Fluid generator and fluid control device

Abstract

The invention relates to the technical field of fluid generators, in particular to a fluid generator and a fluid control device.The fluid generator comprises a piezoelectric actuator, a spacing part and a diaphragm, and a cavity is defined by the piezoelectric actuator, the spacing part and the diaphragm; the vibration antinode position of the diaphragm and the adjacent area of the antinode position protrude out of the surface of the diaphragm to form a convex part, so that the continuity of the rigidity of the diaphragm is broken, and a rigidity sudden change is formed at the outer peripheral edge of the convex part; as the amplitude of the antinode position and the amplitude of the area, closer to the outer side of the antinode, of the area adjacent to the antinode position are not in continuous gradient distribution any more, the area, opposite to the convex part, of the diaphragm can obtain larger vibration energy to generate larger amplitude, and then the output flow is increased; in addition, since the diaphragm forms stiffness abrupt change at the peripheral edges of the convex parts, at the same time, the first hole parts arranged in the areas, opposite to the convex parts, of the diaphragm are in or tend to the air outlet stroke or the exhaust stroke at the same time, and the output flow is further improved.

Description

Technical Field

[0001] The present invention relates to the technical field of fluid generators, and in particular, to a fluid generator and a fluid control device. Background Art

[0002] The invention application with Chinese publication number CN118979867A discloses an existing fluid generating device. The above fluid generating device includes an actuator formed by bonding a substrate and a piezoelectric sheet. The piezoelectric sheet, under the excitation of an electrical signal, causes the actuator to vibrate; a spacer portion, bonded to at least one main surface of the actuator, and surrounding the actuator to form a groove portion having an opening at one end away from the actuator; and a diaphragm, fixedly connected to the end of the spacer portion away from the actuator and covering the opening of the groove portion, so as to form a chamber between the actuator, the groove portion and the diaphragm. A hole portion communicating with the chamber penetrates through the region of the diaphragm opposite to the chamber; when the actuator vibrates under the excitation of an electrical signal, the vibration energy is transmitted to the diaphragm to cause the diaphragm to generate vibrations in a higher-order resonance mode having at least two antinodes. At least one hole portion is formed at the antinode position or in the adjacent region of the antinode position of the diaphragm vibration. The above fluid generating device provides a new breakthrough point for improving the utilization rate of vibration energy and increasing the output flow rate of the fluid generating device under limited scales.

[0003] In order to explore the limits of the output performance of the above fluid generating device, therefore, the inventors of the present application have conducted further research on the above fluid generating device.

[0004] In the fluid generating device of this structural type, the vibration energy of the actuator is transmitted to the diaphragm, thereby causing the diaphragm to vibrate. Since the diaphragm has a planar film / plate-like structure with continuous stiffness and is substantially constrained around the perimeter, on the one hand, when the diaphragm vibrates, the amplitude size from the antinode position and the region adjacent to the antinode position towards the region further outside the antinode shows a continuous gradient distribution, and the vibration energy distribution is not concentrated. During operation, the hole portions formed at each antinode position or in the adjacent region of the antinode position of the diaphragm vibration independently inhale and discharge fluid during the process. The working space during this process is mainly concentrated in the region of the chamber opposite to the hole portions, which results in the vibration energy in the region further outside the antinode not being effectively utilized; on the other hand. When the diaphragm generates vibrations in a higher-order resonance mode having at least two antinodes, the vibration directions of two adjacent antinodes are opposite at the same moment. That is to say, at the same moment, the hole portions at some antinode positions or in the adjacent regions of the antinode positions are in or tend to be in the air exhaust stroke, while the hole portions at some other antinode positions or in the adjacent regions of the antinode positions are in or tend to be in the air intake stroke, and the output performance of the fluid generating device is restricted. Summary of the Invention

[0005] The technical problem to be solved by the present invention is: to solve the deficiencies in the prior art, there is provided a fluid generator and a fluid control device having the same.

[0006] The technical solution adopted by the present invention to solve its technical problems is as follows: A fluid generator includes a piezoelectric actuator, a spacer, and a diaphragm. The diaphragm is joined to the piezoelectric actuator through the spacer, and a chamber is formed among the piezoelectric actuator, the spacer, and the diaphragm.

[0007] The diaphragm has a fixed portion and a vibrating portion. The fixed portion is fixedly connected to one end of the spacer away from the piezoelectric actuator. The fixed portion is connected to the vibrating portion, and the vibrating portion forms an end wall of the chamber in the thickness direction of the piezoelectric actuator.

[0008] When the piezoelectric actuator vibrates under the excitation of an electrical signal, it transfers the vibration energy to the diaphragm to cause the diaphragm to vibrate. At least one first hole portion communicating with the chamber penetrates through the diaphragm at the antinode position or the adjacent area of the antinode position during the vibration of the diaphragm.

[0009] The antinode position and the adjacent area of the antinode position of the diaphragm vibration protrude from the diaphragm surface to form a convex portion. The convex portion is a convex portion that is formed by the depression of one side surface of the diaphragm and protrudes on the other side surface of the diaphragm, and the first hole portion penetrates through the convex portion.

[0010] Furthermore, the convex portion is formed by shaping the antinode position and the adjacent area of the antinode position of the diaphragm vibration.

[0011] Preferably, when the piezoelectric actuator vibrates under the excitation of an electrical signal, it transfers the vibration energy to the diaphragm to cause the diaphragm to vibrate with at least two antinodes. At least one first hole portion communicating with the chamber penetrates through the diaphragm at at least one antinode position or the adjacent area of the antinode position during the vibration of the diaphragm.

[0012] In this structure, preferably, at least one first hole portion communicating with the chamber penetrates through the diaphragm at at least two antinode positions or the adjacent areas of the antinode positions during the vibration of the diaphragm.

[0013] In this structure, more preferably, at least one first hole portion communicating with the chamber penetrates through the diaphragm at each antinode position or the adjacent area of the antinode position during the vibration of the diaphragm.

[0014] Furthermore, a partition portion is further provided on the diaphragm around the outer periphery of the convex portion or between two adjacent convex portions. The area where the vibrating portion is located outside the partition portion is the vibration area.

[0015] The ability of the area of the diaphragm opposite to the partition portion to resist elastic deformation when stressed is greater than the ability of the area of the diaphragm opposite to the vibration area to resist elastic deformation when stressed.

[0016] Furthermore, the partition portion protrudes from the surface of the vibrating portion of the diaphragm.

[0017] The partition part of the present invention can be formed by, but not limited to, the following methods:

[0018] First: The diaphragm forms the partition part by local area shaping. The partition part is a partition rib provided on the vibrating part and protruding from the surface of the diaphragm. The partition rib protrudes from the surface of the diaphragm and is wound around the outer periphery of the convex part or between two adjacent convex parts.

[0019] Second: The partition part is formed by providing reinforcing ribs in a local area on at least one surface of the diaphragm. The reinforcing rib has a main body section provided on the vibrating part. The main body section protrudes from the surface of the diaphragm and is wound around the outer periphery of the convex part or between two adjacent convex parts.

[0020] Further, the reinforcing rib further has an extension section extending from the main body section to the fixing part of the diaphragm. The extension section protrudes from the surface of the diaphragm;

[0021] The extension section is fixedly clamped between the fixing part of the diaphragm and the spacer part, and / or the extension section is fixedly connected to the side of the fixing part of the diaphragm facing away from the spacer part.

[0022] Further, the spacer part is a ring structure. The inner peripheral wall of the spacer part, the piezoelectric actuator, and the diaphragm enclose a chamber. One end of the spacer part facing away from the piezoelectric actuator is entirely or partially joined to the diaphragm on an annular path around the outer periphery of the chamber;

[0023] Or, the spacer part has a plurality of spacers. The spacers of the same spacer part are all joined to the same side surface of the piezoelectric actuator. The plurality of spacers are spaced apart along an annular path around the chamber to enclose the chamber with the piezoelectric actuator and the diaphragm. One end of the spacer facing away from the piezoelectric actuator is entirely or partially joined to the diaphragm.

[0024] Further, the diaphragm is made of a polymer material or a composite material composed of a polymer material and a metal material.

[0025] Further, the piezoelectric actuator has a vibrating plate, and at least one piezoelectric sheet is joined to one or both surfaces of the vibrating plate in the thickness direction. The piezoelectric sheet and the vibrating plate are joined to form the piezoelectric actuator.

