Method, device, electronic equipment and storage medium for determining length of molecular pump rotor spindle

Abstract

The application provides a method and device for determining the length of a main shaft of a molecular pump rotor, electronic equipment and a storage medium. The working speed of the molecular pump is a first speed. The method comprises the following steps: determining a first target nutation frequency based on the first speed; determining a first target length of the main shaft of the molecular pump rotor based on the first target nutation frequency and a first mapping relationship. The ratio of the first target nutation frequency to a first rotor fundamental frequency is less than or equal to 80%, and the first rotor fundamental frequency is determined based on the first speed. The application adjusts the length of the main shaft, suppresses the nutation frequency, and further reduces the vibration of the molecular pump caused by the nutation frequency, thereby improving the overall stability of the rotor.

Description

Technical Field

[0001] This invention relates to the field of vacuum molecular pump technology, and more specifically, to a method for determining the length of the rotor spindle of a molecular pump, a molecular pump, and related equipment. Background Technology

[0002] Molecular pumps offer advantages such as high pumping speed, small size, and clean operation, making them widely used in semiconductor manufacturing, industrial coatings, nuclear energy, and aerospace. However, the large displacement fluctuations and vibrations of molecular pumps have always been a bottleneck restricting their development. Taking magnetic levitation molecular pumps as an example, their compact structure and extremely small assembly gap between the stator and rotor mean that large radial displacement fluctuations generate severe vibrations. This not only affects the stability of the product's operation and shortens its service life, but can also potentially cause catastrophic damage to the pump. Summary of the Invention

[0003] In view of this, this application provides a method for determining the length of the rotor spindle of a molecular pump, a molecular pump, and related equipment, in order to solve the above-mentioned problems.

[0004] In a first aspect, this application provides a method for determining the length of the rotor spindle of a molecular pump, wherein the molecular pump operates at a first speed, comprising:

[0005] The first target nutation frequency of the molecular pump is determined based on the fundamental frequency of the first rotor.

[0006] Based on the first target nutation frequency and the first mapping relationship, the first target length of the molecular pump rotor spindle is determined;

[0007] Wherein, the ratio of the first target nutation frequency to the first rotor fundamental frequency is less than or equal to 80%, and the first rotor fundamental frequency is determined based on the first speed.

[0008] This application reduces the vibration of the molecular pump caused by the nutation frequency by adjusting the spindle length, thereby improving the overall stability of the rotor.

[0009] One possible approach is that the ratio of the first target nutation frequency to the first rotor fundamental frequency is equal to 80%.

[0010] One possible approach is that, in the step of determining the first target length of the molecular pump rotor spindle based on the first target nutation frequency and the first mapping relationship, the first mapping relationship is as follows:

[0011]

[0012] n—Ratio of rotational inertia;

[0013] p1—First value, first velocity;

[0014] l1—First target length of the molecular pump rotor spindle;

[0015] δ pn1 —First target nutation frequency;

[0016] C — constant.

[0017] One possible approach is that, when the molecular pump's operating speed changes from the first speed to the second speed, the method further includes:

[0018] Obtain the first nutation frequency and the current length of the molecular pump rotor shaft. The first nutation frequency is the nutation frequency corresponding to the current length of the molecular pump rotor shaft when the molecular pump operates at the first speed.

[0019] The second target length of the molecular pump rotor spindle is determined based on the first nutation frequency, the second mapping relationship, the first velocity and the second velocity, and the second target nutation frequency, and the current length of the molecular pump rotor spindle is adjusted based on the second target length of the molecular pump rotor spindle.

[0020] Wherein, the ratio of the second target nutation frequency to the second rotor fundamental frequency is less than or equal to 80%, and the second rotor fundamental frequency is determined based on the second speed.

[0021] One possible approach is that the second mapping relationship is as follows:

[0022]

[0023] p1—First velocity;

[0024] p2—Second velocity;

[0025] l2—Current length of the molecular pump rotor spindle;

[0026] l3—Second target length of the molecular pump rotor spindle;

[0027] δ pn2 —Chapter 1 Frequency;

[0028] δ pn3 —Second target nutation frequency;

[0029] C — constant.

[0030] One possible approach is to determine the constant C in the first and second mapping relationships as follows:

[0031] Obtain the preset parameters of the molecular pump, and obtain the second oscillation frequency based on the preset parameters of the molecular pump;

[0032] The constant C in the first and second mapping relationships is determined based on the second nutation frequency, the preset molecular pump length, and the third mapping relationship.

