Self-adaptive air humidity adjusting device of etching machine and adjusting method of self-adaptive air humidity adjusting device

Abstract

The invention relates to the technical field of air humidity adjustment of etching machines, in particular to a self-adaptive air humidity adjusting device of an etching machine and an adjusting method of the self-adaptive air humidity adjusting device. Comprising an equipment body, an atomizing chamber is arranged in the equipment body, an atomizer is arranged at the end of the atomizing chamber, a sample inlet and a gas port are formed in the surface of the atomizer, a half gear is arranged at the end of the atomizer, a moving assembly is arranged below the atomizer, and clamping assemblies are arranged on the two sides of the moving assembly and used for automatically clamping the atomizer. The output end of the servo motor is controlled to drive the lead screw to rotate, the lead screw drives the sliding seat to move in the horizontal direction when rotating, the sliding seat drives the base to move when moving, and due to the fact that the clamping assemblies are arranged on the two sides of the base to limit the atomizer, the atomizer can be clamped by the clamping assemblies, the atomizer can be clamped by the clamping assemblies, and the atomizer can be clamped by the clamping assemblies. And when the base moves, the atomizer is driven to horizontally move to the end part of the atomizing chamber for adaptation, so that the mounting efficiency of the atomizing device is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of etching machine air humidity regulation, and more specifically, to an etching machine adaptive air humidity regulation device and its regulation method. Background Art

[0002] Etching machines are widely used in many fields such as electronics and mechanical manufacturing. During the etching process, air humidity has a significant impact on the etching effect. When the air humidity is too high, the etching solution is prone to absorb moisture, resulting in a decrease in its concentration, which in turn affects the etching rate and etching accuracy. There may be cases of insufficient etching or over-etching, reducing product quality. When the air humidity is too low, impurities such as dust generated during the etching process are not easily settled and are likely to adhere to the surface of the etched workpiece, affecting the flatness and smoothness of the etched surface. At the same time, it may also cause damage to electronic components inside the etching machine, shortening the service life of the equipment.

[0003] At present, the etching machines on the market cannot adjust the air humidity inside the etching machine, resulting in unstable etching quality and limited production efficiency. Moreover, during the installation and maintenance of the atomizer of the etching machine, it is rather troublesome to disassemble the adjustment device, affecting the air adjustment efficiency.

[0004] Therefore, an etching machine adaptive air humidity regulation device is proposed. Summary of the Invention

[0005] The purpose of the present invention is to provide an etching machine adaptive air humidity regulation device to solve the problems raised in the above background art.

[0006] To achieve the solution of the above technical problems, one of the purposes of the present invention is to provide an etching machine adaptive air humidity regulation device, including an equipment body. Inside the equipment body, there is an atomization chamber, and the atomization chamber is connected to the inside of the equipment body through a pipeline. At the end of the atomization chamber, there is an atomizer. On the surface of the atomizer, there are a sample inlet and an air inlet. At the end of the atomizer, there is a semi-gear. Below the atomizer, there is a moving component. On both sides of the moving component, there are clamping components. The clamping components are used to automatically clamp the atomizer, making the atomizer and the end of the atomization chamber at the same horizontal position. Below the semi-gear, there is a rotating component. When the atomizer is adapted to the atomization chamber, the rotating component drives the atomizer to rotate reciprocally to increase the range of the mist droplets during the atomization process.

[0007] As a further improvement of this technical solution, the moving component includes a servo motor arranged below the atomizer. The output end of the servo motor is provided with a lead screw, and a sliding seat is arranged on the surface of the lead screw. When the lead screw rotates, it drives the sliding seat arranged on its surface to move horizontally.

[0008] As a further improvement of the technical solution, a base is provided on the top of the sliding seat, and clamping components are provided on both sides of the surface of the base, and the clamping components are used for clamping and limiting the atomizer.

[0009] As a further improvement of the technical solution, the clamping components include cylinder barrels provided on both sides of the base. A sliding rod is slidably provided on the inner wall of the cylinder barrel, and a compression spring is provided between the cylinder barrel and the sliding rod.

