Fixing clamp for plane grinding of silicon carbide crystal ingot
By designing an adaptive adjustment for the support and clamping mechanism, the problem of unstable clamping in the surface grinding of silicon carbide ingots was solved, achieving high-precision and high-efficiency processing results.
Patent Information
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- SHANXI SEMICORE CRYSTAL CO LTD
- Filing Date
- 2025-04-30
- Publication Date
- 2026-05-22
AI Technical Summary
In the current surface grinding process of silicon carbide ingots, the fixtures cannot effectively clamp the ingots, resulting in low processing accuracy, unstable clamping, and the need to change the fixtures for ingots of different thicknesses, which affects production efficiency.
Design a fixture that includes a support mechanism, a rotation adjustment mechanism, and multiple clamping mechanisms. The fixture ensures clamping stability through support plate height adjustment, adaptive adjustment of the jaws, and spring compression force, and is adaptable to ingots of different thicknesses and diameters.
It improves processing accuracy and production efficiency, reduces product damage rate, and enhances clamping strength and adaptability.
Smart Images
Figure CN224266022U_ABST
Abstract
Description
Technical Field
[0001] This utility model relates to the field of silicon carbide crystal processing technology, specifically a fixing fixture for surface grinding of silicon carbide crystal ingots. Background Technology
[0002] Surface grinding of silicon carbide ingots is a core step in substrate fabrication, directly affecting wafer flatness, surface damage layer control, and subsequent epitaxial growth / device performance. Surface grinding of silicon carbide ingots places higher demands on grinding equipment. Silicon carbide is very hard and difficult to process, so the processing stability of silicon carbide materials is crucial. Current surface grinders perform horizontal "Z"-shaped surface scanning grinding on the upper surface of silicon carbide ingots using the grinding wheel. Therefore, a fixture is needed for surface grinding. Since the ingot is a relatively short cylinder with an uncertain diameter, the upper surface of the clamping fixture cannot be higher than the upper surface of the ingot being processed, and the fixing points when clamping the sides cannot be a single parallel plane but several vertices. This results in fewer contact surfaces for fixing the ingot, affecting the stability of the ingot clamping. In current grinding processes, it is usually necessary to manually clamp a "V"-shaped iron block from both sides of the ingot before fixing the iron block with the grinding machine's magnetic chuck. This method has the following disadvantages:
[0003] (1) When clamping, there is no clamping force between the crystal ingot and the iron block clamp, which cannot guarantee that the crystal ingot is clamped. There will be slight shaking, which will affect the processing accuracy.
[0004] (2) When using two V-shaped iron blocks to clamp the ingot, there are only 4 contact points. In the processing of high-hardness silicon carbide materials, the limited number of clamping points cannot achieve the desired effect of fixing silicon carbide ingots.
[0005] (3) Different thicknesses of silicon carbide ingots require different fixtures, which are inconvenient to replace and cannot meet the thickness requirements of all ingots, thus reducing production efficiency.
[0006] Therefore, in order to securely fix the ingot, it is necessary to design a surface grinder fixture for processing silicon carbide. Utility Model Content
[0007] This invention overcomes the shortcomings of the prior art by proposing a fixing fixture for the surface grinding of silicon carbide ingots, thus solving the problem of not being able to guarantee the clamping of ingots in the surface grinding process of silicon carbide ingots.
[0008] To achieve the above objectives, this utility model is implemented through the following technical solution:
[0009] A fixture for surface grinding of silicon carbide ingots includes a support mechanism, a rotation adjustment mechanism, and multiple clamping mechanisms.
[0010] The support mechanism includes a base, an ingot support plate, and a first guide shaft; the ingot support plate is fixed on the base, and multiple first guide shafts are symmetrically arranged on the base around the center of the ingot support plate, with a clamping mechanism slidably connected to each first guide shaft.
[0011] The rotary adjustment mechanism includes a turntable, an adjusting rod, and a locking arm; the turntable is slidably connected to the base, and the adjusting rod is fixedly connected to the turntable. The end of the adjusting rod is threadedly connected to the locking arm, which fixes the adjusting rod to the base; multiple sliding grooves are symmetrically arranged on the turntable around the center of the ingot support plate; each sliding groove corresponds to a clamping mechanism.
[0012] The clamping mechanism includes an adaptively adjustable gripper, which is connected to a first linear bearing. A rubber-coated bearing is connected to the bottom of the first linear bearing. The first linear bearing is slidably connected to a first guide shaft, and the rubber-coated bearing is slidably connected in a groove. The rubber-coated bearing is used to convert the rotational motion of the turntable into linear motion of the clamping mechanism on the first guide shaft.
