Transfer device and semiconductor processing equipment

Abstract

The invention relates to a transfer device and semiconductor processing equipment, and relates to the technical field of semiconductor components, in the technical scheme, the transfer device enables a bearing mechanism to flexibly move in a three-dimensional space through a multi-degree-of-freedom design, and the transfer requirement under the complex working condition is met. And the first driving mechanism is mounted on the frame body instead of being borne by a mounting piece for mounting the bearing mechanism, so that the vibration risk is effectively reduced, and the motion precision is improved. Moreover, the third moving part can move along with the bearing mechanism, so that the risk that the movement of the to-be-borne part is limited by the third moving part is reduced, and the movement precision of the to-be-borne part is further improved.

Description

Technical Field

[0001] The present application relates to the field of semiconductor equipment technology, and in particular to a transfer device and semiconductor processing equipment. Background Art

[0002] Transfer devices are widely used in fields such as semiconductor manufacturing and biomedical engineering. However, in traditional designs, the movement of the carrying mechanism is prone to instability, which in turn leads to low movement accuracy of the parts to be carried by the carrying mechanism. Summary of the Invention

[0003] Based on this, the present application provides a transfer device and semiconductor processing equipment to improve the movement accuracy of the parts to be carried.

[0004] According to one aspect of the present application, an embodiment of the present application provides a transfer device, the transfer device comprising:

[0005] frame;

[0006] The moving mechanism includes a first moving member, a second moving member, and a third moving member, wherein the first moving member is movably connected to the frame along a first direction, the second moving member is movably connected to the first moving member along a second direction, and the third moving member is movably connected to the second moving member along a third direction;

[0007] A first driving mechanism is provided on the frame and is transmission-connected to the first movable member; the first driving mechanism is used to drive the first movable member to move along a first direction;

[0008] A second driving mechanism includes a moving member and a driving assembly transmission-connected to the moving member, the driving assembly being used to drive the moving member to move along the second direction and the third direction; and

[0009] A carrying mechanism connected to the third moving member and movably connected to the moving member along the first direction;

[0010] The first direction, the second direction and the third direction are perpendicular to each other.

[0011] In one embodiment, the transfer device further includes a flexible mechanism;

[0012] The flexible mechanism is arranged between the third moving member and the bearing mechanism so as to enable relative movement between the third moving member and the bearing mechanism.

[0013] In one embodiment, the flexible mechanism comprises:

[0014] Mounting seat;

[0015] A first sub-section connected to the third moving member, the first sub-section being rotatably connected to the mounting seat around a first axis; and

[0016] a second sub-section connected to the carrying mechanism, the second sub-section being rotatably connected to the mounting seat around a second axis;

[0017] The extending direction of the first axis is parallel to the second direction; the extending direction of the second axis is parallel to the third direction.

[0018] In one embodiment, the mounting base is provided with a first through hole along the second direction and a second through hole along the third direction;

[0019] Flexible mechanisms also include:

[0020] A first rotating shaft is installed in the first through hole and is rotatably connected to the first sub-section around a first axis; the first rotating shaft extends along the second direction;

[0021] The second rotating shaft is installed in the second through hole and is rotatably connected to the second sub-part around the second axis. The second rotating shaft is extended along the third direction.

[0022] In one embodiment, the flexible mechanism further includes a first adjusting member, the first adjusting member connecting the first rotating shaft and the mounting seat; and / or

[0023] The flexible mechanism further includes a second adjusting member, which connects the second rotating shaft and the mounting seat.

[0024] In one embodiment, the flexible mechanism further includes an elastic portion disposed between the first sub-portion and the second sub-portion.

[0025] In one embodiment, the first sub-portion and the second sub-portion are both detachably connected to the elastic portion.

[0026] In one embodiment, the transfer device further comprises:

[0027] A first guide rail is extended along a first direction and is disposed on the frame;

[0028] The connecting member is movably connected to the first guide rail along a first direction; the connecting member is connected to the first movable member.

[0029] In one embodiment, a plurality of first guide rails are provided, and all first guide rails are spaced apart in the third direction; a dimension of the connecting member in the second direction is smaller than a dimension of the connecting member in the first direction, and a dimension of the connecting member in the second direction is smaller than a dimension of the connecting member in the third direction; and / or

[0030] The connecting member has a middle area and an edge area surrounding the middle area, and the first moving member is located in the middle area.

[0031] According to another aspect of the present application, an embodiment of the present application provides a semiconductor processing equipment, including the transfer device in any of the above embodiments, wherein the carrying mechanism of the transfer device is used to carry semiconductor components.

