Partial compensation aspheric reflector surface shape detection method

Abstract

The invention discloses a partial compensation aspheric reflector surface shape detection method, which relates to the field of aspheric reflector surface shape detection and comprises a basic data confirmation step, an aspheric data analysis step, a design parameter acquisition step, a partial compensation mirror establishment step, an interference fringe information acquisition step and a surface shape error analysis step. According to the invention, partial compensation is carried out on an aspheric surface by using a compensator through a partial compensation aspheric reflector surface shape detection technology, so that a detection light path is approximate to an ideal light path, the detection precision is obviously improved, and the development of an optical technology is promoted through research and application of the partial compensation aspheric reflector surface shape detection technology. Along with the continuous improvement and popularization of the technology, more optical systems adopt aspheric reflectors as key elements, thereby promoting the progress and development of the whole optical industry.

Description

Technical Field

[0001] The present application relates to the field of aspheric reflective mirror surface shape detection, and in particular to a method for detecting the surface shape of a partially compensated aspheric reflective mirror. Background Art

[0002] Aspheric mirrors can significantly improve the imaging quality and other performance indicators of optical systems, and are therefore widely used in high-precision optical systems. In order to ensure the realization of these performances, the surface shape of aspheric mirrors must be accurately detected. The processing and detection of aspheric surfaces are far more complicated than those of spherical mirrors. In particular, surface shape detection is an indispensable part of the manufacturing process of large-aperture, high-precision aspheric mirrors. Through surface shape detection, deviations in the manufacturing process can be discovered and corrected in a timely manner to ensure product quality. With the development of science and technology, various fields have increasingly higher performance requirements for optical systems, such as astronomical observation, satellite communications, laser processing, etc. These application demands have driven the development of aspheric mirror surface shape detection technology to meet higher precision and more complex application requirements. However, the existing technology still has the following shortcomings; Traditional aspheric surface detection methods such as profilometry and autocollimation focus methods, although they can meet the detection needs to a certain extent, have many limitations and it is difficult to achieve full-aperture high-precision detection, thereby increasing the detection cost of aspheric reflectors while reducing the detection efficiency of aspheric reflectors. Summary of the Invention

[0003] The object of the present invention is to provide a method for detecting the surface shape of a partially compensated aspheric reflector to solve the problems raised in the above background technology.

[0004] To achieve the above object, the present invention provides the following technical solution: a method for detecting the surface shape of a partially compensated aspheric reflector, comprising: Basic data confirmation steps: establish a three-dimensional model corresponding to the aspheric reflector, and analyze and obtain the basic data corresponding to the best fitting sphere; Aspheric surface data analysis step: used to perform data analysis based on the basic data corresponding to the best fitting sphere to obtain the aspheric surface data corresponding to the aspheric reflector; Design parameter acquisition step: acquiring the design status of the aspheric reflector to obtain the design parameters corresponding to the aspheric reflector; Partial compensation mirror establishment step: for analyzing the design parameters corresponding to the aspheric reflector and the aspheric surface data corresponding to the aspheric reflector, and establishing a partial compensation mirror corresponding to the aspheric reflector; Interference fringe information acquisition step: for collecting data on the convergence of light reflected from the aspheric reflector and light reflected from the partial compensation mirror, to obtain interference fringe information corresponding to each aspheric secondary sub-region of the aspheric reflector; Surface error analysis steps: performing comprehensive analysis on the interference fringe information corresponding to each aspherical secondary sub-region of the aspherical reflector and the aspherical surface data corresponding to the aspherical reflector to obtain the surface error analysis result of the aspherical reflector.

[0005] In the preferred embodiment of this solution, the specific execution method of the spatial model establishment step is as follows: Obtaining the shape structure corresponding to the aspheric reflector; An image acquisition device is used to perform omnidirectional image acquisition on the shape structure corresponding to the aspheric reflector to obtain an omnidirectional image corresponding to the aspheric reflector, and a preset contour scanner is used to perform contour scanning on the omnidirectional image corresponding to the aspheric reflector to establish a three-dimensional model corresponding to the aspheric reflector; A spatial rectangular coordinate system is established according to a preset method, a three-dimensional stereo model corresponding to the aspheric reflector is placed in the spatial rectangular coordinate system according to a preset method, information is extracted from the spatial rectangular coordinate system, and the spatial position coordinates of each point on the aspheric surface corresponding to the aspheric reflector are obtained, data analysis is performed on the spatial position coordinates of each point on the aspheric surface corresponding to the aspheric reflector, and the center and radius of the best-fit sphere corresponding to the aspheric reflector are obtained, and the center and radius of the best-fit sphere are recorded as basic data corresponding to the best-fit sphere.

