Dual-mode inertia-driven micro piezoelectric robot and excitation method thereof

Abstract

The invention discloses a dual-mode inertia-driven microminiature piezoelectric robot and an excitation method thereof, and belongs to the technical field of microminiature robots. Comprising an upper-layer mass block, flexible hinges, driving units and supporting feet. An excitation signal is applied to the driving unit to enable the driving unit to be bent and deformed, the upper-layer mass block of the robot is pushed to rotate around the flexible hinge, and forward movement of the robot is achieved through inertia force generated in the inclined front direction in the lifting and falling processes of the upper-layer mass block. According to different waveforms and frequencies of applied excitation signals, the robot can realize two inertial motion modes of jumping and resonance. By adjusting the configuration mode of the mass block and the driving unit, the robot can form two parallel inertia forces in the advancing direction and can also generate corresponding inertia forces in the retreating direction, and steering motion and forward and backward linear motion on a plane are achieved. The device has the characteristics of simple structure, light weight, high resolution and high movement speed. The method has a wide application prospect in the fields of micro-nano operation in a narrow space, biomedical treatment and the like.

Description

Technical Field

[0001] The present invention belongs to the technical field of microrobots, and in particular relates to a dual-mode inertia-driven micro piezoelectric robot and an excitation method thereof. Background Art

[0002] Micromobile robots have been widely developed due to their small size, flexible movement, low cost, strong environmental adaptability, and good stealth. They are widely used in fields such as biomedical engineering, micromanipulation, and search and rescue. Traditional microrobots typically use electromagnetic actuators, which offer the advantages of simple control and high movement speed. However, the presence of bearings and transmission mechanisms makes further miniaturization of electromagnetic actuators difficult. To overcome these problems, researchers have developed various smart materials, such as shape memory alloys, magnetostrictive materials, dielectric elastomers, and piezoelectric ceramics. Among them, microrobots driven by piezoelectric ceramics have attracted the attention of many researchers and institutions due to their simple structure, high resolution, fast response, and good electromagnetic compatibility.

[0003] Micro-piezoelectric robots can generally be categorized by their operating principle into resonant, direct-drive, walking, inchworm, and inertial types. Resonant micro-mobile robots drive their movements by exciting the resonance of piezoelectric elements, generating elliptical or oblique motion trajectories at the driving foot. Large resonant amplitudes facilitate high speeds, but can also lead to erratic motion and poor controllability. Direct-drive micro-mobile robots utilize the deformation of piezoelectric elements for drive, offering advantages such as wear-free operation and high resolution, but their range of motion is limited to a few hundred microns. Walking micro-mobile robots achieve stepping motion through the coordinated excitation of multiple piezoelectric elements, with static friction always present between the driving foot and the ground. Inchworm-type micro-mobile robots offer advantages such as low wear, high output force, and high motion stability, but their structure and control scheme are complex. Inertial micro-mobile robots, in response to sawtooth wave signals, generate inertial forces on the piezoelectric elements to overcome friction and achieve stepping motion. Inertial micro-mobile robots have a simple structure and drive signal, but their speed is typically limited to a few millimeters per second.

[0004] Inertial micromobile robots have attracted considerable research attention due to their compact structure and simple drive signals, which facilitate miniaturization. However, their single-step displacement and speed are limited. Therefore, while ensuring robot miniaturization, this paper designs a new inertial-driven robot and proposes two unconventional inertial motion modes to achieve high resolution, large step length, and high speed. This robot has broad application prospects in fields such as biomedicine, aerospace, materials, chemistry, and microelectronics. Summary of the Invention

[0005] In order to solve the problem of limited single-step displacement and movement speed of traditional inertial drive robots, the present invention provides a dual-mode inertial drive micro-piezoelectric robot and an excitation method thereof.

[0006] To achieve the above object, the present invention provides the following technical solutions:

[0007] The present invention provides a dual-mode inertial driven micro-piezoelectric robot, the robot comprising an upper mass block, a flexible hinge, a drive unit and a support foot;

[0008] The bottom of the upper mass block contacts the top of the drive unit and is connected via a flexible hinge. The flexible hinge can be directly fixedly connected to the upper mass block and the drive unit. The connection methods include welding, gluing, and an integrated structure.

[0009] The bottom of the driving unit is connected to the supporting foot, and the driving foot is in contact with the working plane;

[0010] The robot is divided into multiple parts with flexible hinges as the dividing line. The top part is the upper mass block, the bottom part is the support foot, and the rest are drive units.