[0032] In the above-mentioned transfer device and semiconductor processing equipment, the transfer device includes a frame, a first drive mechanism, a second drive mechanism, a first movable member, a second movable member, a third movable member and a supporting mechanism. When the member to be carried needs to move along the first direction, the member to be carried is placed on the supporting mechanism. The first drive mechanism drives the first movable member to move in the first direction. The first movable member drives the second movable member to move, and the second movable member drives the third movable member to move, and the third movable member moves in the first direction. Since the supporting mechanism is connected to the third movable member, the supporting mechanism is driven to move in the first direction. Since the first drive mechanism is arranged on the frame, rather than on the transfer member on which the supporting mechanism is installed, the risk of vibration or oscillation of the transfer device when the member to be carried moves quickly or with a large acceleration is reduced, thereby improving the movement accuracy of the member to be carried. When the part to be carried needs to move in the second direction, the second driving mechanism drives the carrying mechanism to move in the second direction. Since the third movable member is set to be movable along the second direction in the present application, when the carrying mechanism moves along the second direction, the third movable member can also move with the carrying mechanism, reducing the risk that the movement of the part to be carried is restricted by the third movable member, and further improving the movement accuracy of the part to be carried. Similarly, when the part to be carried needs to move in the third direction, the second driving mechanism drives the carrying mechanism to move in the third direction. Since the third movable member is set to be movable along the third direction in the present application, when the carrying mechanism moves along the third direction, the third movable member can also move with the carrying mechanism, reducing the risk that the movement of the part to be carried is restricted by the third movable member, and further improving the movement accuracy of the part to be carried. BRIEF DESCRIPTION OF THE DRAWINGS

[0033] Figure 1 This is a schematic diagram of the three-dimensional structure of the transfer device in some embodiments of the present application.

[0034] Figure 2 for Figure 1 Schematic diagram of the three-dimensional structure of the flexible mechanism.

[0035] Figure 3 for Figure 2 Schematic diagram of the three-dimensional structure of the mounting seat in the flexible mechanism.

[0036] Figure 4 The first rotating shaft and the second rotating shaft in this application are installed on Figure 3 Schematic diagram of the three-dimensional structure of the mounting base.

[0037] Figure 5 for Figure 2A cross-sectional diagram of the flexible mechanism in FIG.

[0038] Figure 6 for Figure 2 Another cross-sectional schematic diagram of the flexible mechanism in .

[0039] Figure 7 for Figure 1 Schematic side view of the transfer device in.

[0040] Figure 8 for Figure 1 Schematic diagram of a three-dimensional structure in which the first moving member, the second moving member and the third moving member are assembled together.

[0041] Figure 9 for Figure 1 Schematic diagram of the three-dimensional structure in which the second guide rail, the third guide rail and the fourth guide rail in the transfer device are assembled together.

[0042] The accompanying drawings in the specific implementation manner are as follows:

[0043] 100. Transfer Device, 1. Frame, 2. First Drive Mechanism, 3. Second Drive Mechanism, T, Transfer Member, Y, Moving Mechanism, Y1, First Moving Member, Y2, Second Moving Member, Y3, Third Moving Member, C, Carrying Mechanism, R, Flexible Mechanism, AN, Mounting Seat, B1, First Subsection, B2, Second Subsection, K1, First Through Hole, K2, Second Through Hole, Z1, First Rotating Shaft, Z2, Second Rotating Shaft, J1, First Adjusting Member, J2, Second Adjusting Member, X, Elastic Portion, G1, First Guide Rail, G2, Second Guide Rail, G3, Third Guide Rail, G4, Fourth Guide Rail, L, Connecting Member;

[0044] A first direction F1, a second direction F2, and a third direction F3. DETAILED DESCRIPTION

[0045] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0046] In the description of this application, it should be understood that if the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. appear, the orientation or position relationship indicated by these terms is the orientation or position relationship based on the accompanying drawings, which is only for the convenience of describing this application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0047] In addition, if the terms "first" or "second" appear, these terms are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Therefore, a feature specified as "first" or "second" may explicitly or implicitly include at least one of such features. In the description of this application, if the term "plurality" appears, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0048] In this application, unless otherwise specified or limited, the terms "mounted," "connected," "connected," "fixed," etc., should be interpreted broadly. For example, these terms may refer to fixed connections, removable connections, or integration; mechanical connections or electrical connections; direct connections or indirect connections through an intermediary; and internal communication between two components or interaction between two components, unless otherwise specified. Those skilled in the art will understand the specific meanings of these terms in this application based on the specific circumstances.

