Contact machine tool probes and measuring equipment

Abstract

The present invention provides a contact machine tool probe and measuring equipment. The contact machine tool probe includes a housing, a collision detection mechanism, and an optical force sensing module. The collision detection mechanism is disposed within the housing and includes a probe and an elastic body. One end of the probe abuts the elastic body, while the other end of the probe penetrates the elastic body and is positioned outside the housing. A reflector is disposed within the elastic body. The optical force sensing module is disposed within the elastic body and opposite to the reflector. The present invention can improve measurement accuracy and sensitivity.

Description

Technical Field

[0001] The present invention relates to the technical field of mechanical processing, and in particular to a contact type machine tool probe and measuring equipment. Background Art

[0002] A contact probe is a device used for machining inspection that can be integrated with various machining equipment (such as machine tools, lathes, drilling machines, grinders, etc.) and high-precision inspection instruments (such as 2D detectors, three-dimensional coordinate measuring machines, etc.) to evaluate process parameters such as workpiece dimensional accuracy, surface quality, and machining errors.

[0003] Traditional contact probes utilize a three-point linkage structure, where contact detection is achieved through changes in the contact state of a spherical structure. A clamping mechanism secures the sphere, and a suspension system ensures that the probe returns to its original position after triggering. However, while this three-point linkage offers high repeatability, the asymmetric stiffness of the three-link system results in inconsistent trigger forces in different contact directions, affecting measurement accuracy. Furthermore, the stick-slip effect caused by the switching between sliding friction and static friction at the contact point produces a nonlinear mechanical response, reducing system sensitivity. Summary of the Invention

[0004] The present invention provides a contact type machine tool probe and measuring equipment, aiming to solve the problem of low measurement accuracy and sensitivity of the current contact type probe.

[0005] In a first aspect, the present invention provides a contact machine tool probe, which is applied to measuring equipment, and the contact machine tool probe includes a shell, a collision detection mechanism and an optical force sensing module; the collision detection mechanism is arranged in the shell, and the collision detection mechanism includes a probe and an elastomer, one end of the probe abuts the elastomer, and the other end of the probe passes through the elastomer and is placed on the outside of the shell, and a reflector is provided in the elastomer; the optical force sensing module is arranged in the elastomer and is arranged relative to the reflector.

[0006] Furthermore, the elastic body includes a bottom, a middle portion and a top portion; the middle portion and the bottom portion are spaced apart, and the first surface of the middle portion is connected to the bottom portion via an elastic connector, and the second surface of the middle portion is provided with the top portion.

[0007] Furthermore, the bottom is provided with a plurality of mounting holes passing through the bottom, and the mounting holes are used for mounting the reflector.

[0008] Furthermore, the reflector includes an adjusting portion and a reflector; the adjusting portion is installed in the installation hole, and the reflector is provided on the top of the adjusting portion.

[0009] Furthermore, the optical force sensing module includes a circuit board and an optical force sensor; the circuit board is arranged on the first surface of the middle part, the optical force sensor is arranged on the circuit board and electrically connected to the circuit board, and the optical force sensor is arranged opposite to the mounting hole; wherein, when the elastomer is deformed, the optical force sensor is used to detect the deformation amount of the elastomer according to the change of the optical signal.

[0010] Furthermore, a plurality of supporting parts are provided on the top end of the detection member, and the plurality of supporting parts are used to abut against the top.

[0011] Furthermore, a spherical body is provided at the end of the support portion, and a groove for limiting the spherical body is provided at the top relative to the spherical body.

[0012] Furthermore, the collision detection mechanism further includes a guide member, which is hollow and connected to the second surface of the middle portion to form a closed space, and the top portion and the top end of the detection member are arranged in the closed space.

[0013] Furthermore, the top end of the detection member is connected to the guide member through an elastic member.

[0014] In a second aspect, the present invention provides a measuring device, comprising any one of the contact-type machine tool probes described above.

