Systems and methods for electrochemical machining

Abstract

Example electrochemical machining systems and methods for machining a surface of a sample. In particular, the system includes a nozzle configured to dispense a jet of electrolyte solution toward a surface of the sample. The position or orientation of the nozzle may be controlled to direct a jet of electrolyte solution from the nozzle toward a region of the surface of the sample (e.g., a region for electrochemical etching or other surface treatment). Electrochemical machining is performed by applying charge to the nozzle and to the sample (e.g., ground or other charge return path) such that the nozzle and the sample define a first electrode and a second electrode of the electrolytic cell that are electrically connected by a jet of electrolyte solution.

Description

[0001] CROSS-REFERENCE TO RELATED APPLICATIONS

[0002] This application is a non-provisional patent application of U.S. Provisional Patent Application No. 63 / 437,433, filed on January 6, 2024, entitled “Systems And Methods For Electrochemical Machining,” which is incorporated herein by reference in its entirety. Background Art

[0003] Electrochemical machining (ECM) operations are performed on samples for numerous purposes and across a wide variety of sectors and industries. In some applications, ECM is performed by applying a fluid through a nozzle. However, performing dynamic ECM processes is difficult and time-consuming, and ensuring consistent results can be challenging. Therefore, systems and methods that offer multiple features while maintaining consistent results are desirable. Summary of the Invention

[0004] There is disclosed a system and method for dynamic electrochemical machining, substantially as shown and described in conjunction with at least one of the accompanying drawings, as more fully set forth in the claims. BRIEF DESCRIPTION OF THE DRAWINGS

[0005] Figure 1 Example electrochemical machining systems according to aspects of the present disclosure are presented.

[0006] Figure 1A Shown Figure 1 Another view of an example electrochemical machining system.

[0007] Figure 2 Another example electrochemical machining system according to aspects of the present disclosure is presented.

[0008] Figure 3 Shown Figure 2 Another embodiment of an example electrochemical machining system.

[0009] Figure 4 Another example electrochemical machining system according to aspects of the present disclosure is presented.

[0010] Figure 5 Detailed views of example reservoirs according to aspects of the present disclosure are shown.

[0011] Figure 6 is an example fixture for supporting multiple samples for electrochemical machining according to aspects of the present disclosure.

[0012] Figure 7Another example electrochemical machining system including a filtration system according to aspects of the present disclosure is presented.

[0013] The accompanying drawings are not necessarily drawn to scale. Where appropriate, similar or identical reference numbers are used to designate similar or identical components. DETAILED DESCRIPTION

[0014] Disclosed are electrochemical machining systems and methods for machining a surface of a sample. In particular, the system includes a nozzle configured to dispense a jet of an electrolyte solution toward the surface of the sample. The position or orientation of the nozzle can be controlled to direct the jet of electrolyte solution from the nozzle toward an area of the surface of the sample (e.g., an area for electrochemical etching or other surface treatment). Electrochemical machining is performed by applying an electrical charge to the nozzle and applying an electrical charge to the sample (e.g., a ground or other charge return path), such that the nozzle and the sample define a first electrode and a second electrode of an electrolytic cell, the first electrode and the second electrode being electrically connected by the jet of electrolyte solution.

[0015] The system controls the amount and / or position of electrochemical machining by monitoring system parameters (e.g., fluid conditions, sample conditions, electrical characteristics (such as current / voltage, etc.)) and adjusting one or more system outputs accordingly. For example, a controller or control circuit system (e.g., an integrated or linked computer system) can receive monitored system parameters (e.g., from sensors, output values, etc.) and control adjustments to one or more system components. As a non-limiting example, this can include adjusting one or more of the following: the volume rate of the electrolyte jet, the pressure of the flow, the speed of the nozzle, the distance between the nozzle and the sample, the electrical characteristics of the electrolyte solution, the source or type of fluid used.

[0016] Some example systems use multiple reservoirs or tanks to store multiple fluids, which can be applied by one or more nozzles to process samples in a single or multiple cycles of a selected treatment program. In some examples, a specific program and / or cycle can be input by a user (e.g., via a user interface), selected by the user via a list of stored programs and / or cycles, and / or automatically identified and executed by a control circuit system. For example, a sample, fluid type, and / or system can be automatically identified (e.g., by identifying an indicator, such as a bar code and / or inherent characteristics of a sample), and the control circuit system can automatically select an appropriate program (e.g., from a list). A program and / or cycle can include control positions and features of an applied electrolyte solution jet so that a desired area of the sample is processed according to a predetermined set of output parameters (e.g., time amount, position, and / or treatment amount).

[0017] These are improvements over conventional systems, which are limited to a single nozzle processing a single sample based on strict point-to-point application. This requires the user to reconfigure the sample and / or the system for anything beyond the simplest cycle. The result is additional time and resources invested not in testing but in sorting and arranging the samples.

[0018] The disclosed sample holding fixture and system enables an operator to move an entire sample holder tray and mount it directly onto an electrochemical machining system without having to unload individual samples. This significantly reduces the workload required to process multiple samples and reduces the likelihood of samples being accidentally scratched and / or otherwise damaged.

