Ion beam polishing equipment for titanium nitride cutter machining

Abstract

The invention relates to the technical field of metal processing, and discloses ion beam polishing equipment for titanium nitride cutter processing, which comprises a polishing assembly and a box body, a sealing door is arranged on one side of the box body, and an ion source system is arranged in the box body; and the feeding assembly is arranged in the box body and comprises a supporting rail fixed in the box body, a protective cover is fixed to the top of the supporting rail, a material pushing part is arranged on the supporting rail, and the material pushing part comprises a push rod located at the top of the supporting rail. The ion beam polishing machine has the beneficial effects that when a cutter needing to be polished is replaced, the vacuum state does not need to be frequently relieved, the cutter can be automatically replaced through the feeding assembly, long-time waiting in the vacuumizing process is avoided, the cutter replacement time is greatly shortened, the ion beam polishing machine can be put into machining more frequently, and the machining efficiency is improved. And the effective working time of the equipment is prolonged, so that the overall processing efficiency is improved.

Description

Technical Field

[0001] The invention relates to the technical field of metal processing, in particular to ion beam polishing equipment for titanium nitride tool processing. Background Art

[0002] A titanium nitride tool is a tool with a titanium nitride coating on its surface. In order to improve the surface quality of the tool, reduce the friction coefficient, improve the tool performance and extend its service life, an ion beam polisher is required after the titanium nitride coating is applied. The ion beam polisher is a device used for optical surface processing of the tool layer. It uses ion beam technology to perform high-precision polishing and trimming on the optical surface of the tool layer to achieve the required optical performance and surface quality. During the polishing process, it needs to be carried out in a vacuum state. When replacing the tool that needs to be polished, manual replacement is frequently required, and the vacuum state must be released each time. After the tool is replaced, the vacuum state is restarted. Each time the tool is replaced, the vacuum environment must be re-established. The vacuum process usually takes a long time, which will reduce the effective working time of the equipment and reduce the overall processing efficiency. The manual replacement of tools is relatively slow and requires a certain operating process and preparation time, which causes the tool change process to take more time, affecting the production rhythm. Summary of the Invention

[0003] The present invention is proposed in view of the above-mentioned problems existing in the existing ion beam polishing equipment for titanium nitride tool processing.

[0004] Therefore, the problem to be solved by the present invention is that it takes a long time to replace the cutting tool, which affects the processing efficiency.

[0005] To solve the above technical problems, the present invention provides the following technical solutions: an ion beam polishing device for titanium nitride tool processing, comprising: a polishing assembly including a box, a sealing door is provided on one side of the box, and an ion source system is provided inside the box; A loading assembly is arranged in the box body, comprising a support track fixed inside the box body, a protective cover is fixed on the top of the support track, a pusher is provided on the support track, and the pusher includes a push rod located at the top of the support track, a support sleeve is fixed on one side of the protective cover, a fixed sleeve is rotatably connected in the support sleeve, a winding wheel is fixed on one side of the fixed sleeve, and a pull rope is fixed on one side of the winding wheel; The loading assembly further comprises a fixing member, which comprises a clamping plate located on one side of the support track, a baffle being fixed to one side of the clamping plate via a connecting rod, and a pushing device being fixed to one side of the clamping plate.

[0006] As a preferred solution of the ion beam polishing equipment for titanium nitride tool processing described in the present invention, the loading assembly also includes a material moving part, the material moving part includes a guide rail fixed on one side of the support rail, a guide shaft slides in the guide rail, a fixed rod is fixed at the top end of the guide shaft, and push plates are fixed at both ends of the fixed rod.

[0007] As a preferred solution of the ion beam polishing equipment for titanium nitride tool processing described in the present invention, a fixed block is fixed on the top of the fixed rod, a fixed frame is provided on the outside of the fixed block, a mounting rod is fixed on one side of the fixed frame, the other end of the mounting rod is fixed to the baffle, a first spring is fixed to the inner wall of the fixed frame, and the other end of the first spring is fixed to the fixed block.

