A distributed symmetrical four-mass gyroscope structure

Abstract

The present invention provides a distributed symmetrical four-mass gyroscope structure, comprising a base, two substructures, a drive coupling mechanism, and a detection coupling mechanism, wherein the two substructures are connected by the drive coupling mechanism and the detection coupling mechanism; each substructure comprises two sensitive mass blocks, a drive assembly, and a detection assembly, wherein the two sensitive mass blocks are connected by a detection transmission assembly, wherein the detection transmission assembly is further connected to a plurality of detection assemblies arranged between the two sensitive mass blocks, and the detection transmission assembly comprises a plurality of symmetrically arranged vibration transmission beams, wherein one end of each vibration transmission beam is connected to the corresponding detection assembly and the other end is connected to the corresponding sensitive mass block. The invention, through the design of the detection transmission assembly, enables the detection assembly connected thereto to move in the opposite direction, thereby enabling the detection of the gyroscope structure to operate in the reverse mode, eliminating common-mode error signals, and simultaneously eliminating low-order interference modes in the detection direction, thereby improving the environmental adaptability of the gyroscope.

Description

Technical Field

[0001] The present invention belongs to the technical field of inertial sensors, and in particular relates to a distributed symmetrical four-mass gyroscope structure. Background Art

[0002] Inertial sensors include accelerometers, gyroscopes, and their single-, dual-, and tri-axis combinations. Accelerometers are used to detect the acceleration signals of an object in the three independent axes of the carrier coordinate system, and gyroscopes are used to detect the angular velocity signals of the carrier relative to the navigation coordinate system. By measuring the angular velocity and acceleration of an object in three-dimensional space, they can accurately characterize the object's posture and have very important application value in navigation.

[0003] In existing four-mass gyroscope structures, the coupling method between different mass blocks is generally elastic beam connection, which enables the movement of the mass blocks to be linked. However, this coupling method between different mass blocks causes the same-direction interference mode to appear before the reverse working mode. The existence of the same-direction interference mode is not conducive to improving the environmental adaptability of the gyroscope. Summary of the Invention

[0004] The purpose of the present invention is to provide a distributed symmetrical four-mass gyroscope structure, which can at least solve some of the defects existing in the prior art.

[0005] To achieve the above object, the present invention adopts the following technical solutions:

[0006] A distributed symmetrical four-mass gyroscope structure comprises a base, two substructures, a drive coupling mechanism, and a detection coupling mechanism, wherein the two substructures are connected via the drive coupling mechanism and the detection coupling mechanism; each substructure comprises two sensitive mass blocks, a drive assembly, and a detection assembly, wherein the two sensitive mass blocks are connected via a detection transfer assembly, wherein the detection transfer assembly is further connected to a plurality of detection assemblies arranged between the two sensitive mass blocks, and wherein the detection transfer assembly comprises a plurality of symmetrically arranged vibration transfer beams, wherein one end of each vibration transfer beam is connected to the detection assembly on the corresponding side, and the other end is connected to the sensitive mass block on the corresponding side.

[0007] Furthermore, the vibration transfer beam has an asymmetric structure at both ends.

[0008] Furthermore, both ends of the vibration transmission beam have vibration elastic parts that can be stretched and retracted along the driving direction.

[0009] Furthermore, the detection transmission component also includes a transmission vibration spring, one end of which is connected to the detection component and the other end of which is anchored on the base.

[0010] Furthermore, the detection component is connected to the sensitive mass block via a vibration decoupling elastic component, and one end of the vibration transfer beam connected to the sensitive mass block is connected to the vibration decoupling elastic component.

[0011] Furthermore, the detection component includes a detection frame and at least one group of detection movable comb teeth and at least one group of detection fixed comb teeth arranged in the detection frame. The detection movable comb teeth and the detection fixed comb teeth correspond to each other one by one and extend along the driving direction. The detection movable comb teeth are connected to the detection frame, and the detection fixed comb teeth are anchored on the base. One end of the detection frame along the driving direction is connected to the detection transmission component, and the other end is connected to a first vibrating elastic part that can be extended and retracted along the driving direction.

