Six-dimensional force sensor device

Abstract

The invention provides a six-dimensional force sensor device which comprises a base assembly and a vertical strain beam assembly, the base assembly is designed in a way that a frame is matched with a middle supporting beam, and the center position of a supporting beam component, namely the center of a base supporting frame, is fixedly connected with the end face of one end of the vertical strain beam assembly. The other end face of the vertical strain beam and the other end face of the base are respectively used for fixing and loading an external force to be measured; wherein the sensitive measurement units are uniformly distributed on the peripheral surface of the vertical strain beam and the middle position of a beam body of a supporting beam component of the base respectively, and six to-be-measured target quantities are divided into two parts for measurement by utilizing the shape of a structure main body and the characteristics and distribution of the sensitive measurement units; in this way, six measurement targets can be measured and calculated in a three-plus-three mode, inter-dimension decoupling operation is simplified, the subsequent decoupling process is optimized, the optimized decoupling algorithm guarantees the premise that the measurement precision is not sacrificed, and structural complexity caused by increase of the number of sensitive measurement units is avoided.

Description

Technical Field

[0001] The present invention relates to the field of sensor technology, and in particular to a six-dimensional force sensor device. Background Art

[0002] With the advancement of Industry 4.0 and smart manufacturing, industrial manufacturing is continuously developing towards automation and intelligence. Six-axis force sensors have ushered in development opportunities. Currently, the demand for high-precision, high-response six-axis force sensors is constantly increasing. These six-axis force sensors are widely used in robotics, medical rehabilitation, automated production, virtual reality, aerospace and other fields.

[0003] A six-axis force sensor is a device that can simultaneously measure forces (Fx, Fy, Fz) and torques (Mx, My, Mz) on an object in three spatial directions. It can simultaneously measure forces and torques in three orthogonal directions in three-dimensional space, and is primarily used in force and force-position control applications. The innovative development of six-axis force sensors will directly drive the development of various manufacturing industries, especially in the field of humanoid robots, where six-axis force sensors are expected to accelerate growth due to the maturity of product iterations. As a key component in robots' perception of the external environment, six-axis force sensors play a vital role in humanoid robot systems. Providing force information for the robot's force and motion control plays a vital role in completing complex and delicate tasks and achieving robot intelligence.

[0004] It can be seen from existing technology that the most widely used device for detecting six-dimensional force is the strain gauge sensor, but there are still some problems with the current commonly used design, which are specifically reflected in: the sensor structure is complex and the number of force and strain measurement modules is large, resulting in a high complexity of inter-dimensional decoupling; there are also optimized designs for the high difficulty of decoupling, but there are still too many force and strain measurement modules and complex circuits. In addition, there are also disadvantages such as low measurement accuracy, slow measurement speed, and low dynamic response.

[0005] In summary, the existing six-dimensional force sensor has technical problems of complex structure and insufficient measurement accuracy. Summary of the Invention

[0006] The technical problem to be solved by the present invention is that the existing six-dimensional force sensor has a complex structure and insufficient measurement accuracy.

[0007] To solve the above problems, the present invention provides a six-dimensional force sensor device, including a base assembly and a vertical strain beam assembly fixedly connected to one end of the base assembly, the base assembly including an annular base support frame and a support beam member connected to the base support frame, the support beam member is elastic and distributed along the radial direction of the base support frame, the vertical strain beam assembly is vertically installed and fixed to the central area of the support beam member; the support beam member is provided with a sensitive measurement unit between the areas where it is respectively connected to the base support frame and the vertical strain beam assembly, the vertical strain beam assembly is a columnar structure, one end is fitted and fixed to the support beam member, and the other end is used to load external force, and the vertical strain beam assembly is evenly provided with a plurality of the sensitive measurement units on its outer circumference.

