Diaphragm mechanism, laser beam shaping device and adjusting method of shaping device

Abstract

The invention is suitable for the technical field of laser equipment, and discloses a diaphragm mechanism, a laser beam shaping device and an adjusting method of the laser beam shaping device. Wherein the diaphragm mechanism comprises an annular diaphragm main body, the diaphragm main body comprises a fixed part and a sawtooth part, the sawtooth part is connected to the inner side of the fixed part and comprises a plurality of adjacently arranged sawteeth, the ratio of the height H of the sawteeth to the period L of the sawteeth is D, and D is larger than or equal to 6. By adopting the diaphragm mechanism provided by the invention, the smoothness of the edge of the light beam is improved, the harm to the performance and the use of the laser can be reduced, and the influence on the refined processing of the target material in the processing application can be reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of laser equipment, and in particular to an aperture mechanism, a laser beam shaping device, and an adjustment method for the laser beam shaping device. Background Art

[0002] With the rapid development of my country's high-end manufacturing industry, beam edge shaping has become a key link in system design for high-power laser systems. Due to differences in optical component quality, unstable beam modes, mechanical vibrations, laser aging, scattering and reflection loss, and environmental factors, the smoothness of the profile of the laser beam edge will gradually decrease with the increase of propagation distance. This reduction will lead to a series of serious problems. First, it will cause many hazards to the performance and use of the laser, such as uneven spatial beam energy distribution leading to thermal effects, increased optical losses and reduced overall efficiency and performance of the system, and possible thermal loads on the laser components, resulting in a shortened laser life. Secondly, in processing applications, this unevenness will affect the fine processing of the target material, such as uneven processing quality, thermal stress concentration causing deformation, cracking, and even rupture of the material (i.e., reduced integrity of the material), as well as problems such as material performance degradation, reduced fatigue life caused by surface defects, low processing efficiency, and increased costs. Summary of the Invention

[0003] The present application provides an aperture mechanism, a laser beam shaping device, and an adjustment method for the laser beam shaping device, aiming to solve the technical problem of poor smoothness of the laser beam edge.

[0004] According to the first aspect of the present application, an embodiment provides an aperture mechanism, including an annular aperture body, wherein the aperture body includes:

[0005] Fixed part;

[0006] The sawtooth portion is connected to the inner side of the fixing portion and includes a plurality of adjacently arranged sawteeth. The ratio of the height H of the sawteeth to the period L of the sawteeth is D, wherein D≥6.

[0007] In one embodiment, 0.6 mm ≤ H ≤ 1.4 mm;

[0008] and / or, 100 μm ≤ L ≤ 200 μm.

[0009] In one embodiment, 0.8 mm ≤ H ≤ 1.2 mm;

[0010] and / or, 130 μm ≤ L ≤ 170 μm.

[0011] In one embodiment, the saw teeth are Gaussian or triangular in shape;

[0012] Alternatively, the fixing portion and the serrated portion are integrally formed.

[0013] In one embodiment, the aperture body is in the shape of a circular ring;

[0014] The aperture mechanism further includes a fixing and adjusting device, the aperture body is connected to the fixing and adjusting device, and the fixing and adjusting device is used to adjust the diameter of the aperture body.

[0015] In one embodiment, the fixing and adjusting device is used to continuously adjust the diameter of the aperture body.

[0016] In one embodiment, the aperture mechanism further includes an aperture supplement, wherein the aperture supplement is connected to the aperture main body and forms an aperture component with the aperture main body;

[0017] The aperture component includes a first end and a second end that are arranged opposite to each other, and a connecting point provided at any position between the first end and the second end. The first end and the connecting point are both connected to the fixing and adjusting device and are arranged adjacent to each other. The aperture component located between the first end and the connecting point is the aperture body.

[0018] In one embodiment, the fixing and adjusting device includes a first connecting component and a second connecting component, the first connecting component is fixedly connected to the first end, and the second connecting component is connected to the connection site;

[0019] The second connecting component has a locked state and an unlocked state. When the second connecting component is in the locked state, the connecting site is fixedly connected to the second connecting component. When the second connecting component is in the unlocked state, the connecting site is disengaged from the second connecting component.