[0012] Furthermore, the detection component also includes a tuning capacitor for adjusting the vibration frequency of the sensitive mass block in the detection direction, the tuning capacitor includes at least one group of tuning movable comb teeth and at least one group of tuning fixed comb teeth, the tuning movable comb teeth and the tuning fixed comb teeth correspond one to one and extend along the detection direction, the tuning movable comb teeth are connected to the detection frame, and the tuning fixed comb teeth are anchored on the base.

[0013] Furthermore, the detection component also includes a detection force-applying capacitor for a closed loop, and the detection force-applying capacitor includes at least one group of force-applying dynamic comb teeth and at least one group of force-applying fixed comb teeth. The force-applying dynamic comb teeth and the force-applying fixed comb teeth correspond one to one and extend along the driving direction. The force-applying dynamic comb teeth are connected to the detection frame, and the force-applying fixed comb teeth are anchored to the base.

[0014] Furthermore, the driving component includes a driving capacitor and a driving detection capacitor respectively distributed at both ends of the driving direction of the sensitive mass block; the driving capacitor and the driving detection capacitor are connected to the sensitive mass block through a driving vibration transfer beam, and are anchored to the base through a second vibration elastic member.

[0015] Furthermore, the two driving capacitors in a single substructure are connected via an inverse linkage mechanism, the driving detection capacitors of the two substructures are symmetrically connected via the driving coupling mechanism, and the driving capacitors of the two substructures are symmetrically arranged.

[0016] Compared with the prior art, the present invention has the following beneficial effects:

[0017] (1) The present invention utilizes the rotational motion of the vibration transmission beam of the detection transmission component through the design of the detection transmission component to make the detection component connected thereto move in the reverse direction, thereby making the detection operation of the gyroscope structure in the reverse mode, eliminating the common-mode error signal. At the same time, there is no low-order interference mode in the detection direction, thereby improving the environmental adaptability of the gyroscope; further, through the design of the vibration transmission beam in the form of an asymmetric structure, the vibration transmission beam is more likely to rotate, thereby improving the response speed of the gyroscope.

[0018] (2) The detection component of the present invention is designed with a detection force capacitor, so that the gyroscope structure can work in a position closed loop state, further improving the application range of the gyroscope.

[0019] (3) The present invention arranges multiple groups of comb teeth to double the differential capacitance formed during vibration, thereby increasing the capacitance detection signal and improving the capacitance signal detection sensitivity.

[0020] The present invention will be described in further detail below with reference to the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] Figure 1 is a schematic diagram of a distributed symmetrical four-mass gyroscope structure of the present invention;

[0022] Figure 2 is a schematic diagram of a single substructure in the distributed symmetrical four-mass gyroscope structure of the present invention;

[0023] Figure 3 Schematic diagram of the detection and transmission components in the distributed symmetrical four-mass gyroscope structure of the present invention;

[0024] Figure 4 It is a schematic diagram of the vibration transmission beam structure of the detection and transmission component in the present invention;

[0025] Figure 5 It is a structural schematic diagram of the detection coupling mechanism in the distributed symmetrical four-mass gyroscope structure of the present invention;

[0026] Figure 6 Schematic diagram of the vibration of the sensitive mass block of the distributed symmetrical four-mass gyroscope structure of the present invention along the driving direction;

[0027] Figure 7 It is a schematic diagram of the vibration of the sensitive mass block of the distributed symmetrical four-mass gyroscope structure of the present invention along the detection direction.

[0028] Explanation of reference numerals: 1. Substructure; 2. Driving coupling mechanism; 3. Detection coupling mechanism; 4. Detection transmission assembly; 5. Reverse connecting rod mechanism; 6. Sensitive mass block; 7. Drive vibration transmission beam; 8. First driving frame; 9. Drive fixed comb teeth; 10. Drive movable comb teeth; 11. Connecting rod connecting spring; 12. Connecting rod swing spring; 13. First vibration elastic member; 14. Vibration decoupling straight beam; 15. U-shaped beam; 16. Connecting beam; 17. Positive Cross-correction structure; 18. Second vibration elastic member; 19. Second driving frame; 20. Drive detection fixed comb teeth; 21. Drive detection movable comb teeth; 22. Detection frame; 23. Detection movable comb teeth; 24. Detection fixed comb teeth; 25. Tuning fixed comb teeth; 26. Tuning movable comb teeth; 27. Force-applying fixed comb teeth; 28. Force-applying movable comb teeth; 29. ​​Vibration transmission beam; 30. Vibration transmission spring; 31. Vibration elastic part; 32. Anchor point fixing beam; 33. Straight beam. DETAILED DESCRIPTION

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0030] In the description of the present invention, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as limiting the present invention.

