Rectification and purification equipment for preparing high-purity helium electron gas

Abstract

The invention provides high-purity helium electron gas preparation rectification purification equipment which comprises a distillation retort, a first support is fixedly connected to the outer end of the distillation retort, a display screen is arranged at the position, located at the upper end of the first support, of the distillation retort, mounting blocks are fixedly connected to the four ends of the inner side of the distillation retort, and springs are fixedly connected to the upper ends of the mounting blocks. A movable plate is fixedly connected to the top of the spring, and a through hole I is formed in the middle of the movable plate in a penetrating manner. The movable plate and the spring assembly are mounted in the distillation retort, when the air pressure in the retort body is too high, the movable plate is jacked up, so that the arc-shaped sealing plates at the two ends of the upper part are opened, and a return pipe orifice is leaked; partial gas is intermittently discharged into the cooling tank middle body, so that the distillation tank can be subjected to pressure reduction treatment to avoid explosion, and the safety of the whole distillation and purification equipment is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of preparation of high-purity helium electronic gas, and specifically to a rectification and purification device for preparing high-purity helium electronic gas. Background Art

[0002] High-purity helium electronic gas refers to helium gas with a purity of ≥99.999% (5N grade), which is mainly used in high-end fields such as semiconductor manufacturing, precision analytical instruments (such as gas chromatography), optical fiber drawing, and superconducting equipment. The core requirement is to strictly control impurities such as oxygen, nitrogen, water, and hydrocarbons to avoid affecting process stability or detection accuracy.

[0003] In the process of preparing high-purity helium electronic gas, a distillation extraction device is required. The boiling point of helium is -268.9°C, and impurities (such as nitrogen and methane) need to be separated through a low-temperature rectification column in an environment close to absolute zero. To improve the separation efficiency, the system usually needs to maintain a medium-high pressure environment of 0.5 - 3 MPa. Moreover, at low temperatures, the brittleness of metal materials (such as stainless steel) increases, and high pressure may cause welds or pipelines to rupture, posing a risk of explosion. Secondly, the gas after stripping and rectification is usually directly introduced into the condenser for gas separation. The separated gas is directly exported for collection, and the condensed liquid directly falls and is finally recycled. However, in the current gas rectification and purification method, after rectification, the gas contains a lot of water vapor, and there are many bubbles in the water vapor. Then, the gas after rectification will contain a lot of bubbles. The bubble is composed of an outer water film and the gas in the water film. Then, there will still be many small bubbles in the gas separated by the condenser after condensation separation. This indicates that there will be a certain amount of liquid in the finally separated and prepared gas, which will affect the gas separation efficiency and reduce the gas purity. Summary of the Invention

[0004] (I) Technical Problems to be Solved

[0005] In view of the deficiencies of the prior art, the present invention provides a rectification and purification device for preparing high-purity helium electronic gas, which solves the problems that the internal pressure of the existing rectification and purification device for preparing high-purity helium electronic gas is too high during use, posing a risk of explosion, and the gas after rectification contains bubbles.

[0006] (II) Technical Solutions

[0007] To achieve the above object, the present invention is realized through the following technical solutions: A rectification and purification device for producing high-purity helium electronic gas, including a distillation tank, a support one is fixedly connected to the outer end of the distillation tank, a display screen is arranged at the upper end of the distillation tank on the support one, installation blocks are fixedly connected to the four inner ends of the distillation tank, springs are fixedly connected to the upper ends of the installation blocks, a movable plate is fixedly connected to the top of the springs, a through hole one is penetrated through the middle of the movable plate, a fixed plate is fixedly connected to one inner end of the distillation tank, and a reflux pipe is penetrated through the inside of the distillation tank;

[0008] One end above the movable plate is rotatably connected with two connecting rods, the other ends of the connecting rods are rotatably connected with a fixed frame, the other end of the fixed frame is fixedly connected with an arc-shaped sealing plate, and there are two arc-shaped sealing plates. The arc-shaped sealing plate is in contact with the opening of the reflux pipe. A connecting plate is fixedly connected to the tops of the two arc-shaped sealing plates. A slot is opened in the inside of the fixed plate, a sliding rod is fixedly connected to the inside of the slot, and the connecting plate is slidably connected to the sliding rod;

[0009] Chutes are opened at the three inner ends of the distillation tank, sliders are fixedly connected to the three outer ends of the movable plate, and the sliders are slidably connected to the inside of the chutes. An air inlet pipe is opened at the other end of the outside of the distillation tank. A conduit is penetrated through the top of the distillation tank. A cooling tank is penetrated through the middle of the reflux pipe, and a cooling pipe is fixedly connected to the inside of the cooling tank.

