X-ray stereo imaging device and method

Abstract

The invention relates to an X-ray three-dimensional imaging device which comprises an X-ray source, a first displacement table, a rotary table, a crystal rotary table, a crystal support, a crystal, a second displacement table, a sample support and a detector, the rotary table and the crystal rotary table are arranged on the first displacement table, the crystal support is arranged on the crystal rotary table, the crystal is fixed on the crystal support, and the second displacement table is arranged on the rotary table. The sample support is arranged on the second displacement table and used for fixing a sample, and the detector is located on the downstream of the crystal and the sample. According to the X-ray stereo imaging device, images of a sample at multiple angles can be acquired at a time, so that the data acquisition time is shortened, and the efficiency is improved.

Description

Technical Field

[0001] The present invention relates to the field of X-ray imaging technology, and more particularly to an X-ray stereoscopic imaging device and method. Background Art

[0002] Currently, the mainstream method for X-ray three-dimensional imaging is X-ray computed tomography (CT) imaging technology. However, the CT imaging technology requires a sufficient amount of data to be collected by moving the source-detector device to achieve stereoscopic imaging, which is time-consuming and has low efficiency. Summary of the Invention

[0003] An object of the present invention is to provide an X-ray stereoscopic imaging device that can collect images of a sample at multiple angles in a single acquisition, thereby reducing the data acquisition time and improving the efficiency.

[0004] Based on the above object, on the one hand, the present invention provides an X-ray stereoscopic imaging device, including an X-ray source, a first displacement stage, a rotary stage, a crystal rotary stage, a crystal holder, a crystal, a second displacement stage, a sample holder, and a detector. The rotary stage and the crystal rotary stage are both disposed on the first displacement stage. The crystal holder is disposed on the crystal rotary stage. The crystal is fixed on the crystal holder. The second displacement stage is disposed on the rotary stage. The sample holder is disposed on the second displacement stage. The sample holder is used to fix a sample. The X-ray source is used to emit X-rays. The first displacement stage is configured to move the crystal and the sample so that the crystal is located in the optical path of the X-rays. The crystal rotary stage is configured to rotate the crystal to change the incident angle between the X-rays and the crystal, so that the X-rays undergo Laue diffraction when passing through the crystal. The crystal divides the X-rays into transmitted X-rays and diffracted X-rays. The rotary stage is used to rotate the second displacement stage, the sample holder, and the sample around the crystal so that the sample is located in the optical path of one of the transmitted X-rays and the diffracted X-rays or is moved out of the optical path. The second displacement stage is configured to move the sample relative to the crystal so that the sample is located in the overlapping region of the transmitted X-rays and the diffracted X-rays. The detector is located downstream of the crystal and the sample and is used to receive the transmitted X-rays and diffracted X-rays passing through the crystal or the sample and perform imaging.

[0005] Optionally, the first displacement stage includes an X-axis translation stage, a first Y-axis translation stage, and a first Z-axis translation stage arranged in sequence from bottom to top. The X-axis translation stage is configured to translate the crystal and the sample along the X axis. The first Y-axis translation stage is configured to translate the crystal and the sample along the Y axis. The first Z-axis translation stage is configured to translate the crystal and the sample along the Z axis. Both the crystal turntable and the rotating stage are located on the first Z-axis translation stage.

[0006] Optionally, a through hole is provided on the rotating stage. The crystal turntable passes through the through hole of the rotating stage and forms the rotation axis of the rotating stage. A handle is provided on the rotating stage, and the handle is used to push the rotating stage to rotate around the crystal turntable.

[0007] Optionally, the second displacement stage includes a second Y-axis translation stage, a second Z-axis translation stage, and a sample turntable arranged in sequence from bottom to top. The second Y-axis translation stage is configured to translate the sample along the Y axis. The second Z-axis translation stage is configured to translate the sample along the Z axis. The sample turntable is configured to rotate the sample around the Z axis. The second Y-axis translation stage is provided on the rotating stage.

