Hybrid magnetic array current sensor and method of construction

Abstract

The application relates to the technical field of electromagnetic measurement, and provides a hybrid magnetic array current sensor and a construction method. The hybrid magnetic array current sensor comprises a TMR array unit, a quantum current sensing unit, a data acquisition unit and a data fusion unit. The TMR array unit is used for converting sensed current magnetic field changes into electric signals to obtain first current data. The quantum current sensing unit is used for converting sensed quantum state signal changes into electric signals to obtain second current data. The data acquisition unit is used for acquiring the temperature of the TMR array and the output voltage of the TMR array under a reference magnetic field corresponding to the temperature. The data fusion unit is used for obtaining a sensitivity drift coefficient based on the temperature of the TMR array and the output voltage of the TMR array under the reference magnetic field corresponding to the temperature. The first current data is compensated according to the sensitivity drift coefficient to obtain compensated first current data. The compensated first current data and the second current data are fused to obtain fused current data.

Description

Technical Field

[0001] This invention relates to the field of electromagnetic measurement technology, and in particular to a hybrid magnetic array current sensor and its construction method. Background Technology

[0002] The statements in this section are merely background information related to the present invention and do not necessarily constitute prior art.

[0003] With the rapid construction and advancement of new power systems, the limitations of current sensors are becoming increasingly apparent. On the one hand, large-scale new energy sources such as solar and wind power generation, as well as high-capacity power electronic equipment, are continuously being connected to the power grid. Solar power generation is affected by the intensity and duration of sunlight, while wind power generation is affected by wind strength and stability. The grid connection of these distributed power sources makes the grid current exhibit complex characteristics such as high dynamic range and wide bandwidth. High-capacity power electronic equipment generates a large number of harmonics and high-frequency components during operation, further exacerbating the complexity of the grid current. This undoubtedly places more stringent demands on the measurement performance of grid current measuring devices. On the other hand, in emerging fields such as carbon trading and electricity trade settlement, the accuracy of current measurement is directly related to the economic interests of all parties, and its importance is self-evident.

[0004] Traditional electromagnetic current transformers were widely used in power systems in the past, utilizing the principle of electromagnetic induction to measure current. However, their drawbacks have gradually become apparent when facing the new challenges of modern power systems. When measuring large currents, the limitations of their operating principle require large iron cores and windings, resulting in large size and weight. This not only increases the construction cost and space occupation of power facilities such as substations, but also makes the iron core prone to saturation when dealing with complex fault currents. This prevents the transformer from accurately transmitting current information, seriously affecting the timeliness and accuracy of power system protection and control actions. In fault detection of some high-voltage transmission lines, the saturation phenomenon of electromagnetic current transformers may lead to deviations in the measurement of short-circuit current peaks, thereby affecting the correct operation of relay protection devices and increasing the risk of power system outages due to faults.

[0005] The emergence of Hall effect-based current sensors has improved some of the shortcomings of electromagnetic current transformers. They utilize the Hall effect of a Hall element in a magnetic field to measure current, and are relatively small in size and have a fast response speed. However, they still have shortcomings in terms of accuracy and stability, especially in wide-range measurements, where it is difficult to simultaneously meet the requirements of high accuracy and low error. In some applications with extremely high current measurement accuracy requirements, such as high-precision power metering and dynamic stability analysis of power systems, the performance of Hall current sensors is insufficient.

[0006] Furthermore, with the large-scale integration of new energy power generation into the power system, the current in the power grid has become more complex and variable. In addition to containing various harmonic components and rapid current fluctuations, there are also weak current signals. At the same time, the electromagnetic environment of the power system is becoming increasingly complex. High-voltage equipment in substations, communication lines, and surrounding industrial equipment can all become sources of electromagnetic interference, posing a greater challenge to the anti-interference capabilities of current sensors.

[0007] With the booming development of new energy sources, wind power, photovoltaic power, and other renewable energy generation technologies are being integrated into the power system on a large scale, completely changing the traditional pattern of grid current. The previously relatively stable and regular current is now extremely complex due to the intermittent and fluctuating nature of renewable energy generation. The current not only contains abundant harmonic components, which can severely impact the normal operation of power equipment, potentially leading to overheating, increased losses, or even damage; but also fluctuates extremely rapidly, posing significant challenges to real-time monitoring and control of the power system. Furthermore, the emergence of weak current signals presents unprecedented challenges to the accuracy and sensitivity of current measurements. These weak current signals often contain crucial information about the operating status of the power system; inaccurate measurements can lead to misjudgments of the system's condition.

[0008] Meanwhile, the electromagnetic environment of the power system is becoming increasingly harsh. In substations, high-voltage equipment generates strong electromagnetic radiation during operation, and its complex electromagnetic field distribution may interfere with the normal operation of current sensors. Communication lines, when transmitting signals, also interact with the surrounding electromagnetic environment, generating electromagnetic interference and affecting the accuracy of current measurements. Nearby industrial equipment, such as large motors and welding machines, emit electromagnetic interference of various frequencies into the surrounding space during operation. These interference sources intertwine to form a complex electromagnetic interference field, seriously threatening the reliable operation of current sensors.

[0009] Under such challenging circumstances, traditional current sensors are no longer sufficient to meet the demands of modern power systems. Their measurement accuracy drops sharply when faced with complex currents and strong electromagnetic interference, their measurement range cannot cover a wide range of current variations, and they have weak anti-interference capabilities, making them prone to measurement errors or even failure in complex electromagnetic environments. Therefore, the development of new current sensing devices is urgently needed. Summary of the Invention

[0010] To address the technical problems mentioned above, this invention provides a hybrid magnetic array current sensor and its construction method. This invention combines a TMR array with a quantum current sensing unit, leveraging the complementary advantages of both. The TMR array is responsible for preliminary detection and coarse adjustment of a wide range of currents, while the quantum current sensing unit focuses on high-precision measurement, ensuring accurate acquisition of current information even in complex current and strong electromagnetic interference environments. Simultaneously, utilizing the high stability of diamond color center magnetometry, the error drift of the TMR, which is susceptible to sensitivity changes due to ambient temperature, is monitored, and self-correction of the error drift is performed, further improving measurement accuracy and stability.

[0011] To achieve the above objectives, the present invention adopts the following technical solution:

[0012] The first aspect of the present invention provides a hybrid magnetic array current sensor.

[0013] A hybrid magnetic array current sensor includes: a TMR array unit, a quantum current sensing unit, a data acquisition unit, a transmission unit, and a host computer, wherein the host computer is connected to a data fusion unit through the transmission unit;

[0014] The TMR array unit is used to convert the change in the magnetic field of the sensed current into an electrical signal to obtain the first current data.

[0015] The quantum current sensing unit is used to convert the sensed quantum state signal changes into electrical signals to obtain second current data;

[0016] The data acquisition unit is used to acquire the temperature of the TMR array and the corresponding output voltage at the reference magnetic field.

