Position marking method, optical detection device and storage medium

Abstract

The invention discloses a position marking method, an optical detection device and a storage medium, and the method comprises the steps: obtaining at least one to-be-detected image of a detection object, and obtaining the coordinate range of each to-be-detected image; obtaining coordinates of the first type of targets, and determining a coordinate range where the coordinates of the first type of targets are located; selecting a corresponding to-be-detected image according to the determined coordinate range; and intercepting a mark image containing the first type of target from the selected to-be-detected image. As the marked image is intercepted from the to-be-detected image, the marked image and the to-be-detected image have consistency.

Description

Technical Field

[0001] The present application relates to the technical field of optical detection and optical equipment, and in particular to a position marking method, an optical detection device and a storage medium. Background Art

[0002] When performing defect detection on an object, it is usually necessary to detect the defect location of the object based on the image to be tested. In addition, it is necessary to save the marked image containing the defect location, or also save the marked image containing the location input by the user for subsequent analysis.

[0003] In current technical solutions, the image to be tested and the marked image are acquired using two separate detection devices. These devices acquire images in different ways, which can lead to inconsistencies between the image to be tested and the marked image, affecting subsequent analysis. Therefore, a new technical solution is needed. Summary of the Invention

[0004] The main technical problem solved by this application is that the image to be tested and the marked image of the detection object are inconsistent.

[0005] According to the first aspect, an embodiment provides a location marking method, including:

[0006] Acquire at least one image to be tested of the detection object, and obtain the coordinate range of each image to be tested;

[0007] Acquire the coordinates of the first type of target, and determine the coordinate range in which the coordinates of the first type of target are located;

[0008] Selecting the corresponding image to be measured according to the determined coordinate range;

[0009] A marked image containing the first type of target is intercepted from the selected image to be tested.

[0010] In some embodiments, the position marking method further includes: constructing a spatial coordinate system or an image coordinate system for the detection object, and configuring the coordinate range of each of the images to be detected and the coordinates of the first type of target based on the spatial coordinate system or the image coordinate system.

[0011] In some embodiments, obtaining the coordinate range of each image to be measured includes:

[0012] Obtaining relative positions of image acquisition points of the detection object, and obtaining initial coordinates of each of the images to be detected in the spatial coordinate system or the image coordinate system according to the relative positions, wherein the initial coordinates include one of the upper left corner coordinate, the upper right corner coordinate, the lower left corner coordinate, and the lower right corner coordinate of the image to be detected;

[0013] The image size of each of the images to be measured is obtained, and a coordinate range of each of the images to be measured is configured according to the image size of each of the images to be measured and the corresponding initial coordinates.

[0014] In some embodiments, obtaining the image size of each of the images to be measured includes:

[0015] The number of row and column pixels of each image to be tested and the pixel size of a single pixel are obtained, and the image size of each image to be tested is obtained by calculation.

[0016] In some embodiments, the configuration forming the coordinate range of each image to be measured includes:

[0017] Calculating other corner coordinates using one of the upper left corner coordinate, the upper right corner coordinate, the lower left corner coordinate, and the lower right corner coordinate of the image to be measured in combination with the image size of the image to be measured;

[0018] The upper left corner coordinates and the lower right corner coordinates are used as the coordinate range of the image to be measured; or, the upper right corner coordinates and the lower left corner coordinates are used as the coordinate range of the image to be measured.

[0019] In some embodiments, obtaining the coordinates of the first category of targets includes:

[0020] Detecting target features on each of the images to be tested to obtain a target feature area, and selecting a point from the target feature area to configure as the coordinates of the first type of target;

[0021] And / or, obtaining the point coordinates input by the user and configuring them as the coordinates of the first type of target.

[0022] In some embodiments, intercepting a marked image containing the first type of target from the selected image to be detected includes:

[0023] The target pixel points corresponding to the coordinates of the first type of target are determined in the selected image to be measured, an extension area of the target pixel points is constructed, and a marked image containing the first type of target is formed by at least intercepting the extension area.

