Spectral measurement method and apparatus

Abstract

The invention provides a spectral measurement method and equipment, and the method comprises the steps: enabling a detection light beam generated by a blackbody light source to irradiate a to-be-measured sample, and obtaining an incident light beam with the response characteristics of the to-be-measured sample; performing radial space beam splitting on the incident light beam to obtain at least two split light beams; spectral measurement is carried out on the at least two split light beams in preset spectral ranges to obtain spectral information of the split light beams, the preset spectral ranges corresponding to the split light beams are different, and the sum of the preset spectral ranges corresponding to the split light beams continuously covers a target spectral interval. The problem that there is no spectrum method for ultra-wideband spectrum range measurement in the prior art is solved.

Description

Technical Field

[0001] The present disclosure relates to the technical field of spectral measurement, and in particular, to a spectral measurement method and device. Background Art

[0002] Spectral measurement and analysis is an important method for studying the composition, structure, and properties of substances through phenomena such as absorption, emission, or scattering of light by substances. Among them, transient spectral measurement and analysis can measure and analyze the spectral changes of substances within an extremely short period of time, and can reveal the dynamic behavior and physical and chemical properties of substances during the transient process.

[0003] People's requirements for the performance of spectral analysis instruments, such as the measurement acquisition speed and spectral band range, are also getting higher and higher. Traditional spectral measurement methods have some shortcomings in terms of measurement acquisition speed or spectral band range. For example, the band measurement range of a Fourier transform infrared spectrometer can cover from the near-infrared band to the terahertz band, and can perform conventional spectral measurement and transient spectral measurement. However, due to its use of the interference principle, corresponding mechanical components need to move step by step, and the spectral accuracy and acquisition speed restrict each other. It takes more time to perform high-precision GHz-level measurements, and it takes more than a day to perform high-precision time-resolved transient spectral measurements. Raman spectrometers can achieve second-level fast measurement based on the principle of inelastic scattering of light, but the measurement band range is in the near-infrared band and below its wavelength band. Terahertz time-domain spectrometers obtain time-domain signals through optical delay scanning and then obtain spectral information through Fourier transform. The spectral resolution can reach the GHz level, but the mechanical scanning delay method limits the acquisition speed. Spectrometers with gratings or prisms as the core spectroscopic components are limited by the band applicability range of the gratings or prisms themselves in terms of materials and periodic structures, and it is difficult to achieve ultra-wideband spectral measurement.

[0004] The development of nanophotonics and artificial intelligence has led to computational spectrometers. First, an encoding mechanism with spectral selection characteristics is used to spectrally encode the incident light. Different spectral information is assigned to the incident light through multiple groups of different encodings. Then, a series of light intensity values after encoding are obtained through a detector. The original spectrum is calculated and reconstructed through machine learning algorithms, enabling high-resolution, fast, and real-time measurement of the spectrum. However, currently, it can only be achieved within each small wavelength band range. For example, for a real-time spectral sensing chip based on micro-nano structure metasurface encoding and CMOS array detection, the response wavelength band only extends from visible light to near-infrared. In the prior art, there is no measurement method that can achieve full-spectrum spectral measurement of the sample to be measured in a single shot. In the prior art, it is necessary to input a beam with a specific spectral range to the sample to be measured, and the beam with different wavelength bands is used to irradiate the object to be measured respectively to measure the spectral information of the beams with different wavelength bands respectively, and finally achieve the purpose of the target spectral measurement range. This takes a long time, the measurement steps are cumbersome, and the measurement accuracy is relatively low. If a beam with a relatively wide spectral range is used to irradiate the object to be measured, it will also be limited by the accuracy and measurement range of the detector, and only the results of a partial spectral range are output.

[0005] It should be noted that the above introduction of the technical background is only for the convenience of clearly and completely explaining the technical solution of the present invention and facilitating the understanding of those skilled in the art. It cannot be considered that the above technical solutions are well-known to those skilled in the art just because these solutions are described in the background art part of the present invention. Summary of the Invention

[0006] In view of the above problems, the present disclosure provides a spectral measurement method and device, which solves the problem that there is no spectral method for ultra-wideband spectral range measurement in the prior art.

[0007] According to a first aspect of the present disclosure, there is provided a spectral measurement method, the method comprising:

[0008] Irradiate a detection beam generated by a blackbody light source onto a sample to be measured to obtain an incident beam with the response characteristics of the sample to be measured;

[0009] Perform radial spatial beam splitting on the incident beam to obtain at least two split beams;

[0010] Perform spectral measurement within a preset spectral range on each of the at least two split beams to obtain the spectral information of each split beam, wherein the preset spectral ranges corresponding to each split beam are different, and the sum of the preset spectral ranges corresponding to each split beam continuously covers the target spectral interval.

[0011] According to an embodiment of the present disclosure, the radial spatial beam splitting specifically includes:

[0012] Perform partial reflection processing on the incident light beam, such that the light beam in the first radial region of the incident light beam is reflected to form a split light beam, and the light beam in the second radial region is transmitted to form another split light beam, wherein the first radial region and the second radial region complementarily cover the radial cross-section in the radial direction of the propagation direction of the incident light beam.

[0013] According to an embodiment of the present disclosure, the radial spatial beam splitting further includes:

[0014] For any split light beam obtained through partial reflection processing, repeatedly perform the partial reflection processing, such that the light beam in the first radial region of the current split light beam is reflected to form a newly added split light beam, and the light beam in the second radial region of the current split light beam is transmitted to form another newly added split light beam, wherein the first radial region and the second radial region in the current split light beam complementarily cover the radial cross-section of the current split light beam.

[0015] According to an embodiment of the present disclosure, the method further includes:

[0016] The first radial region corresponding to the partial reflection processing is formed on the radial cross-section of the light beam to be processed, and the first radial region extends from the outer edge to the center of the radial cross-section of the light beam and is arranged in a covering manner.

[0017] According to an embodiment of the present disclosure, the method for generating the detection light beam includes:

[0018] Perform collimation processing on the light beams generated by multiple blackbody light sources respectively to form multiple blackbody light beams;

[0019] Perform convergence and merging processing on the multiple blackbody light beams to form a detection light beam.

[0020] According to an embodiment of the present disclosure, the light beams generated by at least one pair of the blackbody light sources are arranged side by side.

[0021] According to an embodiment of the present disclosure, the method further includes:

[0022] Perform focusing processing on the detection light beam, such that the focused detection light beam forms a spatial focus at the sample to be measured.

[0023] According to an embodiment of the present disclosure, the method further includes:

[0024] Perform collimation processing on the incident light beam, such that the collimated incident light beam can radially spatially split out at least two split light beams.

[0025] According to an embodiment of the present disclosure, the method further includes:

[0026] Perform beam shrinking and collimation processing on the split light beam formed by reflection in the first radial region to form a composite split light beam;

[0027] Perform a transmission-reflection beam splitting process on the composite beam splitter to form a first beam split for measuring the near-infrared to mid-infrared band and a second beam split for measuring the far-infrared band.

[0028] According to an embodiment of the present disclosure, the method further includes:

[0029] Perform beam reduction and collimation on the beam split formed by transmitting the second radial region to form a third beam split for measuring the terahertz band.

