Sample table for scanning electron microscope test

Abstract

The invention relates to a sample table for scanning electron microscope testing, which comprises a base, a supporting part, three movable clamping parts and an anti-collision positioning assembly, and is characterized in that a supporting column is arranged in the center of the lower surface of the base, and the supporting column is inserted into a through hole of an original sample table of a scanning electron microscope; the base is provided with three extension springs which are horizontally arranged and are uniformly distributed in a radial shape, and a transverse plate at the bottom of the clamping part is connected with the base through the extension springs, so that the clamping part can move back and forth along the radial direction of the base to enlarge or reduce the size of the bottom surface of the sample table; the vertical rods of the clamping part and the supporting part are vertical, the supporting part is detachably inserted into the circle center of the base, and a coal sample can be placed between one vertical rod and the supporting part; the anti-collision positioning assembly comprises an anti-collision frame and a limiting rod, the bottom of the anti-collision frame is connected with the tops of the three vertical rods, an inductor is installed on the anti-collision frame, the limiting rod is installed on the side face of the probe, and when the inductor induces the limiting rod, the original sample table stops moving upwards, and the coal sample is prevented from colliding with the probe.

Description

Technical Field

[0001] The present invention belongs to the technical field of scanning electron microscope sample stages, and particularly relates to a sample stage for scanning electron microscope testing. Background Art

[0002] A scanning electron microscope (SEM) is a high-precision imaging device. During use, a movable original sample stage is provided below the probe. A number of through holes are evenly arranged on the original sample stage. The sample is fixed on the original sample stage, and then the position of the sample stage is adjusted so that the sample is directly below the probe (lens). Then, the sample stage is controlled to move upward. The optimal observation position is where the top surface of the sample is 10 mm away from the probe, so that the imaging is the clearest. However, the error of manually adjusting the sample stage by humans is relatively large, and the distance of 10 mm is too small. If not careful, the sample stage will move upward excessively, causing the sample to hit the probe, which can easily lead to damage to the probe and thus cause serious economic losses. Summary of the Invention

[0003] In view of the above problems, the present invention provides a sample stage for scanning electron microscope testing, which includes a base, a support part, three movable clamping parts, and an anti-collision positioning component. A support column is provided at the center of the lower surface of the base. The support column can be inserted into the through holes of the original sample stage of the scanning electron microscope, so that the base is stably placed on the original sample stage; Three horizontally arranged tension springs are provided on the base and are evenly distributed in a radial pattern. The cross plate at the bottom of the clamping part is connected to the base through the tension spring, so that the clamping part can move back and forth along the radial direction of the base to expand or contract the size of the bottom surface of the sample stage; The vertical rods of the clamping part and the support part are both vertical. The support part is detachably inserted at the center of the base. A coal sample can be placed between one vertical rod and the support part; The anti-collision positioning component includes an anti-collision frame and a limiting rod. The bottom of the anti-collision frame is connected to the tops of the three vertical rods. An inductor is installed on the anti-collision frame, and the limiting rod is installed on the side of the probe. When the inductor senses the limiting rod, the original sample stage stops moving upward, preventing the coal sample from colliding with the probe.

[0004] The sample stage of the present invention has a retractable clamping part. When the clamping part moves radially outward along the base, it can expand the accommodation space of the sample stage. At the same time, in cooperation with the support part at the center of the base, three coal samples can be placed. The two sides of each coal sample are respectively clamped and positioned by the vertical rod and the support part, so that three coal samples can be placed simultaneously in one detection, and the efficiency is higher. The present invention does not need to change the structure of the existing scanning electron microscope. The limit rod can be used as a fitting and adhered to the side of the probe, which does not affect the operation of the probe and can be removed when not needed. The sample stage of the present invention has a detachable plug-in relationship with the original sample stage of the scanning electron microscope, which does not affect the structure and other uses of the original sample stage, and the sample stage of the present invention can move together with the original sample stage. Through the cooperation of the limit rod and the limit inductor, the timing when the original sample stage and the sample stage stop moving upward is determined, avoiding the top surface of the coal sample hitting the probe and avoiding the defect of artificial judgment of the timing of stopping moving upward.