[0015] The measuring device disclosed in the present invention includes a contact machine tool probe, which includes a shell and a collision detection mechanism and an optical force sensing module arranged in the shell. The collision detection mechanism includes a probe and an elastic body. The probe abuts the elastic body, and the elastic body is respectively provided with a reflector and an optical force sensing module arranged opposite to the reflector. When the probe contacts the object to be measured, the elastic body deforms, thereby changing the distance between the reflector and the optical force sensing module, and converting the deformation into an optical distance change. The contact force is then measured through the optical distance change, which can improve the measurement accuracy and sensitivity. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the following briefly introduces the drawings required for use in the description of the embodiments. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0017] Figure 1 This is an overall structural diagram of a contact machine tool probe provided by one embodiment of the present invention;

[0018] Figure 21 is a partial structural diagram of a contact type machine tool probe provided by one embodiment of the present invention;

[0019] Figure 3 is a cross-sectional view of a contact-type machine tool probe provided by one embodiment of the present invention;

[0020] Figure 4 is a partial cross-sectional view of a contact-type machine tool probe provided by one embodiment of the present invention;

[0021] Figure 5 This is a diagram showing the overall structure of an elastic body provided by one embodiment of the present invention;

[0022] Figure 6 is a cross-sectional view of an elastic body provided by one embodiment of the present invention;

[0023] Figure 7 yes Figure 6 A partial structural diagram of the cross-sectional view shown;

[0024] Figure 8 is a structural diagram of an optical force sensing module and a reflective element provided in one embodiment of the present invention;

[0025] Figure 9 This is a force demonstration diagram of a contact machine tool probe provided by an embodiment of the present invention;

[0026] Figure 10 is a relationship diagram between position change and contact force provided by one embodiment of the present invention;

[0027] Figure 11 FIG. 4 is a diagram showing the relationship between contact force and position change according to an embodiment of the present invention.

[0028] Description of the drawings: 100, contact machine tool probe; 10, housing; 20, collision detection mechanism; 21, detection member; 22, elastic body; 221, bottom; 222, middle; 223, top; 224, mounting hole; 225, support part; 226, spherical body; 227, groove; 23, reflector; 231, adjustment part; 232, reflector; 24, elastic connecting part; 30, optical force sensing module; 31, circuit board; 32, optical force sensor; 33, elastic member; 40, guide member; 50, elastic part. DETAILED DESCRIPTION

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present invention, not all of them. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present invention without making any creative efforts shall fall within the scope of protection of the present invention.

[0030] It will be understood that when used in this specification and the appended claims, the terms “include” and “comprising” indicate the presence of described features, integers, operations, elements and / or components, but do not preclude the presence or addition of one or more other features, integers, operations, elements, components and / or groups thereof.

[0031] It should also be understood that the terminology used in this specification is for the purpose of describing specific embodiments only and is not intended to limit the present invention. As used in this specification and the appended claims, the singular forms "a," "an," and "the" are intended to include the plural forms unless the context clearly indicates otherwise. It should further be understood that the term "and / or" as used in this specification and the appended claims refers to any and all possible combinations of one or more of the associated listed items, including and including such combinations.

[0032] Furthermore, directional terms used herein, such as "up," "down," "front," "back," "left," "right," "inside," "outside," and "side," are used solely to refer to the accompanying drawings and the orientation of the product in use. Therefore, these directional terms are intended to illustrate and facilitate understanding of the present invention and are not intended to limit the present invention. Furthermore, in the accompanying drawings, similar or identical structures are denoted by the same reference numerals.

[0033] See also Figures 1 to 11 , Figure 1 1 is an overall structural diagram of a contact type machine tool probe 100 provided in one embodiment of the present invention; Figure 2 FIG1 is a partial structural diagram of a contact type machine tool probe 100 provided in one embodiment of the present invention; Figure 3 is a cross-sectional view of a contact type machine tool probe 100 provided in one embodiment of the present invention; Figure 4 is a partial cross-sectional view of a contact type machine tool probe 100 provided in one embodiment of the present invention; Figure 5 1 is an overall structural diagram of an elastic body 22 provided in one embodiment of the present invention; Figure 6 is a cross-sectional view of an elastic body 22 provided in one embodiment of the present invention; Figure 7 yes Figure 6 A partial structural diagram of the cross-sectional view shown; Figure 8 is a structural diagram of an optical force sensing module 30 and a reflective element 23 provided in one embodiment of the present invention; Figure 9 This is a force demonstration diagram of a contact type machine tool probe 100 provided in one embodiment of the present invention; Figure 10 is a relationship diagram between position change and contact force provided by one embodiment of the present invention; Figure 11 FIG. 4 is a diagram showing the relationship between contact force and position change according to an embodiment of the present invention.

