Silicon micro gyroscope modal matching control system and method based on sideband pilot signal phase response

Abstract

The invention discloses a silicon microgyroscope modal matching control system and method based on sideband pilot signal phase response. The system comprises an upper sideband pilot signal input module and a lower sideband pilot signal input module, wherein the upper sideband pilot signal input module and the lower sideband pilot signal input module respectively input upper sideband pilot signals and lower sideband pilot signals into a silicon micromechanical gyroscope; the vibration displacement extraction module is used for extracting a vibration signal of the silicon micromechanical gyroscope to obtain a double-sideband pilot frequency response signal; the double-sideband pilot frequency response signal demodulation module demodulates the double-sideband pilot frequency response signal to obtain sine and cosine component amplitude information of upper and lower sideband pilot frequency signals; a tuning criterion calculation and compensation module obtains a compensated split frequency difference identification quantity according to sine and cosine component amplitude information of the upper and lower sideband pilot signals; and the proportional-integral control module generates tuning voltage according to the compensated splitting frequency difference identification quantity and outputs the tuning voltage to the silicon micromechanical gyroscope to tune and detect the modal resonant frequency until the splitting frequency difference identification quantity is controlled to be zero, so that a modal matching state is realized. The invention solves the technical limitation problem of modal matching in the prior art.

Description

Technical Field

[0001] The present invention belongs to the technical field of silicon micromechanical gyroscopes, and relates to a silicon micro-gyroscope mode matching control system and method based on sideband pilot signal phase response. Background Art

[0002] As research on silicon microgyroscopes deepens, modal matching technology has become a key technical challenge urgently needed to overcome. Studies have shown that due to limitations in structural processing, cleaning processes, and residual material stress, actual manufactured gyroscopes struggle to achieve the theoretically designed resonant frequency. This leads to a deviation in the resonant frequencies of the driving and detection modes, a phenomenon known as frequency splitting. The degree of frequency splitting varies significantly among gyroscopes. This phenomenon causes the detection mode to deviate from its optimal operating state, significantly reducing the gyroscope's mechanical sensitivity and becoming a major bottleneck restricting its performance.

[0003] To address the frequency splitting problem introduced during the manufacturing process, modal matching technology has become a key technical approach to improving the mechanical sensitivity and signal-to-noise ratio of gyroscopes by reducing the splitting frequency difference. Currently, frequency tuning technologies are mainly divided into two categories: permanent mechanical tuning and electrostatic tuning. Permanent mechanical tuning technology mainly achieves frequency adjustment by changing the stiffness and mass distribution of the resonant structure through methods such as selective deposition and laser ablation. However, due to inherent defects such as high processing difficulty, poor controllability, and low repeatability, its application in gyroscope modal frequency difference adjustment is significantly limited.

[0004] In contrast, electrostatic tuning technology, based on the electrostatic negative stiffness effect, offers the advantage of non-permanent adjustment. This technology applies a controllable DC voltage to the tuning electrodes to change the structural equivalent stiffness, thereby achieving precise adjustment of the resonant frequency. Depending on the application scenario, electrostatic tuning can be categorized into two methods: primary mode matching and real-time mode matching. While primary mode matching can effectively improve gyroscope performance, it does not function properly under dynamic angular velocity input conditions, presenting significant application limitations. Summary of the Invention

[0005] Purpose of the invention: The purpose of the present invention is to provide a silicon micro gyroscope modal matching control system and method based on the phase response of the sideband pilot signal to solve the limitations of the modal matching technology in the prior art.

