Low-stress flexible clamping system for aluminum-based silicon carbide ultrathin reflector

Abstract

The invention relates to a clamping system, in particular to a low-stress flexible clamping system for an aluminum-based silicon carbide ultrathin reflector, which comprises an air floatation supporting part, a clamping part and a clamping part, the air floatation supporting part comprises an air bag, the air bag is arranged above a bottom plate, the air bag is U-shaped, and two U-shaped supporting sheets at the upper end of the air bag are opened after the air bag is inflated; the self-adaptive clamp is also in a U shape, when the air bag is opened, the self-adaptive clamp is pulled to be opened outwards, and when the high-temperature reflecting mirror is clamped, the self-adaptive clamp recovers to the original shape, and the reflecting mirror is clamped; after the air bag is inflated, the two U-shaped supporting sheets at the upper end of the air bag are opened, and the opening tension is enough to pull open the self-adaptive clamp in a martensite phase, so that the reflecting mirror can be conveniently placed in the clamping system; when the reflector is clamped, the micro-displacement compensation block begins to extend under the inverse piezoelectric effect, the thickness of the micro-displacement compensation block is reduced, the counter-acting force on the reflector is reduced, flexible clamping is achieved, the assembling stress of the reflector is reduced, surface precision loss is prevented, and therefore the flatness of the surface of the reflector is improved.

Description

Technical Field

[0001] The invention relates to a clamping system, in particular to a low-stress flexible clamping system for an aluminum-based silicon carbide ultra-thin reflector. Background Art

[0002] During the production process of aluminum-based silicon carbide ultra-thin mirrors, they need to be clamped. The clamping system includes mechanical clamps and vacuum adsorption clamps. Mechanical clamps are divided into snap ring clamps and pressure plate clamps, while vacuum adsorption clamps are divided into integral vacuum adsorption clamps and split vacuum adsorption clamps. The snap ring clamp consists of a circular snap ring and multiple fastening bolts. During use, the mirror is placed in the snap ring, and the snap ring is contracted by tightening the bolts, thereby clamping the edge of the mirror. This clamp has a simple structure and is easy to operate. It is suitable for mirrors of various sizes and shapes, but it may cause certain stress concentrations at the edge of the mirror. The pressure plate clamp secures the mirror to the mounting surface using a pressure plate and bolts. The pressure plate is usually made of elastic materials such as rubber or spring steel to reduce damage to the mirror. This type of clamp provides relatively uniform clamping force and is suitable for mirrors requiring high surface precision. However, careful attention must be paid to the mounting position of the pressure plate and the uniformity of the clamping force to avoid affecting the mirror's surface accuracy. A monolithic vacuum clamp consists of a flat plate with a vacuum chamber. The plate is perforated with numerous small holes. A vacuum pump evacuates the air from the vacuum chamber, creating negative pressure that holds the mirror to the plate. This clamp is suitable for mirrors of various shapes and sizes, especially large and thin ones. It provides uniform clamping force without damaging the mirror surface, but requires a reliable vacuum pump and vacuum control system. A split vacuum clamp consists of multiple independent vacuum units that can be flexibly combined and arranged to suit the shape and size of the mirror. Each unit has its own vacuum channel and valve to facilitate control of the strength and distribution of the clamping force. This clamp is suitable for mirrors with complex and irregular shapes, but its clamping force may be less uniform than that of a monolithic vacuum clamp.

[0003] A Chinese patent application numbered CN202010500627.9 discloses a lens clamping fixture. A first movable seat moves on a first guide plate, pushing a dispensing barrel longitudinally. A second movable seat moves on a second guide plate, pushing the dispensing barrel transversely. Finally, an adjusting member in the dispensing barrel allows the barrel to lower only one lens at a time, placing the lenses one by one into the respective positioning holes. However, this lens clamping fixture employs vacuum adsorption or mechanical clamping, which exerts significant assembly stress on the lens, easily leading to a loss of surface accuracy and reducing the flatness of the reflector surface. Summary of the Invention

[0004] The main purpose of the present invention is to provide a low-stress flexible clamping system for aluminum-based silicon carbide ultra-thin reflectors to solve the problems raised in the related art.