[0005] The measured sample of the scanning electron microscope generally needs to be sputter-coated with gold first to make the sample have good conductivity and facilitate clear imaging. The original sample stage of the scanning electron microscope is pre-installed inside the scanning electron microscope device, and it is very inconvenient to disassemble and assemble it once. During experimental testing, generally a small self-made sample stage (a circular base cooperating with a support column) is used. The sample is adhered to the sample stage with double-sided tape, sputter-coated with gold in a special device, and then placed on the original sample stage for testing. Some samples can be made into small pieces or small slices (with a size of a few mm). However, coal samples have their particularities. Some are cut from large coal blocks after sampling and then polished to form coal samples, and some are formed by pressing coal powder. Therefore, coal samples have a fixed shape. The commonly used coal samples in the coal or geological field are cylindrical, with the upper and lower circular surfaces parallel and both polished flat, so that the coal samples can stand upright on the sample stage (with a height of 1-3 cm and a diameter of 2-3 cm). This makes the existing small sample stages no longer applicable. One is limited by the size, and only one coal sample can be measured each time, and the test efficiency is low; the other is that the vertical coal sample is only adhered at the bottom, and the stability is not good, and it is easy to fall down during sputter-coating and testing, and after falling down, it will knock down other samples. Therefore, the present invention designs the above-mentioned sample stage for coal samples.

[0006] Optionally, the base is circular, and three grooves are provided on the upper surface of the base, which are evenly distributed in a radial pattern. The grooves are recessed into the base for accommodating the cross plate and the tension spring; a first threaded hole is provided at the center of the base for connecting the support part; The clamping part is L-shaped and includes a cross plate, a vertical rod and a side positioning part. One end of the cross plate is connected to the tension spring, and the other end is connected to the bottom of the vertical rod. A second threaded hole is provided in the vertical rod for connecting the side positioning part; the top of the side positioning part is provided with a flat and protruding connecting edge one extending outward for abutting against the top surface of the coal sample close to the vertical rod.

[0007] Further optionally, the inner wall of the first threaded hole is provided with internal threads, the first threaded hole is concentric with the base, and the top surface of the first threaded hole is flush with the upper surface of the base; The support part is a vertical rod, and a circular chassis is fixedly connected to the outer side wall of the support part. The chassis has the same diameter as the base and is used to cover the upper surface of the base. The part of the support part below the chassis is cylindrical, and the outer wall of this part is provided with external threads for connecting to the first threaded hole. The part of the support part above the chassis is triangular prism-shaped, and the three side surfaces are respectively used to dock three coal samples.

[0008] Further optionally, the top end of the vertical rod is open and recessed inward to form a second threaded hole, and the inner wall of the second threaded hole is provided with internal threads; the side positioning member includes a circular flange one at the top and a side positioning nail below the flange one, and the outer side surface of the side positioning nail is provided with external threads; After placing the coal sample, the side positioning nail is screwed into the second threaded hole and is threadedly connected. When the lower surface of the flange one contacts the top surface of the coal sample, the screwing of the side positioning nail is stopped, so as to position the height of the top surface of the coal sample.

[0009] Further optionally, the top end of the support part is open and recessed inward to form a third threaded hole, and the inner wall of the third threaded hole is provided with internal threads; the middle positioning member includes a circular flange two at the top and a middle positioning nail below the flange two, and the outer side surface of the middle positioning nail is provided with external threads; After placing the three coal samples, the middle positioning nail is screwed into the third threaded hole and is threadedly connected. When the lower surface of the flange two contacts the top surfaces of the three coal samples, the screwing of the middle positioning nail is stopped, so as to position the height of the top surfaces of the three coal samples.

[0010] Optionally, the anti-collision frame includes an upper support ring, a lower support ring and three support rods. The upper support ring and the lower support ring are concentrically arranged, and the three support rods are evenly arranged along the circumferential direction of the upper support ring; the bottom of the support rod is connected to the top surface of the side positioning member of the corresponding vertical rod, the top of the support rod is detachably connected to the upper support ring, and the lower part of the support rod is detachably connected to the lower support ring; The inductor is arranged on the upper support ring. The vertical distance between the upper support ring and the lower support ring is fixed. By designing the installation position of the limit rod on the side of the probe and the vertical distance between the upper and lower support rings, when the inductor senses the limit rod, the distance between the bottom end of the probe and the top surface of the coal sample reaches the optimal observation distance (i.e., 10 mm).

