A high-purity electronic-grade thionyl fluoride purification system

Abstract

The invention discloses a high-purity electronic-grade thionyl fluoride purification system, comprising: a rectification, a condenser, a reboiler, an air inlet end, and also comprising: a filler mounting structure, wherein a top tray is provided on the inner side of a rectification tower, the filler mounting structure comprises a middle fitting locked on the top tray, a plurality of circular mounting cylinders are sleeved on the middle fitting, fillers are provided on the inner sides of the circular mounting cylinders, a recessed area is provided on the inner sides of the circular mounting cylinders, the recessed area and the inner wall of the rectification tower form a closed space, a clamping piece is provided on the inner side of the recessed area, and the clamping piece abuts against the inner wall of the rectification tower; a pressurized closed structure comprises an outward expansion rod movably mounted on the inner wall of the middle fitting, an outward push piece is movably provided on the inner side of the clamping piece, the outward push piece is movably matched with the middle fitting piece, and a sealing piece is connected to the upper end of the clamping piece. The invention enables thionyl fluoride to stably reach the effect of electronic-grade thionyl fluoride after purification.

Description

Technical Field

[0001] The invention relates to a thionyl fluoride preparation technology, in particular to a high-purity electronic-grade thionyl fluoride purification system. Background Art

[0002] With the continuous development of the semiconductor industry, high-end chip technology has made continuous breakthroughs, among which dry etching technology has been widely used. As the key etching electronic gas and cleaning electronic gas, higher demands have been put forward. Fluorine-based electronic gases have ushered in rapid development. Typical fluorine-based electronic gases currently include sulfur hexafluoride (SF6), carbon tetrafluoride (CF4) and fluorocarbon gases (such as CH3F, CH2F2, CHF3, C2F6, C3F8, etc.). Their GWP values ​​are relatively high and have a greater potential impact on the environment. The development of low-GWP etching and cleaning gases has become the key to the development of the semiconductor industry. While ensuring the etching and cleaning effects, thionyl fluoride (SOF2) is easier to dispose of and more environmentally friendly. Existing technologies usually use anhydrous hydrogen fluoride (AHF) and thionyl chloride (SOCl2) to synthesize thionyl fluoride.

[0003] Existing thionyl fluoride needs to be purified after synthesizing crude gas. During purification, a single distillation tower or multiple distillation towers in series are usually used to distill the gas. Fillers are installed in the tower body. The fillers will be regenerated directly in the tower after a period of use. The regeneration efficiency is low. Therefore, the existing technology sets the filler in a movable state, and the filler can be taken out of the equipment and regenerated in the external environment. Its regeneration effect is greatly improved, and the flushing burden of internal flushing can also be reduced. However, with this regeneration method, it is difficult for the detachable filler to fit perfectly with the tower body, resulting in gaps between the filler and the tower body, so that some gas will pass directly through the filler area along the side seam and leak through the filler, causing some untreated filler to flow directly into the tower bottom or tower top, so that a longer cycle is required to completely purify the product.

[0004] Therefore, this case aims to provide a high-purity electronic-grade thionyl fluoride purification system that can enable the packing layer to be quickly disassembled while ensuring the stable installation and edge sealing effect of the packing layer, so that the thionyl fluoride can stably reach the electronic grade thionyl fluoride effect after purification. Summary of the Invention

[0005] The present invention provides a high-purity electronic-grade thionyl fluoride purification system, which can effectively solve the above problems.

[0006] The present invention is achieved in that:

[0007] A high-purity electronic-grade thionyl fluoride purification system comprises: at least one distillation tower, wherein the upper end of the distillation tower is connected to a condenser, the lower end of the distillation tower is connected to a reboiler, and one side of the distillation tower is provided with an air inlet end, and further comprises:

[0008] A packing installation structure, wherein a top tray is provided on the inner side of the distillation tower, and the packing installation structure comprises a middle fitting locked on the top tray, wherein a plurality of circular mounting cylinders are sleeved on the middle fitting, and packing is provided on the inner side of the circular mounting cylinders, and a recessed area is provided on the inner side of the circular mounting cylinders, wherein the recessed area and the inner wall of the distillation tower form a closed space, and a clamping piece is provided on the inner side of the recessed area, and the clamping piece abuts against the inner wall of the distillation tower. After the middle fitting is fixed, the plurality of circular mounting cylinders are sequentially installed on the middle fitting;