[0008] Optionally, a first fixing portion is provided on the crystal support. The first fixing portion is located at an end of the crystal support away from the crystal turntable, and the crystal is fixed to the first fixing portion.

[0009] Optionally, a second fixing portion is provided on the sample support. The second fixing portion is located at an end of the sample support away from the second displacement stage, and the sample is fixed to the second fixing portion.

[0010] Optionally, the detection surface of the detector is set to be perpendicular to the angular bisector of the angle between the transmitted X-ray and the diffracted X-ray.

[0011] Optionally, the detector is provided on a detector turntable, and the detector turntable is configured to rotate the detector around the Z axis.

[0012] Optionally, the light fields formed by the transmitted X-ray and the diffracted X-ray on the detector are the same.

[0013] On the other hand, the present invention provides an X-ray stereoscopic imaging method, which includes:

[0014] Providing an X-ray stereoscopic imaging device as described above;

[0015] Moving the sample support away from the crystal through the second displacement stage, moving the sample support out of the optical path through the rotating stage, installing the sample on the sample support, and then turning on the X-ray source so that the X-ray source emits X-rays;

[0016] Move the crystal through the first displacement stage so that the crystal is located in the optical path of the X-ray;

[0017] Rotate the crystal to a preset Bragg angle through the crystal turntable so that when the X-ray irradiates on the crystal, Laue diffraction is formed, and the crystal divides the X-ray into transmitted X-ray and diffracted X-ray;

[0018] Make the crystal rotate slightly through the crystal turntable so that the brightness and size of the transmitted X-ray spot and the diffracted X-ray spot formed on the detector are the same;

[0019] Rotate the sample around the crystal through the rotating stage and place it in the optical path of one of the transmitted X-ray and the diffracted X-ray, and then move the sample through the second displacement stage so that the sample is located in the overlapping area of the transmitted X-ray and the diffracted X-ray;

[0020] Detect the image data of the sample at two different angles through the detector;

[0021] Use the binocular vision algorithm to perform stereoscopic imaging on the image data of the sample at two different angles detected by the detector to obtain a stereoscopic image of the sample.

[0022] For the X-ray stereoscopic imaging device and method of the present invention, the detector can obtain image data without irreparable distortion at two different angles of the sample in one acquisition, thereby doubling the data acquisition speed and significantly improving the efficiency; collecting image data at two angles at one time, under the same conditions, more information inside the sample can be obtained by single exposure, and it is expected to obtain three-dimensional information of the sample through single imaging, and then realize in-situ dynamic three-dimensional observation, opening up a new path for the dynamic research of three-dimensional objects. Description of the Drawings

[0023] Figure 1 It is the front view of the X-ray stereoscopic imaging device according to the embodiment of the present invention;

[0024] Figure 2 It is the top view of the X-ray stereoscopic imaging device according to the embodiment of the present invention;

[0025] Figure 3 It is the structural diagram of the first displacement stage of the X-ray stereoscopic imaging device according to the embodiment of the present invention;

[0026] Figure 4 It is the flowchart of the X-ray stereoscopic imaging method according to another embodiment of the present invention. Detailed Embodiments

[0027] The following combines the drawings to give the preferred embodiments of the present invention and describes them in detail.

