Information management system and method of micro-nano processing experiment platform

Abstract

The invention discloses an information management system and method for a micro-nano processing experiment platform, and is used for solving or partially solving the problems of high personnel management difficulty and poor information display effect in the prior art. The information management system at least comprises an identification tracking module and an alarm module; acquiring identity information data of micro-nano processing laboratory personnel in a monitoring area through an identification tracking module, and tracking activity places of the micro-nano processing laboratory personnel and operation behaviors of the micro-nano processing laboratory personnel on equipment in real time; and when it is judged that the activity place and / or the operation behavior on the equipment meet a preset violation condition based on the identity information data, violation alarm information is generated, and the violation alarm information is sent to a first class of responsible person and a second class of responsible person determined based on the identity information data.

Description

[0001] This application is a divisional application of a Chinese patent application with the application number 202410956484.0, the application date of July 17, 2024, and the invention title of "Information Management System and Method for Micro-Nano Processing Experiment Platform". Technical Field

[0002] The present invention relates to the field of micro-nano processing technology, and in particular, to an information management system for a micro-nano processing experiment platform, an information management method for a micro-nano processing experiment platform, and a terminal device. Background Art

[0003] Micro-nano processing technology is a technology for designing, processing, integrating, testing, optimizing, and applying micro- and nano-scale devices. It is widely used in fields such as integrated circuits, flexible electronic devices, microelectromechanical devices and systems, optoelectronic devices, biochips, and 3D hybrid integrated devices. It is one of the main technologies for measuring the level of high-end manufacturing.

[0004] A micro-nano processing experiment platform is a multi-functional public technology support platform that integrates education, research and development, and industrialization of micro-nano processing technology. With the rapid development of the semiconductor industry, universities and research institutions have successively established various micro-nano processing experiment platforms based on micro-nano processing technology. Large-scale precision instruments for micron and nano-scale processing are equipped to form a complete micro-nano processing technology chain. The micro-nano processing experiment platforms of universities and research institutions are not only open to teachers and students on campus, but also open to off-campus research institutions and enterprises. In this case, personnel management and equipment operation and maintenance become more complex and diverse, thus increasing the challenges of platform management and rapid training.

[0005] On the one hand, when training or communicating with personnel on existing micro-nano processing experiment platforms, traditional texts, pictures, and videos are generally used as teaching aids. There are disadvantages such as being unable to directly correspond one-to-one with the actual on-site situation, trainees and communicators being unable to quickly understand, being unable to quickly combine the on-site situation with teaching aids, and the update and improvement of teaching aids being time-consuming and laborious. Moreover, the personnel flow on the experiment platform is complex, resulting in an increase in the difficulty of personnel management. On the other hand, the number and types of semiconductor process equipment and supporting factory facilities on the micro-nano processing experiment platform are numerous. The number and types of information that can be managed for each piece of equipment are also numerous. Due to the huge amount of information and high professionalism, it is necessary for staff to work in combination with the actual on-site situation and background data information. At the same time, it is difficult to check and master the life cycle status of the equipment, and there is a problem of the disconnection between the background and the real-time information of the equipment, and insufficient maintenance judgment basis, resulting in poor information display effect. Summary of the Invention

[0006] The present invention provides an information management system for a micro-nano processing experimental platform, an information management method for a micro-nano processing experimental platform, and a terminal device, which are used to solve or partially solve the problems of difficult personnel management and poor information display effect in the management of existing experimental platforms.

[0007] An information management system for a micro-nano processing experimental platform provided by the present invention, the information management system includes an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module, and at least one terminal device; wherein,

[0008] The identification and tracking module is used to obtain the identity information data of the personnel in the micro-nano processing laboratory in the monitoring area, and to track in real time the activity locations of the personnel in the micro-nano processing laboratory and their operation behaviors on the equipment;

[0009] The alarm module is used to generate a violation alarm information and send it to the person in charge when it is determined based on the identity information data that the activity location, and / or, the operation behavior on the equipment meets a preset violation condition;

[0010] The intelligent push module is used to obtain the personnel identity data corresponding to the terminal device, and automatically match the virtual display data related to the personnel identity data from the data module;

[0011] The rendering module is used to superimpose the virtual display data on the real-time relative position of the real scene image to obtain a rendered image.

[0012] Optionally, the identity information data includes the current reservation range of the personnel in the micro-nano processing laboratory and the equipment usage qualification information, and the alarm module is specifically used for:

[0013] When it is detected that the personnel in the micro-nano processing laboratory appear outside the current reservation range and within the range that needs to be reserved, a super-range violation alarm information is generated;

[0014] When it is detected that the personnel in the micro-nano processing laboratory are operating other equipment that does not match the equipment usage qualification information, a device violation operation alarm information is generated.

[0015] Optionally, the intelligent push module is specifically used for:

[0016] Extract the first type of identity information from the identity information data of the personnel in the micro-nano processing laboratory, and display the first type of identity information at a preset position of the real scene image of the personnel in the micro-nano processing laboratory through the rendering module;

[0017] When receiving the violation alarm information, determine the second type of identity information according to the preset display rules, and display the second type of identity information at a preset position of the real-scene image of the personnel in the micro-nano processing laboratory through the rendering module.

[0018] Optionally, the intelligent push module is specifically configured to:

[0019] When receiving the violation alarm information, determine the violation warning range corresponding to the violation alarm information, perform a violation analysis on the violation behavior within the violation warning range based on the preset risk conditions, and determine the corresponding violation behavior level;

[0020] Retrieve the warning display information and the warning display form matching the violation behavior level from the data module;

[0021] Use the warning display information as the second type of identity information, and display the second type of identity information in the form of the warning display above the current location of the personnel in the micro-nano processing laboratory through the rendering module.

[0022] Optionally, the identity information data includes the identity type and the basic identity information of the personnel in the micro-nano processing laboratory. The person in charge includes the first type of person in charge and the second type of person in charge. The alarm module is further configured to:

[0023] Extract the person in charge corresponding to the currently reserved equipment of the personnel in the micro-nano processing laboratory from the basic identity information as the first type of person in charge;

[0024] Determine the second type of person in charge corresponding to the personnel in the micro-nano processing laboratory according to the identity type.

[0025] Optionally, the alarm module is specifically configured to:

[0026] When the personnel in the micro-nano processing laboratory are the first type of personnel, identify and determine the first target equipment corresponding to the current location of the first type of personnel through the identification and tracking module, and obtain the person in charge corresponding to the first target equipment from the data module as the second type of person in charge;

[0027] When the personnel in the micro-nano processing laboratory are the second type of personnel, extract the school-related person in charge from the basic identity information of the second type of personnel, identify and determine the second target equipment corresponding to the current location of the second type of personnel and the person closest in distance through the identification and tracking module, obtain the person in charge corresponding to the second target equipment from the data module, and use the person in charge corresponding to the second target equipment and the person closest in distance as the second type of person in charge.

[0028] Optionally, the alarm module is further configured to:

[0029] Pushing the violation alarm information to the first category person in charge and the second category person in charge;

[0030] When the violation alert information contains a violation related to the currently scheduled device, the first-category person in charge is regarded as the main person in charge;

[0031] When the violation alarm information contains a violation related to the target device corresponding to the current location of the micro-nano processing laboratory personnel, the second-category person in charge is regarded as the main person in charge.

[0032] Optionally, the alarm module is specifically used for:

[0033] When the micro-nano processing laboratory personnel are first-category personnel, the violation alarm information is pushed to the first-category person in charge and the person in charge corresponding to the first target device;

[0034] When the micro-nano processing laboratory personnel are of the second category, the violation alarm information is pushed to the first category person in charge, the on-campus related person in charge, the person in charge corresponding to the second target device and the person closest to the person, and at the same time, the information of the on-campus related person in charge is pushed to the person closest to the person.

[0035] Optionally, the second category of personnel includes enterprise users and suppliers, the equipment use qualification information corresponding to the enterprise users includes equipment independent operation qualification information, and the equipment use qualification information corresponding to the suppliers includes professional qualification certificate information, and the alarm module is specifically used for:

[0036] When it is detected that the enterprise user is operating other equipment that does not match the equipment independent operation qualification information, or when it is detected that the supplier is operating other equipment that does not match the professional qualification certificate information, an equipment illegal operation alarm message is generated.

[0037] Optionally, the alarm module is further used for:

[0038] When receiving a temporary authorization instruction or a violation cancellation instruction sent by the first type of person in charge or the second type of person in charge through the terminal device, the violation alarm is cancelled and the violation information is recorded.

[0039] Optionally, the identification and tracking module is further used for:

[0040] When receiving a temporary operation equipment request from the micro-nano processing laboratory personnel, determining the temporary request equipment corresponding to the temporary operation equipment request and the person in charge of the temporary request equipment;

[0041] Obtain the reservation application data of the temporary request device from the data module, and determine the current reservation status of the temporary request device through the reservation application data;

[0042] When it is detected that the temporary request device is currently unused, send the temporary operation device request to the person in charge corresponding to the current operation device and the person in charge of the temporary request device;

[0043] After receiving the temporary application approval instruction returned by the person in charge corresponding to the current operation device and / or the person in charge of the temporary request device, send the temporary application approval information to the terminal device of the micro-nano processing laboratory personnel, and record the device operation information of the micro-nano processing laboratory personnel.

[0044] Optionally, the identification and tracking module is further configured to:

[0045] When it is detected that there is an idle device without an ongoing task in the monitoring area, generate temporary authorization opening information for the idle device;

[0046] Send the temporary authorization opening information to the terminal devices of all micro-nano processing laboratory personnel in the monitoring area for micro-nano processing laboratory personnel in need to send a device use request to the person in charge corresponding to the idle device.

[0047] Optionally, the identification and tracking module is further configured to:

[0048] When receiving the temporary permission opening request sent by the micro-nano processing laboratory personnel, determine the temporary opening area corresponding to the temporary permission opening request and the person in charge of the temporary opening area;

[0049] Send the temporary permission opening request to the person in charge of the temporary opening area;

[0050] After receiving the temporary opening approval instruction returned by the person in charge of the temporary opening area, send the temporary opening approval information to the terminal device of the micro-nano processing laboratory personnel, and record the device operation information and / or visit record information of the micro-nano processing laboratory personnel.

[0051] Optionally, the intelligent push module is specifically configured to:

[0052] Determine the real scene images of all real target objects currently visible within the visual range of the terminal device, and at least one virtual anchor point corresponding to the real scene images for displaying information;

[0053] For each of the virtual anchors, retrieve the virtual anchor data corresponding to the virtual anchor from the data module, and generate first-class display data, second-class display data, third-class display data, and fourth-class display data respectively according to the virtual anchor data.

[0054] Optionally, the personnel identity data includes the personnel type of the person corresponding to the terminal device, and the intelligent push module is specifically configured to:

[0055] When the personnel type is a management personnel, use the first-class display data as the automatically pushed virtual display data;

[0056] When the personnel type is a visitor, obtain the personnel background information of the visitor, and screen out the information with the highest recommended matching degree with the personnel background information from the second-class display data as the automatically pushed virtual display data;

[0057] When the personnel type is a trainee, obtain the current ability level of the trainee, and screen out the training content data matching the current ability level from the third-class display data as the automatically pushed virtual display data;

[0058] When the personnel type is a device user, obtain the device operation level of the device user, and screen out the device-related data matching the device operation level from the fourth-class display data as the automatically pushed virtual display data.

[0059] Optionally, the first-class display data includes the device operation data within the current visible range of the terminal device, the device management estimation data, and the data being viewed by visitors or trainees;

[0060] The second-class display data includes different types of recommended information generated for visitors based on different personnel background characteristics;

[0061] The third-class display data includes different levels of training content data generated for trainees based on different ability levels;

[0062] The fourth-class display data includes different levels of device-related data generated for device users based on different device operation levels.

[0063] Optionally, the intelligent push module is specifically configured to:

[0064] When receiving an information viewing instruction sent by the visitor through the corresponding terminal device, determine the display information and the viewable personnel level corresponding to the information viewing instruction, and obtain the viewing permission level of the visitor;

[0065] Match the visible personnel level with the viewing permission level. When the match fails, push a viewing failure reminder message to the terminal device of the visitor, and at the same time push an information viewing request to the school-related person in charge corresponding to the visitor.

[0066] When the match is successful, or when an information viewing approval instruction returned by the school-related person in charge is received, obtain the display information from the data module as the virtual display data currently being displayed.

[0067] Optionally, the intelligent push module is specifically used for:

[0068] When a temporary viewing instruction sent by the trainee through the corresponding terminal device is received, determine the training content information and the viewable ability level corresponding to the temporary viewing instruction;

[0069] Match the viewable ability level with the current ability level. When the match fails, push a viewing failure reminder message to the terminal device of the trainee, and at the same time push a temporary viewing request to the training teacher corresponding to the trainee.

[0070] When the level match is successful, or when a temporary viewing approval instruction returned by the training teacher is received, obtain the information corresponding to the temporary viewing approval instruction from the data module as the virtual display data currently being displayed.

[0071] Optionally, the information management system further includes a voice interaction module, and the voice interaction module is used for:

[0072] When a voice control instruction issued by the personnel in the micro-nano processing laboratory is detected, extract the target control entity and the key action information from the voice control instruction;

[0073] Retrieve the equipment usage permission of the personnel in the micro-nano processing laboratory from the data module, and determine whether the personnel in the micro-nano processing laboratory has the control permission for the target control entity according to the equipment usage permission;

[0074] If so, control the target control entity to perform an action corresponding to the key action information through the information management system; otherwise, push an alarm message to the person in charge of the target control entity through the alarm module.