[0024] In some embodiments, constructing the extended area of the target pixel includes:

[0025] Taking the target pixel point as the center, a rectangular area of a preset size is expanded as the extension area; or

[0026] Taking the target pixel point as the center, the circumscribed rectangular area of the first type of target is used as the extended area; or

[0027] Taking the target pixel point as the center, the circumscribed rectangular area of the first type of target and the row and column extension areas of the circumscribed rectangular area are merged as the extended area.

[0028] In some embodiments, the location marking method further includes:

[0029] The selected detection image is marked and saved, and / or the marked image is saved.

[0030] According to the second aspect, an embodiment provides an optical detection device, comprising:

[0031] a light source module, configured to generate detection light, wherein the detection light is configured to illuminate a detection object so that the detection object generates signal light;

[0032] an imaging module, configured to collect the signal light and generate at least one corresponding image to be measured based on the signal light;

[0033] A processing module is used to process at least one image to be measured generated by the imaging module according to the position marking method described in the first aspect.

[0034] In some embodiments, the optical detection device further comprises:

[0035] The motion module is used to drive the detection object and / or the imaging module to move, so that the detection object performs a scanning movement relative to the imaging module.

[0036] In some embodiments, the optical detection device further comprises:

[0037] Input module, used to obtain the point coordinates input by the user;

[0038] The processing module is further configured to configure the point coordinates as the coordinates of the first type of target.

[0039] According to a third aspect, an embodiment provides a computer-readable storage medium, on which a program is stored. The program can be executed by a processor to implement the position marking method as described in the first aspect.

[0040] According to the position marking method of the above embodiment, after acquiring the image to be tested, the coordinate range of the image to be tested is obtained. Then, the coordinates of the defect location of the test object or the location input by the user are obtained and the coordinate range within which the coordinates fall is determined. Then, based on the determined coordinate range, the corresponding image to be tested is selected, and a marked image containing the defect location of the test object or the location input by the user is captured from the selected image to be tested. Because the marked image is captured from the image to be tested, the marked image and the image to be tested are consistent. BRIEF DESCRIPTION OF THE DRAWINGS

[0041] Figure 1 1 is a schematic structural diagram of an optical detection device according to an embodiment;

[0042] Figure 2 is a schematic structural diagram of an optical detection device according to another embodiment;

[0043] Figure 3 is a schematic diagram of an image to be measured according to an embodiment;

[0044] Figure 4 A schematic diagram of marking an image to be tested according to an embodiment;

[0045] Figure 5 A schematic diagram of a marking image according to an embodiment;

[0046] Figure 6 A flowchart of a location marking method according to an embodiment is shown. DETAILED DESCRIPTION

[0047] The present application is further described in detail below by means of specific embodiments in conjunction with the accompanying drawings. Similar elements in different embodiments are numbered with associated similar elements. In the following embodiments, many detailed descriptions are provided to enable the present application to be better understood. However, those skilled in the art will readily appreciate that some of the features may be omitted in different circumstances, or may be replaced by other elements, materials, or methods. In some cases, some operations related to the present application are not shown or described in the specification. This is to avoid the core portion of the present application being overwhelmed by excessive descriptions. For those skilled in the art, it is not necessary to describe these related operations in detail, and the related operations can be fully understood based on the description in the specification and the general technical knowledge in the art.

[0048] In addition, the features, operations, or characteristics described in the specification may be combined in any appropriate manner to form various embodiments. Furthermore, the steps or actions in the method description may be reordered or adjusted in a manner readily apparent to those skilled in the art. Therefore, the various sequences in the specification and drawings are provided solely for the purpose of clearly describing a particular embodiment and are not intended to be mandatory, unless otherwise specified.

[0049] The serial numbers assigned to components herein, such as "first," "second," etc., are used solely to distinguish the objects being described and do not convey any sequential or technical meaning. References to "connection" and "coupling" herein, unless otherwise specified, include both direct and indirect connections (couplings).

