Clean room airflow simulation modeling method and system fused with process layout optimization

Abstract

The invention relates to a clean room airflow simulation modeling method and system fused with process layout optimization, belongs to the technical field of simulation modeling, and solves the problem that process layout and airflow cannot be optimized at the same time in existing simulation modeling. Comprising the steps of obtaining a process layout model, and constructing a label database according to a design general drawing, an architectural drawing and the process layout model; designing the purification air-conditioning system according to the process layout model and the label database, and determining design parameters; importing the process layout model and the design parameters into CFD pretreatment software to generate an initial model of the clean room, and arranging an air return passageway, a fan filter unit, a dry coil and a raised floor in the initial model according to the label database and the design parameters to obtain a fusion model; and grid division is performed on the fusion model to obtain a clean room airflow simulation model, then the clean room airflow simulation model is imported into CFD software for fluid simulation, and a process layout model of the clean room is optimized according to a fluid simulation result. And iterative optimization of the process and the airflow is realized.

Description

Technical Field

[0001] The present invention relates to the technical field of simulation modeling, and in particular, to a cleanroom airflow simulation modeling method and system integrating process layout optimization. Background Art

[0002] The diversity and complexity of pollutants in the cleanroom process layout and production process pose special requirements for the clean environment of the cleanroom. How to scientifically and accurately optimize the design of the clean environment and process layout to achieve high-quality, low-cost, and low-energy construction and operation has become a key problem affecting its development, and at the same time directly affects the realization of the industry's low-carbon emission reduction and high-quality development goals.

[0003] As a hub connecting product design, manufacturing technology, and market demand, through the optimization of the process line layout, not only can the cleanroom space be optimized to reduce the cleanroom space requirements, but also the material flow path can be optimized to reduce redundant handling, reduce the working distance and the concentration of power facilities of the operators in the cleanroom, and achieve the improvement of production efficiency and the reduction of the construction and operation costs of the cleanroom.

[0004] The quality of the cleanroom manufacturing production environment is one of the key factors guaranteeing its yield and the main factor causing random defects of products. The analysis of the environmental quality in the early stage of cleanroom construction is mainly carried out through airflow simulation. By performing a field analysis of the physical quantities of the controlled parameters, the flow field is optimized to achieve the goals of controlled environmental parameters and system energy saving. However, the key input conditions and evaluation indicators in the airflow simulation, such as the pollution source and its influence, are closely related to the process layout. At the same time, the two should be optimized and iterated with each other to form a layout and airflow organization that truly meets the production requirements, and then a competitive production line with high quality, low construction cost, and low operation energy consumption can be built in a real sense.

[0005] Currently, the process layout optimization and the airflow organization optimization are separated. First, a three-dimensional process layout design is carried out to generate process-related conditions and data, and these are used as the information submission conditions for the building and the purification air conditioning system. The HVAC professional uses this as the input to design the purification air conditioning system, and designs two-dimensional CAD drawings according to the design structure, including the return air duct, the floor, the plane and system diagrams and layout diagrams of the purification air conditioning system. Then, the simulation engineer processes the two-dimensional simulation model based on this CAD drawing, and then converts the two-dimensional simulation model into a three-dimensional geometric model. The airflow simulation is carried out according to the three-dimensional geometric model, and the pollution analysis is associated in the solution, including pollution sensitivity, pollution source, and intensity, etc., and finally the flow field analysis result is achieved.

[0006] The process from layout optimization to air flow simulation optimization in the existing method is relatively long, involving three-dimensional process layout models, two-dimensional CAD drawings, two-dimensional simulation models, and three-dimensional geometric models. Due to the non-closed process, iterative optimization cannot be achieved. Moreover, in practice, process layout adjustment is a common situation in scheme design. The scheme adjustment must be accompanied by a synchronous HVAC scheme, which involves complex iterative calculations from design to layout, resulting in low efficiency of cleanroom air flow simulation modeling, inability to achieve rapid simulation response after scheme adjustment, and poor modeling effects. Summary of the Invention

[0007] In view of the above analysis, embodiments of the present invention aim to provide a cleanroom air flow simulation modeling method integrating process layout optimization to solve the problems in existing simulation methods, where the process layout and HVAC design are mutually separated, information interaction cannot be carried out, and a fast and accurate simulation method for dual optimization of process and air flow for cleanrooms cannot be provided.

[0008] On the one hand, embodiments of the present invention provide a cleanroom air flow simulation modeling method integrating process layout optimization, including the following steps: Obtain the process layout model of the cleanroom, and construct a label database based on the equipment information in the general layout drawing, architectural drawing, and process layout model; Design the purification air-conditioning system according to the process layout model and the label database, and determine the design parameters; Import the process layout model and design parameters of the cleanroom into the CFD pre-processing software to generate an initial model of the cleanroom. Arrange the return air plenum, fan filter unit, dry coil, and raised floor in the initial model of the cleanroom according to the label database and the design parameters to obtain a fusion model; perform mesh division on the fusion model to obtain a cleanroom air flow simulation model; Import the cleanroom air flow simulation model into the CFD software for fluid simulation, and optimize the process layout model of the cleanroom according to the fluid simulation results.

