer, and the part to be processed is the product form of the wafer before the processing is completed.

8. The method according to any one of claims 1 to 7, characterized in that, The method further includes: Obtain the processing step flow information of the product to be processed; Construct the processing graph network according to the processing step flow information.

9. The method according to any one of claims 1 to 8, characterized in that, The method further includes: Output the second goods transfer target.

10. A computer device, characterized in that, Including: An acquisition module, configured to acquire the first goods transfer target of the first node and the first estimated number of parts to be processed of the second node within the preset period. The first node is the root node of the processing graph network corresponding to the product to be processed. The processing process of the product to be processed includes multiple stages, each stage includes at least one processing step, the processing graph network includes multiple nodes, each node represents one of the stages, the connection relationship between the multiple nodes is used to indicate the processing order of the multiple stages, each node corresponds to a goods transfer target, and the second node is a node other than the root node in the processing graph network; A processing module, configured to: In the case where the first estimated number of parts to be processed is less than the first goods transfer target, set the second goods transfer target corresponding to the second node to the first estimated number of parts to be processed; or, In the case where the first estimated number of parts to be processed is greater than or equal to the first goods transfer target, set the second goods transfer target corresponding to the second node to the first goods transfer target.

11. The device according to claim 10, characterized in that, The processing module is further configured to: Determine that the total goods transfer target is less than the first goods transfer target, and the total goods transfer target is equal to the sum of the goods transfer targets of the nodes that have been set in the processing graph network.

12. The device according to claim 10 or 11, wherein: The acquisition module is further configured to acquire the second estimated number of parts to be processed of the third node within the preset period, and the third node is the upstream node of the second node; The processing module is further configured to: In the case where the second estimated number of parts to be processed is less than the first goods transfer target, set the third goods transfer target corresponding to the third node to the second estimated number of parts to be processed; or, In the case where the second estimated number of parts to be processed is greater than or equal to the first goods transfer target, set the third goods transfer target corresponding to the third node to the first goods transfer target.

13. The device according to any one of claims 10 to 12, wherein: The acquisition module is further configured to acquire the priorities of multiple parts to be processed, and the multiple parts to be processed belong to the product to be processed; The processing module is further configured to simulate the product to be processed in the order of decreasing priorities of the multiple parts to be processed to obtain the first estimated number of parts to be processed.

14. The device according to claim 13, wherein: The obtaining module is further configured to obtain the attribute information of the first to-be-processed component, where the first to-be-processed component is one of the multiple to-be-processed components; The processing module is further configured to match at least one priority corresponding to the first to-be-processed component in the business rule engine library according to the attribute information of the first to-be-processed component, and the business rule engine library includes multiple priority mapping relationships; The processing module is further configured to determine that the highest priority among the at least one priority is the priority corresponding to the first to-be-processed component.

15. The apparatus according to claim 13 or 14, wherein The obtaining module is further configured to obtain the control data of the multiple to-be-processed components; The processing module is further configured to: generate a list of available processing machines corresponding to the first processing step of the second to-be-processed component within the preset period according to the control data, where the second to-be-processed component is one of the multiple to-be-processed components, and the first processing step is one of the at least one processing step; if the list of available processing machines is empty, stop dispatching work at the upstream safety site of the first processing step.

16. The device according to any one of claims 13 to 15, characterized in that The to-be-processed product is a wafer, and the to-be-processed component is the product form of the wafer before the processing is completed.

17. The apparatus according to any one of claims 10 to 16, wherein The obtaining module is further configured to obtain the processing step flow information of the to-be-processed product; The processing module is further configured to construct the processing graph network according to the processing step flow information.

18. The device according to any one of claims 10 to 17, characterized in that, The processing module is further configured to output the second goods transfer target.

19. A computer device, characterized in that, Comprising: a processor, where the processor is used to be coupled with a memory, read and execute instructions and / or program codes in the memory to execute the method according to any one of claims 1-9.

20. A computer-readable medium, characterized in that, The computer-readable medium stores computer program codes, and when the computer program codes run on a computer, the computer is caused to execute the method according to any one of claims 1-9.

21. A computer program product, characterized in that, The computer program product includes computer program codes, and when the computer program codes run on a computer, the computer is caused to execute the method according to any one of claims 1-9.

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