A CVD vacuum reactor with pneumatic seal

Abstract

The application discloses a CVD vacuum reactor with pneumatic sealing, and relates to the technical field of chemical vapor deposition. The CVD vacuum reactor comprises a shell, a gas inlet pipe, an adjusting unit and a placing unit. A heating device is arranged in the shell, a mounting hole is formed in the top end of the shell, and a feeding door is arranged on the sidewall of the shell. The adjusting unit comprises a base shell, a flow nozzle, an adjustable nozzle and a self-adaptive flow adjusting assembly. The self-adaptive flow adjusting assembly automatically completes self-adaptive adjustment of the flow of the gas inlet pipe by changing the gas pressure generated by the change of the jet area of the adjusting unit. Compared with the prior art, the flow of the gas inlet pipe and the jet area of the adjusting unit are adjusted by synchronous fixation, and the gas pressure fluctuates during the adjusting process. After the jet area of the adjusting unit is changed, the flow of the gaseous material discharged from each jet hole tends to be consistent with the original flow, so that the film coating effect on the substrate is avoided.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of chemical vapor deposition, in particular to a CVD vacuum reactor with pneumatic sealing. BACKGROUND

[0002] CVD refers to "chemical vapor deposition", which is a kind of gas phase deposition solid film technology that uses gaseous substances to generate solid deposition on the gas or gas-solid interface through chemical reaction at a certain temperature. CVD reaction is usually carried out in normal pressure or vacuum, and the diffraction of the coating film is good, and the surface of the workpiece with complex shape can be uniformly coated.

[0003] After searching, the patent CN116083887B discloses a CVD vacuum reactor with pneumatic sealing, which comprises a shell, an air inlet pipe, an adjusting unit and a placing unit. The shell is provided with a feeding door connected with the shell through a valve, and a heating device is installed in the shell. The placing unit is used for placing and fixing a plurality of substrates. The patent identifies the number of coated substrates by judging the deformation of the spring. If the number of substrates is large, the inner tube can be rotated forward to increase the air flow and the jet area synchronously. If the number of substrates is small, the inner tube can be rotated reversely to reduce the air flow and the jet area synchronously. Thus, the coating effect of the substrate is improved, the waste of gaseous substances is reduced, and the effective use of energy is improved. However, the patent has the following defects in actual use:

[0004] 1. The air flow control of the adjusting unit is not accurate. The air flow is determined by the overlapping area of the holes of the second flow adjusting piece and the first flow adjusting piece. When the inner tube is rotated, the air flow will change constantly. The jet area is adjusted by the number of jet holes blocked by the slider. Since there is a gap between the jet holes, the jet area changes in a gap mode when the inner tube is rotated. This design causes the gaseous substance flow discharged from the jet holes to be inconsistent when the jet area changes, affecting the coating effect of the substrate. For example, different numbers of substrates in the same batch may have uneven coating thickness.

[0005] 2. Heat conduction problem of the adjusting unit. The adjusting unit is located in the shell. When the heating device is started, the heat in the shell will be conducted to the adjusting unit, causing the gaseous substances in the adjusting unit to react chemically and generate solid deposition, thereby blocking the jet holes and affecting the normal operation of the equipment. SUMMARY

[0006] The present application aims to provide a CVD vacuum reactor with pneumatic sealing to solve the problems raised in the background art.

[0007] To achieve the above-mentioned application purposes, the present application adopts the following technical solutions:

[0008] The application provides a CVD vacuum reactor with pneumatic sealing, which comprises a shell, a gas inlet pipe, an adjusting unit and a placing unit, a heating device is installed in the shell, a mounting hole is formed in the top end of the shell, the gas inlet pipe transports gaseous substances into the shell through the adjusting unit at the mounting hole, the placing unit is installed in the shell, and a feeding door is installed on the side wall of the shell, characterized in that the adjusting unit comprises a base shell, a flow nozzle, an adjustable nozzle and a self-adaptive flow adjusting assembly.

[0009] The edge of the bottom of the base shell extends outward to form an extended edge capable of completely covering the mounting hole, the base shell is installed on the top of the shell through the extended edge and blocks the mounting hole, and the inside of the base shell is hollow to form a transition cavity.

