Full-automatic gas cylinder replacement special gas holder for semi-conductor factory

Abstract

The invention provides a special gas holder for full-automatic gas cylinder replacement for a semi-conductor factory, the special gas holder comprises a special gas holder and a replacement mechanism, the replacement mechanism comprises a first cylinder, a shaft sleeve, a shell, a connecting shaft and a fixing rod, and the first cylinder is mounted on the inner wall of the special gas holder; the shaft sleeve is arranged on the outer wall of the output end of the first cylinder; the shell is connected with the output end of the first cylinder; the connecting shafts are respectively arranged on the inner walls of the corresponding shells; the fixing rod is arranged on the outer wall of the connecting shaft. According to the full-automatic gas cylinder replacement special gas holder for the semi-conductor factory disclosed by the embodiment of the invention, the gas cylinders can be quickly and stably replaced through automatic and mechanical design.

Description

Technical Field

[0001] The present invention relates to the technical field of semiconductors, and in particular to a special gas cabinet for fully automatic replacement of gas cylinders used in semiconductor factories. Background Art

[0002] Semiconductors refer to materials whose electrical conductivity at room temperature is between that of conductors and insulators. During the production of semiconductors in semiconductor factories, special gas cabinets are required as equipment for storing and supplying special gases. A stable supply of special gases is crucial.

[0003] When using traditional special gas cabinets, long-term use will cause dust and impurities to accumulate inside the gas cabinet, affecting the purity and supply stability of the special gas, so manual replacement of gas cylinders is required. However, traditional replacement methods are mostly manual operations, which are not only inefficient but also pose certain safety hazards. Summary of the Invention

[0004] The present invention aims to solve one of the technical problems in the above-mentioned technology at least to a certain extent.

[0005] To this end, one purpose of the present invention is to propose a special gas cabinet for fully automatic replacement of gas cylinders for semiconductor factories, which can achieve rapid and stable replacement of gas cylinders through automated and mechanized design.

[0006] To achieve the above-mentioned purpose, the first aspect of the present invention proposes a special gas cabinet for fully automatic replacement of gas cylinders in semiconductor factories, comprising: a special gas cabinet and a replacement mechanism, wherein the replacement mechanism includes a first cylinder, a sleeve, an outer shell, a connecting shaft and a fixing rod, wherein the first cylinder is installed on the inner wall of the special gas cabinet; the sleeve is arranged on the outer wall of the output end of the first cylinder; the outer shell is connected to the output end of the first cylinder; the connecting shafts are respectively arranged on the inner walls of the corresponding outer shells; and the fixing rod is arranged on the outer wall of the connecting shaft.

[0007] In addition, the semiconductor factory fully automatic gas cylinder replacement special gas cabinet proposed in the present invention may also have the following additional technical features: Specifically, a fixing assembly is provided on the inner wall of the special gas cabinet, wherein the fixing assembly includes a second cylinder, a fixing clamp, a first spring and a buffer pad, wherein the second cylinder is provided on the inner wall of the special gas cabinet; the fixing clamp is connected to the output end of the second cylinder; the first spring is provided on the outside of the fixing clamp, and the buffer pad is provided at the other end of the first spring.

[0008] Specifically, a limiting assembly is provided on the outer wall of the buffer pad, wherein the limiting assembly includes a limiting column, a second spring and a limiting block, wherein the limiting column is provided on the outer wall of the buffer pad; the second spring is provided inside the limiting column, and the two ends of the second spring are respectively connected to the buffer pad and the limiting block.

[0009] Specifically, a protective mechanism is provided inside the special gas cabinet, wherein the protective mechanism includes a fixed plate, a connecting plate, a protective plate and a protective cover, wherein the fixed plate is arranged on the inner wall of the special gas cabinet; the connecting plate is arranged on the outer wall of the fixed plate, and the protective plate is connected to the other end of the connecting plate; the protective cover is arranged on the inner wall of the special gas cabinet.

[0010] Specifically, a ventilation groove is provided on the outer wall of the special gas cabinet.

[0011] Specifically, an observation window is provided on the outer wall of the special gas cabinet.

[0012] Specifically, an anti-slip pad is provided on the outer wall of the fixing rod.

[0013] Specifically, an anti-sliding block is provided on the outer wall of the buffer pad.

[0014] Compared with the existing technology, the present invention has the following beneficial effects: the semiconductor factory uses a fully automatic gas cylinder replacement special gas cabinet, which realizes the rapid and stable replacement of gas cylinders through automated and mechanized design, while ensuring the cleanliness of the internal environment of the special gas cabinet and the stable supply of special gas.