[0019] Advantageously, employing the disclosed system and method allows for increased throughput because the system can process multiple samples without requiring the user to configure the system differently and individually for each cycle or program. By simplifying and / or automatically identifying samples and / or desired cycles / programs, configuration time is accelerated and variable, allowing different processing steps to be performed during a single program run. This includes processing multiple samples in a single program. Furthermore, processing samples with multiple nozzles results in a significant reduction in cycle time (e.g., approximately 50% reduction with two nozzles, approximately 66% reduction with three nozzles, etc.), thereby enabling the user to complete the process more quickly than with existing methods.

[0020] As used herein, the word "exemplary" means "serving as an example, instance, or illustration." The embodiments described herein are not limiting, but merely exemplary. It should be understood that the described embodiments are not necessarily to be construed as preferred or advantageous over other embodiments. Furthermore, the term "embodiment" does not require that all disclosed embodiments include the discussed feature, advantage, or mode of operation.

[0021] As used herein, “and / or” refers to any one or more of the multiple items connected by “and / or” in a list. As an example, “x and / or y” refers to any element in the three-element set {(x), (y), (x, y)}. In other words, “x and / or y” refers to “one or both of x and y”. As another example, “x, y and / or z” refers to any element in the seven-element set {(x), (y), (z), (x, y), (x, z), (y, z), (x, y, z)}. In other words, “x, y and / or z” refers to “one or more of x, y and z”. As used herein, the terms “e.g.” and “for example” elicit a list of one or more non-limiting examples, instances, or illustrations.

[0022] To facilitate an understanding of the principles of the claimed technology and to present its best currently understood mode of operation, reference will now be made to the embodiments illustrated in the drawings and specific language will be used to describe these embodiments. It will be understood, however, that this is not intended to limit the scope of the claimed technology, as such modifications and further adaptations of the illustrated apparatus and such further applications of the principles of the claimed technology as illustrated herein are within the ordinary scope of those skilled in the art to which the claimed technology pertains.

[0023] In a disclosed example, an electrochemical machining system for machining a surface of a sample includes a nozzle configured to dispense a jet of electrolyte solution toward the surface of the sample; and control circuitry for controlling the electrochemical machining process. The control circuitry is configured to receive input for a sample provision program; direct the jet of electrolyte solution from the nozzle toward a portion of the surface of the sample based on the program; and apply an electrical charge to the nozzle and to the sample based on the program, such that the nozzle and the sample define a first electrode and a second electrode of an electrolytic cell.

[0024] In some examples, the system includes an interface for receiving input or a barcode from a user. In an example, the control circuitry is further configured to automatically select a program for the sample based on the input or the barcode.

[0025] In some examples, the control circuitry is further configured to monitor one or more system parameters of the surface; and adjust one or more of the volume rate, pressure, or velocity of the electrolyte solution applied in response to the one or more system parameters based on a program. In an example, the one or more system parameters of the surface include voltage or current. In an example, the control circuitry is further configured to measure a voltage or current level; compare the measured voltage or current to a list of threshold voltage or current values; and adjust the voltage or current level when the measured voltage or current is at the threshold voltage or current value.

[0026] In some examples, the apparatus is configured to apply the electrolyte solution jet to multiple samples in a single cycle. In an example, the control circuitry is further configured to receive a first electrochemical machining program and a second electrochemical machining program as input; during the first electrochemical machining program, apply the electrolyte solution jet to a first region of the sample at a first volume rate, a first pressure, or a first velocity; and during the second electrochemical machining program, apply the electrolyte solution jet to a second region of the sample at a second volume rate, a second pressure, or a second velocity.

[0027] In some examples, the system includes a sensor for monitoring one or more system parameters. In one example, the sensor is a fluid sensor configured to monitor one or more of conductivity, refractive index, viscosity, flow rate, or charge of an electrolyte solution. In one example, the sensor is an optical system or a laser system configured to image or scan a sample. In one example, the sensor is an optical system or a laser system configured to image or scan an indicator representing a barcode or other information of the sample.

[0028] In some examples, the system includes an optical system or a laser system configured to present a reference image on the sample or a stage on which the sample is placed to align the sample relative to the nozzle at a desired position on the stage.

[0029] In some examples, the system includes a valve configured to receive an external air flow input to flush the electrolyte solution from the nozzle.

[0030] In some disclosed examples, an electrochemical machining system for machining a surface of one or more samples is provided. The system includes one or more nozzles configured to dispense one or more jets of one or more electrolyte solutions toward the surface of the one or more samples; and a control circuit system for controlling the electrochemical machining process. The control circuit system is configured to direct the one or more jets of one or more electrolyte solutions from a first nozzle of the one or more nozzles toward a first portion of the surface of the one or more samples; direct the one or more jets of one or more electrolyte solutions from a second nozzle of the one or more nozzles toward a second portion of the surface of the one or more samples; and apply an electrical charge to the one or more nozzles and to the one or more samples, such that the nozzles and the samples define a first electrode and a second electrode of an electrolytic cell.

[0031] In some examples, the control circuitry is further configured to control the first nozzle independently of the second nozzle.

