Fluid temperature fluctuation suppressor based on Tesla valve and optimized manufacturing method

Abstract

The invention discloses a fluid temperature fluctuation suppressor based on a Tesla valve and an optimized manufacturing method. The device comprises a suppressor shell and a plurality of Tesla pore plates, the interior of the suppressor shell is hollow, a cavity structure is formed, and inlets and outlets are formed in the two ends of the suppressor shell in the flowing direction of fluid. The optimal manufacturing method comprises the steps of firstly obtaining various parameters, then constructing a temperature attenuation model G of the temperature fluctuation suppressor according to all the obtained parameters, finally carrying out optimal solution on the temperature attenuation model G, and carrying out optimal manufacturing on the fluid temperature fluctuation suppressor according to a solution result. According to the fluid temperature fluctuation suppressor, through the fluid induction effect of the conical curved surface and the through hole jet flow synergistic effect, secondary vortexes are formed in the cavity, fluid back mixing and recirculation are enhanced, an internal flow field is optimized, and the attenuation performance is improved.

Description

Technical Field

[0001] The present invention relates to the technical field of immersion lithography, and in particular to a fluid temperature fluctuation suppressor based on a Tesla valve and an optimized manufacturing method thereof. Background Art

[0002] In an immersion lithography system, the immersion unit injects an ultraclean fluid (such as high-purity deionized water) into the exposure area between the projection lens and the silicon wafer. This fluid's refractive index (n) increases the numerical aperture (NA) of the optical system (NA = n × sinθ), thereby improving lithography resolution (R = k1 × λ / NA). However, temperature fluctuations in the fluid can cause changes in the refractive index, which in turn can induce optical aberrations. Therefore, maintaining the temperature stability of the ultraclean fluid is crucial for ensuring lithography resolution.

[0003] In the immersion liquid cooling system of a photolithography machine, the temperature stability of the ultra-clean fluid must be controlled within an extremely precise range of ±0.005°C. However, this temperature control system faces multiple challenges: its architecture, which is dependent on the immersion water treatment module, makes it susceptible to internal heat load fluctuations, ambient temperature disturbances, and unstable factory inputs. In particular, existing temperature control components (such as heaters and heat exchangers) are limited by their inherent bandwidth and can only effectively suppress low-frequency disturbances, while high-frequency disturbances require buffer tanks to attenuate them.

[0004] The performance optimization of traditional buffer tanks faces significant space constraints. Although theoretically increasing the tank volume can enhance the attenuation capability of medium and high frequency disturbances, the strict space limitations inside the lithography machine make this solution difficult to implement. Existing technical solutions have obvious shortcomings in solving this problem: the mixing efficiency of the buffer tank in the combined temperature control solution directly affects the attenuation effect, and although the bypass heat exchange solution adjusts the temperature through the heat exchange principle, it leads to a decrease in heat exchange performance and may introduce secondary disturbances. Its complex structural design also increases the difficulty of ultra-clean material processing. Therefore, since the temperature control element cannot effectively control medium and high frequency temperature disturbances, optimizing the performance of the temperature fluctuation suppressor within a limited volume becomes a crucial factor. This includes optimizing the internal flow channel design of the buffer tank to improve the mixing efficiency and developing a new compact medium and high frequency attenuation structure. Summary of the Invention

[0005] In order to solve the problems existing in the background technology, the temperature control elements and buffer tanks for the temperature control of ultra-clean fluid in the immersion unit of the existing lithography machine cannot meet the needs of suppressing medium and high frequency temperature fluctuations. The present invention provides a temperature fluctuation suppressor based on the Tesla valve and an optimized manufacturing method to solve the technical problem that the temperature control element cannot effectively control the medium and high frequency temperature disturbances under a limited volume.

[0006] The technical solutions adopted in the present invention include: 1. A fluid temperature fluctuation suppressor based on Tesla valve: It includes a suppressor shell and multiple Tesla orifice plates; the interior of the suppressor shell is hollow to form a cavity structure, and the suppressor shell is provided with inlets and outlets at both ends along the flow direction of the fluid.

