Light path calibration method and device, equipment and storage medium
By obtaining the light intensity at the point of the light detector in semiconductor optical devices and automatically adjusting the position of the optical device, the measurement deviation problem caused by optical path deviation is solved, equipment efficiency is improved and operation and maintenance costs are reduced.
Patent Information
- Application Number
- CN202410105062.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2024-01-25
- Publication Date
- 2025-07-25
AI Technical Summary
After a long time of use, semiconductor optical equipment is affected by environmental vibration, resulting in slight displacement of the laser optical path, resulting in obvious deviations in the measurement results. The existing technology requires manual debugging, resulting in delays in production and R&D tasks and increased operation and maintenance costs.
By obtaining the light intensity of multiple points on the light detector, determining the degree of deviation of the optical path, and controlling the optical device to adjust the position by using the controller to achieve automatic calibration.
The optical path calibration process is simplified, manual intervention is reduced, equipment utilization is improved, operation and maintenance costs are reduced, and efficient optical path deviation calibration is achieved.
Smart Images
Figure CN120369263A_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing, and particularly to an optical path calibration method, apparatus, device, and storage medium. Background Art
[0002] A type of semiconductor optical device in the semiconductor industry, including but not limited to particle size detection devices, photoluminescence devices, etc. After a long period of use, the laser optical path may experience small displacements due to the influence of environmental vibrations on the mechanical frame or optical components. This displacement is amplified by the functional lenses in the optical path, causing the laser beam to deviate significantly from the original incident angle and resulting in obvious changes in the detection results of the sample to be measured. The above phenomena have been found in many application devices currently. Summary of the Invention
[0003] In view of this, embodiments of this application provide an optical path calibration method, apparatus, device, and storage medium to solve at least one problem in the background art.
[0004] To achieve the above object, the technical solution of this application is realized as follows:
[0005] In a first aspect, embodiments of this application provide an optical path calibration method, which is applied to a semiconductor optical detection device. The semiconductor optical detection device includes: a controller, a light source, a light detector, and at least one optical device between the light source and the light detector. The method includes:
[0006] Obtain the light intensities at multiple points on the light detector;
[0007] Determine the deviation degree of the optical path according to the light intensities at the multiple points; the optical path is the path of light propagation;
[0008] Control the optical device affecting the optical path to adjust its position according to the deviation degree of the optical path.
[0009] Optionally, the obtaining the light intensities at multiple points on the light detector includes:
[0010] Obtain an optical signal through a photosensitive element;
[0011] Amplify the obtained optical signal;
[0012] Convert the amplified optical signal into an electrical signal;
[0013] Determine the light intensities at multiple points on the light detector according to the electrical signal.
[0014] Optionally, the obtaining the light intensities at multiple points on the light detector includes:
[0015] Control the position adjustment of the photodetector so that sufficient light intensity can be obtained at multiple points of the photodetector.
[0016] Optionally, determining the deviation degree of the optical path according to the light intensities of the multiple points includes:
[0017] Determining the deviation degree of the optical path according to the light intensity of a single point;
[0018] And / or, determining the deviation degree of the optical path according to the difference in light intensities of different points;
[0019] And / or, determining the deviation degree of the optical path according to the distribution law of the light intensities of multiple points.
[0020] Optionally, controlling the position adjustment of the optical device affecting the optical path according to the deviation degree of the optical path includes:
[0021] Controlling the position adjustment of the optical device gradually according to the preset priorities of the multiple optical devices until the deviation degree of the optical path is reduced to a preset range.
[0022] Optionally, the method further includes:
[0023] Obtaining the light intensities of multiple photodetectors at different positions;
[0024] Determining the deviation degree of the optical path according to the light intensities of the photodetectors at different positions.
[0025] In a second aspect, an embodiment of the present application provides an optical path calibration device, which is applied to a semiconductor optical detection device. The semiconductor optical detection device includes: a light source, a photodetector, and at least one optical device between the light source and the photodetector. The device includes:
[0026] An acquisition module, configured to acquire the light intensities of multiple points on the photodetector;
[0027] A determination module, configured to determine the deviation degree of the optical path according to the light intensities of the multiple points; the optical path is the path of light propagation;
[0028] An adjustment module, configured to control the position adjustment of the optical device affecting the optical path according to the deviation degree of the optical path.
[0029] In a third aspect, an embodiment of the present application provides a computing device, which includes: a storage component, a communication bus, and a processing component, where:
[0030] The storage component is used to store the optical path calibration method program;
[0031] The communication bus is used to implement the connection communication between the storage component and the processing component;
[0032] The processing component is configured to execute an optical path calibration method program to implement the steps of any one of the methods described above.