[0011] The robot drives the upper mass block to rotate around the flexible hinge through the deformation of the driving unit, and at the same time uses the inertial force generated by the upper mass block to realize the movement of the robot.

[0012] Furthermore, the number of the above-mentioned driving units can be one or two. When there are two driving units, the robot can achieve bidirectional linear motion.

[0013] Furthermore, the number of the piezoelectric composite beams in the driving unit may be one or two. When the driving unit has two piezoelectric composite beams, the robot can achieve steering motion.

[0014] Furthermore, when the driving unit has two piezoelectric composite beams, the driving unit includes two first piezoelectric composite beams and a second piezoelectric composite beam with the same structure, two first driving blocks and a second driving block with the same structure, and an outer frame;

[0015] The first piezoelectric composite beam and the second piezoelectric composite beam are respectively arranged at the middle position of the outer frame;

[0016] The first driving block and the second driving block are respectively arranged at the maximum deformation positions of the first piezoelectric composite beam and the second piezoelectric composite beam to improve the displacement output effect;

[0017] The heights of the first driving block and the second driving block are the same as or slightly greater than that of the flexible hinge.

[0018] Furthermore, the first piezoelectric composite beam comprises a thin-walled vibration isolation beam, a substrate and piezoelectric ceramics;

[0019] The substrate is used to mount the piezoelectric ceramics and the support foot;

[0020] Thin-walled vibration isolation beams are used to isolate motion;

[0021] The support foot is used to transmit the deformation generated by the piezoelectric ceramic and is arranged at the position where the deformation of the substrate is the largest;

[0022] The polarization direction of the piezoelectric ceramic is parallel to the z-axis and is fixedly connected to the lower surface of the substrate.

[0023] The present invention also proposes an excitation method for large-step displacement of a dual-mode inertial-driven micro-piezoelectric robot described in any one of the above. By applying a low-symmetry sawtooth wave to the piezoelectric ceramic, the robot can generate large-step displacement in the forward direction, specifically:

[0024] From t0 to t1, the upper mass block is lifted diagonally forward, and its speed increases from zero to its maximum value. The force generated in this stage points diagonally backward, and its vertical component is downward, increasing the friction between the robot and the ground. The robot does not move during this stage.

[0025] At time t1, the piezoelectric composite beam begins to return to the equilibrium position. The upper mass block stops lifting under the action of the flexible hinge and the speed drops rapidly to zero, thereby generating an inertial force obliquely forward and realizing the forward movement of the robot.

[0026] The present invention also provides an excitation method for high-speed movement of a dual-mode inertia-driven micro-piezoelectric robot described in any of the above items. The robot applies a sinusoidal signal of a specific frequency to the piezoelectric ceramic to cause the piezoelectric composite beam to resonate, thereby driving the upper mass block to generate a greater inertial force and a higher deformation frequency, thereby causing the robot to generate high-speed translation along the y direction.

[0027] The present invention also provides a steering motion excitation method for a dual-mode inertia-driven micro-piezoelectric robot described in any one of the above items. When the robot drive unit and the upper mass block are divided into two left and right parts, the robot applies different signals to different piezoelectric ceramics on both sides, so that the robot can achieve steering motion through differential speed.

[0028] The present invention also provides a bidirectional motion excitation method for a dual-mode inertia-driven micro-piezoelectric robot as described above. When the robot is equipped with two drive units, the robot excites the two different drive units respectively to achieve bidirectional motion of the robot.

[0029] The beneficial effects of the present invention are:

[0030] The present invention provides a dual-mode inertial-driven micro-piezoelectric robot and its excitation method. The robot is designed by combining multiple motion modes, leveraging the advantages of each mode to achieve high-speed motion, large step displacement, high-resolution motion, bidirectional motion, and rotation. This robot has the advantages of a simple structure and low cost, while also offering fast motion speed, high resolution, and large step displacement, meeting the requirements of micro-nano operating environments. The dual-mode inertial-driven micro-piezoelectric robot proposed in this invention has broad application prospects in micro-nano manipulation, search and rescue, biomedicine, and other fields. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] In order to more clearly illustrate the specific embodiments of the present invention or the technical solutions in the prior art, the following is a brief introduction to the drawings required for use in the specific embodiments or the description of the prior art. Obviously, the drawings described below are some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0032] Figure 1 This is a schematic diagram of the three-dimensional structure of a steerable inertial jumping piezoelectric robot according to the present invention, wherein Figure 1 (a) is the overall structure diagram of the robot. Figure 1 (b) is a schematic diagram of the driving unit structure;