[0050] In current technical solutions, the image to be tested and the marked image are acquired using two separate sets of inspection devices. One set of inspection devices is used to acquire the image to be tested and output the defect location of the object based on the image to be tested. The other set of inspection devices is used to input the defect location of the object to be tested or a user-entered location and, based on the input location, acquire a marked image containing the defect location. Because the two sets of inspection devices acquire images differently, the image to be tested and the marked image may be inconsistent, thus affecting subsequent analysis.

[0051] In some embodiments of the present application, a set of detection devices can be used to separately acquire an image to be tested and a marked image, thereby ensuring consistency between the image to be tested and the marked image. Specifically, after acquiring the image to be tested, the coordinate range of the image to be tested is obtained, and then the coordinates of the defect location of the test object or the location input by the user are obtained, and the coordinate range within which the coordinates lie is determined. Then, based on the determined coordinate range, a corresponding image to be tested is selected, and a marked image containing the defect location of the test object or the location input by the user is captured from the selected image to be tested. Because the marked image is captured from the image to be tested, consistency between the marked image and the image to be tested is achieved.

[0052] In some embodiments, an optical inspection device is provided, which can be used to obtain an image of an object to be inspected and extract a marked image containing a defect location or a location input by a user from the image to be inspected, so that the image to be inspected and the marked image are consistent. Figure 1 The optical detection device includes a light source module 10, an imaging module 20 and a processing module 30, which are described in detail below.

[0053] The light source module 10 is used to generate detection light, which is used to illuminate the detection object, causing the detection object to generate signal light. This signal light can be light generated by reflection, scattering, or diffraction of the detection light on the object's surface. In some embodiments, the light outlet of the light source module 10 can be directed toward the detection object, thereby directly illuminating the detection object with detection light, such as white light, laser light, or light of a specific wavelength band. In some embodiments, the detection light generated by the light source module 10 is laser light, which is used to illuminate the surface of the detection object in a dot or line pattern, forming an area of laser light illumination on the surface of the detection object. It will be understood that laser light has high brightness, high directionality, high monochromaticity, and high coherence, and can produce stable and reliable illumination on the surface of the detection object, minimizing the influence of ambient light, thereby improving the reliability of optical detection. In some embodiments, the detection object can be a wafer, chip, mask, glass screen, etc. In some embodiments, the detection object can also be a process component with a regular shape. The surface of such components often has high process requirements, and should be free of defects or have as few defects as possible to meet industrial application requirements.

[0054] The imaging module 20 is used to collect the signal light of the detection object and generate a corresponding image to be measured based on the signal light. In some embodiments, the imaging module 20 may include a laser camera, a CCD camera, a CMOS camera, etc. The purpose of using the imaging module 20 is to receive the signal light formed by the detection object under the irradiation of the detection light, and convert the signal light into a corresponding electrical signal, and generate a corresponding image to be measured based on the electrical signal. In some embodiments, since the detection light can form an irradiation area on the surface of the detection object, the signal light can reflect the surface features of the object in the irradiation area, and the electrical signal generated based on the signal light conversion will also reflect the surface features of the object in the irradiation area. Under normal circumstances, if the surface features of the object in the irradiation area are defects, the signal light will be offset or divergent, thereby causing the electrical signal to change, resulting in a change in the pixel value of the imaging pixel point.

[0055] The processing module 30 can be implemented based on logic processing components such as CPU, MCU, FPGA, and single-chip microcomputer. It is connected to the light source module 10 and the imaging module 20 through some ports. The processing module 30 is used to control and analyze optical detection of the detection object.

[0056] Please refer to Figure 2 In some embodiments, the optical detection device may further include an input module 40 , a motion module 50 , and a storage module 60 , and the input module 40 , the motion module 50 , and the storage module 60 are also connected to the processing module 30 , respectively.