[0009] The pressurized closed structure includes an outward expansion rod movably installed on the inner wall of the middle fitting, and an outward push piece movably provided on the inner side of the clamping piece. The outward push piece is movably matched with the middle fitting piece. When the outward expansion rod is embedded in the middle fitting piece, the outward push piece is pushed outward and the clamping piece is abutted against the inner wall of the distillation tower. The upper end of the clamping piece is connected to a sealing piece, and the sealing piece is tightly attached to the inner wall of the distillation tower as the clamping piece moves.

[0010] As a further improvement, the circular mounting tube is an I-shaped structure, the middle portion of the circular mounting tube is a hollow ring, the bottom and top surfaces of the circular mounting tube are both mesh plates, and the outer circumferential surface of the circular mounting tube is a closed surface.

[0011] As a further improvement, a mating screw seat is provided on the bottom surface of the inner side of the top tray, and the bottom of the middle mating piece is a lower screw section, which is threadedly connected in the mating screw seat.

[0012] As a further improvement, the middle mating part includes a connecting shaft that cooperates with the mating screw seat. The interior of the connecting shaft is hollow, and a number of through cavities for installing outward push parts are opened inside the connecting shaft. The bottom of the connecting shaft is connected to the lower screw section.

[0013] As a further improvement, the clamping member includes a guide clamping cylinder arranged in the recessed area, a clamping arm is movably mounted on the inner side of the guide clamping cylinder, and a clamping plate is connected to the side of the clamping arm away from the middle fitting.

[0014] As a further improvement, the clamping arm includes a straight arm portion that cooperates with the guide cartridge, the straight arm portion is movably connected to the push piece, the side of the straight arm portion away from the guide cartridge is connected to a fan-shaped seat, and the clamping plate is locked on the fan-shaped seat.

[0015] As a further improvement, the compression plate includes a mounting plate surface connected to the sector seat, and a plurality of compression pads are provided on one side of the mounting plate surface close to the inner wall of the distillation tower.

[0016] As a further improvement, the bottom of the outward expansion rod is screwed to the bottom inside the middle matching piece, and a plurality of outward swing plates are provided on the outside of the outward expansion rod, and the length of the outward swing plates gradually increases from top to bottom.

[0017] As a further improvement, the push-out member includes an push-out portion corresponding to the clamping member, and a guide slope is provided on the side of the push-out portion away from the clamping member. Different guide slopes have different slopes, and the guide slope can extend into the through cavity of the connecting shaft. The push-out portion and the clamping member are connected by a connecting spring.

[0018] As a further improvement, the sealing member includes an inner arc plate arranged on the outer periphery of the mounting plate surface, the top edge of the inner arc plate is connected to an abutment ring, and the abutment ring is attached to the inner side wall of the distillation tower.

[0019] The beneficial effects of the present invention are

[0020] The removable packing in the distillation tower in the prior art is difficult to perfectly match with the tower body, which leads to the easy appearance of gaps between the packing and the tower body, so that some gas will directly pass through the packing area along the edge gap and leak through the packing, resulting in some untreated packing directly flowing into the tower bottom or the tower top, making it difficult to purify the distillation product. Therefore, the present invention adopts a unified middle matching part through the packing installation structure set up, and all the circular mounting cylinders are uniformly installed to the middle matching part, which can reduce the inner diameter of the circular mounting cylinder, and then the circular mounting cylinder is fixed to the inner side of the distillation tower by means of a clamp, so that the circular mounting cylinder can be firmly fixed to the distillation tower while being detachable.

[0021] The circular mounting tube is filled with fillers, and the gas needs to pass through the fillers to better separate the substances. Therefore, the upper and lower ends of the circular mounting tube in the present invention are both in the state of mesh plates. In order to prevent the gas from leaking from the side, the outer peripheral surface of the circular mounting tube is set as a closed surface, thereby sealing the side area and laying the foundation for the formation of the recessed area.

