Imaging system with moving radiation source and corresponding operating method
By using multiple exposure combinations of electron sources and targets in the X-ray imaging system, combined with the sensing elements of the X-ray detector, the problem of insufficient image resolution and quality in the imaging system is solved, and higher imaging accuracy and detail capture effect are achieved.
Patent Information
- Application Number
- CN202380090346.2
- Authority / Receiving Office
- CN · China
- Patent Type
- Applications(China)
- Current Assignee / Owner
- Filing Date
- 2023-09-21
- Publication Date
- 2025-08-12
AI Technical Summary
Existing X-ray imaging systems are difficult to efficiently capture the detailed information of objects during imaging, especially in the interaction between the object and the X-ray detector, resulting in insufficient image resolution and quality.
Using an electron source configured to send an electron beam and a target with a target, the sensing elements of the X-ray detector are combined with the signal of the object point and a combined signal is generated by a two-dimensional or one-dimensional array arrangement, and the imaging quality is improved by combining multiple exposures and combinations of different targets.
Through the combination of multiple exposures and different targets, the resolution and image quality of the imaging system are significantly improved, especially in the capture of object surface details, achieving higher imaging accuracy.
Smart Images
Figure CN120476305A_ABST
Abstract
Description
Background Art
[0001] An X-ray imaging system may include an X-ray source and an X-ray detector. An object to be imaged by the imaging system may be located between the X-ray source and the X-ray detector. The X-ray source may emit X-rays, and the X-ray detector may capture an image of the object based on the interaction between the X-rays and the object. Summary of the Invention
[0002] Disclosed herein is a system comprising: an electron source configured to emit an electron beam; a target having M target points (target point (i), i = 1, ..., M, where M is an integer greater than 1); and an X-ray detector having M sensor elements (sensor elements (i), i = 1, ..., M). The X-ray detector is configured to capture an image of an object. The object has object points. For each value of i and one value of i at a time, (A) the electron source is configured to direct the electron beam to the target point (i), thereby generating an X-ray (i) from the target point (i), and (B) the sensor element (i) is configured to capture a signal (i) of the object point based on an interaction between the X-ray (i) and the object point. The system is configured to generate a combined signal for the object point based at least on the signals (i), i = 1, ..., M, of the object point.
[0003] According to one aspect, the M target spots are arranged in a two-dimensional array.
[0004] According to one aspect, the M target spots are arranged in a one-dimensional array.
[0005] According to one aspect, the value of the combined signal of the object point is the sum of the individual values (i), i = 1, ..., M of the signal (i), i = 1, ..., M of the object point.
[0006] According to one aspect, for each value of i, the value (i) of the signal (i) of the object point is the number of X-ray photons of the X-ray (i) incident on the sensing element (i).
[0007] According to one aspect, the target and the X-ray detector are stationary relative to each other.
[0008] According to one aspect, each of the M target spots has a maximum dimension of at most 10 μm.
[0009] According to one aspect, no plane intersects all sensing elements of the X-ray detector.
[0010] According to one aspect, a ratio of (A) a distance between a point on the X-ray detector and a point on the object to (B) a distance between the point on the object and a point on the target is at least 5.
[0011] A method of using the above system, comprising: for each value of i and one value of i at a time, (A) directing the electron beam to the target point (i) to generate the X-ray (i) from the target point (i), and (B) using the sensing element (i) to capture the signal (i) of the object point based on the interaction between the X-ray (i) and the object point; and generating the combined signal of the object point based on at least the signal (i) of the object point, i = 1, ..., M.
[0012] According to one aspect, the M target points are arranged in a two-dimensional array, and the object, the target, and the X-ray detector are stationary relative to each other.
[0013] According to one aspect, the object is a wound battery film.
[0014] According to one aspect, the method further comprises moving the object relative to the X-ray detector.The M target points are arranged in a one-dimensional array, and the target and the X-ray detector are stationary relative to each other.
[0015] According to one aspect, the object is a flat battery film.
[0016] According to one aspect, the moving object is along a direction parallel to a straight line intersecting all of the M target points.