[0017] The data fusion unit is used to obtain the sensitivity drift coefficient based on the temperature of the TMR array and the corresponding output voltage under the reference magnetic field; to compensate the first current data according to the sensitivity drift coefficient to obtain the compensated first current data; and to fuse the compensated first current data and the second current data to obtain the fused current data.

[0018] The host computer is used to receive the fused current data uploaded by the data fusion unit and obtain the current measurement results.

[0019] Furthermore, the sensitivity drift coefficient is expressed by the following formula:

[0020]

[0021] in, This represents the sensitivity drift coefficient. This represents the output value of the TMR array under a reference magnetic field. B NVThis indicates the reference magnetic field strength used for diamond color center calibration. T 0 is the reference temperature. T The temperature of the acquired TMR array;

[0022] The first current data after compensation is expressed by the following formula:

[0023]

[0024] in, This indicates the first current data. This represents the first current data after compensation.

[0025] Furthermore, the MR array unit includes: circular array, rectangular array, linear array, and other special arrays.

[0026] Furthermore, the MR array unit includes several magnetic field sensing units, and an online calibration method is adopted. Based on the magnetic field results measured by all magnetic field sensing units, combined with the solution calculation of the magnetic field-current inversion model, the position of the current conductor under test is located, the correlation coefficient of each magnetic field sensing unit is calculated, and calibration is performed according to the correlation coefficient of each magnetic field sensing unit.

[0027] Furthermore, the quantum current sensing unit includes an optical fiber, an optical fiber adapter, a diamond probe, a multi-axis displacement stage, a microwave coil, a microwave switch, and a microwave signal amplifier.

[0028] The output end of the optical fiber is connected to the substrate of the diamond probe, and a multi-axis displacement stage is used to control the center of the end face of the output end of the optical fiber to be coaxial with the NV color center of the diamond probe.

[0029] The laser emitted from the laser source is introduced into the optical fiber through the optical fiber adapter, and then the optical fiber transmits the laser to the diamond probe to excite the NV color center to generate a fluorescence signal.

[0030] A microwave coil is wound around a diamond probe. The microwave signal generated by the microwave source is applied to the microwave coil after passing through a microwave switch and a microwave signal amplifier, so as to control the spin state of the diamond NV color center.

[0031] The connection line between the microwave coil and the microwave source is laid in parallel with the optical fiber.

[0032] Furthermore, the transmission unit includes an optical fiber transmission unit for transmitting current measurement data using optical signals, thereby achieving electrical isolation between the measuring end and the receiving end.

[0033] Furthermore, the transmission unit also includes a microwave control unit, wherein the microwave transmission line of the microwave signal of the microwave control unit is arranged in coordination with the optical signal transmission line; the microwave signal is generated by a microwave source and transmitted through the microwave transmission line to a microwave coil or resonant cavity near the diamond NV color center.

[0034] Furthermore, the host computer is also connected to a signal processing unit via a transmission unit for amplifying, filtering, and linearizing the first current data and the second current data.

[0035] Furthermore, the fusion of the compensated first current data and second current data includes fusing the processed first current data and second current data using a weighted average method or a Kalman filter algorithm.

[0036] Furthermore, the hybrid magnetic array current sensor also includes a central control unit for controlling the sampling frequency, start-up, and stop of the TMR array unit and the quantum current sensing unit.

[0037] Furthermore, the central control unit is used to interact with the signal processing unit and the data fusion unit to set relevant parameters.

[0038] Furthermore, the central control unit is used to analyze, store, and communicate with external devices the transmitted data.

[0039] Furthermore, the hybrid magnetic array current sensor also includes a power supply and management unit for providing power to the TMR array unit, quantum sensor unit, data acquisition unit, signal processing unit, data fusion unit, central control unit, and transmission unit.

[0040] Furthermore, the hybrid magnetic array current sensor also includes a database for storing data.

[0041] A second aspect of the present invention provides a method for constructing a hybrid magnetic array current sensor.

[0042] A method for constructing a hybrid magnetic array current sensor, for constructing the hybrid magnetic array current sensor described in the first aspect, comprising:

[0043] By selecting TMR elements, combining the magnetic field distribution characteristics of the target to be measured and the spatial constraints of the system, electromagnetic simulation software is used to perform simulation analysis to determine the precise position and spacing of each element, and to design the TMR array unit.

[0044] A diamond NV center probe is encapsulated, equipped with a matching laser source and microwave source, and an optical signal collection and conversion system is constructed to connect to the signal processing unit. The diamond NV center probe is sealed and equipped with a laser source. The frequency and power of the microwave source are adjusted according to the magnetic resonance characteristics of the diamond NV center. The optical signal is converted into an electrical signal using a photodetector, and the converted electrical signal is connected to the signal processing unit.

[0045] Select optical fiber based on the distance, rate, and bandwidth requirements of signal transmission; design an adapter interface to ensure the physical connection and electrical matching between the interface and the signal source and optical fiber, and convert the electrical signal into an optical signal for access to the optical fiber;

[0046] An amplifier is selected to amplify and filter the resistance change signal of the TMR array unit. A filter and an analog-to-digital converter are selected to amplify and filter the data. The data is then transmitted to the data fusion unit via the analog-to-digital converter to obtain the current measurement result.

[0047] Furthermore, the hybrid magnetic array current sensor is encapsulated with a sealed housing and sealant.

[0048] In terms of insulation design, a metal shielding layer (such as an aluminum foil shielding layer) is installed between the high-voltage and low-voltage sides and properly grounded. This effectively limits the electric field range, blocks interference from the high-voltage side's electric field to the low-voltage side, and prevents measurement errors or device malfunctions caused by electric field interference. The fiber optic transmission unit in the transmission unit uses optical signals to transmit current measurement data, achieving electrical isolation between the measuring end and the receiving end. In environments with strong electromagnetic interference, such as power systems, this greatly minimizes the impact of electromagnetic interference on the transmitted signal, ensuring the accuracy and stability of data transmission. This allows the device to operate stably in complex electromagnetic environments, such as substations and factories where there is a large amount of electrical equipment and electromagnetic noise.

[0049] TMR array unit structures are diverse, including circular arrays, rectangular arrays, linear arrays, and other special arrays, which can be flexibly selected or combined according to different current measurement needs and scenarios. The data fusion unit's algorithm can dynamically adjust the fusion weights of TMR array unit data and quantum sensing data according to the current magnitude. For small current measurements, it fully leverages the high precision advantage of the quantum current sensing unit, while for large current measurements, it relies on the wide range and stability characteristics of the TMR array unit, thus achieving high-precision measurement over a wide range. This allows the device to meet both the precision measurement needs of small currents, such as current monitoring in microelectronic circuits, and the measurement requirements of large currents, such as current detection in power transmission systems.

[0050] By storing, analyzing, and processing measurement data through a database and a host computer, the device's performance can be optimized. This successfully extends its wide-load characteristics, enabling it to maintain good measurement performance under different load conditions. It effectively solves the problem of balancing the range coverage and measurement accuracy of traditional current sensors.