[0013] Furthermore, the base includes a first base, a second base, and a third base; the bottom of the second base is fixedly connected to the first base, the third base is located at the center of the inner side of the second base, and the bottom of the third base is fixedly connected to the first base by bolts, and the ingot support plate is connected to the third base.
[0014] Furthermore, the ingot support plate is threaded onto the third base, and the ingot support plate and the third base are fixed together by locking screws.
[0015] Furthermore, the first base is a magnetic body, fixed to the magnetic chuck of the surface grinder.
[0016] Furthermore, a top cover plate is fixedly connected to the second base, and the ingot support plate is located above the top cover plate.
[0017] Furthermore, the upper part of the second base is symmetrically provided with multiple guide shaft fixing seats, which are fixedly connected to the second base; a rectangular through groove is opened on the upper cover plate at the position corresponding to the guide shaft fixing seat, one end of the first guide shaft is connected to the guide shaft fixing seat, and the other end is connected to the inner wall of the rectangular through groove of the upper cover plate.
[0018] Furthermore, the second base is connected to the turntable via bearings.
[0019] Furthermore, the clamping mechanism also includes a jaw, a second linear bearing, a second guide shaft, a spring, and a jaw fixing seat; the second linear bearing is fixed inside the jaw, one end of the second guide shaft is fixed to the jaw fixing seat, and the other end passes through the second linear bearing and is inserted into the jaw, the spring is wrapped around the outside of the second guide shaft, and one end of the spring is connected to the jaw fixing seat, and the other end is connected to the second linear bearing.
[0020] Furthermore, there are two limit screws in the middle of the gripper. One threaded end of the limit screw is screwed into the gripper for fixation, and the other threaded end of the limit screw is engaged with the gripper fixing seat.
[0021] Furthermore, a silicone pad with adhesive backing is attached to the outer side of the gripper.
[0022] The beneficial effects of this utility model compared to the prior art are as follows:
[0023] This invention allows for adjustment of the ingot support plate to change the clamping height of silicon carbide ingots, ensuring that the fixture can meet the clamping conditions of ingots of different thicknesses, avoiding the need to replace fixtures and improving production efficiency.
[0024] This invention adapts to different ingot diameters by adjusting the relative distance between the grippers. At the same time, the compression force of the springs in the grippers ensures that the ingots are held more firmly, increasing processing safety and reducing product damage rate. Attached Figure Description
[0025] Figure 1 This is a schematic diagram of the structure of the fixing fixture for surface grinding of silicon carbide ingots according to the present invention;
[0026] Figure 2 This is a schematic diagram of the structure inside the second base;
[0027] Figure 3 This is a schematic diagram of the clamping mechanism;
[0028] Figure 4 This is a side sectional view of the fixing fixture for surface grinding of silicon carbide ingots according to the present invention;
[0029] Figure label:
[0030] 1. First base; 2. Second base; 3. Top cover plate; 4. Ingot support plate; 5. First guide shaft; 6. Guide shaft fixing seat; 7. Turntable; 8. Adjusting rod; 9. Locking arm; 10. Third base; 11. Gripper; 12. Second linear bearing; 13. Second guide shaft; 14. Spring; 15. Limit screw; 16. Gripper fixing seat; 17. First linear bearing; 18. Rubber-coated bearing; 19. Bearing; 20. Locking screw; 21. Silicone pad; 22. Slide groove. Detailed Implementation
[0031] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, this utility model will be further described in detail with reference to the embodiments and accompanying drawings. It should be understood that the specific embodiments described herein are merely illustrative of this utility model and are not intended to limit it. The technical solution of this utility model will be described in detail below with reference to the embodiments and accompanying drawings, but the scope of protection is not limited thereto.
[0032] See Figures 1 to 4 This embodiment proposes a fixing fixture for surface grinding of silicon carbide ingots, including a support mechanism, a rotation adjustment mechanism and four sets of clamping mechanisms.
[0033] The support mechanism includes a first base 1, a second base 2, a third base 10, an upper cover plate 3, a crystal ingot support plate 4, a first guide shaft 5, and a guide shaft fixing seat 6; the support mechanism is used to support and position the silicon carbide crystal ingot, as well as the rotation adjustment mechanism and the clamping mechanism.