[0010] The output end of the gas inlet pipe is connected with the top end of the flow nozzle, the bottom end of the flow nozzle is blocked and vertically extends through the center of the top wall of the base shell into the transition cavity, and a plurality of strip-shaped gas ports are uniformly arranged on the outer wall of the bottom end of the flow nozzle in the circumferential direction; the bottom wall of the base shell is provided with a cross-shaped groove, the cross-shaped groove is composed of four strip-shaped grooves in the shape of right-angled triangles, and the four strip-shaped grooves are arranged perpendicular to each other with the right-angled vertexes as the common center point.

[0011] The adjustable nozzle is sealingly and rotatably assembled on the extended edge of the base shell, the top surface of the adjustable nozzle is in close contact with the bottom wall of the base shell, a plurality of jet holes are arranged in a cross-shaped array at the positions corresponding to the cross-shaped groove of the adjustable nozzle, and the adjustable nozzle is further connected with a first driving member for driving the rotation of the adjustable nozzle.

[0012] The self-adaptive flow adjusting assembly comprises a blocking ring sealingly and slidingly arranged at the strip-shaped gas port of the flow nozzle and a second driving member, the second driving member is used for driving the blocking ring to slide to adaptively adjust the blocking area of the strip-shaped gas port, so that the gas pressure in the transition cavity is at a preset gas pressure value.

[0013] Further, the base shell comprises an upper cover and a lower cover which are detachably connected, the upper cover and the lower cover are both in the shape of a columnar flat structure, the upper cover is provided with an adaptive hole at the central position and the adaptive hole is adapted to the flow nozzle, and the outer wall of the flow nozzle is threadedly connected with the inner wall of the adaptive hole.

[0014] Further, the bottom of the extended edge is provided with a fixing ring adapted to the mounting hole, the edge of the top of the adjustable nozzle extends outward to form a mounting ring adapted to the fixing ring, and the inner side of the fixing ring is threadedly connected with a pressing ring abutting against the mounting ring.

[0015] Further, the first driving member comprises a connecting block slidingly adapted in the circular arc groove in the inner side of the fixing ring and a handle fixed at the top end of the connecting block, the bottom end of the connecting block is fixedly connected with the mounting ring, and the top of the extended edge is provided with a scale.

[0016] Further, the second driving member comprises a partition plate and a counterweight ring, the center of the partition plate is provided with a through hole matched with the flow nozzle, the inner wall of the through hole is in sealing sliding fit with the outer wall of the flow nozzle, the outer wall of the partition plate is in sealing sliding fit with the inner wall of the transition cavity, the counterweight ring is fixedly arranged on the top of the partition plate, the partition plate is fixedly connected with the sealing ring through the connecting piece, and a limiting ring is further arranged on the flow nozzle.

[0017] Further, the outer side of the adjustable nozzle is provided with a heat insulation assembly, the heat insulation assembly comprises a top-open heat insulation cover, the top of the heat insulation cover is welded to the bottom of the mounting ring, a first equidistant gap is formed between the inner wall of the heat insulation cover and the outer wall of the adjustable nozzle, a second equidistant gap is formed between the inner bottom wall of the heat insulation cover and the bottom wall of the adjustable nozzle, the first equidistant gap and the second equidistant gap are communicated to form a heat insulation cavity, and a nozzle corresponding to the injection hole of the adjustable nozzle is further arranged on the bottom wall of the heat insulation cover, and the top end of the nozzle is in sealing fit connection with the bottom wall of the adjustable nozzle.

[0018] Further, the heat insulation cover is made of heat insulation material.

[0019] Further, the adjustable nozzle is symmetrically provided with channels penetrating through the mounting ring and the connecting block, the two channels are respectively a liquid inlet channel and a liquid outlet channel, the liquid inlet channel and the liquid outlet channel are communicated with the heat insulation cavity, and the liquid inlet channel and the liquid outlet channel are connected with the cooling liquid circulating equipment outside.

[0020] Further, the adjustable nozzle comprises a columnar body, the columnar body is in threaded fit connection with the compression ring, the injection hole is arranged on the columnar body, and the columnar body and the heat insulation cover jointly form the heat insulation cavity.

[0021] Further, the mounting ring and the extension edge are provided with a sealing gasket, and sealing is achieved by compressing the sealing gasket.

[0022] Compared with the prior art, the above one or more technical solutions have the following beneficial effects:

[0023] 1. Self-adaptive flow regulation: through the self-adaptive flow regulation assembly, the air inlet flow can be automatically adjusted according to the change of the injection area, so that the flow of gaseous substances discharged from each injection hole remains consistent, thereby avoiding the problem of uneven coating thickness of the substrate.