[0028] As Figure 1 and Figure 2 shown, an embodiment of the present invention provides an X-ray stereoscopic imaging device, which includes an X-ray source (not shown in the figure), a first displacement stage 100, a rotary stage 140, a crystal rotary stage 200, a crystal holder 300, a crystal 400, a second displacement stage 500, a sample holder 600, and a detector 700. The rotary stage 140 and the crystal rotary stage 200 are disposed on the first displacement stage 100. The crystal holder 300 is disposed on the crystal rotary stage 200. The crystal 400 is fixed on the crystal holder 300. The second displacement stage 500 is disposed on the rotary stage 140. The sample holder 600 is disposed on the second displacement stage 500. The sample holder 600 is used to fix the sample 800. The X-ray source is used to emit X-rays. The first displacement stage 100 is used to move the components located thereon. The crystal 400 and the sample 800 can be moved through the first displacement stage 100 so that the crystal 400 is located in the optical path of the X-rays. The crystal rotary stage 200 is used to rotate the crystal 400 to change the incident angle between the X-rays and the crystal 400, so that the X-rays undergo Laue diffraction when passing through the crystal 400, obtaining a transmitted X-ray beam and a diffracted X-ray beam. The rotary stage 140 is used to rotate the second displacement stage 500, the sample holder 600, and the sample 800 around the crystal 400 to adjust the position of the sample 800 relative to the crystal 400 so that the sample 800 is located in one of the optical paths of the transmitted X-rays ( Figure 2 shown by the solid line on the right side of the crystal 400 in the figure) and the diffracted X-rays ( Figure 2 shown by the dashed line in the figure) or removed from the optical path. The second displacement stage 500 is used to move the sample 800 relative to the crystal 400 so that the sample 800 is located in the overlapping region of the transmitted X-rays and the diffracted X-rays. The detector 700 is located downstream of the crystal 400 and the sample 800 and is used to receive the transmitted X-rays and the diffracted X-rays passing through the crystal 400 or the sample 800 and perform imaging. Since the detector 700 simultaneously receives the transmitted X-rays and the diffracted X-rays passing through the sample 800, images of the sample 800 from two perspectives can be obtained in a single time, and the acquisition efficiency is high. For flat samples, only one image detected by the detector 700 can be used for three-dimensional image restoration to achieve stereoscopic imaging. Compared with the CT imaging technology, the acquisition time is greatly shortened and the efficiency is greatly improved.

[0029] As Figure 3As shown in the figure, the first displacement stage 100 includes an X-axis translation stage 110, a first Y-axis translation stage 120, and a first Z-axis translation stage 130 arranged in sequence from bottom to top. The X-axis translation stage 110 is used to translate the components disposed thereon along the X-axis. The first Y-axis translation stage 120 is used to translate the components disposed thereon along the Y-axis. The first Z-axis translation stage 130 is used to translate the components disposed thereon along the Z-axis. The rotation stage 140 and the crystal rotation stage 200 are both disposed on the first Z-axis translation stage 130. Thus, the crystal 400 and the sample 800 can be translated along the X, Y, and Z axes by the first displacement stage 100, so as to move the crystal 400 into the optical path of the X-ray.

[0030] In some embodiments, a through hole is provided on the rotation stage 140. The crystal rotation stage 200 passes through the through hole of the rotation stage 140 and is fixed on the first displacement stage 100. The crystal rotation stage 200 serves as the rotation axis of the rotation stage 140, enabling the rotation stage 140 to rotate around the crystal rotation stage 200 in the XY plane (a plane perpendicular to the Z-axis). A handle 141 may be provided on the rotation stage 140. By means of the handle 141, the rotation stage 140 can be pushed to rotate around the crystal rotation stage 200. Since the second displacement stage 500, the sample holder 600, and the sample 800 are all located on the rotation stage 140, they will also follow the rotation stage 140 to rotate around the crystal rotation stage 200, that is, the sample 800 can rotate around the crystal 400.

[0031] The second displacement stage 500 includes a second Y-axis translation stage 510, a second Z-axis translation stage 520, and a sample rotation stage 530 arranged in sequence from bottom to top. The second Y-axis translation stage 510 is disposed on the rotation stage 140. The second Y-axis translation stage 510 is used to translate the components disposed thereon along the Y-axis. The second Z-axis translation stage 520 is used to translate the components disposed thereon along the Z-axis. The sample rotation stage 530 is used to rotate the components located thereon around the Z-axis. The sample holder 600 is disposed on the sample rotation stage 530. In this way, the sample 800 can be translated relative to the crystal 400 along the Y-axis and the Z-axis by the second Y-axis translation stage 510 and the second Z-axis translation stage 520, so as to adjust the relative position between the sample 800 and the crystal 400, enabling the sample 800 to move to the overlapping region of the transmitted X-ray and the diffracted X-ray. Rotating the sample 800 around the Z-axis by the sample rotation stage 530 can finely adjust the angle between the sample 800 and the transmitted X-ray and the diffracted X-ray, so that sufficient information can be detected after both rays pass through the sample 800.