[0020] According to a second aspect of the present application, an embodiment provides a laser beam shaping device, comprising a spatial filtering mechanism and the aperture mechanism described in the first aspect;

[0021] The spatial filtering mechanism includes a vacuum tube, an incident lens and an exit lens provided at both ends of the vacuum tube, and a filtering aperture provided in the vacuum tube;

[0022] The aperture body is arranged on a side of the vacuum tube where the incident lens is arranged, and allows the light beam passing through the saw teeth toward one end of the center of the aperture body to pass through the center of the filtering aperture.

[0023] According to a third aspect of the present application, an embodiment provides a method for adjusting a laser beam shaping device, wherein the laser beam shaping device includes a fixing and adjusting device and the aperture mechanism described in the first aspect, wherein the aperture body is connected to the fixing and adjusting device, and the fixing and adjusting device is used to adjust the diameter of the aperture body; the method includes:

[0024] The diameter of the aperture body is determined according to the parameters of the laser;

[0025] Adjusting the diameter of the aperture body by means of the fixing and adjusting device;

[0026] The laser parameter is the full width at half maximum (FWHM).

[0027] According to the aperture mechanism, laser beam shaping device, and adjustment method for the laser beam shaping device of the aforementioned embodiment, the ratio D of the sawtooth height H to the sawtooth period L is set to be greater than or equal to 6. This not only improves the visibility of the sawtooth shape (sufficient height) but also ensures a moderate sawtooth period. This ensures that the edge shape of the output beam is highly consistent with the contour of the sawtooth gap, ensuring the sawtooth's ability to modify the beam edge, and thus enabling the aperture mechanism with sawtooths to exhibit superior beam shaping performance. Therefore, the aperture mechanism provided by the present invention improves the smoothness of the beam edge, reduces damage to the performance and use of the laser, and, in processing applications, reduces the impact on the fine processing of target materials. BRIEF DESCRIPTION OF THE DRAWINGS

[0028] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on the structures shown in these drawings without paying any creative work.

[0029] Figure 1 is a front view of the aperture mechanism provided by an embodiment of the present invention;

[0030] Figure 2 yes Figure 1 A partial enlarged view of point A in the middle;

[0031] Figure 3 is a front view of a sawtooth provided by an embodiment of the present invention;

[0032] Figure 4 Schematic diagram of a simulation model of an aperture body provided by an embodiment of the present invention;

[0033] Figure 5This is a graph showing the normalized light intensity distribution of the laser beam after shaping by the laser beam shaping device provided by an embodiment of the present invention when the sawtooth period is 160 μm and the sawtooth heights are 0.2 mm, 0.6 mm, 0.8 mm, and 1.0 mm, respectively;

[0034] Figure 6 1. This is a graph showing experimental results comparing the light beam shaping effects of the aperture mechanism provided by an embodiment of the present invention and a conventional aperture mechanism;

[0035] Figure 7 Schematic diagram of the structure of a laser beam shaping device provided by an embodiment of the present invention.

[0036] Description of Figure Numbers:

[0037] 100. Aperture mechanism; 10. Aperture component; 11. Aperture body; 111. First fixing portion; 112. First serrated portion; 1121. Sawtooth; 12. Aperture supplement; 121. Second fixing portion; 122. Second serrated portion; 13. First end; 14. Second end; 15. Connection point; 20. Fixing and adjusting device; 21. First connecting component; 22. Second connecting component; 200. Spatial filtering mechanism; 201. Vacuum tube; 202. Incident lens; 203. Exit lens; 204. Filter aperture.

[0038] The purpose, features and advantages of the present invention will be further described with reference to the accompanying drawings and in conjunction with the embodiments. DETAILED DESCRIPTION

[0039] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0040] It should be noted that all directional indications in the embodiments of the present invention (such as up, down, left, right, front, back, etc.) are only used to explain the relative position relationship and movement status of the various components under a certain specific posture. If the specific posture changes, the directional indication will also change accordingly.