[0024] 2. Heat insulation and cooling design: the outer side of the adjustable nozzle is provided with a heat insulation assembly, which effectively blocks the heat conduction from the shell to the adjustment unit, avoids the generation of solid deposits in the adjustment unit, and prevents the injection hole from being blocked.

[0025] 3. Precise adjustment and stability: the adjustable nozzle is designed in cooperation with the cross-shaped groove, and combined with the first driving member and the second driving member, the injection area and the air inlet flow can be precisely adjusted to ensure the stable operation of the reactor under different working conditions.

[0026] 4. Modularization and convenient maintenance: the base shell adopts a detachable design, facilitating the installation and maintenance of the flow nozzle and the adjusting assembly; the modular design of the adjustable nozzle and the heat insulation assembly facilitates regular cleaning and maintenance, prolonging the service life of the equipment.

[0027] In summary, the present application optimizes the structural design of the adjusting unit, solves the problems of inaccurate airflow control and heat conduction in the prior art, and significantly improves the film coating effect and operation stability of the CVD vacuum reactor.

[0028] It should be understood that the above general description and the following detailed description are only exemplary and explanatory, and cannot limit the present application. BRIEF DESCRIPTION OF DRAWINGS

[0029] The drawings accompanying the specification of the present application are used to provide a further understanding of the present application, and the schematic embodiments of the present application and the description thereof are used to explain the present application, and do not constitute an improper limitation on the present application.

[0030] Figure 1 is a schematic diagram of the overall structure of the present application;

[0031] Figure 2 is a schematic diagram of the top view structure of the present application;

[0032] Figure 3 is a schematic diagram of the A-A direction structure of Figure 2 ;

[0033] Figure 4 is a schematic diagram of the local structure at B of Figure 3 ;

[0034] Figure 5 is a schematic diagram of the perspective structure of Figure 4 ;

[0035] Figure 6 is a schematic diagram of the front view structure of the present application;

[0036] Figure 7 is a schematic diagram of the C-C direction structure of Figure 6 ;

[0037] Figure 8 is a schematic diagram of the front view structure of the present application after being split;

[0038] Figure 9 is a schematic diagram of the first perspective structure of Figure 8 ;

[0039] Figure 10 is a schematic diagram of the second perspective structure of Figure 8 .

[0040] In the drawings:

[0041] 1 - shell; 11 - mounting hole; 2 - adjusting unit; 3 - base shell; 31 - extension edge; 311 - fixing ring; 312 - pressing ring; 313 - circular arc groove; 32 - transition cavity; 33 - cross-shaped groove; 331 - strip-shaped groove; 34 - upper cover body; 341 - fitting hole; 35 - lower cover body; 4 - flow nozzle; 41 - strip-shaped air port; 5 - adjustable nozzle; 51 - injection hole; 52 - first driving member; 521 - connecting block; 522 - handle; 53 - mounting ring; 54 - liquid inlet channel; 55 - liquid outlet channel; 56 - columnar body; 61 - plugging ring; 62 - second driving member; 621 - partition plate; 622 - counterweight ring; 623 - limiting ring; 7 - heat shield; 71 - heat shield cavity; 711 - first equidistant gap; 712 - second equidistant gap; 72 - nozzle. DETAILED DESCRIPTION

[0042] In order to enable personnel in the technical field to better understand the scheme of the present application, the technical scheme in the embodiments of the present application will be clearly and completely described below in combination with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative labor should belong to the scope of protection of the present application.

[0043] Please refer to Figures 1-10 , the present application provides a CVD vacuum reactor with pneumatic sealing, comprising a shell 1, a gas inlet pipe (not shown), an adjusting unit 2 and a placing unit. The shell 1 is provided with a heating device, and a mounting hole 11 is formed at the top end of the shell 1. The gas inlet pipe delivers gaseous substances into the shell 1 through the adjusting unit 2 at the mounting hole 11, and the placing unit is installed in the shell 1, and the sidewall of the shell 1 is provided with a feeding door. In use, the substrates are placed in the placing unit from the center to the outside in sequence, and the staff can adjust the injection area and flow of the gaseous substances through the adjusting unit 2 according to the number of substrates (i.e. the area occupied by the substrates), so as to ensure the film coating effect of the substrates and avoid waste of energy of the gaseous substances.