[0030] According to an embodiment of the present disclosure, the method for obtaining the spectral information of each of the beam splits includes:

[0031] Perform spectral screening on each of the beam splits so that the spectral range of each of the beam splits is consistent with the corresponding preset encoded spectral range;

[0032] Perform spectral encoding on each of the beam splits to generate an encoded beam carrying spatial phase characteristics;

[0033] Perform identification on each of the encoded beams to obtain the spectral information of each of the beam splits.

[0034] According to an embodiment of the present disclosure, the method further includes:

[0035] According to the continuity of the spectral ranges of the at least two beam splits, perform overlapping region data fusion on the at least two pieces of spectral information to generate continuous spectral information carrying the response characteristics of the sample to be measured and covering the target spectral interval.

[0036] According to an embodiment of the present disclosure, the method further includes:

[0037] When irradiating the detection beam generated by the blackbody light source onto the sample to be measured, irradiate the pump beam onto the sample to be measured with a fixed pulse so that the incident beam is attached with the response information of the sample to be measured in the excited state;

[0038] Perform radial spatial beam splitting on the incident beam to obtain at least two beam splits;

[0039] Measure the spectral information of each of the beam splits respectively.

[0040] According to an embodiment of the present disclosure, the measuring the spectral information of each of the beam splits respectively includes:

[0041] Collect the first spectral information at the moment when the pump beam first excites the sample to be measured;

[0042] In the subsequent N - 1 pump pulse periods, the spectral information is collected with a time delay by successively increasing a preset time interval, where the total time delay of the Nth collection is equal to the duration of a single pump pulse period, and N is a positive integer greater than 2.

[0043] According to an embodiment of the present disclosure, the spectral measurement method further includes: receiving a test beam generated by a test light source, performing radial spatial beam splitting on the test beam to obtain at least two split beams, and respectively measuring the spectral information of each of the split beams.

[0044] A second aspect of the present disclosure provides a spectral measurement device, including:

[0045] A beam input component configured to generate a detection beam from a beam generated by a blackbody light source;

[0046] A sample reaction component provided with a first optical window and a second optical window opposed along the optical axis. The detection beam is incident on the action area of the sample to be measured through the first optical window, and the second window is used for outputting the incident beam formed after acting on the sample to be measured.

[0047] A beam detection component, the beam detection component includes

[0048] A beam splitting element, the beam splitting element is arranged to cover from the outer edge to the central part of the radial cross - section of the incident beam, so that a part of the incident beam is reflected to form a split beam, and the remaining part of the incident beam is transmitted to form another split beam.

[0049] At least two detection parts, each of the detection parts is respectively arranged in the optical path of each of the split beams for obtaining the spectral information of each of the split beams within a preset spectral measurement range.

[0050] According to an embodiment of the present disclosure, the spectral measurement device further includes:

[0051] A beam shrinking and collimating element, the beam shrinking and collimating element is respectively arranged in the optical path of each of the split beams for performing beam shrinking and collimating processing on each of the split beams, so that the beam cross - section diameter of each of the split beams is smaller than the receiving range of the detection part.

[0052] According to an embodiment of the present disclosure, the beam splitting element includes a parabolic mirror assembly, and the parabolic mirror assembly is used for reflecting and shrinking and collimating a part of the incident beam to form a split beam. Description of the Drawings

[0053] Through the following description of the embodiments of the present disclosure with reference to the drawings, the above - mentioned content and other objects, features and advantages of the present disclosure will become clearer. In the drawings:

[0054] Figure 1Schematically shows a flowchart of a spectral measurement method according to an embodiment of the present disclosure;

[0055] Figure 2 Schematically shows a flowchart of a method for generating a detection beam according to an embodiment of the present disclosure;

[0056] Figure 3 Schematically shows a flowchart of operation S300 of a spectral measurement method according to an embodiment of the present disclosure;

[0057] Figure 4 Schematically shows a flowchart of a spectral measurement method in a second measurement mode according to an embodiment of the present disclosure;

[0058] Figure 5 Schematically shows a flowchart of operation S300A of a spectral measurement method according to an embodiment of the present disclosure;

[0059] Figure 6 Schematically shows a structural diagram of a first embodiment of a spectral measurement device according to an embodiment of the present disclosure;

[0060] Figure 7 Schematically shows a structural diagram of a second embodiment of a spectral measurement device according to an embodiment of the present disclosure;

[0061] Figure 8 Schematically shows a structural diagram of a third embodiment of a spectral measurement device according to an embodiment of the present disclosure;

[0062] Figure 9 Schematically shows a first structural block diagram of a third embodiment of a spectral measurement device according to an embodiment of the present disclosure;

[0063] Figure 10 Schematically shows a second structural block diagram of a third embodiment of a spectral measurement device according to an embodiment of the present disclosure;

[0064] Figure 11 Schematically shows a third structural block diagram of a third embodiment of a spectral measurement device according to an embodiment of the present disclosure. Detailed Description of the Invention

[0065] In order to enable those skilled in the art to better understand the technical solutions in the present disclosure, the following will clearly and completely describe the technical solutions in the embodiments of the present disclosure in conjunction with the accompanying drawings in the embodiments of the present disclosure. Obviously, the described embodiments are only a part of the embodiments of the present disclosure, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present disclosure without creative efforts shall fall within the scope of protection of the present disclosure.

[0066] The terms used herein are for describing specific embodiments only and are not intended to limit the present disclosure. The terms "comprising", "including" and the like used herein indicate the presence of the described features, steps, operations and / or components, but do not exclude the presence or addition of one or more other features, steps, operations or components.

[0067] All terms used herein (including technical and scientific terms) have the meanings commonly understood by those of ordinary skill in the art, unless otherwise defined. It should be noted that the terms used herein should be interpreted as having a meaning consistent with the context of this specification, and should not be interpreted in an idealized or overly rigid manner.

[0068] In cases where expressions such as "at least one of A, B, and C, etc." are used, generally, it should be interpreted according to the meaning commonly understood by those of ordinary skill in the art. For example, "a system having at least one of A, B, and C" should include, but not be limited to, a system having only A, only B, only C, having A and B, having A and C, having B and C, and / or having A, B, and C, etc. In cases where expressions such as "at least one of A, B, or C, etc." are used, generally, it should be interpreted according to the meaning commonly understood by those of ordinary skill in the art. For example, "a system having at least one of A, B, or C" should include, but not be limited to, a system having only A, only B, only C, having A and B, having A and C, having B and C, and / or having A, B, and C, etc.

[0069] A blackbody light source is a radiation source capable of generating a continuous broadband spectrum, and its spectral characteristics are close to the thermal radiation distribution of an ideal blackbody. In a specific embodiment, the blackbody light source generates a detection beam covering the near-infrared, far-infrared to terahertz bands through a thermal excitation method. In one embodiment, the light source heats a high-temperature-resistant metal filament or ceramic material by electrification, causing it to radiate broadband electromagnetic waves at high temperatures; at the same time, the temperature stability of the light source is maintained through an active heat dissipation mechanism (such as circulating cooling medium or forced air cooling) to ensure that the spectral intensity distribution of the output beam is uniform and has no significant drift. The radiation characteristics of the blackbody light source enable it to provide ultra-wideband optical excitation for the sample to be measured, thereby providing an original beam covering the target spectral range for subsequent spectral measurement.