[0007] Each Tesla orifice plate is a circular disc-shaped structure with a through hole. Multiple Tesla orifice plates are arranged in parallel and spaced apart along the flow direction of the fluid; each Tesla orifice plate is perpendicular to the flow direction of the fluid and is used to perform back mixing and recirculation of the fluid.

[0008] The middle part of each Tesla orifice plate is set as a conical surface that convexes in the opposite direction of fluid flow, a through hole is opened at the apex of the conical surface, and a circle of small hole groups is set on the conical surface; the bottom end of the conical surface is circumferentially connected to a circular arc surface that is concave from bottom to top, and the circular arc surface forms an annular concave area; the lower part of the conical surface and the annular concave area together form a concave mixing area.

[0009] The conical surface bends inward, and the curvature of the line connecting the vertex of the conical surface to each point at the bottom is equal; the curvature at each point on the circular arc surface is equal, and the tangent plane of any point on the circumferential outer edge of the circular arc surface is vertical.

[0010] The small hole group is composed of a plurality of through holes that are evenly spaced and arranged along the circumference of the central axis of the conical surface.

[0011] The central axes of the conical surfaces of the Tesla orifice plates are on the same straight line; the distribution of the through holes of the small hole groups on the conical surfaces of the Tesla orifice plates is consistent or inconsistent.

[0012] The cavity structure is provided with fluid ports at both ends along the flow direction of the fluid, serving as an outlet and an inlet respectively; the fluid ports are conical ports, and the two fluid ports are symmetrically opened at the two ends of the cavity structure along the flow direction of the fluid, the small ends of the two fluid ports serve as the inlet and outlet of the fluid respectively, and the large ends of the two fluid ports are respectively connected to the two ends of the cavity structure.

[0013] Each of the fluid ports is divided into a threaded sealing port and a fluid expansion port; the fluid expansion port is a tapered port, one end of the threaded sealing port serves as the inlet or outlet of the fluid, the other end of the threaded sealing port is connected to the small end of the fluid expansion port, and the large end of the fluid expansion port is connected to one end of the main body of the cavity structure.

[0014] 2. An optimized manufacturing method for a fluid temperature fluctuation suppressor: Step S1. First, obtain the volume V of the cavity structure, the diameter D of the Tesla orifice plate, the density ρ of the ultra-clean fluid, the flow velocity m of the fluid, the curvature k2 at each point on the arc surface, the crossflow bypass coefficient α, and the recirculation coefficient β.

[0015] Step S2: constructing a temperature attenuation model G of the temperature fluctuation suppressor according to all the parameters obtained in step S1.

[0016] Step S3: Optimize and solve the temperature attenuation model G to determine the number N of chambers divided by the Tesla orifice plate, the slope k1 of the conical surface, the number N' of small holes on the Tesla orifice plate, and the aperture d of the through hole on the Tesla orifice plate, thereby manufacturing an optimized fluid temperature fluctuation suppressor.

[0017] The temperature decay model in step S2 is set according to the following formula: G=(α / (τ1×s+1)+(1-α)(1-β) / (τ2×s+1-β)) N α=(0.000167×(k1) 2 -0.02×k1+0.64)×N β=(0.000167×(k1) 2 -0.02×k1+0.652)×N τ1=θ×ω 2 ×ρ×V1 / m×N τ2=θ×ω 2 ×ρ×V2 / m×N V1=k'×V,V2=V-V1 ω=(1-(d×(N') 1 / 2 / D) 4 ×(1-C 2 )) 1 / 2 / (0.47+0.1×C×d×(N') 1 / 2 / D)-1 Wherein, G represents the temperature attenuation model of the fluid temperature fluctuation suppressor for attenuating the fluid; s is the Laplace operator; θ is the mixing coefficient; ρ is the density of the ultra-clean fluid; k1 represents the curvature of the line connecting the vertex of the conical surface to each point at the bottom; V1 is the volume of the concave mixing zone; V2 is the volume of the crossflow bypass zone; α is the crossflow bypass coefficient; β is the recirculation coefficient; D is the diameter of the Tesla orifice; m is the flow velocity of the fluid; C is the outflow coefficient of the Tesla orifice; N is the number of chambers divided by the Tesla orifice; N' is the number of through holes on the Tesla orifice; d is the aperture of the through holes on the Tesla orifice; τ1 and τ2 represent the temperature attenuation transfer functions of the crossflow bypass zone and the concave mixing zone, respectively; k' represents the volume coefficient, and k'∈[0.01,0.0125]; ω represents the correction coefficient.