[0022] The entire middle fitting can be taken out together with the circular mounting tube, so that all the circular mounting tubes can be quickly taken out together. Therefore, the present invention sets the bottom of the middle fitting as a lower screw section, so that the middle fitting can be matched with the matching screw seat, thereby allowing the middle fitting to form a temporarily fixed and detachable state.

[0023] The middle matching part not only serves as a hollow ring to limit and fix the circular mounting cylinder, but it is also a container. Therefore, the present invention hollows out the inner side of the connecting shaft so that it can cooperate with the outward expansion rod in the pressurized closed structure, thereby making the cooperation between the connecting shaft and the clamping part more practical.

[0024] In the process of limiting the circular mounting cylinder by the clamping member, it is necessary to set a limiting structure for the circular mounting cylinder in the recessed area. Therefore, the present invention sets a guide clamping cylinder in the recessed area, and sets a clamping arm and a clamping plate in the guide clamping cylinder. The circular mounting cylinder is supported by the clamping arm and the clamping plate, and then the circular mounting cylinder is limited to the required height, thereby forming an intermittent gas filtering effect, and the stabilization process is very stable.

[0025] When the tensioning arm cooperates with the inner wall of the distillation tower, it first drives the fan-shaped seat through the movement of the straight arm part, and then forms abutment effect with the fan-shaped seat and the inner wall of the distillation tower to allow the straight arm part to support the circular mounting tube, thereby forming a middle lifting effect. Even if a high oscillation effect is generated when high-pressure gas is introduced, no deviation will occur.

[0026] Although reducing the inner diameter of the circular mounting cylinder and setting a clamp can make the installation of the circular mounting cylinder stable, it is still difficult to avoid the gas in the outer circumference moving to the upper and lower ends without being filtered by the packing. Therefore, the present invention provides a pressurized closed structure based on the packing mounting structure, which not only makes the cooperation between the circular mounting cylinder and the distillation tower more stable, but also can seal the gap between the circular mounting cylinder and the distillation tower through the sealing member to prevent the gas from leaking from the outer edge of the circular mounting cylinder, so that the gas moved to the tower bottom and the tower top can meet the conditions better.

[0027] Since the circular mounting tube at the bottom is the first to come into contact with the gas, the gas pressure at this time is relatively high, and the pressure exerted on the circular mounting tube is relatively high, so the external mounting force exerted on the circular mounting tube at the bottom should also be the largest. Therefore, the present invention sets the inclinations of the guide slopes in the movable push-out member to different degrees, and sets the outer swing plates on the outer sides of the outer expansion rod to different lengths, so that after the outer expansion rod is matched with the middle matching member, the supporting force exerted on the circular mounting tube closer to the bottom can be more stable.

[0028] The closer the circular mounting tube is to the bottom, the easier it is for gas to flow out from the side. Therefore, the present invention connects the inner arc plate of the sealing member to the mounting plate surface, and the sealing member is pushed out through the mounting plate surface, thereby allowing the sealing member to get closer to the inner wall of the distillation tower, thereby improving the sealing effect with depth and avoiding gas leakage from the side. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only illustrate certain embodiments of the present invention and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0030] Figure 1 It is a front structural schematic diagram of the present invention.

[0031] Figure 2 It is a schematic diagram of the top structure of the present invention.

[0032] Figure 3 This invention Figure 2 Cross-sectional view at EE in .

[0033] Figure 4 It is a structural diagram of the cooperation between the middle matching piece and the outer expansion rod of the present invention.

[0034] Figure 5 It is a structural schematic diagram of the circular mounting cylinder of the present invention.

[0035] Figure 6 It is a schematic structural diagram of the cooperation between the clamping member and the push-out member of the present invention.

[0036] Figure 7 This invention Figure 6 Magnified view of area E in the middle.