[0009] Based on a further improvement of the above method, the label database includes data labels at five levels: cleanroom, process block, process step, BAY line, and equipment; the design of the purification air-conditioning system according to the label database includes: classifying each process block into multiple systems; calculating the heat load, moisture load, and air volume for each process block, and calculating the water flow rate for each system according to the heat load and moisture load of each process block; performing hydraulic balance calculation based on the water flow rate of each system to determine the pipe diameter size of each process block in each system; determining the model and quantity of HVAC equipment according to the air treatment plan.

[0010] Based on a further improvement of the above method, arranging the return air plenum in the initial model of the cleanroom includes: Determine the shape of the clean room according to the location dimensions of the clean room in the label database; if the shape of the clean room is rectangular, arrange a return air duct on one side of the long side of the clean room according to the dimensions of the clean room, and the dimensions of the return air duct are determined according to the dimensions, quantity, arrangement position, heat transfer area and resistance of the dry coils; if the shape of the clean room is L-shaped or U-shaped, arrange the return air duct along the outer periphery of the clean room in a closed loop. Obtain the dimensions and shape of the process block with independent return air according to the regional contour coordinates of the process block in the label database and whether there is independent return air, and then arrange the return air duct for the process block with independent return air separately.

[0011] Based on the further improvement of the above method, the dimensions of the return air duct are determined according to the dimensions, quantity, arrangement position, heat transfer area and resistance of the dry coils, including: When the dry coils are arranged at the entrance of the upper mezzanine or the lower mezzanine of the clean room, the area obtained by multiplying the height of the part where the return air duct communicates with the upper mezzanine or the lower mezzanine by the length of the return air duct is not less than the heat transfer area of the dry coils. When the dry coils are arranged in the middle of the return air duct, calculate the length and width of the vertical and horizontal projections according to the dimensions, quantity and horizontal included angle of the dry coils, and neither of them exceeds the length and width of the return air duct.

[0012] Based on the further improvement of the above method, the face velocity of a single dry coil does not exceed 2 m / s and the resistance does not exceed 40 Pa.

[0013] Based on the further improvement of the above method, the fan filter unit is arranged in the upper mezzanine of the clean room, including: Construct a corresponding cuboid according to the dimensions of the fan filter unit. If there is no heat generation and dust generation data for each device in the process block, arrange the fan filter units evenly in each BAY line area of the process block; otherwise, arrange them in parallel according to the number of fan filter units with the heat generation position of each device as the center.

[0014] Based on the further improvement of the above method, the raised floor is arranged at the connection between the middle layer and the lower mezzanine of the clean room, including: Divide the space of the clean room into multiple air flow circulation loops, and each air flow circulation loop contains multiple FFUs and various types of raised floors; Taking the arrangement area of the raised floor in each air flow circulation loop as a constraint, adjust the quantity of different types of raised floors, calculate the resistance of each air flow circulation loop formed by each adjustment by changing the air volume, air velocity and local resistance coefficient. When the resistance of each air flow circulation loop reaches equilibrium, obtain the arrangement quantity of different types of raised floors in each air flow circulation loop.

[0015] Based on further improvements to the above method, the resistance of each air flow circulation loop is obtained by separately calculating the resistance of excluding the raised floor in the loop and the resistance passing through the raised floor and summing them up. The formula is as follows: , wherein, represents the resistance of the air flow circulation loop, represents the resistance of excluding the raised floor in the loop, represents the resistance passing through the raised floor; represents the frictional resistance per unit length, represents the local resistance per unit length, represents the duct length; represents the air density, is the air flow velocity in the duct, represents the equivalent diameter of the duct, represents the friction coefficient; represents the air flow velocity at the location where local losses occur, represents the local resistance coefficient; represents the air viscosity coefficient, represents the thickness of the orifice plate perpendicular to the air flow direction, represents the air flow velocity when passing through the raised panel, represents the permeability, represents the inertial resistance coefficient.

[0016] Based on further improvements to the above method, the layout area of the raised floor in each air flow circulation loop is obtained by summing up the quantity and area of each type of raised floor; the types of raised floors include: raised floors with an opening ratio of 17%, 25%, 33%, 50%, adjustable raised floors with valves, and blind plates.

[0017] On the other hand, an embodiment of the present invention provides a cleanroom air flow simulation modeling system integrating process layout optimization, including: A database construction module, configured to obtain the process layout model of the cleanroom and construct a label database according to the equipment information in the general layout drawing, architectural drawing, and process layout model; A parameter design module, configured to design the purification air conditioning system according to the process layout model and the label database and determine the design parameters; A simulation model generation module, configured to import the process layout model and design parameters of the cleanroom into CFD pre-processing software to generate an initial model, arrange return air ducts, fan filter units, dry coils, and raised floors in the initial model according to the label database and the design parameters to obtain a fusion model; perform mesh division on the fusion model to obtain a cleanroom air flow simulation model; A fluid simulation module is used to import the cleanroom airflow simulation model into CFD software for fluid simulation, and optimize the process layout model of the cleanroom according to the fluid simulation results.

