Five-axis sample stage applied to scanning electron microscope

Abstract

The invention discloses a five-axis sample stage applied to a scanning electron microscope, and belongs to the technical field of electron microscopes. The sample table comprises a Z-axis movement mechanism, a T-axis rotation mechanism, an X-axis movement mechanism, a Y-axis movement mechanism, an R-axis rotation mechanism and a sample table body. All the shafts achieve precise linear or rotary motion through crossed roller guide rails, vacuum motors are adopted for driving, a grating ruler, a travel switch and a limiting block are matched to guarantee positioning precision and motion limiting, and finally five-axis linkage of X-axis and Y-axis orthogonal linear motion, Z-axis vertical lifting, T-axis inclination and R-axis 360-degree rotation is achieved. The device has the advantages of multi-degree-of-freedom omnibearing observation, high-precision positioning, high stability of a vacuum environment, improvement of operation efficiency and the like, can meet the requirements of a scanning electron microscope on multi-angle and high-precision observation of a sample, and is suitable for micro-topography analysis in the fields of material science, electronic manufacturing and the like.

Description

Technical Field

[0001] This invention belongs to the technical field of electron microscopy, specifically relating to a five-axis sample stage for use in scanning electron microscopes. Background Technology

[0002] Scanning electron microscopy (SEM), as an important tool for modern microscopic analysis, plays a crucial role in materials science, life sciences, semiconductor detection, and nanotechnology. Its working principle involves scanning the sample surface with a focused electron beam and detecting the signals generated by the interaction between electrons and the sample to obtain information about the sample's microstructure and composition. In this process, the sample stage, as the core component for supporting and positioning the sample, directly affects the flexibility, efficiency, and accuracy of the observation.

[0003] Current SEM sample stages face numerous technical challenges: First, traditional sample stages have complex structures, making it difficult to achieve multi-degree-of-freedom motion within the limited space of the SEM vacuum chamber; second, existing designs often occupy excessive chamber space, leading to difficulties in sample installation and debugging; and third, avoiding interference between various motion mechanisms while maintaining high-precision motion is a pressing issue. Especially in applications such as advanced semiconductor detection and high-end materials analysis, higher demands are placed on the sample stage's motion range, positioning accuracy, and stability.

[0004] In existing technologies, sample stages mostly adopt a split design with loosely arranged motion axes, which not only occupies a lot of space but also makes it difficult to achieve precise coordination and control. In addition, traditional designs often pose a risk of motion interference when achieving multi-angle observation, affecting the observation results. Especially under long-term high-load working conditions, the stability and reliability of existing sample stages are difficult to guarantee.

[0005] To address the aforementioned issues, existing technologies urgently need improvement. Summary of the Invention

[0006] This invention provides a five-axis sample stage for scanning electron microscopes, which solves the technical problem that current electron microscopes are difficult to achieve multi-degree-of-freedom motion and have the risk of motion interference when achieving multi-angle observation.

[0007] This invention provides a five-axis sample stage for use in a scanning electron microscope, which adopts the following technical solution: including a Z-axis motion mechanism, a T-axis rotation mechanism, an X-axis motion mechanism, a Y-axis motion mechanism, an R-axis rotation mechanism, and a sample stage; The Z-axis motion mechanism includes a Z-axis moving plate, a cross roller guide rail Z, and a mounting plate Z. The mounting plate Z is fixed to the vacuum chamber door of the scanning electron microscope. The cross roller guide rail Z is installed on the back of the mounting plate Z. The Z-axis moving plate is connected to the inner side of the cross roller guide rail Z and slides along the cross roller guide rail Z. The T-axis rotation mechanism includes a rotatably mounted worm wheel T, which is installed on the back of the Z-axis moving plate and partially passes through the front of the Z-axis moving plate. The X-axis motion mechanism includes a cross roller guide X and an X-axis L-shaped base; the cross roller guide X is installed on both sides above the X-axis L-shaped base for slidingly mounting the Y-axis motion mechanism; one end of the X-axis L-shaped base is connected and fixed to a worm gear T. The Y-axis motion mechanism includes an XY adapter plate, a cross roller guide rail Y, and a Y-axis moving tray. The XY adapter plate is installed above the cross roller guide rail X, and the cross roller guide rail Y is installed on both sides above the XY adapter plate. The Y-axis moving tray is connected to the inner side of the cross roller guide rail Y and slides along the cross roller guide rail Y. The R-axis rotation mechanism includes a rotatably mounted worm gear R, which is mounted on the Y-axis moving tray. The sample stage is mounted on the worm gear R and is used to support the sample to be observed.