[0037] In the picture:

[0038] Distillation tower 90, top tray 911, mating screw seat 9111, air inlet end 93, packing mounting structure 95, middle mating part 951, lower screw section 9511, connecting shaft 9512, circular mounting cylinder 952, hollow ring 9521, recessed area 953, clamping part 954, guide clamping cylinder 9541, clamping arm 9542, straight arm part 95421, fan-shaped seat 95422, clamping plate 9543, mounting plate surface 95431, clamping pad 95432, outward expansion rod 961, outward swing plate 9611, outward push piece 962, outward push part 9621, guide slope 9622, spring 9623, sealing part 963, inner arc plate 9631, abutment ring 9632. DETAILED DESCRIPTION

[0039] All embodiments of the present invention are within the scope of protection of the present invention. Therefore, the following detailed description of the embodiments of the present invention provided in the accompanying drawings is not intended to limit the scope of the claimed invention, but merely represents selected embodiments of the present invention. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without inventive effort are within the scope of protection of the present invention.

[0040] In the description of the present invention, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as referring to the purpose, technical solutions and advantages of the methods. To be clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without creative work indicate or imply relative importance or implicitly indicate the number of indicated technical features. Therefore, the features defined as "first" and "second" may explicitly or implicitly include one or more of the features. In the description of the present invention, the meaning of "multiple" is two or more, unless otherwise clearly and specifically defined.

[0041] Reference Figures 1 to 7 As shown, a high-purity electronic grade thionyl fluoride purification system includes: at least one distillation tower 90, the upper end of the distillation tower 90 is connected to a condenser, the lower end of the distillation tower 90 is connected to a reboiler, and one side of the distillation tower 90 is provided with an air inlet end 93, and further includes: a packing mounting structure 95, the inner side of the distillation tower 90 is provided with a top tray 911, the packing mounting structure 95 includes a middle fitting 951 locked on the top tray 911, the middle fitting 951 is sleeved with a plurality of circular mounting cylinders 952, the inner side of the circular mounting cylinder 952 is provided with a packing, the inner side of the circular mounting cylinder 952 is provided with a recessed area 953, the recessed area 953 and the inner wall of the distillation tower 90 form a closed space, the inner side of the recessed area 953 is provided with a A clamping member 954 is provided, and the clamping member 954 abuts against the inner wall of the distillation tower 90. After the middle fitting member 951 is fixed, several circular mounting cylinders 952 are installed on the middle fitting member 951 in sequence; the pressurized closed structure includes an outward expansion rod 961 movably installed on the inner wall of the middle fitting member 951, and an outward push member 962 is movably provided on the inner side of the clamping member 954, and the outward push member 962 is movably matched with the middle fitting member 951. When the outward expansion rod 961 is embedded in the middle fitting member 951, the outward push member 962 is pushed outward and the clamping member 954 abuts against the inner wall of the distillation tower 90. The upper end of the clamping member 954 is connected to a sealing member 963, and the sealing member 963 is tightly attached to the inner wall of the distillation tower 90 as the clamping member 954 moves.

[0042] During the purification process of thionyl fluoride, the gas to be purified is fed into the distillation tower 90 through the lateral gas inlet 93 , and the gas gradually passes through the circular mounting cylinder 952 , contacts the packing in the circular mounting cylinder 952 , and is then recycled at the condenser and reboiler.

[0043] The removable packing in the distillation tower 90 in the prior art is difficult to perfectly match with the tower body, which makes it easy for gaps to appear between the packing and the tower body, so that some gas will pass directly through the packing area along the edge seam and leak through the packing, causing some untreated packing to flow directly into the tower bottom or the top of the tower, making it difficult to purify the distillation product. Therefore, the present invention adopts a unified middle fitting 951 through the packing mounting structure 95 set up, and all the circular mounting cylinders 952 are uniformly installed on the middle fitting 951, which can reduce the inner diameter of the circular mounting cylinder 952, and then the circular mounting cylinder 952 is fixed to the inner side of the distillation tower 90 by the fixing method of the clamp 954, so that the circular mounting cylinder 952 can be firmly fixed to the distillation tower 90 while being detachable.