[0006] Technical solution: The present invention discloses a silicon micro-gyroscope modal matching control system based on the phase response of a sideband pilot signal, comprising: a silicon micro-machined gyroscope, an upper sideband pilot signal input module, a lower sideband pilot signal input module, a vibration displacement extraction module, a double-sideband pilot response signal demodulation module, a tuning criterion calculation and compensation module, and a proportional-integral control module. The upper sideband pilot signal input module and the lower sideband pilot signal input module respectively input the upper sideband pilot signal and the lower sideband pilot signal into the silicon micro-machined gyroscope; the vibration displacement extraction module extracts the vibration signal of the silicon micro-machined gyroscope to obtain a double-sideband pilot response signal; and the double-sideband pilot response signal demodulation module demodulates the double-sideband pilot response signal. The amplitude information of the sine component and its cosine component of the upper sideband pilot signal and the amplitude information of the sine component and its cosine component of the lower sideband pilot signal are obtained, and the amplitude information matrix is further obtained; the tuning criterion calculation and compensation module multiplies the diagonal terms of the amplitude information matrix and accumulates the results to obtain the cracking frequency difference identification of the modal matching control loop based on the phase response of the sideband pilot signal, and compensates the cracking frequency difference identification to obtain the compensated cracking frequency difference identification; the proportional-integral control module generates a tuning voltage according to the compensated cracking frequency difference identification and outputs it to the silicon micromechanical gyroscope to tune and detect the modal resonant frequency until the cracking frequency difference identification is controlled to zero to achieve the modal matching state.

[0007] Optionally, the silicon micromechanical gyroscope includes a detection modal force feedback electrode, a detection modal readout electrode and a frequency tuning electrode. The upper sideband pilot signal and the lower sideband pilot signal are input into the silicon micromechanical gyroscope via the detection modal force feedback electrode to stimulate the silicon micromechanical gyroscope to generate comb vibration displacement, which is read out to the vibration displacement extraction module via the detection modal readout electrode. The tuning voltage generated by the proportional integral control module is applied to the frequency tuning electrode. Based on the electrostatic negative stiffness effect, the detection modal equivalent stiffness is adjusted to change the detection modal resonant frequency.

[0008] Optionally, the upper sideband pilot signal input module and the lower sideband pilot signal input module add the upper sideband pilot signal and the lower sideband pilot signal through an adder and then input the sum into the silicon micromachined gyroscope.

[0009] Optionally, the expression of the cracking frequency difference identification quantity is:

[0010]

[0011] Among them, V judge is the identification value of the cracking frequency difference, A out1 is the upper sideband signal response amplitude, A out2 is the lower sideband signal response amplitude, is the upper sideband signal response phase angle, is the lower sideband signal response phase angle;

[0012] Further analysis of the cracking frequency difference identification yields the compensation coefficient η:

[0013]

[0014] Among them, ω x is the driving mode resonant frequency, ω y To detect the modal resonant frequency, ω band is the sideband offset frequency;

[0015] When the modes match, the above formula can be further expressed as:

[0016]

[0017] The compensation coefficient η is used to compensate the cracking frequency difference identification value, and the expression of the compensated cracking frequency difference identification value is:

[0018]

[0019] Among them, V judge_final is the compensation of the cracking frequency difference identification.

[0020] The present invention provides a silicon micro-gyroscope mode matching control method based on the phase response of a sideband pilot signal, comprising the following steps:

[0021] The silicon micromechanical gyroscope generates a pilot modulation force according to the upper sideband pilot signal and the lower sideband pilot signal input by the upper sideband pilot signal input module and the lower sideband pilot signal input module, thereby stimulating the silicon micromechanical gyroscope to generate comb vibration, and outputs the vibration to the vibration displacement extraction module;

[0022] The vibration displacement extraction module extracts the double-sideband pilot response signal;

[0023] The double-sideband pilot response signal demodulation module performs minimum mean square demodulation on the double-sideband pilot response signal to obtain the amplitude information of the upper sideband pilot signal sine component, the amplitude information of the upper sideband pilot signal cosine component, the amplitude information of the lower sideband pilot signal sine component and the amplitude information of the lower sideband pilot signal cosine component, and further obtains the amplitude information matrix;

[0024] The tuning criterion calculation and compensation module multiplies the diagonal terms of the amplitude information matrix and accumulates the results to obtain the cracking frequency difference identification value of the mode matching control loop based on the phase response of the sideband pilot signal. The cracking frequency difference identification value is further analyzed to obtain the criterion asymmetry, and the criterion asymmetry is used to compensate the cracking frequency difference identification value to obtain the compensated cracking frequency difference identification value.

[0025] The compensated cracking frequency difference identification is used as the phase tuning criterion and sent to the proportional-integral control module to generate a tuning voltage output to the silicon micromachined gyroscope to tune and detect the modal resonant frequency until the cracking frequency difference identification is controlled to zero, achieving the modal matching state.

