Motor control method and system and semiconductor equipment

Abstract

The invention provides a motor control method and system and semiconductor equipment, and the method comprises the steps: obtaining a current value of the opening degree of a cavity door of a cavity where a target rotating device in the semiconductor equipment is located when a current working mode of the semiconductor equipment is a first mode; the current rotating speed upper limit of the target motor is determined based on the current value of the opening degree of the chamber door, and the target motor is controlled to operate based on the current rotating speed upper limit so that the target motor can drive the target rotating device to operate, and the first mode is a working mode in which the chamber door needs to be in an open state in the operation process of the target rotating device; therefore, when the chamber door is opened, the rotating speed of the motor can be limited according to the opening degree of the chamber door, and due to the fact that the upper limit of the current rotating speed is in negative correlation with the opening degree of the chamber door, the operation safety of the motor can be effectively improved while the debugging requirement is met.

Description

Technical Field

[0001] The present application relates to the field of semiconductor equipment, specifically, to automation control technology in the field of semiconductor equipment, and more specifically, to a motor control method, system and semiconductor equipment. Background Art

[0002] Semiconductor equipment with high-speed rotating chucks, such as single-wafer cleaning equipment, typically uses a motor to drive the chuck's rotation. To ensure personnel safety during motor operation and to avoid potential safety hazards caused by the chuck or wafers placed on it continuing to rotate at high speeds when the chamber door containing the chuck is open, a door switch sensor is typically installed at the chamber door. Based on the signal from the door switch sensor, a safety interlock is implemented to control the motor. Specifically, the motor is stopped when the chamber door is opened.

[0003] However, during semiconductor equipment debugging, there are scenarios where the chamber door must be open while the motor remains running. For example, this can be used to debug the chuck ejector pin extension and retraction, observe cable routing within the chamber, or observe interference between the chuck and components like the motor. Currently, safety interlocks are typically disabled in these scenarios to ensure proper motor operation when the chamber door is open, posing a significant safety risk.

[0004] Therefore, it is necessary to provide a method that can improve the safety of motor operation while meeting the debugging requirements. Summary of the Invention

[0005] In order to solve the above technical problems, the present application provides a motor control method, system and semiconductor device to achieve the purpose of improving the safety of motor operation while meeting debugging requirements.

[0006] To achieve the above technical objectives, the embodiments of the present application provide the following technical solutions:

[0007] In a first aspect, embodiments of this specification provide a motor control method, including:

[0008] When the current operating mode of the semiconductor device is a first mode, obtaining a current value of a chamber door opening of a chamber in which a target rotating device is located in the semiconductor device, wherein the first mode is an operating mode in which the chamber door needs to be in an open state during operation of the target rotating device;

[0009] determining, based on a current value of the chamber door opening, a current upper limit of a rotation speed of a target motor, the target motor being used to drive the target rotating device, the current upper limit of the rotation speed being negatively correlated with the current value of the chamber door opening;

[0010] Based on the current upper speed limit, the target motor is controlled to operate.

[0011] Optionally, determining the current upper limit of the speed of the target motor based on the current value of the chamber door opening includes:

[0012] The current upper speed limit of the target motor is determined based on the current value of the chamber door opening and a preset speed determination model, wherein the speed determination model is used to characterize the corresponding relationship between the chamber door opening and the upper speed limit of the target motor.

[0013] Optionally, the rotation speed determination model includes a plurality of sub-models, and the plurality of sub-models correspond one-to-one to a plurality of chamber door opening intervals;

[0014] The determining of the current upper limit of the speed of the target motor based on the current value of the chamber door opening and a preset speed determination model includes:

[0015] determining a target opening range from the plurality of chamber door opening ranges based on a current value of the chamber door opening;

[0016] Based on the sub-model corresponding to the target opening range, a current upper limit of the speed of the target motor is determined.

[0017] Optionally, after controlling the target motor to operate based on the current upper speed limit, the method further includes:

[0018] Obtaining the current speed of the target motor;

[0019] Based on a comparison result between the current rotation speed and the current rotation speed upper limit, a current operating state of the target motor is determined.

[0020] Optionally, a first power supply line is provided between the target motor and a power supply of the target motor, and a first switching device and a frequency conversion device are provided on the first power supply line;

[0021] The controlling the target motor to operate based on the current upper speed limit includes:

[0022] controlling the first switching device to be closed, wherein the first switching device is used to control the first power supply line to be turned on when closed;

[0023] Based on the current upper speed limit, the target power supply frequency of the target motor is determined, and the target power supply frequency is output to the frequency conversion device. The frequency conversion device is used to frequency convert the initial power supply frequency output by the power supply power source based on the target power supply frequency and then power the target motor.

[0024] Optionally, a second power supply line is further provided between the target motor and the power supply, and the second power supply line is arranged in parallel with the first power supply line; a second switching device and a third switching device arranged in series are provided on the second power supply line, and the second switching device and the third switching device are used to control the on and off of the second power supply line;

[0025] The third switch device is connected to a chamber door switch detection device, the chamber door switch detection device is used to obtain a switch signal of the chamber door and output the switch signal to the third switch device, and the switch signal is used to control the closing or opening of the third switch device;

[0026] Also includes:

[0027] When the current operating mode of the semiconductor device is the second mode, the second switching device is controlled to be closed, and the first switching device is controlled to be disconnected. The first switching device is used to control the disconnection of the first power supply line when it is disconnected. The second mode is an operating mode in which the chamber door needs to be in a closed state during the operation of the target rotation device.

[0028] Optionally, both the first switch device and the second switch device are connected to a switch selection circuit;

[0029] The switch selection circuit includes an output control module and a fourth switch device, wherein the fourth switch device is connected to the first switch device and the second switch device respectively;

[0030] Controlling the first switching device to close, or controlling the second switching device to close and controlling the first switching device to open, includes:

[0031] The current working mode is output to the output control module, and the output control module is used to output a selection signal to the fourth switching device based on the current working mode. The fourth switching device is used to output a first level signal to the first switching device and a second level signal to the second switching device based on the selection signal. The first level signal is used to control the first switching device to close or open, and the second level signal is used to control the second switching device to perform an action opposite to that of the first switching device.

[0032] Optionally, after controlling the first switching device to be closed, and / or after controlling the second switching device to be closed and controlling the first switching device to be opened, the method further includes:

[0033] Acquire a first on / off state of the first power supply line and a second on / off state of the second power supply line;

[0034] determining a current power supply state of the target motor based on the first on-off state and the second on-off state;

[0035] When the current power supply state does not meet the operating conditions of the current working mode, an alarm signal is generated.

[0036] In a second aspect, embodiments of this specification provide a motor control system, including:

[0037] a chamber door opening detection device for obtaining a current value of the chamber door opening of the chamber in which the target rotating device is located in the semiconductor equipment;

[0038] A controller connected to the chamber door opening detection device is used to determine the current upper limit of the speed of the target motor based on the current value of the chamber door opening when the current operating mode of the semiconductor device is the first mode, and to control the operation of the target motor based on the current upper limit of the speed; wherein the target motor is used to drive the target rotating device to operate, the current upper limit of the speed is negatively correlated with the current value of the chamber door opening, and the first mode is an operating mode in which the chamber door needs to be in an open state during the operation of the target rotating device.

[0039] Optionally, the device further comprises a first power supply circuit provided between the target motor and a power supply of the target motor, wherein the first power supply circuit is provided with a first switching device and a frequency conversion device;

[0040] The controller is configured to control the first switching device to be closed, determine a target power supply frequency of the target motor based on the current upper speed limit, and output the target power supply frequency to the frequency conversion device;

[0041] The first switching device is used to control the first power supply line to be conductive when closed;

[0042] The frequency conversion device is used to perform frequency conversion on the initial power supply frequency output by the power supply based on the target power supply frequency and then supply power to the target motor.