[0034] like Figures 1 to 11As shown, the contact machine tool probe 100 includes a shell 10, a collision detection mechanism 20 and an optical force sensing module 30; the collision detection mechanism 20 is arranged in the shell 10, and the collision detection mechanism 20 includes a probe 21 and an elastic body 22, one end of the probe 21 abuts against the elastic body 22, and the other end of the probe 21 passes through the elastic body 22 and is placed on the outside of the shell 10, and a reflector 23 is provided in the elastic body 22; the optical force sensing module 30 is arranged in the elastic body 22 and is arranged relative to the reflector 23.

[0035] Specifically, the contact machine tool probe 100 may include a housing 10, a collision detection mechanism 20, and an optical force sensing module 30. The housing 10 may be a cylindrical housing 10 having a hollow interior for mounting the collision detection mechanism 20 and the optical force sensing module 30. The bottom 221 of the housing 10 is provided with a base plate having at least one opening formed therein for passage of a detection portion of a detection member 21 of the collision detection mechanism 20, thereby facilitating contact between the detection portion and the object to be measured.

[0036] The collision detection mechanism 20 may include an elastic body 22 and a detection member 21. The elastic body 22 is disposed inside the housing 10 and is deformable under the action of an external force. The elastic body 22 is provided with a through hole for the detection member 21 to pass through. The detection portion of the detection member 21 passes through the through hole of the elastic body 22 and is placed outside the housing 10. The other end of the detection member 21, which is opposite to the detection portion, abuts against the top surface of the elastic body 22. When the detection portion contacts the object to be detected, an external force may be generated, which acts on the elastic body 22, causing the elastic body 22 to deform.

[0037] A reflective element 23 and an optical force sensing module 30 are also provided in the elastic body 22. The reflective element 23 and the optical force sensing module 30 are arranged relative to each other. For example, the reflective element 23 and the optical force sensor 32 can be arranged relative to each other in the upper and lower parts of the elastic body 22. When the elastic body 22 is deformed, the distance between the reflective element 23 and the optical force sensor 32 can be changed, thereby converting the deformation amount into a change in the optical distance, and then measuring the contact force through the change in the optical distance. This can avoid the low accuracy caused by the asymmetric stiffness of the three-link system and the low sensitivity caused by the stick-slip effect.

[0038] As a further embodiment, the elastomer 22 includes a bottom 221, a middle part 222 and a top 223; the middle part 222 is spaced apart from the bottom 221, and the first surface of the middle part 222 is connected to the bottom 221 through an elastic connecting member 24, and the second surface of the middle part 222 is provided with the top 223.

[0039] The elastomer 22 may include a bottom 221, a middle portion 222 and a top 223. The middle portion 222 and the bottom 221 are spaced apart, that is, a gap is left between the middle portion 222 and the bottom 221. A reflector 23 may be provided on one side of the gap, and an optical force sensing module 30 may be provided on the other side of the gap. For example, an optical force sensing module 30 is provided on the first surface of the middle portion 222, and a reflector 23 is provided on the surface of the bottom 221 facing the middle portion 222. At the same time, the middle portion 222 and the bottom 221 are connected by an elastic connecting member 24. When the detection member 21 contacts the object to be measured, the elastomer 22 is deformed, which in turn causes the elastic connecting member 24 to deform, and the distance between the middle portion 222 and the bottom 221 is shortened, causing the distance between the reflector 23 and the optical force sensing module 30 to be shortened.