[0051] Compared with the prior art, the beneficial effects of the present invention are:

[0052] TMR technology, with its high sensitivity, can accurately capture extremely weak magnetic field changes, giving it a natural advantage in detecting weak current signals. Its low power consumption allows it to maintain stable performance during long-term operation, reducing energy consumption. Quantum sensors, on the other hand, stand at the pinnacle of precision and stability. Their ultra-high precision enables extremely accurate current measurement, while their stability ensures the reliability of measurement results under various environmental conditions. This invention combines a TMR array with a quantum current sensing unit, leveraging the complementary advantages of both. The TMR array handles preliminary detection and coarse adjustment of a wide range of currents, while the quantum current sensing unit focuses on high-precision measurement, ensuring accurate acquisition of current information even in complex current and strong electromagnetic interference environments.

[0053] The hybrid magnetic array current sensor proposed in this invention, once successfully applied, will have a profound impact on the safe, stable, and efficient operation of power systems. In power dispatching, accurate current measurement data will help dispatchers more accurately grasp the real-time operating status of the power system, achieve more rational power allocation, avoid local overload or underload problems caused by uneven power distribution, and improve the overall operating efficiency of the power system. In the field of power equipment protection, it can detect current anomalies in a timely and accurate manner, providing reliable data support for relay protection devices, quickly disconnecting faulty lines, preventing the fault from escalating, and ensuring the safe operation of power equipment. In the long term, the application of the hybrid magnetic array current sensor will also promote the development of smart grids, lay a solid foundation for the intelligent and automated control of power systems, and help the energy industry transform towards a green, low-carbon, and efficient direction. Attached Figure Description

[0054] The accompanying drawings, which form part of this invention, are used to provide a further understanding of the invention. The illustrative embodiments of the invention and their descriptions are used to explain the invention and do not constitute an improper limitation of the invention.

[0055] Figure 1 This is a frame diagram of a hybrid magnetic array current sensor shown in an embodiment of the present invention;

[0056] Figure 2 This is a structural diagram of the hybrid magnetic array current sensor shown in an embodiment of the present invention;

[0057] Figure 3 This is a schematic diagram of a TMR circuit board shown in an embodiment of the present invention;

[0058] Figure 4 This is a circuit diagram of the TMR differential operational amplifier unit shown in an embodiment of the present invention;

[0059] Among them, 1. opening and closing mechanism; 2. shielding structure; 3. TMR chip; 4. current-carrying conductor; 5. microwave antenna; 6. diamond NV color center; 7. photodetector; 8. inner diameter. Detailed Implementation

[0060] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0061] It should be noted that the following detailed description is illustrative and intended to provide further explanation of the invention. Unless otherwise specified, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0062] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the scope of exemplary embodiments according to the invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0063] like Figure 1 As shown, the present invention provides a hybrid magnetic array current sensor, including: a TMR array unit, a quantum current sensing unit, a data acquisition unit, a transmission unit, and a host computer, wherein the host computer is connected to the data fusion unit through the transmission unit;

[0064] The TMR array unit is used to convert the change in the magnetic field of the sensed current into an electrical signal to obtain the first current data.

[0065] The quantum current sensing unit is used to convert the sensed quantum state signal changes into electrical signals to obtain second current data;

[0066] The data acquisition unit is used to acquire the temperature of the TMR array and the corresponding output voltage at the reference magnetic field.

[0067] The data fusion unit is used to obtain the sensitivity drift coefficient based on the temperature of the TMR array and the corresponding output voltage under the reference magnetic field; to compensate the first current data according to the sensitivity drift coefficient to obtain the compensated first current data; and to fuse the compensated first current data and the second current data to obtain the fused current data.

[0068] The host computer is used to receive the fused current data uploaded by the data fusion unit and obtain the current measurement results.

[0069] In some embodiments, the sensitivity drift coefficient is expressed by the following formula:

[0070]

[0071] in, This represents the sensitivity drift coefficient. This represents the output value of the TMR array under a reference magnetic field. B NV This indicates the reference magnetic field strength used for diamond color center calibration. T 0 is the reference temperature. T The temperature of the acquired TMR array;

[0072] The first current data after compensation is expressed by the following formula:

[0073]

[0074] in, This indicates the first current data. This represents the first current data after compensation.

[0075] In some embodiments, the MR array unit includes: a circular array, a rectangular array, a linear array, and other special arrays.

[0076] In some embodiments, the MR array unit includes several magnetic field sensing units, and an online calibration method is used. Based on the magnetic field results measured by all magnetic field sensing units, combined with the solution calculation of the magnetic field-current inversion model, the position of the current conductor under test is located, the correlation coefficient of each magnetic field sensing unit is calculated, and calibration is performed according to the correlation coefficient of each magnetic field sensing unit.

[0077] In some embodiments, the quantum current sensing unit includes an optical fiber, an optical fiber adapter, a diamond probe, a multi-axis displacement stage, a microwave coil, a microwave switch, and a microwave signal amplifier.

[0078] The output end of the optical fiber is connected to the substrate of the diamond probe, and a multi-axis displacement stage is used to control the center of the end face of the output end of the optical fiber to be coaxial with the NV color center of the diamond probe.

[0079] The laser emitted from the laser source is introduced into the optical fiber through the optical fiber adapter, and then the optical fiber transmits the laser to the diamond probe to excite the NV color center to generate a fluorescence signal.

[0080] A microwave coil is wound around a diamond probe. The microwave signal generated by the microwave source is applied to the microwave coil after passing through a microwave switch and a microwave signal amplifier, so as to control the spin state of the diamond NV color center.

[0081] The connection line between the microwave coil and the microwave source is laid in parallel with the optical fiber.

[0082] In some embodiments, the transmission unit includes an optical fiber transmission unit for transmitting current measurement data using optical signals, thereby achieving electrical isolation between the measuring end and the receiving end.

[0083] In some embodiments, the transmission unit further includes a microwave control unit, wherein the microwave transmission line of the microwave signal of the microwave control unit is arranged in conjunction with the optical signal transmission line; the microwave signal is generated by a microwave source and transmitted through the microwave transmission line to a microwave coil or resonant cavity near the diamond NV color center.

[0084] In some embodiments, the host computer is also connected to a signal processing unit via a transmission unit for amplifying, filtering, and linearizing the first current data and the second current data.

[0085] In some embodiments, fusing the compensated first current data and second current data includes fusing the processed first current data and second current data using a weighted average method or a Kalman filter algorithm.

[0086] In some embodiments, the hybrid magnetic array current sensor further includes a central control unit for controlling the sampling frequency, start-up, and stop of the TMR array unit and the quantum current sensing unit.

[0087] In some embodiments, the central control unit is used to interact with the signal processing unit and the data fusion unit to set relevant parameters.

[0088] In some embodiments, the central control unit is used to analyze, store, and communicate with external devices the transmitted data.