[0026] Furthermore, the pilot modulation force F generated by the upper sideband pilot signal and the lower sideband pilot signal in for:

[0027] F in =K vf ·[A1sin[(ω x +ω band )t]+A2sin[(ω x -ω band )t]]

[0028] =A in1 sin[(ω x +ω band )t]+A in2 sin[(ω x +ω band )t]

[0029] Among them, K vf is the voltage-to-force conversion gain of the detection mode; ω band is the sideband offset frequency; A1 is the upper sideband excitation signal amplitude, A2 is the lower sideband excitation signal amplitude, A in1 is the upper sideband excitation amplitude, A in2 is the amplitude of the lower sideband excitation force, ω x is the driving mode resonant frequency, and t is the time.

[0030] Furthermore, the double-sideband pilot response signal V out for:

[0031]

[0032] Among them, V out1 is the upper sideband response signal, V out2 is the lower sideband response signal, A out1 is the upper sideband signal response amplitude, A out2 is the lower sideband signal response amplitude, ω x is the driving modal resonant frequency, is the upper sideband response phase angle, is the lower sideband response phase angle; when the silicon micromechanical gyroscope reaches the mode matching state, the upper and lower sideband response phase angles and It has the characteristic of being symmetrical about -90°; therefore, in the modal matching state, we have:

[0033] Furthermore, the amplitude information matrix M is expressed as:

[0034]

[0035] Among them, m 1s is the amplitude information of the sinusoidal component of the upper sideband pilot signal, m 1c is the amplitude information of the cosine component of the upper sideband pilot signal, m 2s is the amplitude information of the sinusoidal component of the lower sideband pilot signal, m 2c is the cosine component amplitude information of the lower sideband pilot signal, ω band is the sideband offset frequency, is the upper sideband response phase angle, is the lower sideband response phase angle, A out1 is the upper sideband signal response amplitude, A out2 is the lower sideband signal response amplitude, ω x is the driving mode resonant frequency.

[0036] Furthermore, the expression of the cracking frequency difference identification quantity is:

[0037]

[0038] Among them, V judge is the identification value of the cracking frequency difference, A out1 is the upper sideband signal response amplitude, A out2 is the lower sideband signal response amplitude, is the upper sideband response phase angle, is the lower sideband response phase angle;

[0039] Further analysis of the cracking frequency difference identification yields the compensation coefficient η:

[0040]

[0041] Among them, ω x is the driving mode resonant frequency, ω y To detect the modal resonant frequency, ω band is the sideband offset frequency;

[0042] When the modes match, the above formula can be further expressed as:

[0043]

[0044] The compensation coefficient η is used to compensate the cracking frequency difference identification value, and the expression of the compensated cracking frequency difference identification value is:

[0045]

[0046] Among them, V judge_finalis the compensation of the cracking frequency difference identification.

[0047] An electronic device for storing and executing the method includes a memory, a processor, and a computer program / instruction stored in the memory and executable on the processor. When the computer program / instruction is executed by the processor, the steps of the silicon microgyroscope mode matching control method based on the phase response of the sideband pilot signal are implemented.

[0048] Beneficial effects: Compared with the prior art, the significant technical effects of the present invention are: utilizing the input double-sideband pilot signal response phase information, through the vibration displacement extraction module, the double-sideband pilot response signal demodulation module and the tuning criterion calculation and compensation module, the decomposition frequency difference between modes is converted into a phase tuning criterion of the modal matching control system, and the proportional-integral control module is used to control the frequency difference identification amount, thereby realizing automatic modal matching of the silicon micromechanical gyroscope and solving the limitations of the modal matching technology in the prior art. BRIEF DESCRIPTION OF THE DRAWINGS

[0049] Figure 1 This is a block diagram of the silicon microgyroscope modal matching system based on the sideband pilot signal phase response of the present invention;

[0050] Figure 2 This is a block diagram of a double-sideband pilot response signal demodulation module according to the present invention;

[0051] Figure 3 This is a block diagram of the phase tuning criterion calculation and compensation module implementation of the present invention. DETAILED DESCRIPTION

[0052] The present invention will be described in detail below with reference to the accompanying drawings and specific embodiments.