[0040] The second surface of the middle portion 222 is provided with a top portion 223, and the top portion 223 is used to abut against the top end of the detection member 21. In addition, the top portion 223, the middle portion 222, the bottom portion 221 and the elastic connecting member 24 can be integrally formed.

[0041] As a further embodiment, the bottom 221 is provided with a plurality of mounting holes 224 passing through the bottom 221 , and the mounting holes 224 are used for mounting the reflector 23 .

[0042] The bottom portion 221 may be provided with a plurality of mounting holes 224 extending therethrough, with each mounting hole 224 being used to mount a reflector 23. For example, the top portion 223, the middle portion 222, and the bottom portion 221 may all be circular, and multiple mounting holes 224, such as four mounting holes 224, may be provided at equal intervals around the bottom portion 221, with each mounting hole 224 housing a reflector 23. Furthermore, an optical force sensing module 30 may be provided on the first surface of the middle portion 222, i.e., the surface facing the bottom portion 221. The optical force sensor 32 of the optical force sensing module 30 is positioned opposite the reflector 23, with one optical force sensor 32 corresponding to one reflector 23.

[0043] During actual measurement, when the probe 21 contacts the object to be measured, the contact machine tool probe 100 can be squeezed to make the probe 21 squeeze the object to be measured, thereby generating a contact force. Due to the interaction of forces, the object to be measured will simultaneously squeeze the contact machine tool probe 100, causing the elastic body 22 to deform. When the elastic body 22 is deformed, the elastic connecting member 24 located between the middle part 222 and the bottom 221 will also be deformed, thereby changing the distance between the bottom 221 and the middle part 222, and then changing the distance between the reflector 23 and the optical force sensor 32, and the deformation amount can be converted into an optical distance change.

[0044] As a further embodiment, the reflector 23 includes an adjusting portion 231 and a reflector 232 ; the adjusting portion 231 is installed in the installation hole 224 , and the reflector 232 is provided on the top 223 of the adjusting portion 231 .

[0045] The reflector 23 may include an adjustment portion 231 and a reflector 232. The adjustment portion 231 may be a cylinder embedded in the mounting hole 224. A reflector 232 is provided at the top of the adjustment portion 231. The reflector 232 is aligned with the optical force sensor 32. The reflector 232 is provided on the adjustment portion 231, and the adjustment portion 231 is provided in the mounting hole 224 of the bottom 221. This allows the reflector 232 to be unaffected by the contact force of the detector 21, thereby ensuring the reference of the optical signal. The alignment of the reflector 232 and the optical force sensor 32 allows the distance between the optical force sensor 32 and the reflector 232 to change proportionally with the applied force, such as Figure 7 shown.

[0046] In addition, the surface of the adjustment part 231 can be a threaded surface, and the inner wall of the mounting hole 224 can also be a threaded surface. The height of the reflector 232 can be adjusted by rotating the adjustment part 231 to eliminate the error of the initial position of the reflector 232 and ensure measurement accuracy.

[0047] As a further embodiment, the optical force sensing module 30 includes a circuit board 31 and an optical force sensor 32; the circuit board 31 is arranged on the first surface of the middle part 222, the optical force sensor 32 is arranged on the circuit board 31 and electrically connected to the circuit board 31, and the optical force sensor 32 is arranged opposite to the mounting hole 224; wherein, when the elastomer 22 is deformed, the optical force sensor 32 is used to detect the deformation amount of the elastomer 22 according to the change of the optical signal.

[0048] Among them, Figure 8 As shown, the optical force sensing module 30 may include a circuit board 31 and optical force sensors 32. The circuit board 31 is disposed on the first surface of the central portion 222, that is, the surface of the central portion 222 facing the bottom portion 221. The circuit board 31 may be an annular circuit board 31, consistent with the shape of the central portion 222. Multiple optical force sensors 32 are evenly spaced on the circuit board 31, for example, four optical force sensors 32 are disposed therein. Four mounting holes 224 are aligned on the bottom portion 221, each of which houses an adjustment portion 231. Each adjustment portion 231 is provided with a reflector 232. Alternatively, the optical force sensors 32 may be reflective optical force sensors.