[0044] In order to ensure that the flow of the gaseous substances remains relatively stable after the adjusting unit 2 changes the injection area, so as to ensure the uniformity of the film coating thickness of the substrates and improve the film coating effect.

[0045] The present application optimizes the structure of the adjusting unit 2 in the prior art.

[0046] Specifically, as Figure 4 shown, the adjusting unit 2 comprises a base shell 3, a flow nozzle 7, an adjustable nozzle 5 and a self-adaptive flow adjusting assembly.

[0047] The edge of the bottom of the base shell 3 extends outward to form an extended edge 31 capable of completely covering the mounting hole 11, so that the base shell 3 can be mounted on the top of the shell 1 through the extended edge 31 and block the mounting hole 11, thereby forming a sealed space in the shell 1 after the base shell 3 is installed.

[0048] The inside of the base shell 3 is hollow to form a transition chamber 32.

[0049] The output end of the gas inlet pipe is connected to the top end of the flow nozzle 7, the bottom end of the flow nozzle 7 is blocked and extends vertically downward through the center of the top wall of the base shell 3 to the transition chamber 32. The outer wall of the bottom end of the flow nozzle 7 is uniformly provided with a plurality of strip-shaped gas ports 41 in the circumferential direction.

[0050] As shown in Figure 5 , Figure 7 , Figure 9 and Figure 10 , the bottom wall of the base shell 3 is provided with a cross-shaped slot 33, which is composed of four straight triangular strip-shaped slots 331, and the four straight triangular strip-shaped slots 331 are arranged perpendicular to each other with their right-angle vertices as a common center point.

[0051] The adjustable nozzle 5 is sealingly and rotatably mounted on the extended edge 31 of the base shell 3, and the top surface of the adjustable nozzle 5 abuts against the bottom wall of the base shell 3. The adjustable nozzle 5 is provided with a plurality of jet holes 51 in a cross-shaped array corresponding to the position of the cross-shaped slot 33. The adjustable nozzle 5 is also connected to a first driving member 52 for driving the rotation of the adjustable nozzle 5.

[0052] The working principle is that when in use, the gas inlet pipe introduces gaseous substances into the flow nozzle 7, the gaseous substances enter the transition chamber 32 through the strip-shaped gas ports 41, and then are introduced into the shell 1 through the jet holes 51 of the adjustable nozzle 5. The heating device in the shell 1 heats the gaseous substances, causing a chemical reaction of the gaseous substances, thereby generating solid deposits on the surface of the substrate to complete the vacuum coating of the substrate.

[0053] Before coating, the staff can adjust the jet range of the adjustable nozzle 5 by driving the rotation of the adjustable nozzle 5 through the first driving member 52 according to the number of substrates. For example, if the number of substrates is small, the adjustable nozzle 5 can be rotated to gradually block the peripheral jet holes 51 of the bottom wall of the base shell 3, thereby reducing the jet area of the adjustable nozzle 5. If the number of substrates is large, the adjustable nozzle 5 can be rotated to reduce the number of jet holes 51 blocked by the bottom wall of the base shell 3, thereby increasing the jet area of the adjustable nozzle 5.

[0054] When the spray range of the adjustable nozzle 5 is adjusted, if the spray area of the adjustable nozzle 5 changes and the flow of the gaseous substance into the transition chamber 32 remains unchanged (i.e. the diameter of the strip-shaped gas port 41 does not change), the gas pressure in the transition chamber 32 will change, resulting in a change in the flow of the gaseous substance discharged from each spray hole 51 of the adjustable nozzle 5, thereby affecting the film coating effect of the substrate.

[0055] To this end, the present application designs an adaptive flow adjusting assembly, which comprises a blocking ring 61 sealingly sleeved on the strip-shaped gas port 41 of the flow nozzle 7 and a second driving member 62.

[0056] The second driving member 62 is used to drive the blocking ring 61 to slide to adaptively adjust the blocking area of the strip-shaped gas port 41, so that the gas pressure in the transition chamber 32 is at a preset gas pressure value. When the spray area of the adjustable nozzle 5 decreases: the gas pressure in the transition chamber 32 increases, the second driving member 62 drives the blocking ring 61 to move, increases the blocking area of the strip-shaped gas port 41, reduces the effective diameter of the strip-shaped gas port 41, thereby reducing the flow of the gaseous substance into the transition chamber 32, avoiding waste of the gaseous substance.