[0026] The present invention also provides a fluid control device, including the above-mentioned fluid generator.

[0027] Further, it further includes an opposing plate. The opposing plate is spaced apart from the side of the diaphragm facing away from the piezoelectric actuator, so that a separation chamber is formed between the opposing plate and the diaphragm. A second hole portion is correspondingly provided at a position on the opposing plate opposite to the first hole portion.

[0028] Further, the flow-through area of the second hole portion is 1.1 to 10 times that of the corresponding first hole portion.

[0029] Further, in some structures, a plurality of spoke ribs extending from the hole wall toward the center are provided in the second hole portion, and the plurality of spoke ribs are circumferentially spaced apart in the second hole portion to form a hollow structure, and a fluid passage opening through which fluid can flow is formed between adjacent spoke ribs, and the flow-through area of the fluid passage opening is smaller than that of the second hole portion.

[0030] It is possible that the spoke ribs converge in the central region of the second hole portion to form a connecting portion.

[0031] Further, a flow-through hole penetrating the connecting portion is provided on the connecting portion.

[0032] In the structure with distributed spoke ribs, the flow-through area of the hollow structure is 50%-90% of that of the second hole portion.

[0033] Further, in some structures, a mesh structure through which fluid can flow and extending from the hole wall toward the center is provided in the second hole portion, the mesh structure includes a plurality of penetrating mesh holes, and the flow-through area of the mesh holes is smaller than that of the second hole portion.

[0034] In the structure with the mesh structure, the area of the region of the mesh structure opposite to the second hole portion is a facing flow-through region, and the flow-through area of the facing flow-through region is 50%-90% of that of the second hole portion.

[0035] Further, in some structures, a flow-through plate is further included;

[0036] The flow-through plate is disposed between the diaphragm and the counter plate and / or on the counter plate, and at least the region of the flow-through plate opposite to the second hole portion has a mesh structure through which fluid can flow, the mesh structure includes a plurality of mesh holes penetrating the flow-through plate, and the flow-through area of the mesh holes is smaller than that of the second hole portion.

[0037] Further, the flow-through plate is joined to the surface of the counter plate facing the diaphragm.

[0038] In the structure with the flow-through plate, the area of the region of the mesh structure opposite to the second hole portion is a facing flow-through region, and the flow-through area of the facing flow-through region is 50%-90% of that of the second hole portion.

[0039] Further, an elastic support structure is further included, and the fluid generator is elastically supported on the counter plate through the elastic support structure.

[0040] The beneficial effects of the present invention are:

[0041] 1) In the fluid generator of the present invention, when the piezoelectric actuator vibrates under the stimulation of an electrical signal, the piezoelectric actuator transmits the vibration energy to the diaphragm to cause the diaphragm to vibrate. The antinode position of the diaphragm vibration and the adjacent area of the antinode position protrude from the surface of the diaphragm to form a convex portion, thereby breaking the continuity of the diaphragm stiffness and forming a stiffness mutation at the outer edge of the convex portion. When the diaphragm vibrates, the amplitude from the antinode position and the adjacent area of the antinode position toward the area closer to the antinode no longer presents a continuous gradient distribution, and the vibration energy is relatively concentrated. The area opposite to the diaphragm and the convex portion can obtain greater vibration energy and generate a larger amplitude. The cavity and the first The area opposite to the hole portion has a larger volume change during the air inlet and outlet process, thereby increasing the output flow rate; in addition, since the diaphragm forms a sudden change in stiffness at the outer peripheral edge of the convex portion, the vibration mode of the diaphragm during vibration has changed relative to the vibration mode of the flat diaphragm with continuous stiffness. When the diaphragm produces a high-order resonance mode vibration with at least two wave nodes, it has a vibration mode with the same vibration direction as the area of the diaphragm opposite to each convex portion at the same time. That is to say, at the same time, the first hole portion arranged in the area of the diaphragm opposite to each convex portion is simultaneously in or tending to the air outlet stroke or the exhaust stroke, and the output flow rate is further improved.

[0042] 2) The fluid generator of the present invention provides a partition on the diaphragm around the outer periphery of the convex portion or between two adjacent convex portions, and the area where the vibrating portion is located outside the partition is the vibration zone; the ability of the area of the diaphragm opposite to the partition to resist elastic deformation when a force is applied is greater than the ability of the area of the diaphragm opposite to the vibration zone when a force is applied, so that the vibration energy transmitted to the diaphragm by the piezoelectric actuator mainly acts on the area of the diaphragm opposite to the convex portion, causing the area of the diaphragm opposite to the convex portion to generate a larger amplitude vibration, reducing the energy loss of the diaphragm at the partition, and improving the utilization rate of the vibration energy; at the same time, by providing the partition, it is beneficial to further strengthen the stiffness mutation formed by the diaphragm at the outer peripheral edge of the convex portion, further optimize the vibration mode of the diaphragm, and ensure that when the diaphragm vibrates, the vibration mode of the diaphragm area opposite to each convex portion at the same time can be generated, thereby increasing the output flow rate.

[0043] 3) The fluid control device of the present invention provides a spoke rib or mesh structure for fluid circulation in the second hole portion, or provides a flow plate between the diaphragm and the opposing plate or / and on the opposing plate, and makes at least the area of the flow plate opposite to the second hole portion present a mesh structure for fluid circulation. This reduces the velocity difference between the center and the edge of the airflow when it passes through the second hole portion, and the velocity gradient distribution from the center to the edge of the airflow becomes gentle, which can effectively suppress the outflow noise.

[0044] Other features and advantages of the present application will become clear from the following detailed description of the exemplary embodiments of the present application with reference to the accompanying drawings. Description of the Drawings

[0045] The present invention will be further described below in conjunction with the accompanying drawings and embodiments.

[0046] Figure 1 It is a schematic structural view of a groove portion formed by a spacer portion and a diaphragm.

[0047] Figure 2 It is a schematic structural view of a spacer portion and a piezoelectric sheet disposed on the same side surface of the diaphragm in the thickness direction.

[0048] Figure 3 It is a schematic structural view of a piezoelectric actuator with spacer portions combined with the diaphragm provided on both main surfaces thereof, and a piezoelectric sheet provided on any one side surface of the diaphragm in the thickness direction.

[0049] Figure 4 It is a schematic structural view of a piezoelectric actuator with piezoelectric sheets and spacer portions provided on both main surfaces thereof, and the spacer portions being joined to the piezoelectric sheets.

[0050] Figure 5 It is a schematic structural view of a piezoelectric actuator with spacer portions provided on both main surfaces thereof, wherein the spacer portion on one side is joined to the piezoelectric sheet, and the spacer portion on the other side is combined with the diaphragm.

[0051] Figure 6 It is a schematic view of a chamber formed by enclosing a piezoelectric actuator, a spacer portion, and a diaphragm.

[0052] Figure 7 It is a schematic view when the diaphragm bulges and deforms in one direction during vibration.

[0053] Figure 8 It is a schematic view when the diaphragm bulges and deforms in the other direction during vibration.

[0054] Figure 9 It is a schematic view of a fluid generator in Embodiment 1, in which a concave portion is formed on one side surface of the diaphragm close to the piezoelectric actuator, and a convex portion protrudes on the other side surface of the diaphragm away from the piezoelectric actuator.

[0055] Figure 10 It is a schematic view of a fluid generator in Embodiment 1, in which a concave portion is formed on one side surface of the diaphragm away from the piezoelectric actuator, and a convex portion protrudes on the other side surface of the diaphragm close to the piezoelectric actuator.

[0056] Figure 11 It is a three-dimensional schematic view of a first hole portion formed on the convex portion of the diaphragm.

[0057] Figure 12 It is a three-dimensional schematic view of the fluid generator.

[0058] Figure 13 It is a schematic diagram of a dome-like shape formed at one end of the convex part;

[0059] Figure 14 is a schematic diagram of external fluid entering the chamber along the first hole portion when the diaphragm vibrates;

[0060] Figure 15 is a schematic diagram of the fluid being discharged from the chamber along the first hole portion when the diaphragm vibrates;

[0061] Figure 16 is a schematic diagram of a spacer having a plurality of discrete spacers distributed in a ring shape;

[0062] Figure 17 is a schematic diagram of a fluid generator having a partition provided on a diaphragm;

[0063] Figure 18 It is a schematic diagram when the partition on the diaphragm is a partition rib;

[0064] Figure 19 is a schematic diagram of a fluid generator in which the partition on the diaphragm is a plurality of discretely arranged partition strips;

[0065] Figure 20 is a schematic diagram of a fluid generator in which a reinforcing rib is provided on the surface of a side of a diaphragm facing away from a piezoelectric actuator;

[0066] Figure 21 is a bottom view schematic diagram of a fluid generator in which a reinforcing rib with an extended section is provided on a side of the diaphragm facing away from the piezoelectric actuator;

[0067] Figure 22 yes Figure 21 AA section view in FIG.