[0053] The present invention utilizes the input double-sideband pilot signal response phase information to extract the identification quantity that characterizes the frequency difference between modal splitting, and uses a proportional-integral control module to achieve real-time automatic adjustment of the frequency difference, thereby solving the limitation problem of modal matching technology in the prior art.

[0054] like Figure 1As shown, the overall system includes a silicon micromachined gyroscope, an upper sideband pilot signal input module, a lower sideband pilot signal input module, a vibration displacement extraction module, a double-sideband pilot response signal demodulation module, a tuning criterion calculation and compensation module, and a proportional-integral control module. The silicon micromachined gyroscope includes a detection modal force feedback electrode, a detection modal readout electrode, and a frequency tuning electrode. The upper sideband pilot signal input module and the lower sideband pilot signal input module are connected to the detection modal force feedback electrode via an adder. The detection modal readout electrode is sequentially connected to the vibration displacement extraction module, the double-sideband pilot response signal demodulation module, the tuning criterion calculation and compensation module, the proportional-integral control module, and the frequency tuning electrode. The upper sideband pilot signal input by the upper sideband pilot signal input module and the lower sideband pilot signal input by the lower sideband pilot signal input module are added and input into the detection modal force feedback electrode. The detection modal force feedback electrode outputs a voltage signal to generate a pilot modulation force, thereby causing the silicon micromechanical gyroscope to vibrate. The detection modal readout electrode outputs the vibration displacement signal to the vibration displacement extraction module. The vibration displacement extraction module extracts the double-sideband pilot response signal. The double-sideband pilot response signal is input into the double-sideband pilot response signal demodulation module for demodulation to obtain the upper sideband pilot signal sine component amplitude information, the upper sideband pilot signal cosine component amplitude information, the lower sideband pilot signal sine component amplitude information and the lower sideband pilot signal. cosine component amplitude information; the tuning criterion calculation and compensation module calculates the cracking frequency difference identification amount of the modal matching control loop based on the phase response of the sideband pilot signal according to the sine component amplitude information of the upper sideband pilot signal, the cosine component amplitude information of the upper sideband pilot signal, the sine component amplitude information of the lower sideband pilot signal and the cosine component amplitude information of the lower sideband pilot signal, and compensates the cracking frequency difference identification amount to obtain the compensated cracking frequency difference identification amount; the compensated cracking frequency difference identification amount is used as the phase tuning criterion and sent to the proportional integral control module to generate a tuning voltage output to the frequency tuning electrode to tune the detection modal resonant frequency until the cracking frequency difference identification amount is controlled to zero, indicating that the modal matching state is reached.

[0055] Specifically: the input double-sideband pilot signal is detected by the modal force feedback electrode to stimulate the silicon micro-gyroscope to generate comb vibration displacement, which is read out by the detection modal readout electrode to the vibration displacement extraction module. The vibration displacement extraction module converts the comb vibration displacement of the silicon micro-gyroscope into a voltage change to obtain a double-sideband response signal, which is input into the double-sideband pilot response signal demodulation module to obtain the amplitude information of the sine and cosine components representing the upper and lower sidebands, and input into the phase tuning criterion calculation and compensation module to obtain the cracking frequency difference identification amount after coefficient optimization compensation, which is input into the proportional-integral control module as a tuning criterion. The proportional-integral control module generates a tuning voltage and applies it to the frequency tuning electrode. Based on the electrostatic negative stiffness effect, the detection modal equivalent stiffness is adjusted to change the detection modal resonant frequency until the detection modal resonant frequency is equal to the driving modal resonant frequency, completing the negative feedback closed-loop control.

[0056] A silicon micro gyroscope mode matching control method based on the phase response of a sideband pilot signal comprises the following steps:

[0057] S1. The silicon micromechanical gyroscope generates a pilot modulation force based on the input upper sideband pilot signal and lower sideband pilot signal, thereby causing the gyroscope to vibrate. Specifically:

[0058] The driving mode resonance frequency ω is applied through the upper sideband pilot signal input module and the lower sideband pilot signal input module. x Symmetrical upper sideband pilot signal A1sin[(ω x +ω band )t] and the lower sideband pilot signal A2 sin[(ω x -ω band )t] to the detection modal force feedback electrode. Then the pilot modulation force F generated by the upper and lower sideband pilot signals in for:

[0059]

[0060] Among them, K vf is the voltage-to-force conversion gain of the detection mode; ω band is the sideband offset frequency; A1 is the upper sideband excitation signal amplitude, A2 is the lower sideband excitation signal amplitude, A in1 is the upper sideband excitation amplitude, A in2 is the amplitude of the lower sideband excitation force, ω x is the driving mode resonant frequency, and t is the time.