[0033] Figure 2 This is a schematic diagram of the piezoelectric composite beam structure of a steerable inertial jumping piezoelectric robot according to the present invention;

[0034] Figure 3 Schematic diagram of the excitation scheme of the inertial jumping piezoelectric robot of the present invention, wherein Figure 3 (a) is a schematic diagram of the waveform of the large-step displacement excitation scheme. Figure 3 (b) is a schematic diagram of the waveform of the high-speed motion excitation scheme;

[0035] Figure 4 This is a schematic diagram of the working principle of an inertial jumping piezoelectric robot according to the present invention;

[0036] Figure 5 This is a three-dimensional structural diagram of a bidirectional inertial jumping piezoelectric robot according to the present invention, wherein Figure 5 (a) is the overall structure diagram of the robot, where Figure 5 (b) is a schematic diagram of the driving unit structure;

[0037] Figure 6 This is a schematic diagram of the three-dimensional structure of a steerable bidirectional inertial jumping piezoelectric robot according to the present invention, wherein Figure 6(a) is the overall structure diagram of the robot, where Figure 6 (b) is a schematic diagram of the drive unit structure.

[0038] Among them, 1 represents the upper mass block, 2 represents the flexible hinge, 2-1 represents the first hinge, 2-2 represents the second hinge, 3 represents the driving unit, 3-1 represents the first piezoelectric composite beam, 3-1-1 represents the thin-walled vibration isolation beam, 3-1-2 represents the substrate, 3-1-3 represents the piezoelectric ceramic, 3-2 represents the second piezoelectric composite beam, 3-3 represents the first driving block, 3-4 represents the second driving block, 3-5 represents the outer frame, 4 represents the supporting foot, 31 represents the middle driving unit, 311 represents the piezoelectric composite beam of the middle driving unit, 312 represents the supporting block of the middle driving unit, 313 represents the outer frame of the middle driving unit, 32 represents the lower driving unit, 321 represents the first piezoelectric composite beam of the lower driving unit, 322 represents the second piezoelectric composite beam of the lower driving unit, 323 represents the first supporting block of the lower driving unit, 324 represents the second supporting block of the lower driving unit, and 325 represents the outer frame of the lower driving unit. DETAILED DESCRIPTION

[0039] The specific embodiments of the present invention are further described in detail below with reference to the accompanying drawings. The following embodiments will help those skilled in the art further understand the present invention, but are not intended to limit the present invention in any form. It should be noted that those skilled in the art may make various changes and improvements without departing from the scope of the present invention, and these are all within the scope of protection of the present invention. Specific implementation method one:

[0041] To address the issues of limited single-step displacement and movement speed of traditional inertial drive robots, this embodiment provides a dual-mode inertial drive micro-piezoelectric robot, namely an inertial jumping piezoelectric robot that can achieve linear motion or steering motion.

[0042] The robot mainly includes an upper mass block 1, a flexible hinge 2, a drive unit 3 and a support foot 4;

[0043] The bottom of the upper mass block 1 contacts the top of the drive unit 3, and the flexible hinge 2 is directly fixedly connected to the upper mass block 1 and the drive unit 3; the connection methods include welding, gluing, and an integrated structure can also be used.

[0044] The bottom of the driving unit 3 is connected to the supporting foot 4, and the driving foot 4 is in contact with the working plane;

[0045] The robot proposed in this embodiment is divided into multiple sections, separated by a flexible hinge 2. The top section is the upper mass block 1, the bottom section is the support leg 4, and the rest is the robot drive unit 3. The robot drives the upper mass block 1 around the flexible hinge 2 by deforming the drive unit 3, while the inertial force generated by the upper mass block 1 enables the robot to move.

[0046] Furthermore, in actual application, the number of driving units 3 can be one or two. When there are two driving units 3, the robot can achieve bidirectional linear motion.

[0047] Furthermore, in actual application, the number of the piezoelectric composite beams in the driving unit 3 is one or two. When there are two piezoelectric composite beams, the robot can achieve left and right turning movements.