[0034] Specifically, the first base 1 is a square plate structure and is a magnetic body, fixed to the magnetic chuck of the surface grinder. The second base 2 is a ring-shaped mechanism, with its bottom fixedly connected to the first base 1. The third base 10 is located at the inner center of the second base 2, and its bottom is fixedly connected to the first base 1 by bolts. The ingot support plate 4 is threadedly connected to the third base 10 and can be moved up and down for adjustment. After determining the height of the ingot support plate 4, the ingot support plate 4 and the third base 10 are fixed by locking screws 20. The upper cover plate 3 is a circular plate structure and is fixed to the second base 2. The ingot support plate 4 is located above the upper cover plate 3. The ingot support plate 4 is used to place the silicon carbide ingot.
[0035] The upper part of the second base 2 is symmetrically provided with four guide shaft fixing seats 6, which are fixedly connected to the second base 2; the upper cover plate 3 has four rectangular through slots at positions corresponding to the guide shaft fixing seats 6; one end of the first guide shaft 5 is connected to the guide shaft fixing seat 6, and the other end is connected to the inner wall of the rectangular through slot of the upper cover plate 3; the first guide shaft 5 is slidably connected to the clamping mechanism.
[0036] The rotary adjustment mechanism includes a turntable 7, adjusting rods 8, and locking arms 9. The turntable 7 is located inside the second base 2. The second base 2 and the turntable 7 are connected by bearings 19, and the second base 2 remains fixed relative to the surface grinder. The turntable 7 can rotate relative to the surface grinder. Adjusting rods 8 are symmetrically fixedly connected to both sides of the turntable 7. The second base 2 has symmetrical slots on both sides, allowing the adjusting rods 8 to rotate. The ends of the adjusting rods 8 pass through the slots and are located on the outer side of the second base 2. Locking arms 9 are threadedly connected to the ends of the adjusting rods 8 to fix the positions of the adjusting rods 8 and the turntable 7. Four sliding grooves 22 are symmetrically arranged on the turntable 7 around its center.
[0037] The clamping mechanism includes a jaw 11, a second linear bearing 12, a second guide shaft 13, a spring 14, a limit screw 15, a jaw fixing seat 16, a first linear bearing 17, and a rubber-coated bearing 18. The second linear bearing 12 is fixed inside the jaw 11. One end of the second guide shaft 13 is fixed to the jaw fixing seat 16, and the other end passes through the second linear bearing 12 and inserts into the jaw 11. The spring 14 wraps around the outside of the second guide shaft 13, with one end connected to the jaw fixing seat 16 and the other end connected to the second linear bearing 12. The jaw 11 can reciprocate via the second guide shaft 13. In its natural state, the jaw 11 moves away from the jaw fixing seat 16, providing a clamping force to the silicon carbide ingot.
[0038] Two limiting screws 15 are located in the middle of the gripper 11. One threaded end of the limiting screw 15 is screwed into the gripper 11 for fixation, and the other threaded end of the limiting screw 15 is engaged with the gripper fixing seat 16 to prevent the gripper 11 from being pushed out of the second guide shaft 13 by the spring 14. A silicone pad 21 with adhesive backing is attached to the outer side of the gripper 11, which can protect the crystal ingot and also has an anti-slip function.
[0039] The bottom of the gripper fixing seat 16 is fixed with a first linear bearing 17, and the bottom of the first linear bearing 17 is connected to a rubber-coated bearing 18. The first linear bearing 17 is slidably connected to the first guide shaft 5 and is used for the clamping mechanism to reciprocate along the first guide shaft 5. The rubber-coated bearing 18 is slidably connected in the slide groove 22 and is used to convert the rotational motion of the turntable 7 into the linear motion of the clamping mechanism on the first guide shaft 5.
[0040] This embodiment proposes the following working principle for a fixed fixture used in the surface grinding of silicon carbide ingots:
[0041] Adjust the height of the ingot support plate 4 to a suitable position, and then fix it with the locking screw 20 after determining the position; place the silicon carbide ingot on the ingot support plate 4.
[0042] The adjustment rod 8 drives the turntable 7 to rotate. After the adjustment rod 8 is rotated counterclockwise around the center of the turntable 7 to the appropriate position, the clamping mechanism can reciprocate on the first guide shaft 5. The silicon carbide ingot is clamped by the jaws 11 in four directions. Then, the locking arm 9 is rotated clockwise to fix the adjustment rod 8, so that the silicon carbide ingot can be polished.
[0043] The above description is a further detailed explanation of the present invention in conjunction with specific preferred embodiments. It should not be considered that the specific embodiments of the present invention are limited to this. For those skilled in the art, several simple deductions or substitutions can be made without departing from the present invention, and all such deductions or substitutions should be considered to fall within the scope of patent protection determined by the submitted claims.