[0008] Preferably, the Z-axis motion mechanism further includes a limit switch Z, a limit block Z, a vacuum motor Z, a coupling Z, and a screw Z; the limit switch Z is fixed on one side of the mounting plate Z, the limit block Z is fixed between the screw Z and the Z-axis moving plate, and is used to limit the lowest position of the Z-axis moving plate; the vacuum motor Z is fixed on the right side of the back of the mounting plate Z to avoid motion interference with other mechanisms; the vacuum motor Z is connected to the screw Z through the coupling Z, and the nut of the screw Z is connected to the Z-axis moving plate.

[0009] Preferably, the T-axis rotation mechanism further includes a limit switch T, two limit blocks T, a vacuum motor T, a coupling T, and a worm gear T. The limit switch T is fixed to the Z-axis moving plate, the two limit blocks T are fixed to the worm gear T, and the limit switch T is located between the two limit blocks T. The limit blocks T trigger the limit switch T to limit the rotation angle of the T-axis rotation mechanism. The vacuum motor T is fixed to the bottom left side of the Z-axis moving plate to optimize the spatial layout of the back of the Z-axis moving plate. The vacuum motor T is connected to the worm gear T through the coupling T, and the worm gear T meshes with the worm gear T.

[0010] Preferably, the X-axis motion mechanism further includes a vacuum motor X, a screw X, a coupling X, a grating ruler X, and a reading head X; the vacuum motor X is connected to the screw X via the coupling X; the screw X is connected to the Y-axis motion mechanism; the grating ruler X is fixed on the X-axis L-shaped base, and the reading head X is fixed on the XY adapter plate, and the reading head X cooperates with the grating ruler X to limit the movement range of the XY adapter plate along the X-axis direction.

[0011] Preferably, the Y-axis motion mechanism further includes a screw Y, a vacuum motor Y, a coupling Y, a grating ruler Y, and a reading head Y; the screw Y is connected to the Y-axis moving tray, and the vacuum motor Y is connected to the screw Y through the coupling Y; the grating ruler Y is fixed on the XY adapter plate, and the reading head Y is fixed on the Y-axis moving tray, and the reading head Y cooperates with the grating ruler Y to limit the movement range of the Y-axis moving tray along the Y-axis direction.

[0012] Preferably, the R-axis rotation mechanism further includes a worm gear R, a vacuum motor R, a coupling R, a limit switch R, and a limit block R; the worm gear R meshes with the worm wheel R, and the vacuum motor R is connected to the worm gear R through the coupling R; the limit block R is fixed on the worm wheel R, and the limit switch R is fixed on the Y-axis moving tray. When the limit block R triggers the limit switch R, it is the starting position of the R-axis rotation mechanism.

[0013] Preferably, the cross roller guide Y and the cross roller guide X are spatially perpendicular to each other to achieve orthogonal linear motion in the X and Y axis directions.

[0014] Preferably, the rotation angle of the T-axis rotation mechanism is -4° to 70°.

[0015] Preferably, the R-axis rotation mechanism can rotate 360°.

[0016] The beneficial effects of this invention are: This invention achieves full-angle attitude adjustment of the sample in three-dimensional space through orthogonal linear motion of the X and Y axes, vertical lifting of the Z axis, rotational tilt adjustment of the T axis, and 360° rotation of the R axis. The combination of a "grating ruler + reading head" enables high-precision position feedback for X and Y axis movement. Simultaneously, the limit switches (Z-axis limit switch, T-axis limit switch, R-axis limit switch) and limit blocks (Z-axis limit block, T-axis limit block, R-axis limit block) equipped on each axis further ensure precise limiting of movement and calibration of the starting position, meeting the stringent requirements of SEM for sample position accuracy.