[0049] In this application, unless otherwise expressly specified or limited, if a first feature is described as being "above" or "below" a second feature, or similar descriptions, this may mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. Furthermore, when a first feature is described as being "above," "above," or "above" a second feature, it may mean that the first feature is directly above or diagonally above the second feature, or simply means that the first feature is at a higher level than the second feature. When a first feature is described as being "below," "below," or "below" a second feature, it may mean that the first feature is directly below or diagonally below the second feature, or simply means that the first feature is at a lower level than the second feature.

[0050] It should be noted that if an element is referred to as being "fixed to" or "disposed on" another element, it may be directly on the other element or there may be an intermediate element. If an element is considered to be "connected to" another element, it may be directly connected to the other element or there may be an intermediate element. If any, the terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in this application are for illustrative purposes only and do not represent the only embodiment.

[0051] Please refer to Figure 1 , Figure 1 A schematic diagram of the three-dimensional structure of the transfer device in some embodiments of the present application is shown. The transfer device 100 provided in the present application includes a frame 1, a moving mechanism Y, a first driving mechanism 2, a carrying mechanism C transfer member T and a second driving mechanism 3.

[0052] The frame 1 is a part of the transfer device 100 and serves as an installation base for the transfer device 100. It can be set to any structure and shape that is convenient for connection and movement, such as a plate or block, and this application does not limit this.

[0053] The moving mechanism Y includes a first moving member Y1, a second moving member Y2, and a third moving member Y3. The first moving member Y1 is movably connected to the frame 1 along a first direction F1, the second moving member Y2 is movably connected to the first moving member Y1 along a second direction F2, and the third moving member Y3 is movably connected to the second moving member Y2 along a third direction F3.

[0054] By movably connecting the first moving member Y1 to the frame 1 along the first direction F1, the first moving member Y1 can move relative to the frame 1 in the first direction F1, and by movably connecting the second moving member Y2 to the first moving member Y1 along the second direction F2, the second moving member Y2 can not only follow the first moving member Y1 to move along the first direction F1, but also move along the second direction F2. The second moving member Y2 has two degrees of freedom in the first direction F1 and the second direction F2 relative to the frame 1. By movably connecting the third moving member Y3 to the frame 1 along the third direction F3, the second moving member Y2 can move relative to the frame 1 in the first direction F1 and the second direction F2. The second movable member Y2, in this way, the third movable member Y3 can not only follow the second movable member Y2 to move in the first direction F1 and the second direction F2, but also move in the third direction F3. In this way, the third movable member Y3 has three degrees of freedom in the first direction F1, the second direction F2 and the third direction F3 relative to the frame 1. Since the supporting mechanism C is connected to the third movable member Y3, the third movable member Y3 provides a structural basis for the supporting mechanism C to realize the degrees of freedom in three directions relative to the frame 1. The supporting mechanism C obtains the degrees of freedom in three directions and can move flexibly in three-dimensional space.

[0055] The first drive mechanism 2 is provided on the frame and is transmission-connected to the first movable member Y1. The first drive mechanism 2 is used to drive the first movable member Y1 to move along the first direction F1. The first drive mechanism 2 is a component that drives the first movable member Y1 to move along the first direction F1. The first drive mechanism 2 is provided on the frame 1 and is transmission-connected to the first movable member Y1. The first drive mechanism 2 is used to drive the first movable member Y1 to move along the first direction F1.

[0056] The first driving mechanism 2 drives the first moving member Y1 to move in the first direction F1. This motion is transmitted to the second moving member Y2 connected to the first moving member Y1 through the first moving member Y1, so that the second moving member Y2 can also move in the first direction F1. Similarly, the third moving member Y3 connected to the second moving member Y2 can follow the second moving member Y2 to move in the first direction F1. Ultimately, since the supporting mechanism C is movably connected to the transfer member T, the supporting mechanism C is connected to the third moving member Y3 to achieve movement in the first direction F1. Therefore, the supporting mechanism C can move relative to the transfer member T in the first direction F1 under the drive of the first driving mechanism 2.

[0057] The second driving mechanism 3 includes a transfer member T and a driving assembly that is transmission-connected to the transfer member T. The driving assembly is used to drive the transfer member T to move along the second direction F2 and the third direction F3. Since the supporting mechanism C is connected to the transfer member T, the transfer member T can also move along the second direction F2 and the third direction F3. The above analysis shows that in this application, the third movable member Y3 is configured to be movable along the second direction F2 and the third direction F3. Therefore, when the supporting mechanism C moves along the second direction F2 or the third direction F3, the third movable member Y3 can also move with the supporting mechanism C, reducing the risk of the movement of the part to be carried being restricted by the third movable member Y3, and further improving the movement accuracy of the part to be carried.