[0010] As a further improvement of the technical solution, a clamping plate is provided at the end of the sliding rod. The clamping plate is arc-shaped and fits against the side wall of the atomizer.

[0011] As a further improvement of the technical solution, a sliding groove is opened at the bottom of the cylinder barrel, and a toothed block is provided at the end of the sliding rod. The toothed block slides on the inner wall of the sliding groove.

[0012] As a further improvement of the technical solution, a cylinder is provided below the cylinder barrel. A toothed plate is provided on the piston rod at the end of the cylinder. Control the piston rod at the end of the cylinder to drive the toothed plate to move upward in the vertical direction, so that the toothed plate limits the toothed block.

[0013] As a further improvement of the technical solution, the rotating component includes a rack provided below the half gear. When the rack slides on the surface of the base, it drives the half gear to mesh and rotate. A vibration component is provided between the rack and the base. The vibration component includes a double-headed elbow pipe provided on one side of the base. A pressing rod and a knocking rod are respectively provided at both ends of the double-headed elbow pipe. A liquid is contained inside the double-headed elbow pipe. The pressing rod is fixed on one side of the rack. An elastic member is provided between the pressing rod and the double-headed elbow pipe. Press the pressing rod to squeeze the water body inside the double-headed elbow pipe, so that the knocking rod reciprocates to strike the side wall of the atomizer.

[0014] As a further improvement of the technical solution, a rotating motor is provided on the side away from the vibration component. An eccentric wheel is provided at the end of the rotating motor. The eccentric wheel is in contact with the end of the rack. When the eccentric wheel rotates, it drives the rack to reciprocate horizontally.

[0015] The second object of the present invention is to provide a processing method for an etching machine adaptive air humidity adjustment device, including the etching machine adaptive air humidity adjustment device described in any one of the above, and including the following steps:

[0016] S1. Squeeze the clamping plate so that the sliding rod provided at its end slides on the inner wall of the cylinder barrel. At the same time, the compression spring is squeezed during the sliding process of the sliding rod, so that the opening between the clamping plates increases, facilitating the placement of the atomizer between the clamping plates. When the atomizer is placed, stop squeezing the clamping plate. At this time, the sliding rod drives the clamping plates to move relative to each other under the action of the compression spring. Since the clamping plates are arc-shaped and fit tightly against the outer wall of the atomizer, the two sides of the atomizer can be quickly squeezed and limited;

[0017] S2. Control the output end of the servo motor to drive the lead screw to rotate. When the lead screw rotates, it drives the sliding seat to move horizontally. When the sliding seat moves, it drives the base to move. Since clamping components are provided on both sides of the base to limit the atomizer, when the base moves, it drives the atomizer to move horizontally to the end of the atomization chamber for adaptation;

[0018] S3. When replacing the sample, control the piston rod at the end of the cylinder to drive the toothed plate to move vertically upward. When the toothed plate moves to the toothed block, it is clamped and fixed to the toothed block, thereby fixing the position of the sliding rod and making the clamping plate in a stable state of fixing the atomizer;

[0019] S4. When the atomizer moves to the end of the atomization chamber for adaptation and is completed, control the output end of the rotating motor to drive the eccentric wheel to rotate. When the eccentric wheel rotates, it drives the rack to move horizontally. Due to the physical characteristics of the eccentric wheel, when the eccentric wheel rotates, it drives the rack to move horizontally in a reciprocating motion. By rotating the atomizing nozzle, the spray nozzle at the end of the atomizer makes the fog droplet range wider during the atomization process, and makes the fog droplets more evenly dispersed in the atomization chamber to adjust the air humidity.

[0020] Compared with the prior art, the beneficial effects of the present invention are as follows:

[0021] 1. For this etching machine adaptive air humidity adjustment device, by squeezing the clamping plate, the sliding rod provided at its end slides on the inner wall of the cylinder barrel. At the same time, during the sliding process of the sliding rod, the compression spring is squeezed, so that the opening between the clamping plates increases, facilitating the placement of the atomizer between the clamping plates. When the placement of the atomizer is completed, stop squeezing the clamping plate. At this time, the sliding rod drives the clamping plates to move relative to each other under the action of the compression spring. Since the clamping plates are arc-shaped and closely fit the outer wall of the atomizer, the two sides of the atomizer are quickly squeezed and limited, improving the stability of the atomizer, thereby ensuring accurate adjustment of the humidity inside the etching machine.