[0008] The present invention provides a novel and improved six-dimensional force sensor, the structure of which mainly includes two parts: a base component and a vertical strain beam component. The base component is a structural design of a frame and an intermediate support beam. The center position of the support beam component, that is, the center of the base support frame, is fixedly connected to one end face of the vertical strain beam component. The vertical strain beam component is columnar, and the other end face of the vertical strain beam and the other end face of the base are respectively used to fix and load the external force to be measured; wherein the sensitive measuring units are evenly distributed on the outer peripheral surface of the vertical strain beam and the middle position of the beam body of the support beam component of the base, that is, between the support frame and the position connecting the vertical strain beam. Such a design first satisfies the structural integrity of the six-dimensional force gauge and meets the stiffness requirements, and the six target quantities Fx, Fy, Fz, Mx to be measured are fixedly connected. , My, Mz utilize the main shape of the structure and the characteristics and distribution of the sensitive measurement units to divide it into two parts for measurement. The three measurement targets Mx, My, and Fz are measured using the sensitive measurement units of the vertical strain beam assembly, and the three measurement targets Fx, Fy, and Mz are measured using the sensitive measurement units on the base support beam component. In this way, the six measurement targets can be divided into three plus three forms for measurement, which simplifies the inter-dimensional decoupling to a certain extent and optimizes the subsequent decoupling process. The optimized decoupling algorithm ensures that the measurement accuracy is not sacrificed, and the use of such a design will not cause the increase in the number of sensitive measurement units and the complexity of the structure, effectively solving the technical problems of the existing six-dimensional force sensor with complex structure and insufficient measurement accuracy.

[0009] As a preferred solution, the support beam member is a vertical cross-shaped beam structure, and sensitive unit installation slots are provided between the four connection points of the support beam member and the base assembly and the central area thereof, and each of the sensitive unit installation slots is used to install one of the sensitive measurement units. This design further optimizes the structure of the support beam member, adopts a cross-shaped beam structure, and the central area of the cross-shaped cross is connected and fixed to the vertical strain beam assembly. The sensitive unit installation slots are evenly distributed on each beam branch of the support beam member. Since the beam body is in a vertical cross shape, it is suitable for force measurement calibration of the X-axis and Y-axis. Four sets of force measurement data can be obtained through such a distribution of sensitive units, and since the beam body structure has good symmetry, the data measured by the sensitive units is guaranteed to have good general averageness, thereby ensuring the accuracy of the force measurement results.

[0010] As a preferred solution, a cylindrical mounting platform integrally connected to the cross-shaped beam structure is provided in the central region of the support beam member. The cylindrical mounting platform is provided with mounting holes for mounting and connecting with the vertical strain beam assembly. This design optimizes the connection structure between the support beam member and the vertical strain beam assembly. The docking position is adapted to the cylindrical structure of the vertical strain beam assembly. A cylindrical platform structure is provided in the central region of the support beam member, i.e., the central intersection of the cross, and is coupled with the mounting holes to complete docking with the vertical strain beam assembly. Preferably, the vertical strain beam assembly is also provided with corresponding mounting holes to facilitate installation and docking. This structure has good structural strength, avoiding stress concentration damage during use.

[0011] As a preferred solution, the vertical strain beam assembly is provided with sensitive unit mounting slots for inserting and securing the sensitive measurement units at locations corresponding to the four sensitive measurement units on the support beam member. This design further optimizes the distribution of the sensitive measurement units, aligning the placement of the sensitive measurement units on the vertical strain beam assembly with those on the support beam member. This facilitates the unification of measurement data obtained by the vertical strain beam assembly and the base assembly, further simplifying the decoupling process and enhancing the device's ease of use.

[0012] As a preferred solution, inwardly recessed stress-amplifying grooves are provided on the outer circumference of the vertical strain beam between adjacent sensitive unit mounting slots. This design optimizes the vertical strain beam's structural integrity. It should be noted that the stress-amplifying grooves are locations of stress concentration, increasing the amount of deformation of the vertical strain beam caused by force, thereby enhancing the force measurement sensitivity of the sensitive measurement unit, obtaining more distinct and accurate strain values, and improving the device's force measurement accuracy.

