Rotor module of linear motor and cooling control method thereof

Abstract

The invention discloses a rotor module of a linear motor and a cooling control method thereof, the module comprises a shell and a glue filling rotor arranged in the shell, a cooling flow channel is arranged in the glue filling rotor, a heat dissipation cavity is formed between the shell and the glue filling rotor, the shell is provided with an air inlet, an air outlet, a liquid inlet and a liquid outlet, and the air inlet is communicated with the air outlet. The air inlet and the air outlet are correspondingly communicated with the heat dissipation cavity, and the liquid inlet and the liquid outlet are correspondingly connected with the cooling flow channel. The rotor is cooled through air cooling and liquid cooling, the cooling effect is good, and the temperature of the motor can be effectively reduced.

Description

Technical Field

[0001] The present invention relates to the technical field of motors, and in particular to a mover module of a linear motor and a cooling control method thereof. Background Art

[0002] The linear motor's mover consists of a yoke and a coil mounted on it. In the chip manufacturing industry, equipment has high requirements for temperature stability, requiring linear motors to maintain low temperatures during operation. However, some designs require small motors due to space limitations. To maintain output, the motor current needs to be increased. This significantly increases the motor's temperature, requiring heat dissipation to mitigate the effects of temperature. Existing linear motors are generally naturally cooled. When the motor maintains high-frequency motion, it generates a significant amount of heat, causing the motor and mounting surface temperatures to rise excessively, impacting the motor's performance. Summary of the Invention

[0003] The technical problem to be solved by the embodiments of the present invention is to provide a mover module of a linear motor and a cooling control method thereof to improve the heat dissipation effect.

[0004] In order to solve the above technical problems, an embodiment of the present invention proposes a mover module of a linear motor, including a shell and a glue-filled mover arranged in the shell, a cooling channel is provided in the glue-filled mover, a heat dissipation cavity is formed between the shell and the glue-filled mover, and an air inlet, an air outlet, a liquid inlet and a liquid outlet are provided on the shell, the air inlet and the air outlet are correspondingly connected to the heat dissipation cavity, and the liquid inlet and the liquid outlet are correspondingly connected to the cooling channel.

[0005] Furthermore, a plurality of cooling tubes are provided in the glue-filled mover, and a cooling fluid is provided in the cooling tubes. The cooling tubes include a condensation section and an evaporation section, and a capillary mechanism is provided between the condensation section and the evaporation section. The condensation section is arranged adjacent to the cooling channel, and the evaporation section is arranged in the middle of the glue-filled mover.

[0006] Furthermore, the condensation section is arranged at a higher level than the evaporation section.

[0007] Furthermore, the glue-filled mover consists of a mover body and a glue-filled layer covering the mover body. The evaporation section of the cooling pipe is located on the mover body, and the cooling channel is arranged along the outer side of the mover body.

[0008] Furthermore, a plurality of heat-conducting fixing parts are integrated in the glue-filled mover, and the cooling channel and the cooling pipe are fixed by the heat-conducting fixing parts. Heat is conducted between the cooling channel and the condensing section, and between the evaporating section and the mover body respectively through the heat-conducting fixing parts.

[0009] Furthermore, the cooling channel is U-shaped, and the liquid inlet and the liquid outlet are located on the same side of the shell.

[0010] Furthermore, the cooling pipe is L-shaped or Z-shaped.

[0011] Furthermore, the cooling pipes are divided into multiple pairs, and each pair of cooling pipes is arranged in a U-shape.

[0012] Furthermore, a plurality of heat-insulating pads are provided in the heat dissipation cavity.

[0013] Accordingly, an embodiment of the present invention further provides a cooling control method for a mover module of a linear motor, comprising: The temperature of the glue-filled actuator is detected in real time. When the temperature is ≥ the preset temperature, air cooling and liquid cooling are used simultaneously for heat dissipation; when the temperature is < the preset temperature, only air cooling or liquid cooling is used for heat dissipation.

[0014] The beneficial effects of the present invention are as follows: the present invention adopts air cooling and liquid cooling to dissipate heat from the mover, has good heat dissipation effect, and can effectively reduce the temperature of the motor. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1 It is a three-dimensional structural diagram of the mover module of the linear motor according to an embodiment of the present invention from one angle.

[0016] Figure 2 It is a three-dimensional structural diagram of the mover module of the linear motor according to an embodiment of the present invention from another angle.

[0017] Figure 3 It is a three-dimensional structural diagram of the glue-filled mover according to an embodiment of the present invention.

[0018] Figure 4 It is a diagram of the internal structure of the glue-filled mover according to an embodiment of the present invention.

[0019] Figure 5 It is a three-dimensional structural diagram of a cooling pipe according to an embodiment of the present invention.

[0020] Figure 6 This is a front view of the mover module of the linear motor according to an embodiment of the present invention.

[0021] Figure 7 This Figure 6 Cross-sectional view at the middle BB.

