Macro / micro dual-drive cross-scale adjusting mechanism based on micro displacement amplification

Abstract

The invention discloses a macro / micro dual-drive cross-scale adjusting mechanism based on micro displacement amplification, and belongs to the technical field of precise adjusting mechanisms. The mechanism comprises an electroceramic driving mechanism part and a motor driving mechanism part, a piezoelectric ceramic driving mechanism is located above a motor driving mechanism, and the lower surface of the piezoelectric ceramic driving mechanism is attached to the upper surface of the motor driving mechanism and connected with the upper surface of the motor driving mechanism through six M5 screws. According to the mechanism, millimeter-level driving and micron-level positioning are achieved by directly driving the motor and the grating displacement sensor, and micron-level driving and nano-level positioning are achieved through the piezoelectric ceramic micro-displacement amplification mechanism and the capacitive sensor. The adjusting mechanism is free of gap decoupling, small in motion inertia, high in rigidity, high in bearing capacity and easy and convenient to control.

Description

Technical Field

[0001] The present invention belongs to the technical field of precision adjustment mechanisms, and particularly relates to a macro / micro dual-drive cross-scale adjustment mechanism based on micro-displacement amplification. Background Art

[0002] In the fields of micro machinery, precision measurement, ultra-precision machining, and micro assembly technology, very precise positioning and motion are required. At present, the positioning accuracy of the traditional mechanical positioning methods adopted by mainstream products on the market can only reach several micrometers or dozens of micrometers. However, the price of high-precision positioning systems is very expensive, and the key core components rely on imports. In these high-tech fields, the required positioning accuracy is sub-micron level or even nanometer level. These high-precision technical requirements have greatly promoted the development of micro-displacement mechanisms, and micro-displacement mechanisms have become the key technical support in these fields. The actuators adopted in nanometer-level positioning technology mainly include micro motors (such as electrostatic motors, ultrasonic motors, electromagnetic motors, etc.), piezoelectric (PZT) drivers, shape memory alloy (SMA) drivers, electromagnets, giant magnetostrictive material drivers, etc. Due to the advantages of high resolution, high frequency response, non-heating, small volume, and light weight of piezoelectric ceramic devices, they have been widely used in the field of nanometer-level precision positioning. Moreover, according to the current development status at home and abroad, the precision positioning system with piezoelectric ceramics as actuators will be the main research direction of nanometer-level precision positioning technology. However, the piezoelectric coefficient of piezoelectric ceramic drivers is very small, and the output of a single piezoelectric ceramic piece is only 0.3μm. Even if displacement superposition is adopted, its output is only dozens of micrometers, which has certain limitations.

[0003] At present, the displacement precision adjustment system not only requires the switching between large strokes and small strokes, but also high-precision positioning and position feedback. At present, the accuracy of the transmission methods for large-stroke driving (such as precision lead screw transmission, linear motors, voice coil motors, etc.) is generally limited to the micrometer level, while the positioning accuracy of micro-drivers represented by piezoelectric ceramic micro-drivers can reach the nanometer level, but the stroke can only reach dozens of micrometers. How to better solve these contradictions and achieve large strokes and high-precision positioning has become an urgent problem to be solved at present. In order to overcome the above difficulties, this paper proposes a macro / micro dual-drive cross-scale adjustment mechanism based on micro-displacement amplification, which can not only achieve cross-scale stroke driving from millimeter level to sub-micron level, but also achieve nanometer-level positioning control accuracy. Summary of the Invention

[0004] In order to overcome the defects existing in the prior art, the object of the present invention is to provide a macro / micro dual-drive cross-scale adjustment mechanism based on micro-displacement amplification. Based on the idea of macro / micro drive and cross-scale (macro / micro measurement scale) position feedback, the system combines the advantages of large stroke, high speed, high acceleration of the direct drive motor and fast response, high displacement resolution of the piezoelectric ceramic, realizing gapless decoupling of the adjustment mechanism, with small moment of inertia, high stiffness, strong load-bearing capacity, and simple and convenient control.

[0005] The technical problem to be solved by the present invention is to provide a macro / micro dual-drive cross-scale adjustment mechanism based on micro-displacement amplification, which can realize cross-scale stroke drive from millimeter level to sub-micron level and can also achieve nano-level positioning control accuracy.