[0043] Optionally, the device further includes a second power supply circuit provided between the target motor and the power supply, the second power supply circuit being provided in parallel with the first power supply circuit; a second switching device and a third switching device provided in series on the second power supply circuit, the second switching device and the third switching device being used to control the on and off of the second power supply circuit;

[0044] The third switch device is connected to a chamber door switch detection device, the chamber door switch detection device is used to obtain a switch signal of the chamber door and output the switch signal to the third switch device, and the switch signal is used to control the closing or opening of the third switch device;

[0045] The controller is also used to control the second switching device to close and the first switching device to disconnect when the current operating mode of the semiconductor device is the second mode. The first switching device is used to control the disconnection of the first power supply line when disconnected. The second mode is an operating mode in which the chamber door needs to be in a closed state during the operation of the target rotation device.

[0046] Optionally, a switch selection circuit is further included, the switch selection circuit including an output control module and a fourth switch device, the fourth switch device being connected to the output control module, the first switch device and the second switch device respectively;

[0047] The controller is connected to the output control module and is used to output the current working mode to the output control module;

[0048] The output control module is configured to output a selection signal to the fourth switch device based on the current working mode;

[0049] The fourth switching device is used to output a first-level signal to the first switching device and a second-level signal to the second switching device based on the selection signal, the first-level signal is used to control the first switching device to close or open, and the second-level signal is used to control the second switching device to perform an action opposite to that of the first switching device.

[0050] In a third aspect, an embodiment of this specification provides a semiconductor device, including: a target rotating device, a target motor, and a motor control system as described in any one of the above.

[0051] In a fourth aspect, an embodiment of this specification provides a computer-readable storage medium, on which a computer program is stored. When the computer program is executed by a processor, the motor control method as described in any one of the above items is implemented.

[0052] In a fifth aspect, an embodiment of this specification provides a computer program product or a computer program, wherein the computer program product includes a computer program, and the computer program is stored in a computer-readable storage medium; the processor of the computer device reads the computer program from the computer-readable storage medium, and when the processor executes the computer program, it implements the motor control method described in any one of the above items.

[0053] It can be seen from the above technical solution that the embodiments of the present application provide a motor control method, system and semiconductor device, wherein, when the current working mode of the semiconductor device is the first mode, the motor control method obtains the current value of the chamber door opening of the chamber where the target rotating device in the semiconductor device is located, determines the current upper limit of the speed of the target motor based on the current value of the chamber door opening, and controls the operation of the target motor based on the current upper limit of the speed, so as to drive the target rotating device to operate through the target motor, wherein the first mode is an working mode in which the chamber door needs to be in an open state during the operation of the target rotating device, so that when the chamber door is opened, the motor speed can be limited according to the size of the chamber door opening. Since the current upper limit of the speed is negatively correlated with the chamber door opening, it can effectively improve the safety of the motor operation while meeting the debugging requirements. BRIEF DESCRIPTION OF THE DRAWINGS

[0054] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are merely embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on the provided drawings without any creative work.

[0055] Figure 1 A flowchart of a motor control method provided in accordance with one embodiment of the present disclosure;

[0056] Figure 2 A schematic diagram of the division of chamber door opening ranges provided for one embodiment of this specification;

[0057] Figure 3 A schematic diagram of sub-models corresponding to each chamber door opening range provided in one embodiment of this specification;

[0058] Figure 4 A schematic diagram of the structure of a motor control system provided in one embodiment of this specification;

[0059] Figure 5 This is a schematic structural diagram of another motor control system provided in one embodiment of this specification. DETAILED DESCRIPTION

[0060] Unless otherwise defined, technical or scientific terms used in the embodiments of this specification should have the same ordinary meaning as those understood by persons of ordinary skill in the art to which this specification pertains. The terms "first," "second," and similar terms used in the embodiments of this specification do not denote any order, quantity, or importance, but are provided solely to avoid confusion between constituent elements.

[0061] Unless the context requires otherwise, throughout this specification, the term "plurality" means "at least two," and "including" is to be interpreted as open and inclusive, meaning "including, but not limited to." Throughout this specification, the terms "one embodiment," "some embodiments," "exemplary embodiments," "example," "specific example," or "some examples" are intended to indicate that a particular feature, structure, material, or characteristic associated with the embodiment or example is included in at least one embodiment or example of this specification. The schematic representations of these terms do not necessarily refer to the same embodiment or example.

[0062] The following will be combined with the drawings in the embodiments of this specification to clearly and completely describe the technical solutions in the embodiments of this specification. Obviously, the embodiments described are only part of the embodiments of this specification, not all of the embodiments. Based on the embodiments in this specification, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of this specification.

[0063] Overview

[0064] As described in the background technology, semiconductor equipment such as single-wafer cleaning equipment that has a high-speed rotating chuck usually uses a motor to drive the rotation of the chuck. In the motor power supply safety design of such semiconductor equipment, in order to ensure the safety of personnel during the operation of the motor and avoid the safety hazards caused by the chuck or the wafer placed on the chuck still rotating at high speed when the chamber door of the chamber where the chuck is located is opened, a door switch sensor is usually installed at the chamber door, and the motor is controlled by a safety interlock method based on the signal fed back by the door switch sensor. That is, when the chamber door is closed and other safety conditions are met, the motor is controlled to run according to the speed setting value required by the process. When the chamber door is opened, the motor is controlled to stop running.

[0065] However, during the debugging process of semiconductor equipment, there are application scenarios that require the chamber door to be open while the motor remains running. For example, this can be used to debug the extension and retraction of the chuck ejector pin, observe the cabling within the chamber, or observe the interference of the chuck with components such as the motor. Currently, in this application scenario, the safety interlock is usually shielded to ensure the normal operation of the motor when the chamber door is open. Although this can meet the requirements for motor operation, shielding the safety interlock completely decouples the motor's rotational state from the chamber door, ignoring the protective effect of the chamber door on the chuck and the wafer placed on the chuck, thereby greatly increasing the safety risk for personnel during the process or debugging.

[0066] Therefore, it is necessary to provide a method that can improve the safety of motor operation while meeting the debugging requirements.

[0067] In order to solve the problem that traditional motor control methods cannot ensure the safety of motor operation while meeting debugging requirements, in the technical solution of the present application, when the current working mode of the semiconductor device is the first mode, the current value of the chamber door opening of the chamber where the target rotating device in the semiconductor device is located can be obtained, the current speed upper limit of the target motor is determined based on the current value of the chamber door opening, and the operation of the target motor is controlled based on the current speed upper limit to drive the target rotating device to operate through the target motor, wherein the first mode is an working mode in which the chamber door needs to be in an open state during the operation of the target rotating device, so that when the chamber door is opened, the motor speed can be limited according to the size of the chamber door opening. Since the current speed upper limit is negatively correlated with the chamber door opening, the motor operation safety can be effectively improved while meeting the debugging requirements.

[0068] At the same time, in order to quickly and effectively determine the current upper limit of the speed of the target motor, the motor control method provided in the embodiments of this specification also defines a specific method for determining the current upper limit of the speed of the target motor.

[0069] In addition, in order to further improve the safety during the operation of the motor, the implementation method of this specification also provides a specific method for controlling the target motor based on the hardware circuit.

[0070] Based on the above-mentioned inventive concept, the motor control method provided in the embodiment of this specification is exemplarily described below.

[0071] Exemplary Methods

[0072] The embodiment of this specification provides a motor control method, such as Figure 1 Shown, including:

[0073] S101. When the current operating mode of the semiconductor device is a first mode, obtain a current value of the chamber door opening of the chamber where the target rotating device in the semiconductor device is located. The first mode is an operating mode in which the chamber door needs to be in an open state during the operation of the target rotating device.

[0074] Specifically, the semiconductor equipment can be a single-wafer cleaning equipment or other equipment with a chuck that can rotate at high speed. The semiconductor equipment can include a target rotating device and a target motor. The target motor is the motor to be controlled. The target motor can be connected to the target rotating device through a transmission shaft so that the target rotating device is driven to rotate by the target motor. The target rotating device can be arranged in a chamber, and the chamber can include a chamber door. When the chamber door is open, process objects such as wafers can be placed or taken on the target rotating device, and the target rotating device of the semiconductor equipment can be debugged, for example, debugging the extension and retraction of the top rod of the target rotating device, observing the cable routing in the chamber, and the interference of the target rotating device with components such as the target motor. When the chamber door is closed, the target motor can be controlled to operate according to the speed setting value required by the process to perform process processing on process objects such as wafers.

