Evaporation boat structure for vacuum coating machine

Abstract

The invention discloses an evaporation boat structure for a vacuum coating machine, and relates to the technical field of vacuum coating machines, the evaporation boat structure comprises an evaporation boat main body, the bottom of the evaporation boat main body is provided with a fixing mechanism, the bottom of the fixing mechanism is fixedly connected with a fixing plate, and the bottom of the fixing plate is fixedly connected with a supporting column; a rotating groove is formed in the bottom of the supporting column, a rotating block is arranged on the inner wall of the rotating groove in a rolling mode, a second mounting plate is fixedly arranged at the bottom of the rotating block, a first mounting plate is arranged on one side of the evaporation boat body, and a driving motor is fixedly connected to one end of the first mounting plate; an output shaft of the driving motor is fixedly connected with a connecting rod assembly, one end of the connecting rod assembly is rotationally connected with a connecting rod, and the connecting rod is rotationally connected with the supporting column. The coating range of the evaporation boat is convenient to adjust.

Description

Technical Field

[0001] The present invention relates to the technical field of vacuum coating machines, and in particular to an evaporation boat structure for a vacuum coating machine. Background Art

[0002] A vacuum coating machine primarily refers to a type of coating equipment that requires a high vacuum level. Its operating principle is primarily based on physical vapor deposition (PVD) technology, involving multiple physical processes such as vacuum technology, thermal evaporation, and sputtering. During the coating process, a high vacuum environment is first created within the coating chamber to reduce the collision of air molecules with the evaporating film molecules, allowing the evaporated or sputtered film molecules to fly freely and deposit finely and brightly on the substrate surface. The evaporation boat is one of the key components of a vacuum coating machine, serving primarily as an evaporation vessel.

[0003] Patent number CN202420703353.7 discloses an evaporation boat for a vacuum coating machine. The boat comprises a heating layer, which provides heat for the evaporation layer. The heating layer has a groove on its top for accommodating the evaporation layer, with poles connected at both ends. The evaporation layer is used to melt and evaporate the coating material. The evaporation layer has a receiving portion on its top for accommodating the coating material, with feed ports at both ends. The boat cover has limit bars at both ends and is evenly distributed with ventilation holes. This application can reduce waste of coating material, improve coating uniformity, and effectively extend the service life of the evaporation boat.

[0004] However, similar to the above-mentioned evaporation boat for vacuum coating machines, the evaporation boat body is usually fixedly installed inside the vacuum coating machine, so the angle of the evaporation boat cannot be adjusted. When the coating range needs to be adjusted, the evaporation boat needs to be replaced, which is inconvenient. Summary of the Invention

[0005] The purpose of the present invention is to solve the shortcomings of the prior art and to propose an evaporation boat structure for a vacuum coating machine.

[0006] In order to achieve the above object, the present invention adopts the following technical solutions:

[0007] The cam is fixedly mounted on a support frame, and the cam is secured to the support frame by means of a pin. The cam is secured to a position detachable from the support frame by means of a pin. The cam is secured to a position detachable from the support frame by means of a pin.

[0008] The present invention is further configured such that the fixing mechanism includes a support plate fixedly connected to the top of the fixing plate, and mounting brackets are fixedly connected to both sides of the top of the support plate, and the opposite sides of the two mounting brackets are rotatably connected to a bidirectional threaded screw, and fixed blocks are provided at both ends of the outer wall of the bidirectional threaded screw through threaded sliding.

[0009] The present invention is further configured such that a limiting opening is provided at the bottom of the support plate, two limiting blocks are slidably provided on the inner wall of the limiting opening, and the limiting blocks are fixedly connected to the fixing block.

[0010] The present invention is further configured such that fixing grooves are provided on both sides of the outer wall of the evaporation boat body, and the fixing grooves are adapted to the fixing blocks.