[0033] In a fourth aspect, an embodiment of the present application provides a semiconductor optical detection device, including:
[0034] A controller, which is the optical path calibration device described above;
[0035] A light source, configured to emit light with preset physical characteristics;
[0036] An optical device, configured to change the direction, energy, or number of light beams of the light to meet the detection requirements;
[0037] A light detector, configured to receive the light changed by the optical device to determine the deviation degree of the optical path.
[0038] In a fifth aspect, an embodiment of the present application provides a computer-readable storage medium, on which an executable program is stored. When the executable program is executed by a processor, the steps of any one of the methods described above are implemented.
[0039] The optical path calibration method, device, equipment, and storage medium provided by the embodiments of the present application. The method includes: obtaining the light intensities at multiple points on a light detector; determining the deviation degree of the optical path according to the light intensities at the multiple points; the optical path is the path of light propagation; controlling an optical device affecting the optical path to adjust its position according to the deviation degree of the optical path. It can be seen that the optical path calibration method, device, equipment, and storage medium of the embodiments of the present application can solve the optical path deviation of semiconductor optical devices after a long time of use by adding a light detector, determining the deviation degree of the optical path according to the light intensities at multiple points on the light detector, and then controlling the optical device to adjust its position according to the deviation degree. Therefore, the optical path calibration method, device, equipment, and storage medium of the embodiments of the present application can solve the optical path deviation of semiconductor optical devices after a long time of use.
[0040] Additional aspects and advantages of the present application will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present application. Description of the Drawings
[0041] The drawings described herein are used to provide a further understanding of the present application, and constitute a part of the present application. The schematic embodiments and descriptions thereof of the present application are used to explain the present application, and do not constitute an improper limitation to the present application. In the drawings:
[0042] Figure 1 It is a schematic flowchart of the optical path calibration method provided by Embodiment 1 of the present application;
[0043] Figure 2 This is a schematic structural diagram of the optical path calibration device provided in the second embodiment of the present application;
[0044] Figure 3 This is a schematic structural diagram of the computing device provided in the third embodiment of the present application;
[0045] Figure 4 This is a schematic structural diagram of the semiconductor optical detection device provided in the fifth embodiment of the present application.
[0046] Explanation of reference numerals:
[0047] 300, optical path calibration device; 301, acquisition module; 302, determination module; 303, adjustment module; 500, computing device; 501, storage component; 502, communication bus; 503, processing component; 504, input device; 505, output device; 506, external communication interface; 80, semiconductor optical detection device; 81, controller; 82, light source; 831, reflecting mirror; 832, scanning mirror; 833, deflecting mirror; 834, parabolic reflecting mirror; 84, detection workbench; 841, manipulator; 842, workbench surface; 85, photodetector; 86, light collector; 90, workpiece to be detected. Detailed implementation manners
[0048] Hereinafter, the exemplary embodiments disclosed in the present application will be described in more detail with reference to the drawings. Although the exemplary embodiments of the present application are shown in the drawings, it should be understood that the present application can be implemented in various forms and should not be limited by the specific embodiments set forth herein. On the contrary, these embodiments are provided so that the present application can be more thoroughly understood and the scope of the present application can be fully communicated to those skilled in the art.
[0049] In the following description, a large number of specific details are given to provide a more thorough understanding of the present application. However, it is obvious to those skilled in the art that the present application can be implemented without one or more of these details. In other examples, in order to avoid confusion with the present application, some well-known technical features are not described; that is, not all features of the actual embodiments are described here, and the well-known functions and structures are not described in detail.
[0050] In order to thoroughly understand the present application, detailed steps and detailed structures will be presented in the following description to explain the technical solution of the present application. The preferred embodiments of the present application are described in detail below. However, in addition to these detailed descriptions, the present application can also have other embodiments.
[0051] In the research and development of the present application, the inventors found that ordinary users will only search for optical path problems in reverse when there are obvious deviations in the measurement results of semiconductor optical detection equipment. To determine that there is a problem with the optical path and restore the optical path, it is necessary for engineers familiar with the equipment to manually debug on-site. This situation causes delays in production and R & D tasks on the one hand, and reduces the utilization rate of semiconductor equipment and increases the operation and maintenance costs on the other hand.
[0052] Therefore, through further research and development by the inventors, the following technical solutions are proposed.
[0053] Embodiment 1
[0054] The embodiment of the present application provides an optical path calibration method. The method can be implemented by a computer, and the computer can be a computing device configured with a processor. The processor can be a general-purpose processor, a digital signal processor (DSP), a field programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc.
[0055] The method is applied to a semiconductor optical detection device, and the semiconductor optical detection device includes: a controller, a light source, a light detector, and at least one optical device between the light source and the light detector.