[0075] The first mode is an operating mode in which the chamber door needs to be in an open state during the operation of the target rotating device in the semiconductor equipment, for example, a debugging mode.

[0076] The current operating mode of the semiconductor device is the operating mode currently being run by the semiconductor device. In practice, an input device such as a button or touch screen display may be provided to input the operating mode of the semiconductor device, thereby enabling the current operating mode of the semiconductor device to be determined based on the operating mode input by the input device.

[0077] The current value of the chamber door opening of the chamber in which the target rotating device is located is the current value of the chamber door opening. In implementation, a chamber door opening detection device can be provided to detect the chamber door opening of the chamber in which the target rotating device is located in real time. The chamber door opening detection device can be a position sensor disposed on a side of the chamber door away from the rotation axis of the chamber door. The position sensor is configured to detect a position signal from a corresponding sidewall of the chamber door. This position signal can represent the chamber door opening. The greater the chamber door opening, the greater the risk of the target motor operating when the chamber door is open.

[0078] S102 : Determine a current upper speed limit of a target motor based on the current value of the chamber door opening, wherein the target motor is used to drive the target rotating device to operate, and the current upper speed limit is negatively correlated with the current value of the chamber door opening.

[0079] Specifically, the current upper limit of the target motor's speed may be an upper limit of the target motor's speed at the current moment. The current upper limit of the target motor's speed may be determined based on a preset correspondence between the chamber door opening and the upper limit of the target motor's speed, as well as the current value of the chamber door opening. The current upper limit of the speed may be negatively correlated with the current value of the chamber door opening, such that when the chamber door opening of the target motor is large, the target motor's speed is limited to a lower value, thereby effectively improving the operational safety of the semiconductor device when the chamber door is open.

[0080] During implementation, when the current operating mode of the semiconductor device is the first mode, the chamber door opening of the chamber where the target rotating device in the semiconductor device is located can be obtained in real time, so as to update the current upper limit of the target motor in real time according to the chamber door opening, so as to improve the safety of the target motor during operation.

[0081] S103 : Control the target motor to operate based on the current upper speed limit.

[0082] Specifically, the operation of the target motor can be controlled based on the current upper speed limit. For example, the current target speed of the target motor can be determined based on the current upper speed limit, that is, the target value of the speed of the target motor at the current moment, so as to control the operation of the target motor based on the current target speed, thereby effectively avoiding the safety risks caused by the excessively high speed of the target motor when the chamber door is in the open state, thereby improving the operating safety of the target motor.

[0083] Among them, in the process of determining the current target speed of the target motor based on the current speed upper limit, the current speed upper limit can be used as the current target speed of the target motor, and the current target speed of the target motor can also be determined based on the preset fluctuation range of the speed of the target motor and the current speed upper limit. For example, the difference between the current speed upper limit and the upper limit value of the preset fluctuation range is used as the current target speed of the target motor; In addition, the current target speed of the target motor can also be determined based on the current required speed of the target motor and the current speed upper limit. For example, when the current required speed is greater than the current speed upper limit, the current speed upper limit is used as the target speed, and when the current required speed is less than or equal to the current speed upper limit, the current required speed is used as the current target speed of the target motor. The current required speed is the required value of the speed of the target motor at the current moment. The current required speed can be automatically matched by the current working condition of the semiconductor device, and the current required speed can also be determined based on the speed signal input by relevant personnel such as the debugging personnel.

[0084] It can be seen that the motor control method provided in the embodiment of this specification obtains the current value of the chamber door opening of the chamber where the target rotating device in the semiconductor device is located when the current working mode of the semiconductor device is the first mode, determines the current upper limit of the speed of the target motor based on the current value of the chamber door opening, and controls the operation of the target motor based on the current upper limit of the speed to drive the target rotating device to operate through the target motor, wherein the first mode is an operating mode in which the chamber door needs to be in an open state during the operation of the target rotating device, so that when the chamber door is opened, the motor speed can be limited according to the size of the chamber door opening. Since the current upper limit of the speed is negatively correlated with the chamber door opening, it can effectively improve the safety of the motor operation while meeting the debugging requirements.

[0085] In order to quickly and effectively determine the current upper limit of the speed of the target motor, in one embodiment of the present specification, determining the current upper limit of the speed of the target motor based on the current value of the chamber door opening includes:

[0086] Based on the current value of the chamber door opening and a preset speed determination model, the current speed upper limit of the target motor is determined; wherein the speed determination model is used to characterize the corresponding relationship between the chamber door opening and the speed upper limit of the target motor.

[0087] Specifically, the speed determination model is used to characterize the correspondence between the chamber door opening and the upper limit of the speed of the target motor. It can be a mapping table, a curve graph, a mathematical expression, a machine learning model, etc.

[0088] The speed determination model can be pre-input and stored so that it can be called in real time during the process of determining the current upper speed limit of the target motor. In implementation, the speed determination model can be constructed based on the property parameters of the target rotating device (such as material, installation process, etc.), safety test results at different speeds, etc., so that the current upper speed limit of the target motor can be determined quickly and effectively. In the process of controlling the operation of the target motor according to the current upper speed limit of the target motor, the operating safety of the target motor can be effectively improved.

[0089] In a feasible embodiment, the rotation speed determination model includes a plurality of sub-models, and the plurality of sub-models correspond one-to-one to a plurality of chamber door opening ranges;

[0090] The determining of the current upper limit of the speed of the target motor based on the current value of the chamber door opening and a preset speed determination model includes:

[0091] determining a target opening range from the plurality of chamber door opening ranges based on a current value of the chamber door opening;

[0092] Based on the sub-model corresponding to the target opening range, a current upper limit of the speed of the target motor is determined.

[0093] Specifically, the maximum value range of the chamber door opening of the chamber where the target rotating device is located (e.g., 0° to 90°) can be divided into multiple chamber door opening ranges based on the degree of danger when the chamber door is opened. For example, the chamber door opening ranges can be divided based on the size information of process objects such as wafers and / or the chamber door opening requirements. The chamber door opening requirements include, for example, the size to which the chamber door needs to be opened when performing different debugging tasks.

[0094] For different chamber door opening intervals, the correspondence between the chamber door opening represented by the speed determination model and the upper speed limit of the target motor can be different. For example, in different chamber door opening intervals, the change trend of the upper speed limit of the target motor with the chamber door opening can be different. The change trend can be a straight line or a curve, or it can be a discrete point. In implementation, the speed determination model can include multiple sub-models, and the multiple sub-models can correspond one-to-one with multiple chamber door opening intervals. Thus, in different chamber door opening intervals, the current upper speed limit of the target motor can be determined in different ways. Therefore, during the debugging process of the target rotating device, the speed requirement of the target motor can be met while effectively improving the operating safety of the target motor. At the same time, by dividing the chamber door opening intervals, when determining the current upper speed limit of the target motor, the amount of calculation during data matching can be effectively reduced, thereby enabling the current upper speed limit of the target motor to be determined quickly and effectively. Then, when the chamber door opening changes, the speed of the target motor can be limited in real time, further improving the operating safety of the target motor.

[0095] Among them, different sub-models can be of the same or different types. For example, for any sub-model, one of a mapping table, a curve graph, a mathematical expression and a machine learning model can be used.

[0096] During implementation, the current upper speed limit of the target motor can be determined based on the sub-model corresponding to the target opening interval. It is understandable that, for any sub-model, the upper speed limit of the target motor can change with the change of the chamber door opening, or it can remain constant. In the sub-model corresponding to the target opening interval, when the upper speed limit of the target motor does not change with the change of the chamber door opening, for example, when the upper speed limit remains constant within the target opening interval, the current upper speed limit of the target motor can be determined based only on the sub-model corresponding to the target opening interval, for example, the constant value can be directly used as the current upper speed limit. When the upper speed limit of the target motor changes with the change of the chamber door opening, the current upper speed limit of the target motor can be determined based on the sub-model corresponding to the target opening interval and the current value of the chamber door opening, so that the current upper speed limit of the target motor can be determined flexibly and efficiently, and then when the chamber door opening changes, the speed of the target motor can be limited in real time, further improving the operating safety of the target motor.