[0011] Further optionally, the support rod is divided into upper and lower parts with the position connecting the lower support ring as the demarcation position. The upper part is an inclined rod connecting between the upper and lower support rings, and the lower part is a vertical rod connecting between the side positioning member and the lower support ring; the bottom end of the lower part of the support rod is bonded to the top surface of the side positioning member.

[0012] Further optionally, the diameter of the lower support ring is equal to the diameter of the circle formed by the three vertical rods, and the diameter of the upper support ring is greater than that of the lower support ring; gaskets are adhesively bonded to the inner sides of the upper and lower support rings.

[0013] Further optionally, the lower support ring is a circle formed by the intersection of the two ends of a rod. By adjusting the length of the overlapping part where the two ends of the rod intersect, the diameter of the lower support ring can be adjusted to adapt to coal samples of different diameters.

[0014] Further optionally, the sensor is mounted on the upper support ring through a support. The support is in a concave shape and is installed parallel to the tangent direction of the position on the upper support ring where it is mounted; the groove in the middle of the support has two opposite side faces and a bottom face. A sensor is mounted on one of the side faces. During the process that the sensor approaches the limit rod as the sample stage rises, when the limit rod enters the groove of the support and blocks in front of the sensor, the sensor senses the limit rod and transmits a signal to the control mechanism that controls the movement of the original sample stage, pausing the upward movement of the original sample stage. At this time, the bottom end of the probe is 10 mm away from the top surface of the coal sample. Description of the Drawings

[0015] Figure 1 is a schematic structural diagram of the sample stage for scanning electron microscope testing; Figure 2 is a schematic diagram of the connection between the support part and the base; Figure 3 is a schematic diagram of the connection between the support part and the middle positioning component; Figure 4 is a schematic diagram of the anti-collision frame (the support is omitted); Figure 5 is a schematic diagram of the support sensing the limit rod; Figure 6 is Figure 5 a side schematic diagram of.

[0016] In the drawings, 1 - base, 2 - support part, 3 - clamping part, 4 - support column, 5 - tension spring, 6 - cross plate, 7 - vertical rod, 8 - anti-collision frame, 9 - limit rod, 10 - sensor, 11 - groove, 12 - first threaded hole, 13 - side positioning component, 14 - first overlap, 15 - second overlap, 16 - chassis, 17 - middle positioning component, 18 - upper support ring, 19 - lower support ring, 20 - support rod, 21 - support. Detailed Embodiment

[0017] This embodiment provides a sample stage for scanning electron microscope testing, as Figures 1-6As shown in the figure, it includes a base 1, a support part 2, three movable clamping parts 3 and an anti-collision positioning component. A support column 4 is provided at the center of the lower surface of the base 1. The support column 4 can be inserted into the through hole of the original sample stage of the scanning electron microscope, so that the base 1 is stably placed on the original sample stage; Three horizontally arranged tension springs 5 are provided on the base 1 and are evenly distributed radially. The cross plate 6 at the bottom of the clamping part 3 is connected to the base 1 through the tension spring 5, so that the clamping part 3 can move back and forth along the radial direction of the base 1 to expand or contract the size of the bottom surface of the sample stage; The vertical rod 7 of the clamping part 3 and the support part 2 are both vertical. The support part 2 is detachably inserted at the center of the base 1. A coal sample can be placed between one vertical rod 7 and the support part 2; The anti-collision positioning component includes an anti-collision frame 8 and a limit rod 9. The bottom of the anti-collision frame 8 is connected to the tops of the three vertical rods 7. An inductor 10 is installed on the anti-collision frame 8. The limit rod 9 is installed on the side of the probe. When the inductor 10 senses the limit rod 9, the original sample stage stops moving up to avoid the coal sample colliding with the probe.