[0057] When the spray area of the adjustable nozzle 5 increases: the gas pressure in the transition chamber 32 decreases, the second driving member 62 drives the blocking ring 61 to move, reduces the blocking area of the strip-shaped gas port 41, increases the effective diameter of the strip-shaped gas port 41, thereby increasing the flow of the gaseous substance into the transition chamber 32, ensuring that the flow of the gaseous substance discharged from each spray hole 51 of the adjustable nozzle 5 is consistent with the original flow, avoiding affecting the film coating effect of the substrate.

[0058] In the present embodiment, the base shell 3 comprises an upper cover 34 and a lower cover 35 which are detachably connected. The upper cover 34 and the lower cover 35 are both columnar and flat structures, and the upper cover 34 has an adaptive hole 341 at the center position thereof which is adapted to the flow nozzle 7, and the outer wall of the flow nozzle 7 is threadedly connected with the inner wall of the adaptive hole 341. This design enables the base shell 3 to be split, facilitating the installation and regular maintenance of the flow nozzle 7 and the second driving member 62.

[0059] In the present embodiment, the bottom of the outwardly extending edge 31 is provided with a fixing ring 311 which is adapted to the mounting hole 11, and the edge of the top of the adjustable nozzle 5 is outwardly extended to form a mounting ring 53 which is adapted to the fixing ring 311. The inner side of the fixing ring 311 is threadedly connected with a pressing ring 312 which abuts against the mounting ring 53. In use, the adjustable nozzle 5 is clamped into the fixing ring 311, and then the pressing ring 312 is used to abut against the mounting ring 53, so that the mounting ring 53 is tightly attached to the bottom of the outwardly extending edge 31, thereby completing the installation of the adjustable nozzle 5. In order to improve the sealing performance, a sealing gasket is arranged between the mounting ring 53 and the outwardly extending edge 31, and the sealing is achieved by compressing the sealing gasket.

[0060] In order to facilitate the rotation of the adjustable nozzle 5 by the staff, in the embodiment, a circular arc groove 313 is symmetrically and through formed on the outer extension edge 31 of the inner side of the fixed ring 311. The first driving member 52 comprises a connecting block 521 slidingly fitted in the circular arc groove 313 and a handle 522 fixed at the top end of the connecting block 521. The bottom end of the connecting block 521 is fixedly connected with the mounting ring 53, and the top of the outer extension edge 31 is provided with a scale (not shown). In use, the staff can rotate the handle 522 and accurately control the rotation angle of the adjustable nozzle 5 according to the scale, so that the bottom wall of the base shell 3 adaptively covers the spray hole 51 of the adjustable nozzle 5, thereby completing the accurate adjustment of the spray area of the adjustment unit 2.

[0061] In the embodiment, the second driving member 62 comprises a partition plate 621 and a counterweight ring 622. The center of the partition plate 621 has a through hole adapted to the flow nozzle 7, the inner wall of the through hole is sealingly and slidingly fitted with the outer wall of the flow nozzle 7, and the outer wall of the partition plate 621 is sealingly and slidingly fitted with the inner wall of the transition chamber 32. The counterweight ring 622 is fixedly arranged at the top of the partition plate 621, and the partition plate 621 is fixedly connected with the plugging ring 61 through a connecting piece. The flow nozzle 7 is further provided with a limiting ring 623.

[0062] When the gaseous substance enters the transition chamber 32, the gas pressure in the transition chamber 32 causes the partition plate 621 to disengage from the limiting ring 623 and remain in a stable state after rising to a certain height. When the spray area of the adjustment unit 2 is reduced, the gas pressure in the transition chamber 32 increases, pushing the partition plate 621 to move upward, and driving the plugging ring 61 to move upward synchronously through the connecting piece, thereby increasing the plugging area of the strip-shaped gas port 41 and reducing the flow of gaseous substance into the transition chamber 32 (the partition plate 621 tends to be stable after rising to a certain height). When the spray area of the adjustment unit 2 is increased, under the action of the gravity of the counterweight ring 622, the partition plate 621 moves downward, and the plugging ring 61 moves downward synchronously through the connecting piece, thereby reducing the plugging area of the strip-shaped gas port 41 and increasing the flow of gaseous substance into the transition chamber 32 (the partition plate 621 tends to be stable after descending to a certain height).