[0044] The circular mounting cylinder 952 is filled with fillers, and the gas needs to pass through the fillers in order to better separate the substances. Therefore, the circular mounting cylinder 952 in the present invention is an I-shaped structure, and the middle part of the circular mounting cylinder 952 is a hollow ring 9521. The bottom and top surfaces of the circular mounting cylinder 952 are both mesh plates, and the outer peripheral surfaces of the circular mounting cylinder 952 are both closed surfaces. The upper and lower ends of the circular mounting cylinder 952 are both in the state of mesh plates. In order to prevent the gas from leaking from the side position, the outer peripheral surface of the circular mounting cylinder 952 is set to a closed surface, thereby closing the side area, laying the foundation for the formation of the recessed area 953.

[0045] The entire middle fitting part 951 can be taken out together with the circular mounting tube 952, so that all the circular mounting tubes 952 can be quickly taken out together. Therefore, the bottom surface of the inner side of the top tray 911 of this embodiment is provided with a mating screw seat 9111, and the bottom of the middle fitting part 951 is a lower screw section 9511, and the lower screw section 9511 is threadedly connected in the mating screw seat 9111. The bottom of the middle fitting part 951 is set as the lower screw section 9511, so that the middle fitting part 951 can be matched with the mating screw seat 9111, and the middle fitting part 951 can be temporarily fixed and detachable.

[0046] The middle fitting part 951 not only serves as a hollow ring 9521 for limiting and fixing the circular mounting cylinder 952, but is also a container. Therefore, the middle fitting part 951 of this embodiment includes a connecting shaft 9512 that cooperates with the mating screw seat 9111. The interior of the connecting shaft 9512 is hollow, and the interior of the connecting shaft 9512 is provided with a number of through cavities for installing the outward push piece 962. The bottom of the connecting shaft 9512 is connected to the lower screw section 9511. By hollowing out the inner side of the connecting shaft 9512, it can cooperate with the outward expansion rod 961 in the pressurized closed structure, thereby making the cooperation between the connecting shaft 9512 and the clamping part 954 more practical.

[0047] In the process of the clamping member 954 limiting the circular mounting cylinder 952, it is necessary to set a limiting structure for the circular mounting cylinder 952 in the recessed area 953. Therefore, the clamping member 954 of this embodiment includes a guide clamping cylinder 9541 set in the recessed area 953, and a clamping arm 9542 is movably installed on the inner side of the guide clamping cylinder 9541. The clamping arm 9542 is connected to a clamping plate 9543 on the side away from the middle fitting 951. By setting the guide clamping cylinder 9541 in the recessed area 953 and setting the clamping arm 9542 and the clamping plate 9543 in the guide clamping cylinder 9541, the circular mounting cylinder 952 is supported by the clamping arm 9542 and the clamping plate 9543, and then the circular mounting cylinder 952 is limited to the required height, thereby forming an intermittent gas filtration effect, and the stabilization process is very stable.

[0048] When the tensioning arm 9542 cooperates with the inner wall of the distillation tower 90, the tensioning arm 9542 includes a straight arm portion 95421 that cooperates with the guide cartridge 9541. The straight arm portion 95421 is movably connected to the push piece 962. The side of the straight arm portion 95421 away from the guide cartridge 9541 is connected to a fan-shaped seat 95422. The clamping plate 9543 is locked on the fan-shaped seat 95422. First, the fan-shaped seat 95422 is driven by the movement of the straight arm portion 95421, and then the fan-shaped seat 95422 and the inner wall of the distillation tower 90 form abutment effect to allow the straight arm portion 95421 to support the circular mounting cylinder 952, thereby forming a middle lifting effect. Even if a high oscillation effect is formed when high-pressure gas is introduced, no deviation will occur.

[0049] In order to allow the clamping plate 9543 to better fit with the inner wall of the distillation tower 90, the clamping plate 9543 includes a mounting plate surface 95431 connected to the fan-shaped seat 95422, and a plurality of clamping pads 95432 are provided on the side of the mounting plate surface 95431 close to the inner wall of the distillation tower 90. The degree of deformation of the clamping pad 95432 is proportional to the degree of force applied to the clamping member 954, and when the degree of deformation of the clamping pad 95432 is large, it indicates that the circular mounting cylinder 952 is more stable.