[0018] The innovation of this invention lies in utilizing the unique reflux characteristics of the Tesla valve during reverse flow. By optimizing and manufacturing a conical surface with a specific slope and combining it with a small-hole jet, efficient flow field control of the cavity is achieved, the mixing coefficient of the fluid is improved, and the residence time of the fluid in the chamber is extended through the enhanced recirculation effect.

[0019] The beneficial effects of the present invention are: 1. The present invention utilizes the unique backflow characteristics of the Tesla valve in reverse flow, optimizes and manufactures a conical surface with a specific slope and combines it with small hole jet technology to achieve efficient flow field control in the cavity.

[0020] 2. The three-dimensional conical surface optimized and manufactured by the method of the present invention forms a stable secondary vortex structure under the synergistic effect of the small hole jet, which improves the mixing coefficient of the fluid and prolongs the residence time of the fluid in the chamber through the enhanced recirculation effect.

[0021] 3. The volume of the fluid temperature fluctuation suppressor of the present invention does not change compared with the ordinary suppressor, and its structure is compact, which is conducive to use on complex lithography equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 It is a three-dimensional structural diagram of the device of the present invention.

[0023] Figure 2 It is a cross-sectional schematic diagram of the suppressor cavity of the present invention.

[0024] Figure 3 Schematic diagram of the structure of the Tesla orifice plate of the present invention.

[0025] Figure 4 It is the right half of the axial cross section of the Tesla orifice plate of the present invention.

[0026] Figure 5 2 is a fluid flow diagram of the Tesla valve in an embodiment of the present invention.

[0027] Figure 6 This is a schematic diagram of the recycling principle of the bypass and mixing zone of the present invention.

[0028] Figure 7 This is the streamline diagram of the simulated flow field of the Tesla orifice plate structure of the present invention.

[0029] Figure 8 This is a comparison diagram of the amplitude-frequency characteristic curves of different curvatures of the line connecting the vertex and each point at the bottom of the conical surface of the present invention.

[0030] Figure 9 This is a comparison diagram of the amplitude-frequency characteristic curves of the device of the present invention and the empty can.

[0031] Among them, 1. Suppressor housing; 2. Tesla orifice plate; 3. Through hole; 4. Conical surface; 5. Arc surface; 6. Threaded sealing port; 7. Fluid expansion port. DETAILED DESCRIPTION

[0032] The present invention is described in more detail below with reference to the accompanying drawings and examples. However, the present invention is not limited thereto. A person skilled in the art may make various improvements and modifications without departing from the principles of the present invention, and such improvements and modifications are considered to be within the scope of protection of the present invention. Any matters not described in detail in this specification constitute prior art known to those skilled in the art.

[0033] like Figure 1 、 Figure 2 、 Figure 3 and Figure 9 As shown, the fluid temperature fluctuation suppressor of this embodiment includes: A suppressor housing 1 and a plurality of Tesla orifice plates 2; the interior of the suppressor housing 1 is hollow to form a cavity structure, and inlets and outlets are provided at both ends of the suppressor housing 1 along the flow direction of the fluid.

[0034] Each Tesla orifice plate 2 is a circular disc-shaped structure with a through hole 3. Multiple Tesla orifice plates 2 are arranged in parallel and spaced apart along the flow direction of the fluid; each Tesla orifice plate 2 is perpendicular to the flow direction of the fluid and is used to perform back mixing and recirculation of the fluid, thereby achieving fluctuation attenuation.

[0035] The middle part of each Tesla orifice plate 2 is provided with a conical surface 4 with a simplified Tesla valve structure that is raised in the opposite direction of fluid flow. A through hole 3 is opened at the top of the conical surface 4, and a circle of small hole groups are provided on the conical surface 4.