[0008] As a preferred solution of the ion beam polishing equipment for titanium nitride tool processing described in the present invention, the loading assembly also includes a rotating part, the rotating part includes a moving column located on one side of the winding wheel, a fixed shaft is fixed in the winding wheel, a spiral groove and a slide groove are provided on the moving column, a stabilizing rod is fixed on one side of the moving column, a stabilizing block is fixed on one side of the baffle, a mounting block is fixed on the end of the stabilizing rod, and a second spring is fixed on one side of the mounting block.

[0009] As a preferred solution of the ion beam polishing equipment for titanium nitride tool processing of the present invention, a groove is provided on the movable column, a stabilizing shaft is fixed to the inner wall of the groove, and a first stopper is sleeved on the outer side of the stabilizing shaft.

[0010] As a preferred solution of the ion beam polishing equipment for titanium nitride tool processing described in the present invention, the loading assembly also includes a limiter, the limiter includes a stabilizing frame fixed to the top of the support sleeve, a limiter block is arranged in the stabilizing frame, a limiter slot is provided on the fixed sleeve, a third spring is fixed to the top wall of the stabilizing frame, and a pull rod is fixed to the top of the limiter block.

[0011] As a preferred solution of the ion beam polishing equipment for titanium nitride tool processing described in the present invention, a support block is fixed to the inner wall of the guide rail, a support shaft is fixed to the top of the support block, a second baffle is provided on the outside of the support shaft, and a limiting block is fixed to the inner wall of the guide rail.

[0012] As a preferred solution of the ion beam polishing equipment for titanium nitride tool processing described in the present invention, a stabilizing plate is fixed on one side of the protective cover, a stabilizing column is fixed on one side of the stabilizing plate, the stabilizing column is movably connected to the push rod, a fourth spring is fixed on one side of the push rod, and the other end of the fourth spring is fixed to the stabilizing plate.

[0013] As a preferred solution of the ion beam polishing equipment for titanium nitride tool processing of the present invention, there are multiple limiting grooves, which are evenly distributed in a ring shape on the outside of the fixing sleeve.

[0014] As a preferred solution of the ion beam polishing equipment for titanium nitride tool processing of the present invention, one side of the push plate is inclined.

[0015] The beneficial effects of the present invention are as follows: when replacing the tool that needs to be polished, there is no need to frequently release the vacuum state. The tool can be automatically replaced through the loading assembly, avoiding the long waiting time during the vacuum process, greatly shortening the tool replacement time, and enabling the ion beam polishing machine to be put into processing more frequently, increasing the effective working time of the equipment, thereby improving the overall processing efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for describing the embodiments. Obviously, the drawings described below are only some embodiments of the present invention. Those skilled in the art can also derive other drawings based on these drawings without inventive effort. Among them: Figure 1 This is an overall diagram of the ion beam polishing equipment used for titanium nitride tool processing.

[0017] Figure 2 This is a diagram of the internal structure of the ion beam polishing equipment used for titanium nitride tool processing.

[0018] Figure 3 This is a top view of the loading assembly of the ion beam polishing equipment used for titanium nitride tool processing.

[0019] Figure 4 This is a diagram of the support track structure of the ion beam polishing equipment used for titanium nitride tool processing.

[0020] Figure 5 This is a top view of the rotating parts of the ion beam polishing equipment used for titanium nitride tool processing.

[0021] Figure 6 Ion beam polishing equipment for titanium nitride tool processing Figure 5 A partial enlarged structural diagram of point A in the middle.

[0022] Figure 7 This is a cross-sectional structural diagram of the support sleeve of the ion beam polishing equipment used for titanium nitride tool processing.

[0023] Figure 8 This is a top view of the material moving parts of the ion beam polishing equipment used for titanium nitride tool processing.

[0024] Figure 9This is a partial structural diagram of the guide rail of the ion beam polishing equipment used for titanium nitride tool processing, viewed from above.