[0022] 2. For this etching machine adaptive air humidity adjustment device, control the output end of the servo motor to drive the lead screw to rotate. When the lead screw rotates, it drives the sliding seat to move horizontally. When the sliding seat moves, it drives the base to move. Since clamping components are provided on both sides of the base to limit the atomizer, when the base moves, it drives the atomizer to move horizontally to the end of the atomization chamber for adaptation, thereby improving the installation efficiency of the atomization device of the etching machine.

[0023] 3. The adaptive air humidity regulation device of this etching machine drives the eccentric wheel to rotate by controlling the output end of the rotating motor. When the eccentric wheel rotates, it drives the rack to move horizontally. Due to the physical characteristics of the eccentric wheel, the rack moves horizontally in a reciprocating manner when the eccentric wheel rotates. By rotating the atomizing nozzle, the spray nozzle at the end of the atomizer makes the fog droplet range wider during the atomization process, allowing the fog droplets to be more evenly dispersed in the atomization chamber, which is beneficial to accurately regulating the humidity inside the etching machine. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] Figure 1 is a schematic diagram of the overall structure of the present invention;

[0025] Figure 2 For the present invention Figure 1 schematic diagram of part A;

[0026] Figure 3 is a schematic diagram of the structure of the moving component of the present invention;

[0027] Figure 4 is a schematic diagram of the structure of the clamping component of the present invention;

[0028] Figure 5 is a cross-sectional view of the clamping component of the present invention;

[0029] Figure 6 For the present invention Figure 5 schematic diagram of part B;

[0030] Figure 7 is a schematic diagram of the structure of the vibration component of the present invention.

[0031] Figure 8 For the present invention Figure 7 schematic diagram of part C.

[0032] The meanings of each label in the figure are as follows:

[0033] 100, equipment body; 101, atomization chamber;

[0034] 200, atomizer; 201, sample inlet; 202, air inlet; 203, semi-gear;

[0035] 300, moving component; 301, servo motor; 302, lead screw; 303, sliding seat; 304, base;

[0036] 400, clamping component; 401, cylinder; 402, sliding rod; 403, compression spring; 404, clamping plate; 405, tooth block; 406, cylinder; 407, toothed plate;

[0037] 500, Rotating assembly; 501, Rack; 502, Rotating motor; 503, Eccentric wheel; 504, Double-headed elbow pipe; 505, Pressing rod; 506, Knocking rod; 507, Elastic member. Detailed implementation

[0038] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present invention without creative efforts shall fall within the protection scope of the present invention.

[0039] One of the purposes of the present invention is to provide an etching machine adaptive air humidity adjustment device as shown in Figures 1-8 which includes a device body 100. Inside the device body 100, there is an atomization chamber 101. The atomization chamber 101 is connected to the inside of the device body 100 through a pipeline. At the end of the atomization chamber 101, there is an atomizer 200. On the surface of the atomizer 200, there are a sample inlet 201 and an air inlet 202. At the end of the atomizer 200, there is a half gear 203. Below the atomizer 200, there is a moving assembly 300. On both sides of the moving assembly 300, there are clamping assemblies 400. The clamping assemblies 400 are used to automatically clamp the atomizer 200 so that the atomizer 200 and the end of the atomization chamber 101 are in the same horizontal position. Below the half gear 203, there is a rotating assembly 500. When the atomizer 200 is adapted to the atomization chamber 101, the rotating assembly 500 drives the atomizer 200 to rotate reciprocally to increase the droplet range during the atomization process.