[0033] The preset molecular pump length is included in the preset parameters of the molecular pump.

[0034] One possible approach is that the third mapping relationship is as follows:

[0035] δ pn0 =(0.0023l0) 2 -1.8482l0 2 )+C;

[0036] l0—Preset molecular pump length;

[0037] δ pn0 —Chapter Two: Frequency of Movement;

[0038] C — constant.

[0039] Secondly, this application provides a device for determining the length of the rotor spindle of a molecular pump, wherein the molecular pump operates at a first speed, comprising:

[0040] First determining module: used to determine the first target nutation frequency of the molecular pump based on the fundamental frequency of the first rotor;

[0041] The second determining module is used to determine the first target length of the molecular pump rotor spindle based on the first target nutation frequency and the first mapping relationship.

[0042] Wherein, the ratio of the first target nutation frequency to the first rotor fundamental frequency is less than or equal to 80%, and the first rotor fundamental frequency is determined based on the first speed.

[0043] Thirdly, embodiments of this application provide an electronic device, including:

[0044] At least one processor; and

[0045] At least one memory communicatively connected to the processor, wherein:

[0046] The memory stores program instructions that can be executed by the processor, which can invoke the program instructions to perform the method as described in the first aspect.

[0047] Fourthly, this application provides a computer-readable storage medium that stores computer instructions that cause the computer to perform the method described in the first aspect.

[0048] Other features and advantages of the invention will be set forth in the description which follows, and will be apparent in part from the description, or may be learned by practicing the invention. The objects and other advantages of the invention are realized and obtained in accordance with the structures particularly pointed out in the description, claims and drawings.

[0049] To make the above-mentioned objects, features and advantages of the present invention more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0050] To more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of the present invention. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0051] Figure 1 The rotor structure of a molecular pump in the prior art is shown;

[0052] Figure 2 The structure of a quarter-mast molecular pump rotor provided in an embodiment of the present invention is shown;

[0053] Figure 3 A flowchart illustrating a method for determining the length of a molecular pump rotor spindle, provided in an embodiment of the present invention;

[0054] Figure 4 A simulation verification diagram illustrating the mapping relationship of the spindle length as an exemplary embodiment;

[0055] Figure 5 Flowchart of another method for determining the length of a molecular pump rotor spindle provided for embodiments of the invention;

[0056] Figure 6 Flowchart of another method for determining the length of a molecular pump rotor spindle provided in the embodiments of the invention;

[0057] Figure 7 A structural diagram of a device for determining the length of a molecular pump rotor spindle provided in an embodiment of the present invention;

[0058] Figure 8 This is a structural diagram of an electronic device provided in an embodiment of this application. Detailed Implementation

[0059] To make the objectives, technical solutions, and advantages of the embodiments of the present invention clearer, the technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of the present invention.

[0060] Molecular pumps offer advantages such as high pumping speed, small size, and clean operation, making them widely used in semiconductor manufacturing, industrial coatings, nuclear energy, and aerospace. However, the large displacement fluctuations and vibrations of molecular pumps have always been a bottleneck restricting their development. Taking magnetic levitation molecular pumps as an example, their compact structure and extremely small assembly gaps between the stator and rotor mean that when the radial displacement of the molecular pump fluctuates significantly, the resulting severe vibrations not only affect the stability of the product's operation and reduce its service life, but may also cause catastrophic damage.

[0061] To address the aforementioned problems, embodiments of this application provide a method, apparatus, electronic device, and storage medium for determining the length of a molecular pump rotor spindle, thereby resolving the aforementioned issues.

[0062] First, the molecular pump relating to clocks in this application will be described:

[0063] Reference Figure 1 The molecular pump includes a stator (not shown in the figure), a rotor 10, and a main shaft 20. The rotor 10 consists of high-speed rotating blades or a turbine structure, which guides gas molecules from the inlet to the outlet through momentum transfer, forming a directional airflow. The stator is paired with the rotor 10 and fixed inside the pump body, forming a channel for gas flow. The main shaft is a key component connecting the power system and the rotor, responsible for transmitting torque and supporting the high-speed rotation of the rotor.

[0064] Reference Figure 2 In the embodiments approved in this application, the length of the molecular pump rotor spindle can be understood as the overall length or effective length of the molecular pump rotor spindle, wherein the effective length is understood as the length of the portion of the spindle covered by the stator, see details below. Figure 2 L in the middle.