[0005] To achieve the above objectives, according to one aspect of the present invention, a low-stress flexible clamping system for an aluminum-based silicon carbide ultra-thin reflector is provided, comprising a base plate and an air-floating support portion, wherein the air-floating support portion comprises an airbag, the airbag being disposed above the base plate and being U-shaped. When the airbag is inflated, two U-shaped flaps at the upper end of the airbag open; The adaptive clamp is also U-shaped. When the airbag is opened, the adaptive clamp is pulled outward to open. When clamping the high-temperature reflector, the adaptive clamp returns to its original shape to clamp the reflector. The micro-displacement compensation block is divided into two parts, which are respectively arranged on the inner sides of the two branches of the U-shaped adaptive fixture. When the reflector squeezes the micro-displacement compensation block, the micro-displacement compensation block extends to reduce the reaction force on the reflector.

[0006] Furthermore, a pressure plate is fixedly provided on the outer side of the micro-displacement compensation block.

[0007] Furthermore, a plurality of preload parts are provided on one side of the pressure plate, and the preload parts pass through the adaptive clamp and the micro-displacement compensation block in sequence and are fixedly connected to the airbag. The preload parts are slidably connected to the adaptive clamp and the micro-displacement compensation block.

[0008] Furthermore, the preload portion includes a pull rod, a chassis, several buffer strips and a top plate. The buffer strips are fixed on one side of the chassis close to the top plate. The top plate is fixed on the end of the pull rod. The other end of the pull rod is fixedly connected to the airbag. The pull rod passes through the chassis and is slidably connected to the chassis.

[0009] Furthermore, the bottom plate and the top plate are both located inside the ballast plate.

[0010] Furthermore, the adaptive clamp is made of memory alloy.

[0011] Furthermore, the micro-displacement compensation block is made of piezoelectric ceramics.

[0012] Furthermore, a honeycomb adhesive layer is fixedly provided on the side of the ballast plate contacting the reflector, so as to buffer the pressure exerted by the ballast plate on the reflector.

[0013] Furthermore, a plurality of spacers are fixedly provided inside the airbag, and the spacers divide the airbag into a plurality of independent areas.

[0014] Furthermore, a flat airbag is fixedly provided in the middle of the bottom of the airbag.

[0015] Compared with the prior art, the present invention has the following beneficial effects: The low-stress flexible clamping system for the aluminum-based silicon carbide ultra-thin reflector of the present invention is that after the airbag is inflated, the two U-shaped branches at the upper end open, and the tension of the opening is sufficient to pull open the adaptive clamp in the martensite phase, making it convenient for the reflector to be placed in the clamping system; when clamping the reflector, the micro-displacement compensation block begins to elongate under the inverse piezoelectric effect, and the thickness decreases, thereby reducing the reaction force on the reflector, realizing flexible clamping, reducing the assembly stress of the reflector, preventing the loss of surface accuracy, and thus improving the flatness of the reflector surface. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the airbag in the non-inflated state of the low-stress flexible clamping system for the aluminum-based silicon carbide ultra-thin reflector of the present invention; Figure 2 Schematic diagram of the airbag inflated state of the low-stress flexible clamping system for the aluminum-based silicon carbide ultra-thin reflector of the present invention; Figure 3 A cross-sectional view of the stress self-balancing clamping mechanism of the low-stress flexible clamping system for the aluminum-based silicon carbide ultra-thin reflector of the present invention; Figure 4 This is a schematic diagram of the structure of the micro-displacement compensation block of the low-stress flexible clamping system of the aluminum-based silicon carbide ultra-thin reflector of the present invention; Figure 5 This is a longitudinal cross-sectional diagram of the air-floating support portion of the low-stress flexible clamping system for the aluminum-based silicon carbide ultra-thin reflector of the present invention; Figure 6 This is a cross-sectional schematic diagram of the air-floating support portion of the low-stress flexible clamping system for the aluminum-based silicon carbide ultra-thin reflector of the present invention; Figure 7 This is a schematic structural diagram of the preload portion of the low-stress flexible clamping system for the aluminum-based silicon carbide ultra-thin reflector of the present invention; Figure 8 This is a schematic structural diagram of the air-floating support portion of the low-stress flexible clamping system for the aluminum-based silicon carbide ultra-thin reflector of the present invention.