[0036] A circle of small holes is set on the conical surface 4 to allow the fluid to flow out of the small hole group; the through hole 3 opened at the vertex of the conical surface 4 is to prevent the area between the circle of small holes on the conical surface 4 and the vertex of the conical surface 4 from forming a slow flow area of fluid, thereby affecting the effect of suppressor wave attenuation.

[0037] The bottom end of the conical surface 4 is circumferentially connected to a circular arc surface 5 that is concave from bottom to top, and the circular arc surface 5 forms an annular concave area; the lower part of the conical surface and the annular concave area together form a concave mixing area.

[0038] The axial section of each Tesla orifice plate 2 is symmetrical, and the right half of the axial section is as follows: Figure 4As shown, the right half of the axial section of each Tesla orifice plate 2 includes a first curve and a second curve connected sequentially from left to right; the first curve is a circular arc curve that descends and concave from left to right, with the center of the first curve being O1, the radius being R1, and the curvature being k1; the second curve is a circular arc curve that ascends and concave from left to right, with the center of the second curve being O2, the radius being R2, and the curvature being k2. The tangent of the rightmost endpoint of the second curve points vertically upward, and the curvature k2 is greater than the curvature k1. In this embodiment, the angle of the second curve of each Tesla orifice plate 2 is 110 degrees.

[0039] The fluid flows from the previous Tesla orifice plate 2 to the conical surface 4, then slides down to the concave mixing zone to form mixing. The fluid passes through the arc surface 5 that is concave from bottom to top and then splashes back to the conical surface 4 and stays there again, thus forming a vortex, resulting in back mixing and recirculation in the concave mixing zone, which enhances the effect of wave attenuation.

[0040] like Figure 5 The figure shows the fluid flow diagram of the Tesla valve. The fluid flowing from the conical surface 4 to the concave mixing area is equivalent to the fluid in the straight path in the fluid flow diagram of the Tesla valve. The fluid remaining after returning from the concave mixing area to the conical surface 4 is equivalent to the fluid in the curved path in the fluid flow diagram of the Tesla valve. This forms a secondary vortex, enhances the anti-mixing and recirculation of the fluid, and thus enhances the effect of fluctuation attenuation.

[0041] The conical surface 4 curves inward, and the curvature k1 of the line connecting the vertex of the conical surface 4 to each point at the bottom is equal; the curvature k2 at each point on the circular arc surface 5 is equal, and the tangent plane of any point on the circumferential outer edge of the circular arc surface 5 is vertical; the curvature k2 is greater than the curvature k1.

[0042] The small hole group is composed of a plurality of through holes 3 that are evenly spaced apart along the circumference of the central axis of the conical surface 4 .

[0043] The central axes of the conical surfaces 4 of the Tesla orifice plates 2 are on the same straight line; the distribution of the through holes 3 of the small hole groups on the conical surfaces 4 of the Tesla orifice plates 2 is consistent or inconsistent.

[0044] The cavity structure is provided with fluid ports at both ends along the flow direction of the fluid as the outlet and inlet respectively; the fluid ports are conical ports, and the two fluid ports are symmetrically opened at the two ends of the cavity structure along the flow direction of the fluid. The small ends of the two fluid ports serve as the inlet and outlet of the fluid respectively, and the large ends of the two fluid ports are connected to the two ends of the cavity structure respectively.

[0045] Each fluid port is divided into a threaded sealing port 6 and a fluid expansion port 7; the fluid expansion port 7 is a tapered port, one end of the threaded sealing port 6 serves as the inlet or outlet of the fluid, the other end of the threaded sealing port 6 is connected to the small end of the fluid expansion port 7, and the large end of the fluid expansion port 7 is connected to one end of the main body of the cavity structure.

[0046] The fluid flow process of the fluid temperature fluctuation suppressor of the present invention is as follows: The fluid enters from the threaded sealing port 6 near the inlet, expands through the fluid expansion port 7, and then enters the cavity structure. The Tesla orifice plate 2 of the previous layer performs small hole jet on the fluid on the one hand, and on the other hand, the optimized conical surface 4 and circular surface 5 make the fluid back-mixed and recirculated. The fluid after back-mixing and recirculation finally passes through the small hole group of the Tesla orifice plate 2 and flows into the small cavity structure of the lower level, forming a jet, thereby enhancing the mixing effect.