[0057] The input module 40 is used to obtain the coordinates of the first-category target. For example, the coordinates of the first-category target may be the coordinates of a defect location on the inspection object, or the coordinates of a point on the inspection object input by a user. In some embodiments, the input module 40 may include a control panel having buttons configured thereon, through which a user may input the coordinates of the first-category target. In some embodiments, the input module 40 may include a touch screen, through which a user may input the coordinates of the first-category target. In some embodiments, the input module 40 may include a communication unit, to which a user may send the coordinates of the first-category target via a terminal device.

[0058] The motion module 50 is used to drive the detection object and / or the imaging module 20 to move, so that the detection object is scanned and moved relative to the imaging module 20, that is, the image to be detected obtained by the imaging module 20 each time is a part of the detection object, so it is necessary to obtain multiple images to be detected by scanning and moving, so that a global image of the detection object can be obtained. In some embodiments, the imaging module 20 is configured in a fixed position, and the motion module 50 is a motion platform for carrying the detection object, which is used to drive the detection object to move, so that the detection object is scanned and moved relative to the imaging module 20. In some embodiments, the detection object is configured in a fixed position, and the motion module 50 is a motion bracket for carrying the imaging module, which is used to drive the imaging module 20 to move, so that the detection object is scanned and moved relative to the imaging module 20. In some embodiments, the motion module 50 can also drive the detection object and the imaging module 20 to move simultaneously or separately, so that the detection object is scanned and moved relative to the imaging module 20. In some embodiments, the motion module 50 can be implemented based on a drive structure such as a linear module (such as a guide rail), a screw nut, or a gear.

[0059] The storage module 60 is used to store the selected and marked detection images and the marked images. In some embodiments, the storage module 60 can be implemented based on various storage media.

[0060] The above is some description of the optical detection device. The following is a detailed description of the process of position marking by the optical detection device.

[0061] The processing module 30 acquires at least one image to be tested of the detection object based on the imaging module 20 and obtains a coordinate range of each image to be tested.

[0062] In some embodiments, the acquisition of the image to be tested can be real-time. For example, the processing module 30 controls the motion module 50 to drive the detection object to scan relative to the imaging module 20. After each scanning movement of the detection object relative to the imaging module 20, the imaging module 20 acquires an image to be tested of the detection object. After all scanning movements are completed, at least one image to be tested of the detection object is acquired, and the coordinate range of each image to be tested is obtained. In some embodiments, the acquisition of the image to be tested can be offline. For example, after the processing module 30 controls the motion module 50 to drive the detection object to scan relative to the imaging module 20, the imaging module 20 acquires at least one image to be tested of the detection object, and the processing module 30 acquires the at least one image to be tested and obtains the coordinate range of each image to be tested.

[0063] In some embodiments, when obtaining the coordinate range of the image to be tested, the processing module 30 is further configured to construct a spatial coordinate system or image coordinate system for the test object. For example, the spatial coordinate system or image coordinate system is constructed based on the configured position of the test object, and then the coordinate range of each image to be tested is configured based on the spatial coordinate system or image coordinate system. It will be appreciated that determining the coordinate range of the image to be tested within the same spatial coordinate system or image coordinate system facilitates subsequent coordinate comparison and position determination.

[0064] In some embodiments, when obtaining the coordinate range of each image to be measured, the processing module 30 is further configured to obtain the relative position of the image acquisition point of the detection object, and obtain the initial coordinates of each image to be measured in the constructed spatial coordinate system or image coordinate system based on the relative position. For example, after the processing module 30 controls the motion module 50 to drive the detection object to perform a scanning movement relative to the imaging module 20, the processing module 30 obtains the image to be measured of the detection object based on the imaging module 20. At this time, the initial coordinates of the image to be measured are obtained in the constructed spatial coordinate system or image coordinate system based on the relative position of the image acquisition point of the detection object.