[0058] Among them, the first drive mechanism 2 and the second drive mechanism 3 can be driven by a servo motor and a screw, or by a linear motor and a cylinder assembly, or by a stepper motor and a screw, which is not limited here.

[0059] The transfer device 100 of the present application is designed with multiple degrees of freedom, so that the supporting mechanism C can move flexibly in three-dimensional space, meeting the transfer requirements under complex working conditions. The first drive mechanism 2 is installed on the frame 1 rather than being carried by the mounting member on which the supporting mechanism C is installed, which effectively reduces the risk of vibration and improves the accuracy of movement. In addition, the third movable member Y3 can also move with the supporting mechanism C, reducing the risk that the movement of the part to be carried is restricted by the third movable member Y3, and further improving the accuracy of movement of the part to be carried. In addition, the first drive mechanism 2 no longer moves with the supporting mechanism C in the second direction F2 and the third direction F3, reducing the weight of the wiring and alleviating the load on the supporting mechanism C and the transfer member T.

[0060] The following is an example of the use and operation of the transfer device 100:

[0061] The transfer device 100 is at a designated position, and the carrying mechanism C is at a starting position of the transfer device 100 , ready to receive a component to be carried.

[0062] Next, the load is placed on the load-carrying mechanism C, the transfer device 100 is activated, and the first drive mechanism 2 drives the first movable member Y1 to move in the first direction F1. The movement of the first movable member Y1 is transmitted to the second movable member Y2 and the third movable member Y3 via a mechanical connection, enabling the load-carrying mechanism C connected to the third movable member Y3 to move in the first direction F1.

[0063] The drive assembly in the second drive mechanism 3 drives the transport member T to move in the second direction F2 and the third direction F3, thereby enabling the carrier mechanism C connected to the transport member T to move in the second direction F2 and the third direction F3. Because the third movable member Y3 can move along with the carrier mechanism C in the second direction F2 and the third direction F3, restrictions on the carrier mechanism C are reduced, preventing any restrictions on the movement of the carrier member.

[0064] In some embodiments of the present application, continue to refer to Figure 1 , and combined with reference Figure 2 , Figure 2 Shown Figure 1 Schematic diagram of the three-dimensional structure of the flexible mechanism R in the transfer device 100. The transfer device 100 also includes a flexible mechanism R, which is arranged between the third movable member Y3 and the carrying mechanism C. The flexible mechanism R is used to allow relative movement between the third movable member Y3 and the carrying mechanism C.

[0065] By adding a flexible mechanism R between the third movable member Y3 and the carrier mechanism C, relative motion between the third movable member Y3 and the carrier mechanism C is permitted. The addition of the flexible mechanism R allows for slight angular offset or displacement compensation between the third movable member Y3 and the carrier mechanism C, effectively reducing friction and impact caused by the rigid connection and improving the smoothness of the operation of the transfer device 100. The flexible mechanism R can be implemented in a variety of structural types, including but not limited to flexible joints, spring-flexible mechanisms, and flexible hinges.

[0066] In some embodiments of the present application, continue to refer to Figure 2 , and combined with reference Figure 3 , Figure 3 Shown Figure 2Schematic diagram of the three-dimensional structure of the mounting seat AN in the flexible mechanism R, the flexible mechanism R includes a mounting seat AN, a first sub-section B1 and a second sub-section B2, the first sub-section B1 is connected to the third movable part Y3, the first sub-section B1 is rotatably connected to the mounting seat AN around a first axis, the second sub-section B2 is connected to the supporting mechanism C, the second sub-section B2 is rotatably connected to the mounting seat AN around a second axis, the extension direction of the first axis is parallel to the second direction F2; the extension direction of the second axis is parallel to the third direction F3.

[0067] The first sub-part B1 is rotatably connected to the mounting base AN around a first axis, and the second sub-part B2 is rotatably connected to the mounting base AN around a second axis, forming a two-degree-of-freedom rotation pair.

[0068] Because the carrying mechanism C needs to move in the second and third directions, it needs to move in the second and third directions F2 and F3. This movement is caused by the power applied by the second driving mechanism 3. When the carrying mechanism C gains acceleration and begins to move, it transmits force to the third movable member Y3 through its connection with the first subsection B1 and the second subsection B2.