[0065] Secondly, the technical terms used in this application will be explained:

[0066] Rotor fundamental frequency: The fundamental frequency of a rotor usually refers to the frequency at which the rotor rotates, that is, the number of complete rotations the rotor completes per unit time. Specifically, it can be calculated as follows:

[0067]

[0068] p—Operating speed of the molecular pump;

[0069] f—the fundamental frequency of the rotor.

[0070] Nutting frequency: The frequency of periodic small oscillations of the axis of symmetry of a rotating body (such as a gyroscope or celestial body) when subjected to torque disturbance. The smaller the nutation frequency, the smaller the oscillation when subjected to torque disturbance, and the higher the rotor stability.

[0071] Moment of inertia ratio: used to characterize the matching relationship of the moment of inertia between the impeller and the drive system (such as the motor). Its value is affected by the impeller geometry, material density and mass distribution.

[0072] Next, the method for determining the length of the molecular pump rotor spindle provided in the embodiments of this application will be described:

[0073] Reference Figure 3 In the embodiments provided in this application, S101 is first executed: the first target nutation frequency of the molecular pump is determined based on the fundamental frequency of the first rotor.

[0074] In the embodiments provided in this application, the first target nutation frequency is the allowable range of nutation frequency corresponding to the molecular pump operating speed at the first speed (such as the rated speed). In other words, it means that when the molecular pump operating speed is the first speed, when the nutation frequency of the molecular pump meets the first target nutation frequency, the displacement fluctuation and vibration of the molecular pump are within the safe range.

[0075] In the embodiments provided in this application, when the ratio of the first target nutation frequency to the fundamental frequency of the first rotor is less than or equal to 80%, the displacement fluctuation and vibration of the molecular pump are within a safe range.

[0076] Meanwhile, the fundamental frequency of the first rotor is determined based on the first speed.

[0077] Specifically, the fundamental frequency of the first rotor can be determined in the following manner:

[0078]

[0079] p1—First velocity;

[0080] f1 — The fundamental frequency of the first rotor.

[0081] Once the first target nutation frequency is determined, execute S102: Based on the first target nutation frequency and the first mapping relationship, determine the first target length of the molecular pump rotor spindle.

[0082] In the embodiments provided in this application, the first target length of the molecular pump rotor spindle represents the target value of the length of the molecular pump rotor spindle when the molecular pump operates at a first speed.

[0083] Specifically, the first mapping relationship is as follows:

[0084]

[0085] n—Ratio of rotational inertia;

[0086] p1—First value, first velocity;

[0087] l1—First target length of the molecular pump rotor spindle;

[0088] δ pn1 —First target nutation frequency;

[0089] C — constant.

[0090] Using the above formula, given the moment of inertia ratio of the molecular pump, the first target length of the molecular pump rotor spindle can be determined.

[0091] To reduce the vibration caused by the nutation frequency, it is necessary to increase the length of the main shaft, which in turn increases the volume of the molecular pump. In order to reduce the vibration caused by the nutation frequency and at the same time reduce the impact of increasing the main shaft length on the overall volume of the molecular pump, in the embodiments provided in this application, the ratio of the first target nutation frequency to the fundamental frequency of the first rotor is preferably equal to 80%.

[0092] Therefore, this application reduces the vibration of the molecular pump caused by the nutation frequency by increasing the length of the main shaft, thereby improving the overall stability of the rotor.

[0093] To verify the validity of the above formula, a molecular pump was simulated and verified in the embodiments provided in this application. The parameters of the molecular pump are shown in the table below:

[0094] name numerical values <![CDATA[Rotor diameter Moment of inertia J d (kg·mm 2 )]]> 48344 <![CDATA[Rotor pole moment of inertia J p (kg·mm 2 )]]> 33544 Rated speed of molecular pump (r / min) 20000 Molecular pump rated power (kW) 1.5 ratio of rotational inertia 0.69 Radial magnetic bearing stiffness (N / mm) 800 Axial magnetic bearing stiffness (N / mm) 1200 Damping (N·s / mm) 0.1

[0095] Figure 4 One of the two curves in the figure represents the relationship between the nutation frequency and the change in principal axis length of a molecular pump under given parameters based on the finite element method. Specifically, the horizontal axis represents the change in principal axis length, and the vertical axis represents the change in nutation frequency. One curve in the figure is the simulation calculation curve, and the other curve is the curve generated by the analytical calculation using the above formula. The simulation results are in good agreement with the analytical results, and the average error between the two is less than 5Hz, thus verifying the correctness of the above formula.