[0018] Optionally, the base 1 is circular. Three grooves 11 are provided on the upper surface of the base 1 and are evenly distributed radially. The grooves 11 are recessed into the base 1 for accommodating the cross plate 6 and the tension spring 5; a first threaded hole 12 is provided at the center of the base 1 for connecting the support part 2. The starting ends of the three grooves 11 start from the outer wall of the first threaded hole 12; The clamping part 3 is L-shaped and includes a cross plate 6, a vertical rod 7 and a side positioning component 13. One end of the cross plate 6 is connected to the tension spring 5, and the other end is connected to the bottom of the vertical rod 7. A second threaded hole is provided in the vertical rod 7 for connecting the side positioning component 13; the top of the side positioning component 13 is provided with a flat and protruding flange 14 extending outwards for abutting against the top surface of the coal sample close to the vertical rod 7.

[0019] Further optionally, the base 1 has a certain thickness, which can be determined according to actual needs, such as 0.5 - 1.5 cm or larger; the diameter of the tension spring 5 is not greater than the depth of the corresponding groove 11, and the thickness of the cross plate 6 is slightly less than the depth of the groove 11, so that the tension spring 5 and the cross plate 6 can move in the groove 11.

[0020] Further optionally, the inner wall of the first threaded hole 12 is provided with internal threads. The first threaded hole 12 is concentric with the base 1. The top surface of the first threaded hole 12 is flush with the upper surface of the base 1 and is higher than the bottom surface of the groove; The support portion 2 is a vertical rod. A circular chassis 16 is fixedly connected to the outer side wall of the support portion 2. The chassis 16 has the same diameter as the base 1 and is used to cover the upper surface of the base 1. The portion of the support portion 2 below the chassis 16 is cylindrical, and an external thread is provided on the outer wall of this portion for connecting to the first threaded hole 12. The portion of the support portion 2 above the chassis 16 is triangular prism-shaped, and the three side faces are respectively used to dock with three coal samples.

[0021] The chassis 16 and the base 1 are detachable, which is convenient for maintenance and replacement of the tension spring 5. There are various forms for connecting the two ends of the tension spring 5 to the first threaded hole 12 and the cross plate 6. For example, a pull ring is provided at the position corresponding to the tension spring 5 on the outer wall of the first threaded hole 12, and a pull ring is provided at the position corresponding to the tension spring 5 at one end of the cross plate 6 for connecting the tension spring 5. The cross plate 6 can be a flat cuboid shape, and the groove serves as the moving track corresponding to the cross plate 6. After installing the tension spring 5 and the clamping portion 3, the bottom of the support portion 2 is inserted into the first threaded hole 12 and is threadedly connected to the first threaded hole 12, so that the lower surface of the chassis 16 contacts the upper surface of the base 1, that is, the chassis 16 covers the base 1, covering the groove, the tension spring 5 and part of the cross plate 6 to prevent the fine powder and slag of the coal sample from falling into the groove. The triangular prism-shaped portion of the support portion 2 is above the base 1 and is located at the center of the base 1 for separating three coal samples.

[0022] The three coal samples for one test are obtained by batch sample preparation, so they have the same size. When a clamping portion 3 is pulled towards the outside of the base 1, the tension spring 5 elongates and the cross plate 6 moves outwards, and the distance between the corresponding vertical rod 7 and the support portion 2 becomes larger. After putting in a coal sample, the vertical rod 7 and the support portion 2 can clamp the coal sample. A small platform protruding upwards is provided at one end of the cross plate 6 close to the vertical rod 7, and the upper surface of this platform is flush with the upper surface of the chassis 16. The bottom surface of the coal sample can contact the chassis 16 and this platform to ensure the stable placement of the coal sample. In this way, the other two coal samples are placed.

[0023] Further optionally, the top end of the vertical rod 7 is open and recessed inward to form a second threaded hole, and an internal thread is provided on the inner wall of the second threaded hole; the side positioning member 13 includes a circular flange one 14 at the top and a side positioning nail below the flange one 14. The outer side surface of the side positioning nail is provided with an external thread, and the side positioning member 13 is concentrically arranged with the vertical rod 7; the top surface of the side positioning member 13 is a plane and is provided with a sunken straight groove or cross groove to facilitate the screwdriver to control the rotation of the side positioning member 13; After placing the coal sample, the side positioning nail is screwed into the second threaded hole and is threadedly connected. When the lower surface of the flange one 14 contacts the top surface of the coal sample, stop screwing in the side positioning nail, thereby positioning the height of the top surface of the coal sample.