[0017] Furthermore, when the five-axis sample stage is installed as a whole in the chamber of the scanning electron microscope, since the T-axis and Z-axis are placed on the back of the mounting plate Z, only the parts visible from the front are exposed when the chamber is opened. This reduces the space occupied by the vacuum five-axis motion stage and makes the surface cleaner. Each axis uses crossed roller guides, which have the characteristics of low friction, high rigidity, and strong anti-tipping ability, and can maintain motion stability for a long time in a vacuum environment. At the same time, the layout of the vacuum motor has been optimized to avoid motion interference between the axes, ensuring the long-term reliable operation of the equipment in the vacuum chamber. Attached Figure Description

[0018] For ease of explanation, the present invention will be described in detail below with reference to specific embodiments and accompanying drawings.

[0019] Figure 1 This is a perspective view of the five-axis sample stage in this embodiment; Figure 2 This is a perspective view of the five-axis sample stage in this embodiment from another angle; Figure 3 This is a front view of the five-axis sample stage in this embodiment.

[0020] In the picture: 1-Z-axis moving plate; 2-Vacuum motor X; 3-Worm gear R; 4-Sample stage; 5-Worm wheel R; 6-Coupling Y; 7-Y-axis moving tray; 8-Cross roller guide X; 9-Reading head Y; 10-Screw X; 11-X-axis L-shaped base; 12-Grating ruler Y; 13-XY adapter plate; 14-Vacuum motor R; 15-Screw Y; 16-Coupling X; 17-Reading head X; 18-Cross roller guide Z; 19- Limit switch T; 20-worm gear T; 21-vacuum motor T; 22-coupling T; 23-worm T; 24-limit switch Z; 25-vacuum motor Z; 26-coupling Z; 27-screw Z; 28-mounting plate Z; 29-grating ruler X; 30-cross roller guide Y; 31-vacuum motor Y; 32-coupling R; 33-limit switch R; 34-limit block Z; 35-limit block T; 36-limit block R. Detailed Implementation

[0021] The following are specific embodiments of the present invention described in conjunction with the accompanying drawings, further illustrating the technical solutions of the present invention. However, the present invention is not limited to these embodiments. Specific details, such as particular configurations and components, are provided in the following description merely to aid in a comprehensive understanding of the embodiments of the present invention. Therefore, those skilled in the art should understand that various changes and modifications can be made to the embodiments described herein without departing from the scope and spirit of the present invention. Furthermore, for clarity and brevity, descriptions of known functions and structures have been omitted.

[0022] It should be noted that, unless otherwise specified, the embodiments and features described in this invention can be combined with each other.

[0023] like Figures 1-3 As shown, this embodiment provides a five-axis sample stage for a scanning electron microscope, including a Z-axis motion mechanism, a T-axis rotation mechanism, an X-axis motion mechanism, a Y-axis motion mechanism, an R-axis rotation mechanism, and a sample stage 4; The Z-axis motion mechanism includes a Z-axis moving plate 1, a cross roller guide rail Z18, a mounting plate Z28, a vacuum motor Z25, a coupling Z26, and a screw Z27. The mounting plate Z28 is fixed to the vacuum chamber door of the scanning electron microscope. Using the mounting plate Z28 as a reference, the direction facing the chamber is considered the front, and the right side facing the front of the chamber is considered the right side. The cross roller guide rail Z18 is mounted on the back of the mounting plate Z28. The Z-axis moving plate 1 is connected to the inner side of the cross roller guide rail Z18 and slides along the cross roller guide rail Z18. The vacuum motor Z25 is fixed to the right side of the back of the mounting plate Z28 to avoid motion interference with other mechanisms. The vacuum motor Z25 is connected to the screw Z27 via the coupling Z26, and the nut of the screw Z27 is connected to the Z-axis moving plate 1. The operation of the vacuum motor Z25 drives the screw Z27 to rotate, thereby moving the Z-axis moving plate 1 along the Z-direction of the cross roller guide rail Z18.