[0096] Based on the aforementioned embodiments, when the molecular pump operating speed is changed from the first speed to the second speed (such as the modified rated speed), the second target length of the molecular pump rotor spindle is determined in the following manner:

[0097] S201: Obtain the first chapter's operating frequency and the current length of the molecular pump rotor spindle.

[0098] In the embodiments provided in this application, the first nutation frequency is the nutation frequency corresponding to the current length of the molecular pump rotor shaft when the molecular pump operates at the first speed. Specifically, it can be the nutation frequency when the molecular pump operates at the same speed. The second target nutation frequency specifically refers to the allowable range of nutation frequency when the molecular pump operates at the second speed. That is, when the molecular pump operates at the second speed, if the nutation frequency of the molecular pump meets the second target nutation frequency, the displacement fluctuation and vibration of the molecular pump are within a safe range.

[0099] In the embodiments provided in this application, the ratio of the second target nutation frequency to the fundamental frequency of the second rotor is less than or equal to 80%.

[0100] It should be noted that, in the embodiments provided in this application, the fundamental frequency of the second rotor represents the fundamental frequency of the molecular pump when the molecular pump operates at the second speed. Therefore, the fundamental frequency of the second rotor is determined based on the second speed.

[0101] Specifically, the fundamental frequency of the aforementioned second rotor can be calculated using the following formula:

[0102]

[0103] p2—Second velocity;

[0104] f2 — the fundamental frequency of the second rotor.

[0105] S202: Determine the second target length of the molecular pump rotor spindle based on the first nutation frequency, the second mapping relationship, the first velocity and the second velocity, and the second target nutation frequency, and adjust the current length of the molecular pump rotor spindle based on the second target length of the molecular pump rotor spindle.

[0106] In the embodiments provided in this application, the second mapping relationship is as follows:

[0107]

[0108] p1—First velocity;

[0109] p2—Second velocity;

[0110] l1—Current length of the molecular pump rotor spindle;

[0111] l2—Second target length of the molecular pump rotor spindle;

[0112] —Chapter 1 Frequency;

[0113] —Second target nutation frequency;

[0114] C — constant.

[0115] Using the above formula, when the operating speed of the molecular pump changes, the length of the molecular pump rotor spindle after the speed change is determined, thereby adjusting the current length of the molecular pump rotor spindle, suppressing the nutation frequency, reducing the vibration of the molecular pump caused by the nutation frequency, and improving the overall stability of the rotor.

[0116] Specifically, in some examples, the current length of the molecular pump rotor spindle corresponds to the aforementioned first target length of the molecular pump rotor spindle. In this case, the first nutation frequency is the first target nutation frequency.

[0117] In some examples, the current molecular pump rotor spindle length corresponds to the preset molecular pump length described later. In this case, the first chapter's operating frequency corresponds to the second chapter's operating frequency described later.

[0118] Reference Figure 6 In the embodiments provided in this application, as can be seen from the foregoing, there exists a constant C in the first and second mapping relationships. Specifically, the constant C in the aforementioned first and second mapping relationships can be determined in the following manner:

[0119] S301: Obtain the preset parameters of the molecular pump and obtain the second oscillation frequency based on the preset parameters of the molecular pump;

[0120] In the embodiments provided in this application, the preset parameters of the molecular pump include: preset molecular pump length, rotor diameter moment of inertia, rotor pole moment of inertia, preset molecular pump speed, molecular pump rated power, moment of inertia ratio, radial magnetic bearing stiffness, axial magnetic bearing stiffness, and damping.

[0121] It should be noted that, in the embodiments provided in this application, the preset parameters of the molecular pump can be the parameters of the molecular pump during design, or the parameters of the molecular pump under certain preset conditions.

[0122] S302: Determine the constant C in the first and second mapping relationships based on the second kinetic frequency, the preset molecular pump length, and the third mapping relationship.

[0123] As can be seen from the foregoing, the preset length of the molecular pump exists within the preset parameters of the molecular pump.