[0006] To solve the above technical problem, the technical solution of the present invention is as follows:

[0007] Firstly, a direct drive motor and a grating displacement sensor are adopted to realize millimeter-level drive and micron-level positioning. That is, at the macroscopic scale, a millimeter-level linear motion can be achieved through the direct drive motor. For this macroscopic scale motion, a micron-level position feedback and control accuracy can be achieved through the grating displacement sensor. Then, a piezoelectric ceramic micro-displacement amplification mechanism and a capacitance sensor are adopted to realize micron-level drive and nano-level positioning. That is, at the microscopic scale, a micron-level linear motion can be achieved through the micro-displacement amplification mechanism. For this microscopic scale motion, a nano-level position feedback and control accuracy can be achieved through the capacitance sensor.

[0008] The macro / micro dual-drive cross-scale adjustment mechanism based on micro-displacement amplification described in the present invention can be divided into two parts: a piezoelectric ceramic drive mechanism and a motor drive mechanism. The components of the piezoelectric ceramic drive mechanism mainly consist of a piezoelectric ceramic moving platform, a capacitance sensor, piezoelectric ceramics, a base, and a displacement amplification mechanism. The lower surface of the base is connected to the motor moving platform, and the upper surface of the base is respectively connected to the piezoelectric ceramics and the displacement amplification mechanism. The lower surface of the piezoelectric ceramics is located at the center of the base, and the lower surfaces of the three legs of the displacement amplification mechanism are near the three corner points of the triangular mounting surface of the base. The upper surface of the piezoelectric ceramics is connected to the central mounting surface of the displacement amplification mechanism. That is to say, the piezoelectric ceramics are located between the upper surface of the base and the central mounting surface of the displacement amplification mechanism and are connected by screws. The three cylindrical bosses in the upper half of the displacement amplification mechanism are used to install the capacitance sensor. The lower surface of the capacitance sensor contacts the upper surfaces of the three cylindrical bosses, and there is a 0.1 mm gap between the upper surface of the capacitance sensor and the piezoelectric ceramic moving platform. The three rectangular bosses in the upper half of the displacement amplification mechanism are used to install the piezoelectric ceramic moving platform. The lower surface of the piezoelectric ceramic moving platform contacts the upper surfaces of the three rectangular bosses. By controlling the elongation and shortening of the piezoelectric ceramics through a piezoelectric ceramic controller, the linear drive of the piezoelectric ceramics is then transmitted to the displacement amplification mechanism. The elongation or shortening drive displacement is amplified by the displacement amplification mechanism and directly transmitted to the piezoelectric ceramic moving platform, thereby realizing the upward and downward movement of the piezoelectric ceramic moving platform. This realizes the step-by-step movement transmission from the piezoelectric ceramics to the displacement amplification mechanism and then to the piezoelectric ceramic moving platform. The base is a hexagonal plate structure and is the foundation of the entire piezoelectric ceramic drive mechanism component. The lower surface is connected to the motor moving platform, and the upper surface is connected to the piezoelectric ceramics and the displacement amplification mechanism. The piezoelectric ceramic moving platform is a triangular plate structure and is the loading platform of the entire mechanism, used to carry various instruments and items to be moved. The capacitance sensor is a product of MICRO-EPSILON (Micro-Epsilon Company), with a resolution of 4 nm, an absolute error better than 0.1 μm, reaching the order of dozens of nanometers. The piezoelectric ceramics selected are P-842 type piezoelectric ceramics of PI Company, with a maximum stroke of up to 90 μm and a displacement control accuracy of up to 1 nm. The displacement amplification mechanism is made of 65Mn material. The minimum width of each flexible hinge inside the displacement amplification mechanism is 0.5 mm, that is, the minimum distance between the double arcs of each flexible hinge is 0.5 mm. The output displacement force arm is 26 mm, and the input displacement force arm is 6.5 mm. That is, the amplification factor is 26 / 6.5 = 4. That is, when the displacement generated by the piezoelectric ceramics is Δu, after acting on the displacement amplification mechanism, through its own flexible deformation, the displacement at the deformation output end of the displacement amplification mechanism is 4Δu, realizing a 4-fold amplification effect. Different amplification factors can be achieved by adjusting the dimensions of the input / output displacement force arms.