[0041] It should also be noted that when an element is referred to as being "fixed on" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. When an element is referred to as being "connected to" another element, it may be directly connected to the other element or there may be an intermediate element.

[0042] In addition, the descriptions of "first", "second", etc. in the present invention are for descriptive purposes only and should not be understood as indicating or implying their relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined as "first" or "second" may explicitly or implicitly include at least one of such features. In addition, the technical solutions between the various embodiments can be combined with each other, but this must be based on the fact that they can be implemented by ordinary technicians in this field. When the combination of technical solutions is contradictory or cannot be implemented, it should be deemed that such combination of technical solutions does not exist and is not within the scope of protection required by the present invention.

[0043] like Figures 1 to 3 As shown, an aperture mechanism 100 provided by an embodiment of the present invention includes an annular aperture body 11. The aperture body 11 includes a fixed portion and a serrated portion. The serrated portion is connected to the inner side of the fixed portion and includes a plurality of adjacent serrations 1121. The ratio of the height H of the serrations 1121 to the period L of the serrations 1121 is D, where D ≥ 6. In specific applications, D can be 6, 7, 8, 9, 10, etc.

[0044] By adopting the above technical solution, an aperture mechanism 100 having saw teeth 1121 is provided. After the input light beam passes through the aperture body 11, the output light beam will have a periodic sawtooth pattern, such as Figure 4 As shown, these high-frequency components will cause irregular edges in the light beam and increase the diffraction effect. In a specific application, the aperture mechanism 100 cooperates with the spatial filter mechanism 200, and the spatial filter mechanism 200 filters out these high-frequency components through the filter aperture 204, thereby producing a smooth light beam edge. Setting the ratio D of the height H of the sawtooth 1121 and the period L of the sawtooth 1121 to be greater than or equal to 6 not only improves the visibility of the shape of the sawtooth 1121 (sufficient height) but also makes the period of the sawtooth 1121 moderate. In this way, the edge shape of the output light beam can be highly consistent with the contour of the gap between the sawtooth 1121, which can ensure the sawtooth 1121's ability to modify the light beam edge, so that the aperture mechanism 100 with the sawtooth 1121 has excellent beam shaping performance. When the ratio D is less than 6, the height of the sawtooth 1121 is insufficient to effectively control the edge of the light beam, resulting in a convolution effect in the vertical direction, making the edge blurred. Therefore, the aperture mechanism 100 provided in this embodiment improves the smoothness of the beam edge, reduces the damage to the performance and use of the laser, and reduces the impact on the fine processing of the target material in processing applications.

[0045] In one embodiment, 0.6 mm ≤ H ≤ 1.4 mm. That is, the height H of the sawtooth 1121 is greater than or equal to 0.6 mm and less than or equal to 1.4 mm. In specific applications, the height H of the sawtooth 1121 can be 0.6 mm, 0.7 mm, 0.8 mm, 0.9 mm, 1.0 mm, 1.1 mm, 1.2 mm, 1.3 mm, 1.4 mm, etc. Preferably, 0.8 mm ≤ H ≤ 1.2 mm.

[0046] When the height H of the sawtooth 1121 is set lower than 0.6mm, the beam edge shaping effect will not be significant; when the height H of the sawtooth 1121 is set higher than 1.4mm, the difficulty of machining the sawtooth 1121 will increase, and the performance of the spatial filter mechanism 200 will be affected, resulting in an increased risk of poor beam shaping effect. Therefore, setting 0.6mm≤H≤1.4mm can effectively improve the beam edge shaping effect while ensuring that the sawtooth 1121 is easy to machine. Figure 5 As shown, when the height H of the sawtooth 1121 is 0.8 mm and 1.0 mm, the normalized light intensity distribution after filtering (ie, the beam shaping effect) is better, that is, the beam edge is smoother.