[0089] In some embodiments, the hybrid magnetic array current sensor further includes a power supply and management unit for providing power to the TMR array unit, quantum sensor unit, data acquisition unit, signal processing unit, data fusion unit, central control unit, and transmission unit.

[0090] In some embodiments, the hybrid magnetic array current sensor further includes a database for storing data.

[0091] This invention aims to overcome the numerous limitations of traditional current sensors in modern power system applications. Faced with the complex characteristics of grid currents—such as large dynamic range and wide bandwidth—due to the large-scale integration of new energy sources and the widespread application of high-capacity power electronic equipment in new power systems, traditional current sensors—whether due to the saturation issues, large size, and heavy weight of electromagnetic transformers, or the shortcomings of Hall effect sensors in terms of accuracy, stability, and anti-interference capabilities—are unable to meet the ever-increasing demand for high-precision current measurement. This invention combines multiple TMR array units with quantum current sensing units and constructs a corresponding signal processing and transmission unit. Utilizing the high sensitivity of the TMR array units to magnetic field changes, wide-range current measurement is achieved. The ultra-high precision of the quantum current sensing unit improves overall measurement accuracy. Simultaneously, an optical fiber transmission unit ensures reliable signal transmission in environments with strong electromagnetic interference, achieving electrical isolation between the measuring and receiving ends, effectively avoiding the impact of electromagnetic interference on current measurement data. This provides accurate and reliable current measurement data support for many key aspects of power system operation, electricity trade settlement, and carbon trading, greatly promoting the development of power systems towards intelligence and efficiency.

[0092] The following is a detailed description of this embodiment:

[0093] This invention discloses a hybrid magnetic array current sensor, including a TMR array unit, a quantum current sensing unit, a data acquisition unit, a transmission unit, a signal processing unit, a data fusion unit, a central control unit, a power supply, a management unit, and a host computer. The signal processing unit, the data fusion unit, and the central control unit are connected to the host computer through the transmission unit, and the host computer is connected to a database.

[0094] In one or more embodiments, the TMR array unit, such as Figure 3 As shown, based on the tunneling magnetoresistance effect, it can sensitively sense changes in the magnetic field generated by current. When current passes through a conductor, the strength of the surrounding magnetic field is proportional to the magnitude of the current. The resistance of the TMR element changes significantly with the change in magnetic field. By measuring this resistance change, the current value can be detected with high precision, even capturing minute current changes. It is suitable for current monitoring in precision instruments and equipment, current control in low-power circuits, and other scenarios requiring high current accuracy. The TMR array unit structure includes circular arrays, rectangular arrays, linear arrays, and other special arrays. This sensor uses an online calibration method, based on the magnetic field results measured by all magnetic field sensing units, and combines the solution of the magnetic field-current inversion model to accurately locate the position of the conductor under test. From this, the correlation coefficient between the measured current and the magnetic field measured by each magnetic field sensing unit is calculated.

[0095] Specifically, the online calibration process for the TMR array cell structure includes the following steps:

[0096] (1) Layout and data acquisition of magnetic field sensing unit

[0097] Suppose that there are N sensing units in the TMR array cell structure, and the spatial coordinates of the i-th unit are (x, y, y). i ,y i ,z i When the conductor being measured passes through, each magnetic field sensing unit synchronously acquires the magnetic field strength B. i This forms the original data set {B1, B2, ..., B}. N};

[0098] (2) Magnetic field-current inversion modeling

[0099] Establish the position of the current conductor (x) c ,y c ,z c The physical model of magnetic field distribution. According to the Biot-Savart law, the magnetic field produced by a single infinitely long straight conductor is:

[0100]

[0101] in, , Represents the permeability of free space. Indicates the measured current. This represents the perpendicular distance from the magnetic field sensing unit to the conductor.

[0102] (3) Solving for position parameters

[0103] Construct a system of nonlinear equations:

[0104]

[0105] The Levenberg-Marquardt algorithm is used for iterative solution, and the objective function is:

[0106]

[0107] This optimization process can simultaneously obtain the conductor position ( , and current estimates .

[0108] (4) Calculation of correlation coefficient

[0109] The correlation coefficients of each magnetic field sensing unit are calculated based on the positioning results. :

[0110]

[0111] This coefficient Characterizing the conversion relationship between the measured value of the sensing unit and the actual current, under ideal conditions In the actual system, statistics are collected from each unit. Consistency of variance assessment measures.

[0112] (5) Dynamic calibration update

[0113] A sliding time window mechanism is established to periodically execute the above solution process during continuous measurements. When disturbances cause changes in array characteristics, the correlation coefficient matrix is ​​updated. Achieve self-calibration.

[0114] In one or more implementations, such as Figure 2 As shown, the hybrid magnetic array current sensor includes an opening / closing structure 1, a shielding structure 2, a TMR chip 3, a current-carrying conductor 4, a microwave antenna 5, a diamond NV color center 6, a photodetector 7, and an inner diameter 8.

[0115] Among them, the opening and closing structure 1 is used to dynamically adjust the aperture of the TMR array unit to adapt to the measured object of different sizes.

[0116] In this embodiment, the opening and closing structure 1 adopts a hinged mechanical structure with a built-in stepper motor drive, achieving an opening and closing accuracy of ±0.1 mm. When closed, it forms a closed magnetic circuit, reducing magnetic leakage; when open, it allows current-carrying conductors with a maximum diameter of 20 mm to pass through. Furthermore, the outer layer of the opening and closing structure 1 is made of 316L stainless steel (anti-magnetic interference), and the inner lining is a silicone buffer layer (to prevent mechanical wear).

[0117] Shielding structure 2 is used to suppress external magnetic field interference and improve the signal-to-noise ratio.

[0118] In this embodiment, the outer layer of the shielding structure 2 can be made of permalloy (μ=100000), the middle layer can be made of soft magnetic ferrite, and the inner layer can be made of high-permeability nanocrystalline tape. The shielding structure 2 integrates a three-dimensional Helmholtz coil to cancel the residual magnetic field in real time (compensation accuracy ±5 nT).

[0119] TMR chip 3 uses MgO tunnel junction (1.2 nm thick) + CoFeB free layer (10 nm) + IrMn pinning layer.

[0120] The current-carrying conductor 4 serves as the current path to be measured or the reference magnetic field source. It is a U-shaped copper conductor, through which a standard current (such as 1A RMS) is passed to correct the TMR sensitivity drift in real time.

[0121] Microwave antenna 5 is used to manipulate quantum mechanics.

[0122] Diamond NV color center 6, synthesized using CVD.

[0123] The photodetector 7 includes an avalanche photodiode (APD) and a lock-in amplifier circuit. The lock-in amplifier circuit is used for synchronous detection of fluorescence signals (time constant adjustable from 1 ms to 10 s) with a dynamic range of 120 dB. The photodetector 7 adopts a double-layer shielding (electromagnetic + optical shielding) design to eliminate ambient light and radio frequency crosstalk.