[0025] In the figure: 100, polishing assembly; 101, box; 102, sealing door; 103, ion source system; 200, loading assembly; 201, support rail; 202, protective cover; 203, pusher; 2031, push rod; 2032, support sleeve; 2033, fixed sleeve; 2034, take-up wheel; 2035, pull rope; 204, fixing member; 2041, clamping plate; 2042, baffle; 2043, pushing device; 205, material moving member; 2051, guide rail; 2052, guide shaft; 2053, fixed rod; 2054, push plate; 2055, fixed block; 2056, fixed frame; 2057, mounting rod; 2058, first spring; 206, rotating member; 2 061, moving column; 2062, fixed shaft; 2061-1, spiral groove; 2061-2, slide groove; 2063, stabilizing rod; 2064, stabilizing block; 2065, mounting block; 2066, second spring; 2061-3, groove; 2067, stabilizing shaft; 2068, first block; 207, limiting member; 2071, stabilizing frame; 2072, limiting block; 2033-1, limiting groove; 2073, third spring; 2074, pull rod; 2051-1, support block; 2051-2, support shaft; 2051-3, second baffle; 2051-4, limiting block; 2031-1, stabilizing plate; 2031-2, stabilizing column; 2031-3, fourth spring. DETAILED DESCRIPTION

[0026] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0027] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Those skilled in the art may make similar generalizations without violating the connotation of the present invention. Therefore, the present invention is not limited to the specific embodiments disclosed below.

[0028] Secondly, the term "one embodiment" or "embodiment" herein refers to a specific feature, structure, or characteristic that may be included in at least one implementation of the present invention. The phrase "in one embodiment" appearing in various places throughout this specification does not necessarily refer to the same embodiment, nor does it refer to a separate or selective embodiment that is mutually exclusive of other embodiments.

[0029] Example 1 Reference Figures 1-4, which is the first embodiment of the present invention, provides an ion beam polishing device for titanium nitride tool processing. The ion beam polishing device for titanium nitride tool processing includes a polishing assembly 100, including a box 101. The box 101 is provided with a vacuum adsorption device (not shown in the figure). This is a prior art and will not be described in detail in this solution. A sealing door 102 is provided on one side of the box 101. A locking device is provided on one side of the box 101. When the sealing door 102 is closed, the sealing door 102 can be locked, thereby ensuring the sealing inside the box 101.

[0030] An ion source system 103 is provided inside the box 101. The ion source system 103 is used to generate a high-energy ion beam. An inert gas such as argon is usually used as the working gas of the ion source. These ions form a high-speed ion beam under the acceleration of the electric field, and then are focused and irradiated onto the optical surface of the tool layer to be polished. The ion beam interacts with the surface atoms and removes the surface atoms layer by layer through a physical sputtering process, thereby achieving precise polishing of the surface. This is a prior art and will not be elaborated in this solution. Those skilled in the art will be able to clearly understand the working principle.

[0031] The loading component 200 is arranged in the box body 101. The loading component 200 is an accessory for ion beam polishing, including a support rail 201 fixed inside the box body 101. A movable groove is opened on the top of the support rail 201. The tools to be polished are placed in the support rail 201 in sequence. A protective cover 202 is fixed on the top of the support rail 201. There are two protective covers 202, which are fixed on both sides of the top of the support rail 201. The tool to be polished is placed at the center of the top of the support rail 201 and is directly below the ion source system 103. At this time, the optical surface of the tool layer can be polished by the ion source system 103. During the polishing process of the optical surface of the tool layer, the protective cover 202 can be used to protect other tools inside the support rail 201, thereby preventing the tool from being directly bombarded by the ion beam or impacted by scattered ions, resulting in tiny pits, scratches or deformations on the optical surfaces of other tool layers, affecting the surface quality and accuracy of the workpiece.

[0032] After the optical surface of the tool layer is polished, the tool will move to the left at the top of the support rail 201. At this time, the polished tool will move to the inside of the protective cover 202 on the left, and a tool inside the right will move to the bottom of the ion source system 103 and polish the optical surface of another tool layer.