[0065] In some embodiments, the initial coordinates of the image to be measured include one of the coordinates of the upper left corner, upper right corner, lower left corner, and lower right corner of the image to be measured. In this embodiment, the image to be measured is rectangular, and therefore the coordinates of the upper left corner, upper right corner, lower left corner, and lower right corner of the image to be measured represent the maximum or minimum coordinates of the image to be measured in each direction, respectively. Then, the image size of the image to be measured is obtained, and a coordinate range for each image to be measured is configured based on the image size of the image to be measured and the corresponding initial coordinates. In this embodiment, when the coordinates of a corner of the image to be measured are obtained, the coordinates of any point in the image to be measured can be obtained based on the image size of the image to be measured, thereby obtaining the coordinate range of the image to be measured.

[0066] In some embodiments, when configuring the coordinate range of each image to be measured, the processing module 30 is further configured to use one of the upper left corner coordinate, upper right corner coordinate, lower left corner coordinate, and lower right corner coordinate of the image to be measured, in combination with the image size of the image to be measured, to calculate the other corner coordinates. For example, based on the upper left corner coordinate of the image to be measured and the image size of the image to be measured, the upper right corner coordinate, lower left corner coordinate, and lower right corner coordinate of the image to be measured can be calculated respectively. In some embodiments, the upper left corner coordinate and the lower right corner coordinate of the image to be measured are used as the coordinate range of the image to be measured. Alternatively, the upper right corner coordinate and the lower left corner coordinate of the image to be measured are used as the coordinate range of the image to be measured. In this embodiment, two non-adjacent corner coordinates in the image to be measured are used as the coordinate range of the image to be measured, thereby representing the horizontal coordinate range and the vertical coordinate range of the image to be measured in the spatial coordinate system or the image coordinate system based on the corner coordinates.

[0067] In some embodiments, when obtaining the image size of each image to be tested, the processing module 30 is further configured to obtain the number of pixels in the rows and columns of each image to be tested, as well as the pixel size of a single pixel, and then calculate the image size of each image to be tested. In this embodiment, when the number of pixels in the rows and columns and the pixel size of the image to be tested are determined, the image size of the image to be tested is determined. That is, the vertical image size of the image to be tested is obtained by multiplying the number of pixels in the rows and columns by the pixel size, and the horizontal image size of the image to be tested is obtained by multiplying the number of pixels in the columns by the pixel size.

[0068] The processing module 30 is further configured to obtain the coordinates of the first-category targets and determine a coordinate range within which the coordinates of the first-category targets reside. For example, each image to be measured has a corresponding coordinate range. After obtaining the coordinates of the first-category targets, the coordinate range within which the coordinates of each first-category target reside is determined, i.e., the coordinate range contains the coordinates of the first-category targets.

[0069] In some embodiments, when obtaining the coordinates of the first type of target, the processing module 30 is further configured to detect target features in each image to be tested, obtain a target feature region, and select a point from the target feature region to configure as the coordinates of the first type of target. For example, the processing module 30 is configured to detect defects in the image to be tested based on an existing defect detection algorithm, obtain a defect region, and then select a point from the defect region to configure as the coordinates of the first type of target. In some embodiments, the processing module 30 is further configured to select a point at or near the center of the defect region to configure as the coordinates of the first type of target.

[0070] In some embodiments, when obtaining the coordinates of the first type of target, the processing module 30 is further configured to obtain the point coordinates input by the user based on the input module 40 and configure them as the coordinates of the first type of target. In this embodiment, there may be missed target feature regions in the image to be measured. In this case, the user can input the coordinates of the missed target feature regions based on the input module 40, or can also input the coordinates of a point of interest based on the input module 40.

[0071] The processing module 30 is further configured to select a corresponding image to be measured according to the determined coordinate range.

[0072] The processing module 30 is further configured to capture a marked image containing the first type of target from the selected image to be tested.