[0070] Figure 1 A flowchart of a spectral measurement method according to an embodiment of the present disclosure is schematically shown.

[0071] As an aspect of an embodiment of the present disclosure, a spectral measurement method is provided, as Figure 1 shown, the spectral measurement method includes operation S100 - operation S300.

[0072] In operation S100, a detection beam generated by a blackbody light source is irradiated onto a sample to be measured, and an incident beam with the response characteristics of the sample to be measured is obtained.

[0073] In operation S200, the incident beam is radially spatially split to obtain at least two split beams.

[0074] In operation S300, spectral measurements are respectively performed on at least two split beams within a preset spectral range to obtain the spectral information of each split beam. Among them, the preset spectral ranges corresponding to the split beams are different, and the sum of the preset spectral ranges corresponding to the split beams continuously covers the target spectral interval.

[0075] According to the spectral measurement method of the embodiments of the present disclosure, through the cascade operation of the broadband radiation characteristics of the blackbody light source, radial spatial splitting, and split-spectrum range detection, the problem that traditional spectrometers cannot cover ultra-wideband spectra due to hardware bandwidth limitations is solved; through frequency-domain measurement combined with parallel data processing, the spectral reconstruction speed is significantly improved, especially suitable for real-time monitoring of transient processes. In addition, the matching design of the light intensity splitting method in the radial region and the overlapping spectral range screening during the splitting process ensures the seamless fusion of the spectra in each sub-spectral range, effectively avoiding spectral range breaks or data jumps.

[0076] Specifically, in operation S100, the detection beam generated by the blackbody light source is irradiated onto the sample to be measured. After the sample interacts with the beam, its optical response characteristics, such as absorption, transmission, or scattering characteristics, are modulated into the outgoing beam to form an incident beam carrying sample information. Among them, the blackbody light source generates a continuous broadband optical signal through thermal radiation, and its spectral range covers from the near-infrared to the terahertz band, providing a basic optical field for subsequent spectral measurements.

[0077] Specifically, in operation S200, a radial spatial splitting operation is performed on the incident beam. By dividing the radial cross-section of the incident beam, the incident beam is radially separated into at least two split beams. For example, a split beam is separated from a certain radial region of the incident beam, such as the outer edge annular region, and another split beam is separated from the remaining radial region, such as the central circular region, that is, two beams are separated based on the concentric ring method; for another example, a split beam is separated from a region on one side in the radial direction, and another split beam is separated from the remaining region on the opposite side, that is, two beams are separated based on the side-by-side cutting method. The purpose of the splitting operation is to split the incident beam into multiple split beams for subsequent independent processing.

[0078] Specifically in operation S300, after beam splitting is completed, spectral measurements are performed on each split beam within its corresponding preset spectral range: for each split beam, first, the spectral range of each split beam is restricted to the corresponding target spectral range through a spectral screening operation (such as wavelength selection). The preset spectral ranges corresponding to each split beam are different from each other, and the sum of the preset spectral ranges of all split beams needs to continuously cover the target ultra-wideband spectral interval. In some embodiments, the target ultra-wideband spectral interval is the near-infrared to terahertz band. That is, the spectral range of the first split beam can be set to the terahertz band, the spectral range of the second split beam can be set to the far-infrared band, and the spectral range of the third split beam can be set to the mid-infrared band, and there is partial overlap at the junction of adjacent spectral ranges, so as to realize the extraction of spectral information for each split beam after spectral screening.

[0079] According to some exemplary embodiments of the present disclosure, the radial spatial beam splitting specifically includes:

[0080] Performing a partial reflection process on the incident beam such that the beam in the first radial region of the incident beam is reflected to form one split beam, and the beam in the second radial region is transmitted to form another split beam, where the first radial region and the second radial region complementarily cover the radial cross-section in the radial direction of the propagation direction of the incident beam.

[0081] The spectral measurement method of the embodiments of the present disclosure performs a partial reflection process on the incident beam carrying the sample response characteristics, divides the radial cross-section of the beam into two complementarily covered regions through selective reflection and transmission operations, ensures the complete utilization of the incident beam, and solves the measurement blind area problem caused by energy loss or spectral range limitation in traditional spectroscopic techniques; the directional separation design of reflection and transmission simplifies the multi-channel optical path integration and provides high compatibility support for frequency-domain independent measurement, realizing the requirements of fast and low-noise data acquisition.

[0082] In some embodiments, in the propagation direction of the incident beam, through beam splitting, the beam in the first radial region is reflected to form the first split beam, and the beam in the second radial region is transmitted to form the second split beam, where the first radial region and the second radial region complementarily cover the entire cross-section of the incident beam on the radial cross-section in the propagation direction of the incident beam. For example, the first radial region can be defined as a partial side of the radial cross-section of the beam, and through high reflectivity processing, it is reflected and separated into an independent optical path; the second radial region is the remaining part that is not reflected, and maintains the original propagation direction with high transmittance characteristics. In this embodiment, the first split beam and the second split beam after beam splitting respectively enter independent measurement channels, and spectral screening and spectral information extraction are performed for their respective preset spectral ranges.

[0083] According to some exemplary embodiments of the present disclosure, the radial spatial beam splitting further includes:

[0084] For any sub-beam obtained through partial reflection processing, repeat the partial reflection processing so that the light beam in the first radial region of the current sub-beam is reflected to form a newly added sub-beam, and the light beam in the second radial region of the current sub-beam is transmitted to form another newly added sub-beam, where the first radial region and the second radial region in the current sub-beam complementarily cover the radial cross-section of the current sub-beam.

[0085] In an embodiment of the iterative processing, the ultra-wideband spectral measurement task is decomposed into multiple narrow-band sub-tasks through iterative beam splitting operations, solving the problem of insufficient spectral resolution caused by the detector bandwidth limitation in the traditional method; the narrow-band characteristics of the subdivided incident light beam reduce the requirement for the dynamic range of the detector, enabling it to perform optimally within a specific spectral range, thereby improving the quality and reliability of the overall spectral data. In addition, the modular design of multi-level beam splitting provides flexibility for system expansion, allowing the beam splitting level to be dynamically adjusted according to the analysis requirements of the target spectral range, taking into account both measurement efficiency and accuracy.

[0086] Specifically, in some embodiments of the iterative processing, for any sub-beam obtained through partial reflection processing, repeat the same partial reflection processing to divide the radial cross-section of the current sub-beam into two newly added radial regions that complementarily cover each other, that is, perform secondary beam splitting on the first sub-beam (formed by reflecting the first radial region of the initial incident light beam): by performing selective reflection and transmission operations on the radial cross-section of the first sub-beam again, divide it into a new first radial region and a new second radial region, where the light beam in the new first radial region is reflected to form a new first sub-beam, and the light beam in the remaining new second radial region is transmitted to form a new second sub-beam. In another embodiment, the same operation can also be performed on the second sub-beam formed by transmitting the second radial region of the initial incident light beam. During this process, each beam splitting ensures that the two newly added radial regions complementarily cover the entire cross-section of the current sub-beam, avoiding light energy loss or beam splitting omission.

