A discharge detection device for radio frequency power supply production

Abstract

The present invention discloses a discharge detection device for radio frequency power supply production, including a positioning and conveying mechanism, wherein the positioning and conveying mechanism includes a detection platform, and a rectangular frame is fixedly installed on the top of the detection platform. The present invention relates to the field of discharge detection technology. The discharge detection device for radio frequency power supply production uses a positioning and conveying mechanism and a detection and storage mechanism in combination. The arrangement of these two mechanisms can utilize a cylinder to drive the lifting and lowering of a lifting plate to correct and limit the radio frequency power supply, and in this process can push the locking arc block to move back and forth, so that the detection line can be fixed after the subsequent connection is pulled out to avoid being entangled with the interface, and when the lifting plate rises, the resistance plate can also be unlocked, so that the rotating drum can use the elastic force of the second spring to drive the detection line to retract, and the detection instrument can be started and stopped at any time, which not only ensures the cleanliness of the detection environment, but also reduces energy consumption.

Description

Technical Field

[0001] The present invention relates to the technical field of discharge detection, in particular to a discharge detection device for radio frequency power supply production. Background Art

[0002] RF power supply is a power supply that can generate a fixed-frequency sinusoidal voltage with a frequency within the RF range and a certain power. RF power supply has been widely used in semiconductor process equipment; LED and solar photovoltaic industries, plasma generation in scientific experiments, RF induction heating, medical cosmetology, atmospheric pressure plasma disinfection and cleaning, etc.

[0003] Existing RF power supplies are classified as precision instruments, and the environment and field in which they are used are very important. Therefore, after the RF power supply is completed in the factory, a separate testing process needs to be designed, and inspectors need to check its discharge status. Although there are testing equipment on the market that can effectively detect the discharge of RF power supplies, there are still obvious defects when used in the factory, such as:

[0004] Current discharge testing of RF power supplies is more than just a simple test procedure. Tests also require testing of input or output return loss, output power stability, spectrum analysis, impedance matching dynamic performance, and power tube health. Each of these tests requires different instruments to be connected to the RF power supply. Consequently, a single test station is often surrounded by several instruments and numerous RF cables, creating a cluttered testing environment. Furthermore, because the RF power supply interface is not on the same side as the display, observing data on the display on the reverse side during testing is difficult due to the constraints of the RF cables.

[0005] Therefore, a discharge detection device for RF power supply production is now designed to improve detection efficiency and quality to solve such defects. Summary of the Invention

[0006] In view of the shortcomings of the existing technology, the present invention provides a discharge detection device for radio frequency power supply production, which solves the problem of the existing radio frequency power supply discharge detection, such as the large variety of instruments, the chaotic working environment, and the reduced detection efficiency and quality.

[0007] To achieve the above objectives, the present invention is implemented through the following technical solutions: A discharge detection device for radio frequency power supply production, comprising a positioning and conveying mechanism and a detection and storage mechanism, the positioning and conveying mechanism comprising a detection table, a rectangular frame is fixedly installed on the top of the detection table, a storage bottom groove is provided on the top of the detection table and on the inner side of the rectangular frame, an inclined guide plate is fixedly installed on the edge side of the top of the rectangular frame, and four inclined guide plates are provided, telescopic slots are provided on both sides, front and rear of the rectangular frame, rebound guide rods are fixedly installed on the surface of the rectangular frame and on both sides of the telescopic slot, a conical clamp seat is slidably installed between the surfaces of the two rebound guide rods, and the conical clamp seat is located on the inner side of the telescopic slot, and the surface of the rebound guide rod is sleeved with a first spring.

[0008] Preferably, a cylinder is fixedly installed on the bottom of the testing table through a bracket, the top of the cylinder passes through the testing table and extends to the inner side of the storage bottom trough, and one end of the cylinder extending to the inside of the storage bottom trough is fixedly installed with a lifting plate used in conjunction with the storage bottom trough through a fixing block.