[0050] Although reducing the inner diameter of the circular mounting cylinder 952 and providing the clamping member 954 can make the installation of the circular mounting cylinder 952 stable, it is still difficult to prevent the gas in the outer circumference from moving to the upper and lower ends without being filtered by the packing. Therefore, the present invention provides a pressurized closed structure based on the packing mounting structure 95, which not only makes the cooperation between the circular mounting cylinder 952 and the distillation tower 90 more stable, but also can seal the gap between the circular mounting cylinder 952 and the distillation tower 90 through the sealing member 963, thereby preventing the gas from leaking from the outer edge of the circular mounting cylinder 952, so that the gas moved to the bottom of the tower and the top of the tower can meet the conditions better.

[0051] Since the circular mounting cylinder 952 at the bottom is the first to come into contact with the gas, the gas pressure at this time is relatively large, and the pressure exerted on the circular mounting cylinder 952 is relatively large, so the external mounting force exerted on the circular mounting cylinder 952 at the bottom should also be the largest. Therefore, the bottom of the outward expansion rod 961 of this embodiment is screwed to the bottom inside the middle matching piece 951, and a plurality of outward swing plates 9611 are provided on the outside of the outward expansion rod 961. The length of the outward swing plates 9611 gradually increases from top to bottom, and the outward push piece 962 includes an outward push portion 9621 corresponding to the clamping piece 954. The outward push portion 9621 is provided with a guide slope 9622 on the side away from the clamping piece 954. Different The inclination of the guiding slope 9622 is different. The guiding slope 9622 can extend into the through cavity of the connecting shaft 9512. The outward pushing portion 9621 is connected to the clamping member 954 by a connecting spring 9623. The inclination of the guiding slope 9622 in the movable outward pushing member 962 is set to be different, and the outer swing plate 9611 on the outer side of the outward expansion rod 961 is set to be of different lengths, so that after the outward expansion rod 961 is matched with the middle matching member 951, the support force of the circular mounting cylinder 952 closer to the bottom can be more stable, and the setting of the connecting spring 9623 can retract the outward pushing portion 9621 into the guide clamping cylinder 9541 at an appropriate time, so that the middle matching member 951 can be removed.

[0052] The outer expansion rod 961 and the middle matching piece 951 are also movable and disassembled, thus forming a two-stage disassembly, which makes the replacement of the filler easy without affecting the overall use.

[0053] The closer the circular mounting cylinder 952 is to the bottom, the easier it is for the gas to flow out from the side. Therefore, the sealing member 963 of this embodiment includes an inner arc plate 9631 arranged on the outer periphery of the mounting plate surface 95431. The top edge of the inner arc plate 9631 is connected to an abutment ring 9632. The abutment ring 9632 fits against the inner wall of the distillation tower 90, connecting the inner arc plate 9631 of the sealing member 963 to the mounting plate surface 95431. The sealing member 963 is pushed out through the mounting plate surface 95431, allowing it to get closer to the inner wall of the distillation tower 90, thereby improving the sealing effect with depth, thereby avoiding gas leakage from the side.

[0054] The foregoing description is merely a preferred embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that various modifications and variations are possible. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention are intended to be within the scope of protection of the present invention.

Claims

1. A high-purity electronic grade thionyl fluoride purification system, characterized in that: include: At least one distillation tower (90), wherein the upper end of the distillation tower (90) is connected to a condenser, the lower end of the distillation tower (90) is connected to a reboiler, and one side of the distillation tower (90) is provided with an air inlet end (93), and further comprising: A packing installation structure (95), wherein a top tray (911) is provided on the inner side of the distillation tower (90), and the packing installation structure (95) comprises a middle fitting (951) locked on the top tray (911), a plurality of circular installation cylinders (952) are sleeved on the middle fitting (951), a packing is provided on the inner side of the circular installation cylinder (952), a recessed area (953) is provided on the inner side of the circular installation cylinder (952), and the recessed area (953) and the inner wall of the distillation tower (90) form a closed space, a clamping piece (954) is provided on the inner side of the recessed area (953), and the clamping piece (954) abuts against the inner wall of the distillation tower (90), and after the middle fitting (951) is fixed, the plurality of circular installation cylinders (952) are sequentially installed on the middle fitting (951); The pressurized closed structure includes an outward expansion rod (961) movably mounted on the inner wall of a middle fitting (951); an outward push member (962) is movably provided on the inner side of the clamping member (954); the outward push member (962) is movably matched with the middle fitting (951); when the outward expansion rod (961) is embedded in the middle fitting (951), the outward push member (962) is pushed outward to make the clamping member (954) abut against the inner wall of the distillation tower (90); the upper end of the clamping member (954) is connected to a sealing member (963); the sealing member (963) is tightly attached to the inner wall of the distillation tower (90) as the clamping member (954) moves.