[0031] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "install", "connect" and "connect" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, a conflicting connection or an integral connection. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0032] The terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, features specified as "first" or "second" may explicitly or implicitly include one or more of such features; and in the description of the present invention, unless otherwise specified, "plurality" means two or more.

[0033] like Figures 1 to 7 As shown, this embodiment provides a distributed symmetrical four-mass gyroscope structure, including a base (not shown in the figure), two substructures 1, a drive coupling mechanism 2 and a detection coupling mechanism 3. The two substructures 1 are symmetrically arranged in the drive direction and are connected by the drive coupling mechanism 2 and the detection coupling mechanism 3; each substructure 1 includes two sensitive mass blocks 6, a drive component and a detection component. The two sensitive mass blocks 6 are relatively arranged in the detection direction. The drive components are distributed in the drive direction of the sensitive mass blocks 6. Multiple detection components can be designed. In this embodiment, two detection components are taken as an example. The two detection components are relatively arranged between the two sensitive mass blocks 6 in the drive direction. The two detection components are connected by a detection transmission component 4, so that the two detection components move in opposite directions under the detection working mode. Among them, the driving direction in this embodiment is the movement direction of the sensitive mass block 6 in the driving state, that is, Figure 1 The detection direction is the movement direction of the sensitive mass block 6 in the detection state, that is, Figure 1 In this embodiment, when there is an external angular velocity input, the four sensitive masses 6 are subjected to the Coriolis force, which causes vibration in the detection direction. The movement of the sensitive masses 6 drives the detection transmission component 4 to move accordingly. Since the two groups of detection components in the single substructure 1 are connected through the detection transmission component 4, the movement of the detection transmission component 4 can cause the two detection components to move in opposite directions, thereby making the detection of the gyro structure work in the reverse mode, eliminating the common mode error signal. At the same time, there is no low-order interference mode in the detection direction, which improves the environmental adaptability of the gyro.

[0034] As a specific implementation method, Figure 3 and Figure 4 As shown, the detection transmission assembly 4 includes multiple symmetrically arranged vibration transmission beams 29. In this embodiment, four vibration transmission beams 29 are specifically designed. One end of each vibration transmission beam 29 is connected to the corresponding detection assembly, and the other end is connected to the corresponding sensitive mass block 6. When the sensitive mass block 6 moves along the detection direction, it will generate a force on the vibration transmission beam 29 connected to it. This force is transmitted to the detection assembly through the vibration transmission beam 29, causing the detection assembly to move accordingly; for example, Figure 7 When the sensitive mass block 6 in the upper right center moves downward, it will generate a downward force on the upper ends of the two vibration transfer beams 29 connected to it, thereby pushing the two vibration transfer beams 29 to rotate. Since the two vibration transfer beams 29 are arranged symmetrically, the rotation directions of the two vibration transfer beams 29 are opposite, which in turn pushes the two detection components connected to the two vibration transfer beams 29 to move in opposite directions (i.e., left and right), realizing the detection operation of the gyro structure in the reverse mode.

[0035] Preferably, Figure 4As shown, the vibration transmission beam 29 has an asymmetric structure at both ends, which makes it easier for the vibration transmission beam 29 to rotate. Furthermore, vibration elastic parts 31 that can be extended and retracted along the driving direction are provided at both ends of the vibration transmission beam 29.

[0036] Optionally, the detection component is connected to the sensitive mass block 6 through a vibration decoupling elastic component, and one end of the vibration transfer beam 29 connected to the sensitive mass block 6 is connected to the vibration decoupling elastic component; preferably, the two vibration transfer beams 29 connected to the same sensitive mass block 6 are connected to the same point of the vibration decoupling elastic component, so as to ensure that the two vibration transfer beams 29 are subjected to the same force, thereby making the two detection components move synchronously in opposite directions.