[0010] Preferably, the other end of the conduit is penetrated through a treatment tank, and a support two is fixedly connected to the outer end of the treatment tank.

[0011] Preferably, a drain port is penetrated through the bottom of the treatment tank, and a solenoid valve is installed inside the drain port.

[0012] Preferably, a mounting plate is fixedly connected to the top of the treatment tank, a motor is fixedly connected to the outer end of the mounting plate, a worm is rotatably connected to the inside of the mounting plate, and the output end of the motor is fixedly connected to the worm.

[0013] Preferably, a rotating shaft is rotatably connected to the middle of the treatment tank, a worm gear is fixedly connected to the top of the rotating shaft, the worm gear meshes with the worm, a positioning frame is fixedly connected to the inside of the treatment tank, and the rotating shaft is rotatably connected to the positioning frame.

[0014] Preferably, multiple groups of porous plates are fixedly connected to the inside of the treatment tank, several through holes two are opened on the porous plates, a scraper is fixedly connected to the rotating shaft, and the scraper is in contact with the bottom of the porous plate.

[0015] Preferably, both ends above the treatment tank are fixedly connected with mounting frames, the top of the mounting frames is fixedly connected with a vaporization tank, a condenser is arranged through the top of the vaporization tank, a connecting pipe is arranged through the bottom of the vaporization tank and extends inward into the treatment tank, a one-way valve is installed inside the connecting pipe, and both ends of the outer side of the treatment tank are provided with an air outlet pipe 1 through which the other end extends into the inside of the vaporization tank.

[0016] Preferably, an air outlet pipe 2 is arranged through the top of the condenser, the other end of the air outlet pipe 2 extends through a collection tank, and an air pump is arranged in the middle of the air outlet pipe 2.

[0017] Working principle: During use, a high-purity helium electron mixed gas to be distilled and purified is introduced into the inside of the distillation tank 1 through the air inlet. Then, the distillation component inside the distillation tank 1 is started to distill the gas. The distilled gas can enter the inside of the treatment tank 2 through the conduit 103. During the distillation process, when the air pressure inside the distillation tank 1 is too high, the gas can push the movable plate 1011 upward. During the upward movement of the movable plate 1011, the connecting rods 106 at both ends can be driven to move. And under the action of the rotational connection, the separation of the two arc-shaped sealing plates 108 can be realized, so as to expose the nozzle of the return pipe 105, enabling part of the gas to enter the inside of the return pipe 105. When the gas flows into the cooling tank 104, the gas can be condensed and liquefied. The liquefied substance will flow back into the distillation tank 1 from the return pipe 105, enabling the recovered gas after condensation to be purified again, preventing the possibility of explosion.

[0018] After the distilled gas enters the treatment tank 2, the bubbles in the gas are filtered out below the porous plate 207. At this time, the motor 501 is started to drive the worm 503 to rotate. Under the meshing action, the worm wheel 502 and the rotating shaft 208 can be driven to rotate, so as to complete the rotation of the scraper 2010 and puncture the bubbles, improving the separation efficiency and gas purity of the gas after subsequent condensation. After the bubbles are punctured, they will be divided into two parts: water droplets and gas. The water droplets will directly fall and be discharged outward through the drain port 202, and the gas will rise upward and enter the inside of the vaporization tank 204 through the air outlet pipe 1 2011, and is condensed by its condenser 4. At the same time, a part of the liquid condensed by the condenser 4 directly undergoes sufficient mass-energy exchange with the gas continuing to rise inside the vaporization tank 204, which can improve the gas separation efficiency and reduce energy consumption. Another part of the liquid condensed by the condenser 4 will flow back into the treatment pipe 2 through the connecting pipe 206. Finally, the air pump 301 is started to extract the gas condensed, separated and purified by the condenser 4 and transport the gas to the collection tank 3 for collection.