[0073] In some embodiments, when intercepting a labeled image containing a first type of target from a selected image to be tested, the processing module 30 is further configured to determine the target pixel points corresponding to the coordinates of the first type of target in the selected image to be tested, construct an extension area of the target pixel points, and form a labeled image containing the first type of target by intercepting the extension area. In this embodiment, since the minimum unit of the spatial coordinate system or the image coordinate system may be different from the pixel size of the image to be tested, for example, when the size of a pixel point in the image to be tested is a non-integer minimum unit, the coordinates of the first type of target may not be consistent with the pixel points of the image to be tested. In this case, when intercepting a labeled image in the image to be tested, it is necessary to first confirm the target pixel points corresponding to the coordinates of the first type of target in the image to be tested, and then intercept the labeled image in the image to be tested based on the position of the pixel points.

[0074] In some embodiments, when constructing the extended area of the target pixel point, the processing module 30 is also used to use the target pixel point as the center and the expanded rectangular area of the preset size as the extended area; in some embodiments, the processing module 30 is also used to use the target pixel point as the center and the circumscribed rectangular area of the first type of target as the extended area; in some embodiments, the processing module 30 is also used to use the target pixel point as the center and the circumscribed rectangular area of the first type of target and the row and column extension area of the circumscribed rectangular area as the extended area.

[0075] In some embodiments, the processing module 30 is further configured to mark the selected detection image and control the storage module 60 to save the image, and / or the processing module 30 is further configured to control the storage module 60 to save the marked image.

[0076] In the above embodiment, after acquiring the image to be measured, the optical detection device also acquires the coordinate range of the image to be measured. When the acquired coordinates of the first type of target are within the coordinate range of the image to be measured, a marked image containing the first type of target is intercepted from the image to be measured, so that the image to be measured and the marked image are consistent.

[0077] The following example illustrates this.

[0078] After the optical detection device obtains at least one image of the detection object, it calculates the coordinate range of the image. Figure 3 As shown in the figure, the resolution of the image to be tested is 768×512 pixels, with a pixel size of 0.1μm / pixel. Based on the constructed spatial coordinate system or image coordinate system, the relative positions of the image acquisition points of the test object give the coordinates of the upper left corner of the image to be tested as (100, 200), with units in μm. Based on the coordinates of the upper left corner of the image to be tested (100, 200), the coordinates of the lower right corner are (176.8, 148.8), with a resolution of 768×512 pixels and a pixel size of 0.1μm / pixel. Therefore, the coordinate range of the test image is (100, 200, 176.8, 148.8), with units in μm.

[0079] The optical detection device obtains the coordinates of the first type of target, for example, the defect coordinates input by the user are (150.6, 174.7), or the defect coordinates obtained by defect detection based on the image to be tested are (150.6, 174.7), the unit of which is μm. After calculation, 100<150.6<176.8, 200>174.7>148.8, so the defect coordinates are within the coordinate range of the image to be tested, and the image to be tested is selected.

[0080] The optical detection device obtains the target pixel corresponding to the defect coordinates in the image to be tested. Specifically, the target pixel of the defect coordinates (150.6, 174.7) in the image to be tested is ((150.6-100) / 0.1, -(174.7-200) / 0.1), that is, (506, 253), in pixels. Then, the extended area of the target pixel is constructed, as shown in the following example: Figure 4 As shown, with the target pixel as the center, the rectangular area of the preset size that is expanded outward is used as the extension area. Finally, at least the extension area is intercepted to form a marked image containing the first type of target.

[0081] The optical detection device marks the image to be tested, such as Figure 4 As shown, and save the marked image to be tested, or as Figure 5 As shown, the marked image is saved.

[0082] Some embodiments provide a position marking method that can be applied to the above-mentioned optical detection device. Figure 6 , the position marking method includes the following steps:

[0083] Step 100: Acquire at least one image to be tested of the detection object, and obtain the coordinate range of each image to be tested.

[0084] Step 200: Acquire the coordinates of the first type of target and determine the coordinate range of the first type of target.

[0085] Step 300: Select a corresponding image to be measured according to the determined coordinate range.

[0086] Step 400: intercepting a marked image containing a first type of target from the selected image to be tested.