[0048] The present embodiment proposes a dual-mode inertia-driven miniature piezoelectric robot, which generates bending deformation by applying an excitation signal to the driving unit, thereby pushing the upper mass block of the robot to rotate around the flexible hinge, and realizes the forward movement of the robot by generating an inertial force in the oblique forward direction during the lifting and falling of the upper mass block.

[0049] Furthermore, depending on the waveform and frequency of the applied excitation signal, the robot can achieve two inertial motion modes: jumping and resonance. By adjusting the configuration of the mass block and drive unit, the robot can generate two parallel inertial forces in the forward direction and a corresponding inertial force in the backward direction, thereby achieving both steering motion on a plane and forward and backward linear motion. This device features a simple structure, lightweight design, high resolution, and fast motion. It has broad application prospects in fields such as micro-nano manipulation in confined spaces and biomedicine. Specific implementation method 2:

[0051] Combine Figure 1 and Figure 2 This embodiment describes an inertial jumping piezoelectric robot that can achieve unidirectional linear motion and rotation.

[0052] like Figure 1 As shown in Figure 1 (a), the robot primarily comprises an upper mass block 1, a flexible hinge 2, a drive unit 3, and support legs 4. The bottom of the upper mass block contacts the top of the drive unit, while the lowest support legs contact the work surface. The robot is divided into multiple sections, separated by a flexible hinge 2. The uppermost section is the upper mass block 1, the lowest section is the support leg 4, and the rest is the robot drive unit 3.

[0053] like Figure 1As shown in Figure (b), the drive unit 3 comprises two piezoelectric composite beams 3-1 and 3-2 with identical structures, two drive blocks 3-3 and 3-4 with identical structures, and an outer frame 3-5. The two piezoelectric composite beams 3-1 and 3-2 are fixedly connected to the drive blocks 3-3 and 3-4, and their bottoms are fixedly connected to the piezoelectric ceramic. The drive blocks 3-3 and 3-4 act to transmit deformation and are located at the point where the deformation of the piezoelectric composite beams 3-1 and 3-2 is maximum, allowing the robot to maximize the deformation of the piezoelectric composite beams 3-1 and 3-2. By applying drive signals of different frequencies and waveforms to the piezoelectric composite beams 3-1 and 3-2, various motion modes can be achieved.

[0054] like Figure 2 As shown, the specific structure of the piezoelectric composite beam 3-1 includes a thin-walled vibration isolation beam 3-1-1 for isolating motion, a base 3-1-2 for mounting the piezoelectric ceramic 3-1-3 and the support foot 4, and the piezoelectric ceramic 3-1-3. The support foot 4 is used to transmit the deformation generated by the piezoelectric ceramic 3-1-3. It is arranged at the point where the deformation of the base 3-1-2 is the largest, and can maximize the utilization of the deformation of the piezoelectric ceramic 3-1-3. The polarization direction of the piezoelectric ceramic 3-1-3 is parallel to the z-axis and is fixedly connected to the lower surface of the base 3-1-2. By applying different drive signals to the two piezoelectric ceramics, differential motion can be achieved, and then rotation can be achieved. Specific implementation method three:

[0056] Combine Figure 3 (a) and Figure 4 This embodiment will be described. This embodiment provides an implementation scheme for a large-step displacement driving method. By applying a low-symmetry sawtooth wave to the piezoelectric ceramic, the robot can generate a large-step displacement along the forward direction.

[0057] The working process of realizing large step displacement motion is as follows:

[0058] Step 1: Apply the following to the piezoelectric ceramic: Figure 3 (a) shows a low-symmetry, fast-rising signal. During the period from t0 to t1, the robot's upper mass block 1 is rapidly lifted diagonally forward, and its speed increases from zero to a maximum value. The force generated in this stage points diagonally backward, and its vertical component is downward, which increases the friction between the robot and the ground. The robot does not move during this stage.

[0059] Step 2: Apply the following to the piezoelectric ceramics: Figure 3 As shown in the descending signal (a), at time t1, the piezoelectric composite beam begins to return to the equilibrium position. The upper mass block 1 stops lifting under the action of the flexible hinge and its speed drops rapidly to zero, thereby generating an inertial force obliquely forward and realizing the forward motion of the robot.