[0017] According to one aspect, the moving object is such that a resulting path of the object relative to the X-ray detector is not a straight line. BRIEF DESCRIPTION OF THE DRAWINGS
[0018] Figure 1 A perspective view of an imaging system in operation according to an embodiment is schematically shown.
[0019] Figure 2 A flow chart outlining the operation of an imaging system according to an embodiment is shown.
[0020] FIG. 3 schematically shows a schematic diagram of a system in another embodiment according to an alternative embodiment. Figure 1 A perspective view of the imaging system. DETAILED DESCRIPTION
[0021] Imaging system
[0022] Figure 1Schematically illustrates a perspective view of an imaging system 100 according to an embodiment. In one embodiment, the imaging system 100 may include an electron source 110 , a target 120 , and an X-ray detector 130 .
[0023] electron source
[0024] In one embodiment, referring to Figure 1 , electron source 110 can emit electron beam 115. In one embodiment, electron beam 115 can be a pencil beam. Electron source 110 can be of any suitable type, such as a thermionic emission source and a field emission source. Electron source 110 can include suitable electron optics to shape and direct electron beam 115.
[0025] target
[0026] In one embodiment, referring to Figure 1 , the target 120 may be a film or a plate, and the film or plate may contain heavy elements such as platinum, copper, iron, chromium, tungsten, or any combination thereof.
[0027] X-ray detectors
[0028] In one embodiment, referring to Figure 1 The X-ray detector 130 may include a plurality of sensing elements 135 (eg, 50 sensing units 135 as shown). In one embodiment, the sensing elements 135 of the X-ray detector 130 may be arranged in a two-dimensional array (eg, 5 rows and 10 columns as shown).
[0029] In one embodiment, all sensor elements 135 of X-ray detector 130 may be on the same plane. In other words, there is a plane that intersects all 50 sensor elements 135 of X-ray detector 130. In alternative embodiments, all sensor elements 135 of X-ray detector 130 may not be on the same plane. In other words, no plane intersects all 50 sensor elements 135 of X-ray detector 130.
[0030] object
[0031] In one embodiment, referring to Figure 1 The object 190 to be imaged may be located between the target 120 and the X-ray detector 130 (as shown).
[0032] In one embodiment, the ratio of (A) the distance between a point on the X-ray detector 130 and a point on the object 190 to (B) the distance between a point on the object 190 and a point on the target 120 may be at least 5.
[0033] Operation of the imaging system
[0034] In one embodiment, referring to Figure 1 , the imaging system 100 may operate as follows.
[0035] In one embodiment, target 120, object 190, and X-ray detector 130 may be stationary relative to one another during operation of imaging system 100. In one embodiment, object 190 may be a rolled battery film.
[0036] In one embodiment, during a first exposure, the electron source 110 may direct the electron beam 115 toward a target point 125.1 on the target 120, thereby generating a first X-ray (not shown) from the target point 125.1. In one embodiment, the sensing element 135a1 of the X-ray detector 130 may capture a first signal at the object point 195a of the object 190 based on the interaction between the first X-ray and the object point 195a. For example, the first signal may represent the intensity of the first X-ray after passing through the object 190.
[0037] The interaction between the first X-ray and the object point 195a may include situations such as the following: (A) some radiation particles of the first X-ray incident on the object point 195a are blocked by the object point 195a, and (B) some radiation particles of the first X-ray incident on the object point 195a travel through the object point 195a without changing their direction.
[0038] The term "object point" can also refer to a "part of an object." Note that a straight line intersects target point 125.1, object point 195a, and sensing element 135a1. References to "first," "second," and other serial numbers in this patent application (including the claims) are provided for ease of reference only and do not imply any chronological order.
[0039] In one embodiment, during a second exposure that occurs after the first exposure, electron source 110 can direct electron beam 115 toward target point 125.2 on target 120, thereby generating a second X-ray (not shown) from target point 125.2. In one embodiment, sensing element 135a2 of X-ray detector 130 can capture a second signal from object point 195a of object 190 based on the interaction between the second X-ray and object point 195a. Note that a straight line intersects target point 125.2, object point 195a, and sensing element 135a2.