[0018] Compared with the prior art, the present invention can achieve at least one of the following beneficial effects: 1. Integrate the process with the HVAC design. By constructing a label database, synchronously export the HVAC design calculation parameters with the three-dimensional process layout model, quickly construct a three-dimensional model for simulation calculation, reduce many links in the conventional airflow simulation, and feedback and optimize the process layout according to the simulation results, realizing the iterative optimization of the process and airflow, greatly reducing the simulation cycle, achieving fast and accurate simulation response, and thus efficiently serving the actual engineering needs.

[0019] 2. Consider the airflow organization in the process layout optimization. The analysis and evaluation of the airflow organization are based on the process layout and environmental requirements. Through integrating the two, analyze the layout and airflow organization and display them synchronously, comprehensively analyze and evaluate the advantages and disadvantages of the scheme from multiple professional perspectives, avoid the impact of pollution diffusion and transfer caused by the failure to comprehensively consider the airflow in the layout on production, greatly reduce the losses caused by ex post compensation, and reduce the construction and operation and maintenance costs of the cleanroom.

[0020] In the present invention, the above technical solutions can also be combined with each other to achieve more preferred combination schemes. Other features and advantages of the present invention will be described in the subsequent specification, and some advantages can be made obvious from the specification, or understood by implementing the present invention. The objectives and other advantages of the present invention can be realized and obtained through the content specifically pointed out in the specification and the drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] The drawings are only for the purpose of showing specific embodiments, and are not considered as a limitation to the present invention. Throughout the drawings, the same reference signs represent the same components; Figure 1 is a flowchart of a cleanroom airflow simulation modeling method integrating process layout optimization in Embodiment 1 of the present invention; Figure 2 is a block diagram of a cleanroom airflow simulation modeling method integrating process layout optimization in Embodiment 1 of the present invention; Figure 3 is a schematic diagram of dividing the space of the cleanroom into multiple airflow circulation loops in Embodiment 1 of the present invention; Figure 4 is a schematic structural diagram of a cleanroom airflow simulation modeling system integrating process layout optimization in Embodiment 2 of the present invention. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0022] The preferred embodiments of the present invention will be specifically described below with reference to the accompanying drawings. The accompanying drawings form a part of this application and are used together with the embodiments of the present invention to explain the principles of the present invention, rather than to limit the scope of the present invention.

[0023] A specific embodiment of the present invention discloses a cleanroom airflow simulation modeling method integrating process layout optimization, as Figure 1 and Figure 2 shown, which includes the following steps: S1. Obtain the process layout model of the cleanroom, and construct a label database according to the equipment information in the general layout drawing, architectural drawing, and process layout model.

[0024] It should be noted that the process layout model is a three-dimensional model formed by performing the process layout of each device according to the equipment size structure and processing logic, combined with process characteristics, from-to relationship, characteristics of used equipment, and spatial layout factor relationship. Exemplarily, the three-dimensional process layout is completed using Plant Simulation software.

[0025] At the same time, construct a matching label database in the process layout model according to the equipment information in the general layout drawing, architectural drawing, and process layout model of the cleanroom. The label database includes data labels at five levels: cleanroom, process block, process, BAY line (a process layout method), and equipment.

[0026] Specifically, the data labels at the cleanroom level include: location dimensions, customer requirement indicators, and outdoor typical day HVAC, cold and heat source parameters related to HVAC design, etc.; among them, the customer requirement indicators include: product type indicators, equipment type indicators, and production type indicators. The product type indicators include: product output, output cycle time, etc.; the equipment type indicators include: equipment utilization rate, equipment batch quantity, etc.; the production type indicators include throughput, number of ongoing jobs, etc.

[0027] The data labels at the process block level include: area name, area contour coordinates, processing procedures, equipment in the area, area area, floor height, heat transfer coefficient of the area enclosure structure, area cleanliness level, temperature, humidity, and pressure difference parameters, area chemical pollutant control indicators, area unit cold (heat) load, area unit area exhaust air volume, area unit area heat generation, area unit area dust generation, chemical pollutant release amount, area illumination requirement, lighting fixture type, quantity, installed power, simultaneous use coefficient, installation coefficient, rectifier power consumption coefficient, usage time, and whether there is independent return air.

[0028] The data labels at the process level include: full process name, equipment number, processing time, number of wafers processed simultaneously, sampling frequency, sampling ratio / sample number, sensitivity of the process to pollutants, and potential pollution sources, etc.

[0029] The data tags at the BAY line level include: left / right BAY line name, affiliated block, equipment name, and number of equipment.

[0030] The data tags at the equipment level include: equipment type, equipment number, number of interfaces, PM (particulate matter) data, mean time to repair, mean time between failures, etc., process zoning, location area, affiliated Bay line, physical area of the equipment, position and size of the equipment air vents, position and air volume of the affiliated EFU, equipment exhaust outlet, exhaust air volume and components in the exhaust air, equipment heat generation and dust generation data and positions, installed power of the equipment, equipment efficiency, installation coefficient, load coefficient, simultaneous use coefficient, operator position of the staff, number of staff, potential pollution sources and intensities of the equipment, etc.