[0033] The two protective covers 202 are used to protect the polished tools and the tools waiting to be polished respectively. The tops of the two protective covers 202 on the sides away from each other are each provided with openings, which can facilitate the user to take out the polished tools and place the tools to be polished on the top of the support rail 201.

[0034] A pusher 203 is provided on the support rail 201 . The pusher 203 includes a push rod 2031 located at the top of the support rail 201 . The push rod 2031 can move leftward on the top of the support rail 201 to push the tool waiting to be polished to the bottom of the ion source system 103 .

[0035] A support sleeve 2032 is fixed to one side of the protective cover 202, and a fixed sleeve 2033 is rotatably connected inside the support sleeve 2032. The fixed sleeve 2033 is rotatably connected to the support sleeve 2032 through a bearing. A winding wheel 2034 is fixed to one side of the fixed sleeve 2033, and a pull rope 2035 is fixed to one side of the winding wheel 2034. The other end of the pull rope 2035 is fixed to the push rod 2031.

[0036] When the winding wheel 2034 rotates, it will reel in the pull rope 2035 and drive the push rod 2031 to move a specified distance through the pull rope 2035. At this time, the push rod 2031 can push the tool on the top of the support rail 201 to move, and then the tool can be moved downward to the ion source system 103, so that the tool can be replaced without frequently releasing the vacuum state inside the box 101, which greatly shortens the tool replacement time and enables the ion beam polishing machine to be put into processing more frequently, increasing the effective working time of the equipment, thereby improving the overall processing efficiency.

[0037] The loading assembly 200 also includes a fixing part 204, which includes a clamping plate 2041 located on one side of the support rail 201. The clamping plate 2041 is U-shaped and is used to squeeze and fix the tool being polished. A baffle 2042 is fixed to one side of the clamping plate 2041 through a connecting rod. There are two baffles 2042, which are fixed on both sides of the clamping plate 2041 through two connecting rods.

[0038] When the tool moves to the bottom of the ion source system 103, the clamp 2041 will move toward the inside of the support rail 201 and squeeze the tool to fix it, so as to prevent the tool from shaking when polishing the optical surface of the tool layer. At the same time, the two baffles 2042 will block the entrances and exits of the two protective covers 202, so as to prevent scattered ions from entering the inside of the protective cover 202 from the openings on the sides of the protective cover 202.

[0039] A pushing device 2043 is fixed on one side of the splint 2041. The pushing device 2043 is any device that can perform linear reciprocating motion. The preferred cylinder in this solution drives the splint 2041 to move, so that the splint 2041 can squeeze and fix the tool and separate from the tool.

[0040] Example 2 Reference Figure 3-Figure 9 , which is the second embodiment of the present invention, and is based on the previous embodiment.

[0041] Specifically, the loading assembly 200 also includes a material moving part 205, which includes a guide rail 2051 fixed to one side of the support rail 201. The guide rail 2051 is a right triangle. A guide shaft 2052 slides inside the guide rail 2051. A fixed rod 2053 is fixed to the top of the guide shaft 2052. Push plates 2054 are fixed at both ends of the fixed rod 2053, and the two are respectively located on the left and right sides of the fixed rod 2053.

[0042] When the clamp 2041 is separated from the polished tool, the guide shaft 2052 will move along the inclined direction of the guide rail 2051, and drive the fixed rod 2053 and the two push plates 2054 to move. At this time, the push plate on the right will push the first tool waiting for polishing inside the right protective cover 202 to the bottom of the ion source system 103, and the push plate 2054 on the left will push the polished tool to the inside of the left protective cover 202, so that the tool can be replaced.

[0043] One side of the left push plate 2054 is inclined, and as the push plate 2054 continues to move, it can ensure that the tool is completely pushed into the left protective cover 202.