[0006] In the preferred embodiment of this solution, the specific execution method of the spatial model establishment step is as follows: Obtaining the shape structure corresponding to the aspheric reflector; An image acquisition device is used to perform omnidirectional image acquisition on the shape structure corresponding to the aspheric reflector to obtain an omnidirectional image corresponding to the aspheric reflector, and a preset contour scanner is used to perform contour scanning on the omnidirectional image corresponding to the aspheric reflector to establish a three-dimensional model corresponding to the aspheric reflector; A spatial rectangular coordinate system is established according to a preset method, a three-dimensional stereo model corresponding to the aspheric reflector is placed in the spatial rectangular coordinate system according to a preset method, information is extracted from the spatial rectangular coordinate system, and the spatial position coordinates of each point on the aspheric surface corresponding to the aspheric reflector are obtained, data analysis is performed on the spatial position coordinates of each point on the aspheric surface corresponding to the aspheric reflector, and the center and radius of the best-fit sphere corresponding to the aspheric reflector are obtained, and the center and radius of the best-fit sphere are recorded as basic data corresponding to the best-fit sphere.

[0007] In a preferred embodiment of this solution, the specific implementation method of the design parameter acquisition step is as follows: The design parameters of the aspheric reflector are obtained, wherein the design parameters of the aspheric reflector include a surface type, a curvature radius, and a conic coefficient corresponding to the aspheric reflector.

[0008] In a preferred embodiment of this solution, the specific implementation method of the partial compensation mirror establishment step is as follows: According to the asphericity, aspheric gradient and design parameters corresponding to the aspheric reflector, the partial compensation mirror is designed using optical design software to obtain the specific structure of the partial compensation mirror.

[0009] In the preferred embodiment of this scheme, the specific execution method of the surface error analysis step is as follows: Extracting each standard interference fringe data set stored in a database, wherein the standard interference fringe data set includes standard interference fringe clarity, standard interference fringe spacing, standard interference fringe width, and standard interference fringe contrast; Extracting interference fringe influence coefficient sets corresponding to each aspheric gradient level and each asphericity level stored in a database, wherein the influence data set of each aspheric gradient level includes the influence factors of each aspheric gradient level on the clarity, spacing, width, and contrast of the interference fringes, and the influence data set of each asphericity level includes the influence factors of each asphericity level on the clarity, spacing, width, and contrast of the interference fringes; The interference fringe information of each aspherical secondary sub-region corresponding to the aspherical reflector includes the clarity of each interference fringe in each aspherical secondary sub-region, the spacing between adjacent interference fringes, the width of each interference fringe and the contrast of each interference fringe; By calculation formula: , calculate the first quality reference coefficient of each interference fringe in each secondary sub-region of the aspheric surface ; By calculation formula: , calculate the second quality reference coefficient of each interference fringe in each secondary sub-region of the aspheric surface ; By calculating the formula , calculate the comprehensive interference fringe quality reference coefficient corresponding to the aspheric reflector ,in 、 、 、 They are respectively expressed as standard interference fringe clarity, standard interference fringe spacing, standard interference fringe width and standard interference fringe contrast, 、 、 、 They are respectively expressed as the clarity of each interference fringe, the spacing between adjacent interference fringes, the width of each interference fringe and the contrast of each interference fringe in each secondary sub-region of the aspheric surface. 、 、 、 They are respectively expressed as the factors affecting the clarity, spacing, width and contrast of interference fringes by each aspheric gradient level. 、 、 、 They are respectively expressed as the factors affecting the clarity, spacing, width and contrast of interference fringes at each asphericity level. Represents the number of each aspherical secondary sub-region, Expressed as the number of aspherical secondary sub-regions, Represents the number of each interference fringe, Expressed as the number of interference fringes, Expressed as the preset first quality reference coefficient influencing factor, Expressed as a preset second quality reference coefficient influencing factor; The surface error degrees corresponding to the comprehensive interference fringe quality reference coefficient intervals stored in the database are extracted, and the surface error degrees corresponding to the aspheric reflector are obtained by screening according to the comprehensive interference fringe quality reference coefficients corresponding to the aspheric reflector. The surface error degrees corresponding to the aspheric reflector are recorded as the surface error analysis results of the aspheric reflector.