[0060] Step 3: Repeat steps 1 to 2 above. The robot can achieve large step displacement. Its movement principle is as follows: Figure 4 shown. Specific implementation method four:

[0062] Combine Figure 3 (b) This embodiment provides an implementation scheme of a high-speed driving mode, specifically:

[0063] The robot applies the following Figure 3 The sinusoidal signal of a specific frequency shown in (b) causes the piezoelectric composite beam to resonate, driving the upper mass block 1 to generate a larger inertial force and a higher deformation frequency, thereby causing the robot to generate high-speed translation along the y direction. Specific implementation method five:

[0065] Combine Figure 5 This embodiment describes a piezoelectric robot that can realize bidirectional linear motion and inertial jumping. Figure 5 As shown in Figure 2 (a), the robot comprises an upper mass block 1, a flexible hinge 2, a drive unit 3, and a support leg 4. The bottom support leg 4 contacts the work plane, and the robot is divided into three sections, upper, middle, and lower, by the dual flexible hinges 2-1 and 2-2. The upper section comprises the mass block 1, the middle and lower sections each support bidirectional linear motion drive unit 3, and the bottom section comprises the support leg. The surface of the upper mass block 1 contacts the top of the middle drive unit 31, and the bottom of the middle drive unit 31 contacts the top of the lower drive unit 32.

[0066] Each driving unit includes a piezoelectric composite beam, a support block and an outer frame. The middle driving unit 31 is used as an example for explanation. Figure 5 As shown in Figure (b), the central drive unit 31 includes a piezoelectric composite beam 311, a support block 312, and an outer frame 313. The two support blocks in the two drive units each transmit the deformation of the two piezoelectric composite beams. The two support blocks are placed at the points where the deformation of the two piezoelectric composite beams is maximum, maximizing the deformation of the two piezoelectric composite beams. Depending on the waveform and frequency of the applied excitation signal, the robot can achieve two inertial motion modes: jumping and resonance. Driving the drive units 31 and 32 in the middle and bottom of the robot, respectively, enables bidirectional linear motion along the y-axis. Specific implementation method six:

[0068] Combine Figure 6 This embodiment describes an inertial jumping piezoelectric robot that can achieve bidirectional linear motion and steering; Figure 6As shown in Figure 2 (a), the robot comprises an upper mass block 1, a flexible hinge 2, a drive unit 3, and a support leg 4. The bottom support leg 4 contacts the work plane, and the robot is divided into three sections, upper, middle, and lower, by the dual flexible hinges 2-1 and 2-2. The upper section comprises the mass block, the middle and lower sections each provide bidirectional linear motion drive units, and the bottom section comprises the support leg. The surface of the upper mass block 1 contacts the top of the middle drive 31, and the bottom of the middle drive 31 contacts the top of the lower drive 32.

[0069] Each driving unit includes two piezoelectric composite beams and two support blocks; the following driving unit 32 is taken as an example. Figure 6 As shown in Figure (b), the lower drive unit 32 includes two piezoelectric composite beams 321 and 322, two support blocks 323 and 324, and an outer frame 325 of the lower drive unit. The two support blocks 323 and 324 both function to transmit the deformation of the two piezoelectric composite beams 321 and 322. The two support blocks 323 and 324 are respectively arranged at the points where the deformation of the two piezoelectric composite beams 321 and 322 is maximum, which can maximize the deformation of the two piezoelectric composite beams 321 and 322. Depending on the waveform and frequency of the applied excitation signal, the robot can achieve two inertial motion modes: jumping and resonance. Driving the drive units 31 and 32 in the middle and bottom of the robot respectively can achieve bidirectional linear motion along the y-axis. Driving the piezoelectric composite beams 321 and 322 in the left and right parts respectively can achieve differential motion, thereby achieving steering motion.

[0070] In summary, the present invention provides a dual-mode inertial-driven micro-piezoelectric robot and its excitation method. The robot is designed by combining multiple motion modes, leveraging the advantages of different motion modes to achieve high-speed motion, large step displacement, and high-resolution motion. This robot has the advantages of a simple structure and low price. It also has the advantages of fast motion speed, high resolution, and large step displacement, meeting the requirements of micro-nano operating environments. The high-resolution excitation method for an inertial jumping piezoelectric robot proposed in this invention has broad application prospects in micro-nano manipulation, search and rescue, biomedicine, and other fields.

[0071] The foregoing description is merely an embodiment of the present invention and is not intended to limit the present invention. Those skilled in the art will readily appreciate that the present invention is susceptible to various modifications and variations. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of the present invention shall be included within the scope of the claims.