[0024] The T-axis rotation mechanism includes a worm gear T20, a vacuum motor T21, a coupling T22, and a worm T23. The worm gear T20 is mounted on the back of the Z-axis moving plate 1, and part of the worm gear T20 passes through the front of the Z-axis moving plate 1. The vacuum motor T21 is fixed to the bottom left side of the Z-axis moving plate 1 to optimize the spatial layout of the back of the Z-axis moving plate 1. The vacuum motor T21 is connected to the worm T23 through the coupling T22. The worm T23 meshes with the worm gear T20, and the worm gear T20 is connected to the X-axis L-shaped base 11 of the X-axis motion mechanism. The operation of the vacuum motor T21 drives the worm T23 to rotate, which in turn drives the worm gear T20 to rotate on the Z-axis moving plate 1, thereby driving the worm gear T20 to rotate the X-axis L-shaped base 11.

[0025] The X-axis motion mechanism includes a cross roller guide X8, an X-axis L-shaped base 11, a vacuum motor X2, a screw X10, and a coupling X16. The cross roller guide X8 is installed on both sides above the X-axis L-shaped base 11, and the Y-axis motion mechanism is installed above the cross roller guide X8. One end of the X-axis L-shaped base 11 is connected and fixed to a worm gear T20. The vacuum motor X2 is connected to the screw X10 through the coupling X16, and the screw X10 is connected to the Y-axis motion mechanism. The operation of the vacuum motor X2 drives the screw X10 to rotate, thereby driving the Y-axis motion mechanism to move linearly in the X direction of the cross roller guide X8.

[0026] The Y-axis motion mechanism includes an XY adapter plate 13, a cross roller guide rail Y30, a Y-axis moving tray 7, a screw Y15, a vacuum motor Y31, and a coupling Y6. The XY adapter plate 13 is mounted above the cross roller guide rail X8, and the cross roller guide rail Y30 is mounted on both sides above the XY adapter plate 13. The Y-axis moving tray 7 is connected to the inner side of the cross roller guide rail Y30 and slides along the cross roller guide rail Y30. The screw Y15 is connected to the Y-axis moving tray 7, and the vacuum motor Y31 is connected to the screw Y15 through the coupling Y6. The operation of the vacuum motor Y31 drives the screw Y15 to rotate, thereby driving the Y-axis moving tray 7 to move linearly along the Y-axis direction where the cross roller guide rail Y30 is located.

[0027] The R-axis rotation mechanism includes a worm gear R5, a worm R3, a vacuum motor R14, and a coupling R32. The worm gear R5 is mounted on the Y-axis moving tray 7. The worm R3 meshes with the worm gear R5, and the vacuum motor R14 is connected to the worm R3 through the coupling R32. The operation of the vacuum motor R14 drives the worm R3 to rotate, thereby driving the worm gear R5 to rotate in a direction perpendicular to the Y-axis moving tray 7.

[0028] The sample stage 4 is mounted on the worm gear R5 and is used to support the sample to be observed.

[0029] This application further proposes that the Z-axis motion mechanism also includes a limit switch Z24 and a limit block Z34. The limit switch Z24 is fixed on one side of the mounting plate Z28, and the limit block Z34 is fixed between the screw Z27 and the Z-axis moving plate 1 to limit the lowest position of the Z-axis moving plate 1. Specifically, vacuum motor Z25 drives screw Z27 to rotate via coupling Z26. The nut of screw Z27 causes Z-axis moving plate 1 to slide along cross roller guide Z18. When Z-axis moving plate 1 approaches the end of its stroke, limit block Z34 triggers limit switch Z24, cutting off power to vacuum motor Z25 to stop its movement. The spatial layout on the back of mounting plate Z28, achieved by placing vacuum motor Z25 on the right side, effectively avoids motion interference with adjacent mechanisms. The cooperation between the sliding mechanism of cross roller guide Z18 and the screw drive system ensures the linear accuracy of movement in the Z-axis direction.

[0030] This application further proposes that the T-axis rotation mechanism also includes a limit switch T19 and two limit blocks T35; the limit switch T19 is fixed on the Z-axis moving plate 1, and the two limit blocks T35 are fixed on the worm gear T20. The limit switch T19 is located between the two limit blocks T35, and the limit switch T19 is triggered by the limit blocks T35 to limit the rotation angle of the T-axis rotation mechanism.