[0040] In one embodiment, the X-ray detector 130 may generate a combined signal of the object point 195 a based on the first signal and the second signal of the object point 195 a .
[0041] Note that the electron beam 115 strikes the targets 125.1 and 125.2 one after the other (ie, not simultaneously). Thus, in the imaging system 100, at any point in time, X-rays are generated from only one target 125, if any.
[0042] In one embodiment, all sensor elements 135 that capture the signals of object point 195a can be different. For example, as described above, sensor elements 135a1 and 135a that capture the first and second signals of object point 195a, respectively, are different (i.e., they are two different sensor elements 135 of X-ray detector 130).
[0043] Signal measurement
[0044] In one embodiment, the first signal of the object point 195a can be measured based on the number N1 of X-ray photons of the first X-ray incident on the sensing element 135a 1. Note that N1 can be considered as the value of the first signal of the object point 195a.
[0045] Similarly, in one embodiment, the second signal of the object point 195a can be measured based on the number N2 of X-ray photons of the second X-ray incident on the sensing element 135a2. Note that N2 can be considered as the value of the second signal of the object point 195a.
[0046] In one embodiment, the combined signal of the object point 195a can be measured as the sum of N1 and N2 (ie, N1+N2). Note that the sum of N1 and N2 can be considered as the value of the combined signal of the object point 195a.
[0047] Flowchart outlining the operation of the imaging system
[0048] Figure 2 shows an overview according to an embodiment Figure 1 Flowchart 200 of the operation of the imaging system 100.
[0049] In step 210, the operation may include: for each value of i and one value of i at a time, (A) directing the electron beam to the target point (i), thereby generating an X-ray (i) from the target point (i); and (B) using the sensing element (i) to capture a signal (i) of the object point based on the interaction between the X-ray (i) and the object point. For example, in the above embodiment, referring to Figure 1 During a first exposure, electron beam 115 is directed to target point 125.1, thereby generating a first X-ray from target point 125.1; and (B) sensing element 135a1 captures a first signal from object point 195a based on the interaction between the first X-ray and object point 195a. Then, during a second exposure, electron beam 115 is directed to target point 125.2, thereby generating a second X-ray from target point 125.2; and (B) sensing element 135a2 captures a second signal from object point 195a based on the interaction between the second X-ray and object point 195a.
[0050] In step 220, the operation may include generating a combined signal of the object point based on at least the signal (i) of the object point, i=1, ..., M. For example, in the above embodiment, referring to Figure 1 , the X-ray detector 130 generates a combined signal of the object point 195 a based on the first signal and the second signal of the object point 195 a.
[0051] Other embodiments
[0052] Other points of the object
[0053] In one embodiment, referring to Figure 1 , the combined signals of the remaining object points of the object 190 may be generated in a manner similar to the manner in which the combined signal of the object point 195a is generated.
[0054] For example, a combined signal for object point 195b of object 190 can be generated as follows. During a first exposure, sensing element 135b1 of X-ray detector 130 can capture a first signal for object point 195b based on the interaction between the first X-ray and object point 195b. Then, during a second exposure, sensing element 135b2 of X-ray detector 130 can capture a second signal for object point 195b based on the interaction between the second X-ray and object point 195b. The X-ray detector 130 can then generate a combined signal for object point 195b based on the first and second signals of object point 195b.
[0055] In one embodiment, the X-ray detector 130 may generate an image of the object 190 based on the combined signals of all object points 195 of the object 190 , including the object points 195 a and 195 b .
[0056] More than two participating targets
[0057] In the above embodiment, referring to Figure 1 , two target points 125 participate in generating a combined signal for a point 195. For example, two target points 125.1 and 125.2 participate in generating a combined signal for point 195a. Similarly, two target points 125.1 and 125.2 participate in generating a combined signal for point 195b.
[0058] In one embodiment, more than two target spots 125 may participate in generating a combined signal of a target spot 195. For example, Figure 1 The six target spots 125 shown (including target spots 125.1 and 125.2) can participate (one after another) in generating the combined signal of spot 195a.