[0063] In order to avoid the temperature of the heating device being conducted into the adjusting unit 2, causing the gaseous substance to react chemically to form solid deposits in the adjusting unit 2, in the embodiment, a heat insulation assembly is arranged outside the adjustable nozzle 5. The heat insulation assembly comprises a top-open heat insulation cover 7, the top of which is welded to the bottom of the mounting ring 53. The inner wall of the heat insulation cover 7 and the outer wall of the adjustable nozzle 5 have a first equidistant gap 711, and the inner bottom wall of the heat insulation cover 7 and the bottom wall of the adjustable nozzle 5 have a second equidistant gap 712. The first equidistant gap 711 and the second equidistant gap 712 communicate to form a heat insulation cavity 71. The bottom wall of the heat insulation cover 7 is further provided with a spray pipe 72 corresponding to the spray hole 51 of the adjustable nozzle 5, and the top end of the spray pipe 72 is sealingly connected to the bottom wall of the adjustable nozzle 5. The heat insulation cover 7 is made of heat insulation material. In use, the gaseous substance discharged through the spray hole 51 can be discharged into the shell 1 through the spray pipe 72. In this process, the heat insulation cover 7 covers the outside of the adjustable nozzle 5, plays a heat insulation role, and avoids the chemical reaction of the gaseous substance in the adjustable nozzle 5 and the transition cavity 32 to form solid deposits.

[0064] Further, the adjustable nozzle 5 is symmetrically provided with passages penetrating the mounting ring 53 and the connecting block 521, and the two passages are respectively a liquid inlet passage 54 and a liquid outlet passage 55. The liquid inlet passage 54 and the liquid outlet passage 55 are both in communication with the heat insulation cavity 71 and connected with a cooling liquid circulating device (not shown) outside. In use, the cooling liquid circulating device guides the cooling liquid into the heat insulation cavity 71 from the liquid inlet passage 54, and then discharges it from the liquid outlet passage 55, so that the heat insulation cavity 71 is filled with circulating cooling liquid. A condensation layer is formed by the cooling liquid in the heat insulation cavity 71, which blocks the heat transfer on one hand and controls the temperature of the adjustable nozzle 5 on the other hand, avoiding the chemical reaction of the gaseous substance in the adjustable nozzle 5 and the transition cavity 32 due to the excessively high temperature to form solid deposits.

[0065] Further, the adjustable nozzle 5 comprises a cylindrical body 56, which is threadedly connected with the compression ring 312. The spray hole 51 is arranged on the cylindrical body 56, and the cylindrical body 56 and the heat insulation cover 7 jointly form the heat insulation cavity 71. This design enables the cylindrical body 56 and the mounting ring 53 to be disassembled, facilitating the periodic maintenance and cleaning work in the heat insulation cavity 71.

[0066] The above describes only the preferred specific embodiments of the present application, but the protection scope of the present application is not limited thereto, and any person skilled in the art can make equivalent replacements or changes to the technical solutions and the inventive concept of the present application within the technical range disclosed by the present application, which should be covered within the protection scope of the present application.

Claims

1. A CVD vacuum reactor with pneumatic seal, comprising a shell, a gas inlet pipe, a regulating unit and a placing unit, a heating device is installed in the shell, and a mounting hole is formed in the top end of the shell, the gas inlet pipe transports gaseous material into the shell through the regulating unit at the mounting hole, the placing unit is installed in the shell, and a feeding door is installed on the side wall of the shell; characterized in that, The adjusting unit comprises a base shell, a flow nozzle, an adjustable nozzle and an adaptive flow adjusting assembly; The edge of the bottom of the base shell extends outward to form an extended edge capable of completely covering the mounting hole, the base shell is mounted on the top of the shell through the extended edge and blocks the mounting hole, and the inside of the base shell is hollow to form a transition cavity; The output end of the air inlet pipe is connected with the top end of the flow nozzle, the bottom end of the flow nozzle is blocked and arranged to vertically extend through the center of the top wall of the base shell into the transition cavity, and a plurality of strip-shaped air ports are uniformly arranged on the outer wall of the bottom end of the flow nozzle in the circumferential direction; the bottom wall of the base shell is provided with a cross-shaped slot, the cross-shaped slot is composed of four strip-shaped slots in the shape of right-angled triangles, and the four strip-shaped slots are arranged perpendicular to each other with the right-angled vertexes as the common center point; The adjustable nozzle is sealingly and rotatably arranged on the extended edge of the base shell, the top surface of the adjustable nozzle is tightly attached to the bottom wall of the base shell, a plurality of jet holes are arranged in a cross-shaped array at the positions corresponding to the cross-shaped slot of the adjustable nozzle, and the adjustable nozzle is further connected with a first driving member for driving the rotation of the adjustable nozzle; The adaptive flow adjusting assembly comprises a blocking ring sealingly and slidingly arranged at the strip-shaped air port of the flow nozzle and a second driving member, and the second driving member is used to drive the blocking ring to slide to adaptively adjust the blocking area of the strip-shaped air port, so that the air pressure in the transition cavity is at a preset air pressure value.