[0087] In some embodiments, through multi-level beam splitting operations, the incident light beam is gradually split into multiple sub-beams, and each sub-beam corresponds to a smaller radial region. In subsequent spectral measurements, each sub-beam can be preset to cover a narrower spectral range. For example, the sub-beam preset for measuring the terahertz spectral range is further split into a sub-beam for measuring the low-frequency terahertz spectral range and a sub-beam for measuring the high-frequency terahertz spectral range, so as to adapt to the sensitive interval of the high-precision detector, enabling more refined spectral analysis within the ultra-wideband range while retaining the high efficiency and compatibility of the original beam splitting method.

[0088] According to some exemplary embodiments of the present disclosure, a first radial region corresponding to partial reflection processing is formed on the radial cross-section of the processed light beam, and the first radial region extends from the outer edge to the center of the radial cross-section of the light beam for covering arrangement. When performing partial reflection on any processed light beam, the first radial region extends from the outer edge to the center direction of the radial cross-section of the light beam, forming a continuous covering region from the edge to the inside. This avoids the problem of an ineffective occlusion area when setting up the reflection device, which affects the light intensity of the incident light beam.

[0089] Figure 2 Schematically shows a flowchart of a method for generating a detection light beam according to an embodiment of the present disclosure.

[0090] As Figure 2 shown, in some exemplary embodiments of the present disclosure, the method for generating a detection light beam includes: operation S010 to operation S020.

[0091] According to a specific embodiment of the present disclosure, the method for generating a detection light beam includes:

[0092] In operation S010, the light beams generated by multiple blackbody light sources are respectively collimated to form multiple blackbody light beams; in operation S020, the multiple blackbody light beams are converged and merged to form a detection light beam. Through the provided method for generating a detection light beam, through the collaborative operations of multi-light-source collimation and energy merging, the intensity and uniformity of the detection light beam are significantly improved, solving the signal-to-noise ratio bottleneck in weak signal measurement of traditional single-light-source schemes, providing sufficient light energy support for subsequent beam splitting and spectral extraction, and being particularly suitable for highly attenuated samples.

[0093] Specifically, in operation S010, the light beams generated by multiple blackbody light sources are respectively collimated to form multiple blackbody light beams that propagate parallel to each other. In some embodiments, after the divergent light beams of each blackbody light source are independently collimated, they are converted into spatially uniformly distributed and collimated blackbody light beams, and each blackbody light beam is transmitted along the same propagation direction.

[0094] Specifically, in operation S020, the multiple collimated blackbody light beams are subjected to a converging and merging process to converge the energy of each light beam into the same optical path, forming a detection light beam with a high energy density. The finally generated detection light beam has significantly enhanced light intensity characteristics and is suitable for the measurement requirements of low-sensitivity detectors or the penetrability analysis of highly attenuated samples.

[0095] According to some exemplary embodiments of the present disclosure, the light beams generated by at least a pair of blackbody light sources are arranged side by side. By arranging the light beams generated by at least two blackbody light sources side by side, and adjusting the spatial layout to make the two collimated blackbody light beams adjacent to each other in the transverse cross-section, when combined, a detection light beam with a uniform spatial energy distribution can be formed. This arrangement method further improves the intensity and signal-to-noise ratio of the detection light beam by increasing the light field density per unit area. In some embodiments, only the light beams generated by at least a pair of blackbody light sources in the central region can be arranged side by side, further increasing the central light intensity of the detection light beam and reducing the signal-to-noise ratio.

[0096] According to some exemplary embodiments of the present disclosure, the spectral measurement method further includes: focusing the detection light beam so that the focused detection light beam forms a spatial focus at the sample to be measured.

[0097] According to some other exemplary embodiments of the present disclosure, the spectral measurement method further includes: collimating the incident light beam so that the collimated incident light beam can radially spatially split into at least two sub-beams.

[0098] According to the spectral measurement methods of the above two embodiments, in the collaborative optimization of wide-spectrum light beam excitation and beam splitting, the problem that it is difficult to balance the excitation efficiency and beam splitting accuracy due to neglecting the light beam form is solved. In this embodiment, through the cascaded processing of focused excitation and beam expansion and collimation, the above two problems can be solved simultaneously.

[0099] In some embodiments, the detection light beam is focused, and by adjusting the curvature parameter of the detection light beam, the spatial focus where the detection light beam converges is accurately positioned at the action region of the sample to be measured. The focused detection light beam forms a high-intensity micro-region excitation point on the surface of the sample to be measured, and its energy density is significantly increased compared with the collimated light beam, which can effectively excite the weak absorption characteristics and deep structure response of the sample, and at the same time suppress the stray signal interference in the edge region.

[0100] In some other embodiments, during the focusing process, although the focusing effect enhances the excitation efficiency, it causes significant divergence of the light beam after penetrating the sample due to scattering and diffraction effects, forming an incident light beam with a blurred spatial distribution. Even without the focusing process, the light beam will also show significant divergence after penetrating the sample due to scattering and diffraction effects. To eliminate the influence of divergence on the beam splitting accuracy, the incident light beam is collimated so that the divergent light beam is restored to the collimation equivalent to the original detection light beam, and a clear radial spatial distribution feature is reconstructed. Among them, the collimated incident light beam provides reasonable boundary conditions for subsequent radial beam splitting. This method ensures both efficient energy coupling during the sample interaction stage and the spatial-spectral mapping accuracy during the beam splitting stage through cascaded control of focused excitation and collimation.

[0101] According to some exemplary embodiments of the present disclosure, the spectral measurement method further includes:

[0102] Collimate and reduce the beam diameter of the split beam formed by reflecting the first radial region to form a composite split beam; perform transmission and reflection beam splitting on the composite split beam to form a first split beam for measuring the near-infrared to mid-infrared band and a second split beam for measuring the far-infrared band.

[0103] Collimate and reduce the beam diameter of the split beam formed by transmitting the second radial region to form a third split beam for measuring the terahertz band.

[0104] In the scenario of ultra-wide spectral band beam fine splitting, it is difficult for traditional schemes to balance the detection sensitivity and spectral resolution of sub-beams due to the limitation of the spectral range of the beam splitting element and energy loss. In this embodiment, high-fidelity beam splitting is achieved through a hierarchical decoupling strategy, and the specific implementation is as follows: For the split beam formed by reflecting the first radial region, perform collimation and beam diameter reduction processing to adjust its spatial distribution pattern, eliminate the wavefront distortion introduced by the transmission path, and form a split beam with uniform energy density; Subsequently, perform beam splitting processing. In a specific embodiment, a transmission and reflection beam splitter with wavelength selection function can be used. Its transmission channel is optimized for the near-infrared to mid-infrared band, and the reflection channel is optimized for the far-infrared band, so that the components in different spectral ranges in the split beam are separated according to preset characteristics. The transmission channel outputs an independent spectrum in the near-infrared to mid-infrared band, and the reflection channel outputs a complete signal in the far-infrared band; In another specific embodiment, a non-wavelength selection type optical intensity beam splitter can also be used to split the split beam into two paths according to a fixed energy ratio, and each path realizes spectral screening corresponding to its preset spectral range segment subsequently. The former embodiment realizes spectral isolation with zero crosstalk, and the latter embodiment provides high flexibility in bandwidth customization. For the split beam formed by transmitting the second radial region, adjust its transmission characteristics through collimation and beam diameter reduction processing, suppress beam divergence and mode distortion, form a collimated split beam with regular cross-sectional shape and stable energy distribution, and perform spectral screening on the collimated split beam corresponding to its preset spectral range segment and measure the spectral information.