[0013] As a preferred solution, two sensitive measurement units located opposite each other on the outer periphery of the vertical strain beam assembly are connected by digital circuit signals to form a group. This design uses a group of digital circuits to replace the traditional strain gauge sensor's bridge circuit method for measuring the force and torque to be measured. This digital circuit measurement method, under the same temperature conditions, uses a differential structure to subtract and eliminate temperature-induced frequency changes, achieving temperature compensation. This can significantly reduce the number of sensitive measurement units used, solving the problem of existing six-dimensional force sensors using too many sensitive measurement units. It can also improve the sensor's stiffness characteristics and measurement response speed to a certain extent.

[0014] As a preferred solution, the sensitive measurement unit includes a pair of mutually bonded frame-shaped carriers, a piezoelectric material sheet clamped and fixed between the frame-shaped carriers, and an electrode plate bonded to the end surface of the piezoelectric material sheet. This design provides a preferred sensitive measurement unit structure design, in which the frame-shaped carrier, piezoelectric material sheet, and electrode plate are molded in a one-time package, which can further enhance the stress sensitivity of the sensitive measurement unit during operation, thereby improving the overall sensitivity and other characteristics of the six-dimensional force sensor device.

[0015] As a preferred solution, positioning groove structures are provided on both sides of the inner edge of the frame-shaped carrier, wherein a compression elastic component is provided in the positioning groove structure on one side, and the compression elastic component is used to press the piezoelectric material sheet against the inner edge of the frame-shaped carrier and fix it, and the positioning groove structure on the other side is used to bond and fix it to the piezoelectric material sheet.

[0016] This design uses a positioning groove structure to assist in compressing the elastic component, which will create a certain pre-tightening force between the piezoelectric material sheet and the side of the square-shaped carrier. When the external environment changes, the sensitive measurement unit can obtain more obvious tensile and compressive strain signals. When the six-dimensional force sensor is subjected to force or torque, it can immediately determine the direction of the force to be measured based on the difference in the output electrical signal, thereby improving the response speed and measurement accuracy of the six-dimensional force sensor.

[0017] As a preferred solution, the compression elastic member includes a compression spring that abuts against the inner sidewall of the positioning groove structure and a micro-pressing plate connected to one end of the compression spring, the micro-pressing plate abutting against the end surface of the piezoelectric material sheet. This design provides a preferred compression elastic member design, with the main body including the compression spring and micro-pressing plate, a simple structure and stable force.

[0018] As a preferred solution, the base support frame has multiple mounting holes evenly distributed on its end surface for mounting the base assembly or applying external forces. This design optimizes the docking structure between the base assembly and a fixed base or external forces. By evenly distributing multiple mounting holes throughout the base support frame, it balances the overall stress resistance and operational stability of the load-bearing lifting device. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 A schematic diagram of the overall structure of a six-dimensional force sensor device provided by the present invention; Figure 2 for Figure 1 A schematic diagram of the structure of the base assembly of the six-dimensional force sensor device; Figure 3 for Figure 1 Schematic diagram of the structure of the vertical strain beam assembly of the six-dimensional force sensor device; Figure 4 for Figure 1 Schematic diagram of the structure of the sensitive measurement unit of the six-dimensional force sensor device; Figure 5 for Figure 4 Schematic diagram of the decomposition structure of the medium-sensitive measurement unit; Figure 6 for Figure 4 Schematic diagram of the local enlarged structure of the medium-sensitive measurement unit A area; in, Figures 1-6 middle: 1. Base assembly; 1-1. Base support frame; 1-2. Support beam member; 1-3. Cylindrical mounting platform; 2. Vertical strain beam assembly; 2-1. Stress amplification groove structure; 3. Sensitive measurement unit; 3-1. Frame-shaped carrier; 3-2. Piezoelectric material sheet; 3-3. Positioning groove structure; 3-4. Compression spring; 3-5. Electrode plate; 3-6. Micro-pressing sheet; 4. Mounting through hole. DETAILED DESCRIPTION

[0020] In order to make the technical means, creative features, objectives and effects achieved by the present invention easier to understand, the present invention is further described below in conjunction with specific implementation methods.