[0031] S2. Design the purification air conditioning system according to the process layout model and the label database, and determine the models and quantities of the fan filter units and dry coils.

[0032] It should be noted that multiple design parameters are determined through the following steps: ① Classify each process block to divide into multiple systems.

[0033] Based on the label database, obtain the area, cleanliness level, temperature and humidity of each process block, as well as the heat generation per unit area and dust generation per unit area of each process block. Classify the process blocks whose cleanliness level, temperature and humidity are all within the set difference range into one system; classify the process blocks whose heat generation per unit area and dust generation per unit area are both greater than the set maximum threshold into one system; classify the remaining process blocks separately as one system. That is to say, classify the process blocks with the same or similar cleanliness level and temperature and humidity control accuracy into one system, and the dust generation and heat generation of these process blocks will not be particularly large; classify the process blocks with large dust generation and large heat generation into one system; classify the remaining process blocks separately as one system.

[0034] ② Calculate the heat load, moisture load and air volume for each process block, and calculate the water flow rate for each system according to the heat load of each process block.

[0035] It should be noted that the heat load involves determining the cooling or heating capacity required for the clean room under different conditions. The heat load is usually divided into sensible heat load and total heat load. The sensible heat load mainly refers to the heat load caused by temperature changes, while the total heat load includes the sensible heat load and the latent heat load. The latent heat load is the heat load caused by humidity changes. The moisture load involves evaluating and calculating the impact of moisture evaporation generated by personnel activities and equipment operation inside the clean room on the indoor humidity.

[0036] Specifically, the heat load calculation is carried out for each process block from four parts: the enclosure structure, personnel, lighting, and heat generation of equipment.

[0037] Among them, the steady-state heat transfer calculation method is used to determine the enclosure structure; the personnel heat load is the heat load generated by indoor personnel activities, including human body heat dissipation, breathing, etc., and is calculated according to the number of personnel, activity intensity, and residence time; the lighting heat load is the heat load generated by lighting equipment, and is calculated according to the type, quantity, installed power, simultaneous use coefficient, installation coefficient, rectifier power consumption coefficient, and use time of lighting equipment; the heat generation of equipment refers to the heat generated during the operation of equipment (process equipment and purification air-conditioning equipment). If there is no equipment heat generation and dust generation data in the equipment-level data tags in the label database, it is generally calculated by the average value, and is calculated according to the equipment power, efficiency, installation coefficient, load coefficient, simultaneous use coefficient, ventilation and heat preservation coefficient. Among them, the heat generation of FFU in the purification air-conditioning equipment is calculated according to the number, frequency, power, and efficiency of FFU.

[0038] The moisture load calculation is carried out for each process block from two parts: moisture generation by personnel and moisture generation by indoor equipment.

[0039] Among them, the moisture generation by personnel mainly comes from human breathing and sweat evaporation, and is calculated according to the number of people in the room, the breathing frequency per person per hour, the water vapor content in the exhaled air, and the water vapor content in the inhaled air; the moisture generation by indoor equipment refers to the moisture generated due to equipment operation, and is obtained by summarizing the moisture generation of equipment. The moisture generation of equipment is provided by the equipment manufacturer, or can be estimated according to the working principle and operating parameters of the equipment.

[0040] Furthermore, the air volume calculation is carried out for each process block. The air volume includes: supply air volume and fresh air volume. Among them, the supply air volume is obtained by taking the maximum value after calculating three supply air volumes respectively according to the heat load, moisture load, and cleanliness; the fresh air volume is obtained by taking the maximum value after comparing the fresh air volume calculated to ensure fresh air for personnel with the fresh air volume required for positive pressure control of the clean room and supplementing the exhaust air volume.

[0041] It should be noted that when calculating the supply air volume according to the cleanliness, for unidirectional flow clean rooms, the cross-sectional average wind speed method is used for calculation, and for non-unidirectional flow clean rooms, the air change rate method is used for calculation.

[0042] It should be noted that if a process block contains multiple BAY lines, the heat load, moisture load, and air volume of the BAY lines are calculated and then accumulated to obtain the load and air volume of the process block.

[0043] After that, the cooling water flow is calculated according to the heat load and moisture load of each process block, and according to the simultaneous use coefficient of each process block, the cooling water volumes of each block included in each system are added to obtain the water flow of each system.

[0044] ③ Determine the pipe diameter of each pipe segment in each system through hydraulic balance calculation based on the water flow of each system.

[0045] Specifically, select stainless steel or PVC pipes according to the cleanliness class of the clean room. The roughness of the pipes affects the frictional resistance. Select the pipe diameter of each pipe segment in the most unfavorable loop within the allowable flow velocity range according to the water flow of each system. Calculate the frictional resistance and local resistance of each pipe segment according to the water flow and the selected pipe diameter, and determine the total pressure drop of the most unfavorable loop. By setting balance valves on the return pipes of each branch and adjusting the pipe diameter until the hydraulics reach balance, the pipe diameter of each pipe segment in each system can be determined. Among them, the most unfavorable loop refers to the loop with the largest pressure drop. For example, the loop that is the farthest or has many resistance components resulting in a large pressure drop.