[0044] Specifically, a fixing block 2055 is fixed on the top of the fixing rod 2053, a fixing frame 2056 is provided on the outside of the fixing block 2055, and a mounting rod 2057 is fixed on one side of the fixing frame 2056. There are two mounting rods 2057, which are respectively fixed on both sides of the fixing frame 2056. The mounting rod 2057 is L-shaped, and the other end of the mounting rod 2057 is fixed to the baffle 2042. A first spring 2058 is fixed to the inner wall of the fixing frame 2056, and the other end of the first spring 2058 is fixed to the fixing block 2055.

[0045] When the splint 2041 is separated from the tool, the baffle 2042 will drive the fixed frame 2056 to move through the mounting rod 2057, and drive the fixed block 2055 and the fixed rod 2053 to move through the fixed frame 2056. At this time, the fixed rod 2053 will drive the guide shaft 2052 to move along the inclined direction of the guide rail 2051.

[0046] When the guide shaft 2052 moves to the end of the guide rail 2051 and the clamping plate 2041 moves toward the direction of the tool, the mounting rod 2057 will push the fixed frame 2056 and the fixed block 2055 to move in the opposite direction, and the guide shaft 2052 will move along the vertical track of the guide rail 2051, so that the push plate 2054 will not contact the tool when it is reset. When the guide shaft 2052 moves to the end of the guide rail 2051, it will enter the horizontal groove of the guide rail 2051. At this time, the first spring 2058 applies a pulling force to the fixed block 2055, and the fixed block 2055 drives the fixed rod 2053, the guide shaft 2052 and the two push plates 2054 to move to the right, and reset the push plate 2054, and enable the guide shaft 2052 to enter the inclined groove of the guide rail 2051 again.

[0047] Specifically, the loading assembly 200 also includes a rotating part 206, which includes a movable column 2061 located on one side of the winding wheel 2034, a fixed shaft 2062 is fixed in the winding wheel 2034, and a spiral groove 2061-1 and a sliding groove 2061-2 are provided on the movable column 2061, and both ends of the sliding groove 2061-2 are connected to the spiral groove 2061-1.

[0048] A stabilizing rod 2063 is fixed on one side of the movable column 2061, and the stabilizing rod 2063 is rectangular. A stabilizing block 2064 is fixed on one side of the baffle 2042. The stabilizing rod 2063 is movably connected to the stabilizing block 2064 to support and position the stabilizing rod 2063. A mounting block 2065 is fixed on the end of the stabilizing rod 2063, and a second spring 2066 is fixed on one side of the mounting block 2065. The other end of the second spring 2066 is fixed to the stabilizing block 2064.

[0049] When the baffle 2042 moves toward the top of the support rail 201, it will drive the stabilizing block 2064 to move. At this time, the stabilizing block 2064 will drive the mounting block 2065 and the stabilizing rod 2063 to move under the elastic tension of the second spring 2066, and drive the movable column 2061 to move toward the winding wheel 2034 through the stabilizing rod 2063. At this time, the fixed shaft 2062 will enter the spiral groove 2061-1, and as the movable column 2061 continues to move, the fixed shaft 2062 will move along the inner wall of the spiral groove 2061-1. Through the cooperation of the two, the winding wheel 2034 can be driven to rotate, so that the winding wheel 2034 can reel in the pull rope 2035 and the push rod 2031 can push the tool to move.

[0050] When the fixed shaft 2062 moves one circle along the spiral groove 2061-1, it will enter the slide groove 2061-2. At this time, the fixed shaft 2062 contacts the end of the inner wall of the slide groove 2061-2, which will prevent the moving column 2061 from moving. When the baffle 2042 continues to move, the second spring 2066 can be stretched by the stabilizing rod 2063, so as not to hinder the normal movement of the baffle 2042.

[0051] When the baffle 2042 moves away from the top of the support rail 201, it drives the movable column 2061 to move toward the outside of the reel 2034. At this time, the fixed shaft 2062 moves along the slide groove 2061-2, thereby preventing the reel 2034 from rotating.