[0097] As an optional implementation, the chamber door opening range division result can be as follows: Figure 2 As shown, Figure 2 In the figure, the maximum value range of the chamber door opening is [0°, 90°], where 0° indicates that the chamber door is closed and 90° indicates that the chamber door is fully open. The maximum value range of the chamber door opening is divided into four chamber door opening ranges: [0°, α1], (α1, α2], (α2, α3] and (α3, 90°], where 0°<α1<α2<α3<90°. When the chamber door opening is at [0°, α1], the chamber door is close to the closed state. Even if the process objects such as the wafer rotating at high speed on the target rotating device are separated from the target rotating device, there is a high probability that they will be blocked by the chamber door. At this time, the target The upper limit of the motor speed can be relatively large; when the chamber door opening is at (α1, α2], the chamber door opening is slightly larger than the size of the process object such as the wafer, and the upper limit of the target motor speed can gradually decrease as the chamber door opening increases; when the chamber door opening is at (α2, α3], it can usually meet the testing requirements of debugging personnel and other relevant personnel for routing and interference near the target rotating device, but based on the further increase in the risk level, the upper limit of the target motor speed can be further reduced; when the chamber door opening is at (α3, 90°], the chamber door opening is large, and at this time, the upper limit of the target motor speed can be gradually reduced to 0.

[0098] Among them, the sub-model corresponding to each chamber door opening range can be stored in the form of a curve graph, which can be specifically as follows: Figure 3 As shown, Figure 3 The upper speed limit is expressed as a percentage of the maximum speed of the target motor.

[0099] In order to further ensure the safe operation of the target motor, in one embodiment of the present specification, after controlling the operation of the target motor based on the current upper speed limit, the method further includes:

[0100] Obtaining the current speed of the target motor;

[0101] Based on a comparison result between the current rotation speed and the current rotation speed upper limit, a current operating state of the target motor is determined.

[0102] Specifically, the current rotational speed of the target motor is the detected value of the rotational speed of the target motor at the current moment. During the operation of the target motor, the rotational speed of the target motor can be detected in real time by a rotational speed sensor.

[0103] The current operating state of the target motor is the operating state of the target motor at the current moment, and may include a safe state and a dangerous state, for example.

[0104] In implementation, the current operating state of the target motor may be determined based on a comparison result between the current rotation speed of the target motor and the current upper limit of the rotation speed of the target motor.

[0105] In the process of determining the current operating state of the target motor, when the current speed of the target motor is less than or equal to the current speed upper limit, it can be determined to be a safe state, and when the current speed of the target motor is greater than the current speed upper limit, it can be determined to be a dangerous state. When the current operating state of the target motor is a dangerous state, an alarm can be issued, and the target motor can be controlled to adjust the speed or stop running, etc. Among them, whether to control the target motor to adjust the speed or to control the target motor to stop running can be determined based on the difference between the current speed and the current speed upper limit. For example, when the difference between the current speed and the current speed upper limit is less than a preset difference, an alarm can be issued, and the target motor can be controlled to adjust the speed until the current operating state of the target motor is a safe state. When the difference between the current speed and the current speed upper limit is greater than or equal to the preset difference, an alarm can be issued, and the target motor can be controlled to stop running. The preset difference is greater than 0, thereby ensuring the effective operation of the target motor while further improving the operating safety of the target motor.

[0106] It can be understood that during the operation of the target motor, the speed of the target motor can also be feedback controlled based on the comparison result of the current speed of the target motor and the current target speed of the target motor to ensure that the speed of the target motor is stable at the current target speed, thereby ensuring the effective operation of the target motor.

[0107] In order to further ensure the safe operation of the target motor, in one embodiment of the present specification, a first power supply line is provided between the target motor and a power supply of the target motor, and a first switching device and a frequency conversion device are provided on the first power supply line;

[0108] The controlling the target motor to operate based on the current upper speed limit includes:

[0109] controlling the first switching device to be closed, wherein the first switching device is used to control the first power supply line to be turned on when closed;

[0110] Based on the current upper speed limit, the target power supply frequency of the target motor is determined, and the target power supply frequency is output to the frequency conversion device. The frequency conversion device is used to frequency convert the initial power supply frequency output by the power supply power source based on the target power supply frequency and then power the target motor.

[0111] Specifically, the power supply of the target motor is used to provide electrical energy to the target motor. For example, the power supply of the target motor can provide alternating current to the target motor.

[0112] A first switching device is provided on the first power supply line, and the first switching device is used to control the on and off of the first power supply line, that is, when the first switching device is closed, the first power supply line is turned on, and when the first switching device is turned off, the first power supply line is turned off. When the first power supply line is turned on, the power supply can provide electrical energy to the target motor through the first power supply line.

[0113] The first switching device may be an electrically controlled switch, such as a relay or contactor, to control the closing or opening of the first switching device via a control signal. It is understood that the first switching device may also be a mechanical switch to manually control the closing or opening of the first switching device. The first switching device may also include both a mechanical switch and an electrically controlled switch arranged in series to enable manual opening of the first switching device in an emergency.

[0114] When the current operation mode of the semiconductor device is the first mode, the first switching device can be controlled to be closed, so that the first power supply line is turned on, and power is supplied to the target motor through the first power supply line.

[0115] A frequency conversion device is also provided on the first power supply line. The frequency conversion device can convert the initial power supply frequency output by the power supply source based on the target power supply frequency, and output the frequency-converted electric energy to the target motor through the first power supply line to power the target motor. The frequency conversion device can adopt an electronic frequency converter.

[0116] Among them, the target power supply frequency of the target motor can be determined based on the current upper speed limit and the preset correspondence between the upper speed limit and the power supply frequency, so as to quickly and effectively determine the target power supply frequency of the target motor, and then when the power supply frequency of the target motor is limited based on the target power supply frequency, the safety risks caused by the speed of the target motor being out of control can be effectively avoided, thereby further improving the operating safety of the target motor.

[0117] During implementation, when the current operating mode of the semiconductor device is switched to a mode other than the first mode, or when a fault signal or other signal that requires the target motor to stop running is detected, the first switching device can be controlled to disconnect, the first power supply line can be disconnected, and the power supply stops supplying power to the target motor through the first power supply line. Therefore, when the current operating mode of the semiconductor device is the first mode, the power supply to the target motor is controlled by controlling the on and off of the first power supply line, which can effectively reduce the safety risks caused by software control failure.

[0118] It is understood that other power supply lines may be provided between the power supply source and the target motor. When the first power supply line is disconnected, the other power supply lines may be controlled to supply power to the target motor. The control logic of the other power supply lines may be different from that of the first power supply line. Furthermore, when the current operating mode is the first mode, the other power supply lines may be controlled to be disconnected.

[0119] In one feasible embodiment, a second power supply line is further provided between the target motor and the power supply, and the second power supply line is arranged in parallel with the first power supply line; a second switching device and a third switching device arranged in series are provided on the second power supply line, and the second switching device and the third switching device are used to control the on and off of the second power supply line;

[0120] The third switch device is connected to a chamber door switch detection device, the chamber door switch detection device is used to obtain a switch signal of the chamber door and output the switch signal to the third switch device, and the switch signal is used to control the closing or opening of the third switch device;

[0121] Also includes:

[0122] When the current operating mode of the semiconductor device is the second mode, the second switching device is controlled to be closed, and the first switching device is controlled to be disconnected. The first switching device is used to control the disconnection of the first power supply line when it is disconnected. The second mode is an operating mode in which the chamber door needs to be in a closed state during the operation of the target rotation device.