[0046] ④ Determine the type and quantity of HVAC equipment according to the air handling solution.

[0047] In this embodiment, the air handling solution of the clean room purification air conditioning system is Fan Filter Unit (FFU) + Dry Cooling Coil (DCC) + Make-up Air Unit (MAU).

[0048] Among them, the FFU is used for terminal air supply. Select the FFU according to the air volume and cleanliness class requirements of each process block. Then, according to the selection result, calculate the number of FFUs in combination with the air supply volume and the load borne by the FFUs.

[0049] The DCC is used to control the sensible heat load. Determine the supply water temperature and return water temperature of the dry cooling coil according to the heat load of each process block. Determine whether the dry cooling coil has a dehumidification function according to the moisture load of each process block, and then determine the type of the dry cooling coil. Divide the heat load of each process block by the heat exchange capacity of a single dry cooling coil to obtain the number of dry cooling coils in each process block, and at the same time increase a certain proportion of redundancy to ensure the reliability and future expandability of the air conditioning system.

[0050] The MAU is used to process the external fresh air, which generally consists of multiple different functions (heating, humidifying, dehumidifying, cooling, etc.). Configure the parameters of the functional sections of a single unit according to the calculated moisture load and calculate the number of MAUs.

[0051] Through step S1, a process layout model with a label database is obtained. Through step S2, the HVAC design parameters, the type and quantity of each HVAC equipment are integrated. Based on the results of these two steps, it is convenient to arrange the purification air conditioning system in step S3 and quickly construct a three-dimensional geometric model.

[0052] S3. Import the process layout model and design parameters of the cleanroom into the CFD (Computational Fluid Dynamics) pre-processing software to generate an initial model. Arrange the return air plenum, fan filter unit, dry coil, and raised floor in the initial model according to the label database and the design parameters to obtain a fusion model. Perform mesh division on the fusion model to obtain a cleanroom air flow simulation model.

[0053] S31. Arrange the return air plenum and dry coil.

[0054] It should be noted that the return air plenum is designed according to the air flow organization form, and at the same time, considering the regional dimensions, shapes of the process blocks, and whether there is independent return air, a single return air plenum, a double return air plenum, or a multi-return air plenum is arranged. Among them, independent return air means that the cleanroom has an independent air duct or return air system dedicated to return air. During the return air process, it does not mix or interfere with other airflows and can independently return part of the indoor air to the fresh air unit for treatment and then send it back to the cleanroom.

[0055] Specifically, arranging the return air plenum in the initial model includes: Determine the shape of the cleanroom according to the position dimensions of the cleanroom in the label database; if the shape of the cleanroom is rectangular, arrange the return air plenum on one side of the long side of the cleanroom according to the dimensions of the cleanroom. The dimensions of the return air plenum are determined according to the dimensions, quantity, arrangement position, heat transfer area, and resistance of the dry coil; if the shape of the cleanroom is L-shaped or U-shaped, arrange the return air plenum along the outer periphery of the cleanroom in a closed loop; According to the regional contour coordinates and whether there is independent return air in the process blocks in the label database, obtain the dimensions and shapes of the process blocks with independent return air, and then arrange return air plenums separately for the process blocks with independent return air.

[0056] It should be noted that arranging return air plenums separately for the process blocks with independent return air is arranged in the same way as arranging return air plenums in the cleanroom.

[0057] It can be understood that return air plenums can be added according to the simulation results.

[0058] It should be noted that the face velocity of a single dry coil does not exceed 2 m / s, and the resistance does not exceed 40 Pa. Among them, the face velocity is obtained by dividing the air volume passing through a single dry coil by the effective ventilation area of a single dry coil; the effective ventilation area of a single dry coil is obtained by subtracting the area of the four surrounding frames from the outer shape area of a single dry coil; it is expressed by the following formula: , Among them, Indicates the air volume passing through a single dry coil, which is affected by the size of the return air duct. Indicates the effective ventilation area of a single dry coil. Indicates the resistance coefficient, and m represents the resistance index.

[0059] Furthermore, the cleanroom in this embodiment is a three-layer structure factory building: the upper mezzanine, the middle layer, and the lower mezzanine. The middle layer is the core production area for placing equipment. The layout positions of the dry coils include: at the entrance of the upper mezzanine, or at the entrance of the lower mezzanine, or in the middle of the return air duct.

[0060] When the dry coil is arranged at the entrance of the upper mezzanine or the entrance of the lower mezzanine, the area obtained by multiplying the height of the part where the return air duct communicates with the upper mezzanine or the lower mezzanine by the length of the return air duct is not less than the heat transfer area of the dry coil. The formula is shown as follows: , where L represents the length of the return air duct, and respectively represent the heights of the parts where the return air duct communicates with the upper mezzanine and the lower mezzanine, A represents the heat transfer area of the dry coil, represents the heat load that the return air duct needs to transfer, U represents the heat transfer coefficient, represents the logarithmic mean temperature difference.