[0037] Specifically, the vibration decoupling elastic component includes a vibration decoupling straight beam 14 and a U-shaped beam 15. The vibration decoupling straight beam 14 is located between the sensitive mass block 6 and the detection component. The two ends of the vibration decoupling straight beam 14 are respectively connected to the two detection components. The opening of the U-shaped beam 15 faces one side of the vibration decoupling straight beam 14. The two ends of the U-shaped beam 15 are connected to the sensitive mass block 6. The bottom center of the U-shaped beam 15 is connected to the center of the vibration decoupling straight beam 14 via a connecting beam 16. At the same time, the end of the vibration transmission beam 29 is also connected to the center of the vibration decoupling straight beam 14. Specifically, the vibration decoupling straight beam 14 and the U-shaped beam 15 can both expand, contract, bend and deform when subjected to an applied force.

[0038] Optional, such as Figure 3 As shown, the detection transmission component 4 also includes a transmission vibration spring 30, one end of which is connected to the detection component and the other end of which is anchored to the base. The detection component is anchored to the base by the transmission vibration spring 30 to ensure the stability of the detection component movement. Since the detection component moves along the driving direction (i.e., the left and right direction) in this embodiment, the transmission vibration spring 30 also expands and contracts along the driving direction. Optimally, four transmission vibration springs 30 are symmetrically arranged in the space enclosed by the four vibration transmission beams 29 to improve the compactness of the gyro structure.

[0039] As a specific implementation method, Figure 2As shown, the detection component includes a detection frame 22 and at least one group of detection movable comb teeth 23 and at least one group of detection fixed comb teeth 24 arranged in the detection frame 22. The detection movable comb teeth 23 and the detection fixed comb teeth 24 correspond to each other one by one and extend along the driving direction. The detection movable comb teeth 23 and the detection fixed comb teeth 24 constitute a detection capacitor. The detection movable comb teeth 23 are connected to the detection frame 22, and the detection fixed comb teeth 24 are anchored on the base. One end of the detection frame 22 along the driving direction is connected to the detection transmission component 4. Specifically, the middle part of the detection frame 22 is connected to the center of the vibration decoupling straight beam 14 of the vibration decoupling elastic component through the vibration transfer beam 29. At the same time, the middle part of the detection frame 22 is also anchored on the base through the transmission vibration spring 30. The other end of the detection frame 22 along the driving direction is connected to the first vibration elastic member 13 that can be extended and retracted along the driving direction. The first vibration elastic member 13 can be extended and retracted along the driving direction (i.e., the left and right direction). The first vibration elastic member 13 can adopt but is not limited to a vibration spring, a retractable and bendable U-shaped beam or O-shaped beam, etc. Since the two detection components connected to the same detection transmission component 4 move in opposite directions, the capacitance values ​​at the left and right ends increase and decrease respectively, and the difference between the capacitances at the two ends forms a differential capacitance, which increases the capacitance detection signal. At the same time, the common mode error signal is subtracted by the difference. The comb array on the four detection frames 22 further increases the capacitance detection signal and improves the capacitance detection sensitivity.

[0040] Optionally, the detection frame 22 is designed as an outer frame and an inner frame, the two ends of the outer frame along the driving direction are anchored on the base, the vibration decoupling straight beam 14 of the vibration decoupling elastic component is connected to the outer frame of the detection frame 22, the end of the inner frame close to the detection transmission component 4 is connected to the vibration transmission beam 29 and the transmission vibration spring 30 of the detection transmission component 4, and the end of the inner frame away from the detection transmission component 4 is connected to the outer frame through the first vibration elastic member 13, the detection movable comb teeth 23 and the detection fixed comb teeth 24 are both located inside the inner frame, and the detection movable comb teeth 23 are connected to the inner frame; with this structural design, when the sensitive mass block 6 moves along the detection direction (i.e., the up and down direction), since the detection frame 22 is connected to the sensitive mass block 6 through the outer frame, and the inner frame of the detection frame 22 is not directly connected to the sensitive mass block 6, the inner frame of the detection frame 22 will not move up and down with the sensitive mass block 6, but will only move left and right under the action of the vibration transmission beam 29 to generate detection capacitance, thereby improving detection sensitivity.