[0040] When installing the atomization device, it is necessary to insert the atomizing nozzle of the atomizer 200 into the end of the atomization chamber 101 for adaptation. Since the atomizing nozzle is small, it needs to be inserted multiple times during the adaptation process, which affects the installation efficiency of the atomization device. Therefore, the moving component 300 includes a servo motor 301 provided below the atomizer 200. The output end of the servo motor 301 is provided with a lead screw 302. The surface of the lead screw 302 is provided with a sliding seat 303. When the lead screw 302 rotates, it drives the sliding seat 303 provided on its surface to move horizontally. The top of the sliding seat 303 is provided with a base 304. On both sides of the surface of the base 304, there are clamping components 400. The clamping components 400 are used to clamp and limit the atomizer 200. When the atomizer 200 is placed between the clamping components 400 for clamping and limiting, by controlling the output end of the servo motor 301 to drive the lead screw 302 to rotate, when the lead screw 302 rotates, it drives the sliding seat 303 to move horizontally. When the sliding seat 303 moves, it drives the base 304 to move. Since there are clamping components 400 on both sides of the base 304 to limit the atomizer 200, when the base 304 moves, it drives the atomizer 200 to move horizontally to the end of the atomization chamber 101 for adaptation, thereby improving the installation efficiency of the atomization device.

[0041] A stable atomization process can improve the accuracy of humidity adjustment. If the atomization device is unstable, the droplet size and distribution are uneven, which will cause large fluctuations in the sensor signal and make it difficult to accurately obtain the humidity information inside the etching machine, which is not conducive to humidity adjustment. Therefore, the top of the sliding seat 303 is provided with a base 304. On both sides of the surface of the base 304, there are clamping components 400. The clamping components 400 are used to clamp and limit the atomizer 200. The end of the sliding rod 402 is provided with a clamping plate 404. The clamping plate 404 is arc-shaped and fits the side wall of the atomizer 200. When it is necessary to clamp and limit the atomizer 200, by squeezing the clamping plate 404, the sliding rod 402 provided at its end slides on the inner wall of the cylinder 401. At the same time, during the sliding process of the sliding rod 402, the compression spring 403 is squeezed, so that the opening between the clamping plates 404 increases, facilitating the placement of the atomizer 200 between the clamping plates 404. When the placement of the atomizer 200 is completed, stop squeezing the clamping plate 404. At this time, the sliding rod 402 drives the clamping plate 404 to move relative to each other under the action of the compression spring 403. Since the clamping plate 404 is arc-shaped and closely fits the outer wall of the atomizer 200, the two sides of the atomizer 200 are quickly squeezed and limited, improving the stability of the atomizer 200, thereby ensuring accurate adjustment of the humidity inside the etching machine.

[0042] Considering that when replacing the sample at the sample inlet 201, the pipeline is prone to shaking and deviation of the atomizer 200 during the pulling and replacement. To improve the stability of the atomizer 200, a chute is provided at the bottom of the cylinder 401. A tooth block 405 is provided at the end of the sliding rod 402, and the tooth block 405 slides on the inner wall of the chute. A cylinder 406 is provided below the cylinder 401, and a toothed plate 407 is provided on the piston rod at the end of the cylinder 406. Control the piston rod at the end of the cylinder 406 to drive the toothed plate 407 to move upward in the vertical direction, so that the toothed plate 407 limits the tooth block 405. When replacing the sample, control the piston rod at the end of the cylinder 406 to drive the toothed plate 407 to move upward in the vertical direction. The toothed plate 407 moves to the tooth block 405 and is clamped and fixed to it, so that the position of the sliding rod 402 is fixed, and the splint 404 is in a stable fixed state for the atomizer 200, thereby improving the stability of the atomizer 200.