[0009] Preferably, a curved frame is fixedly installed on the upper part of the cylinder surface, and lifting vertical rods are fixedly connected to both sides of the top of the curved frame, and the top of the lifting vertical rod passes through the detection platform and extends to the top of the detection platform. A load-bearing platform is fixedly installed on both sides of the top of the detection platform through a bracket, and a rotating groove is provided on the top of the load-bearing platform. One end of the lifting vertical rod extending to the top of the detection platform is fixedly connected to a concave support frame through a fixed plate, and the inner side of the concave support frame is rotatably connected to a rotating wheel used in conjunction with the rotating groove through a bearing member.

[0010] Preferably, a transverse frame is fixedly installed on the rear of the bending frame through a bracket, and the transverse frame is located on the top of the testing platform. The top of the transverse frame is fixedly connected with a curved pressure plate, and several curved pressure plates are arranged transversely.

[0011] Preferably, a U-shaped bracket is fixedly installed on the rear part of the detection table through a fixing plate, the surface of the U-shaped bracket is fixedly connected to a first frame through the bracket, and the first frame is parallel to and opposite to the rectangular frame, and the upper part of the surface of the U-shaped bracket is fixedly connected to a second frame used in conjunction with the first frame through the bracket.

[0012] Preferably, the detection storage mechanism includes an equipment top frame, which is fixedly installed on the top of the detection platform through a bracket, and a limit plate frame is fixedly installed between the two sides of the inner cavity of the equipment top frame. A detection instrument is installed on the inner side of the limit plate frame, and several detection instruments are provided. The bottom of the inner cavity of the equipment top frame is provided with a threading circular hole that passes through the bottom, and the number of the threading circular holes is the same as that of the detection instruments.

[0013] Preferably, the bottom of the inner cavity of the top frame of the device is fixedly connected to an oblique guide rod through a fixed block, and several groups of two oblique guide rods are provided in a group, and a sliding sleeve block is slidably installed on the surface of the oblique guide rods in the same group, and a circular rotating cylinder is rotatably connected between the two sliding sleeve blocks through a bearing member, and a second spring is sleeved on the surface of the oblique guide rod, and a detection line is provided at the rear of the detection instrument, one end of the detection line passes through the threading circular hole and extends to the bottom of the top frame of the device, and the detection line fits the surface of the circular rotating cylinder.

[0014] Preferably, a resistance plate is fixedly connected between the rear parts of the two sliding sleeve blocks in the same group, a button for use with a detection instrument is fixedly installed on the rear part of the inner cavity of the top frame of the equipment through a fixed plate, and a wire cross bar is fixedly connected between the two sides of the inner cavity of the top frame of the equipment, and the wire cross bar is in contact with the detection line.

[0015] Preferably, a U-shaped slide rod is slidably installed on the rear part of the inner cavity of the top frame of the device through an opening, and the number of the U-shaped slide rods is the same as that of the detection instrument. The rear end of the U-shaped slide rod is fixedly connected to a U-shaped bracket used in conjunction with the arc pressure plate, and a locking arc block used in conjunction with the resistance plate is slidably installed on the surface of the U-shaped slide rod and located on the inner side of the top frame of the device. A third spring is sleeved on the surface of the U-shaped slide rod and located between the locking arc block and the inner wall of the top frame of the device.

[0016] The present invention provides a discharge detection device for radio frequency power supply production. Compared with existing technologies, it has the following advantages:

[0017] (1) The discharge detection equipment for the production of radio frequency power supplies uses a positioning and conveying mechanism and a detection and storage mechanism in combination. The arrangement of these two mechanisms can use the cylinder to drive the lifting plate to rise and fall, correct and limit the radio frequency power supply, and in this process can push the locking arc block to move back and forth, so that the detection line can be fixed after it is pulled out and connected, avoiding entanglement with the interface, and when the lifting plate rises, the resistance plate can be unlocked, so that the rotating drum can use the elastic force of the second spring to drive the detection line to retract, and the detection instrument can be started and stopped at any time, which not only ensures the cleanliness of the detection environment, but also reduces energy consumption.