[0015] Additional aspects and advantages of the present invention will be set forth in part in the description which follows and, in part, will be obvious from the description which follows, or may be learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The above and / or additional aspects and advantages of the present invention will become apparent and readily understood from the following description of the embodiments in conjunction with the accompanying drawings, in which: Figure 1 This is a structural diagram of a special gas cabinet for fully automatic replacement of gas cylinders for semiconductor factories according to one embodiment of the present invention; Figure 2 This is a schematic structural diagram of a protective mechanism for a fully automatic gas cylinder replacement special gas cabinet for a semiconductor factory according to one embodiment of the present invention; Figure 3 This is a structural diagram of a fully automatic gas cylinder replacement mechanism for a semiconductor factory special gas cabinet according to one embodiment of the present invention; Figure 4 This is a schematic structural diagram of a limit assembly for a fully automatic replacement gas cylinder special gas cabinet for a semiconductor factory according to one embodiment of the present invention; Figure 5 A semiconductor factory fully automatic gas cylinder replacement special gas cabinet according to one embodiment of the present invention Figure 4 Enlarged structural diagram at point A in the middle.

[0017] Figure markings: 1. Special gas cabinet; 2. Replacement mechanism; 21. First cylinder; 22. Bushing; 23. Outer shell; 24. Connecting shaft; 25. Fixing rod; 3. Fixing assembly; 31. Second cylinder; 32. Fixing clamp; 33. First spring; 34. Buffer pad; 35. Anti-slip pad; 4. Limiting assembly; 41. Limiting column; 42. Second spring; 43. Limiting block; 5. Protective mechanism; 51. Fixing plate; 52. Connecting plate; 53. Protective plate; 54. Protective cover; 6. Ventilation groove; 7. Observation window; 8. Anti-slip block. DETAILED DESCRIPTION

[0018] The following describes embodiments of the present invention in detail, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended to be used to explain the present invention, and are not to be construed as limiting the present invention.

[0019] The following describes a special gas cabinet for fully automatic replacement of gas cylinders for semiconductor factories according to an embodiment of the present invention with reference to the accompanying drawings.

[0020] like Figure 1-Figure 5 As shown, a semiconductor factory's fully automatic gas cylinder replacement special gas cabinet according to an embodiment of the present invention includes: a special gas cabinet 1 and a replacement mechanism 2.

[0021] The replacement mechanism 2 includes a first cylinder 21 , a sleeve 22 , a housing 23 , a connecting shaft 24 and a fixing rod 25 .

[0022] Among them, the first cylinder 21 is installed on the inner wall of the special gas cabinet 1, the sleeve 22 is arranged on the outer wall of the output end of the first cylinder 21, the outer shell 23 is connected to the output end of the first cylinder 21, the connecting shaft 24 is respectively arranged on the inner wall of the corresponding outer shell 23, and the fixing rod 25 is arranged on the outer wall of the connecting shaft 24.

[0023] Specifically, when using the replacement mechanism 2 to automatically replace the gas cylinder, the first cylinder 21 is first started, driving the sleeve 22 and the outer shell 23 to move. During the movement, the outer shell 23 drives the connecting shaft 24 and the fixed rod 25 to rotate, thereby clamping and replacing the gas cylinder, realizing automatic replacement of the gas cylinder, greatly improving the replacement efficiency and safety, and reducing the tediousness and danger of manual operation.

[0024] In one embodiment of the present application, Figure 4 As shown, a fixing component 3 is provided on the inner wall of the special gas cabinet 1.

[0025] The fixing assembly 3 includes a second cylinder 31, a fixing clamp 32, a first spring 33, and a buffer pad 34. The second cylinder 31 is arranged on the inner wall of the special gas cabinet 1, the fixing clamp 32 is connected to the output end of the second cylinder 31, the first spring 33 is arranged outside the fixing clamp 32, and the buffer pad 34 is arranged at the other end of the first spring 33. An anti-slip pad 35 is provided on the outer wall of the buffer pad 34.

[0026] Specifically, when the gas cylinder is placed in the special gas cabinet 1 for use, the second cylinder 31 is first started, driving the fixing clamp 32 to clamp and fix the gas cylinder. Under the action of the first spring 33 and the buffer pad 34, the gas cylinder can be effectively buffered and protected to prevent the gas cylinder from being damaged during placement or use. At the same time, the setting of the anti-slip pad 35 further improves the stability of the placement of the gas cylinder and prevents the gas cylinder from slipping or shaking, thereby ensuring the normal operation of the special gas cabinet 1 and the stable supply of special gas.