[0105] Figure 3 Schematically shows a flowchart of operation S300 of the spectral measurement method according to an embodiment of the present disclosure.

[0106] As Figure 3 shown, in some exemplary embodiments of the present disclosure, the method for obtaining the spectral information of each split beam specifically includes: operation S310 to operation S330.

[0107] In operation S310, perform spectral screening processing on each split beam so that the spectral range of each split beam is consistent with its corresponding preset coded spectral range.

[0108] In operation S320, perform spectral encoding processing on each split beam to generate an encoded beam carrying spatial phase characteristics.

[0109] In operation S330, each encoded light beam is identified and processed to obtain the spectral information of each sub-light beam.

[0110] Specifically, in operation S310, for the sub-light beams obtained by radial beam splitting, that is, for example, the first sub-light beam and the second sub-light beam, the spectral range is dynamically intercepted through spectral filtering processing, and the sub-light beams with spectral ranges that exactly match the preset spectral ranges of the corresponding detection channels are selected, eliminating the problems of spectral range shift or bandwidth overflow that may be introduced during the beam splitting process. The filtering mechanism of the spectral filtering processing is adaptively enabled according to the difference in the beam splitting mode, which not only ensures the encoding purity of the high-fidelity sub-light beams but also enhances the system compatibility in the composite beam splitting scenario.

[0111] Specifically, in operation S320, for each independent sub-light beam obtained by radial beam splitting, that is, for example, the first sub-light beam and the second sub-light beam, spectral encoding processing is performed on the phase modulation characteristics corresponding to specific spectral ranges. In the spectral encoding processing, the sub-light beam generates a spatial phase modulation associated with the spectral components, forming an encoded light beam carrying unique encoding features.

[0112] Specifically, in operation S330, each encoded light beam is collected and detected in parallel to obtain its spatial intensity distribution information. The collected data is reversely analyzed through a preset phase decoding algorithm to strip off the environmental noise interference and reconstruct the original spectral information of each sub-light beam.

[0113] According to some exemplary embodiments of the present disclosure, the spectral measurement method further includes:

[0114] According to the spectral range continuity of at least two sub-light beams, data fusion of the overlapping region is performed on at least two pieces of spectral information to generate continuous spectral information carrying the response characteristics of the sample to be measured and covering the target spectral interval.

[0115] Specifically, in some embodiments, for the spectral information of multiple sub-light beams obtained by spatial beam splitting, whose spectral ranges respectively correspond to the near-infrared to mid-infrared, far-infrared, and terahertz bands, first, based on the preset spectral mapping relationship, the overlapping regions between the sub-light beams are located, the response signals of all sub-light beams in this region are extracted for cross-correlation analysis, the spectral information is corrected, and the spectral information of the corrected sub-light beams is spliced and extended according to the principle of spectral continuity to generate a continuous spectral curve covering the target interval.

[0116] In some exemplary embodiments of the present disclosure, the spectral measurement method includes three measurement modes. In the first measurement mode, the method is to irradiate the detection beam generated by the blackbody light source onto the sample to be measured for spectral measurement and analysis of the sample to be measured. In the second measurement mode of the spectral measurement method, the method is to irradiate the pump beam and the detection beam onto the sample to be measured together for spectral measurement and analysis of the sample to be measured. In the third measurement mode of the spectral measurement method, the method is to only receive the test beam generated by the test light source and perform spectral measurement and analysis on the test beam.

[0117] As Figure 4 shown, in the second measurement mode, the spectral measurement method further includes: operations S100A to S300A.

[0118] In operation S100A, when irradiating the detection beam generated by the blackbody light source onto the sample to be measured, the pump beam is irradiated onto the sample to be measured with a fixed pulse so that the incident beam carries the response information of the sample to be measured in the excited state.

[0119] In operation S200A, radial spatial beam splitting is performed based on the incident beam to obtain at least two split beams.

[0120] In operation S300A, the spectral information of each split beam is measured respectively.

[0121] In some embodiments, dynamic information analysis is realized through the timing coordination of pulse excitation and broadband detection. In a specific embodiment, while continuously irradiating the detection beam onto the sample to be measured in operation S100A to obtain its steady-state response information, the pump beam is modulated into a pulse sequence with a fixed frequency and a fixed pulse width through an independent optical path. After the pump beam and the detection beam are precisely synchronized in the space-time dimension, they act on the sample surface together. The pulse energy of the pump beam excites the sample into a transient excitation state, and the physical or chemical properties of the sample to be measured change dynamically during the pulse action. When the detection beam penetrates the sample, the dynamic response information of the sample to be measured in the excited state is synchronously loaded, forming an incident beam carrying transient excitation characteristics. In operations S200A and S300A, the radial spatial beam splitting method is adopted to split the incident beam into multiple split beams, and after screening the preset spectral range for each split beam respectively, the ultra-wideband spectral information of the sample to be measured is collected.

[0122] As Figure 5 shown, in some exemplary embodiments of the present disclosure, measuring the spectral information of each split beam respectively specifically includes: operations S310A to S320A.

[0123] In operation S310A, the first spectral information is collected at the moment when the pump beam first excites the sample to be measured;

[0124] In operation S320A, in subsequent N-1 pump pulse cycles, preset time intervals are sequentially increased to perform delayed acquisition of spectral information, wherein the total delay of the Nth acquisition is equal to the duration of a single pump pulse cycle, and N is a positive integer greater than 2.

[0125] In some embodiments, when the pump beam irradiates the sample to be tested with a fixed pulse period, at the trigger moment of the first pulse rising edge in operation S310A, the spectrum acquisition is synchronously started to obtain the first spectrum information of the initial state of the excitation; in operation S320A, in the subsequent pulse period, the trigger signal is successively accumulated and delayed, so that the second to Nth spectrum acquisition moments are fixedly delayed by a preset time interval (such as 1ps to 1ns) compared with the previous one. In this process, the total delay of the Nth acquisition is strictly equal to the length of a single pulse period to ensure the integrity of the timing coverage. After the sub-beam spectral data collected each time are arranged in the order of delay, an ultra-wideband transient response curve of the sample under the action of excitation can be constructed to accurately characterize the dynamic trajectory of its physical or chemical properties evolving over time. This spectral measurement method provides high-precision time-resolved measurement capabilities for ultrafast process research such as excited state relaxation and energy transfer path analysis through the coordinated control of timing extension and fixed period constraints.

[0126] In a specific embodiment of the present disclosure, in the third measurement mode, the spectrum measurement method further includes: operation S100B.

[0127] In operation S100B, while stopping receiving the detection beam and the pump beam, or blocking the incident beam, a test beam generated by an external test light source is received, the test beam is subjected to radial spatial beam splitting processing to obtain at least two sub-beams, and the spectral information of each sub-beam is measured respectively.