[0047] In one embodiment, 100 μm ≤ L ≤ 200 μm. That is, the period L of the sawtooth 1121 is greater than or equal to 100 μm and less than or equal to 200 μm. In specific applications, the period L of the sawtooth 1121 can be 100 μm, 110 μm, 120 μm, 130 μm, 140 μm, 150 μm, 160 μm, 170 μm, 180 μm, 190 μm, 200 μm, etc. Preferably, 130 μm ≤ L ≤ 170 μm. This arrangement makes it easy for the spatial filtering mechanism 200 to effectively remove the periodic effect of the sawtooth 1121, and makes it easy for the spatial filtering mechanism 200 to effectively filter low frequencies.

[0048] In one embodiment, the sawtooth 1121 is Gaussian-shaped. The Gaussian-shaped sawtooth 1121 can achieve a smooth transition of the beam edge, thereby avoiding the generation of overly sharp beam edges, reducing diffraction effects, and reducing optical losses caused by the sharp edges of the sawtooth 1121. In addition, the Gaussian-shaped sawtooth 1121 has strong adjustability and can accurately control the smoothness of the beam edge transition. In addition, the light intensity distribution of an ideal Gaussian beam exhibits a typical Gaussian curve distribution, but high-power lasers deviate from the ideal Gaussian shape due to various reasons. Therefore, the Gaussian-shaped sawtooth 1121 is designed so that the beam edge after passing through the aperture conforms to the ideal Gaussian state.

[0049] It is understood that in other embodiments, the saw teeth 1121 may also be triangular.

[0050] In one embodiment, the fixing portion and the serrated portion are integrally formed, which helps improve the manufacturing efficiency of the aperture mechanism 100. Of course, in other embodiments, the fixing portion and the serrated portion can also be manufactured separately and then assembled.

[0051] In one embodiment, the aperture body 11 is manufactured by finely ablating iron, aluminum, stainless steel or other materials using a high-energy laser, thereby ensuring the accuracy and durability of the saw teeth 1121 .

[0052] In one embodiment, the aperture body 11 is in a circular ring shape. Thus, the light beam outputted by the aperture body 11 is circular and has a sawtooth-shaped edge 1121. It is understood that in other embodiments, the aperture body 11 may also be an annular structure of other shapes.

[0053] See also Figure 1 The aperture mechanism 100 also includes a fixing and adjusting device 20, to which the aperture body 11 is connected. The fixing and adjusting device 20 is used to adjust the diameter of the aperture body 11. In this way, the diameter of the aperture body 11 is adjustable. Therefore, the aperture mechanism 100 can adapt to different laser beams, improving the application performance of the aperture mechanism 100. In a specific application, the inner diameter of the aperture body 11 can be adjusted by the fixing and adjusting device 20 according to the full width at half maximum (FWHM) of the laser beam to adapt the aperture body 11 to the laser beam. The inner diameter ω of the aperture body 11 is the distance between the tops of two straight saw teeth 1121 whose connecting line passes through the center of the aperture body 11.

[0054] In one embodiment, the fixing and adjusting device 20 is used to continuously adjust the diameter of the aperture body 11. Given that different laser systems have different beams, the fixing and adjusting device 20 is provided to continuously adjust the diameter of the aperture body 11. The fixing and adjusting device 20 can precisely adjust the diameter of the aperture body 11 to accommodate different operating conditions and meet diverse usage requirements.

[0055] See also Figure 1 and Figure 2 The aperture mechanism 100 further includes an aperture supplement 12, which is connected to the aperture body 11 and forms the aperture component 10 with the aperture body 11. In a specific application, a portion of the aperture component 10 constitutes the aperture body 11, and another portion of the aperture component 10 constitutes the aperture supplement 12. The aperture supplement 12 can be adjusted to adjust the diameter of the aperture body 11 by adjusting the length of the aperture supplement 12.