[0068] Figure 23 is a cross-sectional schematic diagram of a fluid generator in which a reinforcing rib is provided on one side of the diaphragm close to the piezoelectric actuator;

[0069] Figure 24 is a cross-sectional schematic diagram of a fluid generator in which a first reinforcing rib and a second reinforcing rib are respectively arranged on both sides of a diaphragm;

[0070] Figure 25 is a schematic cross-sectional view of a fluid control device;

[0071] Figure 26 is a cross-sectional schematic diagram of a fluid control device provided with a flow plate;

[0072] Figure 27 is a schematic longitudinal section diagram of a hollow structure provided in the second hole portion;

[0073] Figure 28It is a schematic cross-sectional view of a hollow structure provided in the second hole portion;

[0074] Figure 29 It is a schematic cross-sectional view of a hollow structure with a connecting portion provided in the second hole portion;

[0075] Figure 30 It is a schematic view of a through-flow hole penetrating through the connecting portion of the hollow structure;

[0076] Figure 31 It is a schematic longitudinal-sectional view of a mesh structure provided in the second hole portion;

[0077] Figure 32 It is a schematic cross-sectional view of a mesh structure provided in the second hole portion;

[0078] Figure 33 It is a schematic cross-sectional view of a fluid control device provided with an elastic support structure.

[0079] In the figure: 1. Piezoelectric actuator, 11. Vibration plate, 12. Piezoelectric sheet, 1a. First main surface, 1b. Second main surface;

[0080] 2. Diaphragm, 2-1. Fixed portion, 2-2. Vibration portion, 21. Concave portion, 22. Convex portion, 221. First hole portion;

[0081] 3. Spacer portion, 31. Groove portion, 32. Spacer;

[0082] 4. Chamber;

[0083] 5. Opposing plate, 51. Second hole portion, 511. Spoke rib, 512. Fluid passage port, 513. Connecting portion, 514. Through-flow hole.

[0084] 6. Partition portion, 61. First reinforcing rib, 62. Second reinforcing rib, 63. Reinforcing rib, 631. Main body section, 632. Extension section, 64. Partition rib, 6a. Partition strip;

[0085] 7. Partition chamber;

[0086] 8. Through-flow plate, 81. Mesh structure, 811. Mesh hole;

[0087] 9. Elastic support structure, 91. Frame portion, 92. Elastic arm;

[0088] A. Antinode position. Detailed implementation manner

[0089] The present invention will now be described in further detail with reference to the accompanying drawings. These drawings are simplified schematic diagrams that only illustrate the basic structure of the present invention in a schematic manner, and therefore only show the components related to the present invention, and directions and references (e.g., up, down, left, right, etc.) may only be used to help describe the features in the drawings. Therefore, the following specific embodiments are not to be taken in a limiting sense, and the scope of the subject matter claimed is limited only by the attached claims and their equivalents.

[0090] Example 1

[0091] like Figure 9 and 10 As shown, a fluid generator can be used as a fan, including a piezoelectric actuator 1, a spacer 3 and a diaphragm 2 stacked and positioned in sequence, the diaphragm 2 is connected to the piezoelectric actuator 1 through the spacer 3, and a chamber 4 is enclosed between the piezoelectric actuator 1, the spacer 3 and the diaphragm 2.

[0092] The piezoelectric actuator 1 has a vibration plate 11, and at least one piezoelectric sheet 12 is bonded to one side or both sides of the vibration plate 11 in the thickness direction. The piezoelectric sheet 12 can be a piezoelectric ceramic sheet. The piezoelectric sheet 12 and the vibration plate 11 constitute the piezoelectric actuator 1. The piezoelectric actuator 1 has a first main surface 1a and a second main surface 1b that are relatively arranged in the thickness direction. The piezoelectric sheet 12 causes the piezoelectric actuator 1 to vibrate under the excitation of an electrical signal.

[0093] The vibration plate 11 may be, but is not limited to, circular, rectangular, polygonal or elliptical, etc. In this embodiment, the vibration plate 11 is in the shape of a circular plate as an example. A single piezoelectric sheet 12 can be bonded to any side surface of the vibration plate 11 in the thickness direction to form a single-chip piezoelectric actuator 1; or two piezoelectric sheets 12 are respectively arranged on the two side surfaces of the vibration plate 11 in the thickness direction to form a dual-chip piezoelectric actuator 1; or a plurality of piezoelectric sheets 12 are arranged on the same side surface of the vibration plate 11 in the thickness direction to form a composite multilayer piezoelectric actuator 1, etc. The piezoelectric sheet 12 causes the piezoelectric actuator 1 to vibrate under the excitation of an external periodic electrical signal.

[0094] The first main surface 1a and / or the second main surface 1b of the piezoelectric actuator 1 are joined with a spacer 3, which is joined to the piezoelectric actuator 1 near one end of the piezoelectric actuator 1, and the spacer 3 and the piezoelectric actuator 1 form a groove 31 with an opening at one end away from the piezoelectric actuator 1.

[0095] Specifically:

[0096] The spacer portion 3 can be joined to one or both surfaces of the diaphragm 11 that constitutes the piezoelectric actuator 1 in the thickness direction. At this time, it is not difficult to understand that the spacer portion 3 can be joined to one surface of the diaphragm 11 in the thickness direction or the other surface of the base diaphragm 11 in the thickness direction, as Figure 1 and 2 shown. Of course, when there are multiple spacer portions 3 at the same time, for example, the fluid generator of the present application can have the function of bidirectional operation. At this time, spacer portions 3 are provided on both main surfaces of the piezoelectric actuator 1, and the spacer portions 3 can be respectively provided on both surfaces of the diaphragm 11 in the thickness direction, as Figure 3 shown; in this structure, when the spacer portion 3 and the piezoelectric sheet 12 are provided on the same surface of the diaphragm 11 in the thickness direction, the piezoelectric sheet 12 is located in the groove portion 31 of the spacer portion 3. At the same time, the spacer portion 3 has a height protruding from the surface of the piezoelectric sheet 12, as Figure 2 and Figure 3 shown; when the spacer portion 3 and the piezoelectric sheet 12 are respectively provided on both surfaces of the diaphragm 11 in the thickness direction, there is no such limitation; the joining between the spacer portion 3 and the diaphragm 11 can be bonding or integral molding.

[0097] In addition, the spacer portion 3 can also be joined to the surface of the piezoelectric sheet 12 that constitutes the piezoelectric actuator 1 and faces away from the actuator. In this structure, it is not difficult to understand that when the piezoelectric actuator 1 constitutes the above-mentioned single-chip piezoelectric actuator 1, the spacer portion 3 can be joined to the surface of the piezoelectric sheet 12 that constitutes the single-chip piezoelectric actuator 1 and faces away from the diaphragm 11; when the piezoelectric actuator 1 constitutes the above-mentioned double-chip piezoelectric actuator 1, the spacer portion 3 can be joined to the surface of any one of the piezoelectric sheets 12 that constitutes the double-chip piezoelectric actuator 1 and faces away from the diaphragm 11. Of course, when there are multiple spacer portions 3 at the same time, for example, the fluid generator of the present application can have the function of bidirectional operation. At this time, spacer portions 3 are provided on the first main surface 1a and the second main surface 1b of the piezoelectric actuator 1, and the spacer portions 3 can be respectively provided on the surfaces of the two piezoelectric sheets 12 that constitute the double-chip piezoelectric actuator 1 and face away from the diaphragm 11, as Figure 4 shown.

[0098] In addition, it is not difficult to understand that when there are multiple spacer portions 3 at the same time, the above-mentioned joining methods of the spacer portions 3 can also be combined with each other. For example, the fluid generator of the present application can have the function of bidirectional operation. At this time, spacer portions 3 are provided on the first main surface 1a and the second main surface 1b of the piezoelectric actuator 1. Among them, at least one spacer portion 3 is joined to the surface of the piezoelectric sheet 12 that constitutes the piezoelectric actuator 1 and faces away from the piezoelectric actuator 1, and there is also at least one spacer portion 3 joined to the side of the diaphragm 11 that faces away from the piezoelectric actuator 1, as Figure 5 shown; in this structure, the joining between the spacer portion 3 and the diaphragm 11 can be bonding or integral molding.