[0128] In some embodiments, the test light source is directly radially space-split, and based on a preset spatial separation logic, such as the partial reflection and partial transmission scheme of the above embodiment, the test light source is split into several sub-beams. Since the spectrum range of the test light source is unknown, each sub-beam needs to be further subjected to spectrum screening processing. In a specific embodiment, for one sub-beam, a sub-beam in the near-infrared to far-infrared spectrum range can be screened out, and for another sub-beam, a sub-beam in the terahertz spectrum range can be extracted. Each filtered sub-beam is synchronously collected based on the detection channel of the corresponding spectrum range, and finally the full-spectrum continuous spectrum of the test light source is generated based on the splicing of the spectrum range of each filtered sub-beam.

[0129] Based on the above spectrum measurement method, the embodiment of the present disclosure also provides a spectrum measurement device. Figures 6 to 11 The device is described in detail.

[0130] Figure 6The structural diagram of the first embodiment of the spectral measurement device according to an embodiment of the present disclosure is schematically shown; Figure 7 The structural diagram of the second embodiment of the spectral measurement device according to an embodiment of the present disclosure is schematically shown; Figure 8 The structural diagram of the third embodiment of the spectral measurement device according to an embodiment of the present disclosure is schematically shown; Figure 9 The first structural block diagram of the third embodiment of the spectral measurement device according to an embodiment of the present disclosure is schematically shown; Figure 10 The second structural block diagram of the third embodiment of the spectral measurement device according to an embodiment of the present disclosure is schematically shown; Figure 11 The third structural block diagram of the third embodiment of the spectral measurement device according to an embodiment of the present disclosure is schematically shown.

[0131] As Figures 6 to 11 shown, the spectral measurement device of this embodiment includes a beam input component 4B, a sample reaction component 5B, and a beam detection component 100B.

[0132] The beam input component 4B is configured to generate a detection beam from the beam generated by a blackbody light source.

[0133] The sample reaction component 5B is provided with a first window 51B and a second window 52B that are opposed along the optical axis. The detection beam is incident on the area of the sample to be measured through the first window 51B, and the second window 52B is used for the output of the incident beam formed after interacting with the sample to be measured.

[0134] The beam detection component 100B, the beam detection component 100B includes: a beam splitting element 1B and at least two detection parts 2B. The beam splitting element 1B is arranged to cover from the outer edge to the central part of the radial cross-section of the incident beam, so that a part of the incident beam is reflected to form a split beam, and the remaining part of the incident beam is transmitted to form another split beam. Each detection part 2B is respectively arranged in the optical path of each split beam to obtain the spectral information of each split beam within a preset spectral measurement range.

[0135] In some embodiments, the beam input component 4B generates a detection beam through a blackbody light source. The blackbody light source generates a continuous broadband beam through thermal radiation, and the spectral range of the detection beam covers an ultra-wide interval from the near-infrared to the terahertz band. The detection beam is incident on the area of the sample to be measured through the first window 51B of the sample reaction component 5B. After interacting with the sample, the outgoing beam carrying the sample response characteristics is output as the incident beam through the second window 52B.

[0136] In some embodiments, the beam splitting element 1B of the beam detection assembly 100B includes at least one radial beam splitter 13B. The radial beam splitter 13B is an optical element with partial reflection characteristics. Its reflection area covers a partial area on one side of the radial cross-section of the incident beam, that is, the first radial area, and the transmission area covers the remaining radial area on the other side, that is, the second radial area. After the incident beam is processed by the beam splitting element 1B, the first radial area is reflected to form a split beam, and the first radial area is transmitted to form another split beam. The first radial area and the second radial area complementarily cover the complete cross-section of the beam, ensuring no loss of light energy during the beam splitting process.

[0137] In some embodiments, independent detection parts 2B are respectively arranged in the optical paths of the split beams. Each detection part 2B is configured to obtain the spectral information of the corresponding split beam that falls within its preset spectral measurement range. In one embodiment, the detection part 2 corresponding to the split beam formed by the first radial area covers the low-frequency spectrum range, and the detection part 2B corresponding to the split beam formed by the second radial area covers the high-frequency spectrum range. The sum of the spectral measurement ranges of the two split beams continuously covers the target ultra-wideband interval. Through the matching design of the spatial division of the beam splitting element 1B and the spectral range of the detection part 2B, the ultra-wideband spectral information of the incident beam is split into independent measurement tasks in multiple sub-spectral ranges, solving the problem that traditional spectral devices cannot cover the ultra-wideband spectrum due to the bandwidth limitation of a single detector; the complementary beam splitting logic of reflection and transmission maximally utilizes the incident light energy, avoiding optical path occlusion or energy waste; the independent measurement in the frequency domain combined with the design of the detection part 2B with a matched spectral range ensures seamless connection of the spectral data within the ultra-wideband range, providing a hardware basis for the fast and high-precision spectral analysis of complex samples.

[0138] As Figure 6 and Figure 8 shown, according to some exemplary embodiments of the present disclosure, the beam input assembly 4B includes:

[0139] A beam reducing and collimating element 93. The beam reducing and collimating element 93 is respectively arranged in the optical paths of the split beams to perform beam reducing and collimating processing on the split beams so that the beam cross-section diameters of the split beams are smaller than the receiving range of the detection part 2.

[0140] In some embodiments, a beam reducing and collimating element 93 is disposed in the optical path of each split beam between the radial beam splitter 13B and each detection unit 2B. The beam reducing and collimating element 93 adjusts the propagation characteristics of the split beam through reflection or refraction. In one embodiment, the beam reducing and collimating element 93 can be a lens group or a cascaded mirror. For the split beam formed by reflection, the curved surface design of the parabolic mirror converts the divergent beam of the split beam into a parallel light and compresses the beam cross-sectional size. For the split beam formed by transmission, the beam reducing and collimating element 93 reduces the beam diameter through a parabolic mirror group or a cascaded mirror group. The beam cross-sectional size of each processed split beam is reduced and the propagation direction remains collimated, ensuring that the final cross-sectional size of the split beam reaching the detection unit 2B is smaller than the receiving range of the corresponding detection unit 2B. This embodiment solves the measurement error caused by uneven light field distribution or size mismatch by adapting the matching relationship between the split beam size and the detector receiving ability, and at the same time improves the signal-to-noise ratio in weak signal scenarios.

[0141] As Figure 7 shown, according to some other exemplary embodiments of the present disclosure, the beam splitting element 1B does not include the radial beam splitter 13B, but includes a parabolic mirror assembly 12, and the parabolic mirror assembly 12 is configured to reflect and reduce and collimate a part of the incident light beam to form a split beam.