[0010] Compared with the prior art, the present invention has the following beneficial effects: This invention utilizes a partially compensated aspheric reflector surface shape detection technique, utilizing a compensator to partially or fully compensate for the normal aberration of the aspheric surface, making the detection optical path approximate to the ideal optical path, thereby significantly improving detection accuracy. This high-precision detection helps ensure the performance of aspheric reflectors in practical applications.

[0011] This invention promotes the development of optical technology through the research and application of partially compensated aspheric mirror surface shape detection technology. As this technology continues to improve and become more popular, more optical systems will adopt aspheric mirrors as key components, thereby promoting the progress and development of the entire optical industry. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] The present invention is further described with reference to the accompanying drawings. However, the embodiments in the accompanying drawings do not constitute any limitation to the present invention. A person skilled in the art can obtain other drawings based on the following drawings without creative effort.

[0013] Figure 1 This is a schematic diagram of the connection steps of an embodiment of the present invention. DETAILED DESCRIPTION

[0014] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0015] See also Figure 1 The present invention provides a surface shape detection method for a partially compensated aspheric reflector, the method comprising a basic data confirmation step, an aspheric surface data analysis step, a design parameter acquisition step, a partially compensated mirror establishment step, an interference fringe information acquisition step, and a surface shape error analysis step; The basic data confirmation step is connected to the aspheric surface data analysis step, the aspheric surface data analysis step is connected to the partial compensation mirror establishment step, the design parameter acquisition step is connected to the partial compensation mirror establishment step, the partial compensation mirror establishment step is connected to the interference fringe information acquisition step, and the interference fringe information acquisition step is connected to the surface error analysis step.

[0016] Basic data confirmation steps: establish a three-dimensional model corresponding to the aspheric reflector, and analyze and obtain the basic data corresponding to the best fitting sphere; Furthermore, the specific execution method of the spatial model establishment step is as follows: Obtaining the shape structure corresponding to the aspheric reflector; An image acquisition device is used to perform omnidirectional image acquisition on the shape structure corresponding to the aspheric reflector to obtain an omnidirectional image corresponding to the aspheric reflector, and a preset contour scanner is used to perform contour scanning on the omnidirectional image corresponding to the aspheric reflector to establish a three-dimensional model corresponding to the aspheric reflector; A spatial rectangular coordinate system is established according to a preset method, a three-dimensional stereo model corresponding to the aspheric reflector is placed in the spatial rectangular coordinate system according to a preset method, information is extracted from the spatial rectangular coordinate system, and the spatial position coordinates of each point on the aspheric surface corresponding to the aspheric reflector are obtained, data analysis is performed on the spatial position coordinates of each point on the aspheric surface corresponding to the aspheric reflector, and the center and radius of the best-fit sphere corresponding to the aspheric reflector are obtained, and the center and radius of the best-fit sphere are recorded as basic data corresponding to the best-fit sphere.

[0017] The aspheric surface data analysis step is used to perform data analysis based on the basic data corresponding to the best fitting sphere to obtain the aspheric surface data corresponding to the aspheric reflector; Furthermore, the specific execution method of the aspheric surface data analysis step is as follows: By using the center and radius of the best-fit sphere, a spatial stereo model corresponding to the best-fit sphere is created, and the spatial stereo model corresponding to the best-fit sphere is placed into a spatial rectangular coordinate system in a preset manner; Number each point on the best fitting sphere according to a preset method; Through the straight lines between the center of the best fitting sphere and each point on the best fitting sphere, the matching points on each point on the best fitting sphere and the corresponding aspheric surface of the aspheric reflector are determined. Expressed as the spatial position coordinates of each point on the best fitting sphere, It is expressed as the spatial position coordinates of the matching points on the aspherical surface of the aspherical reflector corresponding to each point on the best fitting sphere. It is represented by the number of each point on the best fitting sphere; By calculating the formula Calculate the distance between each point on the best fitting sphere and the matching point on the aspherical surface of the corresponding aspherical reflector , each point on the best fitting spherical surface and the matching point on the aspherical surface of the corresponding aspherical reflector are recorded as the asphericity of each matching point on the aspherical surface of the aspherical reflector, the aspheric gradient of each matching point on the aspherical surface of the aspherical reflector is obtained by analyzing the asphericity of each matching point on the aspherical surface of the aspherical reflector, and the aspheric gradient and asphericity of each matching point on the aspherical surface of the aspherical reflector are recorded as the aspheric data corresponding to the aspherical reflector; It should be noted that: Establishing a data extraction relationship between the aspheric surface data analysis step and the database, extracting a partitioning plan set stored in the data, wherein the partitioning plan set includes aspheric degree intervals corresponding to various levels of aspheric degree and aspheric gradient intervals corresponding to various levels of aspheric gradient; The aspheric surface of the aspheric reflector is divided according to the asphericity intervals corresponding to the various levels of asphericity and the asphericity of each matching point on the aspheric surface of the aspheric reflector, and the asphericity level corresponding to each aspheric surface first-level sub-region and each aspheric surface first-level sub-region corresponding to the aspheric reflector are obtained; Each aspheric surface sub-region is divided by the aspheric surface gradient interval corresponding to each level of aspheric surface gradient, and each aspheric surface secondary sub-region corresponding to each aspheric surface primary sub-region and each aspheric surface gradient level corresponding to each aspheric surface secondary sub-region are obtained.