[0032] A first fixing portion 310 is provided on the crystal holder 300. The first fixing portion 310 is located at one end of the crystal holder 300 away from the crystal rotation stage 200, and the crystal 400 is fixed on the first fixing portion 310. A second fixing portion 610 is provided on the sample holder 600. The second fixing portion 610 is located at one end of the sample holder 600 away from the second displacement stage 500, and the sample 800 is fixed on the second fixing portion 610.

[0033] The detection surface of the detector 700 is set to be perpendicular to the angular bisector of the angle between the transmitted X-ray and the diffracted X-ray. To adjust the position of the detector 700, the detector 700 can be installed on a detector turntable (not shown in the figure). The detector turntable is used to rotate the detector 700 around the Z-axis, thereby adjusting the angle of the detection surface of the detector 700 to make it perpendicular to the angular bisector of the angle between the transmitted X-ray and the diffracted X-ray. Since a single detector is used to collect images of the sample 800 at different angles, compared with multiple detectors, its detection surface is flatter and the relative uncontrollable distortion is smaller.

[0034] After the X-ray irradiates the crystal 400, Laue diffraction can be generated, which can make the transmitted light spot and the diffracted light spot have no irrecoverable distortion and the effective light field size is large enough, so as to obtain better imaging results.

[0035] The crystal 400 can adopt the Si(111) crystal plane, which needs to eliminate the dispersion effect, be pure enough, and its flatness and thickness need to meet certain requirements so that the light field sizes formed by the transmitted X-ray and the diffracted X-ray on the detector 700 are the same. For example, the surface roughness of the crystal 400 needs to be less than 0.1 nm (atomic level), the lattice distortion needs to be less than 0.001 rad, the crystal thickness needs to be between 100 μm and 1 mm, the thickness uniformity needs to be less than 1%, and the dislocation density needs to be less than 10³ cm -2 。

[0036] In order to enable the detector 700 to obtain two identical light fields (i.e., the same size and brightness), the Bragg angle can be calculated according to the Bragg formula first, and then the crystal 400 is rotated to the calculated Bragg angle by the crystal turntable 200. Then, observe the image on the detector 700 and adjust the rotation angle of the crystal 400 according to the above image to make the two light fields in the detector 700 equal in size and brightness. The detector resolution needs to be greater than 0.01°.

[0037] The sample 800 can be moved by the second displacement stage 500 to make the sample 800 close enough to the crystal 400, so that the sample 800 can be completely located in the overlapping area of the transmitted X-ray and the diffracted X-ray, realizing single-shot multi-angle imaging.

[0038] After the detector 700 detects the image, the image can be processed by background subtraction, noise reduction, sharpening, cropping, etc. Then, using the binocular stereo vision algorithm, the three-dimensional restoration of the sample 800 is carried out to realize stereo imaging.

[0039] In the X-ray stereoscopic imaging device according to the embodiment of the present invention, the detector 700 can obtain the image data of the sample 800 without irrecoverable distortion at two different angles in one acquisition, so as to double the data acquisition speed and significantly improve the efficiency; by collecting the image data at two angles at one time, under the same conditions, more information inside the sample 800 can be obtained in a single exposure, and it is expected to obtain the three-dimensional information of the sample 800 through single imaging, and then realize in-situ dynamic three-dimensional observation, opening up a new path for the dynamic research of three-dimensional objects.