[0022] Explanation of Figure Numbers Housing 10 , heat dissipation cavity 11 , air inlet 12 , air outlet 13 , liquid inlet 14 , liquid outlet 15 , thermal insulation pad 16 , glue-filled mover 20 , cooling channel 21 , heat-conducting fixing part 22 , mover body 23 , cooling pipe 30 , condensation section 31 , evaporation section 32 . DETAILED DESCRIPTION

[0023] It should be noted that, unless there is a conflict, the embodiments in this application and the features in the embodiments can be combined with each other. The present invention is further described in detail below with reference to the drawings and specific embodiments.

[0024] In the embodiments of the present invention, if there are directional indications (such as up, down, left, right, front, back, etc.), they are only used to explain the relative position relationship and movement status of the various components under a specific posture (as shown in the accompanying drawings). If the specific posture changes, the directional indication will also change accordingly.

[0025] In addition, the terms "first," "second," and so on, used in this disclosure are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features being referred to. Therefore, features specified as "first" or "second" may explicitly or implicitly include at least one of these features.

[0026] Please refer to Figures 1 to 7 The mover module of the linear motor according to the embodiment of the present invention includes a housing 10 and a glue-filled mover 20.

[0027] The shell 10 is arranged outside the glue-filled mover 20. A cooling channel 21 is provided in the glue-filled mover 20, and the cooling channel 21 is connected to an external liquid cooling circulation system. A heat dissipation cavity 11 is formed between the shell 10 and the glue-filled mover 20, that is, the top of the glue-filled mover 20 and the inner wall of the shell 10 are separated by a preset distance, forming a closed heat dissipation cavity 11. The shell 10 is provided with an air inlet 12, an air outlet 13, a liquid inlet 14 and a liquid outlet 15. The air inlet 12 and the air outlet 13 are correspondingly connected to the two sides (opposite sides) of the heat dissipation cavity 11, and the liquid inlet 14 and the liquid outlet 15 are respectively connected to the two ends of the cooling channel 21. Preferably, the top surface of the shell 10 is the mounting surface, that is, the load is mounted on the top of the shell 10. Since the thermal conductivity of air is very small, it can effectively reduce the heat transferred from the motor (i.e., the mover module) to the mounting surface, thereby lowering the temperature of the mounting surface and preventing the heat generated by the mover module from affecting the load; at the same time, since a closed space is formed in the middle, cooling gas is passed into the closed space, which can take away the heat of the mover module while further lowering the temperature of the mounting surface.

[0028] As an embodiment, a plurality of thermal insulation pads 16 are provided in the heat dissipation cavity 11, and the thermal insulation pads 16 divide the heat dissipation cavity 11 into a plurality of air-cooling channels. That is, the thermal insulation pad 16 is provided between the outer shell 10 and the glue-filled stator. The thermal insulation pad 16 is processed with thermal insulation material to reduce the temperature of the mover being transferred to the mounting surface. In specific implementation, a step can be provided on the outer shell 10 to limit the placement depth of the glue-filled mover 20 in the outer shell 10. At the same time, when the outer shell 10 is installed, a sealant is applied on the step to ensure that the internal air cooling does not leak. A mounting hole is provided on the outer shell 10, and a sink is provided on the inner side of the mounting hole. When installing the thermal insulation pad 16, a sealant is applied between the thermal insulation pad 16 and the outer shell 10 to ensure that the internal air cooling does not leak from the thermal insulation pad 16.

[0029] As an embodiment, a plurality of cooling tubes 30 are provided in the glue-filled mover 20, and a cooling fluid is provided in the cooling tubes 30. The cooling tubes 30 include a condensation section 31 and an evaporation section 32. A capillary mechanism is provided between the condensation section 31 and the evaporation section 32, wherein the condensation section 31 is provided adjacent to the cooling channel 21, and the evaporation section 32 is provided in the middle of the glue-filled mover 20. The glue-filled mover 20 is composed of a mover body 23 (the mover body 23 is composed of a yoke and a coil provided on the yoke) and a glue layer covering the outside of the mover body 23. The evaporation section 32 of the cooling tube 30 is located on the mover body 23. Preferably, the evaporation section 32 is provided between the air avoidance grooves of the yoke, so that the structure of the present invention can be more compact and the overall height can be lower. The cooling channel 21 is provided along the outside of the mover body 23, preferably at the upper outer edge of the mover body 23 (the top of the cooling channel 21 is slightly lower than the top of the mover body 23). The cooling channel 21 of the present invention is arranged on the side of the mover body 23 to separate the housing 10 and the mover body 23 , which can effectively reduce the temperature of the mover body 23 and transfer it to the housing 10 , further reducing the temperature of the housing 10 .

[0030] During specific implementation, the outside of the cooling tube 30 is coated with thermal grease, and the inside contains a cooling fluid. When exposed to high temperature, the fluid will absorb heat and then vaporize. The steam will flow from the evaporation section 32 to the condensation section 31, cool and condense into liquid in the condensation section 31, and then the liquid will return from the condensation section 31 of the cooling tube 30 to the evaporation section 32 through capillary action to cool the mover and repeat the cooling cycle. The heat in the condensation section 31 will be exchanged with the fluid in the adjacent cooling channel 21, accelerating the cooling of the condensation section 31 and ensuring that the temperature of the condensation section 31 is lower than that of the evaporation section 32.