[0075] Optionally, the voice interaction module is further used for:

[0076] After pushing an alarm message to the person in charge of the target control entity through the alarm module, if a control authorization instruction returned by the person in charge of the target control entity is received, control the target control entity to perform an action corresponding to the key action information through the information management system and record the control information;

[0077] If a control rejection authorization instruction returned by the person in charge of the target control entity is received, it is determined that the voice control instruction is invalid, and an invalid prompt message is sent to the personnel in the micro-nano processing laboratory;

[0078] If an authorization instruction returned by the person in charge of the target control entity is not received within a preset waiting time period, the person in charge at the next higher level corresponding to the person in charge of the target control entity is obtained from the data module, and an alarm message is pushed to the person in charge at the next higher level.

[0079] Optionally, the information management system further includes a usage frequency recording module, and the usage frequency recording module is used for:

[0080] Recording the usage frequency data of each used device in the micro-nano processing experimental platform;

[0081] For any one of the used devices, extracting the personnel type record information corresponding to the used device from the usage frequency data, where the personnel type record information records the usage frequency or click view times of different types of micro-nano processing laboratory personnel for the used device;

[0082] According to the personnel type record information, determining the target personnel type with the most usage frequency or click view times for the used device, and accordingly adjusting the management and operation and maintenance plan of the used device based on the target personnel type.

[0083] The present invention also provides an information management method for a micro-nano processing experimental platform, including:

[0084] Obtaining the personnel identity data and identity information data of the micro-nano processing laboratory personnel corresponding to the terminal device, and automatically matching the virtual display data related to the personnel identity data;

[0085] Overlaying the virtual display data on the real-time relative position of the real scene image to obtain a rendered image;

[0086] Obtaining and real-time tracking the activity locations of the micro-nano processing laboratory personnel in the monitoring area and their operation behaviors on the devices;

[0087] When it is determined based on the identity information data that the activity location and / or the operation behavior on the device of the micro-nano processing laboratory personnel meet the preset violation conditions, a violation alarm message is generated and sent to the person in charge and the terminal device.

[0088] The present invention also provides a terminal device, and the terminal device is used for the information management system of the micro-nano processing experimental platform described in any one of the foregoing, and the terminal device is used for:

[0089] Obtain the identity information data of the personnel in the micro-nano processing laboratory from the data module, and perform personnel binding with the personnel in the micro-nano processing laboratory based on the identity information data;

[0090] Real-time locate the spatial position and angle of the terminal device in the real environment, and obtain the real-scene image of the real target object within the current visible range through its own camera;

[0091] Perform information interaction with the recognition and tracking module, and / or, the alarm module, and / or, the intelligent push module, and / or, the data module;

[0092] Real-time display the rendered image obtained after being processed by the rendering module.

[0093] It can be seen from the above technical solutions that the present invention has the following advantages:

[0094] An information management system and method for a micro-nano processing experimental platform are provided. Among them, the information management system includes a recognition and tracking module, an alarm module, an intelligent push module, a data module, a rendering module, and at least one terminal device. First, obtain the identity information data of the personnel in the micro-nano processing laboratory in the monitoring area through the recognition and tracking module, and real-time track the activity locations of the personnel in the micro-nano processing laboratory and their operation behaviors on the equipment; when it is determined based on the identity information data that the activity location and / or the operation behavior on the equipment meet the preset violation conditions, generate a violation alarm message through the alarm module and send it to the person in charge. Thus, through the interactive setting of the alarm module and violation triggering and alarm pushing, more targeted and efficient personnel management can be carried out on the relevant personnel on the site. Secondly, obtain the personnel identity data corresponding to the terminal device through the intelligent push module, and automatically match the virtual display data related to the personnel identity data from the data module; overlay the virtual display data on the real-time relative position of the real-scene image through the rendering module to obtain the rendered image. On the one hand, through the recognition and tracking module and the alarm module, obtain the activity situation of the personnel in the laboratory, and when a violation occurs, quickly determine multiple persons in charge, simplify the personnel management in the laboratory, and can timely determine different persons in charge when problems occur, avoiding management risks; on the other hand, through the intelligent push module, intelligently push and display more interesting information to relevant personnel according to different personnel types, realizing differential intelligent screening and pushing based on personnel types. Compared with the current information display method, it has a better information display effect and improves the user's information viewing experience. Description of the Drawings

[0095] To more clearly illustrate the technical solutions in the embodiments of the present invention or the prior art, the following will briefly introduce the drawings required for the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present invention. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0096] Figure 1 It is a schematic structural diagram of an information management system for a micro-nano processing experimental platform;

[0097] Figure 2 It is a schematic display diagram of a micro-nano processing process equipment;

[0098] Figure 3 It is a schematic display diagram of a micro-nano processing factory facility;

[0099] Figure 4(a) is a schematic display diagram of the personnel in a micro-nano processing laboratory;

[0100] Figure 4(b) is a schematic display diagram of the personnel in another micro-nano processing laboratory;

[0101] Figure 5(a) is a rendered image displayed on a terminal device;

[0102] Figure 5(b) is a rendered image displayed on another terminal device;

[0103] Figure 6 It is a flowchart of the steps of an information management method for a micro-nano processing experimental platform. Detailed implementation manners

[0104] The embodiments of the present invention provide an information management system for a micro-nano processing experimental platform, an information management method for a micro-nano processing experimental platform, and a terminal device, which are used to solve or partially solve the problems of difficult personnel management and poor information display effect in the management of existing experimental platforms.

[0105] To make the invention purpose, features, and advantages of the present invention more obvious and understandable, the following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the drawings in the embodiments of the present invention. Obviously, the embodiments described below are only some embodiments of the present invention, rather than all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present invention.

[0106] As an example, when training or communicating with personnel on the existing micro-nano processing experimental platform, traditional texts, pictures, and videos are generally used as teaching aids. There are drawbacks such as the inability to directly correspond one-to-one with the actual on-site situation, the difficulty for trainees and communicators to quickly understand, the inability to quickly integrate the on-site situation with the teaching aids, and the time-consuming and laborious update and improvement of the teaching aids.

[0107] Moreover, the personnel exchanges on the experimental platform are complex, resulting in an increase in the difficulty of personnel management. In addition, the number and types of semiconductor process equipment and supporting factory facilities on the micro-nano processing experimental platform are numerous. The quantity and variety of information that can be managed by each piece of equipment are also numerous. Due to the large amount of information and high professionalism, it is necessary for staff to work in combination with the actual on-site situation and background data information. At the same time, since the lifecycle status of the equipment is difficult to check and master, and there is a disconnection between the background and the real-time information of the equipment, there is a lack of sufficient basis for maintenance judgment, and the information display effect is not good.

[0108] In summary, there is currently a lack of an information management system that can better manage personnel and more intelligently push and display the relevant data corresponding to the equipment in the on-site operation and maintenance and on-site education of the micro-nano processing experimental platform and semiconductor factory.

[0109] Therefore, one of the core inventive points of the embodiments of the present invention lies in: aiming at the deficiencies in the prior art, providing an information management system and method for a micro-nano processing experimental platform. The information management system includes an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module, and at least one terminal device. First, the identification and tracking module obtains the identity information data of the personnel in the micro-nano processing laboratory in the monitoring area, and real-time tracks the activity locations of the personnel in the micro-nano processing laboratory and their operation behaviors on the equipment; when it is determined based on the identity information data that the activity location and / or the operation behavior on the equipment meet the preset violation conditions, the alarm module generates a violation alarm message and sends it to the person in charge. Thus, through the interaction settings of the alarm module and violation triggering and alarm pushing, more targeted and efficient personnel management can be carried out on the relevant personnel on the site. Secondly, the intelligent push module obtains the personnel identity data corresponding to the terminal device, and automatically matches the virtual display data related to the personnel identity data from the data module; the rendering module superimposes the virtual display data on the real-time relative position of the real scene image to obtain a rendered image. On the one hand, through the identification and tracking module and the alarm module, the activity situation of the personnel in the laboratory is obtained, and when a violation occurs, multiple persons in charge can be quickly determined, simplifying the personnel management in the laboratory, and when problems occur, different persons in charge can be determined in time to avoid management risks; on the other hand, through the intelligent push module, more interesting information is intelligently pushed to the relevant personnel automatically according to different personnel types, realizing differential intelligent screening and pushing based on personnel types. Compared with the current information display method, it has a better information display effect and can better improve the user's information viewing experience.

[0110] Refer to Figure 1 , which shows a schematic structural diagram of an information management system for a micro-nano processing experimental platform provided by an embodiment of the present invention.

[0111] Combined with Figure 1 , the information management system 100 provided by the embodiments of the present invention can be mainly divided into two major parts. One is the server part, which mainly includes an identification and tracking module 101, an alarm module 102, an intelligent push module 103, a data module 104, and a rendering module 105. The other is the user side part, including at least one terminal device 106. Each terminal device 106 is communicatively connected to the server.

[0112] Among them, the terminal device 106 includes, but is not limited to, AR (Augmented Reality) glasses, MR (Mixed Reality) glasses, tablet computers, and mobile phones.

[0113] On the one hand, when personnel in the micro-nano processing laboratory need to enter the laboratory for visits, training, or operating equipment, they need to wear AR or MR glasses, or hold a tablet computer or mobile phone in their hands to receive relevant virtual display information in real time or perform some interactive operations. At this time, the personnel need to be bound to the terminal device one by one, so that in the subsequent process, when the personnel violate the regulations and an emergency occurs, the corresponding personnel can be quickly locked through the terminal device. Specifically, the terminal device 106 can be used to obtain the identity information data (such as basic identity information, identity type, etc.) of the personnel in the micro-nano processing laboratory from the data module 104, and perform personnel binding with the personnel in the micro-nano processing laboratory based on the identity information data.

[0114] On the other hand, the terminal device 106 can also be used to real-time locate its spatial position and angle in the real environment, obtain the real-scene image of the real target object through its own camera, and display the rendered image.

[0115] Furthermore, the terminal device 106 can also perform information interaction with other modules in the information management system 100, such as the identification and tracking module 101, the alarm module 102, the intelligent push module 103, and the data module 104. The specific information interaction between the device terminal 106 and other modules will be described in combination with the corresponding modules in the subsequent introduction and will not be elaborated here.

[0116] The real target object includes, but is not limited to, the micro-nano processing process equipment, the micro-nano processing plant facilities, and the personnel in the micro-nano processing laboratory in the real environment of the micro-nano processing platform.

[0117] As an alternative embodiment, the terminal device 106 can locate its spatial position and angle in the real environment based on the SLAM (Simultaneous Localization and Mapping) algorithm. Among them, the SLAM algorithm refers to the process in which a moving object calculates its own position while constructing an environmental map according to the information of the sensor. Currently, the application fields of SLAM mainly include robots, virtual reality VR, and augmented reality AR.

[0118] In an alternative embodiment, the information management system 100 may further include a space construction module. The space construction module is mainly used to construct a 3D space model of the micro-nano processing experimental platform. Specifically, the 3D space model may include the 3D models and position information of the micro-nano processing process equipment and the micro-nano processing plant facilities, as well as the display areas of virtual information set according to the position information.

[0119] Furthermore, the space construction module first obtains the anchor point data of the micro-nano processing equipment and the micro-nano processing factory facilities scanned by the point 3D scanning technology. Then, based on the anchor point data, a 3D space model of the micro-nano processing experimental platform is constructed. Each anchor point data includes its X, Y, and Z coordinate information in space. There are more than tens of millions of anchor points for one piece of equipment, achieving contour coverage.

[0120] It can be understood that the anchor point data referred to in the embodiments of the present invention corresponds to the coordinate information of multiple anchor points of the actual equipment and the corresponding 3D space model. The virtual anchor point data corresponds to the virtual information displayed at the specific or calibrated anchor point positions, such as the operation data of the equipment, the current health status information, etc.

[0121] The space construction module receives the anchor point data of the display area of the calibrated virtual information to obtain the display area of the virtual information. The developer can, according to the location information of the micro-nano processing equipment or the micro-nano processing factory facilities, calibrate the area near the equipment or the factory facilities as the display area of the virtual information. Specifically, the anchor point data of the calibrated area is input into the space construction module, and the space construction module constructs the display area of the virtual information in the 3D space model. The developer calibrates the anchor points or the anchor point area where the virtual information needs to be displayed, that is, the designated position of the virtual information.

[0122] For the data module 104, on the one hand, the data module 104 can be used to obtain and store the operation data of the micro-nano processing experimental platform. Exemplarily, the operation data of the micro-nano processing experimental platform mainly can include the real-time operation data and the operation principle data of the micro-nano processing equipment and the micro-nano processing factory facilities. Specifically, the operation principle data mainly can include the 3D explosion diagram of the equipment and the operation principle video.

[0123] Among them, the micro-nano processing equipment covers various types of equipment such as lithography, plate making, deposition, bonding, etching, and measurement in micro-nano processing. The micro-nano processing factory facilities include but are not limited to the chilled water system, power system, air conditioning and exhaust system, process exhaust system, wastewater system, pure water system, gas supply system, and chemical supply system.

[0124] In addition, the data module 104 can also be used to establish an association mapping table between the operation data and the display area of the virtual information, and synchronize all the operation data in the constructed 1:1 3D space model to achieve binding and synchronization. Exemplarily, the data to be displayed is extracted and built into Arkit (an AR development platform). In response to the developer clicking on the display area of the virtual information, a data box pops up for the developer to select the corresponding data to be displayed, and an association mapping table is established. Then the system automatically pushes real-time data to Arkit and realizes docking and real-time pushing through webAPI (web Application Programming Interface).

[0125] The information management system 100 of the micro-nano processing experimental platform provided by the embodiments of the present invention can be used as a training platform for technicians in addition to operation and maintenance. The trainees can include in-school students, enterprise users, operation and maintenance personnel, etc. In the actual scenario of the operation of the lithography machine, through this system, the trainees can view videos such as the corresponding structural position of the lithography machine, the internal operation process video, and the lithography principle. Learning by combining theory with the corresponding actual scene will have better perception and memory, and there is no need for a teacher to give on-site explanations.