[0021] Before explaining the working principle of the present invention in detail, the description of the present invention needs to be further explained: In the description of the present invention, it should be noted that the terms "upper", "lower", "inner", "outer", "front end", "rear end", "two ends", "one end", "the other end", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, they should not be understood as limiting the present invention. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0022] In the description of the present invention, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "provided with," "connected," etc., should be understood in a broad sense. For example, "connected" may refer to a fixed connection, a detachable connection, or an integral connection; it may refer to a mechanical connection, a direct connection, an indirect connection via an intermediate medium, or a connection between two components by welding. Those skilled in the art will understand the specific meanings of the above terms in the present invention in specific contexts.

[0023] refer to Figures 1-6 The following examples are described, Figure 1 A schematic diagram of the overall structure of a six-dimensional force sensor device provided by the present invention; Figure 2 for Figure 1 A schematic diagram of the structure of the base assembly of the six-dimensional force sensor device; Figure 3 for Figure 1 Schematic diagram of the structure of the vertical strain beam assembly of the six-dimensional force sensor device; Figure 4 for Figure 1 Schematic diagram of the structure of the sensitive measurement unit of the six-dimensional force sensor device; Figure 5 for Figure 4 Schematic diagram of the decomposition structure of the medium-sensitive measurement unit; Figure 6 for Figure 4 Schematic diagram of the locally enlarged structure of area A of the medium-sensitive measurement unit.

[0024] An embodiment of the present invention provides a six-dimensional force sensor device, including a base assembly 1 and a vertical strain beam assembly 2 fixedly connected to one end of the base assembly 1, the base assembly 1 including an annular base support frame 1-1 and a support beam member 1-2 connected to the base support frame 1-1, the support beam member 1-2 is elastic and distributed along the radial direction of the base support frame 1-1, the vertical strain beam assembly 2 is vertically installed and fixed to the central area of the support beam member 1-2; the support beam member 1-2 is provided with a sensitive measurement unit 3 between the areas where it is respectively connected to the base support frame 1-1 and the vertical strain beam assembly 2, the vertical strain beam assembly 2 is a columnar structure, one end is fitted and fixed to the support beam member 1-2, and the other end is used to load external force, and the vertical strain beam assembly 2 is evenly provided with multiple sensitive measurement units 3 on its outer circumference. The base support frame 1-1 can adopt a design with an enlarged edge size to protect the internal structure of the force sensor and act as a shell.

[0025] The present invention provides a novel and improved six-dimensional force sensor, the structure of which mainly includes a base component 1 and a vertical strain beam component 2. The base component 1 is a structural design of a frame and an intermediate support beam. The center position of the support beam component 1-2, that is, the center of the base support frame 1-1, is fixedly connected to one end face of the vertical strain beam component 2. The vertical strain beam component 2 is columnar, and the other end face of the vertical strain beam and the other end face of the base are respectively used to fix and load the external force to be measured; wherein the sensitive measuring units 3 are evenly distributed on the outer peripheral surface of the vertical strain beam and the middle position of the beam body of the support beam component 1-2 of the base, that is, located between the support frame and the position connecting the vertical strain beam. Such a design first satisfies the structural integrity of the six-dimensional force gauge and meets the stiffness requirements, and the six target quantities Fx, Fy, F z, Mx, My, and Mz are divided into two parts for measurement using the main structural shape and the characteristics and distribution of the sensitive measurement units 3. The three measurement targets Mx, My, and Fz are measured using the sensitive measurement units 3 of the vertical strain beam assembly 2, and the three measurement targets Fx, Fy, and Mz are measured using the sensitive measurement units 3 on the base support beam component 1-2. In this way, the six measurement targets can be divided into three plus three forms for measurement, which simplifies the inter-dimensional decoupling to a certain extent and optimizes the subsequent decoupling process. The optimized decoupling algorithm ensures that the measurement accuracy is not sacrificed, and the use of such a design will not cause the increase in the number of sensitive measurement units 3 and the complication of the structure, effectively solving the technical problems of the existing six-dimensional force sensor with complex structure and insufficient measurement accuracy.