[0124] To determine the aforementioned constant C, the third mapping relationship is as follows:

[0125] δ pn0 =(0.0023l0) 2 -1.8482l0 2 )+C;

[0126] l0—Preset molecular pump length;

[0127] δ pn0 —Chapter Two: Frequency of Movement;

[0128] C — constant.

[0129] The constant C in the first and second mappings mentioned above is thus determined in the above manner.

[0130] In some scenarios, when designing a molecular pump, it is necessary to first obtain the preset parameters of the molecular pump. After obtaining the preset parameters of the molecular pump, the aforementioned second nutation frequency is obtained. If the ratio of the second nutation frequency to the fundamental frequency of the first rotor is greater than 80%, the aforementioned steps S101 to S102 are executed.

[0131] Based on the foregoing embodiments, this application provides a device for determining the length of the rotor spindle of a molecular pump, wherein the molecular pump operates at a first speed, including:

[0132] First determining module: used to determine the first target nutation frequency of the molecular pump based on the fundamental frequency of the first rotor;

[0133] The second determining module is used to determine the first target length of the molecular pump rotor spindle based on the first target nutation frequency and the first mapping relationship.

[0134] The ratio of the first target nutation frequency to the first rotor fundamental frequency is less than or equal to 80%, and the first rotor fundamental frequency is determined based on the first speed.

[0135] Unless otherwise specifically stated, the relative steps, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of the invention.

[0136] The device provided in this embodiment of the invention has the same implementation principle and technical effect as the aforementioned method embodiment. For the sake of brevity, any parts not mentioned in the device embodiment can be referred to the corresponding content in the aforementioned method embodiment.

[0137] Based on the foregoing embodiments, this application also provides a molecular pump, wherein the spindle length of the molecular pump is determined using the aforementioned method, and the molecular pump is applied in a vacuum environment.

[0138] In the embodiments provided in this application, the molecular pump is a magnetically levitated molecular pump or a mechanical molecular pump.

[0139] In all examples shown and described herein, any specific values ​​should be interpreted as merely exemplary and not as limitations; therefore, other examples of exemplary embodiments may have different values.

[0140] It should be noted that similar labels and letters in the following figures indicate similar items. Therefore, once an item is defined in one figure, it does not need to be further defined and explained in subsequent figures.

[0141] The flowcharts and block diagrams in the accompanying drawings illustrate the architecture, functionality, and operation of possible implementations of systems, methods, and computer program products according to various embodiments of the present invention. In this regard, each block in a flowchart or block diagram may represent a module, segment, or portion of code containing one or more executable instructions for implementing a specified logical function. It should also be noted that in some alternative implementations, the functions marked in the blocks may occur in a different order than those shown in the drawings. For example, two consecutive blocks may actually be executed substantially in parallel, and they may sometimes be executed in reverse order, depending on the functions involved. It should also be noted that each block in the block diagrams and / or flowcharts, and combinations of blocks in the block diagrams and / or flowcharts, can be implemented using a dedicated hardware-based system that performs the specified function or action, or using a combination of dedicated hardware and computer instructions.

[0142] Figure 8 A block diagram is shown that is suitable for implementing embodiments of the present invention. Figure 8 The electronic device shown is merely an example and should not impose any limitation on the functionality and scope of use of the embodiments of the present invention.

[0143] like Figure 8 As shown, the electronic device is represented in the form of a general-purpose computing device. The components of the electronic device may include, but are not limited to: one or more processors 410, a communication interface 420 and a memory 430, and a communication bus 440 connecting different system components (including the memory 430 and the processing unit 410).

[0144] Communication bus 440 represents one or more of several bus architectures, including a memory bus or memory controller, a peripheral bus, a graphics acceleration port, a processor, or a local bus using any of the various bus architectures. Examples of these architectures include, but are not limited to, Industry Standard Architecture (ISA) buses, Micro Channel Architecture (MAC) buses, Enhanced ISA buses, Video Electronics Standards Association (VESA) local buses, and Peripheral Component Interconnect (PCI) buses.

[0145] Electronic devices typically include a variety of computer-readable media. These media can be any available media that can be accessed by the electronic device, including volatile and non-volatile media, and removable and non-removable media.

[0146] Memory 430 may include computer system readable media in the form of volatile memory, such as random access memory (RAM) and / or cache memory. The electronic device may further include other removable / non-removable, volatile / non-volatile computer system storage media. Memory 430 may include at least one program product having a set (e.g., at least one) of program modules configured to perform the functions of various embodiments of the present invention.