[0126] In actual situations, due to the open nature of the micro-nano processing experimental platform in universities, there are a large number of users with diverse professional backgrounds and high mobility, making it difficult to manage personnel. Coupled with the strict requirements of semiconductor processes for cleanliness, the users in the clean room need to wear full-body clean suits from head to toe, which increases the difficulty for on-site operation and maintenance personnel to obtain information about the users.

[0127] Based on this, the data module 104 can also be used to obtain and store the identity information data of the personnel in the micro-nano processing laboratory. Among them, the identity information data mainly includes the current location and identity information of the personnel in the micro-nano processing laboratory, such as the current reserved equipment information, equipment usage qualification information, identity type, and basic identity information, etc.

[0128] Among them, the personnel in the micro-nano processing laboratory include, but are not limited to, various types of personnel listed in this application such as visitors, trainees, operation and maintenance personnel, laboratory staff, and micro-nano processing personnel.

[0129] Each person in the micro-nano processing laboratory can wear a radio frequency card. After passing through the radio frequency identification device, the radio frequency card identifies the identity information data through the radio frequency identification device and stores the identity information data in the database. The data module 104 can then obtain the identity information data of the personnel in the micro-nano processing laboratory from the database. When identity information needs to be displayed (such as when management personnel need to view the identity information of the personnel in the micro-nano processing laboratory, or when a person in the micro-nano processing laboratory has violated the operation regulations and needs to quickly lock down the person), the rendering module 105 can superimpose the corresponding identity information on the real scene image according to the position of the personnel in the micro-nano processing laboratory.

[0130] Exemplarily, Figure 2 shows a display schematic diagram of a micro-nano processing process equipment. Combining Figure 2 , when the real target object is a micro-nano processing process equipment, taking a lithography machine as an example, when the operation and maintenance personnel wear the terminal device 106 and enter the real scene of the micro-nano processing test platform, they can see the lithography machine and the real-time running virtual parameters superimposed above the lithography machine. Among them, the real-time running virtual parameters include but are not limited to temperature, humidity, whether there is an alarm, whether each component is normal, etc. And the parameter display position matches the position of each structure of the lithography machine. For example, if the actual temperature inside the lithography machine cavity is 23±0.1°C, then there will be a line pulled out next to the cavity and the character "23±0.1°C" will be displayed. Thus, the operation and maintenance personnel can directly see the combination of the real scene and the corresponding parameters without having to retrieve the temperature parameters from the machine on site or search for the temperature parameters in the background system. There are many devices on site in the clean room and the noise is loud. When an abnormal situation occurs, such as when it is found that a person has violated the operation regulations regarding the lithography machine, it is difficult to quickly find the source of the alarm just by listening and looking on site. Therefore, assuming that the alarm module 102 issues an alarm message for a person's violation of the operation regulations regarding the lithography machine, the relevant responsible personnel can also see the alarm situation in the AR technology.

[0131] Figure 3 shows a display schematic diagram of a micro-nano processing factory facility provided by an embodiment of the present invention. As Figure 3 shown, taking the factory facility of the micro-nano processing factory as the factory pipeline as an example. Through the information management system 100, when relevant operation and maintenance data are displayed at the corresponding real-time relative position of the pipeline, the management personnel or operation and maintenance personnel can conveniently and intuitively see the corresponding information of the pipeline. For example, through the display of virtual information in the real scene, personnel can quickly understand that this pipeline is a compressed air pipeline, the size of the internal gas flow, the specific flow direction, the pipeline pressure value, whether there is a leakage situation, and so on. In addition, through the information management system 100, based on the superimposed display of virtual information related to equipment operation at the corresponding position in the real scene, trainees can directly match the pipeline and the pipeline information on site, thus eliminating the need to check back and forth in the background or have the teacher accompany and explain.

[0132] Without affecting the information acquisition of other personnel, or based on certain special circumstances, it is necessary to display the identity information of the personnel in the micro-nano processing laboratory. For example, when the management personnel want to quickly understand what types of personnel are currently in the laboratory, and when the personnel have not committed any violations (i.e., under normal circumstances), the intelligent push module 103 can quickly extract the first type of identity information from the identity information data of this personnel, and the rendering module 105 can quickly superimpose and display the first type of identity information at a preset position on the real-scene image of the corresponding personnel, such as above the current location.

[0133] Among them, if the displayed identity information is classified according to urgency or risk level, the first type of identity information can correspond to level 0 basic information. The first type of identity information can specifically include: such as personnel name, affiliated college (for on-campus personnel) / affiliated unit (for off-campus personnel) / , supervisor (for on-campus personnel) / in-school associated person in charge (for off-campus personnel), current reserved equipment name (including current reserved equipment and time period, safety risk), etc.

[0134] If the personnel has committed a violation, when the intelligent push module 103 receives the violation alarm information sent by the alarm module 102, it can quickly determine the second type of identity information that meets the preset display rules, and the rendering module 105 can quickly superimpose and display the second type of identity information at a preset position on the real-scene image of the corresponding personnel, such as above the current location or in the displayable area next to it, for the management personnel or relevant person in charge to quickly lock in on the relevant personnel.

[0135] Furthermore, for the confirmation and display of the second type of identity information, it can be as follows:

[0136] First of all, when the intelligent push module 103 receives the violation alarm information sent by the alarm module 102, it can determine the corresponding violation warning range based on the violation alarm information. For example, when the violating personnel is currently operating the equipment in violation, the area within a preset range centered on this equipment (such as within 3 meters) is used as the violation warning range. Or, for example, when the violating personnel is currently in an area where they have entered without authorization, the area where they entered or the area within a preset range centered on this violating personnel (such as within 3 meters) can be used as the violation warning range.

[0137] Then, based on the preset risk conditions, conduct a violation analysis of the violations within the violation warning range, determine the corresponding violation behavior level, and retrieve the warning display information and warning display form that match the violation behavior level from the data module 104.

[0138] Among them, the second type of identity information corresponds to the information at the time of generating a warning. According to the actual risk situation at the time of the violation, and still classified according to the urgency or risk level, the information that needs to be displayed above the violator when a violation occurs can be further divided into level 1, level 2, and level 3 warning display information.

[0139] Specifically, the warning risk corresponding to the level 1 warning display information is relatively low, only involving violations of equipment or area reservation rules. For example, assume that person A originally reserved equipment A for operation from 9:00 to 10:00, but the system detected that they operated equipment A from 7:00 to 8:00. At this time, the intelligent push module 103 receives the corresponding violation alarm information, quickly determines equipment A and its nearby area as the violation warning range. And analyzes the violation behavior occurring within the current warning range based on the violation alarm information and the detected on-site situation. Such as judging whether the behavior only involves violations of equipment or area reservation rules, and further judging whether an accident has occurred or whether an emergency situation has arisen. If it is judged that only the equipment or area reservation rules are violated and the warning risk is relatively low, the current violation behavior level is determined to be a level 1 warning risk. In this case, the level 1 warning display information that needs to be displayed for person A is a warning of inconsistent operation time and the contact information of equipment person in charge A. At this time, the level 1 warning display information corresponding to person A and matching the level 1 warning risk can be retrieved from the data module 104, and at the same time, the level 1 warning display information can be automatically pushed to the person in charge of equipment A.

[0140] Another example is that person B originally only reserved machine A but actually operated machine B. Through a similar analysis process as described above, it can be determined that the corresponding level of this violation behavior is also a level 1 warning risk. In this case, the level 1 warning display information that needs to be displayed for person B is a warning of inconsistent operation time and the contact information of equipment person in charge B. At this time, the level 1 warning display information corresponding to person B and matching the level 1 warning risk can be retrieved from the data module 104, and at the same time, it is automatically pushed to the person in charge of equipment B.

[0141] Similarly, assume that person C accidentally enters the electronic fence range without prior reservation or permission. In this case, the level 1 warning display information that needs to be displayed for person C is accidentally entering or no permission, and warnings such as evacuating in time, etc.

[0142] The warning risk corresponding to the Level 2 alert display information is medium, involving health damage to the equipment. For example, due to the improper operation of the current user on equipment C, equipment accidents such as debris, chip collision, and cavity contamination occur. At this time, the intelligent push module 103 receives the corresponding violation alert information and quickly determines equipment C and its nearby area as the violation alert range. And based on the violation alert information and the detected on-site situation, it analyzes the violation behavior occurring within the current alert range. First, it judges whether the behavior only involves violating the equipment or area reservation rules, and then further judges whether an accident has occurred or whether an emergency has arisen. If it is confirmed after judgment that it has caused health damage to the equipment (such as detecting debris within the violation alert range, detecting cavity contamination, or sudden abnormal equipment operation data, etc.), it is determined that the warning risk is medium, and the current violation behavior level is determined as a Level 2 warning risk. In this case, for the Level 2 alert display information to be shown, in addition to the information that needs to be shown for the Level 1 warning risk, it also needs to show the details of the misoperation, the contact information of the equipment responsible person, and at the same time show prompts that can solve the misoperation. For example, if a chip collision is caused due to the wrong operation sequence, the correct operation sequence can be shown to give real-time prompts. At the same time, the Level 2 alert display information can be automatically pushed to the equipment responsible person to inform the equipment responsible person to handle the on-site accident in a timely manner to avoid greater losses.

[0143] The warning risks corresponding to the Level 3 alert display information are relatively high and involve personal safety. For example, if the current user accidentally touches chemical liquid medicine, causing experimental accidents such as gas leakage from the machine, these accidents are likely to pose a threat to the personal safety of personnel. For example, personnel may faint, vomit, or even fall into a coma. At this time, the intelligent push module 103 receives the corresponding violation alert information and quickly determines the current user and the nearby area as the violation alert range. And based on the violation alert information and the detected on-site situation, it analyzes the violation behavior that occurs within the current alert range. For example, first judge whether the behavior only involves violating equipment or area reservation rules, and then further judge whether an accident has occurred or whether an emergency situation has occurred. If it is confirmed after judgment that an experimental accident has been caused and it may pose a threat to the personal safety of the current violator (such as detecting gas leakage from the machine, abnormal behaviors of personnel such as falling down or vomiting, etc.), it is determined that the warning risk is high, and the current violation behavior level is determined to be a Level 3 warning risk. In this case, for the Level 3 alert display information to be displayed, in addition to the information that needs to be displayed for Level 1 and Level 2 warning risks, it is also necessary to display information such as the person in charge of the machine and their contact information, emergency contact person and their contact information, and emergency treatment measures. For example, if it is detected that the current violator touches hydrofluoric acid, the emergency measures for hydrofluoric acid need to be popped up. For example, if it is detected that there is a chlorine leakage situation, the emergency measures for chlorine leakage need to be popped up. Through this real-time display method of emergency measures, it is possible to avoid the problem that the first person arriving at the scene does not know how to handle it correctly, or reduce the risks caused by improper handling. At the same time, it can also reduce the training cost for personnel, enabling laypersons or those with insufficient experience to quickly and intuitively understand how to handle emergency situations on-site without having to call or consult materials, which can speed up the handling time and further reduce the adverse effects caused by improper handling.

[0144] Finally, the alert display information is used as the second type of identity information, and through the rendering module 105, the second type of identity information is displayed in a corresponding alert display form at a preset position in the real-scene image of the location where the personnel in the micro-nano processing laboratory are currently located, such as the displayable area above or beside the current location. Thus, when a person violates the rules, based on the alert display information displayed at the preset position of the person, relevant responsible persons can quickly lock down the person who violates the rules in the laboratory, so as to stop it in time or deal with the violation behavior as soon as possible.

[0145] Among them, for the display interface of information display, in order to enable the personnel who can see the information to intuitively judge the urgency of abnormal situations occurring on site, the font background of the display interface can be set to be intuitively displayed with different color blocks. For example, for the display interface of the first type of identity information (i.e., level 0 basic information), the font background can be set to gray or transparent; for the second type of identity information, for the warning display information corresponding to level 1 warning risks, the font background is set to light blue, for the warning display information corresponding to level 2 warning risks, the font background is set to yellow, and for the warning display information corresponding to level 3 warning risks, the font background is set to red.

[0146] Furthermore, according to the actual situation on site, the information can be set for priority display. If the display space on site is sufficient to display all the information that needs to be displayed, then all the information can be set to be displayed. If the site space is limited and only part of the information can be displayed, then the higher-level warning display information can be set for priority display, and the lower-level warning display information can be temporarily folded and hidden. When the personnel need to view the folded lower-level warning display information, they can trigger the expansion by manually clicking.

[0147] Therefore, starting from the actual scenario, considering different situations that may occur in the laboratory, different information display contents and display methods related to personnel are correspondingly set. When it is necessary to quickly view the basic information of relevant personnel, or when abnormal situations occur on site or personnel violate regulations, corresponding information displays are set according to different risk levels or accident urgencies. When abnormal situations with higher risk levels occur, by increasing the information display of emergency measures, on-site personnel can make corresponding treatments more quickly and accurately based on the information prompts given by the emergency measures, avoiding greater losses. At the same time, corresponding priority information displays are set based on the risk levels, so that other on-site personnel can quickly obtain the relatively most critical information, further reducing the time required to handle on-site accidents and improving the handling efficiency.

[0148] Based on the above embodiments, the present application further discloses a method for danger warning of a micro-nano processing experimental platform. As an example, the method includes:

[0149] In the first state, at a preset position of the physical image of the laboratory staff, the first type of identity information is displayed, such as name, work unit, and laboratory role (see the aforementioned laboratory personnel types for details). In some implementable solutions, the first type of identity information further includes the equipment that can be visited, studied, and used, as well as the preset usage time. In some implementable solutions, the first type of identity information also includes the area of permitted activities; in some embodiments, when the first type of identity information in the first state is rendered and displayed on the terminal devices of other personnel, it is displayed on the basis of a first preset transparency background. That is, referring to Figure 4(b), the background of the information box has a certain transparency to avoid interfering with the line of sight of other personnel. It should be noted that the first preset transparency can be completely transparent or relatively high transparency. In specific implementation, according to the equipment and background color of the experiment, the transparency can be adjusted between 70% and 100%.