[0142] In some embodiments, the beam splitting element 1B includes a parabolic mirror assembly 12, and its functions integrate reflection, beam reduction, and collimation operations. The parabolic mirror assembly 12 is disposed to cover a part of the cross-section of the incident light beam from the outer edge to the center of the radial cross-section of the incident light beam. A part of the radial cross-section beam of the incident light beam is reflected by the curved surface of the parabolic mirror assembly 12, and the remaining part of the radial cross-section beam is transmitted beside the parabolic mirror assembly 12 and is separated into at least two split beams. At the same time, the split beam formed by reflection is reduced and collimated by the parabolic mirror assembly 12. In one embodiment, the geometric design of the parabolic mirror assembly 12 enables its reflecting surface to cover a part of the radial region of the incident light beam. During the reflection process, the propagation direction and cross-sectional size of the split beam are adjusted through the surface curvature. Specifically, the divergence angle of the split beam formed by reflection is compressed by the parabolic mirror assembly 12 into a parallel light, and the cross-sectional size of the split beam is reduced to form a reduced and collimated split beam, whose size is adapted to the receiving range of the corresponding detection unit 2B. In some embodiments, the coordinated operations of beam splitting and beam reduction and collimation are realized through a single-stage optical element, avoiding the complex optical path design of additionally arranging a beam reducing and collimating element 93 after beam splitting in the traditional scheme, enabling the reduced and collimated split beam to directly enter the detection unit 2B without secondary adjustment of the light field distribution through a lens or a mirror, significantly simplifying the system structure and improving the energy transfer efficiency.

[0143] As Figures 6 to 11As shown, in some exemplary embodiments, the beam splitting element 1B of the beam detection assembly 100B may further include at least one beam splitting portion 11. The beam splitting portion 11 covers the cross-section of the split beam. The beam splitting portion 11 is configured to split the split beam into a first split beam reflected by the beam splitting portion 11 and a second split beam transmitted by the beam splitting portion 11.

[0144] In some specific embodiments, the beam splitting portion 11 is a planar beam splitter or a beam splitting film, and its reflecting surface and transmitting surface cover the entire cross-section of the split beam. The split beam is split into two split beams by the beam splitting portion 11 according to a preset energy ratio, for example, 50% reflection and 50% transmission: the first split beam changes its propagation direction after reflection, and the second split beam remains in the original direction after transmission. The spectral ranges of the two split beams are the same as that of the incident light, but the energy is split proportionally.

[0145] In some other specific embodiments, the beam splitting portion 11 is a wavelength-selective beam splitting component. In one embodiment, the beam splitting portion 11 may be a dichroic beam splitter. In another embodiment, the beam splitting portion 11 may be a metasurface beam splitter. The reflection and transmission characteristics of the beam splitting portion 11 vary with wavelength. That is, in one embodiment, the beam splitting portion 11 has a high reflectivity for terahertz band light and a high transmittance for infrared band light. The beam splitting portion 11 will reflect the beam to form a split beam corresponding to the terahertz band and transmit it to form another split beam corresponding to the infrared band. The spectral ranges of the two split beams do not overlap and the boundaries are clear. The beam splitting portion 11 directly realizes frequency domain screening through physical characteristics, reducing the subsequent filtering requirements.

[0146] As Figures 6 to 11 shown, in some exemplary embodiments, the detection portion 2B includes: an encoding element 21 disposed on the optical path of the split beam. The encoding element 21 is configured to perform spectral encoding on the split beam so that the split beam is formed into an encoded beam with a spatial phase distribution; a detection element 22 disposed on the optical path of the encoded beam. The detection element 22 is configured to receive the encoded beam and generate spectral information of the encoded beam.

[0147] In some embodiments, encoding elements 21 are provided on the optical paths of the sub-beams. By applying spatial phase modulation to the sub-beams, the encoding elements 21 encode the sub-beams into encoded beams with specific distribution characteristics. In a specific embodiment, the encoding element 21 can be an arrayed metasurface containing electromagnetic microstructures or an arrayed metamaterial containing electromagnetic microstructures, which is used for transmissive high-random spectral encoding or reflective high-random spectral encoding of the sub-beams. In the embodiment where the encoding element 21 is an arrayed metasurface, randomly distributed nanostructures are introduced into the cross-section of the sub-beam, causing different wavelengths of light to generate differential phase delays, thereby forming a spatial interference pattern related to the spectrum during propagation. The encoded beam after encoding is received by the detection element 22. In a specific embodiment, the detection element 22 can be an arrayed optoelectronic sensor, such as a CCD, CMOS, or MCT detector array. The detection element 22 can convert the spatial intensity distribution of the encoded beam into an electrical signal and invert the original spectral information through a machine learning algorithm. In some embodiments, through the combined action of the wavelength selection of the beam splitting element 1B and the spatial modulation of the encoding element 21, the problems of light energy loss or spectral range limitation introduced by the filtering element in traditional spectrometers are solved, and high-precision spectral measurement in the frequency division domain can be achieved without additional filtering. Combining with the parallel acquisition ability of the array detector, the spectral reconstruction speed and resolution are significantly improved.

[0148] As Figures 6 to 9 shown, in some exemplary embodiments, the detection unit 2B further includes: a filtering element 23, disposed between the beam splitting element 1B and the encoding element 21, and the filtering element 23 is located on the optical path of the sub-beam. The filtering element 23 is used to filter out the sub-beam corresponding to the spectral measurement range of the detection unit 2B from the sub-beam.

[0149] As Figures 6 to 8 、 Figure 11 shown, in some exemplary embodiments, the spectral measurement device further includes: a pump light input component 6, which is used to receive a pump pulse beam from the outside; the sample reaction component 5B further has a third window 53, and the third window 53 is used for the pump pulse beam to pass through and be incident on the sample to be measured in the reaction chamber to excite the sample to be measured.

[0150] Specifically, in some embodiments, the pump pulse beam can be a femtosecond laser or a terahertz pulse. The pump light input component 6 is used to receive the pump pulse beam from the outside and guide the pump pulse beam to the third window 53 of the sample reaction component 5B. The third window 53 is an optical transmission window, allowing the pump pulse beam to penetrate and be incident on the surface of the sample to be measured in the reaction chamber, so as to excite the sample to a specific excited state through photothermal, photoelectric or photochemical effects. In this embodiment, the pump pulse beam and the probe beam act on the sample synchronously or asynchronously in time or space. In one embodiment, the pump pulse can also be controlled to delay excitation of the sample by the electric delay module, and then the probe beam captures the dynamic response characteristics of the sample under transient excitation. In this embodiment, the outgoing beam carrying the excitation response information is output to the beam splitting element 1B through the second window 52B. After beam splitting and spectral measurement, the ultra-wideband transient spectrum of the sample in the excited state can be reconstructed. This design expands the functional boundary of the device through the synergistic effect of the pump light and the probe light, making it compatible with the requirements of steady-state and transient spectral analysis.

[0151] As Figures 6 to 8 shown, in some exemplary embodiments, the spectral measurement device further includes: a test light input component 7 for receiving a test beam from the outside; a reflection component 8, and the reflection component 8 is disposed in the inner cavity of the sample reaction component 5B; the sample reaction component 5B further has a fourth window 54, and the fourth window 54 is used for the test beam to pass through and be incident on the reflection component 8, and the reflection component 8 is used to reflect the test beam out through the second window 52B to the beam splitting element 1B.

[0152] Specifically, in some embodiments, the test light input component 7 is used to receive a test beam from the outside. The test beam can come from a test light source such as a calibration light source or a reference light source. The test light input component 7 guides the test beam to the fourth window 54 of the sample reaction component 5B. The fourth window 54 is an optical transmission window, allowing the test beam to penetrate and enter the reaction chamber. However, the propagation path of the test beam does not pass through the sample to be measured, but is directly incident on the surface of the reflection component 8 disposed in the cavity. The reflection component 8 reflects the test beam to the second window 52B, forming an incident beam independent of the sample, and outputs it to the beam splitting element 1B; in one embodiment, the test beam is vertically incident on the reflection component 8 through the fourth window 54 and enters the beam splitting element 1B after reflection through the second window 52B. This design enables the device to complete optical path calibration, system noise calibration or reference spectral measurement through the test beam without disturbing the sample or without the need for sample intervention, providing independent input conditions for the accuracy verification of the ultra-wideband spectrum.