[0123] Specifically, a second switching device and a third switching device arranged in series are provided on the second power supply line. The second switching device and the third switching device are used to control the on and off of the second power supply line. That is, when the second switching device and the third switching device are closed at the same time, the second power supply line is turned on; when at least one of the second switching device and the third switching device is disconnected, the second power supply line is disconnected.

[0124] The second power supply line is arranged in parallel with the first power supply line, that is, the power supply can supply power to the target motor through the power supply line that is connected between the first power supply line and the second power supply line. It can be understood that when the first power supply line is controlled to be connected, the second power supply line can be controlled to be disconnected, and when the second power supply line is controlled to be connected, the first power supply line can be controlled to be disconnected, so as to avoid the impact of the simultaneous connection of the first power supply line and the second power supply line on the safety of the motor operation.

[0125] The second switch device may be an electrically controlled switch, such as a relay or contactor, to control the closing or opening of the second switch via a control signal. It is understood that the second switch device may also be a mechanical switch to manually control the closing or opening of the second switch device. The second switch device may also include both a mechanical switch and an electrically controlled switch arranged in series to enable manual opening of the second switch device in an emergency.

[0126] The third switch device is connected to a chamber door switch detection device, which may include a position sensor arranged on a side of the chamber door away from the rotation axis of the chamber door, and may also include a judgment device, which is used to judge the switch state of the chamber door based on the detection result of the position sensor, and output a corresponding switch signal to the third switch device according to the switch state. The switch signal can be used to control the on-off state of the third switch device. For example, the third switch device can be disconnected when the switch signal indicates that the chamber door is in an open state, and closed when the switch signal indicates that the chamber door is in a closed state, so that when the chamber door is in an open state, the second power supply line can be controlled to be disconnected, thereby avoiding the safety risk caused by the opening of the chamber door during the high-speed operation of the target motor in the second mode.

[0127] In practice, the third switching device can be directly connected to the control power supply so that the control power supply provides power to the third switching device. Furthermore, a second switching device can be disposed in the circuit between the third switching device and the control power supply. When the second switching device is closed, the third switching device can be further controlled to close or open based on the chamber door opening signal. When the second switching device is open, the third switching device is inoperative. This effectively avoids safety risks caused by the third switching device failing to open when the chamber door is open during operation in the second mode.

[0128] The second mode is an operating mode in which the chamber door needs to be in a closed state during the operation of the target rotating device. For example, the second mode may be a mode in which semiconductor equipment performs process processing on process objects such as wafers.

[0129] When the current operating mode of the semiconductor device is the second mode, the first switching device can be controlled to disconnect to disconnect the first power supply line. At the same time, the second switching device can be controlled to close, so that when the third switching device is closed, the second power supply line is turned on, and the power supply can supply power to the target motor through the second power supply line. At this time, the operation of the target motor can be controlled based on the required speed in the current operating mode.

[0130] During implementation, when the current operating mode of the semiconductor device is switched to the first mode, or when a fault signal or other signal that requires the target motor to stop running is detected, the second switching device can also be controlled to disconnect to disconnect the second power supply line, and the power supply stops supplying power to the target motor through the second power supply line. Therefore, when the current operating mode of the semiconductor device is the second mode, the power supply to the target motor is controlled by controlling the on and off of the second power supply line, which can effectively reduce the safety risks caused by software control failure.

[0131] In a feasible embodiment, both the first switch device and the second switch device are connected to a switch selection circuit;

[0132] The switch selection circuit includes an output control module and a fourth switch device, wherein the fourth switch device is connected to the first switch device and the second switch device respectively;

[0133] Controlling the first switching device to be closed and controlling the second switching device to be open, or controlling the second switching device to be closed and controlling the first switching device to be open, comprises:

[0134] The current working mode is output to the output control module, and the output control module is used to output a selection signal to the fourth switching device based on the current working mode. The fourth switching device is used to output a first level signal to the first switching device and a second level signal to the second switching device based on the selection signal. The first level signal is used to control the first switching device to close or open, and the second level signal is used to control the second switching device to perform an action opposite to that of the first switching device.

[0135] Specifically, the switch selection circuit may include an output control module and a fourth switch device. The output control module is connected to the fourth switch device. The fourth switch device may be an electrically controlled switch such as a relay.

[0136] The fourth switching device is connected to the first switching device and the second switching device respectively, and can simultaneously output a first level signal to the first switching device and a second level signal to the second switching device. The first level signal is used to control the closing or opening of the first switching device, and the second level signal is used to control the closing or opening of the second switching device.

[0137] The first level signal and the second level signal may have the same direction or opposite directions, and may be specifically set according to the types of the first switching device and the second switching device, so as to be able to control the first switching device and the second switching device to perform opposite actions, that is, when the first switching device is controlled to be closed, the second switching device is controlled to be opened, and, when the first switching device is controlled to be opened, the second switching device is controlled to be closed.

[0138] For example, when the first switching device and the second switching device are both closed at a high level and disconnected at a low level, or both closed at a low level and disconnected at a high level, the directions of the first level signal and the second level signal can be opposite. When one of the first switching device and the second switching device is closed at a high level and disconnected at a low level, and the other is closed at a low level and disconnected at a high level, the directions of the first level signal and the second level signal can be the same, so as to control one of the first switching device and the second switching device to be closed and the other to be disconnected, thereby effectively avoiding the first switching device and the second switching device from being closed at the same time.

[0139] In implementation, after determining the current operating mode of the semiconductor device, the current operating mode can be sent to the switch selection circuit. The output control module can output a selection signal to the fourth switch device based on the current operating mode. The selection signal can be a high-level signal or a low-level signal. The direction of the selection signal can be opposite in different operating modes. For example, when the first switch device and the second switch device are both closed at a high level and disconnected at a low level, when the current operating mode is the first mode, the first-level signal is a high-level signal and the second-level signal is a low-level signal to control the first switch device to close and the second switch device to disconnect; when the current operating mode is the second mode, the first-level signal is a low-level signal and the second-level signal is a high-level signal to control the first switch device to disconnect and the second switch device to close. Thus, in different operating modes, the first switch device and the second switch device are controlled to open and close in opposite directions through the hardware switch, which can effectively improve the reliability of the control results and thereby improve the operating safety of the motor.

[0140] In a feasible embodiment, after controlling the first switching device to be closed, and / or after controlling the second switching device to be closed and controlling the first switching device to be opened, the method further includes:

[0141] Acquire a first on / off state of the first power supply line and a second on / off state of the second power supply line;

[0142] determining a current power supply state of the target motor based on the first on-off state and the second on-off state;

[0143] When the current power supply state does not meet the operating conditions of the current working mode, an alarm signal is generated.

[0144] Specifically, the current power supply state is the state in which the power supply is supplying power to the target motor at the current moment. For example, the current power supply state can be one of power supply by the first power supply line, power supply by the second power supply line, power supply by the first power supply line and the second power supply line at the same time, and power off.

[0145] When the current working mode of the semiconductor device is the first mode, after controlling the first switching device to close and controlling the second switching device to disconnect, the first on-off state of the first power supply line and the second on-off state of the second power supply line can be further obtained. When the current power supply state is powering the first power supply line, it indicates that the current power supply state meets the operating conditions of the current working mode, and the target motor operation can be further controlled based on the current target speed. Otherwise, it indicates that the current power supply state does not meet the operating conditions of the current working mode, and an alarm signal can be generated.

[0146] When the current working mode of the semiconductor device is the second mode, after controlling the second switching device to close and controlling the first switching device to disconnect, the first on-off state of the first power supply line and the second on-off state of the second power supply line can be further obtained. When the current power supply state is supplying power to the second power supply line, it indicates that the current power supply state meets the operating conditions of the current working mode, and the target motor operation can be further controlled based on the required speed under the current working mode. Otherwise, it indicates that the current power supply state does not meet the operating conditions of the current working mode, and an alarm signal can be generated, thereby effectively avoiding the safety risks caused by controlling the operation of the target motor when the power supply state of the target motor does not match the current working mode.