[0011] The present invention is further configured such that one side of one of the mounting brackets is rotatably connected to a knob, and the knob is fixedly arranged between the bidirectional threaded screw.

[0012] The present invention is further configured such that the connecting rod assembly includes a fixed rod and a movable rod, the fixed rod is fixedly connected to the output shaft of the drive motor, the bottom of the fixed rod is rotatably connected to a threaded rod, the top of the movable rod is provided with a threaded groove adapted to the threaded rod, and the movable rod is rotatably connected to one end of the connecting rod.

[0013] The present invention is further configured such that the bottom of the fixed rod is fixedly connected to a limiting rod, the top of the movable rod is provided with a limiting groove adapted to the limiting rod, and the limiting rod is inserted into the limiting groove.

[0014] The present invention is further configured such that poles are fixedly provided at both sides of the top of the evaporation boat body.

[0015] The beneficial effects of the present invention are:

[0016] 1. The evaporation boat structure of the vacuum coating machine is used. When the first mounting plate and the second mounting plate are fixed to the bottom inner wall and the side wall of the vacuum coating machine respectively, and the poles are energized. When the coating range of the evaporation boat body needs to be adjusted, the connecting rod assembly can be driven to rotate by the driving motor. The supporting column can be swung by the rotating block and the rotating groove, and then the supporting column is driven to swing back and forth by the connecting rod. At this time, the evaporation boat body swings, thereby increasing the diffusion range of the coating gas evaporated on the evaporation boat body, thereby achieving the purpose of adjusting the coating range of the device.

[0017] 2. The vacuum coating machine uses an evaporation boat structure. When the evaporation boat body needs to be replaced, the knob can be turned after cooling. The knob drives the bidirectional threaded screw to rotate. Under the limiting action of the limit port and the limit block, the two fixed blocks are driven to move in opposite directions, so that the fixed block is separated from the fixed groove. At this time, the evaporation boat body can be taken out. When installing, similarly, the evaporation boat body is placed between the two fixed blocks, and the fixed groove is aligned with the fixed block, and then the knob is turned in the opposite direction. The operation is simple and convenient for replacing the evaporation boat body.

[0018] 3. The vacuum coating machine uses an evaporation boat structure. When the coating range needs to be adjusted again, the threaded rod can be rotated. Under the action of the limit rod and the limit groove, the length of the connecting rod assembly changes, thereby adjusting the swing amplitude of the evaporation boat body, thereby adjusting the coating range of the device and increasing the applicability of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 This is a schematic diagram of the overall three-dimensional structure of an evaporation boat for a vacuum coating machine proposed by the present invention;

[0020] Figure 2 This is a partially exploded three-dimensional structural diagram of a fixing groove and a fixing block of an evaporation boat structure for a vacuum coating machine proposed by the present invention;

[0021] Figure 3 This is a partial three-dimensional structural diagram of a bidirectional threaded screw and a fixed block of an evaporation boat structure for a vacuum coating machine proposed by the present invention;

[0022] Figure 4 This is a partial three-dimensional structural diagram of the threaded rod and the limiting rod of the evaporation boat structure for a vacuum coating machine proposed by the present invention.

[0023] In the figure: 1. Evaporation boat body; 2. Pole; 3. First mounting plate; 4. Connecting rod; 5. Fixing groove; 6. Support column; 7. Rotating block; 9. Second mounting plate; 10. Fixing plate; 11. Support plate; 12. Mounting frame; 13. Bidirectional threaded screw; 14. Fixing block; 15. Limiting opening; 16. Limiting block; 17. Knob; 18. Driving motor; 19. Fixing rod; 20. Movable rod; 21. Threaded rod; 22. Threaded groove; 23. Limiting rod; 24. Limiting groove. DETAILED DESCRIPTION

[0024] The technical solution of this patent is further described in detail below in conjunction with specific implementation methods.

[0025] The following describes in detail embodiments of the present invention, examples of which are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present invention, and should not be construed as limiting the present invention.