[0047] The arrangement of multiple Tesla orifice plates 2 enables the fluid in each small cavity structure to be continuously back-mixed and recirculated, thereby enabling the fluid temperature in each small cavity structure to continuously decay.

[0048] When the fluid flows to the fluid expansion port 7 near the outlet, it flows out through the threaded sealing port 6.

[0049] The fluid temperature fluctuation suppressor of this embodiment is manufactured according to the following steps of the optimized manufacturing method: Step S1, first, obtain the volume V of the cavity structure, the diameter D of the Tesla orifice plate 2, the density ρ of the ultra-clean fluid, the flow velocity m of the fluid, the curvature k2 at each point on the arc surface 5, the crossflow bypass coefficient α and the recirculation coefficient β.

[0050] Step S2: Construct a temperature attenuation model G of the temperature fluctuation suppressor based on all the parameters obtained in step S1. The block diagram structure is as follows: Figure 6 As shown, the fluid in the chamber divided by the Tesla orifice plate 2 is divided into two parts. One part flows from the inlet and crossflow to the outlet, that is, the bypass path, and the second part enters the recessed mixing area for mixing. With the emergence of vortex, back mixing occurs, resulting in the formation of a mixing path.

[0051] The temperature decay model in step S2 is set according to the following formula: G=(α / (τ1×s+1)+(1-α)(1-β) / (τ2×s+1-β)) N α=(0.000167×(k1) 2 -0.02×k1+0.64)×N β=(0.000167×(k1) 2 -0.02×k1+0.652)×N τ1=θ×ω 2 ×ρ×V1 / m×N τ2=θ×ω 2 ×ρ×V2 / m×N V1=k'×V,V2=V-V1 ω=(1-(d×(N') 1 / 2 / D) 4 ×(1-C 2 )) 1 / 2 / (0.47+0.1C×d×(N') 1 / 2 / D)-1 Wherein, G represents the temperature attenuation model of the fluid temperature fluctuation suppressor for attenuating the fluid; s is the Laplace operator; θ is the mixing coefficient; ρ is the density of the ultra-clean fluid; k1 represents the curvature of the line connecting the vertex of the conical surface 4 to each point at the bottom; V1 is the volume of the concave mixing zone; V2 is the volume of the crossflow bypass zone; α is the crossflow bypass coefficient; β is the recirculation coefficient; D is the diameter of the Tesla orifice plate 2; m is the flow velocity of the fluid; C is the outflow coefficient of the Tesla orifice plate 2; N is the number of chambers divided by the Tesla orifice plate 2; N' is the number of through holes 3 on the Tesla orifice plate 2; d is the aperture of the through hole 3 on the Tesla orifice plate 2; τ1 and τ2 represent the temperature attenuation transfer functions of the crossflow bypass zone and the concave mixing zone, respectively; k' represents the volume coefficient, and k'∈[0.01,0.0125]; ω represents the correction coefficient of the outflow of the through hole 3 in the temperature attenuation transfer function.

[0052] Step S3: Optimize and solve the temperature attenuation model G to obtain the number N of chambers divided by the Tesla orifice plate 2, the curvature k1 of the line connecting each point from the vertex to the bottom of the conical surface 4, the number N' of small holes on the Tesla orifice plate 2, and the aperture d of the through hole 3 on the Tesla orifice plate 2, thereby manufacturing an optimized fluid temperature fluctuation suppressor.

[0053] The fluid temperature fluctuation suppressor of the present invention utilizes the geometric features of the conical surface 4 to induce the mainstream fluid to generate backflow, and forms a stable secondary vortex structure under the synergistic effect with the small hole jet. This innovative flow field control mechanism has dual advantages: on the one hand, it improves the mixing coefficient of the fluid, and on the other hand, it prolongs the residence time of the fluid in the chamber through the enhanced recycling effect. On the time scale, this extension effect enables the fluid in the temperature peak and trough areas to achieve more complete mixing, thereby significantly improving the temperature fluctuation suppression effect. In addition, the volume has not changed compared to ordinary suppressors, and its structure is compact, which is conducive to use on complex lithography equipment.