[0124] Among them, the microwave antenna 5, the diamond NV color center 6, and the photodetector 7 are mounted on the PCB board and together with the TMR chip 3, output the signal to the microcontroller.

[0125] In one or more embodiments, the quantum sensor unit undergoes special treatment at the output end of the optical fiber. The cladding and core of the output end are integrally processed into a frustum shape, and then photosensitive adhesive is coated on its end face. The output end of the optical fiber is then connected to the substrate of the diamond probe, and precisely adjusted using a multi-axis displacement stage to ensure that the center of the end face of the output end of the optical fiber is coaxial with the NV color center of the diamond probe. Finally, the photosensitive adhesive is cured by irradiating it with excitation light of a specific wavelength, thereby achieving a stable connection between the optical fiber and the diamond probe. Using an optical fiber adapter, the laser emitted from the laser source is introduced into the optical fiber through the adapter, and then the optical fiber transmits the laser to the diamond probe, exciting the NV color center to generate a fluorescence signal. A microwave coil is wound around the diamond probe. The microwave signal generated by the microwave source is amplified by a microwave switch and then applied to the microwave coil, thereby controlling the spin state of the diamond NV color center. The connection line between the microwave coil and the microwave source can be laid in parallel with the optical fiber and integrated into a single system.

[0126] In one or more embodiments, the data acquisition unit includes a temperature sensor and a voltage sensor.

[0127] The temperature sensor and voltage sensor are properly fitted and installed with the TMR array unit. The temperature sensor should ensure that it can accurately detect temperature changes in the TMR array unit while avoiding interference from other external heat sources or interference sources. Once the temperature sensor is installed, real-time temperature measurement of the TMR array unit begins to obtain accurate temperature data.

[0128] In one or more embodiments, the transmission unit includes an optical fiber transmission unit and a microwave control unit.

[0129] Specifically, the fiber optic transmission unit uses optical signals to transmit current measurement data, achieving electrical isolation between the measuring end and the receiving end. In environments with strong electromagnetic interference, such as power systems, it effectively avoids the impact of electromagnetic interference on the transmitted signal, ensuring that the current signal can be accurately transmitted from the sensor end to the data processing center or monitoring equipment. In practical applications, an electro-optical conversion unit needs to be connected after the signal processing unit, data fusion unit, and central control unit to convert the electrical signal into an optical signal, which is then transmitted to the host computer via the fiber optic transmission unit.

[0130] Specifically, the microwave control unit features a microwave signal transmission line that is coordinated with the optical signal transmission line. The microwave signal is generated by a microwave source and transmitted via microwave transmission lines (such as coaxial cables or microstrip lines) to a structure near the diamond NV color center, such as a microwave coil or resonant cavity, for precise manipulation of the quantum state. This ensures that the current data collected by the TMR array unit and the quantum sensor unit is transmitted to the control room without interference, improving the reliability and accuracy of the entire measurement system.

[0131] In one or more embodiments, the signal processing unit is used to amplify, filter, linearize, and other processes the raw signals acquired by the TMR array unit and the quantum sensor unit, converting weak signals that may contain noise interference or nonlinearity into a standard signal form suitable for subsequent circuit processing and analysis, thereby improving the quality and stability of the signal so as to obtain current information more accurately.

[0132] In one or more embodiments, the data fusion unit is responsible for calculating the sensitivity drift coefficient based on the voltage output value of the TMR array under a reference magnetic field at a reference temperature, the voltage output value of the TMR array under a reference magnetic field at the actual temperature, and the reference magnetic field strength calibrated by the diamond color center.

[0133]

[0134] in, This represents the sensitivity drift coefficient. This represents the output value of the TMR array under a reference magnetic field. B NV This indicates the reference magnetic field strength used for diamond color center calibration. T 0 is the reference temperature. T The temperature of the acquired TMR array;

[0135] The current data of the TMR array cells is compensated based on the sensitivity drift coefficient, as shown in the following formula:

[0136]

[0137] in, This represents the current data of the TMR array cells. This represents the current data of the compensated TMR array cells;

[0138] The current data of the compensated TMR array unit and the current data of the quantum current sensing unit are fused to obtain fused current data.

[0139] The signals from the TMR array unit and the quantum sensor unit, after signal conditioning, are fused together. Since these two types of sensor units each have their own advantages and limitations, the data fusion unit can combine the data from both using specific algorithms (such as weighted averaging, Kalman filtering, etc.) to combine their strengths and compensate for their weaknesses, thereby obtaining more reliable and accurate current measurement results and fully leveraging the high-precision characteristics of the hybrid sensor system.

[0140] Specifically, taking the weighted average method as an example, the data from the TMR array unit and the quantum sensor unit are fused. The specific process is as follows:

[0141] (1) Assume the measured value of the TMR array cell is Its measurement variance is (Reflecting noise level); the measured values ​​of the quantum sensor unit Its measurement variance is .

[0142] The variance between the two needs to be determined through sensor calibration or historical data statistics. The smaller the variance, the higher the sensor accuracy.

[0143] (2) Assign weights based on sensor accuracy (variance), with the weights being inversely proportional to the variance:

[0144]

[0145]

[0146]

[0147] in, Indicates the weight of the TMR array cell. This represents the weight of the quantum sensor unit.

[0148] (3) Weighted average calculation

[0149]

[0150] Where x represents the fusion result.

[0151] (4) Dynamic weight adjustment

[0152] If the variance of the TMR array cells and the variance of the quantum sensor unit As operating conditions change, variance can be estimated in real time using a sliding window:

[0153]

[0154] in, This represents the mean of the TMR data within the window, where M is the window length. A similar method is used to update... .

[0155] In one or more embodiments, the central control unit is used to coordinate and control the operation of each unit. It controls the sampling frequency, start-up, and stop of the TMR array unit and quantum sensor unit; interacts with the signal processing unit and data fusion unit to set relevant parameters; further analyzes and stores the transmitted data and communicates with external devices to achieve intelligent current monitoring and management functions.

[0156] In one or more embodiments, the power supply and management unit provides a stable and suitable power supply for the TMR array unit, quantum sensor unit, signal processing unit, data fusion unit, central control unit, and fiber optic transmission unit. It needs to have efficient power conversion and distribution capabilities, adapt to the power requirements of different units, and may need to consider power supply and management strategies under different operating conditions (such as low-power standby mode and high-load measurement mode) to extend the lifespan of the entire sensing device and ensure its stable operation.