[0032] In some examples, the first nozzle is configured to apply one or more jets as first jets of a first electrolyte solution to one or more samples, and the second nozzle is configured to apply one or more jets as second jets of a second electrolyte solution to one or more samples. In an example, the first nozzle is configured to apply the first jet of the first electrolyte solution to a first portion of a surface of the sample at a first volume rate, a first pressure, or a first velocity, and the second nozzle is configured to apply the jet of the second electrolyte solution to a second portion of the surface of the sample at a second volume rate, a second pressure, or a second velocity. In an example, the first volume rate, the first pressure, or the first velocity corresponds to a first electrochemical machining process, and wherein the second volume rate, the second pressure, or the second velocity corresponds to a second electrochemical machining process.

[0033] In some examples, the control circuit system is configured to monitor one or more system parameters; and adjust one or more of a first volume rate or a second volume rate, a first pressure or a second pressure, or a first speed or a second speed of application of the first electrolyte solution or the second electrolyte solution in response to the one or more system parameters.

[0034] In some examples, the system includes a first reservoir containing a first electrolyte solution and a second reservoir containing a second electrolyte solution.

[0035] In some examples, the first portion and the second portion overlap.

[0036] In some examples, the first portion and the second portion do not overlap.

[0037] In some examples, the first nozzle and the second nozzle operate simultaneously.

[0038] In some examples, the system includes an interface for receiving input or a barcode from a user.

[0039] In some examples, the control circuitry is further configured to automatically select a program or electrochemical processing program for one or more samples based on the input or barcode.

[0040] In some examples, the system includes one or more valves configured to receive an external gas flow input to flush the one or more electrolyte solutions from the first nozzle or the second nozzle.

[0041] In some disclosed examples, an electrochemical machining system is used to machine the surface of one or more samples. The system includes one or more reservoirs containing one or more electrolyte solutions; one or more nozzles configured to dispense the one or more electrolyte solutions in one or more jets toward the surface of the one or more samples; and a control circuit system for controlling one or more electrochemical machining processes. The control circuit system is configured to direct one or more jets of the one or more electrolyte solutions from a first reservoir in the one or more reservoirs toward a first portion of the surface of a first sample in the one or more samples; and to direct one or more jets of the one or more electrolyte solutions from a second reservoir in the one or more reservoirs toward a first portion of the surface of a second sample in the one or more samples; and to apply an electrical charge to the one or more nozzles and to the one or more samples, such that the nozzles and the samples define a first electrode and a second electrode of an electrolytic cell.

[0042] In some examples, the one or more electrolyte solutions include a first electrolyte solution contained in a first reservoir and a second electrolyte solution contained in a second reservoir.

[0043] In some examples, one of the first reservoir or the second reservoir includes a plurality of chambers to hold one or more of the first electrolyte solution, the second electrolyte solution, or other fluids.

[0044] In some examples, the system further includes a water reservoir for recirculating rinse water during the electrochemical machining process.

[0045] In some examples, the system further includes a valve configured to receive an external air flow input to flush the electrolyte solution from the nozzle.

[0046] In some examples, the system further includes an interface for receiving input or a barcode from a user. In an example, the control circuitry is further configured to receive input providing a size or processing cycle for one or more samples. In an example, the control circuitry is further configured to automatically select a program or electrochemical processing program for one or more samples based on the input or barcode. In an example, the control circuitry is further configured to receive a selection of a sample type or electrochemical processing program for the one or more samples and automatically select the first electrolyte or the second electrolyte based on the selected sample type or electrochemical processing program.

[0047] Figure 1An electrochemical machining system 100 is shown for machining a surface of a sample or workpiece 135. In particular, the system 100 enables a user to process one or more samples 135 in a single sample processing cycle (e.g., according to one or more processing programs), including multiple processing of multiple samples. In some examples, one or more nozzles 108 are connected to one or more tanks or reservoirs 120 via one or more conduits 122, wherein fluid flow from the reservoirs is controlled via one or more pumps (e.g., see Figure 2 and Figure 3 In an example, a controller or processor 114 coupled to the system 100 controls movement of the nozzle (eg, by controlling one or more motors, actuators, etc.) according to a selected program and / or cycle.

[0048] like Figure 1 As shown, there is a variety of ways to realize these features, such as by adopting imaging device 104 (for example, camera, visual capture system). One or more samples 135 (for example, in fixture 102) are arranged on stage 106, and the surface of wherein stage 106 has multiple coordinates (for example, on X-axis, Y-axis or Z-axis). In some examples, coordinate corresponds to the starting point, end point and / or one or more intermediate points of each sample and / or each sample processing cycle. Program can be selected (for example, selected by the user via user interface 110 and / or automatically identified via one or more inputs and / or triggers) to run on each sample, and is started by similar means. Once selected or identified, system 100 performs a given program on the area corresponding to the selected program of sample. In some examples, this system can send a notice (for example, via the display on alarm, user interface etc.) to the user, and the notice corresponds to one or more stages in the whole program, such as when a particular sample is carried out to a particular treatment, when the cycle of the selected program or a part of the cycle is finished and / or when the program itself is finished.

[0049] In an example, a sample 135 is loaded into a fixture 102 (e.g., a sample holder), which is then loaded into the system 100, such as onto the stage 106. The fixture 102, sample 135, and / or stage 106 may include one or more locating features (e.g., text, graphics, shapes, or geometric shapes, etc.) to ensure that the fixture is loaded into the system 100 at a predefined position, orientation, and / or Z-axis location relative to the stage 106, the imaging device 104, the nozzle 108, and / or some other system reference point.