[0052] Specifically, a groove 2061-3 is provided on the movable column 2061, and a stabilizing shaft 2067 is fixed to the inner wall of the groove 2061-3. A first stopper 2068 is sleeved on the outer side of the stabilizing shaft 2067. One side of the first stopper 2068 contacts the inner wall of the groove 2061-3, so that the first stopper 2068 can only rotate outward but cannot rotate into the slide groove 2061-2. When the fixed shaft 2062 enters the connection between the spiral groove 2061-1 and the slide groove 2061-2, the moving trajectory of the fixed shaft 2062 can be blocked by the first stopper 2068, so that it can only move into the spiral groove 2061-1, and when the fixed shaft 2062 moves to the outside of the slide groove 2061-2, it will not be hindered.

[0053] A first torsion spring is fixed to the outside of the stabilizing shaft 2067 , and the other end of the first torsion spring is fixed to the inside of the first stopper 2068 for resetting the first stopper 2068 after rotation.

[0054] Specifically, the loading component 200 also includes a limiting member 207, which includes a stabilizing frame 2071 fixed to the top of the support sleeve 2032, and a limiting block 2072 is arranged in the stabilizing frame 2071. The bottom side of the limiting block 2072 is inclined, and a limiting groove 2033-1 is provided on the fixed sleeve 2033. There are multiple limiting grooves 2033-1, which are evenly distributed in a ring shape on the outside of the fixed sleeve 2033. The limiting block 2072 is engaged with the limiting groove 2033-1. Through the cooperation of the two, the fixed sleeve 2033 and the winding wheel 2034 can be limited so that the winding wheel 2034 can only rotate in the direction of the winding rope 2035.

[0055] A third spring 2073 is fixed to the top wall of the stabilizing frame 2071 , and the third spring 2073 applies a thrust to the limit block 2072 , so that the limit block 2072 is more tightly engaged with the limit groove 2033 - 1 . A pull rod 2074 is fixed to the top of the limit block 2072 .

[0056] The top end of the pull rod 2074 passes through the outside of the stabilizing frame 2071 and is movably connected to the stabilizing frame 2071. When all the tools placed inside the support track 201 have been polished, the sealed door 102 can be opened and the polished tools can be taken away. At this time, the limit block 2072 is driven upward by the pull rod 2074 to separate the limit block 2072 from the limit groove 2033-1, and the restriction on the winding wheel 2034 is released, so that the push rod 2031 can move to the right and reset, and another batch of tools that need to be polished can be placed inside the support track 201, so that the push rod 2031 can push the tools to move again.

[0057] Example 3 Reference Figures 1-9 , which is the third embodiment of the present invention, is based on the first two embodiments.

[0058] Specifically, a support block 2051-1 is fixed to the inner wall of the guide rail 2051, a support shaft 2051-2 is fixed to the top of the support block 2051-1, a second baffle 2051-3 is arranged on the outside of the support shaft 2051-2, the second baffle 2051-3 is rotatably connected to the outside of the support shaft 2051-2 through a bearing, a second torsion spring is fixed to the outside of the support shaft 2051-2, the other end of the second torsion spring is fixed to the inner side of the second baffle 2051-3, a limiting block 2051-4 is fixed to the inner wall of the guide rail 2051, one side of the limiting block 2051-4 is in contact with the second baffle 2051-3, and is used to limit the rotation direction of the second baffle 2051-3.

[0059] The moving trajectory of the guide shaft 2052 is limited by the second baffle 2051-3, so that when it moves to the end in the inclined direction of the guide rail 2051 and enters the vertical groove, the guide shaft 2052 can be blocked by the second baffle 2051-3 so that it can only move along the vertical groove and not along the inclined groove.

[0060] Specifically, a stabilizing plate 2031-1 is fixed on one side of the protective cover 202, and a stabilizing column 2031-2 is fixed on one side of the stabilizing plate 2031-1. There are two stabilizing plates 2031-1, which are respectively fixed at both ends of the stabilizing column 2031-2. The stabilizing column 2031-2 is movably connected with the push rod 2031. The stabilizing column 2031-2 is used to support and position the push rod 2031. A fourth spring 2031-3 is fixed on one side of the push rod 2031, and the other end of the fourth spring 2031-3 is fixed to the stabilizing plate 2031-1. When the push rod 2031 pushes the tool to move, the fourth spring 2031-3 will be stretched. When the winding wheel 2034 is released from the restriction, the push rod 2031 can be pulled to reset by the fourth spring 2031-3. The elastic force of the second spring 2066 is greater than the fourth spring 2031-3.