[0056] Reference Figure 1 , the method includes:
[0057] Step 101: Obtain the light intensities at multiple points on the light detector;
[0058] Step 102: Determine the deviation degree of the optical path according to the light intensities at the multiple points; the optical path is the path of light propagation;
[0059] Step 103: Control the optical device affecting the optical path to adjust its position according to the deviation degree of the optical path.
[0060] A semiconductor optical detection device can be a device for detecting semiconductor products by light. For example, by emitting light, irradiating it onto a semiconductor product, the product generates reflection or transmission, collecting the reflected or transmitted light, and analyzing it, the relevant physical properties of the semiconductor product can be obtained, thereby achieving the detection purpose.
[0061] The controller in the semiconductor optical detection device can be the computer that executes the method described above. The light source can be a laser generator. The light detector can be a photoelectric sensor.
[0062] In step 101, the photodetector is added to calibrate the optical path deviation. The photodetector can be provided with a light-receiving surface for receiving light, and the area should be as large as possible. Of course, limited by the computational workload and cost, it cannot be the same as the semiconductor product to be detected. However, the photodetector is much more sensitive to receiving light than the workpiece to be detected. Also, since multiple beams of light are required to detect semiconductor products in order to perform a more comprehensive detection in one test. Therefore, multiple points for receiving light are preset on the light-receiving surface of the photodetector to obtain as many light beams as possible and more accurately judge the degree of optical path deviation. Light intensity is short for Luminous intensity.
[0063] In step 102, the degree of optical path deviation includes having deviation and no deviation. Having deviation can be the deviation of the optical path, the deviation of the light intensity during the propagation process, or the deviation of the light intensity distribution. Dividing the degree of optical path deviation into having deviation and no deviation is easier to implement in practice.
[0064] Furthermore, having deviation can be further subdivided into severe deviation, medium deviation, and minor deviation. This is beneficial for the staff to confirm whether it is necessary to trace back the previously measured products.
[0065] In step 103, the position of the optical device in the optical path can be adjusted. The adjustment can be made in the opposite direction according to the deviation of the optical path. For example, if the optical path is skewed to the left, it is adjusted to the right. The adjustment is based on the change of the optical path, and the change of the position of the optical device is used as a reference for adjustment. The adjustment of the optical device is controlled by a computer, that is, a controller. That is, the controller issues an instruction that can correct the degree of optical path deviation according to the degree of optical path deviation. Specifically, the optical device can be provided with mechanical moving parts, such as an electric motor, that can automatically adjust the position of the optical device according to the instruction of the controller.
[0066] Specifically, for accurate and reliable adjustment, the optical device is provided with at least four adjusting feet. Each adjusting foot can be adjusted independently and is provided with a pressure sensor. The controller can adjust the height of one or more adjusting feet according to the situation to adjust the position of the optical device. The pressure sensor of each adjusting foot can be used as a reference for the position change of the optical device.
[0067] The optical path calibration method, device, equipment, and storage medium of the embodiments of the present application add a photodetector, determine the degree of optical path deviation according to the light intensity at multiple points on the photodetector, and then control the optical device to adjust the position according to the degree of deviation. It can solve the optical path deviation of semiconductor optical equipment after a long time of use.
[0068] Furthermore, the above steps implemented by the controller can achieve one-key discovery of the deviation degree of the optical path. The operation is simple and the implementation cost is low. There is no need to search for optical path problems retrospectively only when there are obvious deviations in the measurement results of semiconductor optical detection equipment.
[0069] Furthermore, by setting mechanical moving parts on the optical device to automatically adjust the position of the optical device according to the instructions of the controller, one-key adjustment can be achieved to solve the deviation problem of the optical path. There is no need for engineers familiar with the equipment to manually debug on-site, which is efficient, convenient and low-cost.
[0070] In some embodiments, the obtaining the light intensity at multiple points on the photodetector includes:
[0071] Obtaining an optical signal through a photosensitive element;
[0072] Amplifying the obtained optical signal;
[0073] Converting the amplified optical signal into an electrical signal;
[0074] Determining the light intensity at multiple points on the photodetector according to the electrical signal.
[0075] Converting the optical signal into an electrical signal is beneficial to more accurately quantify the light intensity. Because electrical signals are easy to transmit and detect. Amplifying the optical signal is beneficial to the accuracy of the converted electrical signal. Because if there is a deviation in the optical path, the optical signals received at some points may be relatively weak.
[0076] In some embodiments, the obtaining the light intensity at multiple points on the photodetector includes:
[0077] Controlling the position adjustment of the photodetector so that multiple points on the photodetector can all obtain light with sufficient intensity.