[0087] In some embodiments, the location marking method further includes:

[0088] A spatial coordinate system or image coordinate system is constructed for the detection object, and the coordinate range of each image to be detected and the coordinates of the first type of target are configured based on the spatial coordinate system or image coordinate system.

[0089] In some embodiments, obtaining the coordinate range of each image to be measured includes:

[0090] Obtain the relative position of the image acquisition point of the detection object, and obtain the initial coordinates of each image to be measured in a spatial coordinate system or an image coordinate system based on the relative position, where the initial coordinates include one of the upper left corner coordinate, the upper right corner coordinate, the lower left corner coordinate, and the lower right corner coordinate of the image to be measured; obtain the image size of each image to be measured, and configure the coordinate range of each image to be measured based on the image size of each image to be measured and the corresponding initial coordinates.

[0091] In some embodiments, obtaining the image size of each image to be measured includes:

[0092] The number of row and column pixels of each image to be tested and the pixel size of a single pixel are obtained, and the image size of each image to be tested is obtained by calculation.

[0093] In some embodiments, configuring the coordinate range of each image to be measured includes: using one of the upper left corner coordinate, upper right corner coordinate, lower left corner coordinate and lower right corner coordinate of the image to be measured, combined with the image size of the image to be measured to calculate the other corner coordinates; using the upper left corner coordinate and the lower right corner coordinate as the coordinate range of the image to be measured; or, using the upper right corner coordinate and the lower left corner coordinate as the coordinate range of the image to be measured.

[0094] In some embodiments, obtaining the coordinates of the first type of target includes:

[0095] Detect target features of each image to be tested to obtain a target feature area, select a point from the target feature area and configure it as the coordinates of the first type of target; and / or obtain the point coordinates input by the user and configure them as the coordinates of the first type of target.

[0096] In some embodiments, intercepting a marked image containing the first type of target from the selected image to be detected includes:

[0097] The target pixel points corresponding to the coordinates of the first type of target are determined in the selected image to be tested, an extension area of the target pixel points is constructed, and a marked image containing the first type of target is formed by at least intercepting the extension area.

[0098] In some embodiments, constructing the extended area of the target pixel includes:

[0099] With the target pixel point as the center, the rectangular area of the preset size is expanded as the extended area; or, with the target pixel point as the center, the circumscribed rectangular area of the first type of target is used as the extended area; or, with the target pixel point as the center, the circumscribed rectangular area of the first type of target and the row and column expansion areas of the circumscribed rectangular area are combined as the extended area.

[0100] In some embodiments, the location marking method further includes:

[0101] Mark and save the selected inspection image, and / or save the marked image.

[0102] Some embodiments provide a computer-readable storage medium having a program stored thereon, which can be executed by a processor to implement the above-mentioned location marking method.

[0103] Those skilled in the art will appreciate that all or part of the functions of the various methods in the above embodiments can be implemented by hardware or by computer program. When all or part of the functions in the above embodiments are implemented by computer program, the program can be stored in a computer-readable storage medium, and the storage medium can include: read-only memory, random access memory, disk, optical disk, hard disk, etc., and the program is executed by a computer to implement the above functions. For example, the program is stored in the memory of the device, and when the program in the memory is executed by the processor, all or part of the above functions can be implemented. In addition, when all or part of the functions in the above embodiments are implemented by computer program, the program can also be stored in a storage medium such as a server, another computer, disk, optical disk, flash disk or mobile hard disk, and saved in the memory of the local device by downloading or copying, or the system of the local device is updated. When the program in the memory is executed by the processor, all or part of the functions in the above embodiments can be implemented.

[0104] The above specific examples are used to illustrate the present application, which is only used to help understand the present application and is not intended to limit the present application. For those skilled in the art of the present application, based on the concept of the present application, they can also make some simple deductions, modifications or substitutions.