[0019] (III) Beneficial effects

[0020] The present invention provides a rectification and purification device for producing high-purity helium electronic gas. It has the following beneficial effects:

[0021] 1. By installing a movable plate and a spring assembly inside the distillation tank, when the air pressure inside the tank is too high, the movable plate is pushed up, causing the arc-shaped sealing plates at both upper ends to open, so that the reflux pipe orifice is exposed, and part of the gas is intermittently discharged into the cooling tank, which can reduce the pressure of the distillation tank and avoid explosion, improving the safety of the entire distillation and purification device;

[0022] 2. By arranging a porous plate and a scraper assembly inside the treatment tank, the excess bubbles in the gas can be removed, preventing the liquid contained in many bubbles from still existing in the finally produced gas and affecting the gas separation efficiency and gas purity. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 is the front view of a rectification and purification device for producing high-purity helium electronic gas proposed by the present invention;

[0024] Figure 2 is the cross-sectional view of a rectification and purification device for producing high-purity helium electronic gas proposed by the present invention;

[0025] Figure 3 is the schematic diagram of the worm gear assembly of a rectification and purification device for producing high-purity helium electronic gas proposed by the present invention;

[0026] Figure 4 is the schematic diagram of the pressure relief assembly of a rectification and purification device for producing high-purity helium electronic gas proposed by the present invention;

[0027] Figure 5 is the schematic diagram of the arc-shaped sealing plate limiting assembly of a rectification and purification device for producing high-purity helium electronic gas proposed by the present invention;

[0028] Figure 6 is the internal schematic diagram of the cooling tank of a rectification and purification device for producing high-purity helium electronic gas proposed by the present invention.

[0029] Among them, 1. Distillation tank; 101. Display screen; 102. First support; 103. Conduit; 104. Cooling tank; 105. Return pipe; 106. Connecting rod; 107. Fixed plate; 108. Arc-shaped sealing plate; 109. Chute; 1010. First through hole; 1011. Movable plate; 1012. Spring; 1013. Mounting block; 1014. Slide block; 1015. Groove; 1016. Slide bar; 1017. Connecting plate; 1018. Fixed frame; 1019. Cooling pipe; 2. Processing tank; 201. Second support; 202. Drain port; 203. Solenoid valve; 204. Gasification tank; 205. Check valve; 206. Connecting pipe; 207. Perforated plate; 208. Rotating shaft; 209. Positioning frame; 2010. Scraper; 2011. First gas outlet pipe; 2012. Mounting frame; 2013. Second through hole; 3. Collection tank; 301. Air pump; 302. Second gas outlet pipe; 4. Condenser; 5. Mounting plate; 501. Motor; 502. Worm gear; 503. Worm. Detailed implementation manners

[0030] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0031] Embodiment:

[0032] As Figure 1-6 shown, the embodiment of the present invention provides a rectification and purification device for producing high-purity helium electronic gas, including a distillation tank 1. A first support 102 is fixedly connected to the outer end of the distillation tank 1, and the device can be stably supported through the first support 102. A display screen 101 is arranged at the upper end of the distillation tank 1 on the first support 102. Mounting blocks 1013 are fixedly connected to the four inner ends of the distillation tank 1. Springs 1012 are fixedly connected to the upper ends of the mounting blocks 1013. The top of the spring 1012 is fixedly connected to a movable plate 1011. A first through hole 1010 is formed through the middle of the movable plate 1011. A fixed plate 107 is fixedly connected to one inner end of the distillation tank 1. A return pipe 105 is arranged through the inside of the distillation tank 1. The distilled gas can rise through the first through hole 1010 and enter the inside of the conduit 103. At the same time, a check valve assembly is also installed inside the conduit 103 to ensure the flow of the entire pipeline. Secondly, under the action of the spring 1012, the movable plate 1011 has an elastic force, so as to complete the reset work during the air pressure change process;

[0033] At the upper end of the movable plate 1011, two connecting rods 106 are rotatably connected. At the other end of the connecting rod 106, a fixing frame 1018 is rotatably connected. At the other end of the fixing frame 1018, an arc-shaped sealing plate 108 is fixedly connected. And there are two arc-shaped sealing plates 108. The arc-shaped sealing plate 108 is in contact with the opening of the reflux pipe 105. At the top of the two arc-shaped sealing plates 108, a connecting plate 1017 is fixedly connected. Inside the fixing plate 107, a slot 1015 is opened. Inside the slot 1015, a sliding rod 1016 is fixedly connected. The connecting plate 1017 is slidably connected to the sliding rod 1016. When the air pressure inside the distillation tank 1 is too high, the gas can push the movable plate 1011 upward. During the upward movement of the movable plate 1011, it can drive the connecting rods 106 at both ends to move. And under the action of the rotational connection, the separation of the two arc-shaped sealing plates 108 can be realized, thus exposing the nozzle of the reflux pipe 105, so that part of the gas can enter the inside of the reflux pipe 105. When the gas flows into the cooling tank 104, the gas can be condensed and liquefied. The liquefied substance will flow back into the distillation tank 1 from the reflux pipe 105. The released gas can be condensed and recovered, and then purified again. At the same time, it can also reduce the temperature inside the distillation tank 1, further preventing the possibility of explosion. And the setting of the slot 1015, the sliding rod 1016 and the connecting plate 1017 can limit the arc-shaped sealing plate 108. And the combined volume of the two arc-shaped sealing plates 108 is slightly larger than the nozzle of the reflux pipe 105 to ensure its sealing effect;