[0059] In one embodiment, the target spots 125 that participate in generating the combined signal of the spots 195 may be arranged in a two-dimensional array (e.g., Figure 1 2 rows and 3 columns) arrangement as shown.
[0060] In one embodiment, each target spot 125 that participates in generating the combined signal of the target spot 195 may have a maximum dimension of at most 10 μm.
[0061] Targets can be involved multiple times
[0062] In the above embodiment, referring to Figure 1 , each target point 125 that participates in generating the combined signal of point 195 participates once. For example, each of the two target points 125.1 and 125.2 that participate in generating the combined signal of point 195a participates only once.
[0063] In one embodiment, at least one object point 125 that participates in generating the combined signal of object point 195 participates multiple times. For example, to generate the combined signal of point 195a, 7 exposures may occur one after another (instead of 2 as described above). The first 6 exposures may respectively involve Figure 1 6 target spots 125 are shown, and then the seventh exposure may involve target spot 125.1 a second time. Thus, target spot 125.1 participates twice (i.e., more than once) in the combined signal of the resulting object spot 195a.
[0064] Alternative Embodiments
[0065] Location of the electron source
[0066] In the above embodiment, referring to Figure 1 , the electron source 110 and the X-ray detector 130 are located on two opposite sides of the target 120. This arrangement is not required to operate the imaging system 100. In alternative embodiments, the electron source 110 and the X-ray detector 130 can be located on the same side of the target 120. For example, the electron source 110 can be located on a Figure 1 At the position X marked in .
[0067] The object moves relative to the X-ray detector
[0068] In the above embodiment, referring to Figure 1 , during operation of the imaging system 100, the object 190 is stationary relative to the X-ray detector 130. In an alternative embodiment, referring to Figures 3A to 3D During operation of the imaging system 100 , the object 390 to be imaged may move relative to the X-ray detector 130 while the X-ray detector 130 and the target 120 remain stationary relative to each other.
[0069] In one embodiment, referring to Figures 3A to 3D , object 390 may be located between target 120 and x-ray detector 130 (as shown). In one embodiment, object 390 may be a flat battery film.
[0070] In one embodiment, referring to Figures 3A to 3D , the imaging system 100 may operate as follows.
[0071] In one embodiment, referring to Figure 3A During the fourth exposure, the electron source 110 may direct the electron beam 115 toward the target point 325a of the target 120, thereby generating a fourth X-ray (not shown) from the target point 325a. In one embodiment, the sensing element 135x of the X-ray detector 130 may capture a fourth signal at the object point 395a of the object 390 based on the interaction between the fourth X-ray and the object point 395a. Note that a straight line intersects the target point 325a, the object point 395a, and the sensing element 135x.
[0072] In one embodiment, referring to Figure 3B During the fifth exposure, which occurs after the fourth exposure, electron source 110 may direct electron beam 115 toward target point 325b of target 120, thereby generating a fifth X-ray (not shown) from target point 325b. In one embodiment, sensing element 135y of X-ray detector 130 may capture a fifth signal from object point 395a based on the interaction between the fifth X-ray and object point 395a. Note that a straight line intersects target point 325b, object point 395a, and sensing element 135y.
[0073] In one embodiment, referring to Figure 3C During the sixth exposure, which occurs after the fifth exposure, electron source 110 may direct electron beam 115 toward target point 325c of target 120, thereby generating a sixth X-ray (not shown) from target point 325c. In one embodiment, sensing element 135z of X-ray detector 130 may capture a sixth signal from object point 395a based on the interaction between the sixth X-ray and object point 395a. Note that a straight line intersects target point 325c, object point 395a, and sensing element 135z.
[0074] In one embodiment, the X-ray detector 130 may generate a combined signal of the object point 395 a based on the fourth signal, the fifth signal, and the sixth signal of the object point 395 a .
[0075] In one embodiment, referring to Figures 3A to 3D , the three target spots 325a, 325b, and 325c that participate in generating the combined signal of the target spot 395a can be arranged in a one-dimensional array (as shown).
[0076] In one embodiment, the movement of object 390 relative to X-ray detector 130 may be in a direction parallel to a line that intersects all of target points 325a, 325b, and 325c. Alternatively, the path of object 390 may not be a straight line.