[0024] Further optionally, the top end of the support portion 2 is open and recessed inward to form a third threaded hole, and the inner wall of the third threaded hole is provided with an internal thread; the middle positioning component 17 includes a circular overlap 15 at the top and a middle positioning pin below the overlap 15, and the outer side surface of the middle positioning pin is provided with an external thread, and the middle positioning component 17 is concentrically arranged with the support portion 2; the top surface of the middle positioning component 17 is a plane, and is provided with a sunken straight groove or a cross-shaped groove, which is convenient for a screwdriver to control the rotation of the middle positioning component 17; After placing the three coal samples, the middle positioning nail is screwed into the third threaded hole and threaded until the lower surface of the overlap 15 contacts the top surfaces of the three coal samples. Then, the middle positioning nail is stopped from being screwed in, thereby positioning the height of the top surfaces of the three coal samples.

[0025] Optionally, the anti-collision frame 8 includes an upper support ring 18, a lower support ring 19 and three support rods 20, the upper support ring 18 and the lower support ring 19 are concentrically arranged, and the three support rods 20 are evenly arranged along the circumference of the upper support ring 18; the bottom of the support rod 20 is connected to the top surface of the side positioning component 13 of the corresponding vertical rod 7, the top of the support rod 20 is detachably connected to the upper support ring 18, and the lower part of the support rod 20 is detachably connected to the lower support ring 19; The sensor 10 is arranged on the upper support ring 18. The vertical distance between the upper support ring 18 and the lower support ring 19 is fixed. By designing the installation position of the limit rod 9 on the side of the probe and the vertical distance between the upper and lower support rings 19, when the sensor 10 senses the limit rod 9, the distance between the bottom end of the probe and the top surface of the coal sample reaches the optimal observation distance (i.e. 10 mm).

[0026] Further optionally, the support rod 20 is divided into an upper part and a lower part at the position where it is connected to the lower support ring 19. The upper part is an inclined rod connected between the upper and lower support rings 19, and the lower part is a vertical rod connected between the side positioning component 13 and the lower support ring 19. The bottom end of the lower portion of the support rod 20 is bonded to the top surface of the edge positioning component 13 , for example, by double-sided tape, to facilitate subsequent disassembly of the support rod 20 .

[0027] Further optionally, the upper portion of the support rod 20 is located outside the upper and lower support rings 19, and the support rod 20 is provided with an openable and closable clamping ring at the position facing the two support rings, so as to facilitate detachable connection with the corresponding support ring; The upper portion of the support rod 20 is a telescopic sleeve structure, which is convenient for adjusting the length of the upper portion.

[0028] Further optionally, the diameter of the lower support ring 19 is equal to the diameter of the circle surrounded by the three vertical rods 7, and the diameter of the upper support ring 18 is larger than the lower support ring 19 and larger than the diameter of the bottom end of the probe; Gaskets are adhesively bonded to the inner sides of the upper and lower support rings 19. The gaskets can be made of flexible rubber material. Even if the sample stage moves upward excessively and the probe edge touches the gaskets, the probe will not be damaged.

[0029] Further optionally, the lower support ring 19 is a circle formed by the intersection of the two ends of a rod. By adjusting the length of the overlapping part where the two ends of the rod intersect, the diameter of the lower support ring 19 can be adjusted to adapt to coal samples of different diameters.

[0030] When coal samples of different diameters are clamped between the clamping part 3 and the supporting part 2, the diameter of the circle formed by the three clamping parts 3 is different, and different diameters of the lower support ring 19 are required. The lower support ring 19 of the present invention can adjust its own diameter steplessly. In order to keep the vertical height of the upper and lower support rings 19 unchanged, when the diameter of the lower support ring 19 becomes smaller, the upper part of the support rod 20 becomes longer and the inclination angle decreases; when the diameter of the lower support ring 19 becomes larger, the upper part of the support rod 20 shortens and the inclination angle increases. After the length of the upper part of the support rod 20 is adjusted, a rubber ring tightly wrapping the support rod 20 blocks the movable end of the outer sleeve, thereby temporarily fixing the relative position of the outer sleeve and the inner tube, and further temporarily fixing the length of the upper part of the support rod 20. When the diameter of the lower support ring 19 changes, the support rod 20 also cooperates to change the position connecting the upper and lower support rings 19.