[0150] In the second state, the second type of identity information and warning information are displayed at a preset position of the physical image of the laboratory staff, and are rendered in a color different from that in the first state according to a preset rule.

[0151] The preset rule at least includes: judging the corresponding emergency or risk level in the second state, and when the first type of warning occurs, rendering the first type of identity information and warning information in a color different from that in the first state (see the foregoing content for the warning information content). In some implementation methods of this example, only the warning information is rendered differently, and after the alarm ends, the rendered warning information is stopped from being displayed.

[0152] When the second type of warning occurs, obtain the location information of the laboratory staff being warned, and according to the preset emergency measures, set up a warning range with the location of the warned event as the reference point and a duration of the preset time, and render the accident information and precautions for entering the warning range or safety measures that need to be taken on the warning range. In some specific implementation methods, the system further renders the safety measure situation of the approaching personnel on the warning range, and when the safety measures of the approaching personnel do not meet the requirements of the warning range, it is displayed and reminded on the warning range and pushed to the terminal device of the approaching personnel as a warning message.

[0153] It should be noted that the preset emergency measures can be determined according to different areas of the laboratory and the risk levels of the items used. That is to say, the relevant parts of the emergency measures are preset in combination with the laboratory management requirements and can be adjusted in real time according to the changes in laboratory management. It can be understood that the warning range and warning duration in the emergency measures change according to the laboratory accident situation, while the safety measures need to be preset in advance. For example, the protection level for entering personnel, the skills or equipment to be carried can be implemented based on other modules in the management system. For example, based on image recognition, or by obtaining the barcode information or RF chip information on the protection equipment and carried equipment for judgment, which will not be elaborated here.

[0154] When the third-level warning occurs, in some examples, the personnel status in the warning area is further obtained, and the rendering method is adjusted based on the personnel status. Specifically, it can include: obtaining the personnel status in the area, judging whether the safety measures of the personnel in the area are sufficient to meet the warning requirements. If not, the alarm information is rendered at the preset position and pushed to the terminal of the current person. See the second-level warning for the safety measures and warning requirements, and the preset position can be adaptively adjusted according to various types of information that have been rendered and displayed.

[0155] It should be noted that the preset rules further include the adjustment of the rendering display position. In some implementation manners, when obtaining information rendering from the perspective of other personnel terminals, it can be rendered above or beside the current person. In some implementation manners, when the current person falls to the ground, the rendering information is displayed above or below the current person's body. In some implementation manners, according to the warning requirements, when various types of information are superimposed, the alarm information is displayed in the front and is displayed with a solid-color opaque background to avoid superimposition and occlusion.

[0156] It should be noted that the preset rules further include the adjustment of the transparency of the rendering interface. In some implementation manners, when the second-type identity information or alarm in the second state is rendered and displayed on other people's terminal devices, it is displayed on the basis of the second preset transparency or an opaque solid-color background. That is, referring to the information boxes of different colors in Figure 4(b), the background has a certain transparency, but the transparency is relatively low. In some implementation manners, the second preset transparency is 40% - 70%; it should be noted that when setting, the second preset transparency is less than or equal to the first transparency.

[0157] In some embodiments, when the second type of alert and the third type of alert occur in the second state, the transparency of the corresponding rendering information background box is further reduced. That is, under the second type of alert and the third type of alert, the third preset transparency is executed, and the third preset transparency is 60% - 100%. For example, in some cases, the transparency is 100%, that is, the rendered information is displayed on a completely opaque background. It should be noted that the third transparency is less than the first and second transparencies.

[0158] It should be noted that the preset rules further include the adjustment of the rendering interface color. In some specific embodiments, before the alert display and prompt rendering in front of the user's terminal device, the colors and light intensities of the devices and the environment around the person whose identity information and warning information are to be rendered are obtained, and the colors of the identity information, warning information, and the background box are adjusted according to the colors of the devices and the environment.

[0159] In some specific embodiments, the first, second, and third preset transparencies are adjusted according to the colors of the devices and the environment at the same time. For example, in some specific examples, when the reflectivity of the devices around the person whose identity information and warning information are to be rendered is relatively high, a background with a lower transparency is used for rendering, or a background with a low transparency and bright pure color is used for rendering.

[0160] Exemplarily, FIG. 4(a) shows a simple display schematic diagram of personnel in a micro-nano processing laboratory provided by an embodiment of the present invention. As can be seen from FIG. 4(a), since in the clean room, personnel all need to wear clean clothes, hats, masks, and gloves, it is difficult to distinguish each other. Through the information management system 100, the virtual information superimposed on the heads of the corresponding personnel can be seen. It includes name, unit, which equipment is reserved, etc. It is convenient for on-site personnel management. At the same time, since there are many users of the open platform, including students, off-campus scientific research institution personnel, enterprise personnel and other different types of users. Managers or operation and maintenance personnel can also match the actually entered reservation-related information through these visually displayed information to confirm whether the user has a reservation, whether there is a situation of appearing in an area where they should not appear, using equipment without prior reservation, equipment use errors, entering the clean room without reservation, etc.

[0161] Figure 4(b) shows another display schematic diagram of personnel in the micro-nano processing laboratory provided by the embodiments of the present invention. As can be seen from Figure 4(b), for different violations and different levels of safety risks, the warning display information corresponding to the personnel and the specific information display methods are different. For example, the information corresponding to different warning risk levels is displayed with different font backgrounds and different transparencies. Taking an actual scenario as an example, during the operation of relevant equipment by equipment users, managers or operation and maintenance personnel can also view information such as the identity information of these personnel, the equipment currently in use, and the usage time through the terminal device 106 at any time, so as to quickly understand the personnel information and equipment usage situation in the current laboratory.

[0162] Through the above information display setting method for personnel in the micro-nano processing laboratory, even if visitors do not enter the laboratory, they can quickly understand the personnel structure of the laboratory and important information related to personnel through VR or AR glasses or other available terminal devices from the outside. For example, through the personnel information display method provided by the embodiments of the present invention, when school leaders or off-campus leaders visit, even if the personnel in the laboratory are "fully armed" from head to toe, the management ability of the laboratory for complex personnel can be quickly demonstrated to them.

[0163] For the identification and tracking module 101, first of all, the identification and tracking module 101 can be used to calculate the real-time relative position between the real target object and the display area of the virtual information according to the spatial position and angle of the terminal device 106 and the 3D space model. That is, the spatial position and angle of the terminal device 106 in the real environment are real-time located, and the real-time relative position between the real device and the display area of the virtual information is calculated.

[0164] Furthermore, the identification and tracking module 101 can also be used to obtain the identity information data of the personnel in the micro-nano processing laboratory in the monitoring area, and real-time track the activity locations of the personnel in the micro-nano processing laboratory and their operation behaviors on the equipment. The identity information data includes:

[0165] The identity type of the personnel in the micro-nano processing laboratory, at least including whether the personnel are school-inside personnel or off-campus personnel. School-inside personnel can be further divided into laboratory staff, members of each experimental team, and students of each grade. Off-campus personnel can be further divided into enterprise users, suppliers, visitors, etc.

[0166] Basic identity information. For example, for school-inside personnel, it can include information such as name, student number, campus (such as Qingshuiwan / Guangzhou), and tutor's name. For off-campus personnel, it can include information such as the person's name, company or unit name, school invitation person or in-school associated person in charge, etc.).

[0167] Current reservation device information, such as the reserved device, the corresponding active range area (current reservation range), available time period, etc.

[0168] Equipment usage qualification information, for example, for on-campus personnel, it can be a list of machines that have passed the assessment; for off-campus personnel, if they are corporate users, it can be a list of machines that have passed the assessment; if they are suppliers, it can be supplier certificates or equipment-related professional qualification certificates and other information.

[0169] Education or work background information, for example, from the platform database, obtain the education information of the personnel entering the laboratory, including major, academic qualifications, etc., and obtain the work background information of the personnel entering the laboratory, including brief work experience, etc.

[0170] Based on one or more of the above-mentioned identity type, basic identity information, current reservation device information, device usage qualification information, education or work background information, violation monitoring or information push is performed.

[0171] Furthermore, in order to better manage different types of personnel, corresponding direct or indirect persons in charge can be set for different types of personnel according to actual conditions, so that when abnormal situations occur or personnel violate regulations, the corresponding persons in charge of the violators can be quickly identified to achieve more standardized personnel management.

[0172] For example, for people on campus, the person in charge of the reserved device can be regarded as the first-category person in charge, and the person in charge of the device within the preset range of the person’s current location (such as within a radius of 3 meters) or the device used by the person in violation of regulations without authorization or reservation can be regarded as the second-category person in charge. The first-category person in charge and the second-category person in charge can be regarded as the corresponding persons in charge for the person on campus.

[0173] For off-campus personnel, the person in charge of the reserved device can be regarded as the first-category person in charge, the person invited by the school (i.e. the on-campus related person in charge of the off-campus personnel), the person in charge of the devices within the preset range of the person’s current location (such as within a radius of 3 meters) or the person in charge of the devices used by the person in violation of regulations without authorization or reservation, and the person closest to the off-campus personnel can be regarded as the second-category persons in charge. The first-category person in charge and the second-category person in charge can be regarded as the corresponding persons in charge of the off-campus personnel.

[0174] Thus, when a person in the micro-nano processing laboratory of the corresponding type performs an illegal operation, the illegal information can be quickly sent to the relevant person in charge to promptly stop the illegal operation of the person. In particular, when the person who violates the regulations is an off-campus person, the corresponding school inviter can also be quickly determined, so that the management personnel can determine whether to regard the school inviter as the joint person in charge of the person who violates the regulations according to the actual situation and bear part of the responsibility for the current illegal act.

[0175] In a specific implementation, the alarm module 102 can also be used to: extract the person in charge corresponding to the equipment currently reserved by the micro-nano processing laboratory personnel from the basic identity information as the first type of person in charge; determine the second type of person in charge corresponding to the micro-nano processing laboratory personnel according to the identity type.

[0176] Specifically, determining the second type of person in charge for different types of micro-nano processing laboratory personnel can be: when the micro-nano processing laboratory personnel are the first type of personnel (i.e., on-campus personnel), the alarm module 102 can identify and determine the first target equipment corresponding to the current location of the first type of personnel through the identification and tracking module 101, and obtain the equipment person in charge corresponding to the first target equipment from the data module 104 as the second type of person in charge; when the micro-nano processing laboratory personnel are the second type of personnel (i.e., off-campus personnel), extract the in-school associated person in charge from the basic identity information of the second type of personnel, identify and determine the second target equipment corresponding to the current location of the second type of personnel and the person closest in distance through the identification and tracking module 101, and take one or more of these personnel as the second type of person in charge.

[0177] In actual situations, there will usually be cases where micro-nano processing laboratory personnel have reserved to visit a certain area or as an equipment movable area, but due to unexpected situations on-site or for other reasonable needs, they need to visit or operate equipment in another area (which has not been reserved in advance). At this time, the micro-nano processing laboratory personnel can send a request for temporary opening of permissions for the unreserved area to the relevant person in charge. After receiving the request, the relevant person in charge can give temporary authorization or refuse authorization according to the actual situation.

[0178] Specifically, the identification and tracking module 101 can also be used to: when receiving a temporary permission opening request sent by a personnel in the micro-nano processing laboratory, determine the corresponding temporarily opened area and the person in charge of the temporarily opened area for the temporary permission opening request; send the temporary permission opening request to the person in charge of the temporarily opened area; after receiving the temporary opening approval instruction returned by the person in charge of the temporarily opened area, send the temporary opening approval information to the terminal device 106 of the personnel in the micro-nano processing laboratory, and record the device operation information and / or visit record information of the personnel in the micro-nano processing laboratory. Assuming that due to confidentiality or other factors, the person in charge of the temporarily opened area does not grant the temporary authorization, a rejection authorization instruction can also be sent to the terminal device 106 of the personnel in the micro-nano processing laboratory.

[0179] In addition to the above situations, there may also be a situation where a personnel in the micro-nano processing laboratory has reserved a certain device but wants to operate a device that has not been reserved in advance. When there is an available reservation time slot for this device, or the scheduling of this device is full, but there is no one operating it at this time (that is, this device is currently unused), the personnel in the micro-nano processing laboratory can also send a temporary operation request for this unreserved device in advance to the relevant person in charge. After receiving the request, the relevant person in charge can grant or reject the temporary authorization according to the actual situation.

[0180] Specifically, the identification and tracking module 101 can also be used to: when receiving a temporary device operation request sent by a personnel in the micro-nano processing laboratory, determine the corresponding temporarily requested device and the person in charge of the temporarily requested device; obtain the reservation application data of the temporarily requested device from the data module 104, and determine the current reservation situation of the temporarily requested device through the reservation application data; when detecting that the temporarily requested device is currently unused, send the temporary device operation request to the person in charge corresponding to the currently operating device and the person in charge of the temporarily requested device; after receiving the temporary application approval instruction returned by the person in charge corresponding to the currently operating device and / or the person in charge of the temporarily requested device, send the temporary application approval information to the terminal device 106 of the personnel in the micro-nano processing laboratory, and record the device operation information of the personnel in the micro-nano processing laboratory. Similarly, assuming that neither the person in charge corresponding to the currently operating device nor the person in charge of the temporarily requested device grants the temporary operation authorization, a temporary operation rejection authorization instruction can also be sent to the terminal device 106 of the personnel in the micro-nano processing laboratory.