[0040] As Figure 4 shown, another embodiment of the present invention provides an X-ray stereoscopic imaging method, which includes the following steps:

[0041] S10: Provide an X-ray stereoscopic imaging device as described in the above embodiment;

[0042] S20: Move the sample holder 600 away from the crystal 400 through the second displacement stage 500, move the sample holder 600 out of the optical path through the rotary stage 140, and after installing the sample 800 on the sample holder 600 (for example, fixed to the second fixing part 610), turn on the X-ray source to emit X-rays;

[0043] S30: Move the crystal 400 through the first displacement stage 100 to make the crystal 400 located in the optical path of the X-rays;

[0044] S40: Rotate the crystal 400 through the crystal turntable 200 to a preset Bragg angle, so that when the X-rays irradiate on the crystal 400, Laue diffraction is formed, and the crystal 400 divides the X-rays into transmitted X-rays and diffracted X-rays;

[0045] S50: Rotate the crystal 400 slightly through the crystal turntable 200, and observe the brightness and size of the transmitted X-ray spot and the diffracted X-ray spot formed on the detector 700. When the brightness and size of the two are the same, stop rotating the crystal 400;

[0046] S60: Rotate the sample 800 around the crystal 400 through the rotary stage 140 and place it in the optical path of one of the transmitted X-rays and the diffracted X-rays, and then move the sample 800 through the second displacement stage 500 to make the sample 800 located in the overlapping area of the transmitted X-rays and the diffracted X-rays; specifically, the sample 800 can be moved closer to the crystal 400 through the second Y-direction translation stage 510, the height of the sample 800 can be adjusted through the second Z-direction translation stage 520, and then the angle of the sample 800 can be adjusted through the sample turntable 530 while observing the real-time image of the detector 700 to make the sample 800 located in the overlapping area of the transmitted X-rays and the diffracted X-rays;

[0047] S70: Detect the image data of the sample 800 at two different angles through the detector 700;

[0048] S80: The binocular vision algorithm is used to perform stereoscopic imaging on the image data of the sample 800 detected by the detector 700 at two different angles to obtain a stereoscopic image of the sample 800.

[0049] The binocular vision algorithm is an existing algorithm, and its specific steps and principles are all prior art, which will not be elaborated here.

[0050] In the X-ray stereoscopic imaging method according to the embodiment of the present invention, the detector 700 can obtain image data of the sample 800 at two different angles without irrecoverable distortion in one acquisition, thereby doubling the data acquisition speed and significantly improving the efficiency; collecting image data at two angles at one time, under the same conditions, more information inside the sample 800 can be obtained by single exposure, and it is expected to obtain three-dimensional information of the sample 800 through single imaging, and then realize in-situ dynamic three-dimensional observation, opening up a new path for the dynamic research of three-dimensional objects.

[0051] The above-mentioned are only the preferred embodiments of the present invention and are not intended to limit the scope of the present invention. Various changes can be made to the above embodiments of the present invention. That is, all simple, equivalent changes and modifications made according to the claims and the content of the specification of the present invention application fall within the scope of the claims of the present invention patent. The content not described in detail in the present invention is all conventional technical content.

Claims

1. An X-ray stereoscopic imaging device, characterized in that, It includes an X-ray source, a first displacement stage, a rotating stage, a crystal rotating stage, a crystal holder, a crystal, a second displacement stage, a sample holder and a detector. The rotating stage and the crystal rotating stage are both arranged on the first displacement stage. The crystal holder is arranged on the crystal rotating stage. The crystal is fixed on the crystal holder. The second displacement stage is arranged on the rotating stage. The sample holder is arranged on the second displacement stage. The sample holder is used to fix a sample. The X-ray source is used to emit X-rays. The first displacement stage is arranged to move the crystal and the sample so that the crystal is located in the optical path of the X-rays. The crystal rotating stage is arranged to rotate the crystal to change the incident angle between the X-rays and the crystal, so that the X-rays undergo Laue diffraction when passing through the crystal. The crystal divides the X-rays into transmitted X-rays and diffracted X-rays. The rotating stage is used to rotate the second displacement stage, the sample holder and the sample around the crystal so that the sample is located in the optical path of one of the transmitted X-rays and the diffracted X-rays or is moved out of the optical path. The second displacement stage is arranged to move the sample relative to the crystal so that the sample is located in the overlapping region of the transmitted X-rays and the diffracted X-rays. The detector is located downstream of the crystal and the sample and is used to receive the transmitted X-rays and diffracted X-rays passing through the crystal or the sample and perform imaging.