2. The CVD vacuum reactor with pneumatic seal according to claim 1, characterized in that, The base shell comprises an upper cover body and a lower cover body which are detachably connected, the upper cover body and the lower cover body are both in the shape of a columnar flat structure, the center position of the upper cover body is provided with an adaptive hole matched with the flow nozzle, and the outer wall of the flow nozzle is threadedly matched with the inner wall of the adaptive hole.

3. The CVD vacuum reactor with integrated pneumatic seal according to claim 1, characterized in that The bottom of the extended edge is provided with a fixing ring matched with the mounting hole, the edge of the top of the adjustable nozzle extends outward to form a mounting ring matched with the fixing ring, and the inner side of the fixing ring is threadedly connected with a pressing ring abutting against the mounting ring.

4. The CVD vacuum reactor with pneumatic seal according to claim 1, characterized in that, The first driving member comprises a connecting block slidingly matched in a circular arc slot in the inner side of the fixing ring and a handle fixed at the top end of the connecting block, the bottom end of the connecting block is fixedly connected with the mounting ring, and the top of the extended edge is provided with a scale.

5. The CVD vacuum reactor with pneumatic seal according to claim 1, characterized in that, The second driving member comprises a partition plate and a counterweight ring, the center of the partition plate is provided with a through hole matched with the flow nozzle, the inner wall of the through hole is sealingly and slidingly matched with the outer wall of the flow nozzle, the outer wall of the partition plate is sealingly and slidingly matched with the inner wall of the transition cavity, the counterweight ring is fixedly arranged at the top of the partition plate, the partition plate is fixedly connected with the blocking ring through a connecting piece, and a limiting ring is further arranged on the flow nozzle.

6. The CVD vacuum reactor with pneumatic seal according to claim 1, characterized in that, The outer side of the adjustable nozzle is provided with a heat insulation assembly, the heat insulation assembly comprises a heat insulation cover with an open top, the top of the heat insulation cover is welded to the bottom of the mounting ring, there is a first equidistance gap between the inner wall of the heat insulation cover and the outer wall of the adjustable nozzle, there is a second equidistance gap between the inner bottom wall of the heat insulation cover and the bottom wall of the adjustable nozzle, the first equidistance gap and the second equidistance gap are communicated to form a heat insulation cavity, and a nozzle corresponding to the jet hole of the adjustable nozzle is further arranged on the bottom wall of the heat insulation cover, and the top end of the nozzle is sealingly and matchingly connected with the bottom wall of the adjustable nozzle.

7. The CVD vacuum reactor with integrated pneumatic seal according to claim 6, characterized in that The heat insulation cover is made of heat insulation material.

8. The CVD vacuum reactor with pneumatic seal according to claim 6, characterized in that The adjustable nozzle is symmetrically provided with passages penetrating the mounting ring and the connecting block, two passages are respectively liquid inlet passage and liquid outlet passage, the liquid inlet passage and the liquid outlet passage are communicated with the heat insulation cavity and connected with the cooling liquid circulating equipment outside.

9. The CVD vacuum reactor with pneumatic seal according to claim 6, characterized in that, The adjustable nozzle comprises a columnar body, the columnar body is threadedly connected with the compression ring, the jet hole is arranged on the columnar body, and the columnar body and the heat insulation cover jointly form the heat insulation cavity.

10. A CVD vacuum reactor with integrated pneumatic seal according to any one of claims 1 to 9, characterized in that The mounting ring is provided with a sealing gasket between the outer extension edge, and sealing is realized by compressing the sealing gasket.

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