[0009] The components of the motor drive mechanism mainly consist of a motor moving platform, an encoder gear, an encoder bracket, an encoder, a grating sensor bracket, a base, a grating sensor, a motor, a harmonic reducer, a motor bracket, a motor gear, a cam turntable, and a guide rail slider pair. A harmonic reducer is installed at the output end of the motor, and both are fixedly installed on the motor bracket. The output end of the harmonic reducer is fixedly connected to the motor gear. The motor gear meshes with the teeth on one side above the cam turntable, used to transmit the rotation of the motor to the cam turntable through the motor gear, realizing the input of the movement of the entire motor drive mechanism components. The motor bracket is fixedly installed on the side of the base; the teeth on the other side above the cam turntable mesh with the encoder gear, and the encoder gear is fixedly connected to the input end of the encoder, realizing the transmission of the rotation of the cam turntable to the encoder through the encoder gear, achieving the closed-loop feedback of the number of rotations of the motor. The encoder is fixedly installed on the encoder bracket, and the encoder bracket is fixedly installed on the side of the base; the chute of the cam turntable contacts and cooperates with the lug of the motor moving platform. The rotation of the cam turntable causes the change in the position of its chute, and then pushes the lug of the motor moving platform to move up and down under the guiding action of the guide rail slider pair, converting the rotational motion of the cam turntable into the up and down motion of the motor moving platform, which realizes the step-by-step motion transmission from the motor to the cam turntable and then to the motor moving platform; the guide rail part of the guide rail slider pair is fixedly installed on the outer side of the motor moving platform, and the slider part of the guide rail slider pair is fixedly installed on the inner side of the base.

[0010] The motor moving platform is a hexagonal plate structure with lugs. The upper surface of the motor moving platform is connected to the base, and the lug part cooperates with the grating sensor, used to monitor the up and down movement position of the motor moving platform, achieving the closed-loop feedback of the up and down movement position of the motor moving platform; the grating sensor is fixedly installed on the grating sensor bracket, and the side of the grating sensor bracket is fixedly installed on the side of the base; the cam turntable drives the motor moving platform to perform a linear motion of ±10 mm up and down under the guiding action of the guide rail slider pair; the grating sensor uses an ESSA grating displacement sensor, and the resolution of the device is 0.1 um and the measurement accuracy is better than 1 um.

[0011] During the entire movement transmission process, the base of the motor drive mechanism components always remains stationary. The motor drives the cam turntable to achieve rotational motion, and then the cam turntable pushes the motor moving platform to move up and down under the guiding action of the guide rail slider pair. The motor moving platform then drives the entire piezoelectric ceramic drive mechanism components to complete the first-stage movement and reach the coarse adjustment position; subsequently, the piezoelectric ceramic controller controls the expansion and contraction of the piezoelectric ceramic, transmits the linear drive to the displacement amplification mechanism, and after the expansion and contraction drive displacement is amplified by the displacement amplification mechanism, it directly pushes the piezoelectric moving platform to move up and down, thereby completing the second-stage movement and reaching the fine adjustment position.

[0012] The beneficial technical effects of the present invention

[0013] This application is based on the idea of macro / micro drive and cross-scale (macro / micro measurement scale) position feedback. This system combines the advantages of large stroke, high speed, and high acceleration of direct drive motors, as well as the fast response and high displacement resolution of piezoelectric ceramics. It can achieve cross-scale stroke drive from millimeter level to sub-micron level, and can also achieve nano-level positioning control accuracy, solving the contradiction between large stroke and high-precision position feedback. In addition, the adjustment mechanism has no clearance decoupling, small moment of inertia, high stiffness, strong load-bearing capacity, and simple and convenient control. Brief Description of the Drawings

[0014] Figure 1 It is a three-dimensional perspective view of the macro / micro dual-drive cross-scale adjustment mechanism in the present invention;

[0015] Figure 2 It is a three-dimensional perspective view of the piezoelectric ceramic drive mechanism in the present invention;

[0016] Figure 3 It is a three-dimensional perspective view of the displacement amplification mechanism in the present invention;

[0017] Figure 4 It is a three-dimensional perspective view of the motor drive mechanism in the present invention.