[0061] When the dry coil is arranged in the middle of the return air duct, the dry coil is supported on the duct wall at a certain angle. According to the size, quantity, and horizontal angle of the dry coil, the lengths and widths after vertical and horizontal projections are calculated, and neither exceeds the length and width of the return air duct. The formula is shown as follows: , where W represents the width of the return air duct, represents the width of a single dry coil, represents the length of a single dry coil, represents the distance between two adjacent dry coils, represents the horizontal angle of the dry coil, and n represents the number of dry coils.

[0062] S32. Arrange the fan filter unit FFU.

[0063] In this embodiment, the FFU is arranged according to the heat generation, dust generation, and chemical pollutant emission characteristics of the equipment in the area. Compared with the prior art where the FFU can only be evenly arranged by area, this solution arranges the FFU directionally according to the load and pollutant emission conditions in the tag data, achieving uniform air flow and coverage and avoiding dead corners.

[0064] Specifically, the fan filter unit is arranged in the upper mezzanine of the clean room, including: constructing a corresponding cuboid according to the size of the FFU. If there is no heat generation and dust generation data for each device in the process block, the FFUs are evenly arranged in each BAY line area of the process block; otherwise, centered on the heat generation position of each device, they are arranged in parallel according to the number of FFUs.

[0065] S33. Arrange raised floors at the connection between the middle layer and the lower mezzanine.

[0066] As Figure 3 shown, the space of the clean room is divided into multiple air flow circulation loops, and each air flow circulation loop contains multiple FFUs and various types of raised floors. The sum of the air supply volumes of the FFUs included in each air flow circulation loop is used as the air supply volume of each air flow circulation loop.

[0067] Taking the layout area of the raised floors in each air flow circulation loop as a constraint, adjust the number of different types of raised floors. By changing the air volume, air speed, and local resistance coefficient, control the air speed and air volume distribution of each air flow circulation loop, calculate the resistance of each air flow circulation loop formed by each adjustment. When the resistance of each air flow circulation loop reaches equilibrium, the purification effect is achieved, and the layout quantity of different types of raised floors in each air flow circulation loop is determined.

[0068] Specifically, the layout area of the raised floors in each air flow circulation loop is obtained by adding the areas of the raised floors with different opening ratios, the areas of the raised floors with adjustable valves, and the blind plate areas, and is expressed by the following formula: , where represents the layout area of the raised floors in the i-th air flow circulation loop, , , , respectively represent the sum of the areas calculated according to the respective quantities of the raised floors with opening ratios of 17%, 25%, 33%, and 50%; represents the sum of the areas calculated according to the quantity of the raised floors with adjustable valves, represents the sum of the areas calculated according to the quantity of the blind plates.

[0069] It should be noted that the raised floors with different opening ratios and different types affect the air speed and air volume distribution of each air flow circulation loop, thereby affecting the resistance of each air flow circulation loop.

[0070] Further, the resistance of each air flow circulation loop is the resistance of the air sent by the FFU flowing through the clean room, flowing through the equipment in the clean room, the raised floor, the return air duct, the dry coil, and the upper mezzanine of the clean room and then back to the FFU inlet. In this embodiment, in order to improve the accuracy of the calculation, the resistance of the air flow circulation loop is calculated in segments. , including: excluding the resistance of the raised floor , and the resistance passing through the raised floor ; among which, the resistance excluding the raised floor includes the frictional resistance and the local resistance; the formula is as follows: , wherein, represents the resistance of the air flow circulation loop, represents the frictional resistance per unit length, represents the local resistance per unit length, represents the duct length; represents the air density, is the air velocity in the duct, represents the equivalent diameter of the duct, represents the friction coefficient; represents the air velocity at the location where the local loss occurs, represents the local resistance coefficient; represents the air viscosity coefficient, represents the thickness of the orifice plate perpendicular to the air flow direction, represents the wind speed when passing through the raised panel, represents the permeability, represents the inertial resistance coefficient.

[0071] It should be noted that in the formula, and are obtained by experimentally measuring the resistance of the raised floor at different wind speeds and fitting using the least squares method. The friction coefficient in the formula is calculated through the following formula: , wherein, represents the absolute roughness of the pipe wall, represents the Reynolds number.

[0072] After arranging the return air duct, FFU, dry coil and raised floor in the initial model, a fusion model is obtained, and the fusion model is meshed to obtain a clean room air flow simulation model.

[0073] S4. Import the clean room air flow simulation model into CFD software for fluid simulation, and optimize the process layout model of the clean room according to the fluid simulation results.

[0074] It should be noted that after importing the cleanroom airflow simulation model into the CFD software and setting relevant parameters, multi-physical field simulation analysis is carried out. Among them, setting relevant parameters includes: setting equipment heat generation data, dust generation data and pollutant emission amounts, and equipment accessory EFU parameters; setting the heat generation conditions of the maintenance structure, lighting and personnel; setting the dust generation data of personnel; setting the purification air conditioning system parameters and boundary conditions.