[0031] Specifically, when the vacuum motor T21 drives the worm gear T23 and worm wheel T20 to rotate, the worm wheel T20 drives the X-axis L-shaped base 11 to rotate, which in turn drives the sample stage 4 to rotate around the T-axis. When the two limit blocks T35 fixed on the worm wheel T20 move close to the limit switch T19 during rotation, they trigger a contact-type signal feedback. When either limit block T35 touches the limit switch T19, the control system immediately cuts off the power supply to the vacuum motor T21, thereby achieving precise angle limitation from -4° to 70°. The layout of the vacuum motor T21 at the bottom left side of the Z-axis moving plate 1 avoids spatial interference with adjacent components such as the cross roller guide Z.

[0032] This application further proposes that the X-axis motion mechanism also includes a grating ruler X29 and a reading head X17; the grating ruler X29 is fixed on the X-axis L-shaped base 11, and the reading head X17 is fixed on the XY adapter plate 13, and the reading head X17 cooperates with the grating ruler X29 to limit the movement range of the XY adapter plate 13 along the X-axis direction.

[0033] Specifically, the vacuum motor X2 drives the screw X10 to rotate, and the screw X10 drives the XY adapter plate 13 to slide along the cross roller guide rail X8, achieving linear motion in the X-axis direction. The grating ruler X29 is fixed on the X-axis L-shaped base 11, forming a closed-loop detection system with the reading head X17 on the XY adapter plate 13. When the XY adapter plate 13 moves, the reading head X17 collects the displacement signal of the grating ruler X29 in real time, and the control system determines whether the current position exceeds the preset range. For example, when it moves to the limit position of the X-axis travel, the signal detected by the reading head X17 triggers the control logic to stop the vacuum motor X2, thereby avoiding mechanical interference or overload risks.

[0034] This application further proposes that the Y-axis motion mechanism also includes a grating ruler Y12 and a reading head Y9; the grating ruler Y12 is fixed on the XY adapter plate 13, the reading head Y9 is fixed on the Y-axis moving tray 7, and the reading head Y9 cooperates with the grating ruler Y12 to limit the movement range of the Y-axis moving tray 7 along the Y-axis direction.

[0035] Specifically, when the vacuum motor Y31 drives the screw Y15 to rotate, the nut meshing with the screw Y15 causes the Y-axis moving tray 7 to slide along the cross roller guide Y30. The grating ruler Y12 is installed parallel to the Y-axis direction on the side of the XY adapter plate 13. The reading head Y9 moves synchronously with the Y-axis moving tray and detects the changes in the scale line position of the grating ruler Y12 in real time. When the Y-axis moving tray is detected to be close to the preset stroke end point, the control system cuts off the drive signal of the vacuum motor Y31, so that the movement stops within the safe distance of the mechanical limit; this avoids the accuracy loss caused by rigid collisions and ensures the long-term reliability of the motion mechanism in a vacuum environment.

[0036] This application further proposes that the R-axis rotation mechanism also includes a limit switch R33 and a limit block R36; the limit block R36 is fixed on the worm gear R5, and the limit switch R33 is fixed on the Y-axis moving tray 7. When the limit block R36 triggers the limit switch R33, it is the starting position of the R-axis rotation mechanism; the R-axis rotation mechanism can rotate 360°.

[0037] Specifically, vacuum motor R14 drives worm gear R3 to rotate via coupling R32. The meshing of worm gear R3 and worm wheel R5 transmits the rotational motion to sample stage 4, thereby causing sample 4 to rotate. When worm wheel R5 drives sample stage 4 to rotate, limit block R36 rotates synchronously with worm wheel R. When sample stage 4 rotates to the starting position, limit block R36 contacts the sensing area of ​​limit switch R33, triggering an electrical signal to stop vacuum motor R14. Limit switch R33 and limit block R36 work together to determine the starting position of rotation. After the worm wheel rotates one revolution, the limit block triggers the limit switch to reset the initial state. This process, through mechanical triggering and electrical signal interlocking, ensures that each rotational movement is based on a fixed starting point, avoiding cumulative angular errors.