[0050] The system 100 has the ability to scan the surface area (e.g., X-axis and Y-axis) of the sample to be processed in order to optimize the treatment process and avoid overlapping areas where the electrolyte is applied to the sample. This includes the ability of the system 100 to process larger areas on a given sample and to process larger samples in a shorter time. In an example, the system 100 can scan the sample surface area (e.g., by using an imaging device 104 and / or other sensors, such as laser raster scanning), and / or the user can input one or both of the X coordinate (e.g., the endpoint of the sample from left to right) and the Y coordinate (e.g., the endpoint of the sample from front to back). The control system 114 is configured to optimize the treatment cycle to process the entire area in a single run. This includes determining the position of the nozzle 108 relative to the sample (e.g., X-axis, Y-axis, or Z-axis), the volume of the electrolyte, the rate at which the electrolyte is applied, and / or the type of electrolyte delivered at different points along the sample surface area.

[0051] In some examples, the surface of the sample can be uneven. For example, the height or Z distance from the nozzle 108 and / or the stage 106 can vary over the area to be processed. However, ensuring the distance between the nozzle and the sample surface is important for consistency and quality processing of the sample. Therefore, the system 100 is configured to map the surface to identify when the sample is not level. This can be achieved by probing the surface with the nozzle 108, such as by contacting the surface at different points along the sample and associating the height measurement with its corresponding XY coordinates (e.g., known, determined by one or more sensors, and / or input by the user), thereby generating a map of the surface plane. Based on the height measurement, during the processing process, the system 100 controls the nozzle 108 to adjust its position relative to the sample on the Z axis as the nozzle passes over the sample surface.

[0052] In some examples, a user command is provided (e.g., via UI 110) to indicate the type of fixture being used, and the system 100 is able to identify the location of the sample (e.g., by accessing a list stored in a connected memory device). A specific program to be run on each sample is initiated in response to an input and / or trigger (e.g., user selection, in response to a timer, completion of a predetermined condition, etc.). The system 100 then executes the program on each sample and / or identified area and provides a notification to the user when the cycle is complete.

[0053] In some examples, an indicator 112 (e.g., a barcode, a label, a radio frequency device, etc.) on a fixture and / or sample is captured by the system 100 (e.g., via one or more sensors, an image capture device 104, etc.), thereby enabling the system 100 to automatically identify the fixture and / or sample without requiring additional user input. In some examples, the system 100 scans the indicator to identify the type of fixture and / or sample loaded on the stage 106, and the system 100 identifies the sample 135 by accessing a list of sample types associated with the various indicators (e.g., in a memory device). Based on the identification results and the specific program to be run on each sample, the system initiates a processing cycle.

[0054] In some examples, the image capture device 104 can provide the user with visual indications corresponding to characteristics 105 of the sample 135, the progress of the processing program, or other features associated with the system. For example, the image capture device 104 can be a laser scanner and / or a beam emitter to illuminate the starting point of the etching cycle and / or follow the movement of the nozzle and / or electrolyte solution during the cycle. This makes it easier for the user to position the nozzle at the start and end of the etching cycle and / or adjust the processing path taken during the program.

[0055] In an example, reference indicators are projected onto the sample and / or stage to indicate proper placement of the sample 135 on the stage 106. For example, optical light and / or laser light may be projected (e.g., from a projection device 109 juxtaposed with the nozzle 108) as a single point or spot of light, or as a boundary corresponding to an area of the sample 135 and / or a processing area, so that a user and / or a robotic system can place the sample 135 at a desired location on the stage 106. Once the sample 135 is positioned, another sensor (e.g., an imaging device 104) can verify placement on the stage 106.

[0056] While some examples describe using sensors (e.g., a single image capture device / camera) to collect information, some examples employ various numbers of various sensors. For example, one or more sensors may monitor environmental conditions (e.g., temperature, humidity, chemical content, etc.) and / or system parameters (e.g., voltage, current, power, etc.). Sensors may be located within system devices and / or external to the system. Further, sensors may be integrated with the system and / or communicate with each other via a separate remote system.

[0057] In some examples, the user interface 110 is interactive and operable to receive input and present information, such as configurable soft keys, information about the sample and / or the procedure, and images captured by the system 100. For example, the imaging device 104 is operable to capture an image 116 of the sample 135 and display the image 116 on the user interface 110. Based on the captured image data, the user and / or the system 100 can calibrate the system and / or imaging device 104, such as by setting a reference position (e.g., X-axis, Y-axis, or Z-axis) on the sample 135 and / or the stage 106 directly via a digital representation (e.g., 2D, 3D) of the sample in the image 116. In some examples, regardless of how the sample is loaded / arranged on the stage, or in the absence of a stage, the user can select points along the sample 135 and / or the stage 106 by viewing a scanned image corresponding to a nozzle starting position and subsequent positions via the user interface 110. Additionally or alternatively, the user may select a program for each sample via the user interface 110 (and / or the system may automatically select a program), and initiate the program and / or cycle.

[0058] like Figure 1 As shown, the sample 135 is processed to have a first etched region 105A and a second etched region 105B. In other words, the system 100 can control the nozzle 108 and / or the stage 106 to move relative to each other according to a program and / or cycle to process different samples and / or sample regions.