[0018] The design parameter acquisition step acquires the design status of the aspheric reflector to obtain the design parameters corresponding to the aspheric reflector; Furthermore, the specific execution method of the design parameter acquisition step is as follows: The design parameters of the aspheric reflector are obtained, wherein the design parameters of the aspheric reflector include a surface type, a curvature radius, and a conic coefficient corresponding to the aspheric reflector.

[0019] The partial compensation mirror establishing step is used to establish a partial compensation mirror corresponding to the aspheric reflector by analyzing the design parameters corresponding to the aspheric reflector and the aspheric surface data corresponding to the aspheric reflector; Furthermore, the specific implementation of the partial compensation mirror establishment step is as follows: According to the asphericity, aspheric gradient and design parameters corresponding to the aspheric reflector, the partial compensation mirror is designed using optical design software to obtain the specific structure of the partial compensation mirror.

[0020] The interference fringe information acquisition step is used to collect data on the convergence of light reflected from the aspheric reflector and light reflected from the partial compensation mirror, and obtain interference fringe information corresponding to each aspheric secondary sub-region of the aspheric reflector; It should be noted that the laser beam emitted from the light source is split into two beams by a beam splitter, one beam is used as a reference beam, and the other beam is irradiated onto the aspheric reflector and compensation mirror to be measured.

[0021] The function of the compensating mirror is to produce a wavefront that matches the ideal shape of the aspheric reflector. When the light reflected from the aspheric reflector and the light reflected from the compensating mirror converge again at the beamsplitter, the optical path difference between the two beams will change due to the surface error of the aspheric reflector, resulting in interference fringes.

[0022] The surface error analysis step is used to comprehensively analyze the interference fringe information of each aspherical secondary sub-region corresponding to the aspherical reflector and the aspherical surface data corresponding to the aspherical reflector to obtain the surface error analysis result of the aspherical reflector.

[0023] Furthermore, the specific execution method of the surface error analysis step is as follows: Extracting each standard interference fringe data set stored in a database, wherein the standard interference fringe data set includes standard interference fringe clarity, standard interference fringe spacing, standard interference fringe width, and standard interference fringe contrast; Extracting interference fringe influence coefficient sets corresponding to each aspheric gradient level and each asphericity level stored in a database, wherein the influence data set of each aspheric gradient level includes the influence factors of each aspheric gradient level on the clarity, spacing, width, and contrast of the interference fringes, and the influence data set of each asphericity level includes the influence factors of each asphericity level on the clarity, spacing, width, and contrast of the interference fringes; The interference fringe information of each aspherical secondary sub-region corresponding to the aspherical reflector includes the clarity of each interference fringe in each aspherical secondary sub-region, the spacing between adjacent interference fringes, the width of each interference fringe and the contrast of each interference fringe; By calculation formula: , calculate the first quality reference coefficient of each interference fringe in each secondary sub-region of the aspheric surface ; By calculation formula: , calculate the second quality reference coefficient of each interference fringe in each secondary sub-region of the aspheric surface ; By calculating the formula , calculate the comprehensive interference fringe quality reference coefficient corresponding to the aspheric reflector ,in 、 、 、 They are respectively expressed as standard interference fringe clarity, standard interference fringe spacing, standard interference fringe width and standard interference fringe contrast, 、 、 、 They are respectively expressed as the clarity of each interference fringe, the spacing between adjacent interference fringes, the width of each interference fringe and the contrast of each interference fringe in each secondary sub-region of the aspheric surface. 、 、 、 They are respectively expressed as the factors affecting the clarity, spacing, width and contrast of interference fringes by each aspheric gradient level. 、 、 、 They are respectively expressed as the factors affecting the clarity, spacing, width and contrast of interference fringes at each asphericity level. Represents the number of each aspherical secondary sub-region, Expressed as the number of aspherical secondary sub-regions, Represents the number of each interference fringe, Expressed as the number of interference fringes, Expressed as the preset first quality reference coefficient influencing factor, Expressed as a preset second quality reference coefficient influencing factor; The surface error degrees corresponding to the comprehensive interference fringe quality reference coefficient intervals stored in the database are extracted, and the surface error degrees corresponding to the aspheric reflector are obtained by screening according to the comprehensive interference fringe quality reference coefficients corresponding to the aspheric reflector. The surface error degrees corresponding to the aspheric reflector are recorded as the surface error analysis results of the aspheric reflector.