[0038] This application further proposes that the cross roller guide Y30 and the cross roller guide X8 are spatially perpendicularly distributed to achieve orthogonal linear motion in the X and Y axis directions.

[0039] Specifically, the cross roller guide Y30 is installed on both sides above the XY transition plate 13, and the Y-axis moving tray 7 slides along the Y-axis through contact between the rollers and the guide rail; the cross roller guide X8 is installed on both sides above the X-axis L-shaped base 11, and the XY transition plate 13 slides along the X-axis through rollers. Due to the vertical arrangement of the two guide rails, the X-axis and Y-axis motion planes are orthogonal, ensuring that the sample stage 4 moves strictly in a straight line along the X and Y axes in the horizontal plane. During the movement, the X-axis drive mechanism and the Y-axis drive mechanism work independently, and position information is fed back through a grating ruler to ensure that the two axes do not interfere with each other and that the positioning accuracy is controllable.

[0040] This application further proposes that the rotation angle of the T-axis rotation mechanism is -4° to 70°. Specifically, the T-axis rotation mechanism drives the sample stage 4 to rotate around the T-axis through a worm gear transmission system, and its rotation angle is limited to the range of -4° to 70°. During this process, two limit blocks T35 are fixed on the worm gear T20. When the worm gear T20 rotates to its limit position, the limit block T35 triggers the limit switch T19, thereby cutting off the drive signal of the vacuum motor T21. This angle range design allows the sample stage 4 to achieve large-angle tilt observation within the limited space inside the vacuum chamber, while also compensating for installation errors through the negative angle fine-tuning function, and avoiding mechanical interference with the Z-axis motion mechanism.

[0041] This application further proposes that the Z-axis motion mechanism has a screw Z27 stroke of 50mm, the Y-axis motion mechanism has a screw Y15 stroke of 130mm, and the X-axis motion mechanism has a screw X10 stroke of 130mm. Specifically, the Z-axis screw stroke is set to 50mm to ensure the vertical adjustment accuracy of the sample stage while avoiding interference with the vacuum chamber door structure due to excessive stroke; the X-axis and Y-axis screw strokes are both set to 130mm, forming an effective motion area of ​​130mm × 130mm in the horizontal plane through an orthogonally distributed guide rail system, enabling the detection needs of large-size samples such as semiconductor wafers during observation.

[0042] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to this application. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0043] In the description of this application, it should be understood that the terms "upper" and "lower" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

Claims

1. A five-axis sample stage for use in a scanning electron microscope, characterized in that, It includes a Z-axis motion mechanism, a T-axis rotation mechanism, an X-axis motion mechanism, a Y-axis motion mechanism, an R-axis rotation mechanism, and a sample stage (4); The Z-axis motion mechanism includes a Z-axis moving plate (1), a cross roller guide rail Z (18), and a mounting plate Z (28). The mounting plate Z (28) is fixed on the vacuum chamber door of the scanning electron microscope. The cross roller guide rail Z (18) is mounted on the back of the mounting plate Z (28). The Z-axis moving plate (1) is connected to the inner side of the cross roller guide rail Z (18) and slides along the cross roller guide rail Z (18). The T-axis rotation mechanism includes a rotatable worm wheel T (20), which is mounted on the back of the Z-axis moving plate (1) and partially passes through the front of the Z-axis moving plate (1); The X-axis motion mechanism includes a cross roller guide X (8) and an X-axis L-shaped base (11); the cross roller guide X (8) is installed on both sides above the X-axis L-shaped base (11) for sliding installation of the Y-axis motion mechanism; one end of the X-axis L-shaped base (11) is connected and fixed to the worm gear T (20); The Y-axis motion mechanism includes an XY adapter plate (13), a cross roller guide rail Y (30), and a Y-axis moving tray (7). The XY adapter plate (13) is installed above the cross roller guide rail X (8), and the cross roller guide rail Y (30) is installed on both sides above the XY adapter plate (13). The Y-axis moving tray (7) is connected to the inner side of the cross roller guide rail Y (30) and slides along the cross roller guide rail Y (30). The R-axis rotation mechanism includes a rotatable worm gear R (5), which is mounted on the Y-axis moving tray (7); The sample stage (4) is mounted on the worm gear R (5) and is used to carry the sample to be observed.