[0069] When the supporting mechanism C moves in the second direction F2 and the third direction F3 simultaneously, forces in different directions may interfere with each other.

[0070] And the transmission of this force is realized by the second sub-portion B2 rotating around the second axis and the first sub-portion B1 rotating around the first axis in the present application.When the carrying mechanism C moves in the second direction F2, force is transferred to the 3rd mobile member Y3 by the second sub-portion B2 around the rotation of the second axis, drives the 3rd mobile member Y3 to move in the second direction F2.When the carrying mechanism C moves in the third direction F3, force is transferred to the 3rd mobile member Y3 by the first sub-portion B1 around the rotation of the first axis, drives the 3rd mobile member Y3 to move in the third direction F3.

[0071] The first sub-section B1 and the second sub-section B2 rotate around different axes respectively. This design allows forces in different directions to be transmitted to the third movable member Y3 through independent paths, thereby reducing the risk of mutual interference between the driving forces in the second direction F2 and the third direction F3.

[0072] Furthermore, the first sub-section B1, the second sub-section B2 and the mounting base AN are designed to be detachably connected, which facilitates maintenance and replacement, reducing maintenance costs. Moreover, the detachable connection also facilitates the replacement of different types of mounting bases AN to adapt to different working conditions.

[0073] In some embodiments of the present application, continue to refer to Figure 3 , and combined with reference Figure 4 , Figure 4The first rotating shaft Z1 and the second rotating shaft Z2 in this application are shown to be installed on Figure 3 The schematic diagram of the three-dimensional structure of the mounting base AN in FIG. The mounting base AN has a first through hole K1 along the second direction F2 and a second through hole along the third direction F3. The flexible mechanism R also includes a first rotation axis Z1 and a second rotation axis Z2. The first rotation axis Z1 is mounted in the first through hole K1 and is rotatably connected to the first subsection B1 about a first axis. The first rotation axis Z1 extends along the second direction F2. The second rotation axis Z2 is mounted in the second through hole and is rotatably connected to the second subsection B2 about a second axis. The second rotation axis Z2 extends along the third direction F3.

[0074] By opening a first through hole K1 along the second direction F2 on the mounting seat AN and installing the first rotating shaft Z1 on the first through hole K1, and opening a second through hole along the third direction F3 and installing the second rotating shaft Z2 on the second through hole, a clear rotation fulcrum is provided for the first sub-section B1 and the second sub-section B2. The design of the first rotating shaft Z1 and the second rotating shaft Z2 can effectively reduce the shaking and deviation of the first sub-section B1 and the second sub-section B2 during the rotation process, thereby improving the stability of the rotational movement of the first sub-section B1 and the second sub-section B2.

[0075] Furthermore, the present application adds an angular contact roller bearing, connects the inner ring of the angular contact roller bearing to the first rotating shaft Z1, connects the outer ring of the angular contact roller bearing to the first sub-section B1, connects the inner ring of the angular contact roller bearing to the second rotating shaft Z2, and connects the outer ring of the angular contact bearing to the second sub-section B2. The roller shape and arrangement design of the angular contact roller bearing enable the first rotating shaft Z1 and the second rotating shaft Z2 to withstand radial and axial pressure at the same time during rotation, so that the first rotating shaft Z1 and the second rotating shaft Z2 can be more stable during rotation.

[0076] In other embodiments, a ball joint allows for rotation in multiple directions, replacing a rotating shaft to achieve multi-directional freedom of movement. This structure typically consists of a spherical portion and a socket portion, with the spherical portion being able to rotate freely within the socket, thereby achieving multi-directional movement.

[0077] In some embodiments of the present application, continue to refer to Figures 2 to 4 , and combined with reference Figure 5 and Figure 6 , Figure 5 Shown Figure 2 A cross-sectional diagram of the flexible mechanism R in FIG. Figure 6 Shown Figure 2 Another cross-sectional schematic diagram of the flexible mechanism R in the figure, the flexible mechanism R also includes a first adjusting member J1, the first adjusting member J1 connects the first rotating shaft Z1 and the mounting seat AN; and / or, the flexible mechanism also includes a second adjusting member J2, the second adjusting member J2 connects the second rotating shaft Z2 and the mounting seat AN.