[0018] (2) The discharge detection equipment for radio frequency power supply production has several detection instruments installed inside the top frame of the equipment, and is used in conjunction with a rotating cylinder, a stop plate, a locking arc block and an arc pressure plate. The arrangement of these structures can allow the locking arc block to move forward and reset when the cylinder drives the lifting plate to descend, so that after the detection line is pulled to the bottom, it can be limited by the interference between the stop plate and the locking arc block to avoid the detection line from being entangled. At the same time, the stop plate will also press the button to start and stop the detection instrument, effectively reducing the energy consumption of the equipment. After the detection is completed, the rise of the cylinder can allow the arc pressure plate to squeeze the U-shaped bracket to drive the locking arc block to retract and no longer block the stop plate, so that the detection line can be retracted to the inside of the top frame of the equipment using the second spring, effectively ensuring the cleanliness of the workstation and facilitating the staff to carry out classification observation, thereby improving the quality of the detection.

[0019] (3) The discharge detection equipment for the production of RF power supplies is installed with an inclined guide plate and a conical clamp seat on the top and surface of the rectangular frame respectively, and is used in conjunction with a load-bearing platform and a rotating wheel. The arrangement of these structures can first use the inclined guide plate to correct the position of the RF power supply, and then lift the flat plate to squeeze the conical clamp seat to retract without blocking the descent of the equipment. After the RF power supply is lowered to the bottom, the four conical clamp seats can clamp and fix the RF power supply using the first spring. At the same time, the combination of the rotating wheel and the load-bearing platform can facilitate the staff to disassemble and load the RF power supply, effectively reducing the workload.

[0020] (4) The discharge detection equipment for the production of radio frequency power supply has a U-shaped bracket installed at the rear of the detection table, and a first mirror frame and a second mirror frame installed on the surface of the U-shaped bracket. The arrangement of these structures can utilize the facing position of the first mirror frame and the radio frequency power supply to refract the image in a positive direction to the second mirror frame, thereby ensuring that the staff can directly observe the display screen data of the radio frequency power supply from the front when conducting the test, without having to manually flip the radio frequency power supply, thereby improving the convenience during the test. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 It is a structural schematic diagram of the present invention;

[0022] Figure 2 A bottom view of the positioning and conveying mechanism and the detection and storage mechanism structure of the present invention;

[0023] Figure 3 A schematic diagram of the positioning and conveying mechanism structure of the present invention;

[0024] Figure 4 Schematic diagram of the testing platform, storage bottom tank and U-shaped bracket structure of the present invention;

[0025] Figure 5 It is a schematic diagram of the rotating groove, concave supporting frame and rotating wheel structure of the present invention;

[0026] Figure 6 A schematic diagram of the lifting plate, transverse frame and curved pressure plate structure of the present invention;

[0027] Figure 7 A schematic diagram of the structure of the inclined guide plate, telescopic notch and rebound guide rod of the present invention;

[0028] Figure 8 A schematic diagram of the detection and storage mechanism structure of the present invention;

[0029] Figure 9 Schematic diagram of the detection instrument, oblique guide rod and sliding sleeve block structure of the present invention;

[0030] Figure 10 A schematic diagram of the rotary drum, the detection line, and the second spring structure of the present invention;

[0031] Figure 11 It is a cross-sectional view of the top frame structure of the device of the present invention;

[0032] Figure 12 Schematic diagram of the U-shaped sliding rod, locking arc block and third spring structure of the present invention.