[0041] Optionally, the detection component also includes a tuning capacitor for adjusting the vibration frequency of the sensitive mass block 6 in the detection direction. Specifically, the tuning capacitor includes at least one group of tuning movable comb teeth 26 and at least one group of tuning fixed comb teeth 25. The tuning movable comb teeth 26 and the tuning fixed comb teeth 25 correspond one to one and extend along the detection direction. The tuning movable comb teeth 26 are connected to the detection frame 22, and the tuning fixed comb teeth 25 are anchored to the base.

[0042] Optionally, the detection assembly further includes a closed-loop detection force capacitor, which enables the gyro structure to operate in a closed-loop state, thereby increasing the application range of the gyro structure. Specifically, the detection force capacitor includes at least one set of force-adding dynamic comb teeth 28 and at least one set of force-adding fixed comb teeth 27. The force-adding dynamic comb teeth 28 and the force-adding fixed comb teeth 27 correspond to each other one-to-one and extend along the driving direction. The force-adding dynamic comb teeth 28 are connected to the detection frame 22, and the force-adding fixed comb teeth 27 are anchored to the base.

[0043] The two adjacent detection components between the two substructures 1 are connected via a detection coupling mechanism 3. In some embodiments, for example Figure 1 and Figure 5 As shown, the detection coupling mechanism 3 includes two groups of anchor fixed beam groups arranged symmetrically in the upper and lower parts, and a straight beam 33 is provided between the two groups of anchor fixed beam groups. The straight beam 33 is extended along the driving direction, and the two ends of the straight beam 33 are respectively connected to the middle of the two central detection components. Each group of anchor fixed beam groups includes two anchor fixed beams 32 arranged symmetrically in the left and right parts, and the anchor fixed beams 32 are extended along the detection direction. One end of the anchor fixed beam 32 is anchored on the base, and its anchoring point is arranged close to the straight beam 33. The other end of the anchor fixed beam 32 is connected to the end of the two central detection components. Specifically, the two anchor fixed beams 32 located above the straight beam 33 are respectively connected to the upper ends of the detection frames 22 of the two central detection components, and the two anchor fixed beams 32 located below the straight beam 33 are respectively connected to the lower ends of the detection frames 22 of the two detection components.

[0044] As a specific implementation method, Figure 2As shown, the drive assembly includes drive capacitors and drive detection capacitors, respectively, distributed at both ends of the sensitive mass 6 in the drive direction. Both the drive capacitors and the drive detection capacitors are connected to the sensitive mass 6 via a drive vibration transmission beam 7 and anchored to the substrate via a second vibration elastic member 18. The drive detection capacitors of the two substructures 1 are symmetrically arranged and connected via the drive coupling mechanism 2. The drive capacitors of the two substructures 1 are located outside the two substructures 1 and are symmetrically arranged. Furthermore, the two drive capacitors in the same substructure 1 are connected via an inverse linkage mechanism 5. Under this structural design, when the gyro structure is in the driving working mode, the sensitive mass block 6 vibrates due to the electrostatic force generated by the driving capacitor. Since the driving capacitors of the two substructures 1 are symmetrically arranged, the electrostatic forces generated by them act in opposite directions, so the sensitive mass blocks 6 of the two substructures 1 move in opposite directions. At the same time, since the two driving capacitors in the same substructure 1 are connected by the reverse linkage mechanism 5, the two sensitive mass blocks 6 in the same substructure 1 also move in opposite directions. At this time, the capacitance values ​​of the left and right driving detection capacitors connected by the same driving coupling mechanism 2 along the driving direction increase and decrease respectively, and the difference between the two end capacitances forms a differential capacitance, which increases the driving capacitance detection capability. At the same time, the differential subtraction subtracts the common-mode error signal, improving the capacitance detection sensitivity.