[0017] Reference numerals: 1. Bottom plate; 2. Guide groove; 3. Electric cylinder; 4. Air-floating support part; 5. Adaptive fixture; 6. Micro-displacement compensation block; 7. Ballast plate; 8. Preload part; 9. Flat airbag; 10. Connecting plate; 11. Column; 41. Airbag; 42. Air inlet; 43. Spacer; 44. Connecting groove; 71. Through hole; 72. Airway; 73. Exhaust port; 74. Circular groove; 81. Pull rod; 82. Chassis; 83. Buffer strip; 84. Top plate. DETAILED DESCRIPTION

[0018] In order to further illustrate the technical means and effects adopted by the present invention to achieve the predetermined purpose of the invention, the specific implementation methods, structures, features and effects of the present invention are described in detail below in conjunction with the accompanying drawings and preferred embodiments.

[0019] This embodiment provides a low stress flexible clamping system for aluminum-based silicon carbide ultra-thin reflectors, such as Figures 1 to 3 As shown, it includes a base plate 1, a guide groove 2 is provided on the base plate 1, and an electric cylinder 3 is provided at one end of the guide groove 2 for pushing and pulling the column 11. It also includes: an air floating support part 4, the air floating support part 4 includes an air bag 41, and the air bag 41 is provided above the base plate 1. The air bag 41 is U-shaped. After the air bag 41 is inflated, the two U-shaped pieces at the upper end of the air bag 41 are opened. The pulling force of the opening air bag 41 is sufficient to pull open the adaptive clamp 5 in the martensite phase; The adaptive clamp 5 is also U-shaped. When the airbag 41 is opened, the adaptive clamp 5 is pulled outward to open. When clamping the high-temperature reflector, the adaptive clamp 5 returns to its original shape and clamps the reflector. The micro-displacement compensation block 6 is divided into two parts, which are respectively arranged on the inner sides of the two branches of the U-shaped adaptive fixture 5. When the reflector squeezes the micro-displacement compensation block 6, the micro-displacement compensation block 6 extends to reduce the reaction force on the reflector.

[0020] A pressure plate 7 is fixedly provided on the outer side of the micro-displacement compensation block 6 .

[0021] like Figure 4 As shown, crisscrossing air passages 72 are provided inside the ballast plate 7, and a number of exhaust ports 73 are provided on the outside of the ballast plate 7. The exhaust ports 73 are connected to the air passages 72, and the air passages 72 extend out of the ballast plate 7. Gas can be supplied into the air passages 72 through the air passages 72 extending out of the ballast plate 7 and discharged through the exhaust ports 73.

[0022] The inner side of the ballast plate 7 is provided with a plurality of through holes 71 and a plurality of circular grooves 74 . The through holes 71 are connected to the circular grooves 74 . The bottom plate 82 and the top plate 84 are located in the circular grooves 74 . The pull rod 81 extends from the through holes 71 .

[0023] A plurality of preload parts 8 are provided on one side of the pressure plate 7. The preload parts 8 pass through the adaptive fixture 5 and the micro-displacement compensation block 6 in sequence and are fixedly connected to the airbag 41. The preload parts 8 are slidably connected to the adaptive fixture 5 and the micro-displacement compensation block 6.

[0024] like Figure 7 As shown, the preload portion 8 includes a pull rod 81, a chassis 82, a plurality of buffer strips 83 and a top plate 84. The buffer strips 83 are fixed on one side of the chassis 82 close to the top plate 84. The top plate 84 is fixed on the end of the pull rod 81. The other end of the pull rod 81 is fixedly connected to the airbag 41. The pull rod 81 passes through the chassis 82 and is slidably connected to the chassis 82.

[0025] The bottom plate 82 and the top plate 84 are both located within the ballast plate 7 .

[0026] The adaptive clamp 5 is made of memory alloy.