[0034] At the inner side of the distillation tank 1, three ends are provided with chutes 109. At the outer side of the movable plate 1011, three ends are fixedly connected with sliders 1014. The sliders 1014 are slidably connected inside the chutes 109. At the other end of the outer side of the distillation tank 1, an air inlet pipe is provided. The top of the distillation tank 1 is provided with a conduit 103 penetrating through it. The middle of the reflux pipe 105 is provided with a cooling tank 104 penetrating through it. Inside the cooling tank 104, a cooling pipe 1019 is fixedly connected. By setting the chutes 109 and the sliders 1014, the movable plate 1011 can be restricted to ensure the lifting movement of the movable plate 1011 under the action of air pressure;

[0035] The other end of the conduit 103 is provided with a processing tank 2 penetrating through it. At the outer end of the processing tank 2, a support two 201 is fixedly connected. At the bottom of the processing tank 2, a drain port 202 is provided with a solenoid valve 203 installed inside it. By setting the drain port 202, gas-liquid separation can be completed, and the moisture in the gas can be discharged outwards;

[0036] The top of the processing tank 2 is fixedly connected with a mounting plate 5. The outer end of the mounting plate 5 is fixedly connected with a motor 501. The inside of the mounting plate 5 is rotatably connected with a worm 503. The output end of the motor 501 is fixedly connected with the worm 503. The middle part of the processing tank 2 is rotatably connected with a rotating shaft 208. The top of the rotating shaft 208 is fixedly connected with a worm gear 502. The worm gear 502 meshes with the worm 503. The inside of the processing tank 2 is fixedly connected with a positioning frame 209. The rotating shaft 208 is rotatably connected to the positioning frame 209. The inside of the processing tank 2 is fixedly connected with multiple groups of porous plates 207. A number of through holes two 2013 are formed in the porous plates 207. A scraper 2010 is fixedly connected to the rotating shaft 208. The scraper 2010 is in contact with the bottom of the porous plate 207. Starting the motor 501 drives the worm 503 to rotate. Under the meshing action, it can drive the worm gear 502 and the rotating shaft 208 to rotate, so as to complete the rotation of the scraper 2010, puncture the bubbles, improve the separation efficiency of the gas after subsequent condensation and the gas purity. After the bubbles are punctured, they will be divided into two parts: water droplets and gas. The water droplets will directly fall and be discharged outward through the drain port 202;

[0037] Both ends above the processing tank 2 are fixedly connected with mounting frames 2012. The top of the mounting frames 2012 is fixedly connected with a vaporization tank 204. A condenser 4 is arranged through the top of the vaporization tank 204. A connecting pipe 206 is arranged through the bottom of the vaporization tank 204 and extends inward into the processing tank 2. A one-way valve 205 is installed inside the connecting pipe 206. Both ends on the outside of the processing tank 2 are provided with an air outlet pipe one 2011 through which. And the other end of the air outlet pipe one 2011 is arranged through the inside of the vaporization tank 204. A gas outlet pipe two 302 is arranged through the top of the condenser 4. The other end of the gas outlet pipe two 302 is arranged through a collection tank 3. An air pump 301 is arranged in the middle of the gas outlet pipe two 302. The gas rises upward through the air outlet pipe one 2011 and enters the inside of the vaporization tank 204. It is condensed by the condenser 4. At the same time, a part of the liquid condensed by the condenser 4 directly undergoes sufficient mass and energy exchange with the gas that continues to rise in the vaporization tank 204, which can improve the gas separation efficiency and reduce energy consumption. And another part of the liquid condensed by the condenser 4 will flow back into the processing pipe 2 through the connecting pipe 206. Finally, start the air pump 301 to extract the gas condensed, separated and purified by the condenser 4 and transport the gas to the collection tank 3 for collection.