[0157] In one or more embodiments, the TMR array unit is connected to the TMR differential operational amplifier unit, the circuit structure of which is as follows: Figure 4As shown, the unit includes a U10 chip and a U11 chip. The third port of the U10 chip is grounded. The fourth port of the U10 chip is connected to one end of the first resistor S31-. The other end of the first resistor S31- is connected to one end of capacitor C25, one end of capacitor C26, and the fourth port of the U11 chip. The other end of C25 is connected to +2.5V. The other end of capacitor C26 is connected to one end of capacitor C27, one end of the second resistor, and the first port of the U11 chip. The other end of capacitor C27 is connected to +2.5V. The other end of the second resistor is connected to the fifth port of the U10 chip. The sixth port of the U10 chip is connected to +5V, one end of capacitor C23, and one end of capacitor C24. The other ends of capacitors C23 and C24 are both grounded. The second port of the U11 chip is connected to one end of the third resistor R23 and one end of the fourth resistor R24. The third port of the U11 chip is connected to the other end of the third resistor R23 and the other end of the fourth resistor R24. The fifth port of the U11 chip is grounded. The sixth port of the U11 chip is connected to +2.5V and one end of capacitor C28. The other end of capacitor C28 is grounded. The seventh port of the U11 chip is the output signal of the TMR module, which is connected to the ADC acquisition unit (signal processing unit). The eighth port of the U11 chip is connected to one end of capacitor C29, +12V, and one end of capacitor C77. The other ends of capacitor C29 and capacitor C77 are grounded.

[0158] In this embodiment, U10 can be a TMR chip, and U11 can be a differential operational amplifier chip.

[0159] In one or more embodiments, this invention, by constructing and setting up a database and a host computer, can completely store all data generated by the high-precision hybrid magnetic array current sensing device during measurement, analysis, and processing, so that it can be retrieved at any time later. This effectively solves the problem of accurately determining data related to the measurement range, accuracy control, and stability assessment of the TMR array unit measurement in this device, providing a precise and reliable basis for the formulation of technical guidelines and performance management related to TMR measurement in high-precision hybrid magnetic array current sensing devices.

[0160] This invention uses a TMR array unit to sense changes in the magnetic field of the current and convert them into electrical signals. A quantum sensor unit, through an optical fiber and diamond probe in conjunction with a laser and microwave source, generates quantum state signal changes. A signal processing unit receives the raw signals from both units, amplifies, filters, and linearizes them into standard signals. A data fusion unit fuses the processed TMR and quantum sensor signals using a specific algorithm to obtain accurate current measurement results. A central control unit sets the sampling parameters of the TMR array unit and the quantum sensor unit, controls their start and stop, interacts with the signal conditioning and data fusion unit, deeply analyzes and stores the fused data, and communicates with external devices to achieve intelligent monitoring and management. A power supply and management unit provides stable and adaptable power according to the different operating conditions of each unit. In the transmission unit, the optical fiber transmission unit transmits current data via optical signals to achieve electrical isolation, and the microwave control unit ensures the microwave control function of the quantum sensor, enabling accurate and reliable data transmission to the control unit. The control unit can also communicate in reverse to adjust and control each unit.

[0161] Example 2

[0162] This embodiment provides a method for constructing a hybrid magnetic array current sensor, including the following steps:

[0163] Step 1: Select suitable TMR components, considering their sensitivity, noise, and stability, and design the array structure and determine the components. After selecting the components, design the TMR array structure. Combining the magnetic field distribution characteristics of the target object and the spatial constraints of the system, use electromagnetic simulation software for simulation analysis to determine the precise position and spacing of each component. Reasonable setting of position and spacing can optimize the magnetic field detection effect and reduce mutual interference between components. Finally, when laying the signal lead-out lines, select low-resistance, high-insulation wires and connect them according to reasonable wiring rules to ensure efficient and stable signal transmission to the signal processing unit.

[0164] Step 2: Encapsulate the diamond NV center probe to reduce external interference. Equip it with a matching laser and microwave source to construct an optical signal collection and conversion system connected to the signal processing unit. During encapsulation, first remove impurities and contaminants from the probe surface. Then, seal the probe with an encapsulation material that has electromagnetic shielding and moisture-proof functions to minimize the impact of external electromagnetic interference and humidity changes on the probe. The wavelength, power, and stability of the laser source must be precisely matched to the excitation characteristics of the diamond NV center. The frequency and power of the microwave source must also be precisely adjusted according to the magnetic resonance characteristics of the NV center to ensure precise control of the NV center. Construct an optical signal collection and conversion system, using a photodetector to convert the optical signal into an electrical signal, and connect the converted electrical signal to the signal processing unit to provide reliable data for subsequent processing.

[0165] Step 3: Select low-loss optical fiber based on the required signal transmission distance, rate, and bandwidth. Design an adapter interface to ensure a good physical connection and electrical matching between the interface, the signal source, and the optical fiber, converting the signal into an optical signal for transmission through the fiber. Plan and protect the optical fiber path, fully considering various factors in the installation environment, and install electromagnetic shielding devices to reduce electromagnetic interference. Accurately connect the optical fiber to the signal processing unit to complete reliable signal transmission.

[0166] Step 4: Select an amplifier with low noise and high gain characteristics to amplify and filter the resistance change signal of the TMR array unit. Based on the signal's frequency range and interference characteristics, select an appropriate filter type to filter out various noise and interference components in the amplified signal. For quantum sensing analog electrical signals, amplifiers and filters specifically designed for quantum signals should be used. After processing, a high-precision analog-to-digital converter is used to convert the analog electrical signal into a digital signal, which is then transmitted to the data fusion unit.

[0167] Step 5: The magnitude, direction, frequency of change, and harmonic components of the current all affect the accuracy of the measurement results. Develop a data fusion algorithm to establish a quantitative relationship between current characteristics and data weights. Select a processing platform for data fusion, considering requirements such as data volume, processing speed, and computational complexity. To ensure the accuracy of data transmission and processing, a verification and error correction mechanism needs to be implemented. Methods such as parity checking and cyclic redundancy check (CRC) are used to verify the transmitted data, promptly detecting and correcting errors during data transmission.

[0168] Step 6: Select a processor with suitable computing power and processing speed, taking into account system performance requirements, power consumption, and cost. When building the hardware platform, the layout and wiring of the circuit board should be designed rationally to ensure stable electrical connections and reliable signal transmission between components. The software should have functions such as data acquisition, analysis and processing, status judgment, and instruction generation. Through in-depth analysis of the acquired data, combined with preset current status judgment rules, the current status (e.g., normal, overload, short circuit) should be accurately determined, and corresponding control instructions should be generated based on the judgment results. Depending on the scenario, appropriate communication methods and interfaces should be selected, such as Ethernet, serial port, and bus, to achieve data sharing and collaborative control.

[0169] Step 7: Analyze the power requirements of each unit. Select appropriate power chips and topology, design monitoring circuits to prevent anomalies, and consider heat dissipation.

[0170] The measured current phasor at a single frequency (e.g., 50 Hz or 60 Hz) and the corresponding magnetic field phasors measured by all magnetic field sensing units satisfy the following relationship:

[0171]

[0172] In the formula, For the first k The magnetic field measured by each magnetic field sensing unit; N This represents the number of magnetic field sensing units contained in the circular array; The measured current phasor; γ k for and The proportional coefficient between them.

[0173] The magnetic array current sensor is installed on the current line being measured, and the coefficient is... γ k After calibration, the magnetic field measured by all magnetic field sensing units is substituted into the above formula to calculate the measured current.