[0031] The material of the support rod 20 can be iron, and the inclination angle of the upper part can be adjusted with pliers. The support rod 20 can also have a fixed angle and length, and a suitable support rod 20 can be selected according to the different diameters of the coal samples. Since the diameters of the coal samples for scanning electron microscope testing are limited to several types, several sets of support rods 20 with different sizes are prepared. The materials of the upper and lower support rings 19 are metal or plastic.

[0032] Further optionally, the inductor 10 is installed on the upper support ring 18 through the support 21. The support 21 is in a concave shape and is installed parallel to the tangent direction of the position where the upper support ring 18 is installed. The groove in the middle of the support 21 has two opposite side faces and a bottom face. The inductor 10 is installed on one of the side faces. During the process that the inductor 10 approaches the limit rod 9 as the sample stage rises, when the limit rod 9 enters the groove of the support 21 and blocks in front of the inductor 10, the inductor 10 senses the limit rod 9 and transmits a signal to the control mechanism that controls the movement of the original sample stage, pausing the upward movement of the original sample stage. At this time, the bottom end of the probe is 10 mm away from the top surface of the coal sample.

[0033] Since the tab 14 of the edge positioning member 13 can be positioned on the top surface of the coal sample, the relative positions of the bottom of the support rod 20 and the lower support ring 19 with respect to the edge positioning member 13 are determined. Together with the fixed vertical distance between the upper and lower support rings 19, the problem of positioning the distance between the bottom end of the probe and the top surface of the coal sample is transformed into the simple problem of how the inductor 10 senses the limit rod 9, and the latter problem is easily determined and controlled. The anti-collision frame 8 provides an additional layer of protection for the probe.

[0034] During use, place the sample stage of the present invention on the original matching sample stage, such that the support 21 of the sample stage corresponds to the side where the limit rod 9 is provided for the probe. Move the sample stage to directly below the probe, such that the groove of the support 21 is directly below the limit rod 9. These can be achieved by visual observation. Then, move the original matching sample stage and the sample stage upward. According to the above method, when the inductor 10 senses the limit rod 9, stop moving upward. Then, translate the sample stage to test various positions of the coal sample below using the probe. By reasonably designing the opening degree of the anti-collision frame 8, the translation range of the probe can be increased. Through translation of the probe, the limit rod 9 can be disengaged from the groove of the support 21, increasing the flexibility of the probe translation.

Claims

1. A sample stage for scanning electron microscope testing, characterized in that, The sample stage for scanning electron microscope testing includes a base, a support part, three movable clamping parts and an anti-collision positioning component. A support column is provided at the center of the lower surface of the base, and the support column can be inserted into the through hole of the original sample stage of the scanning electron microscope, so that the base is stably placed on the original sample stage; Three horizontally arranged tension springs are provided on the base and are evenly distributed radially. The cross plate at the bottom of the clamping part is connected to the base through the tension spring, so that the clamping part can move back and forth along the radial direction of the base to expand or contract the size of the bottom surface of the sample stage; The vertical rods of the clamping part and the support part are both vertical. The support part is detachably inserted at the center of the base, and a coal sample can be placed between one vertical rod and the support part; The anti-collision positioning component includes an anti-collision frame and a limiting rod. The bottom of the anti-collision frame is connected to the tops of the three vertical rods. An inductor is installed on the anti-collision frame, and the limiting rod is installed on the side of the probe. When the inductor senses the limiting rod, the original sample stage stops moving up to avoid the coal sample colliding with the probe.

2. The sample stage for scanning electron microscope testing according to claim 1, characterized in that, The base is circular. Three grooves are provided on the upper surface of the base and are evenly distributed radially. The grooves are recessed into the base for accommodating the cross plate and the tension spring; a first threaded hole is provided at the center of the base for connecting the support part; The clamping part is L-shaped and includes a cross plate, a vertical rod and a side positioning component. One end of the cross plate is connected to the tension spring, and the other end is connected to the bottom of the vertical rod. A second threaded hole is provided inside the vertical rod for connecting the side positioning component; the top of the side positioning component is provided with a flat and protruding first lap for abutting against the top surface of the coal sample close to the vertical rod.