[0024] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A method for detecting the surface shape of a partially compensated aspheric reflector, characterized in that: include: Basic data confirmation steps: establish a three-dimensional model corresponding to the aspheric reflector, and analyze and obtain the basic data corresponding to the best fitting sphere; Aspheric surface data analysis step: used to perform data analysis based on the basic data corresponding to the best fitting sphere to obtain the aspheric surface data corresponding to the aspheric reflector; Design parameter acquisition step: acquiring the design status of the aspheric reflector to obtain the design parameters corresponding to the aspheric reflector; Partial compensation mirror establishment step: for analyzing the design parameters corresponding to the aspheric reflector and the aspheric surface data corresponding to the aspheric reflector, and establishing a partial compensation mirror corresponding to the aspheric reflector; Interference fringe information acquisition step: for collecting data on the convergence of light reflected from the aspheric reflector and light reflected from the partial compensation mirror, to obtain interference fringe information corresponding to each aspheric secondary sub-region of the aspheric reflector; Surface error analysis steps: performing comprehensive analysis on the interference fringe information corresponding to each aspherical secondary sub-region of the aspherical reflector and the aspherical surface data corresponding to the aspherical reflector to obtain the surface error analysis result of the aspherical reflector.

2. The method for detecting the surface shape of a partially compensated aspheric reflector according to claim 1, wherein: The specific execution method of the space model establishment step is as follows: Obtain the shape structure corresponding to the aspheric reflector; An image acquisition device is used to perform omnidirectional image acquisition on the shape structure corresponding to the aspheric reflector to obtain an omnidirectional image corresponding to the aspheric reflector, and a preset contour scanner is used to perform contour scanning on the omnidirectional image corresponding to the aspheric reflector to establish a three-dimensional model corresponding to the aspheric reflector; A spatial rectangular coordinate system is established according to a preset method, a three-dimensional stereo model corresponding to the aspheric reflector is placed in the spatial rectangular coordinate system according to a preset method, information is extracted from the spatial rectangular coordinate system, and the spatial position coordinates of each point on the aspheric surface corresponding to the aspheric reflector are obtained, data analysis is performed on the spatial position coordinates of each point on the aspheric surface corresponding to the aspheric reflector, and the center and radius of the best-fit sphere corresponding to the aspheric reflector are obtained, and the center and radius of the best-fit sphere are recorded as basic data corresponding to the best-fit sphere.

3. The method for detecting the surface shape of a partially compensated aspheric reflector according to claim 2, wherein: The specific execution method of the aspheric surface data analysis step is as follows: By using the center and radius of the best-fit sphere, a spatial stereo model corresponding to the best-fit sphere is created, and the spatial stereo model corresponding to the best-fit sphere is placed into a spatial rectangular coordinate system in a preset manner; Number each point on the best fitting sphere according to a preset method; Through the straight lines between the center of the best fitting sphere and each point on the best fitting sphere, the matching points on each point on the best fitting sphere and the corresponding aspheric surface of the aspheric reflector are determined. Expressed as the spatial position coordinates of each point on the best fitting sphere, It is expressed as the spatial position coordinates of the matching points on the aspherical surface of the aspherical reflector corresponding to each point on the best fitting sphere. It is represented by the number of each point on the best fitting sphere; By calculating the formula Calculate the distance between each point on the best fitting sphere and the matching point on the aspherical surface of the corresponding aspherical reflector , each point on the best fitting spherical surface and the matching point on the aspherical surface of the corresponding aspherical reflector are recorded as the asphericity of each matching point on the aspherical surface of the aspherical reflector, the aspheric gradient of each matching point on the aspherical surface of the aspherical reflector is obtained by analyzing the asphericity of each matching point on the aspherical surface of the aspherical reflector, and the aspheric gradient and asphericity of each matching point on the aspherical surface of the aspherical reflector are recorded as the aspheric data corresponding to the aspherical reflector; Establishing a data extraction relationship between the aspheric surface data analysis step and the database, extracting a partitioning plan set stored in the data, wherein the partitioning plan set includes aspheric degree intervals corresponding to various levels of aspheric degree and aspheric gradient intervals corresponding to various levels of aspheric gradient; The aspheric surface of the aspheric reflector is divided according to the asphericity intervals corresponding to the various levels of asphericity and the asphericity of each matching point on the aspheric surface of the aspheric reflector, and the asphericity level corresponding to each aspheric surface first-level sub-region and each aspheric surface first-level sub-region corresponding to the aspheric reflector are obtained; Each aspheric surface sub-region is divided by the aspheric surface gradient interval corresponding to each level of aspheric surface gradient, and each aspheric surface secondary sub-region corresponding to each aspheric surface primary sub-region and each aspheric surface gradient level corresponding to each aspheric surface secondary sub-region are obtained.