[0147] A program / utility having a set (at least one) of program modules can be stored in memory 430. Such program modules include—but are not limited to—an operating system, one or more application programs, other program modules, and program data. Each or some combination of these examples may include an implementation of a network environment. The program modules typically perform the functions and / or methods described in the embodiments of this invention.

[0148] The processor 410 executes various functional applications and data processing by running programs stored in the memory 430, such as implementing the methods provided in the embodiments of the present invention.

[0149] This invention provides a non-transitory computer-readable storage medium that stores computer instructions, which cause a computer to execute the method provided in this invention.

[0150] The aforementioned computer-readable storage medium may be any combination of one or more computer-readable media. A computer-readable medium may be a computer-readable signal medium or a computer-readable storage medium. A computer-readable storage medium may be, for example,—but not limited to—an electrical, magnetic, optical, electromagnetic, infrared, or semiconductor system, apparatus, or device, or any combination thereof. More specific examples of computer-readable storage media (a non-exhaustive list) include: an electrical connection having one or more wires, a portable computer disk, a hard disk, random access memory (RAM), read-only memory (ROM), erasable programmable read-only memory (EPROM), or flash memory, optical fiber, portable compact disk read-only memory (CD-ROM), optical storage device, magnetic storage device, or any suitable combination thereof. In this document, a computer-readable storage medium may be any tangible medium containing or storing a program that may be used by or in connection with an instruction execution system, apparatus, or device.

[0151] Computer-readable signal media may include data signals propagated in baseband or as part of a carrier wave, carrying computer-readable program code. Such propagated data signals may take various forms, including—but not limited to—electromagnetic signals, optical signals, or any suitable combination thereof. Computer-readable signal media may also be any computer-readable medium other than computer-readable storage media, capable of transmitting, propagating, or transmitting programs for use by or in connection with an instruction execution system, apparatus, or device.

[0152] The program code contained on a computer-readable medium may be transmitted using any suitable medium, including—but not limited to—wireless, wire, optical fiber, RF, etc., or any suitable combination thereof.

[0153] Computer program code for performing the operations of embodiments of the present invention can be written in one or more programming languages ​​or a combination thereof, including object-oriented programming languages ​​such as Java, Smalltalk, and C++, and conventional procedural programming languages ​​such as C or similar languages. The program code can be executed entirely on the user's computer, partially on the user's computer, as a standalone software package, partially on the user's computer and partially on a remote computer, or entirely on a remote computer or server. In cases involving remote computers, the remote computer can be connected to the user's computer via any type of network—including a Local Area Network (LAN) or a Wide Area Network (WAN), or it can be connected to an external computer (e.g., via the Internet using an Internet service provider).

[0154] The foregoing has described specific embodiments of the present invention. Other embodiments are within the scope of the appended claims. In some cases, the actions or steps described in the claims may be performed in a different order than that shown in the embodiments and may still achieve the desired results. Furthermore, the processes depicted in the drawings do not necessarily require the specific or sequential order shown to achieve the desired results. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0155] In the description of the embodiments of the present invention, the terms "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., refer to specific features, structures, materials, or characteristics described in connection with that embodiment or example, which are included in at least one embodiment or example of the present invention. In the embodiments of the present invention, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. Furthermore, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in the embodiments of the present invention, as well as the features of the different embodiments or examples.

[0156] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of indicated technical features. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of embodiments of the present invention, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0157] Any process or method description in the flowchart or otherwise herein can be understood as representing a module, segment, or portion of code comprising one or more executable instructions for implementing custom logic functions or processes, and the scope of preferred embodiments of the invention includes additional implementations in which functions may be performed not in the order shown or discussed, including substantially simultaneously or in reverse order according to the functions involved, as should be understood by those skilled in the art to which embodiments of the invention pertain.

[0158] Depending on the context, the word "if" as used here can be interpreted as "when," "when," "in response to determination," or "in response to detection." Similarly, depending on the context, the phrase "if determination" or "if detection (of the stated condition or event)" can be interpreted as "when determination," "in response to determination," "when detection (of the stated condition or event)," or "in response to detection (of the stated condition or event)."

[0159] It should be noted that the terminals involved in the embodiments of the present invention may include, but are not limited to, personal computers (PCs), personal digital assistants (PDAs), wireless handheld devices, tablet computers, mobile phones, MP3 players, MP4 players, etc.