[0054] The situation of the embodiment is as follows: Under the actual working condition where the inlet temperature disturbance period is mainly concentrated in 30s-200s, and limited by the size of the installation space, the cavity structure volume V is 1L, the diameter D is set to 80mm, the fluid flow rate m is 0.75kg / min, the ultra-clean fluid density ρ is 1000kg / m³, the mixing coefficient θ is experimentally calibrated to 0.9, and the curvature k2 at each point on the arc surface 5 is set to 0.083mm. -1 The crossflow bypass coefficient α is experimentally calibrated to 0.04×N, the recirculation coefficient β is experimentally calibrated to 0.05×N, the volume of the depressed mixing zone V1 is calibrated to 0.01×V, the crossflow bypass volume V2 is 0.99V, and the outflow coefficient C of Tesla orifice 2 can be obtained by the Reader-Harris / Gallagher formula.

[0055] The parameter determination process is as follows: First, assuming the aperture d = 2mm and the number of through holes 3 N' = 13, the number of chambers N is pre-selected as 3, 5, and 7, and the impact of the number of chambers N on the crossflow bypass coefficient α and the recirculation coefficient β is comprehensively considered. Based on the amplitude-frequency characteristic curve, the number of chambers N with the best performance in the attenuation amplitude period of 30s-100s is selected, and finally the number of chambers N is selected as 3. After determining the number of chambers N, the curvature k1 of the line connecting each point from the vertex to the bottom of the conical surface 4 is selected as curvature 1 = 0.018mm. -1 , curvature 2 = 0.0167 mm -1 and curvature 3 = 0.015 mm -1 Make the best selection according to Figure 8 As shown in the amplitude-frequency characteristic curve, when the target attenuation frequency band is high frequency, select Figure 8 Curvature 2 in the selection, when the target attenuation frequency band is mid-low frequency, select Figure 8 Finally, the apertures d = 0.5 mm, 1 mm, 2.5 mm and the number of through holes 3 N' = 7, 13, 25 are optimally selected to achieve efficient attenuation suppression of temperature disturbances within the target frequency band.

[0056] like Figure 7 As shown, under the above working conditions, the internal flow field is simulated when the number of chambers N=3, the curvature k1 of the line connecting the vertex and each point of the bottom of the conical surface 4 is selected as 2, the aperture d=1mm and the number of through holes 3 N'=13. It can be seen that due to the geometric characteristics of the conical surface 4 of the Tesla orifice 2, the mainstream fluid is induced to generate backflow, resulting in the formation of backflow and secondary vortex structure in the small cavity structure, which enhances the recirculation coefficient β. In the case of no Tesla orifice, that is, the recirculation coefficient β of the empty can is 0.06, thereby improving the fluctuation suppression performance.

[0057] Figure 7This is a local flow field streamline diagram in which the upper layer fluid flows into the cavity of this layer through the through hole 3 in the upper Tesla orifice plate 2, and flows into the lower layer through the through hole 3 in the Tesla orifice plate 2 of this level. Figure 7 In the figure, the red area at the through hole 3 represents a relatively high flow rate. The darker the color, the greater the speed. And through the depth of the color and the flow state of the streamlines, it can be seen that the fluid forms a small hole jet from under the through hole 3 in the upper Tesla orifice plate 2: a bypass path and a mixing path are formed. Bypass path: the through hole 3 in the upper Tesla orifice plate 2 quickly reaches the through hole 3 in the current Tesla orifice plate 2 at the high flow rate of the small hole jet and flows to the lower chamber; mixing path: that is, entering the concave mixing zone to participate in the circulation, and forming a stable secondary vortex structure through the conical surface 4 and the circular arc surface 5, so that the fluid forms back mixing and recycling. The residence time of the fluid in the chamber is extended by the enhanced secondary vortex recirculation effect. On the time scale, this extension effect enables the fluid in the temperature peak and trough areas to achieve more complete mixing, thereby significantly improving the suppression effect of temperature fluctuations.

