Device and method capable of realizing linear evaporation of organic matters

Abstract

The invention discloses a device capable of realizing linear evaporation of organic matters, which comprises a metal enclosure, an oil bath heating area is arranged in the metal enclosure, a plurality of pairs of oil inlets and oil outlets and two isolation layers are arranged in the oil bath heating area, the end parts of each pair of oil inlet and oil outlet are connected with an oil delivery pump port, and the oil delivery pump port is connected with an oil delivery pump. An evaporation area is arranged in the oil bath heating area, and the interior of the evaporation area is fixedly connected with a raw material crucible through a supporting frame. According to the device and method capable of achieving linear evaporation of the organic matter, an oil bath heating area is divided into different areas, gradient control over the temperature is completed by injecting different kinds of oil into an oil conveying pump opening according to the needed temperature, evaporation of the organic matter in a raw material crucible is achieved, steam is sprayed to a substrate in a linear jet flow mode through a nozzle area, and the linear evaporation of the organic matter is achieved. And a uniform and compact film layer is formed on the substrate, so that the temperature can be conveniently controlled and adjusted in a gradient manner, the heat conduction is more uniform, and the film quality is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of linear evaporation devices, and in particular to a device and method capable of realizing linear evaporation of organic matter. Background Art

[0002] The volatility of organic compounds exhibits significant diversity. Some organic compounds readily evaporate at room temperature, while others require higher temperatures for effective evaporation. This diversity places stringent demands on evaporation equipment, which must be able to flexibly adjust to the volatility characteristics of different organic compounds, ensuring precise temperature control and a stable evaporation rate. For example, formamidine iodide (FAI) begins to volatilize at around 300°C, so the appropriate temperature is required for FAI to effectively transform from a solid state to a gaseous state and complete the evaporation process. However, improper evaporation conditions, such as temperatures that are too high or too low, may affect the evaporation efficiency and the properties of FAI.

[0003] In addition, the currently widely used linear evaporation sources may encounter the challenge of large temperature fluctuations in certain application scenarios. This fluctuation is mainly caused by uneven heat conduction inside the evaporation source. It will not only affect the stability and efficiency of evaporation, but may also cause damage to the evaporation source itself and related equipment, further leading to a decline in the quality of the evaporated film. Therefore, in order to optimize the evaporation process and improve the quality of the film, effective measures need to be taken to solve problems such as uneven heat conduction and temperature gradient adjustment inside the organic evaporation source. Summary of the Invention

[0004] In view of the deficiencies in the prior art, the present invention provides a device and method for achieving linear evaporation of organic matter, thereby solving the above-mentioned problems.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a device capable of linear evaporation of organic matter, comprising a metal enclosure, an oil bath heating zone disposed within the metal enclosure, multiple pairs of oil inlets and outlets disposed within the oil bath heating zone, and two insulating layers, each pair of oil inlets and outlets being connected to an oil pump port at the end thereof, an evaporation zone disposed within the oil bath heating zone, a raw material crucible being fixedly connected to the evaporation zone via a support frame, and a nozzle zone disposed at the top of the evaporation zone; The metal enclosure is used to place the organic linear evaporation device, and the nozzle area is provided on the metal enclosure and is connected to the area requiring evaporation or treatment; The oil bath heating zone is used to heat the material in the raw material crucible. The shell of the oil bath heating zone is made of high temperature resistant and corrosion resistant carbon steel material, and the outermost layer is covered with ceramic fiber insulation material; The raw material crucible is used to hold and heat organic matter and is made of high temperature resistant and corrosion resistant materials; The nozzle area is used to transport the organic matter that is heated and converted into steam, and to transport the organic steam to an area that requires evaporation or treatment. The nozzles in the nozzle area are made of graphite material and ceramic insulating material.

[0006] Preferably, the interior of the oil bath heating zone is separated by two insulating layers into three independent heating units, and the positions of the insulating layers are adjustable, thereby forming different heating gradients and effectively improving the heating effect.

[0007] Preferably, the three pairs of oil inlets and oil outlets are respectively arranged in different heating units, and the three pairs of oil inlets and oil outlets are connected to an oil pump through an oil pump port, and different types of oil are stored in the oil pump, which can facilitate gradient control of temperature.