[0077] In one embodiment, the combined signal for the remaining object points of the object 390 may be generated in a manner similar to the manner in which the combined signal for the object point 395a is generated.
[0078] For example, the object point 395b ( ) of the object 390 may be generated based on the fourth signal, the fifth signal, and the sixth signal of the object point 395b captured during the fourth exposure, the fifth exposure, and the sixth exposure, respectively. Figure 3D ) combined signal.
[0079] For another example, the object point 395c ( ) of the object 390 may be generated based on the seventh signal, the eighth signal, and the ninth signal of the object point 395c captured during the seventh exposure, the eighth exposure, and the ninth exposure, respectively. Figure 3D The seventh, eighth, and ninth exposures (A) occur sequentially after the sixth exposure, and (B) are similar to the fourth, fifth, and sixth exposures, respectively.
[0080] In one embodiment, the X-ray detector 130 may generate an image of the object 390 based on the combined signals of all object points of the object 390 , including the object points 395 a and 395 b .
[0081] Although various aspects and embodiments have been disclosed herein, other aspects and embodiments will be apparent to those skilled in the art. The various aspects and embodiments disclosed herein are for illustrative purposes and are not intended to be limiting, with the true scope and spirit being indicated by the following claims.
Claims
1. A system comprising: an electron source configured to deliver an electron beam; A target, comprising M target points (target point (i), i = 1, ..., M), where M is an integer greater than 1; and The X-ray detector includes M sensing elements (sensing element (i), i = 1, ..., M), and is configured to capture an image of an object, wherein the object includes an object point, where, for each value of i and one value of i at a time, (A) the electron source is configured to direct the electron beam to the target point (i), thereby generating X-rays (i) from the target point (i), and (B) the sensing element (i) is configured to capture a signal (i) of the object point based on an interaction between the X-ray (i) and the object point, and The system is configured to generate a combined signal of the object point based at least on the signal (i), i=1, . . . , M, of the object point.
2. The system according to claim 1, wherein: The M target spots are arranged in a two-dimensional array.
3. The system according to claim 1, wherein: The M target spots are arranged in a one-dimensional array.
4. The system according to claim 1, wherein: The value of the combined signal of the object point is the sum of the individual values (i), i = 1, ..., M of the signal (i), i = 1, ..., M of the object point.
5. The system according to claim 4, wherein: For each value of i, the value (i) of the signal (i) at the object point is the number of X-ray photons of the X-ray (i) incident on the sensor element (i).
6. The system according to claim 1, wherein: The target and the X-ray detector are stationary relative to each other.
7. The system according to claim 1, wherein: Each of the M target spots has a maximum dimension of at most 10 μm.
8. The system according to claim 1, wherein: No plane intersects all sensing elements of the X-ray detector.
9. The system according to claim 1, wherein: A ratio of (A) a distance between a point on the X-ray detector and a point on the object to (B) a distance between the point on the object and a point on the target is at least 5.
10. A method of using the system of any one of claims 1 to 9, the method comprising: For each value of i and one value of i at a time, (A) directing the electron beam to the target point (i) to generate the X-ray (i) from the target point (i), and (B) using the sensing element (i) to capture the signal (i) of the object point based on the interaction between the X-ray (i) and the object point; and The combined signal of the object point is generated based on at least the signal (i), i=1, . . . , M, of the object point.
11. The method according to claim 10, in, The M targets are arranged in a two-dimensional array, and Wherein, the object, the target and the X-ray detector are stationary relative to each other.
12. The method according to claim 11, wherein The object is a wound battery film.
13. The method of claim 10, further comprising moving the object relative to the X-ray detector, in, The M targets are arranged in a one-dimensional array, and Wherein, the target and the X-ray detector are stationary relative to each other.
14. The method according to claim 13, wherein The object is a flat battery film.
15. The method according to claim 13, wherein The moving object is along a direction parallel to a straight line intersecting all the M target points.
16. The method according to claim 13, wherein The moving object is such that a final path of the object relative to the X-ray detector is not a straight line.