[0061] S2, extracting the gyro vibration signal to obtain a double-sideband pilot response signal;

[0062] The input double-side band pilot signal generates a pilot modulation force based on the electrostatic drive principle, causing the gyroscope to vibrate and generate comb tooth vibration displacement. The displacement is read out by the detection mode readout electrode. The vibration displacement extraction module is connected to the detection mode readout electrode. After the vibration displacement extraction module, the silicon micro gyroscope comb tooth vibration displacement change is converted into a voltage change to obtain the double-side band pilot response signal V out for:

[0063]

[0064] Among them, V out1 is the upper sideband response signal, V out2 is the lower sideband response signal, A out1 is the upper sideband signal response amplitude, A out2 is the lower sideband signal response amplitude, is the upper sideband response phase angle, is the lower sideband response phase angle, ωx is the driving mode resonant frequency.

[0065] Among them, when the silicon micromechanical gyroscope reaches the mode matching state, the upper and lower sideband response phase angles and It has the characteristic of being symmetrical about -90°. Therefore, in the modal matching state, we have:

[0066]

[0067] S3. Performing least mean square (LMS) demodulation on the double-sideband pilot response signal to obtain the amplitude information of the upper sideband pilot signal sine component, the amplitude information of the upper sideband pilot signal cosine component, the amplitude information of the lower sideband pilot signal sine component, and the amplitude information of the lower sideband pilot signal cosine component, and further obtaining an amplitude information matrix;

[0068] Further, through the double-sideband pilot response signal demodulation module (such as Figure 2 As shown in Figure 2, perform LMS demodulation on the double-sideband pilot response signal to obtain the amplitude information of the upper sideband pilot signal sine component, the amplitude information of the upper sideband pilot signal cosine component, the amplitude information of the lower sideband pilot signal sine component, and the amplitude information of the lower sideband pilot signal cosine component. The amplitude information matrix M can be expressed as:

[0069]

[0070] Among them, m 1s is the amplitude information of the sinusoidal component of the upper sideband pilot signal, m 1c is the amplitude information of the cosine component of the upper sideband pilot signal, m 2s is the amplitude information of the sinusoidal component of the lower sideband pilot signal, m 2c is the amplitude information of the cosine component of the lower sideband pilot signal.

[0071] S4. Multiply the diagonal terms of the amplitude information matrix M and accumulate the results to obtain a cracking frequency difference identification amount of the mode matching control loop based on the phase response of the sideband pilot signal, further analyze the cracking frequency difference identification amount to obtain a criterion asymmetry, and compensate the cracking frequency difference identification amount using the criterion asymmetry to obtain a compensated cracking frequency difference identification amount;

[0072] Furthermore, by tuning the criterion calculation and compensation module (such as Figure 3 As shown in Figure 2), the diagonal items of the amplitude information matrix M are multiplied and the results are accumulated to obtain the expression of the splitting frequency difference identification quantity of the mode matching control loop based on the phase response of the sideband pilot signal:

[0073]

[0074] In order to improve the accuracy of modal matching, the identification quantity is further analyzed and the compensation coefficient η is obtained as:

[0075]

[0076] Among them, ω y To detect the modal resonance frequency.

[0077] When the modes are matched, Equation (6) can be further expressed as:

[0078]

[0079] Therefore, the compensation coefficient η can be used to compensate the cracking frequency difference identification value to obtain the compensated cracking frequency difference identification value V judge_final The expression is:

[0080]

[0081] S5. The cracking frequency difference identification value after coefficient optimization compensation is used as the phase tuning criterion and sent to the proportional integral control module to generate a tuning voltage, which is applied to the frequency tuning electrode. Based on the electrostatic negative stiffness effect, the detection mode equivalent stiffness is adjusted, and then the detection mode resonant frequency is changed until the detection mode resonant frequency is equal to the driving mode resonant frequency. The cracking frequency difference identification value is controlled to zero, indicating that the mode matching state is achieved and the negative feedback closed-loop control is completed.