[0008] Preferably, the oil bath heating zone includes two inner and outer shells, which are detachably connected to each other. Each of the two shells includes two half shells, which are detachably connected to each other by bolts. A plurality of slots are provided between the inner and outer shells, and the slots are engaged with the insulating layer, so that the position of the insulating layer can be easily adjusted.

[0009] Preferably, the high-temperature-resistant and corrosion-resistant material of the raw material crucible includes ceramic, quartz, graphite or metal alloy, which can effectively increase the service life of the raw material crucible and improve durability.

[0010] Preferably, three temperature sensors are installed on the outside of the oil bath heating zone, which can effectively detect and track the temperatures of different heating units and facilitate temperature control.

[0011] Preferably, the oil bath heating zone is distributed in a ring around the raw material crucible, and the bottom and side surfaces of the inner side of the oil bath heating zone are attached to the surface of the evaporation zone to ensure uniformity and timeliness of heating.

[0012] A method for using a device capable of achieving linear evaporation of organic matter comprises the following steps: Step 1: Adjustment: Disassemble the oil bath heating area, adjust the position of the two insulation layers according to the use requirements, adjust the space and position of the three heating units, and reinstall them together after the adjustment is completed; Step 2: Select different types of media: Select different types of oil according to the heating temperature, and store three different types of oil in the oil pump; Step 3: Adding organic matter: adding the organic matter to be heated into the raw material crucible; Step 4: Heating: The organic matter in the raw material crucible is heated by three independent heating units with gradients in the oil bath heating zone. After heating, the organic matter is converted into steam. Preheated inert gas is used as a pressurized carrier gas, and the organic matter vapor is transported from the nozzle area to the area requiring evaporation or treatment.

[0013] Preferably, in step 2, oils with different boiling points are selected according to the maximum heating temperature.

[0014] Preferably, in step 4, three temperature sensors are used to track the temperatures of three independent heating units.

[0015] The present invention provides a device and method for achieving linear evaporation of organic matter. Compared with the prior art, it has the following advantages: (1) The device and method for realizing linear evaporation of organic matter divides the oil bath heating area into different areas. Since different areas require different evaporation temperatures, a gradient method is adopted to realize multi-gradient temperature control. Different types of oil are poured into the oil pump port according to the required temperature to complete the gradient control of the temperature, thereby realizing the evaporation of the organic matter in the raw material crucible. The steam is sprayed toward the substrate in a linear jet through the nozzle area, and a uniform and dense film layer is formed on the substrate, thereby facilitating the gradient control and adjustment of the temperature, making the heat conduction more uniform.

[0016] (2) The device and method for realizing linear evaporation of organic matter can conveniently adjust the position of the insulating layer through the adjustable insulating layer, and adjust the space and position of the three heating units to meet the evaporation temperature requirements.

[0017] (3) The device and method for realizing linear evaporation of organic matter can conveniently track the temperature data of the three independent heating units in the oil bath heating zone through the temperature sensor, thereby conveniently controlling the temperature. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 It is a schematic diagram of the overall structure of the present invention; Figure 2 It is a schematic diagram of the cross-sectional structure of the oil bath heating zone of the present invention.

[0019] In the figure: 101, metal enclosure; 102, oil bath heating zone; 103, support frame; 104, insulation layer; 105, oil inlet; 106, oil outlet; 107, oil pump port; 108, evaporation zone; 109, raw material crucible; 110, nozzle zone. DETAILED DESCRIPTION

[0020] The technical solutions in the embodiments of the present invention are clearly and completely described. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. All other embodiments derived by persons of ordinary skill in the art based on the embodiments of the present invention without creative effort are within the scope of protection of the present invention.