[0045] Specifically, the driving capacitor includes a first driving frame 8 and at least one group of driving movable comb teeth 10 and at least one group of driving fixed comb teeth 9 provided in the first driving frame 8. The driving movable comb teeth 10 and the driving fixed comb teeth 9 correspond one-to-one and extend along the driving direction. The driving fixed comb teeth 9 are anchored on the substrate, and the driving movable comb teeth 10 are connected to the first driving frame 8. The driving detection capacitor includes a second driving frame 19 and at least one group of driving detection movable comb teeth 21 and at least one group of driving detection fixed comb teeth 20 provided in the second driving frame 19. The driving detection movable comb teeth 21 and the driving detection fixed comb teeth 20 correspond one-to-one and extend along the driving direction. The driving detection fixed comb teeth 20 are anchored on the substrate, and the driving detection movable comb teeth 21 are connected to the second driving frame 19. Among them, the middle parts of the first driving frame 8 and the second driving frame 19 are anchored on the base through the second vibration elastic member 18. The second vibration elastic member 18 can be extended and retracted along the driving direction. It can adopt but is not limited to a vibration spring, a retractable and bendable U-shaped beam or O-shaped beam, etc. Through the setting of the second vibration elastic member 18, the mobility of the first driving frame 8 and the second driving frame 19 along the driving direction is guaranteed. At the same time, the design of anchoring the second vibration elastic member 18 ensures the stability of the movement of the first driving frame 8 and the second driving frame 19 along the driving direction; the ends of the first driving frame 8 and the second driving frame 19 are connected to the sensitive mass block 6 through the driving vibration transfer beam 7.

[0046] Optionally, the drive coupling mechanism 2 is a folded beam structure extending and folding along the drive direction, and the two ends of the folded beam structure are respectively connected to two adjacent drive detection capacitors along the drive direction. In this embodiment, the drive coupling mechanism 2 adopts two groups of W-shaped folded beam structures formed by two U-shaped beams connected side by side. The two groups of W-shaped folded beams are arranged symmetrically up and down, and the two ends of the upper W-shaped folded beam are respectively connected to the upper ends of the two adjacent drive detection capacitors, and the two ends of the lower W-shaped folded beam are respectively connected to the lower ends of the two adjacent drive detection capacitors. The design of this drive coupling mechanism 2 ensures that the two drive detection capacitors connected by the same drive coupling mechanism 2 move in opposite directions in the drive direction.

[0047] Optionally, the reverse linkage mechanism 5 includes a linkage body, both ends of which are connected to the driving capacitor on the corresponding side through a linkage connecting spring 11, and the middle part of the linkage body is anchored to the base through a linkage swing spring 12. When the substructure 1 vibrates in the driving direction, the two sensitive mass blocks 6 in the same substructure 1 move in opposite directions through the swing of the reverse linkage mechanism 5. Since the movement direction of the sensitive mass blocks 6 connected at both ends of the reverse linkage mechanism 5 is along the driving direction, the linkage connecting spring 11 expands and contracts along the driving direction, and the linkage swing spring 12 expands and contracts along the swing direction of the linkage body.

[0048] Preferably, the substructure 1 further includes an orthogonal correction structure 17 for compensating for orthogonal stiffness coupling errors. Two sets of orthogonal correction structures are provided for each sensitive mass block 6, symmetrically arranged along the driving direction. Each set of orthogonal correction structures 17 includes orthogonal movable comb teeth and orthogonal fixed comb teeth. The orthogonal fixed comb teeth are anchored to the base, and the orthogonal movable comb teeth are connected to the sensitive mass block 6. Specifically, a square frame is provided on the sensitive mass block 6 for arranging the orthogonal correction structure 17. The orthogonal movable comb teeth are symmetrically arranged on the left and right sides of the square frame. The number of orthogonal movable comb teeth can be designed according to actual needs. This embodiment uses four orthogonal movable comb teeth as an example. The four orthogonal movable comb teeth are symmetrically arranged in pairs on the left and right sides of the square frame. The anchor point of the orthogonal fixed comb teeth is located at the center of the square frame. The orthogonal fixed comb teeth have two teeth, extending from the anchor point to the left and right sides, respectively, and located between the two orthogonal movable comb teeth on the corresponding side, and the distance between the two orthogonal movable comb teeth is unequal.