[0049] During actual measurement, when the elastic body 22 deforms, the distance between the optical force sensor 32 and the reflector 232 changes. This distance change is converted into a light signal change, which is then converted into a readable voltage output change. Assuming the voltage output signals of the four optical force sensors 32 are V1, V2, V3, and V4, respectively, and the contact force is F, the output contact force vector F can be described as:

[0050]

[0051] Where Fz is the force component along the probe axis (usually the vertical direction, i.e. the z-axis of the coordinate system), M x M is the component of the torque acting on the probe that causes the stylus to rotate around the x-axis (the x-axis is usually horizontal), y The component of the torque acting on the probe that rotates the stylus about the y-axis (the y-axis is usually the horizontal longitudinal axis). The voltage output can be calculated as a force / torque value using an n×m decoupling matrix K, such as a 4×4 decoupling matrix. Voltage vector V = [v1 v2 v3 v4] T The decoupling matrix K can be obtained from the optical force sensor 32. The decoupling matrix K can be determined during calibration using a linear fitting algorithm, such as the least squares method (LM). During calibration, a known force / torque is applied to the optical force sensor 32 and the corresponding voltage is recorded. The optimal decoupling matrix K is then calculated from the dataset to minimize the error.

[0052] As a further embodiment, a plurality of supporting portions 225 are provided on the top end of the detection member 21 , and the plurality of supporting portions 225 are used to abut against the top portion 223 .

[0053] Among them, Figure 9 As shown, the top of the probe 21 is provided with a plurality of support portions 225. The plurality of support portions 225 are arranged around the top of the probe 21. For example, three support portions 225 are provided, and the three support portions 225 are evenly spaced at the top of the probe 21. One end of each support portion 225 is fixedly connected to the probe 21, and the other end thereof abuts against the top 223 of the elastic body 22. When the elastic body 22 deforms, the end of the support portion 225 connected to the top 223 of the elastic body 22 squeezes the elastic body 22, causing the elastic body 22 to deform, thereby changing the distance between the optical force sensor 32 and the reflector 232.

[0054] As a further embodiment, a spherical body 226 is provided at the end of the support portion 225 , and a groove 227 for limiting the position of the spherical body 226 is provided on the top portion 223 relative to the spherical body 226 .

[0055] A spherical body 226 may be provided at the end of the support portion 225, and a groove 227 may be provided at the top 223 of the elastic body 22 relative to the spherical body 226. The groove 227 may be a V-shaped groove for resetting the spherical body 226, ensuring consistency in resetting the elastic member 33 after deflection, and improving the accuracy of repeated measurements. Figure 9 As shown, three support parts 225 can be provided, the angle between each two support parts 225 is 120°, and a spherical body 226 is provided at the end of each support part 225. At the same time, three grooves 227 are provided on the top 223 of the elastomer 22, and each groove 227 is used to place a spherical body 226.

[0056] The following is a specific example. A known force / torque (e.g., vertical force Fz = 0.1 N, moment Mx = 0.02 N·m) is applied to the probe 21. The voltage outputs V1 to V4 of the four optical force sensors 32 are recorded. When Fz = 0.1 N is applied, the voltage vector V = [2.0, 2.0, 3.0, 3.0] T The decoupling matrix K was obtained by least squares fitting, so that the mapping error between voltage and force was ≤ 0.005 N. Based on the measurement requirements, the trigger force threshold was set to 0.06 N.