[0027] In one embodiment of the present application, Figure 3 As shown, a limiting component 4 is provided on the outer wall of the buffer pad 34 .

[0028] The limiting assembly 4 includes a limiting column 41 , a second spring 42 and a limiting block 43 .

[0029] The limiting column 41 is arranged on the outer wall of the buffer pad 34 , the second spring 42 is arranged inside the limiting column 41 , and both ends of the second spring 42 are connected to the buffer pad 34 and the limiting block 43 respectively.

[0030] Specifically, when the fixing assembly 3 is used for fixing, when the gas cylinder is clamped into the buffer pad 34, the buffer pad 34 is forced to compress the limit block 43, and the limit block 43 will drive the second spring 42 to compress, and then the second spring 42 enters the limit column, thereby strengthening the buffering effect on the buffer pad 34 and limiting the displacement of the first spring 33, preventing the buffer pad 34 from being damaged due to excessive force, and further improving the stability and safety of the gas cylinder fixation.

[0031] In one embodiment of the present application, Figure 2 As shown, a protection mechanism 5 is provided inside the special gas cabinet 1 .

[0032] The protection mechanism 5 includes a fixing plate 51 , a connecting plate 52 , a protection plate 53 and a protection cover 54 .

[0033] Among them, the fixing plate 51 is arranged on the inner wall of the special gas cabinet 1, the connecting plate 52 is arranged on the outer wall of the fixing plate 51, the protective plate 53 is connected to the other end of the connecting plate 52, and the protective cover 54 is arranged on the inner wall of the special gas cabinet 1.

[0034] Specifically, when the special gas cabinet 1 needs to be protected, the connecting plate 52 is first fixed to the inner wall of the special gas cabinet 1 through the fixing plate 51, and then the protective plate 53 is connected to the other end of the connecting plate 52 to form effective protection for the interior of the special gas cabinet 1. Finally, through the setting of the protective cover 54, the protection effect of the special gas cabinet 1 is further improved, and dust and impurities are prevented from entering the interior of the special gas cabinet 1, thereby ensuring the purity and supply stability of the special gas.

[0035] In one embodiment of the present application, Figure 2 As shown, a ventilation groove 6 is provided on the outer wall of the special gas cabinet 1 .

[0036] It can be understood that the provision of the ventilation groove 6 enables the interior of the special gas cabinet 1 to maintain good ventilation, effectively preventing the problem of excessive internal temperature or excessive gas concentration due to long-term use.

[0037] In one embodiment of the present application, Figure 1 As shown, an observation window 7 is provided on the outer wall of the special gas cabinet 1 .

[0038] It can be understood that the setting of the observation window 7 makes it convenient for the staff to observe the operation status inside the special gas cabinet 1 at any time, ensure the stable supply of special gas and the normal operation of the equipment, and improve the reliability and safety of the equipment.

[0039] In one embodiment of the present application, Figure 3 As shown, an anti-sliding block 8 is provided on the outer wall of the fixing rod 25 .

[0040] It can be understood that the provision of the anti-sliding block 8 increases the friction between the fixing rod 25 and the gas cylinder, thereby improving the clamping stability of the fixing rod 25 on the gas cylinder, preventing the gas cylinder from slipping or shaking during the replacement process, and further ensuring the safety and efficiency of the replacement process.

[0041] Working principle: When in use, first, the staff observes the operation status inside the special gas cabinet 1 through the observation window 7 to confirm the position of the gas cylinder that needs to be replaced. Then, the replacement mechanism 2 is started, and the first cylinder 21 is started, driving the sleeve 22 and the outer shell 23 to move. During the movement, the outer shell 23 drives the connecting shaft 24 and the fixed rod 25 to rotate. The anti-sliding block 8 on the fixed rod 25 increases the friction with the gas cylinder to achieve stable clamping of the gas cylinder. After the gas cylinder is replaced, the fixing assembly 3 on the inner wall of the special gas cabinet 1 is started, and the second cylinder 31 drives the fixing clamp 32 to clamp and fix the gas cylinder that needs to be replaced. Under the action of the first spring 33 and the buffer pad 34, the gas cylinder is effectively buffered and protected to prevent the gas cylinder from being damaged during the replacement process. The limiting assembly 4 on the outer wall of the buffer pad 34 is subjected to force when the gas cylinder is clamped, and the limiting block 43 drives the second spring 42 to compress, thereby strengthening the buffering effect and limiting the displacement of the first spring 33 to prevent damage to the buffer pad 34. After replacement is complete, the replacement mechanism 2 resets, and the fixing assembly 3 releases the gas cylinder, completing the automatic cylinder replacement process. The protective mechanism 5 within the special gas cabinet 1 effectively protects the interior of the cabinet from dust and impurities, ensuring the purity and stable supply of the special gas. The ventilation slots 6 maintain good ventilation, preventing excessive internal temperatures or gas concentrations. The entire device enables automatic cylinder replacement, significantly improving replacement efficiency and safety while reducing the complexity and dangers of manual operation.