[0018] Among them, 1. Piezoelectric moving platform; 2. Capacitive sensor; 3. Piezoelectric ceramic; 4. Motor moving platform; 5. Encoder gear; 6. Encoder bracket; 7. Encoder; 8. Grating sensor bracket; 9. Base; 10. Grating sensor; 11. Motor; 12. Harmonic reducer; 13. Motor bracket; 14. Motor gear; 15. Cam turntable; 16. Guide rail slider pair; 17. Base; 18. Displacement amplification mechanism. Detailed Embodiment

[0019] The present invention will be further described below with reference to the drawings.

[0020] As Figures 1 to 4As shown in the figure, the macro / micro dual-drive cross-scale adjustment mechanism based on micro-displacement amplification according to the present invention mainly includes a piezoelectric moving platform 1, a capacitance sensor 2, a piezoelectric ceramic 3, a motor moving platform 4, an encoder gear 5, an encoder bracket 6, an encoder 7, a grating sensor bracket 8, a base 9, a grating sensor 10, a motor 11, a harmonic reducer 12, a motor bracket 13, a motor gear 14, a cam turntable 15, a guide rail slider pair 16, a base 17, and a displacement amplification mechanism 18. Among them, the piezoelectric moving platform 1, the capacitance sensor 2, the piezoelectric ceramic 3, the base 17, and the displacement amplification mechanism 18 form a piezoelectric ceramic drive mechanism component; the motor moving platform 4, the encoder gear 5, the encoder bracket 6, the encoder 7, the grating sensor bracket 8, the base 9, the grating sensor 10, the motor 11, the harmonic reducer 12, the motor bracket 13, the motor gear 14, the cam turntable 15, and the guide rail slider pair 16 form a motor drive mechanism component. The piezoelectric ceramic drive mechanism is located above the motor drive mechanism, and the lower surface of the piezoelectric ceramic drive mechanism is attached to the upper surface of the motor drive mechanism and connected by 6 M5 screws. During the entire motion transmission process, the base 9 always remains stationary. The motor 11 drives the cam turntable 15 to achieve rotational motion, and then the cam turntable 15 pushes the motor moving platform 4 to achieve vertical motion under the guiding action of the guide rail slider pair 16. The motor moving platform 4 then drives the entire piezoelectric ceramic drive mechanism component to complete the first-stage motion and reach the coarse adjustment position. Subsequently, the piezoelectric ceramic controller controls the expansion and contraction of the piezoelectric ceramic 3, transmits the linear drive to the displacement amplification mechanism 18, and after the expansion and contraction drive displacement is amplified by the displacement amplification mechanism 18, it directly pushes the piezoelectric moving platform 1 to move up and down, thereby completing the second-stage motion and reaching the fine adjustment position.

[0021] The components of the piezoelectric ceramic drive mechanism mainly consist of a piezoelectric electric platform 1, a capacitance sensor 2, a piezoelectric ceramic 3, a base 17, and a displacement amplification mechanism 18. The lower surface of the base 17 is connected to the motor moving platform 4. The upper surface of the base 17 is respectively connected to the piezoelectric ceramic 3 and the displacement amplification mechanism 18. The lower surface of the piezoelectric ceramic 3 is located at the exact center of the base 17. The lower surfaces of the three legs of the displacement amplification mechanism 18 are near the three corner points of the triangular mounting surface of the base 17. The upper surface of the piezoelectric ceramic 3 is connected to the central mounting surface of the displacement amplification mechanism 18. That is to say, the piezoelectric ceramic 3 is located between the upper surface of the base 17 and the central mounting surface of the displacement amplification mechanism 18 and is connected by screws. The three cylindrical bosses in the upper half of the displacement amplification mechanism 18 are used to mount the capacitance sensor 2. The lower surface of the capacitance sensor 2 contacts the upper surfaces of the three cylindrical bosses. There is a 0.1 mm gap between the upper surface of the capacitance sensor 2 and the piezoelectric electric platform 1. The three rectangular bosses in the upper half of the displacement amplification mechanism 18 are used to mount the piezoelectric electric platform 1. The lower surface of the piezoelectric electric platform 1 contacts the upper surfaces of the three rectangular bosses. By controlling the elongation and shortening of the piezoelectric ceramic 3 through a piezoelectric ceramic controller, the linear drive of the piezoelectric ceramic 3 is transmitted to the displacement amplification mechanism 18. The elongation or shortening drive displacement is amplified by the displacement amplification mechanism 18 and directly transmitted to the piezoelectric electric platform 1, thereby realizing the up and down movement of the piezoelectric electric platform 1. This realizes the step-by-step movement transmission from the piezoelectric ceramic 3 to the displacement amplification mechanism 18 and then to the piezoelectric electric platform 1.