[0059] In some examples, system components (e.g., imaging device 104, nozzle 108 and / or nozzle movement system 109, user interface 110, stage 106 and / or stage movement device 111, etc.) communicate via wired and / or wireless connections with a controller or control circuitry 114. In some examples, controller 114 is operable to control one or more parameters of a program and / or cycle in response to input from a user (e.g., via user interface 110). For example, controller 114 can adjust the speed at which a program is executed, the position of one or more components, the flow rate of a fluid, the imaging of a sample, etc.

[0060] The controller 114 is further operable to cause the user interface 110 to display information regarding the execution of a program or cycle, alarms, and / or images 116. In some examples, the controller 114 is connected to a remote device (e.g., a tablet, a smartphone, a network, a remote computer, etc.), and information can be transmitted (via wired or wirelessly) to such a device.

[0061] Although some example systems are shown as employing a single nozzle, one or more of the disclosed systems and / or methods can be comprised of two or more nozzles. For multiple nozzles, during a cycle or program, the user can select a number of nozzles to employ, on which the sample or the system can determine the appropriate and / or optimal processing steps for each nozzle. The system can then independently control each nozzle to perform the cycle. For example, one or more actuators, motors, drive mechanisms, or gear mechanisms can control the movement of the nozzles to execute the selected cycle or program.

[0062] Figure 1A A stage 106 is shown with a plurality of samples 135A, 135B, and 135C freely loaded thereon. For example, a grid and / or other identifiable pattern 107 may be applied to the surface of the stage 106. The grid / pattern 107 may have one or more reference features to identify the location of the samples on the stage 106 and the relative positions of the individual samples. The imaging device 104 may capture positional data and information related to the identification of each sample. The controller 114 uses the positional and identification information to control the processing of the samples.

[0063] Figure 2 Another example electrochemical machining system 200 is shown that employs two or more nozzles 108A and 108B operating within an etching chamber 202. Each nozzle is connected to a tank or reservoir 120A or 120B via one or more conduits 122A, 122B, respectively. In some examples, pumps 124A, 124B control the flow of one or more fluids (e.g., electrolyte solutions) from the tanks 120A, 120B, which are controlled by the system 200 (e.g., via a controller and / or processor) according to a selected program and / or cycle.

[0064] In some examples, pump 124A and pump 124B control the flow of one or more fluids from a single tank (e.g., tank 120A or tank 120B) to one or both nozzles 108A and 108B. In examples where a single tank includes multiple chambers, multiple fluids can be drawn from different chambers. In some examples, pump 124A controls the flow of fluid from tank 120A, and pump 124A controls the flow of fluid from tank 120B separately and independently of pump 124A, such as Figure 2 shown.

[0065] In some examples, both nozzles 108A and 108B operate simultaneously, with nozzle 108A dispensing a first fluid 126A under pressure onto sample 135A, and nozzle 108B dispensing a second fluid 126B under pressure onto samples 135B and / or 135C. In some examples, each nozzle dispenses its respective fluid to one or more samples during a procedure, and the nozzles may apply each fluid at different times during a procedure, to different areas of one or more samples, and / or according to one or more application parameters (e.g., volumetric rate, pressure, velocity, duration, etc.).

[0066] The use of multiple reservoirs has the benefit of increasing the throughput of the system, allowing samples to be processed with different fluids (e.g., electrolytes) without having to change reservoirs and / or the system. Thus, programs utilizing multiple / different fluids can be loaded onto the system and executed as disclosed herein. Further, the user can place the machine in a location without a flush water connection, as water can be loaded into one of the reservoirs for use during a flush cycle within a program.

[0067] Figure 3 Another embodiment of an example system 200 employing multiple nozzles is shown. As shown, a single sample 135 is subjected to treatment from a first fluid 126A and a second fluid 126B. Such treatment can apply the fluids simultaneously, sequentially, and / or as alternating cycles.

[0068] Figure 4 Another system 300 is shown that employs multiple reservoirs 120A and 120B similar to system 200. However, in Figure 4 In the example of FIG, a single nozzle 108 capable of applying a first fluid 126A and / or a second fluid 126B is located within the housing 302 to process the sample 135. The system 300 employs multiple reservoirs that are configured to operate independently of one another. The reservoirs may include one or more of an electrolyte, water, and / or other suitable fluids. In some examples, such as in a closed system, a third reservoir, pump, and / or nozzle may be included to provide flushing water (without being incorporated into the plumbing system).

[0069] In some examples, one or more connectors or valves 310 are disposed along one or more conduits leading to the nozzle 108. The valves are configured to introduce fluids and / or gases (e.g., compressed air, ambient air, an inert gas, etc.) into the conduits to flush fluids from and / or through the conduits, thereby clearing fluids from the nozzle 108 and cleaning the sample 135 and / or the stage 106. For example, compressed air can be introduced at the valve 310 (e.g., via a hose, an additional conduit, etc.) during device calibration, during process setup, between applications of different fluids, and / or after a procedure or cycle is completed. In some examples, the operation of the air compressor is controlled by the control circuitry 114 to coordinate with the operation of other system components.