[0049] It should be noted that, in the present invention, Figure 6 and Figure 7 This is a schematic diagram of the final motion state of the movable parts of a distributed symmetrical four-mass gyroscope structure vibrating along the driving and detection directions. To reflect the motion effect, the movement displacement of the movable parts in the figure is exaggerated.

[0050] The above examples are merely illustrative of the present invention and do not limit the scope of protection of the present invention. Any design that is identical or similar to the present invention falls within the scope of protection of the present invention.

Claims

1. A distributed symmetrical four-mass gyroscope structure, characterized by: It includes a base, two substructures, a drive coupling mechanism and a detection coupling mechanism, and the two substructures are connected by the drive coupling mechanism and the detection coupling mechanism; each substructure includes two sensitive mass blocks, a drive component and a detection component, and the two sensitive mass blocks are connected by a detection transfer component, and the detection transfer component is also connected to multiple detection components arranged between the two sensitive mass blocks. The detection transfer component includes multiple symmetrically arranged vibration transfer beams, one end of each vibration transfer beam is connected to the corresponding side detection component, and the other end is connected to the corresponding side sensitive mass block.

2. The distributed symmetrical four-mass gyroscope structure according to claim 1, wherein: The vibration transmission beam has an asymmetrical structure at both ends.

3. The distributed symmetrical four-mass gyroscope structure according to claim 1 or 2, characterized in that: Both ends of the vibration transmission beam have vibration elastic parts that can be stretched and retracted along the driving direction.

4. The distributed symmetrical four-mass gyroscope structure according to claim 1, wherein: The detection transmission component also includes a transmission vibration spring, one end of which is connected to the detection component and the other end of which is anchored on the base.

5. The distributed symmetrical four-mass gyroscope structure according to claim 1, wherein: The detection component is connected to the sensitive mass block via a vibration decoupling elastic component, and one end of the vibration transfer beam connected to the sensitive mass block is connected to the vibration decoupling elastic component.

6. The distributed symmetrical four-mass gyroscope structure according to claim 1, wherein: The detection component includes a detection frame and at least one group of detection movable comb teeth and at least one group of detection fixed comb teeth arranged in the detection frame. The detection movable comb teeth and the detection fixed comb teeth correspond to each other one by one and extend along the driving direction. The detection movable comb teeth are connected to the detection frame, and the detection fixed comb teeth are anchored on the base. One end of the detection frame along the driving direction is connected to the detection transmission component, and the other end is connected to a first vibrating elastic member that can be extended and retracted along the driving direction.

7. The distributed symmetrical four-mass gyroscope structure according to claim 6, wherein: The detection component also includes a tuning capacitor for adjusting the vibration frequency of the sensitive mass block in the detection direction. The tuning capacitor includes at least one group of tuning movable comb teeth and at least one group of tuning fixed comb teeth. The tuning movable comb teeth and the tuning fixed comb teeth correspond one to one and extend along the detection direction. The tuning movable comb teeth are connected to the detection frame, and the tuning fixed comb teeth are anchored to the base.

8. The distributed symmetrical four-mass gyroscope structure according to claim 6, wherein: The detection component also includes a detection force-applying capacitor for a closed loop, and the detection force-applying capacitor includes at least one group of force-applying dynamic comb teeth and at least one group of force-applying fixed comb teeth. The force-applying dynamic comb teeth and the force-applying fixed comb teeth correspond one to one and extend along the driving direction. The force-applying dynamic comb teeth are connected to the detection frame, and the force-applying fixed comb teeth are anchored on the base.

9. The distributed symmetrical four-mass gyroscope structure according to claim 1, wherein: The driving component includes a driving capacitor and a driving detection capacitor respectively distributed at both ends of the driving direction of the sensitive mass block; the driving capacitor and the driving detection capacitor are connected to the sensitive mass block through a driving vibration transfer beam, and are anchored to the base through a second vibration elastic member.

10. The distributed symmetrical four-mass gyroscope structure according to claim 9, wherein: The two driving capacitors in a single substructure are connected via an inverse linkage mechanism, the driving detection capacitors of the two substructures are symmetrically connected via the driving coupling mechanism, and the driving capacitors of the two substructures are symmetrically arranged.

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