Claims

1. A silicon micro gyroscope modal matching control system based on the phase response of the sideband pilot signal, characterized in that: include: A silicon micromachined gyroscope, an upper sideband pilot signal input module, a lower sideband pilot signal input module, a vibration displacement extraction module, a double-sideband pilot response signal demodulation module, a tuning criterion calculation and compensation module, and a proportional integral control module. The upper sideband pilot signal input module and the lower sideband pilot signal input module respectively input the upper sideband pilot signal and the lower sideband pilot signal into the silicon micromachined gyroscope. The vibration displacement extraction module extracts the vibration signal of the silicon micromechanical gyroscope to obtain a double-sideband pilot response signal; the double-sideband pilot response signal demodulation module demodulates the double-sideband pilot response signal to obtain the amplitude information of the sine component and the cosine component of the upper sideband pilot signal and the amplitude information of the sine component and the cosine component of the lower sideband pilot signal, and further obtains an amplitude information matrix; the tuning criterion calculation and compensation module multiplies the diagonal terms of the amplitude information matrix and accumulates the results to obtain a cracking frequency difference identification value of the modal matching control loop based on the phase response of the sideband pilot signal, and compensates the cracking frequency difference identification value to obtain a compensated cracking frequency difference identification value; The proportional-integral control module generates a tuning voltage based on the compensated cracking frequency difference identification value and outputs it to the silicon micromachined gyroscope to tune and detect the modal resonant frequency until the cracking frequency difference identification value is controlled to zero, achieving the modal matching state.

2. The silicon microgyroscope modal matching control system based on sideband pilot signal phase response according to claim 1, characterized in that: The silicon micromechanical gyroscope includes a detection modal force feedback electrode, a detection modal readout electrode and a frequency tuning electrode. The upper sideband pilot signal and the lower sideband pilot signal are input into the silicon micromechanical gyroscope via the detection modal force feedback electrode, stimulating the silicon micromechanical gyroscope to generate comb vibration displacement, which is read out to the vibration displacement extraction module via the detection modal readout electrode. The tuning voltage generated by the proportional integral control module is applied to the frequency tuning electrode. Based on the electrostatic negative stiffness effect, the detection modal equivalent stiffness is adjusted to change the detection modal resonant frequency.

3. The silicon microgyroscope modal matching control system based on sideband pilot signal phase response according to claim 1, characterized in that: The upper sideband pilot signal input module and the lower sideband pilot signal input module add the upper sideband pilot signal and the lower sideband pilot signal through an adder and then input the sum into the silicon micromachined gyroscope.

4. The silicon microgyroscope modal matching control system based on sideband pilot signal phase response according to claim 1, characterized in that: The expression of the identification quantity of the cracking frequency difference is: Among them, V judge is the identification value of the cracking frequency difference, A out1 is the upper sideband signal response amplitude, A out2 is the lower sideband signal response amplitude, is the upper sideband signal response phase angle, is the lower sideband signal response phase angle; Further analysis of the cracking frequency difference identification yields the compensation coefficient η: Among them, ω x is the driving mode resonant frequency, ω y To detect the modal resonant frequency, ω band is the sideband offset frequency; When the modes match, the above formula can be further expressed as: The compensation coefficient η is used to compensate the cracking frequency difference identification value, and the expression of the compensated cracking frequency difference identification value is: Among them, V judge_final is the compensation of the cracking frequency difference identification.