[0057] The measurement was started under the above parameters. The initial distance between the optical force sensor 32 and the reflector 232 was 1 mm. The output voltage V0 = [2.5, 2.5, 2.5, 2.5] T When the probe 21 contacts the workpiece surface, the external contact force (e.g., Fz = 0.06N) is transferred from the probe 21 to the spherical body 226 , to the groove 227 , and then to the elastic body 22 , causing the elastic body 22 to deform. The support portion 225 is compressed by 0.05μm in the z-direction, causing the circuit board 31 to move toward the reflector 232 . The distance between the optical force sensor 32 and the reflector 232 is shortened from 1mm to 0.99995mm (a change of 0.05μm). The output voltage of the optical force sensor 32 becomes V = [2.55, 2.55, 2.45, 2.45] T (V1 / V2 increases, V3 / V4 decreases, corresponding to the z-direction force.) The force vector is calculated using the 4×4 decoupling matrix K:

[0058]

[0059] When the calculated Fz=0.06N exceeds the preset threshold, a digital trigger signal (logical high level) is generated, and the machine tool system records the position P0 of the probe 21 at this time. Figure 10 As shown, Figure 10The horizontal axis represents the position change of the probe 21, and the vertical axis represents the contact force detected by the probe 21. When the probe 21 approaches the workpiece, the position change of the horizontal axis gradually increases, and the contact force on the vertical axis starts to rise from 0. After the probe 21 contacts the workpiece, the contact force increases rapidly. After the probe 21 contacts the workpiece, the elastic body 22 will deform. This deformation will cause an error in the actual position of the probe 21 at the time of contact, so it is necessary to increase the compensation amount. Figure 11 As shown, Figure 11 The horizontal axis is the contact force, and the vertical axis is the position change of the elastic body 22, that is, the deformation of the elastic body 22. For example, if the position change corresponding to 0.06N is 0.3μm, then the actual contact position = P0 + compensation amount (0.3μm), that is, the final position is (10,20,5.0003)mm.

[0060] As a further embodiment, the collision detection mechanism 20 further includes a guide member 40, which is hollow and connected to the second surface of the middle portion 222 to form a closed space, in which the top 223 and the top end of the detection member 21 are provided.

[0061] Among them, the collision detection mechanism 20 can also include a guide member 40, which is hollow and connected to the second surface of the middle part 222 to form a closed space, in which the top 223 of the elastomer 22 and the top of the detection member 21 are provided. When the detection member 21 is deflected by the contact force, the guide member 40 limits its movement trajectory so that it moves axially or in a preset direction. At the same time, the guide member 40 also prevents the detection member 21 from shaking or offsetting laterally when subjected to force, ensuring that the deformation is only caused by the contact force and avoiding additional errors. After the contact force disappears, when the elastic member 33 pushes the detection member 21 to reset, the guide member 40 and the groove 227 work together. The inclined structure of the groove 227 guides the detection member 21 to return to the initial position along a fixed path, and the guide member 40 limits the axial displacement range to make the reset deviation less than 0.1°.

[0062] In addition, a plurality of elastic portions 50 may be provided between the top end of the guide member 40 and the top end of the housing 10, such as Figure 2 As shown, a plurality of elastic portions 50 are used to buffer the force between the housing and the guide member 40 .

[0063] As a further embodiment, the top end of the detection member 21 is connected to the guide member 40 via an elastic member 33 .

[0064] The top end of the probe 21 is connected to the guide 40 via an elastic member 33, which can be a spring. The elastic member 33, in conjunction with the guide 40 and the groove 227, ensures the stability and consistent return of the probe 21. When the contact force disappears, the elastic member 33 pushes the probe 21 back into position.

[0065] The present invention also provides a measuring device, which includes the contact machine tool probe 100 described in any one of the above embodiments; the contact machine tool probe 100 includes a shell 10, a collision detection mechanism 20 and an optical force sensing module 30; the collision detection mechanism 20 is arranged in the shell 10, and the collision detection mechanism 20 includes a probe 21 and an elastic body 22, one end of the probe 21 abuts against the elastic body 22, and the other end of the probe 21 passes through the elastic body 22 and is placed on the outside of the shell 10, and a reflector 23 is provided in the elastic body 22; the optical force sensing module 30 is arranged in the elastic body 22 and is arranged relative to the reflector 23.

[0066] Specifically, the contact machine tool probe 100 may include a housing 10, a collision detection mechanism 20, and an optical force sensing module 30. The housing 10 may be a cylindrical housing 10 having a hollow interior for mounting the collision detection mechanism 20 and the optical force sensing module 30. The bottom 221 of the housing 10 is provided with a base plate having at least one opening formed therein for passage of a detection portion of a detection member 21 of the collision detection mechanism 20, thereby facilitating contact between the detection portion and the object to be measured.