[0061] During use, multiple tools that need to be polished are placed in sequence on the top right side of the support rail 201, and then a tool is placed at the center of the top of the support rail 201 and directly below the ion source system 103. At this time, the cylinder drives the clamp 2041 and the baffle 2042 to move, so that the clamp 2041 squeezes and fixes the tool, and the baffle 2042 blocks the side of the protective cover 202. At this time, the optical surface of the tool layer can be polished by the ion source system 103. During the polishing process of the optical surface of the tool layer, the protective cover 202 can be used to protect other tools inside the support rail 201, thereby preventing the tool from being directly bombarded by the ion beam or impacted by scattered ions, resulting in tiny pits, scratches or deformations on the optical surfaces of other tool layers, affecting the surface quality and precision of the workpiece.

[0062] When the baffle 2042 moves toward the top of the support rail 201, it will drive the stabilizing block 2064 to move. At this time, the stabilizing block 2064 will drive the mounting block 2065 and the stabilizing rod 2063 to move under the elastic tension of the second spring 2066, and drive the movable column 2061 to move toward the winding wheel 2034 through the stabilizing rod 2063. At this time, the fixed shaft 2062 will enter the spiral groove 2061-1, and as the movable column 2061 continues to move, the fixed shaft 2062 will move along the inner wall of the spiral groove 2061-1. Through the cooperation of the two, the winding wheel 2034 can be driven to rotate, so that the winding wheel 2034 can reel in the pull rope 2035, and the pull rope 2035 can drive the push rod 2031 to move a specified distance. At this time, the tool at the top of the support rail 201 can be pushed by the push rod 2031 to move, thereby enabling the tool to move downward of the ion source system 103.

[0063] When the splint 2041 is separated from the tool, the baffle 2042 will drive the fixed frame 2056 to move through the mounting rod 2057, and drive the fixed block 2055 and the fixed rod 2053 to move through the fixed frame 2056. At this time, the fixed rod 2053 will drive the guide shaft 2052 to move along the inclined direction of the guide rail 2051, and drive the fixed rod 2053 and the two push plates 2054 to move. At this time, the push plate on the right will push the first tool waiting for polishing inside the right protective cover 202 to the bottom of the ion source system 103, and the push plate 2054 on the left will push the polished tool to the inside of the left protective cover 202, so that the tool can be replaced without frequently releasing the vacuum state inside the box 101, which greatly shortens the tool replacement time and enables the ion beam polishing machine to be put into processing more frequently, increasing the effective working time of the equipment, thereby improving the overall processing efficiency.

[0064] It should be noted that the above embodiments are only used to illustrate the technical solutions of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the preferred embodiments, those skilled in the art should understand that the technical solutions of the present invention may be modified or replaced by equivalents without departing from the spirit and scope of the technical solutions of the present invention, which should all be included in the scope of the claims of the present invention.

Claims

1. An ion beam polishing device for titanium nitride tool processing, characterized in that: include, A polishing assembly (100) comprises a housing (101), a sealing door (102) is provided on one side of the housing (101), and an ion source system (103) is provided inside the housing (101); A loading assembly (200) is arranged in the box (101), comprising a support track (201) fixed inside the box (101), a protective cover (202) fixed on the top of the support track (201), a pusher (203) provided on the support track (201), the pusher (203) comprising a push rod (2031) located at the top of the support track (201), a support sleeve (2032) fixed on one side of the protective cover (202), a fixed sleeve (2033) rotatably connected in the support sleeve (2032), a reel (2034) fixed on one side of the fixed sleeve (2033), and a pull rope (2035) fixed on one side of the reel (2034); The loading assembly (200) further comprises a fixing member (204), wherein the fixing member (204) comprises a clamping plate (2041) located on one side of the support track (201), a baffle (2042) being fixed to one side of the clamping plate (2041) via a connecting rod, and a pushing device (2043) being fixed to one side of the clamping plate (2041).