[0033] In the figure: 1. Positioning and conveying mechanism; 2. Detection and storage mechanism; 101. Detection platform; 102. Rectangular frame; 103. Storage bottom groove; 104. Inclined guide plate; 105. Telescopic notch; 106. Rebound guide rod; 107. Conical clamp seat; 108. First spring; 109. Cylinder; 110. Lifting plate; 111. Bending frame; 112. Lifting vertical rod; 113. Load-bearing platform; 114. Rotating groove; 115. Concave support frame; 116. Rotating wheel; 117. Horizontal frame; 118. Arc Surface pressure plate; 119, U-shaped bracket; 120, first mirror frame; 121, second mirror frame; 201, equipment top frame; 202, limit plate bracket; 203, detection instrument; 204, threading hole; 205, oblique guide rod; 206, sliding sleeve block; 207, rotating cylinder; 208, detection line; 209, second spring; 210, U-shaped bracket; 211, resistance plate; 212, button; 213, wire cross bar; 214, U-shaped slide bar; 215, locking arc block; 216, third spring. DETAILED DESCRIPTION

[0034] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0035] See also Figures 1-12 , the present invention provides a technical solution: a discharge detection device for radio frequency power supply production, comprising a positioning and conveying mechanism 1 and a detection and storage mechanism 2;

[0036] Please refer to Figure 3 、 Figure 4 、 Figure 5 、 Figure 6 and Figure 7 , showing the overall structure of the positioning and conveying mechanism 1, the positioning and conveying mechanism 1 includes a detection table 101, a rectangular frame 102 is fixedly installed on the top of the detection table 101, a storage bottom groove 103 is opened on the top of the detection table 101 and on the inner side of the rectangular frame 102, an inclined guide plate 104 is fixedly installed on the edge side of the top of the rectangular frame 102, and four inclined guide plates 104 are provided, telescopic slots 105 are opened on both sides, front and rear of the rectangular frame 102, and rebound guide rods 106 are fixedly installed on the surface of the rectangular frame 102 and on both sides of the telescopic slots 105. The two rebound guide rods A conical clamp seat 107 is slidably installed between the surfaces of 106, and the conical clamp seat 107 is located on the inner side of the telescopic slot 105. The surface of the rebound guide rod 106 is sleeved with a first spring 108. The bottom of the detection platform 101 is fixedly installed with a cylinder 109 through a bracket. The top of the cylinder 109 passes through the detection platform 101 and extends to the inner side of the storage bottom groove 103. The end of the cylinder 109 extending to the inside of the storage bottom groove 103 is fixedly installed with a lifting plate 110 used in conjunction with the storage bottom groove 103 through a fixed block. A bent frame 111 is fixedly installed on the upper part of the surface of the cylinder 109. Both sides are fixedly connected with lifting vertical rods 112, and the top of the lifting vertical rods 112 passes through the detection platform 101 and extends to the top of the detection platform 101. Both sides of the top of the detection platform 101 are fixedly installed with load-bearing platforms 113 through brackets. A rotating groove 114 is provided on the top of the load-bearing platform 113. The lifting vertical rod 112 extends to one end of the top of the detection platform 101 and is fixedly connected to a concave supporting frame 115 through a fixed plate. The inner side of the concave supporting frame 115 is rotatably connected to a rotating wheel 116 used in conjunction with the rotating groove 114 through a bearing. The rear part of the curved frame 111 is fixedly installed with a horizontal frame 117 through a bracket, and the horizontal frame 117 is fixedly installed with a horizontal frame 117. The vertical frame 117 is located at the top of the testing table 101, and the top of the horizontal frame 117 is fixedly connected to a curved pressure plate 118, and several curved pressure plates 118 are arranged horizontally. The rear part of the testing table 101 is fixedly installed with a U-shaped bracket 119 through a fixing plate, and the surface of the U-shaped bracket 119 is fixedly connected to the first mirror frame 120 through the bracket, and the first mirror frame 120 is parallel to the rectangular frame 102. The upper part of the surface of the U-shaped bracket 119 is fixedly connected to the second mirror frame 121 used in conjunction with the first mirror frame 120 through the bracket, and the angles of the first mirror frame 120 and the second mirror frame 121 are pre-adjusted during installation.