[0043] The droplet spraying patterns generated by different atomizers 200 are different. If the atomizing nozzle is fixed at one position, the droplets may concentrate in a certain area of the atomization chamber 101, resulting in too high local concentration, while other areas cannot fully contact the droplets. Therefore, the rotating assembly 500 includes a rack 501 provided below the half gear 203. A vibration assembly is provided between the rack 501 and the base 304. The vibration assembly includes a double-headed elbow pipe 504 provided on one side of the base 304. The two ends of the double-headed elbow pipe 504 are respectively provided with a pressure rod 505 and a knocking rod 506. The double-headed elbow pipe 504 contains liquid inside. The pressure rod 505 is fixed on one side of the rack 501. An elastic member 507 is provided between the pressure rod 505 and the double-headed elbow pipe 504. Press the pressure rod 505 to squeeze the water body inside the double-headed elbow pipe 504, so that the knocking rod 506 reciprocates to strike the side wall of the atomizer 200. A rotating motor 502 is provided on the side of the base 304 away from the vibration assembly. An eccentric wheel 503 is provided at the end of the rotating motor 502. The eccentric wheel 503 is in contact with the end of the rack 501. When the eccentric wheel 503 rotates, it drives the rack 501 to move reciprocally in the horizontal direction. When the atomizer 200 moves to the end of the atomization chamber 101 for adaptation and completion, control the output end of the rotating motor 502 to drive the eccentric wheel 503 to rotate. When the eccentric wheel 503 rotates, it drives the rack 501 to move in the horizontal direction. When the rack 501 moves, it squeezes the pressure rod 505. The pressure rod 505 slides on the inner wall of the double-headed elbow pipe 504. At the same time, the pressure rod 505 squeezes the liquid inside the double-headed elbow pipe 504, so that the knocking rod 506 moves and impacts the outer wall of the atomizer 200, preventing the sample inlet 201 from being blocked by impurities, thereby ensuring the atomization efficiency of the device;

[0044] Meanwhile, due to the physical characteristics of the eccentric wheel 503, when the eccentric wheel 503 rotates, it drives the rack 501 to reciprocate horizontally. By rotating the atomizing nozzle, the spray nozzle at the end of the atomizer 200 can make the range of the mist droplets wider during the atomization process, and make the mist droplets more evenly dispersed in the atomization chamber 101, which is beneficial to accurately adjust the humidity inside the etching machine.

[0045] During specific use, by squeezing the clamping plate 404, the sliding rod 402 provided at its end slides on the inner wall of the cylinder 401. At the same time, during the sliding process of the sliding rod 402, the compression spring 403 is squeezed, so that the opening between the clamping plates 404 increases, facilitating the placement of the atomizer 200 between the clamping plates 404. When the placement of the atomizer 200 is completed, the squeezing of the clamping plate 404 is stopped. At this time, the sliding rod 402 drives the clamping plate 404 to move relative to each other under the action of the compression spring 403. Since the clamping plate 404 is arc-shaped and closely fits the outer wall of the atomizer 200, the two sides of the atomizer 200 are quickly squeezed and limited, improving the stability of the atomizer 200.

[0046] By controlling the output end of the servo motor 301 to drive the lead screw 302 to rotate, when the lead screw 302 rotates, it drives the sliding seat 303 to move horizontally. When the sliding seat 303 moves, it drives the base 304 to move. Since the clamping components 400 are provided on both sides of the base 304 to limit the atomizer 200, therefore, when the base 304 moves, it drives the atomizer 200 to move horizontally to the end of the atomization chamber 101 for adaptation, thus improving the installation efficiency of the atomization device; when replacing the sample, by controlling the piston rod at the end of the cylinder 406 to drive the toothed plate 407 to move vertically upward, when the toothed plate 407 moves to the toothed block 405, it is clamped and fixed to the toothed block 405, so that the position of the sliding rod 402 is fixed, and the clamping plate 404 is in a stable fixed state for the atomizer 200, thus improving the stability of the atomizer 200.

[0047] When the atomizer 200 moves to the end of the atomization chamber 101 for adaptation and is completed, by controlling the output end of the rotation motor 502 to drive the eccentric wheel 503 to rotate, when the eccentric wheel 503 rotates, it drives the rack 501 to move horizontally. Due to the physical characteristics of the eccentric wheel 503, when the eccentric wheel 503 rotates, it drives the rack 501 to reciprocate horizontally. By rotating the atomizing nozzle, the spray nozzle at the end of the atomizer 200 can make the range of the mist droplets wider during the atomization process, and make the mist droplets more evenly dispersed in the atomization chamber 101, which is beneficial to accurately adjust the humidity inside the etching machine.