[0027] In this embodiment, the adaptive clamp 5 is preferably manufactured from Ni-Ti-Cu shape memory alloy. First, the Ni-Ti-Cu shape memory alloy is processed into a U shape at high temperature to form the adaptive clamp 5, which is convenient for clamping the reflector. At this time, the adaptive clamp 5 is in the austenite phase, that is, the high-temperature phase. When the adaptive clamp 5 is cooled to the martensite phase temperature range, the clamp becomes soft and deformable. After the airbag 41 is inflated, the adaptive clamp 5 can be pulled open to facilitate the placement of the reflector. The temperature of the newly placed reflector is relatively high, higher than the austenite phase of the adaptive clamp 5. The adaptive clamp 5 returns to its original shape by virtue of the shape memory effect, thereby fitting tightly to the surface of the reflector to achieve adaptive clamping.

[0028] The micro-displacement compensation block 6 is made of piezoelectric ceramics.

[0029] When the adaptive fixture 5 returns to its original shape and clamps the reflector, the reflector generates pressure on the micro-displacement compensation block 6, and the piezoelectric ceramic undergoes a positive piezoelectric effect, generating electric charge under the action of pressure. Then, the piezoelectric ceramic undergoes an inverse piezoelectric effect. Under the action of the electric field, the piezoelectric ceramic begins to elongate and the thickness decreases, reducing the reaction force on the reflector, achieving flexible clamping, reducing the assembly stress of the reflector, preventing the loss of surface accuracy, and thus improving the flatness of the reflector surface.

[0030] A honeycomb adhesive layer is fixedly provided on the side of the pressure plate 7 that contacts the reflector, so as to buffer the pressure of the pressure plate 7 on the reflector.

[0031] The honeycomb bonding layer is a silicone-modified polyurethane adhesive with a coating thickness of 200±10μm. It is cured by ultraviolet light with a wavelength of 365nm and an intensity of 50mW / cm². After curing, a honeycomb microstructure with a pore size of 50-100μm is formed. The elastic modulus of the honeycomb bonding layer is 0.5-1.0GPa.

[0032] When removing the reflector from the honeycomb adhesive layer, low-temperature gas, such as liquid nitrogen vapor, is input into the air duct 72 to induce micro-cracks in the interface of the honeycomb adhesive layer by utilizing the CTE difference, causing the honeycomb adhesive layer to undergo brittle fracture and lose its adhesiveness, thereby avoiding damage to the reflector when it is removed.

[0033] like Figure 5 and Figure 6 As shown, a number of spacers 43 are fixedly provided inside the airbag 41. The spacers 43 divide the airbag 41 into a number of independent areas. By adjusting the air pressure in each area, the stiffness of the airbag 41 at the corresponding part can be changed to achieve stable clamping of the reflector.

[0034] like Figure 5 and Figure 6As shown, an air inlet 42 is provided on the outside of each independent area of the airbag 41, and a plurality of connecting grooves 44 are provided on the inside of the airbag 41. One end of the pull rod 81 is inserted into the connecting groove 44 and is fixedly connected to the airbag 41. The adaptive clamp 5 and the micro-displacement compensation block 6 are both provided with through holes. When the pull rod 81 moves outward through the hole, the micro-displacement compensation block 6 is squeezed. After the airbag 41 is inflated, it bulges and pulls the pull rod 81 to move outward. The pull rod 81 pulls the pressure plate 7 outward through the top plate 84, squeezing the micro-displacement compensation block 6, so that the micro-displacement compensation block 6 is subjected to pre-pressure to prevent it from experiencing tension, which causes brittle failure of the micro-displacement compensation block 6.

[0035] like Figure 8 As shown, a flat airbag 9 is fixedly provided in the middle of the bottom of the airbag 41. The flat airbag 9 does not block the inflation channels at the left and right ends of the U-shaped airbag 41. The left and right ends of the airbag 41 can be inflated synchronously to ensure the symmetry of the pulling force. A connecting plate 10 supporting the flat airbag 9 is fixedly provided at the bottom of the flat airbag 9. A column 11 is fixedly provided in the middle of the bottom of the connecting plate 10. The column 11 is fixedly connected to the piston rod of the electric cylinder 3. The electric cylinder 3 pushes the clamping system to move along the guide groove 2 through the column 11 to send the reflector to the lower moving process.