[0099] Of course, the joining method of the spacer portion 3 is not limited thereto. The joining method of the spacer portion 3 follows the principle that one end of the spacer portion 3 close to the piezoelectric actuator 1 is connected to the piezoelectric actuator 1, and a groove portion 31 with an opening is formed at one end of the spacer portion 3 and the piezoelectric actuator 1 facing away from the piezoelectric actuator 1.

[0100] In this embodiment, the piezoelectric actuator 1 is configured as a single-chip piezoelectric actuator 1, and there is one spacer portion 3. The spacer portion 3 is joined to the surface of the diaphragm 11 on the side where the second main surface 1b of the piezoelectric actuator 1 is located for the purpose of facilitating understanding.

[0101] The spacer portion 3 is joined to the surface of the diaphragm 11 on the side where the second main surface 1b is located. One end of the spacer portion 3 close to the diaphragm 11 is connected to the diaphragm 11, and a groove portion 31 with an opening is formed at one end of the spacer portion 3 and the diaphragm 11 facing away from the diaphragm 11, as Figure 1 shown; the joining between the spacer portion 3 and the diaphragm 11 can be bonding or integral molding. The spacer portion 3 has an annular structure, and the inner peripheral wall of the spacer portion 3 itself encloses the groove portion 31;

[0102] One end of the spacer portion 3 close to the diaphragm 11 is joined to the surface of the diaphragm 11 on the side where the second main surface 1b is located. The diaphragm 2 is connected to one end of the spacer portion 3 facing away from the diaphragm 11. Thereby, the vibration of the piezoelectric actuator 1 can directly drive the spacer portion 3 and the diaphragm 2 to vibrate, so as to transfer the vibration energy to the diaphragm 2.

[0103] The diaphragm 2 has a fixing portion 2-1 and a vibrating portion 2-2. The fixing portion 2-1 is fixedly connected to one end of the spacer portion 3 facing away from the piezoelectric actuator 1, so that the diaphragm 2 covers the opening of the groove portion 31 and a chamber 4 is formed by enclosing between the piezoelectric actuator 1, the groove portion 31 and the diaphragm 2. The fixing portion 2-1 and the vibrating portion 2-2 are integrally formed or fixedly connected. The vibrating portion 2-2 is formed as one end wall of the chamber 4 in the thickness direction of the piezoelectric actuator 1; thus, the diaphragm 2 is fixedly connected to the piezoelectric actuator 1 through the spacer portion 3, and the vibration of the piezoelectric actuator 1 causes the diaphragm 2 to vibrate; when the piezoelectric actuator 1 vibrates under the excitation of an electrical signal, the vibration energy is transferred to the diaphragm 2 to cause the diaphragm 2 to vibrate. At least one first hole portion 221 communicating with the chamber 4 penetrates through the diaphragm 2 at the antinode position A or in the adjacent region of the antinode position A. The adjacent region of the antinode position A refers to the region within the interval between the node position and the antinode position A of the diaphragm 2 that is close to the side where the antinode position A is located but does not include the antinode position A, as Figures 6 - 8 shown, Figure 7 and Figure 8The "+" in it indicates that the diaphragm 2 bulges and deforms in one direction, the "-" indicates that the diaphragm 2 bulges and deforms in the other direction, and the area outlined by the long dash and double short dashes indicates the area where the antinode position A is located; there are four antinodes symmetrically distributed on the diaphragm 2;

[0104] The cross-sectional shape of the first hole portion 221 can be circular, or square, rectangular, elliptical or other shapes, which is not limited here. In this embodiment, the cross-sectional shape of the first hole portion 221 is taken as circular for illustration, but this does not constitute a limitation to the present invention.

[0105] It should be noted that in this embodiment, the number of antinodes generated by the vibration of the diaphragm 2, the antinode position A of the vibration of the diaphragm 2, and the adjacent area of the antinode position A are determined when the diaphragm 2 is in a state of a planar film / plate structure with continuous stiffness and is excited. For example, taking the case where the diaphragm 2 shown in Figures 6 - 8 generates four antinodes during vibration as an illustration, but this does not constitute a limitation to the present invention. In engineering, the vibration mode of the diaphragm 2 can usually be simulated by using finite element analysis software. After determining the number of antinodes generated by the vibration of the diaphragm 2, the antinode position A of the vibration of the diaphragm 2, and the adjacent area of the antinode position A, the diaphragm 2 is reconstructed so that the antinode position A of the vibration of the diaphragm 2 and the adjacent area of the antinode position A protrude from the surface of the diaphragm 2 to form a convex portion 22. The convex portion 22 is a convex portion 22 that protrudes from the other surface of the diaphragm 2 due to the depression of one surface of the diaphragm 2 to form a depression portion 21. The first hole portion 221 penetrates through the convex portion 22. It can be that the diaphragm 2 protrudes to form the convex portion 22 on the side facing away from the piezoelectric actuator 1, as shown in Figure 9 shown; it can also be that the diaphragm 2 protrudes to form the convex portion 22 on the side facing the piezoelectric actuator 1, as shown in Figure 10 shown; for a single convex portion 22, the protruding shape can be a flat-bottomed shape formed at one end of the convex portion 22, as shown in Figures 9 - 12 shown, or a dome-shaped shape formed at one end of the convex portion 22, as shown in Figure 13 shown. The specific shape of the convex portion 22 does not constitute a limitation to the protection scope of the present invention.

[0106] The antinode position A where the diaphragm 2 vibrates and the adjacent area of the antinode position A are shaped to form the convex portion 22. The reconstruction of the diaphragm 2 includes, but is not limited to: blow molding, directly using a molding die to blow-mold the diaphragm 2 with a convex portion 22 in a local area; mechanical or thermoplastic molding, applying mechanical pressure to a local area of the diaphragm 2 originally in the form of a planar film / plate structure with continuous stiffness to force the formation of the convex portion 22, or applying pressurized gas to a local area of the diaphragm 2 in a heated state to force the local area of the diaphragm 2 to be shaped to form the convex portion 22. The local area here refers to the antinode position A where the diaphragm 2 vibrates and the adjacent area of the antinode position A as described above. Two ways of reconstructing the diaphragm 2 to form the convex portion 22 are given here, but this does not limit the protection scope of the present invention.

[0107] During operation, the piezoelectric sheet 12 causes the piezoelectric actuator 1 to vibrate under the excitation of an electrical signal, transferring the vibration energy to the diaphragm 2 to cause the diaphragm 2 to vibrate. Each first hole portion 221 formed in the antinode position A of the diaphragm 2 and the adjacent area of the antinode position A independently inhales and discharges fluid during the working process. When the area where the first hole portion 221 is located deforms towards the side away from the piezoelectric actuator 1, the local volume of the chamber 4 in the area corresponding to the first hole portion 221 becomes larger and the pressure decreases, and the external fluid enters the chamber 4 along the first hole portion 221, as Figure 14 shown; when the area where the first hole portion 221 is located deforms towards the side of the piezoelectric actuator 1, the local volume of the chamber 4 in the area corresponding to the first hole portion 221 becomes smaller and the pressure increases, and the fluid inhaled into the chamber 4 in the previous process is discharged from the chamber 4 along the first hole portion 221 and has a certain momentum. The fluid with a certain momentum forms a jet after flowing out of the first hole portion 221 and can entrain the surrounding fluid, further increasing the output flow rate, as Figure 15 shown, and so on.

[0108] It should be noted that in this structure, the height of the chamber 4 in the thickness direction of the piezoelectric actuator 1 can be greater than the sum of the maximum displacement magnitudes of the piezoelectric actuator 1 and the diaphragm 2 when vibrating towards each other, so as to avoid movement interference between the piezoelectric actuator 1 and the diaphragm 2 during vibration and make full use of the vibration energy. Additionally, in this structure, if the height of the chamber 4 is too large, the pressure and flow rate of the fluid discharged from the chamber 4 through the first hole portion 221 will decrease, which will affect the formation of the jet, and even the jet cannot be formed, and thus the surrounding fluid cannot be entrained, resulting in a reduction in the final output flow rate. Preferably, the height of the chamber 4 in the thickness direction of the piezoelectric actuator 1 is not greater than 20 times the sum of the maximum displacement magnitudes of the piezoelectric actuator 1 and the diaphragm 2 when vibrating towards each other.