[0021] See also Figure 1-2 The embodiment of the present invention provides a technical solution: a device that can realize linear evaporation of organic matter, which realizes the evaporation of organic matter by oil bath as a whole, including a metal enclosure 101, an oil bath heating zone 102 is provided inside the metal enclosure 101, and multiple pairs of oil inlets 105 and oil outlets 106 and two insulating layers 104 are provided inside the oil bath heating zone 102, and each pair of oil inlets 105 and oil outlets 106 are connected to an oil pump port 107 at the end, and the three pairs of oil inlets 105 and oil outlets 106 are respectively provided in different heating units, and the three pairs of oil inlets 105 and oil outlets 106 are respectively provided in different heating units. The oil pump port 107 is connected to an oil pump to ensure the orderly delivery of the required oil. Different types of oil are stored in the oil pump, which can facilitate the gradient control of the temperature. An evaporation zone 108 is provided inside the oil bath heating zone 102. A raw material crucible 109 is fixedly connected to the evaporation zone 108 through a support frame 103. A nozzle zone 110 is provided on the top of the evaporation zone 108. The oil bath heating zone 102 is divided into different areas by an insulating layer 104. Because different areas require different evaporation temperatures, a gradient method is adopted to achieve multi-gradient temperature control. Each heating area of the oil bath heating zone 102 The thermal unit is provided with an oil inlet 105 and an oil outlet 106. Different types of oil are poured into the oil pump port 107 according to the required temperature to complete the temperature gradient control. After the evaporation process is completed, the oil is discharged from the oil outlet 106. The organic matter in the raw material crucible 109 is evaporated by the heating effect of the oil bath heating zone 102. The steam is sprayed to the substrate in a linear jet through the nozzle zone 110, and a uniform and dense film layer is formed on the substrate. The oil bath method is used to evaporate the organic matter in a gradient temperature. The operation process is relatively simple, and the gradient temperature control has the advantages of being accurate and stable. This is mainly Thanks to the high specific heat capacity and low thermal conductivity of oil, the oil bath can provide a uniform and stable temperature environment during the heating process. For the gradient evaporation of organic matter, a stable temperature environment is crucial because it ensures that the organic matter evaporates in a controllable manner at different gradients, thereby improving the efficiency and accuracy of evaporation. The oil bath heating method can easily achieve gradient evaporation of organic matter by adjusting the heating power or changing the temperature of the oil bath. This flexibility allows experimenters to fine-tune the evaporation conditions according to specific needs to meet the requirements of different organic matter or different evaporation stages.

[0022] The metal enclosure 101 is used to place the organic linear evaporation device, and the nozzle area 110 is provided on the metal enclosure 101 and is connected to the area that needs to be evaporated or processed.

[0023] The oil bath heating zone 102 is used to heat the material in the raw material crucible 109. The outer shell of the oil bath heating zone 102 is made of high temperature resistant and corrosion resistant carbon steel material, and the outermost layer is covered with ceramic fiber insulation material, which can effectively improve the thermal efficiency and thermal insulation performance. The interior of the oil bath heating zone 102 is separated by two insulating layers 104 and divided into three independent heating units, and the position of the insulating layer 104 is adjustable, so that different heating gradients can be formed to effectively improve the heating effect. The oil bath heating zone 102 includes two inner and outer shells, and the two shells are detachably connected. Each of the two shells includes two half shells, and the two half shells are connected. The connection is detachable by bolts, and multiple slots are provided between the inner and outer shells. The slots are engaged with the insulating layer 104 and are equipped with sealing rings, which can effectively improve the sealing effect and prevent oil leakage, so that the position of the insulating layer 104 can be easily adjusted to meet the evaporation temperature requirements. Three temperature sensors are installed on the outside of the oil bath heating zone 102, which can effectively detect and track the temperatures of different heating units, making it convenient to control the temperature. The oil bath heating zone 102 is distributed in a ring around the raw material crucible 109, and the bottom and side of the inner side of the oil bath heating zone 102 are attached to the surface of the evaporation zone 108 to ensure the uniformity and timeliness of heating.

[0024] The raw material crucible 109 is used to hold and heat organic matter and is made of high-temperature resistant and corrosion-resistant materials. The high-temperature resistant and corrosion-resistant materials of the raw material crucible 109 include ceramics, quartz, graphite or some special metal alloys, which can effectively increase the service life of the raw material crucible 109 and improve its durability.

[0025] The nozzle area 110 is used to transport the organic matter that is heated and converted into steam, and to transport the organic steam to an area that requires evaporation or treatment. The nozzles of the nozzle area 110 are made of graphite material and ceramic insulation material.