[0056] The structure of the aperture supplement 12 is identical to that of the aperture body 11, namely, the aperture supplement 12 also includes a fixing portion and a serrated portion. For ease of description, the fixing portion of the aperture body 11 is defined as the first fixing portion 111, the serrated portion of the aperture body 11 is defined as the first serrated portion 112, the fixing portion of the aperture supplement 12 is defined as the second fixing portion 121, and the serrated portion of the aperture supplement 12 is defined as the second serrated portion 122. The first fixing portion 111 is connected to the second fixing portion 121, and the first serrated portion 112 is connected to the second serrated portion 122. Preferably, the aperture body 11 and the aperture supplement 12 are integrally formed.

[0057] See also Figure 1 and Figure 2 The aperture component 10 includes a first end 13 and a second end 14 disposed opposite each other, and a connection point 15 located anywhere between the first end 13 and the second end 14. Both the first end 13 and the connection point 15 are connected to a fixing and adjustment device 20 and are disposed adjacent to each other. The aperture component 10 located between the first end 13 and the connection point 15 constitutes the aperture body 11. The second end 14 is a free end. In specific applications, the first end 13 and the connection point 15 are disposed closely adjacent to each other, and the serrations of the first end 13 and the connection point 15 may be aligned, i.e., the bases of the serrations of the first end 13 and the connection point 15 may be aligned.

[0058] By providing the connection point 15 at any location between the first end 13 and the second end 14, any location (i.e., the connection point 15) of the aperture component 10 can be connected to the fixing and adjusting device 20 when the connection point 15 (any location) is connected to the fixing and adjusting device 20. The aperture component 10 located between the first end 13 and the connection point 15 forms the aperture body 11. Therefore, when the length of the aperture component 10 between the connection point 15 and the first end 13 is short, the aperture body 11 has a shorter diameter. When the length of the aperture component 10 between the connection point 15 and the first end 13 is long, the aperture body 11 has a longer diameter. In other words, the diameter of the aperture body 11 can be adjusted by changing the position of the connection point 15 on the aperture component 10. This arrangement also allows the fixing and adjusting device 20 to continuously adjust the diameter of the aperture body 11.

[0059] In one embodiment, the fixing and adjusting device 20 includes a first connecting member 21 and a second connecting member 22. The first connecting member 21 is fixedly connected to the first end 13, and the second connecting member 22 is connected to the connecting point 15. The second connecting member 22 has a locked state and an unlocked state. When the second connecting member 22 is in the locked state, the connecting point 15 is fixedly connected to the second connecting member 22. When the second connecting member 22 is in the unlocked state, the connecting point 15 is disconnected from the second connecting member 22.

[0060] In a specific application, when the diameter of the aperture body 11 needs to be adjusted, the second connecting member 22 can be unlocked. At this time, the connecting point 15 is disengaged from the second connecting member 22, and the connection point 15 of the aperture member 10 to the second connecting member 22 can be adjusted. For example, a certain portion of the aperture supplement 12 can be adjusted to serve as the connecting point 15 to increase the diameter of the aperture body 11, or a certain portion of the aperture body 11 can be adjusted to serve as the connecting point 15 to reduce the diameter of the aperture body 11. After the diameter of the aperture body 11 is adjusted, the second connecting member 22 can be locked to securely connect the adjusted connecting point 15 to the second connecting member 22.

[0061] In one embodiment, the aperture component 10 is manufactured by finely ablating a material such as iron, aluminum, or stainless steel using a high-energy laser.

[0062] See also Figure 6 The beam shaping effects of the aperture mechanism 100 with the saw teeth 1121 provided in this embodiment are compared with those of a common aperture mechanism. The experimental results show that the aperture mechanism 100 of this embodiment has a better beam shaping effect.

[0063] Further, see Figure 7 The present invention also provides a laser beam shaping device including the aperture mechanism 100. The aperture mechanism 100 improves the smoothness of the beam edge, reduces damage to the performance and use of the laser, and, in processing applications, reduces the impact on the fine processing of target materials.