[0109] The spacer 3 is an annular structure, the inner peripheral wall of the spacer 3 and the vibration plate 11 of the piezoelectric actuator 1 enclose an annular groove 31, and the end of the spacer 3 away from the piezoelectric actuator 1 is fully or partially engaged with the diaphragm 2 on an annular path around the groove 31; or, the spacer 3 has a plurality of discrete spacers 32 distributed in an annular shape, such as Figure 16 As shown, the spacers 32 of the same spacer portion 3 are all bonded to the first main surface 1a or the second main surface 1b of the piezoelectric actuator 1, and a plurality of spacers 32 are spaced apart and distributed along a circular path around the chamber 4 to form a groove portion 31 with the piezoelectric actuator 1, and one end of the spacer 32 facing away from the piezoelectric actuator 1 is fully or partially bonded to the diaphragm 2.

[0110] That is, the piezoelectric actuator 1, the diaphragm 2 and the spacer 3 form a chamber 4, the spacer 3 forms the inner wall of the chamber 4, the inner wall of the chamber 4 can be closed, without a channel connected to the outside, and the spacer 3 is a ring-shaped structure; the inner wall of the chamber 4 can also be open, the spacer 3 has a plurality of discrete spacers 32 distributed in a ring shape, and the gaps between the plurality of spacers 32 are formed as channels connected to the outside, and the channels are connected to the chamber 4; although external gas can enter the chamber 4 through the above-mentioned channel, the gas toward the chamber 4 The fluid flows in the center, but because the pressure change in the area opposite to the first hole portion 221 in the chamber 4 is more drastic than that in the channel formed on the peripheral wall of the chamber 4, the fluid is mainly sucked in and discharged through the first hole portion 221, and the fluid entering the chamber 4 from the above-mentioned channel reverses its flow direction before reaching the area opposite to and adjacent to the first hole portion 221 in the chamber 4, and flows out of the chamber 4 along the original route, thereby having no substantial impact or very little impact on the suction and discharge of the fluid from the first hole portion 221, so the inner peripheral wall of the chamber 4 can be open.

[0111] Thereby, when the piezoelectric actuator 1 vibrates under the stimulation of the electrical signal, the vibration energy is transmitted to the diaphragm 2 to cause the diaphragm 2 to vibrate. The antinode position A of the vibration of the diaphragm 2 and the adjacent area of the antinode position A protrude from the surface of the diaphragm 2 to form a convex portion 22. Therefore, compared with the prior art, the continuity of the stiffness of the diaphragm 2 is broken, and a sudden change in stiffness is formed at the outer edge of the convex portion 22. When the diaphragm 2 vibrates, the amplitude from the antinode position A and the adjacent area of the antinode position A toward the area closer to the outside of the antinode no longer presents a continuous gradient distribution, and the vibration energy is relatively concentrated. The area opposite to the diaphragm 2 and the convex portion 22 is able to obtain greater vibration energy and generate a larger amplitude. The area of the chamber 4 opposite to the first hole portion 221 has a larger volume change during the air inlet and outlet process, thereby increasing the output flow rate.

[0112] Preferably, when the piezoelectric actuator 1 vibrates under the excitation of an electrical signal, it transfers the vibration energy to the diaphragm 2 to cause the diaphragm 2 to generate vibrations having at least two antinodes. It is possible that at least one first hole portion 221 communicating with the cavity 4 penetrates through at least one antinode position A of the diaphragm 2 during vibration or an adjacent area of the antinode position A; it is also possible that at least one first hole portion 221 communicating with the cavity 4 penetrates through at least two antinode positions A of the diaphragm 2 during vibration or an adjacent area of the antinode position A; it is also possible that at least one first hole portion 221 communicating with the cavity 4 penetrates through each antinode position A of the diaphragm 2 during vibration or an adjacent area of the antinode position A. Compared with the prior art, under the same setting manner of the first hole portion 221, the antinode position A of the diaphragm 2 during vibration and the adjacent area of the antinode position A protrude from the surface of the diaphragm 2 to form convex portions 22, and higher output performance can be obtained.

[0113] Certainly, more preferably, when the piezoelectric actuator 1 vibrates under the excitation of an electrical signal, it transfers the vibration energy to the diaphragm 2 to cause the diaphragm 2 to generate vibrations having at least two antinodes, and at least one first hole portion 221 communicating with the cavity 4 penetrates through each antinode position A of the diaphragm 2 during vibration or an adjacent area of the antinode position A. Since the diaphragm 2 forms a stiffness mutation at the outer peripheral edge of the convex portion 22, the vibration mode of the diaphragm 2 during vibration changes with respect to the vibration mode of a flat diaphragm 2 having a continuous stiffness. When the diaphragm 2 generates vibrations in a high-order resonance mode having at least two antinodes, it has a vibration mode in which the vibration directions of the regions of the diaphragm 2 opposite to the respective convex portions 22 are the same at the same moment. That is to say, at the same moment, the first hole portions 221 provided in the regions of the diaphragm 2 opposite to the respective convex portions 22 are simultaneously in or tend to be in the air outlet stroke or the exhaust stroke, and the output flow rate is further increased.

[0114] The piezoelectric actuator 1 generates vibrations under external excitation and simultaneously transfers the vibration energy to the diaphragm 2, thereby causing the diaphragm 2 to generate vibrations. The resonance mode of the piezoelectric actuator 1 and the diaphragm 2 vibrating in cooperation is related to the structural shape of the vibrating plate 11, the structural shape of the diaphragm 2, and the joining manner between the two; the above factors do not constitute a limitation on the protection scope of the claims of the present invention. The vibrating plate 11 can be, but is not limited to, circular, rectangular, polygonal, elliptical, etc. The shape of the diaphragm 2 can also be, but is not limited to, circular, rectangular, polygonal, elliptical, etc. The spacer portion 3 joined between the vibrating plate 11 and the diaphragm 2 can also be, but is not limited to, a circular ring structure, a rectangular ring structure, a polygonal ring structure, or an elliptical ring structure, etc.

[0115] The diaphragm 2 can be made of metal film materials, such as copper foil, titanium foil, stainless steel foil, etc. Preferably, the diaphragm 2 is made of polymer materials, such as PET, PI, PPS, PEI, FEP or other polymer film materials, or the diaphragm 2 is made of a composite material composed of polymer materials and other metal materials, such as PI copper clad laminate / film, PET copper clad laminate / film, PET nickel-plated laminate / film, carbon fiber metal composite laminate / film, etc.; whether it is a polymer material or a composite material composed of a polymer material and other materials, compared with metal materials, they all show the characteristics of light weight and high elastic strain limit, and the limit amplitude during resonance is usually much higher than that of metal materials, which is particularly suitable for high requirements on flow output, such as heat dissipation of smart 3C terminal products.

[0116] Example 2

[0117] like Figures 17 - 24 As shown, the structural principle of this embodiment is basically the same as that of the embodiment 1, except that a partition 6 is further provided around the outer periphery of the convex portion 22 or between two adjacent convex portions 22 on the diaphragm 2, and the area of the vibrating portion 2-2 outside the partition 6 is the vibrating area;

[0118] The ability of the region of the diaphragm 2 opposite to the partition 6 to resist elastic deformation when a force is applied is greater than the ability of the region of the diaphragm 2 opposite to the vibration region to resist elastic deformation when a force is applied;

[0119] That is, the ability of the region of the diaphragm 2 opposite to the partition 6 to resist elastic deformation when a force is applied is greater than the ability of the region of the diaphragm 2 other than the region opposite to the partition 6 to resist elastic deformation when a force is applied. Therefore, the energy required to cause the region of the diaphragm 2 opposite to the partition 6 to vibrate is much greater than the energy required to cause the region of the diaphragm 2 opposite to the convex portion 22 to vibrate, which is equivalent to the region of the diaphragm 2 opposite to the partition 6 being substantially constrained and the vibration being suppressed. The vibration energy transmitted to the diaphragm 2 by the piezoelectric actuator 1 will mainly act on the region of the diaphragm 2 opposite to the convex portion 22, thereby causing the region of the diaphragm 2 opposite to the convex portion 22 to generate a larger amplitude, while the region of the diaphragm 2 opposite to the partition 6 does not vibrate or generates a small vibration. By providing the partition 6, the energy loss of the diaphragm 2 at the partition 6 is reduced, thereby improving the utilization rate of the vibration energy; at the same time, by providing the partition 6, it is beneficial to further strengthen the stiffness mutation formed at the outer peripheral edge of the diaphragm 2 at the protrusion 22, further optimize the vibration mode of the diaphragm 2, and ensure that when the diaphragm 2 generates vibrations in a high-order resonance mode, the vibration mode of the area of the diaphragm 2 opposite to each protrusion 22 can be generated at the same time, thereby improving the output flow rate.