[0022] The base 17 is a hexagonal plate structure and is the foundation of the entire piezoelectric ceramic drive mechanism component. The piezoelectric electric platform 1 is a triangular plate structure and is the carrier platform of the entire mechanism, used to carry various instruments and items to be moved. The capacitance sensor 2 selects a product of MICRO-EPSILON (MIIYI Company), the probe type is CSH02FL-CRm1.4, the product number is 6610075, the controller model corresponding to the probe is DL6530, the resolution is 4 nm, the absolute error is better than 0.1 um, reaching the order of dozens of nanometers, the probe size is 10.5 mm × 8 mm × 4 mm, and the weight is 28 g. The piezoelectric ceramic 3 selects the P-842 type piezoelectric ceramic of the PI company, the maximum stroke can reach 90 um, and the displacement control accuracy can reach 1 nm. The displacement amplification mechanism 18 uses 65Mn material. The minimum width of each flexible hinge inside the displacement amplification mechanism 18 is 0.5 mm, that is, the minimum distance between the double arcs of each flexible hinge is 0.5 mm. The output displacement force arm is 26 mm, and the input displacement force arm is 6.5 mm. That is, the magnification is 26 / 6.5 = 4. That is, when the displacement generated by the piezoelectric ceramic 3 is Δu, after acting on the displacement amplification mechanism 18, through its own flexible deformation, the displacement at the deformation output end of the displacement amplification mechanism 18 is 4Δu, realizing a 4-fold amplification effect. Different magnification factors can be achieved by adjusting the dimensions of the input / output displacement force arms.

[0023] The motor drive mechanism components mainly consist of a motor moving platform 4, an encoder gear 5, an encoder bracket 6, an encoder 7, a grating sensor bracket 8, a base 9, a grating sensor 10, a motor 11, a harmonic reducer 12, a motor bracket 13, a motor gear 14, a cam turntable 15, and a guide rail slider pair 16. The output end of the motor 11 is equipped with a harmonic reducer 12, and both are fixedly installed on the motor bracket 13. The output end of the harmonic reducer 12 is fixedly connected to the motor gear 14. The motor gear 14 meshes with the teeth on one side above the cam turntable 15, used to transmit the rotation of the motor to the cam turntable 15 through the motor gear 14, achieving the input of the movement of the entire motor drive mechanism components. The motor bracket 13 is fixedly installed on the side of the base 9; the teeth on the other side above the cam turntable 15 mesh with the encoder gear 5, and the encoder gear 5 is fixedly connected to the input end of the encoder 7, achieving the transmission of the rotation of the cam turntable 15 to the encoder 7 through the encoder gear 5, realizing the closed-loop feedback of the number of rotations of the motor 11. The encoder 7 is fixedly installed on the encoder bracket 6, and the encoder bracket 6 is fixedly installed on the side of the base 9; the chute of the cam turntable 15 is in contact and cooperation with the lug of the motor moving platform 4. The rotation of the cam turntable 15 causes a change in the position of its chute, and then pushes the lug of the motor moving platform 4 to move up and down under the guiding action of the guide rail slider pair 16, converting the rotational motion of the cam turntable 15 into the up and down motion of the motor moving platform 4, which realizes the step-by-step motion transmission from the motor 11 to the cam turntable 15 and then to the motor moving platform 4; the guide rail part of the guide rail slider pair 16 is fixedly installed on the outer side of the motor moving platform 4, and the slider part of the guide rail slider pair 16 is fixedly installed on the inner side of the base 9.