[0078] The adjustment of the position includes both the adjustment of the distance from the light source and the adjustment of the angle with the light source. Of course, the adjusted positions need to be recorded to determine the deviation degree of the optical path. That is, if stronger light can be obtained after adjusting the angle, it indicates that there is already a deviation in the optical path.
[0079] In some embodiments, the determining the deviation degree of the optical path according to the light intensity at the multiple points includes:
[0080] Determining the deviation degree of the optical path according to the light intensity at a single point;
[0081] And / or, determining the deviation degree of the optical path according to the difference in the light intensity at different points;
[0082] And / or, determining the deviation degree of the optical path according to the distribution law of the light intensity at multiple points.
[0083] If the light intensity at a single point decreases over time, it can be determined that there is a deviation in the optical path. For example, a first threshold for the light intensity at a single point can be set. If the light intensity at any point is less than the first threshold, it can be confirmed that there is a deviation in the optical path. This confirmation method is simpler and faster to implement. To avoid errors, in practice, it can be confirmed when the light intensities at two points are both less than the first threshold.
[0084] Furthermore, if there are differences in the light intensities at different points, compared with the initial uniform divergence, it can also be confirmed that there is a deviation in the optical path. For example, a second threshold for the difference between the light intensities at different points can be set. If the difference between the light intensities at any two points is greater than the second threshold, it can be confirmed that there is a deviation in the optical path. The technical effects of this confirmation method are basically similar to those of the above implementation method. In implementation, the two points with differences need to be in different regions.
[0085] Furthermore, if the distribution of the light intensities at multiple points has a certain pattern, such as gradually decreasing from one side to the other, compared with the initial uniform divergence, it can also be confirmed that there is a deviation in the optical path. For example, two adjacent points at three different positions can be arbitrarily selected. The light intensities of the adjacent points at the three different positions all have differences, and the directions of the differences are the same. For example, if it is always stronger on the left than on the right, it can be confirmed that there is a deviation in the optical path. This confirmation method can reduce the confirmation errors caused by the accidental errors at a single point.
[0086] For any one of the above three situations, it can be confirmed that there is a deviation in the optical path. If two or three of them occur, it can be more reliably confirmed that there is a deviation in the optical path.
[0087] In some embodiments, controlling the position adjustment of the optical device affecting the optical path according to the deviation degree of the optical path includes:
[0088] Controlling the optical device to perform position adjustment gradually according to the preset priorities of multiple optical devices until the deviation degree of the optical path is reduced to a preset range.
[0089] Specifically, the optical devices of the semiconductor optical detection device may include a mirror, a scanning mirror, a steering mirror, and a parabolic mirror. The scanning mirror is located above the workpiece to be detected, and the mirror is located above the scanning mirror and is used to reflect the light of the light source to the scanning mirror. The steering mirror is used to receive the light passing through the workpiece to be detected and reflect it to the parabolic mirror. The parabolic mirror is used to receive the light reflected from the workpiece to be detected and the light reflected from the steering mirror. The detection device obtains the detection result of the workpiece to be detected by collecting the light passing through the workpiece to be detected and the light reflected from the workpiece to be detected.
[0090] In this embodiment, among the above-mentioned multiple optical devices, adjusting the position of the scanning mirror is the easiest way to correct the optical path deviation. Therefore, the scanning mirror has the highest priority. Therefore, first adjust the scanning mirror. If the optical path deviation has been corrected by adjusting the scanning mirror, there is no need to adjust other optical devices. Otherwise, continue to adjust another optical device according to the priority.
[0091] It should be noted that when adjusting another optical device, the previously adjusted optical device can be restored to its original position, which is beneficial to the adjustment of another optical device.
[0092] The preset range within which the deviation degree of the optical path is reduced to the preset range refers to the deviation range that has no impact on the detection result, which can be determined according to the type of workpiece to be detected and will not be elaborated here.
[0093] In some embodiments, the method further includes:
[0094] Obtaining the light intensities of multiple photodetectors at different positions;
[0095] Determining the deviation degree of the optical path according to the light intensities of the photodetectors at different positions.
[0096] It can be understood that by setting a photodetector at the original placement position of the workpiece to be detected, the deviation of the optical path can generally be confirmed. By setting photodetectors at multiple positions, for example, adding photodetectors between the mirror and the workpiece to be detected, and / or between the steering mirror and the workpiece to be detected, the deviation of the optical path can be confirmed more accurately and reliably.