[0078] In the case where the flexible mechanism R also includes a first adjustment member J1, which connects the first rotating shaft Z1 and the mounting base AN, the present application cleverly connects the first rotating shaft Z1, the mounting base AN, and the second rotating shaft Z2 into a single unit by introducing the first adjustment member J. This design demonstrates flexibility and compensation capabilities when coping with the multi-directional movement of the support mechanism C. When the support mechanism C moves in the second direction F2, the third movable member Y3 temporarily remains stationary due to inertia, and there is a possibility that the movement of the third movable member Y3 cannot keep up with the movement of the support mechanism C. In this case, the second rotating shaft Z2 is designed to rotate freely about the second axis. If the third movable member Y3 cannot keep up with the movement of the support mechanism C, the rotation of the second rotating shaft Z2 can compensate for this lag. At the same time, the mounting base AN and the first rotating shaft Z1, which are tightly connected to the second rotating shaft Z2, also rotate about the second axis, improving the coordination of the entire mechanism. Furthermore, the configuration of the first adjustment member J1 allows it to adjust the position of the first rotating shaft Z1 in the first direction F1, reducing rotational wear caused by gravity or unbalanced loads. This not only reduces the wear of the transfer device 100 and extends the service life of the first rotating shaft Z1, but also reduces maintenance frequency and costs. Due to the reduced rotational wear, the rotational accuracy of the bearing and the first rotating shaft Z1 is maintained, thereby improving the transfer accuracy of the transfer device 100.

[0079] In the case where "the flexible mechanism also includes a second adjustment member J2, and the second adjustment member J2 connects the second rotating shaft Z2 and the mounting seat AN", similarly, when the supporting mechanism C turns to move in the third direction F3, the third movable member Y3 will temporarily remain stationary due to inertia, and there is a situation where the movement of the third movable member Y3 cannot keep up with the movement of the supporting mechanism C. However, thanks to the design of the first rotating shaft Z1 that rotates around the first axis, the rotation of the first rotating shaft Z1 can compensate for this lag. At the same time, the mounting seat AN and the second rotating shaft Z2 also rotate around the first axis, making the overall synchronization and stability. In addition, the setting of the second adjustment member J2 allows the first adjustment member J2 to adjust the position of the second rotating shaft Z2 in the first direction F1, reducing the rotational wear caused by gravity or unbalanced load. This not only reduces the degree of wear of the transfer device 100 and extends the service life of the first rotating shaft Z1, but also reduces the frequency and cost of maintenance. Due to the reduction in rotational wear, the rotation accuracy of the bearing and the first rotating shaft Z1 is maintained, thereby improving the transfer accuracy of the transfer device 100.

[0080] This design demonstrates higher reliability and lower maintenance costs under complex and changeable working conditions, further extending the service life of the transfer device.

[0081] The above-mentioned "the flexible mechanism R also includes a first adjusting member J1, the first adjusting member J1 connects the first rotating shaft Z1 and the mounting seat AN" and "the flexible mechanism also includes a second adjusting member J2, the second adjusting member J2 connects the second rotating shaft Z2 and the mounting seat AN" can be arbitrarily combined according to actual conditions.

[0082] Specifically, in this application, the adjusting member J is a set screw. The adjusting member J utilizes a threaded connection, and the rotational motion of the thread is converted into linear motion. By rotating the nut or screw, the length of the adjusting member J can be changed, thereby adjusting the relative positions between the first rotation axis Z1 and the mounting base AN, and between the second rotation axis Z2 and the mounting base AN.

[0083] By changing the tightening degree of the fastening screws, the distance between the first sub-section B1 and the second sub-section B2 can be changed, and the motion range of the flexible mechanism R can be optimized, thereby improving the reliability of the transfer device 100.

[0084] In some embodiments of the present application, continue to refer to Figure 2 and Figure 6 The flexible mechanism R further includes an elastic portion X, which is disposed between the first sub-portion B1 and the second sub-portion B2.

[0085] The provision of the elastic portion X not only absorbs impact forces generated during the operation of the transfer device 100, improving the device's stability and service life, but also isolates vibration, thereby reducing the risk of vibration affecting components within the transfer device 100. Furthermore, the elastic portion X can compensate for positional errors that may occur in the first direction F1 during transfer, thereby increasing the precision of movement of the support mechanism C in the first direction F1. The elastic portion X can be configured as a spring.

[0086] In some embodiments of the present application, continue to refer to Figure 2 and Figure 6 The first sub-section B1 and the second sub-section B2 are both detachably connected to the elastic section X.

[0087] Furthermore, the first sub-section B1 and the second sub-section B2 are both detachably connected to the elastic section X. Before installing the flexible mechanism R on the transfer device 100, the elastic section X can be removed first. After the flexible mechanism R is connected to the supporting mechanism C, the third movable member Y3 and other components, the elastic section X can be installed. This installation sequence can effectively simplify the installation process, reduce installation difficulty, and improve installation efficiency.