[0070] In an example, system 300 controls pump 124A to pump fluid 126A to nozzle 108 to process sample 105. During this cycle, fluid 126A flows into drain pipe 304 and is pumped to valve 306 via pump 124C. Valve 306 is controlled to selectively guide fluid to a suitable reservoir (e.g., reservoir 120A) to avoid cross contamination between fluids. Adopting multiple reservoirs in a single system, different fluids can be guided to corresponding reservoirs, provides a certain degree of flexibility, which is unavailable in a processing system that only comprises a pump and / or reservoir. In particular, in a system with a pump and / or reservoir, treating samples with different electrolytes will need to remove and replace reservoirs and / or replacement fluids before starting the next part of the cycle.

[0071] As shown, one or both of reservoir 120A and 120B can include one or more sensors 308A and 308B respectively.Sensor is configured to monitor one or more characteristics of fluid (for example, before, during and / or after circulation or program), and provides data corresponding to these characteristics to controller.As the enumeration of non-limiting examples, these characteristics can include one or more of the electrical conductivity, refractive index, viscosity, flow velocity or the charge of fluid.This data allows system to determine useful information about the quality or "healthiness" of fluid (for example, electrolyte).This can make one or more fluid characteristics be compared with a list, and this list associates fluid characteristics with sample type and / or treatment result.This will enable machine to quantitatively determine the quality of fluid, the remaining service life of fluid, and / or whether it is still suitable for use as a given process.

[0072] Advantageously, employing a sensor and determining the quality of the fluid allows the system to provide more consistent processing results. In particular, when the electrolyte fluid is outside a threshold range of quality values, damage to the sample due to poor etching and / or polishing, as well as rework time (of the damaged sample) and / or additional time spent in the process (to compensate for the use of low-quality fluid) can be avoided. The system is operable to provide a reminder to the user that the fluid should be changed before running a program with a low-quality fluid. In some examples, the sensor is further configured to measure other system parameters, such as the volume of fluid in the reservoir, and the temperature of the fluid or system, as a non-limiting example.

[0073] Figure 5 Shown Figure 4 Detailed view of an example reservoir 120A. As shown, reservoir 120A contains a quantity of fluid 126 that can be pumped out through conduit 122A and directed back into the reservoir via conduit 122C. Sensor 308A is coupled to reservoir 120A and configured to measure one or more characteristics of the fluid. Sensor 308A is connected to controller 114 via wired and / or wireless wiring 123. As shown, information about the quality of fluid 126 can be presented in user interface 116.

[0074] In some examples, the reservoir 120A can be marked with an indicator, a radio frequency identification (RFID) tag, and / or a bar code 112 that can be read by one or more sensors of the system (e.g., an image capture device 104, a radio frequency reader, a near field communication (NFC) reader, etc.) to automatically provide data regarding the type of reservoir, the type of fluid within the reservoir, and / or other information associated with the reservoir or fluid to the system controller 114. This data enables the controller to track the operation of one or more pumps to indicate which fluid is being used and to automatically select the appropriate or desired fluid for a given processing cycle.

[0075] In some examples, a user can input information related to the reservoir and / or fluid via the user interface 110. This allows changes to the system, such as manual overrides, and / or allows information to be entered into the system in the absence of a corresponding sensor and / or when there is no indicator on the reservoir. The system can include a sensor 128 (e.g., a contact sensor, a weight sensor, an optical sensor, a laser sensor, etc.) to detect the presence and / or absence of a reservoir. If the presence of a reservoir has been determined (e.g., based on data from the sensor 128), the user interface 110 can prompt the user to enter information about the type of electrolyte contained in the reservoir, and then record this information in the memory of the system controller 114.

[0076] although Figure 5The example of FIG. 1 shows a single reservoir 120A, but the concepts for identifying a reservoir and / or fluid, and / or monitoring fluid characteristics are equally applicable to systems employing one or more reservoirs and / or one or more nozzles.

[0077] Figure 6 An example fixture 130 is shown that is configured to support a plurality of samples 135. For example, the fixture 130 can include a plurality of apertures 134 to receive each sample 135. As shown, one or more indicators 112A can be disposed on the fixture 130, and / or one or more indicators 112B can be disposed on the sample 135. These indicators can be captured by the image detection device 104, and the captured data can be transmitted to the controller 114, where the data can be used to determine an appropriate program and / or cycle for the one or more samples 135, as disclosed herein. As shown, the fixture 130 can be mounted on a platform 132 that can facilitate movement (e.g., rotational movement) of the fixture 130 relative to the nozzle 108 and / or the imaging device 104.

[0078] Figure 7 Another system 400 similar to system 100 is shown employing a reservoir 420, shown with a single nozzle 408 capable of applying a fluid 426 within a housing 402 to process a sample 135. A conduit 422 receives the fluid 426 from the reservoir 420 with the assistance of a pump or valve 424. Although the example system 400 employs a single reservoir, in some examples, multiple reservoirs may be used, as disclosed herein.

[0079] like Figure 7 In the example provided in FIG, a filtration system 430 for filtering electrolyte fluid can be connected to a reservoir 420 via one or more conduits 436A and 436B. One or more pumps or valves 434A and 434B can draw fluid from the reservoir 420 into a filtration tank 440 and through a filter 442, and / or force the fluid back to the reservoir in preparation for another sample processing operation.