[0042] In summary, a fully automatic gas cylinder replacement special gas cabinet for semiconductor factories in an embodiment of the present invention realizes rapid and stable replacement of gas cylinders through automated and mechanized design, while ensuring the cleanliness of the internal environment of the special gas cabinet and the stable supply of special gases.

[0043] In the description of this specification, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of the technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one of such features. In the description of the present invention, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0044] In the description of this specification, the reference terms "one embodiment", "some embodiments", "example", "specific example", or "some examples" mean that the specific features, structures, materials or characteristics described in conjunction with the embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the schematic representations of the above terms do not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner. In addition, those skilled in the art can combine and combine different embodiments or examples described in this specification and features of different embodiments or examples without contradiction.

[0045] Although the embodiments of the present invention have been shown and described above, it will be understood that the above embodiments are exemplary and are not to be construed as limitations on the present invention. A person skilled in the art may change, modify, replace and deform the above embodiments within the scope of the present invention.

Claims

1. A fully automatic gas cylinder replacement special gas cabinet for semiconductor factories, characterized by: include: A special gas cabinet (1) and a replacement mechanism (2), wherein the replacement mechanism (2) comprises a first cylinder (21), a sleeve (22), a shell (23), a connecting shaft (24) and a fixing rod (25), wherein the first cylinder (21) is mounted on the inner wall of the special gas cabinet (1); the sleeve (22) is arranged on the outer wall of the output end of the first cylinder (21); the shell (23) is connected to the output end of the first cylinder (21); the connecting shafts (24) are respectively arranged on the inner walls of the corresponding shells (23); and the fixing rod (25) is arranged on the outer wall of the connecting shaft (24).

2. A semiconductor factory fully automatic gas cylinder replacement special gas cabinet according to claim 1, characterized in that: A fixing assembly (3) is provided on the inner wall of the special gas cabinet (1), and the fixing assembly (3) includes a second cylinder (31), a fixing clamp (32), a first spring (33) and a buffer pad (34). The second cylinder (31) is provided on the inner wall of the special gas cabinet (1); the fixing clamp (32) is connected to the output end of the second cylinder (31); the first spring (33) is provided outside the fixing clamp (32), and the buffer pad (34) is provided at the other end of the first spring (33).

3. The fully automatic gas cylinder replacement cabinet for semiconductor factories according to claim 2 is characterized in that: A limiting assembly (4) is provided on the outer wall of the buffer pad (34), and the limiting assembly (4) comprises a limiting column (41), a second spring (42) and a limiting block (43). The limiting column (41) is provided on the outer wall of the buffer pad (34); the second spring (42) is provided inside the limiting column (41), and the two ends of the second spring (42) are respectively connected to the buffer pad (34) and the limiting block (43).

4. The fully automatic gas cylinder replacement cabinet for semiconductor factories according to claim 1 is characterized in that: A protective mechanism (5) is provided inside the special gas cabinet (1), and the protective mechanism (5) includes a fixed plate (51), a connecting plate (52), a protective plate (53) and a protective cover (54). The fixed plate (51) is provided on the inner wall of the special gas cabinet (1); the connecting plate (52) is provided on the outer wall of the fixed plate (51); the protective plate (53) is connected to the other end of the connecting plate (52); and the protective cover (54) is provided on the inner wall of the special gas cabinet (1).

5. The fully automatic gas cylinder replacement cabinet for semiconductor factories according to claim 1 is characterized in that: A ventilation groove (6) is provided on the outer wall of the special gas cabinet (1).

6. The fully automatic gas cylinder replacement cabinet for semiconductor factories according to claim 1 is characterized in that: An observation window (7) is provided on the outer wall of the special gas cabinet (1).

7. The fully automatic gas cylinder replacement cabinet for semiconductor factories according to claim 1 is characterized in that: An anti-sliding block (8) is provided on the outer wall of the fixing rod (25).

8. The fully automatic gas cylinder replacement cabinet for semiconductor factories according to claim 2 is characterized in that: An anti-slip pad (35) is provided on the outer wall of the buffer pad (34).

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