[0088] In addition, the first sub-section B1 and the second sub-section B2 are both detachably connected to the elastic section X. The elastic section X of different specifications, different materials or different elasticity can be conveniently replaced according to different working conditions to achieve the compensation capability of the flexible mechanism R for different displacements in different directions, so that the transfer device 100 can better adapt to diverse usage scenarios.

[0089] In some embodiments of the present application, continue to refer to Figure 1 , and combined with reference Figure 7 , Figure 7 Shown Figure 1 The side view schematic diagram of the transfer device 100 in the figure, the transfer device 100 also includes a first guide rail G1 and a connecting member L, the first guide rail G1 extends along the first direction F1, and the first guide rail G1 is set on the frame 1, the connecting member L is movably connected to the first guide rail G1 along the first direction F1, and the connecting member L is connected to the first movable member Y1.

[0090] The transfer device 100 also includes a first guide rail G1 and a connector L. The first movable member Y1 is connected to the first guide rail G1 via the connector L. The provision of the connector L disperses the pressure exerted by the first movable member Y1 on the guide rail over a larger area, reducing localized pressure, thereby reducing wear on the first guide rail G1 and the first movable member Y1, and improving the stability and durability of the structure. The connector L also absorbs and cushions vibrations to a certain extent, reducing the impact of vibrations on the first movable member Y1 and the guide rail, thereby ensuring smoother operation of the entire device.

[0091] In some embodiments of the present application, continue to refer to Figure 1 and Figure 7 , a plurality of first guide rails G1 are provided, and all first guide rails G1 are arranged at intervals in the third direction F3; the size of the connecting member L in the second direction F2 is smaller than the size of the connecting member L in the first direction F1, and the size of the connecting member L in the second direction F2 is smaller than the size of the connecting member L in the third direction F3; and / or, the connecting member L has a middle area and an edge area surrounding the middle area, and the first moving member Y1 is located in the middle area.

[0092] In the case where "a plurality of first guide rails G1 are provided, and all first guide rails G1 are spaced apart in the third direction F3; the size of the connector L in the second direction F2 is smaller than the size of the connector L in the first direction F1, and the size of the connector L in the second direction F2 is smaller than the size of the connector L in the third direction F3", the spaced apart arrangement of the plurality of first guide rails G1 in the third direction F3 can distribute the load more evenly and enhance the stability of the overall structure. The smaller size of the connector L in the second direction F2 can reduce its shaking and deviation in this direction, thereby improving the stability of the entire device. The plurality of first guide rails G1 provide more guide and support points, making the movement of the first movable part Y1 along the first direction F1 more precise and smooth. The larger size of the connector L in the first direction F1 and the third direction F3 can provide better support and guidance, reducing errors during movement.

[0093] In the case where the connecting member L has a central region and peripheral regions surrounding the central region, and the first movable member Y1 is located in the central region, the central region generally provides better support and guidance, helping to reduce shaking and offset, and thus making the movement of the first movable member Y1 more stable and precise. Furthermore, the central region generally has a greater load-bearing capacity, and placing the first movable member Y1 there optimizes load distribution, reduces stress on the peripheral regions, and improves the stability of the overall structure.

[0094] In some embodiments of the present application, continue to refer to Figure 1 , and combined with reference Figure 8 , Figure 8 Shown Figure 1 Schematic diagram of the three-dimensional structure in which the first moving member Y1, the second moving member Y2 and the third moving member Y3 are assembled together, the size of the first moving member Y1 in the second direction F2 is smaller than the size of the first moving member Y1 in the first direction F1, and the size of the first moving member Y1 in the second direction F2 is smaller than the size of the first moving member Y1 in the third direction F3.

[0095] Thus, the smaller size of the first movable member Y1 in the second direction F2 and the third direction F3 helps to reduce the weight of the first movable member Y1 as a whole. The smaller size can reduce the influence of the lateral force of the second direction F2 in the second direction F2 and the third direction F3, thereby preventing the problems of instability and error caused by the lateral force. The larger size can provide better guiding performance in the first direction F1, so that the first movable member Y1 can maintain the correct direction during movement, thereby reducing offset and error.