[0181] In another possible situation, assuming that there are idle devices with no current tasks, the device idle information can also be sent to the terminal devices 106 of the personnel in the micro-nano processing laboratory within the monitoring area to inform these personnel that there are idle devices in the current laboratory, and they can apply for operation if there is a need for use.

[0182] The recognition and tracking module 101 can also be used to: when it is detected that there is an idle device without an executing task in the monitoring area, generate temporary authorization opening information for the idle device; and send the temporary authorization opening information to the terminal devices 106 of all micro-nano processing laboratory personnel in the monitoring area, so that the micro-nano processing laboratory personnel in need can send a device usage request to the person in charge corresponding to the idle device.

[0183] The alarm module 102 is used to generate a violation alarm message and send it to the person in charge when it is detected based on the identity information data that the activity location of the micro-nano processing laboratory personnel and / or the operation behavior of the device meet the preset violation conditions.

[0184] In an alternative embodiment, different violation alarm messages can be generated according to different violation types. Specifically, based on the preset electronic fence, and the activity area (activity location) of the micro-nano processing laboratory personnel tracked by the recognition and tracking module 101, and / or the operation behavior of the device, when it is detected that the micro-nano processing laboratory personnel are outside the current reservation range and within the range that requires reservation, an out-of-range violation alarm message can be generated by the alarm module 102; when it is detected that the micro-nano processing laboratory personnel are operating other devices that do not match the device usage qualification information, a device violation operation alarm message is generated.

[0185] Furthermore, the alarm module 102 can also be used to push the violation alarm message to the first type of person in charge and the second type of person in charge determined based on the identity information data, so that the relevant person in charge can handle the violation situation in a timely manner. In specific implementation, in order to deal with different device violation situations, when the violation alarm message contains a violation behavior related to the currently reserved device, the first type of person in charge can be used as the main person in charge (direct person in charge); when the violation alarm message contains a violation behavior related to the target device corresponding to the current location of the micro-nano processing laboratory personnel, the second type of person in charge can be used as the main person in charge (direct person in charge).

[0186] Thus, when the violation alarm message contains a violation behavior related to the currently reserved device, the alarm module 102 can push the corresponding violation alarm message to both the first type of person in charge and the second type of person in charge, and additionally send a key reminder message to the first type of person in charge to remind the first type of person in charge to handle the violation behavior in a timely manner. When the violation alarm message contains a violation behavior related to the target device corresponding to the current location of the micro-nano processing laboratory personnel, the alarm module 102 can push the corresponding violation alarm message to both the first type of person in charge and the second type of person in charge, and additionally send a key reminder message to the second type of person in charge to remind the second type of person in charge to handle the violation behavior in a timely manner.

[0187] In a preferred embodiment, when the alarm module 102 determines that a violation has occurred, it further obtains the location of the person committing the violation and determines the person who meets the relevant conditions and is closest to the location of the person committing the violation as the authorized management personnel. The authorized management personnel may be laboratory maintenance personnel or laboratory staff with management authority.

[0188] In a more preferred embodiment, the alarm module 102 may further obtain multiple laboratory staff within a certain range, and determine the authorized management personnel responsible for on-site management according to the work progress registered by the multiple laboratory staff in the laboratory. For example, different priorities are determined according to the work situation. The first type of priority is the personnel identity. Within the preset range, the laboratory maintenance personnel are preferentially used as the authorized management personnel on-site. Secondly, the laboratory staff responsible for on-site explanation, tour guidance, and completion of the previous stage of work are further used as the authorized management personnel. Thirdly, according to the work experience of the laboratory staff in the laboratory, within the preset range, the laboratory staff with more work experience are preferentially used as the authorized management personnel. Thus, the personnel are determined according to the priority and distance, and the finally determined authorized management personnel are used as the third type of person in charge.

[0189] In an implementable solution, specific coefficients are assigned to the priority and distance of the authorized management personnel, and calculations are performed through the specific coefficients, and the authorized management personnel with the highest score is used as the final authorized management personnel.

[0190] In an implementable manner: Assume that the distance is L, and the distance parameter is A; the value when the person is a laboratory maintenance personnel is X, and the value when the person is a laboratory staff responsible for on-site explanation, tour guidance, and completion of the previous stage of work is Y; the work experience is E, and the work experience parameter is B. Then, when the alarm occurs, the priority score for each authorized management personnel is calculated as: L*A + X + E*B or L*A + Y + E*B.

[0191] The alarm module 102 can also be used to simultaneously push the violation alarm information to the above-mentioned third type of person in charge determined based on the identity information data, so that the violation situation can be confirmed and processed in a timely manner.

[0192] More specifically, in order to achieve more targeted alarm information push, the alarm module 102 is specifically used for: when the micro-nano processing laboratory personnel are first-category personnel, the violation alarm information is pushed to the first-category person in charge and the person in charge corresponding to the first target device; when the micro-nano processing laboratory personnel are second-category personnel, the violation alarm information is pushed to the first-category person in charge, the related person in charge within the school, the person in charge corresponding to the second target device, and the nearest person. Furthermore, the nearest person can be the third-category person in charge determined by the aforementioned method, that is, the authorized manager, and the information of the related person in charge within the school is pushed to the authorized manager.

[0193] In combination with the above content, it can be known that the second type of personnel referred to in the embodiment of the present invention can mainly include off-campus personnel such as visitors, corporate users and suppliers. For the two different types of off-campus personnel, corporate users and suppliers, the corresponding equipment use qualification information is also different. Among them, the equipment use qualification information corresponding to the corporate user may include equipment independent operation qualification information, and the equipment use qualification information corresponding to the supplier may include professional qualification certificate information.

[0194] Therefore, for the judgment of the violation of the scope by the non-school personnel, the alarm module 102 can be used to generate the alarm information of the violation of the scope when it is detected that the visitor, the enterprise user, or the supplier appears in the range of the device that does not belong to the currently reserved device. In particular, for the judgment of the violation of the use of the device by the two non-school personnel, the enterprise user and the supplier, the alarm module 102 can be used to generate the alarm information of the violation of the device operation when it is detected that the enterprise user is operating other devices that do not match the independent operation qualification information of the device, or when it is detected that the supplier is operating other devices that do not match the professional qualification certificate information.

[0195] Furthermore, for violation cancellation, the alarm module 102 is also used to: upon receiving a temporary authorization instruction sent by the first-category person in charge, the second-category person in charge, or the authorized manager through the terminal device 106, or a violation cancellation instruction, cancel the violation alarm and record the violation information of the time.

[0196] In order to enable those skilled in the art to better understand the technical solution of the present invention, the relevant modules introduced in the above embodiments are auxiliary explained through several specific examples.

[0197] As can be seen from the foregoing, when a person is detected in the monitoring area, the identification and tracking module 101 can automatically match whether the identity information data corresponds to the actually pre-stored reservation information. When there are violation points (such as not making a reservation or appearing near an unreserved area / device), a warning or push is made through the alarm module 102. At the same time, the intelligent push module 103 can determine the warning display information to be displayed based on the preset display rules, and the rendering module 105 can display the corresponding warning display information at a preset position (such as above the current location) in the real-person image of the person, so that the management personnel or operation and maintenance personnel can quickly understand the violation points or violation operation information of the person.

[0198] Exemplarily, assume that a student originally reserved machine 1 but appears within the area range (such as an electronic fence) of machine 2. And the student did not reserve machine 2 on that day. Then the alarm module 102 can generate an out-of-range violation alarm message and automatically push the out-of-range violation alarm message to the student's direct supervisor (tutor or experimental teacher) and the person in charge of machine 2. The received manager can conduct an investigation based on the violation alarm message. For example, the person in charge of the device can judge based on experience whether it is reasonable for the student to appear within the electronic fence of machine 2. For example, the student is temporarily studying on machine 2 or studying under the guidance of the tutor. When receiving the authorization instruction from the terminal of the direct supervisor or the person in charge of the device, the violation alarm is lifted according to the position record of the direct supervisor or the person in charge of the device as on-site authorization or on-site exclusion of violation information, remote authorization. However, the alarm module 102 will record the violation information, on-site images, and operation records for subsequent review or information collation by the management personnel or operation and maintenance personnel.

[0199] It should be noted that there are various types of machines in the laboratory according to confidentiality permissions or operation permissions. When the on-site or remote authorization of the direct supervisor or the person in charge of the device for the student conflicts with the permissions, the authorization will be refused and the reason for refusal information will be returned to the terminals of the direct supervisor or the person in charge of the device and the student. That is, when receiving the authorization instruction from the management terminal, it is judged whether the authorization instruction meets the confidentiality permission or operation permission requirements according to the authorized personnel information. If it meets the requirements, the authorization is passed. When it does not meet the preset rules, the alarm module 102 returns a refusal message containing the reason.

[0200] As a specific example, confidentiality rights include rights to visit or use the current area or equipment, and rights to operating information during equipment execution (for example, the equipment includes the team's test processes and data that have not yet been made public and need to be kept confidential); rights to visit or use can be determined based on basic identity information or equipment usage qualifications to determine different preset level requirements; rights to operating information during equipment execution are determined according to the level and settings of the using team, and can be set to preset level requirements for different operating information such as public to team members, public within the laboratory, public to school personnel, and public to the outside world. When the alarm module 102 receives area or equipment authorization information for authorized personnel, it compares the identity information of the authorized personnel with the preset level requirements of the area or equipment, and authorizes or returns unauthorized information.

[0201] In addition, suppose that the student needs to use machine 2 temporarily due to some needs during the use of machine 1. However, the student did not make an appointment for machine 2 in advance. Suppose that there is a situation where a temporary appointment cannot be made on site or machine 2 has been reserved by others, but no one is currently using machine 2. At this time, the student can send a temporary operation request to the person in charge of machine 1 and machine 2 obtained from the information management system 100 through the terminal device 106, and provide the specific reservation device and the corresponding reservation time period. When the person in charge confirms and agrees, the authorization instruction is sent to the information management system 100 through the management terminal, and the information management system 100 sends a temporary application approval information to the student's terminal device 106, and the approval information includes the specified time range information and machine operation requirements. At this time, the student can use machine 2 under the guidance of the machine operation requirements within the specified time range. During the device operation process, the system can record the student's device operation information.

[0202] For equipment operation, it is assumed that the student has passed the assessment of machine 1, that is, he is qualified to use machine 1 independently. If the student is independently operating a machine other than machine 1, it means that he is operating in violation of regulations. Then the alarm module 102 will generate equipment violation operation alarm information, and push the equipment violation operation alarm information to the person in charge of machine 1 and the person in charge of other machines that the student is operating. Then the person in charge will make a judgment and handle it based on the actual situation, and determine whether to open temporary authorization or cancel the violation. Regardless of the handling method adopted, the alarm module 102 will record the violation information.

[0203] Furthermore, the identity information of on-campus personnel may also include portrait information, including students' historical reservation records and violation records, as well as operation data or violation records based on actual records. At the same time, students can be further classified into novice users, proficient users, or users requiring key attention. In actual situations, management personnel can, based on the above information of the student, judge the student's learning or operation situation, analyze which equipment is prone to violations and errors during operation, and provide key guidance or attention during subsequent training or operation.

[0204] When the person viewed by the identification and tracking module 101 is an off-campus person (such as an enterprise user, a supplier, a visitor), the basic information that can be displayed mainly includes: basic identity information, including the person's name, company name, school invitation person (on-campus associated person in charge), etc.; current reserved equipment information, including the currently reserved equipment and time period, the person in charge of the currently reserved equipment, the laboratory safety officer, other equipment reserved on the same day and the time, the entry time period and the entry area, etc.; if the person is not a visitor, equipment usage qualification information can also be included. For enterprise users, the equipment usage qualification information can be equipment independent operation qualification information, corresponding to the list of machines that have passed the assessment, that is, the list of equipment with independent operation qualification. For suppliers, the equipment usage qualification information can be professional qualification certificate information, that is, the supplier's certificates and professional qualification information, such as "Special Operation Permit".

[0205] Similar to on-campus personnel, when it is detected that a person appears in the monitoring area, the system can automatically match whether the above information corresponds to the actual pre-stored reservation information. When there are violation points (such as not having a reservation or appearing near an unreserved area / equipment), a warning or push message is sent, and the corresponding violation information can be simultaneously displayed above the person for management personnel or operation and maintenance personnel to quickly understand the violation points of the person.

[0206] Exemplarily, assume that the supplier was originally supposed to replace spare parts on Machine 1 but appears within the area (such as an electronic fence) of Machine 2, and the supplier did not reserve Machine 2 on the same day. Then the alarm module 102 can generate an out-of-range violation alarm message and automatically push the out-of-range violation alarm message to the equipment responsible persons of Machine 1 and Machine 2, the school invitation person corresponding to this person, and the person closest in distance (or the equipment responsible person closest in distance). The relevant responsible persons can judge based on experience whether it is reasonable for the supplier to appear within the electronic fence of Machine 2 at the current time. After on-site authorization or exclusion of the violation information, this violation alarm is lifted, but the alarm module 102 will record the violation information for management personnel or operation and maintenance personnel to conduct subsequent reviews or information collation. To avoid duplicate processing, if someone among the notified persons has already given a processing result, the result can be automatically pushed to other persons and the alarm can be terminated.

[0207] Accordingly, if a user originally applied to work in maintenance area A, but due to an emergency at the scene or certain requirements (such as needing to view parameters or temporarily retrieve items not in area A), the user needs to go to maintenance area B. At this time, the user can also send a temporary opening authorization application for the area to the person in charge of maintenance area B through the terminal device 106. In addition, the user can also send a temporary opening authorization application to the school invitation person, and indirectly apply to the person in charge of maintenance area B through the school invitation person. After the person in charge of maintenance area B actually confirms and agrees, a temporary opening approval instruction can be issued, sending temporary opening approval information to the user's terminal device 106, and recording the device operation information of the user within the permitted range, and / or visit record information.