[0174] The hybrid magnetic array current sensor described in this invention utilizes TMR elements based on the tunneling magnetoresistance effect to form various arrays (circular, rectangular, linear, etc.), selected according to different current measurement scenarios. A calibration system equipped with hardware containing a magnetic field sensing unit and magnetic field-current inversion model algorithm software is included to accurately locate the current conductor and calculate correlation coefficients, ensuring measurement accuracy. A diamond probe is fabricated and connected to the fiber optic output end. A laser transmission system (laser source, adapter, fiber optic) provides power for exciting NV color center fluorescence, and a microwave control system (microwave source, switch, amplifier, coil) controls the spin state; all circuitry is integrated. The amplification and acquisition module includes differential amplification and an ADC acquisition module to process the TMR signal.

[0175] The signal processing unit includes an amplification and acquisition module and an ADC acquisition module.

[0176] The algorithm unit uses high-performance devices to fuse data from the TMR array unit and the quantum sensor according to a specific algorithm. The wireless transmission unit uses technologies such as IoT and 4G to transmit data to the host computer. The database is used to store data, the graphical interface display unit intuitively displays information, and the interactive control unit communicates bidirectionally and interacts with external systems to facilitate intelligent management and collaborative work.

[0177] This invention supports the technological development and large-scale engineering application of electronic current sensors, addressing the issue that the accuracy and stability of current sensors are easily affected by environmental factors. It researches a current sensing method based on a novel current sensing principle. The hybrid magnetic array current sensing technology utilizes an array of multiple magnetic sensors to measure the magnetic field at multiple measurement points around the measured current, thereby accurately retrieving the current using the magnetic field information. Leveraging the advantages of current TMR array units, such as high sensitivity, wide bandwidth, and good linearity, a quantum sensor is used to calibrate, evaluate, and perform variable analysis on the TMR magnetic sensor. This quantum sensor serves as a "benchmark" in various algorithms, achieving the superior characteristics of NV color center quantum sensors at low cost. The hybrid magnetic array current sensor can easily achieve wide-bandwidth, high-dynamic-range current measurement, perfectly matching the new requirements of current measurement in modern power systems.

[0178] Example 3

[0179] This embodiment designs an insulation design method for a hybrid magnetic array current sensor, including the following steps:

[0180] (a) High-performance epoxy resin and other materials with high insulation strength and low dielectric constant are selected. In this embodiment, it is used on the 10kV side. Epoxy resin is cast on the outside of the shielding box to form an insulating structure for electrical isolation, so as to withstand high electric field strength, block current conduction, and achieve electrical isolation.

[0181] (b) Adjust the internal structure of the hybrid magnetic array to increase the spacing between the high-voltage and low-voltage sections, reduce the electric field strength, and decrease the risk of insulation breakdown. Design a textured surface on the insulation to extend the creepage distance, disperse the electric field energy, and ensure the stability of the insulation system.

[0182] Specifically, a concentric circle layout structure is established with the primary conductor, TMR magnetic sensor chip and quantum sensitive area as the core. The high voltage area (10kV) is concentrated within a 15mm radius of the PCB center. The low voltage area is divided into digital processing area, communication interface area and power management area according to functional modules and distributed around the high voltage area.

[0183] (c) Install aluminum foil shielding in the high and low voltage range to limit the electric field range, reduce interference, and reliably ground the shielding to avoid charge accumulation that could damage the insulation.

[0184] The TMR chip and quantum region near the primary conductor are high-voltage areas, while the surrounding area is a low-voltage area covered by a shielding box.

[0185] (d) When casting insulating materials (such as epoxy resin), use vacuum casting technology to remove air bubbles and ensure the material is dense. Finely machine the surface of the insulating components to make it smooth and reduce electric field distortion.

[0186] Specifically, the TMR circuit board is surrounded by a shielding box, and the outside of the shielding box is cast with epoxy resin, thus forming the entire device into a product.

[0187] (e) The hybrid magnetic array current sensor constructed for quantum sensors and TMR sensors is equipped with a sealed housing and sealant to prevent moisture and dust intrusion, maintain a stable insulation environment, and extend the life of insulation materials.

[0188] In this invention, the hybrid magnetic array current sensor utilizes a TMR array unit that senses changes in the current magnetic field based on the tunneling magnetoresistance effect. Multiple array structures are employed, and online calibration is used to locate the current conductor. The quantum sensor unit features a specially treated fiber optic output end connected to a diamond probe, introducing laser excitation of NV color centers and microwave modulation of the spin state. The transmission unit features electrically isolated fiber optic transmission units and a coordinated microwave modulation unit to ensure data transmission. The signal processing unit amplifies, filters, and linearizes the acquired signal, improving signal quality and stability. The data fusion unit fuses signals from two units using a specific algorithm to obtain more accurate current measurement results. The central control unit coordinates and controls the operation of each unit, handling data interaction, analysis, storage, and communication. The power supply and management unit provides power to each unit, adapting to power requirements and considering strategies for different operating conditions.

[0189] This invention can be installed in various devices or systems requiring current monitoring and management. The hybrid magnetic array current sensor comprehensively covers all nodes of the power distribution network, accurately monitoring current flow and magnitude, and promptly detecting potential power imbalances or overload hazards. With its highly sensitive current monitoring characteristics, it ensures the stability and reliability of base station power supply under different service loads, effectively improving the quality of power service.

[0190] The above description is merely a preferred embodiment of the present invention and is not intended to limit the invention. Various modifications and variations can be made to the present invention by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present invention should be included within the scope of protection of the present invention.

Claims

1. A hybrid magnetic array current sensor, characterized in that, include: The system comprises a TMR array unit, a quantum current sensing unit, a data acquisition unit, a transmission unit, and a host computer, wherein the host computer is connected to the data fusion unit through the transmission unit; The TMR array unit is used to convert the change in the magnetic field of the sensed current into an electrical signal to obtain the first current data. The quantum current sensing unit is used to convert the sensed quantum state signal changes into electrical signals to obtain second current data; The data acquisition unit is used to acquire the temperature of the TMR array and the corresponding output voltage at the reference magnetic field. The TMR array unit includes: circular array, rectangular array, and linear array; The TMR array unit includes several magnetic field sensing units and employs an online calibration method. Based on the magnetic field results measured by all magnetic field sensing units, combined with the solution calculation of the magnetic field-current inversion model, the position of the current-under-measurement conductor is located, the correlation coefficient of each magnetic field sensing unit is calculated, and calibration is performed based on the correlation coefficient of each magnetic field sensing unit. The data fusion unit is used to obtain the sensitivity drift coefficient based on the temperature of the TMR array and the corresponding output voltage under the reference magnetic field; to compensate the first current data according to the sensitivity drift coefficient to obtain the compensated first current data; and to fuse the compensated first current data and the second current data to obtain the fused current data. The sensitivity drift coefficient is expressed by the following formula: in, This represents the sensitivity drift coefficient. This represents the output value of the TMR array under a reference magnetic field. B NV This indicates the reference magnetic field strength used for diamond color center calibration. T 0 is the reference temperature. T The temperature of the acquired TMR array; The first current data after compensation is expressed by the following formula: in, This indicates the first current data. This represents the first current data after compensation; The host computer is used to receive the fused current data uploaded by the data fusion unit and obtain the current measurement results.