[0026] In the technical solution provided in this embodiment, the support beam member 1-2 has a vertical cross-shaped beam structure. Sensitive unit mounting slots are provided between the four connection points between the support beam member 1-2 and the base assembly 1 and the central area thereof. Each sensitive unit mounting slot is used to install a sensitive measurement unit 3. This design further optimizes the structure of the support beam member 1-2, adopting a cross-shaped beam structure. The central area of the cross-shaped cross is connected and fixed to the vertical strain beam assembly 2. The sensitive unit mounting slots are evenly distributed on each beam branch of the support beam member 1-2. Since the beam body is in a vertical cross shape, it is suitable for force measurement calibration of the X-axis and Y-axis. Through this distribution of sensitive units, four sets of force measurement data can be obtained. Moreover, since the beam body structure has good symmetry, the data measured by the sensitive units has good general averageness, thereby ensuring the accuracy of the force measurement results.

[0027] In the technical solution provided in this embodiment, a cylindrical mounting platform 1-3 integrally connected to the cross-shaped beam structure is provided in the central region of the support beam member 1-2. The cylindrical mounting platform 1-3 is provided with a mounting through-hole 4 for mounting and connecting with the vertical strain beam assembly 2. This design optimizes the connection structure between the support beam member 1-2 and the vertical strain beam assembly 2. The docking position is adapted to the cylindrical structure of the vertical strain beam assembly 2. A cylindrical platform structure is provided in the central region of the support beam member 1-2, i.e., the central intersection of the cross, and is coordinated with the mounting through-hole 4 to complete docking with the vertical strain beam assembly 2. Preferably, the vertical strain beam assembly 2 is also provided with a corresponding mounting through-hole 4 to facilitate installation and docking. This structure has good structural strength and avoids stress concentration damage during use.

[0028] In addition, the supporting beam components 1-2 can also be adjusted according to different materials and design requirements. The four originally cross-shaped perpendicular supporting beams can be made into T-shaped, I-shaped, Maltese-shaped and other structures.

[0029] In the technical solution provided in this embodiment, the vertical strain beam assembly 2 is provided with sensitive unit mounting slots for inserting and securing the sensitive measurement units 3, located at positions corresponding to the four sensitive measurement units 3 on the support beam members 1-2. This design further optimizes the distribution of the sensitive measurement units 3. The placement of the sensitive measurement units 3 on the vertical strain beam assembly 2 corresponds to the placement of the sensitive measurement units 3 on the support beam members 1-2. This facilitates the unification of the measurement data obtained by the vertical strain beam assembly 2 and the base assembly 1, further simplifying the decoupling process and improving the ease of use of the device.

[0030] In the technical solution provided in this embodiment, inwardly recessed stress-amplifying groove structures 2-1 are provided between adjacent sensitive unit mounting slots on the outer circumference of the vertical strain beam. This design optimizes the vertical strain beam's structural integrity. It should be noted that the stress-amplifying grooves serve as stress concentration points. This structure can amplify the deformation of the vertical strain beam under load, thereby enhancing the force measurement sensitivity of the sensitive measurement unit 3, obtaining more distinct and accurate strain values, and improving the device's force measurement accuracy.

[0031] In the technical solution provided by this embodiment, two sensitive measurement units 3, positioned opposite each other on the outer circumference of the vertical strain beam assembly 2, are connected by digital circuit signals to form a group. This design uses a grouped digital circuit to replace the bridge circuit used by traditional strain gauge sensors to measure force and torque. Under the same temperature conditions, this digital circuit measurement method, through differential structure subtraction, can eliminate temperature-induced frequency changes and achieve temperature compensation. This significantly reduces the number of sensitive measurement units 3 used, solving the problem of existing six-dimensional force sensors using too many sensitive measurement units. It can also improve the sensor's stiffness characteristics and measurement response speed to a certain extent.