[0097] Embodiment 2
[0098] The embodiment of the present application provides an optical path calibration device 300, which is applied to a semiconductor optical detection device. The semiconductor optical detection device includes: a controller, a light source, a photodetector, and at least one optical device between the light source and the photodetector. Refer to Figure 2 , the device includes:
[0099] An acquisition module 301, configured to acquire the light intensities of multiple points on the photodetector;
[0100] A determination module 302, configured to determine the deviation degree of the optical path according to the light intensities of the multiple points; the optical path is the path of light propagation;
[0101] An adjustment module 303, configured to control the optical device affecting the optical path to perform position adjustment according to the deviation degree of the optical path.
[0102] In some embodiments, the acquisition module 301 is specifically configured to:
[0103] Acquire an optical signal through a photosensitive element;
[0104] Amplify the acquired optical signal;
[0105] Convert the amplified optical signal into an electrical signal;
[0106] Determine the light intensity at multiple points on the photodetector according to the electrical signal.
[0107] Converting the optical signal into an electrical signal is beneficial for more accurately quantifying the light intensity. Because electrical signals are easy to transmit and detect. Amplifying the optical signal is beneficial for the converted electrical signal to be more accurate. Because if there is a deviation in the optical path, the optical signals received by some points may be relatively weak.
[0108] In some embodiments, the acquisition module 301 is further configured to:
[0109] Control the detector to adjust its position so that multiple points on the photodetector can all obtain light with sufficient intensity.
[0110] The adjustment of the position includes the adjustment of the distance from the light source and also includes the adjustment of the angle with the light source. Of course, the adjusted position needs to be recorded to determine the degree of deviation of the optical path. That is, if stronger light can be obtained after adjusting the angle, it indicates that there is already a deviation in the optical path.
[0111] In some embodiments, the determination module 302 is specifically configured to:
[0112] Determine the degree of deviation of the optical path according to the light intensity at a single point;
[0113] And / or, determine the degree of deviation of the optical path according to the difference in light intensity at different points;
[0114] And / or, determine the degree of deviation of the optical path according to the distribution law of the light intensity at multiple points.
[0115] If the light intensity at a single point decreases over time, it can be determined that there is a deviation in the optical path.
[0116] Furthermore, if there are differences in the light intensity at different points, compared with the initial uniform divergence, it can also be confirmed that there is a deviation in the optical path.
[0117] Furthermore, if the distribution of the light intensity at multiple points has a certain law, for example, gradually decreasing from one side to the other side, compared with the initial uniform divergence, it can also be confirmed that there is a deviation in the optical path.
[0118] For any one of the above three situations, it can be confirmed that there is a deviation in the optical path. If two or three of them occur, it can be more reliably confirmed that there is a deviation in the optical path.
[0119] In some embodiments, the adjustment module 303 is specifically configured to:
[0120] Gradually control the optical devices to adjust their positions according to the preset priorities of the multiple optical devices until the deviation degree of the optical path is reduced to a preset range.
[0121] Specifically, the optical devices of the semiconductor optical detection equipment may include a reflecting mirror, a scanning mirror, a steering mirror, and a parabolic mirror. The scanning mirror is located above the workpiece to be detected, and the reflecting mirror is located above the scanning mirror for reflecting the light of the light source to the scanning mirror. The steering mirror is used to receive the light transmitted through the workpiece to be detected and reflect it to the parabolic mirror. The parabolic mirror is used to receive the light reflected from the workpiece to be detected and the light reflected from the steering mirror. The detection equipment obtains the detection result of the workpiece to be detected by collecting the light transmitted through the workpiece to be detected and the light reflected from the workpiece to be detected.
[0122] In this embodiment, among the above-mentioned multiple optical devices, adjusting the position of the scanning mirror is the easiest to correct the deviation of the optical path. Therefore, the priority of the scanning mirror is the highest. Therefore, first adjust the scanning mirror. If the deviation of the optical path has been corrected by adjusting the scanning mirror, other optical devices do not need to be adjusted. Otherwise, continue to adjust another optical device according to the priority.
[0123] It should be noted that in the case of adjusting another optical device, the previously adjusted optical device can be restored to its original position, which is beneficial to the adjustment of another optical device.
[0124] The preset range in which the deviation degree of the optical path is reduced to the preset range refers to the deviation range that has no influence on the detection result, which can be determined according to the type of the workpiece to be detected and will not be elaborated here.
[0125] In some embodiments, the determining module 302 is further configured to:
[0126] Obtain the light intensities of multiple photodetectors at different positions;
[0127] Determine the deviation degree of the optical path according to the light intensities of the photodetectors at different positions.
[0128] It can be understood that by setting a photodetector at the original placement position of the workpiece to be detected, the deviation of the optical path can generally be confirmed. By setting photodetectors at multiple positions, such as adding photodetectors between the reflecting mirror and the workpiece to be detected, and / or between the steering mirror and the workpiece to be detected, the deviation of the optical path can be confirmed more accurately and reliably.