2. A high-purity electronic grade thionyl fluoride purification system according to claim 1, characterized in that, The circular mounting tube (952) is an I-shaped structure, the middle portion of the circular mounting tube (952) is a hollow ring (9521), the bottom surface and the top surface of the circular mounting tube (952) are both mesh plates, and the outer peripheral surface of the circular mounting tube (952) is a closed surface.

3. A high-purity electronic grade thionyl fluoride purification system according to claim 1, characterized in that, A mating screw seat (9111) is provided on the inner bottom surface of the top tray (911), and the bottom of the middle mating piece (951) is a lower screw section (9511), and the lower screw section (9511) is threadedly connected to the mating screw seat (9111).

4. A high-purity electronic grade thionyl fluoride purification system according to claim 1, characterized in that, The middle fitting part (951) includes a connecting shaft (9512) that cooperates with the matching screw seat (9111). The interior of the connecting shaft (9512) is hollow, and a plurality of through cavities for installing the outward push piece (962) are opened inside the connecting shaft (9512). The bottom of the connecting shaft (9512) is connected to the lower screw section (9511).

5. A high-purity electronic grade thionyl fluoride purification system according to claim 1, characterized in that, The clamping member (954) includes a guide clamping cylinder (9541) arranged in the recessed area (953), a clamping arm (9542) is movably mounted on the inner side of the guide clamping cylinder (9541), and a clamping plate (9543) is connected to the side of the clamping arm (9542) away from the middle fitting member (951).

6. A high-purity electronic grade thionyl fluoride purification system according to claim 5, characterized in that: The clamping arm (9542) includes a straight arm portion (95421) that cooperates with the guide clamp (9541), the straight arm portion (95421) is movably connected to the push-out member (962), and the side of the straight arm portion (95421) away from the guide clamp (9541) is connected to a fan-shaped seat (95422), and the clamping plate (9543) is locked on the fan-shaped seat (95422).

7. A high-purity electronic grade thionyl fluoride purification system according to claim 6, characterized in that: The compression plate (9543) includes a mounting plate surface (95431) connected to the fan-shaped seat (95422), and a plurality of compression pads (95432) are provided on one side of the mounting plate surface (95431) close to the inner wall of the distillation tower (90).

8. A high-purity electronic grade thionyl fluoride purification system according to claim 1, characterized in that: The bottom of the outward expansion rod (961) is screwed to the bottom of the interior of the middle matching component (951), and a plurality of outward swing plates (9611) are provided on the outside of the outward expansion rod (961), and the length of the outward swing plates (9611) gradually increases from top to bottom.

9. A high-purity electronic grade thionyl fluoride purification system according to claim 1, characterized in that: The push-out member (962) includes an push-out portion (9621) corresponding to the clamping member (954), and a guide slope (9622) is provided on the side of the push-out portion (9621) away from the clamping member (954). Different guide slopes (9622) have different slopes. The guide slope (9622) can extend into the through cavity of the connecting shaft (9512). The push-out portion (9621) and the clamping member (954) are connected by a connecting spring (9623).

10. A high-purity electronic grade thionyl fluoride purification system according to claim 7, characterized in that: The sealing member (963) includes an inner arc plate (9631) arranged on the outer periphery of the mounting plate surface (95431), and the top edge of the inner arc plate (9631) is connected to an abutment ring (9632), and the abutment ring (9632) is attached to the inner side wall of the distillation tower (90).

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