[0208] Similarly, assuming that the authorized visiting area for a visiting person is the second floor, but the visiting person appears on the third floor (i.e., outside the currently authorized visiting range), the alarm module 102 will also generate an out-of-range violation alarm message, and hand it over to the school invitation person or the area range authorizer for handling through the same steps as above. The school invitation person or the area range authorizer will decide whether to temporarily increase the visiting area for this person.

[0209] Regarding the equipment operation situation of enterprise users, assume that the enterprise user has passed the assessment of machine 1, that is, it has the independent use qualification of machine 1. If the enterprise user is independently operating other machines other than machine 1, it means that the user is operating illegally. Then the alarm module 102 will generate an equipment illegal operation alarm message, and push the equipment illegal operation alarm message to the person in charge of machine 1, the person in charge of other machines that the enterprise user is operating, the school invitation person, and the person closest in distance (authorized management personnel or the person in charge of the equipment closest in distance), so as to stop or temporarily open the authorization for this illegal behavior in a timely manner. Then the person in charge makes a judgment and handling based on the actual situation to determine whether to open a temporary authorization or lift the violation. Regardless of the handling method adopted, the alarm module 102 will record the violation information.

[0210] There are a large number of flammable, explosive, toxic, and harmful chemicals and gases in the micro-nano processing experimental platform in this application, and the operating environment is special. Therefore, there are necessary requirements for the professional qualifications of relevant supplier maintenance personnel. For example, for supplier personnel replacing gas cylinders, they need to hold a "Special Operation Operation Certificate", and for suppliers using acetone, sulfuric acid, and hydrochloric acid, they need to hold an "Acetone, Sulfuric Acid, Hydrochloric Acid Operation Certificate", etc. Similarly, if the person does not have this certificate in their virtual information, it means that the person is operating illegally. By performing the relevant steps mentioned above, the corresponding alarm message is generated and pushed to the corresponding person in charge for the corresponding person in charge to take timely handling actions.

[0211] Furthermore, the identity information of off-campus personnel may also include portrait information, including the historical reservation records and violation records of off-campus personnel, and at the same time based on the actual recorded operation data or violation records. In particular, enterprise users or suppliers can be further divided into novice users, skilled users, or key users of concern. In actual situations, managers can judge the operation situation of the user based on the above information of the user, and can give key guidance or attention during subsequent device operations.

[0212] The intelligent push module 103 is used to obtain the personnel identity data corresponding to the terminal device 106 (mainly the specific personnel type corresponding to the personnel using the terminal device 106), and automatically match the virtual display data related to the personnel identity data from the data module 104. Then, the virtual display data can be superimposed on the real-time relative position of the real scene image through the rendering module 105. That is, based on the association mapping table, the operation data corresponding to the display area of the virtual information is superimposed on the real-time relative position of the real scene image to obtain the rendered image.

[0213] For example, in view of the actual situation, the personnel types of the personnel in the micro-nano processing laboratory can be specifically divided into management personnel, visitors, trainees, and equipment users. Further, for the personnel characteristics of these different types of personnel, starting from different information display focuses, different types of display data associated with these personnel characteristics can be generated based on the virtual anchor data of the real target object (i.e., the object that needs to display virtual information). During the subsequent intelligent information push process, different virtual display data are triggered by the obtained personnel types. Thus, through the intelligent push module 103, personalized information push and display can be performed based on the actual personnel types of the personnel in the micro-nano processing laboratory.

[0214] Specifically, for the generation of different types of display information, the intelligent push module 103 is specifically used to: determine the real scene images of all real target objects within the current visible range of the terminal device 106, and at least one virtual anchor corresponding to the real scene image for displaying information; for each virtual anchor, retrieve the virtual anchor data corresponding to the virtual anchor from the data module 104, and respectively generate the first type of display data, the second type of display data, the third type of display data, and the fourth type of display data according to the virtual anchor data.

[0215] Among them, the first type of display data includes the device operation data within the current visible range of the terminal device, the device management estimated data, and the data being viewed by visitors or trainees. The second type of display data includes different types of recommended information generated for visitors based on different personal background characteristics (such as technicians, industry insiders, and industry outsiders). The third type of display data includes different levels of training content data generated for trainees based on different ability levels (such as dividing the ability levels into primary, intermediate, and advanced based on training ability). The fourth type of display data includes different levels of device-related data generated for device users based on different device operation levels (such as dividing the operation levels into primary, intermediate, and advanced based on device operation ability or relevant device operation certificates).

[0216] For the intelligent push of information, in a specific implementation, when the personnel type is a management staff, the intelligent push module 103 can specifically be used to: directly use the first type of display data as the virtual display data automatically pushed to the management staff.

[0217] Exemplarily, when the person viewing the AR is a management staff, the corresponding permission level of this person is the highest. They can not only view any information in the laboratory but also view the information that trainees and visitors can see.

[0218] Among them, the device operation data can include the current operation data, the comparison result of the current operation data and the normal value, and the historical operation data.

[0219] Specifically: The displayable data within the current visible range of the management staff can include: Current operation data: For example, display the current power, exhaust air volume, gas flow rate, pressure, waste water and waste gas discharge flow rate, various parameters of device operation, device alarm information, etc.

[0220] The comparison result of the current operation data and the normal value: For example, assume the current pressure value is 200 pa, which is within the normal range of 100 - 300 pa, then display "The pressure value is normal". If you want to further view the specific details, you can trigger the data display by clicking with your finger to view the detailed operation parameters.

[0221] Historical operation data: For example, display the historical data curve graph (such as you can view the pressure value curve graph within the recent 6 months), fault records, historical maintenance records (including written descriptions, drawings, videos, exploded view schematic diagrams of maintenance improvement points, etc.), records of replaced parts or consumables, etc.

[0222] Estimated data and estimated reminders: According to the specific maintenance types of the equipment, the relevant data can be classified more meticulously, such as being divided into regular maintenance types, regular repair types, technical upgrade types, and accident emergency types, to facilitate quick retrieval and viewing by personnel. In addition, the data of these different maintenance types can also be displayed to operation and maintenance personnel or equipment users according to actual needs.

[0223] For the implementation of the display interaction function, managers can obtain the content currently viewed by visitors or trainees at any time through the terminal device 106. Based on the currently viewed content, judgments are made, such as judging whether it is necessary to display the operation and maintenance data in the current situation in a short time according to the richness of the currently displayed information or the necessity of displaying operation and maintenance data. If so, the operation and maintenance data is obtained from the data module 104 through the management terminal, and the operation and maintenance data is pushed to the terminal devices of visitors or trainees through the intelligent push module 103, and then the information is displayed through the rendering module 105. Through this intelligent push method, it can be avoided that visitors and trainees obtain too much data at the data anchor points and miss or overlook more important operation and maintenance data.

[0224] In addition, operation and maintenance personnel can also be regarded as managers to a certain extent. For operation and maintenance personnel, they can be further divided into plant operation and maintenance personnel and equipment operation and maintenance personnel according to actual situations. For plant operation and maintenance personnel, the plant information corresponding to the display device is mainly pushed, such as power consumption, exhaust air volume, gas flow and pressure, wastewater and waste gas discharge flow, etc. For equipment operation and maintenance personnel, the important parameters and alarm information of the display device operation are mainly pushed.

[0225] When the personnel type is a visitor, the intelligent push module 103 is specifically used to: obtain the personnel background information of the visitor from the data module 104, and screen out the information with the highest recommended matching degree with the personnel background information from the second type of display data as the virtual display data for automatic push and priority display.

[0226] Specifically, when the person viewing AR is a visitor, the academic background and visit purpose of the person can be obtained from the data module 104, and according to the personnel background information, for different visitors, the information that the other party may be more interested in is screened and pushed intelligently and differentially from the second type of display data.

[0227] Exemplarily, according to the personnel background information, visitors can be mainly divided into technical personnel, industry insiders, and industry outsiders.

[0228] Among them, for technical personnel who may be more interested in the parameter information of the equipment itself, the parameters, operation data, clean room environment parameters, corresponding technical difficulties and key points, patent information, etc. of the display device can be preferentially and intelligently pushed.

[0229] For those who may be more interested in the development of the industry, we can give priority to intelligently push information about the development of the industry, industry development comparison, the originality of this experimental platform or equipment, existing cooperation models, cooperation cases, etc. You can also choose whether to push information such as the parameters of the display device according to the actual situation.

[0230] For those outside the industry who are not familiar with the relevant technologies in this field, scientific information about micro-nano processing can be pushed and displayed intelligently first. For example, information such as the relevance of micro-nano processing products and life, the parameters and purchase status of lithography machines, how to ensure clean temperature and humidity in clean rooms, and the structural design of semiconductor laboratories can be pushed.

[0231] In addition, the intelligent push module 103 can also obtain the visitor's authority and give priority to push display of different levels of information. For example, for teachers on campus, students on campus, off-campus research institutes, corporate visitors, government visitors, investors, etc., different focuses can be displayed according to the personnel's authority.

[0232] At the same time, the intelligent push module 103 can also obtain the visitors' points of interest and interact based on the points of interest. For example, during the visit, the intelligent push module 103 can intelligently push a list of information that the visitors may be interested in at an appropriate time point (such as when there is no content currently displayed, or when the content currently displayed has been displayed for a long time), and display it in front of the visitors through the rendering module 105.

[0233] Visitors can select the information they want to see or hear by voice from the information list by clicking on the specific items of interest in the information list within the scope of their authority. Then the intelligent push module 103 can retrieve the information selected by the visitor from the data module 104 and display it through the rendering module 105.

[0234] If the visitor is not interested in the pushed information, he can also click "skip" with his finger. At this time, the intelligent push module 103 can select other information lists that may be of interest to push to the visitor again for the visitor to choose again. If the "skip" operation is performed several times (such as 3 times), the information intelligent push mode is temporarily put away, and the next appropriate node is waited for to push again.

[0235] If visitors want to view information beyond their current viewing permissions, they need to send a temporary permission viewing application to the school inviter in the AR system. Once the application is approved, they can view the relevant content.

[0236] In a specific implementation, the intelligent push module 103 can also be specifically configured to: when receiving an information viewing instruction sent by a visitor through the corresponding terminal device 106, determine the display information corresponding to the information viewing instruction and the personnel level that can view it, and obtain the viewing permission level of the visitor; match the personnel level that can view it with the viewing permission level, and when the matching fails, push a viewing failure reminder message to the terminal device 106 of the visitor, and at the same time push an information viewing request to the school-related responsible person corresponding to the visitor; when the matching is successful, or when receiving an information viewing approval instruction returned by the school-related responsible person, obtain the display information from the data module 104 as the virtual display data to be currently displayed.

[0237] When the personnel type is a trainee, the intelligent push module 103 is specifically configured to: obtain the current ability level of the trainee, and screen out the training content data matching the current ability level from the third type of display data as the virtual display data to be automatically pushed.

[0238] When the person viewing the AR is a trainee, based on the corresponding information viewing permission, they can mainly view information such as operation and maintenance information, equipment principle structure drawings, videos, 3D models, explosion diagrams, VR operation models, etc. During the viewing process, operations such as clicking, zooming in, zooming out, rotating, and disassembling on the relevant information can also be performed.

[0239] For the intelligent automatic push of trainees' information, in addition to being able to display the basic information of the equipment / facilities, the principle structure information of the equipment / facilities, such as VR models, BIM models (Building Information Modeling), explosion diagrams, etc., can also be further displayed.

[0240] It can be understood that there are differences in the ability levels of different trainees, and the corresponding information viewing permissions also vary. Therefore, when performing information automatic push or when trainees actively want to view certain information, the viewable ability level permissions of the personnel can be determined first, and based on the viewable ability level, it can be judged which information can be displayed.

[0241] For example, device training is divided into basic, intermediate, and advanced training content. Only when the trainee completes the basic training and passes the assessment can the intermediate training content be displayed. Only when the intermediate training is completed and the assessment is passed can the advanced training content be displayed. When the trainee has not passed the basic assessment but wants to view the intermediate training content at this time, the intelligent push module 103 can judge whether to display based on the trainee's viewable ability level. When it is judged that the trainee cannot view the intermediate training content, a viewing failure reminder message is pushed to the trainee's terminal device 106, indicating that the current ability does not reach this level and the trainee needs to pass the basic assessment to enter the intermediate course study. At this time, in order to view the training content, the trainee can directly send an assessment application to the training teacher through the system.

[0242] In a specific implementation, the intelligent push module 103 is specifically used for: when receiving a temporary viewing instruction sent by the trainee through the corresponding terminal device 106, determining the training content information and the viewable ability level corresponding to the temporary viewing instruction; matching the viewable ability level with the current ability level. When the matching fails, a viewing failure reminder message is pushed to the trainee's terminal device 106, and at the same time, a temporary viewing request is pushed to the training teacher corresponding to the trainee; when the level matching is successful, or when a temporary viewing approval instruction returned by the training teacher is received, the information corresponding to the temporary viewing approval instruction is obtained from the data module 104 as the virtual display data currently displayed.

[0243] Another example is that the trainee only applies for the training of device 1, or based on the current viewable ability level, only the training content of device 1 can be displayed. At this time, the information display is restricted and the training content of device 2 cannot be displayed. At the same time, a corresponding reminder can be sent to the trainee's terminal device 106.

[0244] In addition, when a relevant teacher accompanies the trainee for on-site training, the teacher can, according to the student's on-site situation, temporarily authorize the opening of non-authority and non-ability training courses through corresponding opening rules. For example, open all the courses within 10 meters of the current location of the teacher, or select a certain device and open all the courses related to a certain device, etc. Specifically, when the intelligent push module 103 receives a temporary permission opening instruction sent by the training teacher through the terminal device 106, it retrieves the data that meets the permission opening requirements from the data module 104 (for example, all the courses within 10 meters of the current location of the training teacher as described above), and displays the retrieved data through the rendering module 105.