[0129] Each module included in this embodiment can be implemented by a processor in a computer; of course, it can also be implemented by a logic circuit in the computer. The processor can be a general-purpose processor, a digital signal processor (DSP), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. Among them, the general-purpose processor can be a central processing unit (CPU), a microprocessor (MPU), or any other conventional processor.
[0130] The description of the above device embodiment is similar to the description of the above method embodiment and has similar beneficial effects to the method embodiment. For the technical details not disclosed in the device of this embodiment, please refer to the description of the method embodiment in this application for understanding.
[0131] Embodiment III
[0132] This application embodiment provides a computing device 500. Refer to Figure 3 , the computing device 500 includes: a storage component 501, a communication bus 502, and a processing component 503, where:
[0133] The storage component 501 is used to store the optical path calibration method program;
[0134] The communication bus 502 is used to implement the connection and communication between the storage component 501 and the processing component 503;
[0135] The processing component 503 is used to execute the optical path calibration method program to implement the steps of the method as described in Embodiment I.
[0136] For the type or structure of the storage component 501, reference can be made to the storage medium below and will not be elaborated here.
[0137] The processing component 503 can be a general-purpose processor, a digital signal processor (DSP), a field-programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, etc. Among them, the general-purpose processor can be a central processing unit (CPU), a microprocessor (MPU), or any other conventional processor.
[0138] In some embodiments, the computing device 500 may further include: an input device 504, an output device 505, and an external communication interface 506. These components are interconnected through a bus system and / or other forms of connection mechanisms (not shown in the figure). In this embodiment, the input device can be a network connector, an analog-to-digital converter, etc., and the output device can be a display, a speaker, etc.
[0139] In some embodiments, the input device 504 may further include, for example, a keyboard, a mouse, a microphone, and so on. The output device 505 may output various information to the outside. For example, in addition to the above-mentioned display and speaker, it may also be a printer, a projector, a communication network, and remote output devices connected thereto, and so on. The external communication interface 506 may be wired, such as a standard serial port (RS232), a General-Purpose Interface Bus (GPIB) interface, an Ethernet interface, a Universal Serial Bus (USB) interface, or wireless, such as wireless network communication technologies (WiFi), Bluetooth, etc.
[0140] The description of the above embodiments of the computing device is similar to the description of the above method embodiments and has similar beneficial effects to the method embodiments. For technical details not disclosed in the computing device of this embodiment, please refer to the description of the method embodiments in this application for understanding.
[0141] Embodiment 4
[0142] An embodiment of the present application provides a semiconductor optical detection device 80. Refer to Figure 4 , the semiconductor optical detection device 80 includes:
[0143] A controller 81, which is the optical path calibration device 300 described in Embodiment 2;
[0144] A light source 82 for emitting light with preset physical characteristics;
[0145] An optical device for changing the direction, energy, or number of light beams of the light to meet the detection requirements;
[0146] A light detector 85 for receiving the light changed by the optical device to determine the deviation degree of the optical path.
[0147] The controller 81 may be a computer. The computer may be a computing device configured with a processor, and the processor may be a general-purpose processor, a digital signal processor (DSP), a field programmable gate array (FPGA), or other programmable logic devices, discrete gate or transistor logic devices, discrete hardware components, and so on.
[0148] The light source 82 may be a laser generator.
[0149] Further, during calibration, the light source can be replaced with a pulsed laser, which is different from the continuous laser used for normal testing. By replacing it with a pulsed laser, the deviation degree of the optical path can be determined according to the time difference of receiving pulsed laser at each point. In this way, it is not necessary to measure the light intensity, and the confirmation is simpler.
[0150] Specifically, the optical device can be a transmitting mirror, a transmissive mirror, etc. In a specific embodiment, the optical device may include a reflecting mirror 831, a scanning mirror 832, a steering mirror 833, and a parabolic reflecting mirror 834. The scanning mirror 832 is located above the workpiece 90 to be detected, and the reflecting mirror 831 is located above the scanning mirror 832 for reflecting the light of the light source 82 to the scanning mirror 832. The steering mirror 833 is used to receive the light transmitted through the workpiece 90 to be detected and reflect it to the parabolic reflecting mirror 834. The parabolic reflecting mirror 834 is used to receive the light reflected from the workpiece 90 to be detected and the light reflected from the steering mirror 833. The detection device obtains the detection result of the workpiece 90 to be detected by collecting the light transmitted through the workpiece 90 to be detected and the light reflected from the workpiece 90 to be detected.