[0120] It should be noted that the partition 6 can be provided on the diaphragm 2 before or after the convex portion 22 is formed. In this embodiment, the partition 6 is provided on the diaphragm 2 after the convex portion 22 is formed.

[0121] The partition 6 may protrude from the surface of the vibrating portion 2-2 of the diaphragm 2, so that the ability of the diaphragm 2 to resist elastic deformation when the region opposite to the partition 6 is subjected to force is greater than the ability of the vibrating region of the diaphragm 2 to resist elastic deformation when the force is subjected to force. However, this is not limited to the above. For example, the diaphragm 2 itself may be made of a non-homogeneous material, or other rigid dielectric bodies (such as metal ribs) may be embedded in the region opposite to the partition 6 of the diaphragm 2, so that the ability of the diaphragm 2 to resist elastic deformation when the region opposite to the partition 6 is subjected to force is greater than the ability of the vibrating region of the diaphragm 2 to resist elastic deformation when the force is subjected to force.

[0122] The partition 6 in this embodiment can be formed by, but not limited to, the following methods:

[0123] First, a local area of the diaphragm 2 is shaped to form a partition 6, which is a partition rib 64 provided on the vibrating part 2-2 and protruding from the surface of the diaphragm 2, that is, the partition 6 is formed by shaping a local area of the diaphragm 2. The partition rib 64 protrudes from the surface of the diaphragm 2 and is arranged around the periphery of the protrusion 22 or between two adjacent protrusions 22.

[0124] Specifically:

[0125] The ribs 64 protrude from the surface of the diaphragm 2. The ribs 64 may protrude toward the side of the diaphragm 2 away from the piezoelectric actuator 1 or toward the side of the diaphragm 2 toward the actuator. Figure 17 and 18 As shown; part of the ribs 64 may protrude toward the side of the diaphragm 2 away from the piezoelectric actuator 1, while another part of the ribs 64 may protrude toward the side of the diaphragm 2 toward the piezoelectric actuator 1; or the ribs 64 protruding from the diaphragm 2 may have a part protruding toward both the side of the diaphragm 2 away from the piezoelectric actuator 1 and the side of the diaphragm 2 toward the piezoelectric actuator 1. This is not limited here; the cross-sectional shape of the ribs 64 may be angular, sawtooth, or wavy, which is also not limited here.

[0126] In addition, it should be noted that the partition 6 can be a continuous integral structure, such as Figure 17 and 18 As shown, the partition 6 may also be a plurality of partition bars 6a arranged at intervals, that is, the partition 6 is a plurality of discretely arranged partition bars 6a, such as Figure 19 As shown, in principle, it is sufficient as long as the separation of the convex portion 22 of the diaphragm 2 can be achieved.

[0127] Second, the partition portion 6 is formed by providing reinforcing ribs 63 in a partial area on at least one surface of the diaphragm 2, and the reinforcing ribs 63 protrude from the diaphragm 2. The reinforcing ribs 63 have a main body section 631 provided on the vibrating portion 2-2 of the diaphragm 2. The main body section 631 protrudes from the surface of the diaphragm 2, and the main body section 631 is wound around the outer periphery of the convex portion 22 or between two adjacent convex portions 22.

[0128] It is possible that the partition portion 6 is formed by providing reinforcing ribs 63 on the surface of the diaphragm 2 on the side facing away from the piezoelectric actuator 1, and the main body section 631 of the reinforcing ribs 63 is provided on the side of the vibrating portion 2-2 of the diaphragm 2 facing away from the piezoelectric actuator 1, as Figure 20 shown.

[0129] Preferably, the reinforcing ribs 63 may further have an extension section 632 extending from the main body section 631 to the fixing portion 2-1 of the diaphragm 2. The extension section 632 protrudes from the surface of the diaphragm 2, and the extension section 632 is fixedly connected to the side of the fixing portion 2-1 of the diaphragm 2 facing away from the spacer portion 3, as Figure 21 and 22 shown.

[0130] Similarly, the partition portion 6 is a continuous integral structure, that is, the reinforcing ribs 63 forming the partition portion 6 are formed as a continuous whole; or, the partition portion 6 is formed as a plurality of spaced-apart partition strips 6a, that is, the reinforcing ribs 63 forming the partition portion 6 are arranged discretely, which will not be elaborated here;

[0131] The reinforcing ribs 63 are integrally formed or fixedly connected with the diaphragm 2; the reinforcing ribs 63 may be made of the same material as the diaphragm 2, and of course, they may also be made of a different material from the diaphragm 2. For example, when the material of the diaphragm 2 is a polyimide film, the material of the reinforcing ribs 63 may be a polyimide film material or SUS304 stainless steel. The material of the reinforcing ribs 63 is not limited here, but the principle to follow is to ensure that the ability of the area of the diaphragm 2 opposite to the partition portion 6 to resist elastic deformation when stressed is greater than the ability of the area of the diaphragm 2 other than the area opposite to the partition portion 6 to resist elastic deformation when stressed.

[0132] In addition, the reinforcing ribs 63 forming the partition portion 6 may have a constant cross-section or a variable cross-section, which is not limited here.

[0133] It is possible that the partition portion 6 is formed by providing reinforcing ribs 63 on the surface of the diaphragm 2 on the side facing the piezoelectric actuator 1, and the main body section 631 of the reinforcing ribs 63 is provided on the side of the vibrating portion 2-2 of the diaphragm 2 facing the piezoelectric actuator 1, as Figure 23 shown.

[0134] In addition, similarly, the reinforcing rib 63 further has an extension section 632 extending from the main body section 631 to the fixing part 2-1 of the diaphragm 2. The extension section 632 protrudes from the surface of the diaphragm 2, and the extension section 632 is fixedly clamped between the fixing part 2-1 of the diaphragm 2 and the spacer 3.

[0135] Similarly, the partition part 6 is of a continuous integral structure, that is, the reinforcing ribs 63 forming the partition part 6 are formed as a continuous whole; or, the partition part 6 is formed as a plurality of partition strips 6a arranged at intervals, that is, the reinforcing ribs 63 forming the partition part 6 are arranged discretely, which will not be elaborated here.

[0136] Similarly, the reinforcing rib 63 is integrally formed with or fixedly connected to the diaphragm 2; the reinforcing rib 63 can be of the same material as the diaphragm 2, and of course it can also be of a different material from the diaphragm 2. For example, when the material of the diaphragm 2 is a polyimide film, the material of the reinforcing rib 63 can be a polyimide film material or SUS304 stainless steel. The material of the reinforcing rib 63 is not limited here, but the principle to follow is to ensure that the ability of the area of the diaphragm 2 opposite to the partition part 6 to resist elastic deformation when stressed is greater than that of the area of the diaphragm 2 other than the area opposite to the partition part 6 when stressed.

[0137] In addition, the reinforcing rib 63 forming the partition part 6 can be of uniform cross-section or variable cross-section, which is not limited here.

[0138] It can also be that the partition part 6 is formed by simultaneously arranging a first reinforcing rib 61 facing the piezoelectric actuator 1 on both surfaces of the diaphragm 2 and a second reinforcing rib 62 facing away from the piezoelectric actuator 1. Both the first reinforcing rib 61 and the second reinforcing rib 62 protrude from the surface of the diaphragm 2, as Figure 24 shown.

[0139] The first reinforcing rib 61 has a first main body section 631 provided on the vibrating part 2-2 of the diaphragm 2, and the first main body section 631 protrudes from the diaphragm 2;

[0140] The second reinforcing rib 62 has a second main body section 631 provided on the vibrating part 2-2 of the diaphragm 2, and the second main body section 631 protrudes from the diaphragm 2;

[0141] In addition, the first reinforcing rib 61 further has a first extension section 632 extending from the first main body section 631 to the fixing part 2-1 and / or the second reinforcing rib 62 has a second extension section 632 extending from the second main body section 631 to the fixing part 2-1;

[0142] The first extension section 632 protrudes from the surface of the diaphragm 2, and the first extension section 632 is fixedly clamped between the fixing part 2-1 of the diaphragm 2 and the spacer 3;

[0143] The second extension section 632 protrudes from the surface of the diaphragm 2, and the second extension section 632 is fixedly connected to the side of the fixing portion 2-1 of the diaphragm 2 facing away from the spacing portion 3.