3. The sample stage for scanning electron microscope testing according to claim 2, characterized in that, The inner wall of the first threaded hole is provided with internal threads. The first threaded hole is concentric with the base, and the top surface of the first threaded hole is flush with the upper surface of the base; The support part is a vertical rod. A circular chassis is fixedly connected to the outer side wall of the support part. The chassis has the same diameter as the base and is used to cover the upper surface of the base; the part of the support part below the chassis is cylindrical, and the outer wall of this part is provided with external threads for connecting the first threaded hole; the part of the support part above the chassis is triangular prism-shaped, and the three side surfaces are respectively used to dock the three coal samples.

4. The sample stage for scanning electron microscope testing according to claim 2, characterized in that, The top of the vertical rod is open and is recessed inward to form a second threaded hole. The inner wall of the second threaded hole is provided with internal threads; the side positioning component includes a circular first lap at the top and a side positioning nail below the first lap. The outer side surface of the side positioning nail is provided with external threads; After placing the coal sample, the side positioning nail is screwed into the second threaded hole and is threadedly connected. When the lower surface of the first lap contacts the top surface of the coal sample, the screwing of the side positioning nail is stopped, so as to position the height of the top surface of the coal sample.

5. The sample stage for scanning electron microscope testing according to claim 3, characterized in that, The top of the support part is open and is recessed inward to form a third threaded hole. The inner wall of the third threaded hole is provided with internal threads; the middle positioning component includes a circular second lap at the top and a middle positioning nail below the second lap. The outer side surface of the middle positioning nail is provided with external threads; After placing the three coal samples, the middle positioning nail is screwed into the third threaded hole and is threadedly connected. When the lower surface of the second lap contacts the top surfaces of the three coal samples, the screwing of the middle positioning nail is stopped, so as to position the height of the top surfaces of the three coal samples.

6. The sample stage for scanning electron microscope testing according to claim 4, characterized in that, The anti-collision frame includes an upper support ring, a lower support ring and three support rods. The upper support ring and the lower support ring are concentrically arranged, and the three support rods are evenly arranged along the circumference of the upper support ring. The bottom of the support rod is connected to the top surface of the edge positioning part of the corresponding vertical rod, the top of the support rod is detachably connected to the upper support ring, and the lower part of the support rod is detachably connected to the lower support ring. The sensor is arranged on the upper support ring.

7. The sample stage for scanning electron microscope testing according to claim 6, characterized in that, Taking the position where the support rod is connected to the lower support ring as the demarcation position, the support rod is divided into upper and lower parts. The upper part is an inclined rod connected between the upper and lower support rings, and the lower part is a vertical rod connected between the edge positioning part and the lower support ring. The bottom end of the lower part of the support rod is bonded to the top surface of the edge positioning part.

8. The sample stage for scanning electron microscope testing according to claim 7, characterized in that, The diameter of the lower support ring is equal to the diameter of the circle formed by the three vertical rods, and the diameter of the upper support ring is larger than that of the lower support ring. Washers are bonded to the inner sides of the upper and lower support rings.

9. The sample stage for scanning electron microscope testing according to claim 8, characterized in that, The lower support ring is a circle formed by the intersection of the two ends of a rod. By adjusting the length of the overlapping part where the two ends of the rod intersect, the diameter of the lower support ring can be adjusted to adapt to coal samples of different diameters.

10. The sample stage for scanning electron microscope test according to claim 9, characterized in that, The sensor is installed on the upper support ring through a support. The support is concave-shaped and is installed parallel to the tangent direction of the position on the upper support ring where the support is installed. The groove in the middle of the support has two opposite side surfaces and a bottom surface. A sensor is installed on one of the side surfaces. When the sensor approaches the limit rod as the sample stage rises, and the limit rod enters the groove of the support and blocks in front of the sensor, the sensor senses the limit rod and transmits a signal to the control mechanism that controls the movement of the original sample stage, pausing the upward movement of the original sample stage.

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