[0151] It should be noted that in actual use, the steering mirror 833 is located above the workpiece 90 to be detected, and the parabolic reflecting mirror 834 is located above the workpiece 90 to be detected and does not interfere with the scanning mirror 832. Figure 4 For the convenience of showing each device in the optical path more clearly, the steering mirror 833 and the parabolic reflecting mirror 834 that occupy a larger picture are offset from their actual positions and are not shown according to their actual positions.
[0152] Specifically, the detection device further includes a light collector 86 that collects the light transmitted through the workpiece 90 to be detected and the light reflected from the workpiece 90 to be detected. The light collector 86 is located below the parabolic reflecting mirror 834. For the convenience of description, the positional relationships of the various components described in this article are based on Figure 4 the positional relationships of the components therein. It can be understood that from different perspectives or different application scenarios, the positional relationships may change accordingly.
[0153] The adjustment of the optical device is controlled by the controller 81, that is, the controller 81 issues an instruction that can correct the deviation degree of the optical path according to the deviation degree of the optical path. Specifically, the optical device may be provided with mechanical moving components that can automatically adjust the position of the optical device according to the instruction of the controller 81, such as an electric motor, etc.
[0154] Specifically, for accurate and reliable adjustment, the optical device is provided with at least four adjusting feet, each of which can be adjusted independently and is provided with a pressure sensor. The controller 81 can adjust the height of one or more adjusting feet according to the situation to adjust the position of the optical device. The pressure sensor of each adjusting foot can be used as a reference for the position change of the optical device.
[0155] The light detector 85 can be an optoelectronic sensor. The light detector 85 is added to calibrate the optical path deviation. The light detector 85 can be provided with a light-receiving surface for receiving light, and the area should be as large as possible. Of course, limited by the computational workload and cost, the light-receiving surface cannot be the same as the semiconductor product to be detected. However, in terms of the sensitivity of receiving light, the light detector 85 is much higher than the workpiece 90 to be detected. Also, because multiple beams of light are required to detect semiconductor products in order to perform a more comprehensive detection in one detection. Therefore, multiple positions for receiving light are preset on the light-receiving surface of the light detector 85 to obtain as many light beams as possible and more accurately judge the degree of deviation of the optical path.
[0156] The light detector 85 can be arranged on the detection workbench 84 of the workpiece 90 to be detected so that the detection environment meets the actual use requirements. Specifically, the detection workbench 84 can include a manipulator 841 and a workbench surface 842 mounted on the manipulator 841. In this way, the position of the workpiece 90 to be detected can be adjusted by the movement of the manipulator 841. During calibration, the movement of the manipulator 841 can also adjust the position of the light detector 85 so that the light with the best received light intensity is received, which is beneficial to accurate calibration.
[0157] The description of the above embodiments of the semiconductor optical detection device is similar to the description of the above method embodiments and has similar beneficial effects to the method embodiments. For the technical details not disclosed in the semiconductor optical detection device of this embodiment, please refer to the description of the method embodiments in this application for understanding.
[0158] Embodiment Five
[0159] An embodiment of the present application provides a computer-readable storage medium, on which an executable program is stored. When the executable program is executed by a processor, the steps of the method described in Embodiment One are implemented.
[0160] Exemplarily, the computer-readable storage medium may adopt any combination of one or more readable media. The readable media may be a readable signal medium or a readable storage medium. A computer-readable storage medium is a tangible device that can hold and store instructions used by an instruction execution device. The readable storage medium may include, for example, but is not limited to, electrical, magnetic, optical, electromagnetic, infrared, or semiconductor systems, devices, or components, or any combination of the above. More specific examples (non-exhaustive list) of the readable storage medium include: portable computer disks, hard disks, random access memory (RAM), read-only memory (ROM), flash memory, portable compact disc read-only memory (CD-ROM), digital versatile disc (DVD), memory stick, floppy disk, mechanically encoded devices, such as punch cards or raised structures in grooves storing instructions thereon, and any suitable combination of the above. Among them:
[0161] The RAM includes: static random access memory (SRAM), synchronous static random access memory (SSRAM), dynamic random access memory (DRAM), synchronous dynamic random access memory (SDRAM), double data rate synchronous dynamic random access memory (DDR SDRAM), enhanced synchronous dynamic random access memory (ESDRAM), sync link dynamic random access memory (SLDRAM), direct rambus random access memory (DRRAM).
[0162] The ROM includes: Programmable Read-Only Memory (PROM), Erasable Programmable Read-Only Memory (EPROM), and Electrically Erasable Programmable Read-Only Memory (EEPROM).