[0147] In implementations, the first on / off state of the first power supply circuit can be determined based on a first-level signal fed back by the first switching device. Simultaneously, the second on / off state of the second power supply circuit can be determined based on a second-level signal fed back by the second switching device and a third-level signal fed back by the third switching device. It will be appreciated that when the second switching device is located on the circuit between the third switching device and the control power supply, the second on / off state of the second power supply circuit can be determined solely based on the third-level signal. The first-level signal, the second-level signal, and the third-level signal are used to represent the closed or open states of the first, second, and third switching devices, respectively.

[0148] In addition, the current power supply state of the target motor can also be determined based on the first on-off state, the second on-off state and the fourth level signal fed back by the fourth switching device. The fourth level signal is used to characterize the selection result of the power supply line. For example, it can be the same as the first level signal or the second level signal.

[0149] Exemplary Systems

[0150] refer to Figure 4 , the embodiments of this specification also provide a motor control system, including:

[0151] The chamber door opening detection device 401 is used to obtain the current value of the chamber door opening of the chamber where the target rotating device is located in the semiconductor equipment;

[0152] The controller 402 is connected to the chamber door opening detection device 401, and is used to determine the current upper limit of the speed of the target motor based on the current value of the chamber door opening when the current operating mode of the semiconductor device is the first mode, and to control the operation of the target motor based on the current upper limit of the speed; wherein, the target motor is used to drive the target rotating device to operate, the current upper limit of the speed is negatively correlated with the current value of the chamber door opening, and the first mode is an operating mode in which the chamber door needs to be in an open state during the operation of the target rotating device.

[0153] Exemplarily, the controller 402 is specifically configured to:

[0154] The current upper speed limit of the target motor is determined based on the current value of the chamber door opening and a preset speed determination model, wherein the speed determination model is used to characterize the corresponding relationship between the chamber door opening and the upper speed limit of the target motor.

[0155] Exemplarily, the rotation speed determination model includes a plurality of sub-models, and the plurality of sub-models correspond one-to-one to a plurality of chamber door opening ranges; the controller 402 is specifically configured to:

[0156] determining a target opening range from the plurality of chamber door opening ranges based on a current value of the chamber door opening;

[0157] Based on the sub-model corresponding to the target opening range, a current upper limit of the speed of the target motor is determined.

[0158] Exemplarily, the controller 402 is further configured to:

[0159] Obtaining the current speed of the target motor;

[0160] Based on a comparison result between the current rotation speed and the current rotation speed upper limit, a current operating state of the target motor is determined.

[0161] Exemplarily, the device further includes a first power supply circuit provided between the target motor and a power supply of the target motor, wherein the first power supply circuit is provided with a first switching device and a frequency conversion device;

[0162] The controller 402 is configured to control the first switch device to close, determine a target power supply frequency of the target motor based on the current upper speed limit, and output the target power supply frequency to the frequency conversion device;

[0163] The first switching device is used to control the first power supply line to be conductive when closed;

[0164] The frequency conversion device is used to perform frequency conversion on the initial power supply frequency output by the power supply based on the target power supply frequency and then supply power to the target motor.

[0165] Exemplarily, the device further includes a second power supply circuit provided between the target motor and the power supply, the second power supply circuit being provided in parallel with the first power supply circuit; a second switching device and a third switching device provided in series on the second power supply circuit, the second switching device and the third switching device being used to control the on and off of the second power supply circuit;

[0166] The third switch device is connected to a chamber door switch detection device, the chamber door switch detection device is used to obtain a switch signal of the chamber door and output the switch signal to the third switch device, and the switch signal is used to control the closing or opening of the third switch device;

[0167] The controller 402 is also used to control the second switching device to close and the first switching device to disconnect when the current operating mode of the semiconductor device is the second mode. The first switching device is used to control the first power supply line to disconnect when it is disconnected. The second mode is an operating mode in which the chamber door needs to be in a closed state during the operation of the target rotation device.

[0168] Exemplarily, it further includes a switch selection circuit, the switch selection circuit including an output control module and a fourth switch device, the fourth switch device being connected to the output control module, the first switch device, and the second switch device respectively;

[0169] The controller 402 is connected to the output control module and is used to output the current working mode to the output control module;

[0170] The output control module is configured to output a selection signal to the fourth switch device based on the current working mode;

[0171] The fourth switching device is used to output a first-level signal to the first switching device and a second-level signal to the second switching device based on the selection signal, the first-level signal is used to control the first switching device to close or open, and the second-level signal is used to control the second switching device to perform an action opposite to that of the first switching device.

[0172] Exemplarily, the controller 402 is further configured to:

[0173] Acquire a first on / off state of the first power supply line and a second on / off state of the second power supply line;

[0174] determining a current power supply state of the target motor based on the first on-off state and the second on-off state;

[0175] When the current power supply state does not meet the operating conditions of the current working mode, an alarm signal is generated.

[0176] The motor control system provided in this embodiment is based on the same concept as the method provided in the above embodiments of this application. It can execute the method provided in any of the above embodiments of this application and has the corresponding functional modules and beneficial effects. For technical details not fully described in this embodiment, please refer to the specific processing content of the method provided in the above embodiments of this application and will not be repeated here.

[0177] The following is an example of an optional implementation to illustrate the structure of the motor control system of this specification. Figure 5 As shown, the motor control system includes a controller 402, a chamber door opening detection device 401, an output control module 501, a fourth switching device 502, a first control power supply 503, a second control power supply 504, a first switching device 505, a frequency conversion device 506, a second switching device 507, a third switching device 508, a chamber door switch detection device 509 and a safety protection device 510.

[0178] The chamber door opening detection device 401 is connected to the controller 402 and is used to obtain the current value of the chamber door opening of the chamber where the target rotating device is located and send it to the controller 402.

[0179] The controller 402 is connected to the output control module 501 and is configured to output the current operating mode to the output control module 501 after determining the current operating mode of the semiconductor device.

[0180] The output control module 501 and the fourth switch device 502 are connected. 1 / 2 A port is connected to output a selection signal to the A of the fourth switch device 502 according to the current working mode. 1 / 2Port, wherein when the current working mode is the first mode, the output selection signal is a low level signal, and when the current working mode is the second mode, the output selection signal is a high level signal. Wherein, for each port in the fourth switch device 502, the first switch device 505, the second switch device 507 and the third switch device 508, A 1 / 2 The NC port is the normally closed contact port, and the NO port is the normally open contact port.

[0181] The fourth switch device 502 is a relay. The 1N.C. port, 1N.O. port and 2N.O. port of the fourth switch device 502 are all connected to the first control power supply 503. The first control power supply 503 is used to provide voltage to the fourth switch device 502. The 2N.C. port of the fourth switch device 502 is connected to the A port of the first switch device 505. 1 / 2 A port connected to output a first level signal to the first switch device 505 1 / 2 3N.O. port of the fourth switching device 502 and the A of the second switching device 507 1 / 2 A port connected to output the second level signal to the A of the second switch device 507 1 / 2 4N.O. port of the fourth switching device 502 is connected to the controller 402 for feeding back the state Y1 to the controller 402.

[0182] At A of the fourth switching device 502 1 / 2 When the selection signal inputted from the port is a low level signal, the line between the 1N.C. port and the 2N.C. port of the fourth switch device 502 is turned on, and the A of the first switch device 505 is turned on. 1 / 2 The first level signal received by the port is a high level signal. At the same time, the line between the 1N.O. port and the 3N.O. port of the fourth switch device 502 and the line between the 2N.O. port and the 4N.O. port are disconnected. The A of the second switch device 507 is disconnected. 1 / 2 The second level signal received by the port is a low level signal, the state Y1 is a low level, and is recorded as Y1=FALSE, indicating that the current working mode is the first mode.

[0183] At A of the fourth switching device 502 1 / 2 When the selection signal inputted from the port is a high level signal, the line between the 1N.C. port and the 2N.C. port of the fourth switch device 502 is disconnected, and the A of the first switch device 505 is disconnected. 1 / 2 The first level signal received by the port is a low level signal. At the same time, the line between the 1N.O. port and the 3N.O. port of the fourth switch device 502 and the line between the 2N.O. port and the 4N.O. port are both turned on. The A of the second switch device 507 1 / 2The second level signal received by the port is a high level signal, the state Y1 is a high level, and is recorded as Y1=TRUE, indicating that the current working mode is the second mode.