Claims

1. A position marking method, characterized in that: include: Acquire at least one image to be tested of the detection object, and obtain the coordinate range of each image to be tested; Acquire the coordinates of the first type of target, and determine the coordinate range in which the coordinates of the first type of target are located; Selecting the corresponding image to be measured according to the determined coordinate range; A marked image containing the first type of target is intercepted from the selected image to be tested.

2. The position marking method according to claim 1, wherein: Also includes: A spatial coordinate system or an image coordinate system is constructed for the detection object, and a coordinate range of each of the images to be detected and the coordinates of the first type of targets are configured based on the spatial coordinate system or the image coordinate system.

3. The position marking method according to claim 2, wherein: Obtaining the coordinate range of each image to be measured includes: Obtaining relative positions of image acquisition points of the detection object, and obtaining initial coordinates of each of the images to be detected in the spatial coordinate system or the image coordinate system according to the relative positions, wherein the initial coordinates include one of the upper left corner coordinate, the upper right corner coordinate, the lower left corner coordinate, and the lower right corner coordinate of the image to be detected; The image size of each of the images to be measured is obtained, and a coordinate range of each of the images to be measured is configured according to the image size of each of the images to be measured and the corresponding initial coordinates.

4. The position marking method according to claim 3, wherein: The obtaining of the image size of each of the images to be measured includes: The number of row and column pixels of each image to be tested and the pixel size of a single pixel are obtained, and the image size of each image to be tested is obtained by calculation.

5. The position marking method according to claim 3, wherein: The configuration forms a coordinate range of each of the images to be measured, including: Calculating other corner coordinates using one of the upper left corner coordinate, the upper right corner coordinate, the lower left corner coordinate, and the lower right corner coordinate of the image to be measured in combination with the image size of the image to be measured; The upper left corner coordinates and the lower right corner coordinates are used as the coordinate range of the image to be measured; or, the upper right corner coordinates and the lower left corner coordinates are used as the coordinate range of the image to be measured.

6. The position marking method according to claim 1, wherein: The obtaining of the coordinates of the first type of target includes: Detecting target features on each of the images to be tested to obtain a target feature area, and selecting a point from the target feature area to configure as the coordinates of the first type of target; And / or, obtaining the point coordinates input by the user and configuring them as the coordinates of the first type of target.

7. The position marking method according to claim 1, wherein: The step of intercepting a marked image containing the first type of target from the selected image to be tested includes: The target pixel points corresponding to the coordinates of the first type of target are determined in the selected image to be measured, an extension area of the target pixel points is constructed, and a marked image containing the first type of target is formed by at least intercepting the extension area.

8. The position marking method according to claim 7, wherein: The step of constructing the extension area of the target pixel point includes: Taking the target pixel point as the center, a rectangular area of a preset size is expanded as the extension area; or, Taking the target pixel point as the center, the circumscribed rectangular area of the first type of target is used as the extended area; or Taking the target pixel point as the center, the circumscribed rectangular area of the first type of target and the row and column extension areas of the circumscribed rectangular area are merged as the extended area.

9. The position marking method according to claim 1, wherein: Also includes: The selected detection image is marked and saved, and / or the marked image is saved.

10. An optical detection device, characterized in that: include: a light source module, configured to generate detection light, wherein the detection light is configured to illuminate a detection object so that the detection object generates signal light; an imaging module, configured to collect the signal light and generate at least one corresponding image to be measured based on the signal light; A processing module is used to process at least one image to be measured generated by the imaging module according to the position marking method according to any one of claims 1 to 9.

11. The optical detection device according to claim 10, wherein: Also includes: The motion module is used to drive the detection object and / or the imaging module to move, so that the detection object performs a scanning movement relative to the imaging module.

12. The optical detection device according to claim 10, wherein: Also includes: Input module, used to obtain the point coordinates input by the user; The processing module is further configured to configure the point coordinates as the coordinates of the first type of target.

13. A computer-readable storage medium, characterized in that The medium stores a program, which can be executed by a processor to implement the position marking method according to any one of claims 1 to 9.

Images