Claims
1. A fixture for surface grinding of silicon carbide ingots, characterized in that, It includes a support mechanism, a rotation adjustment mechanism, and multiple clamping mechanisms; The support mechanism includes a base, an ingot support plate (4) and a first guide shaft (5); the ingot support plate (4) is fixed on the base, and multiple first guide shafts (5) are symmetrically arranged on the base around the center of the ingot support plate (4), and a clamping mechanism is slidably connected to each first guide shaft (5); The rotating adjustment mechanism includes a turntable (7), an adjusting rod (8), and a locking arm (9); the turntable (7) is slidably connected to the base, and the adjusting rod (8) is fixedly connected to the turntable (7). The end of the adjusting rod (8) is threadedly connected to the locking arm (9), and the adjusting rod (8) is fixed to the base by the locking arm (9); multiple sliding grooves (22) are symmetrically arranged on the turntable (7) around the center of the ingot support plate (4); the sliding grooves (22) correspond one-to-one with the clamping mechanism; The clamping mechanism includes an adaptively adjustable jaw (11), which is connected to a first linear bearing (17). The bottom of the first linear bearing (17) is connected to a rubber-coated bearing (18). The first linear bearing (17) is slidably connected to the first guide shaft (5), and the rubber-coated bearing (18) is slidably connected in the slide groove (22). The rubber-coated bearing (18) is used to convert the rotational motion of the turntable (7) into linear motion of the clamping mechanism on the first guide shaft (5).
2. The fixing fixture for surface grinding of silicon carbide ingots according to claim 1, characterized in that, The base includes a first base (1), a second base (2), and a third base (10); the bottom of the second base (2) is fixedly connected to the first base (1), the third base (10) is located at the center of the inner side of the second base (2), and the bottom of the third base (10) is fixedly connected to the first base (1) by bolts, and the crystal ingot support plate (4) is connected to the third base (10).
3. The fixing fixture for surface grinding of silicon carbide ingots according to claim 2, characterized in that, The ingot support plate (4) is connected to the third base (10) by a thread, and the ingot support plate (4) and the third base (10) are fixed by a locking screw (20).
4. The fixing fixture for surface grinding of silicon carbide ingots according to claim 2, characterized in that, The first base (1) is a magnetic body, which is fixed on the magnetic chuck of the surface grinder.
5. The fixing fixture for surface grinding of silicon carbide ingots according to claim 4, characterized in that, The second base (2) is fixedly connected to the upper cover plate (3), and the crystal ingot support plate (4) is located above the upper cover plate (3).
6. The fixing fixture for surface grinding of silicon carbide ingots according to claim 5, characterized in that, The upper part of the second base (2) is symmetrically provided with multiple guide shaft fixing seats (6), and the guide shaft fixing seats (6) are fixedly connected to the second base (2); a rectangular through groove is opened on the upper cover plate (3) at the position corresponding to the guide shaft fixing seat (6), one end of the first guide shaft (5) is connected to the guide shaft fixing seat (6), and the other end is connected to the inner wall of the rectangular through groove of the upper cover plate (3).
7. The fixing fixture for surface grinding of silicon carbide ingots according to claim 2, characterized in that, The second base (2) is connected to the turntable (7) by a bearing (19).
8. The fixing fixture for surface grinding of silicon carbide ingots according to claim 1, characterized in that, The clamping mechanism also includes a jaw (11), a second linear bearing (12), a second guide shaft (13), a spring (14), and a jaw fixing seat (16). The second linear bearing (12) is fixed inside the jaw (11). One end of the second guide shaft (13) is fixed on the jaw fixing seat (16), and the other end passes through the second linear bearing (12) and is inserted into the jaw (11). The spring (14) is wrapped around the outside of the second guide shaft (13), and one end of the spring (14) is connected to the jaw fixing seat (16), and the other end is connected to the second linear bearing (12).
9. A fixture for surface grinding of silicon carbide ingots according to claim 8, characterized in that, There are two limiting screws (15) in the middle of the gripper (11). One end of the thread of the limiting screw (15) is screwed into the gripper (11) for fixation, and the other end of the thread of the limiting screw (15) is inserted into the gripper fixing seat (16).
10. A fixture for surface grinding of silicon carbide ingots according to claim 1, characterized in that, A silicone pad (21) with adhesive backing is attached to the outer side of the gripper (11).