[0032] In the technical solution provided in this embodiment, the sensitive measurement unit 3 includes a pair of mutually bonded frame-shaped carriers 3-1, a piezoelectric material sheet 3-2 clamped and fixed between the frame-shaped carriers 3-1, and an electrode plate 3-5 bonded to the end surface of the piezoelectric material sheet. This design provides a preferred structural design of the sensitive measurement unit 3, in which the frame-shaped carrier 3-1, the piezoelectric material sheet 3-2, and the electrode plate 3-5 are molded in a one-piece package, which can further enhance the stress sensitivity of the sensitive measurement unit 3 during operation, thereby improving the overall sensitivity and other characteristics of the six-dimensional force sensor device.

[0033] The piezoelectric material sheet 3-2 is preferably made of AT-cut quartz. Taking AT-cut quartz as an example, the sensitive axis of the AT-cut quartz is parallel to the long side of the rectangular quartz wafer. Assuming this sensitive axis is the X-axis, deformation of the AT-cut quartz wafer along the X-axis will produce the largest frequency change. At this point, the vibration mode of the AT-cut quartz wafer is the thickness shear vibration mode, which is also the optimal vibration mode for AT-cut quartz. This vibration mode is a thickness shear vibration mode in which the displacement is parallel to the X-axis. Therefore, the position of the sensitive measurement unit 3 of the six-dimensional force sensor needs to be set according to the sensitive direction of the sensitive measurement unit 3 to ensure that it is in the optimal vibration mode and give full play to its advantages of high sensitivity and fast response speed.

[0034] The design of the electrode plate 3-5 is preferably to provide an active body wave electrode on the surface of the piezoelectric material sheet 3-2, and the active body wave electrode is connected to a wire structure for an external frequency measuring device. The piezoelectric material sheet 3-2 is connected to the prompt signal sending unit through the wire structure for sending its frequency strain signal outward. The wire structure is bonded to the active body wave electrode through a bonding structure. This design ensures the consistency and accuracy of the electrical signal output and optimizes the signal output structure of the piezoelectric material sensitive measurement unit 3, so that the electrical signal can be output directly without the need for an external frequency measuring device for measurement. In this way, when the external force or torque changes, the six-dimensional force sensor can also monitor the changes in the external environment in real time, thereby improving the response speed of the six-dimensional force sensor measurement.

[0035] In the technical solution provided in this embodiment, positioning groove structures 3-3 are provided on both sides of the inner edge of the frame-shaped carrier 3-1. A compression elastic component is provided in the positioning groove structure 3-3 on one side. The compression elastic component is used to press the piezoelectric material sheet 3-2 against the inner edge of the frame-shaped carrier 3-1 and fix it. The positioning groove structure 3-3 on the other side is used to bond and fix it to the piezoelectric material sheet 3-2.

[0036] This design assists in compressing the elastic component by positioning the sink structure 3-3, which will create a certain pre-tightening force between the piezoelectric material sheet 3-2 and the side of the frame-shaped carrier 3-1. When the external environment changes, the sensitive measurement unit 3 can obtain more obvious tensile and compressive strain signals. When the six-dimensional force sensor is subjected to force or torque, it can immediately determine the direction of the force to be measured based on the difference in the output electrical signal, thereby improving the response speed and measurement accuracy of the six-dimensional force sensor.

[0037] In the technical solution provided in this embodiment, the compression elastic member includes a compression spring 3-4 that abuts against the inner wall of the positioning groove structure 3-3 and a micro-pressing piece 3-4 connected to one end of the compression spring 3-4. The micro-pressing piece 3-4 abuts against the end surface of the piezoelectric material sheet 3-2. This design provides an optimal compression elastic member design. The main body includes the compression spring 3-4 and the micro-pressing piece 3-4, which has a simple structure and stable force.

[0038] In the technical solution provided in this embodiment, multiple mounting holes 4 are evenly distributed on the end surface of the base support frame 1-1, which are used to secure the base assembly 1 or apply external forces. This design optimizes the connection between the base assembly 1 and the fixed base or external forces. By evenly distributing multiple mounting holes 4 throughout the frame of the base support frame 1-1, the overall stress resistance and operational stability of the force-bearing lifting device are balanced.