[0245] In a more specific embodiment, when the intelligent push module 103 receives an instruction to open course or device information from the management terminal, it obtains the trainees among all the personnel within 10 meters of the current location of the management terminal, and pushes the designated training courses, training courses of the designated device, or operation information of the designated device to the terminals carried by these trainees.

[0246] For example, open the designated training courses to all the personnel within a radius of 10 meters from the current location of the teacher; or select a certain device and open the designated courses or data related to a certain device, etc.; in this way, it is convenient for the teacher to adjust the teaching or display content on-site in combination with the actual site conditions, the situation of the students, and the problems.

[0247] That is, in specific implementation, when no preset instruction is received, the virtual display data opened to the trainee terminal is preset authorized data or type I data; when a preset instruction is received, the virtual display data opened to the trainee terminal is temporary authorized data or type II data.

[0248] Among them, the preset authorized data or type I data is the data that can be displayed on the trainee's terminal according to their historical learning progress and permissions, or the data that the trainee chooses to view by himself; the temporary authorized data or type II data is the data that the management terminal temporarily pushes from the database to the trainee's terminal for display.

[0249] It should be noted that the temporary authorized data or type II data can be synchronously displayed in a preset order according to the instruction of the management terminal, or can be displayed by the trainee himself after being pushed to the trainee's terminal.

[0250] At the same time, the system can also open and display different course contents according to the batches of personnel currently participating in the training. For example, assuming that the current batch of trainees are non-industry personnel, the primary training permissions for all devices can be opened first; assuming that the current batch of trainees are industry insiders and hope to continue in-depth learning, the permissions for primary, intermediate, and high-level course contents can be opened simultaneously according to the actual situation; assuming that the current batch of personnel are plant maintenance training personnel, the plant maintenance course content permissions can be opened simultaneously, and so on.

[0251] Specifically, the intelligent push module 103 obtains the trainee type of the current batch of trainees from the data module 104, determines the corresponding temporary course opening permissions according to the trainee type, retrieves the data with the corresponding permissions from the data module 104 according to the temporary course opening permissions, and displays the retrieved data with the corresponding permissions through the rendering module 105. Thus, corresponding training content opening permissions can be generated differentially according to the training levels of different batches of trainees, and the corresponding training courses can be pushed.

[0252] When the personnel type is equipment users, the intelligent push module 103 can specifically be used to: obtain the equipment operation level of the equipment users, and screen out the equipment-related data that matches the equipment operation level from the fourth type of display data as the automatically pushed virtual display data.

[0253] When the person viewing the AR is an equipment user, it is possible to intelligently push and display the operation SOP (Standard Operating Procedure) of the current equipment, operation detail prompts that are prone to errors, safety risks, equipment emergency contacts, and laboratory safety contacts based on the current equipment operation level of the equipment user, so that the user can view and contact in a timely manner.

[0254] The rendering module 105 can also be used to render interaction buttons at the real-time relative position of the real scene image. Among them, the interaction buttons are mainly used for the interaction between the user and the operation information, as well as screening the operation information or operating the operation information. In the embodiments of the present invention, not only virtual display can be realized, but also real operations can be performed on the virtual information. For example, by clicking a real button, the screening button is opened to enter the display of different information levels. Among them, the real click actions include real finger clicks, zooming in, zooming out, rotating, disassembling the VR models, exploded views, schematic diagrams, etc. of the equipment or the plant.

[0255] Thus, through the real-time information display by the rendering module 105, the information corresponding to the real objects (covering equipment / facilities / personnel) can be superimposed on the recognized real objects in the form of virtual information. So that the personnel can directly see the real objects and the virtual information representing the current operation state of the real objects mapped on the real objects in the actual scene, so that there is no need to manually search for and match the real objects with the real-time information in the background, but directly obtain the information very intuitively and clearly on the real objects at the scene, and can perform operation and maintenance and training at any time on site, greatly improving the efficiency.

[0256] As an alternative embodiment, the information management system 100 further includes a voice interaction module, which can specifically be used to: when a voice control instruction issued by a personnel in the micro-nano processing laboratory is detected through a terminal, extract a target control entity and key action information from the voice control instruction; retrieve the equipment usage permissions of the personnel in the micro-nano processing laboratory from the data module 104, and based on the equipment usage permissions, determine whether the personnel in the micro-nano processing laboratory has the control permission for the target control entity; if so, control the target control entity to execute an action corresponding to the key action information through the information management system 100. When the voice control instruction is an instruction to display information, relevant operation information or parameter information corresponding to the voice control instruction can be superimposed on the real-time relative position of the real scene image corresponding to the target control entity through the rendering module 105; otherwise, an alarm message is pushed to the person in charge of the target control entity through the alarm module 102.

[0257] Exemplarily, assume that a personnel in the micro-nano processing laboratory issues a voice control instruction "View the monthly usage data of chlorine in the etching machine tool". Through information extraction, the voice interaction module can obtain that the target control entity is the "etching machine tool", the key action information is "View", the action object information is "chlorine", and the action scope information is "monthly usage data"; then the voice interaction module retrieves the equipment usage permissions of the equipment operation and maintenance personnel from the data module 104, and based on the equipment usage permissions, determines whether the equipment operation and maintenance personnel has the control permission for the "key action", "action object information", and "action scope information" of the target control entity of the etching machine tool.

[0258] When the personnel in the micro-nano processing laboratory has the corresponding control permission, the voice interaction module can retrieve the monthly usage data of chlorine in the etching machine tool from the data module 104, and superimpose and display this information on the real-time relative position of the real scene image corresponding to the etching machine tool through the rendering module 105.

[0259] When the personnel in the micro-nano processing laboratory does not have the corresponding control permission, the reason and a request for relevant permissions can be returned to the terminal; when a request for permission application returned by the terminal is received, an authorization request is sent to the person in charge of the target control entity or the person in charge corresponding to the key action information, action object information, and action scope information of the target control entity. When an authorization instruction returned by the person in charge is received, the personnel in the micro-nano processing laboratory is notified and data is retrieved for display according to the instruction of the personnel in the micro-nano processing laboratory.

[0260] Another example, assume that a management personnel issues a voice control instruction "Please display the reservation information of xx user". Through similar steps as above, the system can automatically retrieve the corresponding personnel information from a large amount of data and superimpose and display the information above the current location of the user, thus avoiding the management personnel from searching for the desired data from a vast amount of data and improving the user experience.

[0261] Further, after the alarm module 102 pushes the alarm information to the person in charge of the target control entity, if the terminal receives the control authorization instruction returned by the person in charge of the target control entity, the information management system 100 controls the target control entity to perform the action corresponding to the key action information and records the control information; if the control rejection authorization instruction returned by the person in charge of the target control entity is received, it is determined that the voice control instruction is invalid, and an invalid prompt message is sent to the personnel in the micro-nano processing laboratory; if the authorization instruction returned by the person in charge of the target control entity is not received within the preset waiting time period, the person in charge at the next higher level corresponding to the person in charge of the target control entity is obtained from the data module 104, and the alarm information is pushed to the person in charge at the next higher level.

[0262] Exemplarily, assume that the personnel in the micro-nano processing laboratory issue a voice command of "turn on the lithography machine No. A". When the voice interaction module receives the voice command, it extracts the information of the voice command, and based on the extracted information, retrieves the equipment usage permission of the person from the data module 104 to determine whether the person has the permission to control the entity equipment.

[0263] If there is permission, it indicates that the command is valid, and the information management system 100 is used to control the opening of the lithography machine No. A. If there is no permission, the alarm module 102 sends an alarm message to the person in charge of the lithography machine No. A.

[0264] Assume that the person in charge of the equipment refuses to authorize, then it is determined that the voice command is invalid, and an invalid prompt message is sent to the person. If the person in charge of the equipment agrees to authorize, the information management system 100 can be used to control the opening of the lithography machine No. A and record the control information. If the relevant person in charge cannot make a decision and the voice interaction module does not receive the relevant instruction within the preset waiting time period, the person in charge at the next higher level corresponding to the person in charge of the lithography machine No. A can be obtained from the data module 104, and the alarm information is pushed to the person in charge at the next higher level to push the problem to the person in charge at the next higher level for handling.

[0265] In addition, the voice suggestion function can also be realized through the voice interaction module. Any person (such as a visitor, a trainee, an operation and maintenance personnel) can leave a suggestion or a question in a voice manner. The voice interaction module will convert the obtained voice information into text and record it, and store it in the data module 104 for the management personnel to view.

[0266] In a specific implementation, the voice interaction module can also be used to: in response to receiving a voice control instruction issued by a personnel in the micro-nano processing laboratory, when it is determined that the voice control instruction is a voice suggestion instruction (such as analyzing the voice content based on a large language model to determine whether the voice content is a suggestion or a question), extract voice suggestion information from the voice suggestion instruction; the voice suggestion information includes but is not limited to the target control entity and the suggestion object, convert the voice suggestion information into a text suggestion content, send the text suggestion content to the data module 104 for storage, and display the suggestion content of the suggester to the person in charge of the target control entity or other suggestion objects.

[0267] As an example, for instance, the visiting professor Liu said that "the display content of machine A is too specialized", then after the voice interaction module recognizes "machine A", it pushes the information "Professor Liu" to the person in charge of "machine A" to feedback that "the display content of machine A is too specialized".

[0268] Among them, after further determining other suggestion objects according to the target control entity, role, and time range obtained from the voice, the suggestions are pushed.

[0269] As an example, for instance, the maintenance worker Liu said that "in the past two months, there have been too many non-standard usages of a certain module of machine A, resulting in an increase in the equipment maintenance frequency. It is recommended that the instructor strengthen the pre-training guidance for the trainees", then after the voice interaction module recognizes "machine A", it obtains the "person in charge of machine A" and the corresponding "instructor" and "trainees" in "the past two months", and pushes the usage suggestions or usage guidance suggestions of the module to these personnel.

[0270] As an alternative embodiment, during the operation of the equipment in the micro-nano processing experimental platform by the personnel in the micro-nano processing laboratory, when there are questions, the personnel in the micro-nano processing laboratory can send voice questions at any time. The voice interaction module can, based on AI (Artificial Intelligence) and large language models, match recommended answer content from the data module 104 according to the question content and feedback it to the personnel in the form of voice broadcast. Thus, the voice interaction module can also be used to: extract key question information from the voice question instruction in response to receiving the voice question instruction sent by the personnel in the micro-nano processing laboratory; match the information with the highest degree of association with the key question information from the data module 104 and conduct a voice broadcast to the personnel in the micro-nano processing laboratory; if no secondary question or voice broadcast feedback from the personnel in the micro-nano processing laboratory is received within the preset time period, end the current voice interaction; if a voice broadcast feedback from the personnel in the micro-nano processing laboratory is received within the preset time period, conduct a satisfaction analysis on the voice broadcast feedback. When the satisfaction analysis result indicates that the personnel in the micro-nano processing laboratory are not satisfied with the voice broadcast, push the voice question instruction and the voice broadcast feedback to the equipment person in charge corresponding to the operating equipment where the personnel in the micro-nano processing laboratory are located. Thus, based on the voice question and answer interaction, the problems existing in the operation process of the user can be solved or partially solved. Even if the currently selected reply content cannot completely solve the problems raised by the user, the problems can be sent to the equipment person in charge for the equipment person in charge to handle the problems in a timely manner or provide question answering assistance to the user.

[0271] As an alternative embodiment, when an emergency occurs on site, the equipment person in charge can, through the remote expert guidance system in the AR system, see the real scene on site, that is, have the same field of view as the user. At this time, the equipment person in charge can send instructions to the site through the voice interaction module or perform remote 3D annotation on the site picture to guide the user to handle the problem.

[0272] In a specific implementation, when it is detected that an emergency occurs on site, an emergency assistance instruction can be sent to the terminal device 106 of the relevant equipment person in charge through the alarm module 102; based on the emergency assistance instruction, the equipment person in charge accesses the remote expert guidance system to view the same picture as the user through the terminal device 106; receive the voice guidance instruction sent by the equipment person in charge through the voice interaction module, extract the voice content in the voice guidance instruction, and conduct a voice broadcast in the form of voice, or send it to the terminal device 106 of the user in the form of text content, and display the text content through the rendering module 105. In addition, when the recognition and tracking module 101 detects the remote 3D annotation of the equipment person in charge, obtain the 3D annotation content and display the 3D annotation content at the corresponding position within the user's field of view through the rendering module 105.

[0273] Meanwhile, the user can also directly make a call to the emergency contact of the device and the manager closest to the location through the AR system. Specifically, when the voice interaction module detects a call access reminder, it generates a call communication prompt message and sends the message to the emergency contact terminal device 106 of the device and the terminal device 106 of the manager closest to the location, so that the relevant personnel can establish a call connection with the user to solve relevant problems through on-site connection.

[0274] In an alternative embodiment, the information management system 100 may further include a usage frequency recording module. The usage frequency recording module can record the usage times and durations of the 3D models of each micro-nano processing device and micro-nano processing plant facilities, and then analyze which device or area is viewed most frequently, so as to strengthen management accordingly. Exemplarily, assume that in the current month, it is analyzed through the usage frequency recording module that the usage frequency of the 3D model of the power system is much higher than that in other time periods. It is very likely that there are frequent operation and maintenance problems. Therefore, when managing the power system, the operation and maintenance personnel need to pay key attention.

[0275] In a specific implementation, the usage frequency recording module is specifically used for: recording the usage frequency data of each used device in the micro-nano processing experimental platform; for any used device, extracting the personnel type record information from the usage frequency data, where the personnel type record information records the usage frequency or click view times of different types of micro-nano processing laboratory personnel for the used device; according to the personnel type record information, determining the target personnel type with the most usage frequency or click view times for the used device, and based on the target personnel type, making corresponding adjustments to the management and operation and maintenance plan of the used device.