2. The five-axis sample stage for a scanning electron microscope according to claim 1, characterized in that, The Z-axis motion mechanism also includes a limit switch Z (24), a limit block Z (34), a vacuum motor Z (25), a coupling Z (26), and a screw Z (27); The limit switch Z (24) is fixed on one side of the mounting plate Z (28), and the limit block Z (34) is fixed between the screw Z (27) and the Z-axis moving plate (1) to limit the lowest position of the Z-axis moving plate (1); The vacuum motor Z (25) is fixed on the right side of the back of the mounting plate Z (28) to avoid motion interference with other mechanisms; the vacuum motor Z (25) is connected to the screw Z (27) through the coupling Z (26), and the nut of the screw Z (27) is connected to the Z-axis moving plate (1).

3. A five-axis sample stage for a scanning electron microscope according to claim 1, characterized in that, The T-axis rotation mechanism also includes a limit switch T (19), two limit blocks T (35), a vacuum motor T (21), a coupling T (22), and a worm gear T (23). The limit switch T (19) is fixed on the Z-axis moving plate (1), and the two limit blocks T (35) are fixed on the worm gear T (20). The limit switch T (19) is located between the two limit blocks T (35). The limit block T (35) triggers the limit switch T (19) to limit the rotation angle of the T-axis rotation mechanism. The vacuum motor T (21) is fixed on the bottom left side of the Z-axis moving plate (1) to optimize the spatial layout of the back of the Z-axis moving plate (1); the vacuum motor T (21) is connected to the worm T (23) through the coupling T (22), and the worm T (23) meshes with the worm wheel T (20).

4. A five-axis sample stage for a scanning electron microscope according to claim 1, characterized in that, The X-axis motion mechanism also includes a vacuum motor X (2), a screw X (10), a coupling X (16), a grating ruler X (29), and a reading head X (17). The vacuum motor X (2) is connected to the screw X (10) via a coupling X (16); the screw X (10) is connected to the Y-axis motion mechanism; The grating ruler X (29) is fixed on the X-axis L-shaped base (11), and the reading head X (17) is fixed on the XY adapter plate (13). The reading head X (17) cooperates with the grating ruler X (29) to limit the movement range of the XY adapter plate (13) along the X-axis.

5. A five-axis sample stage for a scanning electron microscope according to claim 1, characterized in that, The Y-axis motion mechanism also includes a screw Y (15), a vacuum motor Y (31), a coupling Y (6), a grating ruler Y (12), and a reading head Y (9); The screw Y (15) is connected to the Y-axis moving tray (7), and the vacuum motor Y (31) is connected to the screw Y (15) through the coupling Y (6). The grating ruler Y (12) is fixed on the XY adapter plate (13), and the reading head Y (9) is fixed on the Y-axis moving tray (7). The reading head Y (9) cooperates with the grating ruler Y (12) to limit the movement range of the Y-axis moving tray (7) along the Y-axis direction.

6. A five-axis sample stage for a scanning electron microscope according to claim 1, characterized in that, The R-axis rotation mechanism also includes a worm gear R (3), a vacuum motor R (14), a coupling R (32), a limit switch R (33), and a limit block R (36). The worm R (3) meshes with the worm wheel R (5), and the vacuum motor R (14) is connected to the worm R (3) through the coupling R (32); The limiting block R (36) is fixed on the worm gear R (5), and the limit switch R (33) is fixed on the Y-axis moving tray (7). When the limiting block R (36) triggers the limit switch R (33), it is the starting position of the R-axis rotation mechanism.

7. A five-axis sample stage for a scanning electron microscope according to claim 1, characterized in that, The cross roller guide Y (30) and cross roller guide X (8) are spatially perpendicular to each other to achieve orthogonal linear motion in the X and Y axis directions.

8. A five-axis sample stage for a scanning electron microscope according to claim 3, characterized in that, The rotation angle of the T-axis rotation mechanism is -4° to 70°.

9. A five-axis sample stage for a scanning electron microscope according to claim 6, wherein the R-axis rotation mechanism is rotatable 360°.

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