[0039] Although the present invention is disclosed as above, the scope of protection disclosed by the present invention is not limited thereto. Those skilled in the art can make various changes and modifications without departing from the spirit and scope of the present invention, and these changes and modifications will fall within the scope of protection of the present invention.

Claims

1. A six-dimensional force sensor device, characterized in that: The invention comprises a base assembly (1) and a vertical strain beam assembly (2) fixedly connected to one end of the base assembly (1), wherein the base assembly (1) comprises an annular base support frame (1-1) and a support beam component (1-2) connected to the base support frame (1-1), wherein the support beam component (1-2) is elastic and distributed along the radial direction of the base support frame (1-1), and the vertical strain beam assembly (2) is vertically mounted and fixed to the central area of the support beam component (1-2); the support beam component (1-2) is provided with a sensitive measurement unit (3) between the areas where it is respectively connected to the base support frame (1-1) and the vertical strain beam assembly (2), and the vertical strain beam assembly (2) is in a columnar structure, one end of which is fitted and fixed to the support beam component (1-2), and the other end is used to load external force, and the vertical strain beam assembly (2) is evenly provided with a plurality of the sensitive measurement units (3) on its outer peripheral surface.

2. The six-dimensional force sensor device according to claim 1, characterized in that: The support beam component (1-2) is a vertical cross-shaped beam structure, and sensitive unit installation slots are provided between the four connection points of the support beam component (1-2) and the base assembly (1) and the central area thereof, and each of the sensitive unit installation slots is used to install one of the sensitive measurement units (3).

3. The six-dimensional force sensor device according to claim 2, characterized in that: A cylindrical mounting platform (1-3) integrally connected to the cross-shaped beam structure is provided in the central area of the support beam component (1-2); a mounting through hole (4) for mounting and connecting to the vertical strain beam assembly (2) is provided on the cylindrical mounting platform (1-3).

4. The six-dimensional force sensor device according to claim 2, characterized in that: The vertical strain beam assembly (2) is provided with sensitive unit mounting grooves for inserting and fixing the sensitive measurement units (3) at positions corresponding to the four sensitive measurement units (3) on the support beam component (1-2) on its outer peripheral surface.

5. The six-dimensional force sensor device according to claim 4, characterized in that: An inwardly recessed stress amplification groove structure (2-1) is provided between adjacent sensitive unit installation grooves on the outer circumference of the vertical strain beam.

6. The six-dimensional force sensor device according to claim 4, characterized in that: Two sensitive measurement units (3) located opposite to each other on the outer peripheral surface of the vertical strain beam assembly (2) are connected by digital circuit signals to form a group.

7. The six-dimensional force sensor device according to any one of claims 1 to 6, characterized in that: The sensitive measurement unit (3) comprises a pair of mutually bonded square frame-shaped carriers (3-1), and a piezoelectric material sheet (3-2) clamped and fixed between the square frame-shaped carriers (3-1). The piezoelectric material sheet has an electrode plate (3-5) bonded on its end surface.

8. The six-dimensional force sensor device according to claim 7, characterized in that: Positioning groove structures (3-3) are provided on both sides of the inner edge of the frame-shaped carrier (3-1), wherein a compression elastic component is provided in the positioning groove structure (3-3) on one side, and the compression elastic component is used to press the piezoelectric material sheet (3-2) against the inner edge of the frame-shaped carrier (3-1) and fix it; and the positioning groove structure (3-3) on the other side is used to be bonded and fixed to the piezoelectric material sheet (3-2).

9. The six-dimensional force sensor device according to claim 8, characterized in that: The compression elastic component comprises a compression spring (3-4) abutting against the inner side wall of the positioning sink structure (3-3) and a micro-pressing plate (3-6) connected to one end of the compression spring (3-4); the micro-pressing plate (3-6) abuts against the end face of the piezoelectric material plate (3-2).

10. The six-dimensional force sensor device according to claim 1, characterized in that: The end surface of the base support frame (1-1) is evenly distributed with a plurality of mounting through holes (4) for mounting and fixing the base assembly (1) or applying external force.

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