[0037] When in use, first start the cylinder 109 to lift the lifting plate 110 from the inner side of the storage bottom groove 103, and raise the lifting plate 110 to the top of the rectangular frame 102 and flush with the load-bearing platforms 113 on both sides. At the same time, the curved frame 111 will also follow the lifting plate 110 and use the lifting vertical rod 112 to push the concave support frame 115 up, so that the rotating wheel 116 passes through the rotating groove 114 and is at the top. Then, the RF power supply is placed on the top of the load-bearing platform 113 on the left, and then the RF power supply is pushed to move to the top of the lifting plate 110. After the movement is completed, start the cylinder 109 to drive the lifting plate 110 and the RF power supply to move. The power supply descends. As the lifting plate 110 descends, the four inclined guide plates 104 will first squeeze the RF power supply to make it correct, and then the lifting plate 110 will squeeze the conical clamp seat 107 downward, so that the four conical clamp seats 107 are pulled out from the inside of the rectangular frame 102 under the limiting effect of the rebound guide rod 106. When the lifting plate 110 completely enters the storage bottom groove 103 and the RF power supply enters the inside of the rectangular frame 102, the four conical clamp seats 107 are no longer squeezed by the lifting plate 110 and the RF power supply is clamped and fixed by the elastic force of the first spring 108. At this time, the interface of the RF power supply faces forward and With the display screen facing backward, the detection line 208 at the bottom of the top frame 201 of the device is manually pulled. When the detection line 208 is pulled, the guide of the wire cross bar 213 is used to press the rotary cylinder 207 and the sliding sleeve block 206 to slide obliquely downward along the oblique guide rod 205. During the sliding process, the resistance plate 211 will first press the button 212 to start the corresponding detection instrument 203. After the detection line 208 is completely pulled to the bottom, the resistance plate 211 will squeeze the locking arc block 215 to retract backward, and make the resistance plate 211 located at the bottom of the locking arc block 215. At this time, the connector at the bottom of the detection line 208 is connected to the shooting During this process, the resistance plate 211 is blocked by the bottom of the locking arc block 215, so the rotating drum 207 will not pull the detection line 208 to reset, so that the bottom end of the detection line 208 will not be pulled after being connected to the RF power supply. During the detection process, the detection data of the detection instrument 203 is observed through the observation window on the surface of the equipment top frame 201. At the same time, since the first mirror frame 120 is facing the display screen of the RF power supply and then reflects the image on the display screen to the second mirror frame 121, the data of the RF power supply can be directly observed through the second mirror frame 121 during detection.

[0038] Please refer to Figure 8 、 Figure 9 、 Figure 10 、 Figure 11 and Figure 12, showing the overall structure of the detection and storage mechanism 2, the detection and storage mechanism 2 includes a device top frame 201, the surface of the device top frame 201 is provided with a glass window for observing data, the device top frame 201 is fixedly installed on the top of the detection platform 101 through a bracket, and a limit plate frame 202 is fixedly installed between the two sides of the inner cavity of the device top frame 201, and a detection instrument 203 is installed on the inner side of the limit plate frame 202. The detection instrument 203 is an oscilloscope, spectrum analyzer, impedance analyzer and vector network analyzer used in the discharge detection of the radio frequency power supply, and the detection instrument 2 03 is provided with several, the bottom of the inner cavity of the top frame 201 of the equipment is provided with a threading round hole 204 that passes through to the bottom, and the number of the threading round holes 204 is the same as that of the detection instrument 203, the bottom of the inner cavity of the top frame 201 of the equipment is fixedly connected with an oblique guide rod 205 through a fixed block, and the oblique guide rods 205 are set in a group of two and several groups are provided, and the surface of the oblique guide rods 205 of the same group is slidably installed with a sliding sleeve block 206, and the two sliding sleeve blocks 206 are rotatably connected with a rotating cylinder 207 through a bearing member, and the surface of the oblique guide rod 205 is sleeved with a second spring 209, A detection line 208 is provided at the rear of the instrument 203. One end of the detection line 208 passes through the threading hole 204 and extends to the bottom of the device top frame 201, and the detection line 208 is in contact with the surface of the rotating cylinder 207. A resistance plate 211 is fixedly connected between the rear parts of the two sliding sleeve blocks 206 in the same group. A button 212 for use with the detection instrument 203 is fixedly installed at the rear of the inner cavity of the device top frame 201 through a fixed plate. A wire cross bar 213 is fixedly connected between the two sides of the inner cavity of the device top frame 201, and the wire cross bar 213 is connected to the detection line 208. Contact, a U-shaped slide rod 214 is slidably installed on the rear part of the inner cavity of the equipment top frame 201 through an opening, and the number of U-shaped slide rods 214 is the same as that of the detection instrument 203, and the rear end of the U-shaped slide rod 214 is fixedly connected to a U-shaped bracket 210 used in conjunction with the arc pressure plate 118, and a locking arc block 215 used in conjunction with the resistance plate 211 is slidably installed on the surface of the U-shaped slide rod 214 and located on the inner side of the equipment top frame 201, and a third spring 216 is sleeved on the surface of the U-shaped slide rod 214 and located between the locking arc block 215 and the inner wall of the equipment top frame 201.