[0064] See also Figure 1 、 Figure 2 and Figure 7 The laser beam shaping device also includes a spatial filtering mechanism 200, which comprises a vacuum tube 201, an input lens 202 and an output lens 203 located at either end of the vacuum tube 201, and a filter aperture 204 located within the vacuum tube 201. The aperture body 11 is positioned on the side of the vacuum tube 201 where the input lens 202 is located, with the beam passing through the serrations 1121 toward the center of the filter aperture 204 at one end of the aperture body 11, i.e., the beam passing through the top of the serrations 1121. It should be noted that for aperture bodies 11 of different diameters adapted for different laser beams, the beam passing through the top of the serrations 1121 passes through the center of the filter aperture 204.

[0065] In specific applications, the incident lens 202 is a focusing lens, and the exit lens 203 is a collimating lens. The focusing lens converts the incident beam wavefront into the spatial frequency domain, forming a spectrum containing spatial frequency information at the back focal plane. The vacuum tube 201 and the filter aperture 204 work together to precisely block high-frequency components (corresponding to the edge details of the high-power laser beam) and allow only low-frequency components (corresponding to the smooth parts of the high-power laser beam) to pass through. The collimating lens performs an inverse transformation on the filtered beam, aligning the beam into parallel light. This achieves the purpose of shaping the laser beam edge and suppressing diffraction peaks.

[0066] In one embodiment, the focal lengths of the input lens 202 and the output lens 203 are equal.

[0067] In one embodiment, the aperture of the filter aperture 204 ranges from 0.7 mm to 2.0 mm. This configuration can improve the filtering effect of the filter aperture 204. In specific applications, the aperture of the filter aperture 204 can be 0.7 mm, 0.8 mm, 1.0 mm, 1.3 mm, 1.5 mm, 1.8 mm, 2.0 mm, etc.

[0068] The working principle of the laser beam shaping device provided by the present invention for beam shaping is as follows:

[0069] 1) The high-power laser beam to be shaped passes through the aperture body 11 of the aperture mechanism 100, and the edge of the output laser beam reflects the sawtooth pattern of the aperture body 11;

[0070] 2) In the spatial filtering mechanism 200, the high-power laser beam wavefront is converted into the spatial frequency domain by the incident lens 202, that is, a frequency spectrum containing spatial frequency information is formed in the rear focal plane; in the vacuum tube 201, the filter aperture 204 can selectively block the sawtooth pattern and details at the edge of the high-power laser beam, retaining the Gaussian distribution profile, that is, the smooth part, to achieve low-pass filtering and eliminate the high-frequency part; finally, the output lens 203 inversely transforms the filtered high-power laser beam to re-form a new beam in the spatial domain; the transmittance of the edge of the beam is Gaussian distributed, thereby achieving the purpose of shaping the laser beam edge and suppressing the diffraction peak.

[0071] The laser beam shaping device provided by the present invention has the following beneficial effects:

[0072] 1) The laser beam shaping device can optimize and modify the edge transmittance of the laser beam, realize laser beam edge shaping, significantly improve the smoothness of the beam profile, and significantly reduce the height of the highest diffraction peak and the number of diffraction peak groups;

[0073] 2) The laser beam shaping device can even out the energy distribution of the spatial beam, improve the beam quality, reduce optical loss, mitigate damage to the internal components of the laser, and improve the working accuracy and efficiency of the laser, thereby improving the overall performance of the laser system;

[0074] 3) The aperture mechanism 100 can significantly improve the focusing quality of the laser beam, meeting the high standards of precision machining in related industrial fields;

[0075] 4) The adaptability of the aperture mechanism 100 is improved. Under the premise of maintaining a constant ratio between the height of the Gaussian sawtooth 1121 and the period of the sawtooth 1121, the size of the aperture body 11 can be flexibly and continuously adjusted, and is widely applicable to various laser systems and different working conditions.

[0076] Furthermore, an embodiment of the present invention provides a method for adjusting a laser beam shaping device. The laser beam shaping device includes a fixing and adjusting device 20 and an aperture mechanism 100. The aperture body 11 is connected to the fixing and adjusting device 20. The fixing and adjusting device 20 is used to adjust the diameter of the aperture body 11. The method includes:

[0077] The diameter of the aperture body 11 is determined according to the parameters of the laser;

[0078] The diameter of the aperture body 11 is adjusted by the fixing and adjusting device 20;

[0079] The parameter of the laser is the full width at half maximum (FWHM) of the laser. In a specific application, the inner diameter ω of the aperture body 11 is determined according to the FWHM of the laser.