2. The X-ray three-dimensional imaging device according to claim 1, wherein The first displacement stage includes an X-axis translation stage, a first Y-axis translation stage and a first Z-axis translation stage arranged in sequence from bottom to top. The X-axis translation stage is arranged to move the crystal and the sample along the X-axis. The first Y-axis translation stage is arranged to move the crystal and the sample along the Y-axis. The first Z-axis translation stage is arranged to move the crystal and the sample along the Z-axis. The crystal rotating stage and the rotating stage are both located on the first Z-axis translation stage.

3. The X-ray three-dimensional imaging device according to claim 1, wherein The rotating stage is provided with a through hole. The crystal rotating stage passes through the through hole of the rotating stage and forms the rotation axis of the rotating stage. The rotating stage is provided with a handle. The handle is used to push the rotating stage to rotate around the crystal rotating stage.

4. The X-ray three-dimensional imaging device according to claim 2, wherein, The second displacement stage includes a second Y-axis translation stage, a second Z-axis translation stage and a sample rotating stage arranged in sequence from bottom to top. The second Y-axis translation stage is arranged to move the sample along the Y-axis. The second Z-axis translation stage is arranged to move the sample along the Z-axis. The sample rotating stage is arranged to rotate the sample around the Z-axis. The second Y-axis translation stage is arranged on the rotating stage.

5. The X-ray three-dimensional imaging device according to claim 1, characterized in that The crystal holder is provided with a first fixing part. The first fixing part is located at one end of the crystal holder away from the crystal rotating stage. The crystal is fixed on the first fixing part.

6. The X-ray three-dimensional imaging device according to claim 1, characterized in that, The sample holder is provided with a second fixing part. The second fixing part is located at one end of the sample holder away from the second displacement stage. The sample is fixed on the second fixing part.

7. The X-ray stereoscopic imaging device according to claim 1, wherein The detection surface of the detector is arranged to be perpendicular to the angular bisector of the angle between the transmitted X-rays and the diffracted X-rays.

8. The X-ray three-dimensional imaging device according to claim 1, characterized in that, The detector is disposed on a detector turntable, and the detector turntable is configured to enable the detector to rotate about the Z axis.

9. The X-ray stereoscopic imaging device according to claim 1, characterized in that The light fields formed by the transmitted X-rays and the diffracted X-rays on the detector are identical.

10. An X-ray stereoscopic imaging method, characterized in that, Comprising: Provided is an X-ray stereoscopic imaging device according to any one of claims 1-9; The sample holder is moved away from the crystal by a second displacement stage, the sample holder is moved out of the optical path by a rotating stage, the sample is mounted on the sample holder, and then the X-ray source is turned on to emit X-rays from the X-ray source; The crystal is moved by a first displacement stage to place the crystal in the optical path of the X-rays; The crystal is rotated to a preset Bragg angle by a crystal turntable so that when the X-rays irradiate the crystal, Laue diffraction is formed, and the crystal divides the X-rays into transmitted X-rays and diffracted X-rays; The crystal is slightly rotated by the crystal turntable so that the brightness and size of the transmitted X-ray spot and the diffracted X-ray spot formed on the detector are the same; The sample is rotated around the crystal by the rotating stage and placed in the optical path of one of the transmitted X-rays and the diffracted X-rays, and then the sample is moved by the second displacement stage to place the sample in the overlapping region of the transmitted X-rays and the diffracted X-rays; The detector detects image data of the sample at two different angles; A binocular vision algorithm is used to perform stereoscopic imaging on the image data of the sample at two different angles detected by the detector to obtain a stereoscopic image of the sample.

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