[0080] The filtering operation performed by the filtration system 430 and / or the reservoir can include forcing one or more of the electrolyte, water, and / or other suitable fluids (e.g., fluids contained in the reservoir 420, the conduit 422, the nozzle 408, the valve 424, etc.) through the conduits 436A and 436B, the valves 434A and 434B, and / or the filter 442. Such flushing can be performed between filtering operations using the first and second reservoirs and / or the first and second fluids (e.g., the first and second electrolytes). Thus, the filtering operation removes impurities from the fluid (e.g., the electrolyte) to provide a more consistent application of the electrolyte during processing.

[0081] Filter 442 may include a single filter and / or multiple filters, one or more of which may be removed from tank 440 for cleaning and / or replacement. Although filter 442 is shown as being disposed within tank 440, one or more filters may be disposed within conduits 436A and 436B and / or valves 434A and 434B.

[0082] In some examples, a drain and / or release valve 444 can be combined with the filter tank 440 to allow any remaining fluid to be drained after the filtering operation. In some examples, the filter system 430 can be flushed between filtering operations, such as with flush water, which can be released through the drain 444.

[0083] Filtration system 430 can operate independently of system 400 and / or be controlled by a common control system (e.g., control circuitry 114) to coordinate the operation of other system components. Although illustrated as providing a single reservoir, in some examples, filtration system 430 can be connected to multiple reservoirs to perform filtration operations on multiple reservoirs simultaneously and / or sequentially. In some examples, filtration system 430 is a closed system and can be attached to and / or removed from a given reservoir.

[0084] The foregoing description and accompanying drawings illustrate principles, preferred embodiments, and modes of operation. However, the present disclosure should not be construed as being limited to the specific embodiments discussed above. Those skilled in the art will appreciate additional variations of the embodiments discussed above.

[0085] Although the present method and / or system has been described with reference to certain embodiments, it will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the scope of the present method and / or system. In addition, many modifications may be made to adapt particular circumstances or materials to the teachings of the present disclosure without departing from the scope of the present disclosure. For example, the frames and / or components of the disclosed examples may be combined, divided, rearranged and / or otherwise modified. Therefore, the present method and / or system is not limited to the specific embodiments disclosed. In fact, the present method and / or system will include all embodiments that fall within the scope of the appended claims, both literally and under the doctrine of equivalents. Although the controller and method are described as being used in conjunction with a grinding / polishing and / or hardness / density testing system, these teachings may be similarly applied to other systems and operations.

[0086] All documents cited herein (including journal articles or abstracts, published or corresponding U.S. or foreign patent applications, issued or foreign patents, or any other documents) are each incorporated by reference in their entirety, including all data, tables, figures, and text presented in the cited documents.

Claims

1. An electrochemical machining system for machining a surface of a sample, the system comprising: a nozzle configured to dispense a jet of electrolyte solution toward a surface of the sample; as well as A control circuit system for controlling an electrochemical machining process, wherein the control circuit system is configured to: receiving input for the sample providing procedure; directing a jet of the electrolyte solution from the nozzle toward a portion of the surface of the sample based on the program; as well as An electrical charge is applied to the nozzle and an electrical charge is applied to the sample based on the program, such that the nozzle and the sample define a first electrode and a second electrode of an electrolytic cell.

2. The system of claim 1, further comprising an interface for receiving input or a barcode from a user.

3. The system of claim 2, wherein: The control circuitry is further configured to automatically select a program for the sample based on the input or the barcode.

4. The system of claim 1, wherein: The control circuitry is further configured to: monitoring one or more system parameters of the surface; and One or more of a volumetric rate, a pressure, or a speed at which the electrolyte solution is applied is adjusted in response to the one or more system parameters based on the program.

5. The system of claim 4, wherein: The one or more system parameters of the surface include voltage or current.

6. The system of claim 5, wherein: The control circuitry is further configured to measure the voltage or the current level; comparing the measured voltage or current to a list of threshold voltage or current values; and When the measured voltage or current is a threshold voltage or current value, the voltage or current level is adjusted.

7. The system of claim 1, wherein: The apparatus is configured to apply the electrolyte solution jet to a plurality of samples in a single cycle.

8. The system of claim 7, wherein: The control circuitry is further configured to: receiving a first electrochemical machining program and a second electrochemical machining program from said input; applying the electrolyte solution jet to a first region of the sample at a first volume rate, a first pressure, or a first velocity during a first electrochemical machining process; as well as During a second electrochemical machining procedure, the electrolyte solution jet is applied to a second region of the sample at a second volume rate, a second pressure, or a second velocity.

9. The system of claim 1, further comprising a sensor for monitoring one or more system parameters.

10. The system of claim 9, wherein: The sensor is a fluid sensor for monitoring one or more of the conductivity, refractive index, viscosity, flow rate or charge of the electrolyte solution.

11. The system of claim 9, wherein: The sensor is an optical system or a laser system configured to image or scan the sample.

12. The system of claim 9, wherein: The sensor is an optical or laser system configured to image or scan an indicator representing a barcode or other information of the sample.

13. The system of claim 1 , further comprising an optical system or a laser system configured to present a reference image on the sample or a stage on which the sample is placed to align the sample relative to the nozzle to a desired position on the stage.