5. A silicon micro gyroscope mode matching control method based on the phase response of the sideband pilot signal, characterized in that: The following steps are involved: The silicon micromechanical gyroscope generates a pilot modulation force according to the upper sideband pilot signal and the lower sideband pilot signal input by the upper sideband pilot signal input module and the lower sideband pilot signal input module, thereby stimulating the silicon micromechanical gyroscope to generate comb vibration, and outputs the vibration to the vibration displacement extraction module; The vibration displacement extraction module extracts the double-sideband pilot response signal; The double-sideband pilot response signal demodulation module performs minimum mean square demodulation on the double-sideband pilot response signal to obtain the amplitude information of the upper sideband pilot signal sine component, the amplitude information of the upper sideband pilot signal cosine component, the amplitude information of the lower sideband pilot signal sine component and the amplitude information of the lower sideband pilot signal cosine component, and further obtains the amplitude information matrix; The tuning criterion calculation and compensation module multiplies the diagonal terms of the amplitude information matrix and accumulates the results to obtain the cracking frequency difference identification value of the mode matching control loop based on the phase response of the sideband pilot signal. The cracking frequency difference identification value is further analyzed to obtain the criterion asymmetry, and the criterion asymmetry is used to compensate the cracking frequency difference identification value to obtain the compensated cracking frequency difference identification value. The compensated cracking frequency difference identification is used as the phase tuning criterion and sent to the proportional-integral control module to generate a tuning voltage output to the silicon micromachined gyroscope to tune and detect the modal resonant frequency until the cracking frequency difference identification is controlled to zero, achieving the modal matching state.

6. The silicon micro gyroscope mode matching control method based on sideband pilot signal phase response according to claim 5, characterized in that: The pilot modulation force F generated by the upper sideband pilot signal and the lower sideband pilot signal in for: F in =K vf ·[A1sin[(ω x +oh band )t]+A2sin[(ω x -oh band )t]] =A in1 sin[(ω x +oh band )t]+A in2 sin[(ω x +oh band )t] Among them, K vf is the voltage-to-force conversion gain of the detection mode; ω band is the sideband offset frequency; A1 is the upper sideband excitation signal amplitude, A2 is the lower sideband excitation signal amplitude, A in1 is the upper sideband excitation amplitude, A in2 is the amplitude of the lower sideband excitation force, ω x is the driving mode resonant frequency, and t is the time.

7. The silicon micro gyroscope mode matching control method based on sideband pilot signal phase response according to claim 5, characterized in that: Double-sideband pilot response signal V out for: Among them, V out1 is the upper sideband response signal, V out2 is the lower sideband response signal, A out1 is the upper sideband signal response amplitude, A out2 is the lower sideband signal response amplitude, ω x is the driving modal resonant frequency, is the upper sideband response phase angle, is the lower sideband response phase angle; when the silicon micromechanical gyroscope reaches the mode matching state, the upper and lower sideband response phase angles and It has the characteristic of being symmetrical about -90°; therefore, in the modal matching state, we have:

8. The silicon micro gyroscope mode matching control method based on sideband pilot signal phase response according to claim 5, characterized in that: The amplitude information matrix M is expressed as: Among them, m 1s is the amplitude information of the sinusoidal component of the upper sideband pilot signal, m 1c is the amplitude information of the cosine component of the upper sideband pilot signal, m 2s is the amplitude information of the sinusoidal component of the lower sideband pilot signal, m 2c is the cosine component amplitude information of the lower sideband pilot signal, ω band is the sideband offset frequency, is the upper sideband response phase angle, is the lower sideband response phase angle, A out1 is the upper sideband signal response amplitude, A out2 is the lower sideband signal response amplitude, ω x is the driving mode resonant frequency.

9. The silicon micro gyroscope mode matching control method based on sideband pilot signal phase response according to claim 5, characterized in that: The expression of the identification quantity of the cracking frequency difference is: Among them, V judge is the identification value of the cracking frequency difference, A out1 is the upper sideband signal response amplitude, A out2 is the lower sideband signal response amplitude, is the upper sideband response phase angle, is the lower sideband response phase angle; Further analysis of the cracking frequency difference identification yields the compensation coefficient η: Among them, ω x is the driving mode resonant frequency, ω y To detect the modal resonant frequency, ω band is the sideband offset frequency; When the modes match, the above formula can be further expressed as: The compensation coefficient η is used to compensate the cracking frequency difference identification value, and the expression of the compensated cracking frequency difference identification value is: Among them, V judge_final is the compensation of the cracking frequency difference identification.

10. An electronic device, characterized in that: The invention comprises a memory, a processor and a computer program / instruction stored in the memory and executable on the processor, wherein when the computer program / instruction is executed by the processor, the steps of the silicon micro gyroscope mode matching control method based on the sideband pilot signal phase response according to any one of claims 5 to 9 are implemented.

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