[0144] Similarly, the region of the separating portion 6 on the same side of the diaphragm 2 is a continuous integral structure, that is, the first reinforcing rib 61 and / or the second reinforcing rib 62 respectively located on both sides of the diaphragm 2 that constitute the separating portion 6 are formed into a continuous whole; the separating portion 6 can also be a plurality of discrete separating strips 6a, that is, the first reinforcing rib 61 and / or the second reinforcing rib 62 respectively located on both sides of the diaphragm 2 that constitute the separating portion 6 are discretely arranged.

[0145] The first reinforcing rib 61 and / or the second reinforcing rib 62 are integrally formed or fixedly connected with the diaphragm 2; the materials of the first reinforcing rib 61 and the second reinforcing rib 62 can be the same or different. For example, when the material of the diaphragm 2 is a polyimide film, the materials of the first reinforcing rib 61 and the second reinforcing rib 62 can be polyimide film materials, or the materials of the first reinforcing rib 61 and the second reinforcing rib 62 can be SUS304 stainless steel. Or, the material of the first reinforcing rib 61 is brass, and the material of the second reinforcing rib 62 is SUS304 stainless steel. Here, the materials of the first reinforcing rib 61 and the second reinforcing rib 62 are not limited, but the principle to follow is to ensure that the ability of the region of the diaphragm 2 opposite to the separating portion 6 to resist elastic deformation when stressed is greater than the ability of the region of the diaphragm 2 other than the region opposite to the separating portion 6 to resist elastic deformation when stressed.

[0146] In addition, the first reinforcing rib 61 and / or the second reinforcing rib 62 that constitute the separating portion 6 can be of uniform cross-section or variable cross-section, which is not limited here.

[0147] Embodiment 3

[0148] As Figures 25 - 33 shown, a fluid control device has the fluid generator described in Embodiment 1 and Embodiment 2, and further includes an opposing plate 5. The opposing plate 5 is spaced apart from the side of the diaphragm 2 facing away from the piezoelectric actuator 1, so that a separation cavity 7 is formed between the opposing plate 5 and the diaphragm 2. A second hole portion 51 is correspondingly provided at a position on the opposing plate 5 opposite to the first hole portion 221, as Figure 25 shown.

[0149] Similarly, the cross-sectional shape of the second hole portion 51 can be circular, square, rectangular, oval or other shapes, which is not limited herein. In this embodiment, the cross-sectional shape of the second hole portion 51 is taken as circular for illustration, but this does not constitute a limitation to the present invention. The flow-through area of the second hole portion 51 is larger than the flow-through area of the corresponding first hole portion 221. Preferably, the flow-through area of the second hole portion 51 is 1.1 to 10 times that of the first hole portion 221 opposite thereto, so that the air flow ejected from the first hole portion 221 can be received by the second hole portion 51, avoiding the flow loss caused by the reflection on the contact wall.

[0150] Taking any one of the second hole portions 51 as an example for further illustration:

[0151] It can be that a plurality of spoke ribs 511 extending from the hole wall towards the center are provided in the second hole portion 51. The plurality of spoke ribs 511 are circumferentially spaced apart in the second hole portion 51 to form a hollow structure. A fluid passage opening 512 for fluid to flow through is formed between adjacent spoke ribs 511. The flow-through area of the fluid passage opening 512 is smaller than the flow-through area of the second hole portion 51, as Figures 27 - 28 shown. It should be noted that the shape, number and arrangement of the spoke ribs 511 are not limited herein. By providing the hollow structure formed by the spoke ribs 511, it is beneficial to reduce the velocity difference between the center and the edge when the air flow passes through the second hole portion 51, and the velocity gradient distribution from the center to the edge of the air flow becomes gentle, which can effectively suppress the outflow noise. In addition, the spoke ribs 511 can converge in the central region of the second hole portion 51 to form a connecting portion 513, as Figure 29 shown. Even more, a through-hole 514 penetrating the connecting portion 513 is provided on the connecting portion 513, as Figure 30 shown.

[0152] In order to minimize the influence of the spoke ribs 511 on the output performance of the fluid control device, preferably, in the structure with the spoke ribs 511, the flow-through area of the hollow structure is 50%-90% of the flow-through area of the second hole portion 51. The flow-through areas of the fluid passage openings and the through-holes 514 in the same second hole portion 51 are both part of the flow-through area of the hollow structure.

[0153] It can also be that a mesh hole structure 81 for fluid to flow through is provided in the second hole portion, which extends from the hole wall towards the center. The mesh hole structure 81 includes a plurality of through mesh holes 811. The flow-through area of the mesh holes 811 is smaller than the flow-through area of the second hole portion 51, as Figures 31 - 32 shown.

[0154] Similarly, in order to minimize the impact of the spoke ribs 511 on the output performance of the fluid control device, preferably, in the structure having the mesh structure 81, the area of the mesh structure 81 opposite to the second hole portion 51 is the directly facing flow area, and the flow area of the directly facing flow area is 50%-90% of the flow area of the second hole portion 51.

[0155] When the material of the opposed plate 5 is a metallic material, the spoke ribs 511 or the mesh structure can be formed by semi-etching the area of the opposed plate 5 opposite to the second hole portion 51. When the material of the opposed plate 5 is a polymer material, the opposed plate 5 can be formed by laminating multiple polymer films, and the spoke ribs 511 or the mesh structure 81 can be provided on at least one of the multiple films constituting the opposed plate 5, although it is not limited thereto.

[0156] To simplify the manufacturing process, it is more desirable that the above-mentioned spoke ribs 511 and the mesh structure 81 are provided independently of the opposed plate 5. For example, the fluid control device further includes a flow-through plate 8, the flow-through plate 8 is disposed between the diaphragm 2 and the opposed plate 5 and / or on the opposed plate 5, and at least the area of the flow-through plate 8 opposite to the second hole portion 51 has a mesh structure 81 through which fluid can flow. The mesh structure 81 includes a plurality of mesh holes 811 penetrating the flow-through plate 8, and the flow area of the mesh holes 811 is smaller than the flow area of the second hole portion 51. By providing the flow-through plate 8, it is beneficial to reduce the velocity difference between the center and the edge when the air flow passes through the second hole portion 51, and the velocity gradient distribution from the center to the edge of the air flow becomes gentle, which can effectively suppress the outflow noise. It is more desirable that the flow-through plate 8 is joined to the surface of the opposed plate 5 facing the diaphragm 2, as Figure 26 shown, so as to rectify and reduce the noise of the air flow before it enters the second hole portion 51.

[0157] Similarly, in order to minimize the impact of the mesh structure 81 of the flow-through plate 8 on the output performance of the fluid control device, preferably, the area of the mesh structure 81 opposite to the second hole portion 51 is the directly facing flow area, and the flow area of the directly facing flow area is 50%-90% of the flow area of the second hole portion 51.

[0158] It further includes an elastic support structure 9, and the elastic support structure 9 elastically supports the fluid generator on the opposed plate 5 in a substantially unconstrained manner. For example, as Figure 33 shown, the elastic support structure 9 may include a frame portion 91 provided on the outer peripheral side of the fluid generator for fixedly connecting to the opposed plate 5: there are a plurality of elastic arms 92 with elasticity between the frame portion 91 and the fluid generator. One end of the elastic arm 92 is connected to the frame portion 91, and the other end is connected to the fluid generator, thereby realizing elastically supporting the fluid generator on the opposed plate 5 in a substantially unconstrained manner. For example, the other end of the elastic arm 92 can be connected to the outer peripheral wall of the piezoelectric actuator 1.