[0038] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A rectification and purification device for producing high-purity helium electronic gas, including a distillation tank (1), characterized in that: A support one (102) is fixedly connected to the outer end of the distillation tank (1). A display screen (101) is arranged at the upper end of the distillation tank (1) on the support one (102). Four inner ends of the distillation tank (1) are fixedly connected with mounting blocks (1013). Springs (1012) are fixedly connected to the upper ends of the mounting blocks (1013). A movable plate (1011) is fixedly connected to the top of the springs (1012). A through hole one (1010) is formed through the middle of the movable plate (1011). A fixing plate (107) is fixedly connected to one inner end of the distillation tank (1). A reflux pipe (105) is arranged through the inside of the distillation tank (1). Two connecting rods (106) are rotatably connected to one upper end of the movable plate (1011). The other ends of the connecting rods (106) are rotatably connected to a fixing frame (1018). An arc-shaped sealing plate (108) is fixedly connected to the other end of the fixing frame (1018), and there are two arc-shaped sealing plates (108). The arc-shaped sealing plate (108) is in contact with the opening of the reflux pipe (105). A connecting plate (1017) is fixedly connected to the top of the two arc-shaped sealing plates (108). A slot (1015) is formed inside the fixing plate (107). A sliding rod (1016) is fixedly connected to the inside of the slot (1015). The connecting plate (1017) is slidably connected to the sliding rod (1016). Three inner ends of the distillation tank (1) are provided with chutes (109). Three outer ends of the movable plate (1011) are fixedly connected with sliders (1014). The sliders (1014) are slidably connected to the inside of the chutes (109). An air inlet pipe is formed at the other outer end of the distillation tank (1). A conduit (103) is arranged through the top of the distillation tank (1). A cooling tank (104) is arranged through the middle of the reflux pipe (105). A cooling pipe (1019) is fixedly connected to the inside of the cooling tank (104).

2. The rectification and purification equipment for producing high-purity helium electronic gas according to claim 1, wherein: The other end of the conduit (103) is arranged through a treatment tank (2). A support two (201) is fixedly connected to the outer end of the treatment tank (2).

3. The rectification and purification equipment for producing high-purity helium electronic gas according to claim 2, characterized in that: A drain port (202) is arranged through the bottom of the treatment tank (2). A solenoid valve (203) is installed inside the drain port (202).

4. A rectification and purification device for producing high-purity helium electronic gas according to claim 2, characterized in that: A mounting plate (5) is fixedly connected to the top of the treatment tank (2). A motor (501) is fixedly connected to the outer end of the mounting plate (5). A worm (503) is rotatably connected to the inside of the mounting plate (5). The output end of the motor (501) is fixedly connected to the worm (503).

5. A rectification and purification device for producing high-purity helium electronic gas according to claim 2, characterized in that: A rotating shaft (208) is rotatably connected to the middle of the treatment tank (2). A worm gear (502) is fixedly connected to the top of the rotating shaft (208). The worm gear (502) meshes with the worm (503). A positioning frame (209) is fixedly connected to the inside of the treatment tank (2). The rotating shaft (208) is rotatably connected to the positioning frame (209).

6. The rectification and purification equipment for producing high-purity helium electronic gas according to claim 5, characterized in that: Inside the treatment tank (2), multiple groups of perforated plates (207) are fixedly connected. A number of through holes II (2013) are formed in the perforated plates (207). A scraper (2010) is fixedly connected to the rotating shaft (208), and the scraper (2010) is in contact with the bottom of the perforated plate (207).

7. A rectification and purification device for producing high-purity helium electronic gas according to claim 2, characterized in that: At both upper ends of the treatment tank (2), mounting frames (2012) are fixedly connected. At the top of the mounting frames (2012), a gasification tank (204) is fixedly connected. A condenser (4) penetrates through the top of the gasification tank (204). A connecting pipe (206) is arranged inside the treatment tank (2) through the bottom of the gasification tank (204). A one-way valve (205) is installed inside the connecting pipe (206). At both outer ends of the treatment tank (2), an air outlet pipe I (2011) penetrates through, and the other end of the air outlet pipe I (2011) penetrates through and is arranged inside the gasification tank (204).

8. A rectification and purification device for producing high-purity helium electronic gas according to claim 7, characterized in that: An air outlet pipe II (302) penetrates through the top of the condenser (4). The other end of the air outlet pipe II (302) penetrates through and is arranged in a collection tank (3). An air pump (301) is arranged in the middle of the air outlet pipe II (302).

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