[0036] The above description is merely a preferred embodiment of the present invention and does not constitute any form of limitation to the present invention. Although the present invention has been disclosed as above in terms of a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can, without departing from the scope of the technical solution of the present invention, make some changes or modifications to equivalent embodiments using the technical contents disclosed above. However, any brief modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention are still within the scope of the technical solution of the present invention.

Claims

1. A low-stress flexible clamping system for aluminum-based silicon carbide ultra-thin reflectors, comprising a base plate (1), characterized in that: Also includes: An air-floating support portion (4), the air-floating support portion (4) comprising an airbag (41), the airbag (41) being arranged above the bottom plate (1), the airbag (41) being U-shaped, and after the airbag (41) is inflated, the two U-shaped pieces at the upper end of the airbag (41) are opened; An adaptive clamp (5), the adaptive clamp (5) is also U-shaped, and when the airbag (41) is opened, the adaptive clamp (5) is pulled outward to open, and when clamping the high-temperature reflector, the adaptive clamp (5) returns to its original shape and clamps the reflector; A micro-displacement compensation block (6) is divided into two parts, which are respectively arranged inside the two branches of the U-shaped adaptive clamp (5); when the reflector squeezes the micro-displacement compensation block (6), the micro-displacement compensation block (6) extends, reducing the reaction force on the reflector.

2. The low-stress flexible clamping system for aluminum-based silicon carbide ultra-thin reflectors according to claim 1 is characterized in that: A pressure plate (7) is fixedly provided on the outer side of each of the micro-displacement compensation blocks (6).

3. The low-stress flexible clamping system for aluminum-based silicon carbide ultra-thin reflectors according to claim 2 is characterized in that: A plurality of preload portions (8) are provided on one side of the pressure plate (7), and the preload portions (8) pass through the adaptive clamp (5) and the micro-displacement compensation block (6) in sequence and are fixedly connected to the airbag (41). The preload portions (8) are slidably connected to the adaptive clamp (5) and the micro-displacement compensation block (6).

4. The low-stress flexible clamping system for aluminum-based silicon carbide ultra-thin reflectors according to claim 3 is characterized in that: The preload portion (8) includes a pull rod (81), a chassis (82), a plurality of buffer strips (83) and a top plate (84), wherein the buffer strips (83) are fixedly arranged on one side of the chassis (82) close to the top plate (84), and the top plate (84) is fixedly arranged at the end of the pull rod (81). The other end of the pull rod (81) is fixedly connected to the airbag (41), and the pull rod (81) passes through the chassis (82) and is slidably connected to the chassis (82).

5. The low-stress flexible clamping system for aluminum-based silicon carbide ultra-thin reflector according to claim 4 is characterized in that: The bottom plate (82) and the top plate (84) are both located inside the ballast plate (7).

6. The low-stress flexible clamping system for aluminum-based silicon carbide ultra-thin reflectors according to claim 1 is characterized in that: The adaptive clamp (5) is made of memory alloy.

7. The low-stress flexible clamping system for aluminum-based silicon carbide ultra-thin reflector according to claim 1 is characterized in that: The micro-displacement compensation block (6) is made of piezoelectric ceramics.

8. The low-stress flexible clamping system for aluminum-based silicon carbide ultra-thin reflector according to claim 2, characterized in that: A honeycomb adhesive layer is fixedly provided on the side of the pressure plate (7) contacting the reflector, and is used to buffer the pressure of the pressure plate (7) on the reflector.

9. The low-stress flexible clamping system for aluminum-based silicon carbide ultra-thin reflector according to claim 1, characterized in that: A plurality of spacers (43) are fixedly provided inside the airbag (41), and the spacers (43) divide the airbag (41) into a plurality of independent areas.

10. The low-stress flexible clamping system for aluminum-based silicon carbide ultra-thin reflector according to claim 1, characterized in that: A flat airbag (9) is fixedly provided in the middle of the bottom of the airbag (41).

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