[0026] In the description of this patent, it should be understood that the terms "center", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings. They are only for the convenience of describing this patent and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they should not be understood as limitations on this patent.

[0027] In the description of this patent, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," "connected," and "set" should be understood in a broad sense. For example, they can refer to fixed connection or set, detachable connection or set, or integral connection or set. Those skilled in the art will understand the specific meanings of the above terms in this patent based on the specific circumstances.

[0028] Reference Figure 1 and Figure 2 , an evaporation boat structure for a vacuum coating machine, including an evaporation boat main body 1, a fixing mechanism is provided at the bottom of the evaporation boat main body 1, a fixing plate 10 is fixedly connected to the bottom of the fixing mechanism, a support column 6 is fixedly connected to the bottom of the fixing plate 10, a rotating groove is provided at the bottom of the support column 6, a rotating block 7 is rotatably provided on the inner wall of the rotating groove, a second mounting plate 9 is fixedly provided at the bottom of the rotating block 7, a first mounting plate 3 is provided on one side of the evaporation boat main body 1, one end of the first mounting plate 3 is fixedly connected to a driving motor 18, an output shaft of the driving motor 18 is fixedly connected to a connecting rod assembly, one end of the connecting rod assembly is rotatably connected to a connecting rod 4, the connecting rod 4 is rotatably connected to the support column 6, and poles 2 are fixedly provided at both sides of the top of the evaporation boat main body 1.

[0029] Reference Figure 3The fixing mechanism includes a support plate 11 fixedly connected to the top of the fixing plate 10, and mounting brackets 12 are fixedly connected to both sides of the top of the support plate 11. The opposite sides of the two mounting brackets 12 are rotatably connected to a bidirectional threaded screw 13. The two ends of the outer wall of the bidirectional threaded screw 13 are provided with fixed blocks 14 through threaded sliding. The bidirectional threaded screw 13 is used to drive the two fixed blocks 14 to move toward or away from each other; a limit opening 15 is provided at the bottom of the support plate 11, and two limit blocks 16 are slidably provided on the inner wall of the limit opening 15. The limit block 16 is fixedly connected to the fixed block 14, and the fixed block 14 is prevented from rotating by the limiting effect of the limit opening 15 and the limit block 16; fixing grooves 5 are provided on both sides of the outer wall of the evaporation boat body 1, and the fixing grooves 5 are adapted to the fixed block 14. The fixing grooves 5 cooperate with the fixed block 14 to facilitate the installation of the evaporation boat body 1; a knob 17 is rotatably connected to one side of one of the mounting brackets 12, and the knob 17 is fixedly arranged with the bidirectional threaded screw 13, and the bidirectional threaded screw 13 is easily rotated by the knob 17.

[0030] Reference Figure 4 The connecting rod assembly includes a fixed rod 19 and a movable rod 20. The fixed rod 19 is fixedly connected to the output shaft of the drive motor 18. The bottom of the fixed rod 19 is rotatably connected to a threaded rod 21. The top of the movable rod 20 is provided with a threaded groove 22 adapted to the threaded rod 21. The movable rod 20 is rotatably connected to one end of the connecting rod 4. The movable rod 20, the threaded rod 21 and the threaded groove 22 are used to easily adjust the length of the connecting rod assembly, thereby adjusting the coating range; the bottom of the fixed rod 19 is fixedly connected to a limiting rod 23, and the top of the movable rod 20 is provided with a limiting groove 24 adapted to the limiting rod 23. The limiting rod 23 is inserted into the limiting groove 24, and the movable rod 20 is limited by the limiting rod 23 and the limiting groove 24 to prevent the movable rod 20 from rotating.