[0024] The motor moving platform 4 is a hexagonal plate structure with lugs. The upper surface of the motor moving platform 4 is connected to the base 17, and the lug part cooperates with the grating sensor 10, used to monitor the up and down movement position of the motor moving platform 4, realizing the closed-loop feedback of the up and down movement position of the motor moving platform 4; the grating sensor 10 is fixedly installed on the grating sensor bracket 8, and the side of the grating sensor bracket 8 is fixedly installed on the side of the base 9; the cam turntable 15 drives the motor moving platform 4 to perform a linear motion of ±10 mm up and down under the guiding action of the guide rail slider pair 16; the grating sensor 10 uses an ESSA grating displacement sensor, and the resolution of the device is 0.1 um and the measurement accuracy is better than 1 um.

[0025] Further, the operation method of this mechanism includes the following steps:

[0026] S1. Start the motor. After deceleration by the harmonic reducer, transmit the rotation through the motor gear to the cam turntable. The cam turntable drives the motor moving platform to achieve a linear motion of ±10 mm up and down under the guiding action of the guide rail slider pair 16, and realize large-stroke high-precision displacement feedback through the grating sensor in real time. The motor moving platform then drives the entire piezoelectric ceramic driving mechanism component to complete the first-stage motion and reach the coarse adjustment position.

[0027] S2. Start the piezoelectric ceramic to generate a displacement of Δu. After acting on the displacement amplification mechanism, through its own flexible deformation, the displacement at the output end is 4Δu, achieving a 4-fold amplification effect. Then drive the piezoelectric moving platform to achieve a linear motion of sub-micron level up and down, and realize small-stroke nano-level ultra-high-precision displacement feedback through the capacitance sensor in real time, and then complete the second-stage motion and reach the fine adjustment position.

[0028] The above specific implementation manners do not constitute a limitation on the protection scope of the present invention. Those skilled in the art should understand that various modifications, combinations, sub-combinations and substitutions can be made according to design requirements and other factors. Any modifications, equivalent substitutions and improvements made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A macro / micro dual-drive cross-scale adjustment mechanism based on micro-displacement amplification, characterized in that, Including: Piezoelectric moving platform (1), capacitive sensor (2), piezoelectric ceramic (3), motor moving platform (4), encoder gear (5), encoder bracket (6), encoder (7), grating sensor bracket (8), base (9), grating sensor (10), motor (11), harmonic reducer (12), motor bracket (13), motor gear (14), cam turntable (15), guide rail slider pair (16), base (17) and displacement amplification mechanism (18). Among them, the piezoelectric moving platform (1), capacitive sensor (2), piezoelectric ceramic (3), base (17) and displacement amplification mechanism (18) constitute the piezoelectric ceramic drive mechanism part; the motor moving platform (4), encoder gear (5), encoder bracket (6), encoder (7), grating sensor bracket (8), base (9), grating sensor (10), motor (11), harmonic reducer (12), motor bracket (13), motor gear (14), cam turntable (15) and guide rail slider pair (16) constitute the motor drive mechanism part. The piezoelectric ceramic drive mechanism is located above the motor drive mechanism. The lower surface of the piezoelectric ceramic drive mechanism is in contact with the upper surface of the motor drive mechanism and is connected by 6 M5 screws. During the entire motion transmission process, the base (9) always remains stationary. The motor (11) drives the cam turntable (15) to achieve rotational motion. Then, the cam turntable (15) pushes the motor moving platform (4) to achieve vertical motion under the guiding action of the guide rail slider pair (16). The motor moving platform (4) then drives the entire piezoelectric ceramic drive mechanism part to complete the first-stage motion and reach the coarse adjustment position. Subsequently, the piezoelectric ceramic controller controls the expansion and contraction of the piezoelectric ceramic (3), transmits the linear drive to the displacement amplification mechanism (18). After the expansion and contraction drive displacement is amplified by the displacement amplification mechanism (18), it directly pushes the piezoelectric moving platform (1) to move up and down, thereby completing the second-stage motion and reaching the fine adjustment position.