[0067] The collision detection mechanism 20 may include an elastic body 22 and a detection member 21. The elastic body 22 is disposed inside the housing 10 and is deformable under the action of an external force. The elastic body 22 is provided with a through hole for the detection member 21 to pass through. The detection portion of the detection member 21 passes through the through hole of the elastic body 22 and is placed outside the housing 10. The other end of the detection member 21, which is opposite to the detection portion, abuts against the top surface of the elastic body 22. When the detection portion contacts the object to be detected, an external force may be generated, which acts on the elastic body 22, causing the elastic body 22 to deform.

[0068] A reflective element 23 and an optical force sensing module 30 are also provided in the elastic body 22. The reflective element 23 and the optical force sensing module 30 are arranged relative to each other. For example, the reflective element 23 and the optical force sensor 32 can be arranged relative to each other in the upper and lower parts of the elastic body 22. When the elastic body 22 is deformed, the distance between the reflective element 23 and the optical force sensor 32 can be changed, thereby converting the deformation amount into a change in the optical distance, and then measuring the contact force through the change in the optical distance. This can avoid the low accuracy caused by the asymmetric stiffness of the three-link system and the low sensitivity caused by the stick-slip effect.

[0069] The contact machine tool probe and measuring equipment disclosed in the present invention are characterized by deformation of the elastic body when the probe contacts the object to be measured, thereby changing the distance between the reflector and the optical force sensing module, converting the deformation into a change in optical distance, and then measuring the contact force through the change in optical distance, which can improve measurement accuracy and sensitivity.

[0070] The above description is merely a specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in the present invention, and such modifications or substitutions are intended to be within the scope of protection of the present invention. Therefore, the scope of protection of the present invention shall be subject to the scope of protection of the claims.

Claims

1. A contact type machine tool probe, characterized in that: Applied to measuring equipment, the contact type machine tool probe comprises: case; a collision detection mechanism disposed in the housing and comprising a detection member and an elastic body, wherein one end of the detection member abuts against the elastic body, the other end of the detection member penetrates the elastic body and is disposed outside the housing, and a reflector is disposed within the elastic body; an optical force sensing module disposed within the elastic body and opposite to the reflective element; Wherein, the elastic body comprises a bottom portion, a middle portion and a top portion; The middle portion is spaced apart from the bottom portion, and a first surface of the middle portion is connected to the bottom portion via an elastic connector, and a second surface of the middle portion is provided with the top portion; The bottom is provided with a plurality of mounting holes passing through the bottom, and the mounting holes are used for mounting the reflector; The optical force sensing module includes a circuit board and an optical force sensor; The circuit board is provided on the first surface of the middle portion, the optical force sensor is provided on the circuit board and is electrically connected to the circuit board, and the optical force sensor is arranged opposite to the mounting hole; Wherein, when the elastic body is deformed, the optical force sensor is used to detect the deformation amount of the elastic body according to the change of the optical signal; The top end of the detection member is provided with a plurality of supporting parts, and the plurality of supporting parts are used to abut against the top; A spherical body is provided at the end of the support portion, and a groove for limiting the spherical body is provided at the top relative to the spherical body.

2. The contact type machine tool probe according to claim 1, wherein: The reflecting member includes an adjusting portion and a reflecting mirror; The adjusting portion is installed in the installation hole, and the reflector is provided on the top of the adjusting portion.

3. The contact type machine tool probe according to claim 1, wherein: The collision detection mechanism further includes a guide member, which is hollow and connected to the second surface of the middle portion to form a closed space, in which the top and the top end of the detection member are arranged.

4. The contact type machine tool probe according to claim 3, wherein: The top end of the detection member is connected to the guide member through an elastic member.

5. A measuring device, characterized in that The invention comprises a contact type machine tool probe as described in any one of claims 1 to 4.

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