[0031] Working principle: When in use, first fix the first mounting plate 3 and the second mounting plate 9 to the bottom inner wall and side wall of the vacuum coating machine respectively, and energize the pole 2. When it is necessary to adjust the coating range of the evaporation boat body 1, the connecting rod assembly can be driven to rotate by the driving motor 18. The support column 6 can be swung through the rotating block 7 and the rotating groove, and then the support column 6 is driven to swing back and forth through the connecting rod 4. At this time, the evaporation boat body 1 swings, thereby increasing the diffusion range of the coating gas evaporated on the evaporation boat body 1, thereby achieving the purpose of adjusting the coating range of the device.

[0032] The above description is only a preferred specific embodiment of the present invention, but the scope of protection of the present invention is not limited thereto. Any technician familiar with the technical field, within the technical scope disclosed by the present invention, who makes equivalent replacements or changes based on the technical solution and inventive concept of the present invention, should be covered by the scope of protection of the present invention.

Claims

1. An evaporation boat structure for a vacuum coating machine, comprising an evaporation boat body (1), characterized in that: The bottom of the evaporation boat body (1) is provided with a fixing mechanism, the bottom of the fixing mechanism is fixedly connected to a fixing plate (10), the bottom of the fixing plate (10) is fixedly connected to a support column (6), the bottom of the support column (6) is provided with a rotation groove, the inner wall of the rotation groove is rollably provided with a rotating block (7), the bottom of the rotating block (7) is fixedly provided with a second mounting plate (9), a first mounting plate (3) is provided on one side of the evaporation boat body (1), one end of the first mounting plate (3) is fixedly connected to a driving motor (18), the output shaft of the driving motor (18) is fixedly connected to a connecting rod assembly, one end of the connecting rod assembly is rotatably connected to a connecting rod (4), and the connecting rod (4) is rotatably connected to the support column (6).

2. The evaporation boat structure for a vacuum coating machine according to claim 1, characterized in that: The fixing mechanism comprises a support plate (11) fixedly connected to the top of the fixing plate (10), and mounting brackets (12) are fixedly connected to both sides of the top of the support plate (11), and two opposite sides of the mounting brackets (12) are rotatably connected to a bidirectional threaded screw (13), and fixed blocks (14) are provided at both ends of the outer wall of the bidirectional threaded screw (13) through threaded sliding.

3. The evaporation boat structure for a vacuum coating machine according to claim 2, characterized in that: A limiting opening (15) is provided at the bottom of the support plate (11), and two limiting blocks (16) are slidably provided on the inner wall of the limiting opening (15), and the limiting blocks (16) are fixedly connected to the fixing block (14).

4. The evaporation boat structure for a vacuum coating machine according to claim 3, characterized in that: Fixing grooves (5) are provided on both sides of the outer wall of the evaporation boat body (1), and the fixing grooves (5) are adapted to the fixing blocks (14).

5. The evaporation boat structure for a vacuum coating machine according to claim 4, characterized in that: One side of one of the mounting brackets (12) is rotatably connected to a knob (17), and the knob (17) is fixedly arranged between the bidirectional threaded screw (13).

6. The evaporation boat structure for a vacuum coating machine according to claim 1, characterized in that: The connecting rod assembly includes a fixed rod (19) and a movable rod (20), wherein the fixed rod (19) is fixedly connected to the output shaft of the driving motor (18), the bottom of the fixed rod (19) is rotatably connected to a threaded rod (21), the top of the movable rod (20) is provided with a threaded groove (22) adapted to the threaded rod (21), and the movable rod (20) is rotatably connected to one end of the connecting rod (4).

7. The evaporation boat structure for a vacuum coating machine according to claim 6, characterized in that: The bottom of the fixed rod (19) is fixedly connected to a limiting rod (23), and the top of the movable rod (20) is provided with a limiting groove (24) adapted to the limiting rod (23), and the limiting rod (23) is inserted into the limiting groove (24).

8. The evaporation boat structure for a vacuum coating machine according to claim 1, characterized in that: Polar poles (2) are fixedly arranged at both sides of the top of the evaporation boat body (1).

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