[0039] After the detection is completed, the plug at the bottom of the detection line 208 is separated from the RF power supply, and then the cylinder 109 is restarted to push the lifting plate 110 upward. When the lifting plate 110 rises this time, the RF power supply rises to the top of the rectangular frame 102, and at the same time, the concave support frame 115 pushes the rotary wheel 116 again to be located inside the rotating groove 114, and the cylinder 109 drives the horizontal frame 117 to rise, so that several arc pressure plates 118 are inserted into the inner side of the U-shaped plug-in frame 210 and squeeze it. After the U-shaped plug-in frame 210 is squeezed, the sliding of the U-shaped slide bar 214 is used to pull the locking arc block 215 backward as a whole. At this time, the backward movement of the locking arc block 215 is no longer blocked by the resistance plate 211, and then the sliding sleeve block 206 and the rotating cylinder 207 are moved backward. It rises upward under the elastic force of the second spring 209, and at the same time pulls the detection line 208 back to the inner side of the equipment top frame 201 for storage, and after the resistance plate 211 rises and recovers, the button 212 is pressed again to turn off the corresponding detection instrument 203, and then the RF power supply that has completed the test is pushed to the top of the load-bearing platform 113 on the right side by the rotating wheel 116. When the next RF power supply is pushed to the top of the lifting plate 110, the arc pressure plate 118 is separated from the U-shaped bracket 210 as the cylinder 109 descends. Then, after the U-shaped bracket 210 is no longer blocked, the entire locking arc block 215 and the U-shaped slide bar 214 move forward and reset under the elastic force of the third spring 216, which is convenient for fixing the detection line 208 during subsequent testing.

[0040] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

Claims

1. A discharge detection device for radio frequency power supply production, comprising a positioning and conveying mechanism (1) and a detection and storage mechanism (2), characterized in that: The positioning and conveying mechanism (1) includes a detection table (101), a rectangular frame (102) is fixedly installed on the top of the detection table (101), a storage bottom groove (103) is provided on the top of the detection table (101) and on the inner side of the rectangular frame (102), an inclined guide plate (104) is fixedly installed on the edge side of the top of the rectangular frame (102), and four inclined guide plates (104) are provided, telescopic slots (105) are provided on both sides and the front and rear of the rectangular frame (102), rebound guide rods (106) are fixedly installed on the surface of the rectangular frame (102) and on both sides of the telescopic slot (105), a conical clamp seat (107) is slidably installed between the surfaces of the two rebound guide rods (106), and the conical clamp seat (107) is located on the inner side of the telescopic slot (105), and the surface of the rebound guide rod (106) is sleeved with a first spring (108); The detection storage mechanism (2) includes a device top frame (201), the device top frame (201) is fixedly mounted on the top of the detection table (101) through a bracket, a limit plate frame (202) is fixedly mounted between two sides of the inner cavity of the device top frame (201), a detection instrument (203) is mounted on the inner side of the limit plate frame (202), and a plurality of detection instruments (203) are provided, and a threading circular hole (204) is opened at the bottom of the inner cavity of the device top frame (201) and passes through the bottom, and the number of the threading circular holes (204) is the same as the number of the detection instruments (203); A cylinder (109) is fixedly mounted on the bottom of the inspection platform (101) via a bracket, the top of the cylinder (109) passes through the inspection platform (101) and extends to the inner side of the storage bottom trough (103), and a lifting plate (110) used in conjunction with the storage bottom trough (103) is fixedly mounted on one end of the cylinder (109) extending into the interior of the storage bottom trough (103) via a fixing block; The bottom of the inner cavity of the device top frame (201) is fixedly connected to an oblique guide rod (205) through a fixed block, and a plurality of groups of oblique guide rods (205) are provided in a group of two. A sliding sleeve block (206) is slidably installed on the surface of the oblique guide rods (205) in the same group. A rotating cylinder (207) is rotatably connected between the two sliding sleeve blocks (206) through a bearing member. A second spring (209) is sleeved on the surface of the oblique guide rod (205). A detection line (208) is provided at the rear of the detection instrument (203). One end of the detection line (208) passes through the threading circular hole (204) and extends to the bottom of the device top frame (201), and the detection line (208) is in contact with the surface of the rotating cylinder (207).