[0160] In the several embodiments provided in this invention, it should be understood that the disclosed systems, apparatuses, and methods can be implemented in other ways. For example, the apparatus embodiments described above are merely illustrative; for instance, the division of units is only a logical functional division, and in actual implementation, there may be other division methods. For example, multiple units or components may be combined or integrated into another system, or some features may be ignored or not executed. Furthermore, the displayed or discussed mutual couplings, direct couplings, or communication connections may be through some interfaces; indirect couplings or communication connections between devices or units may be electrical, mechanical, or other forms.

[0161] Furthermore, in the various embodiments of the present invention, the functional units can be integrated into one processing unit, or each unit can exist physically separately, or two or more units can be integrated into one unit. The integrated unit can be implemented in hardware or in the form of hardware plus software functional units.

[0162] The integrated units implemented as software functional units described above can be stored in a computer-readable storage medium. These software functional units, stored in a storage medium, include several instructions to cause a computer device (which may be a personal computer, server, or network device, etc.) or processor to execute some steps of the methods described in the various embodiments of this invention. The aforementioned storage medium includes various media capable of storing program code, such as USB flash drives, portable hard drives, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical disks.

[0163] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A method of determining the length of a main shaft of a molecular pump rotor, characterized by, The molecular pump operates at a first speed, comprising, determining a first target nutation frequency of the molecular pump based on the first rotor fundamental frequency; determining a first target length of a rotor spindle of the molecular pump based on the first target nutation frequency and a first mapping relationship; wherein a ratio of the first target nutation frequency to the first rotor fundamental frequency is less than or equal to 80%, and the first rotor fundamental frequency is determined based on the first speed; the first mapping relationship is as follows: ； — moment of inertia ratio; - a first value a first speed; — first target length of the main shaft of the molecular pump rotor — a first target nutation frequency; - constant; when the operating speed of the molecular pump is converted from the first speed to a second speed, the method further comprises: obtaining a first nutation frequency and a current length of the rotor spindle of the molecular pump, the first nutation frequency being a nutation frequency corresponding to the current length of the rotor spindle of the molecular pump when the molecular pump operates at the first speed; determining a second target length of the rotor spindle of the molecular pump based on the first nutation frequency, a second mapping relationship, the first speed, the second speed, and a second target nutation frequency, and adjusting the current length of the rotor spindle of the molecular pump based on the second target length of the rotor spindle of the molecular pump; wherein a ratio of the second target nutation frequency to a second rotor fundamental frequency is less than or equal to 80%, and the second rotor fundamental frequency is determined based on the second speed.

2. The method of claim 1, wherein, The ratio of the first target nutation frequency to the first rotor fundamental frequency is equal to 80%.

3. The method of claim 1, wherein, The second mapping relationship is as follows: ； - a first speed; — second speed; — Current molecular pump rotor spindle length; — molecular pump rotor main shaft second target length; - the first epicyclic frequency; - a second target nutation frequency; - Constant.

4. The method of claim 1, wherein, The constants in the first and second mapping relationships are determined in the following manner : obtaining a second nutation frequency based on a preset parameter of the molecular pump; determining a constant in the first and second mapping relationships based on the second nutation frequency, a preset molecular pump length, and a third mapping relationship , wherein the preset length of the molecular pump exists in the preset parameter of the molecular pump.

5. The method of claim 4, wherein, The third mapping relationship is as follows: ； - a preset molecular pump length; - second chapter frequency; - Constant.

6. An apparatus for determining the length of a main shaft of a molecular pump rotor, characterized by The device comprises a processor for executing the method as claimed in any one of claims 1-5, the molecular pump operating at a first speed, comprising: a first determining module for determining a first target nutation frequency of the molecular pump based on a first rotor fundamental frequency; a second determining module for determining a first target length of a rotor spindle of the molecular pump based on the first target nutation frequency and a first mapping relationship; wherein a ratio of the first target nutation frequency to the first rotor fundamental frequency is less than or equal to 80%, and the first rotor fundamental frequency is determined based on the first speed.

7. An electronic device, comprising: comprising: at least one processor; and at least one memory connected in communication with the processor, wherein: the memory stores program instructions executable by the processor, and the processor invoking the program instructions can execute the method as claimed in any one of claims 1-5.

8. A computer-readable storage medium, characterized in that, The computer readable storage medium stores computer instructions, and the computer instructions cause the computer to execute the method as claimed in any one of claims 1-5.

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