[0048] The second object of the present invention is to provide a processing method for an etching machine adaptive air humidity adjustment device, including the etching machine adaptive air humidity adjustment device in any one of the above, and including the following steps:

[0049] S1. Squeeze the clamping plate 404 so that the sliding rod 402 provided at its end slides on the inner wall of the cylinder 401. At the same time, the compression spring 403 is squeezed during the sliding of the sliding rod 402, so that the opening between the clamping plates 404 is increased, facilitating the placement of the atomizer 200 between the clamping plates 404. When the placement of the atomizer 200 is completed, stop squeezing the clamping plate 404. At this time, the sliding rod 402 drives the relative movement of the clamping plate 404 under the action of the compression spring 403. Since the clamping plate 404 is arc-shaped and closely fits the outer wall of the atomizer 200, the two sides of the atomizer 200 are quickly squeezed and limited.

[0050] S2. Control the output end of the servo motor 301 to drive the lead screw 302 to rotate. When the lead screw 302 rotates, it drives the sliding seat 303 to move horizontally. When the sliding seat 303 moves, it drives the base 304 to move. Since the clamping assemblies 400 are provided on both sides of the base 304 to limit the atomizer 200, when the base 304 moves, it drives the atomizer 200 to move horizontally to the end of the atomization chamber 101 for adaptation.

[0051] S3. When replacing the sample, control the piston rod at the end of the cylinder 406 to drive the toothed plate 407 to move upward in the vertical direction. When the toothed plate 407 moves to the toothed block 405, it is clamped and fixed to the toothed block 405, so that the position of the sliding rod 402 is fixed, and the clamping plate 404 is in a stable state of fixing the atomizer 200.

[0052] S4. When the adaptation of the atomizer 200 to the end of the atomization chamber 101 is completed, control the output end of the rotation motor 502 to drive the eccentric wheel 503 to rotate. When the eccentric wheel 503 rotates, it drives the rack 501 to move horizontally. Due to the physical characteristics of the eccentric wheel 503, when the eccentric wheel 503 rotates, it drives the rack 501 to move horizontally in a reciprocating manner. By rotating the atomizing nozzle, the spray nozzle at the end of the atomizer 200 makes the range of the mist droplets wider during the atomization process, and the mist droplets are more evenly dispersed in the atomization chamber 101 to adjust the air humidity.

[0053] The above shows and describes the basic principles, main features and advantages of the present invention. Those skilled in the art should understand that the present invention is not limited by the above embodiments. The above embodiments and the descriptions in the specification are only preferred examples of the present invention and are not used to limit the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection claimed by the present invention is defined by the appended claims and their equivalents.

Claims

1. An adaptive air humidity adjustment device for an etching machine, characterized in that: It includes a device body. Inside the device body, there is an atomization chamber which is connected to the inside of the device body through a pipeline. At the end of the atomization chamber, there is an atomizer. On the surface of the atomizer, there are a sample inlet and a gas inlet. At the end of the atomizer, there is a semi-gear. Below the atomizer, there is a moving component. On both sides of the moving component, there are clamping components which are used to automatically clamp the atomizer so that the atomizer and the end of the atomization chamber are at the same horizontal position. Below the semi-gear, there is a rotating component. When the atomizer is adapted to the atomization chamber, the rotating component drives the atomizer to rotate reciprocally to increase the range of droplets during the atomization process.

2. The etching machine adaptive air humidity adjustment device according to claim 1, wherein: The moving component includes a servo motor arranged below the atomizer. At the output end of the servo motor, there is a lead screw. On the surface of the lead screw, there is a sliding seat. When the lead screw rotates, it drives the sliding seat arranged on its surface to move horizontally.

3. The etching machine adaptive air humidity adjustment device according to claim 2, characterized in that: On the top of the sliding seat, there is a base. On both sides of the surface of the base, there are clamping components which are used to clamp and limit the atomizer.