[0163] The computer-readable storage medium used herein is not construed as being an instantaneous signal per se, such as a radio wave or other freely propagating electromagnetic wave, an electromagnetic wave propagating through a waveguide or other transmission medium (e.g., an optical pulse through an optical fiber cable), or an electrical signal transmitted through a wire.
[0164] The description of the computer-readable storage medium embodiments above is similar to the description of the method embodiments above and has similar beneficial effects to those of the method embodiments. For technical details not disclosed in the computer-readable storage medium embodiments of this example, please refer to the description of the method embodiments in this application for understanding.
[0165] It should be noted that the method, apparatus, computing device, semiconductor optical detection device, and storage medium embodiments provided in the embodiments of this application belong to the same concept; among the technical features in the technical solutions recorded in each embodiment, they can be combined arbitrarily without conflict.
[0166] It should be noted that in this text, the term "comprising", "including", or any other variant thereof is intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus comprising a series of elements includes not only those elements but also other elements not explicitly listed, or further elements inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising one..." does not exclude the existence of additional identical elements in the process, method, article, or apparatus comprising that element.
[0167] It should be understood that the above embodiments are all exemplary and do not cover all possible implementation manners included in the claims. Without departing from the scope of the present disclosure, various deformations and changes can be made based on the above embodiments. Similarly, the various technical features of the above embodiments can be combined arbitrarily to form additional embodiments of this application that may not be explicitly described. Therefore, the above embodiments only represent several implementation manners of this application and do not limit the protection scope of the patent of this application.
Claims
1. An optical path calibration method is applied to a semiconductor optical detection device. The semiconductor optical detection device includes: a controller, a light source, a photodetector, and at least one optical device between the light source and the photodetector, characterized in that, The method includes: Obtaining the light intensities at multiple points on a photodetector; Determining the deviation degree of the optical path according to the light intensities at the multiple points; the optical path is the path of light propagation; Controlling an optical device affecting the optical path to perform position adjustment according to the deviation degree of the optical path.
2. The optical path calibration method according to claim 1, wherein The obtaining the light intensities at multiple points on a photodetector includes: Obtaining an optical signal through a photosensitive element; Amplifying the obtained optical signal; Converting the amplified optical signal into an electrical signal; Determining the light intensities at multiple points on the photodetector according to the electrical signal.
3. The optical path calibration method according to claim 1, characterized in that The obtaining the light intensities at multiple points on a photodetector includes: Controlling the photodetector to perform position adjustment so that multiple points on the photodetector can all obtain light with sufficient intensity.
4. The optical path calibration method according to claim 1, characterized in that, The determining the deviation degree of the optical path according to the light intensities at the multiple points includes: Determining the deviation degree of the optical path according to the light intensity at a single point; And / or, determining the deviation degree of the optical path according to the difference in light intensities at different points; And / or, determining the deviation degree of the optical path according to the distribution law of the light intensities at multiple points.
5. The optical path calibration method according to claim 1, wherein The controlling an optical device affecting the optical path to perform position adjustment according to the deviation degree of the optical path includes: Controlling the optical device to perform position adjustment gradually according to the preset priorities of the multiple optical devices until the deviation degree of the optical path is reduced to a preset range.
6. The optical path calibration method according to any one of claims 1-5, characterized in that The method further includes: Obtaining the light intensities of multiple photodetectors at different positions; Determining the deviation degree of the optical path according to the light intensities of the photodetectors at different positions.
7. An optical path calibration device is applied to a semiconductor optical detection device. The semiconductor optical detection device includes: a light source, a light detector, and at least one optical device between the light source and the light detector, characterized in that, The device includes: An obtaining module, configured to obtain the light intensities at multiple points on a photodetector; A determining module, configured to determine the deviation degree of the optical path according to the light intensities at the multiple points; the optical path is the path of light propagation; An adjusting module, configured to control an optical device affecting the optical path to perform position adjustment according to the deviation degree of the optical path.
8. A computing device, characterized in that, The computing device includes a storage component, a communication bus, and a processing component, wherein: The storage component is configured to store an optical path calibration method program; The communication bus is configured to enable connection communication between the storage component and the processing component; The processing component is configured to execute the optical path calibration method program to implement the steps of the method as described in any one of claims 1 to 6.
9. A semiconductor optical detection device, characterized in that, It includes: A controller, which is the optical path calibration device as described in claim 7; A light source, configured to emit light with preset physical characteristics; An optical device, configured to change the direction, energy, or number of light beams of the light to meet the detection requirements; A photodetector, configured to receive the light changed by the optical device to determine the deviation degree of the optical path.
10. A computer-readable storage medium, characterized in that, An executable program is stored on the computer-readable storage medium, and when the executable program is executed by a processor, the steps of the method as described in any one of claims 1 to 6 are implemented.