[0184] The power supply 511 of the target motor 512 supplies power to the target motor 512 through a first power supply line formed by the first switching device 505 and the frequency conversion device 506 or through a second power supply line formed by the second switching device 507 and the third switching device 508 .

[0185] The 1N.O. port of the first switching device 505 and the 1N.O. port of the second switching device 507 are both connected to the power supply 511. The 2N.O. port of the first switching device 505 and the 2N.O. port of the second switching device 507 are both connected to the second control power supply 504. The second control power supply 504 is used to provide voltage to the 2N.O. port of the first switching device 505 and the 2N.O. port of the second switching device 507. The 3N.O. port of the first switching device 505 is connected to the frequency converter 506 for controlling the on / off of the first power supply line. The 4N.O. port of the first switching device 505 is connected to the controller 402 for feeding back the state Y3 to the controller 402.

[0186] At A of the fourth switching device 502 1 / 2 When the selection signal inputted from the port is a low level signal, the A of the second switch device 507 1 / 2 The second level signal received by the port is a low level signal, the line between the 1N.O. port and the 3N.O. port of the second switch device 507 and the line between the 2N.O. port and the 4N.O. port are disconnected, and the second power supply line is disconnected; at the same time, the A of the first switch device 505 1 / 2 The first level signal received by the port is a high level signal, the line between the 1N.O. port and the 3N.O. port of the first switching device 505 is connected, the first power supply line is connected, and the power supply 511 only supplies power to the target motor 512 through the first power supply line. At the same time, the line between the 2N.O. port and the 4N.O. port of the first switching device 505 is connected, the state Y3 is high level, and is recorded as Y3=TRUE, indicating that the current working mode is the first mode.

[0187] At A of the fourth switching device 502 1 / 2 When the selection signal inputted from the port is a high level signal, the A of the first switch device 505 1 / 2The first level signal received by the port is a low level signal. The line between the 1N.O. port and the 3N.O. port of the first switch device 505 is disconnected, and the first power supply line is disconnected. At the same time, the line between the 2N.O. port and the 4N.O. port of the first switch device 505 is disconnected, and the state Y3 is low level, and is recorded as Y3 = FALSE. At the same time, the A of the second switch device 507 is disconnected. 1 / 2 The second level signal received by the port is a high level signal, and the line between the 1N.O. port and the 3N.O. port and the line between the 2N.O. port and the 4N.O. port of the second switch device 507 are both conductive.

[0188] The 1N.O. port and the 2N.O. port of the third switch device 508 are connected to the 3N.O. port and the 4N.O. port of the second switch device 507 respectively. 1 / 2 The 3N.O. port of the third switch device 508 is connected to the chamber door switch detection device 509, the 4N.O. port of the third switch device 508 is connected to the target motor 512 through the safety protection device 510, and the 5N.O. port of the third switch device 508 is connected to the controller 402 for feeding back the state Y2 to the controller 402. The chamber door switch detection device 509 is used to detect the switch signal of the chamber door and output a high level signal to the A port of the third switch device 508 when the chamber door is closed. 1 / 2 When the line between the 1N.O. port and the 3N.O. port of the third switch device 508 is connected and the line between the 1N.O. port and the 3N.O. port of the second switch device 507 is also connected, the second power supply line is connected, and the power supply 511 supplies power to the target motor 512 only through the second power supply line. At the same time, when the line between the 2N.O. port and the 4N.O. port of the third switch device 508 is connected and the line between the 2N.O. port and the 4N.O. port of the second switch device 507 is also connected, the state Y2 is high and is recorded as Y2=TRUE, indicating that the current working mode is the second mode.

[0189] The chamber door opening and closing detection device 509 outputs a low level signal to the A of the third switch device 508 when the chamber door is opened. 1 / 2When the circuit between the 1N.O. and 3N.O. ports of the third switch device 508 is disconnected, the second power supply circuit is disconnected, and the circuit between the 2N.O. and 4N.O. ports of the third switch device 508 is disconnected, resulting in a low state Y2, recorded as Y2 = FALSE. Simultaneously, when the circuit between the 1N.O. and 3N.O. ports and the circuit between the 2N.O. and 4N.O. ports of the second switch device 507 are disconnected, both the 1N.O. and 2N.O. ports of the third switch device 508 receive low-level signals. Regardless of whether the chamber door is open, the state Y2 remains low, recorded as Y2 = FALSE.

[0190] The frequency converter 506 is connected to the target motor 512 via the safety protection device 510 , and is used to convert the power supply frequency output by the power supply 511 when the first power supply line is turned on, so as to limit the rotation speed of the target motor 512 .

[0191] The safety protection device 510 is used to provide safety protection for the power supply of the target motor 512 , for example, to issue a power-off alarm when a liquid leakage in the chamber is detected.

[0192] The controller 402 is also used to determine whether the operating conditions of the current working mode are met based on the state Y1 fed back by the first switching device 505, the state Y2 fed back by the third switching device 508, and the state Y3 fed back by the first switching device 505. When the current working mode is the first mode, if Y1=FALSE, Y2=FALSE and Y3=TRUE, it is determined that the operating conditions of the first mode are met. The controller 402 determines the current upper limit of the speed of the target motor 512 based on the current value of the chamber door opening, and determines the target power supply frequency of the target motor 512 based on the current upper limit of the speed and outputs it to the frequency conversion device 506. The frequency conversion device 506 converts the initial power supply frequency output by the power supply 511 based on the target power supply frequency and supplies power to the target motor 512; if Y1=FALSE, Y2=FALSE and Y3=TRUE are not satisfied, an abnormal alarm is issued. When the current operating mode is the second mode, if Y1 = TRUE, Y2 = TRUE, and Y3 = FALSE, the operating conditions for the second mode are determined to be met, and the controller 402 controls the target motor 512 based on the speed setting value. If Y1 = TRUE, Y2 = TRUE, and Y3 = FALSE are not met, an abnormality alarm is issued. In addition, during the operation of the target motor 512, the controller 402 can also obtain the speed detection value of the target motor 512 in real time to perform closed-loop control.

[0193] Exemplary devices

[0194] The embodiments of this specification further provide a semiconductor device, including: a target rotating device, a target motor, and a motor control system as described in any of the above embodiments.

[0195] Specifically, a semiconductor device such as a single-wafer cleaning device and a target motor are connected to a motor control system and a target rotating device, respectively.

[0196] Exemplary computer program products and storage media

[0197] In addition to the above-mentioned methods and devices, the motor control method provided in the embodiments of this specification may also be a computer program product, which includes computer program instructions, which, when executed by a processor, enable the processor to execute the steps of the motor control method according to various embodiments of this specification described in the above-mentioned "Exemplary Method" section of this specification.

[0198] The computer program product may be written in any combination of one or more programming languages to implement the operations of the embodiments of this specification, including object-oriented programming languages such as Java, C++, and conventional procedural programming languages such as "C" or similar programming languages. The program code may be executed entirely on the user's computing device, partially on the user's computing device, as a stand-alone software package, partially on the user's computing device and partially on a remote computing device, or entirely on a remote computing device or server.

[0199] In addition, an embodiment of this specification also provides a computer-readable storage medium on which a computer program is stored, and the computer program is used by a processor to execute the steps of the motor control method according to various embodiments of this specification described in the above "Exemplary Method" section of this specification.