Claims

1. A dual-mode inertial driven micro piezoelectric robot, characterized in that: It comprises an upper mass block (1), a flexible hinge (2), a drive unit (3) and a support foot (4); The bottom of the upper mass block (1) contacts the top of the drive unit (3) and is connected via a flexible hinge (2); The bottom of the driving unit (3) is connected to the supporting foot (4), and the driving foot (4) is in contact with the working plane; The robot drives the upper mass block (1) to rotate around the flexible hinge (2) through the deformation of the driving unit (3), and simultaneously utilizes the inertial force generated by the upper mass block (1) to achieve robot movement.

2. A dual-mode inertial driven micro-piezoelectric robot according to claim 1, characterized in that: The number of the driving units (3) is one or two. When there are two driving units, the robot can achieve bidirectional linear motion.

3. A dual-mode inertial driven micro-piezoelectric robot according to claim 2, characterized in that: The number of the piezoelectric composite beams in the driving unit (3) is one or two. When there are two piezoelectric composite beams, the robot can achieve left and right turning motion.

4. The dual-mode inertial driven micro-piezoelectric robot according to claim 3, characterized in that: The driving unit (3) comprises two first piezoelectric composite beams (3-1) and a second piezoelectric composite beam (3-2) with the same structure, two first driving blocks (3-3) and a second driving block (3-4) with the same structure, and an outer frame (3-5); The first piezoelectric composite beam (3-1) and the second piezoelectric composite beam (3-2) are respectively arranged at the middle position of the outer frame (3-5); The first driving block (3-3) and the second driving block (3-4) are respectively arranged at the maximum deformation positions of the first piezoelectric composite beam (3-1) and the second piezoelectric composite beam (3-2); The heights of the first driving block (3-3) and the second driving block (3-4) are the same as that of the flexible hinge (2).

5. The dual-mode inertial driven micro-piezoelectric robot according to claim 4, characterized in that: The first piezoelectric composite beam (3-1) comprises a thin-walled vibration isolation beam (3-1-1), a base (3-1-2) and piezoelectric ceramics (3-1-3); The base (3-1-2) is used to mount the piezoelectric ceramic (3-1-3) and the support foot (4); The thin-walled vibration isolation beam (3-1-1) is used to isolate the movement; The supporting foot (4) is used to transmit the deformation generated by the piezoelectric ceramic (3-1-3) and is arranged at the position of the base body (3-1-2) where the deformation is the largest.

6. The dual-mode inertia-driven micro-piezoelectric robot according to claim 5, characterized in that: The polarization direction of the piezoelectric ceramic (3-1-3) is parallel to the z-axis and is fixedly connected to the lower surface of the substrate (3-1-2).

7. A method for exciting large step displacement of a dual-mode inertial driven micro-piezoelectric robot according to any one of claims 1 to 6, characterized in that: By applying a low-symmetry sawtooth wave to the piezoelectric ceramic, the robot can generate a large step displacement along the forward direction, specifically: From t0 to t1, the upper mass block is lifted diagonally forward, and its speed increases from zero to its maximum value. The force generated in this stage points diagonally backward, and its vertical component is downward, increasing the friction between the robot and the ground. The robot does not move during this stage. At time t1, the piezoelectric composite beam begins to return to the equilibrium position. The upper mass block stops lifting under the action of the flexible hinge and the speed drops rapidly to zero, thereby generating an inertial force obliquely forward and realizing the forward movement of the robot.

8. A method for exciting high-speed motion of a dual-mode inertial driven micro-piezoelectric robot according to any one of claims 1 to 6, characterized in that: By applying a sinusoidal signal of a specific frequency to the piezoelectric ceramic, the piezoelectric composite beam resonates, driving the upper mass block to generate a larger inertial force and a higher deformation frequency, thereby causing the robot to produce high-speed translation along the y direction.

9. A steering motion excitation method for a dual-mode inertial driven micro-piezoelectric robot according to any one of claims 1 to 6, characterized in that: When the drive unit and the upper mass block are divided into left and right parts, different signals are applied to different piezoelectric ceramics on both sides, so that the robot can achieve steering movement through differential speed.

10. A bidirectional motion excitation method for a dual-mode inertial driven micro-piezoelectric robot according to any one of claims 1 to 6, characterized in that: When the robot is equipped with two drive units, the two different drive units are stimulated separately to achieve bidirectional movement of the robot.

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