4. The etching machine adaptive air humidity adjustment device according to claim 1, characterized in that: The clamping component includes cylinder barrels arranged on both sides of the base. Inside the inner wall of the cylinder barrel, a slide bar slides. Between the cylinder barrel and the slide bar, there is a compression spring.

5. The etching machine adaptive air humidity adjustment device according to claim 4, wherein: At the end of the slide bar, there is a clamping plate which is arc-shaped and fits the side wall of the atomizer.

6. The etching machine adaptive air humidity adjustment device according to claim 4, characterized in that: At the bottom of the cylinder barrel, there is a chute. At the end of the slide bar, there is a toothed block which slides on the inner wall of the chute.

7. The etching machine adaptive air humidity adjustment device according to claim 6, wherein: Below the cylinder barrel, there is a cylinder. At the end of the piston rod of the cylinder, there is a toothed plate. Control the piston rod at the end of the cylinder to drive the toothed plate to move upward in the vertical direction so that the toothed plate limits the toothed block.

8. The etching machine adaptive air humidity adjustment device according to claim 1, characterized in that: The rotating component includes a rack arranged below the semi-gear. When the rack slides on the surface of the base, it drives the semi-gear to engage and rotate. Between the rack and the base, there is a vibration component. The vibration component includes a double-headed elbow pipe arranged on one side of the base. At both ends of the double-headed elbow pipe, there are a pressure rod and a knocking rod respectively. Inside the double-headed elbow pipe, there is a liquid. The pressure rod is fixed on one side of the rack. Between the pressure rod and the double-headed elbow pipe, there is an elastic member. Press the pressure rod to squeeze the water body inside the double-headed elbow pipe so that the knocking rod moves reciprocally to strike the side wall of the atomizer.

9. The etching machine adaptive air humidity adjustment device according to claim 8, characterized in that: On one side away from the vibration component, there is a rotating motor. At the end of the rotating motor, there is an eccentric wheel which fits the end of the rack. When the eccentric wheel rotates, it drives the rack to move reciprocally in the horizontal direction.

10. A method for using an etching machine adaptive air humidity adjustment device, which is implemented by the etching machine adaptive air humidity adjustment device according to any one of claims 1-9, characterized in that: It includes the following steps: S1. Squeeze the clamping plate so that the slide bar arranged at its end slides on the inner wall of the cylinder barrel. At the same time, during the sliding process of the slide bar, the compression spring is squeezed, so that the opening between the clamping plates increases, facilitating the placement of the atomizer between the clamping plates. When the atomizer is placed, stop squeezing the clamping plate. At this time, the slide bar drives the clamping plates to move relative to each other under the action of the compression spring. Since the clamping plates are arc-shaped and fit tightly against the outer wall of the atomizer, the two sides of the atomizer can be quickly squeezed and limited. S2. Control the output end of the servo motor to drive the lead screw to rotate. When the lead screw rotates, it drives the sliding seat to move horizontally. When the sliding seat moves, it drives the base to move. Since there are clamping components on both sides of the base to limit the atomizer, when the base moves, it drives the atomizer to move horizontally to the end of the atomization chamber for adaptation. S3. When replacing the sample, the piston rod at the end of the cylinder is controlled to drive the toothed plate to move upward in the vertical direction. The toothed plate moves to the toothed block and is clamped and fixed thereto, thereby fixing the position of the sliding rod and making the clamping plate in a stable fixed state for the atomizer. S4. When the atomizer moves to the end of the atomization chamber and the adaptation is completed, the output end of the rotation motor is controlled to drive the eccentric wheel to rotate. When the eccentric wheel rotates, it drives the rack to move in the horizontal direction. Due to the physical characteristics of the eccentric wheel, when the eccentric wheel rotates, it drives the rack to reciprocate in the horizontal direction. By rotating the atomizing nozzle, the spray nozzle at the end of the atomizer makes the fog droplet range wider during the atomization process, and makes the fog droplets more evenly dispersed in the atomization chamber to adjust the air humidity.

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