[0200] Those skilled in the art will appreciate that all or part of the processes in the above-mentioned embodiments can be implemented by instructing the relevant hardware through a computer program. The computer program can be stored in a non-volatile computer-readable storage medium. When the computer program is executed, it can include the processes of the embodiments of the above-mentioned methods. Among them, any reference to memory, storage, database or other media used in the embodiments provided in this specification can include non-volatile and / or volatile memory. Non-volatile memory can include read-only memory (ROM), programmable ROM (PROM), electrically programmable ROM (EPROM), electrically erasable programmable ROM (EEPROM) or flash memory. Volatile memory can include random access memory (RAM) or external cache memory. By way of illustration and not limitation, RAM is available in various forms, such as static RAM (SRAM), dynamic RAM (DRAM), synchronous DRAM (SDRAM), double data rate SDRAM (DDRSDRAM), enhanced SDRAM (ESDRAM), synchronous link DRAM (SLDRAM), memory bus (Rambus) direct RAM (RDRAM), direct memory bus dynamic RAM (DRDRAM), and memory bus dynamic RAM (RDRAM).

[0201] The technical features of the above embodiments can be combined arbitrarily. To make the description concise, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0202] The above-described embodiments merely represent several implementation methods of this specification. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the solutions provided by the embodiments of this specification. It should be noted that a person skilled in the art can make several variations and improvements without departing from the scope of this specification, and these variations and improvements fall within the scope of protection of this specification. Therefore, the scope of protection of the patent in this specification shall be based on the appended claims.

Claims

1. A motor control method, characterized in that: include: When the current operating mode of the semiconductor device is a first mode, obtaining a current value of a chamber door opening of a chamber in which a target rotating device is located in the semiconductor device, wherein the first mode is an operating mode in which the chamber door needs to be in an open state during operation of the target rotating device; determining, based on a current value of the chamber door opening, a current upper limit of a rotation speed of a target motor, the target motor being used to drive the target rotating device, the current upper limit of the rotation speed being negatively correlated with the current value of the chamber door opening; Based on the current upper speed limit, the target motor is controlled to operate.

2. The method according to claim 1, characterized in that The determining of the current upper limit of the rotation speed of the target motor based on the current value of the chamber door opening includes: The current upper speed limit of the target motor is determined based on the current value of the chamber door opening and a preset speed determination model, wherein the speed determination model is used to characterize the corresponding relationship between the chamber door opening and the upper speed limit of the target motor.

3. The method according to claim 2, characterized in that The rotation speed determination model includes a plurality of sub-models, and the plurality of sub-models correspond one-to-one to a plurality of chamber door opening ranges; The determining of the current upper limit of the speed of the target motor based on the current value of the chamber door opening and a preset speed determination model includes: determining a target opening range from the plurality of chamber door opening ranges based on a current value of the chamber door opening; Based on the sub-model corresponding to the target opening range, a current upper limit of the speed of the target motor is determined.

4. The method according to claim 1, wherein After controlling the target motor to operate based on the current upper speed limit, the method further includes: Obtaining the current speed of the target motor; Based on a comparison result between the current rotation speed and the current rotation speed upper limit, a current operating state of the target motor is determined.

5. The method according to any one of claims 1 to 4, characterized in that A first power supply line is provided between the target motor and a power supply source of the target motor, and a first switching device and a frequency conversion device are provided on the first power supply line; The controlling the target motor to operate based on the current upper speed limit includes: controlling the first switching device to be closed, wherein the first switching device is used to control the first power supply line to be turned on when closed; Based on the current upper speed limit, the target power supply frequency of the target motor is determined, and the target power supply frequency is output to the frequency conversion device. The frequency conversion device is used to frequency convert the initial power supply frequency output by the power supply power source based on the target power supply frequency and then power the target motor.

6. The method according to claim 5, characterized in that A second power supply line is further provided between the target motor and the power supply, and the second power supply line is provided in parallel with the first power supply line; a second switch device and a third switch device are provided in series on the second power supply line, and the second switch device and the third switch device are used to control the on and off of the second power supply line; The third switch device is connected to a chamber door switch detection device, the chamber door switch detection device is used to obtain a switch signal of the chamber door and output the switch signal to the third switch device, and the switch signal is used to control the closing or opening of the third switch device; Also includes: When the current operating mode of the semiconductor device is the second mode, the second switching device is controlled to be closed, and the first switching device is controlled to be disconnected. The first switching device is used to control the disconnection of the first power supply line when it is disconnected. The second mode is an operating mode in which the chamber door needs to be in a closed state during the operation of the target rotation device.

7. The method according to claim 6, characterized in that The first switch device and the second switch device are both connected to a switch selection circuit; The switch selection circuit includes an output control module and a fourth switch device, wherein the fourth switch device is connected to the first switch device and the second switch device respectively; Controlling the first switching device to close, or controlling the second switching device to close and controlling the first switching device to open, includes: The current working mode is output to the output control module, and the output control module is used to output a selection signal to the fourth switching device based on the current working mode. The fourth switching device is used to output a first level signal to the first switching device and a second level signal to the second switching device based on the selection signal. The first level signal is used to control the first switching device to close or open, and the second level signal is used to control the second switching device to perform an action opposite to that of the first switching device.

8. The method according to claim 6, characterized in that After controlling the first switching device to be closed, and / or after controlling the second switching device to be closed and controlling the first switching device to be opened, the method further includes: Acquire a first on / off state of the first power supply line and a second on / off state of the second power supply line; determining a current power supply state of the target motor based on the first on-off state and the second on-off state; When the current power supply state does not meet the operating conditions of the current working mode, an alarm signal is generated.

9. A motor control system, characterized in that: include: a chamber door opening detection device for obtaining a current value of the chamber door opening of the chamber in which the target rotating device is located in the semiconductor equipment; A controller connected to the chamber door opening detection device is used to determine the current upper limit of the speed of the target motor based on the current value of the chamber door opening when the current operating mode of the semiconductor device is the first mode, and to control the operation of the target motor based on the current upper limit of the speed; wherein the target motor is used to drive the target rotating device to operate, the current upper limit of the speed is negatively correlated with the current value of the chamber door opening, and the first mode is an operating mode in which the chamber door needs to be in an open state during the operation of the target rotating device.

10. The motor control system according to claim 9, characterized in that: It also includes a first power supply circuit provided between the target motor and a power supply source of the target motor, wherein the first power supply circuit is provided with a first switching device and a frequency conversion device; The controller is configured to control the first switching device to be closed, determine a target power supply frequency of the target motor based on the current upper speed limit, and output the target power supply frequency to the frequency conversion device; The first switching device is used to control the first power supply line to be conductive when closed; The frequency conversion device is used to perform frequency conversion on the initial power supply frequency output by the power supply based on the target power supply frequency and then supply power to the target motor.

11. The motor control system according to claim 10, characterized in that: The device further includes a second power supply circuit provided between the target motor and the power supply, the second power supply circuit being provided in parallel with the first power supply circuit; a second switching device and a third switching device provided in series on the second power supply circuit, the second switching device and the third switching device being used to control the on and off of the second power supply circuit; The third switch device is connected to a chamber door switch detection device, the chamber door switch detection device is used to obtain a switch signal of the chamber door and output the switch signal to the third switch device, and the switch signal is used to control the closing or opening of the third switch device; The controller is also used to control the second switching device to close and the first switching device to disconnect when the current operating mode of the semiconductor device is the second mode. The first switching device is used to control the disconnection of the first power supply line when disconnected. The second mode is an operating mode in which the chamber door needs to be in a closed state during the operation of the target rotation device.

12. The motor control system according to claim 11, characterized in that: It also includes a switch selection circuit, the switch selection circuit including an output control module and a fourth switch device, the fourth switch device being connected to the output control module, the first switch device and the second switch device respectively; The controller is connected to the output control module and is used to output the current working mode to the output control module; The output control module is configured to output a selection signal to the fourth switch device based on the current working mode; The fourth switching device is used to output a first-level signal to the first switching device and a second-level signal to the second switching device based on the selection signal, the first-level signal is used to control the first switching device to close or open, and the second-level signal is used to control the second switching device to perform an action opposite to that of the first switching device.

13. A semiconductor device, characterized in that: include: A target rotating device, a target motor, and a motor control system according to any one of claims 9 to 12.

14. A computer-readable storage medium, characterized in that The computer-readable storage medium stores a computer program, and when the computer program is executed by the processor, the motor control method according to any one of claims 1 to 8 is implemented.

Images