[0075] Analyze the simulation results, especially analyze the temperature, velocity and pollutant concentration fields in the process areas that are sensitive to environmental requirements. For the situations where the airflow is unreasonable due to equipment layout or the pollutant diffusion affects the process production, feedback to the process layout and make local optimization adjustments to the process layout based on this condition, so as to avoid the situation where it is difficult to adjust or the adjustment cost is high due to unreasonable airflow affecting production in the later stage. That is to say, the process layout and the purification air conditioning system quickly form an integral whole, and the layout and the flow field are quickly visualized.

[0076] Exemplarily, the simulation results show that the temperature at some positions in the process block exceeds the process environment temperature requirement, and the process environment temperature requirement is met by adjusting the equipment spacing in the process layout model.

[0077] It should be noted that the existing methods are prone to causing the fragmentation of the process layout and poor air flow, resulting in the exceeding standard of chemical pollutants (acids) in the process environment and the decrease of the yield. Special rectification will cost a great deal in the later stage.

[0078] Compared with the prior art, a cleanroom airflow simulation modeling method integrating process layout optimization provided by this embodiment integrates the process and HVAC design. By constructing a tag database, the HVAC design calculation parameters are synchronously exported with the three-dimensional model of the process layout, and a three-dimensional model is quickly constructed for simulation calculation, reducing many links in the conventional airflow simulation. And based on the simulation results, the process layout is feedback optimized, realizing the iterative optimization of the process and HVAC, greatly reducing the simulation cycle, achieving fast and accurate simulation response, and then efficiently serving the actual engineering needs. In the process layout optimization, the air distribution is taken into account. The analysis and evaluation of the air distribution are based on the process layout and environmental requirements. By integrating the two, the layout and air distribution are analyzed and synchronously displayed, and the advantages and disadvantages of the scheme are comprehensively analyzed and evaluated from multiple professional perspectives, avoiding the impact of pollution diffusion and transfer caused by the failure to comprehensively consider the air flow in the layout on production, greatly reducing the losses brought by ex post compensation, and reducing the construction and operation and maintenance costs of the cleanroom.

[0079] Embodiment 2 Another embodiment of the present invention discloses a cleanroom air flow simulation modeling system integrating process layout optimization, so as to implement a cleanroom air flow simulation modeling method integrating process layout optimization in Embodiment 1. The specific implementation manners of each module refer to the corresponding descriptions in Embodiment 1. As Figure 4 shown, the system includes: A database construction module 101, configured to obtain a process layout model of the cleanroom and construct a tag database according to the equipment information in the general layout drawing, architectural drawing and process layout model; A parameter design module 102, configured to design a purification air conditioning system according to the process layout model and the tag database and determine design parameters; A simulation model generation module 103, configured to import the process layout model and design parameters of the cleanroom into CFD pre-processing software to generate an initial model, arrange a return air duct, a fan filter unit, a dry coil and a raised floor in the initial model according to the tag database and the design parameters to obtain a fusion model; perform mesh division on the fusion model to obtain a cleanroom air flow simulation model; A fluid simulation module 104, configured to import the cleanroom air flow simulation model into CFD software for fluid simulation and optimize the process layout model of the cleanroom according to the fluid simulation results.

[0080] Since the cleanroom air flow simulation modeling system integrating process layout optimization in this embodiment can be mutually referred to with the aforementioned cleanroom air flow simulation modeling method integrating process layout optimization, and the description is repeated here, it will not be elaborated here. Since the principle of this system embodiment is the same as that of the above method embodiment, this system embodiment also has the corresponding technical effects of the above method embodiment.

[0081] Those skilled in the art can understand that all or part of the processes for implementing the methods in the above embodiments can be completed by instructing relevant hardware through a computer program, and the program can be stored in a computer-readable storage medium. Among them, the computer-readable storage medium is a magnetic disk, an optical disk, a read-only memory or a random access memory, etc.

[0082] The above is only a preferred specific implementation manner of the present invention, but the protection scope of the present invention is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed by the present invention should be covered within the protection scope of the present invention.

Claims

1. A cleanroom airflow simulation modeling method integrating process layout optimization, characterized in that, The steps include: Obtain the process layout model of the cleanroom, and construct a label database based on the equipment information in the general design drawing, architectural drawing, and process layout model; Design the purification air-conditioning system according to the process layout model and the label database, and determine the design parameters; Import the process layout model and design parameters of the cleanroom into the CFD preprocessing software to generate the initial model of the cleanroom, and arrange the return air plenum, fan filter unit, dry coil, and raised floor in the initial model of the cleanroom according to the label database and the design parameters to obtain the integrated model; Perform mesh division on the integrated model to obtain the cleanroom air flow simulation model; Import the cleanroom air flow simulation model into the CFD software for fluid simulation, and optimize the process layout model of the cleanroom according to the fluid simulation results.

2. The cleanroom airflow simulation modeling method for optimizing the integrated process layout according to claim 1, wherein, The label database includes data labels at five levels: cleanroom, process block, process step, BAY line, and equipment; The design of the purification air-conditioning system according to the label database includes: classifying each process block into multiple systems; calculating the heat load, moisture load, and air volume for each process block, and calculating the water flow rate for each system according to the heat load and moisture load of each process block; performing hydraulic balance calculation based on the water flow rate of each system to determine the pipe diameter size of each process block in each system; determining the model and quantity of HVAC equipment according to the air handling plan.