[0153] Those skilled in the art will appreciate that the features described in the various embodiments of the present disclosure can be combined and / or combined in various ways, even if such combinations or combinations are not explicitly described in the present disclosure. In particular, without departing from the spirit and teachings of the present disclosure, the features described in the various embodiments of the present disclosure can be combined and / or combined in various ways. All such combinations and / or combinations fall within the scope of the present disclosure.

[0154] The embodiments of the present disclosure have been described above. However, these embodiments are for illustrative purposes only and are not intended to limit the scope of the present disclosure. Although the embodiments have been described separately above, this does not mean that the measures in the respective embodiments cannot be used advantageously in combination. Without departing from the scope of the present disclosure, those skilled in the art can make various substitutions and modifications, and all such substitutions and modifications should fall within the scope of the present disclosure.

Claims

1. A spectral measurement method, characterized in that, The method includes: Irradiating a detection beam generated by a blackbody light source onto a sample to be measured to obtain an incident beam with the response characteristics of the sample to be measured attached; Performing radial spatial beam splitting on the incident beam to obtain at least two split beams; Performing spectral measurements on the at least two split beams respectively within a preset spectral range to obtain the spectral information of each split beam, wherein the preset spectral ranges corresponding to the respective split beams are different, and the sum of the preset spectral ranges corresponding to the respective split beams continuously covers the target spectral interval.

2. The spectral measurement method according to claim 1, characterized in that, The radial spatial beam splitting specifically includes: Performing partial reflection processing on the incident beam such that the beam in the first radial region of the incident beam is reflected to form one split beam, and the beam in the second radial region is transmitted to form another split beam, wherein the first radial region and the second radial region complementarily cover the radial cross-section in the radial direction of the propagation direction of the incident beam.

3. The spectral measurement method according to claim 2, characterized in that The radial spatial beam splitting further includes: For any split beam obtained through partial reflection processing, repeating the partial reflection processing such that the beam in the first radial region of the current split beam is reflected to form a newly added split beam, and the beam in the second radial region of the current split beam is transmitted to form another newly added split beam, wherein the first radial region and the second radial region in the current split beam complementarily cover the radial cross-section of the current split beam.

4. The spectral measurement method according to claim 2 or 3, wherein The first radial region corresponding to the partial reflection processing is formed on the radial cross-section of the beam to be processed, and the first radial region extends from the outer edge of the radial cross-section of the beam to the center for covering and setting.

5. The spectroscopic measurement method according to claim 1, wherein The method for generating the detection beam includes: Collimating the beams generated by multiple blackbody light sources respectively to form multiple blackbody beams; Converging and combining the multiple blackbody beams to form a detection beam.

6. The spectral measurement method according to claim 5, characterized in that, At least a pair of the beams generated by the blackbody light sources are arranged side by side.

7. The spectral measurement method according to claim 5, characterized in that, The method further includes: Focusing the detection beam such that the focused detection beam forms a spatial focus at the sample to be measured.

8. The spectroscopic measurement method according to claim 7, characterized in that, The method further includes: Collimating the incident beam such that at least two split beams can be radially spatially split from the collimated incident beam.

9. The spectroscopic measurement method according to claim 2, characterized in that, The method further includes: Performing beam reduction and collimation processing on the split beam formed by reflection in the first radial region to form a composite split beam; Performing transmission and reflection beam splitting processing on the composite split beam to form a first split beam for measuring the near-infrared to mid-infrared band and a second split beam for measuring the far-infrared band.

10. The spectral measurement method according to claim 2 or 9, characterized in that, The method further includes: Performing beam reduction and collimation processing on the split beam formed by transmission in the second radial region to form a third split beam for measuring the terahertz band.

11. The spectral measurement method according to claim 2 or 3, characterized in that, The method for obtaining the spectral information of each split beam includes: Performing spectral screening processing on each split beam such that the spectral range of each split beam is consistent with its corresponding preset coded spectral range; Performing spectral coding processing on each split beam to generate a coded beam carrying spatial phase characteristics; Performing identification processing on each coded beam to obtain the spectral information of each split beam.

12. The spectral measurement method according to claim 2 or 3, characterized in that, The method further includes: Based on the spectral range continuity of the at least two sub-beams, data fusion of the overlapping region is performed on the at least two pieces of spectral information to generate continuous spectral information carrying the response characteristics of the sample to be measured and covering the target spectral range.

13. The spectral measurement method according to any one of claims 1-3, 5-9, characterized in that, The method further includes: When irradiating the detection beam generated by the blackbody light source onto the sample to be measured, irradiating the pump beam onto the sample to be measured with a fixed pulse, so that the incident beam is attached with the response information of the sample to be measured in the excited state; Performing radial spatial beam splitting on the incident beam to obtain at least two sub-beams; Measuring the spectral information of each of the sub-beams respectively.

14. The spectroscopic measurement method according to claim 13, wherein The step of measuring the spectral information of each of the sub-beams respectively includes: Collecting the first spectral information at the moment when the pump beam first excites the sample to be measured; In the subsequent N - 1 pump pulse periods, collecting spectral information with a preset time interval increased in sequence for delay, where the total delay of the Nth collection is equal to the duration of a single pump pulse period, and N is a positive integer greater than 2.

15. The spectral measurement method according to any one of claims 1-3, 5-9, characterized in that The method further includes: Receiving the test beam generated by an external test light source, performing radial spatial beam splitting processing on the test beam to obtain at least two sub-beams, and measuring the spectral information of each of the sub-beams respectively.

16. A spectral measurement device, characterized in that, It includes: A beam input component configured to generate a detection beam from the beam generated by the blackbody light source; A sample reaction component provided with a first optical window and a second optical window opposed along the optical axis. The detection beam is incident on the action area of the sample to be measured through the first optical window, and the second window is used for outputting the incident beam formed after acting on the sample to be measured; A beam detection component, and the beam detection component includes: A beam splitting element that covers and is arranged from the outer edge to the central part of the radial cross-section of the incident beam, so that a part of the incident beam is reflected to form a sub-beam, and the remaining part of the incident beam is transmitted to form another sub-beam; At least two detection parts, each of the detection parts is respectively arranged in the optical path of each of the sub-beams for obtaining the spectral information of each of the sub-beams within the preset spectral measurement range.

17. The spectral measurement device according to claim 16, characterized in that, The spectral measurement device further includes: A beam shrinking and collimating element, which is respectively arranged in the optical path of each of the sub-beams for performing beam shrinking and collimating processing on each of the sub-beams, so that the beam cross-section diameter of each of the sub-beams is smaller than the receiving range of the detection part.

18. The spectral measurement device according to claim 16 or 17, wherein The beam splitting element includes a parabolic mirror assembly, and the parabolic mirror assembly is used for reflecting and beam shrinking and collimating a part of the incident beam to form a sub-beam.

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