2. The hybrid magnetic array current sensor according to claim 1, characterized in that, The quantum current sensing unit includes an optical fiber, an optical fiber adapter, a diamond probe, a multi-axis displacement stage, a microwave coil, a microwave switch, and a microwave signal amplifier. The output end of the optical fiber is connected to the substrate of the diamond probe, and a multi-axis displacement stage is used to control the center of the end face of the output end of the optical fiber to be coaxial with the NV color center of the diamond probe. The laser emitted from the laser source is introduced into the optical fiber through the optical fiber adapter, and then the optical fiber transmits the laser to the diamond probe to excite the NV color center to generate a fluorescence signal. A microwave coil is wound around a diamond probe. The microwave signal generated by the microwave source is applied to the microwave coil after passing through a microwave switch and a microwave signal amplifier, so as to control the spin state of the diamond NV color center. The connection line between the microwave coil and the microwave source is laid in parallel with the optical fiber.

3. The hybrid magnetic array current sensor according to claim 1, characterized in that, The transmission unit includes an optical fiber transmission unit, which is used to transmit current measurement data using optical signals to achieve electrical isolation between the measuring end and the receiving end; or, The transmission unit also includes a microwave control unit, wherein the microwave transmission line of the microwave signal in the microwave control unit is arranged in coordination with the optical signal transmission line. The microwave signal is generated by a microwave source and transmitted through a microwave transmission line to a microwave coil or resonant cavity near the NV color center of the diamond. or, The host computer is also connected to a signal processing unit via a transmission unit, which is used to amplify, filter, and linearize the first current data and the second current data.

4. The hybrid magnetic array current sensor according to claim 1, characterized in that, The process of fusing the compensated first current data and second current data includes using a weighted average method or a Kalman filter algorithm to fuse the processed first current data and second current data.

5. The hybrid magnetic array current sensor according to claim 1, characterized in that, The hybrid magnetic array current sensor also includes a central control unit, which controls the sampling frequency, start-up, and stop of the TMR array unit and the quantum current sensing unit; or, The central control unit is used to interact with the signal processing unit and the data fusion unit to set relevant parameters. or, The central control unit is used to analyze and store the transmitted data and communicate with external devices.

6. The hybrid magnetic array current sensor according to claim 1, characterized in that, The hybrid magnetic array current sensor also includes a power supply and management unit for providing power to the TMR array unit, quantum sensor unit, data acquisition unit, signal processing unit, data fusion unit, central control unit, and transmission unit. or, The hybrid magnetic array current sensor also includes a database for storing data.

7. A method for constructing a hybrid magnetic array current sensor, characterized in that, For constructing the hybrid magnetic array current sensor according to any one of claims 1-6, comprising: By selecting TMR elements, combining the magnetic field distribution characteristics of the target to be measured and the spatial constraints of the system, electromagnetic simulation software is used to perform simulation analysis to determine the precise position and spacing of each element, and to design the TMR array unit. A diamond NV center probe is encapsulated, equipped with a matching laser source and microwave source, and an optical signal collection and conversion system is constructed to connect to the signal processing unit. The diamond NV center probe is sealed and equipped with a laser source. The frequency and power of the microwave source are adjusted according to the magnetic resonance characteristics of the diamond NV center. The optical signal is converted into an electrical signal using a photodetector, and the converted electrical signal is connected to the signal processing unit. Select optical fiber based on the distance, rate, and bandwidth requirements of signal transmission; design an adapter interface to ensure the physical connection and electrical matching between the interface and the signal source and optical fiber, and convert the electrical signal into an optical signal for access to the optical fiber; An amplifier is selected to amplify and filter the resistance change signal of the TMR array unit. A filter and an analog-to-digital converter are selected to amplify and filter the data. The data is then transmitted to the data fusion unit via the analog-to-digital converter to obtain the current measurement result.

8. The method for constructing a hybrid magnetic array current sensor according to claim 7, characterized in that, The quantum current sensing unit includes an optical fiber, an optical fiber adapter, a diamond probe, a multi-axis displacement stage, a microwave coil, a microwave switch, and a microwave signal amplifier. The output end of the optical fiber is connected to the substrate of the diamond probe, and a multi-axis displacement stage is used to control the center of the end face of the output end of the optical fiber to be coaxial with the NV color center of the diamond probe. The laser emitted from the laser source is introduced into the optical fiber through the optical fiber adapter, and then the optical fiber transmits the laser to the diamond probe to excite the NV color center to generate a fluorescence signal. A microwave coil is wound around a diamond probe. The microwave signal generated by the microwave source is applied to the microwave coil after passing through a microwave switch and a microwave signal amplifier, so as to control the spin state of the diamond NV color center. The connection line between the microwave coil and the microwave source is laid in parallel with the optical fiber.

9. The method for constructing a hybrid magnetic array current sensor according to claim 7, characterized in that, The transmission unit includes an optical fiber transmission unit, which is used to transmit current measurement data using optical signals to achieve electrical isolation between the measuring end and the receiving end; or, The transmission unit also includes a microwave control unit, wherein the microwave transmission line of the microwave signal in the microwave control unit is arranged in coordination with the optical signal transmission line. The microwave signal is generated by a microwave source and transmitted through a microwave transmission line to a microwave coil or resonant cavity near the NV color center of the diamond. or, The host computer is also connected to a signal processing unit via a transmission unit, which is used to amplify, filter, and linearize the first current data and the second current data.

10. The method for constructing a hybrid magnetic array current sensor according to claim 7, characterized in that, The process of fusing the compensated first current data and second current data includes using a weighted average method or a Kalman filter algorithm to fuse the processed first current data and second current data.

11. The method for constructing a hybrid magnetic array current sensor according to claim 7, characterized in that, The hybrid magnetic array current sensor also includes a central control unit, which controls the sampling frequency, start-up, and stop of the TMR array unit and the quantum current sensing unit; or, The central control unit is used to interact with the signal processing unit and the data fusion unit to set relevant parameters. or, The central control unit is used to analyze and store the transmitted data and communicate with external devices.

12. The method for constructing a hybrid magnetic array current sensor according to claim 7, characterized in that, The hybrid magnetic array current sensor also includes a power supply and management unit for providing power to the TMR array unit, quantum sensor unit, data acquisition unit, signal processing unit, data fusion unit, central control unit, and transmission unit. or, The hybrid magnetic array current sensor also includes a database for storing data.

13. The method for constructing a hybrid magnetic array current sensor according to claim 7, characterized in that, The hybrid magnetic array current sensor is encapsulated with a sealed housing and sealant.

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