4. The method for detecting the surface shape of a partially compensated aspheric reflector according to claim 1, wherein: The specific execution method of the design parameter acquisition step is as follows: The design parameters of the aspheric reflector are obtained, wherein the design parameters of the aspheric reflector include a surface type, a curvature radius, and a conic coefficient corresponding to the aspheric reflector.

5. The method for detecting the surface shape of a partially compensated aspheric reflector according to claim 4, wherein: The specific implementation of the partial compensation mirror establishment step is as follows: According to the asphericity, aspheric gradient and design parameters corresponding to the aspheric reflector, the partial compensation mirror is designed using optical design software to obtain the specific structure of the partial compensation mirror.

6. The method for detecting the surface shape of a partially compensated aspheric reflector according to claim 1, wherein: The specific execution method of the surface error analysis step is as follows: Extracting each standard interference fringe data set stored in a database, wherein the standard interference fringe data set includes standard interference fringe clarity, standard interference fringe spacing, standard interference fringe width, and standard interference fringe contrast; Extracting interference fringe influence coefficient sets corresponding to each aspheric gradient level and each asphericity level stored in a database, wherein the influence data set of each aspheric gradient level includes the influence factors of each aspheric gradient level on the clarity, spacing, width, and contrast of the interference fringes, and the influence data set of each asphericity level includes the influence factors of each asphericity level on the clarity, spacing, width, and contrast of the interference fringes; The interference fringe information of each aspherical secondary sub-region corresponding to the aspherical reflector includes the clarity of each interference fringe in each aspherical secondary sub-region, the spacing between adjacent interference fringes, the width of each interference fringe and the contrast of each interference fringe; By calculation formula: , calculate the first quality reference coefficient of each interference fringe in each secondary sub-region of the aspheric surface ; By calculation formula: , calculate the second quality reference coefficient of each interference fringe in each secondary sub-region of the aspheric surface ; By calculating the formula , calculate the comprehensive interference fringe quality reference coefficient corresponding to the aspheric reflector ,in 、 、 、 They are respectively expressed as standard interference fringe clarity, standard interference fringe spacing, standard interference fringe width and standard interference fringe contrast, 、 、 、 They are respectively expressed as the clarity of each interference fringe, the spacing between adjacent interference fringes, the width of each interference fringe and the contrast of each interference fringe in each secondary sub-region of the aspheric surface. 、 、 、 They are respectively expressed as the factors affecting the clarity, spacing, width and contrast of interference fringes by each aspheric gradient level. 、 、 、 They are respectively expressed as the factors affecting the clarity, spacing, width and contrast of interference fringes at each asphericity level. Represents the number of each aspherical secondary sub-region, Expressed as the number of aspherical secondary sub-regions, Represents the number of each interference fringe, Expressed as the number of interference fringes, Expressed as the preset first quality reference coefficient influencing factor, Expressed as a preset second quality reference coefficient influencing factor; The surface error degrees corresponding to the comprehensive interference fringe quality reference coefficient intervals stored in the database are extracted, and the surface error degrees corresponding to the aspheric reflector are obtained by screening according to the comprehensive interference fringe quality reference coefficients corresponding to the aspheric reflector. The surface error degrees corresponding to the aspheric reflector are recorded as the surface error analysis results of the aspheric reflector.

Images