[0026] A method for using a device capable of achieving linear evaporation of organic matter comprises the following steps: Step 1: Adjustment: Disassemble the oil bath heating area 102 and adjust the positions of the two insulating layers 104 according to the use requirements to adjust the space and position of the three heating units. After the adjustment is completed, reinstall them together; Step 2: Select different types of media: Select different types of oil according to the heating temperature, and store three different oils in the oil pump. In step 2, select oils with different boiling points according to the maximum heating temperature. For example, if you need to heat to a higher temperature, choose an oil with a higher boiling point, such as silicone oil. Silicone oil can withstand a temperature of 300 degrees Celsius and is suitable for high-temperature reactions. Conversely, if you need to heat to a lower temperature, you can choose an oil with a lower boiling point, such as glycerin. Glycerin can reach a maximum temperature of 140-150 degrees Celsius. Step 3: Adding organic matter: adding the organic matter to be heated into the raw material crucible 109; Step 4, heating: The organic matter in the raw material crucible 109 is heated by three independent heating units with a gradient in the oil bath heating zone 102. After heating, the organic matter is converted into steam. Preheated inert gas is used as a pressurized carrier gas to increase the steam injection pressure. Before injection, the injected steam is subjected to a distribution density homogenization treatment. The organic matter vapor is transported to the area requiring evaporation or treatment by the nozzle area 110. In step 4, three temperature sensors are used to track the temperature of the three independent heating units. In addition, the nozzle structure of the nozzle area 110 is appropriately heated to prevent steam condensation. At the same time, the nozzle structure is insulated to prevent heat radiation to the substrate.

[0027] The above-mentioned device can be used as a linear directional source for PGTVD (pressurized vapor transport controlled directional deposition), using PGTVD technology for evaporation, with a fast deposition speed, and deposition speeds of 20nm-200nm / s can be achieved on different materials to be coated. The process window is wide, and different deposition rates and film densities can be achieved by adjusting the evaporation source temperature, vacuum level, substrate temperature, etc.; large-scale and wide-area coating uniformity is good, and the uniformity of film preparation within a width range of 600mm~1600mm can be controlled within ±5%; combined with the isolation design of the production line, the evaporation process is continuously controllable, highly uniform, and has good process repeatability; multiple material evaporation sources can be used for combined coating on the same production line, and doping and isolation are possible; the range of coating materials is wide, and almost all sublimation-type compounds or elements can be evaporated; combined with carrier gas control, saturated evaporation of organic materials and high-temperature metals can also be performed; coating can be performed in 360° directions, such as upward, downward, and tilted; the gaseous material has a high energy density and strong bonding between the film layer and the substrate.

[0028] During use, the oil bath heating zone 102 is first disassembled, and the positions of the two insulating layers 104 are adjusted according to the use requirements. The insulating layers 104 are inserted into different slots to adjust the space and position of the three heating units. After the adjustment is completed, they are reinstalled together, and the organic matter is placed in the raw material crucible 109 for oil bath heating. The oil bath heating zone 102 is divided into different areas by the insulating layer 104. Because the evaporation temperature required in different areas is different, a gradient method is adopted to achieve multi-gradient temperature control. Each heating unit in the oil bath heating zone 102 is respectively provided with an oil inlet 105 and an oil outlet 106. Different types of oil are poured into the oil pump port 107 according to the required temperature to complete the gradient control of the temperature. After the evaporation process is completed, it is discharged from the oil outlet 106. The heating effect of the oil bath heating zone 102 is used to evaporate the organic matter in the raw material crucible 109. The steam is sprayed toward the substrate in a linear jet through the nozzle area 110, and a uniform and dense film layer is formed on the substrate, so that the temperature can be conveniently controlled and adjusted in a gradient manner, making the heat conduction more uniform.

[0029] Meanwhile, the contents not described in detail in this specification belong to the prior art known to those skilled in the art.

[0030] It should be noted that, in this document, relational terms such as first and second, etc., are used only to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprises," "comprising," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that includes a list of elements includes not only those elements but also other elements not explicitly listed, or elements inherent to such process, method, article, or apparatus.

[0031] While embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that various changes, modifications, substitutions, and variations may be made to these embodiments without departing from the principles and spirit of the invention, and that the scope of the invention is defined by the appended claims and their equivalents.