[0276] Assume that for device A, it is analyzed that the maintenance personnel have the most usage frequency, which indicates that the management of this device needs to be strengthened. Then the usage frequency recording module can send a maintenance attention reminder instruction to the maintenance personnel for the maintenance personnel to strengthen the management of this device according to the actual situation. At the same time, the usage frequency recording module can also send a user feedback suggestion instruction to the maintenance personnel to suggest that the maintenance personnel provide user feedback according to the actual maintenance situation when maintaining the device. When the usage frequency recording module receives the user feedback information sent by the maintenance personnel, it can send it to the data module 104 for storage to comprehensively analyze this device based on the user feedback information in the subsequent maintenance process to achieve more comprehensive and targeted device maintenance.

[0277] Suppose for Device B, through analysis it is found that the training personnel click the most frequently. This indicates that for Device B, it is necessary to strengthen the display or training for this part of the personnel. At this time, the usage frequency recording module can send a strengthened training recommendation instruction for Device B to the terminal device 106 of the training teacher, so that when the training teacher conducts training, they can focus on strengthening the display of Device B or increasing the training content.

[0278] Suppose for Device C, through analysis it is found that the visiting personnel click the most frequently. This indicates that this part of the content is the most concerned, so the display can be strengthened. At this time, the usage frequency recording module can generate a strengthened display recommendation instruction and send it to the terminal device 106 of the person in charge of Device C, so that when the person in charge of the device conducts display settings, they can increase the display frequency of this part of the content. Or the strengthened display recommendation instruction can be sent to the intelligent push module 103, and when the intelligent push module 103 conducts intelligent information push, it can give priority to displaying this part of the content or increase the display frequency.

[0279] Similarly, if the number of clicks on Device C is the least, it indicates that this part of the information is not concerned. If attention is desired, the management personnel or relevant operation and maintenance personnel need to re-describe or plan this part of the content. At this time, the usage frequency recording module can generate a content optimization instruction and send it to the terminal device 106 of the person in charge of Device C, so that the person in charge of the device can adjust and optimize this part of the content and send the updated content to the data module 104 for data replacement. When the information is displayed next time, the modified content is displayed, and the effect is analyzed based on the click situation of the modified content. If the number of clicks increases, it means the modification is effective. If the number of clicks remains almost unchanged or decreases, it means that further modification and optimization are still needed.

[0280] Exemplarily, both Figure 5(a) and Figure 5(b) show the rendered images displayed on a terminal device 106 provided by an embodiment of the present invention. From Figure 5(a) and Figure 5(b), it can be seen that through the terminal device 106, the user can simultaneously see the real object and the virtual information mapped on the real object, which represents the current operating state of the real object.

[0281] It should be noted that in order to enable those skilled in the art to better distinguish data of the same type but with different actual reference meanings, in the embodiments of the present invention, some technical features are distinguished and described using terms such as first and second. The terms first, second, etc. are only used for data distinction and have no other special meanings. It can be understood that the present invention makes no limitation in this regard.

[0282] In an embodiment of the present invention, an information management system for a micro-nano processing experimental platform is provided. Among them, the information management system at least includes an identification and tracking module, an alarm module, an intelligent push module, a data module, a rendering module, and at least one terminal device. Combining with the information management method provided by the present invention, first of all, through the interactive settings of the alarm module and violation triggering and alarm pushing, more targeted and efficient personnel management can be carried out on relevant on-site personnel. Thus, on the one hand, the activities of personnel in the laboratory are obtained through the identification and tracking module and the alarm module, and when a violation occurs, multiple responsible persons can be quickly determined, simplifying the personnel management in the laboratory, and when problems occur, different responsible persons can be determined in time to avoid management risks. On the other hand, through the intelligent push module, more interesting information is automatically pushed and displayed to relevant personnel intelligently according to different personnel types, realizing differential intelligent screening and pushing based on personnel types. Compared with the current information display method, it has a better information display effect and improves the user's information viewing experience.

[0283] Referring to Figure 6 , a step flowchart of an information management method for a micro-nano processing experimental platform provided by an embodiment of the present invention is shown. The method may specifically include the following steps:

[0284] Step 601, obtain the personnel identity data and identity information data of the personnel in the micro-nano processing laboratory corresponding to the terminal device, and automatically match the virtual display data related to the personnel identity data;

[0285] Step 602, superimpose the virtual display data on the real-time relative position of the real scene image to obtain a rendered image;

[0286] Step 603, obtain and real-time track the activity locations of the personnel in the micro-nano processing laboratory in the monitoring area and their operation behaviors on the equipment;

[0287] Step 604, when it is determined based on the identity information data that the activity location and / or the operation behavior on the equipment of the personnel in the micro-nano processing laboratory meet the preset violation conditions, generate a violation alarm message and send it to the responsible person and the terminal device.

[0288] For the method embodiment, since it is basically similar to the foregoing device embodiment, the description is relatively simple, and for the relevant parts, refer to the partial description of the foregoing device embodiment.

[0289] In an embodiment of the present invention, based on the information management system of the proposed micro-nano processing experimental platform, a corresponding information management method is provided. First, the identity information data of the personnel in the micro-nano processing laboratory in the monitoring area is obtained through the identification and tracking module, and the activity locations of the personnel in the micro-nano processing laboratory and their operation behaviors on the equipment are tracked in real time; when it is determined based on the identity information data that the activity location and / or the operation behavior on the equipment meet the preset violation conditions, a violation alarm message is generated through the alarm module and sent to the person in charge. Thus, through the interactive settings of the alarm module, violation trigger, and alarm push, more targeted and efficient personnel management can be carried out on the relevant personnel on site. Secondly, the personnel identity data corresponding to the terminal device is obtained through the intelligent push module, and the virtual display data related to the personnel identity data is automatically matched from the data module; the virtual display data is superimposed on the real-time relative position of the real scene image through the rendering module to obtain the rendered image. On the one hand, through the identification and tracking module and the alarm module, the activity situation of the personnel in the laboratory is obtained, and when a violation occurs, multiple persons in charge can be quickly determined, simplifying the personnel management in the laboratory and being able to timely determine different persons in charge when problems occur, avoiding management risks. On the other hand, through the intelligent push module, more interesting information is intelligently and automatically pushed to the relevant personnel according to different personnel types, realizing differential intelligent screening and pushing based on personnel types. Compared with the current information display method, it has a better information display effect and improves the user information viewing experience.

[0290] Those skilled in the art can clearly understand that for the convenience and brevity of description, the specific working processes of the systems, devices, and units described above can refer to the corresponding processes in the foregoing method embodiments and will not be elaborated herein.

[0291] In several embodiments provided by the present invention, it should be understood that the disclosed systems, devices, and methods can be implemented in other ways. For example, the device embodiments described above are merely illustrative. For example, the division of the units is only a logical function division, and there may be other division methods in actual implementation. For example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the couplings, direct couplings, or communication connections shown or discussed with each other can be indirect couplings or communication connections through some interfaces, devices, or units, and can be in electrical, mechanical, or other forms.

[0292] The units described as separate components may or may not be physically separated, and the components shown as units may or may not be physical units, that is, they can be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0293] In addition, in each embodiment of the present invention, each functional unit can be integrated into a processing unit, or each unit can exist physically alone, or two or more units can be integrated into one unit. The above-mentioned integrated unit can be implemented in the form of hardware or in the form of a software functional unit.

[0294] If the above-mentioned integrated unit is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a computer-readable storage medium. Based on such an understanding, the technical solution of the present invention, in essence, or the part that contributes to the prior art, or all or part of the technical solution, can be embodied in the form of a software product. The computer software product is stored in a storage medium and includes several instructions for causing a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in each embodiment of the present invention. The foregoing storage medium includes: various media that can store program codes such as USB flash drives, mobile hard disks, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical discs.

[0295] As described above, the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit them; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements on some of the technical features; and these modifications or replacements do not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of each embodiment of the present invention.

Claims

1. An information management system for a micro-nano processing experimental platform, characterized in that, The information management system includes an identification and tracking module and an alarm module; among them, the identification and tracking module is used to obtain the identity information data of the personnel in the micro-nano processing laboratory in the monitoring area, and to track in real time the activity locations of the personnel in the micro-nano processing laboratory and their operation behaviors on the equipment; the alarm module is used to generate a violation alarm message when it is determined based on the identity information data that the activity location and / or the operation behavior on the equipment meet the preset violation conditions, and to send the violation alarm message to the first type of person in charge and the second type of person in charge determined based on the identity information data.

2. The information management system according to claim 1, wherein The identity information data includes the current reservation scope of the personnel in the micro-nano processing laboratory and the equipment usage qualification information, and the alarm module is specifically used for: when it is detected that the personnel in the micro-nano processing laboratory appear outside the current reservation scope and within the scope that requires reservation, generating a violation alarm message for exceeding the scope; when it is detected that the personnel in the micro-nano processing laboratory are operating other equipment that does not match the equipment usage qualification information, generating a violation alarm message for illegal equipment operation.

3. The information management system according to claim 1 or 2, characterized in that The information management system further includes a data module; the identity information data includes the identity type of the personnel in the micro-nano processing laboratory and the basic identity information; the identity type is the first type of personnel or the second type of personnel; the alarm module is specifically used for: extracting, from the basic identity information, the person in charge corresponding to the equipment currently reserved by the personnel in the micro-nano processing laboratory as the first type of person in charge; when the personnel in the micro-nano processing laboratory are the first type of personnel, identifying and determining, through the identification and tracking module, the first target equipment corresponding to the current location of the first type of personnel, and obtaining, from the data module, the person in charge corresponding to the first target equipment as the second type of person in charge; when the personnel in the micro-nano processing laboratory are the second type of personnel, extracting the school-internal associated person in charge from the basic identity information of the second type of personnel, identifying and determining, through the identification and tracking module, the second target equipment corresponding to the current location of the second type of personnel and the person closest in distance, obtaining, from the data module, the person in charge corresponding to the second target equipment, and taking the person in charge corresponding to the second target equipment and the person closest in distance as the second type of person in charge.

4. The information management system according to claim 3, wherein The alarm module is further used for: pushing the violation alarm message to the first type of person in charge and the second type of person in charge; when the violation alarm message includes a violation behavior related to the currently reserved equipment, taking the first type of person in charge as the main person in charge; when the violation alarm message includes a violation behavior related to the target equipment corresponding to the current location of the personnel in the micro-nano processing laboratory, taking the second type of person in charge as the main person in charge.

5. The information management system according to claim 4, characterized in that The alarm module is specifically used for: when the personnel in the micro-nano processing laboratory are the first type of personnel, pushing the violation alarm message to the first type of person in charge and the person in charge corresponding to the first target equipment; When the micro-nano processing laboratory personnel are the second type of personnel, the violation alarm information is pushed to the first type of person in charge, the on-campus related person in charge, the person in charge corresponding to the second target device and the person closest to the person, and at the same time, the information of the on-campus related person in charge is pushed to the person closest to the person.

6. The information management system according to claim 5, wherein The second category of personnel includes enterprise users and suppliers. The equipment use qualification information corresponding to the enterprise users includes equipment independent operation qualification information. The equipment use qualification information corresponding to the suppliers includes professional qualification certificate information. The alarm module is specifically used for: When it is detected that the enterprise user is operating other equipment that does not match the equipment independent operation qualification information, or when it is detected that the supplier is operating other equipment that does not match the professional qualification certificate information, an equipment illegal operation alarm message is generated.

7. The information management system according to claim 3, wherein The information management system further comprises at least one terminal device; the alarm module is further used for: When receiving a temporary authorization instruction or a violation cancellation instruction sent by the first type of person in charge or the second type of person in charge through the terminal device, the violation alarm is cancelled and the violation information is recorded.

8. The information management system according to claim 3, wherein The identification and tracking module is also used for: When receiving a temporary operation equipment request from the micro-nano processing laboratory personnel, determining the temporary request equipment corresponding to the temporary operation equipment request and the person in charge of the temporary request equipment; Acquire the reservation application data of the temporary request device from the data module, and determine the current reservation status of the temporary request device through the reservation application data; When it is detected that the temporary requested device is not currently in use, the temporary operation device request is sent to the person in charge of the currently operated device and the person in charge of the temporary requested device; After receiving the temporary application approval instruction returned by the person in charge corresponding to the currently operating device and / or the person in charge of the temporary request device, the temporary application approval information is sent to the terminal device of the micro-nano processing laboratory personnel, and the equipment operation information of the micro-nano processing laboratory personnel is recorded.

9. The information management system according to claim 3, wherein The identification and tracking module is also used for: When receiving a temporary permission opening request from the micro-nano processing laboratory personnel, determining the temporary opening area and the person in charge of the temporary opening area corresponding to the temporary permission opening request; Sending the temporary permission opening request to the person in charge of the temporary opening area; After receiving the temporary opening pass instruction returned by the person in charge of the temporary opening area, the temporary opening pass information is sent to the terminal device of the micro-nano processing laboratory personnel, and the equipment operation information and / or visit record information of the micro-nano processing laboratory personnel are recorded.

10. An information management method for a micro-nano processing experimental platform, characterized in that, include: Obtain identity information data of personnel in micro-nano processing laboratories in the monitoring area; Obtain and track in real time the activity locations of the micro-nano processing laboratory personnel in the monitoring area and their operation behaviors on the equipment; When it is determined based on the identity information data that the activity location of the personnel in the micro-nano processing laboratory, and / or, the operation behavior of the equipment meets the preset violation conditions, a violation alarm information is generated, and the violation alarm information is sent to the first type of person in charge and the second type of person in charge determined based on the identity information data.

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