[0031] As an embodiment, the condensation section 31 is arranged at a higher level than the evaporation section 32, that is, the evaporation section 32 is arranged horizontally (horizontally), and the condensation section 31 is tilted at a certain angle. Under the action of gravity, the cooling fluid in the cooling pipe 30 can be accelerated to reflux.

[0032] As an embodiment, several thermally conductive fixtures 22 are integrated into the glue-filled mover 20. The cooling tubes 30 and cooling channels 21 are fixed via the thermally conductive fixtures 22, facilitating glue filling and heat conduction, and facilitating the preparation of the glue-filled mover 20. The thermally conductive fixtures 22 are made of a highly thermally conductive metal, such as copper or aluminum. Heat is conducted between the cooling channel 21 and the condensing section 31, and between the evaporating section 32 and the mover body 23 (yoke), respectively, via the thermally conductive fixtures 22. Preferably, the thermally conductive fixtures 22 are coated with thermally conductive silicone grease, that is, thermally conductive silicone grease is filled between the cooling channel 21, cooling tubes 30, the mover body 23, and the corresponding thermally conductive fixtures 22.

[0033] As an embodiment, the cooling channel 21 is U-shaped, and the liquid inlet 14 and the liquid outlet 15 are located on the same side of the housing 10. The cooling channel 21 has a simple structure, ensures the flow rate of the coolant, keeps the flow rate fast, and improves the cooling effect.

[0034] As an embodiment, the cooling pipe 30 is L-shaped or Z-shaped. The cooling pipe 30 is divided into multiple pairs, and each pair of cooling pipes 30 is arranged in a square shape. Figure 4 and Figure 5 As shown, the short side of the L-shape is the condensation section 31, and the long side is the evaporation section 32, that is, the condensation section 31 of the cooling tube 30 is tilted, and the end of the condensation section 31 is slightly higher than the evaporation section 32. When the cooling tube 30 is Z-shaped, the middle part is the evaporation section 32, and the two sides are the condensation sections 31, that is, Figure 4 In the embodiment, the evaporation sections 32 of the adjacent cooling tubes 30 are integrated together.

[0035] The cooling control method of the mover module of the linear motor according to the embodiment of the present invention includes: The temperature of the glue-filled mover 20 is detected in real time. When the temperature is ≥ the preset temperature, air cooling and liquid cooling are used simultaneously for heat dissipation; when the temperature is < the preset temperature, only air cooling or liquid cooling is used for heat dissipation.

[0036] The present invention can select a mixed cooling method of liquid cooling and air cooling, or select one of the cooling methods according to the demand. The present invention is suitable for industries such as semiconductors that have high requirements for temperature control.

[0037] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A linear motor mover module, comprising a housing and a glue-filled mover disposed in the housing, characterized in that: A cooling channel is provided in the glue-filled mover, and a heat dissipation cavity is formed between the shell and the glue-filled mover. An air inlet, an air outlet, a liquid inlet and a liquid outlet are provided on the shell. The air inlet and the air outlet are connected to the heat dissipation cavity respectively, and the liquid inlet and the liquid outlet are connected to the cooling channel respectively.

2. The linear motor mover module according to claim 1, wherein: Several cooling tubes are provided in the glue-filled mover, and cooling fluid is provided in the cooling tubes. The cooling tubes include a condensation section and an evaporation section. A capillary mechanism is provided between the condensation section and the evaporation section. The condensation section is arranged adjacent to the cooling channel, and the evaporation section is arranged in the middle of the glue-filled mover.

3. The linear motor mover module according to claim 1, wherein: The condensation section level is higher than the evaporation section level.

4. The linear motor mover module according to claim 2, wherein: The glue-filled mover consists of a mover body and a glue-filled layer covering the mover body. The evaporation section of the cooling pipe is located on the mover body, and the cooling flow channel is arranged along the outer side of the mover body.

5. The linear motor mover module according to claim 4, characterized in that: Several heat-conducting fixing parts are integrated in the glue-filled mover. The cooling channel and cooling pipe are fixed by the heat-conducting fixing parts. Heat is conducted between the cooling channel and the condensing section, and between the evaporating section and the mover body through the heat-conducting fixing parts.

6. The linear motor mover module according to claim 2, wherein: The cooling channel is U-shaped, and the liquid inlet and outlet are located on the same side of the shell.

7. The linear motor mover module according to claim 2, wherein: The cooling pipe is L-shaped or Z-shaped.

8. The mover module of the linear motor according to claim 7, characterized in that: The cooling pipes are divided into multiple pairs, and each pair of cooling pipes is arranged in a U-shape.

9. The linear motor mover module according to claim 1, wherein: Several heat-insulating pads are arranged in the heat dissipation cavity.

10. A cooling control method for a mover module of a linear motor according to any one of claims 1 to 9, characterized in that: include: The temperature of the glue-filled actuator is detected in real time. When the temperature is ≥ the preset temperature, air cooling and liquid cooling are used simultaneously for heat dissipation; when the temperature is < the preset temperature, only air cooling or liquid cooling is used for heat dissipation.

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