2. The discharge detection device for radio frequency power supply production according to claim 1, characterized in that: A curved frame (111) is fixedly installed on the upper part of the surface of the cylinder (109), and a lifting vertical rod (112) is fixedly connected to both sides of the top of the curved frame (111), and the top of the lifting vertical rod (112) passes through the detection platform (101) and extends to the top of the detection platform (101). A load-bearing platform (113) is fixedly installed on both sides of the top of the detection platform (101) through a bracket, and a rotating groove (114) is opened on the top of the load-bearing platform (113). One end of the lifting vertical rod (112) extending to the top of the detection platform (101) is fixedly connected to a concave supporting frame (115) through a fixed plate, and the inner side of the concave supporting frame (115) is rotatably connected to a rotating wheel (116) used in conjunction with the rotating groove (114) through a bearing member.

3. The discharge detection device for radio frequency power supply production according to claim 2, characterized in that: A transverse frame (117) is fixedly mounted on the rear portion of the curved frame (111) via a bracket, and the transverse frame (117) is located on the top of the inspection platform (101). A curved pressure plate (118) is fixedly connected to the top of the transverse frame (117), and a plurality of curved pressure plates (118) are arranged transversely.

4. The discharge detection device for radio frequency power supply production according to claim 1, characterized in that: A U-shaped bracket (119) is fixedly mounted on the rear portion of the inspection platform (101) via a fixing plate, a first mirror frame (120) is fixedly connected to the surface of the U-shaped bracket (119) via the bracket, and the first mirror frame (120) is parallel to and opposite to the rectangular frame (102), and a second mirror frame (121) used in conjunction with the first mirror frame (120) is fixedly connected to the upper portion of the surface of the U-shaped bracket (119) via the bracket.

5. The discharge detection device for radio frequency power supply production according to claim 4, characterized in that: A resistance plate (211) is fixedly connected between the rear parts of the two sliding sleeve blocks (206) in the same group, and a button (212) used in conjunction with the detection instrument (203) is fixedly installed on the rear part of the inner cavity of the device top frame (201) through a fixed plate. A wire cross bar (213) is fixedly connected between the two sides of the inner cavity of the device top frame (201), and the wire cross bar (213) is in contact with the detection line (208).

6. The discharge detection device for radio frequency power supply production according to claim 5, characterized in that: A U-shaped slide bar (214) is slidably mounted on the rear portion of the inner cavity of the device top frame (201) through an opening, and the number of the U-shaped slide bars (214) is the same as that of the detection instrument (203). The rear end of the U-shaped slide bar (214) is fixedly connected to a U-shaped bracket (210) used in conjunction with the arc pressure plate (118). A locking arc block (215) used in conjunction with the resistance plate (211) is slidably mounted on the surface of the U-shaped slide bar (214) and located on the inner side of the device top frame (201). A third spring (216) is sleeved on the surface of the U-shaped slide bar (214) and located between the locking arc block (215) and the inner wall of the device top frame (201).

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