2. The macro / micro dual-drive cross-scale adjustment mechanism based on micro-displacement amplification according to claim 1, characterized in that The lower surface of the base (17) is connected to the motor moving platform (4), and the upper surface of the base (17) is respectively connected to the piezoelectric ceramic (3) and the displacement amplification mechanism (18). The lower surface of the piezoelectric ceramic (3) is located at the center position of the base (17). The lower surfaces of the three feet of the displacement amplification mechanism (18) are near the three corner points of the triangular mounting surface of the base (17). The upper surface of the piezoelectric ceramic (3) is connected to the central mounting surface of the displacement amplification mechanism (18). That is to say, the piezoelectric ceramic (3) is located between the upper surface of the base (17) and the central mounting surface of the displacement amplification mechanism (18) and is connected by screws; The three cylindrical bosses on the upper half of the displacement amplification mechanism (18) are used to mount the capacitive sensor (2). The lower surface of the capacitive sensor (2) is in contact with the upper surfaces of the three cylindrical bosses. There is a 0.1 mm gap between the upper surface of the capacitive sensor (2) and the piezoelectric moving platform (1); The three rectangular bosses on the upper half of the displacement amplification mechanism (18) are used to mount the piezoelectric moving platform (1). The lower surface of the piezoelectric moving platform (1) is in contact with the upper surfaces of the three rectangular bosses; The elongation and shortening of the piezoelectric ceramic (3) are controlled by a piezoelectric ceramic controller, and then the linear drive of the piezoelectric ceramic (3) is transmitted to the displacement amplification mechanism (18). The elongation or shortening drive displacement is amplified by the displacement amplification mechanism (18) and directly transmitted to the piezoelectric moving platform (1), thereby realizing the up and down movement of the piezoelectric moving platform (1). This realizes the step-by-step movement transmission from the piezoelectric ceramic (3) to the displacement amplification mechanism (18) and then to the piezoelectric moving platform (1).

3. The macro / micro dual-drive cross-scale adjustment mechanism based on micro-displacement amplification according to claim 1, wherein The output end of the motor (11) is equipped with a harmonic reducer (12), and both are fixedly installed on the motor bracket (13). The output end of the harmonic reducer (12) is fixedly connected to the motor gear (14). The motor gear (14) meshes with the teeth on one side above the cam turntable (15) to transmit the rotation of the motor to the cam turntable (15) through the motor gear (14), realizing the input of the movement of the entire motor drive mechanism part. The motor bracket (13) is fixedly installed on the side of the base (9). The teeth on the other side above the cam turntable (15) mesh with the encoder gear (5), and the encoder gear (5) is fixedly connected to the input end of the encoder (7), realizing the transmission of the rotation of the cam turntable (15) to the encoder (7) through the encoder gear (5), and realizing the closed-loop feedback of the number of rotations of the motor (11). The encoder (7) is fixedly installed on the encoder bracket (6), and the encoder bracket (6) is fixedly installed on the side of the base (9). The chute of the cam turntable (15) is in contact and cooperation with the lug of the motor moving platform (4). The rotation of the cam turntable (15) causes a change in the position of its chute, and then pushes the lug of the motor moving platform (4) to move up and down under the guiding action of the guide rail slider pair (16), converting the rotational movement of the cam turntable (15) into the up and down movement of the motor moving platform (4). This realizes the step-by-step movement transmission from the motor (11) to the cam turntable (15) and then to the motor moving platform (4). The guide rail part of the guide rail slider pair (16) is fixedly installed on the outer side of the motor moving platform (4), and the slider part of the guide rail slider pair (16) is fixedly installed on the inner side of the base (9).

4. A macro / micro dual-drive cross-scale adjustment mechanism based on micro-displacement amplification according to claim 1, characterized in that, The operation method of this mechanism includes the following steps: S1. Start the motor, after deceleration by the harmonic reducer, transmit the rotation to the cam turntable through the motor gear. The cam turntable drives the motor moving platform to achieve a linear movement of ±10 mm up and down under the guiding action of the guide rail slider pair (16), and realize large-stroke high-precision displacement feedback in real time through the grating sensor. The motor moving platform then drives the entire piezoelectric ceramic drive mechanism part to complete the first-level movement and reach the coarse adjustment position. S2. Start the piezoelectric ceramic to generate a displacement of Δu. After acting on the displacement amplification mechanism, through its own flexible deformation, the displacement at the output end is 4Δu, realizing a 4-fold amplification effect. Then, it drives the piezoelectric moving platform to achieve a linear movement of sub-micron level up and down, and realize small-stroke nano-level ultra-high-precision displacement feedback in real time through the capacitance sensor, and then complete the second-level movement and reach the fine adjustment position.

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