[0096] Please refer to this application Figure 9 , Figure 9 Shown Figure 1The schematic diagram of the three-dimensional structure of the second guide rail G2, the third guide rail G3, and the fourth guide rail G4 in the transfer device 100 is shown. In the present application, the second drive mechanism 3 includes the second guide rail G2, the third guide rail G3, and the fourth guide rail G4. The multiple guide rails provide precise guidance. In actual operation, driven by the power output of the motor or other power source, the components connected to the guide rails can be simultaneously driven to slide along the preset path of the guide rails without interfering with each other, so that the position of the carrying mechanism C in all directions can be controlled and moved, reducing error accumulation and further improving the movement accuracy of the carrying mechanism C. Among them, the second guide rail G2, the third guide rail G3, and the fourth guide rail G4 can all adopt ball guides, air-floating guides, magnetic levitation guides, etc., and the number of guide rails is not limited here, and can be one or more.

[0097] Based on the same inventive concept, an embodiment of the present application provides a semiconductor processing device, including the transfer device 100 in any of the above embodiments, wherein the carrying mechanism C of the transfer device 100 is used to carry semiconductor components, wherein the semiconductor components include a die bonding head and a die extraction head.

[0098] In the technical solution of the embodiment of the present application, since the semiconductor processing equipment includes the transfer device 100 in any of the above embodiments, it also has the advantages of any of the above embodiments. Among them, the semiconductor processing equipment includes a die bonder, a flip chip machine, etc.

[0099] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0100] The above embodiments merely illustrate several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of protection of the present patent application shall be determined by the appended claims.

Claims

1. A transfer device, characterized in that: The transfer device comprises: frame; The moving mechanism includes a first moving member, a second moving member, and a third moving member, wherein the first moving member is movably connected to the frame along a first direction, the second moving member is movably connected to the first moving member along a second direction, and the third moving member is movably connected to the second moving member along a third direction; a first driving mechanism, disposed on the frame and transmission-connected to the first moving member; the first driving mechanism is used to drive the first moving member to move along the first direction; A second driving mechanism includes a transfer member and a driving assembly transmission-connected to the transfer member, the driving assembly being used to drive the transfer member to move along the second direction and the third direction; and a carrying mechanism connected to the third moving member and movably connected to the moving member along a first direction; The first direction, the second direction and the third direction are perpendicular to each other.

2. The transfer device according to claim 1, characterized in that: The transfer device further includes a flexible mechanism; The flexible mechanism is arranged between the third moving member and the supporting mechanism so as to enable relative movement between the third moving member and the supporting mechanism.

3. The transfer device according to claim 2, characterized in that: The flexible mechanism comprises: Mounting seat; a first sub-section connected to the third moving member, wherein the first sub-section is rotatably connected to the mounting seat around a first axis; and a second sub-section connected to the bearing mechanism, the second sub-section being rotatably connected to the mounting seat around a second axis; The extending direction of the first axis is parallel to the second direction; the extending direction of the second axis is parallel to the third direction.

4. The transfer device according to claim 3, characterized in that: The mounting seat is provided with a first through hole along the second direction and a second through hole along the third direction; The flexible mechanism further comprises: a first rotating shaft, mounted in the first through hole, and rotatably connected to the first sub-section about the first axis; the first rotating shaft extends along the second direction; The second rotating shaft is installed in the second through hole and is rotatably connected to the second sub-part around the second axis; the second rotating shaft is extended along the third direction.

5. The transfer device according to claim 4, characterized in that: The flexible mechanism further includes a first adjusting member, the first adjusting member connecting the first rotating shaft and the mounting seat; and / or The flexible mechanism further includes a second adjusting member, which connects the second rotating shaft and the mounting seat.

6. The transfer device according to claim 3, characterized in that: The flexible mechanism further includes an elastic portion disposed between the first sub-portion and the second sub-portion.

7. The transfer device according to claim 6, characterized in that: The first sub-portion and the second sub-portion are both detachably connected to the elastic portion.

8. The transfer device according to any one of claims 1 to 7, characterized in that: The transfer device further comprises: a first guide rail extending along the first direction and disposed on the frame; A connecting member is movably connected to the first guide rail along the first direction; the connecting member is connected to the first movable member.

9. The transfer device according to claim 8, characterized in that: There are multiple first guide rails, all of which are spaced apart in the third direction; the size of the connecting member in the second direction is smaller than the size of the connecting member in the first direction, and the size of the connecting member in the second direction is smaller than the size of the connecting member in the third direction; and / or The connecting member has a middle area and an edge area surrounding the middle area, and the first moving member is located in the middle area.

10. A semiconductor processing equipment, characterized in that: The transfer device comprises the transfer device according to any one of claims 1 to 9, wherein the carrying mechanism of the transfer device is used for carrying semiconductor components.

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