[0159] Based on the inspiration of the ideal embodiments of the present invention described above, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of this invention. The technical scope of this invention is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A fluid generator, characterized in that: The invention comprises a piezoelectric actuator (1), a spacer (3) and a diaphragm (2), wherein the diaphragm (2) is connected to the piezoelectric actuator (1) through the spacer (3), and a chamber (4) is enclosed between the piezoelectric actuator (1), the spacer (3) and the diaphragm (2); The diaphragm (2) comprises a fixed portion (2-1) and a vibrating portion (2-2), wherein the fixed portion (2-1) is fixedly connected to one end of the spacer (3) away from the piezoelectric actuator (1), the fixed portion (2-1) is connected to the vibrating portion (2-2), and the vibrating portion (2-2) forms an end wall of the chamber (4) in the thickness direction of the piezoelectric actuator (1); When the piezoelectric actuator (1) vibrates under the stimulation of an electrical signal, it transmits vibration energy to the diaphragm (2) to cause the diaphragm (2) to vibrate, and at least one first hole (221) communicating with the chamber (4) is penetrated at the antinode position (A) of the vibration of the diaphragm (2) or in the vicinity of the antinode position (A); The antinode position (A) of the vibration of the diaphragm (2) and the adjacent area of the antinode position (A) protrude from the surface of the diaphragm (2) to form a convex portion (22); the convex portion (22) is a convex portion (22) that protrudes from the surface of the other side of the diaphragm (2) while being concave to form a concave portion (21); the first hole portion (221) passes through the convex portion (22).

2. The fluid generator according to claim 1, characterized in that: The antinode position (A) of the vibration of the diaphragm (2) and the adjacent area of the antinode position (A) are shaped to form the convex portion (22).

3. The fluid generator according to claim 1, characterized in that: When the piezoelectric actuator (1) vibrates under the stimulation of an electrical signal, it transmits vibration energy to the diaphragm (2), thereby causing the diaphragm (2) to generate vibrations having at least two antinodes, and at least one first hole portion (221) connected to the chamber (4) is penetrated through at least one antinode position (A) of the vibration of the diaphragm (2) or in the vicinity of the antinode position (A).

4. The fluid generator according to claim 3, wherein: At least one first hole (221) communicating with the chamber (4) is respectively penetrated through at least two antinode positions (A) of the vibration of the diaphragm (2) or the vicinity of the antinode position (A).

5. The fluid generator according to claim 3, wherein: At least one first hole portion (221) communicating with the chamber (4) passes through each antinode position (A) or the vicinity of the antinode position (A) of the vibration of the diaphragm (2).

6. The fluid generator according to any one of claims 1-5, characterized in that: A partition (6) is also provided on the diaphragm (2) around the outer periphery of the convex portion (22) or between two adjacent convex portions (22), and the area of the vibrating portion (2-2) outside the partition (6) is a vibrating area; The ability of the region of the diaphragm (2) opposite to the partition (6) to resist elastic deformation when a force is applied is greater than the ability of the region of the diaphragm (2) opposite to the vibration zone to resist elastic deformation when a force is applied.

7. The fluid generator according to claim 6, wherein: The partition portion (6) protrudes from the surface of the vibration portion (2-2) of the diaphragm (2).

8. The fluid generator according to claim 7, wherein: The diaphragm (2) forms the partition portion (6) through local area shaping. The partition portion (6) is a partition rib (64) provided on the vibrating portion (2-2) and protruding from the surface of the diaphragm (2). The partition rib (64) protrudes from the surface of the diaphragm (2), and the partition rib (64) is wound around the outer periphery of the convex portion (22) or between two adjacent convex portions (22).

9. The fluid generator according to claim 7, wherein: The partition portion (6) is formed by providing a reinforcing rib (63) in a local area on at least one surface of the diaphragm (2). The reinforcing rib (63) has a main body section (631) provided on the vibrating portion (2-2). The main body section (631) protrudes from the surface of the diaphragm (2), and the main body section (631) is wound around the outer periphery of the convex portion (22) or between two adjacent convex portions (22).

10. The fluid generator according to claim 9, characterized in that: The reinforcing rib (63) further has an extension section (632) extending from the main body section (631) to the fixing portion (2-1) of the diaphragm (2). The extension section (632) protrudes from the surface of the diaphragm (2); The extension section (632) is fixedly clamped between the fixing portion (2-1) of the diaphragm (2) and the spacer portion (3), or / and the extension section (632) is fixedly connected to the side of the fixing portion (2-1) of the diaphragm (2) facing away from the spacer portion (3).

11. The fluid generator according to claim 1, wherein: The spacer portion (3) is a ring structure. The inner peripheral wall of the spacer portion (3), the piezoelectric actuator (1), and the diaphragm (2) enclose a chamber (4). One end of the spacer portion (3) facing away from the piezoelectric actuator (1) is entirely or partially joined to the diaphragm (2) on an annular path around the outer periphery of the chamber (4); Alternatively, the spacer portion (3) has a plurality of spacers (32). The spacers (32) of the same spacer portion (3) are all joined to the same side surface of the piezoelectric actuator (1). The plurality of spacers (32) are spaced apart along an annular path around the chamber (4) to enclose the chamber (4) with the piezoelectric actuator (1) and the diaphragm (2). One end of the spacer (32) facing away from the piezoelectric actuator (1) is entirely or partially joined to the diaphragm (2).

12. The fluid generator according to claim 1, characterized in that: The diaphragm (2) is made of a polymer material or a composite material composed of a polymer material and a metal material.

13. The fluid generator according to claim 1, wherein: The piezoelectric actuator (1) has a vibrating plate (11). At least one piezoelectric sheet (12) is joined to one or both surfaces of the vibrating plate (11) in the thickness direction. The piezoelectric sheet (12) and the vibrating plate (11) are joined to form the piezoelectric actuator (1).

14. A fluid control device, characterized in that: It includes the fluid generator according to any one of the above 1-13.

15. The fluid control device according to claim 14, wherein: It further includes an opposing plate (5). The opposing plate (5) is spaced apart from the side of the diaphragm (2) facing away from the piezoelectric actuator (1), so that a separation chamber (7) is formed between the opposing plate (5) and the diaphragm (2). A second hole portion (51) is correspondingly provided at a position on the opposing plate (5) opposite to the first hole portion (221).

16. The fluid control device according to claim 15, characterized in that: The flow-through area of the second hole portion (51) is 1.1 to 10 times the flow-through area of the corresponding first hole portion (221).

17. The fluid control device according to claim 15, characterized in that: A plurality of spoke ribs (511) extending from the hole wall towards the center are provided in the second hole portion (51). The plurality of spoke ribs (511) are circumferentially spaced apart along the second hole portion (51) to form a hollow structure. A fluid passage opening (512) through which fluid can flow is formed between adjacent spoke ribs (511). The flow-through area of the fluid passage opening (512) is smaller than the flow-through area of the second hole portion (51).

18. The fluid control device according to claim 17, wherein: The spoke ribs (511) converge in the central region of the second hole portion (51) to form a connecting portion (513).

19. The fluid control device according to claim 18, wherein: A flow-through hole (514) penetrating the connecting portion (513) is provided on the connecting portion (513).

20. The fluid control device according to claim 17, wherein: The flow-through area of the hollow structure is 50%-90% of the flow-through area of the second hole portion (51).

21. The fluid control device according to claim 15, wherein: A mesh structure (81) through which fluid can flow and extending from the hole wall towards the center is provided in the second hole portion (51). The mesh structure (81) includes a plurality of through-meshes (811). The flow-through area of the through-meshes (811) is smaller than the flow-through area of the second hole portion (51).

22. The fluid control device according to claim 21, wherein: The region of the mesh structure (81) opposite to the second hole portion (51) is a facing flow-through region. The flow-through area of the facing flow-through region is 50%-90% of the flow-through area of the second hole portion (51).

23. The fluid control device according to claim 15, characterized in that: It further includes a flow-through plate (8); The flow-through plate (8) is disposed between the diaphragm (2) and the opposing plate (5) or / and on the opposing plate (5). At least the region of the flow-through plate (8) opposite to the second hole portion (51) has a mesh structure (81) through which fluid can flow. The mesh structure (81) includes a plurality of through-meshes (811) penetrating the flow-through plate (8). The flow-through area of the through-meshes (811) is smaller than the flow-through area of the second hole portion (51).

24. The fluid control device according to claim 23, wherein: The flow-through plate (8) is joined to the surface of the opposing plate (5) facing the diaphragm (2).

25. The fluid control device according to claim 23, wherein: The region of the mesh structure (81) opposite to the second hole portion (51) is a facing flow-through region. The flow-through area of the facing flow-through region is 50%-90% of the flow-through area of the second hole portion (51).

26. The fluid control device according to claim 14, wherein: It further includes an elastic support structure (9). The fluid generator is elastically supported on the opposing plate (5) through the elastic support structure (9).

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