3. The method for simulating and modeling the air flow in a clean room with optimized integrated process layout according to claim 2, wherein, Arranging the return air plenum in the initial model of the cleanroom includes: Determine the shape of the cleanroom according to the position dimensions of the cleanroom in the label database; if the shape of the cleanroom is rectangular, arrange the return air plenum on one side of the long side of the cleanroom according to the size of the cleanroom, and the size of the return air plenum is determined according to the size, quantity, arrangement position, heat transfer area, and resistance of the dry coil; if the shape of the cleanroom is L-shaped or U-shaped, arrange the return air plenum along the outer periphery of the cleanroom in a closed loop; Obtain the size and shape of the process blocks with independent return air according to the regional contour coordinates and whether there is independent return air in the process blocks in the label database, and then arrange the return air plenum for the process blocks with independent return air separately.

4. The method for simulating and modeling the airflow in a cleanroom with optimized integrated process layout according to claim 1 or 3, characterized in that, The size of the return air plenum is determined according to the size, quantity, arrangement position, heat transfer area, and resistance of the dry coil, including: When the dry coil is arranged at the entrance of the upper mezzanine or the lower mezzanine of the cleanroom, the area obtained by multiplying the height of the part where the return air plenum communicates with the upper mezzanine or the lower mezzanine by the length of the return air plenum is not less than the heat transfer area of the dry coil; When the dry coil is arranged in the middle of the return air plenum, calculate the length and width of the vertical and horizontal projections according to the size, quantity, and horizontal included angle of the dry coil, and neither exceeds the length and width of the return air plenum.

5. The cleanroom airflow simulation modeling method for optimizing the integrated process layout according to claim 4, characterized in that, The face velocity of a single dry coil does not exceed 2 m / s, and the resistance does not exceed 40 Pa.

6. The method for simulating and modeling the airflow in a cleanroom with optimized integrated process layout according to claim 2, wherein The fan filter unit is arranged in the upper mezzanine of the cleanroom, including: Construct a corresponding cuboid according to the size of the fan filter unit. If there is no heat generation and dust generation data for each equipment in the process block, arrange the fan filter units evenly in each BAY line area of the process block; otherwise, arrange them in parallel according to the number of fan filter units with the heat generation position of each equipment as the center.

7. The method for simulating and modeling the airflow in a clean room with optimized integrated process layout according to claim 2, wherein The raised floor is arranged at the connection between the middle layer and the lower mezzanine of the cleanroom and includes: Dividing the space of the cleanroom into multiple air flow circulation loops, each air flow circulation loop containing multiple FFUs and various types of raised floors; Taking the layout area of the raised floors in each air flow circulation loop as a constraint, adjusting the quantity of different types of raised floors, calculating the resistance of each air flow circulation loop formed by each adjustment by changing the air volume, air speed and local resistance coefficient, and obtaining the layout quantity of different types of raised floors in each air flow circulation loop when the resistance of each air flow circulation loop reaches equilibrium.

8. The cleanroom airflow simulation modeling method for optimizing the integrated process layout according to claim 7, characterized in that, The resistance of each air flow circulation loop is obtained by separately calculating the resistance of the raised floors excluded from the loop and the resistance passing through the raised floors and summing them up, and the formula is as follows: ， Among them, represents the resistance of the air flow circulation loop, represents the resistance of removing the raised floor in the loop, represents the resistance through the raised floor; represents the frictional resistance per unit length, represents the local resistance per unit length, represents the duct length; represents the air density, is the air flow velocity in the duct, represents the equivalent diameter of the duct, represents the friction coefficient; represents the air flow velocity at the location where local losses occur, represents the local resistance coefficient; represents the air viscosity coefficient, represents the thickness of the orifice plate perpendicular to the air flow direction, represents the wind speed when passing through the raised panel, represents the permeability, represents the inertial resistance coefficient.

9. The cleanroom airflow simulation modeling method for optimizing the integrated process layout according to claim 7, characterized in that, The layout area of the raised floors in each air flow circulation loop is obtained by summing up the quantity and area of each type of raised floor; the types of raised floors include: raised floors with an opening ratio of 17%, 25%, 33%, 50%, adjustable raised floors with valves and blind plates.

10. A cleanroom airflow simulation and modeling system integrating process layout optimization, characterized in that, Including: A database construction module for obtaining the process layout model of the cleanroom and constructing a label database according to the equipment information in the general layout drawing, architectural drawing and process layout model; A parameter design module for designing the purification air conditioning system according to the process layout model and the label database and determining the design parameters; A simulation model generation module for importing the process layout model and design parameters of the cleanroom into CFD pre-processing software to generate an initial model, arranging a return air duct, a fan filter unit, a dry coil and a raised floor in the initial model according to the label database and the design parameters to obtain a fusion model; performing mesh division on the fusion model to obtain a cleanroom air flow simulation model; A fluid simulation module for importing the cleanroom air flow simulation model into CFD software for fluid simulation and optimizing the process layout model of the cleanroom according to the fluid simulation results.

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