[0058] like Figure 9 As shown, the amplitude-frequency characteristic curve of the temperature fluctuation suppressor based on the Tesla valve measured in this embodiment is Figure 9 Curve 1.

[0059] Comparative Example: This comparative example uses the same suppressor housing 1 as in the embodiment, but without the Tesla orifice plate 2 to conduct the experiment under the same conditions. The obtained empty tank amplitude-frequency characteristic curve without the Tesla orifice plate 2 under the same cavity volume V and the same inlet flow rate is as follows: Figure 9 Theoretically, the amplitude-frequency characteristic curve of the empty tank in a completely mixed state is as follows: Figure 9 As shown in curve 3.

[0060] It can be found that under actual working conditions of disturbances from 30s to 200s, the performance of curve 1 is better than that of curve 3 in mathematical theory, and is significantly better than that of curve 2. Moreover, as the frequency increases, the disturbance suppression capability of curve 1 becomes stronger than that of the other two curves.

[0061] From the above embodiments and comparative examples, it can be seen that the Tesla orifice plate 2 optimized and manufactured by the present invention improves the anti-mixing effect within the suppressor, effectively expands the formation area of the secondary vortex structure, and enhances the fluctuation suppression performance. Compared with the traditional single cavity structure, which requires a significant increase in volume to improve the attenuation effect in the medium and high frequency bands, the present invention achieves more efficient disturbance control by optimizing the flow field structure, which is particularly suitable for the strict control requirements of ultra-clean fluids on medium and high frequency disturbances in the immersion unit of the lithography equipment. While ensuring excellent performance, this structure maintains a compact design feature, and its miniaturization advantage enables it to adapt to the complex installation space environment inside the lithography machine.

[0062] In the description of the positional relationship of the present invention, terms such as "inside", "outside", "up", "down", "left", "right", etc. that indicate orientation or positional relationship are based on the orientation or positional relationship shown in the drawings. They are only for the convenience of describing the embodiments and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, they should not be understood as limiting the present invention.

[0063] The above content and structure describe the basic principles, main features, and advantages of the product of the present invention, which should be understood by those skilled in the art. The above examples and description are merely illustrative of the principles of the present invention. Various changes and modifications may be made to the present invention without departing from the spirit and scope of the present invention, and such changes and modifications are intended to be within the scope of the invention. The scope of protection claimed in the present invention is defined by the appended claims and their equivalents.

Claims

1. A fluid temperature fluctuation suppressor based on a Tesla valve, characterized by: The invention comprises a suppressor housing (1) and a plurality of Tesla orifice plates (2); the interior of the suppressor housing (1) is hollow to form a cavity structure, and the suppressor housing (1) is provided with inlets and outlets at both ends along the flow direction of the fluid; Each Tesla orifice plate (2) is a circular disc-shaped structure provided with a through hole (3), and a plurality of Tesla orifice plates (2) are arranged in parallel and spaced apart along the flow direction of the fluid; each Tesla orifice plate (2) is perpendicular to the flow direction of the fluid and is used for back-mixing and recirculating the fluid.

2. The fluid temperature fluctuation suppressor according to claim 1, characterized in that: The middle portion of each Tesla orifice plate (2) is provided with a conical surface (4) that is raised in the opposite direction of the flow of the fluid, a through hole (3) is provided at the apex of the conical surface (4), and a circle of small hole groups is provided on the conical surface (4); the bottom end of the conical surface (4) is circumferentially connected to a circular arc surface (5) that is concave from bottom to top, and the circular arc surface (5) forms an annular concave area; the lower portion of the conical surface and the annular concave area together form a concave mixing area.

3. The fluid temperature fluctuation suppressor according to claim 2, characterized in that: The conical surface (4) curves inward, and the curvature of the line connecting the vertex of the conical surface (4) to each point at the bottom is equal; the curvature at each point on the circular arc surface (5) is equal, and the tangent plane of any point on the circumferential outer edge of the circular arc surface (5) is vertical.