14. The system of claim 1, further comprising a valve configured to receive an external air flow input to flush the electrolyte solution from the nozzle.

15. An electrochemical machining system for machining a surface of one or more samples, the system comprising: one or more nozzles configured to dispense one or more jets of one or more electrolyte solutions toward a surface of the one or more samples; as well as A control circuit system for controlling an electrochemical machining process, wherein the control circuit system is configured to: directing one or more jets of the one or more electrolyte solutions from a first nozzle of the one or more nozzles toward a first portion of a surface of the one or more samples; directing one or more jets of the one or more electrolyte solutions from a second nozzle of the one or more nozzles toward a second portion of the surface of the one or more samples; as well as An electrical charge is applied to the one or more nozzles and an electrical charge is applied to the one or more samples such that the nozzles and the samples define a first electrode and a second electrode of an electrolytic cell.

16. The system of claim 15, wherein: The control circuitry is further configured to control the first nozzle independently of the second nozzle.

17. The system of claim 15, wherein: The first nozzle is configured to apply the one or more jets to the one or more samples as first jets of a first electrolyte solution, and the second nozzle is configured to apply the one or more jets to the one or more samples as second jets of a second electrolyte solution.

18. The system of claim 17, wherein: The first nozzle is configured to apply a first jet of the first electrolyte solution to a first portion of the surface of the sample at a first volume rate, a first pressure, or a first velocity, and the second nozzle is configured to apply a jet of the second electrolyte solution to a second portion of the surface of the sample at a second volume rate, a second pressure, or a second velocity.

19. The system of claim 18, wherein: The first volume rate, the first pressure, or the first speed corresponds to a first electrochemical machining procedure.

20. The system of claim 18, wherein: The second volume rate, the second pressure, or the second speed corresponds to a second electrochemical machining procedure.

21. The system of claim 20, wherein: The control circuitry is further configured to: monitoring one or more system parameters; and One or more of a first volumetric rate or a second volumetric rate of the first electrolyte solution application or the second electrolyte solution application, the first pressure or the second pressure, or the first speed or the second speed is adjusted in response to the one or more system parameters.

22. The system of claim 17, further comprising a first reservoir containing the first electrolyte solution and a second reservoir containing the second electrolyte solution.

23. The system of claim 15, wherein: The first portion and the second portion overlap.

24. The system of claim 15, wherein: The first portion and the second portion do not overlap.

25. The system of claim 15, wherein: The first nozzle and the second nozzle operate simultaneously.

26. The system of claim 15, further comprising an interface for receiving input or a barcode from a user.

27. The system of claim 16, wherein: The control circuitry is further configured to automatically select a program or electrochemical processing program for the one or more samples based on the input or the barcode.

28. The system of claim 15, further comprising one or more valves configured to receive an external air flow input to flush the one or more electrolyte solutions from the first nozzle or the second nozzle.

29. An electrochemical machining system for machining a surface of one or more samples, the system comprising: one or more reservoirs containing one or more electrolyte solutions; one or more nozzles configured to dispense the one or more electrolyte solutions in one or more jets toward a surface of the one or more samples; as well as A control circuit system for controlling one or more electrochemical machining processes, the control circuit system being configured to: directing one or more jets of the one or more electrolyte solutions from a first reservoir of the one or more reservoirs toward a first portion of a surface of a first sample of the one or more samples; as well as directing one or more jets of the one or more electrolyte solutions from a second reservoir of the one or more reservoirs toward a first portion of a surface of a second sample of the one or more samples; as well as An electrical charge is applied to the one or more nozzles and an electrical charge is applied to the one or more samples such that the nozzles and the samples define a first electrode and a second electrode of an electrolytic cell.

30. The system of claim 29, wherein: The one or more electrolyte solutions include a first electrolyte solution contained in the first reservoir and a second electrolyte solution contained in the second reservoir.

31. The system of claim 30, wherein: The one or more nozzles include a first nozzle and a second nozzle, the first nozzle configured to draw the first electrolyte solution from the first reservoir and direct a first jet of the first electrolyte solution onto the surface.

32. The system of claim 31, wherein: The second nozzle is configured to draw the second electrolyte solution from the second reservoir and direct a second jet of the second electrolyte solution onto the surface.

33. The system of claim 30, wherein: One of the first reservoir or the second reservoir includes a plurality of chambers to contain one or more of a first electrolyte solution, a second electrolyte solution, or other fluids.

34. The system of claim 29, further comprising a water reservoir for recirculating rinse water during the electrochemical machining process.

35. The system of claim 29, further comprising a valve configured to receive an external air flow input to flush the electrolyte solution from the nozzle.

36. The system of claim 29, further comprising an interface for receiving input or a barcode from a user.

37. The system of claim 36, wherein: The control circuitry is further configured to receive an input providing a size or a processing cycle for the one or more samples.

38. The system of claim 37, wherein: The control circuitry is further configured to automatically select a program or electrochemical processing program for the one or more samples based on the input or the barcode.

39. The system of claim 37, wherein: The control circuitry is further configured to receive a selection of a sample type or an electrochemical processing procedure for the one or more samples and automatically select the first electrolyte or the second electrolyte based on the selected sample type or electrochemical processing procedure.

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