2. The ion beam polishing apparatus for titanium nitride tool processing according to claim 1, wherein: The loading assembly (200) further comprises a material moving member (205), wherein the material moving member (205) comprises a guide rail (2051) fixed to one side of the support rail (201), a guide shaft (2052) sliding in the guide rail (2051), a fixing rod (2053) fixed to the top end of the guide shaft (2052), and push plates (2054) fixed to both ends of the fixing rod (2053).

3. The ion beam polishing apparatus for titanium nitride tool processing according to claim 2, wherein: A fixing block (2055) is fixed to the top of the fixing rod (2053), a fixing frame (2056) is provided on the outside of the fixing block (2055), a mounting rod (2057) is fixed to one side of the fixing frame (2056), the other end of the mounting rod (2057) is fixed to the baffle (2042), a first spring (2058) is fixed to the inner wall of the fixing frame (2056), and the other end of the first spring (2058) is fixed to the fixing block (2055).

4. The ion beam polishing equipment for titanium nitride tool processing according to claim 2 or 3, characterized in that: The loading assembly (200) further includes a rotating member (206), the rotating member (206) including a movable column (2061) located on one side of the winding wheel (2034), a fixed shaft (2062) fixed in the winding wheel (2034), a spiral groove (2061-1) and a slide groove (2061-2) provided on the movable column (2061), a stabilizing rod (2063) fixed on one side of the movable column (2061), a stabilizing block (2064) fixed on one side of the baffle (2042), a mounting block (2065) fixed on the end of the stabilizing rod (2063), and a second spring (2066) fixed on one side of the mounting block (2065).

5. The ion beam polishing equipment for titanium nitride tool processing according to claim 4, characterized in that: A groove (2061-3) is provided on the movable column (2061), a stabilizing shaft (2067) is fixed to the inner wall of the groove (2061-3), and a first stopper (2068) is sleeved on the outer side of the stabilizing shaft (2067).

6. The ion beam polishing equipment for titanium nitride tool processing according to claim 5, characterized in that: The loading assembly (200) further includes a limiting member (207), the limiting member (207) including a stabilizing frame (2071) fixed to the top of the supporting sleeve (2032), a limiting block (2072) being provided in the stabilizing frame (2071), a limiting groove (2033-1) being provided on the fixing sleeve (2033), a third spring (2073) being fixed to the top wall of the stabilizing frame (2071), and a pull rod (2074) being fixed to the top of the limiting block (2072).

7. The ion beam polishing equipment for titanium nitride tool processing according to claim 6, characterized in that: A support block (2051-1) is fixed to the inner wall of the guide rail (2051), a support shaft (2051-2) is fixed to the top of the support block (2051-1), a second baffle (2051-3) is provided on the outside of the support shaft (2051-2), and a limiting block (2051-4) is fixed to the inner wall of the guide rail (2051).

8. The ion beam polishing equipment for titanium nitride tool processing according to claim 6 or 7, characterized in that: A stabilizing plate (2031-1) is fixed on one side of the protective cover (202), a stabilizing column (2031-2) is fixed on one side of the stabilizing plate (2031-1), the stabilizing column (2031-2) is movably connected to the push rod (2031), a fourth spring (2031-3) is fixed on one side of the push rod (2031), and the other end of the fourth spring (2031-3) is fixed to the stabilizing plate (2031-1).

9. The ion beam polishing equipment for titanium nitride tool processing according to claim 8, characterized in that: There are a plurality of limiting grooves (2033-1), which are evenly distributed in a ring shape on the outside of the fixing sleeve (2033).

10. The ion beam polishing equipment for titanium nitride tool processing according to claim 9, characterized in that: One side of the push plate (2054) is inclined.

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