Claims

1. A device capable of achieving linear evaporation of organic matter, characterized in that: The invention comprises a metal enclosure (101), wherein an oil bath heating zone (102) is provided inside the metal enclosure (101), wherein a plurality of pairs of oil inlets (105) and oil outlets (106) and two insulating layers (104) are provided inside the oil bath heating zone (102), wherein the ends of each pair of the oil inlets (105) and oil outlets (106) are connected to an oil pump port (107), wherein an evaporation zone (108) is provided inside the oil bath heating zone (102), wherein a raw material crucible (109) is fixedly connected to the inside of the evaporation zone (108) via a support frame (103), and wherein a nozzle zone (110) is provided at the top of the evaporation zone (108); The metal enclosure (101) is used to place an organic linear evaporation device, and the nozzle area (110) is provided on the metal enclosure (101) and is connected to an area requiring vapor deposition or treatment; The oil bath heating zone (102) is used to heat the material in the raw material crucible (109); the outer shell of the oil bath heating zone (102) is made of high temperature resistant and corrosion resistant carbon steel material, and the outermost layer is attached with ceramic fiber insulation material; The raw material crucible (109) is used to hold and heat organic matter and is made of a high-temperature-resistant and corrosion-resistant material; The nozzle area (110) is used to transport the organic matter that is heated and converted into steam, and to transport the organic matter steam to an area that requires evaporation or treatment. The nozzles of the nozzle area (110) are made of graphite material and ceramic insulation material.

2. The device for realizing linear evaporation of organic matter according to claim 1, characterized in that: The interior of the oil bath heating zone (102) is separated by two insulating layers (104) into three independent heating units, and the position of the insulating layer (104) is adjustable.

3. The device for realizing linear evaporation of organic matter according to claim 2, characterized in that: The three pairs of oil inlets (105) and oil outlets (106) are respectively arranged in different heating units, and the three pairs of oil inlets (105) and oil outlets (106) are all connected to an oil pump via an oil pump port (107), and different types of oil are stored in the oil pump.

4. The device for realizing linear evaporation of organic matter according to claim 1, characterized in that: The oil bath heating zone (102) comprises two inner and outer shells, the two shells are detachably connected, each of the two shells comprises two half shells, the two half shells are detachably connected via bolts, and a plurality of slots are provided between the inner and outer shells, the slots being snap-connected to the insulating layer (104).

5. The device for realizing linear evaporation of organic matter according to claim 1, characterized in that: The high temperature resistant and corrosion resistant material of the raw material crucible (109) includes ceramics, quartz, graphite or metal alloy.

6. The device for realizing linear evaporation of organic matter according to claim 1, characterized in that: Three temperature sensors are installed outside the oil bath heating zone (102).

7. The device for linear evaporation of organic matter according to claim 1, characterized in that: The oil bath heating zone (102) is distributed in a ring shape around the raw material crucible (109), and the bottom and side surfaces of the inner side of the oil bath heating zone (102) are attached to the surface of the evaporation zone (108).

8. A method for using a device capable of achieving linear evaporation of organic matter, characterized in that: The following steps are involved: Step 1, adjustment: disassemble the oil bath heating area (102), adjust the positions of the two insulating layers (104) according to the use requirements, so as to adjust the space and position of the three heating units, and reinstall them together after the adjustment is completed; Step 2: Select different types of media: Select different types of oil according to the heating temperature, and store three different types of oil in the oil pump; Step 3, adding organic matter: adding the organic matter to be heated into the raw material crucible (109); Step 4, heating: The organic matter in the raw material crucible (109) is heated by three independent heating units with a gradient in the oil bath heating zone (102). After the organic matter is heated, it is converted into steam. The preheated inert gas is used as a pressurized carrier gas, and the organic matter steam is transported from the nozzle zone (110) to the area where evaporation or treatment is required.

9. The method for using the device capable of achieving linear evaporation of organic matter according to claim 8, characterized in that: In the step 2, oils with different boiling points are selected according to the maximum heating temperature.

10. The method for using the device capable of achieving linear evaporation of organic matter according to claim 8, characterized in that: In the step 4, three temperature sensors are used to track the temperatures of the three independent heating units.

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