[0080] In one embodiment, the inner diameter ω and the FWHM of the aperture body 11 satisfy the following formula:

[0081]

[0082] Here, FWHM represents the full width at half maximum of the laser.

[0083] In specific applications, the inner diameter ω of the aperture body 11 may be adjusted with reference to the FWHM of the incident light beam listed in Table 1 and Table 2.

[0084] Table 1

[0085]

[0086] Table 2

[0087]

[0088] The above description is only a preferred embodiment of the present invention and does not limit the patent scope of the present invention. All equivalent structural transformations made by using the contents of the present invention description and drawings under the inventive concept of the present invention, or direct / indirect application in other related technical fields are included in the patent protection scope of the present invention.

Claims

1. A diaphragm mechanism, characterized in that: The invention comprises an annular aperture body, wherein the aperture body comprises: Fixed part; The sawtooth portion is connected to the inner side of the fixing portion and includes a plurality of adjacently arranged sawteeth. The ratio of the height H of the sawteeth to the period L of the sawteeth is D, wherein D≥6.

2. The aperture mechanism according to claim 1, wherein: 0.6mm≤H≤1.4mm; and / or, 100 μm ≤ L ≤ 200 μm.

3. The aperture mechanism according to claim 1, wherein 0.8mm≤H≤1.2mm; and / or, 130 μm ≤ L ≤ 170 μm.

4. The aperture mechanism according to claim 1, wherein: The saw teeth are Gaussian or triangular; Alternatively, the fixing portion and the serrated portion are integrally formed.

5. The aperture mechanism according to any one of claims 1 to 4, wherein: The aperture body is in a circular ring shape; The aperture mechanism further includes a fixing and adjusting device, the aperture body is connected to the fixing and adjusting device, and the fixing and adjusting device is used to adjust the diameter of the aperture body.

6. The aperture mechanism according to claim 5, wherein: The fixing and adjusting device is used to continuously adjust the diameter of the aperture body.

7. The aperture mechanism according to claim 6, wherein: The aperture mechanism further includes an aperture supplement, wherein the aperture supplement is connected to the aperture body and forms an aperture component with the aperture body; The aperture component includes a first end and a second end that are arranged opposite to each other, and a connecting point provided at any position between the first end and the second end. The first end and the connecting point are both connected to the fixing and adjusting device and are arranged adjacent to each other. The aperture component located between the first end and the connecting point is the aperture body.

8. The aperture mechanism according to claim 7, wherein: The fixing and adjusting device includes a first connecting member and a second connecting member, the first connecting member is fixedly connected to the first end, and the second connecting member is connected to the connection site; The second connecting component has a locked state and an unlocked state. When the second connecting component is in the locked state, the connecting site is fixedly connected to the second connecting component. When the second connecting component is in the unlocked state, the connecting site is disengaged from the second connecting component.

9. A laser beam shaping device, characterized in that: comprising a spatial filtering mechanism and an aperture mechanism as claimed in any one of claims 1 to 8; The spatial filtering mechanism includes a vacuum tube, an incident lens and an exit lens provided at both ends of the vacuum tube, and a filtering aperture provided in the vacuum tube; The aperture body is arranged on a side of the vacuum tube where the incident lens is arranged, and allows the light beam passing through the saw teeth toward one end of the center of the aperture body to pass through the center of the filtering aperture.

10. A method for adjusting a laser beam shaping device, characterized in that: The laser beam shaping device includes a fixing and adjusting device and the aperture mechanism according to claim 1, wherein the aperture body is connected to the fixing and adjusting device, and the fixing and adjusting device is used to adjust the diameter of the aperture body; the method includes: The diameter of the aperture body is determined according to the parameters of the laser; Adjusting the diameter of the aperture body by means of the fixing and adjusting device; The laser parameter is the full width at half maximum (FWHM).

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