4. The fluid temperature fluctuation suppressor according to claim 2, characterized in that: The small hole group is composed of a plurality of through holes (3) uniformly spaced apart along the circumference of the central axis of the conical surface (4).

5. The fluid temperature fluctuation suppressor according to claim 2, characterized in that: The central axes of the conical surfaces (4) of the Tesla orifice plates (2) are on the same straight line; and the distribution of the through holes (3) of the small hole groups on the conical surfaces (4) of the Tesla orifice plates (2) is consistent or inconsistent.

6. The fluid temperature fluctuation suppressor according to claim 1, characterized in that: The cavity structure is provided with fluid ports at both ends along the flow direction of the fluid, serving as an outlet and an inlet respectively; the fluid ports are conical ports, and the two fluid ports are symmetrically opened at the two ends of the cavity structure along the flow direction of the fluid, the small ends of the two fluid ports serve as the inlet and outlet of the fluid respectively, and the large ends of the two fluid ports are respectively connected to the two ends of the cavity structure.

7. The fluid temperature fluctuation suppressor according to claim 6, characterized in that: Each of the fluid ports is divided into a threaded sealing port (6) and a fluid expansion port (7); the fluid expansion port (7) is a tapered port, one end of the threaded sealing port (6) serves as an inlet or outlet for the fluid, the other end of the threaded sealing port (6) is connected to the small end of the fluid expansion port (7), and the large end of the fluid expansion port (7) is connected to one end of the main body of the cavity structure.

8. An optimized manufacturing method for the fluid temperature fluctuation suppressor according to any one of claims 1 to 7, characterized in that: The steps include: Step S1, first, obtain the volume V of the cavity structure, the diameter D of the Tesla orifice plate (2), the density ρ of the ultra-clean fluid, the flow velocity m of the fluid, the curvature k2 at each point on the arc surface (5), the crossflow bypass coefficient α and the recirculation coefficient β; Step S2: constructing a temperature attenuation model G of the temperature fluctuation suppressor according to all the parameters obtained in step S1; Step S3, optimizing and solving the temperature attenuation model G, solving the number N of chambers divided by the Tesla orifice plate (2), the slope k1 of the conical surface (4), the number N' of small holes on the Tesla orifice plate (2) and the aperture d of the through hole (3) on the Tesla orifice plate (2), and then manufacturing an optimized fluid temperature fluctuation suppressor.

9. The optimized manufacturing method of the fluid temperature fluctuation suppressor according to claim 8, characterized in that: The temperature decay model in step S2 is set according to the following formula: G=(α / (τ1×s+1)+(1-α)(1-β) / (τ2×s+1-β)) N α=(0.000167×(k1) 2 -0.02×k1+0.64)×N β=(0.000167×(k1) 2 -0.02×k1+0.652)×N τ1=θ×ω 2 ×ρ×V1 / m×N τ2=θ×ω 2 ×ρ×V2 / m×N V1=k'×V,V2=V-V1 ω=(1-(d×(N') 1 / 2 / D) 4 ×(1-C 2 )) 1 / 2 / (0.47+0.1×C×d×(N') 1 / 2 / D)-1 Wherein, G represents the temperature attenuation model; s is the Laplace operator; θ is the mixing coefficient; ρ is the density of the fluid; k1 represents the curvature of the line connecting the vertex of the conical surface (4) to each point at the bottom; V1 is the volume of the concave mixing zone; V2 is the volume of the crossflow bypass zone; α is the crossflow bypass coefficient; β is the recirculation coefficient; D is the diameter of the Tesla orifice (2); m is the flow rate of the fluid; C is the outflow coefficient of the Tesla orifice (2); N is the number of chambers divided by the Tesla orifice (2); N' is the number of through holes (3) on the Tesla orifice (2); d is the aperture of the through hole (3) on the Tesla orifice (2); τ1 and τ2 represent the temperature attenuation transfer functions of the crossflow bypass zone and the concave mixing zone, respectively; k' represents the volume coefficient, and k'∈[0.01,0.0125]; ω represents the correction coefficient.

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